Optical detection device and optical detection method

Abstract

An optical detection device and an optical detection method. The optical detection device comprises a light source (10), an optical system (20) and a detector (30); the light source (10) is configured to emit a detection light beam (101); the optical system (20) is configured to transmit the detection light beam (101) to an object to be detected (40), the detection light beam (101) passes through said object (40) to form a detection light beam (102), the optical system (20) is further configured to receive the detection light beam (102), the optical system (20) comprises a field of view adjustment assembly (201), and the detection light beam (102) is projected to an imaging surface (301) of the detector (30) after passing through the field of view adjustment assembly (201), wherein an imaging field of view (103) of the detection light beam (102) on the plane where the imaging surface (301) is located falls into the area where the imaging surface (301) is located; and the detector (30) forms a target image of said object (40) on the basis of the detection light beam (102).

Description

Optical detection device and optical detection method

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 28, 2023, with application number 202311838928.2, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of optical detection technology, for example, to an optical detection device and an optical detection method. Background Art

[0003] Optical imaging equipment is widely used in many fields such as biomedicine, semiconductor production inspection, and precision machining. The basic principle of the equipment is to illuminate the object to be tested through a light source, and then image the object to be tested on the detector through an optical system. Based on different application scenarios, the shape and size of the detector vary. The optical system is usually a centrosymmetric system, that is, the ideal field of view is circular. Figure 1 is a schematic diagram of the imaging field of view of an optical system on a detector in the related art. Referring to Figure 1, when the shape of the detector 30' is not centrosymmetric, it will cause the optical system designed based on the long side size of the detector 30' to have a large range of light within the imaging field of view 103' in the direction of the short side of the detector. All light is intercepted by the edge of the detector 30' (the pattern filling area inside the circular field of view in Figure 1), resulting in a decrease in light energy utilization. The detector obtains detection results based on the image signal-to-noise ratio. When other conditions remain unchanged, a decrease in light energy utilization will cause the detector to receive a decrease in light energy, thereby resulting in a decrease in signal, affecting the detection effect.

[0004] Summary of the Invention

[0005] In view of this, the embodiments of the present application provide an optical detection device and an optical detection method, so that the field of view of the optical system matches the size of the detector, improves the utilization rate of light energy, and takes into account both optical detection efficiency and simplification of optical system design.

[0006] In a first aspect, an embodiment of the present application provides an optical detection device, including a light source, an optical system, and a detector;

[0007] The light source is configured to emit a probe beam;

[0008] The optical system is configured to transmit a detection beam to an object to be measured, where the detection beam forms a detection beam after passing through the object to be measured. The optical system is further configured to receive the detection beam, and the optical system includes a field of view adjustment component. The detection beam is projected onto an imaging surface of the detector after passing through the field of view adjustment component. The imaging field of the detection beam in the plane where the imaging surface is located falls within the region where the imaging surface is located.

[0009] The detector forms a target image of the object to be measured based on the detection light beam.

[0010] In a second aspect, the embodiments of the present application further provide an optical detection method, which is applicable to the optical detection device provided in the embodiments of the present application. The optical detection method includes:

[0011] The light source is controlled to emit a detection beam, which is transmitted to the object to be measured through the optical system and formed into a detection beam by the object to be measured. The detection beam is projected onto the imaging surface of the detector after passing through the field of view adjustment component; wherein the imaging field of the detection beam in the plane where the imaging surface is located falls within the area where the imaging surface is located;

[0012] The detector forms a target image of the object to be measured based on the detection light beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] FIG1 is a schematic diagram of an imaging field of view of an optical system on a detector in the related art;

[0014] FIG2 is a schematic structural diagram of an optical detection device provided in an embodiment of the present application;

[0015] FIG3 is a schematic diagram of an imaging field of view of an optical system on a detector imaging surface provided by an embodiment of the present application;

[0016] FIG4 is a schematic diagram of an imaging field of view provided in an embodiment of the present application;

[0017] FIG5 is a structural diagram of a field of view adjustment assembly provided in an embodiment of the present application;

[0018] FIG6 is a schematic structural diagram of another field of view adjustment assembly provided in an embodiment of the present application;

[0019] FIG7 is a schematic structural diagram of another field of view adjustment assembly provided in an embodiment of the present application;

[0020] FIG8 is a flow chart of an optical detection method provided in an embodiment of the present application;

[0021] FIG9 is a flow chart of another optical detection method provided in an embodiment of the present application. DETAILED DESCRIPTION

[0022] It should be mentioned that before discussing exemplary embodiments in more detail, some exemplary embodiments are described as processing or the method described as flow chart. Although flow chart describes multiple operations (or steps) as sequential processing, many operations therein can be implemented in parallel, concurrently or simultaneously. In addition, the order of operation can be rearranged. When its operation is completed, the processing can be terminated, but can also have additional steps not included in the accompanying drawings. In addition, when not conflicting, the features in the embodiments in the present application and the embodiments can be combined with each other.

[0023] The term "including" and its variations used in this application are open inclusions, that is, "including but not limited to." The term "based on" means "based at least in part on." The term "one embodiment" means "at least one embodiment."

[0024] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. It should be noted that the directional words such as "upper", "lower", "left", and "right" described in the embodiments of the present application are described based on the angles shown in the accompanying drawings and should not be understood as limiting the embodiments of the present application. In addition, in the context, it is also necessary to understand that when it is mentioned that an element is formed "on" or "under" another element, it can not only be directly formed "on" or "under" another element, but also indirectly formed "on" or "under" another element through an intermediate element. The terms "first", "second", etc. are only used for descriptive purposes and do not indicate any order, quantity or importance, but are only used to distinguish different components. For those of ordinary skill in the art, the meaning of the above terms in this application can be understood according to the circumstances.

[0025] In related technologies, the following three methods are usually used to improve signal strength: the first is to increase the light output energy of the light source, but increasing the light output energy will increase the light intensity on the surface of the object to be tested. If it exceeds the damage threshold, the object to be tested will be damaged; the second is to increase the detector integration time, but this will increase the total detection time and reduce the yield; the third is to shape the illumination spot so that the illumination spot matches the shape of the detector to improve the utilization rate of light energy, but the long side size of the detector will increase the field of view requirement of the optical system, increase the difficulty of optical design, and significantly increase time and material costs.

[0026] Based on the above problems, the present application proposes an optical detection device, including a light source, an optical system and a detector;

[0027] The light source is configured to emit a probe beam;

[0028] The optical system is configured to transmit a detection beam to an object to be measured, where the detection beam forms a detection beam after passing through the object to be measured. The optical system is further configured to receive the detection beam, and the optical system includes a field of view adjustment component. The detection beam is projected onto an imaging surface of the detector after passing through the field of view adjustment component. The imaging field of the detection beam in the plane where the imaging surface is located falls within the region where the imaging surface is located.

[0029] The detector forms a target image of the object to be measured based on the detection light beam.

[0030] This solution improves the energy utilization of the detection beam without increasing the energy of the light source or the detector integration time. This helps enhance the detection light signal and improves the optical detection effect, while also ensuring that the object being tested is intact and the optical detection efficiency is high. Furthermore, this setup eliminates the need to design the optical system's field of view based on the detector's long side, reducing the design difficulty and cost of the optical system.

[0031] The above is the core idea of ​​this application. The technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application.

[0032] FIG2 is a schematic diagram of the structure of an optical detection device provided in an embodiment of the present application, and FIG3 is a schematic diagram of the imaging field of view of an optical system on the imaging surface of a detector provided in an embodiment of the present application. Referring to FIG2 and FIG3, the optical detection device provided in an embodiment of the present application includes a light source 10, an optical system 20 and a detector 30; the light source 10 is configured to emit a detection beam 101; the optical system 20 is configured to transmit the detection beam 101 to the object to be measured 40, and the detection beam 101 forms a detection beam 102 through the object to be measured 40, and the optical system 20 is also configured to receive the detection beam 102, and the optical system 20 includes a field of view adjustment component 201, and the detection beam 102 is projected onto the imaging surface 301 of the detector 30 after passing through the field of view adjustment component 201; wherein, the imaging field of view 103 of the detection beam 102 in the plane where the imaging surface 301 is located falls into the area where the imaging surface 301 is located; the detector 30 forms a target image of the object to be measured 40 according to the detection beam 102.

[0033] The placement of light source 10 can be referenced in related art. Figure 2 illustrates light source 10 as being positioned to the left of optical system 20. This is not limiting; the placement of light source 10 can be determined based on the actual requirements of the optical inspection equipment. A probe beam 101 emitted by light source 10 passes through optical system 20 and is then transmitted to stage 50 below, where object 40 to be inspected is placed.

[0034] The optical system 20 may include a probe beam adjustment assembly 202. The probe beam 101 emitted by the light source 10 passes through the probe beam adjustment assembly 202 and is then directed toward the object to be measured 40. The probe beam adjustment assembly 202 includes, but is not limited to, lenses and imaging lenses with transmissive and reflective functions, and is not described or limited in this application. The propagation paths of the probe beam 101 and the detection beam 102 shown in FIG2 are merely exemplary. In other embodiments, the optical system 20 may directly direct the probe beam 101 obliquely onto the surface of the object to be measured 40 for imaging.

[0035] The detection beam 101 directed toward the object 40 to be measured undergoes at least one of the following optical phenomena: reflection, scattering, and transmission at the object 40 to be measured, thereby forming a detection beam 102. The detection beam 102 carries the topographic information of the object 40 to be measured. In the embodiment of the present application, the optical system 20 is further provided with a field of view adjustment component 201. The field of view adjustment component 201 is disposed in the transmission path of the detection beam 102 to the detector 30. The field of view adjustment component 201 can shape the detection beam 102 so that the imaging field of view 103 of the detection beam 102 on the imaging surface 301 of the detector 30 matches the size of the imaging surface 301 of the detector 30. The imaging field of view 103 of the detection beam 102 is the imaging field of view 103 of the optical system 20.

[0036] An imaging element 203 may be further included between the field of view adjustment component 201 and the detector 30 . The detection light beam 102 directed toward the field of view adjustment component 201 is transformed into a convergent light beam after passing through the imaging element 203 and directed toward the imaging surface 301 of the detector 30 .

[0037] Among them, it should be noted that, FIG2 shows that the detector 30 is arranged on the side of the optical system 20 away from the object to be measured 40 (that is, above the object to be measured 40), but it is not limited to this. In this arrangement, the detector 30 receives the detection light beam 102 reflected and / or scattered by the object to be measured 40. In an embodiment not shown in the drawings of the present application, the detector 30 can also be arranged on the side of the object to be measured 40 away from the optical system 20 (that is, below the object to be measured 40), and the detector 30 receives the detection light beam 102 transmitted by the object to be measured 40. The relative positional relationship among the light source 10, the optical system 20, the detector 30 and the object to be measured 40 is not limited to that shown in FIG2.

[0038] Continuing with reference to Figures 2 and 3, the detection beam 102, after being shaped by the field of view adjustment component 201, is imaged on the imaging surface 301 of the detector 30. Due to the presence of the field of view adjustment component 201, the imaging field of view 103 of the detection beam 102 can fall within the range of the detector 30. That is, the detection field of view of the detector 30 overlaps the imaging field of view 103 of the optical system. In this way, without increasing the energy of the detection beam and the integration time of the detector, the light energy utilization rate of the detection beam 102 is improved, the detection light signal is enhanced, and the optical detection effect is improved, which can ensure that the object 40 to be tested is not damaged and the optical detection efficiency is high. At the same time, there is no need to design the field of view of the optical system 20 based on the long side size of the detector 30, which can reduce the design difficulty and design cost of the optical system 20.

[0039] The imaging field of view 103 of the detection beam 102 (or optical system 20) can be considered as the coverage of the detection beam 102 on the imaging surface 301 of the detector 30. The field of view adjustment assembly 201 may include multiple lenses (not shown in FIG. 2 ), which can diverge or converge the detection beam 102 so that the coverage of the detection beam 102 on the imaging surface 301 matches the size of the imaging surface 301. The matching of the imaging field of view 103 of the optical system 20 and the imaging surface 301 of the detector 30 here refers to the projection of the imaging field of view 103 along the propagation direction of the detection beam 102 being the maximum inscribed figure of the projected image on the imaging surface 301, ensuring that as many detection beams 102 as possible fall within the imaging surface 301. Assuming the imaging field of view 103 is elliptical and the imaging surface 301 is rectangular, the major axis of the imaging field of view 103 is equal to the length of the long side of the imaging surface 301, and the minor axis of the imaging field of view 103 is equal to the length of the short side of the imaging surface 301.

[0040] Optionally, for different optical detection devices, the shape of the detector may be different, and the design method of the field of view adjustment component may also be different. In actual application, those skilled in the art can design the field of view adjustment component according to actual conditions, and the embodiments of this application are not limited to this.

[0041] The image acquisition method of the detector includes but is not limited to area array, linear array or line scanning, etc., which is not limited in the embodiments of the present application.

[0042] The technical solution provided in the embodiment of the present application is applicable to scenarios where the imaging field of the optical system is centrally symmetrical and the imaging surface of the detector has different lengths along two orthogonal directions perpendicular to the optical axis.

[0043] In an embodiment of the present application, the optical detection device includes a light source, an optical system, and a detector; the light source is configured to emit a detection beam; the optical system is configured to transmit the detection beam to the object to be measured, and the detection beam forms a detection beam through the object to be measured. The optical system is also configured to receive the detection beam, and the optical system includes a field of view adjustment component, and the detection beam is projected onto the imaging surface of the detector after passing through the field of view adjustment component; wherein the imaging field of the detection beam in the plane where the imaging surface is located falls into the area where the imaging surface is located; the detector forms a target image of the object to be measured based on the detection beam. Through the above scheme, the light energy utilization rate of the detection beam is improved without increasing the energy of the detection beam emitted by the light source and the integration time of the detector, which is conducive to enhancing the detection light signal and improving the optical detection effect, and can ensure that the object to be measured is not damaged and the optical detection efficiency is high. In addition, under this setting method, there is no need to design the field of view of the optical system based on the long side size of the detector, which can reduce the design difficulty and design cost of the optical system.

[0044] Optionally, FIG4 is a schematic diagram of an imaging field of view provided in an embodiment of the present application. With reference to FIG2 to FIG4 , the detection beam 101 forms an illumination field of view 104 on the surface of the object 40 to be measured through the optical system 20. The length of the illumination field of view 104 in the first direction X is a, and the length of the illumination field of view 104 in the second direction Y is b. The length of the imaging surface 301 in the first direction X is m, and the length of the imaging surface 301 in the second direction Y is n. In the first direction X, the field of view adjustment component 201 has a first adjustment magnification x1 for the detection beam 102, and in the second direction Y, the field of view adjustment component 201 has a second adjustment magnification x2 for the detection beam 102. Wherein, x1 = m / a, x2 = n / b, the first direction X and the second direction Y are orthogonal, and both the first direction X and the second direction Y are perpendicular to the optical axis OA of the optical system 20.

[0045] Figure 4 shows the projections of the illumination field of view 104, the imaging field of view 103, and the imaging surface 301 of the detector 30 along the optical axis OA. The illumination field of view 104 can be understood as the light spot formed on the surface of the object 40 after the detection beam 101 passes through the detection beam adjustment assembly 202, i.e., the illumination field of view 104 of the optical system 20. The illumination field of view 104 has the same shape and size as the imaging field of view of the detection beam 102 before being shaped by the field of view adjustment assembly 201. As an optional embodiment, the field of view adjustment assembly 201 can be designed based on the size of the illumination field of view 104 and the size of the imaging surface 301 of the detector 30.

[0046] For example, as shown in Figures 2 to 4 , in the optical detection device, the imaging surface 301 of the detector 30 is perpendicular to the optical axis OA of the optical system 20, and the field of view adjustment assembly 201 can be positioned in the direction of the optical axis OA of the optical system 20. Typically, the imaging surface 301 of the detector 30 is rectangular or elliptical. For a rectangular detector 30, the first direction X can be parallel to the long side of the imaging surface 301, and the second direction Y can be parallel to the short side of the imaging surface 301. For an elliptical detector 30, the first direction X can be parallel to the long axis of the imaging surface 301, and the second direction Y can be parallel to the short axis of the imaging surface 301. Figure 4 uses a rectangular detector 30 as an example for illustration.

[0047] To ensure that the imaging field of view 103 of the detection beam 102 matches the size of the imaging surface 301 after passing through the field of view adjustment assembly 201, the adjustment magnification x1 of the imaging of the detection beam 102 by the field of view adjustment assembly 201 in the first direction X can be set to m / a, and the adjustment magnification x2 of the imaging of the detection beam 102 in the second direction Y can be set to n / b. In this way, after passing through the field of view adjustment assembly 201, the size of the imaging field of view 103 of the optical system 20 in the first direction X and the second direction Y is the same as the size of the imaging surface 301 in the corresponding directions.

[0048] Optionally, referring to Figures 2 to 4 , in a possible embodiment, the optical detection device may further include a data processing module 60, which is electrically connected to the detector 30; the data processing module 60 is configured to correct the target image to obtain an actual image of the object to be measured 40.

[0049] Exemplarily, the image captured by the detector 30 is an image of the detection beam 102 reflected (and / or scattered) or transmitted by the object 40, after bidirectional magnification adjustment, and thus differs from the actual image of the object 40. Based on this, this embodiment proposes that after the detector 30 generates a target image based on the detection beam 102, the data processing module 60 can correct the target image using an image processing algorithm, restoring the target image to its true scale, thereby obtaining an actual image of the object 40, thereby ensuring the accuracy of image capture of the object 40.

[0050] For example, the data processing module 60 can modify the target image by combining the first adjustment magnification x1 and the second adjustment magnification x2. For example, reverse calculation can be performed using the first adjustment magnification x1 and the second adjustment magnification x2 to restore the target image to its true proportions in the first direction X and the second direction Y. The reverse calculation method is not limited and can be implemented using any relevant technology.

[0051] In addition, the target image after the magnification is adjusted by the field of view adjustment component 201 may have a certain degree of distortion. The data processing module 60 can also correct the distortion through the image processing algorithm to improve the authenticity of the imaging of the object to be measured 40.

[0052] Of course, in other possible embodiments, the field of view adjustment assembly may include other optical elements capable of adjusting the field of view of the optical system, such as, but not limited to, a field stop. Exemplarily, the field stop is disposed on a side of the optical system proximal to the detector, with the shape and size of the central light-transmitting area of ​​the field stop matching the shape and size of the imaging surface of the detector.

[0053] Alternatively, with continued reference to Figures 2 to 4 , in a possible embodiment, the size of the illuminated field of view 104 satisfies at least one of the following: a length a of the illuminated field of view 104 in a first direction X is less than a length m of the imaging surface 301 in the first direction X; and a length b of the illuminated field of view 104 in a second direction Y is less than a length n of the imaging surface 301 in the second direction Y. The field of view adjustment assembly 201 is configured to enlarge the illuminated field of view 104.

[0054] For example, referring to FIG4 , in this embodiment, the illumination field of view 104 of the optical system 20 is smaller than the imaging surface 301 of the detector 30. FIG4 illustratively illustrates that the length a of the illumination field of view 104 along the first direction X is smaller than the length m of the imaging surface 301 along the first direction X, and the length b of the illumination field of view 104 along the second direction Y is equal to the length n of the imaging surface 301 along the second direction Y. However, this is not limiting. Assuming that the length a of the illumination field of view 104 in the first direction X is smaller than the length m of the imaging surface 301 in the first direction X, and the length b of the illumination field of view 104 in the second direction Y is smaller than the length n of the imaging surface 301 in the second direction Y, then the first adjustment magnification x1 of the field of view adjustment assembly 201 is the first magnification, and the second adjustment magnification x2 is the second magnification. After passing through the field of view adjustment assembly 201, the illumination field of view 104 is magnified in both the first and second directions Y to match the size of the imaging surface 301. In this way, the optical system 20 can be designed as a centrally symmetrical small field of view system based on the short side size of the detector 30, simplifying the optical design process.

[0055] Of course, in embodiments not shown in this application, the size of the illuminated field of view 104 can be set to satisfy at least one of the following: the length of the illuminated field of view 104 in the first direction X is greater than the length of the imaging surface 301 in the first direction X; and the length of the illuminated field of view 104 in the second direction Y is greater than or equal to the length of the imaging surface 301 in the second direction Y. In this case, the field of view adjustment assembly 201 is configured to reduce the illuminated field of view 104. The reduced imaging field of view 103 matches the size of the imaging surface 301 of the detector 30. This application primarily focuses on magnifying the field of view; the solution for reducing the field of view can be adaptively adjusted based on the embodiments of this application.

[0056] Optionally, the field of view adjustment component may include a plurality of lenses, and the plurality of lenses are arranged along the optical axis direction of the optical system.

[0057] Exemplarily, among the multiple lenses, some are configured to adjust the field of view in a first direction, while another portion is configured to adjust the field of view in a second direction, and the multiple lenses are arranged along the optical axis. The multiple lenses include, but are not limited to, a combination of cylindrical convex lenses, cylindrical concave lenses, spherical lenses, aspherical convex lenses, and aspherical concave lenses. Aspherical lenses can reduce the probability of image distortion, convex lenses can converge the detection beam, and concave lenses can diverge the detection beam.

[0058] The design of the lens in the field of view adjustment assembly can be set by those skilled in the art according to actual needs, and the embodiments of the present application are not limited thereto.

[0059] For example, Figure 5 is a schematic diagram of the structure of a field of view adjustment assembly provided in an embodiment of the present application, and Figure 6 is a schematic diagram of the structure of another field of view adjustment assembly provided in an embodiment of the present application. Figure 5(a) and Figure 6(a) are schematic diagrams of the stereoscopic projection of the field of view adjustment assembly 201 along the first direction X, which can also be regarded as a front view of the field of view adjustment assembly 201; Figure 5(b) and Figure 6(b) are schematic diagrams of the stereoscopic projection of the field of view adjustment assembly 201 along the second direction Y, which can also be regarded as a top view of the field of view adjustment assembly 201. 5 and 6 , in an optional embodiment, the plurality of lenses include a first lens group 2010A and a second lens group 2010B, wherein the first lens group 2010A and the second lens group 2010B are arranged along the optical axis OA; the first lens group 2010A includes a first concave cylindrical mirror 2011 and a first convex cylindrical mirror 2013 arranged along the optical axis OA, and the second lens group 2010B includes a second concave cylindrical mirror 2012 and a second convex cylindrical mirror 2014 arranged along the optical axis OA; the cylindrical directions of the first concave cylindrical mirror 2011 and the first convex cylindrical mirror 2013 are The cylindrical direction of the second concave cylindrical mirror 2012 is parallel to the first direction X, and the cylindrical direction of the second concave cylindrical mirror 2014 is parallel to the second direction Y; alternatively, the first lens group 2010A includes a third concave cylindrical mirror 2015 and a third convex cylindrical mirror 2016 arranged along the optical axis OA, and the second lens group 2010B includes a convex spherical mirror 2017 and a concave spherical mirror 2018 arranged along the optical axis OA; the cylindrical direction of the third concave cylindrical mirror 2015 is the same as the cylindrical direction of the third convex cylindrical mirror 2016, and is parallel to the first direction X or the second direction Y.

[0060] For example, as shown in FIG5 , in some embodiments, the first lens group 2010A includes a concave cylindrical mirror and a convex cylindrical mirror, and the second lens group 2010B includes a concave cylindrical mirror and a convex cylindrical mirror. The multiple cylindrical mirrors are arranged along the optical axis OA. The concave cylindrical mirror can diverge the detection beam 102, while the convex cylindrical mirror can converge the detection beam 102. The concave cylindrical mirrors can be plano-concave cylindrical mirrors, and the convex cylindrical mirrors can be plano-convex cylindrical mirrors. The cylindrical direction is the direction in which the projected line segment of the cylindrical mirror's refractive power meridian Z1 extends onto the cylindrical surface. The direction orthogonal to the cylindrical direction is parallel to the axial meridian Z2 of the cylindrical mirror. Those skilled in the art will appreciate that when light passes through the axial meridian Z2, no change in vergence occurs, while when light passes through the refractive power meridian Z1, a change in vergence occurs. The cylindrical directions of the two concave cylindrical mirrors can be orthogonal, while the cylindrical directions of the two convex cylindrical mirrors can be orthogonal. The cylindrical directions of one of the concave cylindrical mirrors (i.e., the first concave cylindrical mirror 2011) and one of the convex cylindrical mirrors (i.e., the first convex cylindrical mirror 2013) are along the first direction X, and the cylindrical directions of the other concave cylindrical mirror (i.e., the second concave cylindrical mirror 2012) and the other convex cylindrical mirror (i.e., the second convex cylindrical mirror 2014) are along the second direction Y.

[0061] Typically, the detection beam 102 that reaches the field of view adjustment assembly 201 after passing through the object to be measured 40 is parallel light. The combination of the first concave cylindrical mirror 2011 and the first convex cylindrical mirror 2013, whose cylindrical directions are along the first direction X, allows for adjustment of the magnification of the detection beam 102 in the first direction X without changing the propagation direction of the initially incident detection beam. The combination of the second concave cylindrical mirror 2012 and the second convex cylindrical mirror 2014, whose cylindrical directions are along the second direction Y, allows for adjustment of the magnification of the detection beam 102 in the second direction Y without changing the propagation direction of the initially incident detection beam. In other words, after passing through multiple cylindrical mirrors, the detection beam 102 remains parallel light, and the optical path of the optical system remains unchanged; only the size of the imaging field of view changes.

[0062] Among them, the embodiment of the present application does not limit the arrangement order of the first concave cylindrical mirror 2011, the first convex cylindrical mirror 2013, the second concave cylindrical mirror 2012 and the second convex cylindrical mirror 2014, nor the orientation of the cylindrical mirror curved surface. Any design scheme that can adjust the field of view in the first direction X and the second direction Y is within the scope of the technical solution protected by the embodiment of the present application.

[0063] For example, in an optional solution, as shown in FIG5 , along the direction of the optical axis OA shown in the figure, a first concave cylindrical mirror 2011, a first convex cylindrical mirror 2013, a second convex cylindrical mirror 2014 and a second concave cylindrical mirror 2012 can be arranged in sequence, and the curved surfaces of the first concave cylindrical mirror 2011 and the first convex cylindrical mirror 2013 face the incident direction of the detection beam 102, and the curved surfaces of the second concave cylindrical mirror 2012 and the second convex cylindrical mirror 2014 face away from the incident direction of the detection beam 102. In this configuration, the parallel detection beam 102, after passing through the first concave cylindrical mirror 2011, becomes a divergent beam in the first direction X, thereby magnifying the field of view in the first direction X. After passing through the first convex cylindrical mirror 2013, the detection beam 102 becomes a parallel beam again in the first direction X. During this propagation process, the size and shape of the detection beam 102 in the second direction Y remain unchanged. Subsequently, the parallel detection beam 102 passes through the second convex cylindrical mirror 2014, becoming a divergent beam in the second direction Y, thereby magnifying the field of view in the second direction Y. After passing through the second concave cylindrical mirror 2012, the detection beam 102 becomes a parallel beam again in the second direction Y. During this propagation process, the size and shape of the detection beam 102 in the first direction X remain unchanged. By using these multiple cylindrical mirrors, the imaging field of view can be magnified in both the first and second directions X, while ensuring that the optical path of the optical system remains unchanged.

[0064] Figure 7 is a structural schematic diagram of another field of view adjustment component provided in an embodiment of the present application. Figure 7 (a) is a stereoscopic projection schematic diagram of the field of view adjustment component 201 along the first direction X, and Figure 7 (b) is a stereoscopic projection schematic diagram of the field of view adjustment component 201 along the second direction Y. Please refer to Figure 7. In other embodiments, along the direction of the optical axis OA shown in the figure, the first concave cylindrical mirror 2011, the first convex cylindrical mirror 2013, the second concave cylindrical mirror 2012 and the second convex cylindrical mirror 2014 are arranged in sequence as an example, and the curved surfaces of the first concave cylindrical mirror 2011, the first convex cylindrical mirror 2013, the second concave cylindrical mirror 2012 and the second convex cylindrical mirror 2014 can all face the incident direction of the detection light beam 102. In this configuration, the parallel detection beam 102, after passing through the first concave cylindrical mirror 2011, becomes a divergent beam in the first direction X, thereby magnifying the field of view in the first direction X. After passing through the first convex cylindrical mirror 2013, the detection beam 102 becomes a parallel beam again in the first direction X. During this propagation process, the size and shape of the detection beam 102 in the second direction Y remain unchanged. Subsequently, the parallel detection beam 102 passes through the second concave cylindrical mirror 2012, becoming a divergent beam in the second direction Y, thereby magnifying the field of view in the second direction Y. After passing through the second convex cylindrical mirror 2014, the detection beam 102 becomes a parallel beam again in the second direction Y. During this propagation process, the size and shape of the detection beam 102 in the first direction X remain unchanged. By using these multiple cylindrical mirrors, magnification of the imaging field of view in both the first and second directions X can also be achieved, while ensuring that the optical path of the optical system 20 remains unchanged.

[0065] For example, referring to FIG6 , in some other embodiments, the first lens group 2010A includes a third concave cylindrical mirror 2015 and a third convex cylindrical mirror 2016, and the second lens group 2010B includes a convex spherical mirror 2017 and a concave spherical mirror 2018. The cylindrical directions of the third concave cylindrical mirror 2015 and the third convex cylindrical mirror 2016 are parallel to the first direction X or the second direction Y. Assuming that the cylindrical directions of both cylindrical mirrors are parallel to the first direction X (as shown in FIG6 ), the combination of the third concave cylindrical mirror 2015 and the third convex cylindrical mirror 2016 can adjust the magnification of the detection beam 102 in the first direction X without changing the propagation direction of the initially incident detection beam. Assuming that the cylindrical directions of both cylindrical mirrors are parallel to the second direction Y, the combination of the third concave cylindrical mirror 2015 and the third convex cylindrical mirror 2016 can adjust the magnification of the detection beam 102 in the second direction Y without changing the propagation direction of the initially incident detection beam. After passing through the first lens group 2010A, the detection beam 102 undergoes magnification adjustment in one direction and then enters the convex spherical mirror 2017 and the concave spherical mirror 2018 in the second lens group 2010B. The convex spherical mirror 2017 or the concave spherical mirror 2018 can adjust the magnification of the detection beam 102 in the first direction X and the second direction Y. The combination of the convex spherical mirror 2017 and the concave spherical mirror 2018 ensures parallel propagation of the detection beam 102, thereby achieving overall adjustment of the imaging field size of the detection beam 102. Among them, according to the different requirements of the final imaging field of view size, the above-mentioned third concave cylindrical mirror 2015, third convex cylindrical mirror 2016, convex spherical mirror 2017 and concave spherical mirror 2018 are set in different ways. The embodiment of the present application does not limit the design parameters of the above-mentioned lenses.

[0066] Optionally, the curvature of the cylindrical mirrors and the spacing between adjacent cylindrical mirrors can be determined based on the required magnification of the optical system. The order of the cylindrical mirrors can also be determined based on the actual optical system design. The design principle can be followed: the peak-to-valley (PV) value of the detection beam at each surface angle of the cylindrical mirror is minimized. In other words, the light is allowed to pass through the front and back surfaces of the cylindrical mirror as smoothly as possible to reduce the sensitivity of the adjustment.

[0067] By adjusting the curvature and spacing of the cylindrical mirrors, the magnification in the first direction or the second direction can be changed respectively, so that the imaging field of view matches the size of the detector.

[0068] Optionally, reference may be made to Figures 2 to 4 . As described above, the optical system 20 further includes a detection beam adjustment component 202 , which is configured to cause the detection beam 101 to form an illumination field 104 on the surface of the object to be measured 40 ; the field of view adjustment component 201 is located on the side of the detection beam adjustment component 202 facing away from the object to be measured 40 .

[0069] For example, as shown in Figure 2, in this embodiment, the detection beam adjustment component 202 and the field of view adjustment component 201 can be arranged in sequence in the direction of the optical axis OA of the optical system 20, and the detection beam adjustment component 202 and the field of view adjustment component 201 are arranged along the propagation direction of the detection beam 102. In this way, the design of the optical system 20 is relatively simple.

[0070] The optical detection equipment provided in the embodiments of the present application may also include any structure known to those skilled in the art, and the embodiments of the present application are not limited to this.

[0071] Based on the same concept, an embodiment of the present application further provides an optical detection method, which is applicable to the optical detection device provided in any embodiment of the present application. FIG8 is a flow chart of an optical detection method provided in an embodiment of the present application. With reference to FIG8 , the optical detection method includes the following steps:

[0072] S110, controlling the light source to emit a detection light beam.

[0073] The detection beam is transmitted to the object to be measured through the optical system and forms a detection beam through the object to be measured. The detection beam is then projected onto the imaging surface of the detector after passing through the field of view adjustment component. The imaging field of the detection beam in the plane where the imaging surface is located falls within the area where the imaging surface is located.

[0074] S120 : The detector forms a target image of the object to be detected according to the detection light beam.

[0075] This solution improves the energy utilization of the detection beam without increasing the energy of the light source or the detector integration time. This helps enhance the detection light signal and improves the optical detection effect, ensuring that the object under test is intact and the optical detection efficiency is high. Furthermore, this setup eliminates the need to design the optical system's field of view based on the long side of the detector, reducing the design difficulty and cost of the optical system.

[0076] Optionally, the optical detection device further includes a data processing module, which is electrically connected to the detector. After the above (S120), the following steps may be performed: S230, the data processing module corrects the target image to obtain an actual image of the object to be detected.

[0077] FIG9 is a flow chart of another optical detection method provided in an embodiment of the present application. The embodiment shown in FIG9 is a refinement of the above embodiment. With reference to FIG9 , the optical detection method includes the following steps:

[0078] S210: Control the light source to emit a detection light beam.

[0079] The detection beam is transmitted to the object to be measured through the optical system and forms a detection beam through the object to be measured. The detection beam is then projected onto the imaging surface of the detector after passing through the field of view adjustment component. The imaging field of the detection beam in the plane where the imaging surface is located falls within the area where the imaging surface is located.

[0080] S220: The detector forms a target image of the object to be detected according to the detection light beam.

[0081] S230: The data processing module corrects the target image to obtain an actual image of the object to be measured.

[0082] For example, the image captured by the detector is a bidirectionally magnified image of the detection beam reflected and / or scattered or transmitted by the object to be measured, and thus differs from the actual image of the object to be measured. Based on this, this embodiment proposes that after the detector generates a target image based on the detection beam, the data processing module can modify the target image using an image processing algorithm, restoring the target image to its true scale to obtain the actual image of the object to be measured, thereby ensuring the accuracy of the image captured.

[0083] Optionally, the detection beam forms an illumination field of view on the surface of the object to be measured through the optical system, wherein the length of the illumination field of view in the first direction is a, and the length of the illumination field of view in the second direction is b; the length of the imaging surface in the first direction is m, and the length of the imaging surface in the second direction is n; in the first direction, the field of view adjustment component has a first adjustment magnification x1 for the detection beam, and in the second direction, the field of view adjustment component has a second adjustment magnification x2 for the detection beam; wherein x1 = m / a, x1 = n / b, the first direction and the second direction are orthogonal, and both the first direction and the second direction are perpendicular to the optical axis of the optical system. The above (S230) can be further refined as follows: the data processing module corrects the target image in combination with the first adjustment magnification and the second adjustment magnification to obtain an actual image of the object to be measured.

[0084] For example, the data processing module can modify the target image by combining the first adjustment magnification x1 and the second adjustment magnification x2. For example, reverse calculation can be performed using the first adjustment magnification x1 and the second adjustment magnification x2 to restore the target image to its true proportions in the first and second directions. The reverse calculation method is not limited and can be implemented using any relevant technology.

[0085] The optical detection method provided in the embodiment of the present application includes all the technical features and corresponding effects of the optical detection setting provided in the embodiment of the present application, which will not be repeated here.

Claims

1. An optical detection device, comprising a light source (10), an optical system (20) and a detector (30); The light source (10) is configured to emit a detection beam (101); The optical system (20) is arranged to transmit a detection beam (101) to an object to be measured (40), the detection beam (101) forms a detection beam (102) after passing through the object to be measured (40), the optical system (20) is further arranged to receive the detection beam (102), the optical system (20) includes a field of view adjustment component (201), and the detection beam is projected onto the imaging surface (301) of the detector (30) after passing through the field of view adjustment component (201); wherein, The imaging field (103) of the detection beam (102) in the plane where the imaging surface (301) is located falls within the area where the imaging surface (301) is located; The detector (30) forms a target image of the object to be measured (40) according to the detection beam (102).

2. The optical detection device according to claim 1, wherein, The detection beam (101) forms an illumination field (104) on the surface of the object to be measured (40) through the optical system (20). The length of the illumination field (104) in the first direction (X) is a, and the length of the illumination field (104) in the second direction (Y) is b; the length of the imaging surface (301) in the first direction (X) is m, and the length of the imaging surface (301) in the second direction (Y) is n; In the first direction (X), the field of view adjustment component (201) has a first adjustment magnification x1 for the detection beam (102), and in the second direction (Y), the field of view adjustment component (201) has a second adjustment magnification x2 for the detection beam (102); Wherein, x1 = m / a, x2 = n / b, the first direction (X) and the second direction (Y) are orthogonal, and both the first direction (X) and the second direction (Y) are perpendicular to the optical axis (OA) of the optical system (20).

3. The optical detection device according to claim 2, wherein, The size of the illumination field (104) satisfies at least one of the following: the length of the illumination field (104) in the first direction (X) is less than the length of the imaging surface (301) in the first direction (X); the length of the illumination field (104) in the second direction (Y) is less than the length of the imaging surface (301) in the second direction (Y); The field of view adjustment component (201) is configured to magnify the illumination field (104).

4. The optical detection device according to claim 2, wherein, The field of view adjustment component (201) includes a plurality of lenses, and the plurality of lenses are arranged along the optical axis direction of the optical system (20).

5. The optical detection device according to claim 4, wherein, The plurality of lenses include a first lens group (2010A) and a second lens group (2010B), and the first lens group (2010A) and the second lens group (2010B) are arranged along the optical axis (OA) direction; The first lens group (2010A) includes a first concave cylindrical mirror (2011) and a first convex cylindrical mirror (2013) arranged along the optical axis (OA) direction, and the second lens group (2010B) includes a second concave cylindrical mirror (2012) and a second convex cylindrical mirror (2014) arranged along the optical axis (OA) direction; the cylindrical direction of the first concave cylindrical mirror (2011) and the cylindrical direction of the first convex cylindrical mirror (2013) are parallel to the first direction (X), and the cylindrical direction of the second concave cylindrical mirror (2012) and the cylindrical direction of the second convex cylindrical mirror (2014) are parallel to the second direction (Y); or, The first lens group (2010A) includes a third concave cylindrical mirror (2015) and a third convex cylindrical mirror (2016) arranged along the optical axis (OA). The second lens group (2010B) includes a convex spherical mirror (2017) and a concave spherical mirror (2018) arranged along the optical axis (OA). The cylindrical direction of the third concave cylindrical mirror (2015) is the same as that of the third convex cylindrical mirror (2016) and is parallel to the first direction (X) or the second direction (Y).

6. The optical detection device according to claim 2, wherein, The optical system (20) further includes a detection beam adjustment component (202), which is configured to form the illumination field of view (104) on the surface of the object under test (40) with the detection beam (101). The field of view adjustment component (201) is located on the side of the detection beam adjustment component (202) away from the object under test (40).

7. The optical detection device according to claim 1, further comprising a data processing module (60), wherein the data processing module (60) is electrically connected to the detector (30). The data processing module (60) is configured to correct the target image to obtain the actual image of the object under test (40).

8. An optical detection method applicable to the optical detection device according to any one of claims 1 to 7, the optical detection method comprising: Controlling a light source to emit a detection beam, the detection beam is transmitted through the optical system to the object under test and forms a detection beam through the object under test, and the detection beam is projected onto the imaging surface of the detector after passing through the field of view adjustment component; wherein, the imaging field of view of the detection beam in the plane of the imaging surface falls within the area where the imaging surface is located; The detector forms a target image of the object under test according to the detection beam.

9. The optical detection method according to claim 8, wherein, The optical detection device further includes a data processing module, and the data processing module is electrically connected to the detector; After the detector forms a target image of the object under test according to the detection beam, it further includes: The data processing module corrects the target image to obtain the actual image of the object under test.

10. The optical detection method according to claim 9, wherein, The detection beam forms an illumination field of view on the surface of the object under test through the optical system. The length of the illumination field of view in the first direction is a, and the length of the illumination field of view in the second direction is b. The length of the imaging surface in the first direction is m, and the length of the imaging surface in the second direction is n. In the first direction, the field of view adjustment component has a first adjustment magnification x1 for the detection beam, and in the second direction, the field of view adjustment component has a second adjustment magnification x2 for the detection beam. Wherein, x1 = m / a, x2 = n / b, the first direction and the second direction are orthogonal, and both the first direction and the second direction are perpendicular to the optical axis of the optical system; The data processing module corrects the target image to obtain the actual image of the object under test, including: The data processing module corrects the target image by combining the first adjustment magnification x1 and the second adjustment magnification x2 to obtain the actual image of the object to be measured.

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