Heating device and heater

Abstract

A heating device and a heater. In the heating device, a first cover is sealedly connected to one end of a housing; the first cover has a first through opening; a first sealing member separately abuts against the peripheral wall of a first connecting part and the side wall corresponding to the first opening, so as to seal the first connecting part with the first cover. According to the present application, the first cover is sealedly connected to the housing, and the peripheral wall of the first connecting part is sealed by means of the first cover, thereby reducing the assembly difficulty between the housing and a heating tube, and also ensuring the sealing performance of the heating device even when there is an assembly error between the housing and the heating tube.

Description

Heating devices and heaters

[0001] This application requires:

[0002] Submitted to the China Patent Office on December 29, 2023, application number 202323664949.5, invention name “A heating tube”;

[0003] Submitted to the China Patent Office on March 11, 2024, application number 202420461478.3, invention name “A heating device and heater”;

[0004] Submitted to the China Patent Office on March 11, 2024, application number 202410272367.2, invention name “A heating device, a heater, and an assembly method for a heating device”;

[0005] The entire contents of the priorities of the above three Chinese patent applications are incorporated into this application by reference. Technical Field

[0006] The present application relates to the field of electric heating technology, and in particular, to a heating device and a heater. Background Art

[0007] In life and production, fluids of a certain temperature are usually required, such as hot water from a water dispenser, warm water from a water heater, and fluids in semiconductor cleaning equipment requiring a certain temperature.

[0008] In the related art, the fluid is heated by a heating device, which includes a heating tube and a shell. The shell protects the heating part of the heating tube and prevents the external environment from causing adverse effects on the heating part of the heating tube. When installing the heating tube into the shell, it is usually necessary to pass the heating tube through the inner cavity of the shell. At this time, there needs to be a certain distance between the shell and the heating tube to meet the assembly error of the two, so that the heating tube can easily pass through the inner cavity of the shell. Therefore, there needs to be an assembly space between the shell and the heating tube and a sealing structure needs to be set to ensure the sealing of the two, which will increase the difficulty of assembly between the heating tube and the shell. Therefore, how to meet the sealing between the shell and the heating tube and reduce the difficulty of assembly is a problem that technicians in this field need to consider. Summary of the Invention

[0009] The purpose of this application is to at least solve the problems in the background technology and to propose a heating device and a heater.

[0010] In order to achieve the above object, the present invention adopts the following technical solutions:

[0011] A heating device includes a shell and a heating tube, the shell having a accommodating cavity, the heating tube including a heating part, a first connecting part located at one end of the heating part, and a second connecting part located at the other end of the heating part, at least a portion of the heating part is located in the accommodating cavity, and at least a portion of the first connecting part is located outside the shell, the heating device includes a first pressure cover, the first pressure cover is sealed and connected to one end of the shell, the first pressure cover has a first opening extending therethrough, and a portion of the first connecting part is located at the first opening, the heating device includes a first sealing member, at least a portion of the first sealing member is located between the peripheral wall of the first connecting member and the side wall of the opening corresponding to the first opening, and the first sealing member respectively abuts against the peripheral wall of the first connecting member and the side wall of the opening corresponding to the first opening.

[0012] In the heating device of the above technical solution, the first pressure cover is sealed and connected to one end of the shell, and the first pressure cover has a first opening running through it. The first sealing member is respectively abutted against the peripheral wall of the first connection part and the side wall of the opening corresponding to the first opening, so that the first connection part and the first pressure cover are sealed; in the present application, the first pressure cover is sealed with the shell, and the peripheral wall sealing of the first connection part is achieved by the first pressure cover, thereby reducing the difficulty of assembly between the shell and the heating tube, and satisfying the sealing of the heating device even when there is an assembly error between the shell and the heating tube.

[0013] BRIEF DESCRIPTION OF THE DRAWINGS FIG1 is a schematic structural diagram of a heating device according to an embodiment;

[0014] FIG2 is a schematic diagram of an explosion structure of a heating device according to an embodiment;

[0015] FIG3 is a schematic diagram showing an exploded structure of a heating device according to an embodiment of the present invention showing a first end cover;

[0016] FIG4 is a schematic diagram of an explosion structure of a heating device according to another embodiment;

[0017] FIG5 is a schematic diagram of a partial cross-sectional structure of a heating device according to an embodiment;

[0018] FIG6 is a schematic diagram showing the structure of a first gland according to an embodiment;

[0019] FIG7 is a schematic structural diagram of a first gland from another perspective according to an embodiment;

[0020] FIG8 is a schematic cross-sectional view of a first gland according to an embodiment;

[0021] FIG9 is a schematic structural diagram of a first gland according to another embodiment;

[0022] FIG10 is a schematic cross-sectional view of the first gland according to another embodiment;

[0023] FIG11 is a schematic structural diagram of a first end cover according to an embodiment;

[0024] FIG12 is a schematic diagram of an exploded structure of a joint according to an embodiment;

[0025] FIG13 is a schematic cross-sectional view of a joint according to an embodiment;

[0026] FIG14 is a schematic structural diagram showing the gap M. FIG.

[0027] In Figures 1 to 14: housing 1, accommodating cavity 100, main body 101, second mounting hole 1010, first end cover 102, second port 1020, Outlet 1021, third annular groove 1022, fixing hole 1023, cover plate 1024, protrusion 1025, second threaded hole 1026, sealing body 1027, second end cover 103, third port 1031, heating tube 2, first connecting part 201, first interface part 2010, second connecting part 202, second interface part 2020, heating part 203, first gland 3, first port 300, annular part 301, inner port 3010, first annular groove 302, base 303, second annular groove 304, first mounting hole 305, joint 4, stud 401, outer wall part 4011, stop nut 402, sealing ring 403, cover head 404, fixing nut 405, channel 406, first seal 5, second seal 6, third seal 7, second gland 8, fourth port 801, fourth seal 9, fifth seal 10,

[0028] FIG15 is a schematic diagram of an explosion structure of a heating device according to another embodiment;

[0029] FIG16 is a schematic structural diagram of a first end cover of a heating device according to an embodiment;

[0030] FIG17 is a schematic structural diagram of a first end cover of a heating device according to another embodiment;

[0031] FIG18 is a schematic structural diagram of a second end cover of a heating device according to an embodiment;

[0032] FIG19 is a schematic diagram of a partial structure of a heating device according to another embodiment.

[0033] Among them, in Figures 15 to 19: 1 shell, 100 accommodating cavity, 101 main body, 01011 first mounting hole, 102 first end cover, 01021 first opening, 010211 first recessed portion, 01022 cover plate, 01023 protruding portion, 010231 first threaded hole, 103 second end cover, 01031 second opening, 010311 second recessed portion, 2 heating tube, 200 main body, 0201 heating portion, 0202 first connecting portion, 0204 first protruding portion, 0205 second connecting portion, 0206 second protruding portion, 3 first pressure cover, 8 second pressure cover,.

[0034] Figure 20 is a schematic diagram of the main structure of the present invention;

[0035] Figure 21 is a left-side structural diagram of the present invention;

[0036] Figure 22 is a schematic diagram of the radial cross-sectional structure of the tube substrate of the present invention;

[0037] FIG23 is a schematic structural diagram of the tube substrate of the present invention in a straightened state;

[0038] Figure 24 is a schematic diagram of the partial structure of the utility model;

[0039] FIG25 is a schematic diagram of the assembly structure of the metal element and the tube base of the present invention;

[0040] FIG26 is a schematic diagram of the winding structure of the silver wire and the tube matrix of the present invention;

[0041] FIG27 is a schematic diagram of the first structure of the copper electrode electrical connection method of the present invention;

[0042] FIG28 is a second structural diagram of the copper electrode electrical connection method of the present invention.

[0043] In Figures 20 to 28: tube base 1', electric heating film layer 2', electrode layer 3', annular portion 6', power connection portion 7', elastic portion 8', spiral tube portion 9', first connecting section 10', second connecting section 11', first joint portion 102', second joint portion 112', first reduced diameter portion 1021', first expanded diameter portion 1022', second reduced diameter portion 1121', second expanded diameter portion 1122', first electrode layer 31', second electrode layer 32', first conductive element 41', second conductive element 42', first wire 412', second wire 422', first copper electrode 411', second copper electrode 421'. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0045] As shown in Figures 1 to 14, a heating device according to an embodiment includes a shell 1 and a heating tube 2, the shell 1 having a accommodating cavity 100, the heating tube 2 including a heating portion 203 and a first connecting portion 201 located at one end of the heating portion 203, at least a portion of the heating portion 203 is located in the accommodating cavity 100, and at least a portion of the first connecting portion 201 is located outside the shell 1, the heating device includes a first pressure cover 3, the first pressure cover 3 is sealed and connected to one end of the shell 1, the first pressure cover 3 has a first opening 300 passing through, and a portion of the first connecting portion 201 is located at the first opening 300, the heating device includes a first sealing member 5, at least a portion of the first sealing member 5 is located between the peripheral wall of the first connecting portion 201 and the side wall of the opening corresponding to the first opening 300, and the first sealing member 5 respectively abuts against the peripheral wall of the first connecting portion 201 and the side wall of the opening corresponding to the first opening 300.

[0046] At least part of the heating portion 203 of the heating tube 2 is located in the accommodating cavity 100 of the shell 1, thereby being protected by the shell 1 and reducing the adverse effects of the external environment on it. Furthermore, at least part of the first connecting portion 201 extends out of the shell 1 and is connected to an external pipeline or equipment to transport fluid. The fluid is transported to the heating portion 203 of the heating tube 2 through the first connecting portion 201 for heating, or the heated fluid is transported to an external pipeline or equipment. As shown in Figure 5, the first sealing member 5 is respectively against the peripheral wall of the first connecting portion 201 and the side wall of the port corresponding to the first port 300, thereby ensuring the sealing between the first connecting portion 201 and the first pressure cap 3, and the first pressure cap 3 is sealed with the shell 1, so that the first connecting portion 201 and the shell 1 also have good sealing, preventing external impurities from entering the accommodating cavity 100 and causing adverse effects such as contamination on the heating portion 203, thereby affecting the heating efficiency of the heating portion 203.

[0047] Due to the existence of processing errors, during the installation process of the heating tube 2 and the shell 1, when the heating tube 2 extends out of the end of the shell 1, the inner diameter of the opening at the end of the shell 1 through which the heating tube 2 extends is slightly larger than the outer diameter of the opening through which the heating tube 2 extends, so as to meet the installation requirements of the heating tube 2 and the shell 1. For example, in actual production, it is difficult for the two ends of the heating tube 2 to be coaxial with the two ends of the shell 1 or just so that the two ends of the heating tube 2 can be installed through the two ends of the shell 1. When one end of the heating tube 2 is installed through the end corresponding to the shell 1, there will often be a certain installation deviation between its other end and the other end corresponding to the shell 1. In particular, when the heating tube 2 is a curved tube structure such as a spiral tube, sufficient radial space margin must be left at the end of the shell 1 to facilitate the installation of the heating tube 2. At this time, if a sealing ring is directly added to the end of the shell 1 to limit the installation position of the heating tube 2, it will become difficult to install the shell 1 and the heating tube 2. Therefore, it is difficult to directly set a sealing ring on the shell 1 to match the heating tube 2 and facilitate the installation of the heating tube 2 and the shell 1.

[0048] In the present application, the first pressure cover 3 is used to achieve sealing between the first connection part 201 and the shell 1, while taking into account the installation and coordination with the heating tube 2 at the end of the shell 1, so that sufficient installation space margin can be left at the end of the shell 1 for the installation and passage of the first connection part 201.

[0049] Furthermore, during the assembly process of the heating device of the present application, the heating tube 2 is first installed into the shell 1, the first connecting portion 201 of the heating tube 2 extends out of the end of the shell 1, and then the first pressure cover 3 is sleeved on the first connecting portion 201, and finally the first pressure cover 3 is fixed to the end of the shell 1.

[0050] Furthermore, in one embodiment, either the first connection portion 201 or the second connection portion 202 serves as the fluid inlet end, and the other serves as the fluid outlet end. Of course, the two can also be interchangeable.

[0051] In one embodiment, as shown in Figures 9 and 10, the first connecting portion 201 extends out of the first pressure cover 3, the first pressure cover 3 includes an annular portion 301, the first opening 300 includes an inner opening 3010 corresponding to the inner wall of the annular portion 301, the inner wall of the annular portion 301 is provided with a first annular groove 302, and at least a portion of the first sealing member 5 is located in the first annular groove 302.

[0052] The first sealing member 5 is a sealing ring made of silicone or rubber. The first sealing member 5 matches the first annular groove 302. The first sealing member 5 is embedded in the first annular groove 302. The first connecting portion 201 passes through the first opening 300. Finally, the first sealing member 5 respectively abuts against part of the peripheral wall of the first connecting portion 201 and part of the side wall of the first opening 300.

[0053] Furthermore, a second annular groove 304 is provided on one side of the annular portion 301 facing the shell 1, and the heating device includes a second sealing member 6, at least part of which is located in the second annular groove 304, and the second sealing member 6 is respectively against the shell 1 and the first pressure cover 3, thereby achieving sealing between the annular portion 301 and the shell 1.

[0054] The second sealing member 6 is a sealing ring made of a material such as silicone or rubber. The second sealing member 6 corresponds to the second annular groove 304 and is embedded in the second annular groove 304. The annular portion 301 is also provided with a first mounting hole 305. The corresponding end of the housing 1 has a fixing hole 1023. Screws are passed through the first mounting hole 305 and locked with the fixing hole 1023 to ensure that the second sealing member 6 is respectively abutted against the housing 1 and the first gland 3, thereby achieving a seal between the annular portion 301 and the housing 1.

[0055] Furthermore, the first gland 3 is first sleeved onto the first connecting portion 201, and then corresponding fixing holes 1023 are opened at the end of the housing 1 according to the corresponding positions of the first mounting holes 305. That is, the positions of the fixing holes 1023 are determined by the positions of the first gland 3 and the first connecting portion 201. Then, screws or other fixing parts are passed through the first mounting holes 305 and locked into the fixing holes 1023 to secure the first gland 3 to the end of the housing 1. This effectively compensates for machining errors of the heating device and ensures both sealing and installation fit between the heating tube 2 and the housing 1.

[0056] In another embodiment, as shown in Figures 6 to 8, the first gland 3 includes a base 303 and an annular portion 301. The base 303 is integral with or fixed to the annular portion 301, and the second annular groove 304 is located on the base 303. Furthermore, the base 303 and the annular portion 301 form a step-like shape. The diameter of the base 303 is larger than the diameter of the annular portion 301. The base 303 is located between the annular portion 301 and the housing 1. The base 303 is fixed to the housing 1, thereby fixing the first gland 3 to the housing 1. The base 303 also has an opening corresponding to the internal opening 3010 of the annular portion 301. The opening and the internal opening 3010 of the annular portion 301 together constitute the first opening 300. The first annular groove 302 can be provided on the inner wall of the annular portion 301, or on the inner wall corresponding to the opening of the base 303.

[0057] Furthermore, at this time, the first mounting hole 305 is located at the base 303, and a screw is passed through the first mounting hole 305 and locked and installed with the fixing hole 1023, so that the second sealing member 6 is respectively against the shell 1 and the first pressure cover 3, thereby realizing the sealing between the annular portion 301 and the shell 1.

[0058] In one embodiment, as shown in Figure 1, the shell 1 includes a main body 101 and a first end cover 102, the first end cover 102 is located at one end of the main body 101, the first pressure cover 3 is assembled and fixed with the first end cover 102 and sealed, and the first pressure cover 3 is located on the side of the first end cover 102 away from the main body 101.

[0059] In one embodiment, as shown in Figures 1 and 11, the main body 101 is an annular housing 1, and the first end cap 102 is mated with the end of the main body 101. A second threaded hole 1026 is provided on the side wall of the first end cap 102, and a second mounting hole 1010 is provided on the corresponding side wall of the main body 101. A screw is passed through the second mounting hole 1010 and locked and mounted with the second threaded hole 1026, thereby fixing the first end cap 102 to the main body 101.

[0060] In one embodiment, as shown in Figures 5 and 11, the first end cover 102 includes a cover plate 1024 and a protrusion 1025, at least part of the protrusion 1025 is located in the space enclosed by the main body 101, and the heating device includes a third sealing member 7, which is located between the outer wall of the protrusion 1025 and the inner wall of the main body 101, and the third sealing member 7 is respectively against the outer wall of the protrusion 1025 and the inner wall of the main body 101.

[0061] The cover plate 1024 covers the opening at the end of the main body 101 . The protrusion 1025 extends into the space enclosed by the main body 101 . The second threaded hole 1026 is provided on the side of the protrusion 1025 .

[0062] In one embodiment, as shown in Figures 5 and 11, a third annular groove 1022 is defined on the outer wall of the protrusion 1025, and at least a portion of the third sealing member 7 is located in the third annular groove 1022. The third annular groove 1022 matches the third sealing member 7, which is a sealing ring made of a material such as silicone or rubber. At least a portion of the third sealing member 7 is embedded in the third annular groove 1022, and the third sealing member 7 improves the sealing between the cover plate 1024 and the main body 101.

[0063] In one embodiment, as shown in Figure 13, the first end cover 102 has a penetrating second port 1020, the second port 1020 is connected to the first port 300, part of the first connecting portion 201 is located at the second port 1020, the inner diameter of the port corresponding to the second port 1020 is larger than the outer diameter of the first connecting portion 201, and the port side wall corresponding to the second port 1020 has a gap M with the first connecting portion 201, and M satisfies M≥1mm.

[0064] Gap M facilitates installation between the heating tube 2 and the housing 1. Due to manufacturing errors, the first connection portion 201 of the heating tube 2 may deviate from the installation position of the second opening 1020 of the first end cap 102. Gap M compensates for this deviation, ensuring that when at least a portion of the first connection portion 201 is positioned at the second opening 1020, there is a radial deviation margin. This also reflects the reason why the sidewall corresponding to the second opening 1020 is not suitable for installing a sealing ring. In some embodiments, M can be 1.5 mm or 2 mm, both to address installation deviations between the heating tube 2 and the housing 1 and to avoid excessive installation margins between the two, which would result in low space utilization of the heating device.

[0065] The main body 101 of the housing may be cylindrical as a whole, or may be in other shapes such as a polygonal column.

[0066] In one embodiment, as shown in Figure 2, the heating element 203 comprises a curved tube base and a heating film disposed on at least a portion of the surface of the curved tube base. The curved tube base has a heating channel. Specifically, the curved tube base can be a spiral tube base or a curved tube base such as an S-shaped tube base. The curved tube base can increase the actual heating length of the heating tube 2 within the available space, thereby improving the space utilization of the heating device. The heating film is a nano-electric heating film or other electric heating film that can quickly generate heat when powered. The heating element 203 is integrally formed with the first connecting portion 201 and the second connecting portion 202, or can be connected by welding. When the heating element 203 has the same inner diameter as the first connecting portion 201 and the second connecting portion 202, an integral molding is preferred. When the inner diameters of the heating element 203 and the first connecting portion 201 and the second connecting portion 202 are different, welding is preferred. Both the first connecting portion 201 and the second connecting portion 202 have a fluid channel connected to the heating channel. Fluid flows through the fluid channel and the heating channel to achieve the heating function.

[0067] In one embodiment, the first end cap 102 is provided with a wire outlet 1021. The heating device includes a wire, a portion of which is located in the space corresponding to the wire outlet 1021, a portion of which is located outside the housing 1, and a portion of which is located within the accommodating cavity 100. The wire is connected to the electrodes of the heating tube 2. One end of the wire located in the accommodating cavity 100 is connected to the electrodes of the heating tube 2, and the other end can be connected to an external power source to power the heating tube 2.

[0068] In one embodiment, as shown in FIG4 , a sealing body 1027 is provided on the wall corresponding to the outlet 1021. The sealing body 1027 is located between the side wall corresponding to the outlet 1021 and the wire. The sealing body 1027 wraps around a portion of the outer wall of the wire to ensure the tightness of the wire extending out of the outlet 1021. Specifically, the sealing body 1027 can be a sealing ring made of rubber or silicone. The wall corresponding to the outlet 1021 can have an annular groove corresponding to the sealing body 1027. The sealing body 1027 is installed in the annular groove. The wire passes through the outlet 1021 and is sealed by the sealing body 1027.

[0069] In another embodiment, as shown in FIG3 , the heating device includes a connector 4 that matches the wire outlet 1021 and is sealed to the wall corresponding to the wire outlet 1021. The connector 4 is fixedly mounted to the wire outlet 1021, and the wire is sealed through the connector 4, thereby connecting the electrodes of the heating tube 2 to the external power supply. Furthermore, the connector 4 includes a hollow stud 401, a stop nut 402 integral with or fixed to the stud 401, a fixing nut 405, a cap head 404, and a sealing ring 403. The stud 401 has a channel 406, at least a portion of the wire is located in the channel 406, and the sealing ring 403 is located between the side wall corresponding to the channel 406 and the wire. The wire passes through the channel 406 and is sealed by the sealing ring 403. The stud 401 has at least two outer wall portions 4011, with a spacing between adjacent outer wall portions 4011. The outer wall portions 4011 are arranged in a ring shape as a whole. At least a portion of the sealing ring 403 is located in the space enclosed by the outer wall portions 4011. At least a portion of the cover head 404 is fixedly sleeved on the outer wall portion 4011. The cover head 404 can also be threadedly fixed to the stud 401. When the cover head 404 is locked to the stud 401, at least two outer wall portions 4011 approach each other, causing the sealing ring 403 to shrink, thereby achieving a sealed connection between the wire and the connector 4. When the connector 4 is in use, the stud 401, the stop nut 402, the sealing ring 403, and the cover head 404 are installed as a whole in the outlet 1021, and then the other end of the stud 401 relative to the cover head 404 is locked by the fixing nut 405. The configuration of the connector 4 further improves the sealing between the wire and the first end cover 102.

[0070] Furthermore, the heating tube 2 has two electrodes, and the first end cap 102 has two wire outlets 1021. Two wires are connected to the two electrodes, respectively, and then extend out of the heating device through the two wire outlets 1021. That is, the two wires extend from the same end of the heating device, which facilitates wire routing. In other embodiments, the heating tube 2 has three electrodes, and the first end cap 102 has three wire outlets 1021. Three wires are connected to the three electrodes, respectively. In this case, the heating device is suitable for three-phase power.

[0071] In one embodiment, as shown in Figure 2, the heating device includes a second pressure cover 8, which is located at the other end of the shell 1 relative to the first pressure cover 3, and the second pressure cover 8 has a fourth opening 801 passing through. Part of the second connecting portion 202 is located at the fourth opening 801, and at least part of the second connecting portion 202 is located outside the shell 1. The heating device includes a fourth sealing member 9, which is located between the peripheral wall of the second connecting portion 202 and the side wall of the opening corresponding to the fourth opening 801. The fourth sealing member 9 is respectively against the peripheral wall of the second connecting portion 202 and the side wall of the opening corresponding to the fourth opening 801.

[0072] In one embodiment, as shown in FIG2 , the structure of the second gland 8 is the same as that of the first gland 3 . The second gland 8 is sealed to the second connecting portion 202 by a fourth seal 9 , and the second gland 8 is sealed to the housing 1 by a fifth seal 10 . The structural arrangement of the fourth seal 9 and the fifth seal 10 refers to that of the first seal 5 and the second seal 6 , and will not be repeated here.

[0073] The mounting structure of the second gland 8 and the second connecting portion 202 is similar to that of the first gland 3 and the first connecting portion 201, both ensuring sufficient mounting offset between the heating tube 2 and the housing 1. After the heating tube 2 and the housing 1 are mounted, the first and second glands 3 and 8 are mounted to the first and second connecting portions 201 and 202, respectively. Mounting holes are then opened at corresponding locations on both ends of the housing 1, corresponding to the positions of the first and second glands 3 and 8. Finally, the first and second glands 3 and 8 are secured to the ends of the housing 1 using screws or other fasteners.

[0074] In one embodiment, the housing includes a second end cap 103, the second pressure cap 8 is sealedly connected to the second end cap 103, the second end cap 103 has a third opening 1031 extending therethrough, a portion of the second connection portion 202 is located at the third opening 1031, the inner diameter of the opening corresponding to the third opening 1031 is larger than the outer diameter of the second connection portion 202, and a gap N (not marked in the figure, the principle is the same as the gap M) is provided between the side wall of the opening corresponding to the third opening 1031 and the outer peripheral wall of the second connection portion 202, where N satisfies: N ≥ 1 mm. In some embodiments, N can be 1.5 mm or 2 mm, taking into account both solving the installation deviation between the heating tube 2 and the housing 1, and avoiding the low space utilization rate of the heating device caused by excessive installation margins of the two.

[0075] In one embodiment, the mounting structure of the second end cap 103 and the main body 101 of the housing 1 can be the same as the mounting structure of the first end cap 102 and the main body 101 of the housing 1. Of course, in other embodiments, the second end cap 103 can also be integrally formed with the main body 101 of the housing 1, while retaining the detachable mounting of the first end cap 102 and the main body 101 of the housing 1.

[0076] A heater according to one embodiment is used to connect to a pan-semiconductor device, including a shell 1 and a heating tube 2, the shell 1 having a accommodating cavity 100, the heating tube 2 including a heating portion 203 and a first connecting portion 201 located at one end of the heating portion 203, at least a portion of the heating portion 203 being located in the accommodating cavity 100, and at least a portion of the first connecting portion 201 being located outside the shell 1, the heating device including a first pressure cover 3, the first pressure cover 3 being sealed and connected to one end of the shell 1, the first pressure cover 3 having a first opening 300 extending therethrough, a portion of the first connecting portion 201 being located at the first opening 300, the heating device including a first sealing member 5, at least a portion of the first sealing member 5 being located between a peripheral wall of the first connecting portion 201 and a side wall corresponding to the first opening 300, the first sealing member 5 respectively abutting against the peripheral wall of the first connecting portion 201 and the side wall corresponding to the first opening 300; the first connecting portion can be used to connect to a pan-semiconductor device, and\or, the second connecting portion can be used to connect to a pan-semiconductor device.

[0077] Furthermore, the first connection portion has an integrated first interface portion 2010, which can be used to connect to a pan-semiconductor device, and\or, the second connection portion has an integrated second interface portion 2020, which can be used to connect to a pan-semiconductor device.

[0078] Pan-semiconductors include chip, photovoltaic, lithium battery, liquid crystal display and electronic circuit board manufacturing, etc. The pan-semiconductor equipment in this application refers to the equipment related to its production and manufacturing. The heater of this application has good sealing performance, and its shell can play a good sealing effect on the heating tube. It is very suitable for semiconductor production and manufacturing environments, and can avoid the possible intrusion of moisture, acidic and alkaline gases in the pan-semiconductor working scene, thereby eliminating the possible impact of external gases on the life of the heater. The integrated interface makes the material in contact with the fluid purer, meeting the requirements of semiconductor production and manufacturing. Specifically, the heating tube can be integrally formed of quartz material with a purity of not less than 99.99%. In one embodiment, one or both of the first interface part 2010 and the second interface part 2020 have a reduced diameter portion to facilitate connection with the pan-semiconductor equipment through a PILLAR connector structure.

[0079] Please refer to Figures 15 to 19. The present application also provides a structure in which the heating tube and the shell are not easily displaced in the axial direction, which can reduce the occurrence of collision between the heating tube and the shell and damage to the heating tube.

[0080] As shown in Figures 15 to 19, an embodiment includes a shell 1 and a heating tube 2, the shell 1 has a accommodating cavity 100, at least part of the heating tube 2 is located in the accommodating cavity 100, the shell 1 includes a main body 101 and a first end cover 102, the first end cover 102 is located at one end of the main body 101, the first end cover 102 has a first opening 01021, part of the heating tube 2 is located in the first opening 01021, the side wall of the opening corresponding to the first opening 01021 or the inner side wall of the main body 101 has a first recessed portion 010211, the outer peripheral wall of the heating tube 2 has a first protrusion 0204, the first protrusion 0204 can cooperate with the first recessed portion 010211 and be axially limited by the first recessed portion 010211.

[0081] The first protrusion 0204 cooperates with and is axially limited by the first recess 010211, thereby allowing the heating tube 2 to be axially limited by the first end cap 102. On the one hand, the first protrusion 0204 supports the heating tube 2, reducing the possibility of collision between the heating tube 2 and the housing 1 and damaging the heating tube 2. On the other hand, the cooperation between the first protrusion 0204 and the first recess 010211 reduces axial positional deviation between the heating tube 2 and the housing, ensuring that the heating portion of the heating device is located in the optimal position within the heating device. The cooperation between the first protrusion 0204 and the first recess 010211 also provides axial limitation for the heating tube 2, preventing rotational wear between the heating tube 2 and the housing 1.

[0082] In one embodiment, the first recessed portion 010211 is located on the first end cap 102, and the first end cap 102 is integrally or detachably fixed to the main body 101. When the first end cap 102 is integrally fixed to the main body 101, during assembly, the heating tube 2 is inserted along the axial direction from the other side of the main body 101 relative to the first end cap 102 until the first protrusion 0204 cooperates with the first recessed portion 010211 and is axially limited by the first recessed portion 010211. When the first end cap 102 is detachably fixed to the main body 101, the first end cap 102 is separated from the main body 101 in the initial state during assembly. The first end cap 102 can be fixed to the main body 101 first, and then the heating tube 2 is inserted. 2 is inserted into the main body 101 from the other side relative to the first end cover 102 along the axial direction until the first protrusion 0204 cooperates with the first recess 010211 and is axially limited by the first recess 010211. Alternatively, the heating tube 2 may be first inserted into the main body 101 from either end thereof along the axial direction and then the first end cover 102 is fixed to the main body 101. During the installation of the first end cover 102, the axial position of the heating tube 2 is adjusted by the cooperation between the first protrusion 0204 and the first recess 010211.

[0083] In one embodiment, as shown in Figure 17, the first recessed portion 010211 is annular as a whole. The first recessed portion 010211 is located on the side of the mouth side wall corresponding to the first mouth 01021 facing the accommodating cavity 100. The heating tube 2 includes a main body portion 200 and a first convex portion 0204. The first convex portion 0204 protrudes from the main body portion 200. The first convex portion 0204 is annular as a whole and matches the first recessed portion 010211.

[0084] In one embodiment, the shell 1 includes a second end cover 103, which is located at the other end of the shell 1 relative to the first end cover 102. The second end cover 103 has a second opening 01031, and the side wall of the opening corresponding to the second opening 01031 has a second recessed portion 010311. The outer peripheral wall of the heating tube 2 has a second protrusion 0206. The second recessed portion 010311 can cooperate with the second protrusion 0206 and be axially limited by the second protrusion 0206.

[0085] The structure of the second end cover 103 can refer to the structure of the first end cover 102. In one embodiment, the second end cover 103 cooperates with the first end cover 102 to clamp the heating tube 2, thereby fixing the heating tube 2. On the one hand, the heating tube 2 is fixed in a reasonable position so that a specific position of the heating device, such as the middle part, has the best heating effect. On the other hand, it can also slow down the shaking of the heating tube 2. In one embodiment, the second end cover 103 and the first end cover 102 limit the axial position of the heating tube 2 to avoid axial position deviation of the heating tube 2.

[0086] In one embodiment, as shown in Figure 16, the first end cover 102 includes a cover plate 01022 and a protrusion 01023, at least part of the protrusion 01023 is located in the space enclosed by the main body 101, the side wall of the protrusion 01023 has a radial first threaded hole 010231, and the main body 101 has a corresponding first mounting hole 01011.

[0087] Specifically, the main body 101 is an annular outer shell, and the first end cap 102 is mated with the end of the main body 101. A first threaded hole 010231 is provided on the sidewall of the first end cap 102, and a first mounting hole 01011 is provided on the corresponding sidewall of the main body 101. Screws are passed through the first mounting hole 01011 and locked into the first threaded hole 010231, securing the first end cap 102 to the main body 101. A cover plate 01022 covers the opening at the end of the main body 101, and a protrusion 01023 extends into the space enclosed by the main body 101. The first threaded hole 010231 is provided on the side of the protrusion 01023.

[0088] Current semiconductor wet cleaning equipment uses high liquid flow rates. To meet heating efficiency requirements, the heating tubes are designed to be spiral. However, the existing spiral heating tube structure is not designed properly, resulting in uneven placement of the heating film on the surface of the spiral heating tube. This unevenness affects the heating effect and the lifespan of the heating tube. This application proposes the following improvements to the heating tube structure.

[0089] Referring to Figures 20-28, a heating tube for use in pan-semiconductor equipment includes a tube base 1' and an electric heating film layer 2'. The tube base 1' has a spiral tube portion 9', and at least a portion of the electric heating film layer 2' is located on the outer wall of the spiral tube portion. The pitch of the spiral tube portion 9' is D_j, and the outer radius of the spiral tube portion is r, wherein D_j>3r.

[0090] The tube base 1' of the device is provided with a spiral tube portion 9', and an electric heating film layer 2' is provided at least on the outer wall of the spiral tube portion 9'. The electric heating film layer 2' is energized to conduct heat to the tube base 1', and the fluid is heated when passing through the tube base 1'. The pitch of the spiral tube portion 9' and the outer radius of the spiral tube portion of the device are reasonably set, which can ensure that the setting of the electric heating film layer 2' of the spiral tube portion is more uniform. The uniformly set electric heating film layer 2' can ensure a better fluid heating effect.

[0091] The pitch of the spiral tube portion 9' is D_j, and the outer radius of the spiral tube portion 9' is r, where D_j>3r; the pitch of the spiral tube portion 9' is greater than 3 times its outer radius, so that the electric heating film layer 2 can be evenly plated on the outer surface of the spiral tube portion 9'; it can be understood that when the pitch of the spiral tube portion 9' is not greater than 3 times its outer radius, the uniformity of the coating inside and outside the spiral tube is difficult to ensure, and the film on the inside will be significantly thinner than the outside, affecting the normal use of the heating tube. Preferably, the pitch of the spiral tube portion 9' is greater than 3.5 times its outer radius to take into account the printing of the electrode layer of the heating tube and the uniform setting of the electric heating film. Furthermore, the pitch of the spiral tube portion 9' is greater than 4 times its outer radius to ensure the quality of the heating tube.

[0092] The electric heating pipe has a spiral tube portion 9', which can reduce the space occupancy of the electric heating equipment and is very suitable for heating pan-semiconductor equipment, including integrated circuits, flat panel displays, LEDs, solar cells, discrete devices, and semiconductor equipment material industries, including semiconductors.

[0093] The electric heating film layer 2' of the device can be attached to the tube substrate by spraying or coating.

[0094] The outer radius r of the spiral tube portion 9' satisfies the following: 4 mm ≤ r ≤ 40 mm; and / or, the thermal distance d of the spiral tube portion 9' satisfies the following: d ≥ 5 mm, where the thermal distance d refers to the minimum distance between the outer walls of two adjacent spiral units of the spiral tube portion 9'; and / or, the number of spiral turns n of the spiral tube portion 9' satisfies the following: 3 ≤ n ≤ 20; and / or, the wall thickness t of the tube base satisfies the following: 1.5 mm ≤ t ≤ 3 mm; and / or, the median diameter Dm of the spiral tube portion satisfies the following: 15 mm ≤ Dm ≤ 300 mm.

[0095] The larger the outer radius r of the tube base 1', the greater the required flow rate of the heated fluid. Otherwise, the lower the Reynolds number of the fluid flowing through the inner wall of the quartz tube, the more likely it is to exhibit laminar flow. The temperature distribution at the center of the heated fluid differs significantly from the temperature near the inner wall of the quartz tube. Thinner walls improve heat transfer and significantly reduce energy consumption. However, the wall thickness should not be too thin, as this will affect the mechanical strength of the quartz glass. Close spacing between adjacent spiral segments, i.e., a smaller thermal distance, will result in greater radiative heating. Excessive thermal radiation can shorten the lifespan of the heating tube. The greater the power density of the heating tube and the higher the fluid heating temperature, the greater the required thermal distance d.

[0096] Referring to Figure 20 , the tube base 1' includes a first connecting segment 10' and a second connecting segment 11', located at either end of the spiral tube portion 9'. The first connecting segment 10' has an integral first connector 102', while the second connecting segment 11' has an integral second connector 112'. The first and second connecting segments 10', 11' are located at either end of the spiral tube portion 9' for connecting to external equipment, such as a pillar connector.

[0097] As an embodiment of the first connecting section 10' and the second connecting section 11', the first connecting section 10' includes a first straight tube portion 101', one end of the first straight tube portion 101' is connected to the spiral tube portion 9', the other end of the first straight tube portion 101' is connected to the first joint portion 102', and the first straight tube portion 101' and the first joint portion 102' are integrally arranged; and\or, the second connecting section 11' includes a second straight tube portion 111, one end of the second straight tube portion 111 is connected to the spiral tube portion, the other end of the second straight tube portion 111 is connected to the second joint portion 112', and the second straight tube portion 111 and the second joint portion 112' are integrally arranged. The arrangement of the first straight tube portion 101' and the second straight tube portion 111 can better connect to external equipment.

[0098] As an embodiment of the first joint portion 102' and the second joint portion 112', the first joint portion 102' includes an integrated first diameter-reducing portion 1021' and a first diameter-expanding portion 1022', the first diameter-reducing portion 1021' is connected to the first straight tube portion 101', and the outer diameter of the first diameter-reducing portion 1021' is smaller than the outer diameters of the first straight tube portion 101' and the first diameter-expanding portion 1022'; and\or, the second joint portion 112' includes an integrated second diameter-reducing portion 1121' and a second diameter-expanding portion 1122', the second diameter-reducing portion 1121' is connected to the second straight tube portion 111, and the outer diameter of the second diameter-reducing portion 1121' is smaller than the outer diameters of the second straight tube portion 111 and the second diameter-expanding portion 1122'. The arrangement of the first diameter-reducing portion 1021' and the first diameter-expanding portion 1022', and the second diameter-reducing portion 1121' and the second diameter-expanding portion 1122' forms a Cao feature, which can better connect the joint of the external equipment.

[0099] 26-28 , the heating tube includes at least two first electrode layers 31 ′, two second electrode layers 32 ′, and a first conductive element 41 ′ connecting the at least two first electrode layers, and a second conductive element 42 ′ connecting the at least two second electrode layers 32 ′. The first electrode layers 31 ′ and the second electrode layers 32 ′ are arranged alternately. The first electrode layers 31 ′ and the second electrode layers 32 ′ are silver electrode layers. A heating region is formed between each two adjacent electrode layers. By providing multiple first electrode layers 31 ′ and second electrode layers 32 ′, the heating tube forms multiple heating regions, reducing the resistance of the heating film layer, improving heating efficiency, and extending the service life of the heating tube.

[0100] 26 , the first conductive element 41 ′ is a silver wire wrapped around the first electrode layer 31 ′, and the second conductive element 42 ′ is a silver wire wrapped around the second electrode layer 32 ′. The width of the first electrode layer 31 ′ and the second electrode layer 32 ′ are both 8 mm to 10 mm, and the diameter of the silver wire is 0.2 mm to 1.0 mm. The silver wire is used to connect multiple electric heating areas in series, simplifying the electrical connection and reducing structural complexity.

[0101] As another way to connect the heating tube to the power supply, referring to Figure 27, the first conductive element 41' includes at least two first copper electrodes 411' and a first wire 412'. The first copper electrodes correspond to and are connected to the first electrode layer one by one, and the first wire is connected to at least two first copper electrodes. The second conductive element 42' includes at least two second copper electrodes 421' and a second wire 422'. The second copper electrodes correspond to and are connected to the second electrode layer 32' one by one, and the second wire is connected to at least two second copper electrodes. The width of the first electrode layer 31' and the second electrode layer 32' are both 5mm-8mm, and the width of the copper electrode 5 is 3mm-5mm. Multiple heating areas are connected in series by using copper electrodes and wires. This way of connecting the power supply has lower cost and longer service life.

[0102] As another embodiment of copper electrode connection, when the heating power is relatively large, the first conductive elements 41 ′ and the second conductive elements 42 ′ are set to be connected in series in multiple groups to avoid excessive current affecting the service life and safety of the wires.

[0103] The silver wire is connected to the power supply, and the surface of the portion of the silver wire that is not in contact with the first electrode layer 31' and the second electrode layer 32' is provided with a first high-temperature insulating sheath;

[0104] Alternatively, a second high-temperature insulating sheath is provided on the surface of the first and second wires 412', 422' that do not contact the first and second copper electrodes 411', 421'. The high-temperature insulating sheath ensures a safe distance between the conductive silver wires or wires and the heating film layer, eliminating electrical safety risks. The high-temperature insulating sheath is generally rated for temperatures between 500-1000 degrees Celsius.

[0105] The first copper electrode 411' and the second copper electrode 421' are both defined as copper electrodes. The first electrode layer 31' and the second electrode layer 32' are both defined as electrode layers 3'. The copper electrode includes an annular portion 6' wrapped around the outer circumference of the electrode layer, and a power connection portion 7' ​​integrally formed with the annular portion 6'. The annular portion 6' includes several elastic portions 8' protruding outward. A silver layer is provided at the contact portion between the copper electrode and the electrode layer. The thickness of the silver layer is 30um-200um, and the thickness of the copper electrode is 0.2mm-0.5mm.

[0106] The elastic portion 8' can compensate for the dimensional tolerance of the tube substrate and ensure a tight fit. The use of copper electrodes has the advantages of low cost and high efficiency assembly. A silver layer is provided at the contact portion between the copper electrode and the electrode layer to reduce the contact resistance between the copper electrode clamp and the silver electrode layer.

[0107] The total length of the heating area of ​​the electric heating film layer 2' on the tube base 1' is L, wherein 1000mm≤L≤4000mm.

[0108] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and purpose of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A heating device, wherein, The invention comprises a shell (1) and a heating tube (2), wherein the shell (1) has a containing cavity (100), the heating tube (2) comprises a heating portion (203), a first connecting portion (201) located at one end of the heating portion (203), and a second connecting portion (202) located at the other end of the heating portion (203), wherein at least a portion of the heating portion (203) is located in the containing cavity (100), the heating device comprises a first pressure cover (3), wherein the first pressure cover (3) is sealedly connected to one end of the shell (1), the first pressure cover (3) has a first opening (300) extending therethrough, and a portion of the first connecting portion (201) is located in the first opening (300), and the heating device comprises a first sealing member (5), wherein at least a portion of the first sealing member (5) is located between a peripheral wall of the first connecting portion (201) and a side wall of the opening corresponding to the first opening (300), and the first sealing member (5) is respectively abutted against a peripheral wall of the first connecting portion (201) and a side wall of the opening corresponding to the first opening (300).

2. The heating device according to claim 1, wherein The first connecting portion (201) extends out of the first pressure cover (3), the first pressure cover (3) includes an annular portion (301), the first port (300) includes an inner opening (3010) corresponding to the inner wall of the annular portion (301), the inner wall of the annular portion (301) is provided with a first annular groove (302), and at least a portion of the first sealing member (5) is located in the first annular groove (302).

3. The heating device according to claim 1 or 2, wherein, A second annular groove (304) is provided on one side of the first pressure cover (3) facing the shell (1), and the heating device comprises a second sealing member (6), at least part of the second sealing member (6) is located in the second annular groove (304), and the second sealing member (6) is respectively abutted against the shell (1) and the first pressure cover (3).

4. The heating device according to claim 3, wherein, The shell (1) comprises a main body (101) and a first end cover (102), wherein the first end cover (102) is located at one end of the main body (101), the first pressure cover (3) is assembled and fixed with the first end cover (102) and is sealed, and the first pressure cover (3) is located on a side of the first end cover (102) away from the main body (101); and\or, the first pressure cover (3) comprises a base (303), the base (303) is integral with or fixed to the annular portion (301), and the second annular groove (304) is located on the base (303).

5. The heating device according to claim 4, wherein, The first end cover (102) comprises a cover plate (1024) and a protrusion (1025), at least a portion of the protrusion (1025) is located in the space enclosed by the main body (101), the heating device comprises a third sealing member (7), the third sealing member (7) is located between the outer wall of the protrusion (1025) and the inner wall of the main body (101), and the third sealing member (7) is respectively abutted against the outer wall of the protrusion (1025) and the inner wall of the main body (101).

6. The heating device according to claim 4 or 5, wherein The first end cover (102) has a through second opening (1020) that communicates with the first opening (300). A part of the first connecting portion (201) is located in the second opening (1020). The inner diameter of the opening corresponding to the second opening (1020) is greater than the outer diameter of the first connecting portion (201). There is a gap M between the side wall of the opening corresponding to the second opening (1020) and the outer peripheral wall of the first connecting portion (201), and M satisfies: M ≥ 1 mm.

7. The heating device according to claim 4 or 5, wherein, The first end cover (102) is provided with a wire outlet (1021). The heating device includes a wire, and a part of the wire is located in the space corresponding to the wire outlet (1021), and a part of the wire is located outside the housing (1); A sealing body (1027) is provided on the wall corresponding to the wire outlet (1021), and the sealing body (1027) is located between the side wall of the opening corresponding to the wire outlet (1021) and the wire; or, the heating device includes a connector (4), the connector (4) is matched with the wire outlet (1021) and the connector (4) is sealingly connected to the wall corresponding to the wire outlet (1021). The connector (4) includes a hollow stud (401), a stop nut (402) integrated or fixed with the stud (401), a fixing nut (405), a cover head (404), and a sealing ring (403). The stud (401) has a channel (406), at least part of the wire is located in the channel (406), the sealing ring (403) is located between the side wall corresponding to the channel (406) and the wire. The stud (401) has at least two outer wall portions (4011), there is a spacing between adjacent two outer wall portions (4011), the outer wall portions (4011) are integrally arranged in a ring shape, at least part of the sealing ring (403) is located in the space surrounded by the outer wall portions (4011), at least part of the cover head (404) is fixedly sleeved on the outer wall portions (4011), the fixing nut (405) is threadedly fixed to the stud (401), and the fixing nut (405) and the cover head (404) are located on both sides of the stop nut (402).

8. The heating device according to claim 1 or 2 or 4 or 5 or 7, wherein, The heating device includes a second gland (8). The second gland (8) is located at the other end of the housing (1) relative to the first gland (3). The second gland (8) has a through fourth opening (801). A part of the second connecting portion (202) is located in the fourth opening (801). At least part of the second connecting portion (202) is located outside the housing (1). The heating device includes a fourth seal (9). The fourth seal (9) is located between the peripheral wall of the second connecting portion (202) and the side wall of the opening corresponding to the fourth opening (801), and the fourth seal (9) abuts against the peripheral wall of the second connecting portion (202) and the side wall of the opening corresponding to the fourth opening (801) respectively; The housing includes a second end cap (103), the second gland (8) is sealingly connected to the second end cap (103), the second end cap (103) has a through third port (103), a part of the second connecting portion (202) is located in the third port (103), the inner diameter of the port corresponding to the third port (103) is larger than the outer diameter of the second connecting portion (202), and there is a gap N between the side wall of the port corresponding to the third port (103) and the outer peripheral wall of the second connecting portion (202), and N satisfies: N≥1mm.

9. A heater for connection to a pan-semiconductor device, wherein, It includes a housing (1) and a heating tube (2), the housing (1) has a receiving cavity (100), the heating tube (2) includes a heating part (203), a first connecting portion (201) located at one end of the heating part (203), and a second connecting portion (202) located at the other end of the heating part (203), at least a part of the heating part (203) is located in the receiving cavity (100), the heating device includes a first gland (3), the first gland (3) is sealingly connected to one end of the housing (1), the first gland (3) has a through first port (300), a part of the first connecting portion (201) is located in the first port (300), the heating device includes a first seal (5), at least a part of the first seal (5) is located between the peripheral wall of the first connecting portion (201) and the side wall of the port corresponding to the first port (300), and the first seal (5) abuts against the peripheral wall of the first connecting portion (201) and the side wall of the port corresponding to the first port (300) respectively; The first connecting portion (201) can be used to connect to the pan-semiconductor device, and / or the second connecting portion (202) can be used to connect to the pan-semiconductor device.

10. The heating device according to claim 1, wherein, It includes a housing (1) and a heating tube (2), the housing (1) has a receiving cavity (100), a part of the heating tube (2) is located in the receiving cavity (100), the housing (1) includes a main body portion (101) and a first end cap (102), the first end cap (102) is located at one end of the main body portion (101), the first end cap (102) has a first port (01021), a part of the heating tube (2) is located in the first port (01021); the side wall of the port corresponding to the first port (01021) or the inner side wall of the main body portion (101) has a first recess (010211), the outer peripheral wall of the heating tube (2) has a first protrusion (0204), and the first protrusion (0204) cooperates with the first recess (010211) and is axially limited by the first recess (010211). Alternatively, the side wall of the first orifice (01021) or the inner side wall of the main body (101) has a first convex portion (0204), the outer peripheral wall of the heating tube (2) has a first recessed portion (010211), and the first convex portion (0204) is engaged with the first recessed portion (010211) and axially limited by the first recessed portion (010211).

11. The heating device according to claim 10, wherein, The first end cap (102) includes a cover plate (01022) and a protruding portion (01023), at least a part of the protruding portion (01023) is located in the space surrounded by the main body (101), the side wall of the protruding portion (01023) has a first threaded hole (010231) in the radial direction of the heating device, and the main body (101) has a corresponding first mounting hole (01011); The heating tube (2) includes a main body portion (200) and a first convex portion (0204), and the inner diameter of the heating portion (0201) of the main body portion (200) is larger than the first connecting portion (0202) of the main body portion (200); The heating tube (2) has a fluid flow path inside, and a part of the heating tube (2) extends out of the housing (1) and can be used to connect to an external joint.

12. The heating device according to claim 1, comprising a tube base body (1') and an electrothermal film layer (2'), wherein the tube base body (1') has a spiral tube portion (9'), at least a part of the electrothermal film layer (2') is located on the outer wall of the spiral tube portion, the pitch of the spiral tube portion (9') is D_j, and the outer radius of the spiral tube portion is r, wherein D_j>3r.

13. The heating device according to claim 12, wherein, The outer radius r of the spiral tube portion satisfies: 4 mm ≤ r ≤ 40 mm; and / or, the thermal distance d of the spiral tube portion satisfies: d ≥ 5 mm; and / or, the number of turns n of the spiral tube portion satisfies: 3 ≤ n ≤ 20; and / or, the wall thickness t of the tube base satisfies: 1.5 mm ≤ t ≤ 3 mm; and / or, the mean diameter Dm of the spiral tube portion satisfies: 15 mm ≤ Dm ≤ 300 mm; and / or, the total length of the heating area of the electrothermal film layer (2') on the tube base (1') is L, where 1000 mm ≤ L ≤ 4000 mm.

14. The heating device according to claim 12 or 13, wherein, The tube base includes a first connecting section (10') and a second connecting section (11'), the first connecting section (10') and the second connecting section (11') are respectively located at two ends of the spiral tube portion (9'), the first connecting section (10') has an integral first joint portion (102'), the second connecting section (11') has an integral second joint portion (112), the first joint portion (102') includes an integral first reduced-diameter portion (1021') and a first enlarged-diameter portion (1022'), the first reduced-diameter portion (1021') is connected to the first straight tube portion (101'), and the outer diameter of the first reduced-diameter portion (1021') is smaller than the outer diameters of the first straight tube portion (101') and the first enlarged-diameter portion (1022'); and / or, the second joint portion (112') includes an integral second reduced-diameter portion (1121') and a second enlarged-diameter portion (1122'), the second reduced-diameter portion (1121') is connected to the second straight tube portion (111'), and the outer diameter of the second reduced-diameter portion (1121') is smaller than the outer diameters of the second straight tube portion (111') and the second enlarged-diameter portion (1122').

15. The heating device according to claim 12 or 13 or 14, wherein, The heating tube includes at least two first electrode layers (31'), two second electrode layers (32'), a first conductive element (41') connecting at least two first electrode layers, and a second conductive element (42') connecting at least two second electrode layers (32'). The first electrode layers (31') and the second electrode layers (32') are arranged alternately, and the first electrode layers (31') and the second electrode layers (32') are silver electrode layers; The first conductive element (41') includes at least two first copper electrodes (411'), and a first wire (412'). The first copper electrodes are in one-to-one correspondence with and connected to the first electrode layers. The first wire connects at least two of the first copper electrodes. The second conductive element (42') includes at least two second copper electrodes (421'), and a second wire (422'). The second copper electrodes are in one-to-one correspondence with and connected to the second electrode layers (32'). The second wire connects at least two of the second copper electrodes. The widths of the first electrode layers (31') and the second electrode layers (32') are both 5 mm - 8 mm, and the width of the copper electrodes (5') is 3 mm - 5 mm; or the first conductive element (41') is a silver wire wound around the first electrode layer (31'), the second conductive element (42') is a silver wire wound around the second electrode layer (32'), the widths of the first electrode layers (31') and the second electrode layers (32') are both 8 mm - 10 mm, and the wire diameter of the silver wire is 0.2 mm - 1.0 mm.

16. The heating device according to claim 15, wherein, A first high-temperature insulating sheath is provided on the outer surface of the part where the silver wire does not contact the first electrode layer (31') and the second electrode layer (32'); A second high-temperature insulating sheath is provided on the outer surface of the part where the first wire (412') and the second wire (422') do not contact the first copper electrode (411') and the second copper electrode (421').

17. A heating device according to claim 15, wherein, Define that both the first copper electrode (411') and the second copper electrode (421') are copper electrodes, and both the first electrode layer (31') and the second electrode layer (32') are electrode layers. The copper electrode includes an annular part (6') wrapped around the outer circumference of the electrode layer and a power connection part (7') integrally formed with the annular part (6'). The annular part (6') includes several elastic parts (8') protruding outward. A silver layer is provided at the part where the copper electrode contacts the electrode layer, and the thickness of the silver layer is 30 um - 200 um, and the thickness of the copper electrode is 0.2 mm - 0.5 mm.

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