Ventilation system, purification apparatus and method for providing a clean area by means of a stream of air

Abstract

The invention relates to a ventilation system (1) for providing a clean area (R) by means of a stream of air (S), comprising: - a number of air inlets (E) designed to admit (E) ambient air or air from a sealed reservoir into the ventilation system (1), - a plurality of air outlets (A), each designed to let air out in an outlet direction, - a ventilator device (2) designed to create a stream of air (S) from the number of air inlets (E) to the air outlets (A), characterized in that the outlet directions of the air outlets (A) are substantially parallel to one another so the resulting stream of air (S), after leaving the air outlets (A), forms a continuous volume as a clean area (R), and in that the strength of the respective air flows through the individual air outlets (A) is individually controllable. The invention also comprises a purification apparatus, a method for providing a clean area by means of a stream of air, and a production method for generating control data.

Description

[0001] Ventilation system, cleaning device and method for creating a clean area by an air flow

[0002] The invention relates to a ventilation system, a cleaning device and a method for creating a clean area by an air flow as well as a manufacturing method for generating control data for controlling air flows through air outlets.

[0003] Cleanrooms are widely known. They serve to provide a contamination-free environment for the manufacture or maintenance of objects that must not be contaminated, and / or with the objective of drastically reducing the potential negative influences of the environment, processes, and procedures on a sensitive product or activity, or to specifically transport potentially occurring contamination away from an object.

[0004] For example, in the aerospace industry, components, instruments, and entire satellites are manufactured that have high requirements regarding contamination, heat, radiation (e.g., UV), humidity, access, and visibility. This means they require special protection during work and testing steps. This is achieved with a clean environment whose parameters such as particle freedom, chemical composition, chemical purity, heat, and humidity can preferably be adjusted. Other possible areas of application include processing steps, inspection, and repairs, where contamination must be specifically kept away from the object to be protected.

[0005] But products or manufacturing processes in other technical areas, such as semiconductor technology, pharmaceuticals or medical technology, can also be subject to similar requirements.

[0006] A complex and costly implementation involves providing a dedicated, controlled space for these activities. In most cases, these are fixed or flexible cleanroom solutions. These solutions all aim to provide a built-up environment within which a high degree of cleanliness prevails within physical boundaries.

[0007] A problem with this, in addition to the complete enclosure of the cleanroom, is that the cleanliness of the interior is measured independently of the object, activity, location, and time. Guarantees are only given for the cleanliness of the volume, which does not refer to the object or the activities on the object. However, work is generally intended to be carried out on the object in the cleanroom. This means that there is no guarantee that the previously determined cleanroom cleanliness will also be maintained during work on the object.

[0008] A further disadvantage is that the fixed limitations predetermine the flexibility of the location, activity, positioning and size of the object in advance and thus represent a severe restriction.

[0009] Mobile cleanrooms are based on the following basic principle: A space is created that is as enclosed as possible from rigid or flexible textile materials or foils. A gap or air duct on the ceiling acts as a closed system, which is permeable and releases the air in a non-directional manner at a reduced rate. The permeability is adjusted so that a pressure difference builds up, thereby stabilizing the volume. The lower area, i.e. the actual cleanroom, is designed so that an overpressure is created in the virtually closed system (except for ventilation slots). This overpressure is intended to prevent contamination from entering the room from outside. When people or equipment or the object are introduced, or during tampering inside, contamination can certainly occur that can negate the cleanliness criteria, since overpressure cannot always be guaranteed when opening the system.

[0010] The problem with these spaces is that there is no measurable air movement inside the room. Thus, a component can be kept clean from the outside world, but it cannot be protected against contamination if it is generated or introduced within the space. If the source of contamination is inside the space, it is no longer clean. There is a hard boundary between the clean interior and the uncontrolled exterior. If objects or people from outside cross this boundary, the cleanliness of the interior is no longer guaranteed.

[0011] It is an object of the present invention to provide a ventilation system, a cleaning device and a method for creating a clean area by an air flow as well as a manufacturing method for generating control data for controlling air flows through air outlets of a ventilation system, with which the disadvantages described above are avoided.

[0012] This object is achieved by a ventilation system according to patent claim 1, a cleaning device according to patent claim 9, a method according to patent claim 13 and a manufacturing method according to patent claim 15.

[0013] A ventilation system according to the invention serves to create a clean area through an air flow. It comprises the following components:

[0014] - a number of air inlets designed to admit ambient air or air from a closed reservoir into the ventilation system,

[0015] - a plurality of air outlets, each designed to discharge air in an outlet direction,

[0016] - a fan device designed to generate an air flow from the number of air inlets to the air outlets, wherein the outlet directions of the air outlets are aligned substantially parallel to one another, so that the resulting air flow forms a coherent volume as a clean area after exiting the air outlets, and wherein the strength of the respective air flows through the individual air outlets is individually controllable.

[0017] It should be noted that the ventilation system alone can create a "clean room." However, since a clean room is generally understood to be a space enclosed by gas-tight walls, the term "clean area" is used here. A clean area is a spatial volume that may, but is not necessarily, completely or partially enclosed by walls and in which a level of cleanliness comparable to that of a clean room prevails. Essentially, a clean area is a clean room without walls.

[0018] This is achieved through the airflow, which should be of the required purity. The air can be ambient air, which may need to be filtered to ensure it meets the required purity, or bottled air (as an example of a sealed reservoir), which may be in the form of pure gas.

[0019] It should be noted that the airflow is composed of several air streams. The individual air streams exit the air outlets in the outflow direction. The outflow directions are aligned so that the air streams merge into the air stream, which then forms the aforementioned contiguous volume, the clean zone.

[0020] It is particularly preferred that the ventilation system be designed to generate a flow of breathable air, allowing work to be carried out in the clean area without artificial respiration. If air from a reservoir is used, it should preferably be breathable air.

[0021] The air inlets can simply be openings in a case where ambient air is used. However, as mentioned above, these should have filters to clean the ambient air. They can also have a connection system for a hose or gas cylinder. Air from gas cylinders, which is often highly pure, is more expensive but can be advantageous for specific working conditions and issues. This air could also be recirculated, preferably filtered, through the inlets into the clean area.

[0022] However, "purge air" without filtration can also be used to specifically remove contaminants generated by a process. For this and other applications, the ventilation system is preferably designed to switch between different air inlets, so that air enters the clean area from one set of air inlets before switching, and from another set of air inlets after switching.

[0023] The air outlets can be openings or ends of air ducts, such as pipes. Their outlet direction is determined by the air flow and its shape. For example, the outlet direction of a pipe with an angled end usually corresponds to the longitudinal direction of the angled section.

[0024] The fan device can have a single fan, but preferably comprises multiple fans. It serves to generate the air flow from the air inlets to the air outlets. In a pipe system comprising multiple pipes, the air inlets are preferably located at one end of the pipes, the air outlets at the other ends of the pipes, and the fans, particularly together with filters, are located within the pipes. However, a "fan wall" can also be used, in which the fans, possibly together with a number of filters, are housed in cuboid or cylindrical fan modules, one open side of which forms the air inlet and the opposite open side of which forms the air outlet.

[0025] The ventilation system according to the invention is characterized in that the outlet directions of the air outlets are aligned essentially parallel to one another (i.e., with a maximum deviation of 20°, preferably 10°), so that the resulting air flow, after exiting the air outlets, forms a coherent volume as a clean zone. The air flows from the individual air outlets thus have, by and large, the same outlet direction or at least a similar one. This makes it possible to generate a laminar air flow, which is very advantageous for the invention.

[0026] The directed airflow into the clean area being created creates a graduated purity cascade. The maximum purity class prevails in the direct airflow. Further in the direction of flow (away from the air inlets), the purity class is slightly reduced, allowing processes such as loading or unpacking to be carried out. Work that generates particles or other contaminants should be carried out from an area of ​​lower purity to an area of ​​higher purity. The airflow protects against the transfer of contamination to the areas closer to the air outlet, moving contaminants away from the air inlets. Working parallel to the airflow also prevents the transfer of contamination.

[0027] The ventilation system according to the invention is further characterized by the fact that the strength of the respective air flows through the individual air outlets can be individually controlled. This means that the speed and / or flow of an air flow from an air outlet can be individually adjusted. This can be achieved, for example, by individually controlling individual fans or fan groups so that they generate a stronger or weaker air flow, or by controlling the flow resistance so that air can be slowed down. This can be achieved, for example, with an air outlet with a variable cross-section.A control means in particular that different air flows can be set to different strengths, i.e. a location-dependent difference in the air flows is created, and / or that an air flow in a first time interval has a different strength than an air flow in a second time interval, i.e. a time-dependent difference is created.

[0028] The object can then simply be positioned within the clean area, where the airflow will flow around it. If the object is completely positioned within the clean area, no particles can settle on it, and particles generated during work are carried away by the airflow. It is advantageous to clean the outgoing air of any contamination before it is returned to the environment, e.g., using additional filters.

[0029] Thus, the invention can provide a "clean room" in the fields of semiconductor technology, aerospace, pharmaceuticals, optics, medicine or medical technology, as well as other applications, which also requires no walls. The ventilation system is preferably designed to be mobile, e.g., with a floor area on casters. This allows an object to be moved from one position to another while maintaining a clean area around it. By controlling the strength of the air currents (e.g., their speed and / or their flow), the parameters of the resulting air flow and thus of the clean area can be adjusted.

[0030] For example, the outermost air outlets, which do not blow onto the object, can be set to maximum power (creating a "wraparound flow"). This surrounds the object on the corresponding sides by strong air currents that act like walls. However, it can also be advantageous to make the air currents directed toward the object stronger so that contaminants are lifted away from the object ("central flow").

[0031] Preferably, the air outlets are movable so that their outlet directions can be adjusted within the specified angular range. This allows a clean area to be adapted to an object or the airflow around the object ("object flow") to be adjusted.

[0032] A cleaning device according to the invention serves to create a clean area by means of an air flow. It is equipped with a ventilation system according to the invention and additionally comprises a number of walls that delimit the clean area from an outside area. It is preferred that the area above the clean area is accessible from above. The clean area is preferably accessible in such a way that a predetermined object can be introduced into the cleaning device from above and / or manipulations can be carried out on the object. Preferably, additionally or alternatively, another side can have an opening from which access to the object is possible. Since the object is located in the clean area, manipulations can take place without a risk of contamination. In addition to the ventilation system, the cleaning device has at least one wall.It could therefore be referred to as a "clean room," but it is preferable that the clean area is not completely enclosed by walls. In particular, the area above the clean area should be accessible from above, meaning the cleanliness device should have no walls there or have a hole in the wall. The hole should be large enough to allow a predetermined object (to be positioned in the clean area) to be introduced into the cleanliness device from above and / or to allow manipulation of the object from above. It is also possible to access the auxiliary equipment and perform required manipulations from above and against the direction of air flow without increasing the risk of contamination.

[0033] Therefore, with regard to the ventilation system, it is particularly preferable if the air outlets are aligned in such a way that there is no outlet direction from above. This means that all air outlets are aligned so that their outlet directions are diagonal or horizontal (but not vertical).

[0034] Preferably, the purification device additionally comprises air guiding elements designed to support a targeted airflow around an object. Such air guiding elements are, in particular, baffles or collimators.

[0035] A preferred cleaning device preferably has side walls as a wall, which are in particular aligned parallel to the air flow and / or a floor, preferably a floor on rollers, on which the ventilation system is mounted, so that the cleaning device is mobile.

[0036] A method according to the invention serves to create a clean area using an air stream. It comprises the following steps:

[0037] Providing a ventilation system according to the invention or a cleaning device according to the invention,

[0038] - Positioning an object in a predetermined positioning area in front of the ventilation system, which corresponds to the clean area of ​​the ventilation system,

[0039] - Switch on the ventilation system, with its airflow forming a coherent volume, the clean area. To enable work to be carried out in the clean area, it is particularly preferred that the ventilation system be designed to move breathable air.

[0040] As already described above, the ventilation system according to the invention (optionally in the purification device) is designed to create a clean zone when switched on. An object can then simply be positioned where the clean zone of the switched-on ventilation system is located. The ventilation system can be switched on before or after the object is positioned.

[0041] The relative timing of switching on to the positioning of the object can be made dependent on the following considerations:

[0042] If a cleanliness measurement is to be carried out first for the release of the clean area, the ventilation system can be switched on before the object is positioned and switched off again if necessary.

[0043] If a clean environment is required for planned activities such as unpacking an object from a container, repackaging, integrating a critical component, or conducting tests, the ventilation system should preferably be switched on prior to these activities. The same applies to maintenance work or repairs on the object or a neighboring facility.

[0044] When introducing people or equipment, as well as the object itself or manipulating it, contamination may occur, which may invalidate the purity criteria.

[0045] The invention can also provide protection for people or areas when using dust-generating processes or machines. People and areas are preferably separated from sources of contamination by suitable air ducts (such as an air curtain).

[0046] The ventilation system is particularly suitable for creating a contamination-free corridor in which critical components are transported or transferred from one purity class to a higher one. The invention is particularly advantageous for implementing material locks or a transport corridor. If an object is to be transported or introduced into a room, it is preferable that the ventilation system be switched on at least during this process.

[0047] A manufacturing method according to the invention serves to generate control data for controlling air flows through air outlets of a ventilation system according to the invention and / or for a method according to the invention. It comprises the following steps:

[0048] - Providing geometric data on the shape and size of an object to be positioned in the clean area,

[0049] - Calculating the course of air flows which hit the object in a laminar manner from the individual air outlets and flow around it, at least in the intended clean area,

[0050] - Determine for each air outlet, based on the calculations, what individual strength the air flows through the air outlets should have, so that the air flow flows around the object with little turbulence, especially laminar,

[0051] - Creating control data for a control device to control air flows through the air outlets based on the determination of the individual air flows.

[0052] The manufacturing process is very closely linked to the previously described process or ventilation system, as it generates control data for this process or ventilation system. It can be performed as part of the process, e.g., in advance, or during the process, e.g., if changes to the object or its surroundings need to be taken into account. However, it can also be performed first, and the control data generated by the manufacturing process can be made available to the process.

[0053] First, the manufacturing process requires geometric data regarding the position, shape, and size of the object to be positioned in the clean area. The airflows are to be optimized for this object, and for this purpose, its three-dimensional shape and location are important.

[0054] It is preferable to also take into account processes that lead to changes to the object or its position and / or equipment in the vicinity of the object and / or contamination that arises or must be removed. If, for example, it is certain that equipment is to be set up in the vicinity of the object, then it is advisable to also specify the position, shape and size of the equipment and take this into account in the manufacturing process. In the event that the position, shape or size of the object should change, and times or feedback for these changes exist, the manufacturing process can be carried out multiple times and control data for the different positions, shapes or sizes can be created and applied at the appropriate times or feedback times. Feedback can also be provided by image recognition with a camera that records the object.Regarding contamination, the same applies to changes in the position, shape, or size of the object. If it is determined that contamination levels are higher or lower at a certain point in time, specially created control data can be used.

[0055] Now comes the actual core of the manufacturing process.

[0056] The path of air flows is now calculated, which flow laminarly from the individual air outlets onto the object and around it. Corresponding simulation programs are available.

[0057] The strength (i.e., flow and / or speed) of the air currents through the individual air outlets is then determined (based on the calculated air currents), so that the air current hits and flows around the object with little turbulence, particularly in a laminar manner. This can be achieved, for example, by changing the strength of the air currents during an ongoing air current calculation. The individual air currents are modified until a desired, appropriate, or optimal pattern is achieved. In particular, one can start with a predefined pattern of air current strengths and modify this pattern until the flow around the object is as low as possible.

[0058] In the context of the invention, "low-turbulence" means that less than 10% of an air flow in a low-turbulence region may be turbulent, preferably less than 5%, in particular less than 1%. The vortices are preferably so weak that they move within the air flow in such a way that their cyclical movement is smaller than their lateral movement.

[0059] Based on this determination of the individual air flows, the control data for a control device for controlling air flows through the air outlets is then determined. In a clean area, an object is thus approached from one side or obliquely from above (at a favorable angle) by several air flows that combine to form a single airflow. The flow rates are preferably dimensioned such that a suitable flow profile onto the object and a suitable outflow profile are created. Turbulence between the outlet and the object should be avoided, so the flow should be laminar or at least low-turbulence. Care should also be taken to ensure that the turbulence behind the object (viewed from the airflow) remains within acceptable temporal and spatial limits.

[0060] It is preferable to avoid flow toward the bottom, as this could harbor more contaminants. In particular, all flow patterns that could lead to an upward flow from the bottom over the component should be avoided. A flow parallel to the bottom, e.g., between 1 cm and 10 cm above the bottom, is preferred, as this would carry any particles rising from the bottom outward.

[0061] However, airflow toward the floor can also be deliberately achieved by specifically orienting air outlets. This is at least preferable if it creates an air vortex that cleans the floor and carries particles away from the clean area. However, it should be noted that airflow essentially orthogonal to the floor (i.e., with a vertical outflow direction or at least an outflow direction <20° to the vertical) should generally be avoided, as this could cause particles to spread uncontrollably. No air outlet should be positioned so that its outflow direction is essentially orthogonal to the floor.

[0062] Preferably, the airflow is generated in such a way that the individual air streams have a velocity profile (optimized for the object). Side walls are advantageous and serve to reduce external interference, especially in very large rooms and during activities in the vicinity of the clean area.

[0063] By actively flowing clean air around the object to be protected, contamination from a process on that object as well as from the surrounding area is avoided. Particles are simply transported away from the object and removed from the surrounding area (or the clean area). In contrast to the overpressure of the prior art, the invention uses the momentum of the air to create a clean area. This effect is actively amplified when the air flow is locally and / or temporarily increased between the source and the object. This results in a targeted removal of contamination risks.

[0064] The invention has the additional advantage that it can be set up and commissioned without requiring an interface to a building. If ambient air is used, the ventilation system can be powered by a battery for a limited time. This allows an object, such as a satellite, to be moved from one cleanroom to another, for example, when special measurements need to be performed. It also allows for transport by road, rail, ship, or aircraft. For longer-term operation, only a power generator or power connection for the ventilation system would be advantageous.

[0065] The air outlets are preferably directed towards the object in such a way that behind the object the flow separates and is then returned or mixed with the ambient air.

[0066] Further, particularly advantageous embodiments and developments of the invention emerge from the dependent claims and the following description, wherein the claims of one claim category can also be developed analogously to the claims and description parts to form another claim category and, in particular, individual features of different embodiments or variants can be combined to form new embodiments or variants.

[0067] It may be advantageous for the ventilation system to have a heating and / or cooling system that can temper the air, i.e., heat or cool it. This can ensure that the clean area can be maintained at an optimal temperature. The temperature control of a clean room is known in the prior art. By taking air movement into account (e.g., a corresponding increase in temperature if necessary), this knowledge can also be applied to the invention. In this case, monitoring and control are preferably performed by the environment.

[0068] Removal of atmospheric moisture or volatile adhesive or process residues is also preferred. In this regard, when air is recirculated, it is preferred that the ventilation system include appropriate means for drying the air. Recirculating the air is advantageous for energy and cost reasons. For this purpose, the air is preferably (specifically) returned to the number of air inlets. For this purpose, the previously mentioned collimators and air ducts are preferably adapted to the room and the activities. Such air purification or drying is known in the prior art. However, its application within the framework of a system according to the invention is not.

[0069] The use of a humidification system is also preferred. The same applies to this as to drying.

[0070] However, it should be noted that the invention does not require a closed system. In a non-closed system, the risk of creating a so-called mini-environment is very low. In closed systems, there is a risk that a unique climate with individual humidity and temperature will develop within them. It is also disadvantageous if chemical contamination is released in a closed system, as this remains inside for a comparatively long time. A combination of chemical contamination and heat sources is particularly critical, as the low flow rate makes convective upward flow dominant, thus complicating dilution and removal.

[0071] A preferred velocity of an air stream flowing out of an air outlet is greater than 0.1 m / s, in particular greater than 0.2 m / s, preferably at least 0.3 m / s. A maximum velocity is preferably 10 m / s, in particular 1 m / s or even 0.5 m / s.

[0072] The air outlets are preferably shaped as nozzles. It is preferred that the air outlets be controllable with regard to their outflow direction, i.e., the outflow direction can be changed or adjusted.

[0073] The ventilation system is preferably designed so that air is guided to the fan device through a number of pipes. Textile pipe systems are preferred, the walls of which can be used as filters. In a preferred purification device, the walls, particularly for the side walls and / or the floor, are made of a textile material.

[0074] Suitable textile materials for this application are known in the prior art. For example, outer materials for cleanroom overalls are suitable textile materials for the invention. They are impermeable to particles of sizes relevant for cleanrooms and thus serve as a barrier to these particles. Depending on the area of ​​application, the materials are preferably permeable to air and, in particular, also permeable to evaporated solvents and / or moisture, so that any solvent vapors or water vapor generated during work can escape from a cleaning device even more effectively. In addition, the textile material is preferably antistatic and abrasion-resistant, so that air cannot build up a charge on the textile material and particles of the material are not released into the environment.

[0075] The textile material is preferably used as a filter, with air being drawn or pushed through it by a fan. In particular, ducts made of textile material between the air inlet and air outlet can also serve as a filter. A wall in front of or behind a wall of fan modules can also serve as a (possibly additional) filter.

[0076] Applications of the invention, particularly with tubes and / or walls made of a textile material, can be comparatively large or small. The use of a textile material makes the implementation very lightweight, quick to set up, and easy to store and transport. For transporting a small object, an embodiment of the invention can be realized on a portable tray or in the form of a backpack. However, a cleaning device can also be formed by textile panels (as walls) suspended from a frame, together with a ventilation device with a volume of several cubic meters.

[0077] The textile systems are stored in a highly clean state, allowing for immediate installation and commissioning. Unlike other systems, there is no need for pre-cleaning after installation.

[0078] A preferred ventilation system is characterized in that the fan device comprises a plurality of fans and a plurality of air outlets. Preferably, each air outlet is assigned an individual fan, which generates an air flow through the respective air outlet. For example, the air outlets can be the ends of a plurality of pipes, with a fan in each pipe that generates an air flow. However, the ventilation system can also be formed from a matrix of cylindrical or cuboid-shaped boxes (as fan modules), the opposite sides of which are open (and form an air inlet or air outlet), and in each of which a fan is arranged. A preferred ventilation system is designed and controlled such that the air flow exits the air outlets with low turbulence, in particular in a laminar manner. This allows the air to strike an object positioned in the clean area directly and undisturbed.The air behind the object can certainly be more turbulent. Smaller vortices and separation from the object are permissible, but large-scale vortices that cause backflow to the object should be avoided. This can be achieved by choosing the appropriate flow velocity or approach profile.

[0079] Preferably, the outlet directions of a plurality of air outlets, in particular all air outlets, are oriented at an angle of more than 30° to the vertical. They can preferably be oriented at an angle from above in an angle range between 30° and 60° (to the vertical). However, it is preferred that the air outlets be directed toward an object or the intended location of an object so that the air flow does not directly impact the floor. However, lateral air outlets can also be used to specifically clean the floor (for example, in the form of a temporary operating step as a contribution to routine cleaning).

[0080] In another embodiment, the outlet directions of a plurality of air outlets are aligned substantially horizontally (i.e., with a maximum deviation of 20°, preferably 10°). The air flow is then directed (almost) horizontally onto the object.

[0081] A preferred ventilation system is characterized by the air outlets being arranged in a matrix or offset manner in the form of a plurality of rows and columns. "Matrix" refers to a checkerboard pattern, while "offset" refers to an interlaced arrangement. In a matrix pattern, the rows and columns are preferably straight; in a staggered pattern, the rows are preferably straight and the columns are zigzag.

[0082] The air outlets are preferably arranged so that the air is guided diagonally from above. This is easy to achieve if there is sufficient headroom. The configuration is very flexible and allows the air to be guided from above without blocking direct access for a crane or similar. This means that work can basically be carried out on the object from all major sides. However, work should be carried out in the direction of the air outlets in order to keep contamination as low as possible and to achieve optimal removal of contamination. Air is preferably guided horizontally, particularly through a filter wall. In this configuration, the air is guided from one side. The restriction here is that people and equipment should not be allowed to stand between the air duct and the area to be protected so that the airflow onto the object is not unnecessarily interrupted or disturbed.

[0083] Airflow is preferably directed through a checkerboard pattern of air outlets. This configuration allows the number of fans to be kept to a minimum, while achieving a very smooth and gentle airflow. This is advantageous in cases where airflow is critical, for example, with delicate components.

[0084] Preferably, an air flow pattern corresponds to the silhouette of a predetermined object or other predetermined area. This further reduces the number of fans. However, it can also be advantageous to generate airflow around the object. It can also be advantageous to only direct airflow to a specific area that is contamination-critical within the object to be protected. This applies to limited or limited periods of time.

[0085] A preferred implementation involves a flexible arrangement of filter modules. The desired airflow cross-section is created from individual modules. This is achieved by connecting filters ("basic filter units"), for example, with a grid size of 0.5 x 0.5 m, smaller or larger units, which are supplemented by additional units in the vertical and horizontal directions. This allows for the realization of any cross-sectional geometries and airflow silhouettes.

[0086] With all these air ducts, it is possible to move the ventilation system with the clean area (and an object to be protected) and relocate it to another location.

[0087] A preferred ventilation system comprises electrically conductive elements, preferably at least at the air outlet, which are earthed and arranged such that an air flow passing over them experiences a change in charge. The earthing should be so conductive that electrically charged air is discharged. In this regard, it should be noted that flowing air can become electrically charged. If such charged air comes into contact with particles, it can also charge them, which can lead to them being attracted to the object and adhering to it. Or the particles can adhere to possible wall elements or air duct elements. The electrically conductive elements discharge the charged air again and thus reduce the risk of electrically charged particles.

[0088] A preferred cleaning device is also characterized in that at least some of the walls comprise electrically conductive elements which are earthed and arranged such that an air flow passing over them experiences a change in charge, in particular such that electrically charged air is discharged.

[0089] The electrically conductive elements preferably comprise flat electrodes and / or fibers and / or wires.

[0090] Preferably, air-conducting elements are made of textile. Preferably, they must be abrasion-resistant, conductive, tear-resistant, cleanable, impervious to particles meeting the relevant purity requirements, and breathable. This is advantageous for the exchange of air humidity. Any geometries can be custom-made, including openings and connecting elements (such as zippers, Velcro, buttons, or straps). The implementation with various textile colors also allows for the option of integrating an external lighting system (e.g., when using a white textile).

[0091] A preferred ventilation system comprises a control device designed to individually control the air flows through the air outlets (particularly in a location-dependent and / or time-dependent manner). The control device is preferably designed to control these air flows based on geometric data of a predetermined object and / or the temporal sequence of a predetermined process.

[0092] The ventilation system preferably additionally comprises a sensor unit for control, preferably comprising flow sensors and / or particle counters. The sensor unit can have sensors between the air outlets and the clean area. This has the advantage that the conditions of the clean area can be determined. The sensor unit can (also) have sensors downstream of the clean area. This has the advantage that the influence of the object or a process on the object can be monitored.

[0093] The control device is preferably designed to control the air flows based on measurements of a flow velocity and / or on measurements of particle quantities. In practice, control can be achieved via a dedicated mobile device, on which the actual flow state of each filter unit can be displayed and manipulated. Thus, fixed flow profiles can be programmed and subsequently executed.

[0094] Preferably, air flows are controlled in a location-dependent and / or time-dependent manner, in particular according to fixed patterns or depending on the process sequence.

[0095] For example, the following scenarios can be optimized through individual control:

[0096] During normal operation, the clean zone is adjusted to a positioned object. The air velocity could be between 0.1 m / s and 0.3 m / s. An air velocity of more than 0.4 m / s is considered unpleasant.

[0097] To introduce an object into the clean area, the air volume in the part of the clean area from which the object is introduced can be increased to create a stronger airflow. This is followed by positioning, inspection, unpacking, and cleaning, all of which can be performed at an increased flow velocity to carry away particles.

[0098] During crane operations, the airflow at the top of the clean area can be increased. This helps to carry contaminants generated during this operation away from the object.

[0099] When cleaning the floor, it is important to prevent contamination from being washed upwards uncontrollably. This can be achieved by reducing air currents directly above the floor and increasing parallel air currents above it.

[0100] To separate activities from neighboring activities, a vertical virtual wall can be exposed to higher air volumes, creating a virtual clean air partition wall that prevents the transfer of contamination.

[0101] A preferred ventilation system comprises a filter device designed to filter the air flow. It is preferred that several air outlets are each assigned an individual filter of the filter device. Such a filter is arranged so that it filters the air flow before or after the fan. The filter media used correspond, for example, to H7 or H14 filters. The use of ULPA filter systems or their further developments is also possible. This also applies to the special filters for removing chemical residues. Due to the mesh size, particles or chemical residues are filtered out and the clean area is thus flooded without these particles. The filter efficiency is approximately 99.99999% for particles around 0.2 pm. Larger and smaller particles are removed even more efficiently. The selection of suitable filters is known in the art.

[0102] The filter units can be placed in a row. They can also be offset from each other. Furthermore, it is possible to place the filter units upside down to allow the air to flow downwards. In particular, the flexible air duct allows the filter units to be installed at a distance from the protected volume. The positioning of filters depends on the space available and the operational concept of the activities.

[0103] Pre-filters such as H7 and molecular filters are typically located in front of a fan, while fine filters such as H14 are located behind it. This ensures that if the fan fails, no contamination is transferred into the volume.

[0104] Each fan should preferably have its own filter to ensure precise control.

[0105] A preferred purification device comprises an air outlet area, particularly in the direction of air flow, in which there is no wall and which is dimensioned such that the air flow can exit the purification device there after the clean area has been formed. It is preferred that ventilation elements are arranged in the air outlet area, which are designed to extract the air flow from the purification device (as active ventilation). Alternatively or additionally, filter elements can be arranged in the air outlet area, and the air outlet area is then designed such that at least a portion of the outflowing air passes through the filter elements. This allows contamination that arises on the object due to activity or an operational scenario to be removed.

[0106] Preferably, the air outlet area is designed such that, when a normal air flow prevails, the internal pressure does not increase by more than 0.5 bar, preferably not more than 0.1 bar, compared to the air-free purification device. Preferably, no significant overpressure should build up.

[0107] According to a preferred embodiment of the method, the way in which air flows from the individual air outlets reach and flow around the object is calculated, preferably in the form of a simulation. Based on these calculations, the air flows through the individual air outlets are individually controlled so that the air flow flows around the object with low turbulence, particularly in a laminar manner. Empirical values ​​or simulation results can be used to design and optimize the air flow. The simulation results help define operating conditions and support approval by clients, operators, testing organizations, and standards.

[0108] The invention is explained in more detail below with reference to the accompanying figures using exemplary embodiments. In the various figures, identical components are provided with identical reference numerals. The figures are generally not to scale. They show:

[0109] Figure 1 shows an example of a ventilation system in a perspective view,

[0110] Figure 2 shows an example of a ventilation system in side view,

[0111] Figure 3 shows an embodiment with a fan wall from the side with a representation of the air flow,

[0112] Figure 4 shows an embodiment with a fan wall from above with a representation of the air flow.

[0113] Figure 5 shows a preferred flow profile,

[0114] Figure 6 shows another preferred flow profile,

[0115] Figure 7 shows a preferred method as a block diagram,

[0116] Figure 8 shows a preferred manufacturing method as a block diagram, Figure 1 shows a ventilation system 1 for creating a clean area R by an air flow S. It comprises an air inlet E, a plurality of air outlets A, a fan device 2 and a filter device 3. The air inlet E in this example serves to admit ambient air into the ventilation system 1. The air outlets A serve to discharge air in an outlet direction. The fan device 2 serves to generate an air flow S from the air inlet E to the air outlets A. The filter device 3 serves to filter the ambient air after it has entered. The ventilation system 1 is located in front of an object O which is arranged on a table T. The air outlets A are directed towards the object O.

[0117] Figure 2 shows an example of a ventilation system 1 in side view. Here, air currents S are indicated by dashed arrows, flowing from the air outlets A onto the object O. The ventilation system 1 is similar to that shown in Figure 1, with the difference that the air inlet E is located on the front.

[0118] Figure 3 shows an embodiment with a fan wall from the side, depicting the airflow S. The fan wall represents the ventilation system 1, which is formed from several cuboid-shaped fan modules and stands on a base B. The air inlets E of the fan modules are located on the right-hand side, the air outlets A on the left, and inside there is a fan L and a filter F. However, an additional pre-filter can also be used, which would then be installed to the right of the fan L. The filters F shown here would then be fine filters. The entirety of the fans L forms the fan unit 2, and the entirety of the filters F forms the filter unit 3.

[0119] The fan modules emit air currents with a uniform profile (the length of the arrow indicates the speed, the thickness the flow). These air currents merge almost directly behind the fan modules to form an air current S, which forms the clean zone R. When the air current S hits the object O or the table T, the air currents change. Directly past the object O or the table T, the air flows somewhat faster and may be deflected.

[0120] Figure 4 shows an embodiment with a fan wall from above, depicting the airflow S. One can imagine that this shows the arrangement in Figure 3 from above, which is bounded laterally by two walls 5. Walls 5 and ventilation system 1 form a cleaning device 4. Here, too, the fan modules emit air flows with a uniform profile. If, as in Figure 3, the air flow hits the object O or the table T, the air flows change. Directly past the object O or directly past the table T, the air flows somewhat faster and may be deflected.

[0121] Figure 5 shows a preferred flow profile of an airflow S. The airflow velocity at the edge is lower (short arrows) than in the center (longer arrows). This profile can be used to clean an object O or to support a cleaning process.

[0122] Figure 6 shows another preferred flow profile of an airflow S. The airflow velocity at the edges is much higher (long arrows) than in the center (short arrows). This profile can be used to create "air walls" to separate other areas of a room.

[0123] Figure 7 shows a method for creating a clean area R by an air flow S.

[0124] In step I, a ventilation system 1 according to the invention or a cleaning device 4 according to the invention is provided.

[0125] In step II, an object O (here on a table T) is positioned in a predetermined positioning area in front of the ventilation system 1, which corresponds to the clean area R of the ventilation system 1.

[0126] In step III, the ventilation system 1 is switched on, whereby its air flow S forms a coherent volume as clean area R.

[0127] Figure 8 shows a manufacturing method for generating control data D for controlling air flows through air outlets A of a ventilation system according to the invention and / or for a method according to the invention.

[0128] In step I, geometric data on the shape and size of an object O, which is to be positioned in the clean area R, is provided.

[0129] In step II, the course of air flows which hit the object O in a laminar manner from the individual air outlets A and flow around it, at least in the intended clean area R, is calculated. In step III, based on the calculations, the individual strength of the air flows through the air outlets A is determined for the individual air outlets A, so that the air flow S flows around the object O with little turbulence, in particular in a laminar manner. In step IV, control data D is created for a control device for controlling air flows through the air outlets A based on the determination of the individual air flows.

[0130] Finally, it should be noted once again that the invention described in detail above merely represents exemplary embodiments that can be modified in a variety of ways by those skilled in the art without departing from the scope of the invention. Furthermore, the use of the indefinite articles "a" or "an" does not exclude the possibility that the features in question may be present multiple times. Likewise, terms such as "unit" do not exclude the possibility that the components in question consist of several interacting subcomponents, which may also be spatially distributed. The term "a number" should be read as "at least one."

[0131] List of reference symbols

[0132] 1 ventilation system

[0133] 2 Fan device 3 Filter device

[0134] 4 Cleaning device

[0135] 5 Wall

[0136] A Air outlet

[0137] B Soil D Tax data

[0138] E Air intake

[0139] F Filter

[0140] L fan

[0141] O Object R Clean area

[0142] S Airflow

[0143] T Table

Claims

Patent claims 1. Ventilation system (1) for creating a clean area (R) by an air flow (S) comprising: - a number of air inlets (E) designed to admit ambient air or air from a closed reservoir into the ventilation system (1), - a plurality of air outlets (A), each designed to discharge air in an outlet direction, - a fan device (2) designed to generate an air flow (S) from the number of air inlets (E) to the air outlets (A), characterized in that the outlet directions of the air outlets (A) are aligned substantially parallel to one another, so that the resulting air flow (S) forms a coherent volume as a clean area (R) after it exits the air outlets (A), and that the strength of the respective air flows through the individual air outlets (A) can be individually controlled.

2. Ventilation system (1) according to claim 1, characterized in that the fan device (2) comprises a plurality of fans (L) and a plurality of air outlets (A), preferably wherein each air outlet (A) is assigned an individual fan (L) which generates an air flow through the respective air outlet (A).

3. Ventilation system (1) according to one of the preceding claims, characterized in that the ventilation system (1) is designed and controlled such that the air flow (S) exits the air outlets (A) with low turbulence, in particular in a laminar manner.

4. Ventilation system (1) according to one of the preceding claims, characterized in that the outlet directions of a plurality of air outlets (A), in particular of all air outlets (A), are aligned obliquely to the vertical by more than 30°, and preferably obliquely from above in an angular range between 30° and 60° and / or are aligned substantially horizontally.

5. Ventilation system (1) according to one of the preceding claims, characterized in that the air outlets (A) are arranged in a matrix or offset from one another in the form of a plurality of rows and columns, preferably wherein the air outlets (A) are arranged such that - air flow is slanted from above and / or - air is guided horizontally, in particular through a filter wall (F), and / or - air is guided through a checkerboard pattern of air outlets (A) and / or - an air duct corresponds to a silhouette of a predetermined object (O) or a predetermined area.

6. Ventilation system (1) according to one of the preceding claims, comprising electrically conductive elements, preferably at least at the air outlet (A), which are earthed and arranged such that an air flow (S) passing over them experiences a change in charge, wherein the electrically conductive elements comprise flat electrodes, fibers and / or wires.

7. Ventilation system (1) according to one of the preceding claims, comprising a control device which is designed to individually control the air flows through the air outlets (A), in particular based on geometric data of a predetermined object (O) and / or a temporal sequence of a predetermined process, preferably wherein the ventilation system (1) additionally comprises a sensor unit, preferably comprising flow sensors and / or particle counters, and wherein the control device is designed to control the air flows based on measurements of a flow velocity and / or on a measurement of particle quantities, preferably wherein control of air flows takes place in a location-dependent and / or time-dependent manner, in particular according to fixed patterns or depending on the process sequence.

8. Ventilation system (1) according to one of the preceding claims, comprising a filter device (3) designed to filter (F) the air flow (S), preferably wherein a plurality of air outlets (A) are each assigned an individual filter (F) of the filter device (3), wherein such a filter (F) is arranged such that it filters the air flow before or after the fan (L).

9. A cleaning device (4) for creating a clean area (R) by an air flow (S), with a ventilation system (1) according to one of the preceding claims and additionally comprising a number of walls (5) which delimit the clean area (R) from an outside area, preferably wherein the area above the clean area (R) is accessible from above, preferably in such a way that a predetermined object (O) can be introduced from above into the cleaning device (4) can be introduced and / or manipulations can be carried out on the object (O).

10. Cleaning device (4) according to claim 9, characterized in that at least some of the walls (5) comprise electrically conductive elements which are earthed and arranged such that an air stream (S) passing over them experiences a change in charge, the electrically conductive elements comprising flat electrodes, fibers and / or wires.

11. A cleaning device (4) according to claim 9 or 10, comprising an air outflow area, in particular in the flow direction of the air flow (S), in which no wall (5) is present and which is dimensioned such that the air flow (S) can exit the cleaning device (4) there after the clean area (R) has been formed, preferably wherein ventilation elements are arranged in the air outflow area which are designed to suck the air flow (S) out of the cleaning device (4), and / or preferably wherein filter elements (F) are arranged in the air outflow area, and the air outflow area is designed such that at least a portion of the outflowing air passes through the filter elements (F), preferably wherein the air outflow area is designed such that when a normal air flow (S) prevails, the internal pressure does not rise by more than 0.5 bar, preferably not more than 0.1 bar, compared to the cleaning device (4) through which no air flow passes.

12. Cleaning device (4) according to one of claims 9 to 11, wherein the ventilation system is designed such that air is guided through a number of tubes made of textile material to the fan device, the wall of which is preferably used as a filter, and / or wherein walls are made of a textile material, in particular walls for the side walls and / or the floor.

13. A method for creating a clean area (R) by an air stream (S), comprising the steps: - Providing a ventilation system (1) according to one of claims 1 to 8 or a cleaning device (4) according to one of claims 9 to 12, - positioning an object (O) in a predetermined positioning area in front of the ventilation system (1), which corresponds to the clean area (R) of the ventilation system (1), Switching on the ventilation system (1), whereby its air flow (S) forms a coherent volume as a clean area (R).

14. Method according to claim 13, characterized in that it is calculated how air flows from the individual air outlets (A) hit the object (O) and flow around it, preferably in the form of a simulation, and based on the calculations the air flows through the individual air outlets (A) are individually controlled so that the air flow (S) flows around the object (O) with little turbulence, in particular laminarly.

15. Manufacturing method for generating control data (D) for controlling air flows through air outlets (A) of a ventilation system (1) according to one of claims 1 to 8, and / or for a method according to one of claims 13 or 14, comprising the steps: - Providing geometric data on the position, shape and size of an object (O) to be positioned in the clean area (R), - Calculating the course of air flows which hit the object (O) in a laminar manner from the individual air outlets (A) and flow around it, at least in the designated clean area (R), - Determine for the individual air outlets (A) based on the calculations what individual strength the air flows through the air outlets (A) should have, so that the air flow (S) flows around the object (O) with little turbulence, in particular laminarly, - Creating control data (D) for a control device for controlling air flows through the air outlets (A) based on the determination of the individual air flows.

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