Suction attachment jig, suction attachment device, and conveying device

Abstract

A suction attachment jig 20 comprises: a housing 21 which includes a main body 22 having an internal space 23, a suction hole 24 penetrating through the main body 22 and communicating with the internal space 23, and a communicating hole 25 penetrating through the main body 22 and communicating with the internal space 23; a workpiece suction attachment portion 70 which is attached to the main body 22 and which has a fluid flow passage that communicates with the communicating hole 25; a shaft 40 which is provided in the internal space 23; and a resilient body 50 which is provided in the internal space 23 and which holds the shaft 40 so as to be capable of moving in the axial direction. The shaft 40 has a sealing portion 90 for sealing the suction hole 24.

Description

Suction jig, suction device and transport device

[0001] The present invention relates to a suction jig for suctioning a workpiece, a suction device having the suction jig, and a transport device having the suction device.

[0002] In an electronic component manufacturing line, workpieces are sequentially transported to stations, for example, by a belt conveyor. The workpieces transported to the stations undergo predetermined processing (machining, assembly, inspection, etc.). Patent Document 1 describes a transport device for transporting such workpieces, which includes a transport rail on which a pallet is mounted and a fluid rail provided along the transport rail.

[0003] The pallet is a movable platform for transporting workpieces and is equipped with a suction nozzle capable of suctioning the workpieces. A fluid passage is formed inside the fluid rail. The fluid passage is connected to the fluid pump via a first communicating pipe and to the suction nozzle via a second communicating pipe. Therefore, the fluid pump, fluid passage, and suction nozzle are in communication with each other. When the fluid pump operates, the gas inside the fluid passage is sucked by the fluid pump, and the suction nozzle picks up the workpiece placed on the pallet. This holds the workpiece on the pallet, allowing the workpiece to be transported to the station without falling off the pallet.

[0004] Japanese Patent Application Laid-Open No. 2021-30333

[0005] In the conveying device of Patent Document 1, if the fluid pump stops operating, the gas inside the fluid passage is not sucked in, and the suction nozzle cannot suck the workpiece. Therefore, in order to maintain the state in which the suction nozzle holds the workpiece, the fluid pump must continue to suck in the gas inside the fluid passage. However, continuing to operate the fluid pump can cause problems such as increased power consumption and noise.

[0006] The present invention has been made in consideration of the above-described situation, and its purpose is to provide a suction jig capable of maintaining a workpiece in a suctioned state, a suction device having a suction jig, and a conveying device having a suction device.

[0007] In order to achieve the above object, the suction jig of the present invention comprises: a main body having an internal space; a housing having a suction hole that penetrates the main body and communicates with the internal space; and a communication hole that penetrates the main body and communicates with the internal space; a workpiece suction portion attached to the main body and having a fluid flow path that communicates with the communication hole; a shaft provided in the internal space; and an elastic body provided in the internal space and holding the shaft so as to press it toward the suction hole, wherein the shaft has a sealing portion that seals the suction hole.

[0008] In the suction jig according to the present invention, the elastic body holds the shaft so as to press it toward the suction hole. Therefore, the sealing portion maintains the suction hole sealed unless a force that resists the elastic force of the elastic body acts on the shaft. Here, when an external force (a force that resists the elastic force of the elastic body) is applied to the sealing portion from outside the housing while the workpiece suction portion is not suctioning a workpiece, the sealing portion moves toward the internal space, forming a gap between the suction hole and the sealing portion. This establishes communication between the suction hole, the internal space, the communication hole, and the fluid flow path of the workpiece suction portion. In this state, the workpiece suction portion can suction the workpiece by sucking gas from the internal space through the suction hole.

[0009] Thereafter, when the external force applied to the sealing portion becomes smaller than the elastic force of the elastic body, the elastic force of the elastic body causes the sealing portion to move toward the outside of the housing. The sealing portion then again maintains its state of sealing the suction hole. In this state, the internal space is isolated from the outside of the housing, and the internal space remains sealed. Therefore, the workpiece suction portion can continue to suction the workpiece without having to continuously suction gas from the internal space through the suction hole. In this way, the suction jig according to the present invention can maintain a state in which the workpiece is suctioned, even without continuously suctioning gas from the internal space through the suction hole.

[0010] Subsequently, when the external force applied to the sealing portion becomes greater than the elastic force of the elastic body, the sealing portion moves toward the internal space, forming a gap between the suction hole and the sealing portion. This creates communication between the suction hole, the internal space, the communication hole, and the fluid flow path of the workpiece suction portion. In this state, when the internal space communicates with the space outside the housing through the suction hole, gas flows from the space outside the housing into the internal space, releasing the negative pressure in the internal space. This allows the workpiece suction portion to stop suctioning the workpiece.

[0011] The sealing portion may seal the suction hole in response to elastic deformation of the elastic body. In this case, the sealing portion can seal the suction hole without being driven by a drive source. This simplifies the mechanism by which the sealing portion seals the suction hole, allowing for a smaller and more space-saving suction jig.

[0012] The shaft may have a columnar shaft body, and the sealing portion may have a protrusion that protrudes from the tip of the shaft body and fits into the suction hole. In this case, the sealing portion can seal the suction hole depending on how the protrusion fits into the suction hole. This simplifies the mechanism by which the sealing portion seals the suction hole, allowing for a smaller and more space-saving suction jig.

[0013] The sealing portion may have a resin sealing body provided around the protrusion. In this case, the resin sealing body is arranged around the suction hole so as to fill a minute gap between the outer peripheral surface of the protrusion and the inner wall surface of the suction hole when the protrusion is fitted into the suction hole. This allows the sealing portion to airtightly seal the suction hole.

[0014] The resin sealing body may be configured to seal a gap between an outer peripheral surface of the protrusion that fits into the suction hole and an inner wall surface of the suction hole from inside the main body, thereby enabling the sealing part to airtightly seal the suction hole (gap), as described above.

[0015] The main body may have an accommodating recess formed on an inner wall surface of the main body and extending along an opening edge of the suction hole, and the resin encapsulant may be configured to be accommodated in the accommodating recess. In this case, when the resin encapsulant is accommodated in the accommodating recess, the resin encapsulant is positioned along the opening edge of the accommodating hole. This allows the resin encapsulant to airtightly seal the gap between the outer peripheral surface of the protrusion and the inner wall surface of the suction hole.

[0016] The workpiece suction unit may have a nozzle for suctioning a workpiece and a pad provided around the nozzle for placing the workpiece on. When the workpiece is placed on the pad, the nozzle suctions the workpiece, thereby enabling the workpiece to be held in a stable state.

[0017] In order to achieve the above object, the suction device according to the present invention includes any of the suction jigs described above, and a pushing member that pushes the sealing portion that seals the suction hole toward the internal space from the outside of the main body.

[0018] When a pushing member pushes the sealing portion toward the internal space from the outside of the main body, the sealing portion moves toward the internal space. As a result, a gap is formed between the suction hole and the sealing portion, connecting the suction hole to the internal space. When the workpiece suction portion is not suctioning a workpiece, it can suck in gas from the internal space through the suction hole, allowing the workpiece suction portion to suction the workpiece.

[0019] When the pushing member subsequently weakens its pressing force on the sealing portion, the elastic force of the elastic body acting on the shaft causes the sealing portion to move toward the outside of the housing. The sealing portion then maintains its state of sealing the suction hole again. This keeps the internal space sealed, allowing the workpiece suction portion to continue suctioning the workpiece without having to suck gas from the internal space through the suction hole.

[0020] Then, when the pushing member pushes the sealing portion toward the internal space, the sealing portion moves toward the internal space. As a result, a gap is formed between the suction hole and the sealing portion, connecting the suction hole and the internal space. In this state, when the internal space is connected to the space outside the housing through the suction hole, gas enters the internal space from the space outside the housing, releasing the negative pressure in the internal space. This allows the workpiece suction portion to finish suctioning the workpiece.

[0021] The pushing member may have a cylindrical body connectable to a suction source and a hole formed at an axial end of the cylindrical body. In this case, the cylindrical body can push the sealing portion toward the internal space. This forms a gap between the suction hole and the sealing portion, and the internal space communicates with the pushing member through the gap. In this state, by driving the suction source, gas in the internal space can be sucked through the hole.

[0022] When the cylinder pushes the sealing portion that seals the suction hole toward the internal space, the suction source, the interior of the cylinder, the suction hole, the internal space, the communication hole, and the fluid flow path may be in communication with each other. In this case, when the suction source is activated, gas flows into the suction source through the interior of the cylinder, the suction hole, the internal space, the communication hole, and the fluid flow path. This allows the workpiece suction portion to suction the workpiece.

[0023] The pushing member may have a cylindrical cover attached to the outer surface of the cylindrical body, and the cover may be configured to cover the suction hole. When the cylindrical body pushes the sealing portion toward the internal space, the cover abuts against the periphery (outer edge) of the suction hole from the outside of the main body. The suction hole is then covered by the cover from the outside of the main body. As a result, the internal space of the cover is isolated from the external space of the cover, and the cylindrical body is airtightly connected to the internal space of the housing through the internal space of the cover and the suction hole. This allows gas in the internal space of the housing to be efficiently sucked through the internal space of the cover and the suction hole.

[0024] In order to achieve the above object, a conveying device according to the present invention includes any one of the suction devices described above, a pallet on which a suction jig is mounted, and a conveying line for conveying the pallet.

[0025] As described above, in the conveying device according to the present invention, the workpiece suction portion can maintain a state in which it adsorbs the workpiece even if the suction source does not continue to suck gas from the internal space. Therefore, the suction source can be stopped while the workpiece is being conveyed by the pallet, preventing problems such as increased power consumption and noise. Furthermore, the workpiece suction portion can maintain a state in which it adsorbs the workpiece even if the suction device is not physically connected to the suction source. This allows for the conveying device to be made smaller and more space-saving.

[0026] The conveying line may have a suction start portion for connecting the internal space to a suction source through the suction hole and a suction end portion for connecting the internal space to the outside of the housing through the suction hole, and the suction start portion may be located upstream of the suction end portion on the conveying line. When the internal space is connected to the suction source through the suction hole at the suction start portion, the suction source sucks gas from the internal space. This allows the workpiece suction portion to start suctioning the workpiece. Furthermore, when the internal space is connected to the outside of the housing through the suction hole at the suction end portion, gas flows from the outside of the housing into the internal space. This allows the workpiece holder to stop suctioning the workpiece.

[0027] In this way, in the conveying device of the present invention, once the workpiece holding unit starts to adsorb the workpiece at the adsorption start unit, the workpiece adsorption unit can maintain the state in which it has adsorbed the workpiece until the workpiece holding unit finishes adsorbing the workpiece at the adsorption end unit.

[0028] FIG. 1 is a perspective view of a conveying device according to a first embodiment of the present invention. FIG. 2A is a perspective view of a suction device shown in FIG. 1. FIG. 2B is a partially enlarged perspective view of the suction device shown in FIG. 2A. FIG. 3 is a cross-sectional view of the suction device shown in FIG. 2B. FIG. 4 is a cross-sectional view of the workpiece suction portion shown in FIG. 3. FIG. 5 is a partially enlarged perspective view of the suction jig shown in FIG. 2B. FIG. 6A is a cross-sectional view showing the operation of the suction device shown in FIG. 2A. FIG. 6B is a cross-sectional view showing a subsequent operation of the suction device shown in FIG. 6A. FIG. 6C is a cross-sectional view showing a subsequent operation of the suction device shown in FIG. 6B. FIG. 6D is a cross-sectional view showing a subsequent operation of the suction device shown in FIG. 6C. FIG. 6E is a cross-sectional view showing a subsequent operation of the suction device shown in FIG. 6D. FIG. 6F is a cross-sectional view showing a subsequent operation of the suction device shown in FIG. 6E. FIG. 7 is a perspective view of a conveying device according to a second embodiment of the present invention. FIG. 8A is a perspective view of the suction device shown in FIG. 7. FIG. 8B is a perspective view of the suction device shown in FIG. 8A when the pushing member has separated from the housing. FIG. 9A is a cross-sectional view of the suction device shown in FIG. 8A. FIG. 9B is a cross-sectional view of the suction device shown in FIG. 9A when the pushing member presses the sealing portion downward.

[0029] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the contents shown in the drawings are merely shown schematically and exemplarily to facilitate understanding of the present invention, and the appearance and dimensional ratios may differ from the actual product. Furthermore, the present invention is not limited to the following embodiments.

[0030] 1 is a device for transporting a workpiece 9. The transport device 1 has at least a suction device 10 having a suction jig 20, a pallet 5 on which the suction jig 20 is mounted, and a transport line 3 for transporting the pallet 5. In addition to these components, the transport device 1 further has, for example, a support table 2. However, these components are not essential and may be omitted from the transport device 1.

[0031] The number of suction devices 10 is plural but may be singular. The number of suction jigs 20 is plural but may be singular. The number of pallets 5 is plural but may be singular. The workpiece 9 is not particularly limited, but may be electronic components such as coils, capacitors, resistors, electronic devices equipped with electronic components, components that constitute electronic components or electronic devices (ferrite cores, magnets, etc.), or other members. In this embodiment, the workpiece 9 is a rectangular parallelepiped electronic component.

[0032] The pallets 5 are transported by the conveyor line 3 (belt 7, described later) from the upstream side to the downstream side of the conveyor line 3. Pallets 5 carrying suction jigs 20 (suction jigs 20 on which no workpieces 9 have been placed) are sequentially transported to a predetermined position (suction start section 3a, described later) on the upstream side of the conveyor line 3. Then, at this position, a process of placing the workpieces 9 on the suction jigs 20 is performed.

[0033] Meanwhile, pallets 5 with workpieces 9 placed on suction jigs 20 are transported one after another to a predetermined position (a suction end section 3b described later) on the downstream side of the conveyor line 3. Then, at this position, a process of removing the workpieces 9 from the suction jig 20 is performed. In this manner, the workpieces 9 are transported between the equipment (or process) on the upstream side of the conveyor line 3 and the equipment (or process) on the downstream side. The process of placing the workpieces 9 on the suction jig 20 and the process of removing the workpieces 9 from the suction jig 20 are performed by mechanical means such as a robot arm, or by manual means.

[0034] Although detailed illustration is omitted, predetermined processing (machining, assembly, and / or inspection) is performed on the workpiece 9 while the workpiece 9 is being transported from the upstream side to the downstream side of the transport line 3. Such processing of the workpiece 9 is performed at at least one location on the transport line 3. The detailed configuration of the transport device 1 will be described below. In FIG. 1 and other figures, the X-axis is an axis along the movement direction of the transport line 3, the Y-axis is an axis along a direction perpendicular to the movement direction of the transport line 3, and the Z-axis is an axis along the vertical direction. The positive side of the Z-axis is defined as "upward," and the negative side of the Z-axis is defined as "downward." Furthermore, the negative side of the Y-axis is defined as "forward," and the positive side of the Y-axis is defined as "rearward." Furthermore, the negative side of the X-axis is defined as "upstream," and the positive side of the X-axis is defined as "downstream."

[0035] The support table 2 is a mechanism for holding the conveying line 3 at a predetermined height, and is made of metal such as stainless steel, aluminum, steel, or cast iron. The support table 2 has, for example, legs 2a and a base 2b supported by the legs 2a. The base 2b has a flat surface on which the conveying line 3 is to be installed.

[0036] The conveying line 3 has, for example, at least one conveying rail 4, an upstream roller 6a, a downstream roller 6b, and a belt 7. The conveying line 3 is a belt conveyor, but the configuration of the conveying line 3 is not limited to this. For example, the conveying line 3 does not have to have the conveying rail 4. Alternatively, the conveying line 3 does not have to have the upstream roller 6a, the downstream roller 6b, and the belt 7. Furthermore, the conveying line 3 may be another conveying line, such as a roller conveyor.

[0037] As shown in FIG. 2A , the pallet 5 is a platform on which the suction jig 20 is mounted. The pallet 5 is made of, for example, plastic or metal, but is not particularly limited thereto. The pallet 5 has a pallet body 50 and a plurality of locking portions 51 attached to the pallet body 50. The pallet body 50 is a flat plate. As shown in FIG. 1 , the pallet body 50 is placed on the conveyor rail 4, and moves while sliding on the conveyor rail 4 as the belt 7 moves.

[0038] Four locking portions 51 are attached to the pallet body 50. As can be inferred from Figure 2A, the four locking portions 51 are attached to the four corners of the pallet body 50. The locking portions 51 protrude downward from the bottom of the pallet body 50.

[0039] The locking portions 51 are mechanisms for locking the pallet 5 to the belt 7 (FIG. 1). Each of the four locking portions 51 is fixed to the belt 7 with a bolt (not shown). This prevents the pallet 5 from falling off the belt 7 when the pallet 5 moves below the platform 2b, as shown in FIG. 1. The number of locking portions 51 is not limited to four, and may be two to three, or five or more.

[0040] As shown in Figure 1, the transport rail 4 is disposed on the platform 2b and is formed of a rod-shaped member extending along the X-axis. The transport rail 4 is a mechanism for guiding the pallet 5 from the upstream side to the downstream side of the transport line 3. Although detailed illustration is omitted, a pair of transport rails 4 is disposed on the platform 2b. The pair of transport rails 4 are spaced apart in the Y-axis direction and parallel to each other. By providing the transport rails 4 on the transport line 3, the pallet 5 can be transported along the transport rails 4 from the upstream side to the downstream side of the transport line 3.

[0041] The belt 7 is a mechanism for transporting the pallets 5 from the upstream side to the downstream side of the conveyor line 3. The belt 7 is not particularly limited, but may be a rubber belt or a resin belt typically used in belt conveyors. The belt 7 is supported by an upstream roller 6a and a downstream roller 6b. A plurality of pallets 5 are attached to the belt 7 at a distance from each other along the extension direction of the belt 7. As the belt 7 moves from the upstream side to the downstream side of the conveyor line 3, the plurality of pallets 5 move from the upstream side to the downstream side of the conveyor line 3.

[0042] The upstream roller 6a is provided at one end of the support base 2 in the X-axis direction. The downstream roller 6b is provided at the other end of the support base 2 in the X-axis direction. The upstream roller 6a and the downstream roller 6b are provided integrally with the support base 2, but may be provided separately from the support base 2. The upstream roller 6a and the downstream roller 6b rotate continuously, and feed the belt 7 from the upstream side to the downstream side of the conveyor line 3, and further from the downstream side to the upstream side of the conveyor line 3. As a result, the belt 7 moves from the upstream side to the downstream side of the conveyor line 3 above the base 2b. Furthermore, the belt 7 moves from the downstream side to the upstream side of the conveyor line 3 below the base 2b. The mechanism for feeding the belt 7 is not limited to rollers, and may be another mechanism such as a pulley, for example.

[0043] 2A , the suction device 10 has at least a pushing member 11 and a suction jig 20. In addition to these components, the suction device 10 further has, for example, a connecting portion 14, a communicating tube 15, a connector 16, a suction source 17, and a driving portion 18. However, these components are not essential and may be omitted from the suction device 10.

[0044] 2B and 3 , the suction jig 20 has at least a housing 21, a shaft 40, an elastic body 50, and a workpiece suction portion 70. In addition to these components, the suction jig 20 further has, for example, a first resin sealing body 60 and a guide 80. However, these components are not essential and may be omitted from the suction jig 20.

[0045] The housing 21 is made of metal such as, but not limited to, stainless steel, aluminum, steel, or cast iron. As shown in FIG. 3 , the housing 21 has at least a main body 22, a suction hole 24, and a communication hole 25. The main body 22 is a box-shaped body having an internal space 23, and has, for example, a substantially rectangular parallelepiped external shape (see FIG. 2B ). The internal space 23 extends along the Y axis, and the cross-sectional shape of the internal space 23 (cross-sectional shape along the XZ plane) is circular. The internal space 23 accommodates a shaft 40, an elastic body 50, and a guide 80.

[0046] The main body 22 is disposed on the upper surface of the pallet 5. The main body 22 is fixed to the pallet 5, for example, by fasteners such as bolts or by adhesive. The main body 22 has a first portion 221 and a second portion 222 that is separate from the first portion 221. The first portion 221 has a cylindrical shape with a bottom. The bottom of the first portion 221 corresponds to the rear wall portion of the main body 22. The first portion 221 has an internal space 23.

[0047] The second part 221 is a flat plate. The second part 222 is attached to the front opening of the first part 221 so as to close the internal space 23. By attaching the second part 221 to the first part 221, the internal space 23 can be sealed. The second part 221 is fixed to the first part 221 by, for example, a fastener such as a bolt or an adhesive.

[0048] The suction hole 24 penetrates the rear wall of the main body 22 (first portion 221) along the Y axis so as to communicate with the internal space 23. The suction hole 24 extends linearly, but may also be curved. The cross-sectional shape of the suction hole 24 is circular. However, the cross-sectional shape of the suction hole 24 may also be elliptical, rectangular, other polygonal, or other shapes. In the rear portion of the suction hole 24, the diameter of the suction hole 24 is constant along the Y axis. On the other hand, in the front portion of the suction hole 24, the diameter of the suction hole 24 increases toward the front. This is because a first accommodating recess 26 is formed in the front portion of the suction hole 24, as described below.

[0049] The communication hole 25 penetrates the upper wall of the main body 22 (first portion 221) along the Z axis so as to communicate with the internal space 23. The communication hole 25 extends linearly, but may be curved. The cross-sectional shape of the communication hole 25 is circular. However, the cross-sectional shape of the communication hole 25 may be elliptical, rectangular, other polygonal, or any other shape. The diameter of the communication hole 25 is constant along the Z axis, but may increase, for example, as it extends upward or downward.

[0050] A first accommodating recess 26 is formed in the rear inner surface 224 of the main body 22 (the inner wall surface of the rear wall portion of the main body 22). The first accommodating recess 26 is a ring-shaped recess that surrounds the periphery (opening edge) of the accommodating hole 24 and is recessed toward the rear. The shape of the second accommodating recess 26 when viewed from the front is not particularly limited, but is circular. The first accommodating recess 26 is integral with (continuous with) the accommodating hole 24.

[0051] The first accommodating recess 26 is configured to be able to accommodate a first resin sealing body 60. The first resin sealing body 60 is a ring-shaped resin molding (a so-called O-ring) made of rubber or elastomer, and functions as a sealing material. The first resin sealing body 60 has a shape corresponding to the first accommodating recess 26, i.e., a ring shape. The first resin sealing body 60 is attached to the tip surface of the shaft main body 41 (the outer peripheral surface of a protrusion 42, which will be described later). When the protrusion 42 fits into the suction hole 24, the first resin sealing body 60 enters the first accommodating recess 26. This allows the first resin sealing body 60 to be accommodated in the first accommodating recess 26.

[0052] A second accommodating recess 27 is formed in the upper surface 223 of the main body 22 (the upper surface of the upper wall portion of the main body 22). As shown in Fig. 5, the second accommodating recess 27 is a ring-shaped recess that is recessed downward. The shape of the second accommodating recess 27 as viewed from above is not particularly limited, but is preferably triangular. A second resin encapsulant 62 is accommodated in the second accommodating recess 27.

[0053] The second resin sealing body 62 is a ring-shaped resin molding (a so-called O-ring) made of rubber or elastomer, and functions as a sealing material. The second resin sealing body 62 has a shape corresponding to the second accommodating recess 27, i.e., a ring shape. As shown in FIG. 4 , when the second resin sealing body 62 is accommodated in the second accommodating recess 27, a minute gap that may be formed between the upper surface 223 and the bottom surface of the workpiece suction portion 70 (pad 72) is sealed by the second resin sealing body 62. This prevents the internal space 23 ( FIG. 3 ) from communicating with the space outside the housing 21 through the gap.

[0054] As shown in FIG. 3 , a third accommodating recess 28 is formed in the front end surface 225 of the main body 22 (the front end surface of the first portion 221). Although detailed illustration is omitted, the front end surface 225 is a ring-shaped surface. The outer periphery of the front end surface 225 as viewed from the front is, but is not limited to, a square. The inner periphery of the front end surface 225 as viewed from the front is, but is not limited to, a circle. The third accommodating recess 28 is a ring-shaped recess that is recessed toward the rear. The shape of the third accommodating recess 28 as viewed from the front is, but is not limited to, a circle.

[0055] A third resin sealing body 64 is accommodated in the third accommodating recess 28. The third resin sealing body 64 is a ring-shaped resin molding (a so-called O-ring) made of rubber or elastomer, and functions as a sealant. The third resin sealing body 64 has a shape corresponding to the third accommodating recess 28, i.e., a ring shape (see FIG. 2B ). When the third resin sealing body 64 is accommodated in the third accommodating recess 28, a minute gap that may be formed between the front end face 225 and the second portion 222 is sealed by the third resin sealing body 64. This prevents the internal space 23 from communicating with the space outside the housing 21 through the gap.

[0056] As shown in FIG. 4 , the housing 21 further has a recess 29 formed in the upper surface 223. The recess 29 is recessed downward from the upper surface 223. A communication hole 25 is formed in the bottom surface of the recess 29. The bottom surface of the recess 29 is flat except for the position where the communication hole 25 is formed. As shown in FIG. 5 , the recess 29 is adjacent to the second accommodating recess 27 and is formed inside the second accommodating recess 27 so as to be surrounded by the second accommodating recess 27. The outer peripheral shape of the recess 29 corresponds to the inner peripheral shape of the second accommodating recess 27 and is triangular.

[0057] As shown in FIG. 4 , a communication space 30 is formed between the bottom surface of the workpiece suction portion 70 (pad 72) and the bottom surface of the recess 29. The communication space 30 is formed inside the outer periphery of the recess 29. The height of the communication space 30 corresponds to the depth D of the recess 29. The communication holes 25 and a fluid flow path 73 of the workpiece suction portion 70, which will be described later, communicate with the communication space 30. Therefore, the communication holes 25 communicate with the fluid flow path 73 through the communication space 30. Because the communication space 30 is formed between the communication holes 25 and the fluid flow path 73, the fluid flow path 73 can communicate with the communication holes 25 even if the positions of the communication holes 25 and the fluid flow path 73 do not correspond to each other when viewed from the Z-axis direction. The communication space 30 is surrounded by and sealed by the second resin sealing body 62.

[0058] The depth D of the recess 29 (the height of the communication space 30) is shallower than the depth of the second accommodating recess 27. By appropriately setting the depth D of the recess 29, gas can easily pass through the communication space 30 from the communication hole 25 to the fluid flow path 73.

[0059] As shown in FIG. 3 , the elastic body 50 holds the shaft 40 so that it can move along its axial direction. The elastic body 50 also holds the shaft 40 so as to press the shaft 40 toward the suction hole 24. The elastic body 50 is made of an elastically deformable member, and in this embodiment, is a compression spring. The elastic body 50 is a metal spring, but may be a rubber spring or the like. The elastic body 50 is a coil spring, but may be a leaf spring or the like. The elastic body 50 is not limited to a spring, as long as it is made of a member that is elastically deformable forward and backward. For example, the elastic body 50 may be made of an elastically deformable resin.

[0060] One end of the elastic body 50 is fixed to the main body 22. The other end of the elastic body 50 is fixed to the shaft 40.

[0061] The elastic body 50 shown in Figure 3 is in a contracted state from its natural length and is about to expand rearward due to a restoring force. However, the shaft 40 is disposed at the tip of the elastic body 50, and the elastic body 50 cannot expand to its natural length in the internal space 23. Therefore, the elastic body 50 always maintains a compressed state. Furthermore, the elastic body 50 always maintains a state in which it presses the shaft 40 rearward due to its elastic force. Accordingly, the shaft 40 always maintains a state in which it is biased (pressed) rearward due to the elastic force of the elastic body 50.

[0062] The guide 80 is made of a cylindrical member and is housed in the internal space 23. The guide 80 is fitted (press-fitted) into a recess formed in the inner wall surface of the internal space 23. The guide 80 is arranged to surround the outer circumferential surface of the shaft 40. The shaft 40 is arranged in the internal space of the guide 80 so as to be movable forward and backward. The guide 80 is a member that assists the shaft 40 in smooth forward and backward movement.

[0063] The shaft 40 is made of, but is not limited to, a metal such as SUS, aluminum, steel, or cast iron. The shaft 40 is configured to be movable forward or backward by an elastic body 50. The axial direction of the shaft 40 corresponds to the Y-axis direction. The shaft 40 has, for example, a shaft main body 41, a convex portion 42, and a shaft concave portion 43. However, the configuration of the shaft 40 is not limited to this.

[0064] The shaft body 41 is made of a columnar or cylindrical member. The shaft recess 43 is formed in the front of the shaft body 41. The shaft recess 43 is recessed rearward from the front end face of the shaft body 41. At least a portion of the elastic body 50 is housed inside the shaft recess 43. The rear end (tip) of the elastic body 50 is connected to the bottom surface of the shaft recess 43.

[0065] The protrusion 42 is formed integrally with the shaft body 41 and protrudes rearward from the tip of the shaft body 41. At least a portion of the protrusion 42 fits into the suction hole 24. The protrusion length of the protrusion 42 is longer than the length of the suction hole 24 along the Y axis (i.e., the thickness of the rear wall of the body 22). Therefore, when the protrusion 42 fits into the suction hole 24, the tip of the protrusion 42 is exposed to the outside of the housing 21 through the suction hole 24. However, the protrusion length of the protrusion 42 may be equal to or shorter than the length of the suction hole 24 along the Y axis. The cross-sectional shape of the protrusion 42 corresponds to the cross-sectional shape of the suction hole 24 and is circular.

[0066] At the front portion of the protrusion 42, a stepped surface for attaching the first resin encapsulant 60 is formed on the outer peripheral surface of the protrusion 42. The stepped surface extends along the circumferential direction of the protrusion 42. By fitting the first resin encapsulant 60 into the stepped surface, it is possible to prevent the first resin encapsulant 60 from shifting in position along the Y axis. The first resin encapsulant 60 is in close contact with the outer peripheral surface of the protrusion 42. However, a gap may be formed between the inner peripheral surface of the first resin encapsulant 60 and the outer peripheral surface of the protrusion 42.

[0067] The protrusion 42 is fitted into the suction hole 24 so as to block the suction hole 24. A minute gap 100 may inevitably be formed between the outer circumferential surface of the protrusion 42 and the inner wall surface of the suction hole 24. Therefore, the protrusion 42 alone cannot airtightly seal the suction hole 24. Therefore, in this embodiment, a first resin sealing body 60 is attached to the outer circumferential surface of the protrusion 42. The first resin sealing body 60 is attached to the front portion of the protrusion 42 (the tip portion of the shaft body 41).

[0068] When the protrusion 42 fits into the suction hole 24, the first resin sealing body 60 attached to the protrusion 42 enters the first accommodating recess 26. Therefore, the gap 100 is blocked from the internal space 23 side by the first resin sealing body 60. As a result, the internal space 23 is isolated from the space outside the housing 21 by the protrusion 42 and the first resin sealing body 60. In this way, the protrusion 42 and the first resin sealing body 60 function together as a sealing part that seals the suction hole 24.

[0069] Hereinafter, the sealing portion consisting of the protrusion 42 and the first resin sealing body 60 will be referred to as the "sealing portion 90." The shaft 40 has the sealing portion 90 that seals the suction hole 24. The sealing portion 90 seals the suction hole 24 in accordance with the elastic deformation of the elastic body 50. As shown in FIG. 3 , the elastic body 50 constantly maintains a state in which it presses the shaft body 41 rearward by its elastic force. Therefore, unless the shaft body 41 is pressed forward from outside the housing 21, the tip surface of the shaft body 41 maintains a state in which it abuts against the rear inner surface 224.

[0070] In this state, the protrusion 42 fits into the suction hole 24, maintaining a state in which the suction hole 24 is closed. Furthermore, the first resin sealing body 60 enters the first accommodating recess 26. The first resin sealing body 60 maintains a state in which the gap 100 formed between the outer peripheral surface of the protrusion 42 and the inner wall surface of the suction hole 24 is airtightly sealed. This allows the sealing portion 90 to airtightly seal the suction hole 24 (gap 100).

[0071] On the other hand, when the protrusion 42 fitted in the suction hole 24 is pressed forward from the outside of the housing 21, the elastic body 50 contracts from the state shown in FIG. 3 . As a result, the shaft body 41 moves forward, and the tip surface of the shaft body 41 moves forward away from the rear inner surface 224. As a result, the protrusion 42 moves forward inside the suction hole 24 toward the internal space 23. In addition, the first resin sealing body 60 moves forward so as to come out (be exposed) to the outside of the first accommodating recess 26.

[0072] In this state, the first resin sealing body 60 cannot hermetically seal the gap 100. Therefore, the internal space 23 communicates with the space outside the housing 21 through the gap 100. Even if part of the protrusion 42 is disposed inside the suction hole 24, the internal space 23 communicates with the space outside the housing 21 through the gap 100. Therefore, the airtight sealing of the suction hole 24 (gap 100) by the sealing portion 90 is released.

[0073] 4 , the workpiece suction unit 70 is a mechanism for suctioning and placing the workpiece 9, and is provided in the housing 21 (first portion 221 of the main body 22). The workpiece suction unit 70 is detachably attached to the main body 22, for example, by fasteners such as bolts or by adhesive. The workpiece suction unit 70 has at least one nozzle 71, a pad 72, and at least one fluid flow path 73.

[0074] The pad 72 is a mechanism for placing the workpiece 9, and is made of a resin such as polyethylene, polypropylene, polystyrene, or polyamide. The pad 72 is provided around the nozzle 71. The pad 72 has a shape suitable for placing the workpiece 9. In this embodiment, the workpiece 9 is a rectangular parallelepiped electronic component, and is placed on the upper surface of the pad 72.

[0075] The nozzle 71 is a mechanism for suctioning the workpiece 9, and is provided inside a recess 720 formed in the pad 72. The recess 720 is recessed downward from the upper surface of the pad 72. The nozzle 71 is fixed to the bottom surface of the recess 720 by a fastening member (e.g., a nut). At least a lower portion of the nozzle 71 is fitted into the fluid flow path 73. At least an upper portion of the nozzle 71 is exposed from the fluid flow path 73 and protrudes upward from the bottom of the recess 720. When the workpiece 9 comes into contact with the tip of the nozzle 71, the nozzle 71 can suction the workpiece 9.

[0076] The fluid flow path 73 penetrates the pad 72 along the Z axis and extends from the bottom surface of the recess 720 to the bottom surface of the pad 72. The fluid flow path 73 extends linearly along the Z axis, but may be curved. The fluid flow path 73 communicates with the internal space of the nozzle 71 that fits into the fluid flow path 73. The axial lower end of the fluid flow path 73 communicates with the communication space 30. Therefore, the fluid flow path 73 communicates with the communication hole 25 through the communication space 30. As described above, the communication hole 25 communicates with the internal space 23 ( FIG. 3 ), so the fluid flow path 73, the communication space 30, the communication hole 25, and the internal space 23 are in communication with each other.

[0077] 3, the opening of the communication hole 25 may be blocked by the outer circumferential surface of the shaft body 41. Even in such a case, the communication hole 25 communicates with the internal space 23 through a minute gap formed between the outer circumferential surface of the shaft body 41 and the inner circumferential surface of the guide 80. Therefore, the fluid flow path 73 (FIG. 4), the communication space 30 (FIG. 4), the communication hole 25, and the internal space 23 are always in communication with each other.

[0078] As shown in FIG. 5 , the workpiece suction unit 70 is provided with two nozzles 71 and two fluid flow paths 73. However, the number of nozzles 71 may be one or three or more. The number of fluid flow paths 73 may be one or three or more. The two fluid flow paths 73 are spaced apart along the X-axis. The two fluid flow paths 73 communicate with the communication space 30 at positions different from the communication holes 25. One fluid flow path 73, the other fluid flow path 73, and the communication holes 25 are located at positions corresponding to the three vertices of the communication space 30, which has a triangular shape in a plan view. However, the positions of the one fluid flow path 73, the other fluid flow path 73, and the communication holes 25 are not particularly limited, and the communication holes 25 may be located directly below either of the two fluid flow paths 73.

[0079] As shown in FIG. 2A , the pushing member 11 is separate from the suction jig 20 and is configured to be attachable to the suction jig 20. The pushing member 11 is a mechanism for pushing the sealing portion 90 ( FIG. 3 ) toward the internal space 23 from the outside of the main body 22. As shown in FIG. 3 , the pushing member 11 has a cylindrical body 12 and a cover portion 13. The cylindrical body 12 is configured as a member having a cylindrical shape with a bottom. The material of the cylindrical body 12 is not particularly limited, but is, for example, a metal such as stainless steel, aluminum, steel, or cast iron. The cylindrical body 12 is configured to be connectable directly or indirectly to a suction source 17 ( FIG. 2A ).

[0080] The cylindrical body 12 has a fluid flow path 120 and a hole 121. The fluid flow path 120 extends linearly along the axial direction of the cylindrical body 12. The fluid flow path 120 extends from the rear end of the cylindrical body 12 toward the front along the axial direction of the cylindrical body 12. The fluid flow path 120 does not pass through the cylindrical body 12 in the axial direction, and the front end of the fluid flow path 120 is closed. The shape of the tip of the cylindrical body 12 is, for example, a cylindrical shape, which allows the cylindrical body 12 to enter the suction hole 24. The diameter of the tip of the cylindrical body 12 is equal to the diameter of the protrusion 42, but may be smaller.

[0081] The hole 121 is formed at the axial end of the cylindrical body 12. The hole 121 is located at the front end of the cylindrical body 12 and penetrates the cylindrical body 12 along the radial direction of the cylindrical body 12. The hole 121 is in communication with the fluid flow path 120. Therefore, gas can flow from the outside of the cylindrical body 12 to the fluid flow path 120 through the hole 121. In addition, gas can flow from the fluid flow path 120 to the outside of the cylindrical body 12 through the hole 121.

[0082] The cover portion 13 is a cylindrical member and is made of an elastic material such as rubber or elastomer. The cover portion 13 is, for example, a vacuum pad. At least a portion of the cover portion 13 has a bellows shape. Therefore, the cover portion 13 can be easily compressed or expanded along the Y axis. A portion (mainly the rear portion) of the cover portion 13 is attached to the outer surface of the cylindrical body 12 so as to be in close contact with the outer surface of the cylindrical body 12. A portion (mainly the front portion) of the cover portion 13 is spaced from the outer surface of the cylindrical body 12. Therefore, a sealed space 130 is formed between the cover portion 13 and the outer surface of the cylindrical body 12. The cover portion 13 covers the hole portion 121 from the outside of the cylindrical body 12. The front end of the cover portion 13 protrudes further forward than the front end of the cylindrical body 12.

[0083] When the cover part 13 is pressed toward the rear end surface 226 of the main body 22 (the end surface of the rear wall part of the main body 22), the tip end of the cover part 13 comes into tight contact with the rear end surface 226. As a result, the sealed space 130 becomes a closed space surrounded by the cover part 13, the rear end surface 226, and the outer surface of the cylindrical body 12. In this state, no minute gap is formed between the tip end of the cover part 13 and the rear end surface 226. Therefore, it is possible to prevent gas from flowing into the sealed space 130 through a minute gap.

[0084] When the cylindrical body 12 pushes the sealing portion 90 (protrusion 42) forward toward the internal space 23 from the outside of the main body 22, the sealing portion 90 moves forward toward the internal space 23. As a result, the first resin sealing body 60 moves forward so as to protrude (be exposed) outside the first accommodating recess 26. As a result, the internal space 23, the sealed space 130, and the fluid flow path 120 communicate with each other through a gap 100 formed between the outer peripheral surface of the protrusion 42 and the inner wall surface of the suction hole 24. In this state, the suction source 17 ( FIG. 2A ) is operated to suck gas from the internal space 23.

[0085] As described above, unless an external force is applied to the sealing portion 90 from the outside of the main body 22 toward the front, the protrusion 42 is always fitted into the suction hole 24, and the first resin sealing body 60 is always accommodated in the first accommodating recess 26. Therefore, the sealing portion 90 maintains a state in which the suction hole 24 is sealed. In order to release the sealing of the suction hole 24 by the sealing portion 90, it is necessary to push the sealing portion 90 toward the internal space 23 through the suction hole 24 from the outside of the main body 22. As a means for achieving this, the pushing member 11 is provided in the suction device 10.

[0086] As shown in Fig. 2A, the connecting portion 14 is connected to the rear end of the pushing member 11 (cylindrical body 12). In addition to the cylindrical body 12, a communicating tube 15 is connected to the connecting portion 14 by a connector 16. The communicating tube 15 is a tube through which gas can flow. A fluid flow path is formed inside the connecting portion 14, and the cylindrical body 12 is in communication with the communicating tube 15 through the fluid flow path.

[0087] The suction source 17 is connected to one end of the communicating tube 15. The suction source 17 is a pump that has a function of sucking gas. The suction source 17 is also a negative pressure generating source that creates a negative pressure in the internal space 23. The suction source 17 may be a pump that has not only a gas sucking function but also a gas discharging function. When the internal space 23 ( FIG. 3 ), the suction hole 24 ( FIG. 3 ), the gap 100 ( FIG. 3 ), the fluid flow path 120 ( FIG. 3 ), and the communicating tube 15 are in communication with each other, the suction source 17 operates to suck gas from the internal space 23, and the internal space 23 becomes negative pressure.

[0088] The drive unit 18 can be, for example, an air cylinder or a hydraulic cylinder, as appropriate, and drives the connecting unit 14 forward or backward. The drive unit 18 has a fixed unit 180 and a movable unit 181. The movable unit 181 is connected to the fixed unit 180 via, for example, a rod. When the rod moves forward or backward, the movable unit 181 moves forward or backward in conjunction with the movement of the rod. This allows the connecting unit 14, which is connected to the movable unit 181, to move forward or backward.

[0089] When the connecting portion 14 moves forward, the pushing member 11 moves forward in conjunction with this. As a result, the cylindrical body 12 shown in Fig. 3 comes into contact with the tip of the protrusion 42, and can push the sealing portion 90 forward from outside the main body 22. When the connecting portion 14 shown in Fig. 2A moves rearward, the pushing member 11 moves rearward in conjunction with this. As a result, the cylindrical body 12 shown in Fig. 3 moves away from the tip of the protrusion 42, and the pushing of the sealing portion 90 forward by the cylindrical body 12 can be released.

[0090] Next, the operation of the suction device 10 will be described with reference to Figures 6A to 6F. In Figures 6A to 6F, in order to avoid cluttering the drawings, some components disposed between the pushing member 11 and the suction source 17 are omitted or simplified. First, the operation of the suction device 10 when the nozzle 71 starts to suction the workpiece 9 will be described. The state shown in Figure 6A is the state before the suction source 17 starts suction, and the internal space 23 is not under negative pressure but is at normal pressure (atmospheric pressure). Therefore, although the workpiece 9 is placed on the pad 72, the nozzle 71 is not suctioning the workpiece 9.

[0091] Furthermore, the elastic body 50 is compressed from its natural length and is about to expand rearward, so that the elastic force of the elastic body 50 acts on the shaft 40. As a result, the shaft 40 is pressed toward the outside (rearward) of the housing 21 by the elastic body 50 until the tip end face of the shaft main body 41 abuts against the rear inner surface 224 of the main body 22.

[0092] In this state, unless a force (a force directed toward the front of the housing 21) resisting the elastic force of the elastic body 50 acts on the shaft 40, the sealing portion 90 maintains a state in which it seals the suction hole 24. That is, the protrusion 42 enters the suction hole 24 and maintains a state in which it blocks the suction hole 24. Furthermore, the first resin sealing body 60 enters the first accommodating recess 26. Furthermore, the first resin sealing body 60 maintains a state in which it seals the minute gap 100 formed between the outer peripheral surface of the protrusion 42 and the inner wall surface of the suction hole 24.

[0093] Here, when the driving unit 18 shown in FIG. 2A drives the pushing member 11 forward, the pushing member 11 moves forward toward the housing 21, as shown in FIG. 6B. The pushing member 11 (cylinder 12) then presses the sealing portion 90 (protrusion 42) forward. FIG. 6B shows the state immediately before or after the cylinder 12 presses the protrusion 42 forward. Therefore, the tip of the cylinder 12 abuts against the tip of the protrusion 42 exposed from the suction hole 24. Furthermore, the tip of the cover 13 abuts against the rear end surface 226 of the main body 22. As a result, the sealed space 130 is a closed space surrounded by the cover 13, the rear end surface 226, and the outer surface of the cylinder 12.

[0094] As shown in FIG. 6C , when the cylindrical body 12 moves further forward toward the housing 21, the cover portion 13 is compressed forward and presses the rear end surface 226 with greater force. This causes the cover portion 13 to tightly contact the rear end surface 226, sealing the sealed space 130 with a higher degree of tightness. Furthermore, the elastic body 50 contracts forward, causing the shaft 40 to move forward. More specifically, the shaft 40 moves forward to a position where the force F1 with which the cylindrical body 12 presses the protrusion 42 balances with the elastic force F2 of the elastic body 50. As a result, the tip of the cylindrical body 12 enters the interior of the suction hole 24. The protrusion 42 then moves inside the suction hole 24 to a position (internal space 23) further forward than the position shown in FIG. 6B .

[0095] 6B. As a result, the first resin encapsulant 60 moves to the outside of the first accommodating recess 26 and is exposed (separated) from the first accommodating recess 26. In this state, the first resin encapsulant 60 cannot hermetically seal the gap 100. Therefore, the internal space 23 communicates with the sealed space 130 through the gap 100.

[0096] As a result, the fluid flow path 120 of the cylindrical body 12, the hole 121, the sealed space 130, the gap 100 (suction hole 24), the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73 of the workpiece suction unit 70, and the nozzle 71 are all in communication with each other. In this state, when the suction source 17 is operated and suction is initiated, gas present in the fluid flow path 120, the hole 121, the sealed space 130, the gap 100, the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73, and the nozzle 71 is sucked in, and the internal space 23 becomes negative pressure. This allows the nozzle 71 to suction the workpiece 9 placed on the pad 72.

[0097] 2A drives the pushing member 11 rearward, the pushing member 11 moves rearward so as to move away from the housing 21. Accordingly, the elastic body 50 stretches rearward, as shown in FIG. 6D . Therefore, the shaft 40 is pressed toward the outside (rearward) of the housing 21 by the elastic body 50. The shaft 40 then moves rearward until the tip end surface of the shaft main body 41 abuts against the rear inner surface 224 of the main body 22.

[0098] As the shaft 40 moves rearward, the sealing portion 90 moves rearward in the housing 21. The sealing portion 90 then again maintains the state of sealing the suction hole 24. That is, the protrusion 42 enters the suction hole 24 and maintains the state of blocking the suction hole 24. Furthermore, the first resin sealing body 60 enters the first accommodating recess 26 and maintains the state of sealing the gap 100.

[0099] In this state, the first resin sealing body 60 seals the gap 100, so the internal space 23 is isolated from the space outside the housing 21. Therefore, the internal space 23 remains sealed, and the negative pressure in the internal space 23 is maintained even if the suction source 17 does not perform suction. Therefore, the nozzle 71 can continue to suck the workpiece 9 even if the suction source 17 does not perform suction. In this way, in the suction device 10 of this embodiment, once the internal space 23 becomes negative pressure, the nozzle 71 can maintain the state of sucking the workpiece 9 even if the suction source 17 stops suctioning.

[0100] In the state shown in FIG. 6D , the tip of the cylindrical body 12 abuts against the tip of the protrusion 42 exposed from the suction hole 24. The tip of the cover part 13 abuts against the rear end surface 226. When the drive unit 18 shown in FIG. 2A drives the pushing member 11 further rearward, the tip of the cylindrical body 12 moves away from the protrusion 42, and the tip of the cover part 13 moves away from the rear end surface 226 of the main body 22, as shown in FIG. 6E . Even when the pushing member 11 is completely separated from the suction jig 20 (housing 21) and the physical connection between the suction jig 20 and the suction source 17 is severed, the negative pressure in the internal space 23 is maintained. Therefore, the nozzle 71 can maintain the state of suctioning the workpiece 9.

[0101] Next, the operation of the suction device 10 when the nozzle 71 finishes suctioning the workpiece 9 will be described. As shown in Fig. 6F, when the nozzle 71 finishes suctioning the workpiece 9, the cover portion 13 is detached from the pushing member 11. When the driving portion 18 shown in Fig. 2A drives the pushing member 11 forward from the position shown in Fig. 6E, the pushing member 11 moves forward toward the housing 21 as shown in Fig. 6F.

[0102] When the cylindrical body 12 abuts against the protrusion 42 and presses the protrusion 42 forward, the elastic body 50 contracts forward. As a result, the shaft 40 moves forward. More specifically, the shaft 40 moves forward to a position where the force F1 with which the cylindrical body 12 presses against the protrusion 42 balances with the elastic force F2 of the elastic body 50. As a result, the tip of the cylindrical body 12 enters the inside of the suction hole 24. The protrusion 42 then moves inside the suction hole 24 to a position further forward than the position shown in FIG. 6E.

[0103] 6E . As a result, the first resin encapsulant 60 moves together with the protrusion 42 to a position further forward than the position shown in FIG. 6E . As a result, the first resin encapsulant 60 moves out of the first accommodating recess 26 and is exposed (separated) from the first accommodating recess 26. In this state, the first resin encapsulant 60 cannot airtightly seal the gap 100. Furthermore, the push-in member 11 is not provided with a cover 13, and a sealed space 130 ( FIG. 6C ) is not formed around the suction hole 24. Therefore, the internal space 23 communicates with the space outside the housing 21 through the gap 100.

[0104] As a result, the space outside the housing 21, the gap 100, the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73, and the nozzle 71 are in communication with each other. Therefore, gas flows from the space outside the housing 21 into the internal space 23 through the gap 100, and the gas fills the gap 100, the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73, and the nozzle 71. This releases the negative pressure in the internal space 23, and the nozzle 71 can finish suctioning the workpiece 9.

[0105] As described above, in this embodiment, in the suction jig 20 shown in FIG. 6C , in which the internal space 23 is not under negative pressure, the pushing member 11 (cylindrical body 12) is connected to the suction hole 24. When the pushing member 11 pushes the sealing portion 90 toward the internal space 23, the suction source 17 is activated, and the nozzle 71 begins suctioning the workpiece 9. After the nozzle 71 begins suctioning the workpiece 9, the connection between the pushing member 11 and the suction hole 24 is subsequently released, as shown in FIGS. 6D and 6E . Thereafter, the nozzle 71 maintains its state of suctioning the workpiece 9. In the conveyance device 1 shown in FIG. 1 , the pushing member 11 is connected to the suction hole 24, and the position where the nozzle 71 begins suctioning the workpiece 9, i.e., the suction start portion 3a, is predetermined. In other words, the suction start portion 3a is a position for directly or indirectly connecting the internal space 23 to the suction source 17 via the suction hole 24.

[0106] As shown in FIG. 1 , when the pallet 5 carrying the suction jig 20 reaches the suction start section 3a, the pusher 11 connects to the suction hole 24 as shown in FIGS. 6A to 6C . Then, when the pusher 11 pushes the sealing portion 90 toward the internal space 23 a predetermined distance (e.g., the predetermined distance D is 0<D≦3 mm), the suction source 17 is activated, and the nozzle 71 begins suctioning the workpiece 9. After the nozzle 71 begins suctioning the workpiece 9, the connection between the pusher 11 and the suction hole 24 is released as shown in FIGS. 6D and 6E . Then, as shown in FIG. 1 , the pallet 5 is transported downstream on the transport line 3. The suction device 10 repeats this process each time the pallet 5 reaches the suction start section 3a.

[0107] The suction source 17 may be activated before the pushing member 11 pushes the sealing portion 90 toward the internal space 23. Alternatively, the suction source 17 may be activated when the workpiece 9 is placed on the workpiece suction portion 70, or before or after the workpiece 9 is placed on the workpiece suction portion 70.

[0108] 6F , in this embodiment, in the suction jig 20 in which the internal space 23 is under negative pressure, the pushing member 11 (cylindrical body 12) is connected to the suction hole 24. When the pushing member 11 pushes the sealing portion 90 toward the internal space 23, the internal space 23 communicates with the space outside the housing 21, and the nozzle 71 stops suctioning the workpiece 9. In the conveyance device 1 shown in FIG. 1 , the pushing member 11 is connected to the suction hole 24, and a position where the nozzle 71 stops suctioning the workpiece 9, i.e., a suction end portion 3b, is predetermined. In other words, the suction end portion 3b is a position for connecting the internal space 23 to the space outside the housing 21 via the suction hole 24. The suction start portion 3a is provided upstream of the suction end portion 3b on the conveyance line 3.

[0109] 1, when the pallet 5 carrying the suction jig 20 reaches the suction end section 3b, the pushing member 11 connects to the suction hole 24. As shown in FIG. 6F, when the pushing member 11 pushes the sealing portion 90 a predetermined distance toward the internal space 23, the internal space 23 communicates with the space outside the housing 21, and the nozzle 71 finishes suctioning the workpiece 9. When the nozzle 71 finishes suctioning the workpiece 9, the connection between the pushing member 11 and the suction hole 24 is released, and the pallet 5 is transported downstream on the transport line 3. The suction device 10 repeats this process each time the pallet 5 reaches the suction end section 3b.

[0110] A negative pressure is maintained in the internal space 23 of the suction jig 20 between the suction start portion 3 a and the suction end portion 3 b. In this way, once the nozzle 71 starts suctioning the workpiece 9 at the suction start portion 3 a, the nozzle 71 can maintain the state of suctioning the workpiece 9 until the nozzle 71 finishes suctioning the workpiece 9 at the suction end portion 3 b, even if there is no physical connection between the suction source 17 ( FIG. 2A ) and the suction jig 20.

[0111] As described above, in this embodiment, as shown in Fig. 1, the suction source 17 (Fig. 2A) is simply connected to the suction jig 20 transported to the suction start section 3a by the pallet 5. After the pallet 5 passes the suction start section 3a, there is no need to connect the suction source 17 (Fig. 2A) to the suction jig 20 mounted on the pallet 5. In addition, there is no need to connect multiple suction sources 17 to each of the multiple suction jigs 20. This allows for a simplified configuration of the transport device 1.

[0112] 3, the sealing portion 90 seals the suction hole 24 in response to the elastic deformation of the elastic body 50. Therefore, it is not necessary to provide the suction jig 20 with a drive source for driving the sealing portion 90 to seal the suction hole 24. This simplifies the mechanism by which the sealing portion 90 seals the suction hole 24, and allows the suction jig 20 to be made smaller and more space-saving.

[0113] Furthermore, even if the suction source 17 ( FIG. 2A ) does not continue to suck the gas from the internal space 23, the nozzle 71 can maintain the state of suctioning the workpiece 9. Therefore, as shown in FIG. 1 , the suction source 17 can be stopped while the pallet 5 is transporting the workpiece 9 (particularly between the suction start section 3 a and the suction end section 3 b). This prevents problems such as increased power consumption and noise, and provides energy-saving and noise-reducing effects. Furthermore, as shown in FIG. 6E , even if the suction device 10 is not physically connected to the suction source 17, the nozzle 71 can maintain the state of suctioning the workpiece 9. Therefore, the transport device 10 can be made smaller and more space-saving.

[0114] 3 , the shaft 40 has a shaft body 41, and the sealing portion 90 has a protrusion 42 that protrudes from the tip of the shaft body 41 and fits into the suction hole 24. Therefore, the sealing portion 90 can seal the suction hole 24 depending on the fit of the protrusion 42 with the suction hole 24. This simplifies the mechanism by which the sealing portion 90 seals the suction hole 24, and the suction jig 20 can be made smaller and more space-saving.

[0115] Furthermore, the sealing portion 90 has a first resin sealing body 60 provided around the protrusion 42. Therefore, when the protrusion 42 is fitted into the suction hole 24, the first resin sealing body 60 is disposed around the suction hole 24 so as to fill the gap 100 between the outer peripheral surface of the protrusion 42 and the inner wall surface of the suction hole 24. This allows the sealing portion 90 to airtightly seal the suction hole 24.

[0116] The workpiece suction unit 70 also has a nozzle 71 that suctions the workpiece 9, and a pad 72 that is provided around the nozzle 71 and on which the workpiece 9 is placed. When the workpiece 9 is placed on the pad 72, the nozzle 71 suctions the workpiece 9, thereby making it possible to hold the workpiece 9 in a stable state.

[0117] The pushing member 11 also has a cylindrical body 12 connectable to a suction source 17 (FIG. 2A) and a hole 121 formed at the axial end of the cylindrical body 12. When the cylindrical body 12 pushes the sealing portion 90 toward the internal space 23, the internal space 23 communicates with the pushing member 11 through the gap 100 (suction hole 24). In this state, by operating the suction source 17 (FIG. 2A), gas in the internal space 23 can be sucked through the hole 121.

[0118] Furthermore, the pushing member 11 has a cover portion 13 attached to the outer surface of the cylindrical body 12, and the cover portion 13 is configured to cover the suction hole 24 from the outside of the cylindrical body 12. As shown in FIG. 6C , when the cylindrical body 12 pushes the sealing portion 90 toward the internal space 23, the cover portion 13 abuts against the periphery (rear end surface 226) of the suction hole 24 from the outside of the main body 22. Therefore, the suction hole 24 is covered by the cover portion 13 from the outside of the main body 22. This isolates the sealed space 130 from the space outside the cover portion 13, and the suction source 17 ( FIG. 2A ) can efficiently suck gas from the internal space 23 through the suction hole 24.

[0119] Second Embodiment A transport device 1A of a second embodiment shown in Figure 7 has the same configuration as the transport device 1 of the first embodiment, except for the following points. Parts that overlap with those of the transport device 1 are given the same reference numerals, and detailed descriptions thereof will be omitted. Note that in Figure 7 and other figures, the connecting unit 14, suction source 17, drive unit 18, etc. shown in Figure 2A are not shown.

[0120] As shown in Fig. 7, the conveying device 1A has a suction device 10A. The conveying device 1A conveys workpieces 9 from the upstream side to the downstream side of the conveying line 3 with a pallet 5 on which the suction device 10A is mounted suspended from a belt 7. The pallet 5 is connected to the belt 7 by a fastener such as a locking member (see locking portion 51 in Fig. 2A) or a bolt. The configuration of the support base 2, rollers 6a, rollers 6b, and belt 7 is an example and is not limited to the configuration shown in Fig. 7.

[0121] As shown in FIG. 8A , the suction device 10A includes a suction jig 20A, a workpiece suction section 70A, a communicating pipe 31, connectors 32a and 32b, a connecting jig 33, and a nut 34. The suction jig 20A includes a housing 21A. In the housing 21A, a first portion 221 having a cylindrical shape with a bottom and a second portion 222A having a lid shape are arranged one above the other. The first portion 221 is located above the second portion 222A. As shown in FIG. 9A , the second portion 222A includes a through-hole 227. The through-hole 227 penetrates the second portion 222A along the Z-axis.

[0122] The communicating tube 31 is a resin tube made of, for example, urethane, but may also be a metal tube. One end of the communicating tube 31 is connected to the through hole 227 via a connector 32a. The connector 32a is fitted into the through hole 227. One end of the communicating tube 31 may also be fitted directly into the through hole 227 without using the connector 32a. The internal space 23 of the main body 22A is in communication with the communicating tube 31 via the connector 32a.

[0123] 8A , the connecting jig 33 is attached to the outer surface of the main body 22A and connects the main body 22A and the workpiece suction unit 70A. The connecting jig 33 has an L-shaped bent shape. The workpiece suction unit 70A is fixed to the connecting jig 33 so that it is suspended from the connecting jig 33.

[0124] The nozzle 71 is fixed to the connecting jig 33 by a nut 34. However, the means for fixing the nozzle 71 to the connecting jig 33 is not limited to the nut 34, and other fastening members may be used.

[0125] The other end of the communicating pipe 31 is connected to the nozzle 71 via a connector 32b. The communicating pipe 31 may be connected directly to the nozzle 71 without using the connector 32b. Alternatively, the nozzle 71 and the communicating pipe 31 may be integrated. The internal space of the nozzle 71 is in communication with the communicating pipe 31 via the connector 32b.

[0126] The workpiece suction portion 70A has a pad 72A. The pad 72A is made of, for example, rubber and is attached to the tip (lower end) of the nozzle 71. The pad 72A has a through-hole that penetrates the pad 72A along the Z axis. The through-hole of the pad 72A is connected to the internal space of the nozzle 71. The nozzle 71 suctions the workpiece 9 so that the workpiece 9 abuts against the pad 72A. This prevents gas from flowing into the nozzle 71 through a minute gap that may be formed between the nozzle 71 and the workpiece 9.

[0127] In this embodiment, the suction jig 20A operates in the same manner as the suction jig 20 of the first embodiment described with reference to Figures 6A to 6F. That is, when the pushing member 11 (cylindrical body 12) shown in Figure 9A presses the sealing portion 90 (protrusion 42) downward, the first resin sealing body 60 is exposed to the outside (bottom) of the first accommodating recess 26, as shown in Figure 9B. As a result, the fluid flow path 120 of the cylindrical body 12, the hole 121, the sealing space 130, the gap 100 (suction hole 24), the internal space 23, the through-hole 227 (connector 32a), the communicating tube 31, the nozzle 71, and the interior of the pad 72A are communicated with each other through the gap 100 between the outer circumferential surface of the protrusion 42 and the inner wall surface of the suction hole 24. In this state, when the suction source starts suction, the gas inside the fluid flow path 120, the hole 121, the sealed space 130, the gap 100, the internal space 23, the through-hole 227, the communicating pipe 31, the nozzle 71, and the pad 72A is sucked in by the suction source. As a result, the internal space 23 becomes negative pressure, and the nozzle 71 can suck the workpiece 9.

[0128] As shown in Fig. 8B , when the pushing member 11 moves upward away from the housing 21 and the physical connection between the pushing member 11 and the suction hole 24 is released, the pushing member 11 releases the downward pressure on the sealing portion 90. As a result, as shown in Fig. 9A , the elastic force of the elastic body 50 moves the shaft 40 upward, and the sealing portion 90 seals the gap 100 (suction hole 24) again. Therefore, even if the suction source does not perform suction, the negative pressure in the internal space 23 is maintained, and the nozzle 71 can continue to adsorb the workpiece 9.

[0129] In this way, also in this embodiment, the nozzle 71 can maintain the state in which it has sucked the workpiece 9, even if the suction source does not continue to suck the gas in the internal space 23. Therefore, as shown in Figure 7, the suction source can be stopped while the pallet 5 is transporting the workpiece 9 (particularly between the suction start section 3a and the suction end section 3b), preventing problems such as increased power consumption and noise.

[0130] The present invention is not limited to the above-described embodiment, and various modifications can be made within the scope of the present invention.

[0131] 3, in each of the above-described embodiments, the sealing portion 90 is composed of the protrusion 42 formed integrally with the shaft body 41 and the first resin sealing body 60 provided around the protrusion 42. However, the sealing portion 90 may be composed of a protrusion formed separately from the shaft body 41 and the first resin sealing body 60 provided around the protrusion.

[0132] Furthermore, the sealing portion 90 may be formed of a resin molding having the same shape as the protrusion 42. Furthermore, the first resin sealing body 60 may be integrated with this resin molding. That is, the sealing portion 90 may be formed of a single resin molding that can seal the suction hole 24.

[0133] In each of the above embodiments, as shown in FIG. 6F , when the internal space 23 communicates with the space outside the housing 21 through the gap 100, gas flows from the space outside the housing 21 into the internal space 23, thereby releasing the negative pressure in the internal space 23. However, the method for releasing the negative pressure in the internal space 23 is not limited to this. For example, as shown in FIG. 6C , the negative pressure in the internal space 23 may be released by connecting the pushing member 11 to the suction hole 24 and sending gas from the suction source 17 into the internal space 23 through the fluid flow path 120 of the cylindrical body 12, the hole portion 121, the sealed space 130, the gap 100 (suction hole 24), the internal space 23, the communication hole 25, the fluid flow path 73 of the workpiece suction portion 70, and the nozzle 71.

[0134] In each of the above embodiments, as shown in Fig. 6F, the cover part 13 is removed from the pushing member 11 when the nozzle 71 finishes suctioning the workpiece 9. However, the cover part 13 may remain attached to the pushing member 11 as long as a measure is taken to ensure communication between the external space of the housing 21 and the internal space 23 through the gap 100.

[0135] In the above-described embodiments, the pushing members 11 are disposed only at the suction start portion 3 a and the suction end portion 3 b, as shown in Fig. 1. However, at least one pushing member 11 may be disposed at any position between the suction start portion 3 a and the suction end portion 3 b in addition to these positions.

[0136] In each of the above embodiments, as shown in Fig. 3 , the sealing portion 90 seals the suction hole 24 (gap 100) by fitting the protrusion 42 into the suction hole 24. However, the sealing portion 90 may seal the suction hole 24 by covering the opening of the suction hole 24 from the internal space 23 side. In this case, the sealing portion 90 may have a cover (a plate-shaped or dome-shaped cover) that can cover the opening of the suction hole 24.

[0137] In each of the above-described embodiments, as shown in Fig. 6C, when the pushing member 11 is connected to the suction hole 24, the hole 121 is located outside (rearward of) the suction hole 24. However, the hole 121 may extend into the suction hole 24 (or the internal space 23).

[0138] 8A may be attached to the tip of the nozzle 71 shown in Fig. 4. In this case, it is possible to prevent gas from flowing into the nozzle 71 through a minute gap that may be formed between the nozzle 71 and the workpiece 9.

[0139] In the conveyor line 3 shown in FIG. 1, the belt 7 may be configured to be rotatable clockwise or counterclockwise along a horizontal plane.

[0140] DESCRIPTION OF SYMBOLS 1, 1A...Transportation device 2...Support base 2a...Leg 2b...Base 3...Transportation line 3a...Suction start portion 3b...Suction end portion 4...Transportation rail 5...Pallet 50...Pallet body 51...Latching portion 6a...Upstream roller 6b...Downstream roller 7...Belt 9...Workpiece 10, 10A...Suction device 11...Pushing member 12...Cylinder 120...Fluid flow path 121...Hole portion 13...Cover portion 130...Sealed space 14...Connecting portion 15...Communicating pipe 16...Connector 17...Suction source 18...Drive portion 180...Fixed portion 181...Movable portion 20, 20A...Suction jig 21, 21A...Housing 22, 22A...Body 221...First portion 222, 222A...Second portion 223...Upper surface 224...Rear inner surface 225...Front end surface 226...Rear end surface 227...Through hole 23...Internal space 24...Suction hole 25...Communicating hole 26...First accommodating recess 27...Second accommodating recess 28...Third accommodating recess 29...Recess 30...Communicating space 31...Communicating pipe 32a, 32b...Connector 33...Connecting jig 34...Nut 40...Shaft 41...Shaft main body 42...Convex portion 43...Shaft recess 50...Elastic body 60...First resin sealing body 62...Second resin sealing body 64...Third resin sealing body 70, 70A...Workpiece suction portion 71...Nozzle 72, 72A...Pad 720...Recess 73...Fluid flow path 80...Guide 90...Sealing portion 100...Gap

Claims

1. A housing having a main body with an internal space, a suction hole penetrating the main body and communicating with the internal space, and a communication hole penetrating the main body and communicating with the internal space; a work suction part attached to the main body and having a fluid flow path communicating with the communication hole; a shaft provided in the internal space; and an elastic body provided in the internal space and holding the shaft so as to press the shaft toward the suction hole, wherein the shaft is a suction jig having a sealing part for sealing the suction hole.

2. The suction jig according to claim 1, wherein the sealing part seals the suction hole in response to elastic deformation of the elastic body.

3. The shaft has a columnar shaft body, and the sealing part according to claim 1 or 2 has a convex part protruding from the tip of the shaft body and fitting into the suction hole.

4. The suction jig according to claim 3, wherein the sealing part has a resin sealing body provided around the convex part.

5. The resin sealing body according to claim 4 is configured to be able to seal a gap between the outer peripheral surface of the convex part fitting into the suction hole and the inner wall surface of the suction hole from the inside of the main body.

6. The main body has a housing recess formed on the inner wall surface of the main body and extending along the opening edge of the suction hole, and the resin sealing body according to claim 4 is configured to be able to be housed in the housing recess.

7. The work suction part according to claim 1 or 2 has a nozzle for sucking a work and a pad provided around the nozzle for arranging the work.

8. A suction device having the suction jig according to any one of claims 1 to 7 and a pushing member for pushing the sealing part for sealing the suction hole into the internal space from the outside of the main body.

9. The suction device according to claim 8, wherein the pushing member has a cylindrical body connectable to a suction source and a hole formed at an axial end of the cylindrical body.

10. When the cylindrical body pushes the sealing part for sealing the suction hole into the internal space, the suction source, the inside of the cylindrical body, the suction hole, the internal space, the communication hole, and the fluid flow path communicate with each other. The suction device according to claim 9.

11. The pushing member has a cylindrical cover part attached to the outer surface of the cylindrical body, and the cover part is configured to cover the suction hole. The suction device according to claim 8.

12. The adsorption device according to any one of claims 8 to 11, a pallet on which the adsorption jig is mounted, and a transport line for transporting the pallet. A transport device having the above.

13. The transport line has an adsorption start portion for connecting the internal space to a suction source through the suction hole, and an adsorption end portion for connecting the internal space to the outside of the housing through the suction hole. The adsorption start portion is provided on the upstream side of the transport line with respect to the adsorption end portion. The transport device according to claim 12.

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