Electrostatic chuck power circuit current detection apparatus and semiconductor process device

Abstract

The present application discloses an electrostatic chuck power circuit current detection apparatus, and a semiconductor process device. The apparatus comprises: a sampling resistor (R), the sampling resistor (R) being connected in series to an output end of an electrostatic chuck power supply (10); an operational amplifier (12), a positive input end of the operational amplifier (12) being connected to an input end of the sampling resistor (R), a negative input end of the operational amplifier (12) being connected to an output end of the sampling resistor (R), a reference potential end of the operational amplifier (R) being used to input a first reference voltage (VDD1-), an absolute voltage difference between the first reference voltage (VDD1-) and an output voltage (HV+) of the output end of the electrostatic chuck power supply (10) being less than a withstand voltage difference of the operational amplifier (12), a power supply end of the operational amplifier (12) being used to input a first supply voltage (VDD1+), the first supply voltage (VDD1+) being higher than the first reference voltage (VDD1-) by a preset first voltage value, and an output end of the operational amplifier (12) being used to output a voltage signal proportional to a circuit current. The present application uses a non-high-voltage isolated ordinary operational amplifier, which reduces costs and improves the accuracy of current detection.

Description

Electrostatic chuck power supply circuit current detection device and semiconductor process equipment Technical Field

[0001] The present application belongs to the field of semiconductor technology, and in particular relates to a device for detecting current in an electrostatic chuck power supply loop and semiconductor process equipment. Background Art

[0002] A chuck is a support platform located within the processing chamber of semiconductor processing equipment, used to secure and support the wafer being processed or the tray containing the wafer. An electrostatic chuck (ESC) utilizes the principle of electrostatic adsorption to secure the wafer or tray. The ESC's base contains embedded chuck electrodes, which are supplied with high-voltage DC power by the ESC power supply. This generates an electrostatic force between the chuck and the wafer, securing the wafer or tray to the chuck.

[0003] To better understand the operating status of semiconductor process equipment and protect equipment and personnel, it is necessary to accurately detect the ESC power supply circuit current and design necessary short-circuit protection circuits. ESC power supplies have the characteristics of outputting high voltage and low current, which brings certain difficulties to current detection.

[0004] In the related art, the detection scheme of the ESC power supply loop current is shown in FIG1 . A sampling resistor R is connected in series to the output end of the electrostatic chuck power supply 010 . The current signal flowing through the sampling resistor R is converted into a voltage signal, and the voltage signal is amplified by the operational amplifier 012 . + 、IN - ) to ground (GND) voltage HV + 、HV + -U (U is generally less than 10V) are all DC high voltage (generally one thousand to tens of thousands of volts), and the reference potential terminal of the operational amplifier 012 is grounded (GND), so the input terminal (IN + 、IN - ) There is a voltage difference of one thousand to tens of thousands of volts between the reference potential terminal. To ensure the withstand voltage requirement of the operational amplifier 012, the operational amplifier 012 needs to use a high-voltage isolated operational amplifier, that is, the input and output terminals of the operational amplifier 012 are isolated, and the isolation voltage Uiso ≥ the voltage HV output from the ESC power supply to the load + Output. By detecting the voltage at the output of operational amplifier 012 and using the amplification ratio, the current in the ESC power supply circuit can be calculated. However, high-voltage isolated operational amplifiers are expensive and have limited isolation voltages. When the voltage at the output of the electrostatic chuck power supply is too high, the current detection accuracy is poor. Summary of the Invention

[0005] The purpose of the embodiments of the present application is to provide a device for detecting the loop current of an electrostatic chuck power supply and semiconductor process equipment, so as to solve the problems in the related art that the high-voltage isolated operational amplifier is expensive and the isolation voltage is limited, and when the voltage at the output end of the electrostatic chuck power supply is too large, the current detection accuracy is poor.

[0006] To achieve the above objectives, the present invention adopts the following technical solutions:

[0007] In a first aspect, an embodiment of the present application provides a device for detecting the loop current of an electrostatic chuck power supply, comprising: a sampling resistor, the sampling resistor being connected in series to the output end of the electrostatic chuck power supply; an operational amplifier, the positive input end of the operational amplifier being connected to the input end of the sampling resistor, the negative input end of the operational amplifier being connected to the output end of the sampling resistor, the reference potential end of the operational amplifier being used to input a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output end of the electrostatic chuck power supply being less than the withstand voltage difference of the operational amplifier, the power supply end of the operational amplifier being used to input a first power supply voltage, the first power supply voltage being higher than the first reference voltage by a preset first voltage value, and the output end of the operational amplifier being used to output a voltage signal proportional to the loop current.

[0008] In a second aspect, an embodiment of the present application provides a semiconductor process equipment, comprising: an electrostatic chuck, an electrostatic chuck power supply, and a detection device for the electrostatic chuck power supply loop current as described in the first aspect of the present application.

[0009] At least one of the above technical solutions adopted in the embodiments of the present application can achieve the following beneficial effects:

[0010] In an embodiment of the present application, a reference potential terminal of the operational amplifier is used to input a first reference voltage, and the absolute voltage difference between the first reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the withstand voltage difference of the operational amplifier. The power supply terminal of the operational amplifier is used to input a first supply voltage, and the first supply voltage is higher than the first reference voltage by a predetermined first voltage value. By setting the first reference voltage of the reference potential terminal of the operational amplifier so that the absolute voltage difference between the first reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the withstand voltage difference of the operational amplifier, the voltage relative to ground of the input terminal (positive input terminal and negative input terminal) and the output terminal of the operational amplifier are both DC high voltage, but the voltage difference between any two terminals is very low. Therefore, the operational amplifier can be a conventional operational amplifier without high-voltage isolation, avoiding the high cost and limited isolation voltage of high-voltage isolated operational amplifiers. When the high voltage at the output terminal of the electrostatic chuck power supply is too large, the current detection accuracy is poor, thereby reducing costs and improving the accuracy of current detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0012] FIG1 is a schematic structural diagram of a device for detecting current in an electrostatic chuck power supply circuit in the related art;

[0013] FIG2 is a schematic diagram of an electrostatic chuck electrical system provided by one embodiment of the present application;

[0014] FIG3 is a schematic structural diagram of a device for detecting current in an electrostatic chuck power supply circuit according to an embodiment of the present application;

[0015] FIG4 is a schematic structural diagram of a device for detecting current in an electrostatic chuck power supply circuit according to another embodiment of the present application;

[0016] FIG5 is a schematic structural diagram of a power supply unit provided by an embodiment of the present application;

[0017] FIG6 is a schematic structural diagram of a power supply unit provided in another embodiment of the present application;

[0018] FIG7 is a schematic structural diagram of a semiconductor process equipment provided by an embodiment of the present application. DETAILED DESCRIPTION

[0019] To make the purpose, technical solutions, and advantages of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with the specific embodiments of this application and the corresponding drawings. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0020] The terms "first", "second", etc. in this application are used to distinguish similar objects and are not used to describe a specific order or precedence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances so that the embodiments of the present application can be implemented in an order other than those illustrated or described here. In addition, "and / or" in this application represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship. It should be noted that the data involved in this application are all obtained under the premise of obtaining user authorization.

[0021] A chuck is a support platform located within the processing chamber of semiconductor processing equipment, used to secure and support the wafer being processed or the tray containing the wafer. An electrostatic chuck (ESC) utilizes the principle of electrostatic adsorption to secure the wafer or tray. The ESC's base contains embedded chuck electrodes, which are supplied with high-voltage DC power by the ESC power supply. This generates an electrostatic force between the chuck and the wafer, securing the wafer or tray to the chuck.

[0022] FIG2 is a schematic diagram of the electrostatic chuck electrical system. As shown in FIG2 , the base of the electrostatic chuck 23 includes a first ceramic layer 22 and a second ceramic layer 26. The first ceramic layer 22 and the second ceramic layer 26 are respectively embedded with a first electrode 21 and a second electrode 25. The first electrode 21 and the second electrode 25 are made of metal and are respectively surrounded by the first ceramic layer 22 and the second ceramic layer 26 on all four sides. The two high-voltage output terminals HV + Output, HV - The output is connected to the first electrode 21 and the second electrode 25 through the first filter circuit 24 and the second filter circuit 27 respectively.

[0023] The voltage at the two high-voltage output terminals of the electrostatic chuck power supply 010 is typically between one thousand and tens of thousands of volts (V). Because both ceramic layers are made of insulating materials, the loop current of the electrostatic chuck power supply 010 is extremely low. For example, in a Coulomb-type electrostatic chuck, both ceramic layers are made of high-purity ceramic. The resistance between the two electrodes and ground is generally required to be greater than 1000 gigaohms (GΩ), or the loop current I of the electrostatic chuck power supply 010 is required to be less than 10 microamperes (μA). In a JR-type electrostatic chuck, both ceramic layers are doped with conductive materials, resulting in a slightly higher loop current I, generally required to be less than 200 μA.

[0024] To better understand the operating status of semiconductor process equipment and protect equipment and personnel, it is necessary to accurately detect the ESC power supply circuit current and design necessary short-circuit protection circuits. ESC power supplies have the characteristics of outputting high voltage and low current, which brings certain difficulties to current detection.

[0025] In the related art, a high-voltage isolated operational amplifier is used to detect the ESC power supply loop current. However, high-voltage isolated operational amplifiers are relatively expensive and have a limited isolation voltage. When the voltage at the output end of the electrostatic chuck power supply is too high, the accuracy of current detection is poor. To this end, the present application proposes an electrostatic chuck power supply loop current detection device and semiconductor process equipment to address the problems in the related art of high-voltage isolated operational amplifiers, such as the high cost and limited isolation voltage of the high-voltage isolated operational amplifiers, and the poor current detection accuracy when the voltage at the output end of the electrostatic chuck power supply is too high.

[0026] The following describes in detail the technical solutions provided by various embodiments of the present application in conjunction with the accompanying drawings.

[0027] FIG3 is a schematic diagram of a structure of a device for detecting the current in an electrostatic chuck power supply circuit according to an embodiment of the present application. As shown in FIG3 , the device for detecting the current in an electrostatic chuck power supply circuit according to an embodiment of the present application may include: a sampling resistor R and a voltage detection unit 31 .

[0028] The sampling resistor R is connected in series to the output end of the electrostatic chuck power supply 10 .

[0029] It should be noted that the output terminal of the electrostatic chuck power supply 10 can be the positive output terminal of the electrostatic chuck power supply 10 or the negative output terminal of the electrostatic chuck power supply 10. The output voltage of the positive output terminal of the electrostatic chuck power supply 10 is HV + , the output voltage of the negative output terminal of the electrostatic chuck power supply 10 is HV - , the voltage output to the load is recorded as HV + Output, HV - For the convenience of description, the following description will be made by taking the output terminal of the electrostatic chuck power supply 10 as the positive output terminal of the electrostatic chuck power supply 10 as an example.

[0030] The voltage detection unit 31 is used to amplify and perform other processing on the sampled voltage U across the sampling resistor R to generate a detection voltage, which is then outputted through the output terminal of the voltage detection unit 31. Based on this detection voltage, the sampled voltage U across the sampling resistor R can be calculated. Furthermore, based on the sampled voltage U and the resistance R of the sampling resistor R, the loop current I of the electrostatic chuck power supply 10 flowing through the sampling resistor R can be calculated, where I = U / R.

[0031] The voltage detection unit 31 may specifically include an operational amplifier 12 .

[0032] The positive input terminal IN+ of the operational amplifier 12 is connected to the input terminal of the sampling resistor R, and the negative input terminal IN- of the operational amplifier 12 is connected to the output terminal of the sampling resistor R. The output terminal of the operational amplifier 12 is used to output a voltage signal proportional to the loop current. The input voltage U of the operational amplifier 12 = R*I. The operational amplifier 12 amplifies the voltage U. The gain (amplification factor) of the operational amplifier 12 is adjustable and is recorded as K. 12 The voltage U at the output of the operational amplifier 12 12 =K 12 *U=K 12 *R*I,U 12 ∝I, through the circuit conversion of the operational amplifier 12 and the sampling resistor R, the current signal I of the sampling resistor R is converted into a voltage signal U 12 .

[0033] In order to overcome the shortcomings of the high-voltage isolation operational amplifier 012 in Figure 1, the operational amplifier 12 in the embodiment of the present application adopts an ordinary operational amplifier, and the isolation voltage between its input and output ends is greater than the preset voltage (for example, 12V) to meet the conditions.

[0034] In an electric field, the voltage at a given point will vary depending on the reference voltage. In electronic circuits, the metal baseplate (ground) is typically used as the reference voltage. This reference voltage is set to zero, so voltages below the reference voltage are negative, and voltages above the reference voltage are positive. A positive voltage at a point indicates that the voltage at that point is higher than the reference voltage; a negative voltage indicates that the voltage at that point is lower than the reference voltage. The voltage at each point is calculated by calculating the difference between the reference voltage and the reference voltage. The voltage at a point in a circuit is relative; different reference voltages will affect the voltage at each point. However, the voltage between two points in a circuit is fixed and does not change with different reference voltages; that is, it is independent of the reference voltage. The reference voltage can also be a specific value.

[0035] The supply voltage VDD of the operational amplifier 012 in FIG1 + =12V, the reference potential terminal of the operational amplifier 012 in FIG1 is grounded (GND), and the corresponding reference voltage VDD - =0V, that is, the supply voltage VDD of the operational amplifier 012 + Compared to reference voltage VDD - High 12V.

[0036] Different from the operational amplifier 012 in FIG1 , the reference potential terminal of the operational amplifier 12 in the embodiment of the present application is used to input the first reference voltage VDD1 - , the first reference voltage VDD1 - The output voltage HV of the output terminal of the electrostatic chuck power supply 10 is + The absolute voltage difference △VDD1 between them is less than the withstand voltage difference U1 of the operational amplifier 12 max , that is, VDD1 - The value range is (HV + -U1 max , HV + +U1 max ), for example, the reference potential terminal of the operational amplifier 12 can be connected to the output terminal of the electrostatic chuck power supply 10 (the corresponding voltage is recorded as HV + ) connection, that is, the reference potential terminal of the operational amplifier 12 is connected to the first reference voltage VDD1 to the ground - =HV + Correspondingly, the power supply terminal of the operational amplifier 12 is used to input the first power supply voltage VDD1 + , the first supply voltage VDD1+ than the first reference voltage VDD1 - The first voltage value △v1, namely VDD1, is high + =VDD1 - +△v1. The range of the first voltage value △v1 is 3.3V~36V, for example, it can be 12V. At this time, VDD1 + =VDD1 - +12V. With the first reference voltage VDD1 - -HV + =△VDD1 as an example, where △VDD1 is less than the withstand voltage difference U1 of the operational amplifier 12 max , if HV + The voltage to ground is 2000V, then VDD1 - The voltage relative to ground is positive 2000V+△VDD1, that is, the first reference voltage of the operational amplifier 12 is positive 2000V+△VDD1 (relative to ground), VDD1 + The voltage to ground is 2012V+△VDD1. The voltage IN of the positive input terminal of the operational amplifier 12 is + and the first reference voltage VDD1 - The voltage difference between + -VDD1 - =2000-2000-△VDD1=-△VDD1, the voltage IN of the negative input terminal of the operational amplifier 12 - and the first reference voltage VDD1 - The voltage difference between + -U-VDD1 - =2000-U-2000-△VDD1=-U-△VDD1, U is the voltage difference across the sampling resistor R (i.e., the sampling voltage). Generally, U<10V, that is, the voltage difference between the input and output terminals of the operational amplifier 12 is <10V+△VDD1, and △VDD1<the withstand voltage difference U1 of the operational amplifier 12 max , so an ordinary non-high voltage isolated operational amplifier can be used, such as the withstand voltage difference U1 max It can be selected as 10V, then VDD1 - The value range is (1990, 2010) V. In some embodiments, ΔVDD1 = 0. In this case, the reference potential terminal of the operational amplifier 12 is the first reference voltage VDD1 relative to the ground. - =HV + , that is, the first reference voltage VDD1 - With HV + Same potential, first supply voltage VDD1 + =HV + +△v1, that is, the first power supply voltage VDD1+ than HV + High △ v1, the voltage IN of the positive input terminal of the operational amplifier 12 + and the first reference voltage VDD1 - The voltage difference between them is 0, and the voltage IN of the negative input terminal of the operational amplifier 12 is - and the first reference voltage VDD1 - The voltage difference between them is -U, so an ordinary non-high-voltage isolated operational amplifier can be used.

[0037] Furthermore, the voltage detection unit 31 may further include a photocoupler 13 .

[0038] Since the input terminal (IN + 、IN - ) to ground voltage HV + 、HV + -U are both DC high voltages. After amplification, the voltage U at the output of the operational amplifier 12 12 It is also a DC high voltage. The device that receives the detection voltage output by the voltage detection unit 31 and is used to calculate the current I is generally a low-voltage device. Therefore, the voltage U at the output of the operational amplifier 12 needs to be 12 High voltage isolation is performed to ensure the accuracy of current detection.

[0039] Specifically, a photocoupler 13 may be provided between the operational amplifier 12 and the output of the voltage detection unit 31 , with the input of the photocoupler 13 connected to the output of the operational amplifier 12 , and the output of the photocoupler 13 connected to the output of the voltage detection unit 31 .

[0040] The optocoupler 13 can be a linear optocoupler, such as the ISO224 series. The optocoupler 13 includes a light emitter T1 and a light receiver T2. There is no electrical connection between the light emitter T1 and the light receiver T2. Information is transmitted through light intensity, and the isolation voltage can reach 10,000 to tens of thousands of volts. The output voltage U of the linear optocoupler 13 is 13 and input voltage U 12 Proportional, and the ratio is adjustable, denoted as K 13 , the voltage U at the output of the optocoupler 13 13 =K 13 *U 12 =K 13 *K 12 *U=K 13 *K 12 *R*I,U 13 ∝I, through circuit conversion, the current signal I of the sampling resistor R is converted into a voltage signal U 13 By detecting the voltage signal U 13, the loop current I can be calculated.

[0041] The positive input terminal of the light emitting device T1 is connected to the output terminal of the operational amplifier 12, and the negative input terminal of the light emitting device T1 and the reference potential terminal are respectively used to input the second reference voltage VDD2 - , the second reference voltage VDD2 - The output voltage HV of the output terminal of the electrostatic chuck power supply 10 is + The absolute voltage difference △VDD2 between them is less than the withstand voltage difference U2 of the light emitting device T1 max , that is, VDD2 - The value range is (HV + -U2 max , HV + +U2 max ), for example, the negative input terminal and the reference potential terminal of the light emitter T1 can be connected to the output terminal of the electrostatic chuck power supply 10 (the corresponding voltage is recorded as HV + ) connection, that is, the second reference voltage VDD2 to the ground of the reference potential terminal of the light emitting device T1 - =HV + Correspondingly, the power supply terminal of the light emitting device T1 is used to input the second power supply voltage VDD2 + , the second supply voltage VDD2 + than the second reference voltage VDD2 - The second voltage value △v2, namely VDD2 + =VDD2 - +△v2. The second voltage value △v2 has a value range of 3.3V to 36V, for example, it can be 12V. At this time, VDD2 + =VDD2 - +12 V. Similarly, in some embodiments, ΔVDD2=0.

[0042] The reference potential terminal of the light receiver T2 is grounded (GND), and the power supply terminal of the light receiver T2 is used to input a third power supply voltage, which is a preset third voltage value (eg, 12 V). The output terminal of the light receiver T2 is connected to the output terminal of the voltage detection unit 31 .

[0043] Furthermore, the voltage detection unit 31 may further include a voltage follower 14, and the optocoupler 13 is connected to the output terminal of the voltage detection unit 31 via the voltage follower 14. The basic principle of the voltage follower 14 is to use negative feedback to achieve matching between the output voltage and the input voltage. The voltage follower 14 includes an amplifier and a feedback circuit. The feedback circuit compares the output signal of the amplifier with the input signal and feeds back the difference to the input terminal of the amplifier to maintain the stability of the output voltage.

[0044] Specifically, the positive input terminal IN of the voltage follower 14+ They are connected to the positive output terminal of the photocoupler 13 and the output terminal of the voltage follower 14 respectively, and the negative input terminal IN of the voltage follower 14 - The output end of the voltage follower 14 is connected to the negative output end of the photocoupler 13 , and is the output end of the voltage detection unit 31 .

[0045] The reference potential terminal of the voltage follower 14 is grounded (GND), and the power supply terminal of the voltage follower 14 is used to input a fourth power supply voltage, which is a preset fourth voltage value (for example, 12V). Since the voltages of the input terminal, output terminal, and power supply terminal of the voltage follower 14 are all within 12V relative to ground (when the third voltage value and the fourth voltage value are 12V), the voltage follower 14 can use an ordinary non-high-voltage isolated operational amplifier. The voltage U at the output terminal of the voltage follower 14 is 14 =U 13 =K 13 *U 12 =K 13 *K 12 *U=K 13 *K 12 *R*I,U 14 ∝I, through circuit conversion, the current signal I of the sampling resistor R is converted into a voltage signal U 14 By detecting the voltage signal U 14 , the loop current I can be calculated.

[0046] As shown in Figure 4 , considering the extremely weak loop current I, a tunneling magnetoresistance (TMR) sensor 11 can be placed before the input of operational amplifier 12, based on the configuration shown in Figure 3 , to improve sampling accuracy. TMR sensor 11 has an integrated coil, is resistant to external magnetic interference, and offers extremely high precision. For example, the TMR-MAC005 sensor has a resolution of 150 nanoamperes (nA), meeting the microcurrent sampling requirements of ESC power supply 10 .

[0047] The positive input terminal IN of the TMR sensor 11 + Connected to the input end of the sampling resistor R, the negative input terminal IN of the TMR sensor 11 - Connected to the output end of the sampling resistor R, the positive output end Out of the TMR sensor 11 + The positive input terminal IN of the operational amplifier 12 + Connect the negative output terminal of TMR sensor 11 to - The negative input terminal IN of the operational amplifier 12 - The TMR sensor 11 is a linear sensor, and the output voltage U 11It is proportional to the input voltage U and the ratio is adjustable, denoted as K 11 , the output voltage U of the TMR sensor 11 11 =K 11 *U. Correspondingly, the voltage U at the output of the voltage follower 14 14 =U 13 =K 13 *U 12 =K 13 *K 12 *U 11 =K 13 *K 12 *K 11 *R*I,U 14 ∝I, through circuit conversion, the current signal I of the sampling resistor R is converted into a voltage signal U 14 By detecting the voltage signal U 14 , the loop current I can be calculated.

[0048] Similar to the operational amplifier 12, in order to overcome the shortcomings of the high-voltage isolation operational amplifier 012 in Figure 1, the TMR sensor 11 in the embodiment of the present application adopts an ordinary linear sensor, and the isolation voltage between the input and output ends is greater than the preset voltage (for example, 12V) to meet the conditions.

[0049] Specifically, the reference potential terminal of the TMR sensor 11 is used to input the fifth reference voltage VDD5 - , the fifth reference voltage VDD5 - The output voltage HV of the output terminal of the electrostatic chuck power supply 10 is + The absolute voltage difference △VDD5 between them is less than the tolerance voltage difference U5 of the TMR sensor 11 max , that is, VDD5 - The value range is (HV + -U5 max , HV + +U5 max ), for example, the reference potential end of the TMR sensor 11 can be connected to the output end of the electrostatic chuck power supply 10 (the corresponding voltage is recorded as HV + ) connection, that is, the fifth reference voltage VDD5 to the ground of the reference potential terminal of the TMR sensor 11 - =HV + The power supply terminal of the TMR sensor 11 is used to input the fifth power supply voltage VDD5 + , the fifth power supply voltage VDD5 + than the fifth reference voltage VDD5 - The fifth voltage value △v5, namely VDD5, is high. + =VDD5 -+△v5. The fifth voltage value △v5 has a value range of 3.3V to 36V, for example, it can be 12V. At this time, VDD5 + =VDD5 - +12 V. Similarly, in some embodiments, ΔVDD5=0.

[0050] If HV + The voltage to ground is 2000V, then VDD5 - The voltage relative to the ground is positive 2000V+ΔVDD5, that is, the fifth reference voltage of the TMR sensor 11 is positive 2000V+ΔVDD5 (relative to the ground), VDD5 + The voltage to ground is 2012V+ΔVDD5. The voltage IN at the positive input terminal of the TMR sensor 11 is + and the fifth reference voltage VDD5 - The voltage difference between + -VDD5 - =2000-2000-ΔVDD5=-ΔVDD5, the voltage IN of the negative input terminal of the TMR sensor 11 - and the fifth reference voltage VDD5 - The voltage difference between + -U-VDD5 - =2000-U-2000-△VDD5=-U-△VDD5, U is the voltage difference across the sampling resistor R (i.e., the sampling voltage). Generally, U<10V, that is, the voltage difference between the input and output ends of the TMR sensor 11 is <10V+△VDD5, and △VDD1<the withstand voltage difference U1 of the operational amplifier. max Therefore, a common non-high voltage isolated linear sensor can be used, such as the withstand voltage difference U5 max It can be selected as 12V, then VDD1 - The value range is (1988, 2012)V.

[0051] Correspondingly, the input terminal IN of the operational amplifier 12 + 、IN - The output terminal Out of the TMR sensor 11 + and Out - , assuming that the first reference voltage VDD1 - and the fifth reference voltage VDD5 - All HV + ,Out + and Out - The voltage value relative to the reference voltage is recorded as V Out+ and V Out- , the positive input terminal IN of the operational amplifier 12 + The voltage and its reference voltage VDD- The voltage difference between the Out+ +HV + -VDD - =V Out+ , the negative input terminal IN of the operational amplifier 12 - The voltage and its reference voltage VDD - The voltage difference between the Out- +HV + -VDD - =V Out- , V Out+ and V Out- are all less than 12V (when the supply voltage of the TMR sensor 11 to the ground is 12V, according to the rail-to-rail rule, the output voltage to the ground is ≤12V), that is, the voltage difference between the input and output terminals of the operational amplifier 12 is ≤12V. Although the input terminal (IN + 、IN - ) and the output voltage to ground are both DC high voltage, but the voltage difference between any two is very low, so an ordinary non-high voltage isolated operational amplifier can be used.

[0052] In some embodiments, the first supply voltage VDD1 required by the operational amplifier 12 is + , the second power supply voltage VDD2 required by the light emitting device T1 in the photocoupler 13 + and the fifth power supply voltage VDD5 required by the TMR sensor 11 + are all equal, and the reference voltages of the operational amplifier 12, the light emitter T1 in the photocoupler 13, and the TMR sensor 11 are all equal.

[0053] Furthermore, the detection device for the electrostatic chuck power supply circuit current of the embodiment of the present application may further include a power supply unit for outputting the high voltage supply voltage required by each device in the voltage detection unit 31, for example, outputting the first power supply voltage VDD1 required by the operational amplifier 12 to the operational amplifier 12. + , outputting the second power supply voltage VDD2 required by the light emitting device T1 in the photoelectric coupler 13 to the photoelectric coupler 13 + and outputting a fifth power supply voltage VDD5 required for the TMR sensor 11 to the TMR sensor 11. + At the first power supply voltage VDD1 + , the second supply voltage VDD2 + and the fifth power supply voltage VDD5 + When the voltages φ and φ are equal, the power supply unit is configured to output the same power supply voltage to the operational amplifier 12 , the light emitter T1 of the photocoupler 13 , and the TMR sensor 11 .

[0054] As shown in FIG5 , the power supply unit is a direct current to direct current (DC / DC) circuit. Specifically, the power supply unit may include a voltage conversion module T5. A first input terminal of the voltage conversion module T5 is used to input a sixth supply voltage, which is a preset sixth voltage value, such as 24V. A second input terminal of the voltage conversion module T5 is connected to ground (GND) via the chopper module IC2. A first output terminal (SGND) of the voltage conversion module T5 is connected to the output terminal of the electrostatic chuck power supply, that is, to the reference potential terminal of the operational amplifier 12, the photocoupler 13, and the TMR sensor 11 in FIG3 and FIG4 . The corresponding voltage is represented as SGND. A second output terminal of the voltage conversion module T5 is used to output a target supply voltage (i.e., the first supply voltage, the second supply voltage, or the fifth supply voltage). FIG5 illustrates an example in which the target supply voltage relative to SGND is 12V, that is, the voltage relative to ground (GND) is (SGND+12)V. In other words, the second output terminal of the voltage conversion module T5 is connected to the supply terminals of the operational amplifier 12, the photocoupler 13, and the TMR sensor 11 in FIG3 and FIG4 .

[0055] The voltage conversion module T5 can be specifically a transformer. In Figure 5, the primary side supply voltage of the transformer is 24V, the reference voltage is ground (GND), the secondary side output voltage of the transformer is 12V, and the reference voltage is SGND = HV + , at this time the voltage of 12V (to SGND) to ground is (HV + +12)V. If HV + The voltage to ground is positive 2000V, that is, the voltage of SGND to ground is positive 2000V, the voltage of 12V (to SGND) to ground is positive 2012V, and there is a voltage difference of 2000V between SGND and the primary ground (GND) of the transformer. This requires the primary and secondary isolation voltage of the transformer to be U iso >HV + =2000V, which can generally be achieved through winding insulation, overall glue filling and increasing the distance between the primary and secondary sides.

[0056] The power supply unit can maintain the stability of the output voltage of the power supply unit by adjusting the output pulse width modulation (PWM) duty cycle of the chopper module IC2.

[0057] The power input pin VIN (corresponding to pin 13) of the chopping module IC2 is connected to the first input end of the voltage conversion module T5, the soft start pin SS (corresponding to pin 14) of the chopping module IC2 is grounded, and the switching pin SW (corresponding to pins 9-11) of the chopping module IC2 is connected to the second input end of the voltage conversion module T5. The chopping module IC2 is used to periodically connect or disconnect the connection between the switching pin SW and the second input end of the voltage conversion module T5.

[0058] The power supply unit may further include an input circuit, wherein the power input pin VIN of the chopping module IC2 is connected to the first input terminal of the voltage conversion module T5 via the input circuit. The input circuit includes a second resistor R2 and a tenth capacitor C10, wherein a first end of the second resistor R2 is connected to the first input terminal of the voltage conversion module T5, a second end of the second resistor R2 is connected to the power input pin VIN of the chopping module IC2, a first end of the tenth capacitor C10 is connected to the power input pin VIN of the chopping module IC2, and a second end of the tenth capacitor C10 is grounded (GND).

[0059] The power supply unit may further include an input feedback circuit including a fifth resistor R5 and a sixth resistor R6. A first end of the fifth resistor R5 is connected to the first input end of the voltage conversion module T5, a second end of the fifth resistor R5 is connected to the first end of the sixth resistor R6, and a second end of the sixth resistor R6 is connected to the compensation pin COMP (corresponding to pin 1) of the chopper module IC2.

[0060] The power supply unit may further include a voltage stabilizing filter circuit, comprising a fourteenth capacitor C14 and a second voltage stabilizing diode Z2. A first end of the fourteenth capacitor C14 is connected to the second end of the fifth resistor R5, and a second end of the fourteenth capacitor C14 is grounded (GND). A first end of the second voltage stabilizing diode Z2 is connected to the second end of the fifth resistor R5, and a second end of the fourteenth capacitor C14 is grounded (GND).

[0061] The power supply unit may further include a power supply circuit that provides an operating voltage for the chopper module IC2. The power supply circuit includes a fourth resistor R4 and a ninth resistor R9. A first end of the fourth resistor R4 is connected to the first input terminal of the voltage conversion module T5, a second end of the fourth resistor R4 is connected to the pin SHDN (corresponding to pin 3) of the chopper module IC2, a first end of the ninth resistor R9 is connected to the second end of the fourth resistor R4, and a second end of the ninth resistor R9 is grounded (GND).

[0062] The power supply unit may further include a peak absorption circuit, which includes a first voltage stabilizing diode Z1 and a second diode D2. The first voltage stabilizing diode Z1 and the second diode D2 are connected in series between the first input terminal and the second input terminal of the voltage conversion module T5.

[0063] The power supply unit may further include a soft start circuit, the soft start circuit including a fifteenth capacitor C15 and a sixteenth capacitor C16. A first end of the fifteenth capacitor C15 is connected to the soft start pin SS of the chopper module IC2, and a second end of the fifteenth capacitor C15 is grounded (GND). A first end of the sixteenth capacitor C16 is connected to the bypass control pin BYP (corresponding to pin 12) of the chopper module IC2, and a second end of the sixteenth capacitor C16 is grounded (GND).

[0064] The power supply unit may further include an isolation capacitor C12 for isolating the input ground GND of the voltage conversion module T5 from the output ground SGND. A first end of the isolation capacitor C12 is connected to the compensation pin COMP (corresponding to pin 1) of the chopper module IC2, and a second end of the isolation capacitor C12 is connected to ground (GND).

[0065] The power supply unit may further include an RCD absorption circuit. The RCD absorption circuit includes a first diode D1, a first capacitor C1, and a third resistor R3. The first end of the first diode D1 is connected to the second output terminal of the voltage conversion module T5, and the second end of the first diode D1 is used to output the target supply voltage. The first end of the first capacitor C1 is connected to the second output terminal of the voltage conversion module T5, the second end of the first capacitor C1 is connected to the first end of the third resistor R3, and the second end of the third resistor R3 is connected to the first output terminal (SGND) of the voltage conversion module T5.

[0066] The power supply unit may further include a third filter capacitor C3 , a first end of the third filter capacitor C3 being connected to the second end of the first diode D1 , and a second end of the third filter capacitor C3 being connected to the first output end (SGND) of the voltage conversion module T5 .

[0067] The power supply unit may further include a sixth filter capacitor C6 , a first end of the sixth filter capacitor C6 being connected to the second end of the first diode D1 , and a second end of the sixth filter capacitor C6 being connected to the first output end (SGND) of the voltage conversion module T5 .

[0068] The power supply unit may further include a ninth filter capacitor C9, a first end of the ninth filter capacitor C9 being connected to the second end of the first diode D1, a second end of the ninth filter capacitor C9 being connected to the first output end (SGND) of the voltage conversion module T5, and a second end of the third resistor R3 being connected to the first output end (SGND) of the voltage conversion module T5 through the ninth filter capacitor C9.

[0069] The power supply unit may further include a second photocoupler IC1, an input positive terminal of the second photocoupler IC1 being connected to the first output terminal (SGND) of the voltage conversion module T5 through an eleventh capacitor C11, an input negative terminal of the second photocoupler IC1 being connected to the first output terminal (SGND) of the voltage conversion module T5 through an output feedback circuit, an output positive terminal of the second photocoupler IC1 being connected to the first terminal of the isolation capacitor C12, and a negative output terminal of the second photocoupler IC1 being grounded (GND).

[0070] The output feedback circuit includes an eighth resistor R8, a thirteenth capacitor C13, a seventh resistor R7, a tenth resistor R10, and a reference voltage source IC3. A first end of the eighth resistor R8 is connected to the negative input terminal of the second photocoupler IC1, a second end of the eighth resistor R8 is connected to the first output terminal (SGND) of the voltage conversion module T5 via the reference voltage source IC3, a first end of the thirteenth capacitor C13 is connected to the second end of the eighth resistor R8, a second end of the thirteenth capacitor C13 is connected to the first output terminal (SGND) of the voltage conversion module T5 via the tenth resistor R10, a first end of the seventh resistor R7 is connected to the second end of the first diode D1, and a second end of the seventh resistor R7 is connected to the first output terminal (SGND) of the voltage conversion module T5 via the tenth resistor R10.

[0071] Furthermore, as shown in FIG6 , based on the embodiment shown in FIG5 , the power supply unit may further include a second filter capacitor C2, a seventh filter capacitor C7, and an eighth filter capacitor C8 disposed at the input end of the voltage conversion module T5. Selecting a capacitor combination of different capacitance values ​​and dielectric materials can filter interference signals of different frequencies, thereby increasing the input end's anti-interference capability. The first ends of the second filter capacitor C2, the seventh filter capacitor C7, and the eighth filter capacitor C8 are all connected to the first input end of the voltage conversion module T5, and the second ends of the second filter capacitor C2, the seventh filter capacitor C7, and the eighth filter capacitor C8 are all grounded (GND).

[0072] The power supply unit may also include a fourth filter capacitor C4 and a fifth filter capacitor C5, disposed at the output end of the voltage conversion module T5. Selecting a combination of capacitors with different capacitance values ​​and dielectric materials can filter interference signals of different frequencies, thereby increasing the output end's anti-interference capability, ensuring output voltage stability, and reducing ripple. The fourth filter capacitor C4 and the fifth filter capacitor C5 are each connected in parallel with the sixth filter capacitor C6.

[0073] The power supply unit may further include a dummy load resistor R93 connected in parallel with the sixth filter capacitor C6 to ensure the stability of the output voltage.

[0074] The power supply unit may further include an output indication circuit, which includes an indicator LED1 and a first resistor R1 connected in series, and serves as an output indication circuit. The output indication circuit is connected in parallel with a sixth filter capacitor C6.

[0075] In summary, in the detection device for the loop current of the electrostatic chuck power supply of the embodiment of the present application, the reference potential terminal of the operational amplifier is connected to the output terminal of the electrostatic chuck power supply, and the power supply terminal of the operational amplifier is used to input a first power supply voltage, and the first power supply voltage is higher than the output voltage of the output terminal of the electrostatic chuck power supply by a preset first voltage value. By setting the reference voltage of the reference potential terminal of the operational amplifier to the output voltage of the output terminal of the electrostatic chuck power supply, the voltage to ground of the input terminal (input positive terminal, input negative terminal) and the output terminal of the operational amplifier are both DC high voltage, but the voltage difference between any two is very low, so the operational amplifier can use a common operational amplifier with non-high voltage isolation, avoiding the high cost of the high voltage isolation operational amplifier and the limited value of the isolation voltage. When the high voltage voltage at the output terminal of the electrostatic chuck power supply is too large, the accuracy of the current detection is poor, which reduces the cost and improves the accuracy of the current detection. High voltage isolation is achieved by the photoelectric coupler 13, low-cost high voltage isolation is achieved, and the accuracy of current detection is guaranteed. The stability of the output detection voltage is guaranteed by the voltage follower, thereby improving the accuracy of current detection. The TMR sensor improves the accuracy of current sampling and the reference voltage of the TMR sensor, allowing the use of a non-high-voltage isolated TMR sensor, avoiding the high cost of high-voltage isolation. The power supply unit provides the required high-voltage power supply voltage to each component in the voltage detection unit.

[0076] The present invention also provides a semiconductor process equipment. As shown in FIG7 , the semiconductor process equipment 70 of the present invention includes an electrostatic chuck 23 , an electrostatic chuck power supply 10 , and a detection device 71 for the electrostatic chuck power supply loop current of the above embodiment.

[0077] The systems, devices, modules, or units described in the above embodiments may be implemented by computer chips or entities, or by products having certain functions. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smartphone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0078] For the convenience of description, the above devices are described as being divided into various units according to their functions. Of course, when implementing this application, the functions of each unit can be implemented in the same or multiple software and / or hardware.

[0079] Those skilled in the art will appreciate that the embodiments of the present application can be provided as methods, systems, or computer program products. Therefore, the present application can adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment in combination with software and hardware. Moreover, the present application can adopt the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to magnetic disk storage, CD-ROM, optical storage, etc.) that contain computer-usable program code.

[0080] The present application is described with reference to the flow chart and / or block diagram of the method, device (system), and computer program product according to the embodiment of the present application. It should be understood that each flow process and / or box in the flow chart and / or block diagram and the combination of the flow process and / or box in the flow chart and / or block diagram can be realized by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processing machine or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device produce a device for realizing the function specified in one flow chart flow or multiple flows and / or one box or multiple boxes of the block diagram.

[0081] These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce a product including an instruction device that implements the functions specified in one or more processes in the flowchart and / or one or more boxes in the block diagram.

[0082] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, so that the instructions executed on the computer or other programmable device provide steps for implementing the functions specified in one or more processes in the flowchart and / or one or more boxes in the block diagram.

[0083] In a typical configuration, a computing device includes one or more processors (CPUs), input / output interfaces, network interfaces, and memory.

[0084] Memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. Memory is an example of a computer-readable medium.

[0085] Computer-readable media includes permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. The information can be computer-readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disc read-only memory (CD-ROM), digital versatile disc (DVD) or other optical storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer-readable media does not include transitory computer-readable media (transitory media), such as modulated data signals and carrier waves.

[0086] It should also be noted that the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, commodity, or apparatus that includes a series of elements includes not only those elements but also other elements not explicitly listed, or includes elements inherent to such process, method, commodity, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, commodity, or apparatus that includes the element.

[0087] The present application may be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present application may also be practiced in distributed computing environments where tasks are performed by remote processing devices connected through a communications network. In a distributed computing environment, program modules may be located in local and remote computer storage media, including storage devices.

[0088] The various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the system embodiments are generally similar to the method embodiments, so the description is relatively simple. For relevant parts, refer to the description of the method embodiments.

[0089] The above are merely embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should all be included within the scope of the claims of the present application.

Claims

1. A detection device for the current of an electrostatic chuck power supply circuit, characterized in that Comprising: A sampling resistor, which is connected in series to the output terminal of the electrostatic chuck power supply; An operational amplifier, the positive input terminal of which is connected to the input terminal of the sampling resistor, the negative input terminal of which is connected to the output terminal of the sampling resistor, the reference potential terminal of which is used to input a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the tolerance voltage difference of the operational amplifier, the power supply terminal of which is used to input a first supply voltage, the first supply voltage is higher than the first reference voltage by a preset first voltage value, and the output terminal of which is used to output a voltage signal proportional to the loop current.

2. The device according to claim 1, characterized in that, Further comprising: An optocoupler, which includes a light emitter and a light receiver; The positive input terminal of the light emitter is connected to the output terminal of the operational amplifier, the negative input terminal and the reference potential terminal of the light emitter are respectively used to input a second reference voltage, the absolute voltage difference between the second reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the tolerance voltage difference of the light emitter, the power supply terminal of which is used to input a second supply voltage, the second supply voltage is higher than the second reference voltage by a preset second voltage value; The reference potential terminal of the light receiver is grounded, and the power supply terminal of the light receiver is used to input a third supply voltage, and the third supply voltage is a preset third voltage value.

3. The device according to claim 2, wherein Further comprising: A voltage follower, the positive input terminal of which is respectively connected to the positive output terminal of the optocoupler and the output terminal of the voltage follower, and the negative input terminal of which is connected to the negative output terminal of the optocoupler.

4. The device according to claim 3, characterized in that, The reference potential terminal of the voltage follower is grounded, and the power supply terminal of the voltage follower is used to input a fourth supply voltage, and the fourth supply voltage is a preset fourth voltage value.

5. The device according to claim 1, characterized in that Further comprising: A tunneling magnetoresistance sensor, the operational amplifier is connected to both ends of the sampling resistor through the tunneling magnetoresistance sensor; The positive input terminal of the tunneling magnetoresistance sensor is connected to the input terminal of the sampling resistor, the negative input terminal of which is connected to the output terminal of the sampling resistor, the positive output terminal of which is connected to the positive input terminal of the operational amplifier, the negative output terminal of which is connected to the negative input terminal of the operational amplifier, the reference potential terminal of which is used to input a fifth reference voltage, the absolute voltage difference between the fifth reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the tolerance voltage difference of the tunneling magnetoresistance sensor, the power supply terminal of which is used to input a fifth supply voltage, and the fifth supply voltage is higher than the fifth reference voltage by a preset fifth voltage value.

6. The device according to any one of claims 1-5, characterized in that Further comprising: A power supply unit, which is used to output the first supply voltage to the operational amplifier.

7. The device according to claim 6, characterized in that, The power supply unit includes: A voltage conversion module, a first input end of the voltage conversion module is used for inputting a sixth supply voltage, the sixth supply voltage is a preset sixth voltage value, a second input end of the voltage conversion module is grounded through a chopper module, a first output end of the voltage conversion module is connected to an output end of the electrostatic chuck power supply, and a second output end of the voltage conversion module is used for outputting the first supply voltage; A power input pin of the chopper module is connected to the first input end of the voltage conversion module, a soft start pin of the chopper module is grounded, a switching pin of the chopper module is connected to the second input end of the voltage conversion module, and the chopper module is used for periodically connecting or disconnecting the connection between the switching pin and the second input end of the voltage conversion module.

8. The device according to claim 7, wherein, The power supply unit further includes: an input circuit, and the power input pin of the chopper module is connected to the first input end of the voltage conversion module through the input circuit; The input circuit includes: A second resistor, a first end of the second resistor is connected to the first input end of the voltage conversion module, and a second end of the second resistor is connected to the power input pin of the chopper module; A tenth capacitor, a first end of the tenth capacitor is connected to the power input pin of the chopper module, and a second end of the tenth capacitor is grounded.

9. The device according to claim 7, wherein The power supply unit further includes: an input feedback circuit and a voltage stabilizing and filtering circuit; The input feedback circuit includes: a fifth resistor and a sixth resistor; a first end of the fifth resistor is connected to the first input end of the voltage conversion module, a second end of the fifth resistor is connected to a first end of the sixth resistor, and a second end of the sixth resistor is connected to a compensation pin of the chopper module; The voltage stabilizing and filtering circuit includes: a fourteenth capacitor and a second voltage stabilizing diode; a first end of the fourteenth capacitor is connected to the second end of the fifth resistor, and a second end of the fourteenth capacitor is grounded; a first end of the second voltage stabilizing diode is connected to the second end of the fifth resistor, and a second end of the fourteenth capacitor is grounded.

10. The device according to claim 7, wherein The power supply unit further includes: a spike absorption circuit and a soft start circuit; The spike absorption circuit includes: a first voltage stabilizing diode and a second diode; the first voltage stabilizing diode and the second diode are connected in series between the first input end and the second input end of the voltage conversion module; The soft start circuit includes: a fifteenth capacitor and a sixteenth capacitor; a first end of the fifteenth capacitor is connected to the soft start pin of the chopper module, and a second end of the fifteenth capacitor is grounded; a first end of the sixteenth capacitor is connected to a bypass control pin of the chopper module, and a second end of the sixteenth capacitor is grounded.

11. The device according to claim 7, characterized in that, The power supply unit further includes: RCD absorption circuit, the RCD absorption circuit includes a first diode, a first capacitor and a third resistor; a first end of the first diode is connected to a second output end of the voltage conversion module, and a second end of the first diode is used to output the first supply voltage; a first end of the first capacitor is connected to the second output end of the voltage conversion module, a second end of the first capacitor is connected to a first end of the third resistor, and a second end of the third resistor is connected to a first output end of the voltage conversion module; Third filter capacitor, a first end of the third filter capacitor is connected to the second end of the first diode, and a second end of the third filter capacitor is connected to the first output end of the voltage conversion module; Sixth filter capacitor, a first end of the sixth filter capacitor is connected to the second end of the first diode, and a second end of the sixth filter capacitor is connected to the first output end of the voltage conversion module; Ninth filter capacitor, a first end of the ninth filter capacitor is connected to the second end of the first diode, a second end of the ninth filter capacitor is connected to the first output end of the voltage conversion module, and a second end of the third resistor is connected to the first output end of the voltage conversion module through the ninth filter capacitor.

12. The device according to claim 11, characterized in that, The power supply unit further includes: Isolation capacitor, a first end of the isolation capacitor is connected to a compensation pin of the chopping module, and a second end of the isolation capacitor is grounded; Second optocoupler, a positive input end of the second optocoupler is connected to the first output end of the voltage conversion module through an eleventh capacitor, a negative input end of the second optocoupler is connected to the first output end of the voltage conversion module through an output feedback circuit, a positive output end of the second optocoupler is connected to the first end of the isolation capacitor, and a negative output end of the second optocoupler is grounded; The output feedback circuit includes an eighth resistor, a thirteenth capacitor, a seventh resistor, a tenth resistor and a reference voltage source; a first end of the eighth resistor is connected to the negative input end of the second optocoupler, a second end of the eighth resistor is connected to the first output end of the voltage conversion module through the reference voltage source, a first end of the thirteenth capacitor is connected to the second end of the eighth resistor, a second end of the thirteenth capacitor is connected to the first output end of the voltage conversion module through the tenth resistor, a first end of the seventh resistor is connected to the second end of the first diode, and a second end of the seventh resistor is connected to the first output end of the voltage conversion module through the tenth resistor.

13. The device according to claim 7, characterized in that The power supply unit further includes: a second filter capacitor, a seventh filter capacitor and an eighth filter capacitor provided at an input end of the voltage conversion module; A first end of the second filter capacitor, the seventh filter capacitor and the eighth filter capacitor are all connected to a first input end of the voltage conversion module, and a second end of the second filter capacitor, the seventh filter capacitor and the eighth filter capacitor are all grounded.

14. The device according to claim 11, characterized in that, The power supply unit further includes: a fourth filter capacitor, a fifth filter capacitor and a dummy load resistor provided at an output end of the voltage conversion module; The fourth filter capacitor, the fifth filter capacitor, and the dummy load resistor are respectively connected in parallel with the sixth filter capacitor.

15. The device according to claim 11, characterized in that, The power supply unit further includes: an output indication circuit; The output indication circuit includes an indicator lamp and a first resistor connected in series, and the output indication circuit is connected in parallel with the sixth filter capacitor.

16. A semiconductor process equipment, characterized in that, Comprising: An electrostatic chuck, an electrostatic chuck power supply, and a detection device for the electrostatic chuck power supply loop current according to any one of claims 1-15.

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