MEMS mirror assembly with MEMS mirror motion prediction

Abstract

The present invention relates to a MEMS mirror assembly, an optical projector, virtual reality or augmented reality glasses, and a computer-implemented method for predicting an oscillatory motion of a MEMS mirror with respect to a first oscillation axis.

Description

[0001] MEMS mirror array with prediction of MEMS mirror movement

[0002] The present invention relates to a MEMS mirror arrangement, an optical projector, virtual reality or augmented reality glasses and a computer-implemented method for predicting an oscillation movement of a MEMS mirror with respect to a first oscillation axis.

[0003] MEMS mirrors play a major role in the miniaturization of image projectors and image scanners. For example, a MEMS drive can drive the oscillating motion of a MEMS mirror while simultaneously illuminating the MEMS mirror with a controlled or natural light source. This allows the light rays reflected by the MEMS mirror to illuminate a projection plane—whether real or imaginary—in a controlled manner, creating or capturing an image visible to the human eye.

[0004] For this function, it is crucial that the position of the MEMS mirror in space – in other words, its current spatial orientation – is always known as best as possible. This necessity is explained below using the example of an image projector. Only if the position of the MEMS mirror is known can the MEMS mirror arrangement be designed in such a way that a controlled light source emits a light beam with specific properties such as color and brightness at exactly the right time – namely, exactly when the MEMS mirror is in the correct spatial orientation for these properties conveyed by the light beam, so that, for example, a pixel on the projection surface is illuminated with precisely the intended color and brightness.

[0005] Although the movement of the MEMS mirror can be determined using a MEMS sensor as a feedback signal, due to the finite signal propagation times, it is not possible to obtain the information about the spatial orientation of the MEMS mirror at the time required for a projector's light source using the feedback signal alone. Therefore, a prediction in the form of an electronic prediction circuit or a prediction algorithm is required, which can calculate the future spatial orientation of the MEMS mirror at the time a light beam with the appropriate properties is emitted from the light source. In the case of an image scanner, the prediction is required to assign the captured light rays to the correct corresponding image coordinates.

[0006] Against this background, it is an object of the present invention to provide a MEMS mirror arrangement and a method which enables the best possible prediction of the oscillation movement of the MEMS mirror.

[0007] This object is achieved by a MEMS mirror arrangement, wherein the MEMS mirror arrangement comprises a MEMS mirror mounted so as to oscillate with respect to at least one first oscillation axis, wherein the MEMS mirror arrangement has a first phase position determination device, wherein the first phase position determination device is designed and / or configured such that it provides a first electrical phase signal which describes a time-varying phase position of an oscillation movement of the MEMS mirror with respect to the first oscillation axis, wherein the MEMS mirror arrangement comprises a first calculation device, wherein the first calculation device is designed and / or configured such that the first calculation device provides a first prediction signal (in particular a first electrical prediction signal) which describes a future oscillation movement of the MEMS mirror with respect to the first oscillation axis,calculated in direct or indirect dependence on the first phase signal, wherein the MEMS mirror arrangement comprises a data processing device for processing and providing pixel data, wherein the first calculation device and the data processing device are designed and / or configured such that the data processing device reads out or receives the first prediction signal, wherein the first calculation device and the data processing device are designed and / or configured such that the provision of the pixel data by the data processing device takes place in dependence on the received or read out first prediction signal, in particular that the provision of the pixel data by the data processing device takes place in an order of the pixel data dependent on the first prediction signal and / or with a selection of the times dependent on the first prediction signal,for which pixel data is provided.

[0008] In the context of the present invention, providing pixel data includes not only transmitting the pixel data to a controlled light source, but also capturing and storing pixel data in a data storage device. The MEMS mirror arrangement described above can therefore be part of both an image projector and an image scanner.

[0009] The determination of the time-dependent phase position of the oscillation movement of the MEMS mirror allows a simple and energy-efficient calculation of the prediction signal, which describes the predicted oscillation movement.

[0010] The phase position of the oscillation motion of the MEMS mirror is understood in particular to be the argument of an oscillator function with which the oscillation motion can be described. This can be time itself or another time-dependent generalized coordinate, for example a radian value from the numerical range from 0 to twice the number pi (abbreviated to 2n), with which all states of a system described with trigonometric functions can be uniquely described. However, the phase space is not necessarily limited to the numerical range from 0 to 2n. By appropriately redefining and changing the descriptive functions, a phase space limited to the numerical range from 0 to 1 can, for example, also be used to uniquely describe a state of the oscillation motion of the MEMS mirror with respect to the first oscillation axis.For the sake of simplicity, we use a non-restrictive definition for the following discussion, according to which the phase position of the oscillation motion of the MEMS mirror with respect to the first oscillation axis can vary from 0 to 2n. The same applies to oscillation motions with respect to other oscillation axes discussed here.

[0011] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror arrangement is designed and / or configured such that the first calculation device receives or reads out the first phase signal, wherein the first calculation device is designed and / or configured such that the first calculation device calculates the first prediction signal as a function of the received or read-out first phase signal. The first phase signal is therefore a measurable, electrical signal that can be transmitted, received, or read out.

[0012] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror has a mirror plane, with the first oscillation axis aligned parallel to the mirror plane. A prediction signal is particularly advantageous for oscillation movements along such oscillation axes, since these are the main oscillation axes of the MEMS mirror when implemented within an optical projector.

[0013] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device comprises a first oscillator unit, in particular a numerically controlled oscillator, wherein the first oscillator unit is designed and / or configured such that the first oscillator unit provides a first oscillating electrical signal with a time-dependent phase position, wherein the first phase position determination device is designed and / or configured such that the first phase position determination device determines the first phase signal as a function of the phase position of the first oscillating signal of the first oscillator unit.

[0014] The first oscillator unit can be used as a clock for the MEMS mirror array by synchronizing readout processes or transmission processes of data or light beams with the information flow of the first oscillator unit. A numerically controlled oscillator, also called an NCO (numerically controlled oscillator), has proven particularly advantageous for use as the first oscillator unit. Alternatively, a voltage-controlled oscillator (or other oscillator unit) can also be used as the first oscillator unit.

[0015] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror arrangement comprises a first MEMS drive, wherein the first MEMS drive and the MEMS mirror are designed, arranged and configured such that the first MEMS drive drives a resonant oscillation of the MEMS mirror with respect to the first oscillation axis with a first electrical drive signal, wherein the MEMS mirror arrangement is preferably designed such that the first drive signal is the first oscillating signal of the first oscillator unit or is derived from the first oscillating signal of the first oscillator unit.

[0016] In other words, the first drive signal and the first oscillating electrical signal provided by the first oscillator unit are directly dependent on one another, i.e., apart from a time offset, they have an identical temporal profile. The temporal curve profiles can consequently be covered by a shift on the time axis. Therefore, the first phase position determination device can read the phase position of the first drive signal at a current time t from the first oscillating electrical signal of the first oscillator unit. This is an advantageous starting point for predicting the phase position of the first drive signal for a future time t i, whereby a prediction can be made about the phase position of the oscillating movement of the MEMS mirror with respect to the first oscillation axis. The first drive signal can, in particular, be designed as a square-wave signal.

[0017] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror arrangement comprises a first MEMS sensor, wherein the MEMS mirror and the first MEMS sensor are designed and configured such that the first MEMS sensor detects oscillatory movements of the MEMS mirror with respect to the first oscillation axis as a first electrical feedback signal with a time-dependent phase position, wherein the first phase position determination device is designed and / or configured such that the first phase position determination device determines the first phase signal as a function of the phase position of the first feedback signal.

[0018] This consideration of the first feedback signal in the calculation of the first phase signal makes it possible to predict the future phase position of the oscillation movement of the MEMS mirror with respect to the first oscillation axis more precisely.

[0019] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device comprises a first feedback unit, wherein the first feedback unit is designed and / or configured and connected to the first MEMS sensor such that the first feedback unit determines a phase difference of the first feedback signal from a reference signal, in particular the phase difference of the first feedback signal from a drive signal of a first MEMS drive, wherein the first phase position determination device is designed and / or configured such that the first phase position determination device determines the first phase signal as a function of the determined phase difference of the first feedback signal from a reference signal. During operation, the oscillating movement of the MEMS mirror with respect to the first oscillation axis has a phase difference, which can also be called a phase offset, compared to the first drive signal.Such a phase difference arises particularly when the oscillation movement of the MEMS mirror with respect to the first oscillation axis is driven resonantly. The phase difference can assume values ​​(in angular dimensions) from 0 degrees to 360 degrees, depending on the system. The phase difference can also be controlled using a phase control loop, so that only small control-related fluctuations in the phase difference occur during operation. These fluctuations can nevertheless be sufficient to cause image distortion. It is therefore advantageous to use the phase difference derived from the feedback signal, for example, to calculate the phase position of the oscillation movement of the MEMS mirror with respect to the first oscillation axis at time t by adding it to the phase position of the drive signal determined for time t.Alternatively, this could be omitted if the phase-lock loop controls the phase difference with such small fluctuations that a constant phase difference can be assumed for the purposes of the first phase signal. According to such an embodiment, the phase position of the first oscillating electrical signal of the first oscillator unit is summed at least with the phase difference to be controlled in the phase-lock loop in order to obtain the phase position of the oscillation movement of the MEMS mirror with respect to the first oscillation axis at time t0.

[0020] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device comprises a first adaptation unit which is dependent on a physical parameter, wherein the MEMS mirror arrangement is designed and / or configured such that the first adaptation unit which is dependent on a physical parameter continuously receives a frequency value as an input variable or determines this frequency value and the first adaptation unit which is dependent on a physical parameter determines a consequently time-dependent phase value as a function of the received or determined frequency value, in particular by means of a function or look-up table, wherein the first phase position determination device is designed and / or configured such that the first phase position determination device determines the first phase signal as a function of the time-dependent phase value,which has been determined with the first adaptation unit dependent on a physical parameter. The first adaptation unit can, in particular, be a frequency-dependent adaptation unit (the physical parameter is then a frequency), but it can also, alternatively or additionally, be an amplitude-, temperature-, and / or (runtime-)time-dependent adaptation unit.

[0021] The first adaptation unit is particularly suitable for taking into account changes in the resonance frequency of the MEMS mirror with respect to the first oscillation axis. Such changes in the resonance frequency can be caused, for example, by thermal factors or aging. In particular, if a first feedback unit is also provided, which contains a static or quasi-static filter for filtering out the feedback signal at the original resonance frequency, an adaptation unit is advantageous, with which a frequency-dependent phase value is provided in order to obtain a more precise determination of the phase position of the MEMS oscillation movement at time t by adding this phase value. In other words, in this exemplary case, the adaptation unit compensates for a phase difference provided by the feedback unit, which was calculated by the feedback unit with errors due to a static or quasi-static filter.In this context, quasi-static means that a value remains unchanged for a plurality of oscillation periods of the MEMS mirror. In particular, the first adaptation unit can also be designed and / or configured such that the frequency-dependent phase value is calculated using a mathematical formula, in particular a linear mathematical formula. The adaptation unit can receive the estimated frequency at which the MEMS mirror oscillates as an input variable from the first oscillator unit if the first oscillator unit is designed as part of a phase-locked loop, thereby adapting the frequency output by the first oscillator unit to the actual oscillation frequency of the MEMS mirror.

[0022] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device has a first summation unit, wherein the first phase position determination device is designed and / or configured such that two or more, in particular three, time-varying phase values ​​are supplied to the first summation unit as input variables, and the sum of the supplied phase values ​​is provided as an output variable by the first summation unit. This advantageously and particularly energy-efficiently utilizes the property of the phase space to the effect that calculations that would be extremely complex and laborious to perform in the associated spatial or frequency space can be realized in the phase space by simple summation.

[0023] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device has a first adding unit, wherein the first phase position determination device is designed and / or configured such that a time-varying phase value is supplied to the first adding unit as an input variable, preferably a single time-varying phase value is supplied as an input variable, and the sum of the supplied phase value with a first phase value is provided as an output variable by the first adding unit. The added first phase value can, in particular, be initially adjustable and subsequently kept constant forever or for a predefined period of time—for example, at least 1 minute. In other words, the first phase value can be designed to be quasi-static. In the latter case, the first phase value can be adjusted if necessary during reinitialization.For this purpose, for example, a first phase position determination device designed as an integrated circuit can have an electronically configurable circuit which provides a finite number of different configurations of the first phase value, so that one of these configurations can be set by an initialization.

[0024] The purpose of the adding unit is to predict the phase position at a future time ti based on the previously calculated phase position of the oscillation movement at time t0, which then represents the phase value supplied to the adding unit. The temporal prediction is performed in phase space by simply adding a value.

[0025] In view of the previously described embodiments, different variants and combinations are available for calculating (in the sense of approximately determining) the phase position at time t0 as a supplied phase value.

[0026] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be the above-described phase position of the first oscillating signal of the first oscillator unit.

[0027] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be the phase difference of the first feedback signal to a reference signal determined with the first feedback unit described above.

[0028] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be the phase value determined by means of the first adaptation unit dependent on a physical parameter described above.

[0029] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be a sum of the above-described phase position of the first oscillating signal of the first oscillator unit and the phase difference of the first feedback signal to a reference signal determined with the above-described first feedback unit.

[0030] According to a further embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be a sum of the above-described phase position of the first oscillating signal of the first oscillator unit and the phase value determined by means of the above-described first adaptation unit dependent on a physical parameter. According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be a sum of the above-described phase position of the first oscillating signal of the first oscillator unit and the phase difference of the first feedback signal from a reference signal determined by means of the above-described first feedback unit and the phase value determined by means of the above-described first adaptation unit dependent on a physical parameter.

[0031] Precision increases with the number of effects considered and thus with the number of summands. Precision must be balanced against the energy efficiency of the calculation, and the degree of precision required to provide a sufficiently good prediction signal must be considered. The embodiments described here therefore enable a variety of precision levels for a wide variety of applications of the MEMS mirror array.

[0032] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that the first prediction signal cannot be described with a single sine function. This enables an increase in the precision of the prediction. This is because the actual oscillation of the MEMS mirror with respect to an oscillation axis often cannot be described with a single sine oscillation.

[0033] A sine function can have any initial phase offset within the meaning of the present invention, so that a cosine function is also to be understood as a sine function within the meaning of the present invention. If the computing device on which the sine function is implemented is an integrated circuit, a sine function within the meaning of the present application is the element of the integrated circuit that receives a numerical value in the sense of a phase value and provides the sine value of this phase value as an output signal. An oscillation that can be described by a single sine function is a sine oscillation within the meaning of the present invention.

[0034] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that a first sine function is used to determine the first prediction signal, wherein the first calculation device and the first phase position determination device are designed and / or configured such that the phase values ​​of the first phase signal are each supplied to the first sine function as an input variable and the respective function value formed with the first sine function is provided as an output variable and used to determine the first prediction signal.

[0035] It has been shown that the oscillation motion of a MEMS mirror can be described, to a first approximation, by a sinusoidal oscillation. The present embodiment advantageously utilizes this, thus allowing the addition of further precise terms based on this first approximation.

[0036] According to one possible embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is, in particular, designed and / or configured such that the first prediction signal is determined exclusively using the first sine function. This is accompanied by high energy efficiency and can enable sufficient prediction precision for some applications of the MEMS mirror arrangement.

[0037] According to another embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that, in addition to the first sine function, a first time-dependent correction function is used to determine the first prediction signal, so that the first prediction signal cannot be described with a single sine function. In particular, the first calculation device can be designed and / or configured such that the first time-dependent correction function is determined as a function of the first phase signal. According to a further embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that the first prediction signal is formed by the sum of a first summand, which comprises the first sine function, and the first correction function.

[0038] The correction function enables the prediction of the MEMS mirror's movement, i.e., its future spatial orientation, performed by the first calculation device to be made more precise. Consequently, this enables MEMS mirrors whose resonant or bi-resonant oscillation is configured such that the oscillation deviates significantly from a pure sinusoidal oscillation with respect to at least one oscillation axis to be used for optical projectors without causing distortions or artifacts when projecting an image. It has been shown that the oscillatory motion of a MEMS mirror can often be best described by the sum of two oscillatory motions: a sinusoidal oscillation at the resonant frequency and a secondary oscillation at a frequency deviating from the resonant frequency.The embodiment described here makes use of this insight, which enables particularly simple and thus energy-efficient calculations of the first calculation device.

[0039] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that the first correction function comprises a second sine function, in particular is the second sine function, in particular is the product of the second sine function with at least one further factor. The first calculation device can be designed and / or configured such that phase values ​​are each supplied to the second sine function as an input variable, and the respective function value formed with the second sine function is provided as an output variable and used to determine the first prediction signal.

[0040] The overall oscillation with respect to an oscillation axis can be described very precisely by superimposing two sinusoidal oscillation movements – mathematically by summing them. In the frequency spectrum with respect to the corresponding oscillation axis, corresponding resonantly driven MEMS mirrors exhibit a main peak at the resonance frequency and at least one secondary peak at the secondary frequency of the secondary oscillation. Calculation devices configured accordingly are particularly useful for MEMS mirror arrangements that are mounted so that they can oscillate with respect to two independent oscillation axes and are optionally driven bi-resonantly. This can then lead to a bowtie effect, in which the oscillation movement of one oscillation axis is coupled to the oscillation movement of the other oscillation axis.The resulting secondary oscillation can be advantageously described with a sine function with respect to one of these oscillation axes - for example as an oscillation with a frequency mixture formed from the frequency of the fundamental oscillation of one oscillation axis and the frequency of the first harmonic oscillation of the other oscillation axis.

[0041] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that the first correction function comprises an adjustable first coefficient K1. The first calculation device is, in particular, designed and / or configured such that the adjustable first coefficient K1 is a multiplier of a trigonometric function, in particular a sine function, also included in the first correction function. The first coefficient K1 can be used, for example, to model the strength of that component of the oscillation movement that deviates from a sinusoidal oscillation at a resonant frequency in order to best predict the actual oscillation movement of the MEMS mirror. The strength is not always known in advance.In particular, the first calculation device can be designed and configured such that the adjustable first coefficient K1 can be manually adjusted by a user, for example, by using a configuration algorithm. Furthermore, the first calculation device can also be configured, in addition to or independently of the manual adjustment, such that the first calculation device adjusts the adjustable first coefficient K1 automatically—for example, depending on a detected first feedback signal. This represents an adaptive adjustment of the adjustable first coefficient based on the detected first feedback signal.

[0042] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that the first correction function comprises a quadratic trigonometric function, preferably a quadratic sine function. This allows, for example, the Duffing effect to be taken into account.

[0043] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror is additionally mounted so as to be capable of oscillation with respect to a second oscillation axis, wherein the second oscillation axis is not aligned parallel to the first oscillation axis, wherein the MEMS mirror arrangement has a second phase position determination device, wherein the second phase position determination device is designed and / or configured such that it provides a second electrical phase signal which describes a temporally changing phase position of an oscillation movement of the MEMS mirror with respect to the second oscillation axis, wherein the MEMS mirror arrangement comprises a second calculation device, wherein the second calculation device is designed and / or configured such that the second calculation device provides a second prediction signal (in particular a second electrical prediction signal),which describes a future oscillation movement of the MEMS mirror with respect to the second oscillation axis, is calculated in direct or indirect dependence on the second phase signal, wherein the second calculation device and the data processing device are designed and / or configured such that the data processing device reads out or receives the second prediction signal, wherein the second calculation device and the data processing device are designed and / or configured such that the provision of the pixel data by the data processing device takes place in dependence on the received or read out second prediction signal, in particular that the provision of the pixel data by the data processing device takes place in an order of the pixel data dependent on the second prediction signal and / or with a selection of the times dependent on the second prediction signal,for which pixel data is provided.

[0044] In particular, the second oscillation axis is oriented substantially perpendicular to the first oscillation axis. Furthermore, the MEMS mirror arrangement can be configured such that the MEMS mirror can be driven bi-resonantly. This means that both an oscillation with respect to the first oscillation axis at a first resonant frequency and an oscillation with respect to the second oscillation axis at a second resonant frequency can be driven, and in particular is driven.

[0045] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror arrangement is designed and / or configured such that the second calculation device receives or reads out the second phase signal, wherein the second calculation device is designed and / or configured such that the second calculation device calculates the second prediction signal as a function of the received or read-out second phase signal. The second phase signal is therefore also a measurable, electrical signal that can be transmitted, received, or read out.

[0046] According to one embodiment of the MEMS mirror arrangement according to the invention, the second phase position determination device comprises a second oscillator unit, in particular a numerically controlled oscillator, wherein the second oscillator unit is designed and / or configured such that the second oscillator unit provides a second oscillating electrical signal with a time-dependent phase position, wherein the second phase position determination device is designed and / or configured such that the second phase position determination device determines the second phase signal as a function of the phase position of the second oscillating signal of the second oscillator unit.

[0047] The second oscillator unit can be used as an additional clock for the MEMS mirror array.

[0048] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror arrangement comprises a second MEMS drive, wherein the second MEMS drive and the MEMS mirror are designed, arranged, and configured such that the second MEMS drive drives an oscillation, in particular a resonant oscillation, of the MEMS mirror with respect to the second oscillation axis using a second electrical drive signal. In particular, the MEMS mirror arrangement can be designed such that the second drive signal is the second oscillating signal of the second oscillator unit or is derived from the second oscillating signal of the first oscillator unit. Effects and advantages are analogous to the oscillating movement with respect to the first oscillation axis.

[0049] According to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror arrangement comprises a second MEMS sensor, wherein the MEMS mirror and the second MEMS sensor are designed and configured such that the second MEMS sensor detects oscillatory movements of the MEMS mirror with respect to the second oscillation axis as a second electrical feedback signal with a time-dependent phase position, wherein the second phase position determination device is designed and / or configured such that the second phase position determination device determines the second phase signal as a function of the phase position of the second feedback signal. Effects and advantages are analogous to the oscillatory movement with respect to the first oscillation axis.

[0050] According to one embodiment of the MEMS mirror arrangement according to the invention, the second phase position determination device comprises a second feedback unit, wherein the second feedback unit is designed and / or configured and connected to the second MEMS sensor such that the second feedback unit determines a phase difference of the second feedback signal from a reference signal, in particular the phase difference of the second feedback signal from a drive signal of a second MEMS drive, wherein the second phase position determination device is designed and / or configured such that the second phase position determination device determines the second phase signal as a function of the determined phase difference of the second feedback signal from a reference signal. Effects and advantages are analogous to the oscillatory movement with respect to the first oscillation axis.

[0051] According to one embodiment of the MEMS mirror arrangement according to the invention, the second phase position determination device comprises a second adaptation unit dependent on a physical parameter, wherein the MEMS mirror arrangement is designed and / or configured such that the second adaptation unit dependent on a physical parameter continuously receives a frequency value as an input variable or determines this frequency value and the second adaptation unit dependent on a physical parameter determines a consequently time-dependent phase value depending on the received or determined frequency value, in particular by means of a function or look-up table, wherein the second phase position determination device is designed and / or configured such that the second phase position determination device determines the second phase signal depending on the time-dependent phase value,which has been determined with the second adaptation unit dependent on a physical parameter. The second adaptation unit can, in particular, be a frequency-dependent adaptation unit, but it can also, alternatively or additionally, be an amplitude-, temperature-, and / or (runtime)-dependent adaptation unit. Effects and advantages are analogous to the oscillation movement with respect to the first oscillation axis.

[0052] According to one embodiment of the MEMS mirror arrangement according to the invention, the second phase position determination device comprises a second summing unit, wherein the second phase position determination device is designed and / or configured such that two or more, in particular three, time-varying phase values ​​are supplied to the second summing unit as input variables, and the sum of the supplied phase values ​​is provided as an output variable by the second summing unit. Effects and advantages are analogous to the oscillatory motion with respect to the first oscillation axis.

[0053] According to one embodiment of the MEMS mirror arrangement according to the invention, the second phase position determination device has a second adding unit, wherein the second phase position determination device is designed and / or configured such that a time-varying phase value is supplied to the second adding unit as an input variable, preferably a single time-varying phase value is supplied as an input variable, and the sum of the supplied phase value with a second phase value is provided by the second adding unit as an output variable. The added second phase value can, in particular, be initially adjustable and subsequently kept constant forever or for a predefined period of time—for example, at least 1 minute. It can be designed to be quasi-static.

[0054] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device and the second phase position determination device are designed and / or configured such that the phase value added with the first adding unit and the phase value added with the second adding unit differ.

[0055] With regard to the second added phase value, different variants and combinations are also available for calculating (in the sense of approximately determining) the phase position at time t as a supplied phase value, based on the previously described embodiments. According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be the above-described phase position of the second oscillating signal of the second oscillator unit.

[0056] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be the phase difference of the second feedback signal to a reference signal determined with the second feedback unit described above.

[0057] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be the phase value determined by means of the second adaptation unit described above which is dependent on a physical parameter.

[0058] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be a sum of the above-described phase position of the second oscillating signal of the first oscillator unit and the phase difference of the second feedback signal to a reference signal determined with the above-described second feedback unit.

[0059] According to a further embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be a sum of the above-described phase position of the second oscillating signal of the first oscillator unit and the phase value determined with the above-described second adaptation unit dependent on a physical parameter.

[0060] According to one embodiment of the MEMS mirror arrangement according to the invention, the supplied phase value can be a sum of the above-described phase position of the second oscillating signal of the first oscillator unit and the phase difference of the second feedback signal to a reference signal determined by the above-described second feedback unit and the phase value determined by the above-described second adaptation unit dependent on a physical parameter.

[0061] According to one embodiment of the MEMS mirror arrangement according to the invention, the second calculation device is designed and / or configured such that the second prediction signal cannot be described with a single sine function. Effects and advantages are analogous to the oscillation motion with respect to the first oscillation axis.According to one embodiment of the MEMS mirror arrangement according to the invention, the second calculation device is designed and / or configured such that a third sine function is used to determine the second prediction signal. The second calculation device and the second phase position determination device are designed and / or configured such that the phase values ​​of the second phase signal are each supplied to the third sine function as an input variable, and the respective function value formed with the third sine function is provided as an output variable and used to determine the second prediction signal. Effects and advantages are analogous to the oscillation movement with respect to the first oscillation axis.

[0062] According to one embodiment of the MEMS mirror arrangement according to the invention, the second calculation device is designed and / or configured such that, in addition to the third sine function, a second time-dependent correction function is used to determine the second prediction signal, so that the second prediction signal cannot be described with a single sine function. The second calculation device is preferably designed and / or configured such that the second time-dependent correction function is determined as a function of the second phase signal. In particular, the second calculation device can also be designed and / or configured such that the second prediction signal is formed by the sum of a second summand, which includes the third sine function, and the second correction function.

[0063] According to one embodiment of the MEMS mirror arrangement according to the invention, the second calculation device is designed and / or configured such that the second correction function comprises a fourth sine function, in particular is a fourth sine function, wherein the second calculation device is preferably designed and / or configured such that phase values, which can in particular be dependent on the phase values ​​of the second phase signal, are each supplied to the fourth sine function as an input variable and the respective function value formed with the fourth sine function is provided as an output variable and used to determine the second prediction signal.

[0064] A correspondingly configured calculation device is particularly suitable for calculating predictions for the movement of a MEMS mirror in which a significant bowtie effect occurs. According to one embodiment of the MEMS mirror arrangement according to the invention, the second calculation device is designed and / or configured such that the second correction function comprises an adjustable, in particular user-adjustable, second coefficient K2. The second calculation device is preferably designed and / or configured such that the adjustable second coefficient K2 is a multiplier of a trigonometric function, in particular a sine function, also included in the second correction function. This allows the strength of the bowtie effect to be simulated, thus resulting in a further improvement of the prediction signal.

[0065] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured according to a first possibility such that the first calculation device calculates the first prediction signal as a function of the first phase signal and additionally as a function of the second phase signal. Alternatively or additionally, the first calculation device can be designed and / or configured according to a second possibility such that the second calculation device calculates the second prediction signal as a function of the second phase signal and additionally as a function of the first phase signal. This enables coupling effects of the oscillation movements of the first and second oscillation axes - such as the bowtie effect - to be taken into account when calculating the prediction signal.

[0066] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that the phase values ​​supplied to the second sine function are each formed or partially formed from the sum of the following two products:

[0067] ■ the product of a phase value of the first phase signal with an integer, in particular the product of a phase value of the first phase signal with the number 1, and

[0068] ■ the product of a phase value of the second phase signal with an integer, in particular the product of a phase value of the second phase signal with the number 2

[0069] This simulates an oscillation typical of the bowtie effect along the first oscillation axis, which oscillates at a frequency mixture resulting from the sum of the fundamental frequency of the MEMS mirror along the first oscillation axis and the harmonic frequency of the MEMS mirror along the second oscillation axis. This is because the MEMS mirror—if a bowtie effect occurs—is a mechanical mixer that mixes the fundamental oscillation and the harmonic oscillation. In this sense, the calculation device includes an electronic mixer that simulates the mechanical behavior of the MEMS mirror.

[0070] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is designed and / or configured such that the phase values ​​supplied to the second sine function or a further sine function are each formed or partially formed from the difference between the following two products:

[0071] ■ the product of a phase value of the first phase signal with an integer, in particular the product of a phase value of the first phase signal with the number 1, as subtrahend and

[0072] ■ the product of a phase value of the second phase signal with an integer, in particular the product of a phase value of the second phase signal with the number 2, as the minuend.

[0073] This simulates another oscillation typical of the bowtie effect with respect to the first oscillation axis, which oscillates at a frequency mixture resulting from the difference between the overtone frequency of the MEMS mirror with respect to the second oscillation axis and the fundamental frequency of the MEMS mirror with respect to the first oscillation axis.

[0074] According to one embodiment of the MEMS mirror arrangement according to the invention, the second calculation device is designed and / or configured such that the phase values ​​supplied to the fourth sine function are each formed or partially formed from the sum of the following two products:

[0075] ■ the product of a phase value of the second phase signal with an integer, in particular the product of a phase value of the second phase signal with the number 1, and

[0076] ■ the product of a phase value of the first phase signal with an integer, in particular the product of a phase value of the first phase signal with the number 2.

[0077] This simulates an oscillation typical of the bowtie effect with respect to the second oscillation axis, which oscillates at a frequency mixture resulting from the sum of the fundamental frequency of the MEMS mirror with respect to the second oscillation axis and the overtone frequency of the MEMS mirror with respect to the first oscillation axis.

[0078] According to one embodiment of the MEMS mirror arrangement according to the invention, the second calculation device is designed and / or configured such that the phase values ​​supplied to the fourth sine function or a further sine function are each formed or partially formed from the difference between the following two products:

[0079] ■ the product of a phase value of the second phase signal with an integer, in particular the product of a phase value of the second phase signal with the number 1, as subtrahend and

[0080] ■ the product of a phase value of the first phase signal with an integer, in particular the product of a phase value of the first phase signal with the number 2, as the minuend.

[0081] This simulates another oscillation typical of the bowtie effect with respect to the second oscillation axis, which oscillates at a frequency mixture resulting from the difference between the overtone frequency of the MEMS mirror with respect to the first oscillation axis and the fundamental frequency of the MEMS mirror with respect to the second oscillation axis.

[0082] For the purposes of the present invention, a MEMS mirror that is mounted so as to be capable of oscillating with respect to an oscillation axis means that this MEMS mirror, during operation, can execute a rotational oscillation with respect to the oscillation axis (rotational mode), in which the deflection occurs through a movement of the mirror perpendicular to the oscillation axis, or a translational oscillation with respect to the oscillation axis (translational mode), in which the deflection occurs through a translation of the mirror along the oscillation axis. In the embodiments described within the scope of this invention, the MEMS mirror is mounted in particular such that it can execute a rotational oscillation with respect to a first oscillation axis formed substantially parallel to the mirror plane.In the embodiments directed toward a second oscillation axis substantially parallel to the mirror plane, the MEMS mirror is also mounted in such a way that it can perform a rotational oscillation with respect to the second oscillation axis. In addition to these rotational modes, translational modes may also occur during operation of the MEMS mirror arrangement, in particular a translational mode with respect to a third oscillation axis perpendicular to the first and second oscillation axes—and thus perpendicular to the mirror plane.

[0083] Therefore, according to one embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror is mounted so as to be capable of oscillation with respect to the first oscillation axis, with respect to the second oscillation axis and additionally with respect to a third oscillation axis, in particular mounted so as to be capable of translational oscillation with respect to the third oscillation axis, wherein the MEMS mirror has a mirror plane, wherein the first oscillation axis is aligned parallel to the mirror plane, wherein the second oscillation axis is aligned parallel to the mirror plane, wherein the third oscillation axis is not aligned parallel to the mirror plane and preferably perpendicular to the first and second oscillation axes, wherein the MEMS mirror arrangement has a third phase position determination device, wherein the third phase position determination device is designed and / or configured such that it receives a third electrical phase signal,which describes a temporally varying phase position of a movement, in particular an oscillation movement, of the MEMS mirror with respect to the third oscillation axis, wherein, according to a first possibility, the first calculation device is designed and / or configured such that the first calculation device calculates the first prediction signal in direct or indirect dependence on the third phase signal, and / or according to a second possibility, the second calculation device is designed and / or configured such that the second calculation device calculates the second prediction signal in direct or indirect dependence on the third phase signal. As a result, a translational oscillation mode perpendicular to the mirror plane can be taken into account when calculating the first and / or second prediction signal.

[0084] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is a component of an IC, ie an integrated electronic circuit, and in particular a component of an ASIC, ie an application-specific integrated electronic circuit, so that the first calculation device is designed such that the first calculation device calculates the first electrical prediction signal as a function of the first phase signal.

[0085] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device is a component of an IC, in particular ASIC, and preferably a component of an IC or ASIC which also comprises the first calculation device.

[0086] According to one embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is a component of a microchip equipped with a CPU, a universal programmable integrated electronic circuit, so that the first calculation device is configured such that the first calculation device calculates the first electrical prediction signal as a function of the first phase signal.

[0087] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device is a component of a microchip equipped with a CPU and is preferably a component of a microchip equipped with a CPU which also comprises the first calculation device.

[0088] According to a further embodiment of the MEMS mirror arrangement according to the invention, the first calculation device is a component of an FPGA, a programmable electronic logic gate arrangement, so that the first calculation device is designed and configured such that the first calculation device calculates the first prediction signal as a function of the first phase signal.

[0089] According to one embodiment of the MEMS mirror arrangement according to the invention, the first phase position determination device is a component of an FPGA and preferably a component of an FPGA that also comprises the first calculation device.

[0090] According to a further embodiment of the MEMS mirror arrangement according to the invention, the MEMS mirror arrangement comprises a controllable artificial light source, wherein the light source and the MEMS mirror are designed and arranged such that the MEMS mirror projects a light beam emitted by the light source onto an at least imaginary projection surface, wherein the data processing device and the light source are designed, arranged, and configured such that the data processing device provides the pixel data of the light source and the light source projects light beams or their properties, such as color and brightness, onto the MEMS mirror depending on the received pixel data. The light source can in particular be an LED or a laser.

[0091] The object underlying the invention is also achieved by a MEMS mirror arrangement, wherein the MEMS mirror arrangement comprises a MEMS mirror for projecting a light beam onto a projection surface of virtual reality glasses or augmented reality glasses, wherein the MEMS mirror is mounted so as to be capable of oscillation with respect to a first oscillation axis, wherein the MEMS mirror is mounted so as to be capable of oscillation with respect to a second oscillation axis, wherein the MEMS mirror is mounted such that the first oscillation axis and the second oscillation axis are not aligned parallel to one another, wherein the MEMS mirror arrangement comprises a first and a second MEMS drive, wherein the first MEMS drive, the second MEMS drive and the MEMS mirror are designed, arranged and configured such that the MEMS drives drive a bi-resonant oscillation of the MEMS mirror with respect to the first and second oscillation axes,wherein the MEMS mirror arrangement is designed such that the bi-resonant oscillation in the frequency spectrum with respect to the first or with respect to the second oscillation axis has a first peak at the driven resonance frequency and a second peak at a secondary frequency, wherein the second peak has an amplitude of at least 0.5 per mille, preferably at least 0.75 and particularly preferably at least 1 per mille, of the amplitude of the first peak.

[0092] In particular, one of the previously described embodiments of a MEMS mirror arrangement can be designed as an optical projector. Such a MEMS mirror arrangement can also be a component of virtual reality glasses or augmented reality glasses.

[0093] The object underlying the invention is also achieved by a method, in particular a computer-implemented method, for predicting an oscillatory motion of a MEMS mirror with respect to a first oscillation axis, wherein the predicted oscillatory motion cannot be described with a single sine function. This enables an improved prediction, since, in particular, non-sinusoidal oscillation components can also be included in the prediction.

[0094] The object underlying the invention is also achieved by a method for configuring a MEMS mirror arrangement comprising the steps of: (A) Providing a MEMS mirror arrangement for determining the prediction of the oscillatory movement, in particular a MEMS mirror arrangement according to one of the embodiments described here; (B) Initially setting an adjustable parameter of the system, such as an adjustable coefficient or a phase value that is added to a supplied phase value in an adding unit; (C) Checking whether the predicted oscillatory movement is identical to the actual oscillatory movement of the MEMS mirror; and (D) If the check in step C) shows that a discrepancy between the predicted oscillatory movement and the actual oscillatory movement exceeds a predefined threshold: Adjusting the adjustable parameter and repeating step C).This method is particularly intended to set a phase value which is added to a supplied phase value in an adding unit in order to obtain as a result a temporal prediction of the phase position of an oscillation movement of the MEMS mirror.

[0095] It has been shown that this initial configuration, according to the previously described method, can often model the oscillatory motion of the MEMS mirror sufficiently well to obtain a good prediction of the MEMS mirror's motion for a certain time interval, for example, one minute, without the need for reconfiguration. However, it is advisable to perform reconfiguration regularly.

[0096] For the purposes of the present invention, numbering such as "first oscillation axis" is to be understood as naming the element and not necessarily as a list. The term "first element" or a similar term does not imply that there is also a "second element." Nor does the term "second element" or a similar term imply that there must be a corresponding "first element."

[0097] Unless logical exclusions are specified, any combination of the previously described embodiments of a MEMS mirror arrangement according to the invention as well as combinations of the associated features also form further embodiments of the MEMS mirror arrangement according to the invention.

[0098] Further features, advantages, and possible applications of the present invention will become clear from the following description of preferred embodiments and the accompanying figures. They show:

[0099] Fig. 1 : a partial circuit diagram of a first embodiment of the MEMS mirror arrangement according to the invention,

[0100] Fig. 2: a partial circuit diagram of a second embodiment of the MEMS mirror arrangement according to the invention,

[0101] Fig. 3: a partial circuit diagram of a third embodiment of the MEMS mirror arrangement according to the invention,

[0102] Fig. 4: a partial circuit diagram of a fourth embodiment of the MEMS mirror arrangement according to the invention,

[0103] Fig. 5: a partial circuit diagram of a fifth embodiment of the MEMS mirror arrangement according to the invention,

[0104] Fig. 6: a partial circuit diagram of a sixth embodiment of the MEMS mirror arrangement according to the invention,

[0105] Fig. 7: a partial circuit diagram of the first calculation device of the embodiments of the MEMS mirror arrangement according to the invention shown in Figs. 5 and 6,

[0106] Fig. 8: a generalized circuit diagram of an embodiment of the MEMS mirror arrangement according to the invention, Fig. 9: An embodiment of a method according to the invention for configuring a MEMS mirror arrangement.

[0107] Fig. 1 shows an embodiment of the MEMS mirror arrangement 12, partially as an electronic circuit diagram. The MEMS mirror 22, not shown here (but see Fig. 8), is mounted so as to be capable of oscillation with respect to two non-parallel oscillation axes, such that it has a rotational oscillation mode with respect to the first oscillation axis and a rotational oscillation mode with respect to the second oscillation axis. The circuit diagram in Fig. 1 shows the elements used to determine the first prediction signal 4 for the oscillation movement with respect to the first oscillation axis and to determine the second prediction signal 4' for the oscillation movement with respect to the second oscillation axis.

[0108] First, the phase value for both oscillation axes is determined – continuously in the sense of the phase signals 3 and 3' – using the first phase position determination device 2 or the second phase position determination device 2', which represents an estimate of the actual current phase position of the respective oscillation movement of the MEMS mirror. In the example shown in Fig. 1, the first phase position determination device 2 or the second phase position determination device 2' each has exclusively one numerically controlled oscillator. In the sense of the present invention, this is the first oscillator unit 5 for the first phase position determination device 2 and the second oscillator unit 5' for the second phase position determination device 2'. The two numerically controlled oscillators provide a clock signal for the respective oscillation axis in the form of an oscillating electrical signal, which – as shown in Fig.1—is also used as a clock signal for the respective MEMS drive 25 or 25' of an oscillation axis. The clock signal provided by the first oscillator unit 5 is provided to the first MEMS drive 25, which is connected to the MEMS mirror 22 in such a way that it drives the oscillation movement of the MEMS mirror 22 with respect to the first oscillation axis (not shown). The same applies to the second oscillator unit 5' and the oscillation movement of the MEMS mirror 22 with respect to the second oscillation axis.

[0109] The time-dependent phase position 6 or 6' of the respective clock signal is now also used as an estimate for the current phase position of the MEMS mirror in order to later determine the respective first prediction signal 4 or second prediction signal 4'. In the embodiment shown in Fig. 1, this takes place directly and without further corrections to the phase positions 6 and 6'. The time-dependent phase position 6 or 6' provided by the respective numerically controlled oscillator 5 or 5' is therefore fed directly to a first calculation device 1 or second calculation device 1', which in the example shown here exclusively comprises a first sine function 36 or third sine function 36'. The first prediction signal 4 therefore results here from the application of the first sine function 36 to the phase position 6 provided by the first numerically controlled oscillator 5, by which the first phase signal 3 is formed in the example shown here.

[0110] The first prediction signal 4 determined in this way and the second prediction signal 4' determined analogously thereto are then fed to the data processing device 15, which has a data memory in which pixel data is stored. The example shown here concerns the pixel data of a two-dimensional image, so the data memory is also designed such that the pixel data is indexed according to the dimension of the first oscillation axis and the dimension of the second oscillation axis.The index with respect to the first dimension is then specified by the first prediction signal 4 and the index of the second dimension by the second prediction signal 4', so that a uniquely determined data storage point is selected by the two prediction signals 4 and 4', which is specified by the two-dimensional coordinates with respect to the first and second oscillation axes of the spatial position at which the corresponding pixel data are later to be projected by the light source 21.This is because the data processing device makes the pixel data 14 jointly defined by the two prediction signals - timed to match the input of the corresponding values ​​of the two prediction signals - available to the light source 21, so that the latter emits the pixel data in the form of a light beam 23 with defined properties such as color and brightness precisely when the MEMS mirror 22 is in the position corresponding to the prediction signals 4 and 4' in order to project the pixel information at the spatial position intended for the pixel information.

[0111] The examples shown in the figures show components of an image projector. However, these could also be components of an image scanner. The signal and data flow in an image scanner is opposite to the signal and data flow in the image projector examples shown.

[0112] The prediction of the oscillatory motion of the MEMS mirror 22, as performed with the embodiment shown in Figure 1, is based on only a few electronic components and accordingly requires few resources. However, such a prediction is not sufficiently precise for some specific applications. The embodiments described below and shown in Figures 2 to 6 comprise, in ascending order, additional elements with which the prediction signals 4 and 4' are made more precise, so that they exhibit a smaller or, at best, no measurable deviation from the actual future oscillatory motions of the MEMS mirror 22.

[0113] The second embodiment shown in Fig. 2 has all the components previously described in Fig. 1, but differs from the embodiment shown in Figure 1 in that for each of the two oscillation axes, a configured phase value 35 or 35' is added to the phase position 6 or 6' provided by the respective numerically controlled oscillator 5 or 5' in a corresponding first adding unit 34 or second adding unit 34' before the result of this addition is fed to the first computing device 1 or second computing device 1'. The addition carried out in the first adding unit 34 or the second adding unit 34 primarily takes into account the finite signal propagation times within the MEMS mirror arrangement. This is because the phase position 6 or 6' provided by the first or second numerically controlled oscillator 5 or 5'6' may be a good initial estimate of the current actual phase position of the MEMS mirror's oscillation motion. However, due to the finite signal propagation times, several oscillation periods of the MEMS mirror's oscillation motion may elapse in some cases until this information is transmitted to the light source in the form of pixel data 14. Therefore, a valid estimate of the future phase position is possible by adding a phase value. The added phase value 35 or 35' in the time spectrum takes the signal propagation times into account.

[0114] A further improvement in the precision of the prediction signals is made possible by the innovation of the phase position determination devices 2 and 2' shown in Fig. 3 compared to the example shown in Fig. 2. In the third embodiment shown in Fig. 3, the first phase position determination device 2 and the second phase position determination device 2' each have a feedback unit 7 and 7', respectively, in addition to a numerically controlled oscillator 5 and 5', respectively. This first feedback unit 7 or second feedback unit 7' is correspondingly connected to the first MEMS sensor 24 or second MEMS sensor 24' (not shown in Fig. 3, but visible in Fig. 8) and determines the phase difference 8 or 8' between the respective oscillation movement of the MEMS mirror and the respective drive signal 33 or 33' based on the first feedback signal 40 received from the first MEMS sensor 24 or the second feedback signal 40' received from the second MEMS sensor 24'.The first drive signal 33 for the oscillating movement of the MEMS mirror 22 with respect to the first oscillation axis and the second drive signal 33' for the oscillating movement of the MEMS mirror 22 with respect to the second oscillation axis are also derived from the respective clock signal of the numerically controlled oscillator 5 and 5' in the embodiment shown in Fig. 3, as in the embodiment shown in Fig. 1. For the sake of clarity, the MEMS drives 25 and 25' are no longer shown in Figs. 2 to 6.

[0115] For the sake of simplicity, the following description of the phase position determination devices 2 and 2' shown in Fig. 3 is limited to the case of the oscillating movement of the MEMS mirror 22 with respect to the first oscillation axis, i.e., to the first phase position determination device 2. However, the second phase position determination device 2' is designed analogously here. The first feedback unit 7 is used to obtain a more precise estimate of the actual current phase position of the oscillating movement of the MEMS mirror 22 with respect to the first oscillation axis. This also results in a better estimate of the future phase position in the form of the first phase signal 3 and thus a more precise calculation of the first prediction signal 4. For this purpose, the phase difference 8 determined by the first feedback unit 7 and the phase position 6 taken from the clock signal of the numerically controlled oscillator 5 are summed in the first summing unit 11.The result of this summation is then the estimate of the actual current phase position of the oscillation movement of the MEMS mirror with respect to the first oscillation axis. To use this value to estimate the future phase position, the output value of the summation unit 11 is fed to the adding unit 34, already described with reference to Figure 2.

[0116] A further precision in estimating the actual current phase position is achieved with the fourth embodiment shown in Figure 4. This is designed like the third embodiment shown in Figure 3, but differs from the third embodiment in that the first phase position determination device 2 and the second phase position determination device 2' each have a first adaptation unit 9 and a second adaptation unit 9', respectively. The functionality of the first and second adaptation units 9 and 9', respectively, is explained using the example of the first adaptation unit 9. However, the explanations apply analogously to the second adaptation unit 9'.

[0117] In particular, if the MEMS mirror 22 is driven resonantly with respect to one oscillation axis or bi-resonantly with respect to both oscillation axes, the oscillation properties, and in particular the resonance frequency, of the MEMS mirror 22 may change over time during operation. This may be caused by thermal effects or aging processes. However, since, for example, the first feedback unit 7 often comprises a static or quasi-static configured filter, which in turn depends on the original resonance frequency of the MEMS mirror 22 with respect to the first oscillation axis, a change in the resonance frequency, for example in the embodiment shown in Fig. 3, may lead to an increase in the deviation between the estimate of the actual current phase position—the output value of the summing unit 11—and the actual current phase position—a systematic error, so to speak, of the feedback unit 7.However, the first adjustment unit 9 determines the frequency of the fundamental oscillation of the MEMS mirror, which corresponds to the resonance frequency in the case of resonant drive—for example, using the numerically controlled oscillator 5 as part of a phase-locked loop—and compares it with the original resonance frequency. Depending on the deviation between the frequency of the fundamental oscillation of the MEMS mirror and the original resonance frequency determined in this way, a stored phase value 10 (in the case of the second oscillation axis, the phase value 10') is output, which is summed in the first summation unit 11 together with the phase position 6 of the clock signal output by the first numerically controlled oscillator 5 and the phase difference 8 determined by the feedback unit 7.The first adaptation unit 9 can be designed, in particular, as a look-up table that assigns a phase value to a specific deviation between the frequency of the fundamental oscillation of the MEMS mirror 22 and the original resonance frequency. Alternatively, an analytical calculation can also be implemented in the adaptation unit 9.

[0118] 2 to 4, the focus is primarily on the expanded design of the first and second phase position determination devices. The calculation devices 1 and 2, which are also shown, always have exclusively a sine function 36 and 36' respectively in the aforementioned cases. This changes in the fifth embodiment of the present invention shown in Fig. 5. With regard to the first and second phase position determination devices 2 and 2' and with regard to the data processing device 15 and the light source 21, this is based on the embodiment shown in Fig. 4, but can in principle also have, for example, a first and second phase position determination device as shown in Figs. 1 to 3. The order of Figs. 1 to 5 and the associated order of the shown combinations of phase position determination devices 2 and 2' and calculation devices 1 and 2' respectively.T are not to be understood as limiting possible combinations.

[0119] The focus of the following discussion is on the design of the first and second calculation devices 1 and T. This design is explained below using the example of the first calculation device 1. The second calculation device T is designed analogously in the example shown in Fig. 5. In the embodiment shown in Fig. 5, the first calculation device 1 has, in addition to the first sine function 36, a first correction function 37 (second correction function 37' for the second oscillation axis). The phase signal 3 provided by the first phase position determination device 2 (in the sense of an estimate of the actual future phase position of the oscillation movement of the MEMS mirror with respect to the first oscillation axis) is made available to both the first sine function 36 and the first correction function 37 as an input variable.From this, the first sine function 36 forms the corresponding sine value—as in the embodiments shown in Figs. 1 to 4. The first correction function 37 receives, as a further input variable, the second phase signal provided by the second phase position determination device 2' (in the sense of an estimate of the actual future phase position of the oscillation movement of the MEMS mirror with respect to the second oscillation axis).The first correction function 37 then provides, depending on the first and second phase signals 3 and 3', corresponding function values ​​as a first output signal and optionally also different function values ​​as a second output signal, which are initially summed in a third summation unit 26 with the output signal output by the first sine function 36 and then normalized in a first normalization unit 31 to the memory size corresponding to the data memory of the data processing device 15. The resulting first prediction signal 4 therefore has, in addition to the sine component generated by the sine function 36, further components that do not necessarily have to be sinusoidal. The first correction function 37 shown in Figure 5 can, for example, be a first correction function 37 for modeling the bowtie effect, as shown in the detailed view shown in Figure 7.

[0120] The circuit diagram shown in Fig. 7 shows the scheme of the second correction function 37' from Figs. 5 and 6. The second correction function 37' is designed in such a way that the expected bowtie effect for the second prediction signal 4' is modeled, so that a projection of the light beam 23 onto an at least imaginary projection surface based on the second prediction signal by means of reflection at the MEMS mirror 22 is bowtie-free - i.e. without the eponymous bowtie artifact.

[0121] In the following, we therefore assume the future point in time with which the values ​​of the first and second phase signals 3 and 3' supplied to the second correction function 37' are associated, and for which a deflection of the MEMS mirror 22 with respect to the second oscillation axis is calculated in the form of the second prediction signal 4'. The point in time tL can therefore also be called the prediction point in time.

[0122] First, the value of the first phase signal 3 for the time and the value of the second phase signal 3' for the time the second correction function 37'. These phase values ​​are then fed to different operators to determine the function and output values ​​of the correction function. Such a calculation can generally be used to model various effects. The following description of the modeling of the bowtie effect shown in Fig. 7 should therefore be understood as an example.

[0123] The bowtie effect can be understood as the occurrence of mixtures of the fundamental frequency of one oscillation axis and the overtone frequency of the other oscillation axis. The frequency mixture resulting from the fundamental frequency and an overtone frequency, for example, the frequency of the first harmonic (also called the upper frequency component), is the most pronounced. Therefore, the calculations shown in Fig. 7 are explained using this example.

[0124] The respective strength of the bowtie effect also depends on which of the two fundamental frequencies is higher. Therefore, the oscillation axis with the higher driven frequency is given the attribute "fast" here, while the other is given the attribute "slow". In the present case, it is assumed, for example, that the frequency of the fundamental oscillation of the second oscillation axis is higher than the frequency of the fundamental oscillation of the first oscillation axis. In principle, however, the oscillation axes can also be defined such that the opposite is true, i.e., the frequency of the fundamental oscillation of the second oscillation axis is lower than the frequency of the fundamental oscillation of the first oscillation axis.Since the strongest bowtie effect occurs during the oscillation movement of the faster oscillation axis, i.e. the one with the higher fundamental frequency, the corresponding definition of the oscillation axes only changes the answer to the question of which prediction signal should be prioritized and calculated with a corresponding correction function in order to simulate the strongest bowtie effect. If the first oscillation axis is the faster one, this is the first prediction signal. If the second oscillation axis is the faster one, this is the second prediction signal. The latter case is described as an example below. In order to calculate a relevant correction for the prediction signal with regard to the fast axis - in this case the second prediction signal 4' - the one for time t. ± certain phase position (p siow(ti) of the oscillation movement with respect to the slow oscillation axis is multiplied by a factor of two in a multiplication unit 41 and then by the time certain phase (Pfast i) of the oscillation movement with respect to the fast oscillation axis in the fifth sum unit (42).

[0125] The result of this summation is optionally subjected to further phase correction in a correction unit 43 and subsequently normalized to the interval 0 to 2 in a transformation unit 44. The thus transformed phase value is then fed as an argument to the fourth sine function 38, which may in particular be present as a look-up table. The signal calculated by the fourth sine function 38 is then multiplied by the adjustable second coefficient K2 39, which can be set via an input interface, in the product formation unit 45. The result of this multiplication is then provided as an output signal and, as shown in Figs. 5 and 6, is added to the signal of the third sine function (36') in the fourth summation unit (26').

[0126] The modeling of the low frequency component is also shown in Fig. 7. It differs from the previously described modeling of the upper frequency component only in that the sum 2 <p s iow(fi) + <Pfast(ti) gebildet wird, sondern in der Differenzeinheit 46 die Differenz 2 (p siow (fi) ~ <Pfast(ti) gebildet wird. Entsprechend der oberen Beschreibung sind auch hier im weiteren Datenverarbeitungsverlauf eine optionale Korrektureinheit 43‘, eine Transformationseinheit 44‘, eine weitere Sinusfunktion 38‘, ein einstellbarer weiterer Koeffizient K2‘ 39‘ sowie eine Produktbildungseinheit 45‘ vorgesehen. Im Ergebnis gibt die zweite Korrekturfunktion 37‘ zwei separate Signale aus, ein Ausgangssignal für die Modellierung der oberen Frequenzkomponente des Bowtie-Effekts und eine Ausgangssignal für die Modellierung der unteren Frequenzkomponente des Bowtie-Effekts bezüglich der zweiten Schwingungsachse.

[0127] For time t ± The fourth summing unit 26' therefore mathematically determines the following output signal A aus , which can be called a non-normalized prediction signal: The sixth embodiment shown in Figure 6 has all the elements of the fifth embodiment shown in Figure 5. For the sake of clarity, the details of the first and second phase position determination devices 2 and 2' as well as the details of the first and second calculation devices 1 and T already known from Figure 5 are no longer provided with reference numerals in Figure 6. These are identical to those shown in Figure 5. In comparison to the embodiment shown in Figure 5, the first and second calculation devices 1 and T in the embodiment shown in Figure 6 each have an additional correction function 32 and 32' respectively, which specifically provides a non-sinusoidal signal as an output variable, which is summed in the third summation unit 26 with the output signal provided by the first sine function 36 and the output signals provided by the first correction function 37 (for determining the first prediction signal) orin the fourth summation unit 26', the output signal of the third sine function 36' and the output signals of the second correction function 37' are summed (in the case of the second prediction signal). These further correction functions 32 and 32' can, in particular, involve the calculation of a function value that takes into account a translational oscillation mode of the MEMS mirror 22 in a direction perpendicular to the first and second oscillation axes.

[0128] Fig. 8 now shows a possible MEMS mirror arrangement 12 in an overall view, wherein the arrangement can have phase position determination devices 2 and 2' as well as calculation devices 1 and T according to the previously described embodiments. In particular, the first phase position determination device 2 and the second phase position determination device 2' can be designed as components of a trajectory control device 20, which, in the non-limiting example shown here, is arranged in the near field of the MEMS mirror. The first calculation device 1 and the second calculation device T can be arranged as components of a trajectory predictor in the far field, for example, in a cloud, in the non-limiting example shown here. With regard to the near field and far field, reference is made to patent application DE 10 2023 119 117, the complete content of which is incorporated by reference.

[0129] The calculation devices 1 and 1' are also connected to the data processing device 15, which receives the pixel data 14 required for projecting an image (for example, from an external server - not shown) or reads it from an internal storage medium 13, and provides the data processing device 15 with the prediction signals 4 and 4'. Depending on the received prediction signals 4 and 4' and the associated prediction information, the data processing device 15 sends the pixel data 14 via a first data communication interface 16 in the form of a pixel data stream 14 to a receiver device, which receives the pixel data stream 14 with a second data communication interface 17.The pixel data stream 14 is then transferred via an optional buffer 18 and a third data communication interface 19 to a light source 21, for example a LASER or an LED, including light source control, so that light beams corresponding to the pixel data 14 are generated by the light source 21 and projected onto the MEMS mirror 22.

[0130] The MEMS mirror 22 is simultaneously driven by the MEMS drives 25 and 25' or the electrical drive signals 33 and 33' provided by the MEMS drives. The MEMS sensors 24 and 24' receive the feedback signals 40, 40' generated by the movement of the MEMS seal 22 for the two oscillation axes—at least in the present case of a MEMS mirror with two non-parallel oscillation axes driven by the MEMS seal. The feedback signals 40, 40' are then either initially transmitted to the trajectory control device 20 and any feedback units integrated therein, as shown here. The trajectory control device then sends the phase signals 3 and 3' provided by the phase position determination devices 2 and 2' via the second data communication interface 17 to the first data communication interface 16 and via this further to the calculation devices 1 and T as input signals.Based on this, among other things, the predicted oscillation movement of the MEMS mirror 22 can then be continuously calculated and corresponding prediction signals 4 and 4' can be provided.

[0131] Fig. 9 shows a method, which can be designed as a computer-implemented method, with which, for example, the first coefficient K1 of the first correction function 37, the second coefficient K2 39 of the second correction function 37', or the first phase value 35 added in the first adding unit 34 can be adjusted in order to improve the prediction of the oscillatory movement of the MEMS mirror. The non-limiting example of the first coefficient K1 is used below. For this purpose, in the first step 27, an initial value for the coefficient K1 is assumed - possibly based on empirical values ​​- and an image is projected onto a projection surface using a MEMS mirror arrangement designed as an optical projector (as shown, for example, in Fig. 8). In the second step 28, the coefficient K1 is linearly varied.This is followed by a test step 29, in which the projected image after the variation is compared with the projected image before the variation. If this is the very first test step and a deterioration of the projected image has occurred in the sense of an increase in artifacts and / or distortions, the variation is repeated starting from the initial value, but with the opposite sign. If this is not the very first test step, the variation is continued linearly as long as an improvement in the projected image occurs with each variation. In other words, a loop consisting of the second step 28 and test step 29 is run through. If a deterioration occurs after a further variation, the last value applied - before the last variation - is set as the result value for the coefficient K1 in the final step 30.Test step 29 can be sensor / camera-based and / or algorithm-based and / or by visual inspection.

[0132] For the purposes of original disclosure, it is noted that all features or embodiments as they become apparent to a person skilled in the art from the present description, the drawings, and the claims, even if they were specifically described only in conjunction with certain other features, can be combined both individually and in any combination with other features or groups of features disclosed herein, unless this has been expressly excluded or technical circumstances make such combinations impossible or pointless. A comprehensive, explicit presentation of all conceivable combinations of features is omitted here solely for the sake of brevity and readability of the description.

[0133] While the invention has been illustrated and described in detail in the drawings and the foregoing description, this illustration and description are given by way of example only and are not intended to limit the scope of the invention as defined by the claims. The invention is not limited to the disclosed embodiments.

[0134] List of reference symbols

[0135] 1 first calculation device

[0136] T second calculation device

[0137] 2 first phase position determination device

[0138] 2' second phase position determination device

[0139] 3 first phase signal

[0140] 3' second phase signal

[0141] 4 first forecast signal

[0142] 4' second forecast signal

[0143] 5 first oscillator unit (here: numerically controlled oscillator)

[0144] 5' second oscillator unit (here: numerically controlled oscillator)

[0145] 6 Time-dependent phase position of the oscillating electrical signal of the first oscillator unit

[0146] 6' time-dependent phase position of the oscillating electrical signal of the second oscillator unit

[0147] 7 first feedback unit

[0148] 7' second feedback unit

[0149] 8 Phase difference of the first feedback signal to a reference signal

[0150] 8' Phase difference of the second feedback signal to a reference signal

[0151] 9 first adaptation unit dependent on a physical parameter

[0152] 9' second adjustment unit dependent on a physical parameter

[0153] 10 phase value determined by the first adaptation unit dependent on a physical parameter

[0154] 10' phase value determined by the second adaptation unit dependent on a physical parameter

[0155] 11 first sum unit

[0156] 1 T second sum unit

[0157] 12 MEMS mirror array

[0158] 13 Storage medium

[0159] 14 pixel data / pixel data stream

[0160] 15 Data processing facility

[0161] 16 First data communication interface

[0162] 17 Second data communication interface

[0163] 18 buffers

[0164] 19 Third data communication interface

[0165] 20 Trajectory control device 21 Light source with light source control

[0166] 22 MEMS mirrors

[0167] 23 Light beam

[0168] 24 first MEMS sensor

[0169] 24' second MEMS sensor

[0170] 25 first MEMS drive

[0171] 25' second MEMS drive

[0172] 26 third sum unit

[0173] 26' fourth sum unit

[0174] 27 First step

[0175] 28 Second step

[0176] 29 Test step

[0177] 30 Final step

[0178] 31 first standardization unit

[0179] 31 ' second standardization unit

[0180] 32 additional correction function for first calculation device

[0181] 32' further correction function for second calculation device

[0182] 33 first drive signal

[0183] 33' second drive signal

[0184] 34 first adding unit

[0185] 34' second adding unit

[0186] 35 first configured phase value

[0187] 35' second configured phase value

[0188] 36 first sine function

[0189] 36' third sine function

[0190] 37 first correction function

[0191] 37' second correction function

[0192] 38 fourth sine function

[0193] 38' further sine function

[0194] 39 second coefficient K2

[0195] 39' further coefficient K2'

[0196] 40 first feedback signal

[0197] 40' second feedback signal

[0198] 41 Multiplier unit

[0199] 42 fifth sum unit43 correction unit

[0200] 43' correction unit

[0201] 44 Transformation unit ' Transformation unit Product formation unit' Product formation unit Difference unit

Claims

P a t e n t a n s p r ü c h e 1. A MEMS mirror arrangement (12), wherein the MEMS mirror arrangement (12) comprises a MEMS mirror (22) mounted so as to oscillate relative to at least one first oscillation axis, wherein the MEMS mirror arrangement (12) has a first phase position determination device (2), wherein the first phase position determination device (2) is designed and / or configured such that it provides a first electrical phase signal (3) which describes a time-varying phase position of an oscillation movement of the MEMS mirror (22) relative to the first oscillation axis, wherein the MEMS mirror arrangement (12) comprises a first calculation device (1), wherein the first calculation device (1) is designed and / or configured such that the first calculation device (1) provides a first prediction signal (4) which describes a future oscillation movement of the MEMS mirror (22) relative to the first oscillation axis,calculated in direct or indirect dependence on the first phase signal (3), wherein the MEMS mirror arrangement (12) comprises a data processing device (15) for processing and providing pixel data (14), wherein the first calculation device (1) and the data processing device (15) are designed and / or configured such that the data processing device (15) reads out or receives the first prediction signal (4), wherein the first calculation device (1) and the data processing device (15) are designed and / or configured such that the provision of the pixel data (14) by the data processing device (15) takes place in dependence on the received or read out first prediction signal (4),in particular that the provision of the pixel data (14) by the data processing device takes place in an order of the pixel data that is dependent on the first prediction signal (4) and / or with a selection of the times at which pixel data (14) are respectively provided that is dependent on the first prediction signal (4).

2. MEMS mirror arrangement (12) according to claim 1, wherein the MEMS mirror (22) has a mirror plane, wherein the first oscillation axis is aligned parallel to the mirror plane.

3. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) comprises a first oscillator unit (5), in particular a numerically controlled oscillator, wherein the first oscillator unit (5) is designed and / or configured such that the first oscillator unit (5) provides a first oscillating electrical signal with a time-dependent phase position (6), wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal (3) as a function of the phase position (6) of the first oscillating signal of the first oscillator unit (5).

4. MEMS mirror arrangement (12) according to the preceding claim, wherein the MEMS mirror arrangement (12) comprises a first MEMS drive (25), wherein the first MEMS drive (25) and the MEMS mirror (22) are designed, arranged and configured such that the first MEMS drive (25) drives a resonant oscillation of the MEMS mirror (22) with respect to the first oscillation axis with a first electrical drive signal, wherein the MEMS mirror arrangement is preferably designed such that the first drive signal is the first oscillating signal of the first oscillator unit (5) or is derived from the first oscillating signal of the first oscillator unit (5).

5. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the MEMS mirror arrangement (12) comprises a first MEMS sensor (24), wherein the MEMS mirror (22) and the first MEMS sensor (24) are designed and configured such that the first MEMS sensor (24) detects oscillatory movements of the MEMS mirror (22) with respect to the first oscillation axis as a first electrical feedback signal with a time-dependent phase position, wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal as a function of the phase position of the first feedback signal.

6. MEMS mirror arrangement (12) according to the preceding claim, wherein the first phase position determination device (2) comprises a first feedback unit (7), wherein the first feedback unit (7) is designed and / or configured and connected to the first MEMS sensor (24) in such a way that the first feedback unit (7) Phase difference (8) of the first feedback signal to a reference signal, in particular the phase difference of the first feedback signal to a drive signal of a first MEMS drive, is determined, wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal (3) as a function of the determined phase difference (8) of the first feedback signal to a reference signal.

7. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) comprises a first adaptation unit (9) dependent on a physical parameter, wherein the MEMS mirror arrangement (12) is designed and / or configured such that the first adaptation unit (9) dependent on a physical parameter continuously receives a frequency value as an input variable or determines this frequency value, and the first adaptation unit (9) dependent on a physical parameter determines a consequently time-dependent phase value (10) depending on the received or determined frequency value, in particular by means of a look-up table, wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal (3) depending on the time-dependent phase value (10),which has been determined with the first adaptation unit (9) dependent on a physical parameter., 8. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) has a first summing unit (11), wherein the first phase position determination device (2) is designed and / or configured such that two or more, in particular three, time-varying phase values are supplied to the first summing unit (11) as input variables and the sum of the supplied phase values is provided as an output variable by the first summing unit (11).

9. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) comprises a first adding unit (34), wherein the first phase position determination device (2) is designed and / or configured such that a time-varying phase value is supplied to the first adding unit (34) as an input variable, preferably a single time-varying phase value is supplied as an input variable, and the sum of the supplied phase value with a first phase value (35) is provided as an output variable by the first adding unit (34), wherein the supplied phase value is preferably the phase position (6) of the first oscillating signal of the first oscillator unit (5) determined according to claim 3 or the phase difference (8) of the first feedback signal to a reference signal determined according to claim 6 or the phase value (10) determined according to claim 7 by means of the first adaptation unit (9) dependent on a physical parameter or a sum of the phase position (6) of the first oscillating signal of the firstOscillator unit (5) and the phase difference (8) of the first feedback signal to a reference signal determined according to claim 6, or a sum of the phase position (6) of the first oscillating signal of the first oscillator unit (5) determined according to claim 3 and the phase value (10) determined according to claim 7 by means of the first adaptation unit (9) dependent on a physical parameter, or a sum of the phase position (6) of the first oscillating signal of the first oscillator unit (5) determined according to claim 3 and the phase difference (8) of the first feedback signal to a reference signal determined according to claim 6 and the phase value (10) determined according to claim 7 by means of the first adaptation unit (9) dependent on a physical parameter.

10. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first calculation device (1) is designed and / or configured such that the first prediction signal (4) cannot be described with a single sine function.

11. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first calculation device (1) is designed and / or configured such that a first sine function (36) is used to determine the first prediction signal (4), wherein the first calculation device (1) and the first phase position determination device (2) are designed and / or configured such that the phase values of the first phase signal (3) are each supplied to the first sine function (36) as input variables and the respective function value formed with the first sine function (36) is provided as an output variable and used to determine the first prediction signal (4).

12. MEMS mirror arrangement (12) according to the preceding claim, wherein the first calculation device (1) is designed and / or configured such that, in addition to the first sine function (36), a first time-dependent correction function (37) is used to determine the first prediction signal (4), so that the first prediction signal (4) cannot be described with a single sine function, wherein the first calculation device (1) is preferably designed and / or configured such that the first time-dependent correction function (37) is determined as a function of the first phase signal (3), wherein the first calculation device (1) is particularly preferably designed and / or configured such that the first prediction signal (4) is formed by the sum of a first summand, which comprises the first sine function (36), and the first correction function (37).

13. MEMS mirror arrangement (12) according to the preceding claim, wherein the first calculation device (1) is designed and / or configured such that the first correction function (37) comprises a second sine function, in particular is the product of the second sine function with at least one further factor, wherein the first calculation device (1) is preferably designed and / or configured such that phase values are each supplied to the second sine function as an input variable and the respective function value formed with the second sine function is provided as an output variable and used to determine the first prediction signal (4).

14. MEMS mirror arrangement (12) according to claim 12 or 13, wherein the first calculation device (1) is designed and / or configured such that the first correction function (37) comprises an adjustable, in particular user-adjustable, first coefficient K1, wherein the first calculation device (1) is preferably designed and / or configured such that the adjustable first coefficient K1 is a multiplier of a trigonometric function, in particular a sine function, also included in the first correction function (37).

15. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the MEMS mirror (22) is additionally mounted so as to be capable of oscillation with respect to a second oscillation axis, wherein the second oscillation axis is not aligned parallel to the first oscillation axis, wherein the MEMS mirror arrangement (12) has a second phase position determination device (2'), wherein the second phase position determination device (2') is designed and / or configured such that it provides a second electrical phase signal (3') which describes a temporally changing phase position of an oscillation movement of the MEMS mirror (22) with respect to the second oscillation axis, wherein the MEMS mirror arrangement (12) comprises a second calculation device (T), wherein the second calculation device (T) is designed and / or configured such that the second calculation device (T) provides a second prediction signal (4'),which describes a future oscillation movement of the MEMS mirror (22) with respect to the second oscillation axis, calculated in direct or indirect dependence on the second phase signal (3'), wherein the second calculation device (T) and the data processing device (15) are designed and / or configured such that the data processing device (15) reads out or receives the second prediction signal (4'), wherein the second calculation device (T) and the data processing device (15) are designed and / or configured such that the provision of the pixel data (14) by the data processing device (15) takes place in dependence on the received or read out second prediction signal (4'),in particular that the provision of the pixel data (14) by the data processing device (15) takes place in an order of the pixel data (14) dependent on the second prediction signal (4') and / or with a selection of the times at which pixel data (14) are respectively provided dependent on the second prediction signal (4').

16. MEMS mirror arrangement (12) according to claim 15, wherein according to a first possibility the first calculation device (1) is designed and / or arranged such that the first calculation device (1) calculates the first Prediction signal (4) is calculated as a function of the first phase signal (3) and additionally as a function of the second phase signal (3'), and / or wherein according to a second possibility the second calculation device (T) is designed and / or configured such that the second calculation device (T) calculates the second prediction signal (4') as a function of the second phase signal (3') and additionally as a function of the first phase signal (3).

17. MEMS mirror arrangement (12) according to the first possibility of claim 16 and as far as dependent on claim 13, wherein the first calculation device (1) is designed and / or configured such that the phase values supplied to the second sine function are each formed or partially formed from the sum of the following two products: the product of a phase value of the first phase signal (3) with an integer, in particular the product of a phase value of the first phase signal (3) with the number 1, and the product of a phase value of the second phase signal (3') with an integer, in particular the product of a phase value of the second phase signal (3') with the number 2.

18. MEMS mirror arrangement (12) according to the first possibility of claim 16 and as far as dependent on claim 13, wherein the first calculation device (1) is designed and / or configured such that the phase values supplied to the second sine function or a further sine function are each formed or partially formed from the difference between the following two products: the product of a phase value of the first phase signal (3) with an integer, in particular the product of a phase value of the first phase signal (3) with the number 1, as the subtrahend and the product of a phase value of the second phase signal (3') with an integer, in particular the product of a phase value of the second phase signal (3') with the number 2, as the minuend.

19. MEMS mirror arrangement (12) according to one of claims 15 to 18, wherein the MEMS mirror (22) is mounted so as to be movable, in particular oscillatable, with respect to the first oscillation axis, with respect to the second oscillation axis and additionally with respect to a third oscillation axis, wherein the MEMS mirror has a mirror plane, wherein the first oscillation axis is aligned parallel to the mirror plane, wherein the second oscillation axis is aligned parallel to the mirror plane, wherein the third oscillation axis is not aligned parallel to the mirror plane and preferably perpendicular to the first and second oscillation axes, wherein the MEMS mirror arrangement (12) has a third phase position determination device, wherein the third phase position determination device is designed and / or configured such that it provides a third electrical phase signal which describes a time-varying phase position of a movement, in particular an oscillation movement, of the MEMS mirror (22) with respect to the third oscillation axis, - wherein, according to a first possibility, the first calculation device is designed and / or configured such that the first calculation device calculates the first prediction signal in direct or indirect dependence on the third phase signal and / or - wherein, according to a second possibility, the second calculation device is designed and / or configured such that the second calculation device calculates the second prediction signal in direct or indirect dependence on the third phase signal.

20. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first calculation device (1) is a component of an IC, i.e. an integrated electronic circuit, and in particular a component of an ASIC, i.e. an application-specific integrated electronic circuit, so that the first calculation device is designed such that the first calculation device (1) calculates the first electrical prediction signal (4) as a function of the first phase signal (3), wherein the first phase position determination device (2) is preferably a component of an IC, in particular ASIC, and particularly preferably a component of that IC or ASIC which also comprises the first calculation device.

21. MEMS mirror arrangement (12) according to one of claims 1 to 19, wherein the first calculation device (1) is part of a microchip equipped with a CPU, a universal programmable integrated electronic circuit, so that the first calculation device (1) is set up such that the first calculation device (1) calculates the first electrical prediction signal (4) as a function of the first phase signal (3), wherein the first phase position determination device (2) is preferably a component of a microchip equipped with a CPU and particularly preferably a component of the microchip equipped with a CPU which also comprises the first calculation device (1).

22. MEMS mirror arrangement (12) according to one of the preceding claims, wherein the MEMS mirror arrangement (12) comprises a light source (21), wherein the light source (21) and the MEMS mirror (12) are designed and arranged such that the MEMS mirror (22) projects a light beam (23) emitted by the light source (21) onto an at least imaginary projection surface, wherein the data processing device (15) and the light source (21) are designed, arranged and configured such that the data processing device (15) provides the pixel data (14) to the light source (21) and the light source (21) projects light beams (23) or their properties, such as color and brightness, onto the MEMS mirror (22) depending on the received pixel data (14).

23. A MEMS mirror arrangement (12), wherein the MEMS mirror arrangement (12) comprises a MEMS mirror (22) for projecting a light beam (21) onto a projection surface of virtual reality glasses or augmented reality glasses, wherein the MEMS mirror (22) is mounted so as to be capable of oscillation with respect to a first oscillation axis, wherein the MEMS mirror (22) is mounted so as to be capable of oscillation with respect to a second oscillation axis, wherein the MEMS mirror (22) is mounted such that the first oscillation axis and the second oscillation axis are not aligned parallel to one another, wherein the MEMS mirror arrangement (12) comprises a first and a second MEMS drive (25), wherein the first MEMS drive (25), the second MEMS drive and the MEMS mirror (22) are designed, arranged and configured such that the first MEMS drive (25) and the second MEMS drive a bi-resonant oscillation of the MEMS mirror (22) with respect to the first and second oscillation axes,wherein the MEMS mirror arrangement is designed such that the bi-resonant oscillation in the frequency spectrum with respect to the first oscillation axis or relative to the second oscillation axis, has a first peak at the driven resonance frequency and at least one second peak at a secondary frequency, wherein the second peak has an amplitude of at least 0.5 per mille, preferably at least 0.75 and particularly preferably at least 1 per mille, of the amplitude of the first peak.

24. A method implemented by a computer or in an integrated circuit for predicting an oscillatory movement of a MEMS mirror, in particular a bi-resonantly driven MEMS mirror, with respect to a first oscillation axis, wherein the predicted oscillatory movement cannot be described by a single sine function.

25. Method for configuring a MEMS mirror array comprising the steps A) providing a MEMS mirror arrangement according to any one of claims 1 to 23 for determining the prediction of the oscillatory motion; B) Initial setting (27) of an adjustable parameter of the system, such as an adjustable coefficient or a phase value which is added to a supplied phase value in an adding unit; C) checking (29) whether the predicted oscillatory motion is substantially identical to the actual oscillatory motion of the MEMS mirror; D) If the test in step C) shows that a discrepancy between predicted vibration movement and actual vibration movement exceeds a predefined threshold: Adjust the adjustable parameter and repeat step C).

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