Resin composition, cured product, laminate, method for producing cured product, method for producing laminate, method for producing semiconductor device, and semiconductor device, and method for producing condensation product

Abstract

Provided are: a resin composition containing a prescribed resin and a compound A represented by formula (1-1); a cured product; a laminate; a method for producing a cured product; a method for producing a laminate; a method for producing a semiconductor device; a semiconductor device; and a novel method for producing a condensation product. X11 is -O- or -NRN1-; RN1 is a hydrogen atom (H) or a substituent; R11 is an aromatic heterocyclic structure; R12 to R16 is H or a substituent; at least one of R12 to R16 is a substituent in which the bonding position with the benzene ring is -O-, -NRN2- or -S-; RN2 is H or a substituent; and two or more of R12 to R16 may be bonded to form a ring structure.

Description

Resin composition, cured product, laminate, method for producing a cured product, method for producing a laminate, method for producing a semiconductor device, semiconductor device, and method for producing a condensate.

[0001] The present invention relates to a resin composition, a cured product, a laminate, a method for producing a cured product, a method for producing a laminate, a method for producing a semiconductor device, a semiconductor device, and a method for producing a condensate.

[0002] Nowadays, resin materials produced from resin compositions containing resins are being utilized in various fields. For example, cyclized resins such as polyimides are used in a variety of applications due to their excellent heat resistance and insulating properties. Examples of such applications include, but are not limited to, insulating films, sealing materials, or protective films for semiconductor devices used for packaging. They are also used as base films or coverlays for flexible substrates.

[0003] For example, in the above-mentioned applications, the cyclized resin such as polyimide is used in the form of a precursor of the cyclized resin such as a polyimide precursor, or a resin composition containing the cyclized resin. Such a resin composition can be applied to a substrate, for example, by coating to form a photosensitive film, and then, as necessary, exposed to light, developed, heated, or the like, to form a cured product on the substrate. In the cured product, the precursor of the cyclized resin such as a polyimide precursor is converted to a cyclized resin such as a polyimide. Since the resin composition can be applied by known coating methods, for example, it can be said to have excellent manufacturing adaptability, such as a high degree of design freedom in the shape, size, application position, etc., of the applied resin composition. In addition to the high performance of the cyclized resin, from the perspective of such excellent manufacturing adaptability, the industrial application of the above-mentioned resin composition is increasingly expected.

[0004] For example, Patent Document 1 describes a negative-type photosensitive resin composition containing the following components: (A) a resin containing a polyimide precursor, a polyimide, or both of them, (B) a photopolymerization initiator, and (C) a nitrogen-containing heterocyclic compound, in which the polyimide precursor, the polyimide, and the nitrogen-containing heterocyclic compound each have a specific structure.

[0005] Japanese Patent Application Laid-Open No. 2023-086715

[0006] When a cured product containing a cyclized resin such as polyimide is used in a manner that it comes into contact with a metal layer such as an insulating film, it is required to suppress the generation of voids (air gaps) between the cured product and the metal layer over a long period of time.

[0007] The present invention aims to provide a resin composition that can produce a cured product in which the generation of voids between the cured product and a metal layer is suppressed over a long period of time, a cured product obtained by curing the resin composition, a laminate including the cured product, a method for producing the cured product, a method for producing the laminate, a method for producing a semiconductor device including the method for producing the cured product, and a semiconductor device including the cured product. Another object of the present invention is to provide a method for producing a novel condensate.

[0008] Representative embodiments of the present invention are shown below: <1> A resin composition comprising at least one resin selected from the group consisting of cyclized resins and precursors thereof, and a compound A represented by the following formula (1-1): In formula (1-1), X １１ is -O- or -NR Ｎ１ represents -, and R Ｎ１ represents a hydrogen atom or a substituent, R １１ represents an aromatic heterocyclic structure which may have a substituent, R １２ ~R １６ is a hydrogen atom or a substituent, and R １２ ~R １６ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ - or -S-, and R Ｎ２ is a hydrogen atom or a substituent, and R １２ ~R １６ <2> In the above formula (1-1), at least two of R １３ , R １４ and R １５ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２<3> The resin composition according to <1>, wherein R in the formula (1-1) is - or -S-. １１ <4> The resin composition according to <2>, wherein R in the formula (1-1) contains —NH— or —S—. １１ The resin composition according to any one of <1> to <3>, wherein the aromatic heterocyclic structure has at least one partial structure represented by the following formula (R-1): In formula (R-1), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and * represents a bonding site to an atom that is a ring member of the heterocyclic structure. １１ <6> The resin composition according to any one of <1> to <4>, wherein the aromatic heterocyclic structure in the formula (1-1) is a monocyclic or bicyclic aromatic heterocyclic structure having three or more nitrogen atoms as ring members. １１ The resin composition according to any one of <1> to <5>, wherein the aromatic heterocyclic structure has at least one partial structure represented by the following formula (R-2): In formula (R-2), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and X ５１ is an atom that is a ring member of the aromatic heterocyclic structure, and X ５２ is a ring member atom of the aromatic heterocyclic structure, and is a carbon atom or a nitrogen atom; X ５３ <7> In the above formula (1-1), R is a nitrogen atom, an oxygen atom, or a sulfur atom. １１ <6> The resin composition according to any one of <1> to <6>, wherein: is any one of the structures described below, or a structure in which a hydrogen atom is substituted in these structures: <8> In the above formula (1-1), R １３ , R １４ and R １５ At least one of the groups is —OH or —NHR Ｎ２ <9> The resin composition according to any one of <1> to <7>, wherein in the formula (1-1), R １３ , R １４ and R １５<10> The resin composition according to any one of <1> to <8>, wherein at least one of R １２ is a substituent in which the bonding site to the benzene ring described in formula (1-1) is an oxygen atom, a nitrogen atom, or a sulfur atom, and R １３ , R １４ , R １５ and R １６ <11> The resin composition according to any one of <1> to <9>, wherein at least one of R １１ <1> <10> The resin composition according to any one of the above items <1> to <10>, wherein: In the above structure, * represents X １１ is the linking site with R ３３ is an organic group. <12> X in the above formula (1-1) １１is —NH—. <13> The resin composition according to any one of <1> to <12>, wherein the molecular weight of the compound A is less than 2,000. <14> The resin composition according to any one of <1> to <13>, wherein the resin is a polyimide or a polyimide precursor. <15> The resin composition according to any one of <1> to <14>, wherein the resin has a polymerizable group. <16> The resin composition according to any one of <1> to <15>, further comprising an antioxidant. <17> The resin composition according to any one of <1> to <16>, which is used for forming an interlayer insulating film for a redistribution layer. <18> A cured product obtained by curing the resin composition according to any one of <1> to <17>. <19> A laminate comprising two or more layers each comprising the cured product according to <18>, and a metal layer between any two of the layers each comprising the cured product. <20> A method for producing a cured product, comprising a film-forming step of applying the resin composition according to any one of <1> to <17> onto a substrate to form a film. <21> A method for producing the cured product according to <20>, comprising an exposure step of selectively exposing the film to light, and a development step of developing the film using a developer to form a pattern. <22> A method for producing the cured product according to <20> or <21>, comprising a heating step of heating the film at 50 to 450°C. <23> A method for producing a laminate, comprising the method for producing a cured product according to any one of <20> to <22>. <24> A method for producing a semiconductor device, comprising the method for producing a cured product according to any one of <20> to <22>. <25> A semiconductor device, comprising the cured product according to <18>. <26> A method for producing a condensate AQ that is a condensate of a structure derived from the compound AS and a structure derived from the nucleophilic compound AN, the method comprising a step I of reacting a polymer AP obtained by polymerizing a compound AS having an aromatic ring structure, a hydroxy group bonded to the aromatic ring structure via a single bond, and a carboxy group through an ester bond with a nucleophilic compound AN. <27> A method for producing the condensate AQ according to <26>, in which the polymer AP is a compound represented by the following formula (AP-1): In formula (AP-1), R represents a substituent, m represents an integer of 0 to 4, and when m is 2 or more, R may bond with another R on the same benzene ring to form a ring structure, and when m is 2 or more, the structures in the parentheses to which m is a subscript may be different from each other, and n represents the number of repeating units and is an integer of 2 or more, and the structures in the parentheses to which n is a subscript may be different from each other. <28> A method for producing the condensate AQ according to <27>, wherein m in formula (AP-1) is 1. <29> A method for producing the condensate AQ according to any one of <26> to <28>, wherein the nucleophilic compound AN contains -NH- or -OH in its structure. <30> A method for producing the condensate AQ according to any one of <26> to <28>, wherein the nucleophilic compound AN contains -NH ２ <31> A method for producing the condensed compound AQ according to any one of <26> to <30>, wherein the nucleophilic compound AN has an aromatic heterocyclic structure in its structure. <32> A method for producing the condensed compound AQ according to <31>, wherein the aromatic heterocyclic structure in the nucleophilic compound AN has at least one partial structure represented by the following formula (R-3): In formula (R-3), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and each * represents a bonding site to an atom that is a ring member of the heterocyclic structure. <33> The method for producing the condensate AQ according to <32>, wherein the aromatic heterocyclic structure in the nucleophilic compound AN has at least one partial structure represented by the following formula (R-4): In formula (R-4), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and X ８１ is an atom that is a ring member of the aromatic heterocyclic structure, and X ８２ is a ring member atom of the aromatic heterocyclic structure, and is a carbon atom or a nitrogen atom; X ８３is a nitrogen atom, an oxygen atom, or a sulfur atom. <34> A method for producing the condensed product AQ according to any one of <31> to <33>, wherein the aromatic heterocyclic structure in the nucleophilic compound AN is a monocyclic or bicyclic aromatic heterocyclic structure having three or more nitrogen atoms as ring members. <35> A method for producing the condensed product AQ according to any one of <31> to <33>, wherein the aromatic heterocyclic structure in the nucleophilic compound AN is any one of the structures shown below, or any of these structures in which a hydrogen atom is substituted: <36> The method for producing the condensate AQ according to any one of <26> to <35>, wherein the condensate AQ is represented by the following formula (5-1): In formula (5-1), R ５１ is a structure derived from the nucleophilic compound AN, and R ５２ ~R ５６ is a hydrogen atom or a substituent, and R ５２ ~R ５６ At least one of the groups is a substituent in which the bonding site to the benzene ring described in formula (5-1) is —O—, and R ５２ ~R ５６ At least two of the R in the formula (5-1) may be bonded to form a ring structure. ５２ ~R ５６ <38> The method for producing the condensate AQ according to <36>, wherein at least one of R in the formula (5-1) is —OH. ５２ ~R ５６and at least three of the above are hydrogen atoms. <39> A method for producing the condensate AQ according to any one of <26> to <38>, wherein step I is carried out in the presence of a solvent SI in a solution state or a suspension state. <40> A method for producing the condensate AQ according to <39>, wherein the solvent SI is an aprotic polar solvent. <41> A method for producing the condensate AQ according to any one of <26> to <40>, wherein step I is carried out in the presence of a basic compound TI different from the nucleophilic compound AN. <42> A method for producing the condensate AQ according to <41>, wherein the basic compound TI is at least one selected from a pyridine base, an imidazole base, an amidine base, and a guanidine base. <43> A method for producing the condensate AQ according to any one of <26> to <42>, comprising step II of polymerizing the compound AS to synthesize the polymer AP polymerized via an ester bond. <44> The method for producing the condensate AQ according to any one of <26> to <43>, wherein the compound AS is represented by the following formula (6-1): In formula (6-1), R ６１ is —OH or a substituent derivable from —OH, and R ６２ ~R ６６ is a hydrogen atom or a substituent, and R ６２ ~R ６６ At least one of the substituents is a substituent having —O— bonded to the benzene ring as shown in formula (6-1), and R ６２ ~R ６６ At least two of the R in the formula (6-1) may be bonded to form a ring structure. ６１ <46> The method for producing the condensate AQ according to <44>, wherein R in the above formula (6-1) is —OH. ６２ ~R ６６ <47> The method for producing the condensate AQ according to <44> or <45>, wherein at least one of R in the formula (6-1) is —OH. ６２ ~R ６６wherein at least three of the above are hydrogen atoms. <48> A method for producing the condensate AQ according to any one of <43> and <45> to <47>, wherein a condensing agent AC is used in Step II. <49> A method for producing the condensate AQ according to <48>, wherein the condensing agent AC is at least one selected from a carbodiimide compound, phosgene, a phosgene derivative, an acid anhydride, an acid chloride, a phosphonium compound, a uronium compound, and a formamidinium compound. <50> A method for producing the condensate AQ according to <49>, wherein a phosgene derivative is used as the condensing agent AC. <51> A method for producing the condensate AQ according to <50>, wherein diphenyl carbonate is used as the condensing agent AC. <52> A method for producing the condensate AQ according to any one of <43> and <45> to <51>, wherein Step II is carried out in the presence of a solvent SII in the form of a solution or suspension. <53> A method for producing the condensate AQ according to <52>, wherein the solvent SII is an aprotic polar solvent. <54> A method for producing the condensate AQ according to any one of <43> and <45> to <53>, wherein the step II is carried out in the presence of a basic compound TII. <55> A method for producing the condensate AQ according to <54>, wherein the basic compound TII is at least one selected from the group consisting of a pyridine base, an imidazole base, an amidine base, and a guanidine base. <56> A resin composition comprising: at least one resin selected from the group consisting of cyclized resins and precursors thereof; and the condensate AQ synthesized by the method according to any one of <26> to <55>, wherein the condensate AQ is a compound represented by the following formula (1-1): In formula (1-1), X １１ is -O- or -NR Ｎ１ represents -, and R Ｎ１ represents a hydrogen atom or a substituent, R １１ represents an aromatic heterocyclic structure which may have a substituent, R １２ ~R １６ is a hydrogen atom or a substituent, and R １２ ~R １６ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２- or -S-, and R Ｎ２ is a hydrogen atom or a substituent, and R １２ ~R １６ At least two of these may be bonded to form a ring structure. <57> The resin composition according to <56>, further comprising the polymer AP.

[0009] According to the present invention, there are provided a resin composition that can produce a cured product in which the generation of voids between the cured product and a metal layer is suppressed over a long period of time, a cured product obtained by curing the resin composition, a laminate containing the cured product, a method for producing the cured product, a method for producing the laminate, a method for producing a semiconductor device that includes the method for producing the cured product, and a semiconductor device that includes the cured product. Furthermore, according to the present invention, there is provided a method for producing a novel condensate.

[0010] The following describes the main embodiments of the present invention. However, the present invention is not limited to the explicitly described embodiments. In this specification, a numerical range expressed using the symbol "to" means a range that includes the numerical values ​​before and after "to" as the lower and upper limits, respectively. In this specification, the term "process" refers not only to an independent process but also to a process that cannot be clearly distinguished from other processes as long as the process achieves its intended effect. In the description of a group (atomic group), a notation that does not specify whether it is substituted or unsubstituted encompasses both unsubstituted groups (atomic groups) and substituted groups (atomic groups). For example, the term "alkyl group" encompasses not only unsubstituted alkyl groups (unsubstituted alkyl groups) but also substituted alkyl groups (substituted alkyl groups). In this specification, unless otherwise specified, "exposure" includes not only exposure using light but also exposure using particle beams such as electron beams and ion beams. In addition, examples of light used for exposure include actinic rays or radiation such as the bright line spectrum of a mercury lamp, far ultraviolet light typified by excimer lasers, extreme ultraviolet light (EUV light), X-rays, and electron beams. As used herein, "(meth)acrylate" refers to either or both of "acrylate" and "methacrylate," "(meth)acrylic" refers to either or both of "acrylic" and "methacrylic," and "(meth)acryloyl" refers to either or both of "acryloyl" and "methacryloyl." In the structural formulae herein, Me represents a methyl group, Et represents an ethyl group, Bu represents a butyl group, and Ph represents a phenyl group. As used herein, the term "total solid content" refers to the total mass of all components of the composition excluding the solvent. Furthermore, as used herein, the term "solid content concentration" refers to the mass percentage of the components other than the solvent relative to the total mass of the composition. As used herein, the weight average molecular weight (Mw) and number average molecular weight (Mn) are values ​​measured using gel permeation chromatography (GPC) and are defined as polystyrene equivalent values, unless otherwise specified.In this specification, the weight-average molecular weight (Mw) and number-average molecular weight (Mn) can be determined, for example, by using an HLC-8220GPC (manufactured by Tosoh Corporation) and guard columns HZ-L, TSKgel Super HZM-M, TSKgel Super HZ4000, TSKgel Super HZ3000, and TSKgel Super HZ2000 (all manufactured by Tosoh Corporation) connected in series. Unless otherwise specified, these molecular weights are measured using NMP (N-methyl-2-pyrrolidone) as the eluent. However, when NMP is not suitable as the eluent, for example, due to low solubility, THF (tetrahydrofuran) can also be used. Furthermore, unless otherwise specified, detection in GPC measurement is assumed to be performed using a UV (ultraviolet) detector at a wavelength of 254 nm. In this specification, when the positional relationship of each layer constituting a laminate is described as "above" or "below," it is sufficient that another layer is above or below the reference layer among the multiple layers being considered. In other words, a third layer or element may be interposed between the reference layer and the other layer, and the reference layer and the other layer do not need to be in contact with each other. Unless otherwise specified, the direction in which layers are stacked on the substrate is referred to as "above." Alternatively, if a resin composition layer is present, the direction from the substrate to the resin composition layer is referred to as "above," and the opposite direction is referred to as "below." Note that such vertical directions are defined for convenience in this specification, and in actual embodiments, the "above" direction in this specification may differ from the vertically upward direction. In this specification, unless otherwise specified, the composition may contain two or more compounds corresponding to each component contained in the composition. Furthermore, unless otherwise specified, the content of each component in the composition means the total content of all compounds corresponding to that component. In this specification, unless otherwise specified, the temperature is 23° C., the atmospheric pressure is 101,325 Pa (1 atmosphere), and the relative humidity is 50% RH. In this specification, a combination of preferred embodiments is a more preferred embodiment.

[0011] (Resin Composition) A resin composition according to a first aspect of the present invention (hereinafter also simply referred to as the "first resin composition") comprises at least one resin selected from the group consisting of cyclized resins and precursors thereof, and a compound A represented by the above formula (1-1). A resin composition according to a second aspect of the present invention (hereinafter also simply referred to as the "second resin composition") comprises at least one resin selected from the group consisting of cyclized resins and precursors thereof, and the condensate AQ synthesized by the method for producing a condensate of the present invention, wherein the condensate AQ is a compound represented by the above formula (1-1). In this specification, the first resin composition and the second resin composition are collectively referred to as the "resin composition". In addition, in this specification, "at least one resin selected from the group consisting of cyclized resins and precursors thereof" is also referred to as the "specific resin".

[0012] The resin composition of the present invention is preferably used to form a photosensitive film that is subjected to exposure and development, and more preferably to form a film that is subjected to exposure and development using a developer containing an organic solvent. The resin composition of the present invention can be used, for example, to form an insulating film for a semiconductor device, an interlayer insulating film for a rewiring layer, a stress buffer film, etc., and is preferably used to form an interlayer insulating film for a rewiring layer. Furthermore, the resin composition of the present invention is preferably a negative resin composition. The resin composition of the present invention is preferably used to form a cured product in which at least a portion of the resin composition is in contact with a metal. Examples of metals include copper, aluminum, nickel, vanadium, titanium, chromium, cobalt, gold, tungsten, tin, silver, and alloys containing these metals, including copper and aluminum or alloys containing at least one of these, and copper or an alloy containing copper is preferred. In the present invention, negative development refers to development in which unexposed areas are removed by development during exposure and development, and positive development refers to development in which exposed areas are removed by development. As the exposure method, the developer, and the development method, for example, the exposure method described in the exposure step and the developer and development method described in the development step in the description of the method for producing a cured product described below can be used.

[0013] The resin composition of the present invention provides a cured product in which the generation of voids between the cured product and the metal layer is suppressed over a long period of time. The mechanism by which this effect is achieved is unknown, but is speculated to be as follows. The compound represented by formula (1-1) has an aromatic heterocyclic structure and an aromatic ring structure having a specific substituent. It is believed that the adsorption of the aromatic heterocyclic structure to the metal surface of metal wiring or the like suppresses metal migration into the cured product. Furthermore, it is believed that the aromatic ring structure having the specific substituent reduces the activation of corrosive substances such as acids that are introduced from outside the insulating film or generated within the insulating film. Furthermore, the adsorption of the aromatic heterocyclic structure allows the aromatic ring structure and the specific substituent to be densely concentrated near the metal surface, thereby further enhancing the migration suppression effect compared to, for example, the simple use of a migration inhibitor and an antioxidant in combination. Furthermore, the compound represented by formula (1-1) has an ester structure or an amide structure, and therefore has excellent compatibility with specific resins. Therefore, it is difficult for the film to be deposited when it is formed, and when it is applied to a metal, it is adsorbed to the metal in a nearly uniform manner, which is thought to have the effect of suppressing the occurrence of voids as described above.

[0014] However, Patent Document 1 does not describe a resin composition containing Compound A.

[0015] The resin composition of the present invention will be described in detail below.

[0016] <Specific Resin> The resin composition of the present invention contains at least one resin (specific resin) selected from the group consisting of cyclized resins and their precursors. The cyclized resin is preferably a resin containing an imide ring structure or an oxazole ring structure in its main chain structure. In the present invention, the term "main chain" refers to the relatively longest bonded chain in the resin molecule, and the term "side chain" refers to any other bonded chain. Examples of cyclized resins include polyimide, polybenzoxazole, and polyamideimide. A precursor of a cyclized resin refers to a resin whose chemical structure changes upon external stimulation to become a cyclized resin. A resin whose chemical structure changes upon heating to become a cyclized resin is preferred, and a resin that undergoes a ring-closing reaction upon heating to form a ring structure to become a cyclized resin is more preferred. Examples of precursors of cyclized resins include polyimide precursors, polybenzoxazole precursors, and polyamideimide precursors.

[0017] As used herein, polyimide refers to a resin having a repeating unit containing an imide structure in its molecular chain, preferably a resin having a repeating unit containing an imide ring structure in its molecular chain. Furthermore, when the polyimide is a linear resin, the polyimide is preferably a resin having a repeating unit containing an imide structure in its main chain, more preferably a resin having a repeating unit containing an imide ring structure in its main chain. As used herein, the imide structure refers to a structure represented by *-C(=O)N(-*)C(=O)-*, where * represents a bonding site to another structure, preferably a bonding site to a carbon atom, more preferably a bonding site to a quaternary carbon atom. As used herein, the imide ring structure refers to a ring structure containing two carbon atoms and all of the nitrogen atoms in the imide structure as ring members. The imide ring structure is preferably a five-membered ring.

[0018] In this specification, the term "polyimide precursor" refers to a resin that undergoes a change in chemical structure due to an external stimulus to become a polyimide, and is preferably a resin that undergoes a change in chemical structure due to heat to become a polyimide, and more preferably a resin that undergoes a ring-closing reaction due to heat to form a ring structure to become a polyimide. The preferred embodiments of the polyimide that are formed are as described above.

[0019] In this specification, polybenzoxazole refers to a resin having a repeating unit containing a benzoxazole structure in the molecular chain. When polybenzoxazole is a linear resin, it is preferable that the polybenzoxazole is a resin having a repeating unit containing a benzoxazole structure in the main chain. In the present invention, the benzoxazole structure refers to a structure represented by the following formula (PBO-1): In formula (PBO-1), * represents a bonding site to another structure.

[0020] In this specification, the polybenzoxazole precursor refers to a resin that undergoes a change in chemical structure due to an external stimulus to become polybenzoxazole, and is preferably a resin that undergoes a change in chemical structure due to heat to become polybenzoxazole, and more preferably a resin that undergoes a ring-closing reaction due to heat to form a ring structure to become polybenzoxazole. Preferred embodiments of the polybenzoxazole that are formed are as described above.

[0021] As used herein, polyamideimide refers to a resin having an amide structure in the molecular chain in addition to an imide structure, and is preferably a resin having a repeating unit containing an imide ring structure and an amide structure in the molecular chain. In this specification, the amide structure refers to a structure represented by *-C(=O)N(-#)-*, where * represents a bonding site to another structure, preferably a bonding site to a carbon atom, and more preferably a bonding site to a quaternary carbon atom. Furthermore, # represents a bonding site to another structure, preferably a bonding site to a hydrogen atom or a carbon atom, and more preferably a bonding site to a hydrogen atom. As used herein, polyamideimide precursor refers to a resin whose chemical structure changes upon external stimulation to become a polyamideimide, preferably a resin whose chemical structure changes upon heating to become a polyamideimide, and more preferably a resin whose ring structure is formed by a ring-closing reaction upon heating to become a polyamideimide. Preferred aspects of the polyamideimide formed are as described above.

[0022] The resin composition preferably contains, as the specific resin, at least one resin selected from the group consisting of polyimide, polyimide precursor, polybenzoxazole, polybenzoxazole precursor, polyamideimide, and polyamideimide precursor. The resin composition preferably contains, as the specific resin, polyimide or a polyimide precursor. The specific resin preferably has a polymerizable group, more preferably a radically polymerizable group. When the specific resin has a radically polymerizable group, the resin composition of the present invention preferably contains a radical polymerization initiator, more preferably a radical polymerization initiator and a radical crosslinking agent. If necessary, a sensitizer may also be included. From such a resin composition, for example, a negative-type photosensitive film is formed. Furthermore, the specific resin may have a polarity conversion group such as an acid-decomposable group. When the specific resin has an acid-decomposable group, the resin composition preferably contains a photoacid generator. From such a resin composition, for example, a chemically amplified positive-type photosensitive film or a negative-type photosensitive film is formed.

[0023] [Polyimide Precursor] The polyimide precursor used in the present invention is not particularly limited in type, but preferably contains a repeating unit represented by the following formula (2). In formula (2), A １ and A ２ are each independently an oxygen atom or —NR ｚ represents -, and R １１１ represents a divalent organic group, and R １１５ represents a tetravalent organic group, R １１３ and R １１４ each independently represents a hydrogen atom or a monovalent organic group; R ｚ represents a hydrogen atom or a monovalent organic group.

[0024] A in formula (2) １ and A ２ are each independently an oxygen atom or —NR ｚ -, and an oxygen atom is preferred. ｚ represents a hydrogen atom or a monovalent organic group, and preferably a hydrogen atom. １１１represents a divalent organic group. Examples of the divalent organic group include groups containing a linear or branched aliphatic group, a cyclic aliphatic group, and an aromatic group, and a linear or branched aliphatic group having 2 to 20 carbon atoms, a cyclic aliphatic group having 3 to 20 carbon atoms, an aromatic group having 3 to 20 carbon atoms, or a group consisting of a combination thereof is preferred, and a group containing an aromatic group having 6 to 20 carbon atoms is more preferred. The linear or branched aliphatic group may have a hydrocarbon group in the chain substituted with a group containing a heteroatom, and the cyclic aliphatic group and aromatic group may have a hydrocarbon group in the ring substituted with a group containing a heteroatom. R in formula (2) １１１ Examples of the group include groups represented by -Ar- and -Ar-L-Ar-, and the group represented by -Ar-L-Ar- is preferred, where each Ar is independently an aromatic group, L is a single bond, an aliphatic hydrocarbon group having 1 to 10 carbon atoms which may be substituted with a fluorine atom, -O-, -CO-, -S-, or -SO ２ - or -NHCO-, or a group consisting of a combination of two or more of the above. The preferred ranges for these are as described above.

[0025] R １１１ is preferably derived from a diamine. Examples of diamines used in the production of the polyimide precursor include linear or branched aliphatic, cyclic aliphatic, or aromatic diamines. Only one type of diamine may be used, or two or more types may be used. Specifically, R １１１ is preferably a diamine containing a linear or branched aliphatic group having 2 to 20 carbon atoms, a cyclic aliphatic group having 3 to 20 carbon atoms, an aromatic group having 3 to 20 carbon atoms, or a group consisting of a combination thereof, and more preferably a diamine containing an aromatic group having 6 to 20 carbon atoms. The linear or branched aliphatic group may have a hydrocarbon group in the chain substituted with a group containing a heteroatom, and the cyclic aliphatic group and aromatic group may have a hydrocarbon group in the ring substituted with a group containing a heteroatom. Examples of groups containing an aromatic group include the following.

[0026] In the formula, A represents a single bond or a divalent linking group, and is selected from the group consisting of a single bond, an aliphatic hydrocarbon group having 1 to 10 carbon atoms which may be substituted with a fluorine atom, —O—, —C(═O)—, —S—, and —SO ２ -, -NHCO-, or a group selected from a combination thereof, and is preferably a single bond, an alkylene group having 1 to 3 carbon atoms which may be substituted with a fluorine atom, -O-, -C(=O)-, -S-, or -SO ２ - is more preferably a group selected from -CH ２ -, -O-, -S-, -SO ２ -, -C(CF ３ ) ２ - or -C(CH ３ ) ２ In the formula, * represents a bonding site to another structure.

[0027] Specific examples of diamines include 1,2-diaminoethane, 1,2-diaminopropane, 1,3-diaminopropane, 1,4-diaminobutane, and 1,6-diaminohexane; 1,2- or 1,3-diaminocyclopentane, 1,2-, 1,3-, or 1,4-diaminocyclohexane, 1,2-, 1,3-, or 1,4-bis(aminomethyl)cyclohexane, bis-(4-aminocyclohexyl)methane, bis-(3-aminocyclohexyl)methane, 4,4'-diamino-3,3'-dimethylcyclohexylmethane, and isophoronediamine; m- or p-phenylenediamine, diaminotoluene, 4,4'- or 3,3'-diaminobiphenyl, 4,4'-diaminodiphenyl ether, 3,3-diaminodiphenyl ether, 4,4'- or 3,3'-diaminodiphenylmethane, 4,4'- or 3,3'-diaminodiphenyl sulfone, 4,4'- or 3,3'-diaminodiphenyl sulfide, 4,4'- or 3,3'-diaminobenzophenone, 3 ,3'-dimethyl-4,4'-diaminobiphenyl, 2,2'-dimethyl-4,4'-diaminobiphenyl, 3,3'-dimethoxy-4,4'-diaminobiphenyl, 2,2-bis(4-aminophenyl)propane, 2,2-bis(4-aminophenyl)hexafluoropropane, 2,2-bis(3-hydroxy-4-aminophenyl)propane, 2,2-bis(3-hydroxy-4-aminophenyl)hexafluoropropane parafluoropropane, 2,2-bis(3-amino-4-hydroxyphenyl)propane, 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, bis(3-amino-4-hydroxyphenyl)sulfone, bis(4-amino-3-hydroxyphenyl)sulfone, 4,4'-diaminoparaterphenyl, 4,4'-bis(4-aminophenoxy)biphenyl, bis[4-(4-aminophenoxy)phenyl]sulfone, bis[4-(3-aminophenoxy)phenyl]sulfone, bis[4-(2-aminophenoxy)phenyl]sulfone, 1,4-bis(4-aminophenoxy)benzene, 9,10-bis(4-aminophenyl)anthracene, 3,3'-dimethyl-4,4'-diaminodiphenylsulfone, 1,3-bis(4-aminophenoxy)benzene, 1,3-bis(3-aminophenoxy)benzene, 1,3-bis(4-aminophenyl)benzene, 3,3'-diethyl-4,4'-diaminodiphenylmethane, 3,3'-dimethyl-4,4'-diaminodiphenylmethane, 4,4'-diaminooctafluorobiphenyl, 2,2-bis[4-(4-aminophenoxy)phenyl]propane, 2,2-bis[4-(4-aminophenoxy)phenyl]hexafluoropropane, 9,9-bis(4-aminophenyl)-10-hydroanthracene, 3,3',4,4'-tetraaminobiphenyl, 3,3',4,4'-tetraaminodiphenyl ether fluorene, 1,4-diaminoanthraquinone, 1,5-diaminoanthraquinone, 3,3-dihydroxy-4,4'-diaminobiphenyl, 9,9'-bis(4-aminophenyl)fluorene, 4,4'-dimethyl-3,3'-diaminodiphenyl sulfone, 3,3',5,5'-tetramethyl-4,4'-diaminodiphenylmethane, 2,4- and 2,5-diaminocumene, 2,5-dimethyl-p-phenylenediamine, acetoguanamine, 2,3,5,6-tetramethyl-p-phenylenediamine, 2,4,6-trimethyl-m-phenylenediamine bis(3-aminopropyl)tetramethyldisiloxane, bis(p-aminophenyl)octamethylpentasiloxane, 2,7-diaminofluorene, 2,5-diaminopyridine, 1,2-bis(4-aminophenyl)ethane, diaminobenzanilide, esters of diaminobenzoic acid, 1,5-diaminonaphthalene, diaminobenzotrifluoride, 1,3-bis(4-aminophenyl)hexafluoropropane, 1,4-bis(4-aminophenyl)octafluorobutane, 1,5-bis(4-aminophenyl)decafluoropentane, 1,7-bis(4-aminophenyl)tetradecafluoroheptane, 2,2-bis[4-(3-aminophenoxy)phenyl]hexafluoropropane, 2,2-bis[4-(2-aminophenoxy)phenyl]hexafluoropropane, 2,2-bis[4-(4-aminophenoxy)-3,5-dimethylphenyl]hexafluoropropane, 2,2-bis[4-(4-aminophenoxy)-3,5-bis(trifluoromethyl)phenyl]hexafluoropropane, p-bis(4-amino-2-trifluoromethylphenoxy)benzene, 4,At least one diamine selected from 4'-bis(4-amino-2-trifluoromethylphenoxy)biphenyl, 4,4'-bis(4-amino-3-trifluoromethylphenoxy)biphenyl, 4,4'-bis(4-amino-2-trifluoromethylphenoxy)diphenyl sulfone, 4,4'-bis(3-amino-5-trifluoromethylphenoxy)diphenyl sulfone, 2,2-bis[4-(4-amino-3-trifluoromethylphenoxy)phenyl]hexafluoropropane, 3,3',5,5'-tetramethyl-4,4'-diaminobiphenyl, 4,4'-diamino-2,2'-bis(trifluoromethyl)biphenyl, 2,2',5,5',6,6'-hexafluorotolidine, and 4,4'-diaminoquaterphenyl can be mentioned.

[0028] Also preferred are the diamines (DA-1) to (DA-18) described in paragraphs 0030 to 0031 of WO 2017 / 038598.

[0029] Also preferably used are diamines having two or more alkylene glycol units in the main chain described in paragraphs 0032 to 0034 of WO 2017 / 038598.

[0030] R １１１ is preferably represented by -Ar-L-Ar- from the viewpoint of flexibility of the resulting organic film, wherein each Ar is independently an aromatic group, and L is an aliphatic hydrocarbon group having 1 to 10 carbon atoms which may be substituted with a fluorine atom, -O-, -CO-, -S-, or -SO ２ Ar is preferably a phenylene group, and L is preferably an aliphatic hydrocarbon group having 1 or 2 carbon atoms which may be substituted with a fluorine atom, -O-, -CO-, -S-, or -SO ２ The aliphatic hydrocarbon group here is preferably an alkylene group.

[0031] Also, R １１１From the viewpoint of i-line transmittance, it is preferable that is a divalent organic group represented by the following formula (51) or formula (61). In particular, from the viewpoint of i-line transmittance and ease of availability, it is more preferable that is a divalent organic group represented by formula (61). Formula (51) In formula (51), R ５０ ~R ５７ are each independently a hydrogen atom, a fluorine atom, or a monovalent organic group, and R ５０ ~R ５７ At least one of R is a fluorine atom, a methyl group, or a trifluoromethyl group, and * each independently represents a bonding site with the nitrogen atom in formula (2). ５０ ~R ５７ Examples of the monovalent organic group include an unsubstituted alkyl group having 1 to 10 carbon atoms (preferably 1 to 6 carbon atoms) and a fluorinated alkyl group having 1 to 10 carbon atoms (preferably 1 to 6 carbon atoms). In formula (61), R ５８ and R ５９ are each independently a fluorine atom, a methyl group, or a trifluoromethyl group, and * each independently represents a bonding site with the nitrogen atom in formula (2). Examples of diamines that give the structure of formula (51) or formula (61) include 2,2'-dimethylbenzidine, 2,2'-bis(trifluoromethyl)-4,4'-diaminobiphenyl, 2,2'-bis(fluoro)-4,4'-diaminobiphenyl, and 4,4'-diaminooctafluorobiphenyl. These may be used alone or in combination of two or more.

[0032] R １１１ The number of carbon atoms in R is preferably 4 or more, more preferably 4 to 50, and even more preferably 4 to 40. １１１ may be a group containing a structure obtained by removing two or more hydrogen atoms from a structure represented by any one of the following formulas (V-1) to (V-10): By being an organic group containing a structure obtained by removing two or more hydrogen atoms from a structure represented by any one of formulas (V-1) to (V-10), the chemical resistance and flatness of the cured product are improved. In formula (V-2), R Ｘ１are each independently a hydrogen atom, an alkyl group, or a halogenated alkyl group. Ｘ２ and R Ｘ３ each independently represents a hydrogen atom or a substituent, R Ｘ２ and R Ｘ３ may bond to form a ring structure. Ｘ５ are each independently a hydrogen atom, an alkyl group, or a halogenated alkyl group.

[0033] In formula (V-2), R Ｘ１ are each independently preferably an alkyl group or a halogenated alkyl group, more preferably an alkyl group having 1 to 4 carbon atoms or a halogenated alkyl group having 1 to 4 carbon atoms, and even more preferably a methyl group or a trifluoromethyl group. A halogenated alkyl group refers to a group in which at least one hydrogen atom of an alkyl group has been substituted with a halogen atom. The halogen atom is preferably F or Cl, and more preferably F. In formula (V-3), R Ｘ２ and R Ｘ３ are each preferably independently a hydrogen atom. Ｘ２ and R Ｘ３ When R Ｘ２ and R Ｘ３ The structure formed by bonding is a single bond, —O— or —C(R) ２ - is preferred, and -O- or -C(R) ２ R represents a hydrogen atom or a monovalent organic group, preferably a hydrogen atom, an alkyl group, or an aryl group, more preferably a hydrogen atom. Ｘ５ are each independently preferably an alkyl group or a halogenated alkyl group, more preferably an alkyl group having 1 to 4 carbon atoms or a halogenated alkyl group having 1 to 4 carbon atoms, and even more preferably a methyl group or a trifluoromethyl group. A halogenated alkyl group refers to a group in which at least one hydrogen atom of an alkyl group has been substituted with a halogen atom. As the halogen atom, F or Cl is preferred, and F is more preferred.

[0034] R １１１is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-1), R １１１ is preferably a group represented by the following formula (V-1-2): １１１ represents the bonding site with the two nitrogen atoms to which n is bonded, and n1 represents an integer of 1 to 5. Furthermore, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0035] R １１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-2), R １１１ is preferably a group represented by the following formula (V-2-3) or formula (V-2-4), and from the viewpoint of reducing the dielectric constant of the cured product, it is preferably a group represented by formula (V-2-4). Ｘ１ represents a single bond or —O—, and * represents R １１１ represents the bonding site with the two nitrogen atoms to which R is bonded. Ｘ１ The definitions and preferred embodiments of are as described above. In addition, the hydrogen atoms in these structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0036] R １１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-3), R １１１ is preferably a group represented by the following formula (V-3-3) or formula (V-3-4), and from the viewpoint of reducing the dielectric constant of the cured product, is preferably a group represented by formula (V-3-3). In the following formulas, * represents R １１１ represents the bonding site with the two nitrogen atoms to which R is bonded. Ｘ２ and R Ｘ３ The definitions and preferred embodiments of are as described above. In addition, the hydrogen atoms in these structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0037] R１１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-4), R １１１ is preferably a group represented by the following formula (V-4-2) or formula (V-4-3): １１１ represents the bonding site to the two nitrogen atoms to which n is bonded, and n1 represents an integer of 0 to 5. An embodiment in which n1 is 0 is also one of the preferred embodiments of the present invention. Furthermore, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group. Examples of known substituents include an alkyl group, a halogenated alkyl group, and a halogen atom.

[0038] R １１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-5), R １１１ is preferably a group represented by the following formula (V-5-2): １１１ represents the bonding site with the two nitrogen atoms to which the two are bonded. Furthermore, the hydrogen atoms in formula (V-5-2) may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group. Examples of known substituents include an alkyl group, a halogenated alkyl group, and a halogen atom. However, it is also preferable that none of the hydrogen atoms in the structure represented by (V-5-2) is substituted.

[0039] R １１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-6), R １１１ is preferably a group represented by the following formula (V-6-2): １１１ represents the bonding site with the two nitrogen atoms to which the two are bonded. In addition, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0040] R １１１is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-7), R １１１ is preferably a group represented by the following formula (V-7-2): １１１ represents the bonding site with the two nitrogen atoms to which the two are bonded. In addition, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0041] R １１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-8), R １１１ is preferably a group represented by the following formula (V-8-2): １１１ represents the bonding site with the two nitrogen atoms to which R is bonded. Ｘ５ The definition and preferred embodiments of are as described above. In addition, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0042] R １１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-9), R １１１ is preferably a group represented by the following formula (V-9-2): １１１ represents the bonding site with the two nitrogen atoms to which the two are bonded. In addition, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0043] R １１１ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-10), R １１１ is preferably a group represented by the following formula (V-10-2): １１１represents the bonding site with the two nitrogen atoms to which the two are bonded. In addition, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0044] Others, R １１１ may be a group described in paragraphs 0042 to 0053 of JP-A No. 2023-003421. １１１ It is preferable that R does not contain an imide structure in its structure. １１１ It is preferable that R does not contain a urethane bond, a urea bond, or an amide bond in the structure. １１１ It is preferable that R does not contain an ester bond in the structure. １１１ It is preferable that the copolymer does not contain an imide structure, a urethane bond, a urea bond, or an amide bond, and it is more preferable that the copolymer does not contain an imide structure, a urethane bond, a urea bond, an amide bond, or an ester bond.

[0045] R in formula (2) １１５ represents a tetravalent organic group. As the tetravalent organic group, a tetravalent organic group containing an aromatic ring is preferred, and a group represented by the following formula (5) or formula (6) is more preferred. In formula (5) or formula (6), * each independently represents a bonding site to another structure. In formula (5), R １１２ represents a single bond or a divalent linking group, and is a single bond, or an aliphatic hydrocarbon group having 1 to 10 carbon atoms which may be substituted with a fluorine atom, -O-, -CO-, -S-, -SO ２ -, -NHCO-, and a group selected from a combination thereof are preferred, and a single bond, an alkylene group having 1 to 3 carbon atoms which may be substituted with a fluorine atom, -O-, -CO-, -S-, and -SO ２ - is more preferably a group selected from -CH ２ -, -C(CF ３ ) ２ -, -C(CH ３ ) ２ -, -O-, -CO-, -S- and -SO ２ It is more preferably a divalent group selected from the group consisting of -.

[0046] R １１５ The number of carbon atoms in the group is preferably 4 or more, more preferably 4 to 50, and even more preferably 4 to 40.

[0047] Among these, R １１５ is an organic group containing a structure in which two or more hydrogen atoms have been removed from a structure represented by any one of the above formulas (V-1) to (V-10), the chemical resistance and flatness of the cured product are improved. １１５ is an organic group containing a structure in which two or more hydrogen atoms have been removed from a structure represented by any one of formulas (V-1) to (V-5), it is possible to obtain effects such as suppressing the generation of development residues, lowering the dielectric constant of the cured product, and reducing the thermal expansion coefficient.By using an organic group containing a structure in which two or more hydrogen atoms have been removed from a structure represented by any one of formulas (V-6) to (V-10), it is possible to obtain effects such as improving the transmittance of ultraviolet light, making it difficult for the pattern of the cured product to become tapered, and widening the tolerance for the exposure dose.

[0048] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-1), R １１５ is preferably a group represented by the following formula (V-1-1): In the following formula, * represents R in formula (2). １１５ represents bonding sites with the four carbonyl groups to which n1 is bonded, and n1 represents an integer of 0 to 5, and is also preferably an integer of 1 to 5. Furthermore, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0049] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-2), R １１５ is preferably a group represented by the following formula (V-2-1) or formula (V-2-2), and from the viewpoint of lowering the amine value in the resin, it is preferably a group represented by formula (V-2-2). In this specification, a bond crossing a side of a ring structure means that it substitutes one of the hydrogen atoms in the ring structure. In the following formula, L Ｘ１represents a single bond or —O—, and * represents R １１５ represents the bonding site with the four carbonyl groups to which R is bonded. Ｘ１ The definitions and preferred embodiments of are as described above. In addition, the hydrogen atoms in these structures are R １ , or may be further substituted with a known substituent such as a hydrocarbon group.

[0050] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-3), R １１５ is preferably a group represented by the following formula (V-3-1) or formula (V-3-2), and from the viewpoint of reducing the dielectric constant of the cured product, is preferably a group represented by formula (V-3-2). In the following formulas, * represents R １１５ represents the bonding site with the four carbonyl groups to which R is bonded. Ｘ２ and R Ｘ３ The definitions and preferred embodiments of are as described above. In addition, the hydrogen atoms in these structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0051] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-4), R １１５ is preferably a group represented by the following formula (V-4-1): In the following formula (V-4-1), * represents R １１５ represents bonding sites with the four carbonyl groups to which n1 is bonded, and n1 represents an integer of 0 to 5. Furthermore, the hydrogen atoms in formula (V-4-1) may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group. Examples of known substituents include an alkyl group, a halogenated alkyl group, and a halogen atom. However, it is also preferable that none of the hydrogen atoms in the structure represented by (V-4-1) is substituted.

[0052] R １１５is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-5), R １１５ is preferably a group represented by the following formula (V-5-1): In the following formula, * represents R in formula (2). １１５ represents the bonding sites with the four carbonyl groups to which the carbonyl groups are bonded. Furthermore, the hydrogen atoms in formula (V-5-1) may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group. Examples of known substituents include an alkyl group, a halogenated alkyl group, and a halogen atom. However, it is also preferable that none of the hydrogen atoms in the structure represented by (V-5-1) is substituted.

[0053] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-6), R １１５ is preferably a group represented by the following formula (V-6-1): In the following formula, * represents R in formula (2). １１５ represents the bonding sites with the four carbonyl groups to which the carbonyl groups are bonded. In addition, the hydrogen atoms in the following structure may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0054] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-7), R １１５ is preferably a group represented by the following formula (V-7-1): In the following formula, * represents R １１５ represents the bonding sites with the four carbonyl groups to which the carbonyl groups are bonded. In addition, the hydrogen atoms in the following structure may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0055] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-8), R １１５ is preferably a group represented by the following formula (V-8-1): In the following formula, * represents R １１５ represents the bonding site with the four carbonyl groups to which R is bonded.Ｘ５ The definition and preferred embodiments of are as described above. In addition, the hydrogen atoms in the following structures may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0056] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-9), R １１５ is preferably a group represented by the following formula (V-9-1): In the following formula, * represents R １１５ represents the bonding sites with the four carbonyl groups to which the carbonyl groups are bonded. In addition, the hydrogen atoms in the following structure may be further substituted with a group represented by formula (RP-1) described below or a known substituent such as a hydrocarbon group.

[0057] R １１５ is a group containing a structure in which two or more hydrogen atoms have been removed from the structure represented by formula (V-10), R １１５ is preferably a group represented by the following formula (V-10-1): In the following formula, * represents R １１５ represents the bonding sites with the four carbonyl groups to which the carbonyl groups are bonded. In addition, the hydrogen atoms in the following structures may be further substituted with known substituents such as a group represented by formula (RP-1) described below or a hydrocarbon group.

[0058] Others, R １１５ may be a tetracarboxylic acid residue remaining after removal of the anhydride group from a tetracarboxylic acid dianhydride described in paragraphs 0055 to 0057 of JP-A No. 2023-003421.

[0059] Also, R １１５ It is preferable that R does not contain an imide structure in its structure. １１５ In the present invention, the urethane bond is *—O—C(═O)—NR Ｎ - is a bond represented by *, and R Ｎ represents a hydrogen atom or a monovalent organic group, and * represents a bonding site with a carbon atom. Ｎis preferably a hydrogen atom or a hydrocarbon group, more preferably a hydrogen atom or an alkyl group, and even more preferably a hydrogen atom. Ｎ —C(═O)—NR Ｎ - is a bond represented by *, and R Ｎ R each independently represents a hydrogen atom or a monovalent organic group, and * represents a bonding site with a carbon atom. Ｎ Preferred embodiments of R are as described above. １１５ It is preferable that R does not contain an ester bond in its structure. In the present invention, an ester bond is a bond represented by *--O--C(=O)--*. Among these, R １１５ It is preferable that the copolymer does not contain an imide structure, a urethane bond, a urea bond, or an amide bond, and it is more preferable that the copolymer does not contain an imide structure, a urethane bond, a urea bond, an amide bond, or an ester bond.

[0060] Also, R １１５ is a structure represented by the following formula (X-3), or X in the structure represented by formula (X-3): ２ or a hydrogen atom of a group represented by ３ The hydrogen atom of the group represented by formula (RP-1) below may be substituted with a group represented by formula (RP-1). In formula (X-3), X ２ each independently represents a trivalent linking group; L ３ represents a divalent linking group, and * represents a bonding site with another structure. ２ and L ３ A preferred embodiment of the formula (X-2) is ２ and L ３ This is the same as the preferred embodiment of the above.

[0061] R １１５ Specifically, R may be a tetracarboxylic acid residue remaining after removal of the anhydride group from a tetracarboxylic dianhydride. １１５ The tetracarboxylic acid dianhydride may contain only one kind or two or more kinds of tetracarboxylic acid dianhydride residues as a structure corresponding to the formula (I). The tetracarboxylic acid dianhydride is preferably represented by the following formula (O). In formula (O), R １１５ represents a tetravalent organic group. １１５ The preferred range of R in formula (2) is １１５ The same applies to the preferred range.

[0062] Specific examples of tetracarboxylic dianhydrides include pyromellitic dianhydride (PMDA), 3,3',4,4'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-diphenylsulfidetetracarboxylic dianhydride, 3,3',4,4'-diphenylsulfonetetracarboxylic dianhydride, 3,3',4,4'-benzophenonetetracarboxylic dianhydride, 3,3',4,4'-diphenylmethanetetracarboxylic dianhydride, 2,2 2,3,3',4'-diphenylmethanetetracarboxylic dianhydride, 2,3,3',4'-biphenyltetracarboxylic dianhydride, 2,3,3',4'-benzophenonetetracarboxylic dianhydride, 4,4'-oxydiphthalic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1,4,5,7-naphthalenetetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis(2, 1,3-diphenylhexafluoropropane-3,3,4,4-tetracarboxylic dianhydride, 1,4,5,6-naphthalenetetracarboxylic dianhydride, 2,2',3,3'-diphenyltetracarboxylic dianhydride, 3,4,9,10-perylenetetracarboxylic dianhydride, 1,2,4,5-naphthalenetetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 1,8,9,10-phenanthrenetetracarboxylic dianhydride, 1,1-bis(2,3-dicarboxyphenyl)ethane dianhydride, 1,1-bis(3,4-dicarboxyphenyl)ethane dianhydride, 1,2,3,4-benzenetetracarboxylic dianhydride, and alkyl and alkoxy derivatives having 1 to 6 carbon atoms thereof.

[0063] Further, tetracarboxylic dianhydrides (DAA-1) to (DAA-5) described in paragraph 0038 of WO 2017 / 038598 are also preferred examples.

[0064] Among these, R in formula (2) １１５ and R １１１ Preferably, all of them contain a ring structure, and more preferably, all of them contain an aromatic ring structure. １１５ and R １１１ is preferably an organic group containing a structure in which two or more hydrogen atoms have been removed from a structure represented by any one of the above formulas (V-1) to (V-10), and more preferably an organic group containing a structure in which two or more hydrogen atoms have been removed from a structure represented by any one of the above formulas (V-1) to (V-4). Preferred aspects of these groups are as described above.

[0065] In formula (2), R １１１ and R １１５ At least one of R may have an OH group. １１１ Examples of the amino acid residue include residues of bisaminophenol derivatives.

[0066] [Group represented by formula (RP-1)] In formula (2), R １１１ and R １１５ At least one of them may contain a group represented by formula (RP-1). In formula (RP-1), L １ represents a 1+1-valent linking group, A １ represents a polymerizable group, a1 represents an integer of 1 or more, * represents R １１５ or R １１１ It represents the binding site with other structures in the molecule.

[0067] In formula (RP-1), L １ is preferably a group represented by the following formula (L-2). In formula (L-2), Z ２ -O-, -NR Ｎ -, -C(=O)O- or -C(=O)NR Ｎ represents -, and R Ｎ represents a hydrogen atom or a monovalent organic group; when a1 is 1, Lｘ represents a single bond or a divalent linking group, and when a1 is 2 or more, L ｘ represents a linking group having a valence of a1+1, a1 represents an integer of 1 or more, * represents R １１５ or R １１１ represents a bonding site with another structure in formula (RP-1), and # represents a bonding site with another structure in formula (RP-1). １ represents the binding site with

[0068] In formula (L-2), Z ２ is preferably —O— or —C(═O)O—. ２ Ga-NR Ｎ -, then R Ｎ is preferably a hydrogen atom or a hydrocarbon group, more preferably a hydrogen atom, an alkyl group or a phenyl group, and still more preferably a hydrogen atom. ｘ is preferably an alkylene group, more preferably an alkylene group having 1 to 10 carbon atoms, even more preferably an alkylene group having 1 to 4 carbon atoms, and particularly preferably a methylene group. ｘ is preferably a hydrocarbon group, a heterocyclic group, or a group represented by a combination thereof, more preferably a saturated aliphatic hydrocarbon group having 2 to 20 carbon atoms, and even more preferably a saturated aliphatic hydrocarbon group having 3 to 15 carbon atoms. In formula (L-2), a1 has the same meaning as a1 in formula (RP-1).

[0069] In formula (RP-1), A １ represents a polymerizable group. Preferred embodiments of the polymerizable group are the same as the preferred embodiments of the polymerizable group contained in the specific resin described above.

[0070] Among these, A １is preferably a vinylphenyl group, a (meth)acryloxy group, a vinyl ether group, a maleimide group, an allyl group, or a group containing these, and more preferably a maleimide group, a (meth)acryloxy group, a (meth)acrylamide group, or a vinylphenyl group. In particular, from the viewpoint of reactivity, a (meth)acryloxy group is preferred. Furthermore, from the viewpoint of reducing the dielectric loss tangent of the cured product, a maleimide group or a vinylphenyl group is preferred. In particular, A in formula (RP-1) contained in formula (2) １ At least one of the groups is preferably a vinylphenyl group, a (meth)acryloxy group, a vinyl ether group, a maleimide group, an allyl group, an epoxy group, or a group containing any of these, more preferably a maleimide group, a (meth)acryloxy group, a (meth)acrylamide group, or a vinylphenyl group, and even more preferably a vinylphenyl group.

[0071] Among these, A in formula (RP-1) １ is a vinylphenyl group, and L １ is preferably a group represented by formula (L-2-1). In formula (L-2-1), L Ｘ２ represents a hydrocarbon group, a1 represents an integer of 1 or more, * represents R １１５ or R １１１ represents a bonding site with another structure in formula (RP-1), and # represents a bonding site with another structure in formula (RP-1). １ In formula (L-2-1), L Ｘ２ is preferably an aliphatic saturated hydrocarbon group. Ｘ２ is preferably an alkylene group, more preferably an alkylene group having 1 to 10 carbon atoms, still more preferably an alkylene group having 1 to 4 carbon atoms, and particularly preferably a methylene group. In formula (L-2-1), a1 has the same meaning as a1 in formula (RP-1).

[0072] In addition, A in formula (RP-1) １ is a maleimide group, and L １ is a group represented by formula (L-2), and L in formula (L-2) Ｘis preferably an aromatic group or an aliphatic saturated hydrocarbon group having 4 or more carbon atoms. The aromatic group may be either an aromatic hydrocarbon group or an aromatic heterocyclic group, but is preferably an aromatic hydrocarbon group. The aromatic hydrocarbon group is preferably an aromatic hydrocarbon group having 6 to 10 carbon atoms, more preferably an aromatic hydrocarbon group having 6 carbon atoms. Examples of heteroatoms in the aromatic heterocyclic group include an oxygen atom, a nitrogen atom, and a sulfur atom. The number of heteroatoms in the aromatic heterocyclic group is preferably 1 or 2. Furthermore, the aromatic heterocyclic group is preferably a 5- or 6-membered ring containing the above heteroatom. Furthermore, the aromatic heterocyclic group may be condensed with another aromatic heterocyclic group or another aromatic hydrocarbon ring group. The aliphatic saturated hydrocarbon group having 4 or more carbon atoms may be linear, branched, cyclic, or have a structure represented by a combination thereof. The number of carbon atoms in the aliphatic saturated hydrocarbon group having 4 or more carbon atoms is preferably 4 to 20, more preferably 5 to 10.

[0073] In formula (RP-1), a1 is preferably an integer of 1 to 4, and more preferably an integer of 1 or 2. An embodiment in which a1 is 1 is also one of the preferred embodiments of the present invention.

[0074] The number of ester bonds contained in formula (RP-1) is preferably 1 or 0.

[0075] R in formula (2) １１３ and R １１４ each independently represents a hydrogen atom or a monovalent organic group. The monovalent organic group preferably contains a linear or branched alkyl group, a cyclic alkyl group, an aromatic group, or a polyalkyleneoxy group. １１３ and R １１４ Preferably, at least one of R contains a polymerizable group, and more preferably, both of R １１３ and R １１４It is also preferable that at least one of the groups contains two or more polymerizable groups. The polymerizable group is a group capable of undergoing a crosslinking reaction by the action of heat, radicals, or the like, and a radically polymerizable group is preferred. Specific examples of the polymerizable group include a group having an ethylenically unsaturated bond, an alkoxymethyl group, a hydroxymethyl group, an acyloxymethyl group, an epoxy group, an oxetanyl group, a benzoxazolyl group, a blocked isocyanate group, and an amino group. The radically polymerizable group possessed by the polyimide precursor is preferably a group having an ethylenically unsaturated bond. Examples of the group having an ethylenically unsaturated bond include a vinyl group, an allyl group, an isoallyl group, a 2-methylallyl group, a group having an aromatic ring directly bonded to a vinyl group (e.g., a vinylphenyl group), a (meth)acrylamide group, a (meth)acryloyloxy group, and a group represented by the following formula (III), with a group represented by the following formula (III) being preferred.

[0076]

[0077] In formula (III), R ２００ represents a hydrogen atom, a methyl group, an ethyl group, or a methylol group, and is preferably a hydrogen atom or a methyl group. In formula (III), * represents a bonding site with another structure. In formula (III), R ２０１ represents an alkylene group having 2 to 12 carbon atoms, —CH ２ CH(OH)CH ２ -, a cycloalkylene group or a polyalkyleneoxy group. ２０１ Examples of the alkylene group include an ethylene group, a propylene group, a trimethylene group, a tetramethylene group, a pentamethylene group, a hexamethylene group, an octamethylene group, and a dodecamethylene group; a 1,2-butanediyl group, a 1,3-butanediyl group; a —CH ２ CH(OH)CH ２ alkylene groups such as ethylene and propylene; ２ CH(OH)CH ２More preferred are alkylene groups such as ethylene and propylene, or polyalkyleneoxy groups. In the present invention, a polyalkyleneoxy group refers to a group in which two or more alkyleneoxy groups are directly bonded. The alkylene groups in the multiple alkyleneoxy groups contained in the polyalkyleneoxy group may be the same or different. When a polyalkyleneoxy group contains multiple alkyleneoxy groups with different alkylene groups, the arrangement of the alkyleneoxy groups in the polyalkyleneoxy group may be a random arrangement, a block arrangement, or an arrangement having an alternating pattern. The number of carbon atoms in the alkylene group (including the number of carbon atoms in the substituent if the alkylene group has a substituent) is preferably 2 or more, more preferably 2 to 10, even more preferably 2 to 6, even more preferably 2 to 5, even more preferably 2 to 4, even more preferably 2 or 3, and particularly preferably 2. The alkylene group may also have a substituent. Preferred substituents include alkyl groups, aryl groups, and halogen atoms. The number of alkyleneoxy groups contained in the polyalkyleneoxy group (the number of repeating polyalkyleneoxy groups) is preferably 2 to 20, more preferably 2 to 10, and even more preferably 2 to 6. From the viewpoint of solvent solubility and solvent resistance, the polyalkyleneoxy group is preferably a polyethyleneoxy group, a polypropyleneoxy group, a polytrimethyleneoxy group, a polytetramethyleneoxy group, or a group in which multiple ethyleneoxy groups and multiple propyleneoxy groups are bonded, more preferably a polyethyleneoxy group or a polypropyleneoxy group, and even more preferably a polyethyleneoxy group. In the group in which multiple ethyleneoxy groups and multiple propyleneoxy groups are bonded, the ethyleneoxy groups and propyleneoxy groups may be arranged randomly, in blocks, or in an alternating pattern. The preferred embodiments of the number of repeating ethyleneoxy groups and the like in these groups are as described above.

[0078] In formula (2), R １１３is a hydrogen atom, or R １１４ When is a hydrogen atom, the polyimide precursor may form a counter salt with a tertiary amine compound having an ethylenically unsaturated bond. An example of such a tertiary amine compound having an ethylenically unsaturated bond is N,N-dimethylaminopropyl methacrylate.

[0079] In formula (2), R １１３ and R １１４ At least one of the groups may be a polarity conversion group such as an acid-decomposable group. The acid-decomposable group is not particularly limited as long as it is decomposed by the action of an acid to generate an alkali-soluble group such as a phenolic hydroxy group or a carboxy group. Preferred examples include an acetal group, a ketal group, a silyl group, a silyl ether group, and a tertiary alkyl ester group. From the viewpoint of exposure sensitivity, an acetal group or a ketal group is more preferred. Specific examples of the acid-decomposable group include a tert-butoxycarbonyl group, an isopropoxycarbonyl group, a tetrahydropyranyl group, a tetrahydrofuranyl group, an ethoxyethyl group, a methoxyethyl group, an ethoxymethyl group, a trimethylsilyl group, a tert-butoxycarbonylmethyl group, and a trimethylsilyl ether group. From the viewpoint of exposure sensitivity, an ethoxyethyl group or a tetrahydrofuranyl group is preferred.

[0080] The polyimide precursor preferably contains fluorine atoms in its structure. The fluorine atom content in the polyimide precursor is preferably 10% by mass or more and 20% by mass or less.

[0081] Furthermore, for the purpose of improving adhesion to the substrate, the polyimide precursor may be copolymerized with an aliphatic group having a siloxane structure. Specific examples include embodiments using bis(3-aminopropyl)tetramethyldisiloxane, bis(p-aminophenyl)octamethylpentasiloxane, or the like as the diamine.

[0082] The repeating unit represented by formula (2) is preferably a repeating unit represented by formula (2-A). That is, it is preferable that at least one of the polyimide precursors used in the present invention is a precursor having a repeating unit represented by formula (2-A). When the polyimide precursor contains a repeating unit represented by formula (2-A), it becomes possible to further widen the width of the exposure latitude. Formula (2-A) In formula (2-A), A １ and A ２ represents an oxygen atom, R １１１ and R １１２ each independently represents a divalent organic group; R １１３ and R １１４ each independently represents a hydrogen atom or a monovalent organic group; R １１３ and R １１４ At least one of the groups is a group containing a polymerizable group, and it is preferred that both of the groups are groups containing a polymerizable group.

[0083] A １ , A ２ , R １１１ , R １１３ and R １１４ are each independently A in formula (2). １ , A ２ , R １１１ , R １１３ and R １１４ The same definition and preferred range are also true. １１２ is R in formula (5). １１２ The same applies to the preferred range.

[0084] The polyimide precursor may contain one type of repeating unit represented by formula (2), or may contain two or more types. It may also contain a structural isomer of the repeating unit represented by formula (2). The polyimide precursor may also contain other types of repeating units in addition to the repeating unit of formula (2).

[0085] In one embodiment of the polyimide precursor of the present invention, the content of the repeating unit represented by formula (2) is 50 mol% or more of all repeating units. The total content is more preferably 70 mol% or more, even more preferably 90 mol% or more, and particularly preferably more than 90 mol%. The upper limit of the total content is not particularly limited, and all repeating units in the polyimide precursor except for the terminal repeating units may be repeating units represented by formula (2).

[0086] The weight-average molecular weight (Mw) of the polyimide precursor is preferably 5,000 to 100,000, more preferably 10,000 to 50,000, and even more preferably 15,000 to 40,000. The number-average molecular weight (Mn) of the polyimide precursor is preferably 2,000 to 40,000, more preferably 3,000 to 30,000, and even more preferably 4,000 to 20,000. The molecular weight dispersity of the polyimide precursor is preferably 1.5 or more, more preferably 1.8 or more, and even more preferably 2.0 or more. The upper limit of the molecular weight dispersity of the polyimide precursor is not particularly specified, but is, for example, preferably 7.0 or less, more preferably 6.5 or less, and even more preferably 6.0 or less. In this specification, the molecular weight dispersity is a value calculated by dividing the weight-average molecular weight by the number-average molecular weight. When the resin composition contains multiple polyimide precursors as specific resins, it is preferable that the weight-average molecular weight, number-average molecular weight, and dispersity of at least one polyimide precursor are within the above-mentioned ranges. It is also preferable that the weight-average molecular weight, number-average molecular weight, and dispersity calculated by treating the multiple polyimide precursors as a single resin are each within the above-mentioned ranges.

[0087] When the specific resin is a polyimide precursor, the imidization rate (also referred to as "ring closure rate") of the polyimide precursor is preferably less than 70%, more preferably less than 50%, and even more preferably less than 30%, from the viewpoint of the film strength, insulating properties, etc. of the resulting organic film. The lower limit of the imidization rate may be 0% or more, or may be 5% or more, or may be 10% or more. The imidization rate refers to the ratio (%) of the molar amount of imide ring structures to the total molar amount of amic acid structures, amic acid ester structures, and imide ring structures.

[0088] [Polyimide] The polyimide used in the present invention may be an alkali-soluble polyimide, or may be a polyimide soluble in a developer containing an organic solvent as a main component. In this specification, alkali-soluble polyimide refers to a polyimide that dissolves at 0.1 g or more in 100 g of a 2.38 mass % aqueous tetramethylammonium solution at 23°C. From the viewpoint of pattern formability, a polyimide that dissolves at 0.5 g or more is preferred, and a polyimide that dissolves at 1.0 g or more is even more preferred. The upper limit of the solubility is not particularly limited, but is preferably 100 g or less. From the viewpoint of the film strength and insulating properties of the resulting organic film, the polyimide is preferably a polyimide having multiple imide structures in its main chain.

[0089] -Fluorine Atom- From the viewpoint of the film strength of the obtained organic film, it is also preferable that the polyimide contains a fluorine atom. The fluorine atom is, for example, R １３２ or R in the repeating unit represented by formula (4) described below １３１ and R in the repeating unit represented by formula (4) described below is preferably included. １３２ or R in the repeating unit represented by formula (4) described below １３１ The amount of fluorine atoms relative to the total mass of the polyimide is preferably 5% by mass or more and 20% by mass or less.

[0090] -Silicon Atom- From the viewpoint of the film strength of the obtained organic film, it is also preferable that the polyimide contains a silicon atom. The silicon atom is, for example, R in the repeating unit represented by formula (4) described later. １３１ and R in the repeating unit represented by formula (4) described below is preferably included. １３１ It is more preferable that the silicon atom or the organic modified (poly)siloxane structure described below is contained in the polyimide. The silicon atom or the organic modified (poly)siloxane structure may be contained in a side chain of the polyimide, but is preferably contained in the main chain of the polyimide. The amount of silicon atoms relative to the total mass of the polyimide is preferably 1 mass % or more and 20 mass % or less.

[0091] - Ethylenically unsaturated bond - From the viewpoint of the film strength of the obtained organic film, it is preferable that the polyimide has an ethylenically unsaturated bond. The polyimide may have the ethylenically unsaturated bond at the end of the main chain or in a side chain, but it is preferable that the ethylenically unsaturated bond is in a side chain. The ethylenically unsaturated bond is preferably radically polymerizable. The ethylenically unsaturated bond is formed by the R １３２ or R １３１ and R １３２ or R １３１ Among these, the ethylenically unsaturated bond is more preferably contained as a group having an ethylenically unsaturated bond in R １３１ and R １３１ Examples of the group having an ethylenically unsaturated bond include a group having an optionally substituted vinyl group directly bonded to an aromatic ring, such as a vinyl group, an allyl group, or a vinylphenyl group, a (meth)acrylamide group, a (meth)acryloyloxy group, a group represented by the above formula (RP-1), and a group represented by the following formula (IV).

[0092]

[0093] In formula (IV), R ２０represents a hydrogen atom, a methyl group, an ethyl group or a methylol group, and is preferably a hydrogen atom or a methyl group.

[0094] In formula (IV), R ２１ represents an alkylene group having 2 to 12 carbon atoms, —O—CH ２ CH(OH)CH ２ -, -C(=O)O-, -O(C=O)NH-, a (poly)alkyleneoxy group having 2 to 30 carbon atoms (the alkylene group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and particularly preferably 2 or 3 carbon atoms; the number of repeating alkyleneoxy groups is preferably 1 to 12, more preferably 1 to 6, and particularly preferably 1 to 3 carbon atoms), or a group combining two or more of these. The alkylene group having 2 to 12 carbon atoms may be any of linear, branched, and cyclic alkylene groups, or alkylene groups represented by a combination thereof. The alkylene group having 2 to 12 carbon atoms is preferably an alkylene group having 2 to 8 carbon atoms, and more preferably an alkylene group having 2 to 4 carbon atoms.

[0095] Among these, R ２１ is preferably a group represented by any one of the following formulae (R1) to (R3), and more preferably a group represented by formula (R1). In formulas (R1) to (R3), L represents a single bond, an alkylene group having 2 to 12 carbon atoms, a (poly)alkyleneoxy group having 2 to 30 carbon atoms, or a group in which two or more of these are bonded together; X represents an oxygen atom or a sulfur atom; * represents a bonding site with another structure; and ● represents R ２１ In formulas (R1) to (R3), a preferred embodiment of the alkylene group having 2 to 12 carbon atoms or the (poly)alkyleneoxy group having 2 to 30 carbon atoms as L is R in formula (IV). ２１The preferred embodiments are the same as those of the alkylene group having 2 to 12 carbon atoms or the (poly)alkyleneoxy group having 2 to 30 carbon atoms. In formula (R1), X is preferably an oxygen atom. In formulas (R1) to (R3), * has the same meaning as * in formula (IV), and the preferred embodiments are also the same. The structure represented by formula (R1) can be obtained, for example, by reacting a polyimide having a hydroxy group such as a phenolic hydroxy group with a compound having an isocyanato group and an ethylenically unsaturated bond (e.g., 2-isocyanatoethyl methacrylate). The structure represented by formula (R2) can be obtained, for example, by reacting a polyimide having a carboxy group with a compound having a hydroxy group and an ethylenically unsaturated bond (e.g., 2-hydroxyethyl methacrylate). The structure represented by formula (R3) can be obtained, for example, by reacting a polyimide having a hydroxy group such as a phenolic hydroxy group with a compound having a glycidyl group and an ethylenically unsaturated bond (e.g., glycidyl methacrylate).

[0096] In formula (IV), * represents a bonding site to another structure, and is preferably a bonding site to the main chain of the polyimide.

[0097] The amount of ethylenically unsaturated bonds relative to the total mass of the polyimide is preferably 0.0001 to 0.1 mol / g, and more preferably 0.0005 to 0.05 mol / g.

[0098] -Polymerizable group other than a group having an ethylenically unsaturated bond- The polyimide may have a polymerizable group other than a group having an ethylenically unsaturated bond. Examples of the polymerizable group other than a group having an ethylenically unsaturated bond include an epoxy group, a cyclic ether group such as an oxetanyl group, an alkoxymethyl group such as a methoxymethyl group, and a methylol group. Examples of the polymerizable group other than a group having an ethylenically unsaturated bond include R in the repeating unit represented by formula (4) below. １３１ The amount of polymerizable groups other than groups having an ethylenically unsaturated bond relative to the total mass of the polyimide is preferably 0.0001 to 0.1 mol / g, and more preferably 0.001 to 0.05 mol / g.

[0099] - Polarity conversion group - The polyimide may have a polarity conversion group such as an acid-decomposable group. The acid-decomposable group in the polyimide is R １１３ and R １１４ The polarity conversion group is, for example, R in the repeating unit represented by formula (4) described later. １３１ , R １３２ , contained in the terminals of polyimides, etc.

[0100] -Acid Value- When the polyimide is subjected to alkaline development, from the viewpoint of improving developability, the acid value of the polyimide is preferably 30 mgKOH / g or more, more preferably 50 mgKOH / g or more, and even more preferably 70 mgKOH / g or more. The acid value is preferably 500 mgKOH / g or less, more preferably 400 mgKOH / g or less, and even more preferably 200 mgKOH / g or less. When the polyimide is subjected to development using a developer containing an organic solvent as a main component (e.g., "solvent development"), the acid value of the polyimide is preferably 1 to 35 mgKOH / g, more preferably 2 to 30 mgKOH / g, and even more preferably 5 to 20 mgKOH / g. The acid value is measured by a known method, for example, by the method described in JIS K 0070:1992. From the viewpoint of achieving both storage stability and developability, the acid group contained in the polyimide preferably has a pKa of 0 to 10, more preferably 3 to 8. pKa refers to the equilibrium constant Ka of a dissociation reaction in which a hydrogen ion is released from an acid, expressed as its negative common logarithm, pKa. In this specification, pKa refers to a value calculated using ACD / ChemSketch (registered trademark) unless otherwise specified. For pKa, reference may be made to the value listed in the "Revised 5th Edition Chemistry Handbook: Basics" compiled by the Chemical Society of Japan. When the acid group is a polyvalent acid such as phosphoric acid, the pKa is the first dissociation constant. As such an acid group, the polyimide preferably contains at least one selected from the group consisting of a carboxy group and a phenolic hydroxy group, and more preferably a phenolic hydroxy group.

[0101] -Phenol Hydroxy Group- From the viewpoint of ensuring an appropriate development rate with an alkaline developer, the polyimide preferably has a phenolic hydroxy group. The polyimide may have the phenolic hydroxy group at the end of the main chain or on a side chain. The phenolic hydroxy group can be, for example, R in the repeating unit represented by formula (4) described below. １３２ or R １３１ The amount of phenolic hydroxy groups relative to the total mass of the polyimide is preferably 0.1 to 30 mol / g, and more preferably 1 to 20 mol / g.

[0102] The polyimide used in the present invention is not particularly limited as long as it is a polymer compound having an imide structure, but it is preferable that it contains a repeating unit represented by the following formula (4). In formula (4), R １３１ represents a divalent organic group, and R １３２ represents a tetravalent organic group. When the compound has a polymerizable group, the polymerizable group is １３１ and R １３２ or may be located at the end of the polyimide as shown in the following formula (4-1) or formula (4-2): In formula (4-1), R １３３ is a polymerizable group, and the other groups have the same meanings as in formula (4). In formula (4-2), R １３４ and R １３５ At least one of the groups is a polymerizable group, and if it is not a polymerizable group, it is an organic group, and the other group has the same meaning as in formula (4).

[0103] Examples of the polymerizable group include the above-mentioned group containing an ethylenically unsaturated bond and a crosslinkable group other than the above-mentioned group having an ethylenically unsaturated bond. １３１ represents a divalent organic group. The divalent organic group is R １１１Among these, the divalent organic group is preferably a group containing a structure in which two or more hydrogen atoms have been removed from a structure represented by any one of the above formulas (V-1) to (V-10), and more preferably a structure in which two or more hydrogen atoms have been removed from a structure represented by any one of the above formulas (V-1) to (V-10), and which has a group represented by formula (RP-1) as a substituent in the structure. R １３１ The diamine residues include those remaining after removal of the amino groups of the diamine. Examples of the diamine include aliphatic, cycloaliphatic, and aromatic diamines. Specific examples include R in the formula (2) of the polyimide precursor. １１１ Examples include:

[0104] R １３１ is preferably a diamine residue having at least two alkylene glycol units in the main chain, in order to more effectively suppress the occurrence of warping during firing, more preferably a diamine residue containing two or more ethylene glycol chains, propylene glycol chains, or both in one molecule, and even more preferably a diamine residue of the above diamine that does not contain an aromatic ring.

[0105] Examples of diamines containing two or more ethylene glycol chains, propylene glycol chains, or both in one molecule include, but are not limited to, Jeffamine (registered trademark) KH-511, ED-600, ED-900, ED-2003, EDR-148, EDR-176, D-200, D-400, D-2000, and D-4000 (all trade names, manufactured by HUNTSMAN Co., Ltd.), 1-(2-(2-(2-aminopropoxy)ethoxy)propoxy)propan-2-amine, and 1-(1-(1-(2-aminopropoxy)propan-2-yl)oxy)propan-2-amine.

[0106] R １３２ represents a tetravalent organic group. The tetravalent organic group is R １１５ Examples of the group R are the same as those of the group R, and the preferred ranges are also the same. １１５The four bonds of the tetravalent organic group exemplified by: are bonded to the four —C(═O)— moieties in formula (4) to form a condensed ring.

[0107] R １３２ Examples of the tetracarboxylic acid residues include those remaining after removal of the anhydride groups from tetracarboxylic dianhydrides. １１５ From the viewpoint of the strength of the organic film, R １３２ is preferably an aromatic diamine residue having 1 to 4 aromatic rings.

[0108] R １３１ and R １３２ It is also preferable that at least one of R １３１ Preferred examples of R include 2,2-bis(3-hydroxy-4-aminophenyl)propane, 2,2-bis(3-hydroxy-4-aminophenyl)hexafluoropropane, 2,2-bis(3-amino-4-hydroxyphenyl)propane, 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, and the above (DA-1) to (DA-18). １３２ As the above, (DAA-1) to (DAA-5) are more preferred examples.

[0109] The polyimide preferably contains fluorine atoms in its structure, and the content of fluorine atoms in the polyimide is preferably 10% by mass or more, and more preferably 20% by mass or less.

[0110] To improve adhesion to the substrate, the polyimide may be copolymerized with an aliphatic group having a siloxane structure. Specific examples of the diamine component include bis(3-aminopropyl)tetramethyldisiloxane and bis(p-aminophenyl)octamethylpentasiloxane.

[0111] In order to improve the storage stability of the resin composition, it is preferable that the main chain terminals of the polyimide are blocked with a terminal blocking agent such as a monoamine, an acid anhydride, a monocarboxylic acid, a monoacid chloride compound, or a monoactive ester compound. Among these, it is more preferable to use a monoamine, and preferred monoamine compounds include aniline, 2-ethynylaniline, 3-ethynylaniline, 4-ethynylaniline, 5-amino-8-hydroxyquinoline, 1-hydroxy-7-aminonaphthalene, 1-hydroxy-6-aminonaphthalene, 1-hydroxy-5-aminonaphthalene, 1-hydroxy-4-aminonaphthalene, 2-hydroxy-7-aminonaphthalene, 2-hydroxy-6-aminonaphthalene, 2-hydroxy-5-aminonaphthalene, 1-carboxy-7-aminonaphthalene, 1-carboxy-6-aminonaphthalene, and 1-carboxy 2-5-aminonaphthalene, 2-carboxy-7-aminonaphthalene, 2-carboxy-6-aminonaphthalene, 2-carboxy-5-aminonaphthalene, 2-aminobenzoic acid, 3-aminobenzoic acid, 4-aminobenzoic acid, 4-aminosalicylic acid, 5-aminosalicylic acid, 6-aminosalicylic acid, 2-aminobenzenesulfonic acid, 3-aminobenzenesulfonic acid, 4-aminobenzenesulfonic acid, 3-amino-4,6-dihydroxypyrimidine, 2-aminophenol, 3-aminophenol, 4-aminophenol, 2-aminothiophenol, 3-aminothiophenol, 4-aminothiophenol, etc. Two or more of these may be used, and multiple different terminal groups may be introduced by reacting multiple terminal-capping agents.

[0112] -Imidization rate (ring closure rate)- The imidization rate of the polyimide (also referred to as "ring closure rate") is preferably 70% or more, more preferably 80% or more, and even more preferably 90% or more, from the viewpoint of the film strength, insulating properties, etc. of the resulting organic film. There are no particular restrictions on the upper limit of the imidization rate, and it is sufficient if it is 100% or less. The imidization rate is measured, for example, by the following method." is deleted and replaced with "The imidization rate refers to the ratio of imide ring structures to the total of amic acid structures, amic acid ester structures, and imide ring structures.

[0113] Polyimide is a polymer in which all repeating units are R １３１ and R １３２ The repeating unit may contain the repeating unit represented by the above formula (4) in which the combination of R １３１ and R １３２ The polyimide may contain a repeating unit represented by the formula (4) above, which contains two or more different combinations of repeating units. In addition to the repeating unit represented by the formula (4), the polyimide may contain other types of repeating units. Examples of other types of repeating units include the repeating unit represented by the formula (2) above.

[0114] Polyimides can be synthesized by, for example, reacting a tetracarboxylic dianhydride with a diamine (partially substituted with a monoamine end-capping agent) at low temperature, reacting a tetracarboxylic dianhydride with a diamine (partially substituted with an acid anhydride, monoacid chloride compound, or monoactive ester compound end-capping agent) at low temperature, preparing a diester from a tetracarboxylic dianhydride with an alcohol and then reacting it with a diamine (partially substituted with a monoamine end-capping agent) in the presence of a condensing agent, preparing a diester from a tetracarboxylic dianhydride with an alcohol and then converting the remaining dicarboxylic acid to an acid chloride and reacting it with a diamine (partially substituted with a monoamine end-capping agent), or by completely imidizing the resulting polyimide precursor using a known imidization reaction method, or by terminating the imidization reaction midway to introduce a partial imide structure, or by blending a fully imidized polymer with the polyimide precursor to introduce a partial imide structure. Other known polyimide synthesis methods can also be used.

[0115] The weight-average molecular weight (Mw) of the polyimide is preferably 5,000 to 100,000, more preferably 10,000 to 50,000, and even more preferably 15,000 to 40,000. By setting the weight-average molecular weight to 5,000 or more, the fold resistance of the cured film can be improved. In order to obtain an organic film with excellent mechanical properties (e.g., breaking elongation), the weight-average molecular weight is particularly preferably 15,000 or more. The number-average molecular weight (Mn) of the polyimide is preferably 2,000 to 40,000, more preferably 3,000 to 30,000, and even more preferably 4,000 to 20,000. The molecular weight dispersity of the polyimide is preferably 1.5 or more, more preferably 1.8 or more, and even more preferably 2.0 or more. The upper limit of the molecular weight dispersity of the polyimide is not particularly specified, but is, for example, preferably 7.0 or less, more preferably 6.5 or less, and even more preferably 6.0 or less. When the resin composition contains multiple types of polyimides as specific resins, it is preferable that the weight average molecular weight, number average molecular weight, and dispersity of at least one type of polyimide are within the above ranges. It is also preferable that the weight average molecular weight, number average molecular weight, and dispersity calculated by treating the multiple types of polyimides as one resin are each within the above ranges.

[0116] [Polybenzoxazole Precursor] Examples of the polybenzoxazole precursor include the compounds described in paragraphs 0073 to 0095 of WO 2022 / 145355. The above descriptions are incorporated herein by reference.

[0117] [Polybenzoxazole] Examples of polybenzoxazole include the compounds described in paragraphs 0096 to 0103 of WO 2022 / 145355. The above descriptions are incorporated herein by reference.

[0118] [Polyamideimide Precursor] Examples of the polyamideimide precursor include the compounds described in paragraphs 0104 to 0119 of WO 2022 / 145355. The above descriptions are incorporated herein by reference.

[0119] In addition, when the specific resin is a polyamide-imide precursor, R １１５is a structure represented by the following formula (X-2), or X in the structure represented by formula (X-2): ２ or a hydrogen atom of a group represented by ３ In the above embodiment, the hydrogen atom of the group represented by formula (2) may be substituted with a group represented by formula (RP-1). １ , A ２ , R １１１ , R １１３ and R １１４ The preferred embodiments are as described above. In formula (X-2), X ２ each independently represents a trivalent linking group; L ３ represents a divalent linking group, and * represents a bonding site to another structure.

[0120] In formula (X-2), X ２ is exemplified by a linear or branched aliphatic group, a cyclic aliphatic group, and an aromatic group, or a group in which two or more of these are linked by a single bond or a linking group, and is preferably a linear aliphatic group having 2 to 20 carbon atoms, a branched aliphatic group having 3 to 20 carbon atoms, a cyclic aliphatic group having 3 to 20 carbon atoms, an aromatic group having 6 to 20 carbon atoms, or a group in which two or more of these are combined by a single bond or a linking group, and more preferably an aromatic group having 6 to 20 carbon atoms, or a group in which two or more aromatic groups having 6 to 20 carbon atoms are combined by a single bond or a linking group. Examples of the linking group include -O-, -S-, -C(=O)-, -S(=O) ２Preferred are -, an alkylene group, a halogenated alkylene group, an arylene group, or a linking group formed by bonding two or more of these, and more preferred are -O-, -S-, an alkylene group, a halogenated alkylene group, an arylene group, or a linking group formed by bonding two or more of these. The alkylene group is preferably an alkylene group having 1 to 20 carbon atoms, more preferably an alkylene group having 1 to 10 carbon atoms, and even more preferably an alkylene group having 1 to 4 carbon atoms. The halogenated alkylene group is preferably a halogenated alkylene group having 1 to 20 carbon atoms, more preferably a halogenated alkylene group having 1 to 10 carbon atoms, and even more preferably a halogenated alkylene group having 1 to 4 carbon atoms. Furthermore, examples of the halogen atom in the halogenated alkylene group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferred. The halogenated alkylene group may contain hydrogen atoms or may have all of the hydrogen atoms substituted with halogen atoms, but it is preferable that all of the hydrogen atoms be substituted with halogen atoms. Examples of preferred halogenated alkylene groups include a (ditrifluoromethyl)methylene group. The arylene group is preferably a phenylene group or a naphthylene group, more preferably a phenylene group, and even more preferably a 1,3-phenylene group or a 1,4-phenylene group.

[0121] Also, X ２ is preferably derived from a tricarboxylic acid compound in which at least one carboxy group may be halogenated. The halogenation is preferably chlorination. In the present invention, a compound having three carboxy groups is referred to as a tricarboxylic acid compound. Two of the three carboxy groups in the tricarboxylic acid compound may be converted to acid anhydrides. Examples of tricarboxylic acid compounds that may be halogenated include branched aliphatic, cyclic aliphatic, and aromatic tricarboxylic acid compounds. These tricarboxylic acid compounds may be used alone or in combination of two or more.

[0122] X ２ It is preferable that X does not contain an imide structure in its structure. ２It is preferable that X does not contain a urethane bond, a urea bond, or an amide bond in the structure. ２ It is preferable that X does not contain an ester bond in the structure. ２ It is preferable that the copolymer does not contain an imide structure, a urethane bond, a urea bond, or an amide bond, and it is more preferable that the copolymer does not contain an imide structure, a urethane bond, a urea bond, an amide bond, or an ester bond.

[0123] Specifically, the tricarboxylic acid compound is preferably a tricarboxylic acid compound containing a linear aliphatic group having 2 to 20 carbon atoms, a branched aliphatic group having 3 to 20 carbon atoms, a cyclic aliphatic group having 3 to 20 carbon atoms, an aromatic group having 6 to 20 carbon atoms, or a group in which two or more of these are combined via a single bond or a linking group, and more preferably a tricarboxylic acid compound containing an aromatic group having 6 to 20 carbon atoms, or a group in which two or more aromatic groups having 6 to 20 carbon atoms are combined via a single bond or a linking group.

[0124] Specific examples of tricarboxylic acid compounds include 1,2,3-propanetricarboxylic acid, 1,3,5-pentanetricarboxylic acid, citric acid, trimellitic acid, 2,3,6-naphthalenetricarboxylic acid, and compounds in which phthalic acid (or phthalic anhydride) and benzoic acid are bonded with a single bond, —O—, —CH ２ -, -C(CH ３ ) ２ -, -C(CF ３ ) ２ -, -SO ２ These compounds may be compounds in which two carboxy groups are anhydride (e.g., trimellitic anhydride), or compounds in which at least one carboxy group is halogenated (e.g., trimellitic anhydride chloride).

[0125] In formula (X-2), L ３is exemplified by a linear or branched aliphatic group, a cyclic aliphatic group, an aromatic group, or a group in which two or more of these are linked by a single bond or a linking group, and is preferably a linear aliphatic group having 2 to 20 carbon atoms, a branched aliphatic group having 3 to 20 carbon atoms, a cyclic aliphatic group having 3 to 20 carbon atoms, an aromatic group having 6 to 20 carbon atoms, or a group in which two or more of these are combined by a single bond or a linking group, and more preferably an aromatic group having 6 to 20 carbon atoms, or a group in which two or more aromatic groups having 6 to 20 carbon atoms are combined by a single bond or a linking group. Examples of the linking group include -O-, -S-, -C(=O)-, -S(=O) ２ Preferred are -, an alkylene group, a halogenated alkylene group, an arylene group, or a linking group formed by bonding two or more of these, and more preferred are -O-, -S-, an alkylene group, a halogenated alkylene group, an arylene group, or a linking group formed by bonding two or more of these. The alkylene group is preferably an alkylene group having 1 to 20 carbon atoms, more preferably an alkylene group having 1 to 10 carbon atoms, and even more preferably an alkylene group having 1 to 4 carbon atoms. The halogenated alkylene group is preferably a halogenated alkylene group having 1 to 20 carbon atoms, more preferably a halogenated alkylene group having 1 to 10 carbon atoms, and even more preferably a halogenated alkylene group having 1 to 4 carbon atoms. Furthermore, examples of the halogen atom in the halogenated alkylene group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferred. The halogenated alkylene group may contain hydrogen atoms or may have all of the hydrogen atoms substituted with halogen atoms, but it is preferable that all of the hydrogen atoms be substituted with halogen atoms. Examples of preferred halogenated alkylene groups include a (ditrifluoromethyl)methylene group. The arylene group is preferably a phenylene group or a naphthylene group, more preferably a phenylene group, and even more preferably a 1,3-phenylene group or a 1,4-phenylene group.

[0126] [Polyamideimide] Examples of polyamideimide include the compounds described in paragraphs 0120 to 0133 of WO 2022 / 145355, the disclosure of which is incorporated herein by reference.

[0127] [Method for producing polyimide precursors, etc.] Polyimides, etc., can be produced, for example, by the method described in paragraphs 0134 to 0136 of WO 2022 / 145355. The above description is incorporated herein by reference. Alternatively, synthesis may be carried out with reference to other known methods.

[0128] [Content] The content of the specific resin in the resin composition of the present invention is preferably 20% by mass or more, more preferably 30% by mass or more, even more preferably 40% by mass or more, and even more preferably 50% by mass or more, based on the total solid content of the resin composition. Furthermore, the content of the resin in the resin composition of the present invention is preferably 99.5% by mass or less, more preferably 99% by mass or less, even more preferably 98% by mass or less, even more preferably 97% by mass or less, and even more preferably 95% by mass or less, based on the total solid content of the resin composition. The resin composition of the present invention may contain only one type of specific resin, or may contain two or more types. When two or more types are contained, the total amount is preferably within the above range.

[0129] It is also preferable that the resin composition of the present invention contains at least two kinds of resins. Specifically, the resin composition of the present invention may contain a total of two or more kinds of the specific resin and other resins described later, or may contain two or more kinds of specific resins, but it is preferable that the resin composition of the present invention contains two or more kinds of specific resins. When the resin composition of the present invention contains two or more kinds of specific resins, for example, a polyimide precursor having a structure derived from a dianhydride (R １１５ ) preferably contains two or more different polyimide precursors.

[0130] <Other Resins> The resin composition of the present invention may contain the specific resin described above and another resin (hereinafter simply referred to as "other resin") different from the specific resin. Examples of other resins include phenolic resins, polyamides, epoxy resins, polysiloxanes, resins containing a siloxane structure, (meth)acrylic resins, (meth)acrylamide resins, urethane resins, butyral resins, styryl resins, polyether resins, and polyester resins. For example, by further adding a (meth)acrylic resin, a resin composition with excellent coatability can be obtained, and a pattern (cured product) with excellent solvent resistance can be obtained. For example, instead of or in addition to the polymerizable compound described below, a resin having a high polymerizable group value and a weight average molecular weight of 20,000 or less (for example, a polymerizable group content of 1×10 per 1 g of resin) can be used. －３ By adding a (meth)acrylic resin (having a molecular weight of 1000 to 1000 mol / g or more) to the resin composition, it is possible to improve the coatability of the resin composition and the solvent resistance of the pattern (cured product).

[0131] When the resin composition of the present invention contains other resins, the content of the other resins is preferably 0.01% by mass or more, more preferably 0.05% by mass or more, even more preferably 1% by mass or more, even more preferably 2% by mass or more, even more preferably 5% by mass or more, and even more preferably 10% by mass or more, based on the total solid content of the resin composition. When the resin composition of the present invention contains other resins, the content of the other resins is preferably 80% by mass or less, more preferably 75% by mass or less, even more preferably 70% by mass or less, even more preferably 60% by mass or less, and even more preferably 50% by mass or less, based on the total solid content of the resin composition. A preferred embodiment of the resin composition of the present invention may also be an embodiment in which the content of the other resin is low. In the above embodiment, the content of the other resin is preferably 20% by mass or less, more preferably 15% by mass or less, even more preferably 10% by mass or less, even more preferably 5% by mass or less, and even more preferably 1% by mass or less, based on the total solid content of the resin composition. The lower limit of the content is not particularly limited, as long as it is 0% by mass or more. The resin composition of the present invention may contain only one type of other resin, or may contain two or more types. When two or more types are contained, the total amount is preferably in the above range.

[0132] <Compound A> The resin composition of the present invention contains compound A represented by the following formula (1-1): In the second resin composition, compound A is a condensate AQ synthesized by the method for producing a condensate of the present invention described below. In formula (1-1), X １１ is -O- or -NR Ｎ１ represents -, and R Ｎ１ represents a hydrogen atom or a substituent, R １１ represents an aromatic heterocyclic structure which may have a substituent, R １２ ~R １６ is a hydrogen atom or a substituent, and R １２ ~R １６ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ - or -S-, and RＮ２ is a hydrogen atom or a substituent, and R １２ ~R １６ At least two of these may be bonded to form a ring structure.

[0133] [X １１ In the formula (1-1), from the viewpoint of the stability of compound A, X １１ Ha-NR Ｎ１ - is preferred, and -NH- is more preferred. Ｎ１ is a substituent, R Ｎ１ is preferably a hydrocarbon group, more preferably an alkyl group, and even more preferably a methyl group.

[0134] [R １１ 〕 R １１ represents an aromatic heterocyclic structure which may have a substituent. Examples of heteroatoms in the aromatic heterocyclic structure include a nitrogen atom, a sulfur atom, and an oxygen atom, and it is preferable that the aromatic heterocyclic structure contains at least a nitrogen atom as a heteroatom. The aromatic heterocyclic structure may be a monocyclic structure or a polycyclic structure, but is preferably a monocyclic structure or a bicyclic structure. When the aromatic heterocyclic structure is a polycyclic structure, it is sufficient that at least one of the rings contained in the polycyclic structure is a heterocyclic structure, and it is not necessary that all of the rings contained in the polycyclic structure are heterocyclic structures.

[0135] When the aromatic heterocyclic structure has a substituent, examples of the substituent include a substituent containing —NH— or —S—, which will be described later, and a group represented by the following formula (Sub-1). In formula (Sub-1), X １１ is -O- or -NR Ｎ１ represents -, and R Ｎ１ represents a hydrogen atom or a substituent, R １２ ~R １６ is a hydrogen atom or a substituent, and R １２ ~R １６ At least one of the bonding sites to the benzene ring described in formula (Sub-1) is —O— or —NR Ｎ２ - or -S-, and R Ｎ２ is a hydrogen atom or a substituent, and R １２ ~R １６At least two of these may be bonded to form a ring structure, and * represents the bonding site to the aromatic heterocyclic structure. １１ , R １２ ~R １６ A preferred embodiment of the formula is X １１ , R １２ ~R １６ This is the same as the preferred embodiment of the above.

[0136] From the viewpoint that compound A is easily adsorbed to metal and the effects of suppressing the generation of voids or improving adhesion can be easily obtained, R １１ preferably contains -NH-, -S- or -O- in the structure, more preferably contains -NH-, -SH or -OH, and further preferably contains -NH-. Here, the -NH-, -S- or -O- is R １１ or may be present in a substituent in the aromatic heterocyclic structure. １１ "Existing in an aromatic heterocyclic structure in" means that the nitrogen atom, sulfur atom, or oxygen atom in -NH-, -S-, or -O- is present as a ring member of the aromatic heterocyclic structure. Here, when tautomers exist in compound A, R in at least one of the tautomers １１ The structure corresponding to the above formula (1) may contain -NH-, -S-, or -O- in the structure. Examples of the substituent (i.e., the substituent containing -NH-, -S-, or -O-) present in the substituent in the aromatic heterocyclic structure include an amino group or a substituted amino group, a thiol group, and a hydroxy group.

[0137] From the viewpoint that compound A is easily adsorbed to metal and the effects of suppressing the generation of voids or improving adhesion can be easily obtained, R １１ The aromatic heterocyclic structure in the above formula (R) preferably has at least one partial structure represented by the following formula (R-1): In formula (R-1), N is a nitrogen atom that is a ring member of the above-mentioned aromatic heterocyclic structure, and * represents a bonding site to an atom that is a ring member of the above-mentioned heterocyclic structure.

[0138] The aromatic heterocyclic structure preferably has one or two partial structures represented by formula (R-1), and more preferably has only one partial structure. When compound A has tautomers, R in at least one of the tautomers is １１ The structure corresponding to the above formula may contain a partial structure represented by formula (R-1) in the structure.

[0139] R １１ The number of nitrogen atoms in formula (1-1) is preferably 2 or more, more preferably 3 or more. The number of nitrogen atoms is preferably 10 or less, more preferably 5 or less. From the viewpoint that compound A is easily adsorbed to metal and the effects of suppressing the generation of voids or improving adhesion can be easily obtained, R １１ The aromatic heterocyclic structure in the above embodiment is preferably a monocyclic or bicyclic aromatic heterocyclic structure having three or more nitrogen atoms as ring members. The number of nitrogen atoms is more preferably 3 to 6, and even more preferably 3 to 5. In the above embodiment, when the aromatic heterocyclic structure is a bicyclic aromatic heterocyclic structure, the total number of nitrogen atoms present as ring members in the two rings may be three or more.

[0140] Such heteroaromatic rings are not particularly limited, but examples include the following ring structures and tautomers of the following ring structures: Among these, R １１ The heteroaromatic ring in the formula (I) is preferably a structure having a 1,2,3-triazole, 1,2,4-triazole or purine ring as a partial structure.

[0141] Here, R １１ is also preferably an aromatic heterocyclic structure containing —NH—, —SH— or —OH in the structure and having a monocyclic or bicyclic aromatic heterocyclic structure and having three or more nitrogen atoms as ring members, and R １１ has at least one partial structure represented by formula (R-1), and is a monocyclic or bicyclic aromatic heterocyclic structure having three or more nitrogen atoms as ring members.

[0142] R in the above formula (1-1) １１ It is preferable that the aromatic heterocyclic structure in the above formula (R-1) has at least one partial structure represented by the following formula (R-2). In formula (R-2), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and X ５１ is an atom that is a ring member of the aromatic heterocyclic structure, and X ５２ is a ring member atom of the aromatic heterocyclic structure, and is a carbon atom or a nitrogen atom; X ５３ is a nitrogen atom, an oxygen atom or a sulfur atom.

[0143] In formula (R-2), X ５１ In formula (R-2), X is preferably a carbon atom. ５２ is preferably a nitrogen atom or a carbon atom. ５３ is preferably a nitrogen atom or an oxygen atom, more preferably a nitrogen atom. ５３ is preferably an atom that is a ring member of the aromatic heterocyclic structure. ５１ ~X ５３ In the formula (R-2), if there are any bonds remaining on each atom in addition to the bonds described in the formula (R-2), the bonds are to be bonded to other structures. For example, X ５１ When is a nitrogen atom, two bonds are bonded to another structure, and when is a carbon atom, three bonds are bonded to another structure.

[0144] Such aromatic heterocyclic structures include the following nitrogen-containing heterocycles and tautomers of any of the following nitrogen-containing heterocycles:

[0145] In formula (1-1), R １１ is preferably any of the structures shown below, or structures in which a hydrogen atom in these structures is substituted. Also, tautomers of these structures may be used. In the following structures, * represents X １１ represents the binding site with １１By having these structures, the solubility of Compound A in the solvent is improved, it becomes less likely to precipitate, it can be used at a higher concentration, etc., and it is therefore thought that the effects of suppressing the generation of voids and improving adhesion can be more easily obtained. Here, the SP value of the solvent is 10 to 47 (MPa). １／２ is preferable, 15 to 35 (MPa) １／２ More preferably, 18 to 30 (MPa) １／２ More preferably, 20 to 27 (MPa) １／２ It is particularly preferable that the SP value is the value described in the literature "Hansen Solubility Parameters; A Users Handbook (CRC Press, 2007)" by Charles M. Hansen. In addition, for solvents not described in the literature, the SP value is estimated from the chemical structure using the computer software "Hansen Solubility Parameters in Practice (HSPiP ver. 5.4.08)".

[0146] In addition, in formula (1-1), R １１ may be any of the structures shown below, or structures in which hydrogen atoms are substituted in these structures. Also, tautomers of these structures may be used. In the following structures, * indicates X １１ represents the binding site with

[0147] [R １２ ~R １６ ] In formula (1-1), R １２ ~R １６ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ - or -S- (hereinafter also referred to as "specific substituents"). Ｎ２ - or -S- means -O-, -NR Ｎ２ This means that the oxygen atom, nitrogen atom, or sulfur atom in - or -S- is bonded to the benzene ring via a single bond without a linking group. Ｎ２is a hydrogen atom or a substituent, preferably a hydrogen atom or a hydrocarbon group, more preferably a hydrogen atom or an alkyl group, still more preferably a hydrogen atom or a methyl group, and particularly preferably a hydrogen atom.

[0148] R １２ ~R １６ Specific substituents in the ２１ , -NR Ｎ２ R ２２ , or -SR ２３ , and the above R ２１ is a hydrogen atom or an organic group, preferably a hydrogen atom, an alkyl group or an aryl group, more preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and even more preferably a hydrogen atom. ２２ is a hydrogen atom or an organic group, preferably a hydrogen atom, an alkyl group, an aryl group, or an alkoxycarbonyl group, more preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and even more preferably a hydrogen atom. Ｎ２ The preferred embodiments of the above R ２３ represents a hydrogen atom or an organic group, preferably a hydrogen atom, an alkyl group or an aryl group, more preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and even more preferably a hydrogen atom.

[0149] R １２ ~R １６ Examples of the substituents not corresponding to the specific substituents in the above (hereinafter also referred to as "other substituents") include an alkyl group, a phenyl group, a halogen atom, and the like.

[0150] R １２ ~R １６ When two adjacent rings among the above are bonded to each other to form a ring, the ring structure formed may be an aliphatic ring structure or an aromatic ring structure, but an aliphatic ring structure is preferred. An embodiment in which the ring structure formed includes an acetal structure is also one of the preferred embodiments of the present invention.

[0151] In formula (1-1), R １３ , R １４ and R １５and at least one of the groups is a specific substituent, and the bonding site to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ More preferably, the substituent is —OH or —NHR. Ｎ２ It is more preferable that R is —OH, and it is particularly preferable that R is —OH. １１ When the aromatic heterocyclic structure in the compound (I) is adsorbed to a metal, the specific substituent is positioned in the opposite direction to the metal, and therefore corrosive substances such as acids are more likely to be quenched by the specific substituent, which is thought to make it easier to achieve the effects of suppressing the generation of voids and improving adhesion.

[0152] In addition, in formula (1-1), R １２ is a specific substituent, and R １３ , R １４ , R １５ and R １６ In one preferred embodiment of the present invention, at least one of R １２ is a specific substituent, and R １３ , R １４ , R １５ and R １６ are hydrogen atoms, the solubility of compound A in the solvent is improved, precipitation is less likely, and compound A can be used at a higher concentration. For these reasons, it is thought that the effects of suppressing the generation of voids and improving adhesion are more easily obtained. Here, the SP value of the solvent is 10 to 47 (MPa). １／２ is preferable, 15 to 35 (MPa) １／２ More preferably, 18 to 30 (MPa) １／２ More preferably, 20 to 27 (MPa) １／２ In the above embodiment, R １２ Preferred embodiments of the specific substituents in R are as described above. １３ , R １４ , R １５ and R １６ Examples of the substituent in include the specific substituents described above and other substituents described above, and preferred embodiments of these substituents are also as described above.

[0153] [Molecular Weight] The molecular weight of compound A is preferably less than 2,000, more preferably 1,000 or less, and even more preferably 500 or less. The lower limit of the molecular weight is not particularly limited, but is preferably 200 or more.

[0154] [pKa] The pKa of compound A (measured in a DSMO solvent) is preferably 5 or more, more preferably 10 or more, and even more preferably 12 or more. The pKa of the conjugate acid of compound A (measured in a DSMO solvent) is preferably 10 or less, more preferably 8 or less, and even more preferably 5 or less. In this specification, pKa is a value calculated using ACD / ChemSketch (registered trademark) unless otherwise specified.

[0155] [Synthesis Method] Compound A can be synthesized, for example, by the method described in the Examples below. Alternatively, other known synthesis methods may be used, and the synthesis method is not particularly limited. Compound A is preferably synthesized by the method for producing a condensate of the present invention described below.

[0156] [Specific Examples] Specific examples of Compound A are not particularly limited, but include the compounds used in the examples described below.

[0157] [Content] The content of compound A relative to the total solid content of the resin composition of the present invention is preferably 0.005 to 30% by mass. The lower limit is more preferably 0.01% by mass or more, even more preferably 0.02% by mass or more, and particularly preferably 0.05% by mass or more. The upper limit is more preferably 15% by mass or less, even more preferably 5% by mass or less, and particularly preferably 1% by mass or less. Furthermore, when the content of the specific resin is taken as 100 parts by mass, the content of compound A is preferably 0.005 to 30 parts by mass, more preferably 0.01 to 15 parts by mass, even more preferably 0.02 to 5 parts by mass, and particularly preferably 0.05 to 1 part by mass. One type of compound A may be used alone, or two or more types may be used in combination. When two or more types are used in combination, the total amount thereof preferably falls within the above range.

[0158] <Polymer AP> The resin composition of the present invention preferably further contains a polymer AP. The polymer AP is a polymer formed by polymerizing a compound AS having a carboxy group via an ester bond. By including the polymer AP, the storage stability of the composition is improved, for example, even when the composition is contaminated with water. Specifically, even when a resin composition containing water is used after long-term storage, a cured product with excellent insulation reliability can be obtained. The mechanism by which the above effect is achieved is unknown, but it is presumed that degradation of the resin can be suppressed by hydrolyzing the polymer AP instead of the resin being hydrolyzed by water.

[0159] Preferred embodiments of the polymer AP and the compound AS are the same as those described below in the method for producing the condensation product of the present invention.

[0160] When the resin composition contains a polymer AP, the content thereof is preferably 0.0005 to 1 mass %, more preferably 0.001 to 0.25 mass %, and even more preferably 0.002 to 0.05 mass %, based on the total solid content of the resin composition. Only one type of polymer AP may be contained, or two or more types may be contained. When two or more types of polymer AP are contained, it is preferable that the total amount is in the above range.

[0161] <Polymerizable Compound> The resin composition of the present invention preferably contains a polymerizable compound. Examples of the polymerizable compound include a polymerizable compound having a radical polymerizable group (radical crosslinking agent) and other crosslinking agents.

[0162] [Radical Crosslinking Agent] The resin composition of the present invention preferably contains a radical crosslinking agent. The radical crosslinking agent is a compound having a radical polymerizable group. The radical polymerizable group is preferably a group containing an ethylenically unsaturated bond. Examples of the group containing an ethylenically unsaturated bond include a vinyl group, an allyl group, a vinylphenyl group, a (meth)acryloyl group, a maleimide group, and a (meth)acrylamide group. Among these, a (meth)acryloyl group, a (meth)acrylamide group, and a vinylphenyl group are preferred, and from the viewpoint of reactivity, a (meth)acryloyl group is more preferred.

[0163] The radical crosslinking agent is preferably a compound having one or more ethylenically unsaturated bonds, more preferably a compound having two or more ethylenically unsaturated bonds. The radical crosslinking agent may have three or more ethylenically unsaturated bonds. The compound having two or more ethylenically unsaturated bonds is preferably a compound having 2 to 15 ethylenically unsaturated bonds, more preferably a compound having 2 to 10 ethylenically unsaturated bonds, and even more preferably a compound having 2 to 6 ethylenically unsaturated bonds. From the viewpoint of the film strength of the obtained pattern (cured product), it is also preferable that the resin composition of the present invention contains a compound having two ethylenically unsaturated bonds and the compound having three or more ethylenically unsaturated bonds.

[0164] The molecular weight of the radical crosslinking agent is preferably 2,000 or less, more preferably 1,500 or less, and even more preferably 900 or less. The lower limit of the molecular weight of the radical crosslinking agent is preferably 100 or more.

[0165] Specific examples of radical crosslinking agents include unsaturated carboxylic acids (e.g., acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), their esters, and amides. Preferred are esters of unsaturated carboxylic acids and polyhydric alcohol compounds, and amides of unsaturated carboxylic acids and polyamine compounds. Also suitable are addition reaction products of unsaturated carboxylic acid esters or amides having a nucleophilic substituent such as a hydroxyl group, amino group, or sulfanyl group with monofunctional or polyfunctional isocyanates or epoxies, and dehydration condensation reaction products of monofunctional or polyfunctional carboxylic acids. Also suitable are addition reaction products of unsaturated carboxylic acid esters or amides having an electrophilic substituent such as an isocyanate group or an epoxy group with monofunctional or polyfunctional alcohols, amines, or thiols, and substitution reaction products of unsaturated carboxylic acid esters or amides having a leaving substituent such as a halogeno group or a tosyloxy group with monofunctional or polyfunctional alcohols, amines, or thiols. As another example, it is also possible to use a group of compounds in which the above-mentioned unsaturated carboxylic acids are replaced with unsaturated phosphonic acids, vinylbenzene derivatives such as styrene, vinyl ethers, allyl ethers, etc. Specific examples can be found in paragraphs 0113 to 0122 of JP 2016-027357 A, the contents of which are incorporated herein by reference.

[0166] The radical crosslinking agent is preferably a compound having a boiling point of 100°C or higher under normal pressure. Examples of compounds having a boiling point of 100°C or higher under normal pressure include the compounds described in paragraph 0203 of WO 2021 / 112189, the contents of which are incorporated herein by reference.

[0167] Other preferred radical crosslinking agents than those mentioned above include the radical polymerizable compounds described in paragraphs 0204 to 0208 of WO 2021 / 112189, the contents of which are incorporated herein by reference.

[0168] Preferred radical crosslinking agents include dipentaerythritol triacrylate (commercially available products include KAYARAD D-330 (manufactured by Nippon Kayaku Co., Ltd.)), dipentaerythritol tetraacrylate (commercially available products include KAYARAD D-320 (manufactured by Nippon Kayaku Co., Ltd.) and A-TMMT (manufactured by Shin-Nakamura Chemical Co., Ltd.)), dipentaerythritol penta(meth)acrylate (commercially available products include KAYARAD D-310 (manufactured by Nippon Kayaku Co., Ltd.)), and dipentaerythritol hexa(meth)acrylate (commercially available products include KAYARAD DPHA (manufactured by Nippon Kayaku Co., Ltd.) and A-DPH (manufactured by Shin-Nakamura Chemical Co., Ltd.)), and structures in which the (meth)acryloyl group is bonded via an ethylene glycol residue or a propylene glycol residue. Oligomers of these agents can also be used.

[0169] Commercially available radical crosslinking agents include, for example, SR-494, a tetrafunctional acrylate having four ethyleneoxy chains, SR-209, 231, and 239, which are difunctional methacrylates having four ethyleneoxy chains (all manufactured by Sartomer Corporation), DPCA-60, a hexafunctional acrylate having six pentyleneoxy chains, and TPA-330, a trifunctional acrylate having three isobutyleneoxy chains (all manufactured by Nippon Kayaku Co., Ltd.), and urethane oligomers such as Examples of such an ester include UAS-10 and UAB-140 (manufactured by Nippon Paper Industries Co., Ltd.), NK Ester M-40G, NK Ester 4G, NK Ester M-9300, NK Ester A-9300, and UA-7200 (manufactured by Shin-Nakamura Chemical Co., Ltd.), DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA-306T, UA-306I, AH-600, T-600, and AI-600 (manufactured by Kyoeisha Chemical Co., Ltd.), and Blenmar PME400 (manufactured by NOF Corporation).

[0170] Suitable radical crosslinking agents include urethane acrylates such as those described in JP-B No. 48-041708, JP-A No. 51-037193, JP-B No. 02-032293, and JP-B No. 02-016765, and urethane compounds having an ethylene oxide skeleton such as those described in JP-B No. 58-049860, JP-B No. 56-017654, JP-B No. 62-039417, and JP-B No. 62-039418. Compounds having an amino structure or a sulfide structure in the molecule, such as those described in JP-A Nos. 63-277653, 63-260909, and JP-A No. 01-105238, can also be used as radical crosslinking agents.

[0171] The radical crosslinking agent may be a radical crosslinking agent having an acid group such as a carboxy group or a phosphate group. The radical crosslinking agent having an acid group is preferably an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and more preferably a radical crosslinking agent obtained by reacting a non-aromatic carboxylic anhydride with an unreacted hydroxy group of an aliphatic polyhydroxy compound to provide an acid group. Particularly preferred is a radical crosslinking agent obtained by reacting a non-aromatic carboxylic anhydride with an unreacted hydroxy group of an aliphatic polyhydroxy compound to provide an acid group, in which the aliphatic polyhydroxy compound is pentaerythritol or dipentaerythritol. Examples of commercially available products include polybasic acid-modified acrylic oligomers M-510 and M-520 manufactured by Toagosei Co., Ltd.

[0172] The acid value of the radical crosslinking agent having an acid group is preferably 0.1 to 300 mgKOH / g, more preferably 1 to 100 mgKOH / g. When the acid value of the radical crosslinking agent is within the above range, the agent has excellent handleability in production and developability. Furthermore, the agent has good polymerizability. The acid value is measured in accordance with the description of JIS K 0070:1992.

[0173] As the radical crosslinking agent, a radical crosslinking agent having at least one selected from the group consisting of a urea bond and a urethane bond (hereinafter also referred to as "crosslinking agent U") is also preferred. By including crosslinking agent U in a resin composition, chemical resistance, resolution, etc. may be improved. The mechanism by which the above effect is achieved is unclear; however, it is thought that, for example, upon curing by heating, a portion of crosslinking agent U is thermally decomposed to generate amines, etc., which then promote the cyclization of precursors of cyclized resins such as polyimide precursors. Furthermore, crosslinking agent U has high compatibility with compound A having an amide structure or an ester structure, and using crosslinking agent U in the resin composition of the present invention can also improve the coatability of the composition. Crosslinking agent U may have only one urea bond or urethane bond, or may have one or more urea bonds and one or more urethane bonds, or may have no urethane bonds but two or more urea bonds, or may have no urea bonds but two or more urethane bonds. The total number of urea bonds and urethane bonds in crosslinking agent U is 1 or more, preferably 1 to 10, more preferably 1 to 4, and even more preferably 1 or 2. When crosslinking agent U has no urethane bonds, the number of urea bonds in crosslinking agent U is 1 or more, preferably 1 to 10, more preferably 1 to 4, and even more preferably 1 or 2. When crosslinking agent U has no urea bonds, the number of urethane bonds in crosslinking agent U is 1 or more, preferably 1 to 10, more preferably 1 to 4, and even more preferably 1 or 2.

[0174] The radical polymerizable group in the crosslinking agent U is not particularly limited, but examples thereof include a vinyl group, an allyl group, a (meth)acryloyl group, a (meth)acryloxy group, a (meth)acrylamide group, a vinylphenyl group, and a maleimide group. A (meth)acryloxy group, a (meth)acrylamide group, a vinylphenyl group, or a maleimide group is preferred, and a (meth)acryloxy group is more preferred. When the crosslinking agent U has two or more radical polymerizable groups, the structures of the respective radical polymerizable groups may be the same or different. The number of radical polymerizable groups in the crosslinking agent U may be only one or may be two or more, preferably 1 to 10, more preferably 1 to 6, and particularly preferably 1 to 4. The radical polymerizable group value (mass of the compound per mole of radical polymerizable group) in the crosslinking agent U is preferably 150 to 400 g / mol. From the viewpoint of chemical resistance of the cured product, the lower limit of the radical polymerizable group value is more preferably 200 g / mol or more, even more preferably 210 g / mol or more, even more preferably 220 g / mol or more, even more preferably 230 g / mol or more, still more preferably 240 g / mol or more, and particularly preferably 250 g / mol or more. From the viewpoint of developability, the upper limit of the radical polymerizable group value is more preferably 350 g / mol or less, even more preferably 330 g / mol or less, and particularly preferably 300 g / mol or less. In particular, the polymerizable group value of crosslinking agent U is preferably 210 to 400 g / mol, and more preferably 220 to 400 g / mol.

[0175] The crosslinking agent U preferably has a structure represented by the following formula (U-1): In formula (U-1), R Ｕ１ represents a hydrogen atom or a monovalent organic group, and A represents —O— or —NR Ｎ - and R Ｎ is a hydrogen atom or a monovalent organic group, Z Ｕ１ is an m-valent organic group, and Z Ｕ２ is an (n+1)-valent organic group, X is a radical polymerizable group, n is an integer of 1 or more, and m is an integer of 1 or more.

[0176] R Ｕ１ R is preferably a hydrogen atom, an alkyl group or an aromatic hydrocarbon group, and more preferably a hydrogen atom. Ｎ is preferably a hydrogen atom, an alkyl group or an aromatic hydrocarbon group, more preferably a hydrogen atom. Ｕ１ represents a hydrocarbon group, -O-, -C(=O)-, -S-, -S(=O) ２ -, -NR Ｎ - or a group in which two or more of these are bonded is preferred, and a hydrocarbon group, or a hydrocarbon group and -O-, -C(=O)-, -S-, -S(=O) ２ - and -NR Ｎ - is more preferred. The hydrocarbon group is preferably a hydrocarbon group having 20 or less carbon atoms, more preferably a hydrocarbon group having 18 or less carbon atoms, and even more preferably a hydrocarbon group having 16 or less carbon atoms. Examples of the hydrocarbon group include saturated aliphatic hydrocarbon groups, aromatic hydrocarbon groups, and groups represented by a combination of these. R Ｎ represents a hydrogen atom or a monovalent organic group, preferably a hydrogen atom or a hydrocarbon group, more preferably a hydrogen atom or an alkyl group, and even more preferably a hydrogen atom or a methyl group. Ｕ２ represents a hydrocarbon group, -O-, -C(=O)-, -S-, -S(=O) ２ -, -NR Ｎ - or a group in which two or more of these are bonded is preferred, and a hydrocarbon group, or a hydrocarbon group and -O-, -C(=O)-, -S-, -S(=O) ２ - and -NR Ｎ A group bonded to at least one group selected from the group consisting of - is more preferred. Ｕ１Examples of the groups include those listed in 1. and preferred embodiments are also the same. X is not particularly limited, but examples include a vinyl group, an allyl group, a (meth)acryloyl group, a (meth)acryloxy group, a (meth)acrylamide group, a vinylphenyl group, and a maleimide group, with a (meth)acryloxy group, a (meth)acrylamide group, a vinylphenyl group, or a maleimide group being preferred, and a (meth)acryloxy group being more preferred. n is preferably an integer of 1 to 10, more preferably an integer of 1 to 4, even more preferably 1 or 2, and particularly preferably 1. m is preferably an integer of 1 to 10, more preferably an integer of 1 to 4, and even more preferably 1 or 2.

[0177] It is also preferable that the crosslinking agent U has at least one of a hydroxy group, an alkyleneoxy group, an amide group, and a cyano group. From the viewpoint of the chemical resistance of the resulting cured film, the hydroxy group may be an alcoholic hydroxy group or a phenolic hydroxy group, but an alcoholic hydroxy group is preferred. From the viewpoint of the chemical resistance of the resulting cured film, the alkyleneoxy group is preferably an alkyleneoxy group having 2 to 20 carbon atoms, more preferably an alkyleneoxy group having 2 to 10 carbon atoms, even more preferably an alkyleneoxy group having 2 to 4 carbon atoms, even more preferably an ethylene group or a propylene group, and particularly preferably an ethylene group. The alkyleneoxy group may be contained in the crosslinking agent U as a polyalkyleneoxy group. In this case, the number of repeating alkyleneoxy groups is preferably 2 to 10, more preferably 2 to 6. The amide group is a -C(=O)-NR Ｎ - refers to a bond represented by R Ｎ When the crosslinking agent U has an amide group, the crosslinking agent U may be, for example, R—C(═O)—NR Ｎ - a group represented by *, or *-C(=O)-NR ＮIt can be contained as a group represented by -R. R represents a hydrogen atom or a monovalent substituent, and is preferably a hydrogen atom or a hydrocarbon group, and more preferably a hydrogen atom, an alkyl group, or an aromatic hydrocarbon group. Crosslinking agent U may have two or more structures selected from the group consisting of a hydroxy group, an alkyleneoxy group (however, when a polyalkyleneoxy group is formed, a polyalkyleneoxy group), an amide group, and a cyano group in the molecule, but an embodiment in which only one structure is present in the molecule is also preferred. The hydroxy group, alkyleneoxy group, amide group, and cyano group may be present at any position in crosslinking agent U, but from the viewpoint of chemical resistance, it is also preferred that at least one selected from the group consisting of a hydroxy group, an alkyleneoxy group, an amide group, and a cyano group is linked to at least one radically polymerizable group contained in crosslinking agent U via a linking group containing a urea bond or a urethane bond (hereinafter also referred to as "linking group L2-1"). In particular, when crosslinking agent U contains only one radically polymerizable group, it is preferred that the radically polymerizable group contained in crosslinking agent U and at least one selected from the group consisting of a hydroxy group, an alkyleneoxy group, an amide group, and a cyano group are linked via a linking group containing a urea bond or a urethane bond (hereinafter also referred to as "linking group L2-2"). When crosslinking agent U contains an alkyleneoxy group (however, when it constitutes a polyalkyleneoxy group, it is a polyalkyleneoxy group) and has the linking group L2-1 or the linking group L2-2, the structure bonded to the side of the alkyleneoxy group (however, when it constitutes a polyalkyleneoxy group, it is a polyalkyleneoxy group) opposite to the linking group L2-1 or the linking group L2-2 is not particularly limited, but is preferably a hydrocarbon group, a radically polymerizable group, or a group represented by a combination thereof. As the hydrocarbon group, a hydrocarbon group having 20 or fewer carbon atoms is preferred, a hydrocarbon group having 18 or fewer carbon atoms is more preferred, and a hydrocarbon group having 16 or fewer carbon atoms is even more preferred. Examples of the hydrocarbon group include saturated aliphatic hydrocarbon groups, aromatic hydrocarbon groups, and groups represented by a combination thereof. Preferred embodiments of the radical polymerizable group are the same as those of the radical polymerizable group in the crosslinking agent U.When crosslinking agent U contains an amide group and has the linking group L2-1 or L2-2, the structure bonded to the side of the amide group opposite the linking group L2-1 or L2-2 is not particularly limited, but is preferably a hydrocarbon group, a radically polymerizable group, or a group represented by a combination thereof. The hydrocarbon group is preferably a hydrocarbon group having 20 or fewer carbon atoms, more preferably a hydrocarbon group having 18 or fewer carbon atoms, and even more preferably a hydrocarbon group having 16 or fewer carbon atoms. Examples of the hydrocarbon group include saturated aliphatic hydrocarbon groups, aromatic hydrocarbon groups, and groups represented by a combination thereof. Preferred aspects of the radically polymerizable group are the same as those of the radically polymerizable group in crosslinking agent U described above. In the above aspect, the carbon atom side of the amide group may be bonded to the linking group L2-1 or L2-2, or the nitrogen atom side of the amide group may be bonded to the linking group L2-1 or L2-2. Among these, from the viewpoints of adhesion to the substrate, chemical resistance, and suppression of Cu voids, it is preferable that crosslinking agent U have a hydroxy group.

[0178] From the viewpoint of compatibility with the specific resin, etc., the crosslinking agent U preferably contains an aromatic group. The aromatic group is preferably directly bonded to a urea bond or urethane bond contained in the crosslinking agent U. When the crosslinking agent U contains two or more urea bonds or urethane bonds, it is preferable that one of the urea bonds or urethane bonds is directly bonded to the aromatic group. The aromatic group may be an aromatic hydrocarbon group or an aromatic heterocyclic group, or may have a structure in which these form a condensed ring, but is preferably an aromatic hydrocarbon group. The aromatic hydrocarbon group is preferably an aromatic hydrocarbon group having 6 to 30 carbon atoms, more preferably an aromatic hydrocarbon group having 6 to 20 carbon atoms, and even more preferably a group in which two or more hydrogen atoms have been removed from a benzene ring structure. The aromatic heterocyclic group is preferably a 5- or 6-membered aromatic heterocyclic group. Examples of the aromatic heterocycle in such an aromatic heterocyclic group include pyrrole, imidazole, triazole, tetrazole, pyrazole, furan, thiophene, oxazole, isoxazole, thiazole, pyridine, pyrazine, pyrimidine, pyridazine, triazine, etc. These rings may be condensed with other rings, for example, indole or benzimidazole. The heteroatom contained in the aromatic heterocyclic group is preferably a nitrogen atom, an oxygen atom, or a sulfur atom. The aromatic group is preferably contained in a linking group that links two or more radical polymerizable groups and contains a urea bond or a urethane bond, or a linking group that links at least one selected from the group consisting of the above-mentioned hydroxy group, alkyleneoxy group, amide group, and cyano group to at least one radical polymerizable group contained in the crosslinking agent U.

[0179] The number of atoms (linking chain length) between the urea bond or urethane bond and the radical polymerizable group in crosslinking agent U is not particularly limited, but is preferably 30 or less, more preferably 2 to 20, and even more preferably 2 to 10. When crosslinking agent U contains a total of two or more urea bonds or urethane bonds, when it contains two or more radical polymerizable groups, or when it contains two or more urea bonds or urethane bonds and two or more radical polymerizable groups, the minimum number of atoms (linking chain length) between the urea bond or urethane bond and the radical polymerizable group may be within the above range. In this specification, the "number of atoms (linking chain length) between the urea bond or urethane bond and the polymerizable group" refers to the atomic chain on the path connecting the two atoms or atomic groups to be linked that connects these objects via the shortest distance (minimum number of atoms). For example, in the structure represented by the following formula, the number of atoms (linking chain length) between the urea bond and the radical polymerizable group (methacryloyloxy group) is 2.

[0180] [Axis of symmetry] It is also preferable that the crosslinking agent U is a compound having a structure that does not have an axis of symmetry. The fact that the crosslinking agent U does not have an axis of symmetry means that the crosslinking agent U is a bilaterally asymmetric compound that does not have an axis that would produce a molecule identical to the original molecule by rotating the entire compound. Furthermore, when the structural formula of the crosslinking agent U is written on paper, the fact that the crosslinking agent U does not have an axis of symmetry means that the structural formula of the crosslinking agent U cannot be written in a form that has an axis of symmetry. It is believed that the fact that the crosslinking agent U does not have an axis of symmetry suppresses aggregation of the crosslinking agent U molecules in the composition film.

[0181] [Molecular Weight] The molecular weight of the crosslinking agent U is preferably 100 to 2,000, more preferably 150 to 1,500, and even more preferably 200 to 900.

[0182] The method for producing the crosslinking agent U is not particularly limited, but it can be obtained, for example, by reacting a radical polymerizable compound and a compound having an isocyanate group with a compound having at least one of a hydroxy group and an amino group.

[0183] Specific examples of the crosslinking agent U are shown below, but the crosslinking agent U is not limited to these.

[0184] From the viewpoints of pattern resolution and film elasticity, it is preferable to use a bifunctional methacrylate or acrylate for the resin composition. Specific compounds include triethylene glycol diacrylate, triethylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, tetraethylene glycol diacrylate, PEG (polyethylene glycol) 200 diacrylate, PEG 200 dimethacrylate, PEG 600 diacrylate, PEG 600 dimethacrylate, polytetraethylene glycol diacrylate, polytetraethylene glycol dimethacrylate, dipropylene glycol diacrylate, tripropylene glycol diacrylate, neopentyl glycol diacrylate, neopentyl glycol dimethacrylate, 3-methyl-1,5-pentanediol diacrylate, 1,6-hexyl ... Xanediol diacrylate, 1,6-hexanediol dimethacrylate, dimethylol-tricyclodecane diacrylate, dimethylol-tricyclodecane dimethacrylate, ethylene oxide (EO) adduct diacrylate of bisphenol A, propylene oxide (PO) adduct dimethacrylate of bisphenol A, propylene oxide (PO) adduct dimethacrylate of bisphenol A, 2-hydroxy-3-acryloyloxypropyl methacrylate, EO-modified isocyanuric acid diacrylate, EO-modified isocyanuric acid dimethacrylate, and other bifunctional acrylates and bifunctional methacrylates having a urethane bond can be used. Two or more of these can be mixed and used as needed. For example, PEG200 diacrylate refers to polyethylene glycol diacrylate with a formula weight of approximately 200 for the polyethylene glycol chain. From the viewpoint of suppressing warpage of the pattern (cured product), a monofunctional radical crosslinking agent can preferably be used as the radical crosslinking agent in the resin composition of the present invention.Preferred examples of monofunctional radical crosslinking agents include (meth)acrylic acid derivatives such as n-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, butoxyethyl (meth)acrylate, carbitol (meth)acrylate, cyclohexyl (meth)acrylate, benzyl (meth)acrylate, phenoxyethyl (meth)acrylate, N-methylol (meth)acrylamide, glycidyl (meth)acrylate, polyethylene glycol mono(meth)acrylate, and polypropylene glycol mono(meth)acrylate; N-vinyl compounds such as N-vinylpyrrolidone and N-vinylcaprolactam; and allyl glycidyl ether. Preferred monofunctional radical crosslinking agents include compounds having a boiling point of 100°C or higher under normal pressure in order to suppress volatilization before exposure. Other examples of bifunctional or higher radical crosslinking agents include allyl compounds such as diallyl phthalate and triallyl trimellitate.

[0185] When a radical crosslinking agent is contained, the content of the radical crosslinking agent is preferably more than 0% by mass and not more than 60% by mass, based on the total solid content of the resin composition. The lower limit is more preferably 5% by mass or more. The upper limit is more preferably 50% by mass or less, and even more preferably 30% by mass or less.

[0186] The radical crosslinking agent may be used alone or in combination of two or more. When two or more types are used in combination, the total amount thereof is preferably within the above range.

[0187] [Other Crosslinking Agents] The resin composition of the present invention preferably contains another crosslinking agent different from the radical crosslinking agent described above. The other crosslinking agent refers to a crosslinking agent other than the radical crosslinking agent described above. Preferably, the other crosslinking agent is a compound having a plurality of groups in the molecule that promote the reaction of forming a covalent bond with other compounds in the composition or their reaction products upon exposure to light by a photoacid generator or a photobase generator. Preferably, the other crosslinking agent is a compound having a plurality of groups in the molecule that promote the reaction of forming a covalent bond with other compounds in the composition or their reaction products under the action of an acid or base. Examples of other crosslinking agents include the compounds described in paragraphs 0179 to 0207 of WO 2022 / 145355. The above descriptions are incorporated herein by reference.

[0188] The content of the other crosslinking agent is preferably 0.1 to 30% by mass, more preferably 0.1 to 20% by mass, even more preferably 0.5 to 15% by mass, and particularly preferably 1.0 to 10% by mass, based on the total solid content of the resin composition. Only one type of other crosslinking agent may be contained, or two or more types may be contained. When two or more types of other crosslinking agents are contained, the total amount thereof is preferably within the above range.

[0189] [Polymerization initiator] The resin composition of the present invention preferably contains a polymerization initiator. The polymerization initiator may be a thermal polymerization initiator or a photopolymerization initiator, but it is particularly preferable to contain a photopolymerization initiator. The photopolymerization initiator is preferably a photoradical polymerization initiator. There are no particular restrictions on the photoradical polymerization initiator, and it can be appropriately selected from known photoradical polymerization initiators. For example, a photoradical polymerization initiator that is photosensitive to light in the ultraviolet to visible range is preferred. Alternatively, it may be an activator that reacts with a photoexcited sensitizer to generate active radicals.

[0190] The photoradical polymerization initiator has a capacity of at least about 50 L·mol within a wavelength range of about 240 to 800 nm (preferably 330 to 500 nm). －１ ・cm －１The molar absorption coefficient of the compound can be measured using a known method. For example, it is preferable to measure the molar absorption coefficient using an ultraviolet-visible spectrophotometer (Varian Cary-5 spectrophotometer) at a concentration of 0.01 g / L using ethyl acetate as a solvent.

[0191] Any known compound can be used as the photoradical polymerization initiator. Examples include halogenated hydrocarbon derivatives (e.g., compounds having a triazine skeleton, compounds having an oxadiazole skeleton, compounds having a trihalomethyl group, etc.), acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazole, oxime compounds such as oxime derivatives, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, α-aminoketone compounds such as aminoacetophenone, α-hydroxyketone compounds such as hydroxyacetophenone, azo compounds, azide compounds, metallocene compounds, organic boron compounds, and iron arene complexes. For details of these compounds, please refer to paragraphs

[0165] to

[0182] of JP 2016-027357 A and paragraphs

[0138] to

[0151] of WO 2015 / 199219 A, the contents of which are incorporated herein by reference. Further, paragraphs 0065 to 0111 of JP 2014-130173 A, compounds described in Japanese Patent No. 6301489, MATERIAL STAGE 37 to 60p, vol. 19, No. 3,2019 described peroxide-based photopolymerization initiators, photopolymerization initiators described in WO 2018 / 221177, photopolymerization initiators described in WO 2018 / 110179, photopolymerization initiators described in JP 2019-043864 A, photopolymerization initiators described in JP 2019-044030 A, peroxide-based initiators described in JP 2019-167313 A can be mentioned, the contents of which are incorporated herein by reference.

[0192] Examples of ketone compounds include the compounds described in paragraph 0087 of JP 2015-087611 A, the contents of which are incorporated herein by reference. As a commercially available product, Kayacure-DETX-S (manufactured by Nippon Kayaku Co., Ltd.) is also preferably used.

[0193] In one embodiment of the present invention, a hydroxyacetophenone compound, an aminoacetophenone compound, or an acylphosphine compound can be suitably used as the photoradical polymerization initiator. More specifically, for example, an aminoacetophenone-based initiator described in JP-A-10-291969 or an acylphosphine oxide-based initiator described in Japanese Patent No. 4225898 can be used, the contents of which are incorporated herein by reference.

[0194] Examples of α-hydroxyketone initiators that can be used include Omnirad 184, Omnirad 1173, Omnirad 2959, and Omnirad 127 (all manufactured by IGM Resins B.V.), IRGACURE 184 (IRGACURE is a registered trademark), DAROCUR 1173, IRGACURE 500, IRGACURE-2959, and IRGACURE 127 (all manufactured by BASF).

[0195] Examples of α-aminoketone initiators that can be used include Omnirad 907, Omnirad 369, Omnirad 369E, and Omnirad 379EG (all manufactured by IGM Resins B.V.), and IRGACURE 907, IRGACURE 369, and IRGACURE 379 (all manufactured by BASF).

[0196] As the aminoacetophenone initiator, acylphosphine oxide initiator, and metallocene compound, for example, compounds described in paragraphs 0161 to 0163 of WO 2021 / 112189 can also be suitably used. The contents of this specification are incorporated herein by reference.

[0197] As the photoradical polymerization initiator, an oxime compound is more preferably used. By using an oxime compound, it is possible to more effectively improve the exposure latitude. An oxime compound is particularly preferred because it has a wide exposure latitude (exposure margin) and also functions as a photocuring accelerator.

[0198] Specific examples of the oxime compound include compounds described in JP-A-2001-233842, compounds described in JP-A-2000-080068, compounds described in JP-A-2006-342166, compounds described in J. C. S. Perkin II (1979, pp. 1653-1660), compounds described in J. C. S. Perkin II (1979, pp. 156-162), compounds described in Journal of Photopolymer Science and Technology (1995, pp.202-232) described compounds, compounds described in JP-A-2000-066385, compounds described in JP-T-2004-534797, compounds described in JP-A-2017-019766, compounds described in Japanese Patent No. 6065596, compounds described in WO 2015 / 152153, compounds described in WO 2017 / 051680, compounds described in JP-A-2017-198865, compounds described in paragraphs 0025 to 0038 of WO 2017 / 164127, compounds described in WO 2013 / 167515 and the like, the contents of which are incorporated herein.

[0199] Preferred oxime compounds include, for example, compounds having the following structure: 3-(benzoyloxy(imino))butan-2-one, 3-(acetoxy(imino))butan-2-one, 3-(propionyloxy(imino))butan-2-one, 2-(acetoxy(imino))pentan-3-one, 2-(acetoxy(imino))-1-phenylpropan-1-one, 2-(benzoyloxy(imino))-1-phenylpropan-1-one, 3-((4-toluenesulfonyloxy)imino)butan-2-one, and 2-(ethoxycarbonyloxy(imino))-1-phenylpropan-1-one. In the resin composition, it is particularly preferable to use an oxime compound as a photoradical polymerization initiator. The oxime compound as a photoradical polymerization initiator has a linking group of >C=N-O-C(=O)- in the molecule.

[0200]

[0201] Commercially available oxime compounds include IRGACURE OXE 01, IRGACURE OXE 02, IRGACURE OXE 03, and IRGACURE OXE 04 (manufactured by BASF), ADEKA OPTOMER N-1919 (manufactured by ADEKA Corporation, photoradical polymerization initiator 2 described in JP 2012-014052 A), TR-PBG-304, TR-PBG-305 (manufactured by Changzhou Strong Electronic New Materials Co., Ltd.), ADEKA ARCLES NCI-730, NCI-831, and ADEKA ARCLES NCI-930 (manufactured by ADEKA Corporation), DFI-091 (manufactured by Daito ChemiX Co., Ltd.), and SpeedCure PDO (SARTOMER Also, an oxime compound having the following structure can be used.

[0202] Examples of photoradical polymerization initiators include oxime compounds having a fluorene ring, oxime compounds having a skeleton in which at least one benzene ring of a carbazole ring is replaced with a naphthalene ring, and oxime compounds having a fluorine atom, as described in paragraphs 0169 to 0171 of WO 2021 / 112189. Also usable are oxime compounds having a nitro group, oxime compounds having a benzofuran skeleton, and oxime compounds in which a substituent having a hydroxy group is bonded to a carbazole skeleton, as described in paragraphs 0208 to 0210 of WO 2021 / 020359. The contents of these compounds are incorporated herein by reference.

[0203] Among these, the photopolymerization initiator preferably contains a compound represented by the following formula (P-1).

[0204] In addition, compounds described in paragraphs 0113 to 0117 of JP-A No. 2023-058585 can also be used as the photopolymerization initiator, the disclosure of which is incorporated herein by reference.

[0205] When the resin composition contains a photopolymerization initiator, the content thereof is preferably 0.1 to 30% by mass, more preferably 0.1 to 20% by mass, even more preferably 0.5 to 15% by mass, and even more preferably 1.0 to 10% by mass, based on the total solid content of the resin composition. Only one type of photopolymerization initiator may be contained, or two or more types may be contained. When two or more types of photopolymerization initiators are contained, the total amount is preferably within the above range. Note that the photopolymerization initiator may also function as a thermal polymerization initiator, and therefore crosslinking by the photopolymerization initiator may be further promoted by heating in an oven, hot plate, or the like.

[0206] [Sensitizer] The resin composition may contain a sensitizer. The sensitizer absorbs specific actinic radiation and becomes electronically excited. The electronically excited sensitizer comes into contact with a thermal radical polymerization initiator, a photoradical polymerization initiator, or the like, and undergoes electron transfer, energy transfer, heat generation, and other actions. This causes the thermal radical polymerization initiator or the photoradical polymerization initiator to undergo a chemical change and decompose, generating a radical, acid, or base. Usable sensitizers include benzophenone-based, Michler's ketone-based, coumarin-based, pyrazole azo-based, anilino azo-based, triphenylmethane-based, anthraquinone-based, anthracene-based, anthrapyridone-based, benzylidene-based, oxonol-based, pyrazolotriazole azo-based, pyridone azo-based, cyanine-based, phenothiazine-based, pyrrolopyrazole azomethine-based, xanthene-based, phthalocyanine-based, benzopyran-based, and indigo-based compounds. "Sensitizers include compounds described in paragraph 0202 of WO 2023 / 190064.

[0207] When the resin composition contains a sensitizer, the content of the sensitizer is preferably 0.01 to 20 mass %, more preferably 0.1 to 15 mass %, and still more preferably 0.5 to 10 mass %, based on the total solid content of the resin composition. The sensitizer may be used alone or in combination of two or more types.

[0208] [Chain Transfer Agent] The resin composition of the present invention may contain a chain transfer agent. Chain transfer agents are defined, for example, in the Third Edition of the Polymer Dictionary (edited by the Society of Polymer Science, 2005), pages 683-684. Examples of chain transfer agents include those having -S-S-, -SO ２ Examples of compounds that can be used include compounds having -S-, -N-O-, SH, PH, SiH, and GeH, and dithiobenzoates, trithiocarbonates, dithiocarbamates, and xanthate compounds having a thiocarbonylthio group used in RAFT (Reversible Addition Fragmentation Chain Transfer) polymerization. These compounds can donate hydrogen to low-activity radicals to generate radicals, or can be oxidized and then deprotonated to generate radicals. Thiol compounds are particularly preferred.

[0209] In addition, the chain transfer agent may be a compound described in paragraphs 0152 to 0153 of WO 2015 / 199219, the contents of which are incorporated herein by reference.

[0210] When the resin composition contains a chain transfer agent, the content of the chain transfer agent is preferably 0.01 to 20 parts by mass, more preferably 0.1 to 10 parts by mass, and even more preferably 0.5 to 5 parts by mass, relative to 100 parts by mass of the total solid content of the resin composition. Only one type of chain transfer agent may be used, or two or more types may be used. When two or more types of chain transfer agents are used, the total content thereof is preferably within the above range.

[0211] In another preferred embodiment of the present invention, the resin composition of the present invention contains two or more polymerization initiators. Specifically, the resin composition of the present invention may contain a photopolymerization initiator and a thermal polymerization initiator described below.

[0212] By including a photopolymerization initiator and a thermal polymerization initiator described below, pattern formation by exposure becomes possible, and radical polymerization also proceeds more easily during curing by a heating step described below, which may improve performance such as chemical resistance. When a photopolymerization initiator and a thermal polymerization initiator described below are included, the content of the thermal polymerization initiator is preferably 20 to 70% by mass, and more preferably 30 to 60% by mass, relative to the total content of the photopolymerization initiator and the thermal polymerization initiator.

[0213] Inclusion of a photoradical polymerization initiator and a photoacid generator may improve performance such as resolution. When a photopolymerization initiator and a photoacid generator are included, the content ratio of the photoacid generator relative to the total content of the photopolymerization initiator and the photoacid generator is preferably 20 to 70 mass %, more preferably 30 to 60 mass %.

[0214] [Thermal Polymerization Initiator] Examples of the thermal polymerization initiator include a thermal radical polymerization initiator. A thermal radical polymerization initiator is a compound that generates radicals by thermal energy and initiates or promotes the polymerization reaction of a polymerizable compound. Addition of a thermal radical polymerization initiator can also promote the polymerization reaction of the resin and the polymerizable compound, thereby further improving solvent resistance.

[0215] Specific examples of the thermal radical polymerization initiator include compounds described in paragraphs 0074 to 0118 of JP-A-2008-063554, the contents of which are incorporated herein by reference.

[0216] When a thermal polymerization initiator is contained, the content thereof is preferably 0.1 to 30 mass% relative to the total solid content of the resin composition, more preferably 0.1 to 20 mass%, and even more preferably 0.5 to 15 mass%. Only one type of thermal polymerization initiator may be contained, or two or more types may be contained. When two or more types of thermal polymerization initiators are contained, it is preferable that the total amount is in the above range.

[0217] <Base Generator> The resin composition of the present invention may contain a base generator. Here, the base generator is a compound capable of generating a base by physical or chemical action. Preferred base generators include thermal base generators and photobase generators. In particular, when the resin composition contains a precursor of a cyclized resin, the resin composition preferably contains a base generator. By containing a thermal base generator in the resin composition, the cyclization reaction of the precursor can be promoted, for example, by heating, and the mechanical properties and chemical resistance of the cured product can be improved, resulting in excellent performance as an interlayer insulating film for a rewiring layer included in a semiconductor package. The base generator may be an ionic base generator or a nonionic base generator. Examples of the base generated from the base generator include secondary amines and tertiary amines. The base generator is not particularly limited, and known base generators can be used. Examples of known base generators include carbamoyl oxime compounds, carbamoyl hydroxylamine compounds, carbamic acid compounds, formamide compounds, acetamide compounds, carbamate compounds, benzyl carbamate compounds, nitrobenzyl carbamate compounds, sulfonamide compounds, imidazole derivative compounds, amine imide compounds, pyridine derivative compounds, α-aminoacetophenone derivative compounds, quaternary ammonium salt derivative compounds, iminium salts, pyridinium salts, α-lactone ring derivative compounds, amine imide compounds, phthalimide derivative compounds, and acyloxyimino compounds. Specific examples of non-ionic base generators include the compounds described in paragraphs 0249 to 0275 of WO 2022 / 145355. The above descriptions are incorporated herein by reference.

[0218] Examples of the base generator include, but are not limited to, the following compounds:

[0219]

[0220] The molecular weight of the nonionic base generator is preferably 800 or less, more preferably 600 or less, and even more preferably 500 or less. The lower limit is preferably 100 or more, more preferably 200 or more, and even more preferably 300 or more.

[0221] Specific preferred compounds for the ionic base generator include, for example, the compounds described in paragraphs 0148 to 0163 of WO 2018 / 038002.

[0222] Specific examples of ammonium salts include, but are not limited to, the following compounds:

[0223] Specific examples of iminium salts include, but are not limited to, the following compounds:

[0224] The base generator is preferably an amine in which the amino group is protected with a t-butoxycarbonyl group, from the viewpoints of storage stability and generating a base by deprotection during curing.

[0225] Examples of amine compounds protected by a t-butoxycarbonyl group include ethanolamine, 3-amino-1-propanol, 1-amino-2-propanol, 2-amino-1-propanol, 4-amino-1-butanol, 2-amino-1-butanol, 1-amino-2-butanol, 3-amino-2,2-dimethyl-1-propanol, 4-amino-2-methyl-1-butanol, valinol, 3-amino-1,2-propanediol, and 2-amino-1,3-propanediol. alcohol, tyramine, norephedrine, 2-amino-1-phenyl-1,3-propanediol, 2-aminocyclohexanol, 4-aminocyclohexanol, 4-aminocyclohexaneethanol, 4-(2-aminoethyl)cyclohexanol, N-methylethanolamine, 3-(methylamino)-1-propanol, 3-(isopropylamino)propanol, N-cyclohexylethanolamine, α-[2-(methylamino)ethyl]benzyl alcohol, diethanolamine diamine, diisopropanolamine, 3-pyrrolidinol, 2-pyrrolidinemethanol, 4-hydroxypiperidine, 3-hydroxypiperidine, 4-hydroxy-4-phenylpiperidine, 4-(3-hydroxyphenyl)piperidine, 4-piperidinemethanol, 3-piperidinemethanol, 2-piperidinemethanol, 4-piperidineethanol, 2-piperidineethanol, 2-(4-piperidyl)-2-propanol, 1,4-butanolbis(3-aminopropyl)ethanol ter, 1,2-bis(2-aminoethoxy)ethane, 2,2'-oxybis(ethylamine), 1,14-diamino-3,6,9,12-tetraoxatetradecane, 1-aza-15-crown-5-ether, diethylene glycol bis(3-aminopropyl)ether, 1,11-diamino-3,6,9-trioxaundecane, or compounds in which the amino group of an amino acid or a derivative thereof is protected with a t-butoxycarbonyl group, but are not limited to these.

[0226] When the resin composition contains a base generator, the content of the base generator is preferably 0.1 to 50 parts by mass per 100 parts by mass of the resin in the resin composition. The lower limit is more preferably 0.3 parts by mass or more, and even more preferably 0.5 parts by mass or more. The upper limit is more preferably 30 parts by mass or less, even more preferably 20 parts by mass or less, even more preferably 10 parts by mass or less, even more preferably 5 parts by mass or less, and particularly preferably 4 parts by mass or less. One or more types of base generators can be used. When two or more types are used, the total amount is preferably within the above range.

[0227] <Solvent> The resin composition of the present invention preferably contains a solvent. Any known solvent can be used as the solvent. The solvent is preferably an organic solvent. Examples of the organic solvent include compounds such as esters, ethers, ketones, cyclic hydrocarbons, sulfoxides, amides, ureas, and alcohols.

[0228] Examples of esters include ethyl acetate, n-butyl acetate, isobutyl acetate, hexyl acetate, amyl formate, isoamyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, ethyl lactate, γ-butyrolactone, ε-caprolactone, δ-valerolactone, γ-valerolactone, alkyl alkyloxyacetates (for example, methyl alkyloxyacetate, ethyl alkyloxyacetate, butyl alkyloxyacetate (for example, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, etc.)), 3-alkyloxypropionic acid alkyl esters (for example, methyl 3-alkyloxypropionate, ethyl 3-alkyloxypropionate (for example, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, etc.)), 2-alkyloxypropionic acid alkyl esters ...alkyloxypropionate, ethyl 3-alkyloxypropionate, 2-alkyloxypropionic acid alkyl esters (for example, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, etc.)), 2-alkyloxypropionic acid alkyl esters (for example, methyl 3-alkyloxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, etc.)), 2-alkyloxypropionic acid alkyl esters (for example, methyl 3- Preferred examples thereof include alkyl esters of alkyloxypropionates (e.g., methyl 2-alkyloxypropionate, ethyl 2-alkyloxypropionate, propyl 2-alkyloxypropionate (e.g., methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate)), methyl 2-alkyloxy-2-methylpropionate and ethyl 2-alkyloxy-2-methylpropionate (e.g., methyl 2-methoxy-2-methylpropionate, ethyl 2-ethoxy-2-methylpropionate), methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, methyl 2-oxobutanoate, ethyl 2-oxobutanoate, ethyl hexanoate, ethyl heptanoate, dimethyl malonate, and diethyl malonate.

[0229] Suitable examples of ethers include ethylene glycol dimethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol butyl methyl ether, triethylene glycol dimethyl ether, tetraethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol dimethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether, ethylene glycol monobutyl ether acetate, diethylene glycol ethyl methyl ether, propylene glycol monopropyl ether acetate, and dipropylene glycol dimethyl ether.

[0230] Suitable examples of ketones include methyl ethyl ketone, cyclohexanone, cyclopentanone, 2-heptanone, 3-heptanone, 3-methylcyclohexanone, levoglucosenone, and dihydrolevoglucosenone.

[0231] Suitable examples of cyclic hydrocarbons include aromatic hydrocarbons such as toluene, xylene, and anisole, and cyclic terpenes such as limonene.

[0232] A preferred example of the sulfoxides is dimethyl sulfoxide.

[0233] Preferred examples of the amides include N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, N-cyclohexyl-2-pyrrolidone, N,N-dimethylacetamide, N,N-dimethylformamide, N,N-dimethylisobutyramide, 3-methoxy-N,N-dimethylpropionamide, 3-butoxy-N,N-dimethylpropionamide, N-formylmorpholine, and N-acetylmorpholine.

[0234] Preferred examples of ureas include N,N,N',N'-tetramethylurea, 1,3-dimethyl-2-imidazolidinone, and 1,3-dimethyl-3,4,5,6-tetrahydro-2(1H)-pyrimidinone.

[0235] Examples of alcohols include methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 1-pentanol, 1-hexanol, benzyl alcohol, ethylene glycol monomethyl ether, 1-methoxy-2-propanol, 2-ethoxyethanol, diethylene glycol monoethyl ether, diethylene glycol monohexyl ether, triethylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monomethyl ether, polyethylene glycol monomethyl ether, polypropylene glycol, tetraethylene glycol, ethylene glycol monobutyl ether, ethylene glycol monobenzyl ether, ethylene glycol monophenyl ether, methylphenyl carbinol, n-amyl alcohol, methyl amyl alcohol, and diacetone alcohol.

[0236] From the viewpoint of improving the properties of the coated surface, it is also preferable to mix two or more kinds of solvents.

[0237] In the present invention, one solvent selected from methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, cyclopentanone, γ-butyrolactone, γ-valerolactone, 3-methoxy-N,N-dimethylpropionamide, toluene, dimethyl sulfoxide, ethyl carbitol acetate, butyl carbitol acetate, N-methyl-2-pyrrolidone, propylene glycol methyl ether, propylene glycol methyl ether acetate, levoglucosenone, and dihydrolevoglucosenone, or a mixed solvent composed of two or more solvents, is preferred. Particularly preferred are a combination of dimethyl sulfoxide and γ-butyrolactone, a combination of dimethyl sulfoxide and γ-valerolactone, a combination of 3-methoxy-N,N-dimethylpropionamide and γ-butyrolactone, a combination of 3-methoxy-N,N-dimethylpropionamide, γ-butyrolactone and dimethyl sulfoxide, or a combination of N-methyl-2-pyrrolidone and ethyl lactate. An embodiment in which toluene is further added to these combined solvents in an amount of approximately 1 to 10% by mass, based on the total mass of the solvent, is also a preferred embodiment of the present invention. In particular, from the viewpoint of the storage stability of the resin composition, an embodiment in which γ-valerolactone is included as a solvent is also a preferred embodiment of the present invention. In such an embodiment, the content of γ-valerolactone relative to the total mass of the solvent is preferably 50% by mass or more, more preferably 60% by mass or more, and even more preferably 70% by mass or more. The upper limit of the above content is not particularly limited and may be 100% by mass. The above content may be determined taking into consideration the solubility of components such as the specific resin contained in the resin composition, etc. Furthermore, when dimethyl sulfoxide and γ-valerolactone are used in combination, the solvent preferably contains 60 to 90 mass% of γ-valerolactone and 10 to 40 mass% of dimethyl sulfoxide, more preferably 70 to 90 mass% of γ-valerolactone and 10 to 30 mass% of dimethyl sulfoxide, and even more preferably 75 to 85 mass% of γ-valerolactone and 15 to 25 mass% of dimethyl sulfoxide, relative to the total mass of the solvent.

[0238] Furthermore, the resin composition of the present invention preferably contains one or more solvents selected from the group consisting of γ-butyrolactone and N-methyl-2-pyrrolidone, and ethyl lactate as solvents. The inclusion of ethyl lactate results in excellent film-forming properties. This is thought to be because ethyl lactate has low hydrophilicity, and its inclusion suppresses resin precipitation due to moisture in residual solvent when the composition is dried. In the above embodiment, the total content of one or more solvents selected from the group consisting of γ-butyrolactone and N-methyl-2-pyrrolidone and ethyl lactate is preferably 50% by mass or more, more preferably 60% by mass or more, and even more preferably 70% by mass or more, based on the total mass of the solvent. The upper limit of the content is not particularly limited, as long as it is 100% by mass or less. In the above-mentioned embodiment, the content of the one or more solvents selected from the group consisting of γ-butyrolactone and N-methyl-2-pyrrolidone relative to the total content of the one or more solvents selected from the group consisting of γ-butyrolactone and N-methyl-2-pyrrolidone and ethyl lactate is preferably 80 to 99.9 mass%, more preferably 90 to 99.5 mass%, and even more preferably 90 to 99.0 mass%. In the above-mentioned embodiment, the resin composition of the present invention preferably further contains dimethyl sulfoxide as a solvent. The inclusion of dimethyl sulfoxide improves the storage stability of the composition. This is presumably because dimethyl sulfoxide has high polarity, which suppresses aggregation of the resin in the composition. When dimethyl sulfoxide is contained, the content of dimethyl sulfoxide relative to the total mass of the solvent is preferably 10 to 40 mass%, more preferably 15 to 35 mass%, and even more preferably 20 to 30 mass%.

[0239] From the viewpoint of coatability, the content of the solvent is preferably an amount such that the total solids concentration of the resin composition of the present invention is 5 to 80 mass%, more preferably an amount such that the total solids concentration is 5 to 75 mass%, even more preferably an amount such that the total solids concentration is 10 to 70 mass%, and even more preferably an amount such that the total solids concentration is 20 to 70 mass%. The solvent content may be adjusted depending on the desired thickness of the coating film and the coating method. When two or more solvents are contained, the total amount of the solvents is preferably within the above range.

[0240] <Metal Adhesion Improver> The resin composition of the present invention preferably contains a metal adhesion improver from the viewpoint of improving adhesion to metal materials used in electrodes, wiring, etc. Examples of the metal adhesion improver include a silane coupling agent having an alkoxysilyl group, an aluminum-based adhesion aid, a titanium-based adhesion aid, a compound having a sulfonamide structure, a compound having a thiourea structure, a phosphoric acid derivative compound, a β-ketoester compound, and an amino compound.

[0241] [Silane Coupling Agent] Examples of silane coupling agents include the compounds described in paragraph 0316 of WO 2021 / 112189 and the compounds described in paragraphs 0067 to 0078 of JP 2018-173573 A, the contents of which are incorporated herein by reference. It is also preferable to use two or more different silane coupling agents, as described in paragraphs 0050 to 0058 of JP 2011-128358 A. It is also preferable to use the following compounds as the silane coupling agent. In the formula below, Me represents a methyl group, and Et represents an ethyl group. Furthermore, the following R represents a structure derived from a blocking agent in a blocked isocyanate group. The blocking agent may be selected depending on the desorption temperature, and examples include alcohol compounds, phenol compounds, pyrazole compounds, triazole compounds, lactam compounds, and active methylene compounds. For example, caprolactam is preferred from the viewpoint of achieving a desorption temperature of 160 to 180°C. Commercially available products of such compounds include X-12-1293 (manufactured by Shin-Etsu Chemical Co., Ltd.).

[0242]

[0243] Other silane coupling agents include, for example, vinyltrimethoxysilane, vinyltriethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycidoxypropyltriethoxysilane, p-styryltrimethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropylmethyldiethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, N-2- Examples of suitable silane coupling agents include (aminoethyl)-3-aminopropylmethyldimethoxysilane, N-2-(aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-triethoxysilyl-N-(1,3-dimethylbutylidene)propylamine, N-phenyl-3-aminopropyltrimethoxysilane, tris-(trimethoxysilylpropyl)isocyanurate, 3-ureidopropyltrialkoxysilane, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-isocyanatopropyltriethoxysilane, and 3-trimethoxysilylpropylsuccinic anhydride. These may be used alone or in combination of two or more. Furthermore, oligomeric compounds having multiple alkoxysilyl groups may also be used as silane coupling agents. Examples of such oligomeric compounds include compounds containing a repeating unit represented by the following formula (S-1): In formula (S-1), R Ｓ１ represents a monovalent organic group, R Ｓ２ represents a hydrogen atom, a hydroxy group or an alkoxy group, and n represents an integer of 0 to 2. Ｓ１is preferably a structure containing a polymerizable group. Examples of the polymerizable group include a group having an ethylenically unsaturated bond, an epoxy group, an oxetanyl group, a benzoxazolyl group, a blocked isocyanate group, and an amino group. Examples of the group having an ethylenically unsaturated bond include a vinyl group, an allyl group, an isoallyl group, a 2-methylallyl group, a group having an aromatic ring directly bonded to a vinyl group (for example, a vinylphenyl group), a (meth)acrylamide group, and a (meth)acryloyloxy group. A vinylphenyl group, a (meth)acrylamide group, or a (meth)acryloyloxy group is preferred, a vinylphenyl group or a (meth)acryloyloxy group is more preferred, and a (meth)acryloyloxy group is even more preferred. R Ｓ２ is preferably an alkoxy group, more preferably a methoxy group or an ethoxy group. n represents an integer of 0 to 2, preferably 1. Here, the structures of the multiple repeating units represented by formula (S-1) contained in the oligomer-type compound may be the same. Here, of the multiple repeating units represented by formula (S-1) contained in the oligomer-type compound, it is preferable that n is 1 or 2 in at least one, more preferably that n is 1 or 2 in at least two, and even more preferably that n is 1 in at least two. Such oligomer-type compounds can be commercially available products, and an example of a commercially available product is KR-513 (manufactured by Shin-Etsu Chemical Co., Ltd.).

[0244] [Aluminum-Based Adhesion Aid] Examples of aluminum-based adhesion aids include aluminum tris(ethylacetoacetate), aluminum tris(acetylacetonate), and ethylacetoacetate aluminum diisopropylate.

[0245] Other metal adhesion improvers that can be used include the compounds described in paragraphs 0046 to 0049 of JP-A-2014-186186 and the sulfide-based compounds described in paragraphs 0032 to 0043 of JP-A-2013-072935, the contents of which are incorporated herein by reference.

[0246] The content of the metal adhesion improver is preferably 0.01 to 30 parts by mass, more preferably 0.1 to 10 parts by mass, and even more preferably 0.5 to 5 parts by mass, relative to 100 parts by mass of the specific resin. By ensuring that the content is equal to or greater than the above lower limit, the adhesion between the pattern and the metal layer is improved, and by ensuring that the content is equal to or less than the above upper limit, the heat resistance and mechanical properties of the pattern are improved. Only one type of metal adhesion improver may be used, or two or more types may be used. When two or more types are used, it is preferable that the total amount is within the above range.

[0247] <Migration Inhibitor> The resin composition of the present invention preferably further contains a migration inhibitor. By containing a migration inhibitor, for example, when the resin composition is applied to a metal layer (or metal wiring) to form a film, migration of metal ions derived from the metal layer (or metal wiring) into the film can be effectively suppressed. Compounds corresponding to the above-mentioned compound A are not considered to be migration inhibitors as used herein.

[0248] The migration inhibitor is not particularly limited, but examples thereof include compounds having a heterocycle (pyrrole ring, furan ring, thiophene ring, imidazole ring, oxazole ring, thiazole ring, pyrazole ring, isoxazole ring, isothiazole ring, tetrazole ring, pyridine ring, pyridazine ring, pyrimidine ring, pyrazine ring, piperidine ring, piperazine ring, morpholine ring, 2H-pyran ring, 6H-pyran ring, triazine ring), thioureas and compounds having a sulfanyl group, hindered phenol compounds, salicylic acid derivative compounds, and hydrazide derivative compounds. In particular, triazole compounds such as 1,2,4-triazole, benzotriazole, 3-amino-1,2,4-triazole, and 3,5-diamino-1,2,4-triazole, and tetrazole compounds such as 1H-tetrazole, 5-phenyltetrazole, and 5-amino-1H-tetrazole are preferably used.

[0249] As the migration inhibitor, an ion trapping agent that traps anions such as halogen ions can also be used.

[0250] Other migration inhibitors include the rust inhibitors described in paragraph 0094 of JP-A-2013-015701, the compounds described in paragraphs 0073 to 0076 of JP-A-2009-283711, the compounds described in paragraph 0052 of JP-A-2011-059656, the compounds described in paragraphs 0114, 0116 and 0118 of JP-A-2012-194520, and the compounds described in paragraph 0166 of WO 2015 / 199219. The contents of this specification are incorporated herein by reference.

[0251] Specific examples of the migration inhibitor include the following compounds.

[0252]

[0253] Furthermore, the migration inhibitor may contain a compound B represented by the following formula (X-1). In formula (X-1), X Ｂ１ is -O-, -S-, or -NR Ｎ１ - and R Ｎ１ is a hydrogen atom or a substituent, and R Ｂ１ represents an aromatic heterocyclic structure which may have a substituent, R Ｂ２ ~R Ｂ６ is a hydrogen atom or a substituent, and R Ｂ２ ~R Ｂ６ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ - or -S-, and R Ｎ２ is a hydrogen atom or a substituent, and R Ｂ２ ~R Ｂ６ At least two of these may be bonded to form a ring structure.

[0254] Here, X in formula (B-1) Ｂ１ , R Ｂ１ ~R Ｂ６ A preferred embodiment of the formula is X １１ , R １１ ~R １６ The preferred embodiments are the same as those of the above.

[0255] When the resin composition of the present invention contains a migration inhibitor, the content of the migration inhibitor is preferably 0.01 to 5.0 mass%, more preferably 0.05 to 2.0 mass%, and even more preferably 0.1 to 1.0 mass%, based on the total solid content of the resin composition.

[0256] The migration inhibitor may be one kind or two or more kinds. When two or more kinds of migration inhibitors are used, the total amount thereof is preferably within the above range.

[0257] <Light absorber> The resin composition of the present invention preferably contains a compound (light absorber) whose absorbance at the exposure wavelength is reduced by exposure. Examples of the light absorber include the compounds described in paragraphs 0159 to 0183 of WO 2022 / 202647 and the compounds described in paragraphs 0088 to 0108 of JP 2019-206689 A. The contents of these compounds are incorporated herein by reference.

[0258] It is also preferable to include a compound having the following structure as the light absorber.

[0259] The content of the light absorber relative to the total solid content of the resin composition of the present invention is not particularly limited, but is preferably 0.1 to 20 mass%, more preferably 0.5 to 10 mass%, and even more preferably 1 to 5 mass%.

[0260] <Polymerization Inhibitor> The resin composition of the present invention preferably contains a polymerization inhibitor. Examples of the polymerization inhibitor include phenolic compounds, quinone compounds, amino compounds, N-oxyl free radical compounds, nitro compounds, nitroso compounds, heteroaromatic ring compounds, and metal compounds.

[0261] Specific examples of the polymerization inhibitor include the compounds described in paragraph 0310 of WO 2021 / 112189, p-hydroquinone, o-hydroquinone, 4-hydroxy-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, phenoxazine, 1,4,4-trimethyl-2,3-diazabicyclo[3.2.2]non-2-ene-N,N-dioxide, 1-nitroso-2-naphthol, 2,2,6,6-tetramethylpiperidine 1-oxyl free radical, tert-butylhydroquinone, 4-tert-butylcatechol, phenothiazine, and the like. The contents of this document are incorporated herein by reference.

[0262] When the resin composition of the present invention contains a polymerization inhibitor, the content of the polymerization inhibitor is preferably 0.01 to 20 mass%, more preferably 0.02 to 15 mass%, and even more preferably 0.05 to 10 mass%, based on the total solid content of the resin composition.

[0263] The polymerization inhibitor may be one kind or two or more kinds. When two or more kinds of polymerization inhibitors are used, the total amount thereof is preferably within the above range.

[0264] <Other Additives> The resin composition of the present invention may contain various additives, as needed, within the scope of obtaining the effects of the present invention, such as surfactants, higher fatty acid derivatives, thermal polymerization initiators, inorganic particles, ultraviolet absorbers, organic titanium compounds, antioxidants, photoacid generators, anti-aggregation agents, phenolic compounds, other polymer compounds, plasticizers, and other auxiliary agents (e.g., antifoaming agents, flame retardants, etc.). By appropriately incorporating these components, it is possible to adjust properties such as film physical properties. For details of these components, please refer to, for example, the descriptions in paragraphs 0183 and after of JP 2012-003225 A (corresponding to paragraph 0237 of U.S. Patent Application Publication No. 2013 / 0034812 ), and the descriptions in paragraphs 0101 to 0104 and 0107 to 0109 of JP 2008-250074 A, the contents of which are incorporated herein by reference. When these additives are blended, the total content thereof is preferably 3% by mass or less of the solid content of the resin composition of the present invention.

[0265] [Surfactant] Various surfactants can be used as the surfactant, such as a fluorine-based surfactant, a silicone-based surfactant, a hydrocarbon-based surfactant, etc. The surfactant may be a nonionic surfactant, a cationic surfactant, or an anionic surfactant.

[0266] By adding a surfactant to the resin composition of the present invention, the liquid properties (particularly fluidity) of the coating liquid composition when prepared are further improved, and the uniformity of the coating thickness and the liquid saving can be further improved. That is, when a film is formed using a coating liquid containing a surfactant, the interfacial tension between the surface to be coated and the coating liquid is reduced, improving the wettability of the surface to be coated and the coatability of the surface to be coated. Therefore, it is possible to more suitably form a uniform film with small thickness unevenness.

[0267] Examples of fluorine-based surfactants include the compounds described in paragraph 0328 of WO 2021 / 112189, the contents of which are incorporated herein by reference. As the fluorine-based surfactant, fluorine-containing polymer compounds containing a repeating unit derived from a (meth)acrylate compound having a fluorine atom and a repeating unit derived from a (meth)acrylate compound having two or more (preferably five or more) alkyleneoxy groups (preferably ethyleneoxy groups, propyleneoxy groups) can also be preferably used, and examples thereof include the following compounds.

[0268] The weight-average molecular weight of the above compound is preferably 3,000 to 50,000, and more preferably 5,000 to 30,000. As the fluorosurfactant, a fluorine-containing polymer having an ethylenically unsaturated group in the side chain can also be used. Specific examples include the compounds described in paragraphs 0050 to 0090 and 0289 to 0295 of JP 2010-164965 A, the contents of which are incorporated herein by reference. Commercially available products include Megafac RS-101, RS-102, and RS-718K manufactured by DIC Corporation.

[0269] The fluorine content in the fluorine-containing surfactant is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and particularly preferably 7 to 25% by mass. A fluorine-containing surfactant having a fluorine content within this range is effective in terms of uniformity of the thickness of the coating film and liquid saving, and also has good solubility in the composition.

[0270] Examples of silicone surfactants, hydrocarbon surfactants, nonionic surfactants, cationic surfactants, and anionic surfactants include the compounds described in paragraphs 0329 to 0334 of WO 2021 / 112189, the contents of which are incorporated herein by reference.

[0271] The surfactant may be used alone or in combination of two or more. The content of the surfactant is preferably 0.001 to 2.0 mass %, more preferably 0.005 to 1.0 mass %, based on the total solid content of the composition.

[0272] [Inorganic Particles] Specific examples of inorganic particles include calcium carbonate, calcium phosphate, silica, kaolin, talc, titanium dioxide, alumina, barium sulfate, calcium fluoride, lithium fluoride, zeolite, molybdenum sulfide, and glass.

[0273] The average particle size of the inorganic particles is preferably 0.01 to 2.0 μm, more preferably 0.02 to 1.5 μm, even more preferably 0.03 to 1.0 μm, and particularly preferably 0.04 to 0.5 μm. The above average particle size of the inorganic particles is the primary particle size and also the volume average particle size. The volume average particle size can be measured, for example, by dynamic light scattering using a Nanotrac WAVE II EX-150 (manufactured by Nikkiso Co., Ltd.). If the above measurement is difficult, it can also be measured by centrifugal sedimentation light transmission method, X-ray transmission method, or laser diffraction / scattering method.

[0274] [Organotitanium Compound] When the resin composition contains an organotitanium compound, a resin layer having excellent chemical resistance can be formed even when cured at low temperatures.

[0275] Usable organic titanium compounds include those in which an organic group is bonded to a titanium atom via a covalent bond or an ionic bond. Specific examples of organic titanium compounds are shown below in I) to VII): I) Titanium chelate compounds: Titanium chelate compounds having two or more alkoxy groups are more preferred because they provide good storage stability to the resin composition and a good curing pattern. Specific examples include titanium bis(triethanolamine) diisopropoxide, titanium di(n-butoxide) bis(2,4-pentanedionate), titanium diisopropoxide bis(2,4-pentanedionate), titanium diisopropoxide bis(tetramethylheptanedionate), and titanium diisopropoxide bis(ethylacetoacetate). II) Tetraalkoxytitanium compounds: for example, titanium tetra(n-butoxide), titanium tetraethoxide, titanium tetra(2-ethylhexoxide), titanium tetraisobutoxide, titanium tetraisopropoxide, titanium tetramethoxide, titanium tetramethoxypropoxide, titanium tetramethylphenoxide, titanium tetra(n-nonyloxide), titanium tetra(n-propoxide), titanium tetrastearyloxide, titanium tetrakis[bis{2,2-(allyloxymethyl)butoxide}], etc. III) Titanocene compounds: for example, pentamethylcyclopentadienyltitanium trimethoxide, bis(η5-2,4-cyclopentadien-1-yl)bis(2,6-difluorophenyl)titanium, bis(η5-2,4-cyclopentadien-1-yl)bis(2,6-difluoro-3-(1H-pyrrol-1-yl)phenyl)titanium, etc. IV) Monoalkoxytitanium compounds: for example, titanium tris(dioctylphosphate)isopropoxide, titanium tris(dodecylbenzenesulfonate)isopropoxide, etc. V) Titanium oxide compounds: for example, titanium oxide bis(pentanedionate), titanium oxide bis(tetramethylheptanedionate), phthalocyanine titanium oxide, etc.VI) Titanium tetraacetylacetonate compounds: for example, titanium tetraacetylacetonate, etc. VII) Titanate coupling agents: for example, isopropyl tridodecylbenzenesulfonyl titanate, etc.

[0276] Among these, from the viewpoint of better chemical resistance, the organic titanium compound is preferably at least one compound selected from the group consisting of I) titanium chelate compounds, II) tetraalkoxytitanium compounds, and III) titanocene compounds. In particular, titanium diisopropoxide bis(ethylacetoacetate), titanium tetra(n-butoxide), and bis(η5-2,4-cyclopentadien-1-yl)bis(2,6-difluoro-3-(1H-pyrrol-1-yl)phenyl)titanium are preferred.

[0277] It is also preferable to contain a compound represented by the following formula (T-1) as the organotitanium compound or in place of the organotitanium compound. In formula (T-1), M is titanium, zirconium, or hafnium, l1 is an integer of 0 to 2, l2 is 0 or 1, l1 + l2 × 2 is an integer of 0 to 2, m is an integer of 0 to 4, n is an integer of 0 to 2, l1 + l2 + m + n × 2 = 4, and R １１ are each independently a substituted or unsubstituted cyclopentadienyl group, a substituted or unsubstituted alkoxy group, or a substituted or unsubstituted phenoxy group; R １２ is a substituted or unsubstituted hydrocarbon group, R ２ are each independently a group containing a structure represented by the following formula (T-2), and R ３ are each independently a group containing a structure represented by the following formula (T-2), Ａ are each independently an oxygen atom or a sulfur atom. In formula (T-2), X １ ~X ３ each independently represents -C(-*)= or -N=, * represents a bonding site to another structure, and # represents a bonding site to a metal atom.

[0278] In formula (T-1), from the viewpoint of storage stability of the composition, M is preferably titanium. In formula (T-1), an embodiment in which l1 and l2 are 0 is also one of the preferred embodiments of the present invention. In formula (T-1), m is preferably 2 or 4, and more preferably 2. In formula (T-1), n ​​is preferably 1 or 2, and more preferably 1. Here, it is also preferable that in formula (T-1), l1 and l2 are 0, and m is 0, 2, or 4.

[0279] In formula (T-1), from the viewpoint of the stability of the specific metal complex, R １１ is preferably a substituted or unsubstituted cyclopentadienyl ligand. １１ The cyclopentadienyl group, alkoxy group and phenoxy group in the formula (I) may be substituted, but an embodiment in which they are unsubstituted is also one of the preferred embodiments of the present invention.

[0280] In formula (T-1), R １２ is preferably a hydrocarbon group having 1 to 20 carbon atoms, and more preferably a hydrocarbon group having 2 to 10 carbon atoms. １２ The hydrocarbon group in may be either an aliphatic hydrocarbon group or an aromatic hydrocarbon group, but an aromatic hydrocarbon group is preferred. The aliphatic hydrocarbon group may be either a saturated aliphatic hydrocarbon group or an unsaturated aliphatic hydrocarbon group, but a saturated aliphatic hydrocarbon group is preferred. The aromatic hydrocarbon group is preferably an aromatic hydrocarbon group having 6 to 20 carbon atoms, more preferably an aromatic hydrocarbon group having 6 to 10 carbon atoms, and even more preferably a phenylene group. R １２ The substituent in R is preferably a monovalent substituent, such as a halogen atom. １２ When R is an aromatic hydrocarbon group, it may have an alkyl group as a substituent. １２ is preferably an unsubstituted phenylene group. １２ The phenylene group in is preferably a 1,2-phenylene group.

[0281] In formula (T-1), m is 2 or more, and R ２ If two or more are included,２ In formula (T-1), n ​​is 2 or more, and R ３ If two or more are included, ３ The structures may be the same or different.

[0282] In formula (T-2), X １ ~X ３ each independently represents -C(-*)= or -N=, and it is preferable that at least one represents -C(-*)=, and it is more preferable that at least two represent -C(-*)=.

[0283] Specific examples of the compound represented by formula (T-1) include, but are not limited to, the compound F-11 in the examples.

[0284] When an organotitanium compound is contained, its content is preferably 0.05 to 10 parts by mass, and more preferably 0.1 to 5 parts by mass, relative to 100 parts by mass of the specific resin. When the content is 0.05 part by mass or more, the heat resistance and chemical resistance of the obtained cured pattern are improved, and when it is 10 parts by mass or less, the storage stability of the composition is improved.

[0285] When an organotitanium compound is contained, its content is preferably 0.05 to 10 parts by mass, and more preferably 0.1 to 2 parts by mass, relative to 100 parts by mass of the specific resin. When the content is 0.05 part by mass or more, the heat resistance and chemical resistance of the obtained cured pattern are improved, and when it is 10 parts by mass or less, the storage stability of the composition is superior.

[0286] [Antioxidant] By including an antioxidant as an additive, the elongation properties of the cured film and adhesion to metal materials can be improved. Examples of antioxidants include phenolic compounds, phosphite ester compounds, and thioether compounds. Specific examples of antioxidants include the compounds described in paragraphs 0348 to 0357 of WO 2021 / 112189, the contents of which are incorporated herein by reference. In addition, D-1 to D-18 described in the examples below can also be suitably used.

[0287] The content of the antioxidant is preferably 0.1 to 10 parts by mass, more preferably 0.5 to 5 parts by mass, per 100 parts by mass of the specific resin. By adding an amount of 0.1 parts by mass or more, it is easy to obtain the effects of improving elongation properties and adhesion to metal materials even in high-temperature, high-humidity environments. By adding an amount of 10 parts by mass or less, the sensitivity of the resin composition is improved, for example, through interaction with the photosensitizer. Only one type of antioxidant may be used, or two or more types may be used. When two or more types are used, it is preferable that the total amount thereof be within the above range. Other additives include the compounds described in paragraphs 0249-0282 and 0316-0358 of WO 2022 / 145355. The above descriptions are incorporated herein by reference.

[0288] <Characteristics of Resin Composition> The viscosity of the resin composition of the present invention can be adjusted by the solid content concentration of the resin composition. ２ / s~12,000mm ２ / s is preferred, and 2,000 mm ２ / s~10,000mm ２ / s is more preferable, and 2,500 mm ２ / s~8,000mm ２ Within the above range, it is easy to obtain a highly uniform coating film. ２ If the thickness is more than 12,000 mm / s, it is easy to apply the coating to a thickness required for an insulating film for rewiring, for example. ２ If the viscosity is less than 1 / s, a coating film with excellent surface condition can be obtained.

[0289] <Restrictions on substances contained in the resin composition> The water content of the resin composition of the present invention is preferably less than 2.0% by mass, more preferably less than 1.5% by mass, and even more preferably less than 1.0% by mass. If it is less than 2.0%, the storage stability of the resin composition is improved. Methods for maintaining the water content include adjusting the humidity under storage conditions and reducing the porosity of the storage container during storage.

[0290] From the viewpoint of insulating properties, the metal content of the resin composition of the present invention is preferably less than 5 mass ppm (parts per million), more preferably less than 1 mass ppm, and even more preferably less than 0.5 mass ppm. Examples of metals include sodium, potassium, magnesium, calcium, iron, copper, chromium, and nickel, but metals contained as complexes of organic compounds and metals are excluded. When multiple metals are contained, the total amount of these metals is preferably within the above range.

[0291] Furthermore, examples of methods for reducing metal impurities unintentionally contained in the resin composition of the present invention include selecting raw materials with a low metal content as raw materials for constituting the resin composition of the present invention, filtering the raw materials for constituting the resin composition of the present invention, and lining the inside of the apparatus with polytetrafluoroethylene or the like to perform distillation under conditions that minimize contamination as much as possible.

[0292] Considering the use of the resin composition of the present invention as a semiconductor material, the content of halogen atoms is preferably less than 500 ppm by mass, more preferably less than 300 ppm by mass, and even more preferably less than 200 ppm by mass, from the viewpoint of wiring corrosion. In particular, those present in the form of halogen ions are preferably less than 5 ppm by mass, more preferably less than 1 ppm by mass, and even more preferably less than 0.5 ppm by mass. Examples of halogen atoms include chlorine atoms and bromine atoms. It is preferable that the total of chlorine atoms and bromine atoms, or chlorine ions and bromine ions, is within the above-mentioned range. Preferred methods for adjusting the content of halogen atoms include ion exchange treatment.

[0293] A conventionally known container can be used as a container for storing the resin composition of the present invention. For the purpose of preventing impurities from being mixed into the raw materials or the resin composition of the present invention, it is also preferable to use a multi-layer bottle whose inner wall is made of six types of six resin layers, or a bottle with a seven-layer structure made of six types of resin. Examples of such containers include the container described in JP 2015-123351 A.

[0294] <Cured Product of Resin Composition> A cured product of the resin composition can be obtained by curing the resin composition of the present invention. The cured product of the present invention is a cured product obtained by curing the resin composition. The resin composition is preferably cured by heating, with a heating temperature of 120°C to 400°C being more preferred, 140°C to 380°C being even more preferred, and 170°C to 350°C being particularly preferred. The form of the cured product of the resin composition is not particularly limited, and can be selected depending on the application, such as a film, rod, sphere, or pellet. In the present invention, the cured product is preferably in the form of a film. By patterning the resin composition, the shape of the cured product can be selected depending on the application, such as forming a protective film on a wall surface, forming via holes for electrical conductivity, adjusting impedance, capacitance, or internal stress, or imparting heat dissipation functionality. The film thickness of the cured product (film made of the cured product) is preferably 0.5 μm or more and 150 μm or less. The shrinkage rate when the resin composition of the present invention is cured is preferably 50% or less, more preferably 45% or less, and even more preferably 40% or less. Here, the shrinkage rate refers to the percentage of change in volume of the resin composition before and after curing, and can be calculated by the following formula: Shrinkage rate [%] = 100 - (volume after curing / volume before curing) x 100

[0295] <Characteristics of cured product of resin composition> The imidization reaction rate of the cured product of the resin composition of the present invention is preferably 70% or more, more preferably 80% or more, and even more preferably 90% or more. If it is 70% or more, the cured product may have excellent mechanical properties. The elongation at break of the cured product of the resin composition of the present invention is preferably 30% or more, more preferably 40% or more, and even more preferably 50% or more. The glass transition temperature (Tg) of the cured product of the resin composition of the present invention is preferably 180°C or more, more preferably 210°C or more, and even more preferably 230°C or more.

[0296] <Preparation of Resin Composition> The resin composition of the present invention can be prepared by mixing the above-mentioned components. The mixing method is not particularly limited, and can be carried out by a conventionally known method. Examples of the mixing method include mixing with a stirring blade, mixing with a ball mill, and mixing by rotating a tank. The temperature during mixing is preferably 10 to 30°C, more preferably 15 to 25°C.

[0297] Filtration using a filter is preferably performed to remove foreign matter such as dust and fine particles from the resin composition of the present invention. The filter pore size is, for example, preferably 5 μm or less, more preferably 1 μm or less, even more preferably 0.5 μm or less, and even more preferably 0.1 μm or less. The filter material is preferably polytetrafluoroethylene, polyethylene, or nylon. When the filter material is polyethylene, HDPE (high-density polyethylene) is more preferable. The filter may be pre-washed with an organic solvent. In the filter filtration process, multiple types of filters may be connected in series or parallel. When multiple types of filters are used, filters with different pore sizes or materials may be combined. An example of a connection mode is a mode in which an HDPE filter with a pore size of 1 μm is connected in series as the first stage and an HDPE filter with a pore size of 0.2 μm is connected in series as the second stage. Various materials may also be filtered multiple times. When filtration is performed multiple times, circulating filtration may be used. Filtration may also be performed under pressure. When filtering under pressure, the pressure to be applied is preferably 0.01 MPa or more and 1.0 MPa or less, more preferably 0.03 MPa or more and 0.9 MPa or less, even more preferably 0.05 MPa or more and 0.7 MPa or less, and even more preferably 0.05 MPa or more and 0.5 MPa or less. In addition to filtering using a filter, a process of removing impurities using an adsorbent may be performed. Filter filtration and a process of removing impurities using an adsorbent may be combined. Known adsorbents can be used as the adsorbent. Examples include inorganic adsorbents such as silica gel and zeolite, and organic adsorbents such as activated carbon. After filtering using a filter, the resin composition filled in a bottle may be subjected to a degassing process by placing it under reduced pressure.

[0298] (Method for producing a cured product) The method for producing a cured product of the present invention preferably includes a film-forming step in which a resin composition is applied to a substrate to form a film. The method for producing a cured product more preferably includes the film-forming step, an exposure step in which the film formed in the film-forming step is selectively exposed to light, and a development step in which the film exposed in the exposure step is developed using a developer to form a pattern. The method for producing a cured product particularly preferably includes the film-forming step, the exposure step, the development step, and at least one of a heating step in which the pattern obtained in the development step is heated and a post-development exposure step in which the pattern obtained in the development step is exposed to light. The method for producing a cured product also preferably includes the film-forming step and a step of heating the film. Details of each step are described below.

[0299] <Film Forming Step> The resin composition of the present invention can be used in a film forming step of applying the resin composition to a substrate to form a film. The method for producing a cured product of the present invention preferably includes a film forming step of applying the resin composition to a substrate to form a film.

[0300] [Substrate] The type of substrate can be appropriately determined depending on the application and is not particularly limited. Examples of substrates include semiconductor production substrates such as silicon, silicon nitride, polysilicon, silicon oxide, and amorphous silicon, quartz, glass, optical films, ceramic materials, vapor deposition films, magnetic films, reflective films, metal substrates such as Ni, Cu, Cr, and Fe (for example, substrates formed from metal and substrates on which a metal layer is formed by, for example, plating or vapor deposition), paper, SOG (Spin On Glass), TFT (Thin Film Transistor) array substrates, mold substrates, and plasma display panel (PDP) electrode plates. Substrates are particularly preferably semiconductor production substrates, with silicon substrates, Cu substrates, and mold substrates being more preferred. These substrates may have a surface layer such as an adhesion layer or an oxide layer formed by hexamethyldisilazane (HMDS) or the like. The shape of the substrate is not particularly limited and may be circular or rectangular. The size of the substrate is preferably, for example, a diameter of 100 to 450 mm, more preferably 200 to 450 mm, if it is circular. If it is rectangular, the length of the short side is preferably, for example, 100 to 1000 mm, more preferably 200 to 700 mm. As the substrate, for example, a plate-shaped, preferably a panel-shaped substrate (substrate) is used.

[0301] When a film is formed by applying a resin composition to the surface of a resin layer (for example, a layer made of a cured product) or the surface of a metal layer, the resin layer or the metal layer serves as the substrate.

[0302] Coating is preferred as a means for applying the resin composition to a substrate. Specific application methods include dip coating, air knife coating, curtain coating, wire bar coating, gravure coating, extrusion coating, spray coating, spin coating, slit coating, and inkjet coating. From the viewpoint of uniformity of film thickness, spin coating, slit coating, spray coating, or inkjet coating is preferred, and from the viewpoint of uniformity of film thickness and productivity, spin coating and slit coating are more preferred. By adjusting the solid content concentration of the resin composition and coating conditions depending on the application method, a film of the desired thickness can be obtained. In addition, the coating method can be appropriately selected depending on the shape of the substrate. For circular substrates such as wafers, spin coating, spray coating, inkjet coating, etc. are preferred, and for rectangular substrates, slit coating, spray coating, inkjet coating, etc. are preferred. In the case of spin coating, for example, it can be applied at a rotation speed of 500 to 3,500 rpm for about 10 seconds to 3 minutes. Alternatively, a method can be used in which a coating film formed by applying the coating composition to a temporary support in advance using the above-described application method is transferred onto the substrate. Regarding the transfer method, the preparation methods described in paragraphs 0023 and 0036 to 0051 of JP-A No. 2006-023696 and paragraphs 0096 to 0108 of JP-A No. 2006-047592 can be suitably used. A step of removing excess film from the edge of the substrate may also be performed. Examples of such a step include edge bead rinsing (EBR) and back rinsing. A pre-wetting step may also be employed in which the substrate is coated with various solvents before applying the resin composition to the substrate, improving the wettability of the substrate and then applying the resin composition.

[0303] <Drying Step> After the film-forming step (layer-forming step), the film may be subjected to a step (drying step) of drying the formed film (layer) to remove the solvent. That is, the method for producing a cured product of the present invention may include a drying step of drying the film formed in the film-forming step. The drying step is preferably carried out after the film-forming step and before the exposure step. The drying temperature of the film in the drying step is preferably 50 to 150°C, more preferably 70 to 130°C, and even more preferably 90 to 110°C. Drying may also be carried out under reduced pressure. The drying time is, for example, 30 seconds to 20 minutes, preferably 1 to 10 minutes, and more preferably 2 to 7 minutes.

[0304] <Exposure Step> The film may be subjected to an exposure step in which the film is selectively exposed to light. The method for producing a cured product may include an exposure step in which the film formed in the film formation step is selectively exposed to light. Selective exposure means that a portion of the film is exposed to light. Furthermore, selective exposure forms exposed regions (exposed portions) and unexposed regions (unexposed portions) in the film. The exposure dose is not particularly limited as long as it can cure the resin composition of the present invention, but for example, it is 50 to 10,000 mJ / cm2 in terms of exposure energy at a wavelength of 365 nm. ２ is preferred, and 200 to 8,000 mJ / cm ２ is more preferred.

[0305] The exposure wavelength can be appropriately determined within the range of 190 to 1,000 nm, and is preferably 240 to 550 nm.

[0306] The exposure wavelengths, in relation to the light source, are: (1) semiconductor laser (wavelengths 830 nm, 532 nm, 488 nm, 405 nm, 375 nm, 355 nm, etc.); (2) metal halide lamp; (3) high-pressure mercury lamp, g-line (wavelength 436 nm), h-line (wavelength 405 nm), i-line (wavelength 365 nm), broad (three wavelengths of g, h, and i-line); (4) excimer laser, KrF excimer laser (wavelength 248 nm), ArF excimer laser (wavelength 193 nm), F ２Examples of such light include excimer laser (wavelength 157 nm), (5) extreme ultraviolet light; EUV (wavelength 13.6 nm), (6) electron beam, and (7) YAG laser second harmonic 532 nm and third harmonic 355 nm. For the resin composition of the present invention, exposure with a high-pressure mercury lamp is particularly preferred, and exposure with i-line is more preferred from the viewpoint of exposure sensitivity. The exposure method is not particularly limited as long as it is a method that exposes at least a portion of the film made of the resin composition of the present invention, and examples thereof include exposure using a photomask and exposure by laser direct imaging.

[0307] <Post-Exposure Bake Step> The film may be subjected to a heating step (post-exposure bake step) after exposure. That is, the method for producing a cured product of the present invention may include a post-exposure bake step in which the film exposed in the exposure step is heated. The post-exposure bake step can be carried out after the exposure step and before the development step. The heating temperature in the post-exposure bake step is preferably 50°C to 140°C, more preferably 60°C to 120°C. The heating time in the post-exposure bake step is preferably 30 seconds to 300 minutes, more preferably 1 minute to 10 minutes. The temperature rise rate in the post-exposure bake step from the temperature at the start of heating to the maximum heating temperature is preferably 1 to 12°C / min, more preferably 2 to 10°C / min, and even more preferably 3 to 10°C / min. The temperature rise rate may also be changed as appropriate during heating. The heating means in the post-exposure bake step is not particularly limited, and known hot plates, ovens, infrared heaters, etc. may be used. It is also preferable to carry out the heating in an atmosphere of low oxygen concentration by flowing an inert gas such as nitrogen, helium, or argon.

[0308] <Development step> The above-mentioned film after exposure may be subjected to a development step in which it is developed using a developer to form a pattern. That is, the method for producing a cured product of the present invention may include a development step in which the film exposed in the exposure step is developed using a developer to form a pattern. By carrying out development, one of the exposed and unexposed parts of the film is removed to form a pattern. Here, development in which the unexposed parts of the film are removed in the development step is called negative development, and development in which the exposed parts of the film are removed in the development step is called positive development.

[0309] [Developer] The developer used in the development step may be an aqueous alkaline solution or a developer containing an organic solvent.

[0310] When the developer is an alkaline aqueous solution, examples of the basic compound that can be contained in the alkaline aqueous solution include inorganic alkalis, primary amines, secondary amines, tertiary amines, and quaternary ammonium salts. Preferred are TMAH (tetramethylammonium hydroxide), potassium hydroxide, sodium carbonate, sodium hydroxide, sodium silicate, sodium metasilicate, ammonia, ethylamine, n-propylamine, diethylamine, di-n-butylamine, triethylamine, methyldiethylamine, dimethylethanolamine, triethanolamine, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, tetrapentylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, ethyltrimethylammonium hydroxide, butyltrimethylammonium hydroxide, methyltriamylammonium hydroxide, dibutyldipentylammonium hydroxide, dimethylbis(2-hydroxyethyl)ammonium hydroxide, trimethylphenylammonium hydroxide, trimethylbenzylammonium hydroxide, triethylbenzylammonium hydroxide, pyrrole, and piperidine, and more preferred is TMAH. The content of the basic compound in the developer is preferably from 0.01 to 10% by mass, more preferably from 0.1 to 5% by mass, and even more preferably from 0.3 to 3% by mass, based on the total mass of the developer.

[0311] When the developer contains an organic solvent, the organic solvent may be a compound described in paragraph

[0387] of WO 2021 / 112189, the contents of which are incorporated herein by reference. Suitable examples of alcohols include methanol, ethanol, propanol, isopropanol, butanol, pentanol, octanol, diethylene glycol, propylene glycol, methyl isobutyl carbinol, and triethylene glycol, and suitable examples of amides include N-methylpyrrolidone, N-ethylpyrrolidone, and dimethylformamide.

[0312] When the developer contains an organic solvent, the organic solvent may be used alone or in combination. In the present invention, a developer containing at least one selected from the group consisting of cyclopentanone, γ-butyrolactone, dimethyl sulfoxide, N-methyl-2-pyrrolidone, and cyclohexanone is particularly preferred, a developer containing at least one selected from the group consisting of cyclopentanone, γ-butyrolactone, and dimethyl sulfoxide is more preferred, and a developer containing cyclopentanone is particularly preferred.

[0313] When the developer contains an organic solvent, the content of the organic solvent relative to the total mass of the developer is preferably 50% by mass or more, more preferably 70% by mass or more, even more preferably 80% by mass or more, and particularly preferably 90% by mass or more. Alternatively, the content may be 100% by mass.

[0314] The developer may further contain other components, such as known surfactants and known defoaming agents.

[0315] [Method of Supplying Developer] The method of supplying the developer is not particularly limited as long as it can form the desired pattern, and includes a method of immersing a substrate on which a film has been formed in the developer, puddle development in which the developer is supplied to the film formed on the substrate using a nozzle, and a method of continuously supplying the developer. The type of nozzle is not particularly limited, and examples include a straight nozzle, a shower nozzle, and a spray nozzle. From the viewpoints of the permeability of the developer, the removability of non-image areas, and production efficiency, a method of supplying the developer using a straight nozzle or a method of continuously supplying the developer using a spray nozzle is preferred, and from the viewpoint of the permeability of the developer to the image areas, a method of supplying using a spray nozzle is more preferred. In addition, a process may be adopted in which the developer is continuously supplied using a straight nozzle, the substrate is spun to remove the developer from the substrate, and after spin drying, the developer is continuously supplied again using a straight nozzle, and the substrate is spun to remove the developer from the substrate, or this process may be repeated multiple times. Methods of supplying the developer in the development process include a process in which the developer is continuously supplied to the substrate, a process in which the developer is kept substantially stationary on the substrate, a process in which the developer is vibrated on the substrate using ultrasound or the like, and a combination thereof.

[0316] The development time is preferably 10 seconds to 10 minutes, more preferably 20 seconds to 5 minutes. The temperature of the developer during development is not particularly limited, but is preferably 10 to 45°C, more preferably 18 to 30°C.

[0317] In the developing step, after the treatment with the developer, the pattern may be further washed (rinsed) with a rinse liquid. Alternatively, a method may be employed in which a rinse liquid is supplied before the developer in contact with the pattern is completely dried.

[0318] [Rinse Liquid] When the developer is an alkaline aqueous solution, for example, water can be used as the rinse liquid. When the developer is a developer containing an organic solvent, for example, a solvent different from the solvent contained in the developer (for example, water, an organic solvent different from the organic solvent contained in the developer) can be used as the rinse liquid.

[0319] When the rinse solution contains an organic solvent, examples of the organic solvent include the same organic solvents as those exemplified when the developer contains an organic solvent. The organic solvent contained in the rinse solution is preferably different from the organic solvent contained in the developer, and more preferably an organic solvent that has a lower solubility for the pattern than the organic solvent contained in the developer.

[0320] When the rinse solution contains an organic solvent, the organic solvent may be used alone or in combination of two or more. The organic solvent is preferably cyclopentanone, γ-butyrolactone, dimethyl sulfoxide, N-methylpyrrolidone, cyclohexanone, PGMEA, or PGME, more preferably cyclopentanone, γ-butyrolactone, dimethyl sulfoxide, PGMEA, or PGME, and even more preferably cyclohexanone or PGMEA.

[0321] When the rinse solution contains an organic solvent, the organic solvent preferably accounts for 50% by mass or more, more preferably 70% by mass or more, and even more preferably 90% by mass or more of the total mass of the rinse solution, and may also account for 100% by mass of the total mass of the rinse solution.

[0322] The rinse liquid may further contain other components, such as known surfactants and known defoaming agents.

[0323] [Method of Supplying Rinse Liquid] The method of supplying the rinse liquid is not particularly limited as long as it can form a desired pattern, and examples thereof include a method of immersing the substrate in the rinse liquid, a method of supplying the rinse liquid to the substrate by puddling, a method of supplying the rinse liquid to the substrate by showering, and a method of continuously supplying the rinse liquid onto the substrate by means of a straight nozzle or the like. From the viewpoints of the permeability of the rinse liquid, the removability of non-image areas, and production efficiency, methods of supplying the rinse liquid using a shower nozzle, straight nozzle, spray nozzle, etc. are available, and a method of continuously supplying using a spray nozzle is preferred, and from the viewpoint of the permeability of the rinse liquid into the image areas, a method of supplying using a spray nozzle is more preferred. The type of nozzle is not particularly limited, and examples include a straight nozzle, shower nozzle, spray nozzle, etc. That is, the rinsing step is preferably a step of supplying or continuously supplying the rinse liquid to the exposed film using a straight nozzle, and more preferably a step of supplying the rinse liquid using a spray nozzle. The method of supplying the rinse liquid in the rinsing step may include a step of continuously supplying the rinse liquid to the substrate, a step of keeping the rinse liquid substantially stationary on the substrate, a step of vibrating the rinse liquid on the substrate by ultrasonic waves or the like, and a combination of these steps.

[0324] The rinsing time is preferably 10 seconds to 10 minutes, more preferably 20 seconds to 5 minutes. The temperature of the rinsing liquid during rinsing is not particularly limited, but is preferably 10 to 45°C, more preferably 18 to 30°C.

[0325] <Heating Step> The pattern obtained by the development step (or the pattern after rinsing, if a rinsing step is performed) may be subjected to a heating step in which the pattern obtained by the development step is heated. That is, the method for producing a cured product of the present invention may include a heating step in which the pattern obtained by the development step is heated. Furthermore, the method for producing a cured product of the present invention may include a heating step in which a pattern obtained by another method without performing a development step, or a film obtained by a film formation step, is heated. In the heating step, a resin such as a polyimide precursor is cyclized to form a resin such as a polyimide. Furthermore, crosslinking of unreacted crosslinkable groups in the specific resin or in a crosslinking agent other than the specific resin also proceeds. The heating temperature (maximum heating temperature) in the heating step is preferably 50 to 450°C, more preferably 150 to 350°C, even more preferably 150 to 250°C, even more preferably 160 to 250°C, and particularly preferably 160 to 230°C.

[0326] The heating step is preferably a step in which the cyclization reaction of the polyimide precursor is promoted within the pattern by the action of a base or the like generated from the base generator due to heating.

[0327] The heating step is preferably carried out at a temperature increase rate of 1 to 12°C / min from the temperature at the start of heating to the maximum heating temperature. The temperature increase rate is more preferably 2 to 10°C / min, and even more preferably 3 to 10°C / min. By setting the temperature increase rate to 1°C / min or more, it is possible to prevent excessive volatilization of the acid or solvent while ensuring productivity, and by setting the temperature increase rate to 12°C / min or less, it is possible to alleviate residual stress in the cured product. In addition, in the case of an oven capable of rapid heating, it is preferable to increase the temperature from the temperature at the start of heating to the maximum heating temperature at a temperature increase rate of 1 to 8°C / sec, more preferably 2 to 7°C / sec, and even more preferably 3 to 6°C / sec.

[0328] The temperature at the start of heating is preferably 20°C to 150°C, more preferably 20°C to 130°C, and even more preferably 25°C to 120°C. The temperature at the start of heating refers to the temperature at the start of the process of heating up to the maximum heating temperature. For example, when the resin composition of the present invention is applied to a substrate and then dried, the temperature is the temperature of the film (layer) after this drying, and it is preferable to raise the temperature from, for example, a temperature 30 to 200°C lower than the boiling point of the solvent contained in the resin composition.

[0329] The heating time (heating time at the maximum heating temperature) is preferably from 5 to 360 minutes, more preferably from 10 to 300 minutes, and even more preferably from 15 to 240 minutes.

[0330] In particular, when forming a multilayer laminate, from the viewpoint of interlayer adhesion, the heating temperature is preferably 30° C. or higher, more preferably 80° C. or higher, even more preferably 100° C. or higher, and particularly preferably 120° C. or higher. The upper limit of the heating temperature is preferably 350° C. or lower, more preferably 250° C. or lower, and even more preferably 240° C. or lower.

[0331] Heating may be performed in stages. For example, the temperature may be increased from 25°C to 120°C at a rate of 3°C / min, held at 120°C for 60 minutes, increased from 120°C to 180°C at a rate of 2°C / min, and held at 180°C for 120 minutes. It is also preferable to treat the film while irradiating it with ultraviolet light, as described in U.S. Pat. No. 9,159,547. Such a pretreatment step can improve the film's properties. The pretreatment step is preferably performed for a short period of time, such as 10 seconds to 2 hours, and more preferably 15 seconds to 30 minutes. The pretreatment may be performed in two or more steps. For example, a first pretreatment step may be performed at a temperature in the range of 100 to 150°C, followed by a second pretreatment step at a temperature in the range of 150 to 200°C. Furthermore, cooling may be performed after heating. In this case, the cooling rate is preferably 1 to 5°C / min.

[0332] The heating step is preferably carried out in an atmosphere with a low oxygen concentration by flowing an inert gas such as nitrogen, helium, or argon, or by carrying out the heating step under reduced pressure, in order to prevent decomposition of the specific resin. The oxygen concentration is preferably 50 ppm (volume ratio) or less, more preferably 20 ppm (volume ratio) or less. The heating means used in the heating step is not particularly limited, and examples thereof include a hot plate, an infrared oven, an electric heating oven, a hot air oven, and an infrared oven.

[0333] <Post-development exposure step> The pattern obtained in the development step (if a rinsing step is performed, the pattern after rinsing) may be subjected to a post-development exposure step in which the pattern obtained in the development step is exposed to light, instead of or in addition to the heating step. That is, the method for producing a cured product of the present invention may include a post-development exposure step in which the pattern obtained in the development step is exposed to light. The method for producing a cured product of the present invention may include a heating step and a post-development exposure step, or may include only one of the heating step and the post-development exposure step. The post-development exposure step can promote, for example, a reaction in which cyclization of a polyimide precursor or the like progresses due to exposure of a photobase generator, or a reaction in which elimination of an acid-decomposable group progresses due to exposure of a photoacid generator. In the post-development exposure step, it is sufficient that at least a portion of the pattern obtained in the development step is exposed, but it is preferable that the entire pattern is exposed. The exposure dose in the post-development exposure step is 50 to 20,000 mJ / cm in terms of exposure energy at a wavelength to which the photosensitive compound has sensitivity. ２ is preferred, and 100 to 15,000 mJ / cm ２ The post-development exposure step can be carried out using, for example, the light source used in the exposure step described above, and it is preferable to use broadband light.

[0334] <Metal Layer Forming Step> The pattern obtained by the developing step (preferably subjected to at least one of a heating step and a post-development exposure step) may be subjected to a metal layer forming step of forming a metal layer on the pattern. That is, the method for producing a cured product of the present invention preferably includes a metal layer forming step of forming a metal layer on the pattern obtained by the developing step (preferably subjected to at least one of a heating step and a post-development exposure step).

[0335] The metal layer is not particularly limited, and existing metal species can be used. Examples include copper, aluminum, nickel, vanadium, titanium, chromium, cobalt, gold, tungsten, tin, silver, and alloys containing these metals. Copper and aluminum are more preferred, and copper is even more preferred.

[0336] The method for forming the metal layer is not particularly limited, and existing methods can be applied. For example, the methods described in JP 2007-157879 A, ​​JP 2001-521288 A, JP 2004-214501 A, JP 2004-101850 A, U.S. Patent No. 7,888,181 B2, and U.S. Patent No. 9,177,926 B2 can be used. Examples of suitable methods include photolithography, PVD (physical vapor deposition), CVD (chemical vapor deposition), lift-off, electroplating, electroless plating, etching, printing, and combinations of these. More specifically, examples include patterning methods that combine sputtering, photolithography, and etching, and patterning methods that combine photolithography and electroplating. Preferred plating methods include electroplating using a copper sulfate or copper cyanide plating solution.

[0337] The thickness of the metal layer is preferably 0.01 to 50 μm, more preferably 1 to 10 μm, at the thickest part.

[0338] <Applications> Fields to which the method for producing a cured product of the present invention or the cured product can be applied include insulating films for electronic devices, interlayer insulating films for rewiring layers, stress buffer films, etc. Other examples include sealing films, substrate materials (base films, coverlays, and interlayer insulating films for flexible printed circuit boards), and the etching of insulating films for packaging applications such as those described above. For these applications, reference can be made to, for example, Science & Technology Co., Ltd.'s "High Performance Polyimide and Application Technology" (April 2008), edited by Masaaki Kakimoto, CMC Technical Library "Fundamentals and Development of Polyimide Materials" (November 2011), and Japan Polyimide and Aromatic Polymer Research Association's "Latest Polyimide Fundamentals and Applications" (NTS, August 2010).

[0339] The method for producing the cured product of the present invention, or the cured product of the present invention, can also be used for producing printing plates such as offset printing plates or screen printing plates, for etching molded parts, for producing protective lacquers and dielectric layers in electronics, especially microelectronics, etc.

[0340] (Laminate and method for manufacturing laminate) The laminate of the present invention refers to a structure having a plurality of layers each made of the cured product of the present invention. The laminate is a laminate including two or more layers each made of the cured product, and may be a laminate including three or more layers. At least one of the two or more layers each made of the cured product contained in the laminate is a layer made of the cured product of the present invention, and from the viewpoint of suppressing shrinkage of the cured product or deformation of the cured product associated with the shrinkage, it is also preferable that all of the layers made of the cured product contained in the laminate are layers made of the cured product of the present invention.

[0341] That is, the method for producing a laminate of the present invention preferably includes the method for producing a cured product of the present invention, and more preferably includes repeating the method for producing a cured product of the present invention multiple times.

[0342] The laminate of the present invention preferably includes two or more layers made of a cured product and a metal layer between any of the layers made of the cured product. The metal layer is preferably formed by the metal layer-forming step. That is, the method for producing a laminate of the present invention preferably further includes a metal layer-forming step of forming a metal layer on a layer made of a cured product between multiple cured product production processes. A preferred embodiment of the metal layer-forming step is as described above. Examples of the laminate include a laminate having at least a layer structure in which three layers are stacked in this order: a layer made of a first cured product, a metal layer, and a layer made of a second cured product. It is preferred that both the layer made of the first cured product and the layer made of the second cured product are layers made of the cured product of the present invention. The resin composition of the present invention used to form the layer made of the first cured product and the resin composition of the present invention used to form the layer made of the second cured product may have the same composition or different compositions. The metal layer in the laminate of the present invention is preferably used as metal wiring, such as a rewiring layer.

[0343] <Lamination Step> The method for producing a laminate of the present invention preferably includes a lamination step. The lamination step is a series of steps including performing at least one of (a) a film formation step (layer formation step), (b) an exposure step, (c) a development step, and (d) a heating step and a post-development exposure step again on the surface of the pattern (resin layer) or the metal layer in this order. However, at least one of (a) the film formation step and (d) the heating step and the post-development exposure step may be repeated. Furthermore, after at least one of (d) the heating step and the post-development exposure step, (e) a metal layer formation step may be included. It goes without saying that the lamination step may further include the above-mentioned drying step or the like as appropriate.

[0344] When a further lamination step is performed after the lamination step, a surface activation treatment step may be further performed after the exposure step, the heating step, or the metal layer forming step. An example of the surface activation treatment is a plasma treatment. Details of the surface activation treatment will be described later.

[0345] The lamination step is preferably performed 2 to 20 times, more preferably 2 to 9 times. For example, a structure having 2 to 20 resin layers, such as resin layer / metal layer / resin layer / metal layer / resin layer / metal layer, is preferred, and a structure having 2 to 9 resin layers is even more preferred. Each of the layers may be the same or different in composition, shape, film thickness, etc.

[0346] In the present invention, a particularly preferred embodiment is one in which, after providing a metal layer, a cured product (resin layer) of the resin composition of the present invention is further formed so as to cover the metal layer.Specific examples include an embodiment in which the steps of (a) film formation step, (b) exposure step, (c) development step, (d) at least one of a heating step and a post-development exposure step, and (e) metal layer formation step are repeated in this order, or an embodiment in which the steps of (a) film formation step, (d) at least one of a heating step and a post-development exposure step, and (e) metal layer formation step are repeated in this order.By alternately performing the lamination step of laminating the resin composition layer (resin layer) of the present invention and the metal layer formation step, the resin composition layer (resin layer) of the present invention and the metal layer can be alternately laminated.

[0347] (Surface Activation Treatment Step) The method for producing a laminate of the present invention preferably includes a surface activation treatment step in which at least a portion of the metal layer and the resin composition layer are surface-activated. The surface activation treatment step is usually performed after the metal layer formation step, but after the development step (preferably after at least one of the heating step and the post-development exposure step), the resin composition layer may be surface-activated before the metal layer formation step. The surface activation treatment may be performed only on at least a portion of the metal layer, or only on at least a portion of the resin composition layer after exposure, or may be performed on at least a portion of both the metal layer and the resin composition layer after exposure. The surface activation treatment is preferably performed on at least a portion of the metal layer, and it is preferable to perform the surface activation treatment on part or all of the region of the metal layer on which the resin composition layer is to be formed. In this way, by performing the surface activation treatment on the surface of the metal layer, adhesion with the resin composition layer (film) provided on the surface can be improved. The surface activation treatment is also preferably performed on part or all of the resin composition layer (resin layer) after exposure. In this way, by performing the surface activation treatment on the surface of the resin composition layer, adhesion with the metal layer or resin layer provided on the surface that has been surface-activated can be improved. In particular, when negative development is performed, when the resin composition layer is cured, it is less susceptible to damage due to surface treatment and adhesion is likely to be improved. The surface activation treatment can be carried out, for example, by the method described in paragraph 0415 of International Publication No. 2021 / 112189. The contents of this specification are incorporated herein by reference.

[0348] (Semiconductor device and manufacturing method thereof) The present invention also discloses a semiconductor device comprising the cured product or laminate of the present invention. The present invention also discloses a manufacturing method for a semiconductor device comprising the manufacturing method for the cured product or the manufacturing method for the laminate of the present invention. Specific examples of semiconductor devices using the resin composition of the present invention to form an interlayer insulating film for a rewiring layer can be found in paragraphs 0213 to 0218 and FIG. 1 of JP 2016-027357 A, the contents of which are incorporated herein by reference.

[0349] (Method for Producing Condensate) The method for producing a condensate of the present invention is a method for producing a condensate AQ, which is a condensate of a structure derived from the compound AS and a structure derived from the nucleophilic compound AN, comprising a step I of reacting a polymer AP obtained by polymerizing a compound AS having an aromatic ring structure, a hydroxy group bonded to the aromatic ring structure via a single bond, and a carboxy group through an ester bond, with a nucleophilic compound AN. According to the method for producing a condensate of the present invention, the condensate AQ (as an example, the compound represented by the above formula (1-1)) can be produced in good yield.

[0350] <Step I> Step I is a step of reacting a polymer AP in which a compound AS having an aromatic ring structure, a hydroxy group bonded to the aromatic ring structure via a single bond, and a carboxy group is polymerized via an ester bond with a nucleophilic compound AN.

[0351] [Compound AS] Compound AS is a compound having an aromatic ring structure, a hydroxy group bonded to the aromatic ring structure via a single bond, and a carboxy group, wherein the hydrogen atom in the hydroxy group and the OH in the carboxy group may be structurally modified within a range that allows the hydroxy group moiety and the carboxy group moiety to condense to form a polyester, which is polymer AP.

[0352] Moreover, the compound AS is preferably a compound represented by the following formula (6-1). In formula (6-1), R ６１ is —OH or a substituent derivable from —OH, and R ６２ ~R ６６ is a hydrogen atom or a substituent, and R ６２ ~R ６６ At least one of the substituents is a substituent having —O— bonded to the benzene ring as shown in formula (6-1), and R ６２ ~R ６６ At least two of these may be bonded to form a ring structure.

[0353] -R ６１ - In formula (6-1), R ６１ -OH, -OR ６７Alternatively, —OH is preferably a product of reaction with a condensing agent AC described below, and —OH is more preferred. ６７ represents a halogen atom, an aromatic ring structure which may have a substituent, or —(C═O)R ６８ is preferred. ６７ When R is a halogen atom, examples thereof include a fluorine atom, a chlorine atom, and a bromine atom, and a chlorine atom is preferred. ６７ When R is an aromatic ring structure which may have a substituent, it is preferably a benzene ring structure which may have a substituent, and more preferably a phenyl group. Examples of the substituent include an alkyl group, an aryl group, and an alkoxy group. ６７ -(C=O)R ６８ If R ６８ is preferably a hydrocarbon group, such as an alkyl group or an aryl group.

[0354] -R ６２ ~R ６６ - In formula (6-1), R ６２ ~R ６６ At least one of the above is a substituent (also referred to as "specific substituent 2") in which the bonding site to the benzene ring described in formula (6-1) is -O-. Here, the bonding site to the benzene ring is -O-, which means that the oxygen atom of -O- is bonded to the benzene ring by a single bond without a linking group. Examples of specific substituent 2 include -OR ２１ The above R ２１ is a hydrogen atom or an organic group, preferably a hydrogen atom, an alkyl group, or an aryl group, more preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and even more preferably a hydrogen atom. ６２ ~R ６６ At least one of these is preferably —OH.

[0355] In formula (6-1), R ６２ ~R ６６ At least one of the groups may be a substituent (another substituent) different from the specific substituent 2. Examples of the other substituent include an alkyl group, a phenyl group, and a halogen atom. ６２ ~R ６６In another preferred embodiment of the present invention, at least three of the above are hydrogen atoms.

[0356] R ６２ ~R ６６ When two adjacent rings among the above are bonded to each other to form a ring, the ring structure formed may be an aliphatic ring structure or an aromatic ring structure, but an aliphatic ring structure is preferred. An embodiment in which the ring structure formed includes an acetal structure is also one of the preferred embodiments of the present invention.

[0357] In formula (6-1), R ６３ , R ６４ and R ６５ At least one of the groups is preferably Specific Substituent 2, and more preferably —OH.

[0358] In addition, in formula (6-1), R ６２ is specific substituent 2, and R ６３ , R ６４ , R ６５ and R ６６ In one preferred embodiment of the present invention, at least one of R ６２ Preferred embodiments of the specific substituents in R are as described above. ６３ , R ６４ , R ６５ and R ６６ Examples of the substituent in include the specific substituent 2 described above and other substituents described above, and preferred embodiments of these substituents are also as described above.

[0359] [Polymer AP] Polymer AP is a polymer AP in which compound AS is polymerized via an ester bond, that is, polymer AP is a polyester having a structure derived from compound AS as a monomer.

[0360] The polymer AP is preferably a compound represented by the following formula (AP-1). In formula (AP-1), R represents a substituent, m represents an integer of 0 to 4, and when m is 2 or greater, R may be bonded to another R on the same benzene ring to form a ring structure, and when m is 2 or greater, the structures in the parentheses to which m is a subscript may be different from each other, and n represents the number of repeating units and is an integer of 2 or greater, and the structures in the parentheses to which n is a subscript may be different from each other.

[0361] In formula (AP-1), a preferred embodiment of R is R in the above formula (6-1). ６２ ~R ６６ is another substituent. When m is 2 or more, R may be bonded to another R on the same benzene ring to form a ring structure. The ring structure formed may be an aliphatic ring structure or an aromatic ring structure, but an aliphatic ring structure is preferred. An embodiment in which the ring structure formed includes an acetal structure is also one of the preferred embodiments of the present invention.

[0362] -m- In formula (AP-1), m represents an integer of 0 to 4, preferably an integer of 0 to 3, more preferably 0 or 1, and even more preferably 0.

[0363] n represents the number of repeating units and is an integer of 2 or more, preferably 2 to 30, more preferably 2 to 15, and even more preferably 2 to 5.

[0364] [Nucleophilic Compound AN] As the nucleophilic compound AN, any known nucleophilic compound can be used without any particular limitation. However, it is preferable that the nucleophilic compound AN contains —NH— or —OH in the structure. ２ It is more preferred that the composition contains:

[0365] -Aromatic heterocyclic structure- Furthermore, the nucleophilic compound AN preferably has an aromatic heterocyclic structure in its structure. Examples of heteroatoms in the aromatic heterocyclic structure include a nitrogen atom, a sulfur atom, and an oxygen atom, and it is preferable that the aromatic heterocyclic structure contains at least a nitrogen atom as a heteroatom. The aromatic heterocyclic structure may be a monocyclic structure or a polycyclic structure, but is preferably a monocyclic structure or a bicyclic structure. When the aromatic heterocyclic structure is a polycyclic structure, it is sufficient that at least one of the rings contained in the polycyclic structure is a heterocyclic structure, and it is not necessary that all of the rings contained in the polycyclic structure are heterocyclic structures.

[0366] The aromatic heterocyclic structure preferably has at least one partial structure represented by the following formula (R-3). In formula (R-3), N is a nitrogen atom that is a ring member of the above-mentioned aromatic heterocyclic structure, and * represents a bonding site to an atom that is a ring member of the above-mentioned heterocyclic structure.

[0367] The aromatic heterocyclic structure preferably has one or two partial structures represented by formula (R-3), more preferably only one. Here, when the aromatic heterocyclic structure has tautomers, it is sufficient that the partial structure represented by formula (R-3) is contained in the structure of at least one of the tautomers. The aromatic heterocyclic structure is also preferably a monocyclic or bicyclic aromatic heterocyclic structure having three or more nitrogen atoms as ring members. The number of the nitrogen atoms is more preferably 3 to 6, and even more preferably 3 to 5. In the above embodiment, when the aromatic heterocyclic structure is a bicyclic aromatic heterocyclic structure, it is sufficient that the total number of nitrogen atoms present as ring members in the two rings is three or more.

[0368] Such heteroaromatic rings are not particularly limited, but examples include the following ring structures and tautomers of the following ring structures: Among these, the aromatic heterocyclic structure is preferably a structure having a 1,2,3-triazole, 1,2,4-triazole or purine ring as a partial structure.

[0369] The aromatic heterocyclic structure preferably has at least one partial structure represented by the following formula (R-4): In formula (R-4), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and X ８１ is an atom that is a ring member of the aromatic heterocyclic structure, and X ８２ is a ring member atom of the aromatic heterocyclic structure, and is a carbon atom or a nitrogen atom; X ８３ is a nitrogen atom, an oxygen atom or a sulfur atom.

[0370] In formula (R-4), X ８１ In formula (R-4), X is preferably a carbon atom. ８２ is preferably a nitrogen atom or a carbon atom. ８３ is preferably a nitrogen atom or an oxygen atom, more preferably a nitrogen atom. ８３ is preferably an atom that is a ring member of the aromatic heterocyclic structure. ８１ ~X ８３ In the formula (R-2), if there are any bonds remaining on each atom in addition to the bonds described in the formula (R-2), the bonds are to be bonded to other structures. For example, X ８１ When is a nitrogen atom, two bonds are bonded to another structure, and when is a carbon atom, three bonds are bonded to another structure.

[0371] Such aromatic heterocyclic structures include the following nitrogen-containing heterocycles and tautomers of any of the following nitrogen-containing heterocycles:

[0372] Among these, it is preferable that the aromatic heterocyclic structure in the nucleophilic compound AN is any one of the structures described below, or any of these structures in which a hydrogen atom has been substituted.

[0373] [Condensate AQ] The condensate AQ is preferably a compound represented by formula (5-1). In formula (5-1), R ５１ is a structure derived from the nucleophilic compound AN, and R ５２ ~R ５６ is a hydrogen atom or a substituent, and R ５２ ~R５６ At least one of the groups is a substituent in which the bonding site to the benzene ring described in formula (5-1) is —O—, and R ５２ ~R ５６ At least two of these may be bonded to form a ring structure.

[0374] In formula (5-1), R ５１ A preferred embodiment of the formula (1-1) is R １１ In formula (5-1), R ５２ ~R ５６ The preferred embodiments of the above are R ６２ ~R ６６ Among them, R in formula (5-1) is the same as the preferred embodiment of ５２ ~R ５６ In another preferred embodiment of the present invention, at least one of R ５２ ~R ５６ In another preferred embodiment of the present invention, at least three of the above are hydrogen atoms.

[0375] [Solvent] Step I is preferably carried out in the presence of a solvent SI in a solution or suspension state, and even if the solvent SI is in a suspension state, it is more preferable that a portion of the solvent is in a solution state. The solvent SI is preferably an aprotic polar solvent. Examples of aprotic polar solvents include diethyl ether, methyl tert-butyl ether, cyclopentyl methyl ether, tetrahydrofuran, 2-methyltetrahydrofuran, dichloromethane, chloroform, carbon tetrachloride, acetone, acetonitrile, N,N-dimethylformamide, N,N-dimethylacetamide, 3-methoxy-N,N-dimethylpropanamide, 3-butoxy-N,N-dimethylpropanamide, N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, ethyl acetate, isopropyl acetate, butyl acetate, propylene glycol methyl ether acetate, γ-butyrolactone, γ-valerolactone, dimethyl sulfoxide, and hexamethyl triphosphate. amide, tetramethylurea, 1,3-dimethyl-2-imidazolidinone, 1,3-dimethyl-3,4,5,6-tetrahydro-2(1H)-pyrimidinone, triethylamine, N,N-diisopropylethylamine, pyridine, 2,6-lutidine, 1-methylimidazole, 1,8-diazabicyclo[5.4.0]-7-undecene, sulfolane, dioxane, hexamethylphosphoramide, propionitrile, butanone, cyclohexanone, tetrahydropyran, ethylene glycol diacetate, methyl isobutyl ketone, 1-butylimidazole, 1,5-diazabicyclo[4.3.0]nonene-5, cyclopentanone, anisole, and the like.

[0376] The amount of solvent SI added is preferably 120 to 12,000 molar equivalents, more preferably 250 to 6,000 molar equivalents, and even more preferably 400 to 2,500 molar equivalents, relative to the amount of polymer AP used.

[0377] [Basic Compound TI] Step I is preferably carried out in the presence of a basic compound TI different from the nucleophilic compound AN. The basic compound TI is preferably a compound that does not fall under the category of the solvent SI described above. As the basic compound TI, it is preferable to use at least one selected from a pyridine-based base, an imidazole-based base, an amidine-based base, and a guanidine-based base. Examples of pyridine-based bases include 4-dimethylaminopyridine, 2,2'-bipyridyl, nicotinic acid, isoquinoline, pyridine, 2-methylpyridine, 4-cyanopyridine, 4-methoxypyridine, 2,6-lutidine, 2,4,6-collidine, and 9-azajulolidine. Imidazole bases include 1-methylimidazole, N-tert-butoxycarbonylimidazole (N-Boc-imidazole), 2-methylimidazole, 2-phenylimidazole, benzimidazole, 2-ethyl-4-methylimidazole, 4-ethyl-2-methylimidazole, 4-methyl-2-phenylimidazole, 2-undecylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1H-imidazole, and 1,2-dimethylimidazole. Examples of amidine bases include amidine, 1,5-diazabicyclo[4.3.0]non-5-ene, 1,8-diazabicyclo[5.4.0]-7-undecene, 5,6-dibutylamino-1,8-diazabicyclo[5.4.0]-7-undecene, 1,5-diazabicyclo[4.3.0]-5-nonene, etc. Examples of guanidine bases include tetramethylguanidine, tetraethylguanidine, 1,3-diphenylguanidine, 1,3-di-o-tolylguanidine, 1,5,7-triazabicyclo[4.4.0]dec-5-ene, 7-methyl-1,5,7-triazabicyclo[4.4.0]dec-5-ene, etc.

[0378] The amount of basic compound TI added is preferably 0.01 to 30.0 molar equivalents, more preferably 0.05 to 10.0 molar equivalents, and even more preferably 0.1 to 5.0 molar equivalents, relative to the amount of polymer AP used. The pKa (measured in a DSMO solvent) of the conjugate acid of basic compound TI is preferably 2 or more, more preferably 7 or more, and even more preferably 10 or more. In this specification, pKa is a value calculated using ACD / ChemSketch (registered trademark), unless otherwise specified.

[0379] [Reaction Temperature, Reaction Time] The reaction temperature and time in Step I are not particularly limited, and may be determined taking into consideration the yield of condensate AQ, the reaction rate, heating costs, etc. For example, the reaction temperature may be 25 to 300° C., 50 to 250° C., or 100 to 200° C. For example, the reaction time may be 30 minutes to 72 hours, 1 to 48 hours, or 2 to 24 hours.

[0380] <Step II> The method for producing a condensate of the present invention preferably includes step II of polymerizing compound AS to synthesize the polymer AP polymerized via an ester bond.

[0381] In Step II, preferred embodiments of Compound AS are the same as those described in Step 1 above.

[0382] In step II, it is preferable to use a condensing agent AC. Alternatively, compound AS may be reacted with a condensing agent AS in advance to form, for example, R ６１ By using a compound AS in which —OH is a product obtained by reacting with a condensing agent AC described below, it is possible to avoid adding a new condensing agent AC in step II. As the condensing agent, any condensing agent known in esterification reactions can be used without any particular limitation, and the condensing agent may be selected taking into consideration the yield of the condensation reaction, the reaction rate, the removability of by-products, and the like.

[0383] As the condensing agent AC, it is preferable to use at least one selected from the group consisting of carbodiimide compounds, phosgene, phosgene derivatives, acid anhydrides, acid chlorides, phosphonium compounds, uronium compounds, and formamidinium compounds. The carbodiimide compound is a compound having a carbodiimide structure, and examples thereof include, but are not limited to, N,N'-diisopropylcarbodiimide, N,N'-dicyclohexylcarbodiimide, N,N'-di-tert-butylcarbodiimide, 1-(3-dimethylaminopropyl)-3-ethylcarbodiimide, 1-(3-dimethylaminopropyl)-3-ethylcarbodiimide hydrochloride, and 1-cyclohexyl-3-(2-morpholinoethyl)carbodiimide metho-p-toluenesulfonate. The phosgene derivative is a compound that can be derived from phosgene, and examples thereof include, but are not limited to, triphosgene, dimethyl carbonate, diethyl carbonate, diphenyl carbonate, di(N-succinimidyl carbonate), bis(pentafluorophenyl carbonate), bis(4-nitrophenyl carbonate), di-2-pyridyl carbonate, 1,1'-carbonyldiimidazole, 1,1'-carbonyldi(1,2,4-triazole), methyl chloroformate, ethyl chloroformate, 4-nitrophenyl chloroformate, and 4-nitrobenzyl chloroformate.Acid anhydrides are compounds obtained by dehydration condensation of one or more types of acids, and examples thereof include acetic anhydride, butyric anhydride, decanoic anhydride, cyclohexanecarboxylic anhydride, trifluoroacetic anhydride, 3-pyridinecarboxylic anhydride, 2-methyl-6-nitrobenzoic anhydride, 4-trifluoromethylbenzoic anhydride, 2-fluoro-6-(trifluoromethyl)benzoic anhydride, 3-(diethoxyphosphoryloxy)-1,2,3-benzotriazin-4(3H)-one, pentafluorophenyl 4-nitrobenzenesulfonate, 1-(p-toluenesulfonyl)imidazole, diethyl cyanophosphonate, and pentafluorophenyldiphenyl. These include, but are not limited to, phosphinate, pentafluorophenyl trifluoromethanesulfonate, diphenylphosphoryl azide, trifluoromethanesulfonic anhydride, 2-[N,N-bis(trifluoromethanesulfonyl)amino]-5-chloropyridine, N-(2-pyridyl)bis(trifluoromethanesulfonimide), 4-nitrophenyl trifluoromethanesulfonate, N-phenylbis(trifluoromethanesulfonimide), trifluoromethanesulfonanilide, 1-(trifluoromethanesulfonyl)-1H-benzotriazole, 1-(trifluoromethanesulfonyl)imidazole, and the like.The acid chloride is a chloride of an organic acid, for example, acetyl chloride, trichloroacetyl chloride, pivaloyl chloride, benzyl chloride, 2,4,6-trichlorobenzoyl chloride, thionyl chloride, phosphoryl chloride, 2,4,6-triisopropylbenzenesulfonyl chloride, 2,4-mesitylenedisulfonyl dichloride, dimethylthiophosphinoyl chloride, diphenylphosphinic chloride, bis(2-oxo-3-oxazolidinyl)phosphinic chloride, cyanuric chloride, 2-chloro-4,6-dimethoxy-1,3,5-triazine, methanesulfonyl chloride, trifluoromethanesulfonyl chloride, trifluoromethanesulfonyl bromine, amide, trichloromethanesulfonyl chloride, p-toluenesulfone chloramide, N-chlorosuccinimide, oxalyl chloride, phosphorus trichloride, phosphorus pentachloride, methoxyacetyl chloride, sodium dichloroisocyanurate, trichloroisocyanuric acid, 1,3-dichloro-5,5-dimethylhydantoin, N-chlorosaccharin, N,N-dichloro-p-toluenesulfonamide, N-acetoxy-N-chloro-4-nitrobenzamide, N-chlorophthalimide, 2-chloro-1,3-bis(methoxycarbonyl)guanidine, benzenesulfone dichloroamide, sodium benzenesulfone chloramide hydrate, and the like. Examples of phosphonium compounds include, but are not limited to, 1H-benzotriazol-1-yloxytris(dimethylamino)phosphonium hexafluorophosphate, (7-azabenzotriazol-1-yloxy)tris(dimethylamino)phosphonium hexafluorophosphate, 1H-benzotriazol-1-yloxytripyrrolidinophosphonium hexafluorophosphate, (6-chloro-1H-benzotriazol-1-yloxy)tripyrrolidinophosphonium hexafluorophosphate, bromotris(dimethylamino)phosphonium hexafluorophosphate, chlorotripyrrolidinophosphonium hexafluorophosphate, and bromotripyrrolidinophosphonium hexafluorophosphate.Examples of the uronium compound include O-(6-chlorobenzotriazol-1-yl)-N,N,N',N'-tetramethyluronium tetrafluoroborate, O-(6-chlorobenzotriazol-1-yl)-N,N,N',N'-tetramethyluronium hexafluorophosphate, O-(3,4-dihydro-4-oxo-1,2,3-benzotriazin-3-yl)-N,N,N',N'-tetramethyluronium tetrafluoroborate, O-(benzotriazol-1-yl)-N, N,N',N'-Bis(tetramethylene)uronium hexafluorophosphate, O-(benzotriazol-1-yl)-N,N,N',N'-bis(pentamethylene)uronium hexafluorophosphate, O-[(ethoxycarbonyl)cyanomethyleneamino]-N,N,N',N'-tetramethyluronium tetrafluoroborate, O-[(ethoxycarbonyl)cyanomethyleneamino]-N,N,N',N'-tetramethyluronium hexafluorophosphate, (1-cyano- 2-Ethoxy-2-oxoethylideneaminooxy)dimethylaminomorpholinocarbenium hexafluorophosphate, O-[2-oxo-1(2H)-pyridyl]-N,N,N',N'-tetramethyluronium tetrafluoroborate, 2-(5-norbornene-2,3-dicarboximido)-1,1,3,3-tetramethyluronium tetrafluoroborate, N,N,N',N'-tetramethyl-O-(N-succinimidyl)uronium tetrafluoroborate, N,N,N',N N,N,N',N'-tetramethyl-O-(N-succinimidyl)uronium hexafluorophosphate, N,N,N',N'-bis(tetramethylene)-O-(N-succinimidyl)uronium hexafluorophosphate, N,N,N',N'-tetramethyl-S-(1-oxido-2-pyridyl)thiouronium tetrafluoroborate, N,N,N',N'-tetramethyl-S-(1-oxido-2-pyridyl)thiouronium hexafluorophosphate, and the like.Examples of formamidinium compounds include 1-[bis(dimethylamino)methylene]-1H-benzotriazolium 3-oxide hexafluorophosphate, 1-[bis(dimethylamino)methylene]-1H-benzotriazolium 3-oxide tetrafluoroborate, 1-[bis(dimethylamino)methylene]-1H-1,2,3-triazolo[4,5-b]pyridinium 3-oxide hexafluorophosphate, 1-[bis(dimethylamino)methylene]-1H-1,2,3-triazolo[4,5-b]pyridinium 3-oxide tetrafluoroborate, fluoro-N,N Examples of the condensing agent AC include, but are not limited to, 2-chloro-1,3-dimethylimidazolinium chloride, 2-chloro-1,3-dimethylimidazolinium chloride, 2-chloro-1,3-dimethylimidazolinium hexafluorophosphate, 2-chloro-1,3-dimethylimidazolinium tetrafluoroborate, chloro-N,N,N',N'-tetramethylformamidinium hexafluorophosphate, chloro-N,N,N',N'-tetramethylformamidinium hexafluorophosphate, 1-(chloro-1-pyrrolidinylmethylene)pyrrolidinium hexafluorophosphate, 2-chloro-1,3-dimethylimidazolinium chloride, 2-chloro-1,3-dimethylimidazolinium hexafluorophosphate, 2-chloro-1,3-dimethylimidazolinium tetrafluoroborate, etc. Among these, it is preferable to use a phosgene derivative as the condensing agent AC, and it is more preferable to use diphenyl carbonate.

[0384] Furthermore, a nucleophilic compound may be further contained as a reagent for promoting the condensation reaction. The nucleophilic compound may be the same compound as the nucleophilic compound AN used in Step I described above, or may be a different compound. Examples of nucleophilic compounds include, but are not limited to, pyridine-based compounds, hydroxylamine derivatives, N-oxide compounds, and phenol-based compounds. Pyridine-based compounds are compounds having a pyridine structure, and examples thereof include, but are not limited to, 4-dimethylaminopyridine, 2,2'-bipyridyl, nicotinic acid, isoquinoline, pyridine, 2-methylpyridine, 4-cyanopyridine, 4-methoxypyridine, 2,6-lutidine, 2,4,6-collidine, and 9-azajulolidine. The hydroxylamine derivative is a compound having a nitrogen-oxygen bond, and examples thereof include, but are not limited to, N-hydroxysuccinimide, N-hydroxysulfosuccinimide sodium, N-hydroxyphthalimide, N-hydroxy-5-norbornene-2,3-dicarboximide, 1-hydroxybenzotriazole, 1-hydroxy-6-(trifluoromethyl)benzotriazole, 3H-1,2,3-triazolo[4,5-b]pyridin-3-ol, 1-hydroxy-1H-1,2,3-triazole-4-carboxylate ethyl, 2-cyano-2-(hydroxyimino)ethyl acetate, and N-hydroxytetrachlorophthalimide. Examples of N-oxide compounds include, but are not limited to, pyridine N-oxide, 2-hydroxypyridine N-oxide, 2-methylpyridine N-oxide, 4-(tert-butyl)pyridine N-oxide, 4-cyanopyridine N-oxide, 4-(dimethylamino)pyridine N-oxide, quinoline N-oxide, etc. Phenolic compounds are compounds having a hydroxyl group bonded to an aromatic ring or a heteroaromatic ring, and examples include, but are not limited to, phenol, 1-naphthol, 2-naphthol, pentafluorophenol, 2-nitrophenol, 3-nitrophenol, 4-nitrophenol, 2,4,5-trichlorophenol, etc.

[0385] [Solvent] Step II is preferably carried out in the presence of solvent SII in a solution or suspension state, and even if the suspension state is used, it is more preferable that a portion of the suspension state is in a solution state. Solvent SII is preferably an aprotic polar solvent. Preferred embodiments of solvent SII are the same as those of solvent SI in Step I described above.

[0386] The amount of solvent SII added is preferably 120 to 12,000 molar equivalents, more preferably 250 to 6,000 molar equivalents, and even more preferably 400 to 2,500 molar equivalents, relative to the amount of compound AS used.

[0387] Step II is preferably carried out in the presence of a basic compound TII. The basic compound TII may be the same as the solvent SII or the same as the nucleophilic compound used in Step II described above. Among these, it is preferable to use at least one selected from a pyridine base, an imidazole base, an amidine base, and a guanidine base as the basic compound TII. Other preferred aspects of the basic compound TII are the same as the preferred aspects of the basic compound TI in Step I described above.

[0388] The amount of basic compound TII added is preferably 0.01 to 30.0 molar equivalents, more preferably 0.05 to 10.0 molar equivalents, and even more preferably 0.1 to 5.0 molar equivalents, relative to the amount of compound AS used.

[0389] [Reaction Temperature, Reaction Time] The reaction temperature and time in Step II are not particularly limited, and may be determined taking into consideration the yield of condensate AQ, the reaction rate, heating costs, etc. For example, the reaction temperature may be 25 to 200°C, 40 to 150°C, or 50 to 110°C. For example, the reaction time may be 30 minutes to 24 hours, 1 to 15 hours, or 1 to 8 hours.

[0390] <Other Steps> The method for producing a condensate of the present invention may further include steps conventionally known in the synthesis of compounds, such as a step of purifying the resulting compound, for example, a reprecipitation step, a recrystallization step, a filtration step, a washing step, a drying step, a purification step by chromatography, a purification step by sublimation, etc.

[0391] The method for producing a condensate of the present invention can also be carried out as a so-called one-pot synthesis, in which step I and step II are carried out by sequentially adding raw materials to the same vessel. For example, compound AS, solvent II, and optionally condensing agent AC and optionally basic compound TII are reacted in a vessel to obtain a reaction solution containing polymer AP, and after the reaction, nucleophilic compound AN, and optionally solvent SI and optionally basic compound TII are added to the reaction solution to obtain condensate AQ. Thus, the method for producing a condensate of the present invention is an invention of great industrial significance, also in that it allows condensate AQ to be obtained in high yield by a very simple method.

[0392] (Second Resin Composition) The second resin composition of the present invention described above contains the condensate AQ synthesized by the condensate production method of the present invention. Here, the condensate AQ contains the solvent I, solvent II, basic compound TI, basic compound TII, etc., and these solvents or basic compounds may be carried over to the second resin composition when the condensate AQ is added.

[0393] The present invention will be explained in more detail below with reference to examples. The materials, amounts used, ratios, processing details, processing procedures, etc. shown in the following examples can be changed as appropriate without departing from the spirit of the present invention. Therefore, the scope of the present invention is not limited to the specific examples shown below. Unless otherwise specified, "parts" and "%" are based on mass.

[0394] <Polymer synthesis> [Synthesis Example P-1: Synthesis of resin (P-1) (precursor of cyclized resin)] Resin (P-1) was synthesized according to the method described in paragraph

[0397] of WO 2022 / 044998, except that the molar ratio of 4,4'-oxydiphthalic dianhydride (ODPA) to bisphthalic dianhydride (BPDA) used was 60:40. The weight average molecular weight (Mw) was 28,000. １ By H-NMR, it was confirmed that the structure of resin (P-1) was the structure represented by the following formula (P-1). Furthermore, by changing the equivalent weight of the diamine used, resin (P-1) with a Mw of 30,000 was also synthesized. In the above and following synthesis examples, unless otherwise specified, the weight-average molecular weight and number-average molecular weight were measured by the following method. Using a high-speed GPC apparatus HLC-8420GPC (manufactured by Tosoh Corporation), GPC measurements were performed using a TSK guard column, a Super AW-H (4.6 mm x 35 mm), and two TSKgel Super AWM-H (4.6 mm x 150 mm) columns connected in series. A 0.01 mol / L solution of lithium bromide in NMP (N-methyl-2-pyrrolidone) was used as the eluent.

[0395] [Synthesis Example P-2: Synthesis of Resin (P-2) (Precursor of Cyclized Resin)] Resin (P-2) was synthesized in the same manner as in Synthesis Example P-1, except that the molar ratio of 4,4'-oxydiphthalic dianhydride (ODPA) to bisphthalic dianhydride (BPDA) used was 75:25. The weight average molecular weight (Mw) was 22,000. Furthermore, by changing the equivalent weight of the diamine used, a resin (P-2) with an Mw of 30,000 was also synthesized. １ By H-NMR, it was confirmed that the structure of resin (P-2) was a structure represented by the following formula (P-2).

[0396] Synthesis Example P-3: Synthesis of Resin (P-3) (Precursor to Cyclized Resin) 21.2 g of 4,4'-oxydiphthalic anhydride, 18.0 g of 2-hydroxyethyl methacrylate, 23.9 g of pyridine, and 250 mL of diglyme (diethylene glycol dimethyl ether) were mixed and stirred at 60°C for 4 hours to synthesize a diester of 4,4'-oxydiphthalic acid and 2-hydroxyethyl methacrylate. The reaction mixture was then cooled to -10°C, and 17.0 g of thionyl chloride was added over 60 minutes while maintaining the temperature at -10±5°C. After dilution with 50 mL of N-methylpyrrolidone, a solution of 12.6 g of 4,4'-diaminodiphenyl ether in 100 mL of N-methylpyrrolidone was added dropwise to the reaction mixture over 60 minutes at -10±5°C, and the mixture was stirred at room temperature for 2 hours. Thereafter, 10.0 g of ethanol was added and the mixture was stirred at room temperature for 1 hour. Next, 6,000 g of water was added to precipitate the polyimide precursor, and the precipitate (water-polyimide precursor mixture) was stirred for 15 minutes. The precipitate (solid polyimide precursor) after stirring was collected by filtration and dissolved in 500 g of tetrahydrofuran. 6,000 g of water (poor solvent) was added to the resulting solution to precipitate the polyimide precursor, and the precipitate (water-polyimide precursor mixture) was stirred for 15 minutes. The precipitate after stirring was again filtered and dried at 45°C under reduced pressure for 3 days. 46.6 g of the dried powder was dissolved in 419.6 g of tetrahydrofuran, and then 2.3 g of triethylamine was added and the mixture was stirred at room temperature for 35 minutes. Then, 3,000 g of ethanol was added, and the precipitate was collected by filtration. The resulting precipitate was dissolved in 281.8 g of tetrahydrofuran. 17.1 g of water and 46.6 g of ion exchange resin UP6040 (AmberTec) were added thereto and stirred for 4 hours. Thereafter, the ion exchange resin was removed by filtration, and the resulting polymer solution was added to 5,600 g of water to obtain a precipitate. The precipitate was collected by filtration and dried under reduced pressure at 45 ° C. for 24 hours to obtain 45.1 g of resin (P-3). １H-NMR confirmed that the structure of resin (P-3) was the structure represented by the following formula (P-3). The weight average molecular weight (Mw) was 30,000. Furthermore, by appropriately adjusting the equivalent weight of 4,4'-diaminodiphenyl ether, resins (P-3) with Mw of 15,000, 20,000, 40,000, or 50,000 were also synthesized.

[0397] [Synthesis Examples P-4 to 16, 24 to 33: Synthesis of Resins (P-4 to P-16, P-24 to P-33) (Precursors of Cyclized Resins)] Resins (P-4) to (P-16) and resins (P-24) to (P-33) represented by any of the following formulas (P-4) to (P-16) and (P-24) to (P-33) were synthesized in the same manner as in Synthesis Example P-3, except for appropriately changing the compounds used. The Mw of resins (P-4) to (P-16) and resins (P-24) to (P-33) was all 30,000.

[0398] Synthesis Example P-17: Synthesis of Resin (P-17) (Cyclated Resin) Synthesis Example AA-1 48.65 g (225 mmol) of 3,3'-dihydroxybenzidine and 375 mL of dimethylformamide were mixed in a flask. Under ice cooling, 98.21 g (450 mmol) of di-t-butyl dicarbonate was added dropwise. After the dropwise addition, the mixture was stirred at 60°C for 5 hours. After the reaction was completed and the mixture was cooled to room temperature, 35 mg of 2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 68.68 g (450 mmol) of p-chloromethylstyrene, 74.63 g (540 mmol) of potassium carbonate, and 8.96 g (54.0 mmol) of potassium iodide were added, and the mixture was stirred at 60°C for 3 hours. After the reaction was completed, the mixture was filtered by suction filtration, and the filtrate was added dropwise to 500 mL of water. White crystals were precipitated, and the precipitated solid was collected by suction filtration. The obtained white solid was purified by recrystallization at 60°C using 1000 mL of acetone. 125 g (yield 85.6%) of the following intermediate AA-1a was obtained. The structure of AA-1a is shown below. １ This was confirmed by H-NMR spectrum. １ H-NMR (BRUKER, AVANCE NEO 400): δ(ppm,DMSO-d6)8.04-7.94(s,2H), 7.75-7.64(d,2H), 7.56-7.42(m,8H), 7.27-7.20(d,2H), 7.19-7.12(d,2H), 6.79-6.64(2H), 5.89-5.77(2H), 5.30-5.15(6H), 1.49-1.43(s,18H)

[0399] 75.0 g (115.6 mmol) of (AA-1a) and 500 mL of methylene chloride were mixed in a flask. 131.8 g (1156 mmol) of trifluoroacetic acid was added at room temperature, and then the mixture was stirred at 40°C for 5 hours. After the reaction was completed, 250 mL of methanol was added dropwise under ice cooling, followed by 117.0 g (1156 mmol) of triethylamine. Pale yellow crystals were precipitated, and the precipitated solid was collected by suction filtration. The mixture was suspended and washed in 750 mL of methanol, yielding 40.5 g (73% yield) of (AA-1). The structure of AA-1 is shown below. The following structure is １This was confirmed by H-NMR spectrum. １ H-NMR (BRUKER, AVANCE NEO 400): δ(ppm,DMSO-d6)7.53-7.45(s,8H), 7.05-6.98(d,2H), 6.92-6.85(d,2H), 6.79-6.63(4H), 5.89-5.78(d,2H), 5.29-5.22(d,2H), 5.20-5.13(s,4H), 4.92-4.64(4H)

[0400] Synthesis Example AT-1 AT-1 was obtained in the same manner as in Synthesis Example AA-1, except that 3,3'-dihydroxybenzidine was replaced with p-methoxyphenol. The structure of AT-1 is shown below. １ This was confirmed by H-NMR spectrum. １ H-NMR (BRUKER, AVANCE NEO 400): δ(ppm,DMSO-d6)7.52-7.42(d,2H), 7.42-7.32(d,2H), 6.80-6.63(3H), 6.54-6.43(d,2H), 5.92-5.77(1H), 5.30-5.19(1H), 4.95-4.89(s,2H), 4.68-4.54(2H) 30.0 g (57.64 mmol) of 4,4'-(4,4'-isopropylidenediphenoxy)diphthalic anhydride and 0.08 g of 2,2,6,6-tetramethylpiperidine 1-oxyl free radical were dissolved in 120 g of N-methylpyrrolidone (NMP) to obtain a solution. Subsequently, 5.14 g (24.2 mmol) of m-tolidine, 10.86 g (24.2 mmol) of AA-1, and 1.30 g (5.76 mmol) of AT-1 were dissolved in 100 g of NMP and added dropwise to the solution over 1 hour at a temperature of 0 to 10°C. After stirring at 25°C for 60 minutes, 18.2 g of pyridine and 14.7 g of acetic anhydride were added and the mixture was reacted at 80°C for 4 hours. After completion of the reaction, the mixture was cooled to 25°C and diluted with 200 g of tetrahydrofuran. Subsequently, the reaction solution was added dropwise to a mixture of 2.0 L of methanol and 0.5 L of water, and after stirring for 15 minutes, the polyimide resin was filtered. Next, the resin was reslurried in 1 L of water and filtered, and then reslurried again in 1 L of methanol, filtered, and dried under reduced pressure at 40°C for 10 hours. Subsequently, the dried resin was dissolved in 250 g of tetrahydrofuran, and 40 g of ion exchange resin (MB-1: manufactured by Organo Corporation) was added. The mixture was stirred for 4 hours, and the ion exchange resin was removed by filtration. The polyimide resin was precipitated in 2 L of methanol and stirred for 15 minutes. The polyimide resin was collected by filtration and dried under reduced pressure at 45°C for 1 day to obtain cyclized resin (P-17). The weight average molecular weight of the obtained cyclized resin (P-17) was 30,000. The cyclized resin (P-17) is a resin having a repeating unit represented by the following formula (P-17). The structure of the repeating unit is: １ Determined from H-NMR spectrum.

[0401] Synthesis Example P-21: Synthesis of Resin (P-21) (Cyclated Resin) 33.6 g (64.5 mmol) of 4,4'-(4,4'-isopropylidenediphenoxy)diphthalic anhydride, 6.23 g (28.8 mmol) of 4,4'-diamino-3,3'-dihydroxybiphenyl, 6.11 g (28.8 mmol) of m-tolidine, and 0.76 g (7.0 mmol) of 4-aminophenol were dissolved in 200 ml of NMP and stirred at 200°C for 3 hours under a nitrogen atmosphere to obtain a polyimide. Next, 0.1 g of TEMPO and 50.4 g (324 mmol) of MOI (2-isocyanatoethyl methacrylate) were added at room temperature, and the mixture was heated to 60°C. After that, 0.1 g of Neostan U-600 (Nitto Kasei Co., Ltd., inorganic bismuth) was added and stirred for 3 hours. To the obtained polyimide solution, 630 ml of THF was added, and the mixture was added dropwise to 2500 ml of methanol to precipitate the polymer. The polymer collected by filtration was dried at 40°C under reduced pressure for 1 day to obtain polyimide (P-21) as a powder. The weight average molecular weight of the obtained cyclized resin (P-21) was 30,000. The cyclized resin (P-21) is a resin having a repeating unit represented by the following formula (P-21). The structure of the repeating unit is: １ Determined from H-NMR spectrum.

[0402] [Synthesis Examples P-18 to 20, 22 to 23, 34 to 37: Synthesis of Resins (P-18) to (P-20), (P-22) to (P-23), (P-34) to (P-37) (Cyclated Resins)] Resins (P-18) to (P-20), (P-34) to (P-37) having a structure represented by any of the following formulas (P-18) to (P-20), (P-34) to (P-37) were synthesized by the same method as in Synthesis Example P-17, except that the compounds used were changed appropriately. Furthermore, resins (P-22) to (P-23) having a structure represented by any of the following formulas (P-22) to (P-23) were synthesized by the same method as in Synthesis Example P-21, except that the compounds used were changed appropriately. The Mw of resins (P-18) to (P-20) and (P-22) to (P-23) was all 30,000.

[0403] Examples and Comparative Examples In each example, the components listed in the table below were mixed to obtain a resin composition. In each comparative example, the components listed in the table below were mixed to obtain a comparative composition. Specifically, the content of each component listed in the table was the amount (parts by mass) listed in the "Parts by Mass" column of each column in the table. The amount of solvent used was such that the solid content concentration of the composition would be the "Solid Content Concentration (% by mass)" in the table, and each solvent was mixed at the mixing ratio (mass ratio) listed in the "Ratio" column. The obtained resin composition and comparative composition were pressure-filtered using a polytetrafluoroethylene filter with a pore size of 0.8 μm. In the table, "-" indicates that the composition did not contain the corresponding component.

[0404]

[0405]

[0406]

[0407]

[0408]

[0409]

[0410]

[0411]

[0412]

[0413]

[0414]

[0415]

[0416]

[0417]

[0418] [Resins] P-1 to P-37: Resins (P-1) to (P-37) synthesized above

[0419] [Polymerizable compounds] M-1: NK Ester 4G (manufactured by Shin-Nakamura Chemical Co., Ltd.) M-2: Compound having the following structure M-3: NK Ester A-DCP (manufactured by Shin-Nakamura Chemical Co., Ltd.) M-4: Compound having the following structure M-5: Compound having the following structure M-6: Viscoat #802 (manufactured by Osaka Organic Chemical Industry Ltd.) M-7: NK Ester TMPT (manufactured by Shin-Nakamura Chemical Co., Ltd.) M-8: NK Ester A-9300 (manufactured by Shin-Nakamura Chemical Co., Ltd.)

[0420] [Polymerization initiators] I-1: Compound having the following structure I-2: IRGACURE OXE 01 (manufactured by BASF) I-3: Compound having the following structure I-4: Compound having the following structure I-5: TR-PBG-304 (manufactured by TRONLY) I-6: TR-PBG-305 (manufactured by TRONLY) I-7: TR-PBG-3057 (manufactured by TRONLY) I-8: Compound having the following structure I-9: Benzoyl peroxide (manufactured by Tokyo Chemical Industry Co., Ltd.)

[0421] [Base Generator] AR-1 to AR-5: Compounds having the following structure

[0422] [Compound A] A-1 to A-43: Compounds having the following structure

[0423] [Synthesis of Specific Compounds] - Synthesis of Compound A-1 - 5.00 g of phenyl 4-hydroxybenzoate and 2.16 g of 3-amino-1,2,4-triazole were mixed in a flask and stirred at 165 ...

Claims

1. A resin composition comprising at least one resin selected from the group consisting of cyclized resins and precursors thereof, and a compound A represented by the following formula (1-1): In formula (1-1), X １１ is -O- or -NR Ｎ１ represents -, and R Ｎ１ represents a hydrogen atom or a substituent, R １１ represents an aromatic heterocyclic structure which may have a substituent, R １２ ~R １６ is a hydrogen atom or a substituent, and R １２ ~R １６ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ - or -S-, and R Ｎ２ is a hydrogen atom or a substituent, and R １２ ~R １６ At least two of these may be bonded to form a ring structure.

2. In the formula (1-1), R １３ , R １４ and R １５ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ The resin composition according to claim 1, wherein the substituent is - or -S-.

3. R in the formula (1-1) １１ The resin composition according to claim 2, wherein the structure contains —NH— or —S—.

4. R in the formula (1-1) １１ The resin composition according to claim 2, wherein the aromatic heterocyclic structure has at least one partial structure represented by the following formula (R-1): In formula (R-1), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and each * represents a bonding site to an atom that is a ring member of the heterocyclic structure.

5. R in the formula (1-1) １１ 3. The resin composition according to claim 2, wherein the aromatic heterocyclic structure in the formula (I) is a monocyclic or bicyclic aromatic heterocyclic structure having three or more nitrogen atoms as ring members.

6. R in the formula (1-1) １１ The resin composition according to claim 2, wherein the aromatic heterocyclic structure has at least one partial structure represented by the following formula (R-2): In formula (R-2), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and X ５１ is an atom that is a ring member of the aromatic heterocyclic structure, and X ５２ is a ring member atom of the aromatic heterocyclic structure, and is a carbon atom or a nitrogen atom; X ５３ is a nitrogen atom, an oxygen atom or a sulfur atom.

7. In the formula (1-1), R １１ The resin composition according to claim 2, wherein: is any one of the structures shown below, or a structure in which a hydrogen atom is substituted in any one of these structures:

8. In the formula (1-1), R １３ , R １４ and R １５ At least one of the groups is —OH or —NHR Ｎ２ The resin composition according to claim 2, wherein 9. In the formula (1-1), R １３ , R １４ and R １５ The resin composition according to claim 2, wherein at least one of the groups is —OH.

10. In the formula (1-1), R １２ is a substituent in which the bonding site to the benzene ring described in formula (1-1) is an oxygen atom, a nitrogen atom, or a sulfur atom, and R １３ , R １４ , R １５ and R １６ The resin composition according to claim 1 , wherein at least one of the following is a substituent.

11. In the formula (1-1), R １１ The resin composition according to claim 1, wherein: is any one of the structures shown below, or a structure in which a hydrogen atom is substituted in any one of these structures: In the above structure, * represents X １１ is the linking site with R ３３ is an organic group.

12. X in the formula (1-1) １１ The resin composition according to any one of claims 1 to 11, wherein is -NH-.

13. The resin composition according to any one of claims 1 to 11, wherein the molecular weight of compound A is less than 2,000.

14. The resin composition according to any one of claims 1 to 11, wherein the resin is a polyimide or a polyimide precursor.

15. The resin composition according to any one of claims 1 to 11, wherein the resin has a polymerizable group.

16. The resin composition according to any one of claims 1 to 11, further comprising an antioxidant.

17. The resin composition according to any one of claims 1 to 11, which is used to form an interlayer insulating film for a rewiring layer.

18. A cured product obtained by curing the resin composition according to claim 1 or 2.

19. A laminate comprising two or more layers of the cured product according to claim 18, and a metal layer between any of the layers of the cured product.

20. A method for producing a cured product, comprising a film-forming step of applying the resin composition according to claim 1 or 2 onto a substrate to form a film.

21. The method for producing a cured product according to claim 20, comprising an exposure step of selectively exposing the film to light and a development step of developing the film with a developer to form a pattern.

22. The method for producing a cured product according to claim 21, further comprising a heating step of heating the film at 50 to 450°C.

23. A method for producing a laminate, comprising the method for producing a cured product according to claim 22.

24. A method for manufacturing a semiconductor device, comprising the method for manufacturing the cured product according to claim 22.

25. A semiconductor device comprising the cured product of claim 18.

26. A method for producing a condensate AQ, which is a condensate of a structure derived from compound AS and a structure derived from nucleophilic compound AN, comprising step I of reacting a polymer AP formed by polymerizing a compound AS having an aromatic ring structure, a hydroxy group bonded to the aromatic ring structure by a single bond, and a carboxy group via an ester bond, with a nucleophilic compound AN.

27. The method for producing the condensate AQ according to claim 26, wherein the polymer AP is a compound represented by the following formula (AP-1): In formula (AP-1), R represents a substituent, m represents an integer of 0 to 4, and when m is 2 or greater, R may be bonded to another R on the same benzene ring to form a ring structure, and when m is 2 or greater, the structures in the parentheses to which m is a subscript may be different from each other, and n represents the number of repeating units and is an integer of 2 or greater, and the structures in the parentheses to which n is a subscript may be different from each other.

28. The method for producing the condensate AQ according to claim 27, wherein m in formula (AP-1) is 1.

29. The method for producing the condensate AQ according to claim 26 or 27, wherein the nucleophilic compound AN contains —NH— or —OH in the structure.

30. The nucleophilic compound AN has —NH ２ 30. A method for producing the condensate AQ according to claim 29, comprising:

31. A method for producing a condensate AQ according to claim 26 or 27, wherein the nucleophilic compound AN has an aromatic heterocyclic structure in its structure.

32. A method for producing a condensate AQ according to claim 31, wherein the aromatic heterocyclic structure in the nucleophilic compound AN has at least one partial structure represented by the following formula (R-3): In formula (R-3), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and each * represents a bonding site to an atom that is a ring member of the heterocyclic structure.

33. A method for producing a condensate AQ according to claim 32, wherein the aromatic heterocyclic structure in the nucleophilic compound AN has at least one partial structure represented by the following formula (R-4): In formula (R-4), N is a nitrogen atom that is a ring member of the aromatic heterocyclic structure, and X ８１ is an atom that is a ring member of the aromatic heterocyclic structure, and X ８２ is a ring member atom of the aromatic heterocyclic structure, and is a carbon atom or a nitrogen atom; X ８３ is a nitrogen atom, an oxygen atom or a sulfur atom.

34. A method for producing the condensed product AQ described in claim 31, wherein the aromatic heterocyclic structure in the nucleophilic compound AN is a monocyclic or bicyclic aromatic heterocyclic structure having three or more nitrogen atoms as ring members.

35. A method for producing the condensate AQ described in claim 31, wherein the aromatic heterocyclic structure in the nucleophilic compound AN is any one of the structures shown below, or a structure in which a hydrogen atom in any one of these structures is substituted.

36. The method for producing the condensate AQ according to claim 26, wherein the condensate AQ is represented by the following formula (5-1): In formula (5-1), R ５１ is a structure derived from the nucleophilic compound AN, and R ５２ ~R ５６ is a hydrogen atom or a substituent, and R ５２ ~R ５６ At least one of the groups is a substituent in which the bonding site to the benzene ring described in formula (5-1) is —O—, and R ５２ ~R ５６ At least two of these may be bonded to form a ring structure.

37. R in the formula (5-1) ５２ ~R ５６ The method for producing the condensate AQ according to claim 36, wherein at least one of the following is —OH.

38. R in the formula (5-1) ５２ ~R ５６ The method for producing the condensate AQ according to claim 36, wherein at least three of the above are hydrogen atoms.

39. The method for producing the condensate AQ according to claim 26, wherein step I is carried out in the presence of a solvent SI in a solution or suspension state.

40. The method for producing the condensate AQ according to claim 39, wherein the solvent SI is an aprotic polar solvent.

41. The method for producing the condensate AQ according to claim 26, wherein step I is carried out in the presence of a basic compound TI different from the nucleophilic compound AN.

42. A method for producing the condensate AQ according to claim 41, wherein the basic compound TI is at least one selected from the group consisting of pyridine bases, imidazole bases, amidine bases, and guanidine bases.

43. A method for producing the condensate AQ according to claim 26, comprising step II of polymerizing the compound AS to synthesize the polymer AP polymerized via an ester bond.

44. A method for producing the condensate AQ according to claim 26 or 43, wherein the compound AS is represented by the following formula (6-1): In formula (6-1), R ６１ is —OH or a substituent derivable from —OH, and R ６２ ~R ６６ is a hydrogen atom or a substituent, and R ６２ ~R ６６ At least one of the substituents is a substituent having —O— bonded to the benzene ring as shown in formula (6-1), and R ６２ ~R ６６ At least two of these may be bonded to form a ring structure.

45. R in the formula (6-1) ６１ The method for producing the condensate AQ according to claim 44, wherein is —OH.

46. R in the formula (6-1) ６２ ~R ６６ The method for producing the condensate AQ according to claim 44, wherein at least one of the following is —OH.

47. R in the formula (6-1) ６２ ~R ６６ The method for producing condensate AQ according to claim 44, wherein at least three of the above are hydrogen atoms.

48. A method for producing the condensate AQ according to claim 43, wherein a condensing agent AC is used in step II.

49. A method for producing a condensate AQ according to claim 48, wherein the condensing agent AC is at least one selected from the group consisting of carbodiimide compounds, phosgene, phosgene derivatives, acid anhydrides, acid chlorides, phosphonium compounds, uronium compounds, and formamidinium compounds.

50. A method for producing the condensate AQ according to claim 49, wherein a phosgene derivative is used as the condensing agent AC.

51. The method for producing the condensate AQ according to claim 50, wherein diphenyl carbonate is used as the condensing agent AC.

52. The method for producing condensate AQ according to claim 43, wherein step II is carried out in the presence of solvent SII in a solution or suspension state.

53. The method for producing condensate AQ according to claim 52, wherein said solvent SII is an aprotic polar solvent.

54. The method for producing the condensate AQ according to claim 43, wherein step II is carried out in the presence of a basic compound TII.

55. The method for producing the condensate AQ according to claim 54, wherein the basic compound TII is at least one selected from the group consisting of a pyridine base, an imidazole base, an amidine base, and a guanidine base.

56. A resin composition comprising: at least one resin selected from the group consisting of cyclized resins and their precursors; and the condensate AQ synthesized by the method according to claim 26 or 27, wherein the condensate AQ is a compound represented by the following formula (1-1): In formula (1-1), X １１ is -O- or -NR Ｎ１ represents -, and R Ｎ１ represents a hydrogen atom or a substituent, R １１ represents an aromatic heterocyclic structure which may have a substituent, R １２ ~R １６ is a hydrogen atom or a substituent, and R １２ ~R １６ At least one of the bonding sites to the benzene ring described in formula (1-1) is —O— or —NR Ｎ２ - or -S-, and R Ｎ２ is a hydrogen atom or a substituent, and R １２ ~R １６ At least two of these may be bonded to form a ring structure.

57. The resin composition according to claim 56, further comprising the polymer AP.

Images