Lined container

Abstract

[Problem] To provide a lined container that makes it possible to ascertain the situation between an inner wall part of a tank body and a lining layer at all times. [Solution] A lined container according to the present invention has at least: a metal tank body that has an open part on one side and a bottom part on the other; and a lining layer that is provided to an inner wall part of the tank body via an adhesive. The lined container is to be used to store a chemical liquid that is introduced through the opening part. A through hole passes from the surface of an outer wall part of the tank body to the surface of the inner wall part. A leakage detection part is provided between the inner wall part of the tank body and the lining layer. At least a portion of the leakage detection part communicates with the outer wall part side of the tank body via the through hole. An IC chip is provided to the at least one portion of the leakage detection part that communicates with the outer wall part side of the tank body.

Description

Lining container

[0001] The present invention relates to a lining container used to contain chemicals and other liquids.

[0002] Conventionally, lined containers have been known in which a PTFE sheet (lining layer) is attached to the inner wall of a metal tank body, and are used to store chemical liquids such as strong hydrochloric acid solutions and alkaline solutions used in semiconductor manufacturing.

[0003] Such a lined vessel is filled with a chemical solution at a chemical plant and then transported to a semiconductor manufacturing plant and installed. The chemical solution in the installed lined vessel is then used in the desired process during semiconductor manufacturing. When the chemical solution in the lined vessel falls below a specified level, a separate lined vessel filled with the chemical solution is transported to the semiconductor manufacturing plant and replaced with the lined vessel whose chemical solution level has fallen below the specified level.

[0004] In a certain semiconductor manufacturing factory, the lined container is repeatedly used by filling the inside of the lined container with a chemical solution, transporting the lined container, laying the lined container, and replacing the lined container, which constitutes one cycle.

[0005] However, repeated use of the lined container in this manner may cause deterioration of the lined container over time.

[0006] One of the mechanisms by which deterioration occurs is that vaporized chemical gas (hereinafter simply referred to as gas) gradually permeates in the thickness direction of the PTFE sheet (lining layer) that is attached to the inner wall of the metal tank body via an adhesive.When this gas reaches the interface between the inner wall of the tank body and the PTFE sheet (lining layer), it induces deterioration of the adhesive and causes a change in volume due to the temperature environment, resulting in a ``floating'' between the tank body and the PTFE sheet (lining layer).

[0007] As this "floating" occurs, the gas condenses and liquefies under conditions of a certain concentration and temperature, accelerating corrosion of the inner wall of the tank body. As the gas liquefies further, the "floating" and corrosion of the PTFE sheet (lining layer) progresses throughout the entire inner wall of the tank body, causing "peeling." This "floating" and "peeling" of the PTFE sheet (lining layer) from the inner wall of the tank body can affect the purity of the chemical solution inside the lining container, and in some cases, make the lining container unusable.

[0008] For this reason, some lined containers are required by law to undergo periodic inspections. For example, inspections are conducted every two and a half and five years after use, including checking for the presence of gas odors and liquid leakage through vent holes provided on the outer wall of the tank body (see, for example, Patent Documents 1 and 2).

[0009] If any defects are found, further detailed inspections are carried out. For example, if there is any "floating" or "peeling" between the metal tank body and the PTFE sheet (lining layer), or if gas or liquid is detected, the location and range of the defect are identified, and the lined container can be repaired so that it can continue to be used.

[0010] JP 2009-133767 A JP 2009-133845 A

[0011] However, if a defect occurs in a conventional lined container, gases that permeate the PTFE sheet (lining layer), components of adhesives or adhesive layers eluted by the chemical solution, or metal components of the tank body may contaminate the internal chemical solution, potentially significantly affecting the quality of the final product manufactured using the chemical solution and causing significant damage. Alternatively, the defect may not be detected until a periodic inspection is performed, potentially overlooking the defect for a long period of time. Furthermore, if the lined container is transported or shipped without noticing the defect and the chemical solution leaks outside during this transportation or shipping process, it could have a significant impact on the environment and human health, potentially even taking the life of the transporter. Therefore, there is a need for a new lined container that will not overlook defects before they occur.

[0012] The present invention has been made in consideration of the above circumstances, and aims to provide a lining container that allows the condition between the inner wall of the tank body and the lining layer to be constantly monitored.

[0013] The present invention has been invented to solve the problems in the prior art described above, and the lining container of the present invention comprises at least a metal tank body having a mouth on one side and a bottom on the other side, and a lining layer provided via an adhesive on the inner wall of the tank body, and is used by storing a chemical solution inside from the mouth, and the lining container is characterized in that the tank body has a through hole that penetrates from the surface of the outer wall of the tank body to the surface of the inner wall, and a leak detection unit is provided between the inner wall of the tank body and the lining layer, and at least a part of the leak detection unit is configured to communicate with the outer wall side of the tank body via the through hole, and an IC chip is provided in at least a part of the leak detection unit that communicates with the outer wall side of the tank body.

[0014] In this way, a leak detection unit is provided between the inner wall of the tank body and the lining layer, and an IC chip is further provided in part of this leak detection unit.If electrical information generated between the inner wall of the tank body and the lining layer is written to the IC chip, the status of the lining container can be constantly monitored by constantly reading this written information.

[0015] In addition, because the condition of the lined vessel can be constantly monitored, the personnel costs required for inspection can be reduced compared to when inspections were actually carried out at the installation site of the lined vessel. Furthermore, even if a problem occurs with the lined vessel, repair measures can be taken on the lined vessel while the damage is still minimal, thereby reducing the costs required for maintenance and inspection of the lined vessel.

[0016] Furthermore, if the use of the lined container of the present invention leads to early detection of defects in the lined container, leakage of chemicals can be detected during storage or transportation of the lined container, which is effective in terms of safe operation. In particular, leakage of gas or chemicals during transportation can cause significant damage to human life and the natural environment. With conventional lined containers, defects can only be discovered by first removing the plug attached to the vent hole and then visually checking for abnormalities through the vent hole, which results in delayed detection of the defect and creates danger. With the lined container of the present invention, danger can be detected without removing the plug from the vent hole and checking, as was previously required, making it suitable for lined containers that require inspection.

[0017] The lining container of the present invention is also characterized in that a vent hole member having a hole portion communicating with the through hole is provided immediately above the through hole.

[0018] If the vent hole member is provided directly above the through hole in this manner, the position of the through hole can be easily recognized when visually inspecting the lining container.

[0019] The lining container of the present invention is characterized in that the IC chip is disposed in the hole portion of the vent hole member.

[0020] If the IC chip is disposed in the hole portion in this manner, the IC chip is covered with the vent hole member, and therefore damage to the IC chip can be suppressed.

[0021] The lined container of the present invention is characterized in that the IC chip is equipped with an antenna, and information written in the IC chip is configured to be read by an RFID reader via the antenna.

[0022] If an antenna is provided so that the information written on the IC chip can be read by an RFID reader, the information can be obtained remotely. This reduces personnel costs compared to actually inspecting the lined container at its installation site. Furthermore, even if a problem occurs with the lined container, repair measures can be taken to repair the lined container while the damage is still minimal, thereby reducing the costs required for maintenance and inspection of the lined container. Furthermore, when the lined container is filled with chemical solution and transported to the installation site, the information written on the IC chip can be read before and after transportation and before and after installation to obtain information on whether or not there are any unexpected problems related to transportation or installation.

[0023] The lining container of the present invention is also characterized in that the information written in the IC chip is information regarding the presence or absence of an electrical signal based on gas or liquid leakage occurring between the inner wall of the tank body and the lining layer.

[0024] One of the causes of defects between the inner wall and the lining layer of a tank containing a chemical solution is when gas or liquid permeates the lining layer and remains between the inner wall and the lining layer. When this gas or liquid reaches the interface between the inner wall and the lining layer, it undergoes a volume change depending on the temperature environment, causing "floating" or "peeling" between the tank and the lining layer. In these "floating" or "peeling" areas, the chemical solution remains as "gas" or, depending on the temperature environment and concentration, as "liquid." This can cause deterioration of the adhesive that attaches the lining layer to the inner wall of the tank, or induce corrosion of the inner wall of the tank, passing through the through-hole and further into the hole in the vent hole. The presence or absence of an electrical signal when the leak detection device at the hole is wet (i.e., when gas or liquid is leaking) can be written to an IC chip, and this written information can be read continuously to constantly monitor the status of the lining container. If a leak detection unit is installed between the inner wall of the tank body and the lining layer, it will act as a path for gas or liquid to pass through the through-hole and then reach the hole in the vent hole member, making it possible to more effectively detect the occurrence of "floating" or "peeling." Furthermore, by writing the presence or absence of an electrical signal when the hole is wet to an IC chip and constantly reading this information, the status of the lining container can be constantly monitored.

[0025] The lining container of the present invention is characterized in that a plurality of the through holes are provided in the tank body.

[0026] If a plurality of vent hole members are provided in the tank body in this way, it is possible to arrange the same number of IC chips as the number of vent hole members, so that the situation throughout the entire lining vessel can be accurately grasped at all times. ２ It is preferable to provide one or more vent hole members for the lining vessel in order to accurately grasp the situation throughout the vessel.

[0027] The lined container of the present invention is characterized in that the lining layer is made of a fluororesin.

[0028] If the lining layer is made of a fluororesin, it is particularly suitable for storing chemicals used in semiconductor manufacturing inside the lining container.

[0029] The lined container of the present invention is also characterized in that the leak detection unit is an electrical wiring and / or a spacer member. Such electrical wiring and / or a spacer member can serve as a passageway for gas or liquid to pass through the through-hole and further to the hole portion of the vent hole member, making it possible to reliably detect the occurrence of "floating" or "peeling."

[0030] The lining container of the present invention is characterized in that the spacer member is a string-like member.

[0031] Such string-like members function as spacers to the extent that they do not interfere with the adhesion between the inner wall of the tank body and the lining layer, and are easily bent and can be freely configured for installation, making them ideal as spacer members. Examples of string-like members include porous straw-like or rod-like materials that are permeable to gas or liquid, twisted paper materials, and threads, strings, and ropes made from twisted thin units. These string-like members have a structure that is prone to capillary action, so in the event of a gas or liquid leak, they easily move the leaked gas or liquid toward the hole. Therefore, by writing information on the presence or absence of an electrical signal when the leak detection unit in the hole is wet (i.e., when gas or liquid is leaking) to an IC chip disposed in part of the leak detection unit, and constantly reading this written information, the status of the lining container can be constantly monitored.

[0032] The lined container of the present invention is also characterized in that the leak detection section is a gap. Even in this type of gap, gas or liquid that has permeated the lining layer can pass through the gap, pass through the through-hole, and then reach the hole in the vent hole member. For this reason, an IC chip is provided in part of the gap, and information on the presence or absence of an electrical signal when the leak detection section in the hole is wet (i.e., when gas or liquid is leaking) is written. By constantly reading this written information, the status of the lined container can be constantly monitored.

[0033] The lined container of the present invention is also characterized in that the surface roughness (arithmetic mean roughness Ra) of the gap is within the range of 1 to 2000 μm. By setting the surface roughness (arithmetic mean roughness Ra) of the gap in this range, capillary action can be easily generated, which is suitable for moving leaked gas or liquid to the IC chip side when the leaked gas or liquid leaks.

[0034] The lined container of the present invention is characterized in that the chemical solution contained in the lined container is a hydrochloric acid solution, a sulfuric acid solution, a hydrofluoric acid solution, or an alkaline solution.

[0035] It is known that, particularly in the case of such chemical liquids, the gas or liquid that has permeated the lining layer remains between the inner wall of the tank body and the lining layer, and when this gas or liquid reaches the interface between the inner wall of the tank body and the lining layer, a volume change occurs depending on the temperature environment, causing "floating" or "peeling" between the tank body and the lining layer. For this reason, if the presence or absence of an electrical signal based on the leakage of gas or liquid that occurs between the inner wall of the tank body and the lining layer due to "floating" or "peeling" is written to an IC chip and this written information can be read at all times, the status of the lined container can be constantly monitored.

[0036] According to the lining container of the present invention, a leak detection unit is provided between the inner wall portion of the tank body and the lining layer, and an IC chip is further provided in part of the leak detection unit.Therefore, by constantly reading the electrical information generated between the inner wall portion of the tank body and the lining layer, which is written to the IC chip, it is possible to constantly grasp the situation between the inner wall portion of the tank body and the lining layer in the lining container.

[0037] FIG. 1(a) is a perspective view of a lined container of the present invention, and FIG. 1(b) is a partial cross-sectional view showing the cross-sectional structure of part A in FIG. 1(a).

[0038]

[0023] Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. <Lined Vessel 10> As shown in Figures 1(a) and 1(b), the lined vessel 10 of the present invention comprises a metal tank body 20 having a mouth 22 on one side (upper side in Figure 1(a)) and a bottom 24 on the other side (lower side in Figure 1(a)), and a lining layer 40 provided on an inner wall 26 of the tank body 20 via an adhesive. The tank body 20 is not particularly limited as long as it is made of metal, but it is envisioned that it may be made of steel, stainless steel, or an aluminum alloy, for example.

[0039] In this embodiment, a plurality of through holes 30 are provided that penetrate from the surface of the outer wall portion 28 of the tank body 20 to the surface of the inner wall portion 26, and a leak detection unit 60 is further provided between the inner wall portion 26 of the tank body 20 and the lining layer 40.

[0040] The leak detection unit 60 is configured so that a portion of the leak detection unit 60 communicates with the outer wall portion 28 of the tank body 20 via the through-hole 30, and an IC (Integrated Circuit) chip 70 is disposed in the portion of the leak detection unit 60 that communicates with the outer wall portion 28 of the tank body 20. The leak detection unit 60 functions as a passage for gas or liquid when the gas or liquid leaks, passes through the through-hole 30, and further reaches the hole portion 52 of the vent hole member 50. Therefore, there are no particular limitations on the leak detection unit 60 as long as it functions as a passage.

[0041] The leak detection unit 60 may be, for example, an electrical wiring or a spacer member, or a combination of electrical wiring and a spacer member. An example of the electrical wiring is a wire, and an example of the spacer member is a string-like member. A string-like member is particularly suitable as a spacer member because it acts as a spacer to the extent that it does not interfere with the adhesion between the inner wall 26 of the tank body 20 and the lining layer 40, and it can be easily bent and freely changed in its installation shape.

[0042] Examples of the string-like member include porous straw-like or rod-like materials that are permeable to gas or liquid, twisted paper materials, and threads, strings, and ropes made of twisted thin units. Because these string-like members have a structure that easily generates capillary action, they are suitable for moving leaked gas or liquid toward the IC chip 70 when the gas or liquid leaks. The diameter of the string-like member is preferably about 2 to 3 mm. The material may be any of the above, and the string-like member may be deformed as long as it serves as a flow path for gas or liquid. In other words, there are no particular limitations on the material as long as it has a cross-sectional shape that easily generates capillary action.

[0043] Furthermore, the leak detection unit 60 may be a gap (not shown) that functions as a passageway for gas or liquid. In this case, it is preferable that the surface roughness (arithmetic mean roughness Ra) of the gap is within a range of 1 to 2000 μm. By providing a gap with such a surface roughness (arithmetic mean roughness Ra), capillary action can be easily generated, and in the event of a gas or liquid leak, the leaked gas or liquid can be easily moved toward the IC chip 70.

[0044] On the other hand, a vent hole member 50 having a hole portion 52 communicating with the through hole 30 is provided immediately above the through hole 30, and an IC chip 70 is disposed in this hole portion 52.

[0045] In addition, it is preferable that the IC chip 70 disposed in this hole portion 52 is equipped with an antenna, so that the information written in the IC chip 70 can be read via the antenna by a separately provided RFID (Radio Frequency Identification) reader 80.

[0046] Here, the information written to the IC chip 70 is not particularly limited, but at least information regarding the presence or absence of an electrical signal based on the leakage of gas or liquid occurring between the inner wall portion 26 of the tank body 20 and the lining layer 40 is written.

[0047] Such a lined vessel 10 can constantly monitor the status of the lined vessel 10 by constantly reading the information on the presence or absence of an electrical signal based on the leakage of gas or liquid, which is written in the IC chip 70. Furthermore, because the status of the lined vessel 10 can be constantly monitored, personnel costs can be reduced compared to inspecting the vessel 10 at its installation site. Furthermore, even if a problem occurs with the lined vessel 10, repair measures can be taken on the vessel 10 while damage is still minimal, thereby reducing the costs required for maintenance and inspection of the vessel 10.

[0048] In this embodiment, a plurality of through holes 30 are provided in the tank body 20. This allows the state of the lining vessel 10 to be reliably grasped throughout the entire lining vessel 10. Here, the surface area of ​​the inner wall portion 26 of the tank body 20 is 1.5 to 2.5 m ２ It is preferable to provide one or more vent hole members 50 for each of the lining vessels 10 in order to accurately grasp the situation throughout the entire lining vessel 10.

[0049] Furthermore, in the lined container 10 of the present invention, the lining layer 40 is preferably made of a fluororesin. There are no particular limitations on the fluororesin, but examples include tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), polytetrafluoroethylene (PTFE), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinylidene fluoride (PVDF), polychlorotrifluoroethylene (PCTFE), and chlorotrifluoroethylene-ethylene copolymer (ECTFE).

[0050] The chemical solution 12 stored in the lining container 10 of the present invention configured in this manner is not particularly limited, but examples thereof include hydrochloric acid solution, sulfuric acid solution, hydrofluoric acid solution, alkaline solution, etc., which are used in semiconductor manufacturing.

[0051] As described above, the lining container 10 of the present invention has a leak detection unit 60 disposed between the inner wall 26 of the tank body 20 and the lining layer 40, and an IC chip 70 disposed in part of the leak detection unit 60. If information on the presence or absence of an electrical signal based on the leakage of gas or liquid occurring between the inner wall 26 of the tank body 20 and the lining layer 40 is written into the IC chip 70, the written information can be read at all times, making it possible to constantly grasp the status of the lining container 10, particularly the status between the inner wall 26 of the tank body 20 and the lining layer 40.

[0052] In addition, since the condition of the lined vessel 10 can be constantly monitored, personnel costs can be reduced compared to when inspections are actually performed at the installation site of the lined vessel 10. Furthermore, even if a problem occurs with the lined vessel 10, repair measures can be taken on the lined vessel 10 while the damage is still minimal, thereby reducing the costs required for maintenance and inspection of the lined vessel 10.

[0053] REFERENCE SIGNS LIST 10 Lining container 12 Chemical solution 20 Tank body 22 Mouth portion 24 Bottom portion 26 Inner wall portion 28 Outer wall portion 30 Through hole 40 Lining layer 50 Vent hole member 52 Hole portion 60 Leak detection portion 70 IC (Integrated Circuit) chip 80 RFID (Radio Frequency Identification) reader

Claims

1. A lining container comprising at least a metal tank body having a mouth on one side and a bottom on the other side, and a lining layer attached to the inner wall of the tank body via an adhesive, the lining container being used to store a chemical solution inside from the mouth, wherein the tank body has a through-hole that penetrates from the surface of the outer wall of the tank body to the surface of the inner wall, and a leak detection unit is provided between the inner wall of the tank body and the lining layer, and at least a portion of the leak detection unit is configured to communicate with the outer wall of the tank body via the through-hole, and an IC chip is provided in at least a portion of the leak detection unit that communicates with the outer wall of the tank body.

2. The lining container according to claim 1, characterized in that a vent hole member having a hole communicating with said through hole is provided immediately above said through hole.

3. The lining container according to claim 2, wherein the IC chip is disposed in the hole of the vent hole member.

4. The lined container according to claim 1, characterized in that the IC chip is equipped with an antenna, and the information written in the IC chip is configured to be read by an RFID reader via the antenna.

5. The lining container according to claim 4, characterized in that the information written in the IC chip is information regarding the presence or absence of an electrical signal based on the leakage of gas or liquid occurring between the inner wall of the tank body and the lining layer.

6. The lining container according to claim 1, wherein a plurality of the through holes are provided in the tank body.

7. The lined container according to claim 1, wherein the lining layer is made of a fluororesin.

8. The lined vessel according to claim 1, wherein the leak detection unit is an electrical wiring and / or a spacer member.

9. The lining container according to claim 8, wherein the spacer member is a string-like member.

10. The lined container according to claim 1, wherein the leak detection portion is a void portion.

11. A lined container according to claim 10, characterized in that the surface roughness (arithmetic mean roughness Ra) of the gap portion is within the range of 1 to 2000 μm.

12. The lined vessel according to claim 1, wherein the chemical solution contained in the lined vessel is a hydrochloric acid solution, a sulfuric acid solution, a hydrofluoric acid solution, or an alkaline solution.

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