Protective device and wafer cassette carrying apparatus

Abstract

A protective device and a wafer cassette carrying apparatus. The protective device (100) comprises a base (10), a protective enclosure (20), a driving assembly, and a power source (40); the protective enclosure (20) is provided with a protective cavity (20a) and an opening (20b) in communication with the protective cavity (20a); the driving assembly is connected between the protective enclosure (20) and the base (10); the driving assembly comprises first driving members (31); each first driving member (31) comprises a connecting component (311) and a rotating component (312); the connecting component (311) is provided with an elongated guide part (3111); the rotating component (312) is arranged on the protective enclosure (20); the rotating component (312) is movably connected to the connecting component (311) and can move in the extension direction of the elongated guide part (3111); the power source (40) is arranged in the base (10) and is connected to the driving assembly so as to drive the first driving members (31) to drive the protective enclosure (20) to rotate relative to the base (10).The protective device is conducive to implementing automation design, and improving the rotation efficiency.

Description

Protective devices and wafer box carriers

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to Chinese patent application No. 202420333856.X filed on February 22, 2024, entitled “Protective device and wafer box carrier,” the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present invention relates to the field of semiconductor manufacturing, in particular to a protective device and a wafer box carrying device. Background Art

[0004] Wafer cassettes are used primarily to store and transport wafers in semiconductor production. Dust can easily accumulate on wafer cassettes during storage, contaminating the wafers. To reduce the risk of contamination of the cassette and the wafers placed inside, dust covers are often placed on the outside of the cassette to prevent dust. However, existing dust covers are typically manually flipped open, resulting in low efficiency.

[0005] Application Contents

[0006] The present application provides a protective device and a wafer box carrying device, which can realize automated design and help improve rotation efficiency.

[0007] According to an embodiment of the present application, a protective device is proposed, including: a base; a protective cover having a protective cavity and an opening connected to the protective cavity; a drive assembly connected between the protective cover and the base, the drive assembly including a first drive member, the first drive member including a connecting member and a rotating member, the connecting member being provided with a strip guide portion, the rotating member being provided on the protective cover, the rotating member being movably connected to the connecting member and being capable of moving along the extension direction of the strip guide portion; a power source being provided on the base and connected to the drive assembly to drive the first drive member to drive the protective cover to rotate relative to the base.

[0008] According to one aspect of an embodiment of the present application, the rotating component includes a fixed portion and a rotating portion, the fixed portion has a fixed end and a rotating end, the fixed end is connected to the protective cover, the rotating portion is arranged at the rotating end to be rotatably connected to the fixed portion, and the rotating portion is rotatably connected and movably connected to the connecting component.

[0009] According to one aspect of an embodiment of the present application, the protective cover includes a wall portion, which encloses a protective cavity. The rotating component also includes a transition portion, which has a transition end opposite to the fixed end. The wall portion is clamped between the fixed portion and the transition portion, and the transition end is connected to the fixed end.

[0010] According to one aspect of an embodiment of the present application, the strip-shaped guide portion is an oblong hole extending along the extension direction, the rotating portion is arranged in the oblong hole, and is rotatably connected to the hole wall of the oblong hole and movably connected; or, the strip-shaped guide portion is a slide rail extending along the extension direction, the rotating component also includes a connecting block, the rotating portion is rotatably connected to the connecting block, and the connecting block is movably connected to the slide rail.

[0011] According to one aspect of an embodiment of the present application, the base has a accommodating cavity, the driving assembly also includes a second driving member, at least a portion of the second driving member and a power source are arranged in the accommodating cavity, the second driving member includes a first shaft, the first shaft is connected between one end of the connecting member along the extension direction of the strip guide portion and the power source, and the power source drives the first shaft to rotate to drive the first driving member to rotate relative to the base.

[0012] According to one aspect of an embodiment of the present application, the first driving members are arranged in pairs and spaced apart along a first direction, the protective cover is connected between the first driving members arranged in pairs, the first axis extends along the first direction, and the first axis extends out of the accommodating cavity on both sides of the first direction to connect with the connecting parts arranged in pairs.

[0013] According to one aspect of the embodiment of the present application, the second driving member further includes a second shaft and a transmission belt, the power source is connected to the second shaft, and the transmission belt is wound and connected between the first shaft and the second shaft.

[0014] According to one aspect of an embodiment of the present application, the protective device further includes a trigger member connected to the base, and the trigger member is configured to detect a rotation angle of the protective cover relative to the base.

[0015] According to one aspect of an embodiment of the present application, the protective device also includes a first shielding member connected to the first axis, and the first shielding member is configured to detect the rotation angle of the protective cover relative to the base; and / or, the protective device also includes a second shielding member connected to the second axis, and the first shielding member is configured to detect the rotation angle of the protective cover relative to the base.

[0016] According to one aspect of an embodiment of the present application, the protective device further includes a third shielding member connected to the protective cover, and the third shielding member is configured to detect an opening direction of the opening.

[0017] On the other hand, according to an embodiment of the present application, a wafer box carrying device is also proposed, including: a carrying platform, including a carrying surface and a connecting surface arranged to intersect; like the above-mentioned protective device, the base is connected to the side of the connecting surface facing away from the carrying surface, and the protective cover is arranged on the side of the connecting surface facing away from the base, and the carrying platform can be set to close the opening.

[0018] The protective device and wafer cassette support device provided in the embodiments of the present application include a base, a protective cover, a drive assembly, and a power source. By controlling the power source to drive a first drive member to rotate the protective cover relative to the base, this facilitates the automated design of the protective device while meeting the requirements for opening and closing the protective cover. Furthermore, by providing a rotating component on the protective cover and movably connecting it to a connecting component, the protective cover can move along the extension direction of the strip guide portion during rotation relative to the base. In other words, the protective cover can automatically adjust its rotation radius during rotation, avoiding jamming and improving the rotation efficiency of the protective device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The features, advantages and technical effects of exemplary embodiments of the present application will be described below with reference to the accompanying drawings.

[0020] FIG1 is a schematic diagram of a partial structure of a wafer box carrying device according to an embodiment of the present application;

[0021] FIG2 is a schematic diagram of FIG1 from another perspective;

[0022] FIG3 is a schematic diagram of a partial structure of a wafer box carrying device according to another embodiment of the present application;

[0023] FIG4 is a schematic diagram of a partial structure of a wafer box carrying device according to another embodiment of the present application.

[0024] Among them: 100-protective device; 10-base; 10a-accommodating chamber; 20-protective cover; 20a-protective chamber; 20b-opening; 21-wall; 31-first driving member; 311-connecting member; 3111-strip guiding portion; 312-rotating member; 3121-fixing portion; 31211-fixed end; 3122-rotating portion; 3123-connecting block; 32-second driving member; 321-first shaft; 322-second shaft; 323-transmission belt; 40-power source; 50-trigger member; 61-first shielding member; 62-third shielding member; 200-supporting platform; 201-supporting surface; 202-connecting surface; A-extension direction; X-first direction. DETAILED DESCRIPTION

[0025] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the detailed description below, many specific details are set forth in order to provide a comprehensive understanding of the present application. However, it will be apparent to those skilled in the art that the present application can be implemented without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by illustrating examples of the present application. In the accompanying drawings and the following description, at least some of the well-known structures and technologies are not shown in order to avoid unnecessary ambiguity in the present application; and, for clarity, the sizes of some structures may be exaggerated. In addition, the features, structures, or characteristics described below may be combined in any suitable manner in one or more embodiments.

[0026] The directional words that appear in the following description refer to the directions shown in the figures and do not limit the protective device and wafer box carrier equipment of this application. In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection. For those of ordinary skill in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0027] In order to better understand the present application, the protective device 100 and the wafer box carrying device according to the embodiment of the application are described in detail below with reference to Figures 1 to 4.

[0028] Please refer to Figures 1 to 4 together. According to an embodiment of the present application, a protective device 100 is proposed, which includes a base 10, a protective cover 20, a drive assembly and a power source 40. The protective cover 20 has a protective cavity 20a and an opening 20b connected to the protective cavity 20a. The drive assembly is connected between the protective cover 20 and the base 10. The drive assembly includes a first drive member 31, and the first drive member 31 includes a connecting member 311 and a rotating member 312. The connecting member 311 is provided with a strip guide portion 3111. The rotating member 312 is provided on the protective cover 20. The rotating member 312 is movably connected to the connecting member 311 and can move along the extension direction A of the strip guide portion 3111. The power source 40 is provided on the base 10 and is connected to the drive assembly to drive the first drive member 31 to drive the protective cover 20 to rotate relative to the base 10.

[0029] The protective device 100 provided in the embodiment of the present application is provided with a drive assembly between the protective cover 20 and the base 10, and a power source 40 connected to the drive assembly is provided on the base 10. By controlling the power source 40 to drive the first drive member 31 to drive the protective cover 20 to rotate relative to the base 10, while meeting the requirements of opening and closing the protective cover 20, it is conducive to realizing the automated design of the protective device 100, so as to better protect the product to be protected in the protective device 100.

[0030] The products to be protected may be wafers, wafer boxes, or other products that require protection and pollution prevention.

[0031] When manually opening the protective cover, it is easy to accidentally touch the product to be protected inside it, and there is also the possibility of manual error in the protective cover not being accurately returned to its original position. Therefore, the protective device 100 provided in the embodiment of the present application, by providing a power source 40 and a drive assembly to set the protective cover 20 to be rotatable relative to the base 10, can accurately return the protective cover 20 to its original position, and also helps to ensure the safety of the product to be protected, thereby improving the protective effect of the protective device 100. Here, returning to the original position means that the protective device 100 is protecting the product to be protected, that is, the product to be protected is located in the protective cavity 20a.

[0032] The protective device 100 provided in the embodiment of the present application can be used for a carrying device. During the specific implementation process, the base 10 can be fixedly connected to the tray of the carrying device, and the tray can close the opening 20b to make the protective cavity 20a a closed cavity. The product to be protected can be carried on the pallet and protected by the protective device 100.

[0033] For example, when the protective device 100 is protecting the product to be protected, the opening direction of the opening 20b of the protective cover 20 is toward the pallet. When there is a need to open the protective cover 20, the power source 40 is controlled to drive the first driving member 31 to drive the protective cover 20 to rotate relative to the base 10, so that the product to be protected can be partially or completely exposed. At this time, the opening direction of the opening 20b of the protective cover 20 is no longer toward the pallet.

[0034] Optionally, the protective device 100 may further include a controller, which is operated to send a drive signal to the power source 40, so that the power source 40 drives the first drive member 31 to drive the protective cover 20 to rotate. Optionally, the controller does not need to be provided on the protective device 100, and can be provided as a remote control, a handle, a switch, etc. Of course, the controller can also be provided on the protective cover 20, and can be provided as a button, a fingerprint touch screen, etc.

[0035] Optionally, a handle may be provided on the protective cover 20, and the sensor may be provided on the handle. The handle is provided on a side of the protective cover 20 away from the protective cavity 20a for easy operation.

[0036] Optionally, the shape of the protective cover 20 can be rectangular, arc-shaped, etc., and can be specifically designed according to the shape, structural size or actual application environment of the product to be protected, and this application does not limit this.

[0037] In the embodiment of the present application, the first direction X may be the width direction of the protective cover 20 , the second direction Y may be the length direction of the protective cover 20 , and the third direction Z may be the height direction of the protective cover 20 .

[0038] Optionally, the protective cover 20 may be disposed on one side of the base 10 along the second direction Y, and the protective cover 20 may rotate around the base 10 with the first direction X as an axis to open or close the protective cover 20 .

[0039] Optionally, the first driving member 31 can be arranged between the protective cover 20 and the base 10 along the second direction Y. Of course, the first driving member 31 can also be arranged on one side of the base 10 and the protective cover 20 along the first direction X. The power source 40 can be arranged inside or outside the base 10 to be connected to the drive assembly.

[0040] In an embodiment of the present application, the drive assembly includes a first drive member 31, which includes a connecting member 311 and a rotating member 312. By setting the rotating member 312 on the protective cover 20 and setting it to be movably connected to the connecting member 311, during the rotation of the protective cover 20 relative to the base 10, the protective cover 20 can move along the extension direction A of the strip guide portion 3111, thereby avoiding the occurrence of jamming during the rotation of the protective cover 20, which is beneficial to improving the rotation efficiency of the protective device 100 and the efficiency of opening or closing the protective cover 20.

[0041] Moreover, by setting it up in this way, the protective device 100 provided in the embodiment of the present application can use protective covers 20 of different volumes and sizes, and the protective cover 20 can automatically adjust the rotation radius during the rotation process, which is conducive to improving versatility.

[0042] In addition, since the protective cover 20 can automatically adjust the rotation radius during the rotation process, the distance between the protective cover 20 and the base 10 can be set to be smaller, which is beneficial to improving the structural compactness of the protective device 100 and reducing the occupied space.

[0043] Optionally, the power source 40 may include power components such as a motor and a hydraulic press.

[0044] Optionally, the extending direction A of the strip-shaped guide portion 3111 is the same as the extending direction of the connecting component 311 , which facilitates processing and manufacturing.

[0045] Optionally, the movably connected manner of the rotating component 312 and the connecting component 311 can be set to a sliding connection or a rolling connection.

[0046] The protective device 100 provided in the embodiment of the present application can be produced and sold separately as an independent component. At the same time, it can also be used in a wind turbine generator set and as a component of the carrier equipment of the wafer box, which can realize automated design and help improve operational efficiency.

[0047] Please continue to refer to Figures 1 to 3. In some optional embodiments, the rotating part 312 includes a fixed part 3121 and a rotating part 3122. The fixed part 3121 has a fixed end 31211 and a rotating end. The fixed end 31211 is connected to the protective cover 20. The rotating part 3122 is set at the rotating end to be rotatably connected to the fixed part 3121, and the rotating part 3122 is rotatably connected and movably connected to the connecting part 311.

[0048] By setting it up in this way, during the rotation of the protective cover 20 relative to the base 10, the friction between the protective cover 20 and the rotating part 312 can be reduced or even eliminated, thereby reducing the risk of generating friction particles and preventing particles from falling into the protective cavity 20a, thereby better improving the protective effect of the protective device 100.

[0049] The rotating member 312 is fixedly connected to the protective cover 20 via the fixed portion 3121, and is rotatably connected to the fixed portion 3121 and the protective cover 20 via the rotating portion 3122. The rotating portion 3122 is rotatably connected and movably connected to the connecting member 311. Optionally, the rotating portion 3122 is rotatably connected to the rotating end on one side along its own extension direction, and is rotatably connected and movably connected to the connecting member 311 on the other side.

[0050] Optionally, the fixed end 31211 and the protective cover 20 can be detachably connected, and fasteners such as bolts, studs, and screws can be used to connect the fixed end 31211 to the protective cover 20, facilitating assembly and facilitating maintenance or replacement. Furthermore, an adhesive such as thread glue can be used to reinforce the connection between the fixed end 31211 and the protective cover 20 to prevent movement between the fixed portion 3121 and the protective cover 20, thereby preventing friction between the protective cover 20 and the fixed portion 3121, and further preventing the generation of dust particles.

[0051] Optionally, the fixing portion 3121 can be configured as a connecting plate or a connecting flange structure, and the periphery of the fixing portion 3121 is provided with more than two fixing ends 31211, which is beneficial to improving the connection strength between the fixing portion 3121 and the protective cover 20 so that the two remain relatively stationary.

[0052] Optionally, a sealing ring may be provided in the fixed end 31211 to prevent dust and other foreign particles from entering the protective cavity 20a, thereby improving the safety of the protective device.

[0053] Optionally, a rotating end is provided at the center of the fixing portion 3121, and the rotating portion 3122 can be provided as a roller or a bearing structure to ensure the rotation effect.

[0054] In some optional embodiments, the protective cover 20 includes a wall portion 21, which encloses a protective cavity 20a. The rotating part 312 also includes a transition portion, which has a transition end opposite to the fixed end 31211. The wall portion 21 is clamped between the fixed portion 3121 and the transition portion, and the transition end is connected to the fixed end 31211.

[0055] By configuring in this manner, stress concentration at the connection position between the wall portion 21 and the fixing portion 3121 can be reduced, thereby preventing the wall portion 21 from being deformed or even damaged, thereby improving the service life of the protective cover 20 .

[0056] Usually, the protective cover 20 is designed to be lighter and thinner to facilitate rotation. Therefore, a fixing portion 3121 and a connecting portion are connected to the inner and outer sides of the wall portion 21 respectively, which can facilitate the connection between the wall portion 21 and the rotating part 312, and is beneficial to improving the connection strength, and can also prevent the wall portion 21 from deformation or even damage.

[0057] Optionally, fasteners such as studs, bolts, and screws may be used to connect the fixed end 31211 and the transition end, so that the wall portion 21 can be locked between the fixed portion 3121 and the transition portion.

[0058] Optionally, the adapter end and the fixed end 31211 can be configured to have the same structure, or, of course, can be configured to have different structures.

[0059] In some optional embodiments, the strip-shaped guide portion 3111 is an oblong hole extending along the extension direction A, and the rotating portion 3122 is disposed in the oblong hole and is rotatably and movably connected to the hole wall of the oblong hole.

[0060] Optionally, the oblong hole can be a hole set through the connecting part 311, which is easy to process and facilitate assembly. Of course, it can also be set as a groove body to prevent impurity particles such as water vapor from contaminating it, thereby affecting the smoothness of the movement of the rotating part 3122.

[0061] As shown in FIG3 , optionally, the strip-shaped guide portion 3111 is a slide rail extending along the extension direction A, and the rotating component 312 further includes a connecting block 3123 . The rotating portion 3122 is rotatably connected to the connecting block 3123 , and the connecting block 3123 is movably connected to the slide rail.

[0062] Optionally, a connecting plate may be provided between the rotating portion 3122 and the connecting block 3123 , the connecting plate having a connecting fixed end and a connecting rotating end, the rotating portion 3122 may be rotatably connected to the connecting rotating end, and the connecting block 3123 may be fixedly connected to the connecting fixed end.

[0063] Optionally, the slide rail may be provided with two tracks, and the connecting block clamps the slide rail and is slidably connected to the two tracks respectively, which helps to improve stability.

[0064] The strip-shaped guide portion of the protective device 100 provided in the embodiment of the present application can be configured as either an oblong hole or a slide rail, both of which can ensure the effectiveness of the rotation of the protective cover 20 relative to the base 10 .

[0065] Optionally, a protective plate may be provided on the connecting component 311 to seal the strip-shaped guide portion 3111 and prevent the rotating portion 3122 and other structures from being exposed to the external environment, thereby improving the service life of the protective device 100 .

[0066] Please continue to refer to Figures 3 and 4. In some optional embodiments, the base 10 has a accommodating cavity 10a, and the driving assembly also includes a second driving member 32. At least part of the second driving member 32 and the power source 40 are arranged in the accommodating cavity 10a. The second driving member 32 includes a first shaft 321. The first shaft 321 is connected between one end of the connecting part 311 along the extension direction A of the strip guide portion 3111 and the power source 40. The power source 40 drives the first shaft 321 to rotate to drive the first driving member 31 to rotate relative to the base 10.

[0067] By configuring in this manner, the power source 40 can better drive the first driving member 31 to rotate, and helps ensure the effectiveness of the power source 40 driving the first driving member 31 to rotate relative to the base 10 .

[0068] Optionally, the second driving member 32 is provided separately from the first driving member 31, and the part of the first shaft 321 located inside the accommodating chamber 10a can be connected to the power source 40, and the part of the first shaft 321 located outside the accommodating chamber 10a can be connected to the connecting component 311. During the specific implementation process, the power source 40 drives the first shaft 321 to rotate, the first shaft 321 drives the first driving member 31 to rotate relative to the base 10, and the first driving member 31 drives the protective cover 20 to rotate relative to the base 10, which is easy to implement.

[0069] In some optional embodiments, the first driving members 31 are arranged in pairs and spaced apart along the first direction X, the protective cover 20 is connected between the first driving members 31 arranged in pairs, the first shaft 321 extends along the first direction X, and the first shaft 321 extends out of the accommodating cavity 10a on both sides in the first direction X to connect with the connecting parts 311 arranged in pairs.

[0070] By arranging in this manner, the protective cover 20 can rotate more smoothly, which is beneficial to ensuring the reliability of the protective device 100. In addition, the first driving members 31 arranged in pairs can also provide the protective cover 20 with more driving force, which is beneficial to improving the rotation efficiency.

[0071] Optionally, the first driving members 31 are symmetrically distributed to further improve the reliability of the protection device 100 .

[0072] Referring to FIG. 4 , in some optional embodiments, the second driving member 32 further includes a second shaft 322 and a transmission belt 323 . The power source 40 is connected to the second shaft 322 , and the transmission belt 323 is wound and connected between the first shaft 321 and the second shaft 322 .

[0073] By configuring in this manner, the power source 40 and the second driving member 32 can be reasonably arranged within the base 10 , thereby improving the compactness of the structure.

[0074] The power source 40 may be disposed on one side of the second shaft 322 along the first direction X, and the first shaft 321 may be disposed on one side of the second shaft 322 along the second direction Y or the third direction Z close to the protective cover 20 .

[0075] Optionally, in the first direction X, the length of the second shaft 322 is smaller than the length of the first shaft 321 , which helps to reduce costs.

[0076] 1 to 3 , in some optional embodiments, the protective device 100 further includes a trigger member 50 connected to the base 10 , and the trigger member 50 is configured to detect a rotation angle of the protective cover 20 relative to the base 10 .

[0077] By providing the trigger member 50 , it is possible to determine whether the protective cover 20 is rotated into place, which is beneficial to improving the degree of automation of the protective device 100 .

[0078] The specific position of the trigger member 50 on the base 10 can be designed according to a preset rotation angle. The preset rotation angle satisfies that when the protective cover 20 rotates the preset angle, the protective cover 20 abuts against the trigger member 50 .

[0079] Exemplarily, when the protective device 100 is in a closed state, the protective cover 20 is separated from the trigger member 50. When the protective device 100 is in an open state, the protective cover 20 rotates and moves close to the trigger member 50. When the protective cover 20 abuts against the trigger member 50, the protective cover 20 has rotated to a preset rotation angle relative to the base 10. The trigger member 50 sends a control signal, the power source 40 stops driving the first drive member 31, and the protective cover 20 stops rotating.

[0080] As shown in FIG. 4 , in some optional embodiments, the protective device 100 further includes a first shielding member 61 connected to the first shaft 321 , and the first shielding member 61 is configured to detect a rotation angle of the protective cover 20 relative to the base 10 .

[0081] By setting in this manner, it is possible to determine whether the protective cover 20 is rotated into place, which is beneficial to improving the efficiency of the protective device 100.

[0082] Optionally, a laser detection mechanism may be provided, which may serve as a part of the protective device 100 . Of course, the laser detection mechanism may also serve as an external component used in conjunction with the protective device 100 .

[0083] Exemplarily, the laser detection mechanism may include a first laser detection unit, which is disposed on one side of the base 10 along the first direction X, and is capable of emitting a first laser element. When the protective cover 20 has not been rotated to a preset rotation angle, the first laser element can be observed from the other side of the base 10 along the first direction X. The power source 40 drives the second driving member 32 to rotate, and the first shielding member 61 rotates along the first axis 321. When the protective cover 20 rotates to a preset rotation angle relative to the base 10, the first shielding member 61 just blocks the first laser element, making it impossible to observe the first laser element from the other side of the base 10 along the first direction X. At this time, the protective cover 20 rotates into place, and the power source 40 stops driving the second driving member 32 to rotate.

[0084] Optionally, the first shielding member 61 may be configured as a baffle, a block or other structure, and the material of the first shielding member 61 may be a material that can prevent laser light from penetrating.

[0085] The specific position of the first shielding member 61 can be set according to the rotation angle of the protective cover 20, which is not limited in this application.

[0086] In some optional embodiments, the protective device 100 further includes a second shielding member connected to the second shaft 322 , and the first shielding member 61 is configured to detect a rotation angle of the protective cover 20 relative to the base 10 .

[0087] By setting in this manner, it is possible to determine whether the protective cover 20 is rotated into place, which is beneficial to improving the efficiency of the protective device 100.

[0088] Exemplarily, the laser detection mechanism may include a second laser detection unit, which is disposed on one side of the base 10 along the first direction X, and is capable of emitting a second laser element. When the protective cover 20 has not been rotated to a preset angle, the second laser element can be observed from the other side of the base 10 along the first direction X. The power source 40 drives the second driving member 32 to rotate, and the second shielding member rotates along the second shaft 322. When the protective cover 20 rotates by a preset rotation angle relative to the base 10, the second shielding member just blocks the second laser element, making it impossible to observe the second laser element from the other side of the base 10 along the first direction X. At this time, the protective cover 20 rotates into place, and the power source 40 stops driving the second driving member 32 to rotate.

[0089] Optionally, the second shielding member can be configured as a baffle, a block, or the like, and the material of the second shielding member can be a material that prevents laser penetration. Optionally, the structure and material of the second shielding member can be the same as or different from the first shielding member 61.

[0090] The specific position of the second shielding member can be set according to the rotation angle of the protective cover 20 to be rotated into place, and this application does not limit this.

[0091] In some optional embodiments, the protection device 100 further includes a third shielding member 62 connected to the protection cover 20 , and the third shielding member 62 is configured to detect the opening direction of the opening 20 b.

[0092] Optionally, the third shielding member 62 is connected to the wall portion 21 of the protective cover 20 and is disposed in the protective cavity 20a to avoid interference with external structures, thereby improving safety.

[0093] Exemplarily, the laser detection mechanism may include a third laser detection unit, disposed on one side of the protective cover 20 along the first direction X. The third laser detection unit is capable of emitting a third laser element. When the protective cover 20 is not returned to its original position, that is, when the product to be protected is not within the protective cavity 20a, the third laser element can be observed from the other side of the protective cover 20 along the first direction X. When the protective cover 20 is returned to its original position, that is, when the product to be protected is within the protective cavity 20a, the third shielding member 62 precisely blocks the third laser element, rendering the first laser element unobservable from the other side of the protective cover 20 along the first direction X. At this point, the opening 20b opens along the third direction Z toward the product to be protected, and the protective cover 20 is rotated back to its original position.

[0094] Optionally, the third shielding member 62 may be configured as a baffle, a block or other structures, and the material of the third shielding member 62 may be a material that can prevent laser light from penetrating.

[0095] Referring to Figures 1 through 3 , embodiments of the present application also provide a wafer cassette carrier, comprising a carrier platform 200 and a protective device 100 as described in the aforementioned embodiments. The carrier platform 200 includes an intersecting carrier surface 201 and a connecting surface 202. A base 10 is connected to the side of the connecting surface 202 facing away from the carrier surface 201. A protective cover 20 is disposed on the side of the connecting surface 202 facing away from the base 10. The carrier platform 200 is configured to enclose an opening 20b.

[0096] The carrying surface 201 is used to carry the wafer box, which is used to hold wafers. The finished wafers can be placed in the wafer box for storage. The protective cover 20 can protect the wafer box to prevent foreign particles from entering the protective cavity 20a and contaminating the wafer box.

[0097] When the protective cover 20 needs to be opened to access wafers or wafer boxes, the protective device 100 can automatically control the opening and closing of the protective cover 20, thereby improving the operating efficiency of the carrier equipment.

[0098] Optionally, a laser detection component may be provided, which may serve as a part of the carrier device. Of course, the laser detection component may also be used as an external component in conjunction with the carrier device.

[0099] For example, the laser detection assembly may include a fourth laser detection unit, disposed on one side of the protective cover 20 along the first direction X. The fourth laser detection unit is capable of emitting a fourth laser element. When the wafer cassette is not positioned at the designated location on the carrying surface 201, the fourth laser element can be observed from the other side of the protective cover 20 along the first direction X. When the wafer cassette is positioned at the designated location on the carrying surface 201, the fourth laser element cannot be observed from the other side of the protective cover 20 along the first direction X. This configuration allows for determination of whether the wafer cassette is accurately positioned at the designated location, thereby improving operational efficiency.

[0100] Although the present application has been described with reference to preferred embodiments, various modifications may be made thereto and components may be substituted with equivalents without departing from the scope of the present application. In particular, the various technical features described in the various embodiments may be combined in any manner as long as there are no structural conflicts. The present application is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.

Claims

1. A protective device comprising: base; A protective cover having a protective cavity and an opening communicating with the protective cavity; a drive assembly connected between the protective cover and the base, the drive assembly comprising a first drive member, the first drive member comprising a connecting member and a rotating member, the connecting member being provided with a strip-shaped guide portion, the rotating member being provided on the protective cover, the rotating member being movably connected to the connecting member and being capable of moving along an extension direction of the strip-shaped guide portion; A power source is arranged on the base and connected to the driving assembly to drive the first driving member to drive the protective cover to rotate relative to the base.

2. The protective device according to claim 1, wherein: The rotating component includes a fixed part and a rotating part, the fixed part has a fixed end and a rotating end, the fixed end is connected to the protective cover, the rotating part is arranged at the rotating end to be rotatably connected to the fixed part, and the rotating part is rotatably connected and movably connected to the connecting component.

3. The protective device according to claim 2, wherein: The protective cover includes a wall portion, which encloses the protective cavity. The rotating component also includes a transition portion, which has a transition end opposite to the fixed end. The wall portion is clamped between the fixed portion and the transition portion, and the transition end is connected to the fixed end.

4. The protective device according to claim 2, wherein: The strip-shaped guide portion is an oblong hole extending along the extending direction, and the rotating portion is provided in the oblong hole and is rotatably connected to the hole wall of the oblong hole and is movably connected; Alternatively, the strip-shaped guiding portion is a slide rail extending along the extending direction, the rotating component further comprises a connecting block, the rotating portion is rotatably connected to the connecting block, and the connecting block is movably connected to the slide rail.

5. The protective device according to claim 1, wherein: The base has a accommodating cavity, and the driving assembly also includes a second driving member. At least a portion of the second driving member and the power source are arranged in the accommodating cavity. The second driving member includes a first shaft. The first shaft is connected between one end of the connecting member along the extension direction of the strip guide portion and the power source. The power source drives the first shaft to rotate to drive the first driving member to rotate relative to the base.

6. The protective device according to claim 5, wherein: The first driving members are arranged in pairs and spaced apart along the first direction, the protective cover is connected between the first driving members arranged in pairs, the first shaft extends along the first direction, and the first shaft extends out of the accommodating cavity on both sides of the first direction to connect with the connecting parts arranged in pairs.

7. The protective device according to claim 6, wherein: The second driving member further includes a second shaft and a transmission belt. The power source is connected to the second shaft. The transmission belt is wound and connected between the first shaft and the second shaft.

8. The protection device according to any one of claims 1 to 7, wherein: The protection device further includes a trigger member connected to the base, and the trigger member is configured to detect a rotation angle of the protection cover relative to the base.

9. The protective device according to claim 7, wherein: The protection device further includes a first shielding member connected to the first shaft, the first shielding member being configured to detect a rotation angle of the protection cover relative to the base; And / or, the protective device further includes a second shielding member connected to the second shaft, and the first shielding member is configured to detect a rotation angle of the protective cover relative to the base.

10. The protection device according to any one of claims 1 to 7, wherein: The protection device further includes a third shielding member connected to the protection cover, and the third shielding member is configured to detect an opening direction of the opening.

11. A wafer box carrying device, wherein: include: The bearing platform includes a bearing surface and a connecting surface arranged to intersect each other; As described in any one of claims 1 to 10 above, the base is connected to the side of the connecting surface facing away from the bearing surface, the protective cover is arranged on the side of the connecting surface facing away from the base, and the bearing platform can close the opening.

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