Automatic coupler for supplying utilities

Abstract

The present invention relates to an automatic coupler for supplying utilities, the coupler comprising: a first coupling member (110) provided in one from among a utility supply end and a utility reception end; a first valve body (120) which is provided in the first coupling member (110), and which has an elastically-supported first check ball (121) such that a flow path is opened and closed by the first check ball (121); a second coupling member (210) provided in the other from among the utility supply end and the utility reception end, and coupled to the first coupling member (110); and a second valve body (220) which is provided in the second coupling member (210), and which has an elastically-supported second check ball (221) such that a flow path is opened and closed by the second check ball (221), wherein the second valve body (220) includes: a main body part (222); a first floating body part (223) elastically supported with respect to the main body part (222); and a second floating body part (224) which is elastically supported with respect to the first floating body part (223) so that a portion thereof protrudes to the outside of the first floating body part (223), and which elastically supports the second check ball (221) so that a portion of the second check ball (221) protrudes to the outside of the first floating body part (223).

Description

Auto coupler for utility supply

[0001] The present invention relates to an auto coupler for connecting utility pneumatics.

[0002] Typically, semiconductor manufacturing processes require various utilities such as air, nitrogen, vacuum, deionized water (DW), and power, and it is very important to ensure a smooth supply of utilities during the manufacturing process.

[0003] For example, in the semiconductor device packaging process, testers and handlers are used to electrically inspect individual semiconductor devices after assembly is complete. The handler receives electrical signals and performs mechanical movements to connect the semiconductor device to a contactor connected to the tester, thereby inspecting its electrical characteristics. Based on the inspection results, the handler classifies the semiconductor device as defective or defective and then unloads the semiconductor device onto a semiconductor package carrier, such as a tube or tray.

[0004] [Prior Art Literature]

[0005] [Patent Document]

[0006] Korean Patent Publication No. 10-2000-0015678 (Publication Date: March 15, 2000)

[0007] The present invention aims to provide an auto coupler for utility supply that can prevent leaks and stably establish pneumatic connection between a utility supply terminal and a utility receiving terminal for utility supply in a manufacturing facility.

[0008] To achieve the above object, the utility supply auto coupler of the present invention comprises: a first coupling member provided in either a utility supply end or a utility receiving end; a first valve body provided in the first coupling member and having a first check ball that is elastically supported and through which a flow path is opened and closed by the first check ball; a second coupling member provided in the other of the utility supply end or the utility receiving end and being coupled to the first coupling member; and a second valve body provided in the second coupling member and having a second check ball that is elastically supported and through which a flow path is opened and closed by the second check ball, wherein the second valve body comprises: a main body part; a first floating body part that is elastically supported with respect to the main body part; and a second floating body part that is elastically supported with respect to the first floating body part and a portion of the second check ball is provided to protrude outward from the first floating body part and elastically supports the second check ball so that a portion of the second check ball protrudes outward from the first floating body part.

[0009] Preferably, the second valve body is provided such that the second floating body portion protrudes by a certain height based on the contact surface of the first floating body portion that comes into contact with the first valve body, and the second check ball is provided such that it protrudes higher than the protrusion height of the second floating body portion.

[0010] Preferably, the first valve body and the second valve body further include a sealing member provided on at least one of the two facing contact surfaces to maintain sealing.

[0011] Preferably, it comprises a first elastic body that elastically supports the main body part and the first floating body part; a second elastic body that elastically supports the first floating body part and the second floating body part; and a third elastic body that elastically supports the second floating body part and the second check ball, wherein the first elastic body has a higher elastic modulus than the second elastic body, and the second elastic body has a higher elastic modulus than the third elastic body.

[0012] More preferably, the second valve body further includes a valve stem that is fixed to the second floating body portion and supports the third elastic body.

[0013] The utility supply auto coupler of the present invention comprises a first coupling member provided in one of a utility supply end and a utility receiving end, a first valve body provided in the first coupling member and having a first check ball that is elastically supported and through which a flow path is opened and closed by the first check ball, a second coupling member provided in the other of the utility supply end and the utility receiving end and being coupled to the first coupling member, and a second valve body provided in the second coupling member and having a second check ball that is elastically supported and through which a flow path is opened and closed by the second check ball, wherein the second valve body comprises a main body part, a first floating body part that is elastically supported with respect to the main body part, and a second floating body part that is elastically supported with respect to the first floating body part and provides a portion thereof protruding outward from the first floating body part and elastically supports the second check ball so that a portion thereof protrudes outward from the first floating body part, thereby minimizing the possibility of a leak that may occur when two valve bodies are connected. It has the effect of maintaining a stable pneumatic connection.

[0014] Figures 1 (a) and (b) are schematic diagrams showing the separated and connected states of an auto coupler for utility supply according to an embodiment of the present invention, respectively.

[0015] Fig. 2 is a cross-sectional diagram of an auto coupler for utility supply according to an embodiment of the present invention.

[0016] Figures 3 to 6 are cross-sectional diagrams showing the connection process of an auto coupler for utility supply according to an embodiment of the present invention.

[0017] The specific structural and functional descriptions presented in the embodiments of the present invention are merely illustrative for the purpose of explaining embodiments according to the concept of the present invention, and embodiments according to the concept of the present invention may be implemented in various forms. Furthermore, they should not be construed as being limited to the embodiments described herein, but should be understood to include all modifications, equivalents, and substitutes included within the spirit and technical scope of the present invention.

[0018] Hereinafter, the present invention will be described in detail with reference to the attached drawings.

[0019] Figures 1 (a) and (b) are schematic diagrams showing the separated and connected states of an auto coupler for utility supply according to an embodiment of the present invention, respectively.

[0020] Referring to (a)(b) of FIG. 1, an auto coupler (1) for utility supply according to an embodiment of the present invention includes a first coupling member (110), a first valve body (120), a second coupling member (210), and a second valve body (220).

[0021] The first coupling member (110) and the second coupling member (210) are provided at the utility receiving end and the utility supply end, respectively, and may include male and female coupling guide members. In the present embodiment, the coupling guide member shows a guide arm (211) protruding in the coupling direction from the second coupling member (120), and a guide groove (111) formed in the first coupling member (110) corresponding to the guide arm (211) and into which the guide arm (211) is inserted. This guide member may be modified into various shapes within a range in which the first coupling member (110) and the second coupling member (210) can be coupled. Meanwhile, although not shown, a separate locking member may be added that can mechanically fix or release the coupling state of the first coupling member (110) and the second coupling member (210).

[0022] The first valve body (120) is provided in the first flow path (112) of the first connecting member (110), and an elastically supported first check ball (121) is provided so that the flow path is opened and closed by the first check ball (121). Preferably, the first check ball (121) is elastically supported within the first valve body (120) so that at least a portion thereof protrudes outside the first valve body (120).

[0023] The second valve body (220) is provided in the second flow path (212) of the second connecting member (210), and an elastically supported second check ball (221) is provided so that the flow path is opened and closed by the second check ball (221). Preferably, the second check ball (221) is elastically supported within the second valve body (210) so that at least a portion thereof protrudes outside the second valve body (210).

[0024] When the first coupling member (110) and the second coupling member (210) maintain a state in which the first valve body (120) and the second valve body (220) are separated from each other, the air pressure is blocked by the check balls (121) (221) of each valve body (120) (220). Meanwhile, when the first coupling member (110) and the second coupling member (210) are coupled, the check balls (121) (221) of the first valve body (120) and the second valve body (220) are pushed inward, thereby connecting the supply and receiving ends of the utility (air pressure) to each other.

[0025] In particular, the present invention can minimize the possibility of a leak that may occur when the first valve body (120) and the second valve body (220) are connected by having a two-step contact process between the first valve body (120) and the second valve body (220).

[0026] Hereinafter, the configuration of each valve body, which is a key component of the present invention, will be described in detail with reference to the relevant drawings. Fig. 2 is a cross-sectional configuration diagram of an auto coupler for utility supply according to an embodiment of the present invention.

[0027] Referring to FIG. 2, the second valve body (220) includes a first check ball (221), a main body part (222), a first floating body part (223), and a second floating body part (224).

[0028] The main body part (222) is hollow and constitutes the main exterior of the second valve body and is assembled with the second connecting member. The main body part (222) is provided with a first elastic body (S1) that elastically supports the first floating body part (223), and a first catch (222a) that is formed by bending in the inner diameter direction is provided at the lower end of the main body part (222), and the first floating body part (223) that is inserted into the main body part (222) and elastically supported by the first elastic body (S1) is supported at the lower end by the first catch (222a). In the present embodiment, the first floating body part (223) is provided with a first flow path (212) therein.

[0029] The second floating body part (224) is inserted into the first floating body part (223) and elastically supported by the second elastic body (S2), and a second catch (222a) is provided at the outer opening end of the flow path to support the second check ball (221), and the diameter of the opening where the second catch (222a) is formed is smaller than the diameter of the second check ball (221).

[0030] This second floating body part (224) is elastically supported by the second elastic body (S2) and the first floating body part (223) so that a portion thereof protrudes outward from the first floating body part (223) by a certain height (d1), and a third elastic body (S3) is also provided to elastically support the second check ball (221) so that a portion of the second check ball (221) protrudes outward from the first floating body part (223).

[0031] Preferably, the second floating body part (224) further includes a first sealing member (225) for maintaining sealing on the contact surface that comes into contact with the first valve body (120). For example, the first sealing member (225) may be provided by a known O-ring. Meanwhile, in the present embodiment, the first sealing member (225) is provided on the second floating body part (224), but it may also be provided around the opening end of the first floating body part (223) to achieve sealing with the first valve body (120).

[0032] The second valve body (220) protrudes by a certain height (d1) based on the contact surface of the first floating body part (223) that comes into contact with the first valve body (120), and the second check ball (221) protrudes by a certain height (d2) higher than the protrusion height (d1) of the first floating body part (223) (d1) <d2).

[0033] Preferably, the second valve body (220) further includes a first valve stem (226) that is fixed to the first floating body part (223) and is arranged on the flow path to support the third elastic body (S3), and further includes a first guide stem (226a) that extends from the first valve stem (226) and into which a part of the third elastic body (S3) is inserted.

[0034] Preferably, the first elastic body (S1) has a larger elastic modulus than the second elastic body (S2), and the second elastic body (S3) has a larger elastic modulus than the third elastic body (S3). Therefore, when the second valve body (220) and the first valve body (120) come into contact, the third elastic body (S3), the second elastic body (S2), and the first elastic body (S1) are compressed in sequence, so that the second check ball (221) is inserted into the second floating body part (224) (third elastic body compression), and then the first floating body part (223) is inserted into the main body part (222) (second elastic body and third elastic body compression).

[0035] The first valve body (120) has a hollow shape and constitutes the main exterior of the first valve body, is assembled with the first connecting member, and preferably, a second sealing member (126) for maintaining the sealing of the first connecting member may be provided. The first valve body (120) is provided with a second catch (120a) that supports the first check ball (121) at the outer opening end of the flow path, and the diameter of the opening end where the second catch (120a) is formed is smaller than the diameter of the first check ball (121). The first valve body (120) further includes a second valve stem (124) that supports the fourth elastic body (S4), and may further include a second guide stem (124a) that extends from the second valve stem (124) and into which a part of the fourth elastic body (S4) is inserted.

[0036] The first valve body (120) is provided with a first check ball (121) protruding outward by a certain height (d3) based on the contact surface with the second valve body (220).

[0037] Preferably, the first valve body (120) further includes a valve body head (122) that is formed to protrude outwardly by being combined with the first coupling member, and the outer diameter (D1) of the valve body head (122) is smaller than the inner diameter (D2) of the opening end of the main body part (222).

[0038] Figures 3 to 6 are cross-sectional diagrams showing the connection process of an auto coupler for utility supply according to an embodiment of the present invention.

[0039] The connection process of the utility supply auto coupler of the present invention configured as described above is described with reference to FIGS. 3 and 6, and for the purpose of facilitating understanding, the first valve body (120) is fixed and the second valve body (220) is moved so that the first valve body (120) and the second valve body (220) are connected.

[0040] As illustrated in FIGS. 3 and 4, the second valve body (220) moves downwards, the first check ball (121) and the second check ball (221) come into contact and are pushed against each other (see FIG. 3), and as the second elastic body (S2) and the fourth elastic body (S4) are compressed, the first check ball (121) and the second check ball (221) are drawn into the inside of the first valve body (120) and the second floating body (224), respectively, and the flow paths of the first valve body (120) and the second valve body (220) begin to be connected (see FIG. 4). Meanwhile, in a state where the first check ball (121) and the second check ball (221) are fully inserted into the first valve body (120) and the second floating body part (224), the valve body head (122) and the upper surface and the lower surface of the second floating body part (224) are in close contact.

[0041] Next, as illustrated in FIGS. 5 and 6, as the second valve body (220) continues to move downward, the first elastic body (S2) is compressed, the second floating body part (224) is introduced into the first floating body part (223), and the first floating body part (223) is introduced into the main body part (222), so that the flow paths of the first valve body (120) and the second valve body (220) are completely connected. Meanwhile, in a state where the flow paths of the first valve body (120) and the second valve body (220) are connected, the sealing effect can be enhanced by the first sealing member (225) provided between the contact surfaces of the first valve body (120) and the floating body part (223).

[0042] The disconnection of the first valve body (120) and the second valve body (220) is carried out in the reverse order of the connection process, and as the first valve body (120) and the second valve body (220) fall, each check ball (121) (221) is pulled outward, thereby blocking the flow path of each valve body (120) (220).

[0043] Meanwhile, in the present embodiment, the first coupling member (110) provided with the first valve body (120) and the second coupling member (210) provided with the second valve body (220) are described as being provided at the utility receiving end and the utility supply end, respectively, but they may be arranged in reverse, and one of the first coupling member (110) and the second coupling member (210) may be fixed and the other may move so that the first valve body (120) and the second valve body (210) are connected, or the first coupling member (110) and the second coupling member (210) may move together so that the first valve body (120) and the second valve body (210) are connected.

[0044] The present invention described above is not limited to the above-described embodiments and the attached drawings, and it will be apparent to a person skilled in the art to which the present invention pertains that various substitutions, modifications, and changes are possible within a scope that does not depart from the technical spirit of the present invention.

[0045] [Explanation of symbols]

[0046] 1: Auto coupler for utility supply

[0047] 110: First connecting member 120: First valve body

[0048] 121: First check ball 210: Second connecting member

[0049] 220: Second valve body 221: Second check ball

[0050] 222: Main body 223: First floating body

[0051] 224: Second floating body part S1: First elastic body

[0052] S2: Second elastic body S3: Third elastic body

[0053] S4: Fourth elastic body

Claims

1. A first coupling member provided in either a utility supply terminal or a utility receiving terminal; A first valve body provided in the first connecting member and having an elastically supported first check ball, and in which the opening and closing of the flow path is performed by the first check ball; A second coupling member provided on one of the utility supply terminals or the utility receiving terminals and coupled to the first coupling member; A second valve body is provided in the second connecting member and has a second check ball that is elastically supported, and the opening and closing of the flow path is performed by the second check ball. The above second valve body, Main body and; A first floating body part elastically supported on the main body part; An auto coupler for utility supply, comprising a second floating body part that is elastically supported on the first floating body part and a portion thereof protrudes outside the first floating body part, and elastically supports the second check ball so that a portion of the second check ball protrudes outside the first floating body part.

2. In the first paragraph, the second valve body is characterized in that the second floating body part protrudes by a certain height based on the contact surface of the first floating body part that comes into contact with the first valve body, and the second check ball is provided to protrude higher than the protrusion height of the second floating body part.

3. An auto coupler for utility supply, wherein the first valve body and the second valve body further include a sealing member for maintaining sealing provided on at least one of the two facing contact surfaces.

4. In the first paragraph, it includes a first elastic body that elastically supports the main body part and the first floating body part; a second elastic body that elastically supports the first floating body part and the second floating body part; and a third elastic body that elastically supports the second floating body part and the second check ball. An auto coupler for utility supply, characterized in that the first elastic body has a greater elastic modulus than the second elastic body, and the second elastic body has a greater elastic modulus than the third elastic body.

5. In paragraph 4, the second valve body, An auto coupler for utility supply further comprising a valve stem fixed to the second floating body portion to support the third elastic body.

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