Adapter device and manipulator

Abstract

An adapter device (100), comprising a bearing component (10), a driving wheel (20), and a driven wheel (30), wherein the driving wheel is arranged on the bearing component; the adapter device is connected to a manipulator by means of the driving wheel, and the manipulator can drive the driving wheel to rotate; the driven wheel is arranged on the bearing component and is connected to the driving wheel; by means of the driven wheel, the adapter device is connected to an object to be transported, and the driving wheel can drive the driven wheel to rotate so as to rotationally adjust said object; the width of the adapter device is less than the width of the manipulator. Also provided is a manipulator comprising the adapter device. Use of the adapter device can enable the manipulator to stretch into a narrow space to grab an object, thereby improving the use capability of the manipulator in the narrow space, and meeting the object transportation requirement under more working conditions.

Description

Transfer device and manipulator

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to Chinese patent application 202420369754.3, filed on February 28, 2024, entitled “Transfer device and robot arm,” the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present application relates to the field of semiconductor manufacturing technology, and in particular to a transfer device and a manipulator. Background Art

[0004] In the production and manufacturing process of semiconductors, it is often necessary to use robots to move semiconductor equipment, that is, to move the robots to the position where manual loading and unloading are performed, thereby saving manual labor to a great extent.

[0005] However, the interaction space of current semiconductor equipment is small. Ordinary robots are too large to reach the manual loading and unloading locations, and cannot reliably connect with the objects to be transported. As a result, they cannot grab items in narrow spaces, making it impossible for the robots to play a role in transportation.

[0006] Utility Model Content

[0007] The embodiments of the present application provide a transfer device and a manipulator, which enable the manipulator to reach into a narrow space to grab objects, thereby improving the manipulator's ability to be used in narrow spaces and meeting the needs of object transportation under more working conditions.

[0008] On the one hand, according to an embodiment of the present application, a transfer device is proposed, which is used to connect between a manipulator and an object to be transported. The transfer device includes a carrier, a driving wheel and a driven wheel. The driving wheel is arranged on the carrier, and the transfer device is connected to the manipulator through the driving wheel, and the manipulator can drive the driving wheel to rotate; the driven wheel is arranged on the carrier and connected to the driving wheel, and the transfer device is connected to the object to be transported through the driven wheel, and the driving wheel can drive the driven wheel to rotate to rotate and adjust the object to be transported; wherein, the width of the transfer device is smaller than the width of the manipulator.

[0009] According to one aspect of the embodiment of the present application, the adapter includes a connecting member connected between the driving wheel and the driven wheel, and the driving wheel can drive the connecting member to move to drive the driven wheel to rotate.

[0010] According to one aspect of an embodiment of the present application, the connecting member includes a conveyor belt, which is respectively sleeved on the driving wheel and the driven wheel. The driving wheel can drive the conveyor belt to move around the driving wheel to drive the driven wheel to rotate.

[0011] According to one aspect of the embodiment of the present application, the driving wheel includes a first gear, the driven wheel includes a second gear, and the first gear is meshed with the second gear.

[0012] According to one aspect of the embodiment of the present application, a first connection hole is provided on the driving wheel, and the driving wheel is bolted to the manipulator through the first connection hole.

[0013] According to one aspect of the embodiment of the present application, a positioning hole is provided on the driving wheel, the positioning hole and the first connecting hole are spaced apart from each other, and the positioning hole is configured to enable the driving wheel to dock with the manipulator.

[0014] According to one aspect of the embodiments of the present application, a second connecting hole is provided on the driven wheel, and the driven wheel is bolted to the object to be transported through the second connecting hole.

[0015] According to one aspect of an embodiment of the present application, the transfer device includes a conductive component, which includes a fixed ring and a rotating ring connected to each other. The conductive component is connected to the carrier through the fixed ring and is connected to the driven wheel through the rotating ring. The rotating ring can rotate following the driven wheel, and the driven wheel is connected to the object to be transported through the rotating ring.

[0016] According to one aspect of the embodiment of the present application, the length of the adapter device is 250-275 mm, the width is 120-150 mm, and the height is 30-38 mm.

[0017] On the other hand, according to an embodiment of the present application, a robot is provided, comprising the adapter device as described above.

[0018] The embodiment of the present application provides a transfer device and a manipulator, which connects the transfer device between the manipulator and the object to be transported, specifically connects the driving wheel in the transfer device to the manipulator and connects the driven wheel to the object to be transported, and uses the driving wheel and driven wheel in the transfer device to adjust the object during the transportation process to complete the transportation of the object. By making the overall width of the transfer device smaller than the width of the manipulator, the manipulator can extend into a narrow space through the transfer device to interact with the equipment, and then use the adjustment performance of the transfer device to complete the transportation of objects in the narrow space, thereby improving the application range of the manipulator, meeting the needs of object transportation in more spaces, and fully saving manual labor. At the same time, the manipulator's own power is used to achieve drive, and there is no need for additional driving force, which saves power energy, has higher adjustability, and is convenient for installation and application by staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The features, advantages and technical effects of exemplary embodiments of the present application will be described below with reference to the accompanying drawings.

[0020] FIG1 is a schematic structural diagram of a switching device according to an embodiment of the present application;

[0021] FIG2 is a schematic structural diagram of a switching device according to an embodiment of the present application;

[0022] FIG3 is a top view of the adapter device according to an embodiment of the present application;

[0023] FIG4 is a side view of the adapter device according to an embodiment of the present application.

[0024] Reference numerals: 100 - adapter; 10 - carrier; 20 - driving wheel; 30 - driven wheel; 40 - connecting member; 21 - first connecting hole; 22 - positioning hole; 31 - second connecting hole; 50 - conductive component; 51 - fixing ring; 52 - rotating ring.

[0025] In the drawings, like parts are given like reference numerals, but the drawings are not necessarily drawn to scale. DETAILED DESCRIPTION

[0026] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the detailed description below, many specific details are set forth in order to provide a comprehensive understanding of the present application. However, it will be apparent to those skilled in the art that the present application can be implemented without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by illustrating examples of the present application. In the accompanying drawings and the following description, at least some of the well-known structures and technologies are not shown in order to avoid unnecessary ambiguity in the present application; and, for clarity, the sizes of some structures may be exaggerated. In addition, the features, structures, or characteristics described below may be combined in any suitable manner in one or more embodiments.

[0027] The directional words appearing in the following description are all directions shown in the figures, and do not limit the specific structure of the adapter and manipulator of this application. In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0028] The following embodiments of the present application only illustrate the transfer device by using a robot to transport a crystal boat as an example, but the application of the transfer device of the embodiments of the present application is not limited to the following embodiments, and can also be installed on objects to be transported in other fields to protect them.

[0029] In order to better understand the present application, the switching device and the manipulator of the embodiment of the present application are described in detail below with reference to Figures 1 to 4.

[0030] Please refer to Figure 1. According to an embodiment of the present application, a transfer device 100 is proposed. The transfer device 100 is used to connect between a manipulator and an object to be transported. The transfer device 100 includes a carrier 10, a driving wheel 20 and a driven wheel 30. The driving wheel 20 is arranged on the carrier 10. The transfer device 100 is connected to the manipulator through the driving wheel 20, and the manipulator can drive the driving wheel 20 to rotate; the driven wheel 30 is arranged on the carrier 10 and connected to the driving wheel 20. The transfer device 100 is connected to the object to be transported through the driven wheel 30, and the driving wheel 20 can drive the driven wheel 30 to rotate to rotate and adjust the object to be transported; wherein, the width of the transfer device 100 is smaller than the width of the manipulator.

[0031] In the process of using a robot to transport objects, the adapter device 100 in this embodiment can be installed on the robot. Optionally, the adapter device 100 can be detachably connected to the robot, so as to facilitate the staff to disassemble and assemble the adapter device 100. For example, a bolt connection method can be used. This application does not specifically limit the specific connection method between the adapter device 100 and the robot.

[0032] Similarly, during the transportation process, the other end of the adapter 100 is connected to the object to be transported, so that the robot is indirectly connected to the object to be transported through the adapter 100 to realize the transportation of the object. The adapter 100 and the object to be transported can also be connected by bolts to facilitate disassembly and assembly by the staff.

[0033] As for the specific structure of the adapter 100, the driving wheel 20 and the driven wheel 30 need to be arranged on the carrier 10. Optionally, the carrier 10 can adopt a plate-like structure. The adapter 100 is connected to the manipulator through the driving wheel 20. The power source is the end shaft of the manipulator. The end of the manipulator provides power to the driving wheel 20, so that it can rotate on the carrier 10, thereby driving the driven wheel 30 connected thereto to complete the rotation.

[0034] Since the transfer device 100 is connected to the object to be transported through the driven wheel 30, when the driven wheel 30 is driven by the driving wheel 20, it can further drive the object connected to it to rotate. Optionally, it can specifically realize 360° rotation adjustment of the object, has better adjustment capabilities, meets more transportation conditions, and enables the manipulator to have better adjustment flexibility through the transfer device 100 at the end.

[0035] Among them, the driving wheel 20 and the driven wheel 30 on the carrier 10 can be connected and cooperated with each other to achieve common rotation. This application does not specifically limit the connection relationship between the driving wheel 20 and the driven wheel 30. It is sufficient that the driving wheel 20 can drive the driven wheel 30 to rotate. It should be noted that the power source in the adapter 100 provided in this embodiment is a manipulator.

[0036] Optionally, the object to be transported proposed in this embodiment can be a wafer boat in the semiconductor field. Of course, objects in other fields can also be transported according to different actual needs. This application does not specifically limit the type of object to be transported.

[0037] Due to the large size of the manipulator, the manipulator cannot directly move objects in a narrow space. Therefore, the adapter device 100 provided in this embodiment is smaller than the width of the manipulator, so that the manipulator can use the adapter device 100 to reach into the narrow space and connect with the object. The staff can connect the two ends of the adapter device 100 to the manipulator and the object respectively, thereby realizing an indirect connection between the manipulator and the object.

[0038] Optionally, the present application does not impose any special restrictions on the specific size of the adapter 100, as long as its size is smaller than that of the robot arm and can be inserted into a narrow space to connect objects.

[0039] The embodiment of the present application provides a transfer device 100, which connects the transfer device 100 between the manipulator and the object to be transported, specifically connects the driving wheel 20 in the transfer device 100 to the manipulator and connects the driven wheel 30 to the object to be transported, and uses the driving wheel 20 and the driven wheel 30 in the transfer device 100 to adjust the object during the transportation process to complete the transportation of the object. By making the overall width of the transfer device 100 smaller than the width of the manipulator, the manipulator can extend into a narrow space through the transfer device 100 to interact with the equipment, and then use the adjustment performance of the transfer device 100 to complete the transportation of objects in the narrow space, thereby improving the application range of the manipulator, meeting the demand for object transportation in more spaces, and fully saving manual labor. At the same time, the manipulator's own power is used to achieve drive, and there is no need for additional driving force, which saves power energy, has higher adjustability, and is convenient for installation and application by staff.

[0040] As an optional embodiment, please refer to FIG. 1 , the adapter 100 includes a connecting member 40 , which is connected between the driving wheel 20 and the driven wheel 30 . The driving wheel 20 can drive the connecting member 40 to move so as to drive the driven wheel 30 to rotate.

[0041] In this embodiment, a connecting member 40 is used to connect between the driving wheel 20 and the driven wheel 30. On the basis of achieving the connection between the driving wheel 20 and the driven wheel 30, the connecting member 40 can also be used to transmit power between the two wheels, which has a better transmission effect.

[0042] When the driving wheel 20 starts to rotate due to the power of the manipulator, the driving wheel 20 will first transmit the power to the connecting part 40. When the connecting part 40 moves, it will drive the driven wheel 30 connected to it to rotate synchronously, realizing the common rotation of the two wheels, and then the object connected to the driven wheel 30 can be rotated and adjusted. The rotation adjustment can be multi-angle adjustment, which can be clockwise or counterclockwise adjustment.

[0043] Optionally, the connecting member 40 may be a rod-shaped structure or a belt-shaped structure. The present application does not impose any special restrictions on the specific structure of the connecting member 40, as long as it can connect and transmit the two wheels at the same time.

[0044] An embodiment of the present application provides a transfer device 100, which provides a connecting member 40 between the driving wheel 20 and the driven wheel 30. On the basis of ensuring that the two wheels are connected to form a structural whole, the connecting member 40 is used to complete the power transmission process of the driving wheel 20. The transmission of the connecting member 40 has better structural stability, which can not only realize the rotation of the driven wheel 30, but also make the overall structure more stable during operation and have better safety performance.

[0045] As an optional embodiment, the connecting member 40 includes a conveyor belt, which is respectively sleeved on the driving wheel 20 and the driven wheel 30. The driving wheel 20 can drive the conveyor belt to move around the driving wheel 20 to drive the driven wheel 30 to rotate.

[0046] In this embodiment, the connecting member 40 is configured as a conveyor belt structure, and the conveyor belt can simultaneously surround the periphery of the driving wheel 20 and the driven wheel 30. The driving wheel 20 and the driven wheel 30 are spaced apart on the carrier 10 and simultaneously support the conveyor belt.

[0047] When the driving wheel 20 receives the power provided by the end of the manipulator and starts to rotate, it will drive the conveyor belt surrounding the periphery to rotate as a whole, and then drive the surrounding driven wheel 30 to start rotating. After the driven wheel 30 rotates, it will drive the object connected to it to rotate together, thereby realizing the transportation and adjustment of the object.

[0048] An embodiment of the present application provides a transfer device 100, which sets the connecting member 40 in the structural form of a conveyor belt. While the driving wheel 20 and the driven wheel 30 are connected by the conveyor belt, the power is transmitted through the conveyor belt. At the same time, the conveyor belt has a certain flexibility, which can ensure the adjustment margin of the conveyor belt during the transmission process, making the transmission process safer and more stable, and the overall structure has better safety performance.

[0049] As an optional embodiment, the driving wheel 20 includes a first gear, the driven wheel 30 includes a second gear, and the first gear is meshed with the second gear.

[0050] This embodiment provides a transmission form by utilizing gear meshing, that is, the driving wheel 20 and the driven wheel 30 are respectively set to the gear structure. After the driving wheel 20 receives the power from the end of the manipulator, the transmission process with the driven wheel 30 is realized through the gear, so that the two wheels rotate synchronously during the rotation adjustment process.

[0051] It should be noted that, considering that the adapter 100 in this embodiment needs to pass through a narrow space and transport objects, the driving wheel 20 and the driven wheel 30 in the adapter 100 need to use small-sized gears to ensure that the carrier 10 can carry the driving wheel 20 and the driven wheel 30, so that the overall size of the adapter 100 meets the small size requirements of the narrow space. On this basis, this application does not make any special restrictions on the specific structural form of the gears.

[0052] An embodiment of the present application provides a transfer device 100, which provides another transmission method by configuring the driving wheel 20 and the driven wheel 30 to be in the form of a gear structure. The structural components are simple and can also form a stable transmission effect, thereby realizing the rotation adjustment of the object to be transported.

[0053] As an optional embodiment, please refer to FIG. 1 , a first connection hole 21 is provided on the driving wheel 20 , and the driving wheel 20 is bolted to the manipulator via the first connection hole 21 .

[0054] This embodiment provides a detachable connection method between the adapter device 100 and the manipulator. Specifically, a first connection hole 21 is set on the driving wheel 20. The first connection hole 21 serves as a threaded hole to facilitate bolt insertion. This application does not specifically limit the number, size and setting position of the first connection hole 21. It can be determined according to actual conditions to ensure that a stable connection can be formed with the end of the manipulator.

[0055] When the adapter 100 in this embodiment is needed to transport an object, a worker can manually install the adapter 100 on the end of the manipulator using bolts to facilitate subsequent disassembly and assembly.

[0056] An embodiment of the present application provides a transfer device 100, which forms a bolt connection with the end of the manipulator by utilizing the first connection hole 21 on the drive wheel 20, thereby achieving the detachability between the transfer device 100 and the manipulator, making it easier for staff to complete the disassembly and assembly operations, having better operational convenience, and flexibly realizing the installation of the transfer device 100.

[0057] As an optional embodiment, referring to FIG. 1 , a positioning hole 22 is provided on the driving wheel 20 . The positioning hole 22 and the first connecting hole 21 are spaced apart from each other. The positioning hole 22 is configured to enable the driving wheel 20 to dock with the manipulator.

[0058] Taking into account the need to accurately dock the driving wheel 20 with the end of the manipulator so that the end of the manipulator can provide power to the driving wheel 20, a number of positioning holes 22 are set on the driving wheel 20 in this embodiment. The positioning holes 22 need to be spaced apart from the above-mentioned first connecting holes 21, so that the staff can use the positioning holes 22 to complete the precise docking with the manipulator, ensuring that the manipulator can provide stable and continuous driving force to the driving wheel 20.

[0059] An embodiment of the present application provides a transfer device 100, which can facilitate the staff to complete the installation with the robot by further setting a positioning hole 22 spaced apart from the first connection hole 21 on the driving wheel 20, thereby improving the installation efficiency of the transfer device 100 and the robot, having better operational convenience, preventing the situation where the transfer device 100 cannot be docked with the robot, and making the connection between the structures more reliable.

[0060] As an optional embodiment, referring to FIG. 1 , a second connecting hole 31 is provided on the driven wheel 30 , and the driven wheel 30 is bolted to the object to be transported through the second connecting hole 31 .

[0061] This embodiment provides a detachable connection method between the adapter 100 and the object to be transported. Specifically, a second connection hole 31 is set on the driven wheel 30. The second connection hole 31 serves as a threaded hole to facilitate bolt insertion. This application does not impose any special restrictions on the number, size and setting position of the second connection hole 31. It can be determined according to actual conditions to ensure that a stable connection can be formed with the object to be transported.

[0062] When the adapter 100 in this embodiment is needed to transport the object to be transported, the staff can manually install the adapter 100 on the object to be transported using bolts to facilitate subsequent disassembly and assembly.

[0063] An embodiment of the present application provides a transfer device 100, which forms a bolt connection with the object to be transported by utilizing the second connection hole 31 on the driven wheel 30, thereby achieving the detachability between the transfer device 100 and the object to be transported, making it easier for staff to complete the disassembly and assembly operations, having better operational convenience, and flexibly realizing the installation of the transfer device 100.

[0064] As an optional embodiment, please refer to Figures 1 to 4. The transfer device 100 includes a conductive component 50, which includes a fixed ring 51 and a rotating ring 52 connected to each other. The conductive component 50 is connected to the carrier 10 through the fixed ring 51 and is connected to the driven wheel 30 through the rotating ring 52. The rotating ring 52 can rotate with the driven wheel 30, and the driven wheel 30 is connected to the object to be transported through the rotating ring 52.

[0065] Optionally, the conductive component 50 can be a conductive slip ring structure, and the adapter 100 can transmit current through the conductive component 50. The conductive component 50 can transmit current to the electric control box body, thereby controlling the box body to clamp the wafer boat, making it easier to transport and adjust the wafer boat.

[0066] Specifically, the driven wheel 30 on the carrier 10 is connected to the rotating ring 52 in the conductive component 50. The rotation of the driven wheel 30 can drive the rotating ring 52 to rotate synchronously, and is connected to the object through the rotating ring 52. The fixed ring 51 is mainly connected to the carrier 10 and can conduct external current to realize electrical control adjustment of the object to be transported.

[0067] An embodiment of the present application provides a transfer device 100, which disposes a conductive component 50 on the carrier 10, forms a rotational fit with the driven wheel 30 by using a rotating ring 52, and connects to the carrier 10 by using a fixed ring 51 and conducts electricity to the electric control box transferred in the middle, thereby realizing the electric control of the object to be transported and automating the control of the object's transportation process.

[0068] As an optional embodiment, the adapter 100 has a length of 250-275 mm, a width of 120-150 mm, and a height of 30-38 mm.

[0069] An embodiment of the present application provides a transfer device 100. By controlling the various dimensions of the transfer device 100 within the above-mentioned numerical range, it can ensure that the transfer device 100 can be extended into a narrow space to transport objects. On the basis of forming a stable connection with the manipulator, it can realize the transportation of objects in a small space, has better spatial adaptability, and meets the usage requirements in different environments.

[0070] According to an embodiment of the present application, a robot is provided, comprising the adapter device 100 as described above.

[0071] The embodiment of the present application provides a transfer device and a manipulator, which connects the transfer device between the manipulator and the object to be transported, specifically connects the driving wheel in the transfer device to the manipulator and connects the driven wheel to the object to be transported, and uses the driving wheel and driven wheel in the transfer device to adjust the object during the transportation process to complete the transportation of the object. By making the overall width of the transfer device smaller than the width of the manipulator, the manipulator can extend into a narrow space through the transfer device to interact with the equipment, and then use the adjustment performance of the transfer device to complete the transportation of objects in the narrow space, thereby improving the application range of the manipulator, meeting the needs of object transportation in more spaces, and fully saving manual labor. At the same time, the manipulator's own power is used to achieve drive, and there is no need for additional driving force, which saves power energy, has higher adjustability, and is convenient for installation and application by staff.

[0072] Although the present application has been described with reference to preferred embodiments, various modifications may be made thereto and components may be substituted with equivalents without departing from the scope of the present application. In particular, the various technical features described in the various embodiments may be combined in any manner as long as there are no structural conflicts. The present application is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.

Claims

1. A switching device, wherein: The transfer device is used to connect between the manipulator and the object to be transported, and the transfer device includes: bearing members; A driving wheel is provided on the carrier, the adapter is connected to the manipulator via the driving wheel, and the manipulator can drive the driving wheel to rotate; A driven wheel is provided on the carrier and connected to the driving wheel, the transfer device is connected to the object to be transported via the driven wheel, and the driving wheel can drive the driven wheel to rotate to rotate and adjust the object to be transported; Wherein, the width of the adapter device is smaller than the width of the manipulator.

2. The switching device according to claim 1, wherein: The transfer device includes a connecting member connected between the driving wheel and the driven wheel. The driving wheel can drive the connecting member to move so as to drive the driven wheel to rotate.

3. The switching device according to claim 2, wherein: The connecting member includes a conveyor belt, which is respectively sleeved on the driving wheel and the driven wheel. The driving wheel can drive the conveyor belt to move around the driving wheel to drive the driven wheel to rotate.

4. The switching device according to claim 1, wherein: The driving wheel includes a first gear, the driven wheel includes a second gear, and the first gear is meshed with the second gear.

5. The switching device according to claim 1, wherein: The driving wheel is provided with a first connecting hole, and the driving wheel is bolted to the manipulator through the first connecting hole.

6. The switching device according to claim 5, wherein: A positioning hole is provided on the driving wheel, the positioning hole and the first connecting hole are spaced apart from each other, and the positioning hole is configured to enable the driving wheel to dock with the manipulator.

7. The switching device according to claim 1, wherein: The driven wheel is provided with a second connecting hole, and the driven wheel is bolted to the object to be transported through the second connecting hole.

8. The switching device according to claim 1, wherein: The transfer device includes a conductive component, which includes a fixed ring and a rotating ring connected to each other. The conductive component is connected to the carrier through the fixed ring and is connected to the driven wheel through the rotating ring. The rotating ring can rotate following the driven wheel, and the driven wheel is connected to the object to be transported through the rotating ring.

9. The switching device according to claim 1, wherein: The adapter has a length of 250-275 mm, a width of 120-150 mm, and a height of 30-38 mm.

10. A robot arm, wherein: The invention comprises a switching device according to any one of claims 1 to 9.

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