Positioning fixture for coating / developing device

Abstract

A positioning fixture for a coating / developing device, comprising a base (9) and a positioning assembly. The base (9) comprises a guide member (902) extending in a first direction and a guide portion extending in a second direction, and the guide member (902) comprises a positioning sleeve (9022); and the positioning assembly comprises a first positioning component (10) and a second positioning component (11), the first positioning component (10) and the second positioning component (11) are both movably connected to the guide portion in the second direction, the first positioning component (10) is provided with a positioning pin (102), the second positioning component (11) is provided with a first positioning surface (111) and an auxiliary positioning side, and the first positioning surface (111) and the auxiliary positioning side intersect. According to such a positioning fixture for a coating / developing device, the positioning of an outer cup air cylinder (7) to be replaced can be rapidly completed, thereby greatly improving the replacement efficiency of the outer cup air cylinder (7).

Description

Positioning tooling for coating and developing equipment

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to Chinese patent application No. 202420356807.8, filed on February 27, 2024, entitled “Positioning tooling for glue coating and developing equipment,” the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present application relates to the technical field of chip processing equipment, and in particular to a positioning tool for a coating and developing device. Background Art

[0004] Resin coating and developing equipment, including coating, baking, and developing equipment used alongside lithography equipment during the photolithography process, includes coaters, sprayers, and developers. These equipment typically operate in conjunction with lithography equipment to form a complete wafer processing and lithography production line, collaborating with the lithography equipment to complete the precise lithography process.

[0005] The developer generally includes a chuck, an inner cup, an under cup and an outer cup, wherein a center hole is provided at the center of the surface of the chuck. The chuck is used to carry and adsorb the wafer to be coated with glue so that the wafer and the carrier are relatively fixed. After the wafer surface is coated with glue, the chuck can drive the wafer to rotate so that the glue is evenly distributed on the wafer surface; the inner cup is used to drain the glue thrown out when the wafer rotates; the under cup is used to collect the glue drained by the inner cup; the outer cup is arranged above the under cup, and an avoidance hole is provided in the middle of the outer cup. The diameter of the avoidance hole is larger than the diameter of the wafer. A convex edge is provided at the bottom of the outer cup, and a cylindrical hole for accommodating the convex edge is provided above the under cup. The outer peripheral surface of the convex edge and the inner peripheral surface of the cylindrical hole are clearance-matched.

[0006] Slide sleeves and outer cup cylinders are respectively arranged below the two opposite sides of the top of the outer cup. The slide sleeves and outer cup cylinders are respectively fixedly installed on the workbench. The surface of the workbench is flat. A slide rod is fixedly connected to the bottom of one side of the top of the outer cup. The slide rod is slidably connected to the slide sleeve. The other side of the top of the outer cup is fixedly connected to the piston rod of the outer cup cylinder. The piston rod of the outer cup cylinder drives the outer cup to move along the axial direction of the slide rod.

[0007] Due to the need to ensure movement accuracy, the outer cup cylinder needs to use a double-rod cylinder. The bottom of the double-rod cylinder is close to the workbench. The double-rod cylinder also includes four cylinder side surfaces connected end to end. The cylinder side surfaces are all perpendicular to the bottom of the cylinder. Some components of the developing machine must meet the following requirements: the axis of the sliding rod, the axis of the center hole and the axes of the two piston rods of the double-rod cylinder are parallel; the distance from the axis of the sliding rod to the axis of the center hole is the same as the distance from the axis of the center hole to the plane where the axes of the two piston rods of the double-rod cylinder are located; the plane where the axis of the sliding rod and the axis of the center hole are located is perpendicular to the plane where the axes of the two piston rods of the double-rod cylinder are located.

[0008] The piston rod of a double-rod cylinder rubs against the cylinder body during movement. Over extended periods of operation, this friction can reduce the cylinder's precision, leading to friction between the outer cup's lip and the base cup. Therefore, double-rod cylinders require regular replacement to maintain the precision of both the cylinder and the outer cup.

[0009] The overall structure of the developing machine is relatively compact. In order to ensure the accurate positioning of the outer cup cylinder and avoid friction between the convex edge of the outer cup and the bottom cup when the outer cup cylinder drives the outer cup to move, experienced staff are required to make repeated adjustments. Currently, each replacement of the outer cup cylinder takes more than 3 hours, and the replacement efficiency is extremely low.

[0010] Utility Model Content

[0011] The embodiment of the present application provides a positioning tool for a glue coating and developing device, which can quickly complete the positioning of the outer cup cylinder to be replaced, greatly improving the replacement efficiency of the outer cup cylinder.

[0012] In the first aspect, an embodiment of the present application provides a positioning tool for a glue coating and developing device, which is used to position the outer cup cylinder of the developing machine of the glue coating and developing device, including: a base, including a guide member extending along a first direction and a guide portion extending along a second direction, the guide member including a positioning sleeve for rotatably connecting to a sliding sleeve of the developing machine, the first direction being perpendicular to the second direction; a positioning assembly, including a first positioning component and a second positioning component, the first positioning component being located between the guide member and the second positioning component, the first positioning component and the second positioning component being both movably connected to the guide portion along the second direction, the first positioning component being provided with a positioning pin for being inserted into the center hole of the developing machine, the axis of the positioning pin being parallel to the first direction, the second positioning component being provided with a first positioning surface and an auxiliary positioning side, the first positioning surface and the auxiliary positioning side being intersectingly arranged, the plane in which the axis of the positioning sleeve and the axis of the positioning pin are located is perpendicular to the first positioning surface, the first positioning surface and the auxiliary positioning side are respectively used to abut against two adjacent cylinder body sides of the outer cup cylinder.

[0013] In some embodiments, the guide member further includes a first guide column distributed successively with the positioning sleeve, and a sleeve hole is provided at one end of the positioning sleeve facing away from the first guide column so as to be sleeved on the sliding sleeve.

[0014] In some embodiments, a first screw is threadedly connected to the side wall of the positioning sleeve, and a threaded hole on the positioning sleeve for connecting the first screw is connected to the sleeve hole.

[0015] In some embodiments, the base further includes a first frame, the first frame is movably connected to the first guide post along a first direction, and the first frame is movably connected to the guide portion along a second direction.

[0016] In some embodiments, the guide portion includes a second guide column, the first frame, the first positioning assembly and the second positioning assembly are all provided with connection holes, and the first frame, the first positioning assembly and the second positioning assembly are all connected to the second guide column through corresponding connection holes.

[0017] In some embodiments, the auxiliary positioning side is a busbar of the second guide post close to the first positioning surface.

[0018] In some embodiments, the number of the second guide pillars is two, and the two second guide pillars are spaced apart and distributed along a third direction, and the third direction is perpendicular to both the first direction and the second direction.

[0019] In some embodiments, the spacing between the two second guide posts is the same as the width of the outer cup cylinder to be positioned.

[0020] In some embodiments, the first positioning assembly is further provided with a second positioning surface to abut against the upper surface of the carrier plate of the developer, the positioning pin is protruded from the second positioning surface, and the second positioning surface is perpendicular to the first direction.

[0021] In some embodiments, the first positioning surface is located at a position where the second positioning component faces away from the first positioning component.

[0022] The positioning tooling for the coating and developing equipment of the embodiment of the present application includes a base and a positioning assembly, wherein the base includes a guide extending along a first direction and a guide portion extending along a second direction, the guide portion includes a positioning sleeve, and the first direction is perpendicular to the second direction; the positioning assembly includes a first positioning component and a second positioning component, and the first positioning component and the second positioning component are both movably connected to the guide portion along the second direction, that is, when the positioning assembly is in the first state, the first positioning component and the second positioning component can both move relative to the guide portion along the second direction; when the positioning assembly is in the second state, the first positioning component, the second positioning component and the guide portion remain relatively fixed, a positioning pin is provided on the first positioning component, and the axis of the positioning pin is parallel to the first direction, and a first positioning surface and an auxiliary positioning side are provided on the second positioning component, the first positioning surface and the auxiliary positioning side are intersectingly arranged, and the plane where the axis of the positioning sleeve and the axis of the positioning pin are located is perpendicular to the first positioning surface. When the positioning assembly is in the first state, the staff can pre-adjust the distance between the guide, the first positioning component and the second positioning component to a preset size outside the developer, which is easy to operate and will not be restricted by the compact structure of the developer; when the positioning assembly is adjusted to the second state, the positioning sleeve is rotatably connected to the sliding sleeve, the positioning pin is inserted into the center hole, and the bottom surface of the cylinder body is abutted against the workbench. By respectively abutting the two adjacent cylinder body sides of the outer cup cylinder to the first positioning surface and the auxiliary positioning side, the positioning of the outer cup cylinder to be replaced can be quickly completed, which greatly improves the replacement efficiency of the outer cup cylinder, and the above positioning process can be completed by ordinary personnel, and the work experience requirements of the staff are relatively low. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0024] FIG1 is a schematic structural diagram of a developer of a prior art glue coating and developing device;

[0025] FIG2 is a schematic structural diagram of a positioning tool for a coating and developing device according to an embodiment of the present application;

[0026] FIG3 is a schematic structural diagram from another perspective of a positioning tool for a gluing and developing device provided in an embodiment of the present application;

[0027] FIG4 is a schematic diagram of the coordination structure of the positioning fixture and the developing machine for the gluing and developing equipment provided in an embodiment of the present application.

[0028] In the figure: 1. workbench; 2. sliding sleeve; 3. sliding rod; 4. outer cup; 5. inner cup; 6. carrying plate; 601. center hole; 7. outer cup cylinder; 8. bottom cup; 9. base; 901. first frame; 902. guide member; 9021. first guide column; 9022. positioning sleeve; 9023. sleeve hole; 903. second guide column; 10. first positioning assembly; 101. second positioning surface; 102. positioning pin; 11. second positioning assembly; 111. first positioning surface; 12. second screw; 13. third screw; 14. first screw; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0029] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is merely to provide a better understanding of the present application by illustrating the examples of the present application.

[0030] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, the elements defined by the phrase "comprising..." do not exclude the presence of other identical elements in the process, method, article, or device comprising the elements.

[0031] FIG1 is a schematic structural diagram of a developer of a glue coating and developing device in the prior art.

[0032] As shown in Figure 1, the developer includes a carrier plate 6 (chuck), an inner cup 5 (inner cup), a bottom cup 8 (under cup) and an outer cup 4 (out cup), wherein a center hole 601 is opened at the center position of the surface of the carrier plate 6, and the carrier plate 6 is used to carry and adsorb the wafer to be coated with glue so that the wafer and the carrier plate are relatively fixed. After the wafer surface is coated with glue, the carrier plate 6 can drive the wafer to rotate so that the glue is evenly distributed on the wafer surface; the inner cup 5 is used to drain the glue thrown out when the wafer rotates; the bottom cup 8 is used to collect the glue drained by the inner cup 5; the outer cup is arranged above the bottom cup 8, and an avoidance hole is provided in the middle of the outer cup. The diameter of the avoidance hole is larger than the diameter of the wafer, the bottom of the outer cup is provided with a convex edge, and a cylindrical hole for accommodating the convex edge is provided above the bottom cup 8, and the outer peripheral surface of the convex edge is gap-matched with the inner peripheral surface of the cylindrical hole.

[0033] Slide sleeves 2 and outer cup cylinders 7 are arranged below opposite sides of the outer cup top, respectively. Slide sleeves 2 and outer cup cylinders 7 are fixedly mounted on a workbench 1, the surface of which is flat. A slide rod 3 is fixed below one side of the outer cup top, which is slidably connected to the slide sleeve 2. The other side of the outer cup top is fixed to the piston rod of the outer cup cylinder 7. The piston rod of the outer cup cylinder 7 drives the outer cup to move along the axis of the slide rod 3. Specifically, when the outer cup moves to a position close to the bottom cup 8, the transfer device can place the wafer on the carrier plate 6 or remove the wafer from above the carrier plate 6; when the outer cup moves to a position away from the bottom cup 8, the developer can cooperate with the glue coating machine to evenly distribute the glue on the wafer surface.

[0034] Due to the need to ensure movement accuracy, the outer cup cylinder 7 needs to use a double-rod cylinder. The bottom of the double-rod cylinder is close to the workbench 1. The double-rod cylinder also includes four cylinder side surfaces connected end to end. The two adjacent cylinder side surfaces are perpendicular to each other, and the cylinder side surfaces are all perpendicular to the bottom of the cylinder body. Some components of the developing machine must meet the following requirements: the axis of the slide rod 3, the axis of the center hole 601 and the axes of the two piston rods of the double-rod cylinder are parallel; the distance from the axis of the slide rod 3 to the axis of the center hole 601 is the same as the distance from the axis of the center hole 601 to the plane where the axes of the two piston rods of the double-rod cylinder are located; the plane where the axis of the slide rod 3 and the axis of the center hole 601 are located is perpendicular to the plane where the axes of the two piston rods of the double-rod cylinder are located.

[0035] The inventors of this application have discovered that the piston rod of a double-rod cylinder rubs against the cylinder body during movement. This friction can reduce the cylinder's precision over extended periods of operation, leading to friction between the outer cup's lip and the bottom cup 8. Therefore, the double-rod cylinder must be regularly replaced to ensure the precise movement of both the cylinder and the outer cup. The overall structure of the developing machine is relatively compact, and ensuring accurate positioning of the outer cup cylinder 7 and preventing friction between the outer cup's lip and the bottom cup 8 during movement requires repeated adjustments by experienced personnel. Currently, each replacement of the outer cup cylinder 7 takes over three hours, making replacement efficiency extremely low.

[0036] In order to solve the problems in the prior art, the present invention provides a positioning tool for a coating and developing device, which is described in detail below with reference to the accompanying drawings.

[0037] Figure 2 is a structural schematic diagram of the positioning tooling for the glue coating and developing equipment provided in an embodiment of the present application; Figure 3 is a structural schematic diagram from another perspective of the positioning tooling for the glue coating and developing equipment provided in an embodiment of the present application; Figure 4 is a structural schematic diagram of the coordination between the positioning tooling for the glue coating and developing equipment and the developing machine provided in an embodiment of the present application.

[0038] Please refer to Figures 2 to 4. An embodiment of the present application provides a positioning tool for a glue coating and developing device, which is used to position the outer cup cylinder 7 of the developing machine of the glue coating and developing device, and includes a base 9 and a positioning assembly, wherein the base 9 includes a guide member 902 extending along a first direction X and a guide portion extending along a second direction Y, the first direction X is perpendicular to the second direction Y, the guide member 902 includes a positioning sleeve 9022, and the positioning sleeve 9022 is used to be rotatably connected to the sliding sleeve 2 of the developing machine, that is, after the positioning sleeve 9022 is connected to the sliding sleeve 2, the axis of the positioning sleeve 9022 coincides with the axis of the sliding sleeve 2, and when the positioning sleeve 9022 is in the first state, the positioning sleeve 9022 can rotate relative to the sliding sleeve 2; when the positioning sleeve 9022 is in the second state, the positioning sleeve 9022 is relatively fixed to the sliding sleeve 2.

[0039] The positioning assembly includes a first positioning component 10 and a second positioning component 11. The first positioning component 10 is located between the guide member 902 and the second positioning component 11. The first positioning component 10 and the second positioning component 11 are both movably connected to the guide portion along the second direction Y. That is, when the positioning assembly is in the first state, the first positioning component 10 and the second positioning component 11 can both move relative to the guide portion along the second direction Y; when the positioning assembly is in the second state, the first positioning component 10, the second positioning component 11 and the guide portion remain relatively fixed.

[0040] The first positioning assembly 10 is provided with a positioning pin 102 for being inserted into the central hole 601 of the developer. The diameter of the positioning pin 102 is the same as that of the central hole 601 , and the axis of the positioning pin 102 is parallel to the first direction X.

[0041] The second positioning assembly 11 is provided with a first positioning surface 111 and an auxiliary positioning side. The first positioning surface 111 and the auxiliary positioning side are intersectingly arranged. Specifically, the auxiliary positioning side can be in the form of a positioning surface that is parallel to both the first direction X and the second direction Y. In addition, the auxiliary positioning side can also be in the form of a straight line parallel to the second direction Y, such as a busbar of a cylindrical structural member, or an edge of another structural body. In the process of designing the auxiliary positioning side, it is necessary to make the distance from the plane where the axis of the positioning sleeve 9022 and the axis of the positioning pin 102 are located to the auxiliary positioning side be half the width of the outer cup cylinder 7, wherein the width of the outer cup cylinder 7 refers to the distance between the two cylinder body side surfaces of the outer cup cylinder 7 parallel to the first plane, and the first plane refers to the plane where the axis of the slide rod 3 and the axis of the center hole 601 are located. The plane where the axis of the locating sleeve 9022 and the axis of the locating pin 102 are located is perpendicular to the first locating surface 111. The first locating surface 111 and the auxiliary locating side are respectively used to abut against two adjacent cylinder body sides of the outer cup cylinder 7. Specifically, the cylinder body side that the first locating surface 111 is used to abut is parallel to the second plane. The second plane refers to the plane where the two piston rod axes of the outer cup cylinder 7 are located.

[0042] The positioning process for the replacement outer cup cylinder 7 is as follows: With the positioning assembly in the first position, adjust the distance between the first positioning assembly 10 and the guide member 902 so that the distance from the axis of the positioning sleeve 9022 to the axis of the positioning pin 102 is equal to the distance from the axis of the sliding sleeve 2 to the axis of the center hole 601. Adjust the distance between the second positioning assembly 11 and the first positioning assembly 10 so that the difference between the distance from the axis of the center hole 601 to the plane containing the two piston rod axes of the outer cup cylinder 7 and the distance from the axis of the positioning pin 102 to the first positioning surface 111 is half the thickness of the outer cup cylinder 7. The thickness of the outer cup cylinder 7 refers to the distance between the two side surfaces of the outer cup cylinder 7 parallel to the second plane. After completing these steps, adjust the positioning assembly to the second position. The positioning sleeve 9022 is rotatably connected to the sliding sleeve 2, the positioning pin 102 is inserted into the center hole 601, the bottom surface of the cylinder body is abutted against the workbench 1, the side surface of the cylinder body parallel to the second plane is abutted against the first positioning surface 111, and the other side surface of the cylinder body is abutted against the auxiliary positioning side, so as to complete the positioning of the outer cup cylinder 7 to be replaced.

[0043] When the positioning assembly is in the first state, the staff can pre-adjust the distance between the guide 902, the first positioning component 10 and the second positioning component 11 outside the developer according to the above steps. The operation is convenient and will not be restricted by the compact structure of the developer. When the positioning assembly is adjusted to the second state, the positioning tooling claimed in this application is placed in the corresponding position of the developer according to the above steps. The positioning of the outer cup cylinder 7 to be replaced can be quickly completed, which greatly improves the replacement efficiency of the outer cup cylinder 7. The above positioning process can be completed by ordinary personnel, and the work experience requirements of the staff are relatively low.

[0044] In some embodiments, the guide member 902 also includes a first guide column 9021 distributed successively with the positioning sleeve 9022. The positioning sleeve 9022 is provided with a sleeve hole 9023 at one end facing away from the first guide column 9021 so as to be sleeved on the sliding sleeve 2. The diameter of the sleeve hole 9023 is the same as the outer diameter of the sliding sleeve 2. By setting the sleeve hole 9023, it is convenient to connect the positioning sleeve 9022 and the sliding sleeve 2 during the positioning process.

[0045] In some embodiments, the side wall of the positioning sleeve 9022 is threadedly connected to the first screw 14, and the threaded hole on the positioning sleeve 9022 for connecting the first screw 14 is connected to the sleeve hole 9023. When the positioning sleeve 9022 is sleeved on the outer periphery of the sliding sleeve 2 and the first screw 14 is in a tightened state, the tail of the first screw 14 is tightly against the sliding sleeve 2, and the positioning sleeve 9022 is in the second state; when the first screw 14 is in a loosened state, there is a gap between the first screw 14 and the sleeve hole 9023, and the positioning sleeve 9022 is in the first state.

[0046] In some embodiments, the base 9 also includes a first frame 901, which is movably connected to the first guide column 9021 along the first direction X, and the first frame 901 is movably connected to the guide portion along the second direction Y. During the movement of the first frame 901 relative to the first guide column 9021 along the first direction X, the distance from the sleeve hole 9023 to the root of the positioning pin 102 can be adjusted, so that the positioning tool has better adaptability.

[0047] In some embodiments, the first frame 901 is threadedly connected to the second screw 12. When the second screw 12 is in a tightened state, the tail of the second screw 12 is tightly against the first guide column 9021. At this time, the first frame 901 and the first guide column 9021 are relatively fixed; when the second screw 12 is in a loosened state, there is a gap between the second screw 12 and the first guide column 9021. At this time, the first frame 901 can move relative to the first guide column 9021 along the first direction X.

[0048] In some embodiments, the guide portion includes a second guide column 903, and the first frame 901, the first positioning component 10 and the second positioning component 11 are all provided with connecting holes. The first frame 901, the first positioning component 10 and the second positioning component 11 are all connected to the second guide column 903 through corresponding connecting holes, and the second guide column 903 is used as a guide portion, and the structure is simple.

[0049] In some embodiments, the first frame 901, the first positioning assembly 10 and the second positioning assembly 11 are all threadedly connected with a third screw 13. When the third screws 13 are in a tightened state, the tail of the third screw 13 is tightly against the second guide column 903, and the positioning assembly is in the second state; when the third screws 13 are in a loosened state, the first frame 901, the first positioning assembly 10 and the second positioning assembly 11 can all move relative to the second guide column 903, and the positioning assembly is in the first state.

[0050] In some embodiments, the cross-section of the second guide pillar 903 and the cross-section of the connecting hole are both circular. Compared with a square cross-section, a circular cross-section is easier to machine with higher precision.

[0051] In some embodiments, the cross-section of the second guide column 903 is circular, and the auxiliary positioning side is the busbar of the second guide column 903 close to the first positioning surface 111. There is no need to set an additional structure in the second positioning component 11 to form an auxiliary positioning side, which can simplify the overall structure of the positioning tooling.

[0052] In some embodiments, the number of the second guide pillars 903 is two, and the two second guide pillars 903 are spaced apart along the third direction Z. The third direction Z is perpendicular to both the first direction X and the second direction Y, which can improve the overall stability of the positioning tooling.

[0053] In some embodiments, the spacing between the two second guide pillars 903 is the same as the width of the outer cup cylinder 7 to be positioned. During the positioning of the outer cup cylinder 7, the two cylinder body sides of the outer cup cylinder 7 parallel to the first plane are respectively abutted against the two busbars closest to the two second guide pillars 903. Through over-positioning, the positioning accuracy of the outer cup cylinder 7 is further improved.

[0054] In some embodiments, a second positioning surface 101 is further provided on the first positioning assembly 10 to abut against the upper surface of the carrier plate 6 of the developer, and a positioning pin 102 is protruded from the second positioning surface 101. The second positioning surface 101 is perpendicular to the first direction X. During the positioning process, the second positioning surface 101 is abutted against the upper surface of the carrier plate 6 to prevent the axis of the positioning sleeve 9022 from being skewed from the axis of the sliding sleeve 2, thereby further improving the positioning accuracy of the positioning tooling.

[0055] In some embodiments, the first positioning surface 111 is located at a position where the second positioning assembly 11 faces away from the first positioning assembly 10 , and the area facing the first positioning surface 111 is relatively open, further facilitating replacement of the outer cup cylinder 7 .

[0056] The above description is only a specific embodiment of the present application. Those skilled in the art will clearly understand that for the convenience and brevity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the scope of protection of the present application.

Claims

1. A positioning tool for a glue coating and developing device, used for positioning the outer cup cylinder of a developing machine of the glue coating and developing device, wherein: include: a base comprising a guide member extending in a first direction and a guide portion extending in a second direction, the guide member comprising a positioning sleeve for rotatably connecting to a sliding sleeve of the developer, the first direction being perpendicular to the second direction; The positioning assembly includes a first positioning component and a second positioning component, the first positioning component is located between the guide member and the second positioning component, the first positioning component and the second positioning component are both movably connected to the guide member along the second direction, the first positioning component is provided with a positioning pin to be inserted into the center hole of the developer, the axis of the positioning pin is parallel to the first direction, the second positioning component is provided with a first positioning surface and an auxiliary positioning side, the first positioning surface and the auxiliary positioning side are intersectingly arranged, the plane where the axis of the positioning sleeve and the axis of the positioning pin are located is perpendicular to the first positioning surface, and the first positioning surface and the auxiliary positioning side are respectively used to abut against two adjacent cylinder body sides of the outer cup cylinder.

2. The positioning tool for the coating and developing equipment according to claim 1, wherein: The guide member further includes a first guide post distributed successively with the positioning sleeve. An end of the positioning sleeve facing away from the first guide post is provided with a sleeve hole for sleeve-mounting on the sliding sleeve.

3. The positioning tool for the coating and developing equipment according to claim 2, wherein: The side wall of the positioning sleeve is threadedly connected with a first screw, and the threaded hole on the positioning sleeve for connecting the first screw is connected to the sleeve hole.

4. The positioning tool for the coating and developing equipment according to claim 2, wherein: The base further includes a first frame, the first frame is movably connected to the first guide column along the first direction, and the first frame is movably connected to the guide portion along the second direction.

5. The positioning tool for the coating and developing equipment according to claim 4, wherein: The guide portion includes a second guide column, the first frame, the first positioning assembly and the second positioning assembly are all provided with connecting holes, and the first frame, the first positioning assembly and the second positioning assembly are all connected to the second guide column through the corresponding connecting holes.

6. The positioning tool for the coating and developing equipment according to claim 5, wherein: The auxiliary positioning side is a busbar of the second guide post close to the first positioning surface.

7. The positioning tool for the coating and developing equipment according to claim 6, wherein: The number of the second guide pillars is two, and two second guide pillars are spaced apart and distributed along a third direction, and the third direction is perpendicular to both the first direction and the second direction.

8. The positioning tool for the coating and developing equipment according to claim 7, wherein: The distance between the two second guide pillars is the same as the width of the outer cup cylinder to be positioned.

9. The positioning tool for the coating and developing equipment according to claim 1, wherein: The first positioning assembly is further provided with a second positioning surface for contacting the upper surface of the carrier plate of the developer. The positioning pin is protruded from the second positioning surface, and the second positioning surface is perpendicular to the first direction.

10. The positioning tool for the coating and developing equipment according to claim 1, wherein: The first positioning surface is located at a position where the second positioning component faces away from the first positioning component.

Images