Force-torque sensor and robot

Abstract

The present invention relates to a force-torque sensor, the force-torque sensor according to an embodiment of the present invention comprising: a base; a lid disposed on top of the base; and first and second carriers disposed between the base and lid, the lid and first and second carriers moving in the first axial direction relative to the base when the lid is pressed in the first axial direction, and the lid moving in the first circumferential direction relative to the first carrier when the lid is pressed in the first circumferential direction with the first axis as the center.

Description

Force-torque sensors and robots

[0001] The present embodiment relates to a force-torque sensor.

[0002] Robots are used in a variety of fields, including industry, medicine, service, and other fields, and their scope of application is constantly expanding. To improve the performance and ensure safety of robotic systems, accurate monitoring and control of robot movements are essential. In particular, the forces and torques generated when a robot interacts with its environment or handles objects are crucial information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, forces and torques play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp and manipulate objects and respond to their environment. Furthermore, these sensors can be utilized to improve robot efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors cannot separate the applied external force into the forces of each axis. Instead, they receive input simultaneously and decompose the forces. This causes crosstalk noise to be mixed into the detection values ​​for each axis. In particular, noise increases when the Z-axis and torque forces are mixed.

[0005] (Patent Document 1) KR 10-2023-0123723 A

[0006] The present embodiment seeks to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0007] Through this, we aim to improve robot control and work processes.

[0008] A force-torque sensor according to the present embodiment comprises: a base; a lead disposed on the base; and a first carrier and a second carrier disposed between the base and the lead, wherein when the lead is pressed in a first axial direction, the lead, the first carrier, and the second carrier move in the first axial direction with respect to the base, and when the lead is pressed in a first circumferential direction centered on the first axis, the lead can move in the first circumferential direction with respect to the first carrier.

[0009] When the lead is pressed in a direction other than the first axis and the first circumferential direction, the lead and the first carrier can move relative to the second carrier.

[0010] When the lead is pressed in a second axis direction perpendicular to the first axis or in a third axis direction perpendicular to both the first axis and the second axis, the lead and the first carrier can move relative to the second carrier.

[0011] When the lead is pressed in a second circumferential direction centered on the second axis or in a third circumferential direction centered on the third axis, the lead and the first carrier can move relative to the second carrier.

[0012] The above lead may include a flange portion and a carrier portion connected to the flange portion through a first elastic member.

[0013] The force-torque sensor includes a first ball disposed between the lead and the first carrier, at least one of the lead and the first carrier includes a first rail on which the first ball is disposed, and the first rail can extend in the first circumferential direction.

[0014] The force-torque sensor may include a second ball disposed between the first carrier and the second carrier.

[0015] The force-torque sensor includes a first ball disposed between the lead and the first carrier; and a second ball disposed between the first carrier and the second carrier, wherein at least a portion of the first ball can overlap the second ball in the first axial direction.

[0016] The force-torque sensor may include a first magnet disposed on one of the second carrier and the base; and a first sensor disposed on the other of the second carrier and the base and detecting the first magnet.

[0017] The force-torque sensor may include a second magnet disposed on one of the lead and the base; and a second sensor disposed on the other of the lead and the base and detecting the second magnet.

[0018] The force-torque sensor may include a second elastic member connecting the carrier portion of the lead and the first carrier; a third elastic member connecting the first carrier and the second carrier; and a fourth elastic member connecting the second carrier and the base.

[0019] The force-torque sensor may include a coil disposed on one of the carrier and the base; and a sensor disposed on the other of the carrier and the base and detecting an electromagnetic field of the coil when current is applied to the coil.

[0020] The force-torque sensor may include a capacitance sensor that measures a change in capacitance between the lead and the base or between the second carrier and the base.

[0021] The force-torque sensor may include a man-power magnet disposed on one of the lead, the first carrier, the second carrier, and the base; and a yoke disposed on another of the lead, the first carrier, the second carrier, and the base, on which man-power acts with the man-power magnet.

[0022] The robot according to the present embodiment may include the force-torque sensor.

[0023] The force-torque sensor according to this embodiment can measure Z-axis force and torque force separately. This minimizes the influence of noise due to crosstalk on the detection values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0024] Figure 1 is a perspective view of a force-torque sensor according to the present embodiment.

[0025] Figure 2 is a cross-sectional view taken along line AA of Figure 1.

[0026] Figure 3 is a BB cross-sectional view of Figure 1.

[0027] Figures 4 and 5 are cross-sectional views of the force-torque sensor according to the present embodiment, cut perpendicular to the z-axis and viewed from above.

[0028] Figure 6 is an exploded perspective view of a force-torque sensor according to the present embodiment.

[0029] Fig. 7 is an exploded perspective view of a force-torque sensor according to the present embodiment viewed from a different direction than Fig. 6.

[0030] Fig. 8 is a perspective view of a force-torque sensor according to the present embodiment, with the flange portion of the lead omitted.

[0031] Fig. 9 is a perspective view of a force-torque sensor according to the present embodiment, with the lead and carrier omitted.

[0032] Fig. 10 is a perspective view illustrating a carrier and related configuration of a force-torque sensor according to the present embodiment.

[0033] Fig. 11 is a perspective view of Fig. 10 with the carrier portion of the lead omitted.

[0034] FIG. 12 is a bottom perspective view illustrating the lead and carrier and related configuration of the force-torque sensor according to the present embodiment.

[0035] Fig. 13 is a bottom perspective view of Fig. 12 with the second carrier and related components omitted.

[0036] Fig. 14 is a bottom perspective view showing the first carrier and related configuration of the force-torque sensor according to the present embodiment.

[0037] Fig. 15 is a side view illustrating a first carrier of a force-torque sensor according to the present embodiment.

[0038] Fig. 16 is a drawing for explaining when a force in the z-axis direction is applied to a force-torque sensor according to the present embodiment.

[0039] Fig. 17 is a drawing for explaining when a roll direction force is applied to a force-torque sensor according to the present embodiment.

[0040] Fig. 18 is a drawing for explaining when forces in the x-axis direction, y-axis direction, yaw direction, and pitch direction are applied to the force-torque sensor according to the present embodiment.

[0041] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0042] However, the technical idea of ​​the present invention is not limited to some of the embodiments described, but can be implemented in various different forms, and within the scope of the technical idea of ​​the present invention, one or more of the components between the embodiments can be selectively combined or substituted for use.

[0043] In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be interpreted as having a meaning that can be generally understood by a person of ordinary skill in the technical field to which the present invention belongs, unless explicitly and specifically defined and described, and terms that are commonly used, such as terms defined in a dictionary, may be interpreted in consideration of the contextual meaning of the relevant technology.

[0044] Additionally, the terms used in the embodiments of the present invention are intended to describe the embodiments and are not intended to limit the present invention.

[0045] In this specification, the singular may also include the plural unless specifically stated otherwise in the phrase, and when it is described as “A and / or at least one (or more) of B, C”, it may include one or more of all combinations that can be combined with A, B, C.

[0046] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and are not intended to limit the nature, order, or sequence of the components.

[0047] And, when a component is described as being 'connected', 'coupled', or 'connected' to another component, it may include not only cases where the component is 'connected', 'coupled', or 'connected' directly to the other component, but also cases where the component is 'connected', 'coupled', or 'connected' by another component between the component and the other component.

[0048] Additionally, when described as being formed or arranged "above" or "below" each component, "above" or "below" includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or arranged between the two components. Furthermore, when expressed as "above" or "below," the meaning may include not only the upward direction but also the downward direction based on one component.

[0049] Hereinafter, the base (100) may be referred to as a “fixed part”.

[0050] Hereinafter, the lead (200), the first carrier (310), and the second carrier (320) may be referred to as “moving parts.” Hereinafter, one of the lead (200), the first carrier (310), and the second carrier (320) may be referred to as the “first moving part,” the other may be referred to as the “second moving part,” and the other may be referred to as the “third moving part.”

[0051] Hereinafter, one of the upper rail (230), the upper rail (311a), the lower rail (312a), and the lower rail (321) may be referred to as the “first rail,” the other may be referred to as the “second rail,” the other may be referred to as the “third rail,” and the other may be referred to as the “fourth rail.” In addition, any two configurations of the upper rail (230), the upper rail (311a), the lower rail (312a), and the lower rail (321) may be collectively referred to as the “first rail,” etc.

[0052] Hereinafter, one of the upper guide ball (410) and the lower guide ball (420) may be referred to as the “first ball” and the other may be referred to as the “second ball”.

[0053] Hereinafter, one of the z-axis magnet (610) and the side magnet (630) may be referred to as the “first magnet” and the other may be referred to as the “second magnet.”

[0054] Hereinafter, one of the z-axis sensor (620) and the side sensor (640) may be referred to as a “first sensor” and the other may be referred to as a “second sensor.”

[0055] Hereinafter, one of the z-axis, x-axis, and y-axis may be referred to as the “first axis,” the other as the “second axis,” and the other as the “third axis.”

[0056] Hereinafter, one of the roll direction, yaw direction, and pitch direction may be referred to as a “first circumferential direction,” another may be referred to as a “second circumferential direction,” and another may be referred to as a “third circumferential direction.” In addition, the roll direction, yaw direction, and pitch direction may be referred to as “first to third directions.”

[0057]

[0058] Below, the configuration of the force-torque sensor according to the present embodiment is described with reference to the drawings.

[0059] Fig. 1 is a perspective view of a force-torque sensor according to the present embodiment. Fig. 2 is a cross-sectional view taken along line AA of Fig. 1. Fig. 3 is a cross-sectional view taken along line BB of Fig. 1. Figs. 4 and 5 are cross-sectional views taken perpendicular to the z-axis and viewed from above of the force-torque sensor according to the present embodiment. Fig. 6 is an exploded perspective view of the force-torque sensor according to the present embodiment. Fig. 7 is an exploded perspective view of the force-torque sensor according to the present embodiment viewed from a different direction from Fig. 6. Fig. 8 is a perspective view of the force-torque sensor according to the present embodiment with the flange portion of the lead omitted. Fig. 9 is a perspective view of the force-torque sensor according to the present embodiment with the lead and carrier omitted. Fig. 10 is a perspective view illustrating a carrier and related components of the force-torque sensor according to the present embodiment. Fig. 11 is a perspective view of Fig. 10 with the carrier portion of the lead omitted. Fig. 12 is a bottom perspective view illustrating the lead and carrier and related components of the force-torque sensor according to the present embodiment. Fig. 13 is a bottom perspective view of Fig. 12 with the second carrier and related components omitted. Fig. 14 is a bottom perspective view illustrating the first carrier and related components of the force-torque sensor according to the present embodiment. Fig. 15 is a side view illustrating the first carrier of the force-torque sensor according to the present embodiment.

[0060] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0061] A force-torque sensor may include a fixed part. The fixed part may be a part that is relatively fixed when the moving part moves, as distinguished from the moving part.

[0062] A force-torque sensor may include a base (100). A fixing member may include the base (100). A lead (200) may be disposed on the base (100). At least a portion of the lead (200) may be accommodated on the base (100). A first carrier (310) may be disposed on the base (100). At least a portion of the first carrier (310) may be accommodated on the base (100). A second carrier (320) may be disposed on the base (100). At least a portion of the second carrier (320) may be accommodated on the base (100). A ball may be disposed on the base (100). An elastic member may be disposed on the base (100). A sensing structure may be disposed on the base (100). The base (100) may be formed in a cylindrical shape with an open top. As a variation, the base (100) may be formed in the shape of a square pillar with an open top.

[0063] The base (100) may include a lower plate (110). The lower plate (110) may be a base plate. The lower plate (110) may be a bottom plate. The lower plate (110) may include a hole (111). The hole (111) may be hollow. The lower plate (110) may be formed in a circular shape. Alternatively, the lower plate (110) may be formed in a square shape.

[0064] The base (100) may include a side plate (120). The side plate (120) may extend from the lower plate (110). The side plate (120) may extend upward from the lower plate (110). The side plate (120) may be formed in a circular ring shape when viewed from above. Alternatively, the side plate (120) may be formed in a square ring shape when viewed from above.

[0065] The force-torque sensor may include a moving part. The moving part may be a part that moves in response to an external force. That is, the moving part can move relative to the fixed part when an external force is applied to the force-torque sensor.

[0066] The force-torque sensor may include a roll moving unit. The roll moving unit may move in the roll direction. The roll moving unit may rotate in the roll direction.

[0067] The force-torque sensor may include a lead (200). The lead (200) may be disposed on the base (100). The lead (200) may be disposed on the base (100). At least a portion of the lead (200) may be disposed within the base (100). At least a portion of the lead (200) may be accommodated in the base (100). The lead (200) may be movably disposed on the base (100). The lead (200) may be movable in the roll direction. The lead (200) may be movable relative to the base (100). The lead (200) may be movable relative to the first carrier (310). The lead (200) may be movable relative to the second carrier (320).

[0068] The lead (200) may include a flange portion (210). The flange portion (210) may be formed in a flange shape. The flange portion (210) may be formed in a plate shape. The flange portion (210) may be a portion to which an external force is applied. The flange portion (210) may be disposed on the base (100). The flange portion (210) may be disposed on the upper side of the base (100). The flange portion (210) may be disposed spaced apart from the base (100). The flange portion (210) may be formed in a circular shape. As a variation, the flange portion (210) may be formed in a square shape.

[0069] The flange portion (210) may include a first hole (211). The first hole (211) may be hollow. The flange portion (210) may include a second hole (212). The second hole (212) may be a joining hole. The second hole (212) may include a plurality of holes. Screws or the like that are joined to other components of the robot may be assembled into the second hole (212).

[0070] The lead (200) may include a carrier portion (220). The carrier portion (220) may be disposed below the flange portion (210). The flange portion (210) may be disposed on the carrier portion (220). The carrier portion (220) may be disposed spaced apart from the flange portion (210). The carrier portion (220) may be connected to the flange portion (210) through a first elastic member (510). The carrier portion (220) and the flange portion (210) may be elastically connected by the first elastic member (510). The carrier portion (220) and the flange portion (210) may move together. The carrier portion (220) and the flange portion (210) may move together in all directions. When the carrier part (220) and the flange part (210) move together, the amount of movement of the carrier part (220) may be the same as the amount of movement of the flange part (210). However, as a variation, the amount of movement of the carrier part (220) and the amount of movement of the flange part (210) may be different.

[0071] As a variation, the carrier portion (220) may be formed integrally with the flange portion (210). Through this, the carrier portion (220) may move integrally with the flange portion (210).

[0072] The lead (200) may include an upper rail (230). The upper rail (230) may be an upper guide ball rail. An upper guide ball (410) may be arranged on the upper rail (230). The upper rail (230) may extend in the roll direction. The upper rail (230) may guide the upper guide ball (410) to move in the roll direction. The upper rail (230) may guide the upper guide ball (410) to rotate on the upper rail (230). The upper rail (230) may be formed by a groove. The upper rail (230) may include a groove. The upper rail (230) may be a groove.

[0073] The force-torque sensor may include a tilting member. The tilting member may be tiltable relative to a fixed member. The tilting member may be a rotational member.

[0074] The force-torque sensor may include a first carrier (310). The first carrier (310) may be disposed between the base (100) and the lid (200). The first carrier (310) may be disposed within the base (100). The first carrier (310) may be disposed on the base (100). The first carrier (310) may be movably disposed on the base (100). At least a portion of the first carrier (310) may be accommodated in the base (100). The first carrier (310) may be disposed on the lower side of the lid (200). The first carrier (310) may be disposed on the lower side of the flange portion (210) of the lid (200). The first carrier (310) may be placed on the inside of the lead (200). The first carrier (310) may be placed on the inside of the carrier section (220) of the lead (200). The first carrier (310) may be placed between the lead (200) and the second carrier (320).

[0075] The first carrier (310) can move in any direction except the roll direction. The first carrier (310) can move relative to the base (100). The first carrier (310) can move together with the lead (200) in any direction except the roll direction.

[0076] The first carrier (310) may include an upper flange portion (311). The upper flange portion (311) may be disposed on a lower flange portion (312). The first carrier (310) may include a lower flange portion (312). The diameter of the upper flange portion (311) may be larger than the diameter of the lower flange portion (312). The first carrier (310) may include a connecting portion (313). The connecting portion (313) may connect the upper flange portion (311) and the lower flange portion (312). The diameter of the connecting portion (313) may be smaller than the diameters of each of the upper flange portion (311) and the lower flange portion (312). An upper guide ball (410) may be disposed on the upper flange portion (311). A lower guide ball (420) may be disposed on the lower flange portion (312).

[0077] The upper flange portion (311), the lower flange portion (312), and the connection portion (313) can be formed integrally. The upper flange portion (311), the lower flange portion (312), and the connection portion (313) can move integrally.

[0078] The first carrier (310) may include an upper rail (311a). The upper flange portion (311) may include the upper rail (311a). The upper rail (311a) may be an upper guide ball rail. An upper guide ball (410) may be arranged on the upper rail (311a). The upper rail (311a) may extend in the roll direction. The upper rail (311a) may guide the upper guide ball (410) to move in the roll direction. The upper rail (311a) may guide the upper guide ball (410) to rotate on the upper rail (311a). The upper rail (311a) may be formed by a groove. The upper rail (311a) may include a groove. The upper rail (311a) may be a groove.

[0079] The first carrier (310) may include a lower rail (312a). The lower flange portion (312) may include the lower rail (312a). The lower rail (312a) may be a lower guide ball rail. A lower guide ball (420) may be arranged on the lower rail (312a). The lower rail (312a) may guide the lower guide ball (420) to rotate on the lower rail (312a). The lower rail (312a) may guide the lower guide ball (420) to tilt on the lower rail (312a). The lower rail (312a) may be formed by a groove. The lower rail (312a) may include a groove. The lower rail (312a) may be a groove.

[0080] The force-torque sensor may include a z-axis moving member. The z-axis moving member may move in the z-axis direction.

[0081] The force-torque sensor may include a second carrier (320). The second carrier (320) may be disposed between the base (100) and the lid (200). The second carrier (320) may be disposed within the base (100). The second carrier (320) may be disposed on the base (100). The second carrier (320) may be movably disposed on the base (100). At least a portion of the second carrier (320) may be accommodated in the base (100). The second carrier (320) may be disposed on the lower side of the lid (200). The second carrier (320) may be disposed on the lower side of the flange portion (210) of the lid (200). The second carrier (320) may be placed on the inside of the lead (200). The second carrier (320) may be placed on the inside of the carrier portion (220) of the lead (200). The second carrier (320) may be placed between the first carrier (310) and the base (100).

[0082] The second carrier (320) can move in the z-axis direction. The second carrier (320) can move with respect to the base (100). The second carrier (320) can move with respect to the base (100) in the z-axis direction. The second carrier (320) can move only in the z-axis direction.

[0083] The second carrier (320) may include a lower rail (321). The lower rail (321) may be a lower guide ball rail. A lower guide ball (420) may be arranged on the lower rail (321). The lower rail (321) may guide the lower guide ball (420) to rotate on the lower rail (321). The lower rail (321) may guide the lower guide ball (420) to tilt on the lower rail (321). The lower rail (321) may be formed by a groove. The lower rail (321) may include a groove. The lower rail (321) may be a groove.

[0084] The force-torque sensor may include a guide member. The guide member may guide movement of the moving member relative to the fixed member.

[0085] The force-torque sensor may include a ball. The guide member may include a ball. The ball may guide the movement of the moving part relative to the fixed part. The ball may direct the movement of the moving part relative to the fixed part in a specific direction. In the present embodiment, the ball may be formed of a ceramic ball.

[0086] The force-torque sensor may include an upper guide ball (410). The upper guide ball (410) may be a roll guide ball. The upper guide ball (410) may limit the movement of the lead (200) relative to the first carrier (310) in the roll direction. The upper guide ball (410) may guide the movement of the lead (200) relative to the first carrier (310) in the roll direction. The upper guide ball (410) may guide the lead (200) to move in the roll direction relative to the base (100).

[0087] The upper guide ball (410) may be disposed between the lead (200) and the first carrier (310). The upper guide ball (410) may be disposed on the lead (200). The upper guide ball (410) may be in contact with the lead (200). The upper guide ball (410) may move along the lead (200). The upper guide ball (410) may be disposed on the first carrier (310). The upper guide ball (410) may be in contact with the first carrier (310). The upper guide ball (410) may move along the first carrier (310). The upper guide ball (410) may be disposed on the carrier portion (220) of the lead (200). The upper guide ball (410) may be in contact with the carrier portion (220) of the lead (200). The upper guide ball (410) can move along the carrier part (220) of the lead (200).

[0088] The upper guide ball (410) may be placed between the upper rail (230) of the lead (200) and the upper rail (311a) of the first carrier (310). The upper guide ball (410) may be placed on the upper rail (230) of the lead (200). The upper guide ball (410) may move along the upper rail (230) of the lead (200). The upper guide ball (410) may be placed on the upper rail (311a) of the first carrier (310). The upper guide ball (410) may move along the upper rail (311a) of the first carrier (310).

[0089] The upper guide ball (410) may include a plurality of balls. At least three upper guide balls (410) may be arranged spaced apart in the roll direction when viewed from above. Four upper guide balls (410) may be arranged spaced apart in the roll direction when viewed from above. Fifteen upper guide balls (410) may be arranged spaced apart in the roll direction when viewed from above. The upper guide ball (410) may include a plurality of balls overlapping in the roll direction. The upper guide balls (410) may be arranged in one layer in the z-axis direction. However, as a modification, the upper guide balls (410) may be arranged in multiple layers in the z-axis direction.

[0090] The force-torque sensor may include a lower guide ball (420). The lower guide ball (420) may be a rotational guide ball. The lower guide ball (420) may limit the movement of the first carrier (310) relative to the second carrier (320) in a rotational direction. The lower guide ball (420) may guide the movement of the first carrier (310) relative to the second carrier (320) in a rotational direction. The lower guide ball (420) may guide the first carrier (310) to rotate relative to the second carrier (320).

[0091] The lower guide ball (420) may be placed between the first carrier (310) and the second carrier (320). The lower guide ball (420) may be placed on the first carrier (310). The lower guide ball (420) may be in contact with the first carrier (310). The lower guide ball (420) may move along the first carrier (310). The lower guide ball (420) may be placed on the second carrier (320). The lower guide ball (420) may be in contact with the second carrier (320). The lower guide ball (420) may move along the second carrier (320).

[0092] The lower guide ball (420) may be placed between the lower rail (312a) of the first carrier (310) and the lower rail (321) of the second carrier (320). The lower guide ball (420) may be placed on the lower rail (312a) of the first carrier (310). The lower guide ball (420) may rotate on the lower rail (312a) of the first carrier (310). The lower guide ball (420) may be placed on the lower rail (321) of the second carrier (320). The lower guide ball (420) may rotate on the lower rail (321) of the second carrier (320).

[0093] The lower guide ball (420) may include multiple balls. At least three lower guide balls (420) may be arranged spaced apart in the roll direction when viewed from above. Four lower guide balls (420) may be arranged spaced apart in the roll direction when viewed from above. The lower guide balls (420) may be arranged in one layer in the z-axis direction.

[0094] At least a portion of the upper guide ball (410) may overlap the lower guide ball (420) in the z-axis direction.

[0095] The force-torque sensor may include a restoring member. The restoring member can return the moving part to its original position when the external force acting on the force-torque sensor is removed.

[0096] The force-torque sensor may include a ball pressure member. The ball pressure member may pressurize the upper guide ball (410) so that the upper guide ball (410) remains in contact with the lead (200) and the first carrier (310) without moving out of a preset position. The ball pressure member may pressurize the lower guide ball (420) so that the lower guide ball (420) remains in contact with the first carrier (310) and the second carrier (320) without moving out of a preset position.

[0097] The force-torque sensor may include an elastic member. The restoring member may include an elastic member. The ball pressurizing member may include an elastic member. The elastic member may move the moving member to its original position when the external force applied thereto is removed. The elastic member may maintain the ball's pressurized state. The elastic member may include a spring. The elastic member may have elasticity. The elastic member may have an elastic restoring force.

[0098] The force-torque sensor may include a first elastic member (510). The first elastic member (510) may include a spring. The first elastic member (510) may connect a flange portion (210) of a lead (200) and a carrier portion (220) of the lead (200). The first elastic member (510) may elastically connect the flange portion (210) of the lead (200) and the carrier portion (220) of the lead (200). The first elastic member (510) may be coupled to the flange portion (210) of the lead (200). The first elastic member (510) may be coupled to the carrier portion (220) of the lead (200). The first elastic member (510) may be arranged parallel to the z-axis.

[0099] The force-torque sensor may include a second elastic member (520). The second elastic member (520) may include a spring. The second elastic member (520) may connect the carrier portion (220) of the lead (200) and the first carrier (310). The second elastic member (520) may elastically connect the carrier portion (220) of the lead (200) and the first carrier (310). The second elastic member (520) may connect the lead (200) and the first carrier (310). The second elastic member (520) may be coupled to the carrier portion (220) of the lead (200). The second elastic member (520) may be coupled to the first carrier (310). The second elastic member (520) may be arranged perpendicular to the z-axis. The second elastic member (520) can be combined with the lower surface of the carrier portion (220) of the lead (200) and the lower surface of the upper flange portion (311) of the first carrier (310).

[0100] The force-torque sensor may include a third elastic member (530). The third elastic member (530) may include a spring. The third elastic member (530) may connect the first carrier (310) and the second carrier (320). The third elastic member (530) may elastically connect the first carrier (310) and the second carrier (320). The third elastic member (530) may be coupled to the first carrier (310). The third elastic member (530) may be coupled to the second carrier (320). The third elastic member (530) may be arranged perpendicular to the z-axis. The third elastic member (530) can be combined with the upper surface of the lower flange portion (312) of the first carrier (310) and the upper surface of the second carrier (320).

[0101] The force-torque sensor may include a fourth elastic member (540). The fourth elastic member (540) may include a spring. The fourth elastic member (540) may connect the second carrier (320) and the base (100). The fourth elastic member (540) may elastically connect the second carrier (320) and the base (100). The fourth elastic member (540) may be coupled to the second carrier (320). The fourth elastic member (540) may be coupled to the base (100). The fourth elastic member (540) may be arranged perpendicular to the z-axis. The fourth elastic member (540) may be coupled to the bottom surface of the base (100) and the lower surface of the second carrier (320). The base (100) may include a step to which the fourth elastic member (540) is coupled. The step may protrude from the bottom surface of the base (100).

[0102] The force-torque sensor may include a sensing member. The sensing member may detect movement of a moving member relative to a fixed member. The sensing member may measure the amount of movement of the moving member relative to the fixed member. The sensing member may include a magnet and a Hall sensor. The magnet may be disposed on one of the lead (200) and the base (100). The sensor may be disposed on the other of the lead (200) and the base (100). In addition, the magnet may be disposed on one of the second carrier (320) and the base (100). The sensor may be disposed on the other of the second carrier (320) and the base (100). The sensor may detect the magnet. The sensor may be a Hall sensor.

[0103] The force-torque sensor may include a z-axis sensing element. The z-axis sensing element may detect movement of the lead (200) in the z-axis direction. The z-axis sensing element may measure the amount of movement of the lead (200) in the z-axis direction.

[0104] The force-torque sensor may include a z-axis magnet (610). The z-axis magnet (610) may be disposed on the lower surface of the second carrier (320). The z-axis magnet (610) may be disposed on the second carrier (320). The z-axis magnet (610) may move together with the second carrier (320).

[0105] The force-torque sensor may include a z-axis sensor (620). The z-axis sensor (620) may face the z-axis magnet (610). The z-axis sensor (620) may be positioned at a position corresponding to the z-axis magnet (610). The z-axis sensor (620) may be positioned on the lower plate (110) of the base (100). The z-axis sensor (620) may be positioned on the base (100).

[0106] The z-axis sensor (620) can detect the z-axis magnet (610). The z-axis sensor (620) can measure the amount of movement of the z-axis magnet (610). The z-axis sensor (620) can detect the magnetic field of the z-axis magnet (610). The z-axis sensor (620) can be a Hall sensor.

[0107] As a variation, the z-axis magnet (610) may be placed on the base (100) and the z-axis sensor (620) may be placed on the second carrier (320).

[0108] The force-torque sensor may include a rotation sensing element. The rotation sensing element may detect the rotation of the lead (200). The rotation sensing element may measure the amount of rotation of the lead (200).

[0109] The force-torque sensor may include a side magnet (630). The side magnet (630) may be disposed on the outer surface of the lead (200). The side magnet (630) may be disposed on the lead (200). The side magnet (630) may move together with the lead (200). The side magnet (630) may be disposed on the carrier portion (220) of the lead (200).

[0110] The force-torque sensor may include a side sensor (640). The side sensor (640) may detect a side magnet (630). The side sensor (640) may measure the amount of movement of the side magnet (630). The side sensor (640) may detect a magnetic field of the side magnet (630). The side sensor (640) may be a Hall sensor. The side sensor (640) may face the side magnet (630). The side sensor (640) may be positioned corresponding to the side magnet (630). The side sensor (640) may be positioned on a side plate (120) of the base (100). The side sensor (640) may be positioned on the base (100).

[0111] Alternatively, the side magnet (630) may be placed on the base (100) and the side sensor (640) may be placed on the lead (200).

[0112] The side sensor (640) may include multiple sensors. The side sensor (640) may include four sensors. The side sensor (640) may include first to fourth sensors (641, 642, 643, 644). The side sensor (640) may include a first side sensor (641), a second side sensor (642), a third side sensor (643), and a fourth side sensor (644) that detect the side magnet (630).

[0113] The first side sensor (641), the second side sensor (642), the third side sensor (643), and the fourth side sensor (644) may be arranged on the side plate (120) of the base (100). When viewed from the inside, the first side sensor (641) may be arranged on the upper side of the side magnet (630), the second side sensor (642) may be arranged on the lower side of the side magnet (630), the third side sensor (643) may be arranged on the left side of the side magnet (630), and the fourth side sensor (644) may be arranged on the right side of the side magnet (630).

[0114] In this embodiment, when the lead (200) is pressed in the z-axis direction, the lead (200), the first carrier (310), and the second carrier (320) can move in the z-axis direction with respect to the base (100). That is, when the lead (200) moves in the z-axis direction, the first carrier (310) and the second carrier (320) can move integrally with the lead (200).

[0115] When the lead (200) is pressed in the roll direction centered on the z-axis, the lead (200) can move in the roll direction with respect to the first carrier (310).

[0116] When the lead (200) is pressed in a direction other than the z-axis and the roll direction, the lead (200) and the first carrier (310) can move relative to the second carrier (320). At this time, the movement amounts of the lead (200) and the first carrier (310) may be different. However, the lead (200) and the first carrier (310) may move, and the second carrier (320) and the base (100) may be fixed.

[0117] When the lead (200) is pressed in the x-axis direction perpendicular to the z-axis or in the y-axis direction perpendicular to both the z-axis and the x-axis, the lead (200) and the first carrier (310) can move relative to the second carrier (320).

[0118] When the lead (200) is pressed in the y-axis-centered direction or the pitch direction centered on the y-axis, the lead (200) and the first carrier (310) can move relative to the second carrier (320).

[0119] In the force-torque sensor according to the present embodiment, a ball may be placed between the moving part or between the moving part and the fixed part. The ball may be pressed by an elastic member. Alternatively, as a variation, the ball may be pressed by the attractive force between the magnet and the yoke. The cross-section of the rail on which the ball is placed may be formed into a curved shape or a polygonal shape such as a triangle or square.

[0120] In this embodiment, the force in the z-axis direction is measured separately from the force in other directions, thereby minimizing the occurrence of crosstalk. Furthermore, this embodiment can also simplify the structure.

[0121] In a variation, the elasticity of one of the springs among the elastic members can be increased to design it to be stably supported in the initial position.

[0122] The force-torque sensor according to the modified example may have a difference in the sensing element from the present embodiment. The force-torque sensor according to the modified example may include a coil instead of a magnet.

[0123] The force-torque sensor may include a coil. The coil may be disposed on either the lead (200) or the base (100). The sensor may be disposed on the other of the lead (200) or the base (100). Additionally, the coil may be disposed on either the second carrier (320) or the base (100). The sensor may be disposed on the other of the second carrier (320) or the base (100). The sensor may detect an electromagnetic field of the coil when current is applied to the coil.

[0124] The force-torque sensor may include a z-axis coil. The z-axis coil may be disposed on the lower surface of the second carrier (320). The z-axis coil may be disposed on the second carrier (320). The z-axis coil may move together with the second carrier (320).

[0125] The force-torque sensor may include a side coil. The side coil may be positioned on the outer surface of the lead (200). The side coil may be positioned on the lead (200). The side coil may move together with the lead (200).

[0126] In another variation, the sensing element may be equipped with a capacitive sensor instead of a magnet and a Hall sensor.

[0127] The force-torque sensor may include a capacitance sensor that measures a change in capacitance between the lead (200) and the base (100) or between the second carrier (320) and the base (100). A predetermined potential may be applied to the lead (200), and a different potential may be applied to the base (100). A predetermined potential may be applied to the second carrier (320), and a different potential may be applied to the base (100). Through this, the capacitance may change according to the movement of the lead (200) and the second carrier (320). In a variation, a capacitance sensor that detects this may be provided.

[0128] In another variation, the ball press member may be provided with a man-power magnet and a yoke.

[0129] The manpower magnet may be placed on any one of the lead (200), the first carrier (310), the second carrier (320), and the base (100). The yoke may be placed on another one of the lead (200), the first carrier (310), the second carrier (320), and the base (100) so that the manpower magnet and the manpower can act together. The manpower magnet may be placed on any one of the lead (200) and the first carrier (310). The yoke may be placed on the other one of the lead (200) and the first carrier (310) so that the manpower magnet and the manpower can act together. In addition, the manpower magnet may be placed on any one of the lead (200) and the second carrier (320). The yoke may be placed on the other one of the lead (200) and the second carrier (320) so that the manpower magnet and the manpower can act together.

[0130]

[0131] Below, the operation of the force-torque sensor according to the present embodiment is described with reference to the drawings.

[0132] Fig. 16 is a drawing for explaining when a force in the z-axis direction is applied to a force-torque sensor according to the present embodiment.

[0133] When an external force having a z-axis component is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the present embodiment, the lead (200), the first carrier (310), and the second carrier (320) can move in the z-axis direction as a whole (see A of FIG. 16) (see B of FIG. 16). At this time, since the base (100) is maintained in a fixed state, the z-axis sensor (620) disposed on the base (100) detects the z-axis magnet (610) disposed on the second carrier (320), so that the amount of movement of the lead (200) in the z-axis direction can be measured. Through this, the z-axis component of the external force applied to the lead (200) can be measured.

[0134] Fig. 17 is a drawing for explaining when a roll direction force is applied to a force-torque sensor according to the present embodiment.

[0135] When an external force having a roll direction component is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the present embodiment, the lead (200) (see A of FIG. 17) can rotate or tilt around the z-axis (see B of FIG. 17). At this time, since the base (100) is maintained in a fixed state, the side sensor (640) arranged on the base (100) detects the side magnet (630) arranged on the lead (200), so that the amount of movement of the lead (200) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (200) can be measured.

[0136] Fig. 18 is a drawing for explaining when forces in the x-axis direction, y-axis direction, yaw direction, and pitch direction are applied to the force-torque sensor according to the present embodiment.

[0137] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the present embodiment, the lead (200) and the first carrier (310) can be rotated or tilted around the x-axis as a whole (see A of FIG. 18) (see B of FIG. 18). At this time, since the base (100) is maintained in a fixed state, the side sensor (640) arranged on the base (100) can detect the side magnet (630) arranged on the lead (200) to measure the amount of movement of the lead (200). Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (200) can be measured. As a variation, the side sensor (640) can detect the movement of the first carrier (310).

[0138] When an external force having a component in at least one direction of the x-axis direction and the pitch direction is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the present embodiment, the lead (200) and the first carrier (310) can be rotated or tilted integrally (see A of FIG. 18) around the y-axis (see C of FIG. 18). At this time, since the base (100) is maintained in a fixed state, the side sensor (640) arranged on the base (100) detects the side magnet (630) arranged on the lead (200), so that the amount of movement of the lead (200) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (200) can be measured.

[0139]

[0140] Below, the configuration of the robot according to this embodiment is described.

[0141] A robot may include a body. The robot may include an arm connected to the body. The arm of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the present embodiment may be disposed on the gripping portion of the arm. The arm of the robot may include a joint. The force-torque sensor of the present embodiment may be disposed on a joint of the arm.

[0142]

[0143] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential features thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

Claims

1. Base; a lead arranged on the base; and Including a first carrier and a second carrier arranged between the base and the lead, When the lead is pressed in the first axial direction, the lead, the first carrier, and the second carrier move in the first axial direction with respect to the base, A force-torque sensor in which, when the lead is pressed in a first circumferential direction centered on the first axis, the lead moves in the first circumferential direction with respect to the first carrier.

2. In paragraph 1, A force-torque sensor in which the lead and the first carrier move relative to the second carrier when the lead is pressed in a direction other than the first axis and the first circumferential direction.

3. In paragraph 1, A force-torque sensor in which the lead and the first carrier move relative to the second carrier when the lead is pressed in a second axis direction perpendicular to the first axis or in a third axis direction perpendicular to both the first axis and the second axis.

4. In paragraph 3, A force-torque sensor in which the lead and the first carrier move relative to the second carrier when the lead is pressed in a second circumferential direction centered on the second axis or in a third circumferential direction centered on the third axis.

5. In paragraph 1, A force-torque sensor comprising a flange portion and a carrier portion connected to the flange portion through a first elastic member.

6. In paragraph 1, A first ball is disposed between the lead and the first carrier, At least one of the lead and the first carrier includes a first rail on which the first ball is placed, The above first rail is a force-torque sensor extending in the first circumferential direction.

7. In paragraph 1, A force-torque sensor including a second ball disposed between the first carrier and the second carrier.

8. In paragraph 2, A first ball disposed between the lead and the first carrier; and Including a second ball disposed between the first carrier and the second carrier, A force-torque sensor in which at least a portion of the first ball overlaps the second ball in the first axis direction.

9. In paragraph 1, A first magnet arranged on either the second carrier or the base; and A force-torque sensor comprising a first sensor disposed on the other of the second carrier and the base and detecting the first magnet.

10. In paragraph 1, a second magnet disposed on one of the above lead and the above base; and A force-torque sensor comprising a second sensor disposed on the other of the lead and the base and detecting the second magnet.

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