Force-torque sensor and robot

Abstract

The present invention relates to a force-torque sensor, the force-torque sensor according to an embodiment of the present invention comprising: a base; a lid disposed on top of the base; and a carrier disposed between the base and lid, the lid moving in the first axial direction relative to the carrier when the former is pressed in the first axial direction, and the lid and carrier moving relative to the base when the lid is pressed in a direction different from the first axial direction.

Description

Force-torque sensors and robots

[0001] The present embodiment relates to a force-torque sensor.

[0002] Robots are used in a variety of fields, including industry, medicine, service, and other fields, and their scope of application is constantly expanding. To improve the performance and ensure safety of robotic systems, accurate monitoring and control of robot movements are essential. In particular, the forces and torques generated when a robot interacts with its environment or handles objects are crucial information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, forces and torques play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp and manipulate objects and respond to their environment. Furthermore, these sensors can be utilized to improve robot efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors cannot separate the applied external force into the forces of each axis. Instead, they receive input simultaneously and decompose the forces. This causes crosstalk noise to be mixed into the detection values ​​for each axis. In particular, noise increases when the Z-axis and torque forces are mixed.

[0005] (Patent Document 1) KR 10-2023-0123723 A

[0006] The present embodiment seeks to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0007] Through this, we aim to improve robot control and work processes.

[0008] A force-torque sensor according to a first embodiment of the present invention comprises: a base; a lead disposed on the base; and a carrier disposed between the base and the lead, wherein when the lead is pressed in a first axial direction, the lead moves relative to the carrier in the first axial direction, and when the lead is pressed in a direction other than the first axial direction, the lead and the carrier can move relative to the base.

[0009] When the lead is pressed in a second axis direction perpendicular to the first axis, a third axis direction perpendicular to both the first axis and the second axis, or a first circumferential direction centered on the first axis, the lead and the carrier can move relative to the base.

[0010] When the lead is pressed in a second circumferential direction centered on the second axis or in a third circumferential direction centered on the third axis, the lead and the carrier can move relative to the base.

[0011] The force-torque sensor includes a first ball disposed between the lead and the carrier, at least one of the lead and the carrier includes a first rail on which the first ball is disposed, and the first rail can extend in the first axial direction.

[0012] The force-torque sensor includes a second ball disposed between the base and the carrier, at least one of the base and the carrier includes a second rail on which the second ball is disposed, and the second rail can extend in the first circumferential direction.

[0013] The force-torque sensor includes a first ball disposed between the lead and the carrier; and a second ball disposed between the base and the carrier, wherein the carrier includes a first surface on which the first ball is disposed and a second surface on which the second ball is disposed, and the second surface of the carrier may be disposed not to be parallel to the first surface of the carrier.

[0014] Each of the first ball and the second ball may be arranged at least three apart in the first circumferential direction when viewed from above.

[0015] The force-torque sensor may include a magnet disposed on one of the carrier and the base; and a sensor disposed on the other of the carrier and the base and detecting the magnet.

[0016] The force-torque sensor may include a first magnet and a first sensor detecting the first magnet, the base may include a lower plate and a side plate extending from the lower plate, the first magnet may be disposed on a lower surface of the lead, and the first sensor may be disposed on the lower plate of the base.

[0017] The force-torque sensor includes a second magnet, and a second-first sensor, a second-second sensor, a second-third sensor, and a second-fourth sensor that detect the second magnet, the base includes a lower plate and a side plate extending from the lower plate, the carrier includes a lower surface of the base facing the lower plate, and an outer surface of the base facing the side plate, the second magnet is disposed on the outer surface of the carrier, the second-first sensor, the second-second sensor, the second-third sensor, and the second-fourth sensor are disposed on the side plate of the base, and when viewed from the inside, the second-first sensor may be disposed above the second magnet, the second-second sensor may be disposed below the second magnet, the second-third sensor may be disposed on the left side of the second magnet, and the second-fourth sensor may be disposed on the right side of the second magnet.

[0018] The force-torque sensor may include a first elastic member connecting the lead and the carrier; and a second elastic member connecting the base and the carrier.

[0019] The force-torque sensor may include a coil disposed on one of the carrier and the base; and a sensor disposed on the other of the carrier and the base and detecting an electromagnetic field of the coil when current is applied to the coil.

[0020] The force-torque sensor may include a capacitance sensor that measures a change in capacitance between the lead and the base or between the carrier and the base.

[0021] The force-torque sensor may include a man-power magnet disposed on one of the base and the carrier; and a yoke disposed on the other of the base and the carrier, on which man-power acts with the man-power magnet.

[0022] A robot according to the first embodiment of the present invention may include the force-torque sensor.

[0023] A force-torque sensor according to a second embodiment of the present invention includes a base; a lead disposed on the base; and a carrier disposed between the base and the lead, wherein when the lead is pressed in a first axial direction, the lead and the carrier move in the first axial direction with respect to the base, and when the lead is pressed in a direction other than the first axial direction, the lead can move with respect to the carrier.

[0024] When the lead is pressed in a second axis direction perpendicular to the first axis, a third axis direction perpendicular to both the first axis and the second axis, or a first circumferential direction centered on the first axis, the lead can move relative to the carrier.

[0025] When the lead is pressed in a second circumferential direction centered on the second axis or in a third circumferential direction centered on the third axis, the lead can move relative to the carrier.

[0026] The force-torque sensor includes a first ball disposed between the lead and the carrier, at least one of the lead and the carrier includes a first rail on which the first ball is disposed, and the first rail can extend in the first circumferential direction.

[0027] The force-torque sensor includes a second ball disposed between the base and the carrier, at least one of the base and the carrier includes a second rail on which the second ball is disposed, and the second rail can extend in the first axis direction.

[0028] The force-torque sensor includes a first ball disposed between the lead and the carrier; and a second ball disposed between the base and the carrier, wherein the carrier includes a first surface on which the first ball is disposed and a second surface on which the second ball is disposed, and the second surface of the carrier may be disposed not to be parallel to the first surface of the carrier.

[0029] At least 23 of the above second balls can be arranged spaced apart from each other in the first circumferential direction when viewed from above.

[0030] The above first ball may include a greater number of balls than the above second ball when viewed from above.

[0031] The force-torque sensor includes a first magnet and a first sensor detecting the first magnet, the base includes a lower plate and a side plate extending from the lower plate, the carrier includes a lower surface of the base facing the lower plate and an outer surface of the base facing the side plate, the first magnet may be disposed on the lower surface of the carrier, and the first sensor may be disposed on the lower plate of the base.

[0032] The force-torque sensor includes a second magnet, and a second-first sensor, a second-second sensor, a second-third sensor, and a second-fourth sensor that detect the second magnet, and the lead includes a flange portion and a column portion extending from the flange portion toward the base, and the column portion of the lead includes an outer circumferential surface having a curve and a protrusion portion protruding outward from the outer circumferential surface, and the second magnet is disposed on the protrusion portion of the lead, and the second-first sensor, the second-second sensor, the second-third sensor, and the second-fourth sensor are disposed on the carrier, and when viewed from the inside, the second-first sensor may be disposed above the second magnet, the second-second sensor may be disposed below the second magnet, the second-third sensor may be disposed on the left side of the second magnet, and the second-fourth sensor may be disposed on the right side of the second magnet.

[0033] The force-torque sensor may include a first elastic member connecting the lead and the carrier; and a second elastic member connecting the base and the carrier.

[0034] The force-torque sensor may include a coil disposed on one of the carrier and the base; and a sensor disposed on the other of the carrier and the base and detecting an electromagnetic field of the coil when current is applied to the coil.

[0035] The force-torque sensor may include a capacitance sensor that measures a change in capacitance between the base and the carrier or between the carrier and the lead.

[0036] The force-torque sensor may include a man-power magnet disposed on one of the base and the carrier; and a yoke disposed on the other of the base and the carrier, on which man-power acts with the man-power magnet.

[0037] A robot according to a second embodiment of the present invention may include the force-torque sensor.

[0038] The force-torque sensor according to this embodiment can measure the Z-axis force and torque force separately. This minimizes the influence of noise due to crosstalk on the detection values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0039] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0040] Figure 2 is a cross-sectional view taken along line AA of Figure 1.

[0041] Figure 3 is a BB cross-sectional view of Figure 1.

[0042] FIG. 4 is a cross-sectional view of a force-torque sensor according to a first embodiment of the present invention, cut perpendicular to the z-axis and viewed from above.

[0043] Figure 5 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0044] FIG. 6 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention, viewed from a different direction than FIG. 5.

[0045] Fig. 7 is a perspective view of a force-torque sensor according to a first embodiment of the present invention with the lead omitted.

[0046] FIG. 8 is a plan view of a force-torque sensor according to a first embodiment of the present invention with the lead omitted.

[0047] Figure 9 is a perspective view of Figure 7 with the carrier omitted.

[0048] FIG. 10 is a perspective view showing a carrier and related configuration of a force-torque sensor according to a first embodiment of the present invention.

[0049] Figure 11 is a side view of Figure 10.

[0050] Figure 12 is a bottom perspective view of Figure 10 viewed from a different direction.

[0051] Fig. 13 is a bottom perspective view showing a state in which the lead and related components are combined in Fig. 12.

[0052] FIG. 14 is a bottom perspective view illustrating a lead and related configuration of a force-torque sensor according to a first embodiment of the present invention.

[0053] Figure 15 is a conceptual diagram of a force-torque sensor according to a first embodiment of the present invention.

[0054] Fig. 16 is a cross-sectional view of a force-torque sensor according to a modified example.

[0055] Figure 17 is a bottom perspective view illustrating a sensing structure according to a modified example.

[0056] FIG. 18 is a drawing showing a state in which the lead moves in the z-axis direction in a force-torque sensor according to the first embodiment of the present invention.

[0057] FIG. 19 is a drawing for explaining when forces in the x-axis direction, y-axis direction, yaw direction, and pitch direction are applied to a force-torque sensor according to the first embodiment of the present invention.

[0058] FIG. 20 is a drawing for explaining when a roll direction force is applied to a force-torque sensor according to the first embodiment of the present invention.

[0059] Fig. 21 is a perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0060] Figure 22 is a cross-sectional view taken along line AA of Figure 21.

[0061] Figure 23 is a BB cross-sectional view of Figure 21.

[0062] Figure 24 is a cross-sectional view of a force-torque sensor according to a second embodiment of the present invention, cut perpendicular to the z-axis and viewed from above.

[0063] Fig. 25 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0064] Fig. 26 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention, viewed from a different direction than Fig. 25.

[0065] Fig. 27 is a perspective view of a force-torque sensor according to a second embodiment of the present invention with the lead omitted.

[0066] Fig. 28 is a plan view of a force-torque sensor according to a second embodiment of the present invention with the lead omitted.

[0067] Figure 29 is a perspective view of Figure 27 with the carrier omitted.

[0068] FIG. 30 is a perspective view showing a carrier and related configuration of a force-torque sensor according to a second embodiment of the present invention.

[0069] Figure 31 is a side view of Figure 30.

[0070] Figure 32 is a bottom perspective view of Figure 30 viewed from a different direction.

[0071] FIG. 33 is a cross-sectional perspective view showing a lead and carrier and related configuration of a force-torque sensor according to a second embodiment of the present invention.

[0072] FIG. 34 is a bottom perspective view illustrating a lead and related configuration of a force-torque sensor according to a second embodiment of the present invention.

[0073] Figure 35 is a conceptual diagram of a force-torque sensor according to a second embodiment of the present invention.

[0074] FIG. 36 is a drawing showing a state in which the lead moves in the z-axis direction in a force-torque sensor according to a second embodiment of the present invention.

[0075] FIG. 37 is a drawing for explaining when forces in the x-axis direction, y-axis direction, yaw direction, and pitch direction are applied to a force-torque sensor according to a second embodiment of the present invention.

[0076] FIG. 38 is a drawing for explaining when a roll direction force is applied to a force-torque sensor according to a second embodiment of the present invention.

[0077] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0078] However, the technical idea of ​​the present invention is not limited to some of the embodiments described, but can be implemented in various different forms, and within the scope of the technical idea of ​​the present invention, one or more of the components between the embodiments can be selectively combined or substituted for use.

[0079] In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be interpreted as having a meaning that can be generally understood by a person of ordinary skill in the technical field to which the present invention belongs, unless explicitly and specifically defined and described, and terms that are commonly used, such as terms defined in a dictionary, may be interpreted in consideration of the contextual meaning of the relevant technology.

[0080] Additionally, the terms used in the embodiments of the present invention are intended to describe the embodiments and are not intended to limit the present invention.

[0081] In this specification, the singular may also include the plural unless specifically stated otherwise in the phrase, and when it is described as “A and / or at least one (or more) of B, C”, it may include one or more of all combinations that can be combined with A, B, C.

[0082] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and are not intended to limit the nature, order, or sequence of the components.

[0083] And, when a component is described as being 'connected', 'coupled', or 'connected' to another component, it may include not only cases where the component is 'connected', 'coupled', or 'connected' directly to the other component, but also cases where the component is 'connected', 'coupled', or 'connected' by another component between the component and the other component.

[0084] Additionally, when described as being formed or arranged "above" or "below" each component, "above" or "below" includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or arranged between the two components. Furthermore, when expressed as "above" or "below," the meaning may include not only the upward direction but also the downward direction based on one component.

[0085] Hereinafter, the base (100) may be referred to as a “fixed part”.

[0086] Hereinafter, the lead (200) and the carrier (300) may be referred to as “moving parts”. Hereinafter, one of the lead (200) and the carrier (300) may be referred to as the “first moving part” and the other may be referred to as the “second moving part”.

[0087] Hereinafter, one of the outer rail (130), the inner rail (230), and the inner rail (310) may be referred to as the “first rail,” the other as the “second rail,” and the other as the “third rail.” Additionally, any two configurations of the outer rail (130), the inner rail (230), and the inner rail (310) may be collectively referred to as the “first rail,” etc.

[0088] Hereinafter, one of the internal guide ball (410) and the external guide ball (420) may be referred to as the “first ball” and the other may be referred to as the “second ball.”

[0089] Hereinafter, one of the internal elastic member (510) and the external elastic member (520) may be referred to as the “first elastic member” and the other may be referred to as the “second elastic member”. In addition, hereinafter, the internal upper elastic member (511), the internal lower elastic member (512), the external upper elastic member (521), the external lower elastic member (522), and the lower elastic member connecting portion (532) may be referred to as “first to fifth elastic members”. In addition, the internal upper elastic member (511) and the external upper elastic member (521) may be collectively referred to as the “upper elastic member”, and the internal lower elastic member (512) and the external lower elastic member (522) may be collectively referred to as the “lower elastic member”.

[0090] Hereinafter, one of the z-axis magnet (610) and the side magnet (630) may be referred to as the “first magnet” and the other may be referred to as the “second magnet.”

[0091] Hereinafter, one of the z-axis sensor (620) and the side sensor (640) may be referred to as a “first sensor” and the other may be referred to as a “second sensor.”

[0092] Hereinafter, the base (1100) may be referred to as a “fixed part”.

[0093] Hereinafter, the lead (1200) and the carrier (1300) may be referred to as “moving parts”. Hereinafter, one of the lead (1200) and the carrier (1300) may be referred to as the “first moving part” and the other may be referred to as the “second moving part”.

[0094] Hereinafter, one of the inner rail (1230), the inner rail (1310), and the outer rail (1340) may be referred to as the “first rail,” the other as the “second rail,” and the other as the “third rail.” Additionally, any two configurations of the inner rail (1230), the inner rail (1310), and the outer rail (1340) may be collectively referred to as the “first rail,” etc.

[0095] Hereinafter, one of the inner guide ball (1410) and the outer guide ball (1420) may be referred to as the “first ball” and the other may be referred to as the “second ball.”

[0096] Hereinafter, one of the internal elastic member and the external elastic member (1520) may be referred to as the “first elastic member” and the other may be referred to as the “second elastic member.” In addition, hereinafter, the internal upper elastic member (1511), the external upper elastic member (1521), the external lower elastic member (1522), and the lower elastic member connecting portion (1532) may be referred to as the “first to fourth elastic members.” In addition, the internal upper elastic member (1511) and the external upper elastic member (1521) may be collectively referred to as the “upper elastic member.”

[0097] Hereinafter, one of the z-axis magnet (1610) and the side magnet (1630) may be referred to as the “first magnet” and the other may be referred to as the “second magnet.”

[0098] Hereinafter, one of the z-axis sensor (1620) and the side sensor (1640) may be referred to as the “first sensor” and the other may be referred to as the “second sensor.”

[0099] Hereinafter, one of the z-axis, x-axis, and y-axis may be referred to as the “first axis,” the other as the “second axis,” and the other as the “third axis.”

[0100] Hereinafter, one of the roll direction, yaw direction, and pitch direction may be referred to as a “first circumferential direction,” another may be referred to as a “second circumferential direction,” and another may be referred to as a “third circumferential direction.” In addition, the roll direction, yaw direction, and pitch direction may be referred to as “first to third directions.”

[0101]

[0102] Hereinafter, the configuration of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0103] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA of FIG. 1. FIG. 3 is a cross-sectional view taken along line BB of FIG. 1. FIG. 4 is a cross-sectional view taken along line AA of FIG. 1 and viewed from above of the force-torque sensor according to the first embodiment of the present invention. FIG. 5 is an exploded perspective view of the force-torque sensor according to the first embodiment of the present invention. FIG. 6 is an exploded perspective view of the force-torque sensor according to the first embodiment of the present invention when viewed from a different direction from FIG. 5. FIG. 7 is a perspective view of the force-torque sensor according to the first embodiment of the present invention with the lead omitted. FIG. 8 is a plan view of the force-torque sensor according to the first embodiment of the present invention with the lead omitted. FIG. 9 is a perspective view of FIG. 7 with the carrier omitted. Fig. 10 is a perspective view illustrating a carrier and related components of a force-torque sensor according to a first embodiment of the present invention. Fig. 11 is a side view of Fig. 10. Fig. 12 is a bottom perspective view of Fig. 10 viewed from another direction. Fig. 13 is a bottom perspective view illustrating a state in which the leads and related components of Fig. 12 are coupled. Fig. 14 is a bottom perspective view illustrating the leads and related components of a force-torque sensor according to a first embodiment of the present invention. Fig. 15 is a conceptual diagram of a force-torque sensor according to a first embodiment of the present invention.

[0104] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0105] A force-torque sensor may include a fixed part. The fixed part may be a part that is relatively fixed when the moving part moves, as distinguished from the moving part.

[0106] A force-torque sensor may include a base (100). The fixing member may include the base (100). A lead (200) may be disposed on the base (100). At least a portion of the lead (200) may be accommodated on the base (100). A carrier (300) may be disposed on the base (100). At least a portion of the carrier (300) may be accommodated on the base (100). A ball may be disposed on the base (100). An elastic member may be disposed on the base (100). A sensing structure may be disposed on the base (100). The base (100) may be formed in a cylindrical shape with an open top. Alternatively, the base (100) may be formed in a square cylindrical shape with an open top.

[0107] The base (100) may include a lower plate (110). The lower plate (110) may be a base plate. The lower plate (110) may be a bottom plate. The lower plate (110) may include a hole (111). The hole (111) may be hollow. The lower plate (110) may be formed in a circular shape. Alternatively, the lower plate (110) may be formed in a square shape.

[0108] The base (100) may include a side plate (120). The side plate (120) may extend from the lower plate (110). The side plate (120) may extend upward from the lower plate (110). The side plate (120) may be formed in a circular ring shape when viewed from above. Alternatively, the side plate (120) may be formed in a square ring shape when viewed from above.

[0109] The base (100) may include an outer rail (130). The outer rail (130) may be an outer guide ball rail. An outer guide ball (420) may be arranged on the outer rail (130). The outer rail (130) may extend in the roll direction. The outer rail (130) may guide the outer guide ball (420) to move in the roll direction. The outer rail (130) may guide the outer guide ball (420) to rotate on the outer rail (130). The outer rail (130) may be formed by a groove. The outer rail (130) may include a groove. The outer rail (130) may be a groove.

[0110] The force-torque sensor may include a moving part. The moving part may be a part that moves in response to an external force. That is, the moving part can move relative to the fixed part when an external force is applied to the force-torque sensor.

[0111] The force-torque sensor may include a z-axis moving member. The z-axis moving member may move in the z-axis direction.

[0112] The force-torque sensor may include a lead (200). The lead (200) may be disposed on the base (100). The lead (200) may be disposed on the base (100). At least a portion of the lead (200) may be disposed within the base (100). At least a portion of the lead (200) may be accommodated in the base (100). The lead (200) may be movably disposed on the base (100). The lead (200) may be movable in the z-axis direction. The lead (200) may be movable relative to the base (100). The lead (200) may be movable relative to the carrier (300).

[0113] The lead (200) may include a flange portion (210). The flange portion (210) may be formed in a flange shape. The flange portion (210) may be formed in a plate shape. The flange portion (210) may be a portion to which an external force is applied. The flange portion (210) may be disposed on the base (100). The flange portion (210) may be disposed on the upper side of the base (100). The flange portion (210) may be disposed spaced apart from the base (100). The flange portion (210) may be formed in a circular shape. As a variation, the flange portion (210) may be formed in a square shape.

[0114] The flange portion (210) may include a first hole (211). The first hole (211) may be hollow. The flange portion (210) may include a second hole (212). The second hole (212) may be a joining hole. The second hole (212) may include a plurality of holes. Screws or the like that are joined to other components of the robot may be assembled into the second hole (212).

[0115] The lead (200) may include a pillar portion (220). The pillar portion (220) may extend from the flange portion (210). The pillar portion (220) may extend downward from the flange portion (210). At least a portion of the pillar portion (220) may be disposed within the base (100). The pillar portion (220) may be formed in a cylindrical shape. An internal guide ball (410) may be disposed in the pillar portion (220). The pillar portion (220) may be formed integrally with the flange portion (210). The pillar portion (220) may move together when the flange portion (210) moves.

[0116] The lead (200) may include an inner rail (230). The inner rail (230) may be an inner guide ball rail. An inner guide ball (410) may be arranged on the inner rail (230). The inner rail (230) may extend in the z-axis direction. The inner rail (230) may guide the inner guide ball (410) to move in the z-axis direction. The inner rail (230) may guide the inner guide ball (410) to rotate on the inner rail (230). The inner rail (230) may be formed by a groove. The inner rail (230) may include a groove. The inner rail (230) may be a groove.

[0117] The force-torque sensor may include a tilting member. The tilting member may be tilted relative to the fixed member.

[0118] The force-torque sensor may include a carrier (300). The carrier (300) may be disposed between the base (100) and the lid (200). The carrier (300) may be disposed within the base (100). The carrier (300) may be disposed on the base (100). The carrier (300) may be movably disposed on the base (100). At least a portion of the carrier (300) may be accommodated in the base (100). The carrier (300) may be disposed on the lower side of the lid (200). The carrier (300) may be disposed on the lower side of the flange portion (210) of the lid (200). The carrier (300) may be disposed on the outer side of the lid (200). The carrier (300) can be placed on the outside of the pillar portion (220) of the lead (200). The carrier (300) can move in all directions except the z-axis direction. The carrier (300) can move relative to the base (100). The carrier (300) can move together with the lead (200) in all directions except the z-axis direction.

[0119] The carrier (300) may include a lower surface facing the lower plate (110) of the base (100). The carrier (300) may include an outer surface facing the side plate (120) of the base (100).

[0120] The carrier (300) may include an inner rail (310). The inner rail (310) may be an inner guide ball rail. An inner guide ball (410) may be arranged on the inner rail (310). The inner rail (310) may extend in the z-axis direction. The inner rail (310) may guide the inner guide ball (410) to move in the z-axis direction. The inner rail (310) may guide the inner guide ball (410) to rotate on the inner rail (310). The inner rail (310) may be formed by a groove. The inner rail (310) may include a groove. The inner rail (310) may be a groove.

[0121] The carrier (300) may include a first surface (321). The carrier (300) may include a second surface (322). The carrier (300) may include a first surface (321) on which an internal guide ball (410) is arranged, and a second surface (322) on which an external guide ball (420) is arranged. The second surface (322) of the carrier (300) may be arranged not to be parallel to the first surface (321) of the carrier (300). In a cross-section, the first surface (321) of the carrier (300) may include a straight line on which an internal guide ball (410) is arranged. In a cross-section, the second surface (322) of the carrier (300) may include a curved line on which an external guide ball (420) is arranged.

[0122] The carrier (300) may include a groove (330). The groove (330) may be a side magnet placement groove. A side magnet (630) may be placed in the groove (330). The groove (330) may be formed in a shape corresponding to the side magnet (630). The groove (330) may be recessed into the outer surface of the carrier (300).

[0123] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving member relative to the fixed member.

[0124] The force-torque sensor may include a ball. The guide member may include a ball. The ball may guide the movement of the moving part relative to the fixed part. The ball may direct the movement of the moving part relative to the fixed part in a specific direction. In the first embodiment of the present invention, the ball may be formed of a ceramic ball.

[0125] The force-torque sensor may include an internal guide ball (410). The internal guide ball (410) may be a z-axis guide ball. The internal guide ball (410) may limit the movement of the lead (200) relative to the carrier (300) in the z-axis direction. The internal guide ball (410) may guide the movement of the lead (200) relative to the carrier (300) in the z-axis direction. The internal guide ball (410) may guide the lead (200) to move in the z-axis direction relative to the base (100).

[0126] The inner guide ball (410) may be placed between the lead (200) and the carrier (300). The inner guide ball (410) may be placed in the lead (200). The inner guide ball (410) may be in contact with the lead (200). The inner guide ball (410) may move along the lead (200). The inner guide ball (410) may be placed in the carrier (300). The inner guide ball (410) may be in contact with the carrier (300). The inner guide ball (410) may move along the carrier (300).

[0127] The inner guide ball (410) may be placed between the inner rail (230) of the lead (200) and the inner rail (310) of the carrier (300). The inner guide ball (410) may be placed on the inner rail (230) of the lead (200). The inner guide ball (410) may move along the inner rail (230) of the lead (200). The inner guide ball (410) may be placed on the inner rail (310) of the carrier (300). The inner guide ball (410) may move along the inner rail (310) of the carrier (300).

[0128] The inner guide ball (410) may include a plurality of balls. At least three inner guide balls (410) may be arranged spaced apart in the roll direction when viewed from above. Four inner guide balls (410) may be arranged spaced apart in the roll direction when viewed from above. The inner guide ball (410) may include a plurality of balls overlapping in the z-axis direction. The inner guide ball (410) may include three balls overlapping in the z-axis direction. The inner guide ball (410) may be composed of four groups of three balls each, for a total of twelve balls.

[0129] The force-torque sensor may include an external guide ball (420). The external guide ball (420) may be a rotational guide ball. The external guide ball (420) may limit the movement of the carrier (300) relative to the base (100) in a rotational direction. The external guide ball (420) may guide the movement of the carrier (300) relative to the base (100) in a rotational direction. The external guide ball (420) may guide the carrier (300) to rotate relative to the base (100).

[0130] The external guide ball (420) may be placed between the base (100) and the carrier (300). The external guide ball (420) may be placed on the base (100). The external guide ball (420) may be in contact with the base (100). The external guide ball (420) may move along the base (100). The external guide ball (420) may be placed on the carrier (300). The external guide ball (420) may be in contact with the carrier (300). The external guide ball (420) may move along the carrier (300).

[0131] The external guide ball (420) may be arranged between the external rail (130) of the base (100) and the carrier (300). In the first embodiment of the present invention, the carrier (300) is illustrated as not having a separate rail for the external guide ball (420), but as a variation, the carrier (300) may include a rail on which the external guide ball (420) is arranged. The external guide ball (420) may be arranged on the external rail (130) of the base (100). The external guide ball (420) may move along the external rail (130) of the base (100).

[0132] The external guide ball (420) may include a plurality of balls. At least three external guide balls (420) may be arranged spaced apart in the roll direction when viewed from above. Four external guide balls (420) may be arranged spaced apart in the roll direction when viewed from above. The external guide balls (420) may be arranged in two layers in the z-axis direction. That is, the external guide balls (420) may include a lower ball and an upper ball arranged higher than the lower ball. In the first embodiment of the present invention, the external guide balls (420) may be composed of four balls in two layers, for a total of eight balls. In a variation, the external guide balls (420) may be arranged in three, four, or more layers on the z-axis. In a variation, five, six, or more external guide balls (420) may be arranged in each layer.

[0133] The force-torque sensor may include a restoring member. The restoring member can return the moving part to its original position when the external force acting on the force-torque sensor is removed.

[0134] The force-torque sensor may include a ball pressure member. The ball pressure member may pressurize the inner guide ball (410) so that the inner guide ball (410) remains in contact with the lead (200) and the carrier (300) without moving out of a preset position. The ball pressure member may pressurize the outer guide ball (420) so that the outer guide ball (420) remains in contact with the carrier (300) and the base (100) without moving out of a preset position.

[0135] The force-torque sensor may include an elastic member. The restoring member may include an elastic member. The ball pressurizing member may include an elastic member. The elastic member may move the moving member to its original position when the external force applied thereto is removed. The elastic member may maintain the ball's pressurized state. The elastic member may include a spring. The elastic member may have elasticity. The elastic member may have an elastic restoring force.

[0136] The force-torque sensor may include an internal elastic member (510). The elastic member may include an internal elastic member (510). The internal elastic member (510) may connect the lead (200) and the carrier (300). The internal elastic member (510) may elastically connect the lead (200) and the carrier (300). The internal elastic member (510) may be coupled to the lead (200) and the carrier (300). The internal elastic member (510) may be coupled to the lead (200). The internal elastic member (510) may be coupled to the carrier (300). The internal elastic member (510) may support the lead (200) to be movable relative to the carrier (300).

[0137] As a variation, as illustrated in FIG. 15, the internal elastic member (510a) can connect the lead (200) and the base (100). The internal elastic member (510a) can connect the lower surface of the lead (200) and the lower plate (110) of the base (100).

[0138] The force-torque sensor may include an inner upper elastic member (511). The inner elastic member (510) may include an inner upper elastic member (511). The inner upper elastic member (511) may connect the upper portion of the lead (200) and the upper portion of the carrier (300). The inner upper elastic member (511) may elastically connect the upper portion of the lead (200) and the upper portion of the carrier (300). The inner upper elastic member (511) may be coupled to the upper portion of the lead (200). The inner upper elastic member (511) may be coupled to the upper portion of the carrier (300). The inner upper elastic member (511) may be coupled to the upper surface of the carrier (300).

[0139] The force-torque sensor may include an inner lower elastic member (512). The inner elastic member (510) may include an inner lower elastic member (512). The inner lower elastic member (512) may connect the lower portion of the lead (200) and the lower portion of the carrier (300). The inner lower elastic member (512) may elastically connect the lower portion of the lead (200) and the lower portion of the carrier (300). The inner lower elastic member (512) may be coupled to the lower portion of the lead (200). The inner lower elastic member (512) may be coupled to the lower portion of the lead (200). The inner lower elastic member (512) may be coupled to the lower portion of the carrier (300). The inner lower elastic member (512) may be coupled to the lower portion of the carrier (300).

[0140] The force-torque sensor may include an external elastic member (520). The elastic member may include an external elastic member (520). The external elastic member (520) may connect the base (100) and the carrier (300). The external elastic member (520) may elastically connect the base (100) and the carrier (300). The external elastic member (520) may be coupled to the base (100) and the carrier (300). The external elastic member (520) may be coupled to the base (100). The external elastic member (520) may be coupled to the carrier (300). The external elastic member (520) may support the carrier (300) to be movable relative to the base (100).

[0141] The force-torque sensor may include an external upper elastic member (521). The external elastic member (520) may include an external upper elastic member (521). The external upper elastic member (521) may connect the upper portion of the base (100) and the upper portion of the carrier (300). The external upper elastic member (521) may elastically connect the upper portion of the base (100) and the upper portion of the carrier (300). The external upper elastic member (521) may be coupled to the upper portion of the base (100). The external upper elastic member (521) may be coupled to the upper surface of the base (100). The external upper elastic member (521) may be coupled to the upper portion of the carrier (300). The external upper elastic member (521) may be coupled to the upper surface of the carrier (300).

[0142] The force-torque sensor may include an external lower elastic member (522). The external elastic member (520) may include an external lower elastic member (522). The external lower elastic member (522) may connect the lower portion of the base (100) and the lower portion of the carrier (300). The external lower elastic member (522) may elastically connect the lower portion of the base (100) and the lower portion of the carrier (300). The external lower elastic member (522) may be coupled to the lower portion of the base (100). The external lower elastic member (522) may be coupled to the lower portion of the carrier (300). The external lower elastic member (522) may be coupled to the lower surface of the carrier (300).

[0143] The force-torque sensor may include a lower elastic member connecting portion (532). The lower elastic member connecting portion (532) may connect the inner lower elastic member (512) and the outer lower elastic member (522). The lower elastic member connecting portion (532) may be formed integrally with the inner lower elastic member (512) and the outer lower elastic member (522). The lower elastic member connecting portion (532) may be disposed on the carrier (300). The lower elastic member connecting portion (532) may be disposed on the lower surface of the carrier (300).

[0144] The force-torque sensor may include a sensing member. The sensing member may detect movement of a moving member relative to a fixed member. The sensing member may measure the amount of movement of the moving member relative to the fixed member. The sensing member may include a magnet and a Hall sensor. The magnet may be disposed on one of the carrier (300) and the base (100). The sensor may be disposed on the other of the carrier (300) and the base (100). The sensor may detect the magnet. The sensor may be a Hall sensor.

[0145] The force-torque sensor may include a z-axis sensing element. The z-axis sensing element may detect movement of the lead (200) in the z-axis direction. The z-axis sensing element may measure the amount of movement of the lead (200) in the z-axis direction.

[0146] The force-torque sensor may include a z-axis magnet (610). The z-axis magnet (610) may be disposed on the lower plate (110) of the base (100). The z-axis magnet (610) may be disposed on the base (100).

[0147] The force-torque sensor may include a z-axis sensor (620). The z-axis sensor (620) may face the z-axis magnet (610). The z-axis sensor (620) may be positioned at a position corresponding to the z-axis magnet (610). The z-axis sensor (620) may be positioned on the lower surface of the lead (200). The z-axis sensor (620) may be positioned on the lead (200). The z-axis sensor (620) may move together with the lead (200).

[0148] The z-axis sensor (620) can detect the z-axis magnet (610). The z-axis sensor (620) can measure the amount of movement of the z-axis magnet (610). The z-axis sensor (620) can detect the magnetic field of the z-axis magnet (610). The z-axis sensor (620) can be a Hall sensor.

[0149] As a variation, the z-axis magnet (610) may be placed on the lead (200) and the z-axis sensor (620) may be placed on the base (100).

[0150] Alternatively, the z-axis magnet (610) may be placed on the lower surface of the lead (200). The z-axis magnet (610) may be placed on the lead (200). The z-axis magnet (610) may move together with the lead (200).

[0151] At this time, the z-axis sensor (620) may be placed on the lower plate (110) of the base (100). The z-axis sensor (620) may be placed on the base (100).

[0152] The force-torque sensor may include a rotation sensing member. The rotation sensing member may detect the rotation of the carrier (300). The rotation sensing member may measure the amount of rotation of the carrier (300).

[0153] The force-torque sensor may include a side magnet (630). The side magnet (630) may be disposed on an outer surface of the carrier (300). The side magnet (630) may be disposed on the carrier (300). The side magnet (630) may move together with the carrier (300).

[0154] The force-torque sensor may include a side sensor (640). The side sensor (640) may detect a side magnet (630). The side sensor (640) may measure the amount of movement of the side magnet (630). The side sensor (640) may detect a magnetic field of the side magnet (630). The side sensor (640) may be a Hall sensor. The side sensor (640) may face the side magnet (630). The side sensor (640) may be positioned corresponding to the side magnet (630). The side sensor (640) may be positioned on a side plate (120) of the base (100). The side sensor (640) may be positioned on the base (100).

[0155] Alternatively, the side magnet (630) may be placed on the base (100) and the side sensor (640) may be placed on the carrier (300).

[0156] The side sensor (640) may include multiple sensors. The side sensor (640) may include four sensors. The side sensor (640) may include first to fourth sensors (641, 642, 643, 644). The side sensor (640) may include a first side sensor (641), a second side sensor (642), a third side sensor (643), and a fourth side sensor (644) that detect the side magnet (630).

[0157] The first side sensor (641), the second side sensor (642), the third side sensor (643), and the fourth side sensor (644) may be arranged on the side plate (120) of the base (100). When viewed from the inside, the first side sensor (641) may be arranged on the upper side of the side magnet (630), the second side sensor (642) may be arranged on the lower side of the side magnet (630), the third side sensor (643) may be arranged on the left side of the side magnet (630), and the fourth side sensor (644) may be arranged on the right side of the side magnet (630).

[0158] In the first embodiment of the present invention, when the lead (200) is pressed in the z-axis direction, the lead (200) can move in the z-axis direction with respect to the carrier (300). When the lead (200) is pressed in the z-axis direction, the lead (200) can move in the z-axis direction with respect to the base (100). However, at this time, the carrier (300) can also move to some extent with respect to the base (100). However, even in this case, the movement amounts of the carrier (300) and the lead (200) may be different. That is, when the lead (200) moves in the z-axis direction, the carrier (300) may remain stationary or move less than the lead (200).

[0159] When the lead (200) is pressed in a direction other than the z-axis direction, the lead (200) and the carrier (300) can move with respect to the base (100). That is, in a direction other than the z-axis direction, the lead (200) and the carrier (300) can move as one. However, as a variation, the movement amounts of the lead (200) and the carrier (300) may be different.

[0160] When the lead (200) is pressed in the x-axis direction perpendicular to the z-axis, in the y-axis direction perpendicular to both the z-axis and the x-axis, or in the roll direction centered on the z-axis, the lead (200) and the carrier (300) can move with respect to the base (100).

[0161] When the lead (200) is pressed in the y-axis-centered direction or the pitch direction centered on the x-axis, the lead (200) and the carrier (300) can move relative to the base (100).

[0162] In the force-torque sensor according to the first embodiment of the present invention, a ball may be placed between the moving part or between the moving part and the fixed part. The ball may be pressed by an elastic member. Alternatively, as a variation, the ball may be pressed by the attractive force between the magnet and the yoke. The cross-section of the rail on which the ball is placed may be formed into a curved shape or a polygonal shape such as a triangle or square.

[0163] In the first embodiment of the present invention, the force in the z-axis direction is measured separately from the force in other directions, thereby minimizing the occurrence of crosstalk. Furthermore, the first embodiment of the present invention can also simplify the structure.

[0164] In a variation, the elasticity of one of the springs among the elastic members can be increased to design it to be stably supported in the initial position.

[0165]

[0166] Below, the configuration of a force-torque sensor according to a modified example is described with reference to the drawings.

[0167] Fig. 16 is a cross-sectional view of a force-torque sensor according to a modified example. Fig. 17 is a bottom perspective view illustrating a sensing structure according to a modified example.

[0168] A force-torque sensor according to a variation may differ from the first embodiment of the present invention in its sensing element. A force-torque sensor according to a variation may include a coil instead of a magnet.

[0169] The force-torque sensor may include a coil (650, 660). The coil (650, 660) may be disposed on either the carrier (300) or the base (100). The sensor (620, 640) may be disposed on the other of the carrier (300) or the base (100). The coil (650, 660) may be disposed on either the lead (200) or the base (100). The sensor (620, 640) may be disposed on the other of the lead (200) or the base (100). The sensor (620, 640) may detect an electromagnetic field of the coil (650, 660) when current is applied to the coil (650, 660).

[0170] The force-torque sensor may include a z-axis coil (650). The z-axis coil (650) may be disposed on the lower surface of the lead (200). The z-axis coil (650) may be disposed on the lead (200). The z-axis coil (650) may move together with the lead (200).

[0171] The force-torque sensor may include a side coil (660). The side coil (660) may be disposed on an outer surface of the carrier (300). The side coil (660) may be disposed on the carrier (300). The side coil (660) may move together with the carrier (300).

[0172] The force-torque sensor may include a substrate (670). The substrate (670) may be disposed on a carrier (300). The substrate (670) may include a first portion where a z-axis coil (650) is disposed, a second portion where a side coil (660) is disposed, and a third portion connecting the first portion and the second portion. The substrate (670) may be a flexible printed circuit board (FPCB).

[0173] In another variation, the sensing element may be equipped with a capacitive sensor instead of a magnet and a Hall sensor.

[0174] The force-torque sensor may include a capacitance sensor that measures a change in capacitance between the lead (200) and the base (100) or between the carrier (300) and the base (100). A predetermined potential may be applied to the lead (200), and a different potential may be applied to the base (100). A predetermined potential may be applied to the carrier (300), and a different potential may be applied to the base (100). Through this, a capacitance sensor that detects a change in capacitance according to the movement of the lead (200) and the carrier (300) may be provided.

[0175] In another variation, the ball press member may be provided with a man-power magnet and a yoke. The man-power magnet may be placed on either the base (100) or the carrier (300). The yoke may be placed on the other of the base (100) and the carrier (300) so that the man-power magnet and the man-power can act together. In addition, the man-power magnet may be placed on either the base (100) or the lead (200). The yoke may be placed on the other of the base (100) and the lead (200) so that the man-power magnet and the man-power can act together. In addition, the man-power magnet may be placed on either the carrier (300) or the lead (200). The yoke may be placed on the other of the carrier (300) and the lead (200) so that the man-power magnet and the man-power can act together.

[0176]

[0177] Hereinafter, the operation of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0178] FIG. 18 is a drawing showing a state in which the lead moves in the z-axis direction in a force-torque sensor according to the first embodiment of the present invention.

[0179] When an external force having a z-axis component is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the first embodiment of the present invention, the lead (200) (see A of FIG. 18) can move in the z-axis direction (see B of FIG. 18). At this time, since the base (100) is maintained in a fixed state, the z-axis sensor (620) disposed on the lead (200) detects the z-axis magnet (610) disposed on the base (100), so that the amount of movement of the lead (200) in the z-axis direction can be measured. Through this, the z-axis component force of the external force applied to the lead (200) can be measured.

[0180] FIG. 19 is a drawing for explaining when forces in the x-axis direction, y-axis direction, yaw direction, and pitch direction are applied to a force-torque sensor according to the first embodiment of the present invention.

[0181] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the first embodiment of the present invention, the lead (200) and the carrier (300) can be rotated or tilted around the x-axis as a whole (see A of FIG. 19) (see B of FIG. 19). At this time, since the base (100) is maintained in a fixed state, the side sensor (640) arranged on the base (100) detects the side magnet (630) arranged on the carrier (300), so that the amount of movement of the lead (200) and the carrier (300) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (200) can be measured.

[0182] When an external force having a component in at least one direction of the x-axis direction and the pitch direction is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the first embodiment of the present invention, the lead (200) and the carrier (300) can be rotated or tilted integrally (see A of FIG. 19) around the y-axis (see C of FIG. 19). At this time, since the base (100) is maintained in a fixed state, the side sensor (640) arranged on the base (100) detects the side magnet (630) arranged on the carrier (300), so that the amount of movement of the lead (200) and the carrier (300) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (200) can be measured.

[0183] FIG. 20 is a drawing for explaining when a roll direction force is applied to a force-torque sensor according to the first embodiment of the present invention.

[0184] When an external force having a roll direction component is applied to the flange portion (210) of the lead (200) of the force-torque sensor according to the first embodiment of the present invention, the lead (200) and the carrier (300) can be rotated or tilted integrally (see A of FIG. 20) around the z-axis (see B of FIG. 20). At this time, since the base (100) is maintained in a fixed state, the side sensor (640) arranged on the base (100) detects the side magnet (630) arranged on the carrier (300), so that the amount of movement of the lead (200) and the carrier (300) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (200) can be measured.

[0185]

[0186] Below, the configuration of a robot according to the first embodiment of the present invention is described.

[0187] A robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the first embodiment of the present invention may be disposed on the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the first embodiment of the present invention may be disposed on a joint of the arm member.

[0188]

[0189] Below, the configuration of a force-torque sensor according to a second embodiment of the present invention is described with reference to the drawings.

[0190] FIG. 1 is a perspective view of a force-torque sensor according to a second embodiment of the present invention. FIG. 22 is a cross-sectional view taken along line AA of FIG. 1. FIG. 23 is a cross-sectional view taken along line BB of FIG. 1. FIG. 24 is a cross-sectional view taken along line AA of FIG. 1. FIG. 24 is a cross-sectional view taken along line BB of FIG. 1. FIG. 25 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention, taken perpendicular to the z-axis and viewed from above. FIG. 26 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention, viewed from a different direction from FIG. 25. FIG. 27 is a perspective view of a force-torque sensor according to a second embodiment of the present invention, with the lead omitted. FIG. 28 is a plan view of a force-torque sensor according to a second embodiment of the present invention, with the lead omitted. FIG. 29 is a perspective view of FIG. 27, with the carrier omitted. Fig. 30 is a perspective view illustrating a carrier and related components of a force-torque sensor according to a second embodiment of the present invention. Fig. 31 is a side view of Fig. 30. Fig. 32 is a bottom perspective view of Fig. 30 viewed from another direction. Fig. 33 is a cross-sectional perspective view illustrating a lead, a carrier, and related components of a force-torque sensor according to a second embodiment of the present invention. Fig. 34 is a bottom perspective view illustrating a lead and related components of a force-torque sensor according to a second embodiment of the present invention. Fig. 35 is a conceptual diagram of a force-torque sensor according to a second embodiment of the present invention.

[0191] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0192] A force-torque sensor may include a fixed part. The fixed part may be a part that is relatively fixed when the moving part moves, as distinguished from the moving part.

[0193] The force-torque sensor may include a base (1100). The fixing member may include the base (1100). A lead (1200) may be disposed on the base (1100). At least a portion of the lead (1200) may be accommodated on the base (1100). A carrier (1300) may be disposed on the base (1100). At least a portion of the carrier (1300) may be accommodated on the base (1100). A ball may be disposed on the base (1100). An elastic member may be disposed on the base (1100). A sensing structure may be disposed on the base (1100). The base (1100) may be formed in a cylindrical shape with an open top. Alternatively, the base (1100) may be formed in a square cylindrical shape with an open top.

[0194] The base (1100) may include a lower plate (1110). The lower plate (1110) may be a base plate. The lower plate (1110) may be a bottom plate. The lower plate (1110) may include a hole (1111). The hole (1111) may be hollow. The lower plate (1110) may be formed in a circular shape. Alternatively, the lower plate (1110) may be formed in a square shape.

[0195] The base (1100) may include a side plate (1120). The side plate (1120) may extend from the lower plate (1110). The side plate (1120) may extend upward from the lower plate (1110). The side plate (1120) may be formed in a circular ring shape when viewed from above. Alternatively, the side plate (1120) may be formed in a square ring shape when viewed from above.

[0196] The base (1100) may include an outer rail. The outer rail may be an outer guide ball rail. An outer guide ball (1420) may be arranged on the outer rail. The outer rail may extend in the z-axis direction. The outer rail may guide the outer guide ball (1420) to move in the z-axis direction. The outer rail may guide the outer guide ball (1420) to rotate on the outer rail. The outer rail may be formed by a groove. The outer rail may include a groove. The outer rail may be a groove.

[0197] The force-torque sensor may include a moving part. The moving part may be a part that moves in response to an external force. That is, the moving part can move relative to the fixed part when an external force is applied to the force-torque sensor.

[0198] The force-torque sensor may include a tilting member. The tilting member may be tiltable relative to the fixed member. The tilting member may be a rotational member.

[0199] The force-torque sensor may include a lead (1200). The lead (1200) may be disposed on the base (1100). The lead (1200) may be disposed on the base (1100). At least a portion of the lead (1200) may be disposed within the base (1100). At least a portion of the lead (1200) may be accommodated in the base (1100). The lead (1200) may be movably disposed on the base (1100). The lead (1200) may be rotatable. The lead (1200) may be movable relative to the base (1100). The lead (1200) may be movable relative to the carrier (1300). The lead (1200) may be movable in the yaw direction. The lead (1200) may be movable in the pitch direction. The lead (1200) may be movable in the roll direction. The lead (1200) can move independently in all directions except the z-axis direction. The lead (1200) can move in the z-axis direction together with the carrier (1300). That is, the lead (1200) can move in all directions.

[0200] The lead (1200) may include a flange portion (1210). The flange portion (1210) may be formed in a flange shape. The flange portion (1210) may be formed in a plate shape. The flange portion (1210) may be a portion to which an external force is applied. The flange portion (1210) may be disposed on the base (1100). The flange portion (1210) may be disposed on the upper side of the base (1100). The flange portion (1210) may be disposed spaced apart from the base (1100). The flange portion (1210) may be formed in a circular shape. Alternatively, the flange portion (1210) may be formed in a rectangular shape.

[0201] The flange portion (1210) may include a first hole (1211). The first hole (1211) may be hollow. The flange portion (1210) may include a second hole (1212). The second hole (1212) may be a joining hole. The second hole (1212) may include a plurality of holes. Screws or the like that are joined to other components of the robot may be assembled into the second hole (1212).

[0202] The lead (1200) may include a pillar portion (1220). The pillar portion (1220) may extend from the flange portion (1210). The pillar portion (1220) may extend downward from the flange portion (1210). At least a portion of the pillar portion (1220) may be disposed within the base (1100). The pillar portion (1220) may be formed in the shape of a portion of a sphere. An outer edge of a cross-section of the pillar portion (1220) may be formed in an approximately oval shape. An internal guide ball (1410) may be disposed in the pillar portion (1220). The pillar portion (1220) may be formed integrally with the flange portion (1210). The pillar portion (1220) may move together when the flange portion (1210) moves.

[0203] The lead (1200) may include a protrusion (1221). The column portion (1220) may include a protrusion (1221). The protrusion (1221) may protrude outward from the outer surface of the column portion (1220). The protrusion (1221) may be arranged between internal guide balls (1410) arranged in two layers in the cross section.

[0204] The lead (1200) may include a groove (1222). The column portion (1220) may include a groove (1222). The groove (1222) may be formed in the protrusion (1221). The groove (1222) may be a side magnet placement groove. A side magnet (1630) may be placed in the groove (1222). The groove (1222) may be formed in a shape corresponding to the side magnet (1630).

[0205] The lead (1200) may include an inner rail (1230). The inner rail (1230) may be an inner guide ball rail. An inner guide ball (1410) may be arranged on the inner rail (1230). The inner rail (1230) may extend in the roll direction. The inner rail (1230) may guide the inner guide ball (1410) to move in the roll direction. The inner rail (1230) may guide the inner guide ball (1410) to rotate on the inner rail (1230). The inner rail (1230) may be formed by a groove. The inner rail (1230) may include a groove. The inner rail (1230) may be a groove.

[0206] The force-torque sensor may include a z-axis moving member. The z-axis moving member may move in the z-axis direction relative to the fixed member.

[0207] The force-torque sensor may include a carrier (1300). The carrier (1300) may be disposed between the base (1100) and the lid (1200). The carrier (1300) may be disposed within the base (1100). The carrier (1300) may be disposed on the base (1100). The carrier (1300) may be movably disposed on the base (1100). At least a portion of the carrier (1300) may be accommodated in the base (1100). The carrier (1300) may be disposed on the lower side of the lid (1200). The carrier (1300) may be disposed on the lower side of the flange portion (1210) of the lid (1200). The carrier (1300) may be disposed on the outer side of the lid (1200). The carrier (1300) may be arranged on the outside of the column portion (1220) of the lead (1200). The carrier (1300) may move in the z-axis direction. The carrier (1300) may move relative to the base (1100). Movement of the carrier (1300) in a direction other than the z-axis direction may be restricted. That is, the carrier (1300) may move only in the z-axis direction. The carrier (1300) may move together with the lead (1200). The carrier (1300) may move integrally with the lead (1200) in the z-axis direction.

[0208] The carrier (1300) may include a lower surface facing the lower plate (1110) of the base (1100). The carrier (1300) may include an outer surface facing the side plate (1120) of the base (1100).

[0209] The carrier (1300) may include an inner rail (1310). The inner rail (1310) may be an inner guide ball rail. An inner guide ball (1410) may be arranged on the inner rail (1310). The inner rail (1310) may extend in the roll direction. The inner rail (1310) may guide the inner guide ball (1410) to move in the roll direction. The inner rail (1310) may guide the inner guide ball (1410) to rotate on the inner rail (1310). The inner rail (1310) may be formed by a groove. The inner rail (1310) may include a groove. The inner rail (1310) may be a groove.

[0210] The carrier (1300) may include a first surface (1321). The carrier (1300) may include a second surface (1322). The carrier (1300) may include a first surface (1321) on which an inner guide ball (1410) is arranged, and a second surface (1322) on which an outer guide ball (1420) is arranged. The second surface (1322) of the carrier (1300) may be arranged not to be parallel to the first surface (1321) of the carrier (1300). In a cross-section, the first surface (1321) of the carrier (1300) may include a curved line on which the inner guide ball (1410) is arranged. In a cross-section, the second surface (1322) of the carrier (1300) may include a straight line on which the outer guide ball (1420) is arranged.

[0211] The carrier (1300) may include a groove (1330). The groove (1330) may be a side sensor placement groove. A side sensor (1640) may be placed in the groove (1330). The groove (1330) may be formed in a shape corresponding to the side sensor (1640). The groove (1330) may be recessed into the inner surface of the carrier (1300).

[0212] The carrier (1300) may include an outer rail (1340). The outer rail (1340) may be an outer guide ball rail. An outer guide ball (1420) may be arranged on the outer rail (1340). The outer rail (1340) may extend in the z-axis direction. The outer rail (1340) may guide the outer guide ball (1420) to move in the z-axis direction. The outer rail (1340) may guide the outer guide ball (1420) to rotate on the outer rail. The outer rail (1340) may be formed by a groove. The outer rail (1340) may include a groove. The outer rail (1340) may be a groove.

[0213] The carrier (1300) may include a protrusion (1350). The protrusion (1350) may protrude inwardly from the inner surface of the carrier (1300). The protrusion (1350) may be arranged between internal guide balls (1410) arranged in two layers in a cross-section. The protrusion (1350) of the carrier (1300) may horizontally overlap with the protrusion (1221) of the lead (1200). The gap between the protrusion (1350) of the carrier (1300) and the protrusion (1221) of the lead (1200) may be smaller than the diameter of each internal guide ball (1410).

[0214] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving member relative to the fixed member.

[0215] The force-torque sensor may include a ball. The guide member may include a ball. The ball may guide the movement of the moving part relative to the fixed part. The ball may direct the movement of the moving part relative to the fixed part in a specific direction. In the second embodiment of the present invention, the ball may be formed of a ceramic ball.

[0216] The force-torque sensor may include an internal guide ball (1410). The internal guide ball (1410) may be a rotational guide ball. The internal guide ball (1410) may limit the movement of the lead (1200) relative to the carrier (1300) in a rotational direction. The internal guide ball (1410) may guide the movement of the lead (1200) relative to the carrier (1300) in a rotational direction. The internal guide ball (1410) may guide the lead (1200) to rotate relative to the carrier (1300). The internal guide ball (1410) may guide the lead (1200) to move in a yaw direction. The internal guide ball (1410) may guide the lead (1200) to move in a pitch direction. The internal guide ball (1410) may guide the lead (1200) to move in a roll direction.

[0217] The inner guide ball (1410) may be placed between the lead (1200) and the carrier (1300). The inner guide ball (1410) may be placed in the lead (1200). The inner guide ball (1410) may be in contact with the lead (1200). The inner guide ball (1410) may move along the lead (1200). The inner guide ball (1410) may be placed in the carrier (1300). The inner guide ball (1410) may be in contact with the carrier (1300). The inner guide ball (1410) may move along the carrier (1300).

[0218] The inner guide ball (1410) may be placed between the inner rail (1230) of the lead (1200) and the inner rail (1310) of the carrier (1300). The inner guide ball (1410) may be placed on the inner rail (1230) of the lead (1200). The inner guide ball (1410) may move along the inner rail (1230) of the lead (1200). The inner guide ball (1410) may be placed on the inner rail (1310) of the carrier (1300). The inner guide ball (1410) may move along the inner rail (1310) of the carrier (1300).

[0219] The inner guide ball (1410) may include a plurality of balls. At least 23 inner guide balls (1410) may be arranged spaced apart in the roll direction when viewed from above. Four inner guide balls (1410) may be arranged spaced apart in the roll direction when viewed from above. Twenty inner guide balls (1410) may be arranged spaced apart in the roll direction when viewed from above. The inner guide balls (1410) may be arranged in two layers in the z-axis direction. That is, the inner guide balls (1410) may include a lower ball and an upper ball arranged higher than the lower ball. In the second embodiment of the present invention, the inner guide balls (1410) may be composed of 20 balls in two layers, for a total of 40 balls. As a variation, the inner guide balls (1410) may be arranged in three, four, or more layers on the z-axis.

[0220] The force-torque sensor may include an external guide ball (1420). The external guide ball (1420) may be a z-axis guide ball. The external guide ball (1420) may limit movement of the carrier (1300) relative to the base (1100) in the z-axis direction. The external guide ball (1420) may guide movement of the carrier (1300) relative to the base (1100) in the z-axis direction. The external guide ball (1420) may guide movement of the carrier (1300) relative to the base (1100) in the z-axis direction.

[0221] An external guide ball (1420) may be placed between a base (1100) and a carrier (1300). The external guide ball (1420) may be placed on the base (1100). The external guide ball (1420) may be in contact with the base (1100). The external guide ball (1420) may move along the base (1100). The external guide ball (1420) may be placed on the carrier (1300). The external guide ball (1420) may be in contact with the carrier (1300). The external guide ball (1420) may move along the carrier (1300).

[0222] The external guide ball (1420) may be placed between the external rail of the base (1100) and the external rail (1340) of the carrier (1300). The external guide ball (1420) may be placed on the external rail of the base (1100). The external guide ball (1420) may move along the external rail of the base (1100). The external guide ball (1420) may be placed on the external rail (1340) of the carrier (1300). The external guide ball (1420) may move along the external rail (1340) of the carrier (1300).

[0223] The outer guide ball (1420) may include a plurality of balls. At least 23 outer guide balls (1420) may be arranged spaced apart in the roll direction when viewed from above. Four outer guide balls (1420) may be arranged spaced apart in the roll direction when viewed from above. The outer guide ball (1420) may include a plurality of balls overlapping in the z-axis direction. The outer guide ball (1420) may include two balls overlapping in the z-axis direction. The inner guide ball (1410) may be composed of a total of eight balls, in four groups of two balls each.

[0224] The force-torque sensor may include a restoring member. The restoring member can return the moving part to its original position when the external force acting on the force-torque sensor is removed.

[0225] The force-torque sensor may include a ball pressurizing member. The ball pressurizing member may pressurize the inner guide ball (1410) so that the inner guide ball (1410) remains in contact with the lead (1200) and the carrier (1300) without moving out of a preset position. The ball pressurizing member may pressurize the outer guide ball (1420) so that the outer guide ball (1420) remains in contact with the carrier (1300) and the base (1100) without moving out of a preset position.

[0226] The force-torque sensor may include an elastic member. The restoring member may include an elastic member. The ball pressurizing member may include an elastic member. The elastic member may move the moving member to its original position when the external force applied thereto is removed. The elastic member may maintain the ball's pressurized state. The elastic member may include a spring. The elastic member may have elasticity. The elastic member may have an elastic restoring force.

[0227] The force-torque sensor may include an internal elastic member. The elastic member may include an internal elastic member. The internal elastic member may connect the lead (1200) and the carrier (1300). The internal elastic member may elastically connect the lead (1200) and the carrier (1300). The internal elastic member may be coupled to the lead (1200) and the carrier (1300). The internal elastic member may be coupled to the lead (1200). The internal elastic member may be coupled to the carrier (1300). The internal elastic member may support the lead (1200) to be movable relative to the carrier (1300).

[0228] The force-torque sensor may include an inner upper elastic member (1511). The inner elastic member may include an inner upper elastic member (1511). The inner upper elastic member (1511) may connect the upper portion of the lead (1200) and the upper portion of the carrier (1300). The inner upper elastic member (1511) may elastically connect the upper portion of the lead (1200) and the upper portion of the carrier (1300). The inner upper elastic member (1511) may be coupled to the upper portion of the lead (1200). The inner upper elastic member (1511) may be coupled to the upper portion of the pillar portion (1220) of the lead (1200). The inner upper elastic member (1511) may be coupled to the upper portion of the carrier (1300). The inner upper elastic member (1511) may be coupled to the upper surface of the carrier (1300).

[0229] The force-torque sensor may include an internal lower elastic member. The internal elastic member may include an internal lower elastic member. The internal lower elastic member may connect the lower portion of the lead (1200) and the lower portion of the carrier (1300). The internal lower elastic member may elastically connect the lower portion of the lead (1200) and the lower portion of the carrier (1300). The internal lower elastic member may be coupled to the lower portion of the lead (1200). The internal lower elastic member may be coupled to the lower surface of the lead (1200). The internal lower elastic member may be coupled to the lower surface of the carrier (1300). The internal lower elastic member may be coupled to the lower surface of the carrier (1300).

[0230] The force-torque sensor may include an external elastic member (1520). The elastic member may include an external elastic member (1520). The external elastic member (1520) may connect the base (1100) and the carrier (1300). The external elastic member (1520) may elastically connect the base (1100) and the carrier (1300). The external elastic member (1520) may be coupled to the base (1100) and the carrier (1300). The external elastic member (1520) may be coupled to the base (1100). The external elastic member (1520) may be coupled to the carrier (1300). The external elastic member (1520) may support the carrier (1300) to be movable relative to the base (1100).

[0231] The force-torque sensor may include an external upper elastic member (1521). The external elastic member (1520) may include an external upper elastic member (1521). The external upper elastic member (1521) may connect the upper portion of the base (1100) and the upper portion of the carrier (1300). The external upper elastic member (1521) may elastically connect the upper portion of the base (1100) and the upper portion of the carrier (1300). The external upper elastic member (1521) may be coupled to the upper portion of the base (1100). The external upper elastic member (1521) may be coupled to the upper surface of the base (1100). The external upper elastic member (1521) may be coupled to the upper portion of the carrier (1300). The external upper elastic member (1521) may be coupled to the upper surface of the carrier (1300).

[0232] The force-torque sensor may include an external lower elastic member (1522). The external elastic member (1520) may include an external lower elastic member (1522). The external lower elastic member (1522) may connect the lower portion of the base (1100) and the lower portion of the carrier (1300). The external lower elastic member (1522) may elastically connect the lower portion of the base (1100) and the lower portion of the carrier (1300). The external lower elastic member (1522) may be coupled to the lower portion of the base (1100). The external lower elastic member (1522) may be coupled to the lower portion of the carrier (1300). The external lower elastic member (1522) may be coupled to the lower surface of the carrier (1300).

[0233] The force-torque sensor may include an upper elastic member connecting portion (1531). The upper elastic member connecting portion (1531) may connect the inner upper elastic member (1511) and the outer upper elastic member (1521). The upper elastic member connecting portion (1531) may be formed integrally with the inner upper elastic member (1511) and the outer upper elastic member (1521). The lower upper elastic member connecting portion (1531) may be disposed on the carrier (1300). The upper elastic member connecting portion (1531) may be disposed on the upper surface of the carrier (1300).

[0234] The force-torque sensor may include a sensing member. The sensing member may detect movement of a moving member relative to a fixed member. The sensing member may measure the amount of movement of the moving member relative to the fixed member. The sensing member may include a magnet and a Hall sensor. The magnet may be disposed on one of the carrier (1300) and the base (1100). The sensor may be disposed on the other of the carrier (1300) and the base (1100). The magnet may be disposed on one of the carrier (1300) and the lid (1200). The sensor may be disposed on the other of the carrier (1300) and the lid (1200). The sensor may detect the magnet. The sensor may be a Hall sensor.

[0235] The force-torque sensor may include a z-axis sensing element. The z-axis sensing element may detect movement of the carrier (1300) in the z-axis direction. The z-axis sensing element may measure the amount of movement of the carrier (1300) in the z-axis direction.

[0236] The force-torque sensor may include a z-axis magnet (1610). The z-axis magnet (1610) may be disposed on the lower surface of the carrier (1300). The z-axis magnet (1610) may be disposed on the carrier (1300). The z-axis magnet (1610) may move together with the carrier (1300).

[0237] The force-torque sensor may include a z-axis sensor (1620). The z-axis sensor (1620) may face the z-axis magnet (1610). The z-axis sensor (1620) may be positioned corresponding to the z-axis magnet (1610). The z-axis sensor (1620) may be positioned on the lower plate (1110) of the base (1100). The z-axis sensor (1620) may be positioned on the base (1100).

[0238] The z-axis sensor (1620) can detect the z-axis magnet (1610). The z-axis sensor (1620) can measure the amount of movement of the z-axis magnet (1610). The z-axis sensor (1620) can detect the magnetic field of the z-axis magnet (1610). The z-axis sensor (1620) can be a Hall sensor.

[0239] Alternatively, the z-axis magnet (1610) may be placed on the base (1100) and the z-axis sensor (1620) may be placed on the carrier (1300).

[0240] The force-torque sensor may include a rotation sensing element. The rotation sensing element may detect the rotation of the lead (1200). The rotation sensing element may measure the amount of rotation of the lead (1200).

[0241] The force-torque sensor may include a side magnet (1630). The side magnet (1630) may be positioned on an outer surface of the lead (1200). The side magnet (1630) may be positioned on the lead (1200). The side magnet (1630) may move together with the lead (1200).

[0242] The force-torque sensor may include a side sensor (1640). The side sensor (1640) may detect a side magnet (1630). The side sensor (1640) may measure the amount of movement of the side magnet (1630). The side sensor (1640) may detect a magnetic field of the side magnet (1630). The side sensor (1640) may be a Hall sensor. The side sensor (1640) may face the side magnet (1630). The side sensor (1640) may be positioned corresponding to the side magnet (1630). The side sensor (1640) may be positioned on the inner surface of the carrier (1300). The side sensor (1640) may be positioned on the carrier (1300).

[0243] Alternatively, the side magnet (1630) may be placed on the carrier (1300) and the side sensor (1640) may be placed on the lead (1200).

[0244] The side sensor (1640) may include multiple sensors. The side sensor (1640) may include four sensors. The side sensor (1640) may include first to fourth sensors (1641, 642, 643, 644). The side sensor (1640) may include a first side sensor (1641), a second side sensor (1642), a third side sensor (1643), and a fourth side sensor (1644) that detect the side magnet (1630).

[0245] The first side sensor (1641), the second side sensor (1642), the third side sensor (1643), and the fourth side sensor (1644) may be arranged on the side plate (1120) of the base (1100). When viewed from the inside, the first side sensor (1641) may be arranged on the upper side of the side magnet (1630), the second side sensor (1642) may be arranged on the lower side of the side magnet (1630), the third side sensor (1643) may be arranged on the left side of the side magnet (1630), and the fourth side sensor (1644) may be arranged on the right side of the side magnet (1630).

[0246] In the second embodiment of the present invention, when the lead (1200) is pressed in the z-axis direction, the lead (1200) and the carrier (1300) can move in the z-axis direction with respect to the base (1100). That is, when the lead (1200) moves in the z-axis direction, the carrier (1300) can move integrally with the lead (1200).

[0247] When the lead (1200) is pressed in a direction other than the z-axis direction, the lead (1200) can move with respect to the carrier (1300). That is, in a direction other than the z-axis direction, the lead (1200) can be separated from the carrier (1300) and move alone.

[0248] When the lead (1200) is pressed in the x-axis direction perpendicular to the z-axis, in the y-axis direction perpendicular to both the z-axis and the x-axis, or in a roll direction centered on the z-axis, the lead (1200) can move with respect to the carrier (1300).

[0249] When the lead (1200) is pressed in the y-axis-centered direction or the pitch direction centered on the x-axis, the lead (1200) can move relative to the carrier (1300).

[0250] In a force-torque sensor according to a second embodiment of the present invention, a ball may be placed between the moving parts or between the moving part and the fixed part. The ball may be pressed by an elastic member. Alternatively, as a variation, the ball may be pressed by the attractive force between the magnet and the yoke. The cross-section of the rail on which the ball is placed may be formed into a curved shape or a polygonal shape such as a triangle or square.

[0251] In the second embodiment of the present invention, the force in the z-axis direction is measured separately from the force in other directions, thereby minimizing the occurrence of crosstalk. Furthermore, the second embodiment of the present invention can also simplify the structure.

[0252] In a variation, the elasticity of one of the springs among the elastic members can be increased to design it to be stably supported in the initial position.

[0253] The force-torque sensor according to the modified example may differ from the second embodiment of the present invention in the sensing element. The force-torque sensor according to the modified example may include a coil instead of a magnet.

[0254] The force-torque sensor may include a coil. The coil may be disposed on either the carrier (1300) or the base (1100). The sensor may be disposed on the other of the carrier (1300) or the base (1100). The coil may be disposed on either the carrier (1300) or the lead (1200). The sensor may be disposed on the other of the carrier (1300) or the lead (1200). The sensor may detect an electromagnetic field of the coil when current is applied to the coil.

[0255] The force-torque sensor may include a z-axis coil. The z-axis coil may be disposed on the lower surface of the carrier (1300). The z-axis coil may be disposed on the carrier (1300). The z-axis coil may move together with the carrier (1300).

[0256] The force-torque sensor may include a side coil. The side coil may be positioned on the outer surface of the lead (1200). The side coil may be positioned on the lead (1200). The side coil may move along with the lead (1200).

[0257] In another variation, the sensing element may be equipped with a capacitive sensor instead of a magnet and a Hall sensor.

[0258] The force-torque sensor may include a capacitance sensor that measures a change in capacitance between the lead (1200) and the base (1100) or between the carrier (1300) and the base (1100). A predetermined potential may be applied to the lead (1200), and a different potential may be applied to the base (1100). A predetermined potential may be applied to the carrier (1300), and a different potential may be applied to the base (1100). Through this, a capacitance sensor that detects a change in capacitance according to the movement of the lead (1200) and the carrier (1300) may be provided.

[0259] In another variation, the ball press member may be provided with a man-power magnet and a yoke. The man-power magnet may be placed on either the base (1100) or the carrier (1300). The yoke may be placed on the other of the base (1100) and the carrier (1300) so that the man-power magnet and the man-power force may act together. In addition, the man-power magnet may be placed on either the base (1100) or the lead (1200). The yoke may be placed on the other of the base (1100) and the lead (1200) so that the man-power magnet and the man-power force may act together. In addition, the man-power magnet may be placed on either the carrier (1300) or the lead (1200). The yoke may be placed on the other of the carrier (1300) and the lead (1200) so that the man-power magnet and the man-power force may act together.

[0260] In the second embodiment of the present invention, the inner rail (1310) of the carrier (1300) may be formed in a semicircular or arc-shaped cross-section as illustrated in (a) of FIG. 35. As a variation, the inner rail (1310a) of the carrier (1300) may be formed in a triangular cross-section as illustrated in (b) of FIG. 35. As a variation, the inner rail (1310b) of the carrier (1300) may be formed in a trapezoidal cross-section as illustrated in (c) of FIG. 35. The inner rail (1310) of the carrier (1300) may be formed in various shapes such as a polygonal cross-section.

[0261]

[0262] Hereinafter, the operation of a force-torque sensor according to a second embodiment of the present invention will be described with reference to the drawings.

[0263] FIG. 36 is a drawing showing a state in which the lead moves in the z-axis direction in a force-torque sensor according to a second embodiment of the present invention.

[0264] When an external force having a z-axis component is applied to the flange portion (1210) of the lead (1200) of the force-torque sensor according to the second embodiment of the present invention, the lead (1200) and the carrier (1300) can move in the z-axis direction as a unit (see A of FIG. 36) (see B of FIG. 36). At this time, since the base (1100) is maintained in a fixed state, the z-axis sensor (1620) disposed on the base (1100) detects the z-axis magnet (1610) disposed on the carrier (1300), so that the amount of movement of the lead (1200) and the carrier (1300) in the z-axis direction can be measured. Through this, the z-axis component of the external force applied to the lead (1200) can be measured.

[0265] FIG. 37 is a drawing for explaining when forces in the x-axis direction, y-axis direction, yaw direction, and pitch direction are applied to a force-torque sensor according to a second embodiment of the present invention.

[0266] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the flange portion (1210) of the lead (1200) of the force-torque sensor according to the second embodiment of the present invention, the lead (1200) (see A of FIG. 37) can rotate or tilt around the x-axis (see B of FIG. 37). At this time, since the carrier (1300) is maintained in a fixed state, the side sensor (1640) arranged on the carrier (1300) detects the side magnet (1630) arranged on the lead (1200), so that the amount of movement of the lead (1200) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (1200) can be measured.

[0267] When an external force having a component in at least one direction of the x-axis direction and the pitch direction is applied to the flange portion (1210) of the lead (1200) of the force-torque sensor according to the second embodiment of the present invention, the lead (1200) (see A of FIG. 37) can rotate or tilt around the y-axis (see C of FIG. 37). At this time, since the carrier (1300) is maintained in a fixed state, the side sensor (1640) arranged on the carrier (1300) detects the side magnet (1630) arranged on the lead (1200), so that the amount of movement of the lead (1200) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (1200) can be measured.

[0268] FIG. 38 is a drawing for explaining when a roll direction force is applied to a force-torque sensor according to a second embodiment of the present invention.

[0269] When an external force having a roll direction component is applied to the flange portion (1210) of the lead (1200) of the force-torque sensor according to the second embodiment of the present invention, the lead (1200) (see A of FIG. 38) can rotate or tilt around the z-axis (see B of FIG. 38). At this time, since the carrier (1300) is maintained in a fixed state, the side sensor (1640) arranged on the carrier (1300) detects the side magnet (1630) arranged on the lead (1200), so that the amount of movement of the lead (1200) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (1200) can be measured.

[0270]

[0271] Below, the configuration of a robot according to a second embodiment of the present invention is described.

[0272] A robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. A force-torque sensor according to a second embodiment of the present invention may be disposed on the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor according to a second embodiment of the present invention may be disposed on a joint of the arm member.

[0273]

[0274] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential features thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

Claims

1. Base; a lead arranged on the base; and Including a carrier disposed between the base and the lead, When the lead is pressed in the first axial direction, the lead moves in the first axial direction with respect to the carrier, A force-torque sensor in which the lead and the carrier move relative to the base when the lead is pressed in a direction other than the first axis direction.

2. In paragraph 1, A force-torque sensor in which the lead and the carrier move relative to the base when the lead is pressed in a second axis direction perpendicular to the first axis, a third axis direction perpendicular to both the first axis and the second axis, or a first circumferential direction centered on the first axis.

3. In paragraph 2, A force-torque sensor in which the lead and the carrier move relative to the base when the lead is pressed in a second circumferential direction centered on the second axis or in a third circumferential direction centered on the third axis.

4. In paragraph 1, including a first ball disposed between the lead and the carrier, At least one of the lead and the carrier includes a first rail on which the first ball is placed, The above first rail is a force-torque sensor extending in the direction of the first axis.

5. In paragraph 2, Including a second ball disposed between the base and the carrier, At least one of the base and the carrier includes a second rail on which the second ball is placed, The above second rail is a force-torque sensor extending in the first circumferential direction.

6. In paragraph 2, A first ball disposed between the lead and the carrier; and Including a second ball disposed between the base and the carrier, The carrier includes a first surface on which the first ball is placed and a second surface on which the second ball is placed, A force-torque sensor in which the second surface of the carrier is arranged not parallel to the first surface of the carrier.

7. In paragraph 6, A force-torque sensor in which each of the first ball and the second ball is spaced apart from each other in the first circumferential direction by at least three when viewed from above.

8. In paragraph 1, A magnet disposed on one of the carrier and the base; and A force-torque sensor comprising a sensor disposed on the other of the carrier and the base and detecting the magnet.

9. In paragraph 1, It includes a first magnet and a first sensor that detects the first magnet, The above base includes a lower plate and a side plate extending from the lower plate, The above first magnet is placed on the lower surface of the lead, The above first sensor is a force-torque sensor arranged on the lower plate of the base.

10. In paragraph 1, It includes a second magnet, a second-1 sensor, a second-2 sensor, a second-3 sensor, and a second-4 sensor that detect the second magnet, The above base includes a lower plate and a side plate extending from the lower plate, The carrier includes a lower surface facing the lower plate of the base and an outer surface facing the side plate of the base, The second magnet is arranged on the outer surface of the carrier, The above 2-1 sensor, the 2-2 sensor, the 2-3 sensor, and the 2-4 sensor are arranged on the side plate of the base, A force-torque sensor in which, when viewed from the inside, the 2-1 sensor is disposed above the 2nd magnet, the 2-2 sensor is disposed below the 2nd magnet, the 2-3 sensor is disposed on the left side of the 2nd magnet, and the 2-4 sensor is disposed on the right side of the 2nd magnet.

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