Showerhead testing hardware based on particle count

Abstract

In some examples, a showerhead testing apparatus includes an enclosure forming an internal volume. The enclosure is configured to support a showerhead, positioned within the internal volume. The showerhead testing apparatus further includes a first supply line removably attached to the enclosure. The first supply line is configured to supply compressed gas to the internal volume of the enclosure. The showerhead testing apparatus further includes a second supply line that is removably attached to the showerhead. The second supply line is configured to supply the compressed gas to an internal volume of the showerhead. The showerhead testing apparatus further includes a measuring probe that is removably attached to the enclosure. The measuring probe obtains a particle count measurement associated with gas flow through one or both of the internal volume of the showerhead and the internal volume of the enclosure.

Description

Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO SHOWERHEAD TESTING HARDWARE BASED ON PARTICLE COUNT CLAIM OF PRIORITY

[0001] This application claims the benefit of priority to U.S. Provisional Patent Application Serial No. 63 / 559,072, filed on February 28, 2024, and entitled “SHOWERHEAD TESTING HARDWARE BASED ON PARTICLE COUNT,” which application is incorporated by reference herein in its entirety. TECHNICAL FIELD

[0002] The subject matter disclosed herein generally relates to testing hardware for assessing defects of showerheads used in substrate processing and, in some examples, to showerhead testing hardware using an air-based particle counting (APC) probe. BACKGROUND

[0003] Semiconductor substrate processing systems are used to process semiconductor substrates by techniques comprising etching, physical vapor deposition (PVD), atomic layer deposition (ALD), chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), pulsed deposition layer (PDL), plasma-enhanced pulsed deposition layer (PEPDL), and resist removal. One type of semiconductor substrate processing apparatus is a plasma processing apparatus that comprises a vacuum process chamber containing upper and lower electrodes. In a substrate processing cycle, a radio frequency (RF) power is applied between the electrodes to excite a process gas into plasma for processing semiconductor substrates in the chamber.

[0004] The showerhead used in semiconductor substrate processing systems can become contaminated, which can lead to inferior substrate processing and substrate defects. Existing techniques for assessing showerhead defects are limited in scope and do not assess defects in gas holes or the internals of the showerhead.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO

[0005] The background description provided herein is to present the context of the disclosure generally. It should be noted that the information described in this section is presented to provide the skilled artisan some context for the following disclosed subject matter and should not be considered as admitted prior art. More specifically, the work of the presently named inventors, to the extent it is described in this background section, as well as aspects of the description that may not otherwise qualify as prior art at the time of filing, are neither expressly nor impliedly admitted as prior art against the present disclosure. SUMMARY

[0006] Methods and systems are presented for assessing showerhead defects using air-based particle count. Some examples include testing hardware used for mounting the showerhead and a particle counting probe for assessing showerhead defects based on particle count of internal and / or external showerhead surfaces.

[0007] In some examples, a showerhead testing apparatus includes an enclosure forming an internal volume. The enclosure is configured to support a showerhead positioned within the internal volume. The showerhead testing apparatus further includes a first supply line removably attached to the enclosure. The first supply line is configured to supply compressed gas to the internal volume of the enclosure. The showerhead testing apparatus further includes a second supply line that is removably attached to the showerhead. The second supply line is configured to supply the compressed gas to an internal volume of the showerhead. The showerhead testing apparatus further includes a measuring probe that is removably attached to the enclosure. The measuring probe obtains a particle count measurement associated with gas flow through one or both of the internal volume of the showerhead and the internal volume of the enclosure.

[0008] In some embodiments, a method for assessing showerhead defects includes supplying compressed gas via a first supply line to an internal volume of a chamber to obtain a first gas flow. The compressed gas is supplied via a second supply line to an internal volume of a showerhead positioned within theAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO internal volume of the chamber to obtain a second gas flow. A particle count measurement associated with the first gas flow and the second gas flow is generated. A report of the particle count measurement is output.

[0009] In some embodiments, an apparatus includes a chamber, a chamber lid, a base plate, and a measuring probe. The chamber lid is removably attached to the chamber. The chamber lid includes a showerhead stem mount configured to hold a showerhead positioned within the chamber. The base plate is removably attached to the chamber. The measuring probe obtains a particle count measurement associated with gas flow through one or both of an internal volume of the showerhead and an internal volume of the chamber based on the showerhead being positioned within the internal volume. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Various views of the appended drawings merely illustrate example embodiments of the present disclosure and should not be considered as limiting its scope.

[0011] FIG. 1 illustrates a side view of a showerhead testing apparatus, according to some example embodiments.

[0012] FIG. 2 is a diagram of a processing flow for testing a showerhead positioned within a chamber of the showerhead testing apparatus of FIG. 1, according to an example embodiment.

[0013] FIG. 3A illustrates a perspective view of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0014] FIG. 3B illustrates a perspective view of a chamber lid of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0015] FIG. 3C illustrates a side view of a base plate of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0016] FIG. 3D illustrates a side view of a toggle clamp of the showerhead testing apparatus of FIG. 1, according to some example embodiments.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO

[0017] FIG. 4A and FIG. 4B illustrate perspective views of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0018] FIG. 5A illustrates a side view of a showerhead stem mount of the showerhead testing apparatus of FIG. 1 used in connection with a threaded stem showerhead, according to some example embodiments.

[0019] FIG. 5B illustrates a side view of a showerhead stem mount of the showerhead testing apparatus of FIG. 1 used in connection with a screw- mounted stem showerhead, according to some example embodiments.

[0020] FIG. 6A illustrates a perspective view of a mounting adapter used for mounting a measuring probe of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0021] FIG. 6B illustrates a perspective view of the mounting adapter and measuring probe mounted on the base plate of the showerhead testing apparatus of FIG.1, according to some example embodiments.

[0022] FIG. 6C illustrates a perspective view of a chamber lid of the showerhead testing apparatus of FIG. 1 with the chamber lid including a probe blank-off mount, according to some example embodiments.

[0023] FIG. 6D illustrates a side view of the showerhead testing apparatus of FIG. 1 with the chamber lid including a measuring probe attached via the probe blank-off mount for showerhead outside surface measurements, according to some example embodiments.

[0024] FIG. 7 illustrates a flowchart of a method for assessing showerhead defects, according to an example embodiment.

[0025] FIG. 8 is a block diagram illustrating an example of a machine upon which one or more example methods may be implemented or by which one or more example embodiments may be controlled. DETAILED DESCRIPTION

[0026] Methods and systems are presented for assessing showerhead defects based on, e.g., measuring particle count (e.g., using air-based particle counting (APC) techniques) for particles on external and internal surfaces of theAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO showerhead. In the following description, for purposes of explanation, numerous specific details are set forth to provide a thorough understanding of example embodiments. It will be evident to one skilled in the art, however, that the present subject matter may be practiced without these specific details.

[0027] Existing techniques for assessing showerhead defects (e.g., showerhead cleanliness) are based on particle counting on limited areas on the showerhead face. The drawbacks of the existing techniques include only measuring a limited number of locations on a limited external surface of the showerhead, without any measurement of cleanliness on internal surfaces of the showerhead (e.g., the showerhead holes areas and the internal plenum surfaces). Additionally, existing techniques are based on manually moving a measuring probe over the showerhead surface, which increases the risk of showerhead contamination.

[0028] In comparison, the disclosed showerhead testing apparatus can be used to mount a showerhead in an internal volume of a chamber and supply compressed gas (e.g., N2or another gas) to outside and internal surfaces of the showerhead in connection with showerhead testing using APC-based particle counting. The disclosed apparatus has a small footprint and can be configured to test different types of showerheads. Additionally, the disclosed showerhead testing techniques include APC-based testing that is done automatically, without exposing showerhead surfaces to outside contaminants from human intervention / manipulation.

[0029] FIG. 1 illustrates a side view of a showerhead testing apparatus, according to some example embodiments. Referring to FIG. 1, the showerhead testing apparatus 100 includes a chamber 102, a chamber lid 104, and a base plate 106. The combination of chamber 102, chamber lid 104, and base plate 106 is also referred to as enclosure 101.

[0030] The chamber lid 104 and the base plate 106 are removably attached to the chamber 102. When the chamber lid 104 and the base plate 106 are attached to chamber 102, an internal volume 103 is formed.

[0031] The chamber lid 104 includes a probe blank-off mount 112, a showerhead stem mount 114, and a chamber inlet 118. The showerhead stem mount 114 can be used for mounting a showerhead 120 so that when theAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO chamber lid 104 is attached to chamber 102, showerhead 120 is positioned within the internal volume 103. The showerhead 120 can be configured with a showerhead inlet adapter 116 for connecting a showerhead fluid supply line 134 to supply fluid (e.g., compressed gas) inside the showerhead 120. Similarly, chamber inlet 118 can be used to connect a chamber fluid supply line 136 to supply fluid (e.g., compressed gas) in the internal volume 103 of chamber 102.

[0032] The base plate 106 includes a base plate opening 124 and a mounting adapter 140 mounted on the base plate around the base plate opening 124. The mounting adapter 140 is configured to receive measuring probe 141 (which can be the same as measuring probe 312 of FIG. 3A, FIG. 4A, and FIG. 4B). In some aspects, the mounting adapter 140 includes a facility supply outlet 138, which can be used for exhausting the compressed gas introduces via the showerhead fluid supply line 134 and the chamber fluid supply line 136. As illustrated in FIG. 1, base plate 106 can be configured with a partially conical profile, providing a slope towards the base plate opening 124.

[0033] In some aspects, base plate 106 further includes a pressure switch mounting slot 122, which can be used for mounting a pressure switch 123 (e.g., for pressure monitoring or relief).

[0034] The showerhead testing apparatus 100 further includes side stand panels 108 and 110, which can be mounted to chamber 102 and can be used to hold the chamber (e.g., when in use) at a pre-configured distance from a surface the stand panels are placed on.

[0035] The showerhead testing apparatus 100 further includes a gas delivery system 125. The gas delivery system 125 includes a showerhead toggle valve 126 (to control the supply of compressed gas to the showerhead via the showerhead fluid supply line 134), chamber toggle valve 128 (to control the supply of compressed gas to the internal volume 103 via the chamber fluid supply line 136), a filter 130 (to filter the compressed gas before it is introduced into the showerhead and the internal volume), and flowmeter 132. Additional components of the gas delivery system 125 are visible in FIG. 3A and FIG. 4A and include a pressure regulator 302 and a facility supply inlet 314 (to supply compressed gas or other fluid for use by the showerhead testing apparatus 100).Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO

[0036] FIG. 2 is a diagram of a processing flow 200 for testing a showerhead positioned within a chamber of the showerhead testing apparatus of FIG. 1, according to an example embodiment. Referring to FIG. 2, the facility supply inlet can receive compressed gas at facility supply inlet 314. At operation 204, pressure regulator 302 can be adjusted based on a desired facilities outlet pressure 202. At operation 206, flowmeter 132 can be adjusted to supply the compressed gas into the chamber and the showerhead at a preconfigured flow rate, such as a flow rate of approximately about 50 standard liters per minute (SLM) to approximately about 100 SLM. At operation 208, the compressed gas is filtered (e.g., by filter 130) and is introduced into chamber 210 (which is the same as chamber 102). The pressure inside the chamber can be regulated by pressure regulator 302 or pressure switch 214 (which can be the same as pressure switch 123). As compressed gas is released from the base plate opening 124, the particle counting system 212 (e.g., measuring probe 141 or 312) obtains a particle count measurement associated with the gas flow through the internal volume 103 and / or the showerhead 120.

[0037] FIG. 3A illustrates a perspective view 300A of the showerhead testing apparatus of FIG. 1, according to some example embodiments. Referring to FIG. 3A, the chamber lid 104 can include a plurality of latch mount ribs 308, and chamber 102 can include a corresponding plurality of toggle clamps 304. Toggle clamps 304 can be configured to engage the latch mount ribs 308 so that the chamber lid is securely attached to chamber 102 (e.g., after showerhead 120 is mounted to the chamber lid 104 via the showerhead stem mount 114).

[0038] In some aspects, the chamber lid 104 can also include a bleed valve 306 for pressure relief.

[0039] In some aspects, the showerhead stem mount 114 can include an O- ring and a nut 316, which can be used to attach showerhead 120 to the showerhead stem mount 114. Other showerhead mounting options are discussed in connection with FIG. 5A and FIG. 5B.

[0040] FIG. 3B illustrates a perspective view 300B of the chamber lid 104 of the showerhead testing apparatus 100 of FIG. 1, according to some example embodiments. Even though FIG. 3B illustrates the chamber lid 104 as including six latch mount ribs 308, the present disclosure is not limited in this regard and aAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO different number of latch mount ribs can be used. In some embodiments, the chamber lid 104 can be configured with other mounting means as well for mounting the chamber lid 104 to chamber 102.

[0041] In some aspects, each latch mount rib of the plurality of latch mount ribs 308 is configured as a protrusion from a generally circular perimeter of the chamber lid 104. In some aspects, each latch mount rib of the plurality of latch mount ribs 308 is configured to include a slot 309 to accommodate a bolt 311 that is part of each toggle clamp 304 (as illustrated in FIG. 3D).

[0042] FIG. 3C illustrates a side view 300C of the base plate 106 of the showerhead testing apparatus 100 of FIG. 1, according to some example embodiments. In some embodiments, the base plate 106 can include an O-ring 310, which can be used to attach the base plate 106 securely to chamber 102.

[0043] FIG. 3D illustrates a side view 300D of a toggle clamp 304 of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0044] FIG. 4A and FIG. 4B illustrate corresponding perspective views 400A and 400B of the showerhead testing apparatus 100 of FIG. 1, according to some example embodiments. Referring to FIG. 4A, in some embodiments, side stand panels 108 and 110 can be configured so that width, height, and depth measurements are substantially equal to each other (e.g., X inches in each direction).

[0045] FIG. 5A illustrates a side view 500A of a showerhead stem mount 114 of the showerhead testing apparatus of FIG. 1 used in connection with a threaded stem showerhead 502, according to some example embodiments. More specifically, threaded stem showerhead 502 (e.g., a 13-inch showerhead) can include a threaded portion at the top of its stem, which can be used for securing the showerhead to the showerhead stem mount 114 via O-ring and a nut 504.

[0046] FIG. 5B illustrates a side view 500B of a showerhead stem mount 114 of the showerhead testing apparatus of FIG. 1 used in connection with a screw- mounted stem showerhead 506, according to some example embodiments. For example, showerhead 506 (e.g., a 15-inch showerhead) can include threadedAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO screw openings, which can be used for securing the showerhead to the showerhead stem mount 114 via screws 508.

[0047] In some embodiments, mounting means that are different from the mounting means illustrated in FIG. 5A and FIG. 5B can be used to secure a showerhead to the showerhead stem mount 114.

[0048] FIG. 6A illustrates a perspective view 600A of the mounting adapter 140 used for mounting a measuring probe of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0049] FIG. 6B illustrates a perspective view 600B of the mounting adapter 140 and measuring probe 312 mounted on the base plate 106 of the showerhead testing apparatus of FIG. 1, according to some example embodiments.

[0050] FIG. 6C illustrates a perspective view 600C of a segment of the chamber lid 104 of the showerhead testing apparatus of FIG. 1 with the chamber lid including the probe blank-off mount 112, according to some example embodiments.

[0051] In some embodiments, the measuring probe 312 is attached to the base plate 106 via the mounting adapter 140 so that particle count of the internal volume 103 and the inside of showerhead 120 can be performed (e.g., this configuration is illustrated in FIG. 1, FIG. 3A, FIG. 4A, FIG. 4B, and FIG. 6B). In this case, compressed gas is supplied via both the showerhead fluid supply line 134 and the chamber fluid supply line 136. In this case, the probe blank-off mount 112 is unused and is closed by a blank-off 602.

[0052] In other embodiments, only particle count measurements on the outside surface of the showerhead 120 are desired. In this case, the measuring probe 312 is mounted on the chamber lid 104 via the probe blank-off mount 112, and the blank-off 602 is used to close the base plate opening 124. This configuration is illustrated in FIG. 6D.

[0053] FIG. 6D illustrates a side view 600D of the showerhead testing apparatus of FIG. 1 with the chamber lid 104 including the measuring probe 312 attached via the probe blank-off mount 112 for showerhead outside surface measurements, according to some example embodiments. Referring to FIG. 6D, in addition to blank-off 602 closing the base plate opening 124, the showerheadAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO testing apparatus 100 can be configured with an adapter plate 604 sealing off lower volume 606 and closing off the showerhead faceplate openings. In this regard, compressed gas can be introduced only in a portion of the internal volume 103 that is above the adapter plate 604 using the chamber fluid supply line 136.

[0054] FIG. 7 illustrates a flowchart of method 700 for assessing showerhead defects, according to an example embodiment. Method 700 includes operations 702, 704, 706, and 708, which may be performed by control logic (or the control logic configures or causes other modules to perform the function), such as a system controller or hardware processor (e.g., hardware processor 802 of machine 800 described in connection with FIG. 8).

[0055] At operation 702, compressed gas is supplied via a first supply line (e.g., chamber fluid supply line 136) to an internal volume of a chamber to obtain a first gas flow.

[0056] At operation 704, the compressed gas is supplied via a second supply line to an internal volume of a showerhead (e.g., showerhead 120) positioned within the internal volume (e.g., internal volume 103) of the chamber (e.g., chamber 102) to obtain a second gas flow.

[0057] At operation 706, a particle count measurement associated with the first gas flow and the second gas flow is obtained. For example, measuring probe 312 mounted on the base plate 106 via the mounting adapter 140 is used to perform the particle count measurement as compressed gas is exhausted via the facility supply outlet 138.

[0058] At operation 708, a report of the particle count measurement can be output. In some aspects, each measurement can be output (e.g., on a display of the measuring probe), or another type of notification may be provided.

[0059] FIG. 8 is a block diagram illustrating an example of a machine 800 upon which one or more example method embodiments may be implemented or by which one or more example embodiments may be controlled. In alternative embodiments, the machine 800 may operate as a standalone device or may be connected (e.g., networked) to other machines. In a networked deployment, the machine 800 may operate in the capacity of a server machine, a client machine, orAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO both in server-client network environments. In an example, machine 800 may act as a peer machine in a peer-to-peer (P2P) (or other distributed) network environment. Further, while only a single machine 800 is illustrated, the term “machine” shall also be taken to include any collection of machines that individually or jointly execute a set (or multiple sets) of instructions to perform any one or more of the methodologies discussed herein, such as via cloud computing, software as a service (SaaS), or other computer cluster configurations.

[0060] Examples, as described herein, may include, or may operate by, logic, several components, or mechanisms. Circuitry is a collection of circuits implemented in tangible entities that include hardware (e.g., simple circuits, gates, logic). Circuitry membership may be flexible over time and underlying hardware variability. Circuitries include members that may, alone or in combination, perform specified operations when operating. In some aspects, the hardware of the circuitry may be immutably designed to carry out a specific operation (e.g., hardwired). In an example, the hardware of the circuitry may include variably connected physical components (e.g., execution units, transistors, simple circuits), including a computer-readable medium physically modified (e.g., magnetically, electrically, by the moveable placement of invariant massed particles) to encode instructions of the specific operation. In connecting the physical components, the underlying electrical properties of a hardware constituent are changed (for example, from an insulator to a conductor or vice versa). The instructions enable embedded hardware (e.g., the execution units or a loading mechanism) to create members of the circuitry in hardware via the variable connections to carry out portions of the specific operation when in operation. Accordingly, the computer- readable medium is communicatively coupled to the other components of the circuitry when the device is operating. In some aspects, any of the physical components may be used in more than one member of more than one circuitry. For example, under operation, execution units may be used in a first circuit of a first circuitry at one point in time and reused by a second circuit in the first circuitry or by a third circuit in a second circuitry at a different time.

[0061] The machine (e.g., computer system) 800 may include a hardware processor 802 (e.g., a central processing unit (CPU), a hardware processor core, a graphics processing unit (GPU), or any combination thereof), a main memory 804,Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO and a static memory 806, some or all of which may communicate with each other via an interlink (e.g., bus) 808. The machine 800 may further include a display device 810, an alphanumeric input device 812 (e.g., a keyboard), and a user interface (UI) navigation device 814 (e.g., a mouse). In an example, the display device 810, alphanumeric input device 812, and UI navigation device 814 may be a touch screen display. Machine 800 may additionally include a mass storage device (e.g., drive unit) 816, a signal generation device 818 (e.g., a speaker), a network interface device 820, and one or more sensors 821. Machine 800 may include an output controller 828, such as a serial (e.g., universal serial bus (USB)), parallel, or other wired or wireless (e.g., infrared (IR), near field communication (NFC)) connection to communicate with or control one or more peripheral devices (e.g., a printer, card reader).

[0062] In an example embodiment, the hardware processor 802 may perform the functionalities of a system controller or any control logic of a showerhead testing apparatus discussed hereinabove (or any other control logic used in connection with a showerhead testing apparatus) to configure and control functionalities described herein for APC-based showerhead testing (e.g., performing APC-based assessment of particle count present on external and / or internal surfaces of the showerhead).

[0063] The mass storage device 816 may include a machine-readable medium 822 on which one or more sets of data structures or instructions 824 (e.g., software) embodying or utilized by any one or more of the techniques or functions described herein can be stored. The instructions 824 may also reside, completely or at least partially, within the main memory 804, within the static memory 806, or the hardware processor 802 during execution thereof by the machine 800. In an example, one or any combination of the hardware processor 802, the main memory 804, the static memory 806, or the mass storage device 816 may constitute machine-readable media.

[0064] While the machine-readable medium 822 is illustrated as a single medium, the term “machine-readable medium” may include a single medium or multiple media (e.g., a centralized or distributed database and / or associated caches and servers) configured to store the one or more instructions 824.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO

[0065] The term “machine-readable medium” may include any medium that is capable of storing, encoding, or carrying instructions 824 for execution by machine 800 and that causes machine 800 to perform any one or more of the techniques of the present disclosure, or that is capable of storing, encoding, or carrying data structures used by or associated with such instructions 824. Non- limiting machine-readable medium examples may include solid-state memories and optical and magnetic media. In an example, a massed machine-readable medium comprises a machine-readable medium 822 with a plurality of particles having invariant (e.g., rest) mass. Accordingly, massed machine-readable media are not transitory propagating signals. Specific examples of massed machine- readable media may include non-volatile memory, such as semiconductor memory devices (e.g., Electrically Programmable Read-Only Memory (EPROM), Electrically Erasable Programmable Read-Only Memory (EEPROM)) and flash memory devices; magnetic disks, such as internal hard disks and removable disks; magneto-optical disks; and CD-ROM and DVD-ROM disks.

[0066] The instructions 824 may further be transmitted or received over a communications network 826 using a transmission medium via the network interface device 820.

[0067] Implementation of the preceding techniques may be accomplished through any number of specifications, configurations, or example deployments of hardware and software. It should be understood that the functional units or capabilities described in this specification may have been referred to or labeled as components or modules to emphasize their implementation independence more particularly. Any number of software or hardware forms may embody such components. For example, a component or module may be implemented as a hardware circuit comprising custom very-large-scale integration (VLSI) circuits or gate arrays, off-the-shelf semiconductors such as logic chips, transistors, or other discrete components. A component or module may also be implemented in programmable hardware devices such as field-programmable gate arrays, programmable array logic, programmable logic devices, or the like. Components or modules may also be implemented in software for execution by distinct types of processors. An identified component or module of executable code may, for instance, comprise one or more physical or logical blocks of computerAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO instructions, which may, for instance, be organized as an object, procedure, or function. Nevertheless, the executables of an identified component or module need not be physically located together but may comprise disparate instructions stored in separate locations, which, when joined logically together, comprise the component or module and achieve the stated purpose for the component or module.

[0068] Indeed, a component or module of executable code may be a single instruction or many instructions and may even be distributed over several different code segments, among different programs, and across several memory devices or processing systems. In particular, some aspects of the described process (such as code rewriting and code analysis) may take place on a different processing system (e.g., in a computer in a data center) than that in which the code is deployed (e.g., in a computer embedded in a sensor or robot). Similarly, operational data may be identified and illustrated herein within components or modules and may be embodied in any suitable form and organized within any suitable type of data structure. The operational data may be collected as a single data set or may be distributed over separate locations, including over different storage devices, and may exist, at least partially, merely as electronic signals on a system or network. The components or modules may be passive or active, including agents operable to perform desired functions.

[0069] Given the above-described implementations of subject matter, this application discloses the following list of examples, wherein one feature of an example in isolation or more than one feature of an example, taken in combination and, optionally, in combination with one or more features of one or more further examples are further examples also falling within the disclosure of this application.

[0070] Example 1 is a showerhead testing apparatus comprising an enclosure forming an internal volume and configured to support a showerhead positioned within the internal volume; a first supply line removably attached to the enclosure, the first supply line to supply compressed gas to the internal volume of the enclosure; a second supply line removably attached to the showerhead, the second supply line to supply the compressed gas to an internal volume of the showerhead; and a measuring probe removably attached to the enclosure, the measuring probeAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO capable of obtaining a particle count measurement associated with gas flow through one or both of the internal volume of the showerhead and the internal volume of the enclosure.

[0071] In Example 2, the subject matter of Example 1 includes subject matter where the enclosure includes a chamber, a chamber lid that is removably attached to the chamber, and a base plate that is removably attached to the chamber.

[0072] In Example 3, the subject matter of Example 2 includes subject matter where the chamber lid includes a showerhead stem mount, wherein a stem of the showerhead is removably attached to the showerhead stem mount while the showerhead is positioned within the internal volume, and wherein the stem includes a showerhead inlet adapter to receive the second supply line.

[0073] In Example 4, the subject matter of Example 3 includes subject matter where the chamber lid includes a chamber inlet to receive the first supply line.

[0074] In Example 5, the subject matter of Examples 2–4 includes subject matter where the chamber lid comprises a plurality of latch mount ribs.

[0075] In Example 6, the subject matter of Example 5 includes subject matter where the chamber comprises a plurality of toggle clamps configured to engage the plurality of latch mount ribs to attach the chamber lid to the chamber.

[0076] In Example 7, the subject matter of Examples 2–6 includes subject matter where the base plate includes an opening and a mounting adapter configured on an outside surface of the opening, wherein the mounting adapter receives the measuring probe.

[0077] In Example 8, the subject matter of Example 7 includes subject matter where the base plate includes a supply outlet, wherein the measuring probe is capable of obtaining the particle count measurement when the gas flow is exhausted out of the enclosure via the supply outlet.

[0078] In Example 9, the subject matter of Examples 2–8 includes a gas delivery system to receive the compressed gas from a gas source and distribute the compressed gas to the first supply line and the second supply line.

[0079] Example 10 is a method for assessing showerhead defects, the method comprising supplying compressed gas via a first supply line to an internal volumeAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO of a chamber to obtain a first gas flow; supplying the compressed gas via a second supply line to an internal volume of a showerhead positioned within the internal volume of the chamber to obtain a second gas flow; obtaining a particle count measurement associated with the first gas flow and the second gas flow; and outputting a report of the particle count measurement.

[0080] In Example 11, the subject matter of Example 10 includes supplying the compressed gas to the internal volume of the chamber via a chamber inlet fluidly attached to the first supply line, the chamber inlet configured on a chamber lid that is removably attached to the chamber.

[0081] In Example 12, the subject matter of Example 11 includes supplying the compressed gas to the internal volume of the showerhead via a showerhead inlet adapter fluidly attached to the second supply line, the showerhead inlet adapter configured on the showerhead.

[0082] In Example 13, the subject matter of Examples 10–12 includes configuring the first gas flow and the second gas flow to exhaust through an opening of a base plate, the base plate being removably attached to the chamber.

[0083] In Example 14, the subject matter of Example 13 includes obtaining the particle count measurement via an air-based particle counting (APC) probe placed in proximity to the opening of the base plate.

[0084] In Example 15, the subject matter of Examples 10–14 includes supplying the compressed gas via the first supply line and the second supply line at a pre-configured flow rate of approximately about 50 standard liters per minute (SLM) to approximately about 100 SLM.

[0085] In Example 16, the subject matter of Example 15 includes performing the particle count measurement after a pre-configured time subsequent to initiating the supplying of the compressed gas.

[0086] Example 17 is an apparatus comprising a chamber, a chamber lid that is removably attached to the chamber, the chamber lid including a showerhead stem mount configured to hold a showerhead positioned within the chamber, a base plate that is removably attached to the chamber, and a measuring probe to obtain a particle count measurement associated with gas flow through one or bothAttorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO of an internal volume of the showerhead and an internal volume of the chamber based on the showerhead being positioned within the chamber.

[0087] In Example 18, the subject matter of Example 17 includes subject matter where the base plate includes an opening, a mounting adapter configured on an outside surface of the opening, wherein the mounting adapter receives the measuring probe, and a supply outlet, wherein the measuring probe obtains the particle count measurement for the internal volume of the showerhead and the internal volume of the chamber when the gas flow is exhausted out of the chamber via the supply outlet.

[0088] In Example 19, the subject matter of Example 18 includes subject matter where the chamber lid includes a probe blank-off mount configured to receive a blank-off based on the measuring probe being mounted by the mounting adapter of the base plate.

[0089] In Example 20, the subject matter of Example 19 includes subject matter where the probe blank-off mount is configured to receive the measuring probe when the particle count measurement is configured for a partial particle count and where the partial particle count is based on the internal volume of the chamber without the internal volume of the showerhead.

[0090] In Example 21, the subject matter of Example 20 includes subject matter where the base plate includes a blank-off covering the opening and an adapter plate blocking openings of the showerhead based on the measuring probe measuring the partial particle count.

[0091] In Example 22, the subject matter of Examples 17–21 includes a pair of side stand panels mounted on the chamber, the pair of side stand panels to hold the chamber at a pre-configured height from a horizontal surface on which the pair of side panels stand during the particle count measurement.

[0092] In Example 23, the subject matter of Example 22 includes subject matter where height, width, and depth dimensions along orthogonal sides of the pair of side panels are equal to each other when the pair of side panels are mounted on the chamber.

[0093] In Example 24, the subject matter of Examples 17–23 includes subject matter where the base plate comprises a partially conical profile.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO

[0094] Example 25 is at least one machine-readable medium including instructions that, when executed by processing circuitry, cause the processing circuitry to perform operations to implement any of Examples 1–24.

[0095] Example 26 is an apparatus comprising means to implement any of Examples 1–24.

[0096] Example 27 is a system to implement any of Examples 1–24.

[0097] Example 28 is a method to implement any of Examples 1–24.

[0098] Throughout this specification, plural instances may implement components, operations, or structures described as a single instance. Although individual operations of one or more methods are illustrated and described as separate operations, one or more of the individual operations may be performed concurrently, and nothing requires that the operations be performed in the order illustrated. Structures and functionality that are presented as separate components, such as configurations, may be implemented as a combined structure or component. Similarly, structures and functionality presented as a single component may be implemented as separate components. These and other variations, modifications, additions, and improvements fall within the scope of the subject matter herein.

[0099] The embodiments illustrated herein are described in sufficient detail to enable those skilled in the art to practice the teachings disclosed. Other embodiments may be used and derived therefrom, such that structural and logical substitutions and changes may be made without departing from the scope of this disclosure. The Detailed Description, therefore, is not to be taken in a limiting sense, and the scope of various embodiments is defined only by the appended claims, along with the full range of equivalents to which such claims are entitled.

[0100] The claims may not set forth every feature disclosed herein as embodiments may feature a subset of said features. Further, embodiments may include fewer features than those disclosed in a particular example. Thus, the following claims are hereby incorporated into the Detailed Description, with a claim standing on its own as a separate embodiment.

[0101] As used herein, the term “or” may be construed in either an inclusive or exclusive sense. Moreover, plural instances may be provided for resources,Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO operations, or structures described herein as a single instance. Additionally, boundaries between various resources, operations, modules, engines, and data stores are arbitrary, and particular operations are illustrated in the context of specific illustrative configurations. Other allocations of functionality are envisioned and may fall within the scope of various embodiments of the present disclosure. In general, structures and functionality are presented as separate resources in the example, configurations may be implemented as a combined structure or resource. Similarly, structures and functionality presented as a single resource may be implemented as separate resources. These and other variations, modifications, additions, and improvements fall within a scope of embodiments of the present disclosure as represented by the appended claims. The specification and drawings are, accordingly, to be regarded in an illustrative rather than a restrictive sense.

Claims

Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO CLAIMS What is claimed is:

1. A showerhead testing apparatus comprising: an enclosure forming an internal volume, the enclosure configured to support a showerhead positioned within the internal volume; a first supply line removably attached to the enclosure, the first supply line to supply compressed gas to the internal volume of the enclosure; a second supply line removably attached to the showerhead, the second supply line to supply the compressed gas to an internal volume of the showerhead; and a measuring probe removably attached to the enclosure, the measuring probe capable of obtaining a particle count measurement associated with a gas flow of the compressed gas through one or both of the internal volume of the showerhead and the internal volume of the enclosure.

2. The showerhead testing apparatus of claim 1, wherein the enclosure comprises: a chamber; a chamber lid that is removably attached to the chamber; and a base plate that is removably attached to the chamber.

3. The showerhead testing apparatus of claim 2, wherein the chamber lid comprises: a showerhead stem mount, wherein a stem of the showerhead is removably attached to the showerhead stem mount while the showerhead is positioned within the internal volume, and wherein the stem includes a showerhead inlet adapter to receive the second supply line.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO 4. The showerhead testing apparatus of claim 3, wherein the chamber lid comprises: a chamber inlet to receive the first supply line.

5. The showerhead testing apparatus of claim 2, wherein the chamber lid comprises a plurality of latch mount ribs.

6. The showerhead testing apparatus of claim 5, wherein the chamber comprises a plurality of toggle clamps configured to engage the plurality of latch mount ribs to attach the chamber lid to the chamber.

7. The showerhead testing apparatus of claim 2, wherein the base plate comprises: an opening; and a mounting adapter configured on an outside surface of the opening, wherein the mounting adapter receives the measuring probe.

8. The showerhead testing apparatus of claim 7, wherein the base plate comprises: a supply outlet, wherein the measuring probe is capable of obtaining the particle count measurement when the gas flow is exhausted out of the enclosure via the supply outlet.

9. The showerhead testing apparatus of any of claims 2-8, further comprising: a gas delivery system to receive the compressed gas from a gas source and distribute the compressed gas to the first supply line and the second supply line.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO 10. A method for assessing showerhead defects, the method comprising: supplying compressed gas via a first supply line to an internal volume of a chamber to obtain a first gas flow; supplying the compressed gas via a second supply line to an internal volume of a showerhead positioned within the internal volume of the chamber to obtain a second gas flow; obtaining a particle count measurement associated with the first gas flow and the second gas flow; and outputting a report of the particle count measurement.

11. The method of claim 10, further comprising: supplying the compressed gas to the internal volume of the chamber via a chamber inlet fluidly attached to the first supply line, the chamber inlet configured on a chamber lid that is removably attached to the chamber.

12. The method of claim 11, further comprising: supplying the compressed gas to the internal volume of the showerhead via a showerhead inlet adapter fluidly attached to the second supply line, the showerhead inlet adapter configured on the showerhead.

13. The method of claim 10, further comprising: configuring the first gas flow and the second gas flow to exhaust through an opening of a base plate, the base plate being removably attached to the chamber.

14. The method of claim 13, further comprising: obtaining the particle count measurement via an air-based particle counting (APC) probe placed in proximity to the opening of the base plate.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO 15. The method of any of claims 10-14, further comprising: supplying the compressed gas via the first supply line and the second supply line at a pre-configured flow rate of approximately about 50 standard liters per minute (SLM) to approximately about 100 SLM.

16. The method of claim 15, further comprising: performing the particle count measurement after a pre-configured time subsequent to initiating the supplying of the compressed gas.

17. An apparatus comprising: a chamber; a chamber lid that is removably attached to the chamber, the chamber lid including a showerhead stem mount configured to hold a showerhead positioned within the chamber; a base plate that is removably attached to the chamber; and a measuring probe to obtain a particle count measurement associated with gas flow through one or both of an internal volume of the showerhead and an internal volume of the chamber based on the showerhead being positioned within the chamber.

18. The apparatus of claim 17, wherein the base plate comprises: an opening; a mounting adapter configured on an outside surface of the opening, wherein the mounting adapter receives the measuring probe; and a supply outlet, wherein the measuring probe obtains the particle count measurement for the internal volume of the showerhead and the internal volume of the chamber when the gas flow is exhausted out of the chamber via the supply outlet.Attorney Docket No.4948.165WO1 / Client Ref. No.11639-1WO 19. The apparatus of claim 18, wherein the chamber lid comprises: a probe blank-off mount configured to receive a blank-off based on the measuring probe being mounted by the mounting adapter of the base plate.

20. The apparatus of claim 19, wherein the probe blank-off mount is configured to receive the measuring probe when the particle count measurement is configured for a partial particle count, and wherein the partial particle count is based on the internal volume of the chamber without the internal volume of the showerhead.

21. The apparatus of claim 20, wherein the base plate includes a blank-off covering the opening and an adapter plate blocking openings of the showerhead based on the measuring probe measuring the partial particle count.

22. The apparatus of any of claims 17-21, further comprising: a pair of side stand panels mounted on the chamber, the pair of side stand panels to hold the chamber at a pre-configured height from a horizontal surface on which the pair of side panels stand during the particle count measurement.

23. The apparatus of claim 22, wherein height, width, and depth dimensions along orthogonal sides of the pair of side panels are equal to each other when the pair of side panels are mounted on the chamber.

24. The apparatus of claim 17, wherein the base plate comprises a partially conical profile.

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