Fluid generation device

Abstract

A fluid generation device, comprising a piezoelectrically-driven actuator (1), a spacer portion (2) and a diaphragm (3), wherein the diaphragm (3) has a fixing portion (31) and a vibration portion (32), the fixing portion (31) being fixedly connected to the end of the spacer portion (2) facing away from the actuator (1). For vibration energy generated by the actuator (1), the energy is transmitted to the diaphragm (3) by means of the actuator (1) vibrating to cause the change in the pressure of fluid in a cavity, and more importantly, the energy is directly transmitted to the diaphragm (3) by means of mechanical coupling formed by the actuator (1) and the diaphragm (3), thereby prompting the diaphragm (3) to vibrate, and achieving higher energy transmission efficiency. By means of providing a partition portion (5) on the diaphragm (3), the partition portion (5) divides the vibration portion into at least two vibration areas (321), the capacity of the area of the diaphragm (3) opposite the partition portion (5) to resist against elastic deformation when being stressed is greater than the capacity of the vibration areas to resist against elastic deformation when being stressed, and the vibration energy transmitted to the diaphragm (3) mainly acts on the vibration areas (321), thus prompting the vibration areas (321) to generate vibration with a larger amplitude, and achieving a higher energy utilization rate.

Description

Fluid generating device Technical Field

[0001] The present invention relates to the field of fluid control technology, and in particular to a fluid generating device. Background Art

[0002] As 3C terminal products continue to develop rapidly towards intelligence, lightness and thinness, the heat load of internal electronic devices gradually increases, and efficient thermal management technology has become a hot research topic nowadays.

[0003] In recent years, gas generating devices using piezoelectric transducers as actuators, such as a piezoelectric pump declared with publication number CN101490419A, a fluid pump declared with publication number CN102597520A, and a piezoelectric micro blower declared with publication number CN101542122A, are installed in the internal space of terminal products and are believed to generate greater heat benefits.

[0004] However, the vibration energy of the actuator in the above-mentioned gas generating device is transmitted to the resonant component through changes in gas pressure. Due to the existence of aerodynamic damping, this method of transmitting vibration energy through fluid-solid coupling has large losses and is not efficient. At the same time, the effective working space of the above-mentioned resonant system is mainly concentrated in the central large-amplitude area, while the vibration energy in the area outside the central large-amplitude area is not effectively utilized, resulting in low overall energy utilization. Summary of the Invention

[0005] The technical problem to be solved by the present invention is: in order to solve the deficiencies in the prior art, a fluid generating device is provided, which has high energy transfer efficiency and energy utilization rate.

[0006] The technical solution adopted by the present invention to solve the technical problem is: a fluid generating device, comprising:

[0007] A piezoelectrically driven actuator having a first main surface and a second main surface disposed opposite to each other in a thickness direction;

[0008] a spacer, the first main surface and / or the second main surface being joined to the spacer, the spacer being joined to the actuator near one end of the actuator, and the spacer and the actuator forming a groove having an opening at one end facing away from the actuator;

[0009] and a diaphragm having a fixed portion and a vibrating portion, the fixed portion being fixedly connected to an end of the partition portion facing away from the actuator, so that the diaphragm covers the opening of the groove portion and forms a chamber between the actuator, the groove portion, and the diaphragm, the fixed portion being connected to the vibrating portion, the vibrating portion forming an end wall of the chamber, and the diaphragm further provided with a partition portion, the partition portion dividing the vibrating portion into at least two vibrating regions, at least a portion of the partition portion being located between two adjacent vibrating regions;

[0010] The ability of the region of the diaphragm opposite to the partition to resist elastic deformation when subjected to force is greater than the ability of the vibration region of the diaphragm to resist elastic deformation when subjected to force;

[0011] When the actuator vibrates under the stimulation of an electrical signal, the actuator transmits vibration energy to the diaphragm to cause the diaphragm to vibrate. A vibration region of the diaphragm is penetrated by at least one hole portion communicating with the chamber.

[0012] Furthermore, the partition portion protrudes from the surface of the vibration area of ​​the diaphragm.

[0013] The separator of the present invention can be combined with the following:

[0014] First, a local area of ​​the diaphragm is shaped to form the partition, and the partition is a rib provided on the vibration part and protruding from the surface of the vibration area of ​​the diaphragm.

[0015] Secondly, the partition is formed by providing a reinforcing rib in a local area on one side of the diaphragm;

[0016] The reinforcing rib has a main body section arranged on the vibration part, the main body section protrudes from the surface of the vibration area of ​​the diaphragm, and the main body section divides the vibration part into at least two vibration areas.

[0017] Furthermore, the reinforcing rib is arranged on a side of the diaphragm away from the actuator, and the main body section constituting the reinforcing rib is arranged on a side of the vibrating portion of the diaphragm away from the actuator.

[0018] Furthermore, the reinforcing rib also has an extension section extending from the main section to the fixed portion of the diaphragm, the extension section protrudes from the surface of the vibration area of ​​the diaphragm, and the extension section is fixedly connected to the side of the fixed portion of the diaphragm away from the spacer portion.

[0019] Furthermore, the reinforcing rib is provided on a side of the diaphragm facing the actuator, and a main body section constituting the reinforcing rib is provided on a side of the vibrating portion of the diaphragm facing the actuator.

[0020] Furthermore, the reinforcing rib also has an extension section extending from the main section to the diaphragm fixing portion, the extension section protrudes from the surface of the vibration area of ​​the diaphragm, and the extension section is fixedly clamped between the fixing portion of the diaphragm and the spacer portion.

[0021] Furthermore, the side of the main body section facing the actuator is fixedly connected to the actuator.

[0022] Furthermore, the partition is formed by providing a first reinforcing rib facing the actuator and a second reinforcing rib facing away from the actuator in local areas on both sides of the diaphragm;

[0023] The first reinforcing rib has a first main body section provided on the vibrating portion of the diaphragm, the first main body section protruding from the diaphragm;

[0024] The second reinforcing rib has a second main body section disposed on the vibrating portion of the diaphragm, and the second main body section protrudes from the diaphragm.

[0025] Furthermore, the first reinforcing rib further comprises a first extending section extending from the first main section to the fixing portion, and / or the second reinforcing rib comprises a second extending section extending from the second main section to the fixing portion;

[0026] The first extension section protrudes from the surface of the vibration area of ​​the diaphragm, and the first extension section is fixedly clamped between the fixing portion of the diaphragm and the spacer portion;

[0027] The second extending section protrudes from the surface of the vibration area of ​​the diaphragm, and the second extending section is fixedly connected to a side of the fixing portion of the diaphragm away from the spacing portion.

[0028] Furthermore, the side of the first main body section facing the actuator is fixedly connected to the actuator.

[0029] Furthermore, the materials constituting the first reinforcing rib and the second reinforcing rib are the same or different.

[0030] Furthermore, the partition is integrally formed with the diaphragm or is fixedly connected to it.

[0031] Furthermore, the region of the partition on the same side of the diaphragm is a continuous integral structure;

[0032] Alternatively, the partition is formed as a plurality of partition strips arranged at intervals in the region on the same side of the diaphragm.

[0033] Furthermore, the spacer is an annular structure, the inner peripheral wall of the spacer and the actuator enclose an annular groove, and the end of the spacer away from the actuator is fully or partially engaged with the diaphragm in an annular path around the groove;

[0034] Alternatively, the spacer portion has multiple spacers, and the spacers of the same spacer portion are all joined to the first main surface or the second main surface. The multiple spacers are spaced apart and distributed along a circular path around the chamber to form the groove portion with the actuator, and the end of the spacer facing away from the actuator is fully or partially joined to the diaphragm.

[0035] Furthermore, the diaphragm is made of a polymer material, or a composite material of a polymer material and a metal material.

[0036] Furthermore, the actuator comprises a substrate, and at least one piezoelectric sheet is bonded to one or both surfaces of the substrate in a thickness direction, and the piezoelectric sheet is bonded to the substrate to form the actuator.

[0037] Furthermore, at least one hole portion communicating with the cavity is penetrated through the maximum amplitude region or the adjacent region of the maximum amplitude region of the vibration region of the diaphragm.

[0038] The beneficial effects of the present invention are:

[0039] 1) The present invention provides a partition on the diaphragm, which separates the vibrating portion of the diaphragm to form at least two vibration zones. The area of ​​the diaphragm opposite the partition has a greater ability to resist elastic deformation when subjected to force than the vibrating zone of the diaphragm. This allows the vibration energy transmitted to the diaphragm by the actuator to act primarily on the vibrating zone of the diaphragm, prompting the vibrating zone of the diaphragm to generate larger amplitude vibrations, reducing energy loss of the diaphragm at the partition, and improving the utilization rate of the vibration energy.

[0040] 2) The effective working space of the chamber between the actuator and the diaphragm of the present invention is no longer mainly concentrated in the central area where the actuator and the diaphragm are opposite, but extends to a larger area than the central area, so the utilization rate of vibration energy is higher.

[0041] 3) The vibration energy generated by the actuator of the present invention under the stimulation of an external electrical signal, on the one hand, drives the fluid in the chamber to produce pressure changes when the actuator vibrates, thereby causing the diaphragm to vibrate and transfer the energy to the diaphragm. More importantly, the design of the spacer is used to form a mechanical coupling between the actuator and the diaphragm, so that the energy is directly transferred to the diaphragm, which has a higher energy transfer efficiency.

[0042] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] The present invention will be further described below with reference to the accompanying drawings and examples.

[0044] FIG1 is a schematic diagram showing a partition portion dividing a diaphragm into two vibration zones;

[0045] FIG2 is a cross-sectional schematic diagram of a fluid generating device in which a diaphragm is divided into vibration zones by a partition;

[0046] FIG3 is a schematic diagram of a partition portion dividing the diaphragm into four vibration zones;

[0047] FIG4 is a schematic diagram of a diaphragm formed by shaping a partition;

[0048] FIG5 is a schematic diagram of a diaphragm in which the partitions are discretely arranged;

[0049] FIG6 is a schematic diagram showing that the holes are relatively independent of each other in the working process to absorb the fluid;

[0050] FIG7 is a schematic diagram showing that the holes discharge fluid relatively independently during operation;

[0051] FIG8 is a schematic diagram of a spacer formed by a spacer;

[0052] FIG9 is a schematic cross-sectional view of a fluid generating device in which a reinforcing rib is provided on the side of the diaphragm facing away from the actuator;

[0053] FIG10 is a bottom view of a fluid generating device in which a reinforcing rib having an extended section is provided on the side of the diaphragm facing away from the actuator;

[0054] FIG11 is a schematic cross-sectional view taken along line AA in FIG10 ;

[0055] FIG12 is a cross-sectional schematic diagram of a fluid generating device in which a reinforcing rib is provided on the side of the diaphragm close to the actuator;

[0056] FIG13 is a cross-sectional schematic diagram of a fluid generating device in which a reinforcing rib connected to the actuator is provided on the side of the diaphragm close to the actuator;

[0057] FIG14 is a cross-sectional schematic diagram of a fluid generating device in which a first reinforcing rib and a second reinforcing rib are respectively provided on both sides of the diaphragm;

[0058] FIG15 is a schematic diagram of the structure of the groove formed by the spacer and the substrate;

[0059] FIG16 is a schematic structural diagram of a spacer and a piezoelectric sheet disposed on the same side surface of a substrate in the thickness direction;

[0060] FIG17 is a schematic diagram of a structure in which both main surfaces of the actuator are provided with spacers bonded to the substrate, and a piezoelectric sheet is provided on either side of the substrate in the thickness direction;

[0061] FIG18 is a schematic diagram showing a structure in which piezoelectric sheets and spacers are provided on both main surfaces of an actuator, and the spacers are bonded to the piezoelectric sheets;

[0062] FIG19 is a schematic structural diagram showing a structure in which spacers are provided on both main surfaces of an actuator, with the spacers on one side bonded to the piezoelectric sheet and the spacers on the other side bonded to the substrate.

[0063] In the figure: 1, actuator, 11, substrate, 12, piezoelectric sheet, 1a, first main surface, 1b, second main surface;

[0064] 2. spacer, 21. groove, 22. spacer;

[0065] 3. Diaphragm, 31. Fixed portion, 32. Vibrating portion, 321. Vibrating region, 321a. Hole portion, 3211. Maximum amplitude region;

[0066] 4. Chamber;

[0067] 5. Partition, 51. First reinforcing rib, 52. Second reinforcing rib, 53. Reinforcing rib, 531. Main section, 532. Extension section, 54. Partition rib, 5a. Partition strip. DETAILED DESCRIPTION

[0068] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams that illustrate the basic structure of the present invention only in a schematic manner. Therefore, they only show components relevant to the present invention, and directions and references (e.g., up, down, left, right, etc.) may be used solely to facilitate the description of features in the drawings. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0069] Example 1

[0070] As shown in FIG2 , a fluid generating device, which can be used as a fan, comprises: a piezoelectrically driven actuator 1 , a spacer 2 and a diaphragm 3 ;

[0071] As shown in Figures 1-8 and 15 to 19, at least one piezoelectric sheet 12 is bonded to one or both surfaces of the substrate 11 in the thickness direction. The piezoelectric sheet 12 may be a piezoelectric ceramic sheet. The piezoelectric sheet 12 and the substrate 11 are bonded to form an actuator 1. The actuator 1 has a first main surface 1a and a second main surface 1b that are arranged opposite to each other in the thickness direction. The piezoelectric sheet 12 causes the actuator 1 to vibrate under the stimulation of an electrical signal.

[0072] The substrate 11 may be, but is not limited to, circular, rectangular, polygonal or elliptical, etc. In this embodiment, taking the substrate 11 in the shape of a circular plate as an example, a single piezoelectric piece 12 can be bonded to any side surface of the substrate 11 in the thickness direction to form a piezoelectric single-chip actuator 1; or two piezoelectric pieces 12 are respectively arranged on the two side surfaces of the substrate 11 in the thickness direction to form a piezoelectric dual-chip actuator 1; or multiple piezoelectric pieces 12 are arranged on the same side surface of the substrate 11 in the thickness direction to form a composite multilayer piezoelectric actuator 1, etc. The piezoelectric piece 12 causes the actuator 1 to vibrate under the excitation of an external periodic electrical signal.

[0073] A spacer 2 is bonded to the first main surface 1 a and / or the second main surface 1 b . The spacer 2 is bonded to the actuator 1 at one end thereof and forms a groove 21 with an opening at one end facing away from the actuator 1 .

[0074] Specifically:

[0075] The spacer 2 can be bonded to one side or both sides of the substrate 11 constituting the actuator 1 in the thickness direction. In this case, it is not difficult to understand that the spacer 2 can be bonded to one side or the other side of the substrate 11 in the thickness direction, as shown in Figures 15 and 16. Of course, when there are multiple spacers 2 at the same time, for example, the fluid control device of the present application can have a bidirectional working function. In this case, the spacers 2 need to be provided on both main surfaces of the actuator 1. The spacers 2 can be provided respectively at The two side surfaces of the substrate 11 in the thickness direction are as shown in Figure 17; under this structure, when the spacer 2 and the piezoelectric sheet 12 are arranged on the same side surface of the substrate 11 in the thickness direction, the piezoelectric sheet 12 is located in the groove 21 of the spacer 2, and at the same time, the spacer 2 has a height protruding from the surface of the piezoelectric sheet 12, as shown in Figures 16 and 17; when the spacer 2 and the piezoelectric sheet 12 are respectively arranged on the two side surfaces of the substrate 11 in the thickness direction, they are not subject to this restriction; the connection between the spacer 2 and the substrate 11 can be bonding or integrally formed.

[0076] In addition, the spacer 2 can also be joined to the side surface of the piezoelectric piece 12 constituting the actuator 1 that is away from the actuator 1. Under this structure, it is not difficult to understand that when the actuator 1 constitutes the above-mentioned piezoelectric single-chip actuator 1, the spacer 2 can be joined to the side surface of the piezoelectric piece 12 constituting the piezoelectric single-chip actuator 1 that is away from the substrate 11; when the actuator 1 constitutes the above piezoelectric dual-chip actuator 1, the spacer 2 can be joined to the side surface of the piezoelectric piece 12 on either side of the piezoelectric dual-chip actuator 1 that is away from the substrate 11. Of course, when there are multiple spacers 2 at the same time, for example, the fluid control device of the present application can have a bidirectional working function. At this time, the first main surface 1a and the second main surface 1b of the actuator 1 need to be provided with a spacer 2. The spacer 2 can be respectively provided on the side surface of the piezoelectric pieces 12 on both sides of the piezoelectric dual-chip actuator 1 that are away from the substrate 11, as shown in Figure 18.

[0077] In addition, it is not difficult to understand that when multiple spacers 2 exist at the same time, the above-mentioned joining methods of the spacers 2 can also be combined with each other. For example, the fluid generating device of the present application can have a bidirectional working function. At this time, the first main surface 1a and the second main surface 1b of the actuator 1 both need to be provided with spacers 2, wherein there is at least one spacer 2 joined to the side surface of the piezoelectric piece 12 constituting the actuator 1 facing away from the actuator 1, and there is also at least one spacer 2 joined to the side of the substrate 11 facing away from the actuator 1, as shown in Figure 19; under this structure, the joining between the spacer 2 and the substrate 11 can be bonding or integrally formed.

[0078] Of course, the joining method of the spacer 2 is not limited to this. The joining method of the spacer 2 follows the principle that the end of the spacer 2 close to the actuator 1 is connected to the actuator 1, and the spacer 2 and the actuator 1 form a groove 21 with an opening at the end facing away from the actuator 1.

[0079] For ease of understanding, this embodiment is described in the form that the actuator 1 is configured as a piezoelectric single-crystal actuator 1, there is one spacer 2, and the spacer 2 is bonded to the surface of the substrate 11 located on the side where the second main surface 1b of the actuator 1 is located.

[0080] The spacer 2 is bonded to the surface of the substrate 11 on the side where the second main surface 1b is located. The end of the spacer 2 closest to the substrate 11 is connected to the substrate 11, and the spacer 2 and the substrate 11 form a groove 21 with an opening at the end facing away from the substrate 11, as shown in FIG15 . The bonding between the spacer 2 and the substrate 11 can be achieved by bonding or integral molding. The spacer 2 has an annular structure, and the inner peripheral wall of the spacer 2 itself forms the groove 21.

[0081] One end of the spacer 2 close to the substrate 11 is joined to the surface of the substrate 11 on the side where the second main surface 1b is located, and the diaphragm 3 is connected to the end of the spacer 2 facing away from the substrate 11, thereby allowing the vibration of the actuator 1 to directly drive the spacer 2 and the diaphragm 3 to vibrate, so as to transfer the vibration energy to the diaphragm 3 through mechanical coupling.

[0082] The diaphragm 3 has a fixed portion 31 and a vibrating portion 32. The fixed portion 31 is fixedly connected to the end of the spacer 2 away from the actuator 1, so that the diaphragm 3 covers the opening of the groove portion 21 and forms a chamber 4 between the actuator 1, the groove portion 21 and the diaphragm 3. The fixed portion 31 and the vibrating portion 32 are integrally formed or fixedly connected. The vibrating portion 32 forms the end wall of the chamber 4, as shown in Figures 1 and 2; thus, the diaphragm 3 is fixedly connected to the actuator 1 through the spacer 2. The vibration of the actuator 1 causes the diaphragm 3 to vibrate. This process is accompanied by energy transfer. The vibration energy generated by the actuator 1 under the excitation of the external electrical signal is When the surface vibrates through the actuator 1, it drives the fluid in the chamber 4 to produce pressure changes, thereby causing the diaphragm 3 to vibrate and transfer energy to the diaphragm 3. More importantly, the energy is directly transferred to the diaphragm 3 through the mechanical coupling formed by the actuator 1 and the diaphragm 3. Compared with the existing technology that only relies on the fluid to transfer vibration energy, the energy transfer efficiency is higher. Under the same excitation conditions, it can cause the diaphragm 3 to produce a larger amplitude to achieve a higher flow output; under the same amplitude requirement, the input power of the actuator 1 can be reduced, the heat is reduced, and the energy utilization rate, product stability and service life are improved.

[0083] A partition 5 is provided on the diaphragm 3, which divides the vibrating portion 32 of the diaphragm 3 into at least two vibrating zones 321. At least a portion of the partition 5 is located between two adjacent vibrating zones 321. The area of ​​the diaphragm 3 opposite to the partition 5 has a greater ability to resist elastic deformation when subjected to force than the vibrating zone 321 of the diaphragm 3. Therefore, the energy required to cause the area of ​​the diaphragm 3 opposite to the partition 5 to vibrate is much greater than the energy required to cause the vibrating zone 321 to vibrate. This is equivalent to the area of ​​the diaphragm 3 opposite to the partition 5 being substantially constrained, and the vibration being suppressed. The vibration energy transmitted to the diaphragm 3 by the actuator 1 will mainly act on the vibrating zone 321, thereby causing the vibrating zone 321 to generate a larger amplitude, while the area of ​​the diaphragm 3 opposite to the partition 5 does not vibrate or generates a smaller vibration. In addition, compared with the prior art, the vibrating portion 32 of the diaphragm 3 is divided into two vibration zones 321 by the partition 5. It is divided into multiple vibration zones 321, so that the effective working space of the chamber 4 between the actuator 1 and the diaphragm 3 is no longer mainly concentrated in the central area of ​​the diaphragm 3, but extends to an area larger than the central area, so that the utilization rate of the vibration energy is higher. When the actuator 1 vibrates under the excitation of the electrical signal, the vibration energy is transferred to the diaphragm 3 to cause the diaphragm 3 to vibrate. At least one hole portion 321a connecting to the chamber 4 is passed through the vibration zone 321, as shown in Figures 1 and 2; specifically, at least one hole portion 321a connecting to the chamber 4 may be passed through the maximum amplitude area 3211 of the vibration zone 321 of the diaphragm 3 or the adjacent area of ​​the maximum amplitude area 3211; the adjacent area of ​​the maximum amplitude area 3211 refers to the area close to the side of the maximum amplitude area 3211 in the interval between the maximum amplitude area 3211 of the vibration zone 321 and the adjacent partition 5 but not including the maximum amplitude area 3211.

[0084] In this embodiment, the partition 5 protrudes from the surface of the vibration region 321 of the diaphragm 3, thereby achieving that the region of the diaphragm 3 opposite the partition 5 has a greater ability to resist elastic deformation when subjected to force than the vibration region 321 of the diaphragm 3. However, the present invention is not limited thereto. For example, the diaphragm 3 itself may be made of a non-homogeneous material, or another rigid dielectric body (such as a metal rib) may be embedded in the region of the diaphragm 3 opposite the partition 5. This can also achieve that the region of the diaphragm 3 opposite the partition 5 has a greater ability to resist elastic deformation when subjected to force than the vibration region 321 of the diaphragm 3.

[0085] In this embodiment, a local area of ​​the diaphragm 3 is shaped to form a partition 5, which is a partition rib 54 arranged on the vibration part 32 and protruding from the surface of the vibration area 321 of the diaphragm 3. That is, the partition 5 is formed by shaping a local area of ​​the diaphragm 3.

[0086] The ribs 54 protrude from the diaphragm 3. The ribs 54 may all protrude toward the side of the diaphragm 3 facing away from the actuator 1 or toward the side of the diaphragm 3 facing the actuator 1, as shown in Figures 3 and 4. Alternatively, some ribs 54 may protrude toward the side of the diaphragm 3 facing away from the actuator 1, while other ribs 54 may protrude toward the side of the diaphragm 3 facing the actuator 1. Alternatively, the ribs 54 protruding from the diaphragm 3 may have portions protruding toward both the side of the diaphragm 3 facing away from the actuator 1 and the side of the diaphragm 3 facing the actuator 1. This is not a limitation; the cross-sectional shape of the ribs 54 may be angular, sawtooth, or wavy, also not a limitation.

[0087] In addition, it should be noted that the partition 5 can be a continuous integral structure, as shown in Figures 3 and 4, or the partition 5 can be a plurality of spaced-apart partition strips 5a, that is, the partition 5 is a plurality of discretely arranged partition strips 5a, as shown in Figure 5. In principle, as long as the separation of the vibration zone 321 of the diaphragm 3 can be achieved, it can be used.

[0088] During operation, the piezoelectric piece 12 causes the actuator 1 to vibrate under the stimulation of the electrical signal, and transmits the vibration energy to the diaphragm 3, thereby causing the diaphragm 3 to vibrate. The holes 321a formed in or near the area with the largest amplitude of each vibration zone 321 of the diaphragm 3 each independently inhale and discharge the fluid during operation. When the area where the hole 321a is located is deformed toward the side away from the actuator 1, the local volume of the area corresponding to the hole 321a in the chamber 4 increases, the pressure decreases, and the external fluid enters the chamber 4 along the hole 321a, as shown in Figure 6; and when the area where the hole 321a is located is deformed toward the side of the actuator 1, the local volume of the area corresponding to the hole 321a in the chamber 4 decreases, the pressure increases, and the fluid sucked into the chamber 4 in the previous process is discharged from the chamber 4 along the hole 321a with a certain momentum. The fluid with a certain momentum forms a jet after flowing out of the hole 321a, and can draw in the surrounding fluid, further increasing the output flow rate, as shown in Figure 7, and so on.

[0089] It should be noted that, under this structure, the height of the chamber 4 in the thickness direction of the actuator 1 may be greater than the sum of the respective maximum displacements of the actuator 1 and the diaphragm 3 when they vibrate and deform toward each other, so as to avoid motion interference between the actuator 1 and the diaphragm 3 during the vibration process and make full use of the vibration energy. In addition, under this structure, if the height of the chamber 4 is too large, the fluid pressure and flow rate discharged from the chamber 4 by the hole 321a will be reduced, thereby affecting the formation of the jet, or even making it impossible to form a jet, and thus unable to entrain the surrounding fluid, thereby resulting in a reduction in the final output flow rate. Preferably, the height of the chamber 4 in the thickness direction of the actuator 1 is not greater than 20 times the sum of the respective maximum displacements of the actuator 1 and the diaphragm 3 when they vibrate and deform toward each other.

[0090] The spacer 2 is an annular structure, and the inner wall of the spacer 2 and the substrate 11 of the actuator 1 form an annular groove 21, and the end of the spacer 2 facing away from the actuator 1 is fully or partially engaged with the diaphragm 3 on an annular path around the groove 21; or, the spacer 2 has a plurality of discrete spacers 22 distributed in an annular shape, as shown in Figure 8, the spacers 22 of the same spacer 2 are all engaged with the first main surface 1a or the second main surface 1b, and the plurality of spacers 22 are spaced around the chamber 4 along the annular path to form a groove 21 with the actuator 1, and the end of the spacer 22 facing away from the actuator 1 is fully or partially engaged with the diaphragm 3.

[0091] That is, the substrate 11, the diaphragm 3 and the spacer 2 form a chamber 4, the spacer 2 forms the inner wall of the chamber 4, the inner wall of the chamber 4 can be closed, without a channel communicating with the outside, and the spacer 2 is a ring-shaped structure; the inner wall of the chamber 4 can also be open, the spacer 2 has a plurality of discrete spacers 22 distributed in a ring shape, and the gaps between the plurality of spacers 22 are formed into channels communicating with the outside, and the channels communicate with the chamber 4; although external gas can enter the chamber 4 through the above-mentioned channels, it is not allowed to enter the chamber 4 toward the chamber 4. 4, but because the pressure in the area opposite to the hole 321a in the chamber 4 fluctuates more dramatically than that in the channel formed in the peripheral wall of the chamber 4, the fluid is mainly sucked in and discharged through the hole 321a, and the fluid entering the chamber 4 through the above-mentioned channel reverses its flow direction before reaching the area opposite to and adjacent to the hole 321a in the chamber 4, and flows out of the chamber 4 along the original path. Therefore, the suction and discharge of the fluid from the hole 321a are not substantially affected, or the effect is very small. Therefore, the inner peripheral wall of the chamber 4 can be open.

[0092] The actuator 1 vibrates under external excitation and transmits the vibration energy to the diaphragm 3, thereby causing the diaphragm 3 to vibrate. The resonance mode of the coordinated vibration of the actuator 1 and the diaphragm 3 is related to the structural shape of the substrate 11, the structural shape of the diaphragm 3 and the connection method between the two. The above factors do not constitute a limitation on the scope of protection of the claims of the present invention. The substrate 11 can be but is not limited to circular, rectangular, polygonal or elliptical, etc., the shape of the diaphragm 3 can also be but is not limited to circular, rectangular, polygonal or elliptical, etc., and the spacer 2 connected between the substrate 11 and the diaphragm 3 can also be but is not limited to a circular ring structure, a rectangular ring structure, a polygonal ring structure or an elliptical ring structure, etc.

[0093] The diaphragm 3 can be made of metal film materials, such as copper foil, titanium foil, stainless steel foil, etc. Preferably, the diaphragm 3 is made of polymer materials, such as PET, PI, PPS, PEI, FEP or other polymer film materials, or the diaphragm 3 is made of a composite material composed of polymer materials and other metal materials, such as PI copper-clad plate / film, PET copper-clad plate / film, PET nickel-plated plate / film, carbon fiber metal composite plate / film, etc.; whether it is a polymer material or a composite material composed of polymer materials and other materials, compared with metal materials, they all show the characteristics of light weight and high elastic strain limit, and the limit amplitude during resonance is usually much higher than that of metal materials, which is particularly suitable for high requirements on flow output, such as heat dissipation of smart 3C terminal products.

[0094] Example 2

[0095] The difference between Example 2 and Example 1 is that the partition 5 is formed by providing a reinforcing rib 53 in a local area on one side of the diaphragm 3 , and the reinforcing rib 53 protrudes from the diaphragm 3 .

[0096] The reinforcing rib 53 has a main section 531 arranged on the vibration part 32, the main section 531 protrudes from the surface of the vibration area 321 of the diaphragm 3, and the main section 531 divides the vibration part 32 into at least two vibration areas 321. The reinforcing rib 53 is arranged on the side of the diaphragm 3 facing away from the actuator 1, and the main section 531 is arranged on the side of the vibration part 32 of the diaphragm 3 facing away from the actuator 1, as shown in Figure 9.

[0097] In addition, the reinforcing rib 53 may also have an extension section 532 extending from the main section 531 to the fixed portion 31 of the diaphragm 3, the extension section 532 protruding from the surface of the vibration area 321 of the diaphragm 3, and the extension section 532 is fixedly connected to the side of the fixed portion 31 of the diaphragm 3 facing away from the spacer portion 2, as shown in Figures 10 and 11.

[0098] The partition 5 is a continuous, integral structure. That is, the reinforcing ribs 53 constituting the partition 5 form a continuous, integral structure while dividing the vibrating portion 32 of the diaphragm 3 into at least two vibrating regions 321. The partition 5 is formed as a plurality of spaced-apart partition bars 5a. That is, the reinforcing ribs 53 constituting the partition 5 are discretely arranged while dividing the vibrating portion 32 of the diaphragm 3 into at least two vibrating regions 321.

[0099] The reinforcing rib 53 is integrally formed with or fixedly connected to the diaphragm 3; the reinforcing rib 53 can be made of the same material as the diaphragm 3, or of course can be made of a different material from the diaphragm 3. For example, when the diaphragm 3 is made of polyimide film, the material of the reinforcing rib 53 can be polyimide film material or SUS304 stainless steel. There is no limitation on the material of the reinforcing rib 53 here, but the principle to be followed is to ensure that the ability of the area of ​​the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration zone 321 of the diaphragm 3 to resist elastic deformation when subjected to force, so that the partition 5 separates the vibration portion 32 of the diaphragm 3 to form at least two vibration zones 321.

[0100] In addition, the reinforcing ribs 53 constituting the partition 5 may be of a constant cross-section or a variable cross-section, which is not limited here.

[0101] Example 3

[0102] The difference between Example 3 and Example 2 is that the partition 5 is formed by providing a reinforcing rib 53 in a local area of ​​the side of the diaphragm 3 facing the actuator 1 , and the reinforcing rib 53 protrudes from the diaphragm 3 .

[0103] The reinforcing rib 53 has a main section 531 arranged on the vibrating part 32 of the diaphragm 3, and the main section 531 divides the vibrating part 32 of the diaphragm 3 into at least two vibration areas 321. The main section 531 constituting the reinforcing rib 53 is arranged on the side of the vibrating part 32 of the diaphragm 3 facing the actuator 1, as shown in Figure 12.

[0104] In addition, similarly, the reinforcing rib 53 also has an extension section 532 extending from the main section 531 to the fixed portion 31 of the diaphragm 3, the extension section 532 protrudes from the surface of the vibration area 321 of the diaphragm 3, and the extension section 532 is fixedly clamped between the fixed portion 31 of the diaphragm 3 and the spacer portion 2.

[0105] Furthermore, the main body section 531 constituting the reinforcing rib 53 is fixedly connected to the actuator 1 on the side facing the actuator 1 , as shown in FIG13 .

[0106] The partition 5 is a continuous integral structure, that is, the reinforcing ribs 53 constituting the partition 5 form a continuous whole while dividing the vibration portion 32 of the diaphragm 3 into at least two vibration zones 321; or, the partition 5 is formed as a plurality of spaced-apart partition strips 5a, that is, the reinforcing ribs 53 constituting the partition 5 are also discretely arranged while dividing the vibration portion 32 of the diaphragm 3 into at least two vibration zones 321.

[0107] It should be noted that when the main section 531 constituting the reinforcing rib 53 is connected to the actuator 1 on the side facing the actuator 1, and the partition 5 is arranged to be a continuous integral partition 5, especially when the main section 531 constituting the partition 5 is formed into a continuous integral body, the chamber 4 is formed into a plurality of spaced sub-chambers, and the number of the sub-chambers matches the number of the vibration zones 321.

[0108] Similarly, the reinforcing rib 53 is integrally formed with or fixedly connected to the diaphragm 3; the reinforcing rib 53 may be made of the same material as the diaphragm 3, or of course, may be made of a different material from the diaphragm 3. For example, when the diaphragm 3 is made of polyimide film, the material of the reinforcing rib 53 may be polyimide film material or SUS304 stainless steel. There is no limitation on the material of the reinforcing rib 53 here, but the principle to be followed is to ensure that the ability of the area of ​​the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration zone 321 of the diaphragm 3 to resist elastic deformation when subjected to force, so that the partition 5 separates the vibration portion 32 of the diaphragm 3 to form at least two vibration zones 321.

[0109] In addition, the reinforcing ribs 53 constituting the partition 5 may be of a constant cross-section or a variable cross-section, which is not limited here.

[0110] Example 4

[0111] The difference between this embodiment and embodiments 2 and 3 is that the partition 5 is formed by providing a first reinforcing rib 51 facing the actuator 1 and a second reinforcing rib 52 facing away from the actuator 1 in local areas on both sides of the diaphragm 3. The first reinforcing rib 51 and the second reinforcing rib 52 both protrude from the diaphragm 3, as shown in Figure 14.

[0112] The first reinforcing rib 51 has a first main body section 531 disposed on the vibrating portion 32 of the diaphragm 3 , and the first main body section 531 protrudes from the diaphragm 3 ;

[0113] The second reinforcing rib 52 has a second main body section 531 disposed on the vibrating portion 32 of the diaphragm 3 , and the second main body section 531 protrudes from the diaphragm 3 ;

[0114] The first main section 531 and the second main section 531 separate the vibration portion 32 of the diaphragm 3 into at least two vibration areas 321 .

[0115] In addition, the first reinforcing rib 51 further includes a first extending section 532 extending from the first main section 531 to the fixing portion 31 and / or the second reinforcing rib 52 includes a second extending section 532 extending from the second main section 531 to the fixing portion 31.

[0116] The first extension section 532 protrudes from the surface of the vibration area 321 of the diaphragm 3 , and the first extension section 532 is fixedly clamped between the fixing portion 31 of the diaphragm 3 and the spacer portion 2 ;

[0117] The second extending section 532 protrudes from the surface of the vibration region 321 of the diaphragm 3 . The second extending section 532 is fixedly connected to a side of the fixing portion 31 of the diaphragm 3 that faces away from the spacer 2 .

[0118] Furthermore, the first main body section 531 constituting the first reinforcing rib 51 is fixedly connected to the actuator 1 on the side facing the actuator 1 .

[0119] Similarly, the partition 5 in the area on the same side of the diaphragm 3 is a continuous integral structure, that is, the partition 5 is composed of the first reinforcing rib 51 and the second reinforcing rib 52 located on both sides of the diaphragm 3, and the first reinforcing rib 51 and the second reinforcing rib 52 form a continuous whole while dividing the vibration part 32 of the diaphragm 3 into at least two vibration areas 321; the partition 5 can also be a plurality of discretely arranged partition strips 5a, that is, the partition 5 is composed of the first reinforcing rib 51 and the second reinforcing rib 52 located on both sides of the diaphragm 3, and the first reinforcing rib 51 and the second reinforcing rib 52 are also discretely arranged while dividing the vibration part 32 of the diaphragm 3 into at least two vibration areas 321.

[0120] The first reinforcing rib 51 and / or the second reinforcing rib 52 are integrally formed with or fixedly connected to the diaphragm 3; the materials of the first reinforcing rib 51 and the second reinforcing rib 52 can be the same or different. For example, when the material of the diaphragm 3 is polyimide film, the material of the first reinforcing rib 51 and the second reinforcing rib 52 can be polyimide film material, or the material of the first reinforcing rib 51 and the second reinforcing rib 52 can be SUS304 stainless steel, or the material of the first reinforcing rib 51 is brass, and the material of the second reinforcing rib 52 is SUS304 stainless steel. There is no limitation on the materials of the first reinforcing rib 51 and the second reinforcing rib 52 here, but the principle to be followed is to ensure that the ability of the area of ​​the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration zone 321 of the diaphragm 3 to resist elastic deformation when subjected to force, so that the partition 5 separates the vibration part 32 of the diaphragm 3 to form at least two vibration zones 321.

[0121] In addition, the first reinforcing rib 51 and / or the second reinforcing rib 52 constituting the partition 5 may be of a constant cross-section or a variable cross-section, which is not limited here.

[0122] The above description of the preferred embodiments of the present invention is intended to serve as a guide. Based on the above description, relevant personnel are fully capable of making various changes and modifications without departing from the technical scope of this invention. The technical scope of this invention is not limited to the contents of the specification and must be determined according to the scope of the claims.

Claims

1. A fluid generating device, characterized in that: include: A piezoelectrically driven actuator (1) has a first main surface (1a) and a second main surface (1b) arranged opposite to each other in a thickness direction; A spacer (2), the first main surface (1a) and / or the second main surface (1b) being joined with the spacer (2), the spacer (2) being joined to the actuator (1) near one end portion of the actuator (1), and the spacer (2) and the actuator (1) forming a groove (21) having an opening at one end facing away from the actuator (1); and a diaphragm (3), comprising a fixed portion (31) and a vibrating portion (32), wherein the fixed portion (31) is fixedly connected to an end of the spacer portion (2) facing away from the actuator (1), so that the diaphragm (3) covers the opening of the groove portion (21) and forms a chamber (4) between the actuator (1), the groove portion (21) and the diaphragm (3), wherein the fixed portion (31) is connected to the vibrating portion (32), and the vibrating portion (32) forms an end wall of the chamber (4), and the diaphragm (3) is further provided with a partition (5), wherein the partition (5) partitions the vibrating portion (32) into at least two vibrating regions (321), and at least a portion of the partition (5) is located between two adjacent vibrating regions (321); The ability of the region of the diaphragm (3) opposite to the partition (5) to resist elastic deformation when subjected to force is greater than the ability of the vibration region (321) of the diaphragm (3) to resist elastic deformation when subjected to force; When the actuator (1) vibrates under the stimulation of an electrical signal, it transmits vibration energy to the diaphragm (3) to cause the diaphragm (3) to vibrate. The vibration area (321) of the diaphragm (3) is penetrated by at least one hole (321a) communicating with the chamber (4).

2. The fluid generating device according to claim 1, characterized in that: The partition (5) protrudes from the surface of the vibration area (321) of the diaphragm (3).

3. The fluid generating device according to claim 2, characterized in that: A local area of ​​the diaphragm (3) is shaped to form the partition (5), and the partition (5) is a partition rib (54) provided on the vibration part (32) and protruding from the surface of the vibration area (321) of the diaphragm (3).

4. The fluid generating device according to claim 2, characterized in that: The partition (5) is formed by providing a reinforcing rib (53) in a local area on one side of the diaphragm (3); The reinforcing rib (53) has a main body section (531) arranged on the vibration part (32), the main body section (531) protrudes from the surface of the vibration area (321) of the diaphragm (3), and the main body section (531) divides the vibration part (32) into at least two vibration areas (321).

5. The fluid generating device according to claim 4, characterized in that: The reinforcing rib (53) is arranged on a side of the diaphragm (3) away from the actuator (1), and the main body section (531) constituting the reinforcing rib (53) is arranged on a side of the vibrating portion (32) of the diaphragm (3) away from the actuator (1).

6. The fluid generating device according to claim 5, characterized in that: The reinforcing rib (53) further comprises an extension section (532) extending from the main section (531) to the fixed portion (31) of the diaphragm (3), wherein the extension section (532) protrudes from the surface of the vibration region (321) of the diaphragm (3), and the extension section (532) is fixedly connected to the side of the fixed portion (31) of the diaphragm (3) facing away from the spacer portion (2).

7. The fluid generating device according to claim 4, characterized in that: The reinforcing rib (53) is arranged on the side of the diaphragm (3) facing the actuator (1), and the main body section (531) constituting the reinforcing rib (53) is arranged on the side of the vibrating portion (32) of the diaphragm (3) facing the actuator (1).

8. The fluid generating device according to claim 7, characterized in that: The reinforcing rib (53) further comprises an extension section (532) extending from the main section (531) to the fixing portion (31) of the diaphragm (3), wherein the extension section (532) protrudes from the surface of the vibration region (321) of the diaphragm (3), and the extension section (532) is fixedly clamped between the fixing portion (31) of the diaphragm (3) and the spacer (2).

9. The fluid generating device according to claim 7, characterized in that: The side of the main body section (531) facing the actuator (1) is fixedly connected to the actuator (1).

10. The fluid generating device according to claim 2, characterized in that: The partition (5) is formed by arranging a first reinforcing rib (51) facing the actuator (1) and a second reinforcing rib (52) facing away from the actuator (1) in local areas on both sides of the diaphragm (3); The first reinforcing rib (51) has a first main body section (531) arranged on the vibrating portion (32) of the diaphragm (3), and the first main body section (531) protrudes from the diaphragm (3); The second reinforcing rib (52) has a second main body section (531) arranged on the vibration portion (32) of the diaphragm (3), and the second main body section (531) protrudes from the diaphragm (3).

11. The fluid generating device according to claim 10, characterized in that: The first reinforcing rib (51) further comprises a first extension section (532) extending from the first main section (531) to the fixing portion (31), and / or the second reinforcing rib (52) comprises a second extension section (532) extending from the second main section (531) to the fixing portion (31); The first extension section (532) protrudes from the surface of the vibration area (321) of the diaphragm (3), and the first extension section (532) is fixedly clamped between the fixing portion (31) of the diaphragm (3) and the spacer portion (2); The second extension section (532) protrudes from the surface of the vibration area (321) of the diaphragm (3), and the second extension section (532) is fixedly connected to a side of the fixed portion (31) of the diaphragm (3) that faces away from the spacer portion (2).

12. The fluid generating device according to claim 10, characterized in that: The side of the first main body section (531) facing the actuator (1) is fixedly connected to the actuator (1).

13. The fluid generating device according to claim 10, characterized in that: The materials constituting the first reinforcing rib (51) and the second reinforcing rib (52) are the same or different.

14. The fluid generating device according to any one of claims 2 or 4-13, characterized in that: The partition (5) and the diaphragm (3) are integrally formed or fixedly connected.

15. The fluid generating device according to any one of claims 2 to 13, characterized in that: The partition (5) is a continuous integral structure in the area on the same side of the diaphragm (3); Alternatively, the partition (5) is formed as a plurality of spaced-apart partition strips (5a) in the region on the same side of the diaphragm (3).

16. The fluid generating device according to claim 1, characterized in that: The spacer (2) is an annular structure, the inner peripheral wall of the spacer (2) and the actuator (1) enclose an annular groove (21), and the end of the spacer (2) facing away from the actuator (1) is fully or partially engaged with the diaphragm (3) on an annular path around the groove (21); Alternatively, the spacer portion (2) has a plurality of spacers (22), and the spacers (22) of the same spacer portion (2) are all bonded to the first main surface (1a) or the second main surface (1b), and the plurality of spacers (22) are spaced and distributed along an annular path around the chamber (4) to enclose the groove portion (21) with the actuator (1), and the end of the spacer (22) facing away from the actuator (1) is fully or partially bonded to the diaphragm (3).

17. The fluid generating device according to claim 1, characterized in that: The diaphragm (3) is made of a polymer material, or a composite material consisting of a polymer material and a metal material.

18. The fluid generating device according to claim 1, characterized in that: The actuator (1) comprises a substrate (11), wherein at least one piezoelectric sheet (12) is bonded to one or both surfaces of the substrate (11) in a thickness direction, and the piezoelectric sheet (12) is bonded to the substrate (11) to form the actuator (1).

19. The fluid generating device according to claim 1, characterized in that: At least one hole portion (321a) communicating with the chamber (4) passes through the maximum amplitude region (3211) or the adjacent region of the maximum amplitude region (3211) of the vibration region (321) of the diaphragm (3).

Images