Electrically conductive pin

Abstract

The objective of the present invention is to provide an electrically conductive pin having improved electrical characteristics while having a reduced number of constituent parts. Provided is the electrically conductive pin provided in an inspection device to inspect the electrical characteristics of an object to be inspected, the electrically conductive pin comprising: a terminal unit, which has a hollow and can come in contact with the object to be inspected; and an elastic unit including a first coil part, which comes in contact with the inspection device and has a fixed length, and a second coil part, which is connected to the first coil part so as to have a changeable length in the hollow.

Description

electrically conductive pins

[0001] The present invention relates to an electrically conductive pin, and more particularly, to an electrically conductive pin having a reduced number of parts.

[0002] Electrically conductive pins are pins that can be used in testing devices, such as probe cards or test sockets, that come into contact with the test object and test it. Here, the electrically conductive pins serve to transmit electrical signals between the test object and the testing device.

[0003] Testing of semiconductor devices is performed by contacting a test socket or probe card having a number of electrically conductive pins on a semiconductor package or semiconductor wafer to provide an electrical signal.

[0004] In this regard, prior art document No. 10-2202826 discloses a "plunger and a probe pin using the same." The prior art document describes a probe pin comprising four parts: two plungers, a barrel, and an elastic member. The two plungers move up and down within the barrel via the elastic member, thereby examining the electrical characteristics of the test object.

[0005] However, the probe pins presented a problem: the assembly process became more complex due to the large number of parts involved, increasing process time and manufacturing costs. Various attempts are being made to improve electrical characteristics while addressing these issues.

[0006] [Prior Art Literature]

[0007] [Patent Document]

[0008] (Patent Document 1) Patent Publication No. 10-2202826

[0009] In order to solve the above-described problems, the present invention aims to provide an electrically conductive pin having improved electrical characteristics while reducing the number of component parts.

[0010] In order to achieve the above-described purpose, an electrically conductive pin according to an embodiment of the present invention is provided in an inspection device to inspect an electrical characteristic of an object to be inspected, the electrically conductive pin may include a terminal portion having a hollow portion and being able to come into contact with the object to be inspected; and an elastic portion having a first coil portion that comes into contact with the inspection device and has a fixed length, and a second coil portion that is connected to the first coil portion and is able to change length in the hollow portion.

[0011] Additionally, in an embodiment of the present invention, the elastic member may have one end supported longitudinally on the inner wall of the terminal member.

[0012] Additionally, in an embodiment of the present invention, a part of the first coil portion may be positioned hollow due to compression of the elastic portion.

[0013] Additionally, in an embodiment of the present invention, the first coil portion may have adjacent unit coils connected to each other in the longitudinal direction.

[0014] In addition, in an embodiment of the present invention, the elastic part further includes a third coil part that is connected to the second coil part and has a fixed length; and the third coil part can be supported in the longitudinal direction on the inner wall of the terminal part.

[0015] Additionally, in an embodiment of the present invention, the elastic member may further include at least one plating layer positioned on the material layer.

[0016] In addition, in an embodiment of the present invention, the elastic member may further include a first plating member provided on the first coil part for connecting adjacent unit coils of the first coil part in the longitudinal direction; and a second plating member provided on the second coil part for wrapping the unit coils of the second coil part along the strand direction.

[0017] In addition, in an embodiment of the present invention, the elastic portion includes a first plating portion provided in the first coil portion to connect adjacent unit coils of the first coil portion in the longitudinal direction, and the first plating portion can form a current path in the longitudinal direction.

[0018] The present invention has the effect of reducing the number of components of an electrically conductive pin, facilitating manufacturing, and improving electrical characteristics.

[0019] FIG. 1 is a drawing showing an electrically conductive pin according to an embodiment of the present invention.

[0020] Fig. 2 is a drawing showing a cross-section of an electrically conductive pin according to an embodiment of the present invention.

[0021] FIG. 3 is a drawing showing an overdrive state of an electric conductive pin according to an embodiment of the present invention.

[0022] Figure 4 is a drawing showing the plating state of an elastic part in an embodiment of the present invention.

[0023] FIG. 5 is a flowchart showing a method for manufacturing an electrically conductive pin according to another embodiment of the present invention.

[0024] FIGS. 6A to 6C are drawings showing a part of a method for manufacturing an electrically conductive pin according to an embodiment of the present invention.

[0025] Figures 7a and 7b are drawings showing the preparation steps in an embodiment of the present invention.

[0026] Fig. 8 is a drawing showing a deformed part after a deformation step in an embodiment of the present invention.

[0027] Figures 9a to 9d are drawings showing cross-sections of a terminal portion after the terminal portion forming step in an embodiment of the present invention.

[0028] Figures 10a to 10d are drawings showing the end portion of a terminal portion after the terminal portion forming step in an embodiment of the present invention.

[0029] Those skilled in the art will be able to develop various devices that embody the principles of the invention and fall within the scope and spirit of the invention, even if not explicitly described or illustrated in this specification. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention's concept and should be understood as being in no way limiting to the specifically listed embodiments and conditions.

[0030] The above-described objects, features and advantages will become more apparent through the following detailed description of the invention in conjunction with the accompanying drawings, so that those skilled in the art will be able to easily implement the technical idea of ​​the invention.

[0031] The embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal illustrations of the present invention. The dimensions of components depicted in these drawings may be exaggerated for the purpose of effectively explaining the technical content. The form of the illustrations may be altered due to manufacturing techniques and / or tolerances.

[0032] When describing various embodiments, components that perform the same function will be given the same names and reference numbers for convenience even if the embodiments are different. In addition, the expression "at least one of A, B, and C" means that it is composed of one, two, or three of A, B, and C. In addition, a cross-section or cross-sectional area may mean a cross-section perpendicular to the longitudinal direction unless otherwise specified. In addition, the longitudinal direction may mean the compression and restoration directions of the elastic member (200). Furthermore, the configuration and operation already described in other embodiments will be omitted for convenience.

[0033] Hereinafter, an electrically conductive pin (10) according to an embodiment of the present invention will be described. Fig. 1 is a drawing showing an electrically conductive pin (10) according to an embodiment of the present invention. Fig. 2 is a drawing showing a cross-section of an electrically conductive pin (10) according to an embodiment of the present invention. Fig. 3 is a drawing showing an overdrive state of an electrically conductive pin (10) according to an embodiment of the present invention. Fig. 4 is a drawing showing a plating state of an elastic member (200) according to an embodiment of the present invention.

[0034] Referring to FIGS. 1 and 2, an electrically conductive pin (10) according to an embodiment of the present invention may include a terminal portion (100) having a hollow portion (110) and being able to come into contact with the object to be inspected, in an electrically conductive pin (10) equipped in an inspection device to inspect the electrical characteristics of an object to be inspected; and an elastic portion (200) having a first coil portion (210) that comes into contact with the inspection device and has a fixed length, and a second coil portion (220) that is connected to the first coil portion (210) and is able to change length in the hollow portion (110).

[0035] The terminal portion (100) can contact an inspection object (not shown) and exchange electric signals with the inspection object. A current path may be formed in at least a portion of the terminal portion (100). The terminal portion (100) may have a hollow space (110) therein.

[0036] The terminal portion (100) may include a contact tip (120) that comes into contact with the test object at one end, a main body (130) extending from the contact tip (120), a detachment prevention portion (150) extending from the main body (130), and a fixing portion (140) positioned between both ends of the main body (130).

[0037] The contact tip (120) can directly contact the test object and may have multiple tips (121) (see FIG. 6c).

[0038] The main body (130) may have a hollow portion (110) and may accommodate an elastic portion (200) through the hollow portion (110). The main body (130) may provide a space in which the elastic portion (200) can be compressed and restored.

[0039] The fixing member (140) may be a protrusion formed to protrude radially from the main body (130) and may be formed along the circumference of the main body (130). The fixing member (140) may fix the electrically conductive pin (10) or the main body (130) to the inspection device.

[0040] The detachment prevention part (150) can prevent detachment of the elastic part (200) by contacting a part of the elastic part (200) in the area where the hollow (110) of the main body (130) narrows. Specifically, the detachment prevention part (150) can prevent detachment of the elastic part (200) by forming a narrowed hollow (110) or an inner surface and contacting the elastic part (200) (or the outer surface of the elastic part (200).

[0041] The terminal portion (100) may have a portion of one end open in the longitudinal direction, and may be opened to a degree that the elastic portion (200) can be supported without coming off. The terminal portion (100) may have a small hollow portion (112) in which a portion of one end is opened in the longitudinal direction, and the radius of the small hollow portion (112) is smaller than the outer diameter of the elastic portion (200), so that the elastic portion (200) can be prevented from coming off through one end of the terminal portion (100).

[0042] The terminal portion (100) has an open end to form an opening (151), and a part of the elastic portion (200) can be exposed longitudinally through the opening (151).

[0043] A hollow (110) may be provided in at least a portion of the terminal portion (100) between the opening (151) and the contact tip (120). The hollow (110) may be formed so that the size and shape of the cross-sectional area are the same along the longitudinal direction, except for the detachment prevention portion (150) and the contact tip (120).

[0044] The inclined hollow (111) may extend from the hollow (110). The inclined hollow (111) may be formed so that the size of the cross-sectional area gradually decreases toward the end along the length direction (see Fig. 8).

[0045] The small hollow (112) may extend from the inclined hollow (111) (see Fig. 8). The small hollow (112) may be formed such that the size and shape of the cross-sectional area are the same along the length direction. The small hollow (112) may be formed such that the size or shape of the cross-sectional area is not the same or is irregular along the length direction.

[0046] The small hollow (112) may extend in the longitudinal direction. The small hollow (112) may communicate the hollow (110) (or the inclined hollow (111)) with the outside of the terminal portion (100). The small hollow (112) may be formed in the contact tip (120).

[0047] The terminal portion (100) may include a terminal plating layer (not shown) on the surface to improve electrical conductivity. The plating material (or plating solution) may be introduced into the interior of the terminal portion (100) through the opening (151) and / or the small hollow (112) of the terminal portion (100). The small hollow (112) allows air existing inside the body to escape, thereby allowing the plating material to be easily introduced through the opening (151). The opening (151) allows air existing inside the terminal portion (100) to escape, thereby allowing the plating material to be easily introduced through the small hollow (112).

[0048] The small hollow (112) and the opening (151) are located at one end and the other end of the terminal portion (100), respectively, so that when plating material is introduced through one of the small hollow (112) and the opening (151), air is discharged through the other, thereby performing complementary roles.

[0049] The electrically conductive pin (10) according to the embodiment of the present invention is provided with a small hollow portion (112) and an opening portion (151) at one end and the other end of the terminal portion (100), respectively, so that the plating material can easily come into contact with the surface of the terminal portion (100), thereby reducing the process time and process difficulty.

[0050] The elastic member (200) can contact the inspection device (or electrode (20)) and exchange electric signals with the inspection device. The elastic member (200) may be a coil spring made of a metal material, but is not necessarily limited thereto.

[0051] The elastic member (200) can be formed by repeatedly winding the wire, and the elastic member (200) can have multiple winding numbers. A unit coil (UC) means an individual region that is wound once (one turn). That is, the elastic member (200) can have a shape in which the wire is wound in the circumferential direction and the unit coil (UC) is repeated in the longitudinal direction.

[0052] The elastic member (200) may include a first coil member (210) that contacts the inspection device (or electrode (20)) and a second coil member (220) that extends from the first coil member (210) and is capable of being compressed and restored. In addition, the elastic member (200) may further include a third coil member (230) that extends from the second coil member (220). The engaging section (201) may refer to a section in which the outer diameter and inner diameter sizes of the elastic member (200) gradually change in the longitudinal direction.

[0053] The first coil portion (210) may have a fixed length, and the second coil portion (220) may have a variable length. The third coil portion (230) may have a fixed length. The first coil portion (210) may have an outer diameter smaller than the outer diameter of the second coil portion (220). The third coil portion (230) may have an outer diameter smaller than the outer diameter of the second coil portion (220). The first coil portion (210) and the third coil portion (230) may have the same or different outer diameters.

[0054] When the elastic portion (200) includes all of the first coil portion (210) to the third coil portion (230), since it is symmetrical from the longitudinal center, it can be positioned in the terminal portion (100) in any direction, thereby increasing manufacturing convenience.

[0055] The elastic portion (200) may be supported longitudinally on the inner wall of the terminal portion (100). Specifically, the elastic portion (200) may be supported longitudinally on the contact tip (120) (or the inner wall of the contact tip (120)). When the elastic portion (200) includes a first coil portion (210) and a second coil portion (220), the second coil portion (220) may be supported on the inner wall of the terminal portion (100), and when the elastic portion (200) includes a first coil portion (210), a second coil portion (220), and a third coil portion (230), the third coil portion (230) may be supported on the inner wall of the terminal portion (100).

[0056] When the electrically conductive pin (10) comes into contact with the test object and receives a longitudinal force, the elastic member (200) may be compressed, which is called an overdrive state. When the electrically conductive pin (10) is released from contact with the test object and the longitudinal force is removed, the elastic member (200) may be restored, which is called a release state.

[0057] The first coil portion (210) can move in the longitudinal direction, i.e., toward the contact tip (120), in the overdrive state. At this time, a part of the first coil portion (210) can be located in the hollow (110), and the remainder can be located outside the hollow (110). The first coil portion (210) can move in the longitudinal direction, i.e., in the opposite direction of the contact tip (120), in the released state.

[0058] The second coil portion (220) can be compressed in an overdrive state. The second coil portion (220) can be restored in a release state. The second coil portion (220) can be positioned in the hollow (110) in the overdrive state and the release state.

[0059] The first coil portion (210) can move longitudinally in the hollow (110) according to the compression and restoration of the elastic portion (200). A portion of the first coil portion (210) can be positioned in the hollow (110) according to the compression of the elastic portion (200). The second coil portion (220) can be compressed in the hollow (110).

[0060] Unlike Fig. 2, the engaging section (201) may be fixed in length while forming a part of the first coil portion (210). As shown in Fig. 2, the engaging section (201) may be variable in length while forming a part of the second coil portion (220). A part of the engaging section (201) may form a part of the first coil portion (210) and the remainder may form a part of the second coil portion (220).

[0061] The elastic part (200) can be prevented from being separated from the terminal part (100) by the separation prevention part (150) of the terminal part (100). When the catch section (201) of the elastic part (200) and the separation prevention part (150) of the terminal part (100) come into contact, the elastic part (200) is prevented from moving and can be prevented from being separated from the terminal part (100). Here, separation can mean a state in which the terminal part (100) and the elastic part (200) are completely separated from each other.

[0062] Referring to Fig. 3, when the electrically conductive pin (10) comes into contact with the inspection object, it can be compressed in the longitudinal direction by pressure. By the compression of the elastic part (200) supported by the contact tip (120) of the terminal part (100), the first coil part (210) and the terminal part (100) can move relative to each other in the longitudinal direction, thereby compressing the electrically conductive pin (10) (overdrive). Conversely, when the electrically conductive pin (10) is released from contact with the inspection object, the first coil part (210) and the terminal part (100) can move relative to each other in the longitudinal direction, thereby restoring the electrically conductive pin (10) (release).

[0063] The arrows in Fig. 3 represent the movement of an electric signal. The electric signal can move from the inspection device to the elastic member (200). The electric signal can move through the first coil member (210) in the longitudinal direction. The electric signal can move from the first coil member (210) to the second coil member (220), and from the second coil member (220) again to the terminal member (100). The second coil member (220) can contact the side wall (104) of the terminal member (100) to transmit the electric signal to the terminal member (100). The second coil member (220) can come into contact with the terminal member (100) while being bent or tilted in a radial direction perpendicular to the longitudinal direction. The electric signal can move from the terminal member (100) to the electrode (20) of the inspection object through the contact tip (120). Conversely, the electrical signal can travel in the following order: the test object, the terminal portion (100), the second coil portion (220), the first coil portion (210), and the test device.

[0064] In contrast, the electric signal can move from the first coil portion (210) to the terminal portion (100). The first coil portion (210) can contact the detachment prevention portion (150) to transmit the electric signal to the terminal portion (100). The first coil portion (210) can come into contact with the terminal portion (100) while being bent or tilted in a radial direction perpendicular to the longitudinal direction. The electric signal can move from the terminal portion (100) to the electrode (20) of the inspection object through the contact tip (120). Conversely, the electric signal can move in the following order: the inspection object, the terminal portion (100), the first coil portion (210), and the inspection device.

[0065] In an embodiment of the present invention, the second coil portion (220) may have relatively greater resistance than the terminal portion (100) due to the long length of the wire. Accordingly, the electrical signal may experience less loss when traveling through the terminal portion (100) than when traveling through the second coil portion (220).

[0066] Since the second coil portion (220) is more likely to come into contact with the terminal portion (100) than the first coil portion (210) and the third coil portion (230), the second coil portion (220) may come into contact with the terminal portion (100) and the outer wall at various points. In this case, since the terminal portion (100) and the second coil portion (220) form a parallel circuit, the electric signal flowing to the terminal portion (100) may be distributed to the second coil portion (220), resulting in signal loss.

[0067] When the elastic portion (200) further includes a third coil portion (230), the length of the second coil portion (220) in the longitudinal direction is shortened by the length of the third coil portion (230), so that the probability of the electric signal flowing to the terminal portion (100) being dispersed to the second coil portion (220) can be reduced.

[0068] In summary, since the third coil part (230) has a smaller outer diameter than the second coil part (220), the possibility of contact with the terminal part (100) is low, and it becomes difficult to transmit an electric signal from the terminal part (100), thereby inducing movement of an electric signal to the terminal part (100).

[0069] The electric conductive pin (10) according to the embodiment of the present invention can have the effect of reducing the loss of an electric signal by including a third coil portion (230).

[0070] Referring to FIG. 4, the elastic member (200) may include a material layer (240) and a plating layer (250). The wire wound around the elastic member (200) may have the material layer (240) positioned at the center, and the plating layer (250) positioned on the material layer (240). The plating layer (250) may have higher electrical conductivity than the material layer (240).

[0071] The plating layer (250) may be made of at least one material selected from the group consisting of gold (Au), silver (Ag), nickel (Ni), and copper (Cu), but is not limited thereto. The plating layer (250) may include a plurality of layers. That is, the elastic member (200) may include a material layer (240), a first plating layer (251) positioned on the material layer (240), and a second plating layer (252) positioned on the first plating layer (251).

[0072] For example, the first plating layer (251) may include copper, and the second plating layer (252) may include gold. As another example, the first plating layer (251) may include nickel, the second plating layer (252) may include copper, the third plating layer (not shown) may include nickel, and the fourth plating layer (not shown) may include gold.

[0073] The plating layer (250) can play a role of protecting the elastic part (200) while increasing the electrical conductivity of the elastic part (200). The plating layer (250) can be divided into a first plating layer (251) and a second plating layer (252), etc., based on the position of the layer. The plating layer (250) can be divided into a first plating portion (260) and a second plating portion (270), etc., based on the position in the longitudinal direction.

[0074] The first plating portion (260) may refer to a plating layer (250) plated on the first coil portion (210). The second plating portion (270) may refer to a plating layer (250) plated on the second coil portion (220). The third plating portion (not shown) may refer to a plating layer (250) plated on the third coil portion (230).

[0075] Before the explanation, the longitudinal direction means the compression and restoration direction of the elastic member (200) as described above, the wire direction means the circumferential direction in which the wire advances, and the longitudinal direction and the circumferential direction are distinct concepts. For example, in the first coil portion (210), the unit coils (AUC) adjacent in the longitudinal direction are in contact with each other, and in the second coil portion (220), the unit coils (UC) in the longitudinal direction are in a non-contact state with each other.

[0076] The first plating portion (260) may constitute the surface of the first coil portion (210). Specifically, the first plating portion (260) may be positioned on the material layer (240) of the first coil portion (210). The material layers (240) of the first coil portion (210) may contact each other in the longitudinal direction based on the unit coil (UC) or may be spaced apart from each other, but the first coil portions (210) including the first plating portion (260) may contact each other in the longitudinal direction based on the unit coil (UC).

[0077] The first plating portion (260) may be plated so that a plurality of unit coils (UC) are connected in the longitudinal direction. The first coil portion (210) may have adjacent unit coils (AUC) connected to each other in the longitudinal direction. That is, the plurality of unit coils (UC) constituting the first coil portion (210) may be in contact in the longitudinal direction.

[0078] In the first coil portion (210), an electric signal can travel along the longitudinal direction of the unit coils (UC) that are in contact with each other. The first coil portion (210) can form a longitudinal current path.

[0079] The second plating portion (270) may constitute the surface of the second coil portion (220). Specifically, the second plating portion (270) may be positioned on the material layer (240) of the second coil portion (220). The material layers (240) of the second coil portion (220) may be spaced apart from each other based on the unit coil (UC), and the second coil portions (220) including the second plating portion (270) may also be spaced apart from each other based on the unit coil (UC).

[0080] The second plating portion (270) may be plated so that a plurality of unit coils (UC) are not connected in the longitudinal direction. The second coil portion (220) may have unit coils (UC) spaced apart from each other in the longitudinal direction. That is, the plurality of unit coils (UC) constituting the second coil portion (220) may be spaced apart in the longitudinal direction.

[0081] In the second coil section (220), the electric signal can move along the wire direction (or circumferential direction) of the unit coils (UC).

[0082] The third plating portion may constitute the surface of the third coil portion (230). Specifically, the third plating portion may be located on the material layer (240) of the third coil portion (230). The material layers (240) of the third coil portion (230) may contact each other in the longitudinal direction based on the unit coil (UC) or may be spaced apart from each other, but the third coil portions (230) including the third plating portion may contact each other in the longitudinal direction based on the unit coil (UC).

[0083] The third plating portion may be plated so that a plurality of unit coils (UC) are connected in the longitudinal direction. The third coil portion (230) may have adjacent unit coils (AUC) connected to each other in the longitudinal direction. That is, the plurality of unit coils (UC) constituting the third coil portion (230) may be in contact in the longitudinal direction.

[0084] In the third coil section (230), the electric signal can travel along the length direction of the unit coils (UC) that are in contact with each other.

[0085] Since the elastic portion (200) can be formed by winding a wire, when an electric signal moves along the wire, loss may increase due to high resistance. The first coil portion (210) can minimize loss by forming a longitudinal current path by allowing adjacent unit coils (AUC) to contact or connect with each other in the longitudinal direction.

[0086] The electrically conductive pin (10) according to an embodiment of the present invention can secure high electrical conductivity through the first coil portion (210) while reducing the number of parts by contacting the elastic portion (200) with the inspection device to exchange electrical signals.

[0087] Below, a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention will be described.

[0088] FIG. 5 is a flowchart illustrating a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention. FIGS. 6a to 6c are diagrams illustrating a part of a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention. FIGS. 7a to 7b are diagrams illustrating a preparation step (S100) according to an embodiment of the present invention. FIG. 8 is a diagram illustrating a deformation part (102) after a deformation step (S200) according to an embodiment of the present invention. FIGS. 9a to 9d are diagrams illustrating a cross-section of a terminal part (100) after a terminal part forming step (S400) according to an embodiment of the present invention. FIGS. 10a to 10d are diagrams illustrating an end of a terminal part (100) after a terminal part forming step (S400) according to an embodiment of the present invention.

[0089] Referring to FIGS. 5 and 6a to 6c, a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention may include a preparation step (S100) of preparing a tubular member (101) in which a hollow (110) is formed from one end to at least a portion of a depth; a deformation step (S200) of forming a deformation portion (102) by narrowing the hollow (110) corresponding to one end area of ​​the tubular member (101); and a contact tip forming step (S300) of forming a contact tip (120) that comes into contact with an object to be inspected by processing the deformation portion (102); and may further include a terminal portion forming step (S400) of forming an outer shape by processing the tubular member (101).

[0090] First, a preparation step (S100) can be performed.

[0091] Referring again to FIG. 6A, the tubular member (101) may have a hollow space (110) formed longitudinally therein. The hollow space (110) is not limited to being formed throughout the entire tubular member (101) along the longitudinal direction, and may be formed from one end to a certain depth along the longitudinal direction of the tubular member (101).

[0092] Referring to FIGS. 7A and 7B, a tubular member (101) can be prepared by machining a cylindrical member from one end to at least a portion of the depth. At this time, the tubular member (101) can have a hollow (110) formed by drilling (D) while the cylindrical member is held by a holding portion (30).

[0093] Next, a transformation step (S200) can be performed.

[0094] Referring to FIGS. 6a, 6b, and 8, a deformation portion (102) may be formed in one end region of the tubular member (101). The deformation portion (102) may be a region where a portion of the tubular member (101) is plastically deformed by being bent into a shape in which the hollow (110) becomes narrower. The deformation portion (102) may be deformed into a shape in which one end region of the tubular member (101) is bent in the direction of the central axis (or cylindrical axis) so that the annular ends (103) of the tubular member (101) face each other. The annular ends (103) may contact each other to close the hollow (110) (see FIG. 6b), or may not contact each other to close only a portion of the hollow (110) to form a small hollow (112) to be described later (see FIG. 8).

[0095] The tubular member (101) can be deformed by being rotated by the gripper (30) while the deformation means (not shown) is in contact with the outer surface of the side wall (104) of one end region. At this time, the formation of the deformation portion (102) can be performed by the herashibori method, but is not limited thereto. After being processed, the deformation portion (102) can become a contact tip (120).

[0096] With continued reference to FIG. 8, the deformation portion (102) may include an inclined hollow (111). The inclined hollow (111) may refer to a section in which the hollow (110) is narrowed by the deformation portion (102) formed in one end region of the tubular member (101). Specifically, the inclined hollow (111) may be formed such that the cross-sectional area (cross-sectional area) of the hollow (110) of the tubular member (101) gradually decreases in the longitudinal direction.

[0097] The inclined hollow (111) (or the inner wall of the contact tip (120)) is formed inside the terminal portion (100) and can support the elastic portion (200). Here, the cross-section of the hollow (110) means an imaginary cross-section formed by the hollow (110) when the tubular member (101) is cut perpendicular to the length direction.

[0098] The deformation portion (102) may include a small hollow portion (112). The small hollow portion (112) may refer to a section extending from the inclined hollow portion (111) in the deformation portion (102) formed in one end region of the tubular member (101). Specifically, the small hollow portion (112) may be formed to have a cross-sectional area smaller than the cross-sectional area of ​​the hollow portion (110) of the tubular member (101). Various examples of the small hollow portion (112) will be described later.

[0099] Next, a contact tip forming step (S300) can be performed.

[0100] Referring to FIGS. 6C, 9A, and 10A, the contact tip (120) can be formed by processing a deformation portion (102). The contact tip (120) can include a plurality of tip portions (121). The deformation portion (102), which is formed by deforming one end region of the tubular member (101), can be cut and provided on the tubular member (101) as a plurality of tip portions (121).

[0101] The contact tip (120) may include a plurality of tip portions (121) for contacting the test object. The contact tip (120) may form a plurality of contact points with the test object (or electrode (20)) through the plurality of tip portions (121), thereby transmitting a signal between the test device and the test object.

[0102] The contact tip (120) may be provided in a form in which a portion of the deformation portion (102) is cut off. The contact tip (120) may be formed by cutting the outer surface of the deformation portion (102) so as to be inclined in the direction of the central axis (cylindrical axis). The outer portion cut off from the deformation portion (102) forms a plurality of tip portions (121), and the inclined hollow portion (111) that is not cut from the deformation portion (102) may form the inner surface of the contact tip (120) that supports the elastic portion (200).

[0103] Next, the terminal portion forming step (S400) can be performed.

[0104] The terminal portion forming step (S400) may include at least one of a step of processing the outer surface of the side wall (104) of the tubular member (101) to reduce the thickness of the side wall (104), a step of forming a first processing hole (105) in the deformation portion (102) that is longitudinally connected to the hollow (110), and a step of forming a second processing hole (106) in the side wall (104) of the tubular member (101) that is longitudinally connected to the hollow (110). The first processing hole (105) may be a small hollow (112).

[0105] Referring to FIG. 6c, FIG. 9a and FIG. 10a, in the step of processing the outer surface of the side wall (104) of the tubular member (101) to reduce the thickness of the side wall (104), the terminal portion (100) can be processed to form an outer shape.

[0106] The tubular member (101) can be cut by being rotated by the gripper (30) while the cutting means (not shown) is in contact with it. The outer surface of the side wall (104) of the tubular member (101) can be cut to reduce the thickness of the side wall (104), thereby forming the outer shape of the terminal part (100). The main body (130) of the terminal part (100) can maintain the same outer diameter except for the fixing part (140), and can maintain the same thickness of the side wall (104). In some cases, the terminal part (100) is divided into one side and the other side based on the fixing part (140), and the thicknesses of the side walls (104) of one side and the other side of the terminal part (100) may be different from each other.

[0107] The side wall (104) of the tubular member (101) can be cut to a first thickness (d2). A portion of the side wall (104) of the tubular member (101) can be cut to a thickness greater than the first thickness (d2) or can be left unprocessed to become a fixed portion (140).

[0108] A part of the side wall (104) of the tubular member (101) may be cut or unprocessed to become a fixed portion (140), and the remainder of the side wall (104) may be cut to a first thickness (d2) thinner than the fixed portion (140) to become a main body (130) excluding the fixed portion (140).

[0109] Referring to FIGS. 9b and 10b, in the step of forming a first processing hole (105) that is longitudinally connected to the hollow (110) in the deformation portion (102), the deformation portion (102) (or contact tip (120)) of the tubular member (101) (or terminal portion (100)) may be processed to form the first processing hole (105).

[0110] The first processing hole (105) may be formed to penetrate longitudinally from the end of the terminal portion (100). When viewed from the end of the terminal portion (100), the first processing hole (105) may be formed in the shape of a '+' or an 'x'. The first processing hole (105) may be formed by cutting the deformation portion (102) while the cutting means moves in the shape of a '+' or an 'x'.

[0111] A plurality of tip portions (121) may be repeatedly provided along the circumferential direction, and a plurality of recessed portions (122) formed between the plurality of tip portions (121) may also be repeatedly provided along the circumferential direction. At this time, each recessed portion (122) may be formed to extend in the radial direction. The plurality of recessed portions (122) may be formed in the shape of a '+' or an 'x'. The first processing hole (105) may be formed by a cutting means cutting a deformed portion (102) in the radial direction along each of the recessed portions (122).

[0112] Referring to FIGS. 9c and 10c, in the step of forming a first processing hole (105) that is longitudinally connected to the hollow (110) in the deformation portion (102), the deformation portion (102) (or contact tip (120)) of the tubular member (101) (or terminal portion (100)) may be processed to form the first processing hole (105).

[0113] The first processing hole (105) may be formed to penetrate longitudinally from the end of the terminal portion (100). When the terminal portion (100) is viewed from the end, the first processing hole (105) may be formed in an 'o' shape. The first processing hole (105) may be formed by cutting the deformation portion (102) into an 'o' shape by rotation of the drill (D).

[0114] Referring to FIGS. 9D and 10D, in the step of forming a second processing hole (106) communicating with a hollow (110) in the side wall (104) of the tubular member (101), the tubular member (101) (or terminal portion (100)) may be processed to form the second processing hole (106). The second processing hole (106) may be provided in a different location from the small hollow (112), but may have the same function as the small hollow (112) having the function of introducing plating material and releasing air.

[0115] The second processing hole (106) may be formed to penetrate the side wall (104) of the terminal portion (100) in the direction of the central axis. The second processing hole (106) may provide a passage through which a plating material for plating the inner surface of the side wall (104) forming the hollow (110) of the terminal portion (100) (or the main body (130)) is introduced. When viewed from the side wall (104) of the terminal portion (100), the second processing hole (106) may be formed in an 'o' shape. The second processing hole (106) may be formed by cutting the tubular member (101) in an 'o' shape by rotation of the drill (D).

[0116] Continuing, a separation prevention part forming step may be performed to form a separation prevention part (150) by narrowing the hollow (110) corresponding to the other end area of ​​the tubular member (101). The separation prevention part (150) may be performed in a state where the elastic part (200) is positioned in the hollow (110) of the terminal part (100). Specifically, the separation prevention part (150) may be performed in a state where the second coil part (220) is positioned in the hollow (110).

[0117] In this way, the elastic portion (200) can be prevented from being detached from the terminal portion (100) by having the catch section (201) contact the detachment prevention portion (150), and can be supported by the terminal portion (100) so that a part (the second coil portion (220)) can be located on the terminal portion (100).

[0118] The contact tip forming step (S300) and the terminal portion forming step (S400) can be performed sequentially. That is, since both forming the contact tip (120) by processing the deformable portion (102) and forming the outer shape of the terminal portion (100) by processing the tubular member (101) are performed by a cutting process, they can be performed simultaneously or at different times by the same or different cutting means.

[0119] Meanwhile, since the deformation step (S200) and the contact tip forming step (S300) are performed in one end region of the tubular member (101), the gripping part (30) can grip the tubular member (101) in a direction in which one end region of the tubular member (101) is exposed. The terminal part forming step (S400) can be performed in one end region exposed by the gripping part (30) and a part of the main body (130).

[0120] As a comparative example, when the outer shape of the terminal portion (100) is formed first and the hollow portion (110) of the terminal portion (100) is formed later, scratches may occur on the outer shape of the terminal portion (100) due to the frictional force of the grip portion (30) and / or the drill (D).

[0121] In contrast, the method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention first forms a contact tip (120) in a tubular member (101) having a hollow (110) and then forms a terminal portion (100) by cutting the outer surface of the side wall (104) of the tubular member (101). Therefore, the outer surface of the terminal portion (100) can be prevented from being damaged by the grip portion (30) during the process of forming the hollow (110).

[0122] Even when a scratch occurs by using a tubular member (101) that already has a hollow (110) or by forming a hollow (110) in a tubular member (101') that does not have a hollow (110), the scratch can be removed by cutting the outer surface of the side wall (104) of the tubular member (101). As a result, the terminal portion (100) can be manufactured in a complete state without any scratches.

[0123] In addition, the electrically conductive pin (10) according to the embodiment of the present invention may have a thickness (d1) of the contact tip (120) greater than the thickness (d2) of the side wall (104) of the terminal portion (100) in at least a portion of the contact tip (120).

[0124] Specifically, the contact tip (120) may include a section in which the thickness (d1) gradually increases from the outer surface of the side wall (104) of the terminal portion (100) to the vertex of the tip portion (121). In addition, the contact tip (120) may include a section in which the thickness (d1) gradually decreases from the vertex of the tip portion (121) of the terminal portion (100) toward the central axis. In addition, the thickness (d1) of the contact tip (120) in the area where the contact tip (120) supports the elastic portion (200) may be thicker than the thickness (d2) of the side wall (104) of the terminal portion (100).

[0125] Since the tubular member (101) having a thick side wall (104) is plastically deformed to form a deformed portion (102) and a contact tip (120), and the thick side wall (104) is cut to form a thin side wall (104), the thickness (d1) of at least a portion of the contact tip (120) may be greater than the thickness (d2) of the side wall (104) of the terminal portion (100). Here, the thickness (d1) of the contact tip (120) may mean the thickness in the direction perpendicular to the inner surface (or inner surface) forming the hollow (110) or the inclined hollow (111).

[0126] According to an embodiment of the present invention, the electrically conductive pin (10) can implement a narrow pitch of a plurality of electrically conductive pins (10) provided in an inspection device by configuring the thickness (d2) of the side wall (104) of the terminal portion (100) to be relatively thin, and by configuring the thickness (d1) of the contact tip (120) to be relatively thick, deformation and damage due to the force received by the elastic portion (200) and the inspection object can be prevented.

[0127] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0128] [Explanation of symbols]

[0129] 10: Electrically conductive pin

[0130] 20: Electrode

[0131] 30: The phage department

[0132] 100: Terminal section

[0133] 101: Tubular member

[0134] 102: Transformation section

[0135] 103: Circular end

[0136] 104: Side wall

[0137] 105: First processing hole

[0138] 106: Second processing hole

[0139] 110: Hollow

[0140] 111: Slope hollow

[0141] 112: Small hollow

[0142] 120: Contact tip

[0143] 121: Cutting edge

[0144] 122: Depression

[0145] 130: Body

[0146] 140: Fixed part

[0147] 150: Anti-detachment section

[0148] 151: Opening

[0149] 200: Elasticity

[0150] 201: Stuck section

[0151] 210: First coil section

[0152] 220: Second coil section

[0153] 230: Third coil section

[0154] 240: Material layer

[0155] 250: Plating layer

[0156] 251: First plating layer

[0157] 252: Second plating layer

[0158] 260: First plating department

[0159] 270: Second Plating Department

[0160] UC: Unit coil

[0161] AUC: Adjacent Unit Coil

Claims

1. In the electrically conductive pin equipped in the inspection device to inspect the electrical characteristics of the inspection object, A terminal part having a hollow body and capable of contacting the test object; and An electrically conductive pin comprising an elastic member having a first coil portion that is in contact with the inspection device and has a fixed length, and a second coil portion that is connected to the first coil portion and has a length that can be changed in the hollow space.

2. In paragraph 1, The above elastic part, An electrically conductive pin supported longitudinally on the inner wall of the terminal portion.

3. In paragraph 1, The above first coil part, Electrically conductive pins, some of which are located in the hollow according to the compression of the above elastic member.

4. In paragraph 1, The above first coil part, Electrically conductive pins in which adjacent unit coils are connected longitudinally.

5. In paragraph 1, The above elastic part, It further includes a third coil part that is connected to the second coil part and has a fixed length; The third coil portion is an electrically conductive pin supported longitudinally on the inner wall of the terminal portion.

6. In paragraph 1, The above elastic part, An electrically conductive pin further comprising at least one plating layer positioned on the material layer.

7. In paragraph 1, The above elastic part, A first plating portion provided in the first coil portion to connect adjacent unit coils of the first coil portion in the longitudinal direction; and An electrically conductive pin further comprising a second plating portion provided in the second coil portion to wrap the unit coils of the second coil portion along the direction of the wire.

8. In paragraph 1, The above elastic part, Including a first plating part provided in the first coil part to connect adjacent unit coils of the first coil part in the longitudinal direction, The above first plating portion is an electrically conductive pin that forms a longitudinal current path.

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