Vessel

Abstract

In the present invention, the opening / closing of a container for vacuum transfer is automated while the occurrences of operational malfunctions are reduced. A portable vessel (90) accommodates a processing object of a vacuum processing device while holding the object in a vacuum. The portable vessel comprises: a plate-like base body (91) on an upper surface of which is provided a protruding part (914) that is adjacent to at least a corner of the encircling shape of a groove (912) into which a seal member is fitted; and a lid body (92) configured such that side walls (923) are positioned directly above the groove.

Description

Vessel

[0001] The present disclosure relates to a vessel applied to a vacuum processing apparatus.

[0002] Vacuum processing apparatuses, such as plasma processing apparatuses, are known that perform required processing on a workpiece within a vacuum chamber. It has also been proposed to apply a transport container to the vacuum processing apparatus, which can accommodate the workpiece while maintaining it under vacuum and can be transported into and out of the vacuum processing apparatus body.

[0003] Japanese Patent Application Publication No. 2005-170665

[0004] In the technology of Patent Document 1, the transport container is mainly composed of a box-shaped portion having no lid and a lid portion, and a sealing member is sandwiched between the box portion and the lid portion to maintain a vacuum in the internal space. However, there were problems with the reliability of these operations within the vacuum processing equipment, as it was difficult to remove and store the workpiece.

[0005] In order to solve the above problems, one aspect of the present disclosure is a portable vessel that contains a workpiece to be processed by a vacuum processing device while holding it in a vacuum, the vessel comprising a base and a lid, the base being plate-shaped, and the upper surface of the base being provided with a groove that runs around the periphery to form a rounded square or a rounded rectangle and into which a sealing member is fitted, and a convex portion adjacent to at least the corners of the groove's circumferential shape, the lid having a plate-shaped ceiling portion and sidewall portions that extend downward from the ceiling portion and run around the periphery in a planar view, the sidewall portions of the lid being configured so that the sidewall portions of the lid attached to the base are positioned directly above the groove.

[0006] According to one aspect of the present disclosure, it is possible to realize automation of opening and closing of a vacuum transfer vessel while reducing the occurrence of operational malfunctions.

[0007] FIG. 1 is a diagram illustrating an overview of a vacuum processing apparatus to which a vessel according to a first embodiment of the present disclosure is applied. FIG. 2 is a block diagram illustrating a functional configuration of the vacuum processing apparatus. FIG. 3 is a diagram illustrating a cross section viewed from the front to illustrate an overview of the vessel. FIG. 4 is a plan view illustrating a base body of the vessel. FIG. 5 is a plan view illustrating a lid body of the vessel. FIG. 6 is a diagram illustrating a cross section of the vessel, with an enlarged corner. FIG. 7 is a diagram illustrating an overview of a load lock chamber of the vacuum processing apparatus. FIG. 8 is a diagram illustrating a state in which a lifting rod of an opening and closing mechanism is raised. FIG. 9 is a diagram illustrating an overview of a load lock chamber of the vacuum processing apparatus. FIG. 10 is a diagram illustrating a state in which the opening and closing mechanism has detached the lid body of the vessel from the base. FIG. 11 is a plan view illustrating a base body of a vessel according to a second embodiment of the present disclosure. FIG. 12 is a plan view illustrating a base body of a vessel according to a third embodiment of the present disclosure. FIG. 13 is a diagram illustrating a cross section viewed from the front to illustrate an overview of a vessel according to a fourth embodiment of the present disclosure.

[0008] [Embodiment 1] An embodiment of the present invention will be described in detail below. However, the following description is intended to describe an example of a vessel according to the present invention and a vacuum processing apparatus 1 to which the vessel is applied, and the technical scope of the present invention is not limited to the following description and the contents of the drawings. Note that, in the following, directions and orientations are represented assuming that the upward vertical line is the positive direction of the Z axis, and that the X axis and Y axis are in a horizontal plane.

[0009] <Overview of the configuration of the vacuum processing apparatus 1> Fig. 1 is a diagram illustrating the configuration of the main parts of the vacuum processing apparatus 1 to which a vessel 90 according to the first embodiment of the present disclosure is applied. Fig. 1 also shows the vessel 90, and illustrates an example of a scene in which the vessel 90 is introduced into the vacuum processing apparatus 1. Fig. 2 is a block diagram illustrating the functional configuration of the vacuum processing apparatus 1.

[0010] The vacuum processing apparatus 1 includes a load lock chamber 10, an intermediate chamber 20, a vacuum processing chamber 30, a transfer mechanism 40, and a control unit 60 that controls each part of the vacuum processing apparatus 1. The load lock chamber 10 and the vacuum processing chamber 30 are airtightly connected via the intermediate chamber 20. The load lock chamber 10, the intermediate chamber 20, and the vacuum processing chamber 30 are arranged side by side in the X-axis direction.

[0011] The intermediate chamber 20 is provided with a gate valve 21 that can isolate the load lock chamber 10 from the vacuum processing chamber 30. The transport mechanism 40 has a transfer rod 41 that can move back and forth in the X-axis direction. With the gate valve 21 open, the transport mechanism 40 can transport a holder 93 on which a workpiece (not shown) is placed between the load lock chamber 10 and the vacuum processing chamber 30.

[0012] The load lock chamber 10 includes a support mechanism 11, a vessel fixing mechanism 12, an opening / closing mechanism 13, and a door (not shown). The door can open the load lock chamber 10 to the outside, allowing the vessel 90 according to the first embodiment of the present disclosure to be introduced into the load lock chamber 10 from the outside. When the door is closed, the load lock chamber 10 can be kept airtight. The vessel fixing mechanism 12 is a stage that holds the vessel 90 inside the load lock chamber 10.

[0013] The support mechanism 11 supports the vessel fixing part 12 so that its position can be adjusted. The opening / closing mechanism 13 is a mechanism that opens and closes the vessel 90 held by the vessel fixing part 12. The opening / closing mechanism 13 has two lifting rods 131 that can descend from the ceiling side of the load lock chamber 10 toward the vessel fixing part 12 and can also ascend. Each of the lifting rods 131 is held by a seal block 14 on the ceiling of the load lock chamber 10 so that it can be raised and lowered, while the load lock chamber 10 is kept airtight.

[0014] A vacuum pipe 51 connected to a first vacuum pump unit 50 (vacuum pump unit) is connected to the load lock chamber 10, and the load lock chamber 10 can be evacuated by the first vacuum pump unit 50. A gas pipe 53 connected to a gas inlet unit 52 is also connected to the load lock chamber 10, and gas can be introduced into the load lock chamber 10 by the gas inlet unit 52.

[0015] An inert gas such as argon or nitrogen is preferably used as the gas introduced by the gas introduction unit 52. The gas introduction unit 52 is appropriately provided with an interlock mechanism that stops the gas introduction when the pressure inside the load lock chamber 10 reaches a predetermined pressure that exceeds atmospheric pressure, or a mechanism that releases the pressure in the load lock chamber 10 while continuing the gas introduction.

[0016] 1 is connected to the load lock chamber 10, making it possible to measure the dew point inside the load lock chamber 10. The detailed functions and operations of each part of the load lock chamber 10 will be described in more detail later.

[0017] The vacuum processing chamber 30 is divided into a front chamber section 31 and a processing chamber section 32 located above the front chamber section 31. The vacuum processing chamber 30 is equipped with an elevation mechanism 33 and an elevation stage 34. A vacuum pipe 55 connected to a second vacuum pump section 54 is connected to the vacuum processing chamber 30, and the vacuum processing chamber 30 can be evacuated by the second vacuum pump section 54.

[0018] The lifting mechanism 33 moves the lifting stage 34 up and down between the front chamber 31 and the processing chamber 32. When the lifting stage 34 is in a lowered position within the front chamber 31, the transport mechanism 40 can hold the holder 93 on which the workpiece is placed by the transfer rod 41 and transport it between the load lock chamber 10 and the lifting stage 34 of the vacuum processing chamber 30.

[0019] When the lift stage 34 is in a raised position within the processing chamber 32, the workpiece on the lift stage 34 can be subjected to the required vacuum processing. In Fig. 1, the lift stage 34 in the lowered position is shown by a solid line, and the lift stage 34 halfway between the raised and lowered positions is shown by a dotted line. The vacuum processing apparatus 1 that performs the required vacuum processing on the workpiece within the processing chamber 32 may be, for example, a plasma processing apparatus. A sputtering apparatus, a plasma CVD (Chemical Vapor Deposition) apparatus, a plasma etching apparatus, and a plasma ashing apparatus are all examples of plasma processing apparatuses.

[0020] The vacuum processing apparatus 1 includes an appropriate vacuum processing mechanism 35 for performing required vacuum processing within the processing chamber 32. Examples of functions of the vacuum processing mechanism 35 include a mechanism for generating plasma within the processing chamber 32, a mechanism for introducing required gases into the processing chamber 32, a mechanism for heating the lifting stage 34, and a mechanism for applying a bias to the lifting stage 34 or the film-forming raw material within the processing chamber 32.

[0021] The vessel 90 according to the first embodiment of the present disclosure is a portable vacuum transport container that can accommodate a workpiece while maintaining it under vacuum. The vessel 90 is composed of a base 91 and a lid 92. The vessel 90 accommodates the workpiece and a holder 93 on which the workpiece is placed in the internal space defined by the base 91 and the lid 92.

[0022] Vessel 90 enables the workpiece to be transported between vacuum processing apparatus 1 and other apparatus while being held in a vacuum. To this end, load lock chamber 10 is configured so that vessel 90 can be received on vessel fixing portion 12, lid 92 of vessel 90 can be attached and detached to and from base 91, and the workpiece can be taken out or stored together with holder 93.

[0023] Fig. 3 is a cross-sectional view seen from the front (Y direction in Fig. 1) to show the main configuration of the vessel 90. Fig. 4 is a plan view of the base 91. Fig. 5 is a plan view of the lid 92. Fig. 3 shows cross sections taken along lines A-A of the base 91 in Fig. 4 and the lid 92 in Fig. 5. Fig. 6 is an enlarged view showing cross sections taken along lines B-B of the base 91 in Fig. 4 and the lid 92 in Fig. 5.

[0024] The lid 92 is composed of a plate-shaped ceiling portion 921 that is approximately square or rectangular in plan view, and sidewall portions 923 that extend downward from the outer edge, i.e., four sides, of the ceiling portion 921. Therefore, the planar shape of the lid 92 is approximately square or rectangular. In plan view, the sidewall portions 923 run around the outer edge of the ceiling portion 921. In the plan view of the base 91 in Figure 4, the position of the sidewall portions 923 of the lid 92 that are attached to the plate-shaped base 91 is indicated by a dotted line. Note that in Figure 4, the outer edge of the sidewall portions 923 coincides with the outer edge of the lid 92 itself in plan view (the planar shape of the lid 92).

[0025] 3 to 6, the base 91 is a plate-like member that is approximately square or rectangular in plan view. However, the planar shape of the base 91 can be selected arbitrarily as long as the internal space partitioned by the base 91 and the lid 92 can be airtight. In the specific examples shown in FIGS. 3 to 6, the planar shape of the base 91 is set to the minimum size that approximately matches the planar shape of the lid 92, and is therefore approximately square or rectangular. However, since the vessel 90 is configured such that the base 91 surrounds the side wall portion 923 of the lid 92 in plan view, the planar shape of the base 91 is not limited to being approximately square or rectangular if the planar shape of the base 91 is not set to the minimum size.

[0026] Here, the term "approximately rectangular" refers to any shape that can be recognized as a rectangle overall. In other words, the term "approximately rectangular" includes rectangles with slight modifications. For example, a rectangle with rounded corners or a shape that is rectangular overall, such as a rectangle with at least one rounded corner (so-called R), is also an example of a "approximate rectangle." Another example of a "approximate rectangle" is a rectangle with a convex or concave portion on one of its sides. The term "approximate rectangle" also includes a shape that can be recognized as a rectangle overall, even if at least one of its sides has a wavy or curved portion. The same applies to the term "approximate square."

[0027] 3 , in the vessel 90 in a state in which the lid 92 is attached to the base 91, the internal space is the space sandwiched between the ceiling 921 of the lid 92 and the base 91 in the vertical direction. In addition, in the horizontal direction, the internal space is the space surrounded by the side wall 923 of the lid 92.

[0028] Two engagement portions 922 are provided on the upper surface of the ceiling portion 921 of the lid 92. Specifically, the engagement portions 922 are threaded holes that can engage with threaded portions 132 (see FIG. 7 ), which are engagement portions on the opening / closing mechanism 13 and will be described later. The two engagement portions 922 are arranged on a diagonal line in the planar shape of the lid 92. Line B-B in FIG. 5 coincides with a part of the diagonal line in the planar shape of the lid 92. In particular, the two engagement portions 922 are arranged symmetrically about the center of the planar shape of the lid 92, near each corner of the circular shape of a dovetail groove 912 (described later) of the base 91.

[0029] The bottom surface of the base 91 may be flat. Through holes 911 are provided at the four corners of the base 91 in the planar shape, respectively, so that the base 91 can be fixed to the vessel fixing part 12 using appropriate engaging members such as screws or pins. Therefore, in a plan view, the through holes 911 are located outside the outer edge (see the dotted line in FIG. 4 ) of the lid 92 attached to the base 91.

[0030] A dovetail groove 912 (groove) is provided on the upper surface of the base 91 so as to surround the outer edge of the base 91. In a plan view, the overall shape of the dovetail groove 912, when viewed as a line, is a rounded square or a rounded rectangle. The dovetail groove 912 is an inversely tapered groove whose groove width increases from the entrance toward the back.

[0031] A sealing member (not shown) is inserted into the entire dovetail groove 912. The sealing member is preferably ring-shaped to correspond to the circumferential shape of the dovetail groove 912. The following describes a specific example of a sealing member in which an O-ring is used. The upper end of the O-ring fitted into the dovetail groove 912 is positioned above the upper end of the dovetail groove 912. By fitting the O-ring into this inverted tapered groove, the vessel 90 is configured so that the O-ring does not easily fall off the base 91.

[0032] At one location on the dovetail groove 912, a cylindrical hole 913 that does not penetrate through to the bottom surface of the base 91 and opens to the top surface of the base 91 with a diameter equal to or larger than the maximum groove width of the dovetail groove 912 is arranged so as to overlap the dovetail groove 912. The cylindrical hole 913 is an entrance and exit for a processing tool when forming the inverted tapered dovetail groove 912 in the base 91. The through holes 911 at the four corners of the base 91 are each arranged outside the dovetail groove 912 that surrounds it.

[0033] Convex portions 914 are provided on the upper surface of base 91 adjacent to at least the corners of the circumferential shape of dovetail groove 912. At least at the corners of the circumferential shape of dovetail groove 912, the outer edges of convex portions 914 facing dovetail groove 912 are preferably configured to follow dovetail groove 912. In other words, since the circumferential shape of dovetail groove 912 is a rounded square or a rounded rectangle, the outer edges of convex portions 914 facing dovetail groove 912 near the corners of the circumferential shape of dovetail groove 912 preferably have a rounded shape in plan view.

[0034] 4 , the protrusion 914 is disposed inside the opening of the dovetail groove 912 that runs around the upper surface of the base 91, and is positioned slightly spaced apart so that the entire outer edge is aligned with the dovetail groove 912. Therefore, the outer edge of the protrusion 914 is a rounded square or a rounded rectangle that is one size smaller than the overall rounded square or rectangle of the dovetail groove 912 described above.

[0035] However, the convex portion 914 may be disposed so that the entire outer edge is positioned slightly apart from the opening of the dovetail groove 912 around which the convex portion 914 circumferentially runs, along the dovetail groove 912. Thus, surfaces of the same height are formed along the dovetail groove 912 on both sides of the opening of the dovetail groove 912. The upper surface of the convex portion 914 is configured at a position higher than the corresponding surfaces on both sides of the opening of the dovetail groove 912, that is, at a position away from the bottom surface of the base 91. The side surface that constitutes the outer edge of the convex portion 914 and faces the dovetail groove 912 is preferably configured as an inclined surface 91S that slopes upward so as to move away from the dovetail groove 912, as shown in FIG. 6 and other figures.

[0036] The protrusions 914 may be formed integrally with, for example, a metal main body of the base 91. Alternatively, the protrusions 914 may be formed from a separate member fixed to, for example, a metal main body of the base 91. In particular, if the separate member forming the protrusions 914 is provided detachably from the main body of the base 91, the protrusions 914 can be easily replaced when worn or damaged.

[0037] Furthermore, at least the surface of the protrusion 914 may be made of a material that is softer than the lid 92 and is less likely to scratch the lid 92 when it collides with the lid 92. Since the lid 92 plays a role in maintaining a vacuum by sandwiching a seal member between the lid 92 and the base 91, it is preferable that the lid 92 be made of a material that is less likely to scratch. For example, the lid 92 may be made of metal, and the surface of the protrusion 914 may be made of resin.

[0038] On the upper surface of the base 91, inside the convex portion 914, a recess 915 having a surface recessed from the upper surface of the convex portion 914 toward the bottom surface of the base 91 may be appropriately provided, so that the holder 93 for the workpiece placed on the base 91 can be kept at a fixed position on the upper surface of the base 91. Note that the positioning of the holder 93 may be performed by a protrusion instead of the recess 915, and in that case the recess 915 need not be formed.

[0039] When the lid 92 is attached to the base 91 and assembled into the vessel 90, the bottom surface of the side wall 923 of the lid 92 is located on a surface on the upper surface of the base 91 that is at the same height as the dovetail groove 912 and along the dovetail groove 912. That is, as shown in FIG. 4 , the side wall 923 of the lid 92 attached to the base 91 is configured to be located directly above the dovetail groove 912.

[0040] The bottom surface of the side wall portion 923 of the lid 92 comes into contact with an O-ring inserted in the dovetail groove 912, thereby airtightly sealing the internal space between the base 91 and the lid 92. A protrusion 914 is provided so that the lid 92 can be aligned to the correct position on the base 91 when the lid 92 is attached to the base 91.

[0041] <Transportation of Workpiece: Vessel Introduction to Lid Removal> The transportation of workpieces to be vacuum-processed in vacuum processing apparatus 1 will be described below with further reference to Figures 7 and 8. Figures 7 and 8 are diagrams showing the main parts of load lock chamber 10 of vacuum processing apparatus 1.

[0042] 1 shows a state in which the opening / closing mechanism 13 is engaged with the lid 92 when it is attached to the base 91 of the vessel 90, whereas Fig. 7 shows a state in which the opening / closing mechanism 13 is not engaged with the lid 92 in the same state. In Fig. 7, the lifting rod 131 of the opening / closing mechanism 13 is elevated above a position where it can engage with the lid 92 when it is attached to the base 91. Fig. 8 also shows a state in which the opening / closing mechanism 13 is engaged with the lid 92 and raised, causing the lid 92 to be detached from the base 91.

[0043] First, a vessel 90 is prepared, with the workpiece accommodated in a vacuum state in its internal space together with a holder 93. The vessel 90 in this state can be prepared appropriately by the vacuum processing apparatus 1 or another apparatus. In the vacuum processing apparatus 1, the gate valve 21 is closed to isolate the load lock chamber 10 from the vacuum processing chamber 30, and the inside of the load lock chamber 10 is at approximately atmospheric pressure. An operator opens the door of the load lock chamber 10.

[0044] At this time, the gas inlet 52 purges the inside of the load lock chamber 10 with an inert gas, and the inflow of outside air into the load lock chamber 10 through the opening in the door is prevented as much as possible. The flow rate of the inert gas purging the inside of the load lock chamber 10 may be adjusted by the control unit 60 so that the dew point inside the load lock chamber 10 measured by the dew point meter 15 is equal to or lower than a predetermined value.

[0045] An operator introduces the vessel 90 into the load lock chamber 10 through the opening in the door and places it on the vessel fixing part 12. At this time, the two lifting rods 131 are raised. The operator then inserts the engaging members into the through holes 911 in the base 91 to fix the base 91 to the vessel fixing part 12. The positional relationship between the opening / closing mechanism 13, the vessel 90, and the vessel fixing part 12 in this state is as shown in FIG. 7. The operator then closes the door of the load lock chamber 10.

[0046] Next, when the operator issues a predetermined instruction to the control unit 60, the control unit 60 controls each unit of the vacuum processing apparatus 1 to automatically execute a series of sequences including the vacuum processing. First, the introduction of the inert gas into the load lock chamber 10 by the gas introduction unit 52 is stopped, and the first vacuum pump unit 50 evacuates the load lock chamber 10.

[0047] After the inside of the load lock chamber 10 has reached a predetermined vacuum level, a step is performed in which the workpiece is removed from the vessel 90. Note that, in order to sufficiently exhaust the remaining air in the load lock chamber 10, before the workpiece is removed from the vessel 90, evacuation and gas introduction may be repeated until the dew point inside the load lock chamber 10 measured by the dew point meter 15 falls to a predetermined value or less.

[0048] To remove the workpiece from the vessel 90, a step is performed in which the lid 92 is detached from the base 91 fixed to the vessel fixing part 12. First, the two lifting rods 131 in the opening / closing mechanism 13 are each lowered and rotated (spinned) about their central axes, causing the threaded portions 132 provided on the central axes at the lower ends of the lifting rods 131 to threadably engage with the engaging portions 922 of the lid 92. The threaded portions 132 are parts of the opening / closing mechanism 13 that engage with the engaging portions 922. The positional relationship between the opening / closing mechanism 13, the vessel 90, and the vessel fixing part 12 in this state is as shown in FIG. 1 .

[0049] In order to accurately align the screw portion 132 and the engaging portion 922, the support mechanism 11 that supports the vessel fixing portion 12 may adjust the position of the vessel 90 before the lifting rod 131 descends. Such alignment may be performed using an appropriate detection means provided as part of the support mechanism 11 or the opening / closing mechanism 13. As the detection means for detecting the position of the engaging portion 922 of the vessel 90, a camera (image acquisition unit) that acquires an image of the lid body 92, a distance sensor that detects the position of the lid body 92, or the like may be used as appropriate.

[0050] After the threaded portion 132 and the engaging portion 922 are engaged with each other, the two lifting rods 131 in the opening / closing mechanism 13 are raised without rotating, thereby separating the lid body 92 from the base body 91 fixed to the vessel fixing portion 12. At this time, the two lifting rods 131 are not raised simultaneously but at slightly different times.

[0051] The engaging portion 922 of the lid 92 is disposed at a distance on a diagonal line of the planar shape of the lid 92 that corresponds to the circular shape of the dovetail groove 912, so the lid 92 is pulled up at a slight incline in the direction of the diagonal line. In other words, the initial peeling between the O-ring and the bottom surface of the side wall portion 923 of the lid 92 occurs on the side of the corner of the circular shape of the dovetail groove 912 that is closest to the engaging portion 922 that is pulled up first.

[0052] If the lid 92 is pulled up horizontally without tilting, the O-ring attached to the bottom surface must be simultaneously peeled off the entire sidewall 923 of the lid 92, requiring a large force to separate the lid 92 from the base 91. This places a large load on the motor driving the lift rod 131, and the motor and mechanism driving the lift rod 131 are subjected to a large impact the moment of separation. This can easily cause malfunctions in the operation of the opening and closing mechanism of the vessel 90 and wear of the mechanism over time. However, the vacuum processing apparatus 1 according to embodiment 1 allows for smooth peeling, reducing the occurrence of such malfunctions.

[0053] Furthermore, because the lid 92 has two diagonally arranged engaging portions 922, the area where peeling begins is limited to the corners of the circular shape of the dovetail groove 912, and therefore, a particularly small force is required in the initial stage of peeling. After the initial peeling, a relatively small force is required to peel the O-ring off from the bottom surface of the side wall portion 923 of the lid 92.

[0054] Furthermore, if the lid 92 and the opening / closing mechanism 13 are engaged at one point and the lid 92 is pulled up, the tilt of the lid 92 cannot be controlled when the lid 92 is removed, and the lid 92 is likely to tilt excessively. Therefore, stress is likely to be applied to the engaging portions of both the lid 92 and the opening / closing mechanism 13 and to the mechanical parts of the opening / closing mechanism 13. This can easily cause malfunctions in the operation of the opening / closing mechanism of the vessel 90 and wear of the mechanism over time. However, according to the first embodiment, as described above, the opening and closing of the vessel 90 can be smoothly performed automatically by the opening / closing mechanism 13, reducing the occurrence of such malfunctions.

[0055] As described above, when lid 92 attached to base 91 is separated, side wall 923 of lid 92 may come into contact with protrusion 914, particularly near the corners of the circumferential shape of dovetail groove 912. If the bottom surface of side wall 923 is scratched, the vacuum inside vessel 90 may not be maintained sufficiently.

[0056] However, the circumferential shape of dovetail groove 912 is a square or a rectangle with rounded corners, and at least at the corners of the circumferential shape of dovetail groove 912, the outer edge of convex portion 914 that faces dovetail groove 912 is configured to follow dovetail groove 912. In this way, near the corners of the circumferential shape of dovetail groove 912, the outer edge of convex portion 914 that faces dovetail groove 912 is rounded in plan view and does not form an angular shape, so even if the bottom surface of side wall portion 923 comes into contact with it, the possibility of scratching the bottom surface of side wall portion 923 is reduced.

[0057] Furthermore, it is preferable that the side surface of the protrusion 914 facing the dovetail groove 912 is configured as an inclined surface 91S that slopes upward so as to move away from the dovetail groove 912, further reducing the possibility of scratching the side wall portion 923. As shown in Fig. 6, it is particularly preferable that the cross section (a plane passing through the Z axis in Fig. 1) of the protrusion 914 from the side surface to the top surface be rounded and not angular.

[0058] <Transportation of workpiece: Removal of workpiece from vessel - vacuum processing - reloading> When the lid body 92 is lifted upward from the base body 91 by the two lifting rods 131 of the opening / closing mechanism part 13, the workpiece contained in the internal space of the vessel 90 can be removed, and the gate valve 21 is opened.

[0059] At this time, the positional relationship between the opening / closing mechanism 13, the lid 92, the base 91, and the vessel fixing part 12 is as shown in Fig. 8. The base 91 is fixed to the vessel fixing part 12, and the opening / closing mechanism 13 pulls the lid 92 up above the base 91. Because the base 91 is a plate-shaped member, the holder 93 placed on the base 91 is largely exposed, and can be easily picked up by the transfer rod 41 accessed from the side.

[0060] Therefore, the possibility of malfunctions occurring during the removal or insertion of the holder 93 is reduced, and the possibility of damage to the substrate 91, etc., due to malfunctions is also reduced. Therefore, according to the first embodiment, the removal or insertion of the holder 93 within the vacuum processing apparatus is more reliably performed. The workpiece can be inserted into the vessel 90 while the vacuum state is reliably maintained.

[0061] In conventional transfer containers, holders with workpieces placed on them are housed in a box-like, lidless container, making it difficult to remove and place the holders and workpieces even when the lid is open. Therefore, in conventional vacuum transfer containers, the holders are moved upward by a spring when the lid is opened, which is a complex configuration and can cause operational problems when automatically removing and placing holders and other items inside a vacuum processing device. Furthermore, vacuum transfer containers equipped with such mechanisms are prone to generating dust, especially when used for long periods of time.

[0062] The transport mechanism 40 operates, and the transfer rod 41 advances through the intermediate chamber 20 into the load lock chamber 10, where it holds the holder 93 by an appropriate method, such as by scooping up the holder 93 from above the substrate 91. At this time, an appropriate operation may be performed, such as slightly lowering the vessel fixing part 12. The transfer rod 41 then retreats to the anterior chamber 31 of the vacuum processing chamber 30, places the holder 93 on the lift stage 34, and releases its hold on the holder 93. The transfer rod 41 then retreats to a standby position where it does not interfere with the lift stage 34. The gate valve 21 is then closed, isolating the load lock chamber 10 from the vacuum processing chamber 30.

[0063] Next, the lifting mechanism 33 raises the lifting stage 34 on which the holder 93 is placed to the processing chamber 32. When the vacuum processing mechanism 35 performs the required vacuum processing on the workpiece placed on the holder 93 in the processing chamber 32, the lifting stage 34 on which the holder 93 is placed returns to a lowered position in the anterior chamber 31. When the inside of the vacuum processing chamber 30 reaches a predetermined vacuum level by vacuuming using the second vacuum pump 54, the gate valve 21 is opened.

[0064] The transport mechanism 40 operates to move the holder 93 from the lift stage 34 back onto the base 91 fixed to the vessel fixing part 12. Thereafter, the transfer rod 41 returns to the standby position, the gate valve 21 closes, and the load lock chamber 10 and the vacuum processing chamber 30 are isolated from each other again.

[0065] <Transportation of Workpiece: Attaching Lid to Removing Vessel> The lifting rod 131 is lowered, and the lid 92 engaged with the threaded portion 132 of the opening / closing mechanism 13 is placed on the base 91. The positional relationship between the opening / closing mechanism 13, the vessel 90, and the vessel fixing portion 12 is returned to the state shown in FIG.

[0066] Thereafter, the pressure inside the load lock chamber 10 is returned to near atmospheric pressure by the opening / closing mechanism 13 while appropriately applying a force to press the lid 92 toward the base 91. At this time, the first vacuum pump 50 stops evacuating the load lock chamber 10, and the gas inlet 52 begins introducing an inert gas into the load lock chamber 10.

[0067] In this way, the pressure around vessel 90 is changed from a vacuum state to atmospheric pressure with the O-ring between base 91 and lid 92 tightly attached, so that the workpieces are accommodated inside vessel 90 while the vacuum is reliably maintained without leakage. Next, an operator opens the door of load lock chamber 10 and carries vessel 90 fixed on vessel fixing part 12 out of vacuum processing apparatus 1 together with the workpieces accommodated therein.

[0068] If the position of the lid body 92 is deviated from the correct position when the opening / closing mechanism 13 places the lid body 92 on the base body 91, the side wall portion 923 of the lid body 92 will ride up onto the protrusion 914 of the base body 91. In this case, the opening / closing mechanism 13 detects that the lid body 92 cannot move to the predetermined height, and the control unit 60 can easily determine that the position of the lid body 92 is not the correct position for attachment.

[0069] In this case, the control unit 60 can readjust the position of the lid body 92 to the correct position for attachment by adjusting the position of the lid body 92 relative to the base 91 using the support mechanism unit 11. Therefore, according to the first embodiment, when the workpiece is automatically placed inside the vessel 90 by the vacuum processing apparatus 1, the workpiece can be placed in the internal space of the vessel 90 while reliably maintaining a vacuum state.

[0070] In the above description, the vessel 90 is manually loaded and unloaded into the load lock chamber 10 by an operator. However, the vacuum processing apparatus 1 may be configured to perform this procedure automatically. Although the example in which the opening / closing mechanism 13 and the lid 92 of the vessel 90 are engaged at two locations has been described, the number of engagement locations may be more than two. Even in this case, it is sufficient that one specific location is lifted up earlier than the other engagement locations when the lid 92 is detached from the base 91. The size of the vessel 90 is not particularly limited. The side length of the lid 92, which is generally square or rectangular, may be, for example, in the range of 5 cm to 3 m.

[0071] [Embodiment 2] In embodiment 2, an example of a vessel having a shape that is partially different from that of embodiment 1 is shown. A vessel 90 according to embodiment 2 is similar to embodiment 1 except that the shape of a base 91A is different from that of the base 91 in embodiment 1.

[0072] 9 is a plan view of a base body 91A of a vessel 90 according to a second embodiment of the present disclosure. On the top surface of the base body 91A, convex portions 914A are provided inside the circumferential shape of the dovetail groove 912, at each of the four corners of the circumferential shape of the dovetail groove 912. Similar to the first embodiment, the outer edges of these convex portions 914A facing the dovetail groove 912 at the corners of the circumferential shape of the dovetail groove 912 are rounded to fit the dovetail groove 912.

[0073] In base 91A, recess 916 for aligning holder 93 is provided so as to be recessed from a surface that continues from the side of the opening of dovetail groove 912 on the upper surface of base 91A, i.e., a surface that is at the same height as the surfaces on both sides of the opening of dovetail groove 912. Although Fig. 9 shows a specific example in which protrusion 914A is disposed only inside the circumferential shape of dovetail groove 912, it may also be disposed outside.

[0074] [Embodiment 3] Embodiment 3 shows an example of a vessel having a shape that is partially different from that of Embodiment 1. A vessel 90 according to Embodiment 3 is similar to that of Embodiment 1 except that the shape of a base 91B is different from that of the base 91 in Embodiment 1.

[0075] 10 is a plan view of a base body 91B of a vessel according to a third embodiment of the present disclosure. On the top surface of the base body 91A, convex portions 914B are provided at the four corners of the circumferential shape of the dovetail groove 912, outside the circumferential shape of the dovetail groove 912. In the base body 91B, recesses 916 for aligning the holder 93 are provided so as to be recessed from a surface that continues from the side of the opening of the dovetail groove 912 on the top surface of the base body 91B, i.e., from a surface that is flush with the surfaces on both sides of the opening of the dovetail groove 912.

[0076] 11 is a diagram schematically illustrating a configuration of a main part of a vessel 90 according to a fourth embodiment of the present disclosure. The vessel 90 according to the fourth embodiment includes a pressure gauge 924 and a valve 925 in addition to the configuration of the vessel 90 according to the first embodiment.

[0077] The pressure gauge 924 is a measuring device that detects the pressure in the internal space of the vessel 90, which is partitioned by the base 91 and the lid 92 attached to the base 91. By providing the vessel 90 with the pressure gauge 924, it becomes possible to confirm whether the internal space of the vessel 90 is in a vacuum state.

[0078] Valve 925 is provided in a path that connects the internal space of vessel 90 with the outside of vessel 90. Valve 925 can control the state of communication / isolation between the internal space of vessel 90, which is partitioned by base 91 and lid 92 attached to base 91, and the outside. By providing valve 925 in vessel 90, when the internal space of vessel 90 is in a vacuum state, an operator can easily adjust the pressure in the internal space of vessel 90 to atmospheric pressure without using vacuum processing apparatus 1. In other words, valve 925 can be used as a so-called leak valve that releases the vacuum state of the internal space of vessel 90.

[0079] [Summary] Aspect 1 of the present disclosure is a portable vessel that accommodates a workpiece to be processed by a vacuum processing apparatus while holding it in a vacuum, the vessel comprising a base and a lid, the base being plate-shaped, and the top surface of the base being provided with a groove that runs around the periphery to form a rounded square or a rounded rectangle and into which a sealing member is fitted, and protrusions adjacent to at least the corners of the groove's circumferential shape, the lid having a plate-shaped ceiling and sidewalls that extend downward from the ceiling and run around the periphery in a planar view, the sidewalls of the lid being attached to the base being configured to be located directly above the groove.

[0080] In a vessel according to a second aspect of the present disclosure, in the first aspect, an outer edge of the convex portion facing the groove may be configured to follow the groove at least at a corner of the circumferential shape of the groove.

[0081] In a vessel according to a third aspect of the present disclosure, in the first or second aspect, the convex portion may be disposed inside and / or outside the circumferential shape of the groove so that the outer edge thereof follows the groove.

[0082] In a vessel according to a fourth aspect of the present disclosure, in the first or second aspect, a plurality of the protrusions may be provided on the inside of the circumferential shape of the groove, at each of four corners of the circumferential shape of the groove.

[0083] In a fifth aspect of the present disclosure, the vessel is the same as the first or second aspect, and a plurality of the protrusions may be provided on the outside of the circumferential shape of the groove, one at each of four corners of the circumferential shape of the groove.

[0084] A vessel according to a sixth aspect of the present disclosure is any one of the first to fifth aspects, wherein a side surface of the convex portion facing the groove may be inclined so as to move away from the groove as it extends upward.

[0085] A vessel according to a seventh aspect of the present disclosure is the vessel according to any one of the first to sixth aspects, wherein the surface of the convex portion may be made of resin.

[0086] In the vessel of Aspect 8 of the present disclosure, in any one of Aspects 1 to 7, the convex portion may be detachably provided on the main body portion of the base body.

[0087] A vessel according to aspect 9 of the present disclosure, in any one of aspects 1 to 8 above, may have a plurality of engagement portions on the upper surface of the lid body attached to the base, along a line located above a diagonal line of the circumferential shape of the groove, with which a mechanism for separating the lid body from the base can engage.

[0088] The vessel of aspect 10 of the present disclosure, in any one of aspects 1 to 9 above, may further include a pressure gauge that detects the pressure in an internal space partitioned by the base and the lid attached to the base.

[0089] The vessel of aspect 11 of the present disclosure, in any one of aspects 1 to 10 above, may further include a valve that controls communication / isolation between an internal space defined by the base and the lid attached to the base and the outside.

[0090] The present disclosure is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present disclosure. For example, in embodiment 1, the convex portion 914 of the base 91 is disposed inside the circumferential shape of the dovetail groove 912. However, the convex portion 914 may be disposed outside the circumferential shape of the dovetail groove 912 in the shape of a ring surrounding the dovetail groove 912.

[0091] REFERENCE SIGNS LIST 1 Vacuum processing apparatus 10 Load lock chamber 11 Support mechanism 12 Vessel fixing portion 13 Opening and closing mechanism 131 Lifting rod 132 Threaded portion 14 Seal block 15 Dew point meter 20 Intermediate chamber 21 Gate valve 30 Vacuum processing chamber 40 Transfer mechanism 41 Transfer rod 50 First vacuum pump portion 54 Second vacuum pump portion 51, 55 Vacuum piping 52 Gas introduction portion 53 Gas piping 60 Control portion 90 Vessel 91, 91A, 91B Base 911 Through hole 912 Dovetail groove 914, 914A, 914B Convex portion 91S Inclined surface 92 Lid 921 Ceiling portion 922 Engagement portion 923 Side wall portion 924 Pressure gauge 925 Valve 93 Holder

Claims

1. A portable vessel for accommodating an object to be processed by a vacuum processing apparatus while holding it in a vacuum, the vessel comprising a base and a lid, the base being plate-shaped, the upper surface of the base being provided with a groove that runs around the periphery to form a rounded square or a rounded rectangle and into which a sealing member is fitted, and protrusions adjacent to at least the corners of the groove's circumferential shape, the lid having a plate-shaped ceiling and sidewalls that extend downward from the ceiling and run around the periphery in a plan view, the sidewalls of the lid being attached to the base being configured to be positioned directly above the groove.

2. The vessel according to claim 1, wherein at least at the corners of the circumferential shape of the groove, the outer edge of the convex portion facing the groove is configured to follow the groove.

3. The vessel according to claim 2, wherein the convex portion is disposed inside and / or outside the circumferential shape of the groove so that the outer edge thereof follows the groove.

4. A vessel according to claim 2, wherein a plurality of said protrusions are provided on the inside of the circumferential shape of said groove, one at each of the four corners of the circumferential shape of said groove.

5. A vessel according to claim 1, wherein a plurality of said protrusions are provided on the outside of the circumferential shape of said groove, one at each of the four corners of said circumferential shape of said groove.

6. A vessel according to any one of claims 1 to 5, wherein the side surface of the convex portion facing the groove is inclined so as to move away from the groove as it extends upward.

7. A vessel according to any one of claims 1 to 5, wherein the surface of the convex portion is made of resin.

8. A vessel according to any one of claims 1 to 5, wherein the protrusion is provided detachably with respect to the main body portion of the base.

9. A vessel as described in any one of claims 1 to 5, wherein a plurality of engagement portions are provided on the upper surface of the lid body attached to the base body along a line located above the diagonal line of the circular shape of the groove, with which a mechanism for pulling the lid body away from the base body engages.

10. A vessel according to any one of claims 1 to 5, further comprising a pressure gauge for detecting the pressure in an internal space defined by said base and said lid attached to said base.

11. A vessel according to any one of claims 1 to 5, further comprising a valve for controlling communication / isolation between the interior space defined by the base and the lid attached to the base and the outside.

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