Transport system and transport method

Abstract

This transport system comprises: a ceiling transport vehicle that travels along a track provided on a ceiling and transports an article; and an on-floor transport vehicle that travels on a floor and transports an article. The ceiling transport vehicle and the on-floor transport vehicle each have a communication device capable of communicating information with each other. The on-floor transport vehicle has an upwardly opened loading platform on which an article can be placed. The ceiling transport vehicle delivers an article to a loading platform of the on-floor transport vehicle after executing communication pertaining to the transfer of the article to the on-floor transport vehicle.

Description

Transport system and transport method

[0001] The present disclosure relates to a transport system and a transport method.

[0002] Systems equipped with overhead transport vehicles and other carriages are known as transport systems for transporting items in factories, etc. For example, the system described in Patent Document 1 includes an overhead transport vehicle, a ground-side work carriage, a local carriage that travels between the overhead transport vehicle and the work carriage, and a buffer for temporarily storing items. The transport of items is performed by the cooperation of these transport vehicles and carriages.

[0003] JP 2016-64903 A

[0004] In recent years, there has been an increasing demand for transport systems that can efficiently transport items even when transport requirements change due to, for example, changes in production plans.

[0005] The present disclosure describes a transport system and a transport method that can efficiently transport articles in response to changes in transport demand trends.

[0006] [1] A transport system according to one aspect of the present disclosure comprises a ceiling transport vehicle that travels along a track provided on the ceiling and transports items, and a floor transport vehicle that travels on the floor and transports items, wherein the ceiling transport vehicle and the floor transport vehicle each have communication devices that enable them to communicate information with each other, the floor transport vehicle has a loading platform that is open upward on which items can be placed, and the ceiling transport vehicle performs communication with the floor transport vehicle regarding the transfer of the items, and then hands over the items to the loading platform of the floor transport vehicle.

[0007] In the transport system [1], each transport vehicle can transport items on both the ceiling side and the floor side. Since the loading platform of the floor transport vehicle is open upward, items can be transferred freely between the ceiling transport vehicle and the floor transport vehicle. By executing communication related to the transfer of items from the ceiling transport vehicle to the floor transport vehicle, items can be handed over reliably and appropriately between the two. Even if the trend in transport requests changes, items can be transported efficiently by appropriately selecting single transport by the ceiling transport vehicle, single transport by the floor transport vehicle, or transport by collaboration between the ceiling transport vehicle and the floor transport vehicle.

[0008] [2] In the transport system of [1] above, the floor transport vehicle may transmit information about a stopping position to the ceiling transport vehicle. In this case, the transfer of goods from the ceiling transport vehicle to the floor transport vehicle (or from the floor transport vehicle to the ceiling transport vehicle) can be performed more reliably and quickly.

[0009] [3] In the transport system of [1] or [2] above, the floor transport vehicle may transmit information about obstacles to the ceiling transport vehicle, allowing for more appropriate and safer transfer of goods from the ceiling transport vehicle to the floor transport vehicle (or from the floor transport vehicle to the ceiling transport vehicle).

[0010] [4] In any one of the transport systems described in [1] to [3] above, the floor transport vehicle may execute transfer-related communication with a port of a processing device installed on the floor, and then deliver the item to the port. In this case, the item can be freely transferred from the floor transport vehicle to the port (or from the port to the floor transport vehicle). Therefore, the item can be transported without the intervention of an overhead transport vehicle. As a result, slack is created in the entire system, further increasing the overall transport efficiency.

[0011] [5] In any one of the transport systems [1] to [4] above, when transferring an article between the ceiling transport vehicle and the floor transport vehicle, the ceiling transport vehicle may transmit pre-transfer information including information inquiring whether the article can be transferred to the floor transport vehicle. In this case, the article can be transferred more reliably.

[0012] [6] In any one of the transport systems [1] to [5] above, two articles may be placed on the platform of the floor transport vehicle. By being able to place multiple articles on the platform, the article transport capacity is increased and the free space on the platform can be utilized while transporting one article.

[0013] [7] As another aspect of the present disclosure, there may be provided a method for transporting an article in a transport system including an overhead transport vehicle that travels along a track provided on a ceiling and transports an article, and a floor transport vehicle that travels on a floor and transports the article. In this transport method, the overhead transport vehicle executes communication with the floor transport vehicle regarding the transfer of the article, and then delivers the article to a loading platform that is open above the floor transport vehicle.

[0014] According to the conveying method [7], the same effects and advantages as those of the conveying system [1] can be achieved.

[0015] According to the present disclosure, even if the trend in transport requests changes, articles can be transported efficiently by transferring articles between ceiling transport vehicles and floor transport vehicles as appropriate.

[0016] FIG. 1 is a plan view showing a track and multiple arranged ports in a transport system according to an embodiment of the present disclosure. FIG. 2 is a block diagram of the transport system. FIG. 3(a) is a diagram showing the transfer of an item between an overhead transport vehicle and a port, FIG. 3(b) is a diagram showing the transfer of an item between an overhead transport vehicle and a floor transport vehicle, and FIG. 3(c) is a diagram showing the transfer of an item between a floor transport vehicle and a port. FIG. 4(a) is a diagram showing the transfer process flow between an overhead transport vehicle and a port, FIG. 4(b) is a diagram showing the transfer process flow between an overhead transport vehicle and a floor transport vehicle, and FIG. 4(c) is a diagram showing the transfer process flow between a floor transport vehicle and a port. FIGS. 5(a) to 5(d) are diagrams showing an example of an item transfer procedure between a port, an overhead transport vehicle, and a floor transport vehicle. FIGS. 6(a) to 6(d) are diagrams showing another example of an item transfer procedure between a port, an overhead transport vehicle, and a floor transport vehicle. FIG. 7 is a diagram showing an example of information communication regarding the stopping position of the floor transport vehicle to the overhead transport vehicle before transfer. FIG. 8 is a diagram showing another example of information communication related to the stopping position from the floor transport vehicle to the ceiling transport vehicle before transfer. FIGS. 9(a) and 9(b) are diagrams showing an example of a downward monitoring situation by the ceiling transport vehicle before transfer. FIGS. 10(a) and 10(b) are diagrams showing another example of a downward monitoring situation by the ceiling transport vehicle before transfer. FIG. 11 is a diagram showing an example of information communication related to an obstacle from the floor transport vehicle to the ceiling transport vehicle before transfer. FIGS. 12(a) to 12(c) are diagrams showing an example of a procedure for utilizing a floor transport vehicle in a transport system. FIGS. 13(a) to 13(c) are diagrams showing an example of a procedure following FIG. 12(c). FIG. 14 is a diagram showing another example of utilizing a floor transport vehicle. FIGS. 15(a) to 15(e) are plan views schematically showing various examples of selecting obstacle areas. FIG. 16 is a diagram showing an example of an information communication method via a port (processing device). FIG. 17 is a diagram showing an example of an information communication method using a dedicated communication relay device.

[0017] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicated description will be omitted.

[0018] The overall configuration of a transport system S of this embodiment will be described with reference to Fig. 1. As shown in Fig. 1, the transport system S is applied to, for example, a clean room (semiconductor factory) where semiconductor devices are manufactured. The transport system S includes a track 200 laid near the ceiling of a building constituting the clean room or the like, and one or more overhead transport vehicles 1 that travel along the track 200. The number of overhead transport vehicles 1 is determined appropriately depending on the required transport capacity, etc.

[0019] The track 200 is suspended from the ceiling, for example. The track 200 is a predetermined one-way running path for the ceiling transport vehicle 1 to travel on. The track 200 passes over, for example, a plurality of ports 60. The layout of the track 200 may be determined appropriately depending on the arrangement of the processing device A (see FIG. 3( a) etc.) in the clean room. FIG. 1 shows the most simplified example. Each port 60 is installed, for example, on the floor F, at the end of the processing device A in the horizontal direction (see FIG. 3( a) etc.). The arrangement of the ports 60 may also be determined appropriately. At least one port 60 may be arranged in a position that does not overlap the track 200 in a plan view.

[0020] The transport system S further includes multiple floor guided vehicles 30 that travel on the floor F. The number of floor guided vehicles 30 is determined as appropriate. Depending on the scale of the transport system S (including the amount of transport commands), the transport system S may include only one floor guided vehicle 30. Each floor guided vehicle 30 is, for example, an autonomous mobile robot (hereinafter referred to as AMR). An AMR is a type of collaborative robot. An AMR can perform transport operations without hindrance even in spaces where workers are present. In other words, an AMR can coexist with workers in a factory. An AMR estimates its own position based on information obtained from sensors mounted on its cart body 31 (see FIG. 3(a) and other figures) and travels autonomously while avoiding collisions with obstacles. An AMR does not have a specific trajectory. In other words, an inductor such as a magnetic tape attached to the floor F is not required for the AMR to travel.

[0021] In the transport system S, each ceiling transport vehicle 1 travels along a track 200, and each floor transport vehicle 30 travels on a floor F. Each floor transport vehicle 30 travels below the space of the track 200 (the travel space of the ceiling transport vehicle 1) in an area other than the installation area of ​​the port 60 (processing equipment A). The ceiling transport vehicle 1 transports an item 10. The floor transport vehicle 30 also transports an item 10. The item 10 is, for example, a FOUP (Front Opening Unified Pod) that contains multiple wafers.

[0022] In the transport system S, the ceiling transport vehicle 1 transfers the article 10 between the port 60 of the processing equipment A. The ceiling transport vehicle 1 transfers the article 10 between the floor transport vehicle 30. The floor transport vehicle 30 also transfers the article 10 between the port 60 of the processing equipment A. The transport system S may also be equipped with a storage shelf (not shown) suspended from the ceiling, or may be equipped with a storage shelf (not shown) installed on the floor F. A "storage shelf" is also called a "buffer." The "storage shelf" is a concept that also includes automatic storage devices such as stockers. The ceiling transport vehicle 1 transfers the article 10 between both the ceiling-side and floor-mounted storage shelves. The floor transport vehicle 30 transfers the article 10 between the floor-mounted storage shelves.

[0023] Next, the configuration of each transport vehicle will be described with reference to Figure 2 and subsequent figures. As shown in Figures 3(a) and 3(b), the ceiling transport vehicle 1 has a frame unit 2, a traveling unit 3, a lateral unit 4, a lifting drive unit 6, and a gripping unit 7. The frame unit 2 includes frames provided on the front and rear sides in the extension direction (traveling direction) of the track 200 (see also Figure 7). Note that, for simplicity, the illustration of the center frame is omitted in each figure. The traveling unit 3 travels along the track 200 by receiving a contactless supply of power, for example, from a high-frequency current line laid along the track 200. The driving system for the traveling unit 3 may be an electric motor drive system, a linear motor drive system, or any other known drive system. The lateral unit 4 moves the lifting drive unit 6 and the gripping unit 7 laterally (to the side in the traveling direction of the ceiling transport vehicle 1).

[0024] The lifting drive unit 6 lifts and lowers the gripping unit 7. The lifting drive unit 6 lifts and lowers the gripping unit 7 by winding or unwinding the belt B. The gripping unit 7 grips (holds) the article 10 in a specified orientation. The gripping unit 7 has a pair of grippers 8, 8. The pair of grippers 8, 8 are opened and closed by a drive motor and a link mechanism to grip or release the article 10.

[0025] The ceiling transport vehicle 1 may have other known configurations in addition to those described above. A rotation unit that rotates the lifting drive unit 6 about a central axis (rotation axis) along the Z direction may be provided between the lateral unit 4 and the lifting drive unit 6. Furthermore, another rotation unit that rotates the gripping unit 7 about a central axis (rotation axis) along the Z direction may be provided between the lifting drive unit 6 and the gripping unit 7.

[0026] As shown in FIG. 2 , the ceiling transport vehicle 1 has a first control unit 22. The first control unit 22 is disposed, for example, in the frame unit 2. The first control unit 22 is a controller that controls each part of the ceiling transport vehicle 1. The first control unit 22 is an electronic control unit that is configured with a processor such as a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc. The first control unit 22 is able to grasp the position of its own vehicle, for example, from position information acquired from a barcode or the like provided on the track 200 and a counter (encoder) or the like of a motor or the like provided in the traveling unit 3.

[0027] The ceiling transport vehicle 1 has a communication device 24 and an obstacle sensor 26. The first control unit 22 communicates information with the transport vehicle controller 50, the floor transport vehicle 30, and the port 60 via the communication device 24.

[0028] As shown in Figures 3(b) and 3(c), the floor transport vehicle 30 includes a carriage body 31, a traveling unit 33, and a loading / unloading unit 40. The carriage body 31 includes, for example, a rectangular parallelepiped housing that houses various drive mechanisms, a control unit, a battery, etc. The carriage body 31 also houses (or is equipped with) various sensors. The traveling unit 33 is provided at the bottom of the carriage body 31 and includes, for example, two driving wheels and two driven wheels. The traveling unit 33 receives power from a battery (not shown) and rotates the driving wheels. This allows the floor transport vehicle 30 to travel on the floor F at a predetermined speed. During travel, the floor transport vehicle 30 estimates its own position using various sensors and travels autonomously while avoiding collisions or interference with workers. The floor transport vehicle 30 can charge its battery at a charging station (not shown) provided within the transport system S. The configuration of the traveling unit 33 is not limited to the above. A number of auxiliary wheels or auxiliary rollers or the like may be provided.

[0029] A flat loading platform 35 that is open upward is provided on the upper surface of the cart body 31. The loading platform 35 is large enough to accommodate, for example, two articles 10 (see FIG. 13( a) and the like). The floor transport vehicle 30 places one article 10 in one of the loading spaces of the loading platform 35, or places two articles 10 in both loading spaces. The loading platform 35 that is open upward allows the article 10 to be transferred to and from the ceiling transport vehicle 1 (i.e., there are no obstacles between the ceiling transport vehicle 1 and the loading platform 35). The shape of the cart body 31 is not particularly limited. The side walls of the cart body 31 may include, for example, curved surfaces. The loading platform 35 is provided with, for example, a sensor (not shown) that can detect the presence or absence of the article 10.

[0030] The loading / unloading unit 40 is attached to the top of the carriage body 31. The loading / unloading unit 40 includes, for example, an arm unit 41 having multiple joints and a holding unit 43 attached to the tip of the arm unit 41. The arm unit 41 and the holding unit 43 also operate by receiving power from a battery. The arm unit 41 and the holding unit 43 are controlled by the second control unit 32 (see FIG. 2). The arm unit 41 and the holding unit 43 transfer (move) the item 10 on the loading platform 35, for example, onto the loading surface 60a of the port 60. The arm unit 41 and the holding unit 43 also pick up (move) the item 10 on the loading surface 60a of the port 60 to one of the loading spaces of the loading platform 35. Alternatively, the arm unit 41 and the holding unit 43 move the item 10 loaded on one loading space to the other loading space. The configuration of the loading / unloading unit 40 is not limited to the above, and other known configurations may be adopted.

[0031] As shown in FIG. 2 , the floor transport vehicle 30 has a second control unit 32. The second control unit 32 is disposed, for example, in the carriage body 31. The second control unit 32 is a controller that controls each part of the floor transport vehicle 30. The second control unit 32 is an electronic control unit configured with a processor such as a CPU, a ROM, a RAM, etc. The second control unit 32 stores map information for the transport system S, estimates its own position based on information obtained by various sensors (obstacle sensors, etc.), and autonomously moves to the destination. The second control unit 32 controls the traveling unit 33 and the loading / unloading unit 40 to transport the item 10 based on a transport command (information including From-To).

[0032] The floor transport vehicle 30 has a communication device 34, a stop position sensor 36, and an obstacle sensor 37. The second control unit 32 communicates information with the transport vehicle controller 50, the ceiling transport vehicle 1, and the port 60 via the communication device 34.

[0033] As shown in FIG. 3( c) and other figures, the port 60 of the processing device A can place an article 10 on its placement surface 60 a. As shown in FIG. 2, the port 60 also has a port control unit 61. The port control unit 61 communicates information with the ceiling transport vehicle 1 via the communication unit 63, and controls the transfer (handover) of the article 10 between the ceiling transport vehicle 1 and the port control unit 61. The port control unit 61 communicates information with the floor transport vehicle 30 via the communication unit 63, and controls the transfer (handover) of the article 10 between the floor transport vehicle 30 and the port control unit 61. The port control unit 61 also controls the insertion and removal of the article 10 into and from the processing device A. The placement surface 60 a is provided with, for example, a sensor (not shown) that can detect the presence or absence of the article 10.

[0034] As described above, the ceiling transport vehicle 1 and the floor transport vehicle 30 respectively have the communication device 24 and the communication device 34 as communication devices capable of communicating information with each other. The ceiling transport vehicle 1 and the port 60 respectively have the communication device 24 and the communication unit 63 as communication devices capable of communicating information with each other. The floor transport vehicle 30 and the port 60 respectively have the communication device 34 and the communication unit 63 as communication devices capable of communicating information with each other.

[0035] 2, the transport system S includes a host controller 100 and a transport vehicle controller 50. The host controller 100 controls manufacturing by a plurality of processing devices A. The host controller 100 issues a transport request to the transport vehicle controller 50.

[0036] The transport vehicle controller 50 is connected to the upper controller 100 wirelessly or by wire. The transport vehicle controller 50 controls the ceiling transport vehicle 1 and the floor transport vehicle 30. The transport vehicle controller 50 can acquire information regarding the current positions of all transport vehicles (ceiling transport vehicles 1 and floor transport vehicles 30) belonging to the transport system S. The transport vehicle controller 50 receives a transport request from the upper controller 100, for example, to transport an item 10 from one port 60 to another port 60. The transport vehicle controller 50 generates a transport command in accordance with the received transport request and assigns the transport command to one of the ceiling transport vehicles 1 or one of the floor transport vehicles 30.

[0037] The transport system S may include a transport vehicle controller (ceiling transport vehicle controller) that controls the ceiling transport vehicle 1 and another transport vehicle controller (floor transport vehicle controller) that controls the floor transport vehicle 30, instead of the transport vehicle controller 50. In this case, each transport vehicle controller controls the transport vehicle that it controls by communicating information with the upper controller 100.

[0038] The following describes various methods for transferring and loading the article 10 in the transport system S, various transport methods, and their control. Fig. 3(a) is a diagram showing the transfer of the article 10 between the ceiling transport vehicle 1 and the port 60, Fig. 3(b) is a diagram showing the transfer of the article 10 between the ceiling transport vehicle 1 and the floor transport vehicle 30, and Fig. 3(c) is a diagram showing the transfer of the article 10 between the floor transport vehicle 30 and the port 60. Figs. 4(a) to 4(c) show the transfer process flow (transport method) for each case.

[0039] As shown in FIGS. 3A and 4A, the overhead transport vehicle 1 transfers the article 10 between the port 60 of the processing equipment A. The overhead transport vehicle 1 receives a transport command from the transport vehicle controller 50 or the like, then travels as necessary, and stops at a stopping position where the article 10 can be transferred between the port 60 of the processing equipment A and the overhead transport vehicle 1. At this time, the overhead transport vehicle 1 is positioned above the port 60 of the processing equipment A. The first control unit 22 of the overhead transport vehicle 1 first transmits pre-transfer information from the ceiling side to the port 60 (S101). The pre-transfer information includes, for example, information inquiring whether the article 10 can be transferred (unloaded or loaded). The port control unit 61 of the port 60 transmits the pre-transfer information from the port side to the overhead transport vehicle 1 (S102). The pre-transfer information includes, for example, information inquiring whether the article 10 can be transferred (unloaded or loaded). These information communications are interlock communications between the ceiling transport vehicle 1 and the port 60 before transfer.

[0040] When the first control unit 22 determines that all the conditions related to the transfer are satisfied, it controls each unit of the ceiling transport vehicle 1 and starts the operation of transferring the item 10 onto the placement surface 60a of the port 60 (S103). Control related to the transfer operation (such as the payout control and stop control of the belt B and the gripping control of the gripper 8) is executed by the first control unit 22 according to a known method. Even during the transfer operation, the first control unit 22 transmits transfer in progress information from the ceiling side to the port 60 (S104). In addition, the port control unit 61 transmits transfer in progress information from the port side to the ceiling transport vehicle 1 (S106). These information communications are interlock communications during the transfer between the ceiling transport vehicle 1 and the port 60.

[0041] The first control unit 22 of the ceiling transport vehicle 1 recognizes that the transfer of the article 10 has been completed (S107). The port control unit 61 of the port 60 also recognizes that the transfer of the article 10 has been completed (S108). The first control unit 22 and the port control unit 61 transmit information indicating that the transfer of the article 10 has been completed to the transport vehicle controller 50.

[0042] As shown in Figures 3(b) and 4(b), the ceiling transport vehicle 1 transfers the article 10 between the floor transport vehicle 30 and the ceiling transport vehicle 1. The ceiling transport vehicle 1 and the floor transport vehicle 30 receive transport commands from the transport vehicle controller 50 or the like, then travel as necessary, and stop at a stopping position where the article 10 can be transferred between the ceiling transport vehicle 1 and the floor transport vehicle 30. At this time, the ceiling transport vehicle 1 is located above the floor transport vehicle 30. The floor transport vehicle 30 is located below the ceiling transport vehicle 1. The ceiling transport vehicle 1 may stop in accordance with the position of the floor transport vehicle 30, or the floor transport vehicle 3 may stop in accordance with the position of the ceiling transport vehicle 1. The first control unit 22 of the ceiling transport vehicle 1 first transmits pre-transfer information from the ceiling side to the floor transport vehicle 30 (S201). The pre-transfer information is the same as the pre-transfer information in step S101 above. The second control unit 32 of the floor transport vehicle 30 transmits pre-transfer information from the ground side to the ceiling transport vehicle 1 (S202). The pre-transfer information includes, for example, information responding to whether the transfer (unloading or loading) of the item 10 is possible, information regarding the stopping position of the floor transport vehicle 30, information regarding obstacles around (including the sides and above) the floor transport vehicle 30, etc. This information communication is interlock communication before transfer between the ceiling transport vehicle 1 and the floor transport vehicle 30.

[0043] When the first control unit 22 determines that all transfer conditions are met, it controls each unit of the overhead transport vehicle 1 based on information regarding the stopping position of the floor transport vehicle 30, and starts the transfer operation of the item 10 onto the loading platform 35 of the floor transport vehicle 30 (S203). Control related to the transfer operation (such as the payout control and stop control of the belt B and the gripping control of the gripper 8) is performed by the first control unit 22 according to a known method. During the transfer operation, the first control unit 22 also transmits transfer in progress information from the ceiling side to the floor transport vehicle 30 (S204). The transfer in progress information is the same as the transfer in progress information in step S104 above. The second control unit 32 also transmits transfer in progress information from the ground side to the overhead transport vehicle 1 (S206). The transfer in progress information includes, for example, information regarding obstacles around the floor transport vehicle 30 (including the sides and above). This information communication is interlock communication during transfer between the overhead transport vehicle 1 and the floor transport vehicle 30.

[0044] The first control unit 22 of the ceiling transport vehicle 1 recognizes that the transfer of the article 10 has been completed (S207). The second control unit 32 of the floor transport vehicle 30 recognizes that the transfer of the article 10 has been completed (S208). The first control unit 22 and the second control unit 32 transmit information indicating that the transfer of the article 10 has been completed to the ceiling transport vehicle and the transport vehicle controller 50.

[0045] As shown in Figures 3(c) and 4(c), the floor transport vehicle 30 transfers the item 10 between the port 60 of the processing device A. The floor transport vehicle 30 receives a transport command from the transport vehicle controller 50 or the like, then travels as necessary, and stops at a stopping position where the item 10 can be transferred between the port 60 of the processing device A and the floor transport vehicle 30. At this time, the floor transport vehicle 30 is located in front of (near) the port 60 of the processing device A. The second control unit 32 of the floor transport vehicle 30 first transmits pre-transfer information from the ground side to the port 60 (S301). The pre-transfer information includes, for example, information inquiring whether the item 10 can be transferred (unloaded or loaded). The port control unit 61 of the port 60 transmits the pre-transfer information from the port side to the floor transport vehicle 30 (S302). The pre-transfer information is the same as the pre-transfer information in step S102 above. These information communications are interlock communications between the floor transport vehicle 30 and the port 60 before transfer.

[0046] When the second control unit 32 determines that all the conditions related to the transfer are satisfied, it controls each unit of the floor transport vehicle 30 to start the operation of transferring the item 10 onto the loading surface 60a of the port 60 (S303). Control related to the transfer operation (such as movement control of the arm unit 41 and holding control in the holding unit 43) is executed by the second control unit 32 according to a known method. During the transfer operation, the second control unit 32 also transmits transfer in progress information from the ground side to the port 60 (S304). In addition, the port control unit 61 transmits transfer in progress information from the port side to the ceiling transport vehicle 1 (S306). The transfer in progress information is the same as the transfer in progress information in step S106 above. These information communications are interlock communications during the transfer between the floor transport vehicle 30 and the port 60.

[0047] The second control unit 32 of the floor transport vehicle 30 recognizes that the transfer of the item 10 has been completed (S307). The port control unit 61 of the port 60 also recognizes that the transfer of the item 10 has been completed (S308). The second control unit 32 and the port control unit 61 transmit information indicating that the transfer of the item 10 has been completed to the transport vehicle controller 50.

[0048] As described above, in the conveyance system S, three types of transfer operations are performed in accordance with predetermined processing and information communication. In the conveyance system S, these transfer operations are appropriately combined to convey the article 10.

[0049] 5(a) to 5(d) are diagrams showing an example of a procedure for transferring an item 10. In the example shown in FIGS. 5(a) to 5(d), the ceiling transport vehicle 1 and the floor transport vehicle 30 cooperate (in a relay system) to perform a predetermined transfer operation. The ceiling transport vehicle 1 stops directly above the port 60 and the floor transport vehicle 30 stopped near the port 60. The stopping position of the floor transport vehicle 30 is near the side of the port 60 in the direction of lateral movement of the ceiling transport vehicle 1, i.e., in a direction perpendicular to the direction of travel of the ceiling transport vehicle 1. The stopping position of the floor transport vehicle 30 is not particularly limited as long as it is within a range where the transfer unit 40 can transfer the item 10 to the port 60 (it does not need to be stopped strictly at a predetermined stopping position). The ceiling transport vehicle 1 places, for example, an unprocessed item 10 on the loading platform 35 of the floor transport vehicle 30 (see FIGS. 5(a) and 5(b)). Next, the ceiling transport vehicle 1 unloads the processed item 10 from the port 60 (see Figure 5(c)). Thereafter, the floor transport vehicle 30 places the item 10 received from the ceiling transport vehicle 1 (i.e., the item 10 to be processed next in processing device A) on the loading surface 60a of the port 60 (see Figure 5(d)). "Unprocessed item 10" means an item 10 that will yet be processed in processing device A. "Processed item 10" means an item 10 for which processing in processing device A has been completed. "Unloading" has the same meaning as "loading" described above. Through the above transfer operation, the ceiling transport vehicle 1 that has carried the item 10 can continuously unload the processed item 10 (i.e., while remaining in the same stopped position).

[0050] 6(a) to 6(d) are diagrams showing another example of the transfer procedure for the article 10. In the examples shown in FIGS. 6(a) to 6(d), the floor transport vehicle 30 and the ceiling transport vehicle 1 also work together (in a relay system) to perform a predetermined transfer operation. The floor transport vehicle 30 unloads the processed article 10 from the port 60 (see FIG. 6(a)). The ceiling transport vehicle 1 places the unprocessed article 10 on the vacant port 60 (see FIG. 6(b)). Next, the ceiling transport vehicle 1 unloads the processed article 10 from the floor transport vehicle 30 (see FIG. 6(c)). At this time, a wafer is removed from the unprocessed article 10 on the port 60 and is processed in the processing device A. Thereafter, the ceiling transport vehicle 1 transports the article 10 received from the floor transport vehicle 30 (see FIG. 6(d)). By the above-described transfer operation, the floor transport vehicle 30 can immediately unload the processed article 10, thereby enabling the processing of the article 10 in the processing device A to begin sooner.

[0051] As described above, the ceiling transport vehicle 1 and the floor transport vehicle 30 cooperate to perform a series of transfer operations. Examples of information exchanged between them during these transfer operations will be described in more detail. As shown in FIG. 7 , the floor transport vehicle 30 may have a position detection camera 39 installed in the carriage body 31 and capable of capturing an image of the floor F below. The second control unit 32 of the floor transport vehicle 30 processes the image of the marker M acquired by the position detection camera 39 and performs a predetermined calculation to determine the difference from the marker M and calculate the positional deviation amount D of its own carriage. The second control unit 32 of the floor transport vehicle 30 adds up the mechanical error of its own carriage and the positional deviation amount D and transmits the obtained value to the first control unit 22 of the ceiling transport vehicle 1. At this time, optical communication (serial communication) is performed between the optical communication device 38 installed on the carriage body 31 and the optical communication device 12 installed on the frame unit 2 of the ceiling transport vehicle 1. This is an example of the information communication in step S202 described above. The position detection camera 39 constitutes a part of the stop position sensor 36 (see FIG. 2). The optical communication device 38 constitutes a part of the communication device 34, and the optical communication device 12 constitutes a part of the communication device 24 (see FIG. 2).

[0052] As shown in FIG. 8 , the floor transport vehicle 30 may have a position detection camera 39 installed at the tip of the arm unit 41 and capable of capturing images of the surrounding area. The second control unit 32 of the floor transport vehicle 30 recognizes the positional deviation between the port 60 and its own vehicle by image processing the image of the marker 64 on the placement surface 60a acquired by the position detection camera 39 and performing a predetermined calculation. At this time, the second control unit 32 of the floor transport vehicle 30 transmits (reports) correction value information to the first control unit 22 of the ceiling transport vehicle 1, which uses this as a correction value for transfer between the floor transport vehicle 30 and the floor transport vehicle 30. The second control unit 32 of the floor transport vehicle 30 may use this positional deviation as a correction value to transfer the object to the port 60. In this case, optical communication (serial communication) is also performed between the optical communication device 38 and the optical communication device 12. In transfer between the ceiling transport vehicle 1 and the port 60, a marker tower (not shown) installed separately from the device may be used instead of the marker 64 on the port 60. A marker provided on the tower is used to recognize the positional deviation. The tower may also serve as a charging device for the floor transport vehicle 30.

[0053] Furthermore, interlock communication may be performed before and during transfer using a first obstacle sensor 13 and a second obstacle sensor 14 provided on the frame unit 2 of the overhead transport vehicle 1. As shown in Figures 9(a) and 9(b), the first obstacle sensor 13 detects obstacles (presence or absence of obstacles) around the floor transport vehicle 30 at positions in front of and behind the overhead transport vehicle 1 in the traveling direction. The second obstacle sensor 14 detects obstacles (presence or absence of obstacles) around the floor transport vehicle 30 at positions to the side in the horizontal direction perpendicular to the traveling direction of the overhead transport vehicle 1. Information detected in this manner may be used for information communication in step S201 or S204 described above. The first obstacle sensor 13 and the second obstacle sensor 14 are three-way look-down sensors and constitute part of the obstacle sensor 26 (see Figure 2).

[0054] Furthermore, interlock communication may be performed before and during transfer using a downward monitoring camera 15 provided on the frame unit 2 of the ceiling transport vehicle 1. As shown in Figures 10(a) and 10(b), the downward monitoring camera 15 detects obstacles (presence or absence of obstacles) in four directions around the floor transport vehicle 30. The first control unit 22 of the ceiling transport vehicle 1 detects the presence or absence of obstacles by processing the images acquired by the downward monitoring camera 15 and performing a predetermined calculation. The information detected in this manner may be used for information communication in step S201 or S204 described above. The downward monitoring camera 15 constitutes part of the obstacle sensor 26 (see Figure 2).

[0055] Furthermore, interlock communication may be performed before and during transfer using a side obstacle sensor 46 provided on the carriage body 31 of the floor transport vehicle 30. As shown in FIG. 11 , the floor transport vehicle 30 detects obstacles (presence or absence of obstacles) around the carriage using the side obstacle sensor 46. The detected information may be used for information communication in step S202 or S206 described above. The side obstacle sensor 46 constitutes part of the obstacle sensor 37. In this case, when the second control unit 32 of the floor transport vehicle 30 detects a moving object within a predetermined range around the stopping position of the carriage (a range within which a worker or the like can access the transfer space (put their hands or the like)), it reports this to the first control unit 22 of the ceiling transport vehicle 1. As a result, the first control unit 22 temporarily suspends the transfer operation of the item 10 by the ceiling transport vehicle 1. When the second control unit 32 detects that a moving object has left the range, the first control unit 22 receives a report to that effect and resumes the operation of transferring the article 10 using the ceiling transport vehicle 1. Alternatively, a detection area may be assigned in advance to each port 60. When a moving object or an obstacle is detected within the detection area, an instruction to stop the transfer operation may be issued.

[0056] Various examples of obstacle area selection are shown in Figures 15(a) to 15(e). As shown in Figure 15(a), both longitudinal sides of the floor transport vehicle 30 (areas Ea and Ec) and both lateral sides of the floor transport vehicle 30 (areas Eb and Ed) may be set as obstacle areas. As shown in Figure 15(b), when the floor transport vehicle 30 is located in front of the port 60, both longitudinal sides of the floor transport vehicle 30 (areas Ea and Ec) and one lateral side of the floor transport vehicle 30 (area Eb) may be set as obstacle areas. As shown in Figure 15(c), when the floor transport vehicle 30 is located in front of the port 60, both longitudinal sides of the floor transport vehicle 30 (areas Ea and Ec) and one lateral side of the floor transport vehicle 30 (area Ed) may be set as obstacle areas. In Figure 15(c), the position of the floor transport vehicle 30 relative to the port 60 is opposite to that in Figure 15(b). As shown in Figure 15(d), when the floor transport vehicle 30 is located in front of the port 60 and close to a fixed obstacle such as a wall, each of the areas on one side of the floor transport vehicle 30 in the longitudinal direction (area Ec) and one side of the floor transport vehicle 30 in the lateral direction (area Ed) may be set as an obstacle area. Also, as shown in Figure 15(e), when the floor transport vehicle 30 is located in front of the port 60, each of the areas on both sides of the floor transport vehicle 30 in the longitudinal direction (areas Ea and Ec) and both sides of the floor transport vehicle 30 in the lateral direction (areas Eb and Ed) may be set as an obstacle area. In this case, area Eb may be set as a range that avoids the port 60.

[0057] Here, information communication between the floor transport vehicle 30 and the ceiling transport vehicle 1 may be based on the E84 communication standard. In this case, information communication may be performed wirelessly, such as between the optical communication device 38 and the optical communication device 12, or may be performed (wired) via the port 60, the processing device A, and the transmission line 67, or may be performed (wired) via the communication relay device 90 and the transmission line 93. An example of the configuration of wired communication will be described later (see Figures 16 and 17). Note that if the amount of information communication possible in E84 communication (8 bits) is insufficient, for example, when communicating stop position information, another communication standard such as wireless LAN, 5G, or sub-G (gigabit) may be used.

[0058] Next, with reference to each of Figures 12(a) to 13(c), an example of a transport procedure for an article 10 in the transport system S (an example of a procedure for using the floor transport vehicles 30) will be described. As shown in Figure 12(a), five floor transport vehicles 30 are positioned below a portion of the track 200 and are stopped (waiting). In this configuration, the five floor transport vehicles 30 are used as a pre-equipment buffer for all of the processing equipment A present in the module. The four floor transport vehicles 30 arranged and waiting together serve as transfer ports. As shown in Figure 12(b), the ceiling transport vehicle 1 transfers (hands over) an article 10 to one of the floor transport vehicles 30. As shown in Figure 12(c), the floor transport vehicle 30 moves toward one port 60 on which the processed article 10 is placed. 13(a), the floor transport vehicle 30 replaces the unprocessed item 10 it transported to the port 60 with the processed item 10. The floor transport vehicle 30 may wait in front of the port 60 until processing in the processing device A is completed. During this time, the floor transport vehicle 30 may acquire the unprocessed item 10 from the ceiling transport vehicle 1, and replace it with the next item 10 as soon as processing of the item 10 in the processing device A is completed. The floor transport vehicle 30 may hold the processed item 10 and wait for collection by the ceiling transport vehicle 1.

[0059] As shown in Figure 13(b), for example, the floor transport vehicle 30 returns to its original position while holding the processed item 10. Then, as shown in Figure 13(c), the ceiling transport vehicle 1 collects the item 10. At the point shown in Figure 13(b), the floor transport vehicle 30 may, in some cases, transport the processed item 10 to another processing device A, which is the next process.

[0060] As another example of a transport procedure (an example of a procedure for utilizing the floor transport vehicles 30), each floor transport vehicle 30 may be made to wait in front of the port 60, as shown in Figure 14. With this arrangement, the transfer operation as shown in Figure 5 or 6 is realized between the floor transport vehicle 30, the ceiling transport vehicle 1, and the port 60. At this time, the ceiling transport vehicle 1 performs a lateral transfer operation.

[0061] In the conveying system S and conveying method of this embodiment, each conveying vehicle can convey an article on both the ceiling side and the floor side. Since the loading platform 35 of the floor conveying vehicle 30 is open upward, the article 10 can be transferred freely between the ceiling conveying vehicle 1 and the floor conveying vehicle 30. Communication regarding the transfer of the article 10 is executed from the ceiling conveying vehicle 1 to the floor conveying vehicle 30 (see Figure 4 (b) etc.), so that the article can be handed over reliably and appropriately between the two. Even if the trend of conveying requests changes, the article 10 can be conveyed efficiently by appropriately selecting single conveyance by the ceiling conveying vehicle 1, single conveyance by the floor conveying vehicle 30, or conveyance by cooperative work between the ceiling conveying vehicle 1 and the floor conveying vehicle 30.

[0062] By having the floor transport vehicle 30 send information regarding the stopping position to the ceiling transport vehicle 1, the transfer of items 10 from the ceiling transport vehicle 1 to the floor transport vehicle 30 (or from the floor transport vehicle 30 to the ceiling transport vehicle 1) can be carried out more reliably and quickly.

[0063] By having the floor transport vehicle 30 send information regarding obstacles to the ceiling transport vehicle 1, the transfer of items 10 from the ceiling transport vehicle 1 to the floor transport vehicle 30 (or from the floor transport vehicle 30 to the ceiling transport vehicle 1) can be carried out more appropriately and safely.

[0064] Furthermore, since the floor transport vehicle 30 executes transfer-related communication with the port 60 of the processing device A and then hands over the article 10 to the port 60, the article 10 can be freely transferred from the floor transport vehicle 30 to the port 60 (or from the port 60 to the floor transport vehicle 30). Therefore, the transport of the article 10 can proceed without the intervention of the ceiling transport vehicle 1. As a result, slack is created in the entire system, further increasing the total transport efficiency.

[0065] When transferring the article 10 between the ceiling transport vehicle 1 and the floor transport vehicle 30, the ceiling transport vehicle 1 transmits pre-transfer information including information inquiring whether or not the article 10 can be transferred to the floor transport vehicle 30. This allows the article 10 to be transferred more reliably.

[0066] Two articles 10 can be placed on the loading platform 35 of the floor transport vehicle 30. By being able to place multiple articles 10 on the loading platform 35, the transport capacity for the articles 10 is increased. In addition, the free space on the loading platform 35 can be utilized while transporting one article 10.

[0067] Although the embodiments of the present disclosure have been described above, the present invention is not limited to the above embodiments. For example, as shown in FIG. 16 , information communication between the floor transport vehicle 30 and the ceiling transport vehicle 1 may be performed wired, with information being sent via a port 60 and a processing device A to a communicator provided on the track 200 via a transmission line 67. For example, a short-range communicator 66 provided on the port 60 and a short-range communication device 47 provided on the carriage body 31 of the floor transport vehicle 30 face to face and communicate information. The short-range communicator 66, the port control unit 61, and a short-range communicator 92 provided on the track 200 are connected via the transmission line 67. The short-range communicator 92 face to face and communicate information with a short-range communicator 16 provided on the frame unit 2 of the ceiling transport vehicle 1. In this configuration, the short-range communicator 66 constitutes part of the communication unit 63.

[0068] 17 , when information communication between the floor transport vehicle 30 and the ceiling transport vehicle 1 is performed by wire, a communication relay device 90 equipped with a short-range communicator 91 may be used. The short-range communicator 91 of the communication relay device 90 installed on the floor F faces the short-range communication device 47 provided on the carriage body 31 of the floor transport vehicle 30 to communicate information. The short-range communicator 91 is also connected to a short-range communicator 92 provided on the track 200 via a transmission line 93. The short-range communicator 92 faces the short-range communicator 16 provided on the frame unit 2 of the ceiling transport vehicle 1 to communicate information.

[0069] The communication in the above two examples is, for example, the E84 communication described above. It is not limited to E84 communication, and other communication standards such as wireless LAN, 5G, and sub-G (gigabit) may be used. The communication relay device 90 shown in FIG. 17 may also serve as a charging device for the floor transport vehicle 30. In the above two examples, the short-range communication device 47 constitutes a part of the communication device 34, and the short-range communicator 16 constitutes a part of the communication device 24 (see FIG. 2).

[0070] At least one of the information communication from the floor transport vehicle 30 to the ceiling transport vehicle 1 regarding the stopping position and the information communication regarding the obstacle may be omitted.

[0071] The transport system S may be equipped with one or more automatic guided vehicles (hereinafter referred to as AGVs) with a transfer function as the floor transport vehicle 30, instead of an AMR. Even in such a case, the same transport as in the above embodiment can be performed and similar effects can be achieved by the AGV, which has an open platform at the top and is configured to be able to transfer the article 10 between the ceiling transport vehicle 1 and the port 60. If a worker may be present on or near the route on which the AGV can travel, separate measures may be taken to avoid collision or interference between the worker and the AGV.

[0072] Only one item or three or more items may be placed on the loading platform 35 of the floor transport vehicle 30.

[0073] The article to be transported in the transport system S is not limited to a FOUP, but may be any article other than a FOUP that can be transported by the ceiling transport vehicle 1 and the floor transport vehicle 30. The article may also be a reticle pod that stores a reticle, or the like.

[0074] 1...ceiling transport vehicle, 10...item, 12...optical communication device, 13...first obstacle sensor, 14...second obstacle sensor, 15...downward monitoring camera, 16...short-range communication device, 24...communication device, 30...floor transport vehicle, 34...communication device, 35...loading platform, 36...stop position sensor, 37...obstacle sensor, 38...optical communication device, 46...side obstacle sensor, 47...short-range communication device, 50...transport vehicle controller, 60...port, 100...upper controller, 200...track, A...processing device, S...transport system.

Claims

1. A transport system comprising: a ceiling transport vehicle that travels along a track installed on the ceiling and transports items; and a floor transport vehicle that travels on the floor and transports the items, wherein the ceiling transport vehicle and the floor transport vehicle each have communication devices that allow them to communicate information with each other, the floor transport vehicle has a loading platform that is open upward and on which the items can be placed, and the ceiling transport vehicle executes communication with the floor transport vehicle regarding the transfer of the items, and then hands over the items to the loading platform of the floor transport vehicle.

2. The transport system according to claim 1, wherein the floor transport vehicle transmits information regarding a stop position to the ceiling transport vehicle.

3. A transport system according to claim 1 or 2, wherein the floor transport vehicle transmits information relating to obstacles to the ceiling transport vehicle.

4. A transport system as described in claim 1 or 2, wherein the floor transport vehicle executes transfer-related communication with a port of a processing device installed on the floor, and then delivers the item to the port.

5. A transport system as described in claim 1 or 2, wherein when transferring the item between the ceiling transport vehicle and the floor transport vehicle, the ceiling transport vehicle transmits pre-transfer information to the floor transport vehicle, the pre-transfer information including information inquiring whether the item can be transferred or not.

6. A transport system according to claim 1 or 2, wherein two articles can be placed on the platform of the floor transport vehicle.

7. A method of transport in a transport system comprising a ceiling transport vehicle that travels along a track provided on the ceiling and transports items, and a floor transport vehicle that travels on the floor and transports the items, wherein the ceiling transport vehicle executes communication with the floor transport vehicle regarding the transfer of the items, and then hands over the items to a loading platform opened above the floor transport vehicle.

Images