Infrared absorption-based non-contact temperature measurement sensor and non-contact temperature measurement sensor system

Abstract

The present invention relates to a non-contact temperature measurement sensor and a non-contact temperature measurement sensor system, and to an infrared absorption-based non-contact temperature measurement sensor comprising: a housing provided at a pipe such that the pipe passes through the inner space thereof; a sensor module which is provided inside the housing, and which has an infrared emission unit for emitting infrared rays at one side of the pipe and an infrared detection unit for detecting, at the other side of the pipe, the infrared rays that passed through the pipe; and a cover coupled to the housing so as to close the inner space of the housing, wherein the sensor module can accommodate pipes of various diameters, and the infrared emission unit emits infrared rays toward the center of the pipe.

Description

Non-contact temperature measurement sensor and non-contact temperature measurement sensor system based on infrared absorption

[0001] The present invention relates to a non-contact temperature measurement sensor, and more specifically, to a non-contact temperature sensor and a non-contact temperature measurement sensor system based on infrared absorption that can measure the temperature of a fluid in a pipe in real time in a non-contact manner as a temperature measurement technology based on infrared absorption.

[0002]

[0003] The temperature of the chemical liquid (hereinafter referred to as “fluid”) used in processes such as wafer cleaning and etching during the semiconductor process must be monitored in real time because the precision of the cleaning and etching process is determined by the temperature.

[0004] Therefore, real-time measurement of the fluid temperature during the process is essential. To address this issue, extensive research is underway, including publications such as "Thermocouple Temperature Sensor with Improved Reliability and Response Speed" (Publication No. 10-2018-0084381), "Temperature Measuring Device" (Registration No. 10-1996312), and "Temperature Sensor-Integrated Differential Pressure Flow Meter" (Registration No. 10-2611068).

[0005] In the case of the above conventional technologies, a thermometer is inserted into a pipe to measure the temperature of the fluid in a contact manner. The contact thermometer has high accuracy in temperature measurement and can measure in real time. However, since the contact thermometer must be installed in a place where it can come into direct contact with the fluid in the pipe, it is impossible to install it while a process is in progress.

[0006] Furthermore, if a problem arises with an installed temperature sensor and replacement or repair is necessary, it cannot be performed during the process; the process must be halted for replacement or repair. Furthermore, the fluids used in semiconductor cleaning and etching are toxic, posing a risk of personal injury if exposed to the elements. Therefore, the above-mentioned conventional technologies are not only difficult to install inside pipes, but also difficult to maintain.

[0007]

[0008] <Prior Art Literature>

[0009] Patent Document 1 Publication No. KR 10-2018-0084381

[0010] Patent Document 2 Registered Patent KR 10-1996312

[0011] Patent Document 3 Registered Patent KR 10-2611068

[0012]

[0013] An object of the present invention to solve the above problem is to provide a non-contact temperature measuring sensor that measures the temperature of a fluid in a non-contact manner by installing a sensor measuring the temperature of the fluid inside the pipe on the outer surface of the pipe.

[0014] In addition, the purpose of the present invention is to provide a non-contact temperature measurement sensor that can be installed on a new pipe or can be easily replaced or repaired by installing the temperature measurement sensor on the outside of the pipe so that there is no possibility of toxic fluid leaking to the outside.

[0015] In addition, it is an object of the present invention to enable easy installation of a non-contact temperature measurement sensor in pipes having different diameters.

[0016] The technical problems to be solved by the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned can be clearly understood by a person having ordinary skill in the technical field to which the present invention belongs from the description below.

[0017]

[0018] In order to achieve the above object, the present invention provides a non-contact temperature measurement sensor, comprising: a housing installed in a pipe so that the pipe passes through the internal space; a sensor module provided inside the housing, the sensor module including an infrared emitting portion emitting infrared rays from one side of the pipe and an infrared detecting portion detecting infrared rays passing through the pipe from the other side of the pipe; and a cover coupled to the housing so as to close the internal space of the housing; wherein the sensor module can accommodate pipes of various diameters, and the infrared emitting portion is formed so as to emit infrared rays toward the center of the pipe.

[0019] In an embodiment of the present invention, the sensor module may be formed to be detachable from the housing, and each sensor module may be characterized by having a mounting groove of various sizes into which a pipe is inserted.

[0020] In an embodiment of the present invention, the lower surface of the cover may be provided with a pressing projection for fixing a pipe inserted into the fixing groove.

[0021] In an embodiment of the present invention, the pressing projection may be made of an elastic material and may be characterized in that its shape is deformed to fit the diameter of the pipe.

[0022] In an embodiment of the present invention, the protrusion may be formed to be replaceable to match the diameter of the pipe inserted into the fixing groove.

[0023] In an embodiment of the present invention, it may be characterized in that an air passage is formed between the pipe inserted into the mounting groove and the cover.

[0024] In an embodiment of the present invention, the infrared emitting unit may be provided with a plurality of units that emit infrared rays of different wavelengths, and the infrared detection unit may be provided in a number corresponding to the number of the infrared emitting units.

[0025] In an embodiment of the present invention, when an IPA (Isopropyl Alcohol) solution flows in the pipe, the plurality of infrared emitting parts may be characterized in that they each emit infrared rays having a wavelength of 1,450 nm ± 50 nm and infrared rays having a wavelength of 1,600 nm ± 50 nm.

[0026] In an embodiment of the present invention, it may be characterized by comprising: a non-contact temperature measurement sensor; and a temperature calculation unit that calculates the temperature of a fluid using a sensing value measured by the temperature measurement sensor.

[0027] In an embodiment of the present invention, when a plurality of infrared emitting units emit infrared rays of different wavelengths, the temperature calculating unit may be characterized by including a ratio calculating unit that calculates a ratio of the sensing values ​​of the infrared detecting units for each wavelength; and a temperature storage unit that stores the temperature according to the ratio.

[0028] In an embodiment of the present invention, the ratio calculating unit may be characterized by calculating the ratio of the average sensing value of the infrared detection unit for each wavelength.

[0029] In an embodiment of the present invention, the wavelength of the infrared ray emitted from the infrared emitting portion may be different depending on the type of fluid in the pipe.

[0030] In an embodiment of the present invention, a sensor module for a non-contact temperature measurement sensor based on infrared absorption may be characterized by including an infrared emitting unit that emits infrared from one side of a pipe, and an infrared detecting unit that detects infrared that has passed through the pipe from the other side of the pipe, and a sensor module that is formed to be detachable from a housing of the temperature measurement sensor installed in a pipe so that the pipe passes through the internal space, and formed to be capable of accommodating pipes of various diameters.

[0031] In an embodiment of the present invention, the infrared emitting portion may be characterized by a sensor module formed to emit infrared rays toward the center of the pipe.

[0032] In an embodiment of the present invention, a sensor module may be characterized by further including a mounting groove into which a pipe is inserted; and height-adjusting pieces that are detachably arranged along the inner surface of the mounting groove and have different thicknesses.

[0033] In an embodiment of the present invention, the infrared emitting unit may be provided with a plurality of units that emit infrared rays of different wavelengths, and the infrared detection unit may be characterized by a sensor module provided according to the number of the infrared emitting units.

[0034]

[0035] The effect of the present invention according to the above configuration is that by installing a non-contact temperature measurement sensor on the outer surface of the pipe, maintenance is easy, and by preventing the fluid inside the pipe from leaking to the outside, human casualties can be prevented, and it can be installed directly in the necessary part.

[0036] In addition, according to the present invention, it is possible to install it in pipes having different diameters, and the heat generated from the non-contact temperature measurement sensor can be discharged to the outside, and by utilizing infrared rays of various wavelengths when measuring temperature, temperature measurement can be performed more accurately.

[0037] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the detailed description of the present invention or the composition of the invention described in the claims.

[0038]

[0039] FIG. 1 is a perspective view of a non-contact temperature measurement sensor according to one embodiment of the present invention.

[0040] Figure 2 is an exploded perspective view of the non-contact temperature measurement sensor.

[0041] Fig. 3 is a perspective view and a cross-sectional view of a housing equipped with a sensor module, which is a part of the non-contact temperature measurement sensor.

[0042] Figure 4 is a perspective view showing the housing and sensor module separated.

[0043] Figure 5 is a cross-sectional view showing a state in which pipes of different diameters are installed in a sensor module.

[0044] Figure 6 is a perspective view and a front view of a cover, which is a part of the present invention.

[0045] Figure 7 is a cross-sectional view showing the process of attaching the cover to the housing.

[0046] Figure 8 is a cross-sectional view showing the state of use of a height adjustment member, which is a part of the present invention.

[0047] Figure 9 is a cross-sectional view illustrating a process for replacing a pressing projection, which is a part of the cover.

[0048] Fig. 10 is a cross-sectional view illustrating another embodiment of the sensor module.

[0049] Fig. 11 is a cross-sectional view illustrating the use of the above sensor module to align a small diameter pipe with an infrared emitting portion.

[0050] Fig. 12 is a partially cut perspective view and a side view of the non-contact temperature measurement sensor of the present invention.

[0051] Figure 13 is a conceptual diagram illustrating a system using a non-contact temperature measurement sensor of the present invention.

[0052] Figure 14 is a graph showing the infrared absorption spectrum of water according to temperature.

[0053] Figure 15 is a graph showing the ratio of signals obtained from an infrared emitting part emitting infrared light with a wavelength of 1,400 nm and an infrared emitting part emitting infrared light with a wavelength of 1,600 nm.

[0054] Figure 16 is a graph showing the infrared absorption spectrum of an IPA (Isopropyl Alcohol) solution according to temperature.

[0055] Figure 17 is a graph showing the ratio of the signal average value of a wavelength of 1,450 nm ± 50 nm and the signal average value of a wavelength of 1,600 nm ± 50 nm according to the temperature of the IPA solution.

[0056] Figure 18 is a graph showing signal values ​​(P1, P2) of different wavelengths according to the temperature of the IPA solution.

[0057] Figure 19 is a graph showing the ratio of signal values ​​(P1 / P2) according to the temperature of IPA.

[0058]

[0059] A most preferred embodiment according to the present invention comprises: a housing installed in a pipe so that a pipe passes through the internal space; a sensor module provided inside the housing, the sensor module including an infrared emitting portion emitting infrared rays from one side of the pipe and an infrared detecting portion detecting infrared rays passing through the pipe from the other side of the pipe; and a cover coupled to the housing so as to close the internal space of the housing; wherein the sensor module is characterized in that it can accommodate pipes of various diameters, and the infrared emitting portion is formed so as to emit infrared rays toward the center of the pipe.

[0060]

[0061] Hereinafter, the present invention will be described with reference to the attached drawings. However, the present invention may be implemented in various different forms and is therefore not limited to the embodiments described herein. In the drawings, irrelevant parts have been omitted for clarity of description, and similar parts have been designated with similar reference numerals throughout the specification.

[0062] Throughout the specification, when a part is said to be "connected (connected, contacted, or coupled)" to another part, this includes not only cases where it is "directly connected," but also cases where it is "indirectly connected" with another part in between. Furthermore, when a part is said to "include" a component, this does not exclude other components, but rather implies that it may include other components, unless otherwise specifically stated.

[0063] The terminology used herein is merely used to describe specific embodiments and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this specification, it should be understood that the terms "comprises" or "has" indicate the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0064] Additionally, terms such as “... part,” “... unit,” and “... module” described in the specification mean a unit that processes at least one function or operation, which may be implemented by hardware, software, or a combination of hardware and software.

[0065] Additionally, when a step is said to be located "before" or "after" another step in this specification, this includes not only cases where the step is in a direct time-series relationship with the other step, but also cases where the two steps are in an indirect time-series relationship where the time-series order may be changed, such as a mixing step after each step.

[0066] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

[0067]

[0068] FIG. 1 is a perspective view of a non-contact temperature measurement sensor (100) according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of the non-contact temperature measurement sensor (100), and FIG. 3 is a perspective view and a cross-sectional view of a housing (110) equipped with a sensor module (120), which is a part of the non-contact temperature measurement sensor (100).

[0069] The non-contact temperature measurement sensor (100) based on infrared absorption of the present invention may include a housing (110), a sensor module (120), and a cover (130), as shown in FIGS. 1 to 3.

[0070] The above housing (110) can be installed in a pipe (140) so that a pipe (140) can pass through the internal space. In addition, a receiving space (111) can be formed inside the housing (110) so that a sensor module (120) can be provided.

[0071] The above sensor module (120) may be provided inside the housing (110). Specifically, the sensor module (120) may be installed by being inserted into the receiving space (111) of the housing (110).

[0072] The above sensor module (120) can allow the pipe (140) to pass through the interior of the housing (110) when the pipe (140) passes through the interior of the sensor module (120). In addition, the sensor module (120) can include an infrared emitting unit (121) that emits infrared rays from one side of the pipe (140) and an infrared detecting unit (122) that detects infrared rays passing through the pipe (140) from the other side of the pipe (140).

[0073] When the sensor module (120) is installed in the pipe (140) by the housing (110), the infrared emitting part (121) emits infrared rays, and the infrared rays pass through the pipe (140) and can be detected by the infrared detection part (122).

[0074] The above infrared emitting unit (121) may be an IR LED, i.e., a diode that emits infrared rays. The infrared emitting unit (121) may emit infrared rays of a specific wavelength range. At this time, the degree to which the infrared rays emitted from the infrared emitting unit (121) are absorbed may vary depending on the temperature of the fluid within the pipe (140).

[0075] The above infrared detection unit (122) converts the detected infrared into an electrical signal, and the converted signal can be utilized to measure temperature. As described above, the degree to which infrared is absorbed varies depending on the temperature of the fluid within the pipe (140), so the sensing value of the infrared detected by the infrared detection unit (122) can vary depending on the temperature of the fluid within the pipe (140).

[0076] Therefore, it may become possible to measure the temperature of the fluid by utilizing the sensing value of the infrared detection unit (122).

[0077] In summary, the housing (110) of the non-contact temperature measurement sensor (100) of the present invention is installed on the outer surface of the pipe (140), and the infrared emitting portion (121) of the sensor module (120) can emit infrared rays from one side of the pipe (140) and pass the infrared rays through the pipe (140).

[0078] And the infrared rays passing through the pipe (140) are detected by the infrared detector (122) located on the other side, and the detected infrared rays are converted into an electrical signal and can then be used to detect the temperature of the fluid.

[0079] In this way, the non-contact temperature measurement sensor (100) of the present invention can be installed on the outer surface of the pipe (140) as needed, so it can be installed without any conditions such as time, place, or situation during the process.

[0080] In addition, since it is installed on the outer surface of the pipe (140), the fluid flowing inside the pipe (140) cannot leak to the outside, and it has the effect of being easy to maintain, and it has the effect of being able to accurately measure the temperature of the fluid in real time using infrared rays from the outside of the pipe (140).

[0081] The above sensor module (120) can accommodate pipes (140) of various diameters. In addition, the infrared emitting portion (121) and the infrared detecting portion (122) can be formed to emit infrared rays toward the center of the pipe (140) and detect the same.

[0082] Therefore, by allowing infrared rays to pass through the center of the pipe (140), the temperature of the fluid can be accurately measured by allowing infrared rays to be absorbed into the fluid as efficiently as possible.

[0083] The cover (130) can be coupled to the housing (110) to close the internal space of the housing (110). Therefore, the cover (130) coupled to the housing (110) can prevent the pipe (140) from being separated from the housing (110).

[0084]

[0085] Figure 4 is a perspective view showing a state in which the housing (110) and the sensor module (120) are separated, and Figure 5 is a cross-sectional view showing a state in which pipes (140) of different diameters are installed in the sensor module (120).

[0086] The above sensor module (120) may be formed to be retractable to the housing (110), as illustrated in FIG. 4. In addition, each sensor module (120) may be provided with a mounting groove (123) of various sizes into which a pipe (140) is inserted.

[0087] As illustrated in Fig. 5, the sensor module (120) is a single module equipped with an infrared emitting portion (121) and an infrared detecting portion (122), and can be combined and separated from the housing (110). Therefore, by combining the sensor module (120) equipped with a mounting groove (123) suitable for each pipe (140) of different diameters with the housing (110), it can be installed in each pipe (140) of different diameters.

[0088] In addition, by using a sensor module (120) equipped with a mounting groove (123) that is suitable for the diameter of each pipe (140), the center of the pipe (140) can be aligned with the center of the infrared emitting portion (121), thereby ensuring accuracy in measuring the temperature of the fluid within the pipe (140).

[0089] At this time, the housing (110) may be provided with an insertion groove (112) wider than the mounting groove (123) so that a pipe (140) can be inserted into the mounting groove (123).

[0090]

[0091] Figure 6 is a perspective view and a front view of the cover (130), and Figure 7 is a cross-sectional view showing the process of attaching the cover (130) to the housing (110).

[0092] As shown in Fig. 6, a pressing projection (135) may be provided on the lower surface of the cover (130). The pressing projection (135) prevents the pipe (140) from moving by pressing the upper portion of the pipe (140) when the cover (130) is coupled to the housing (110), thereby increasing the accuracy of temperature measurement.

[0093] In addition, the pressing protrusions (135) may be formed to be spaced apart from each other as shown in (c) of Fig. 6. Therefore, by pressing only a portion of the pipe (140), the pipe (140) is not heated by the infrared ray radiated from the infrared radiator (121) or the infrared ray radiator (121) or the infrared ray detector (122), and the heat is discharged to the outer surface of the pipe (140) in a portion that does not come into contact with the pressing protrusions (135), thereby enabling accurate measurement.

[0094] At this time, the pressing protrusion (135) may be made of an elastic material. Therefore, as illustrated in FIG. 7, when the cover (130) is coupled to the housing (110), the pressing protrusion (135) is deformed in shape to match the diameter of the pipe (140), thereby providing an effect of preventing the pipe (140) from shaking more stably.

[0095] As described above, the detachable sensor modules (120) are made up of various sized mounting grooves (123) into which pipes (140) are inserted, but it is difficult to manufacture them to fit pipes (140) of all diameters.

[0096] The sensor module (120) equipped with the above-mentioned mounting groove (123) can use pipes (140) having diameters within a certain range. For example, pipes (140) having diameters of 10 mm to 15 mm, 16 mm to 20 mm, 21 mm to 25 mm, etc. can be used together.

[0097] At this time, when a pipe (140) having a diameter of 10 mm is inserted into a sensor module (120) equipped with a mounting groove (123) into which a pipe (140) having a diameter of 20 mm can be inserted, the center of the infrared emitting portion (121) and the center of the pipe (140) do not align, making it impossible to perform accurate measurement. Therefore, a height adjustment piece (124) may be equipped in the mounting groove (123).

[0098] As shown in Fig. 8, the above height adjustment member (124) raises the height of the pipe (140) so that the pipe (140) having a smaller diameter than the mounting groove (123) is aligned with the center of the infrared emitting portion (121) when the pipe does not align with the center of the infrared emitting portion (121), thereby stably achieving measurement accuracy.

[0099] Figure 8 is a cross-sectional view showing the state of use of the height adjustment member (124).

[0100] The diameter of the pipe (140) inserted into the above-mentioned mounting groove (123) may be small, so that the pressing projection (135) pressing from above may not reach it. Therefore, the pressing projection (135) may be formed to be replaceable according to the diameter of the pipe (140) inserted into the mounting groove (123).

[0101] At this time, the pressure adjustment piece (124) can be located at the bottom of the pressure projection (135). By fixing the pipe (140) between the pressure adjustment piece (124) and the pressure projection (135), the center of the infrared emitting part (121) and the infrared detecting part (122) can be aligned.

[0102] Figure 9 is a cross-sectional view illustrating a process for replacing the above-mentioned pressing projection (135).

[0103] The above-mentioned pressing projection (135) is replaceable. Specifically, as illustrated in (a) of Fig. 9, a step (131) may be formed to enable fitting. The step (131) is formed to have the same shape as the cross-section of the pressing projection (135) to form a fitting groove (133), but the width of the fitting groove (133) is formed to be smaller than the cross-sectional width of the pressing projection (135), so that the pressing projection (135) made of an elastic material can be inserted into the fitting groove (133) and fitted.

[0104] Another method is to replace the pusher (135) by fastening it using a bolt (134), as shown in (b) of Fig. 9.

[0105] By this, by ensuring the fixation of the pipe (140) inserted into the fixing groove (123), more accurate measurement can be made possible by emitting infrared rays.

[0106]

[0107] Fig. 10 is a cross-sectional view showing another embodiment of the sensor module (120), and Fig. 11 is a cross-sectional view showing the use of the sensor module (120) to align a small diameter pipe (140) with the center of an infrared emitting portion (121).

[0108] The sensor module (120) of the present invention may include a sensor receiving portion (125), a mounting base (126), and an elastic support portion (127), as illustrated in FIG. 10.

[0109] The infrared emitting portion (121) and the infrared detecting portion (122) may be positioned in the sensor receiving portion (125). In addition, the infrared emitting portion (121) and the infrared detecting portion (122) positioned in the sensor receiving portion (125) may be movable in the longitudinal direction of the sensor receiving portion (125).

[0110] The above-mentioned mounting plate (126) is located within the sensor receiving portion (125) and the pipe (140) can be mounted thereon. Accordingly, the mounting plate (126) can be configured to be located between the sensor receiving portions (125), i.e., between the infrared emitting portion (121) and the infrared detecting portion (122), and the pipe (140) can be mounted thereon.

[0111] The above elastic support member (127) may be located at the bottom of the mounting plate (126). In addition, the elastic support member (127) supporting the bottom of the mounting plate (126) is elastic in the vertical direction, and can push the pipe (140) mounted on the mounting plate upward.

[0112] At this time, the cover (130) can be replaced with a pusher (135) of different length depending on the diameter of the pipe (140).

[0113] Accordingly, when the pipe (140) installed in the mounting portion is pushed upward and its center does not match the infrared emitting portion (121), it is pressed by the pressing projection (135) so that the position can be adjusted to match the center of the infrared emitting portion (121).

[0114] Accordingly, when installing pipes (140) with different diameters, by only replacing and fixing the pusher (135), the pipe (140) can be easily fixed and aligned with the center of the infrared emitting portion (121).

[0115] In addition, as the diameter of the pipe (140) changes, the distance between the infrared emitting portion (121) and the infrared detecting portion (122) also needs to be adjusted. Therefore, the distance between the infrared emitting portion (121) and the infrared detecting portion (122) can be adjusted to match the diameter of the pipe (140) as described above.

[0116] Specifically, any form of configuration that allows movement within the sensor receiving portion (125) can be used, but preferably, a spring (128) is formed between the infrared emitting portion (121) and the sensor receiving portion (125) and between the infrared detecting portion (122) and the sensor receiving portion, and the gap can be adjusted by the spring (128) pushing.

[0117] Therefore, it is economical because there is no need to manufacture multiple sensor modules (120) with different sizes of the mounting grooves (123), and the present invention can be installed and used in pipes (140) formed with various diameters simply by replacing only the pressing projection (135) provided on the cover (130).

[0118]

[0119] Fig. 12 is a partially cut perspective view and a side view of a non-contact temperature measurement sensor (100) of the present invention. An air passage (113) may be formed between the pipe (140) inserted into the mounting groove (123) and the cover (130).

[0120] The above air passage (113) can be formed by penetrating from one outer surface of the housing (110) in the direction in which the pipe (140) is installed, through the sensor module (120), and to the other outer surface of the housing (110).

[0121] The pipe (140) can be prevented from being heated by infrared rays emitted from the infrared emitting portion (121) through the above air passage (113) or by heat generated from the infrared emitting portion (121), and the heat can be discharged to the outside along the air passage (113).

[0122] Accordingly, an environment is created in which the pipe (140) or the fluid within the pipe (140) is not affected by external factors, enabling more accurate measurements to be made, and preventing the infrared emitting unit (121) or the infrared detecting unit (122) from being damaged by heat.

[0123]

[0124] The above infrared emitting unit (121) is provided with a plurality of units that emit infrared rays of different wavelengths, and the infrared detection unit (122) can be provided in accordance with the number of infrared emitting units (121).

[0125] Therefore, the temperature of the fluid within the pipe (140) can be measured more accurately, and a detailed description thereof will be provided later.

[0126]

[0127] Hereinafter, a system (200) using a non-contact temperature measurement sensor (100) based on infrared absorption according to the present invention will be described. When describing the system (200) according to the present invention, a detailed description of matters mentioned in the description of the non-contact temperature measurement sensor (100) may be omitted.

[0128]

[0129] FIG. 13 is a conceptual diagram showing a system (200) using a non-contact temperature measuring sensor (100) of the present invention, FIG. 14 is a graph showing an infrared absorption spectrum of water according to temperature, FIG. 15 is a graph showing the ratio of signals obtained from an infrared emitting part (121) emitting infrared light with a wavelength of 1,400 nm and an infrared emitting part (121) emitting infrared light with a wavelength of 1,600 nm, FIG. 16 is a graph showing an infrared absorption spectrum according to the temperature of an IPA (Isopropyl Alcohol) solution, FIG. 17 is a graph showing the ratio of the signal average value of a wavelength of 1,450 nm ± 50 nm and the signal average value of a wavelength of 1,600 nm ± 50 nm according to the temperature of the IPA solution, FIG. 18 is a graph showing signal values ​​(P1, P2) of different wavelengths according to the temperature of the IPA solution, and FIG. 19 is a graph showing the ratio of signal values ​​according to the temperature of the IPA. This is a graph showing the ratio (P1 / P2).

[0130]

[0131] The system (200) of the present invention may include a non-contact temperature measurement sensor (100) and a temperature calculation unit (210), as shown in FIG. 13.

[0132] The above non-contact temperature measurement sensor (100) is installed on the outer surface of the pipe (140), emits infrared rays to the fluid within the pipe (140), and can detect the infrared rays when they pass through the pipe (140).

[0133] The above temperature calculation unit (210) can calculate the temperature of the fluid by utilizing the sensing value measured by the non-contact temperature measurement sensor (100).

[0134] That is, a calculation formula that takes the sensing value of the non-contact temperature measurement sensor (100) as input and the temperature of the fluid as output is stored in the temperature calculation unit (210), so that the temperature of the fluid can be calculated by inputting the sensing value of the non-contact temperature measurement sensor (100) into the calculation formula.

[0135] The present invention is a technology for measuring the temperature of a fluid without contact, which continuously measures infrared rays passing through the fluid in a pipe (140) to check the temperature in real time, and has the advantage of being easy to install and maintain.

[0136]

[0137] As described above, the infrared emitting unit (121) and infrared detecting unit (122) of the non-contact temperature measuring sensor (100) are provided in a number of units that emit infrared rays of different wavelengths, and the number of infrared detecting units (122) can be provided according to the number of infrared emitting units (121).

[0138] In the present invention, an example of having two infrared emitting units (121) and two infrared detecting units (122) is given, but the infrared emitting units (121) and the infrared detecting units (122) may be configured in multiple units, such as three or five, depending on the on-site situation.

[0139] Hereinafter, the infrared emitting unit (121) and the infrared detecting unit (122) are described as two. In addition, a case in which water flows within the pipe (140) is described as an example.

[0140] Referring to Fig. 14, when the fluid is water, it can be confirmed that the infrared absorption intensity changes with temperature over a range of wavelengths from 1,400 nm to 1,700 nm.

[0141] In particular, it can be seen that the absorption intensity changes as the temperature increases at the peak point of the absorption intensity.

[0142] Specifically, among the wavelength range of 1,400 nm to 1,700 nm, it can be seen that near the wavelength of 1,450 nm, there is a clear tendency for the absorbance to increase as the temperature increases, and near the wavelength of 1,600 nm, there is a clear tendency for the absorbance to decrease as the temperature increases.

[0143] Therefore, when the fluid is water, the temperature of the water can be measured more accurately by utilizing two infrared emitting parts (121) having a wavelength of 1,450 nm and two infrared detectors (122) having a wavelength of 1,600 nm.

[0144] Additionally, depending on the characteristics of the fluid absorbing infrared rays, the wavelength of infrared rays emitted from the infrared emitting portion (121) may be emitted differently depending on the type of fluid in the pipe (140).

[0145]

[0146] The above temperature generating unit (210) may include a non-producing unit (211) and a temperature storage unit (212), as shown in FIG. 13.

[0147] The above-mentioned ratio calculation unit (211) can calculate the ratio of the sensing value of the infrared detection unit (122) for each wavelength. For example, if the fluid is water, the ratio of the sensing value detecting infrared rays with a wavelength of 1,450 nm and the sensing value detecting infrared rays with a wavelength of 1,600 nm can be calculated.

[0148] The temperature storage unit (212) above can store the temperature according to the ratio. In addition, by utilizing the ratio of the signals produced by the ratio producing unit (211), the temperature of the fluid can be checked in the temperature storage unit (212) by finding the temperature according to the ratio of the signals.

[0149] For example, in the case of water, since the temperature-dependent absorption trends of 1,450 nm and 1,600 nm are almost opposite, the ratio of the sensing value at a wavelength of 1,450 nm to the sensing value at a wavelength of 1,600 nm can vary significantly depending on the temperature.

[0150] Referring to Figure 15, the ratio of signals measured by each infrared detector (122) is shown according to temperature, and it can be confirmed that the ratio of signals increases linearly as the temperature increases.

[0151] In this way, by utilizing the signal ratio at multiple wavelengths through the infrared emitting unit (121) and infrared detecting unit (122) consisting of two, more precise temperature measurement is possible, and there is an advantage in that the influence of environmental noise or errors of the sensor itself can be reduced.

[0152]

[0153] When an IPA (Isopropyl Alcohol) solution flows in the above pipe (140), the plurality of infrared emitting parts can emit infrared rays with a wavelength of 1,450 nm ± 50 nm and infrared rays with a wavelength of 1,600 nm ± 50 nm, respectively.

[0154] As another example, when the fluid in the pipe (140) is an IPA (Isopropyl Alcohol) solution, as shown in FIG. 18, it can be confirmed that the sensing value measured by the non-contact temperature measurement sensor (100) slightly increases as the temperature increases at a wavelength of 1,450 nm ± 50 nm (P1), and the sensing value significantly decreases as the temperature increases at a wavelength of 1,600 nm ± 50 nm (P2).

[0155] Accordingly, the ratio of the sensing value of the infrared detection unit (122) with a wavelength of 1,450 nm ± 50 nm (P1) and the sensing value of the infrared detection unit (122) with a wavelength of 1,600 nm ± 50 (P2) clearly increases linearly as the temperature increases, as shown in FIG. 19, and as a result, it is possible to accurately calculate the temperature of the IPA solution by utilizing the ratio of the sensing values ​​of the infrared detection units (122) with the two wavelengths.

[0156]

[0157] The above-mentioned ratio generating unit (211) can calculate the ratio of the average sensing values ​​of the infrared detection unit (122) for each wavelength. That is, the average sensing value of one wavelength band and the average sensing value of another wavelength band can be obtained, and the ratio of the average values ​​of each wavelength band can be calculated.

[0158] In this case, the infrared emitting portion (121) may be formed so as to convert the infrared wavelengths emitted within each wavelength band or may be formed so as to emit infrared rays of multiple wavelengths included within each wavelength band from a separate LED.

[0159] This applies to cases where the temperature-dependent absorption difference of the fluid in each wavelength band is relatively small or where the correlation between the change in wavelength and the change in infrared absorption is not high, enabling accurate measurement of the temperature of the fluid even in these cases.

[0160] As illustrated in Figure 16, in the 1,450 nm ± 50 nm wavelength range, the absorbance increases as the temperature increases, and in the 1,600 nm ± 50 wavelength range, the absorbance decreases as the temperature increases. However, this trend is not as pronounced as in water. In addition, the change in absorbance by wavelength range is relatively small.

[0161] Therefore, the temperature of the fluid can be accurately measured by comparing the average of the sensing values ​​detected by the infrared detector (122) for the infrared rays in the wavelength range of 1,450 nm ± 50 nm with the average of the sensing values ​​detected by the infrared detector (122) for the infrared rays in the wavelength range of 1,600 nm ± 50 nm.

[0162] Referring to Figure 17, the ratio of the average sensing values ​​for each wavelength range can be observed linearly as the temperature increases. Therefore, the temperature of the fluid can be accurately calculated using the ratio of the average sensing values ​​for each wavelength range.

[0163] In this way, by utilizing the ratio of the average sensing values ​​for each wavelength, it may be possible to reduce measurement errors caused by environmental noise, etc., and disperse errors that may occur at one wavelength, thereby improving the consistency and accuracy of temperature measurement results.

[0164]

[0165] The wavelength of the infrared rays emitted from the above infrared emitting unit (121) may vary depending on the type of fluid in the pipe (140).

[0166] As in water or IPA solution, the tendency of infrared absorption by wavelength at each temperature is different, and the wavelength range with the greatest difference in absorption is different at each temperature.

[0167] Therefore, by varying the wavelength of infrared rays emitted from the infrared emitting portion (121) depending on the type of fluid, the temperature of various fluids can be accurately calculated.

[0168]

[0169] Although the description of the present invention has been illustrated with limited drawings, it is for illustrative purposes, and those skilled in the art will understand that the present invention can be easily modified into other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. For example, each component described as a single component may be implemented in a distributed manner, and likewise, components described as distributed may be implemented in a combined form. Furthermore, the described techniques may be performed in a different order than the described method.

[0170] The embodiments described in this specification and the accompanying drawings merely illustrate some of the technical concepts encompassed by the present invention. Therefore, the scope of the present invention is defined by the claims below, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

[0171]

[0172] <Explanation of symbols>

[0173] 100: Non-contact temperature measurement sensor

[0174] 110: Housing

[0175] 111: Reception space

[0176] 112: Insertion groove

[0177] 113: Air passage

[0178] 120: Sensor module

[0179] 121: Infrared emitting part

[0180] 122: Infrared sensor

[0181] 123: Settlement Home

[0182] 124: Height adjustment section

[0183] 125: Sensor receptacle

[0184] 126: Settlement

[0185] 127: Elastic support

[0186] 128: Moving protrusion

[0187] 130: Cover

[0188] 131: Single chin

[0189] 133: Insertion groove

[0190] 134: Bolt

[0191] 135: Push-in

[0192] 140: Piping

[0193] 200: System

[0194] 210: Temperature calculation unit

[0195] 211: Non-production section

[0196] 212: Temperature storage unit

Claims

1. A housing installed in a pipe so that the pipe passes through the internal space; A sensor module provided inside the housing, comprising an infrared emitting unit that emits infrared rays from one side of the pipe and an infrared detecting unit that detects infrared rays passing through the pipe from the other side of the pipe; and A cover coupled to the housing to close the internal space of the housing; The above sensor module, A non-contact temperature measurement sensor based on infrared absorption, which can accommodate pipes of various diameters, and wherein the infrared emitting portion is formed to emit infrared rays toward the center of the pipe.

2. In paragraph 1, The above sensor module is formed to be detachable from the housing, A non-contact temperature measurement sensor based on infrared absorption, wherein each of the above sensor modules has a mounting groove of various sizes into which a pipe is inserted.

3. In paragraph 2, A non-contact temperature measurement sensor based on infrared absorption, characterized in that the lower surface of the cover is provided with a pressing projection for fixing a pipe inserted into the mounting groove.

4. In paragraph 3, The above-mentioned pressing projection is a non-contact temperature measurement sensor based on infrared absorption, characterized in that it is made of an elastic material and its shape is changed to fit the diameter of the pipe.

5. In paragraph 3, A non-contact temperature measurement sensor based on infrared absorption, characterized in that the above-mentioned protrusion is formed to be replaceable according to the diameter of the pipe inserted into the above-mentioned mounting groove.

6. In paragraph 2, A non-contact temperature measurement sensor based on infrared absorption, characterized in that an air passage is formed between the pipe inserted into the above-mentioned mounting groove and the cover.

7. In paragraph 1, The above infrared emitting unit is provided with a plurality of units that emit infrared rays of different wavelengths, A non-contact temperature measurement sensor based on infrared absorption, characterized in that the above infrared detection unit is provided in accordance with the number of the above infrared emitting units.

8. In paragraph 7, If IPA (Isopropyl Alcohol) solution flows inside the above pipe, A non-contact temperature measurement sensor based on infrared absorption, characterized in that a plurality of the above infrared emitting parts each emit infrared rays having a wavelength of 1,450 nm ± 50 nm and infrared rays having a wavelength of 1,600 nm ± 50 nm.

9. A non-contact temperature measurement sensor according to any one of clauses 1 to 8; and A non-contact temperature measurement sensor system characterized by comprising a temperature calculation unit that calculates the temperature of a fluid using the sensing value measured by the temperature measurement sensor.

10. In paragraph 9, When multiple infrared emitters emit infrared rays of different wavelengths, A non-contact temperature measurement sensor system characterized in that the temperature calculation unit comprises a ratio calculation unit that calculates the sensing value of the infrared detection unit for each wavelength as a ratio; and a temperature storage unit that stores the temperature according to the ratio.

11. In paragraph 10, A non-contact temperature measurement sensor system characterized in that the above-mentioned ratio generating unit calculates the ratio of the average sensing values ​​of the infrared detection unit for each wavelength.

12. In paragraph 9, A non-contact temperature measurement sensor system characterized in that the wavelength of infrared rays emitted from the above infrared emitting portion is different depending on the type of fluid in the pipe.

13. In a sensor module for a non-contact temperature measurement sensor based on infrared absorption, It includes an infrared emitting unit that emits infrared rays from one side of the pipe, and an infrared detecting unit that detects infrared rays passing through the pipe from the other side of the pipe. The housing of the temperature measuring sensor is formed to be detachable and installed in the pipe so that the pipe passes through the volleyball space. A sensor module characterized in that it is formed to accommodate pipes of various diameters.

14. In paragraph 13, A sensor module characterized in that the above infrared emitting portion is formed to emit infrared rays toward the center of the pipe.

15. In paragraph 13, A sensor module characterized by further comprising: a mounting groove into which a pipe is inserted; and height-adjusting pieces that are detachably arranged along the inner surface of the mounting groove and have different thicknesses.

16. In paragraph 13, A sensor module characterized in that the above infrared emitting unit is provided with a plurality of units that emit infrared rays of different wavelengths, and the infrared detection unit is provided in accordance with the number of the above infrared emitting units.

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