Flow rate control device

Abstract

The present invention relates to a flow rate control device used in the semiconductor process field, whereby the speed of an inflowing fluid flowing into a flow unit can be increased to smoothly discharge contaminated gas inside a pipe while introducing a supply fluid, flowing into a body, via a flow path buried in the body, and thereby maintain the supply fluid at a high temperature and prevent the contaminated gas from accumulating and blocking the pipe. The flow rate control device according to a feature of the present invention comprises: a buried flow path that is buried inside a body and supplied with a supply fluid; a first chamber that communicates with the buried flow path and is provided in the body so as to be located inside the buried flow path; a second chamber that communicates with the first chamber and is provided in the body so as to be located inside the first chamber; and a flow unit that communicates with the second chamber and passes through the upper surface and the lower surface of the body so as to be located inside the second chamber, wherein the speed of inflowing fluid that flows into the flow unit is increased by the supply fluid injected into the flow unit via the second chamber.

Description

Flow control device

[0001] The present invention relates to a flow control device used in the semiconductor processing field.

[0002] A flow control device is a device that controls the flow rate of fluid introduced into a flow section by amplifying the velocity of the fluid introduced into the flow section using the supplied fluid as a power source.

[0003] The flow control device is configured such that the supply fluid is introduced through the supply section of the flow control device, and as the supply fluid flows along the flow path, it is injected into the flow path through the fluid injection section formed on the flow path.

[0004] The supply fluid supplied to the flow control device uses high-pressure compressed fluid, and as a result, the high-pressure supply fluid injected into the flow section flows along the inner surface of the flow section due to the Coanda effect. Therefore, the inner area of ​​the flow section is momentarily in a low-pressure state, and the fluid introduced through the flow section is amplified and flows out of the flow control device.

[0005] As above, the flow control device can amplify the velocity of the fluid without a fan, so not only is there no problem with vibration or heat generation caused by the motor, but there is also no power consumption in the flow control device itself.

[0006] These flow control devices are widely used as a technology to discharge pollutant gases in technical fields where pollutant gases frequently occur, especially in the semiconductor processing field.

[0007] Typically, flow control devices used in semiconductor processing applications are used in exhaust pipes that exhaust contaminant gases, such as fumes, from semiconductor processing chambers. Specifically, flow control devices generate suction to effectively exhaust contaminant gases within the process chamber.

[0008] If the contaminated gas in the process chamber is exhausted for a long period of time, the contaminated gas solidifies and accumulates inside the exhaust pipe, which causes the exhaust pipe to become blocked.

[0009] To prevent exhaust pipe clogging, the temperature inside the exhaust pipe must be maintained at a high temperature. Therefore, the exhaust pipe is typically heated directly using a heater jacket or similar device.

[0010] However, if the exhaust pipe is heated directly, a large number of heater jackets are required, which causes problems such as increased power consumption.

[0011] [Prior Art Literature]

[0012] [Patent Document]

[0013] (Patent Document 1) Korean Patent No. 10-0567433

[0014] (Patent Document 2) Korean Patent No. 10-0582235

[0015] The present invention has been devised to solve the above-mentioned problem, and the purpose of the present invention is to provide a flow control device that can amplify the velocity of the inflow fluid flowing into the flow portion to smoothly exhaust pollutant gases inside the pipe, and at the same time, can prevent the supply fluid flowing into the body at a high temperature by introducing the supply fluid through a flow path embedded in the body, thereby preventing the pipe from being clogged due to the accumulation of pollutant gases.

[0016] A flow control device according to one feature of the present invention comprises: a buried flow path portion that is provided to be buried inside a body and receives a supply fluid; a first chamber provided in the body so as to be in communication with the buried flow path portion and located inside the buried flow path portion; a second chamber provided in the body so as to be in communication with the first chamber and located inside the first chamber; and a flow portion formed by penetrating the upper and lower surfaces of the body so as to be in communication with the second chamber and located inside the second chamber; wherein the velocity of the inflow fluid introduced into the flow portion is amplified by the supply fluid injected into the flow portion through the second chamber.

[0017] In addition, it further includes a heating unit for heating the supply fluid; and a connecting passage unit for connecting the heating unit and the embedded passage unit so as to cause the supply fluid heated in the heating unit to flow into the embedded passage unit.

[0018] In addition, it further includes an insulating cover surrounding the heating unit and the body.

[0019] In addition, it further includes a temperature measuring unit for measuring the temperature of the above-mentioned connecting portion.

[0020] In addition, the above-mentioned buried flow path portion includes a main flow path communicating with the connecting flow path portion; a branch flow path provided along the circumference of the body from the main flow path; a first communication flow path communicating one end of the branch flow path with the first chamber; and a second communication flow path communicating the other end of the branch flow path with the first chamber.

[0021] In addition, the first communication channel and the second communication channel are arranged on opposite sides with respect to the center line of the body.

[0022] In addition, it further includes a first blocking wall that guides the supply fluid supplied from the first communication path to the first chamber in one direction; and a second blocking wall that allows the supply fluid supplied from the second communication path to flow from the second chamber in one direction.

[0023] In addition, the first chamber is mutually distinguished into a 1-1 chamber in which the supply fluid supplied through the first communication path flows by the first blocking wall, and a 1-2 chamber in which the supply fluid supplied through the second communication path flows by the second blocking wall.

[0024] In addition, the first guide part is provided in the first chamber and is formed to be inclined in the downstream direction of the flow part as it gets farther away from the first communication path, and the second guide part is provided in the first chamber and is formed to be inclined in the downstream direction of the flow part as it gets farther away from the second communication path.

[0025] In addition, the center lines of the first and second connecting passages are perpendicular to the center line of the fluid section.

[0026] In addition, it further includes a buried urea section cover coupled to the body to surround the buried urea section.

[0027] The body includes a first body having a first hollow space extending vertically in the center; a second body having a second hollow space extending vertically in the center and inserted into the first hollow space to be positioned inside the first hollow space and coupled; and a third body having a third hollow space extending vertically in the center and inserted into the second hollow space to be positioned inside the second hollow space and coupled; wherein an outer surface of a lower portion of the first body of the first body and an inner surface of the second hollow space form the first chamber, an inner surface of the second hollow space and an outer surface of an upper portion of the third body of the third body form the second chamber, and the first to third hollow spaces are connected to each other to form the fluid portion.

[0028] In addition, a branch flow path of the buried flow path portion is provided on the outer surface of the second body, and first and second communication flow paths communicating with the branch flow path are provided on one side and the other side of the second body, respectively.

[0029] In addition, it further includes a first pad heater that surrounds the second body and heats the second body; and a second pad heater that surrounds the lower part of the third body of the third body and heats the lower part of the third body.

[0030] In addition, the invention further includes a pad heater that surrounds the body and heats the body, and the embedded urea portion is located on the inside of the pad heater.

[0031] According to the flow control device of the present invention as described above, the following effects are achieved.

[0032] Since heated supply fluid is supplied into the body through the buried duct, heat loss is minimized and it can be introduced into the body, thereby preventing pollutant gases from being deposited in the pipe and enabling more effective exhaust.

[0033] By closing the buried duct section with a buried duct section cover, the buried duct section can be easily formed.

[0034] If the supply fluid passing through the heating unit through the temperature measuring unit and heater cutoff unit of the connecting section is excessively heated, it can be cut off, thereby allowing the supply fluid to be heated to an appropriate temperature.

[0035] By amplifying the supply fluid primarily and secondarily through the 1-1 chamber, the 1-2 chamber, and the 2nd chamber, a greater amplification of the velocity of the supply fluid can be achieved, and through this, the discharge velocity of the inflow fluid can be made faster.

[0036] Since the body and the heating part are closed from the outside by the insulating cover, the high temperature of the supply fluid flowing inside the body and the heating part can be maintained.

[0037] Since it is composed of a combination of the first body, the second body, and the third body, it is possible to easily manufacture complex-shaped chambers such as the first-first chamber, the first-second chamber, and the second chamber.

[0038] By separating and combining the first body, second body, and third body, maintenance of the flow control device (1) can be made easier.

[0039] As the first and second pad heaters surround and heat the body, the supply fluid flowing into the body is heated. Therefore, as the heated supply fluid and the inflow fluid flow through the flow section, the high temperature of the fluid prevents contaminant gases from accumulating within the pipe.

[0040] Fig. 1 is a perspective view of a flow control device of the present invention.

[0041] Figure 2 is a perspective view showing a state in which the insulation cover is removed from the flow control device of the present invention.

[0042] Figure 3 is a cross-sectional view of line AA' of Figure 2.

[0043] Figure 4 is a cross-sectional view of line BB' of Figure 2.

[0044] Figure 5 is an exploded perspective view of Figure 4.

[0045] Figure 6 is a side cross-sectional view of Figure 5.

[0046] Figure 7 is a planar cross-sectional view showing the flow of inflow fluid and supply fluid in the buried flow path section, first chamber, second chamber, and flow section of the flow control device of the present invention.

[0047] Fig. 8 is a perspective view showing a pad heater installed in the body of the flow control device of the present invention.

[0048] Fig. 9 is a perspective view illustrating the pad heater of Fig. 8.

[0049] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. The advantages and features of the present invention, as well as the methods for achieving them, will become clearer with reference to the embodiments described in detail below together with the attached drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in various forms. Rather, the embodiments introduced herein are provided to ensure that the disclosure is thorough and complete and to sufficiently convey the spirit of the present invention to those skilled in the art, and the present invention is defined solely by the scope of the claims. Like reference numerals throughout the specification refer to like elements.

[0050] The terminology used herein is for the purpose of describing embodiments only and is not intended to be limiting of the present invention. In this specification, the singular also includes the plural unless specifically stated otherwise. As used herein, the words "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components, steps, operations, and / or elements mentioned.

[0051] Additionally, since it is according to a preferred embodiment, the reference signs presented in the order of the description are not necessarily limited to that order.

[0052] In addition, the embodiments described herein will be described with reference to cross-sectional views and / or plan views, which are ideal exemplary drawings of the present invention. In the drawings, the thicknesses of films and regions are exaggerated for effective explanation of the technical contents. Accordingly, the shapes of the exemplary drawings may be modified due to manufacturing techniques and / or tolerances, etc. Accordingly, the embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes produced according to the manufacturing process. Accordingly, the regions illustrated in the drawings have schematic properties, and the shapes of the regions illustrated in the drawings are intended to illustrate specific shapes of regions of the device and are not intended to limit the scope of the invention.

[0053] In describing various embodiments, components that perform the same function will be given the same names and reference numbers for convenience, even if the embodiments differ. Furthermore, configurations and operations already described in other embodiments will be omitted for convenience.

[0054] Hereinafter, the flow control device (1) of the present invention will be described with reference to FIGS. 1 to 9.

[0055] FIG. 1 is a perspective view of a flow control device of the present invention, FIG. 2 is a perspective view showing a state in which an insulation cover is removed from the flow control device of the present invention, FIG. 3 is a cross-sectional view taken along line AA' of FIG. 2, FIG. 4 is a cross-sectional view taken along line BB' of FIG. 2, FIG. 5 is an exploded perspective view of FIG. 4, FIG. 6 is a side cross-sectional view of FIG. 5, FIG. 7 is a plan cross-sectional view showing the flow of inflow fluid and supply fluid in a buried flow path section, a first chamber, a second chamber, and a flow section of the flow control device of the present invention, FIG. 8 is a perspective view showing a pad heater installed on a body of the flow control device of the present invention, and FIG. 9 is a perspective view showing the pad heater of FIG. 8.

[0056] As shown in FIGS. 1 to 9, the flow control device (1) of the present invention comprises: a heating unit (20) for heating the supply fluid supplied therein; a body (10); a connection flow path (30) for connecting the heating unit (20) and the body (10); an embedded flow path (250) provided to be embedded in the body (10) so as to be connected to the connection flow path (30) and to receive the supply fluid; a first chamber (500) provided in the body (10) so as to be connected to the embedded flow path (250) and located on the inside of the embedded flow path (250); a second chamber (600) provided in the body (10) so as to be connected to the first chamber (500) and located on the inside of the first chamber (500); and a second chamber (600) provided in the body (10) so as to be connected to the second chamber (600) and located on the inside of the second chamber (600). It can be configured to include a fluid section (800) formed by penetrating the upper and lower surfaces, a buried flow section cover (260) coupled to the body (10) to surround the buried flow section (250), an insulating cover (40) that surrounds the heating section (20) and the body (10), and a temperature measuring section (31) that measures the temperature of the connecting flow section (30).

[0057] The heating unit (20) has a function of supplying a supply fluid to the inside of the heating unit (20), heating the supply fluid, and then flowing the supply fluid to the body (10).

[0058] The heating unit (20) may be configured to include an inlet (21) that receives a supply fluid from an external supply unit (not shown), a heating unit body (22) that is connected to the inlet (21), a heater coil (23) provided inside the heating unit body (22), an electric cable insertion unit (24) that is connected to the heating unit body (22) and into which an electric cable (not shown) is inserted, and a heater cutoff unit (25) that stops the operation of the heater coil (23) when the temperature value measured from the temperature measurement unit (31) exceeds a limit value.

[0059] The interior of the heating body (22) is provided with an empty space.

[0060] The inlet (21) is provided on the lower front surface of the heating body (22).

[0061] The connecting duct (30) functions to connect the heating duct (20) and the buried duct (250) so that the heated supply fluid from the heating duct (20) flows to the buried duct (250).

[0062] The connecting euro part (30) is provided on the upper rear surface of the heating part body (22).

[0063] As described above, as the positions of the inlet (21) and the connecting flow path (30) are arranged, the supply fluid introduced into the empty space inside the heating body (22) through the inlet (21) flows through a long flow distance to the outside of the heating body (22) through the connecting flow path (30). Therefore, the supply fluid introduced into the heating body (22) from the external supply through the inlet (21) is heated by the heater coil (23) and then introduced into the body (10) through the connecting flow path (30).

[0064] An electric cable that supplies electricity to the heater coil (23) and the temperature measuring unit (31) is inserted and placed in the electric cable insertion section (24).

[0065] The heater cutoff unit (25) has a preset limit value. Accordingly, when the temperature value measured from the temperature measuring unit (31) exceeds the limit value, the heater cutoff unit (25) cuts off the power supplied to the heater coil (23), thereby stopping the operation of the heater coil (23).

[0066] The body (10) is connected to the heating body (22) of the heating unit (20) by the connecting euro portion (30).

[0067] The body (10) may be configured to include a first body (100) having a first hollow (110) that penetrates vertically in the center, a second body (200) having a second hollow (210) that penetrates vertically in the center and is inserted into the inside of the first hollow (110) and coupled so as to be positioned inside the first hollow (110), and a third body (300) having a third hollow (310) that penetrates vertically in the center and is inserted into the inside of the second hollow (210) and coupled so as to be positioned inside the second hollow (210).

[0068] The first body (100) has a cylindrical shape with an overall circular cross-section.

[0069] The center of the first body (100) is provided with a first hollow (110) that penetrates vertically.

[0070] The outer surface of the first body (100) is provided with a first protruding surface (140) that protrudes in the outer direction of the first body (100).

[0071] The first body (100) can be divided into a first body upper portion (120) formed by the upper region of the first body (100) and a first body lower portion (130) formed by the lower region of the first body (100).

[0072] The first protruding surface (140) is located between the first body upper portion (120) and the first body lower portion (130), and thus, the first protruding surface (140) forms a boundary between the first body upper portion (120) and the first body lower portion (130).

[0073] The lower part (130) of the first body is inserted into the second hollow (210) of the second body (200) when the first body (100) and the second body (200) are connected vertically. In this case, the lower surface of the first protruding surface (140) comes into contact with the upper surface of the second protruding surface (220) of the second body (200), and through this, only the lower part (130) of the first body can be easily inserted into the second hollow (210).

[0074] When the first chamber (500) is formed by the first body (100) and the second body (200), the first protruding surface (140) blocks the upper part of the first chamber (500).

[0075] A first blocking wall (150) is formed to protrude outwardly from the first body lower portion (130) to guide the supply fluid in one direction inside the first-1 chamber (510) of the first body lower portion (130), and a second blocking wall (160) is formed to protrude outwardly from the first body lower portion (130) to guide the supply fluid in one direction inside the first-2 chamber (520).

[0076] The first barrier wall (150) is formed to extend to the lower portion of the first protruding surface (140).

[0077] The outward protrusion length of the first blocking wall (150) is shorter than the outward protrusion length of the first protruding surface (140). Therefore, the lower surface of the first blocking wall (150) does not contact the upper surface of the second protruding surface (220), and through this, the first blocking wall (150) does not get caught on the second protruding surface (220), and the first body (100) is easily inserted into the second hollow (210) of the second body (200), so that the first body (100) and the second body (200) are vertically connected.

[0078] The first barrier wall (150) has a semicircular opening shape identical to the shape of one side of the first communication passage (254).

[0079] In addition, the first blocking wall (150) is arranged so that the center point of the first communication channel (254) is concentric with the center point of the straight section of the first blocking wall (150) having a semicircular opening shape. Accordingly, the supply fluid flowing into the 1-1 chamber (510) through the first communication channel (254) is blocked by the first blocking wall (150) and guided in one direction.

[0080] A first guide part (151) is provided at the lower part of the first barrier wall (150).

[0081] The first guide portion (151) is formed to slope downwards in the direction in which the supply fluid flows from the first blocking wall (150) to the first-1 chamber (510). Therefore, the first guide portion (151) functions to guide the supply fluid introduced into the first-1 chamber (510) through the first communication path (254) to the first-1 gap (511) formed at the bottom of the first-1 chamber (510).

[0082] The second blocking wall (160) is formed to extend to the lower part of the first protruding surface (140) on the opposite side of the first blocking wall (150).

[0083] The outward protrusion length of the second blocking wall (160) is shorter than the outward protrusion length of the first protrusion surface (140). Therefore, the lower surface of the second blocking wall (160) does not contact the upper surface of the second protrusion surface (220), and as a result, the second blocking wall (160) does not get caught on the second protrusion surface (220), and the first body (100) is easily inserted into the second hollow (210) of the second body (200), so that the first body (100) and the second body (200) are connected vertically.

[0084] The second barrier wall (160) has a semicircular opening shape identical to the shape of one side of the second communication passage (255).

[0085] In addition, the second blocking wall (160) is arranged so that the center point of the second communication passage (255) is concentric with the center point of the straight section of the second blocking wall (160) having a semicircular opening shape. Accordingly, the supply fluid flowing into the first-second chamber (520) through the second communication passage (255) is blocked by the second blocking wall (160) and guided in one direction.

[0086] A second guide part (161) is provided at the lower part of the second barrier wall (160).

[0087] The second guide portion (161) is formed to slope downwards in the direction in which the supply fluid flows from the first-second chamber (520) to the second blocking wall (160). Therefore, the second guide portion (161) functions to guide the supply fluid introduced into the first-second chamber (520) through the second communication channel (255) to the first-second gap (521) formed at the bottom of the first-second chamber (520).

[0088] The first blocking wall (150) and the second blocking wall (160) can be placed diagonally opposite to each other with respect to the center line of the flow control device (1).

[0089] As an example, the first blocking wall (150) may be placed on the left rear side based on the central axis of the flow control device (1), and the second blocking wall (160) may be placed on the right front side based on the central axis of the flow control device (1).

[0090] The supply fluid supplied to the 1-1 chamber (510) and the 1-2 chamber (520) through the first communication passage (254) and the second communication passage (255), respectively, can flow in one direction (clockwise in FIG. 7) inside the 1-1 chamber (510) and the 1-2 chamber (520) respectively by the first blocking wall (150) and the second blocking wall (160).

[0091] The center lines of the first and second connecting passages (254, 255) are perpendicular to the center line of the moving part (800).

[0092] The second body (200) has a cylindrical shape with an overall circular cross-section.

[0093] The second body (200) is inserted into the first hollow (110) so as to be positioned inside the first body (100) and is vertically connected to the first body (100).

[0094] The upper inner side of the second body (200) is provided with a second protruding surface (220) that protrudes inward.

[0095] The second protruding surface (220) catches the first protruding surface (140) of the first body (100), thereby preventing the upper part of the first body (120) from being inserted into the second hollow (210).

[0096] The lower inner side of the second body (200) is provided with a third protruding surface (230) protruding inward.

[0097] The third protrusion (230) prevents the third body lower part (330) from being inserted into the third hollow by allowing the third body upper part (320) of the third body (300) to be caught.

[0098] The second body (200) is provided with a second hollow (210) that penetrates vertically at the center. Therefore, when the first body (100) and the second body (200) are combined, the first hollow (110) and the second hollow (210) are connected.

[0099] A buried mileage section (250) is provided at the front of the second body (200).

[0100] The buried euro section (250) is connected to the connecting euro section (30) and is buried inside the body (10), i.e., the second body (200).

[0101] The landfill duct (250) may be configured to include a main duct (251) communicating with the connecting duct (30), a branch duct (253) provided along the perimeter of the body (10) from the main duct (251), a first communication duct (254) communicating one end of the branch duct (253) with the first chamber (500), and a second communication duct (255) communicating the other end of the branch duct (253) with the first chamber (500).

[0102] A branch flow path (253) of a buried flow path (250) is provided on the outer surface of the second body (200).

[0103] On one side and the other side of the second body (200), first and second communication channels (254, 255) communicating with the branch channel (253) are respectively provided. That is, the first communication channel (254) is provided on the left side of the second body (200), and the second communication channel (255) is provided on the right side of the second body (200).

[0104] The main euro (251) is formed in the upper and lower direction of the second body (200) and is formed to be open in the forward direction of the second body (200).

[0105] The buried guage section cover (260) covers the branch guage section (253), and as a result, the main guage section (251) has a shape that is open toward the front of the second body (200), i.e., the body (10). Accordingly, the connection guage section (30) is connected to the main guage section (251).

[0106] The center line of the main euro (251) is formed to be perpendicular to the center line of the connecting euro portion (30), so that the main euro (251) has a length in the vertical direction in front of the body (10), i.e., the second body (200).

[0107] The branch euro (253) is formed along the perimeter of the body (10), i.e., the second body (200), from the front to the rear of the body (10).

[0108] The center of the upper part of the branch euro (253) is connected to the lower part of the main euro (251).

[0109] One end of the branch flow path (253) is connected to the first communication flow path (254). Therefore, one end of the branch flow path (253) is located on the left side of the body (10), i.e., on the left side of the second body (200).

[0110] The other end of the branch flow path (253) is connected to the second communication flow path (255). Therefore, the other end of the branch flow path (253) is located on the right side of the body (10), i.e., on the right side of the second body (200).

[0111] These branching euros (253) are formed to extend only from the front of the second body (200) to the vicinity of the center line connecting the left and right sides of the second body (200) so as to have a cross-section that is roughly more like a semicircle.

[0112] The first communication passage (254) has an outer end connected to one end of the branch passage (253) and an inner end connected to one side of the first chamber (500), i.e., the 1-1 chamber (510), thereby functioning to connect the branch passage (253) and the 1-1 chamber (510).

[0113] This first communication path (254) is formed to be embedded in the left side of the body (10), i.e., the left side inside of the second body (200).

[0114] The second communication passage (255) has an outer end connected to one end of the branch passage (253) and an inner end connected to the other end of the first chamber (500), that is, the 1-2 chamber (520), thereby functioning to connect the branch passage (253) and the 1-2 chamber (520).

[0115] This second connecting passage (255) is formed to be embedded in the right side of the body (10), i.e., the right side inside the second body (200).

[0116] The buried flow path (250), i.e., the main flow path (251), the branch flow path (253), the first communication flow path (254) and the second communication flow path (255), are formed in a concave groove shape along the periphery of the second body (200) and are closed by the buried flow path cover (260) to have a form buried inside the body (10), i.e., the second body (200).

[0117] As described above, the buried flow path section (250), i.e., the main flow path (251), the branch flow path (253), the first communication flow path (254) and the second communication flow path (255) are formed by digging into a groove shape and closed by the buried flow path section cover (260), so that the buried flow path section (250) can be easily formed in a buried shape in the manufacturing process of the body (10), i.e., the second body (200).

[0118] The outer surface of the lower part of the first body (130) and the inner surface of the second body (200) form the first chamber (500).

[0119] The lower part of the outer surface of the lower part of the first body (130) and the lower part of the inner surface of the second body (200) are spaced apart from each other to form a first gap (not shown in the drawing). Accordingly, a first gap is formed in the lower part of the first chamber (500), and this first gap is connected to the second chamber (600).

[0120] The first gap may be composed of a first-first gap (511) and a first-second gap (521).

[0121] To explain in more detail, the front space of the first blocking wall (150) among the outer surfaces of the lower part (130) of the first body and the inner surface of the second body (200) form a 1-1 chamber (510). In this case, the lower part of the first blocking wall (150) and the inner surface of the second body (200) are spaced apart from each other to form a 1-1 gap (511).

[0122] In addition, the rear space of the second blocking wall (160) among the outer surfaces of the lower portion (130) of the first body and the inner surface of the second body (200) form the first-second chamber (520). In this case, the lower portion of the second blocking wall (160) and the inner surface of the second body (200) are spaced apart from each other to form the first-second gap (521).

[0123] The first-first gap (511) and the first-second gap (521) as described above are connected to the second chamber (600).

[0124] The third body (300) is inserted into the second hollow (210) so as to be positioned inside the second body (200) and is vertically connected to the first body (100) and the second body (200).

[0125] The third body (300) is provided with a third hollow (310) that penetrates vertically at the center. Therefore, when the first body (100), the second body (200), and the third body (300) are combined, the first hollow (110), the second hollow (210), and the third hollow (310) are connected to each other to form a moving part (800).

[0126] The outer surface of the third body (300) is provided with a fourth protruding surface (340) that protrudes in the outer direction of the third body (300).

[0127] The third body (300) can be divided into a third body upper portion (320) formed by the upper region of the third body (300) and a third body lower portion (330) formed by the lower region of the third body (300).

[0128] The fourth protrusion surface (340) is located between the third body upper portion (320) and the third body lower portion (330), and through this, the third protrusion surface (230) forms a boundary between the third body upper portion (320) and the third body lower portion (330).

[0129] The upper part (320) of the third body is inserted into the second hollow part (210) of the second body (200) when the third body (300) and the second body (200) are connected vertically. In this case, the upper surface of the fourth protruding surface (340) comes into contact with the lower surface of the third protruding surface (230) of the second body (200), and through this, only the upper part (320) of the third body can be easily inserted into the second hollow part (210).

[0130] The uppermost part of the third body (320) is provided with a tapered portion (321) that is continuously tapered so as to protrude in the outer direction of the third body (300) along the outer circumference of the third body (320).

[0131] Since the tapered portion (321) is provided at the top of the third body upper portion (320), the upper surface of the tapered portion (321) forms the upper surface of the third body upper portion (320).

[0132] The upper surface of the tapered portion (321) (i.e., the upper portion of the third body (320)) and the inner surface of the second body (200) are spaced apart from each other to form a second gap (610).

[0133] A first inclined surface (331) and a second inclined surface (333) are formed on the inner side of the upper part of the third body (320).

[0134] The first slope (331) is formed to slope inward from the top to the bottom of the third body (320).

[0135] The second slope (333) is formed to extend downward from the first slope (331) and is formed to slope outward as it goes downward.

[0136] These first slope (331) and second slope (333) form part of the inner surface of the fluid section (800) when the first body (100), the second body (200), and the third body (300) are combined, thereby imparting a Coanda effect to the fluid.

[0137] The first chamber (500) is connected to the buried duct section (250) and is located inside the buried duct section (250).

[0138] The first chamber (500) is formed by the outer surface of the lower part of the first body (130) and the inner surface of the second body (200). In other words, the first chamber (500) is formed by a space formed by the inner surface of the second hollow (210) and the outer surface of the lower part of the first body (130).

[0139] This first chamber (500) is connected to the second chamber (600) through the first gap.

[0140] A first gap is formed between the lower part of the inner surface of the second hollow (210) and the lower part of the outer surface of the lower part of the first body (130) by being spaced apart from each other.

[0141] The upper part of the first chamber (500) is blocked by the first protruding surface (140), and the lower part of the first chamber (500) is connected to the second chamber (600) by the first gap.

[0142] The first chamber (500) is mutually distinguished into a 1-1 chamber (510) in which the supply fluid supplied through the first communication path (254) by the first blocking wall (150) flows, and a 1-2 chamber (520) in which the supply fluid supplied through the second communication path (255) by the second blocking wall (160) flows.

[0143] A 1-1 gap (511) is formed on the inner lower part of the 1-1 chamber (510).

[0144] The 1-1 gap (511) is formed along the inner lower part of the 1-1 chamber (510).

[0145] The 1-1 gap (511) functions to connect the 1-1 chamber (510) and the 2nd chamber (600).

[0146] A first-second gap (521) is formed on the inner lower part of the first-second chamber (520).

[0147] The first-second gap (521) is formed along the inner lower part of the first-second chamber (520).

[0148] The first-second gap (521) functions to connect the first-second chamber (520) and the second chamber (600).

[0149] The 1-1 chamber (510) and the 1-2 chamber (520) are formed in a ring shape with a cross-section having a radius smaller than a semicircle.

[0150] The direction of the supply fluid flowing in the 1-1 chamber (510) and the 1-2 chamber (520) is the same.

[0151] As an example, as illustrated in FIG. 7, the supply fluids flowing in the 1-1 chamber (510) and the 1-2 chamber (520) both flow in one direction, i.e., clockwise.

[0152] In the 1-1 chamber (510), a first guide part (151) is provided that is formed to be inclined toward the downstream part of the flow part (800) as it gets farther away from the first communication path (254).

[0153] The first guide section (151) has the function of guiding the supply fluid flowing in the 1-1 chamber (510) toward the lower direction of the 1-1 chamber (510).

[0154] As described above, as the supply fluid is guided downwardly in the 1-1 chamber (510), the supply fluid can be smoothly injected into the 2nd chamber (600) through the 1-1 gap (511) even in an area far from the 1st communication path (254). Therefore, regardless of the distance from the 1st communication path (254), a relatively uniform fluid pressure can be formed inside the 1-1 chamber (510), and through this, the amplification of the fluid velocity discharged to the fluid section (800) can be achieved more effectively.

[0155] As the first guide section (151) is provided, the vertical length of the first-1 chamber (510) becomes longer as it moves away from the first communication path (254).

[0156] Accordingly, the vertical length of the 1-1 chamber (510) that is relatively far from the first communication path (254) is formed longer than the vertical length of the 1-1 chamber (510) that is relatively close to the first communication path (254).

[0157] In the 1st-2nd chamber (520), a second guide part (161) is provided that is formed to be inclined toward the downstream part of the flow part (800) as it gets farther away from the second communication path (255).

[0158] The second guide section (161) has the function of guiding the supply fluid flowing through the first-second chamber (520) toward the lower direction of the first-second chamber (520).

[0159] As described above, as the supply fluid is guided downwardly in the first-second chamber (520), the supply fluid can be smoothly injected into the second chamber (600) through the first-second gap (521) even in an area far from the second communication path (255). Therefore, regardless of the distance from the second communication path (255), a relatively uniform fluid pressure can be formed inside the first-second chamber (520), and through this, the amplification of the fluid velocity discharged to the flow section (800) can be more effectively achieved.

[0160] As the second guide section (161) is provided, the vertical length of the first-second chamber (520) becomes longer as it moves away from the second communication path (255).

[0161] Accordingly, the vertical length of the first-second chamber (520) that is relatively far from the second communication path (255) is formed longer than the vertical length of the first-second chamber (520) that is relatively close to the second communication path (255).

[0162] The 1-1 chamber (510) and the 1-2 chamber (520) can be arranged diagonally symmetrically with respect to the front-rear center line of the flow control device (1).

[0163] The second chamber (600) is provided in the body (10) so as to be located inside the first chamber (500).

[0164] The second chamber (600) is formed by the inner surface of the second hollow (210) of the second body (200) and the outer surface of the upper portion (320) of the third body. In other words, the second chamber (600) is formed by a space formed by the inner surface of the second hollow (210) and the outer surface of the upper portion (320) of the third body. This second chamber (600) is connected to the first chamber (500) and the moving part (800).

[0165] The second chamber (600) has a ring-shaped cross-section.

[0166] The second chamber (600) is communicated with the first chamber (500) through the first gap and with the fluid part (800) through the second gap (610).

[0167] The lower part of the first chamber (500) and the lower part of the second chamber (600) are connected by the first gap, and the upper part of the second chamber (600) and the side of the moving part (800) are connected by the second gap (610).

[0168] The fluid section (800) is formed by the communication of the first hollow section (110), the second hollow section (210), and the third hollow section (310). Therefore, the fluid section (800) is formed to penetrate vertically from the center of the flow control device (1).

[0169] The fluid section (800) functions as a passage through which the inflowing fluid flows.

[0170] The upper and lower parts of the fluid section (800) can be connected to the upper pipe and the lower pipe, respectively.

[0171] The inflow fluid introduced through the upper pipe can flow through the interior of the flow section (800) and then be discharged through the lower pipe.

[0172] In other words, since the fluid section (800) is connected between the upper and lower pipes, the flow control device (1) can control the speed of the flow rate of the inflow fluid flowing through the upper and lower pipes.

[0173] The insulating cover (40) surrounds the heating unit (20) and the body (10). Therefore, the heating unit (20) and the body (10) are provided inside the insulating cover (40).

[0174] At the lower front portion of the insulation cover (40), the inlet portion (21) of the heating portion (20) is exposed to the outside and protrudes.

[0175] An electric cable insertion portion (24) is provided on the upper portion of the inlet portion (21) at the front of the insulation cover (40). An electric cable is inserted into the interior of the insulation cover (40) through this electric cable insertion portion (24).

[0176] Two electric cable insertion portions (24) may be provided as shown in Fig. 1, and an electric cable supplying power to the heating portion (20) may be inserted into one of the two electric cable insertion portions (24), and an electric cable supplying power to the temperature measuring portion (31) may be inserted into the remaining one of the two electric cable insertion portions (24).

[0177] An upper cover part (43) may be provided on the front upper portion of the insulating cover (40). The upper cover part (43) functions to cover the upper portion of the heating part (20) by covering the heating part insertion hole (not shown) formed on the front upper portion of the insulating cover (40) after the heating part (20) is positioned inside the insulating cover (40).

[0178] The insulating cover (40) is fastened to the body (10) by a cover connecting portion (41) provided in the heating portion (20).

[0179] The cover connecting portion (41) is provided on the left and right sides of the heating portion (20) and is formed to be bent so as to come into contact with the inner surface of the insulating cover (40).

[0180] Bolts, etc. are inserted into the cover connecting portion (41), and through this, the cover connecting portion (41) and the insulating cover (40) are connected. Accordingly, the body (10), the heating portion (20), and the insulating cover (40) are mutually connected.

[0181] Hereinafter, the flow of fluid inside the flow control device (1) of the present invention having the aforementioned configuration will be described.

[0182] The supply fluid mentioned in the following description is a high-pressure fluid that is supplied to the heating unit (20) at high pressure from an external supply unit, then heated and flows into the body (10) through the connecting passage unit (30).

[0183] High pressure supply fluid is supplied from an external supply unit to the inlet unit (21) of the heating unit (20).

[0184] The supply fluid supplied to the inlet (21) flows into the heating body (22), is heated by the heat generated from the heater coil (23), and then flows into the connecting passage (30).

[0185] The supply fluid flowing into the connecting section (30) flows into the embedded section (250) of the body (10).

[0186] The supply fluid flowing through the main flow path (251) of the landfill flow path (250) branches off through the branch flow path (253) and then flows into the first communication flow path (254) and the second communication flow path (255), respectively.

[0187] As illustrated in Fig. 7, the supply fluid flowing through the first communication channel (254) flows into the 1-1 chamber (510), and then is blocked by the first blocking wall (150) inside the 1-1 chamber (510) and cannot flow counterclockwise, but flows in one direction, i.e., clockwise.

[0188] The fluid flows along the 1-1 chamber (510) in a clockwise direction inside the 1-1 chamber (510), and at the same time flows to the lower part of the 2nd chamber (600) through the 1-1 gap (511) formed at the lower part inside the 1-1 chamber (510). In this case, the supply fluid is guided by the first guide part (151), so that the injection from the 1-1 chamber (510) to the 2nd chamber (600) is smoothly performed.

[0189] The supply fluid flowing into the second chamber (600) in this way flows along the ring-shaped second chamber (600) in the same clockwise direction as the flow direction inside the 1-1 chamber (510).

[0190] The supply fluid flowing through the second communication channel (255) flows into the 1st-2nd chamber (520), and then is blocked by the second blocking wall (160) inside the 1st-2nd chamber (520) and cannot flow counterclockwise, but flows in one direction, i.e., clockwise.

[0191] The fluid flows along the 1-2 chamber (520) in a clockwise direction inside the 1-2 chamber (520), and at the same time flows to the lower part of the 2nd chamber (600) through the 1-2 gap (521) formed at the lower part inside the 1-2 chamber (520). In this case, the supply fluid is guided by the second guide part (161), so that the injection from the 1-2 chamber (520) to the 2nd chamber (600) is smoothly performed.

[0192] The supply fluid flowing into the second chamber (600) in this way flows along the ring-shaped second chamber (600) in the same clockwise direction as the flow direction inside the first-second chamber (520).

[0193] The supply fluid flowing from each of the 1-1 chamber (510) and the 1-2 chamber (520) to the second chamber (600) flows along the second chamber (600) and at the same time flows into the flow section (800) through the second gap (610) formed on the inner upper portion of the second chamber (600).

[0194] The supply fluid injected into the fluid section (800) flows in the inward direction of the fluid section (800) along the first inclined surface (331), and then flows in the outward direction of the fluid section (800) along the second inclined surface (333).

[0195] As the supply fluid flows along the second slope (333), the supply fluid flows at a very high velocity due to the Coanda effect, and the central region of the flow section (800) becomes momentarily under low pressure. Accordingly, after the inflow fluid is quickly introduced through the upper pipe, the velocity of the inflow fluid and the supply fluid are accelerated and discharged through the lower pipe at a very high velocity.

[0196] As described above, the flow control device (1) can amplify the velocity of the inflow fluid by amplifying the velocity of the supply fluid and the inflow fluid by the Coanda effect and discharging them to the outside of the flow control device (1) through the flow section (800). That is, the flow control device (1) amplifies the velocity of the inflow fluid that has been introduced into the flow section (800) by the supply fluid that has been injected into the flow section (800) through the second chamber (600).

[0197] Below, the amplification of the velocity of a fluid by the Coanda effect is described in detail through FIGS. 3, 4, and 7.

[0198] As described above, the supply fluid supplied into the interior of the 1-1 chamber (510) and the 1-2 chamber (520) through the first communication passage (254) and the second communication passage (255) flows into the 2nd chamber (600) through the 1-1 gap (511) and the 1-2 gap (521) while flowing inside the 1-1 chamber (510) and the 1-2 chamber (520), respectively.

[0199] The supply fluid flowing into the 1-1 gap (511) is guided by the first guide part (151) to flow to the lower part of the 1-1 chamber (510), and then flows from the lower part to the upper part of the second chamber (600). In this process, the supply fluid flows along the inner surface of the 1-1 chamber (510) and the outer surface of the second chamber (600), so that the velocity of the supply fluid is first amplified by the Coanda effect.

[0200] The supply fluid flowing into the first-second gap (521) is guided by the second guide part (161) to flow to the lower part of the first-second chamber (520), and then flows from the lower part to the upper part of the second chamber (600). In this process, the supply fluid flows along the inner surface of the first-second chamber (520) and the outer surface of the second chamber (600), so that the velocity of the supply fluid is first amplified by the Coanda effect.

[0201] As above, the first amplified supply fluids flow into the interior of the second chamber (600) and flow into the second chamber (600) through the second gap (610).

[0202] The supply fluid flowing into the second gap (610) flows from the bottom to the top of the second chamber (600) and then flows into the flow section (800). In this process, the supply fluid flows along the inner surface of the second chamber (600) and the first and second inclined surfaces (331, 333) of the flow section (800), so that the velocity of the supply fluid is amplified twice by the Coanda effect.

[0203] In this way, the supply fluid supplied to the 1-1 and 1-2 chambers (520) through the 1st and 2nd connecting passages (254, 255) has its velocity amplified firstly by the Coanda effect when it flows from the 1-1 and 1-2 chambers (520) to the 2nd chamber (600), and when it flows from the 2nd chamber (600) to the fluid section (800), its velocity is amplified secondarily by the Coanda effect.

[0204] The secondarily amplified supply fluid is discharged to the outside of the flow control device (1) at a very high speed along the lower part of the flow section (800).

[0205] The flow control device (1) of the present invention having the above-described configuration can cause the flow of the supplied fluid to flow equally in one direction inside the 1-1 chamber (510) and the 1-2 chamber (520) even without eccentrically arranging the 1st and 2nd communication channels (254, 255) through the 1st and 2nd blocking walls (150, 160).

[0206] In this way, the occurrence of turbulence within the 1-1 chamber (510), the 1-2 chamber (520), and the 2nd chamber (600) can be minimized, thereby ensuring a high pressure of the supply fluid injected into the flow section (800). Accordingly, the velocity of the fluid discharged to the lower portion of the flow section (800) can be amplified to a higher degree than in a conventional flow control device.

[0207] In addition, the downward flow can be smoothly induced in the first and second chambers (510 and 520) by the first and second guide sections (151, 161), respectively, and through this, a uniform fluid pressure can be generated in the first and second chambers (510 and 520), thereby allowing the amplified fluid to be discharged at a high velocity in the fluid section (800).

[0208] The first-first gap (511) may be formed to have a vertical length that becomes longer the farther away it is from the first communication passage (254). As described above, since the vertical length of the first-first gap (511) becomes longer the farther away it is from the first communication passage (254), even when it is farther away from the first communication passage (254), a large amount of supply fluid can be injected into the second chamber (600) through the first-first gap (511). Therefore, a uniform fluid pressure can be formed inside the first-first chamber (510) and the second chamber (600).

[0209] The first-second gap (521) may be formed to have a vertical length that becomes longer as it gets further away from the second communication passage (255). As described above, since the vertical length of the first-second gap (521) becomes longer as it gets further away from the second communication passage (255), even when it gets further away from the second communication passage (255), a large amount of supply fluid can be injected into the second chamber (600) through the first-second gap (521). Accordingly, a uniform fluid pressure can be formed inside the first-second chamber (520) and the second chamber (600).

[0210] The flow control device (1) can be configured such that the first body (100), the second body (200), and the third body (300) can be detachably coupled to each other.

[0211] As an example, a screw thread is provided on one of the inner surface of the second hollow (210) of the second body (200) and the outer surface of the first body (100), and a female screw is provided on the other, so that the first body (100) and the second body (200) are joined by screw coupling, so that the first body (100) and the second body (200) can be joined to each other in a detachable manner.

[0212] In addition, a screw thread is provided on one of the inner surface of the second hollow (210) of the second body (200) and the outer surface of the third body (300), and a female screw is provided on the other, so that the second body (200) and the third body (300) are joined by screw coupling, so that the second body (200) and the third body (300) can be joined to each other in a detachable manner.

[0213] As shown in FIGS. 8 and 9, the flow control device (1) of the present invention can further include a pad heater (900) that surrounds the body (10) and heats the body (10).

[0214] The pad heater (900) may be configured to include a first pad heater (910) that surrounds the second body (200) and heats the second body (200), and a second pad heater (920) that surrounds the third body (300) and heats the third body (300).

[0215] The first pad heater (910) has a cross-section in the shape of a continuous ring.

[0216] First pad heater connection portions (915) are provided at both ends of the first pad heater (910), so that a pair of first pad heater connection portions (915) are provided on the first pad heater (910).

[0217] Each of the pair of first pad heater connections (915) is provided with a first connection bolt hole (916).

[0218] The first pad heater (910) wraps around the outer surface of the second body (200), and then the first connecting bolt (917) is inserted into the first connecting bolt hole (916) provided in each of the pair of first pad heater connecting parts (915) to fasten the first pad heater (910), thereby easily wrapping around the outer surface of the second body (200) and installing the first pad heater (910).

[0219] As above, when the first pad heater (910) wraps around the second body (200), a gap is formed between the pair of first pad heater connecting portions (915), and this gap does not wrap around the second body (200). Therefore, the main passage (251) of the embedded passage section (250) is positioned between the pair of first pad heater connecting portions (915).

[0220] That is, the main euro (251) is not covered by the first pad heater (910) due to the separation space formed between the pair of first pad heater connections (915).

[0221] As above, since the main euro (251) is not covered by the first pad heater (910), the main euro (251) is opened forward, through which the main euro (251) and the connection euro portion (30) can be easily connected.

[0222] The first pad heater (910) may be a surface heater that generates heat in a surface when power is applied.

[0223] When power is applied to the first pad heater (910), the first pad heater (910) is heated, and as a result, the second body (200) wrapped around the first pad heater (910) is heated as a whole.

[0224] The second pad heater (920) has a cross-section in the shape of a continuous ring.

[0225] Second pad heater connection portions (925) are provided at both ends of the second pad heater (920), and thus, a pair of second pad heater connection portions (925) are provided on the second pad heater (920).

[0226] Each of the pair of second pad heater connections (925) is provided with a second connection bolt hole (926).

[0227] The second pad heater (920) wraps around the outer surface of the lower part of the third body (330), and then a second connecting bolt (927) is inserted into the second connecting bolt hole (926) provided in each of a pair of second pad heater connecting parts (925) to fasten the second pad heater (920), thereby easily wrapping around the outer surface of the lower part of the third body (330) and installing the second pad heater (920).

[0228] As above, when the second pad heater (920) wraps around the lower part of the third body (330), a gap space is formed between a pair of second pad heater connecting parts (925), and this gap space does not wrap around the lower part of the third body (330).

[0229] The second pad heater (920) may be a surface heater that generates heat in a surface when power is applied.

[0230] When power is applied to the second pad heater (920), the second pad heater (920) is heated, and as a result, the third body (300) wrapped around the second pad heater (920) is heated as a whole.

[0231] As described above, when the first and second pad heaters (910, 920) surround the body (10) and heat the body (10), the supply fluid introduced into the body (10) is heated. Therefore, when the heated supply fluid and the inflow fluid flow through the flow portion (800), the high temperature of the fluid can prevent pollutant gases from being deposited in the pipe.

[0232] The pad heater (900), i.e., the first and second pad heaters (910, 920), surround the body (10) and heat the body (10). In this case, the embedded duct part (251) is located on the inside of the pad heater (900).

[0233] In detail, at least a portion of the buried flow path (251), i.e., a portion excluding the central region of the branch flow path (253), and the first communication flow path (254) and the second communication flow path (255) are surrounded by the first pad heater (910) and positioned inside the first pad heater (910). Therefore, at least a portion of the buried flow path (251) is heated by the first pad heater (910), and thus, the supply fluid flowing through the buried flow path (251) can be maintained at a high temperature and flow without heat loss.

[0234] The flow control device (1) of the present invention has the following effects.

[0235] Since the heated supply fluid is supplied into the body (10) through the buried duct (250), heat loss is minimized and it can be introduced into the body (10), and through this, pollutant gases are not deposited in the pipe and exhaust can be performed more effectively.

[0236] By closing the buried duct section (250) through the buried duct section cover (260), the buried duct section (250) can be easily formed.

[0237] If the supply fluid passing through the heating unit (20) through the temperature measuring unit (31) and heater blocking unit (25) of the connecting urea unit (30) is excessively heated, it can be blocked, thereby allowing the supply fluid to be heated to an appropriate temperature.

[0238] As the supply fluid is amplified first and second times through the 1-1 chamber (510), the 1-2 chamber (520), and the 2nd chamber (600), a greater amplification of the velocity of the supply fluid can be achieved, and through this, the discharge velocity of the inflow fluid can be made faster.

[0239] Since the body (10) and the heating unit (20) are closed from the outside by the insulating cover (40), the high temperature of the supply fluid flowing inside the body (10) and the heating unit (20) can be maintained.

[0240] Since it is composed of a combination of a first body (100), a second body (200), and a third body (300), it is possible to easily manufacture a complex-shaped first-1 chamber (510), a first-2 chamber (520), and a second chamber (600).

[0241] By separating and combining the first body (100), the second body (200), and the third body (300), maintenance of the flow control device (1) can be made easier.

[0242] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent embodiments are possible. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the appended claims.

[0243] [Explanation of symbols]

[0244] 1: Flow control device

[0245] 10: Body

[0246] 20: Heating section

[0247] 21: Inlet

[0248] 22: Heating body

[0249] 23: Heater coil

[0250] 24: Electrical cable insertion part

[0251] 25: Heater cutoff

[0252] 30: Connecting Euro

[0253] 31: Temperature measurement unit

[0254] 40: Insulation cover

[0255] 41: Cover connection

[0256] 43: Upper cover

[0257] 100: First Body

[0258] 110: First Hollow

[0259] 120: Upper part of the first body

[0260] 130: Lower part of the first body

[0261] 140: First projection surface

[0262] 150: First barrier

[0263] 151: 1st Guide Department

[0264] 160: Second barrier

[0265] 161: Second Guide Department

[0266] 200: Second body

[0267] 210: Second Hollow

[0268] 220: Second protrusion

[0269] 230: Third projection surface

[0270] 250: Landfill Euro section

[0271] 251: Main Euro

[0272] 253: Quarterly Euro

[0273] 254: First-line Euro

[0274] 255: Second-line Euro

[0275] 260: Landfill Euro Cover

[0276] 300: Third Body

[0277] 310: Third Hollow

[0278] 320: Third body upper part

[0279] 321: Tapered section

[0280] 330: Lower third body

[0281] 331: First slope

[0282] 333: Second slope

[0283] 340: 4th projection

[0284] 500: Chamber 1

[0285] 510: Chamber 1-1

[0286] 511: 1-1 Gap

[0287] 520: Chambers 1-2

[0288] 521: 1-2nd gap

[0289] 600: Second Chamber

[0290] 610: Second gap

[0291] 800: Floating part

[0292] 900: Pad Heater

[0293] 910: 1st pad heater

[0294] 915: 1st pad heater connection

[0295] 916: First connecting bolt hole

[0296] 917: First connecting bolt

[0297] 920: Second pad heater

[0298] 925: Second pad heater connection

[0299] 926: Second connecting bolt hole

[0300] 927: Second connecting bolt

Claims

1. A buried flow path section that is provided to be buried inside the body and receives the supply fluid; A first chamber provided in the body so as to be connected to the above-mentioned buried passage section and positioned inside the above-mentioned buried passage section; A second chamber provided in the body so as to be in communication with the first chamber and located inside the first chamber; and It includes a fluidic portion formed by penetrating the upper and lower surfaces of the body so as to be connected to the second chamber and positioned inside the second chamber; A flow control device in which the velocity of the inflow fluid introduced into the flow section is amplified by the supply fluid injected into the flow section through the second chamber.

2. In paragraph 1, a heating unit for heating the supply fluid; and A flow control device further comprising a connecting passage unit that connects the heating unit and the buried passage unit to allow the heated supply fluid in the heating unit to flow to the buried passage unit.

3. In paragraph 2, A flow control device further comprising an insulating cover surrounding the heating unit and the body.

4. In paragraph 2, A flow control device further comprising a temperature measuring unit for measuring the temperature of the above-mentioned connecting portion.

5. In paragraph 1, The above landfill euro section is, A main euro connected to the above connecting euro section; A branch duct provided along the perimeter of the body from the main duct; A first communication channel connecting one end of the above branched channel and the first chamber; and A flow control device comprising a second communication channel connecting the other end of the branch flow path and the first chamber.

6. In paragraph 5, A flow control device in which the first communication path and the second communication path are arranged on opposite sides based on the center line of the body.

7. In paragraph 5, A first blocking wall that guides the supply fluid supplied from the first communication path to the first chamber in one direction; and A flow control device further comprising a second blocking wall that allows the supply fluid supplied from the second communication path to flow in one direction to the second chamber.

8. In paragraph 7, A flow control device in which the first chamber is distinguished from the first chamber in which the supply fluid supplied through the first communication path flows by the first blocking wall, and the first chamber in which the supply fluid supplied through the second communication path flows by the second blocking wall.

9. In paragraph 7, In the above 1-1 chamber, a first guide section is provided which is formed to be inclined in the downstream direction of the flow section as it gets farther away from the first communication path. A flow control device in which a second guide section is formed to be inclined toward the downstream portion of the flow section as it moves away from the second communication path in the first and second chambers.

10. In paragraph 5, A flow control device in which the center lines of the first and second communication channels are perpendicular to each other and the center line of the flow section.

11. In paragraph 1, A flow control device further comprising a buried flow section cover coupled to the body so as to surround the buried flow section.

12. In paragraph 1, The above body, A first body having a first hollow space in the center that penetrates vertically; A second body having a second hollow portion extending vertically in the center and inserted into the interior of the first hollow portion so as to be positioned on the inner side of the first hollow portion and joined; and A third body having a third hollow portion extending vertically and horizontally in the center and inserted into the interior of the second hollow portion so that the upper portion is positioned on the inner side of the second hollow portion and is combined; The outer surface of the lower part of the first body and the inner surface of the second hollow body form the first chamber, The inner surface of the second hollow body and the outer surface of the upper part of the third body of the third body form the second chamber. A flow control device in which the first to third hollow sections are interconnected to form the flow section.

13. In paragraph 12, The outer surface of the second body is provided with a branch flow path of the buried flow path, A flow control device, wherein first and second communication channels communicating with the branch flow path are respectively provided on one side and the other side of the second body.

14. In paragraph 12, A first pad heater that surrounds the second body and heats the second body; and A flow control device further comprising a second pad heater that surrounds the lower part of the third body of the third body and heats the lower part of the third body.

15. In paragraph 1, Further comprising a pad heater that wraps around the body and heats the body; A flow control device, wherein the above-mentioned buried flow path is located inside the pad heater.

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