Method for controlling a planar drive system, and planar drive system

Abstract

The invention relates to a method (100) for operating a planar drive system (200), wherein the planar drive system (200) comprises a stator unit (300) having a plurality of coil groups (321) for generating a stator magnetic field, and a rotor (400) having a plurality of magnet units (409) for generating a rotor magnetic field, and wherein the method (100) comprises: outputting control signals by a control unit (201) of the planar drive system (200) to X-coil groups (323) and / or Y-coil groups (325) covered by the rotor (400), in order to energise the X-coil groups (323) and / or Y-coil groups (325) covered by the rotor (400) and to generate stator magnetic fields of the controlled X-coil groups (323) and / or Y-coil groups (325) in order to move the rotor (400) from a first position and a first orientation into a second position and / or a second orientation of the rotor (400) relative to the stator unit in a control step (101). The invention also relates to a planar drive system (200).

Description

[0001] Method for controlling a planar drive system and planar drive system

[0002] Description

[0003] The invention relates to a method for controlling a planar drive system and a planar drive system which is configured to carry out the method for controlling a planar drive system.

[0004] The patent application claims priority from German patent application 10 2024 111 060.0, the disclosure of which is hereby incorporated by reference.

[0005] Planar drive systems can be used in automation technology, particularly in manufacturing technology, handling technology, and process engineering. Using planar drive systems, a moving element of a system or machine can be moved or positioned in at least two linearly independent directions. Planar drive systems can comprise a permanently excited electromagnetic planar motor with a planar stator and a rotor that can move on the stator in at least two directions.

[0006] In a permanent magnet electromagnetic planar motor, a driving force is exerted on the rotor by energized coil groups of the stator unit magnetically interacting with drive magnets of several magnet arrangements of the rotor.

[0007] Planar drive systems with rectangular and longitudinally connected coil groups and rectangular and longitudinally extended magnet units of the rotor are known from the prior art. Planar drive systems with rectangular and longitudinally connected coil groups and rectangular and longitudinally extended magnet units of the rotor are advantageous for the linear translational movement of the rotor.

[0008] Furthermore, planar drive systems with round coil groups are known from the prior art. Round coil groups are advantageous for the rotation of the rotor, but have significant disadvantages in the linear translational movement of the rotor and can lead to unsteady and jerky movements.

[0009] In a planar drive system with rectangular and linearly arranged coil groups and magnet units, the rotor comprises at least a first magnet unit for driving the rotor in a first direction and a second magnet unit for driving the rotor in a second direction that is linearly independent of the first direction, for example, in a second direction orthogonal to the first direction. The planar stator unit comprises energizable first coil groups that magnetically interact with the magnets of the first magnet unit to drive the rotor in the first direction, and energizable second coil groups that magnetically interact with the magnets of the second magnet unit to drive the rotor in the second direction. The first and second coil groups can generally be energized independently of one another to enable independent movements of the rotor in the first and second directions.If the conductors of the first and second groups can be energized independently of each other, at least in part, several rotors can be moved independently of each other on a stator at the same time.

[0010] To control a rotor of a planar drive system, it may be crucial for certain applications to change the position of the rotor, which primarily occurs through translational movements along the first and second directions, as well as to change the orientation of the rotor relative to the stator unit. This requires the rotor to be able to rotate about a rotation axis oriented perpendicular to a surface of the stator unit. However, due to the linear arrangement of the coil groups and the characteristic interaction between the coil groups and the magnet units, rotations of the rotor are difficult and limited to only a few degrees.

[0011] It is therefore an object of the invention to provide an improved method for controlling a planar drive system that enables unrestricted, essentially planar movement of the rotor. A further object of the invention is to provide a planar drive system configured to implement the inventive method.

[0012] This object is achieved by a method for controlling a planar drive system and a planar drive system according to the independent claims. Preferred embodiments are specified in the dependent claims.

[0013] According to one aspect of the invention, a method for operating a planar drive system is provided, wherein the planar drive system comprises a stator unit with a plurality of coil groups for generating a stator magnetic field and a rotor with a plurality of magnet units for generating a rotor magnetic field, wherein the rotor on the stator unit can be driven via a magnetic coupling between the stator magnetic field and the rotor magnetic field, wherein the plurality of coil groups comprises a plurality of X-coil groups and a plurality of Y-coil groups, each with substantially rectangular coil surfaces, wherein the X-coil groups extend with a longer side of the substantially rectangular coil surface along an X-direction and the Y-coil groups extend with a longer side of the substantially rectangular coil surfaces along a Y-direction of the stator unit oriented perpendicular to the X-direction,wherein the plurality of X-coil groups and the plurality of Y-coil groups are each arranged in at least two stator layers spaced apart from one another along a Z-direction perpendicular to the X-direction and Y-direction, wherein the plurality of magnet units comprises a plurality of X-magnet units and a plurality of Y-magnet units, each having substantially rectangular magnetic surfaces, wherein the X-magnet units are oriented with a longer side of the substantially rectangular magnetic surfaces along an X-direction of the rotor, and wherein the method comprises:

[0014] Outputting control signals by a control unit of the planar drive system to X-coil groups and / or Y-coil groups covered by the rotor for energizing the X-coil groups and / or Y-coil groups covered by the rotor and for generating stator magnetic fields of the controlled X-coil groups and / or Y-coil groups for moving the rotor from a first position and a first orientation into a second position and / or a second orientation of the rotor relative to the stator unit in a control step, wherein the X-coil groups and Y-coil groups covered by the rotor are individually controlled, and wherein at least two X-coil groups and / or at least two Y-coil groups covered by the rotor are controlled for energization with different coil currents.

[0015] This makes it possible to achieve the technical advantage of providing an improved method for operating a planar drive system that allows unrestricted movement of the rotor relative to the stator unit.

[0016] By individually controlling the coil groups covered by the rotor's magnet units, the stator magnetic fields generated by the respective coil groups can be set individually for each coil group. Thus, by controlling the coil groups covered by the respective magnet unit, each magnet unit of the rotor can be subjected to an individual stator magnetic field, without the stator magnetic field applied to one magnet unit influencing the other magnet units of the rotor. By individually positioning the stator magnetic fields generated by the respective coil groups, the magnetic forces acting on the individual magnet units of the rotor can be individually adjusted, so that the total magnetic forces acting on the individual magnet units of the rotor cause the rotor to rotate around the rotation axis.

[0017] This allows stator magnetic fields to be generated that allow the rotor to be moved from any first position and any first orientation to any possible second position and any possible second orientation of the rotor relative to the stator unit. There is therefore no restriction on the movement that the rotor can perform. The rotor can be rotated through any angle in any position. The rotor can perform any possible translational movement in any possible orientation. Combined rotational and translational movements are also possible.

[0018] For the purposes of the application, an orientation of the rotor is an alignment of a preferred direction of the rotor relative to the X-direction and the Y-direction of the coordinate system spanned by the stator unit. A change in the orientation of the rotor can be achieved by rotating it about a rotation axis oriented parallel to the Z-axis of the coordinate system spanned by the stator unit.

[0019] For the purposes of the application, a position of the rotor is a position of the rotor on the stator unit. A change in the position of the rotor can be achieved via a translational movement along the X and Y directions of the stator unit. A position of the rotor can be determined, in particular, by positioning a center of the rotor on the stator unit.

[0020] In the sense of the application, an angle of rotation is a solid angle between the preferred direction of the rotor and the X or Y direction of the coordinate system spanned by the stator unit.

[0021] Individual control of a coil group, as defined in the application, involves energizing the coil group with an individual excitation current. The excitation currents of two individually energized coil groups can differ in at least one value. The essentially rectangular shape of the coil surfaces of the coil groups and the magnetic surfaces of the magnet units also encompasses a square shape in which the longer and shorter sides are of equal length.

[0022] According to one embodiment, the movement of the rotor comprises a translational movement between the first position and the second position and / or a rotational movement between the first orientation and the second orientation.

[0023] This offers the technical advantage of improved control of the runner. The runner can be moved and oriented in any direction without restrictions.

[0024] According to one embodiment, at least one X-coil group and at least one Y-coil group, which are covered by the same magnetic element of the rotor, are controlled simultaneously.

[0025] This makes it possible to achieve the technical advantage that, by simultaneously energizing the at least one X-coil group and the at least one Y-coil group, which are covered by the same magnet unit of the rotor, a partial magnetic force of the stator magnetic field of the energized X-coil group and a partial magnetic force of the energized Y-coil group can act on the magnet unit.

[0026] The stator magnetic field of the energized X-coil group has a Z component oriented parallel to the Z direction and a Y component oriented parallel to the Y direction of the stator. The stator magnetic field of the energized Y-coil group also has a Z component and an additional X component oriented along the X direction of the stator.

[0027] By simultaneously energizing the X-coil group and the Y-coil group, a stator magnetic field with an X-component, a Y-component and a Z-component can act on the magnet unit covering the X-coil group and the Y-coil group.

[0028] Depending on the orientation of the respective magnet unit relative to the X-direction and the Y-direction of the stator unit, partial magnetic forces acting on the magnet unit in any direction can be generated. The rotor can thus perform movements without restrictions. According to one embodiment, at least two X-coil groups and / or at least two Y-coil groups, which are covered by the same magnetic element of the rotor, are controlled to supply different coil currents.

[0029] This makes it possible to achieve the technical advantage that a plurality of differently configured magnetic partial forces can be generated for the respective magnet unit by means of the plurality of simultaneously energized X-coil groups and / or Y-coil groups. By having a plurality of differently configured magnetic partial forces acting on each magnet unit, a finer and more precise adjustment and generation of the force and / or torque acting on the rotor is possible. This enables finer control of the rotor. By generating the forces or torques required to move the rotor using a larger number of coil groups, the current flowing through the energized coil groups can be reduced, thereby reducing heat generation within the coil groups.

[0030] According to one embodiment, the Y-magnet units are oriented with the longer side of the substantially rectangular magnetic surfaces along a Y-direction of the rotor oriented perpendicular to the X-direction, wherein the longer sides of the coil surfaces of the X-coil groups and Y-coil groups are substantially the same length as or shorter than the longer sides of the magnetic surfaces of the X-magnet units and Y-magnet units.

[0031] This allows the technical advantage to be achieved that the arrangement of X-coil groups and Y-coil groups of the stator unit and the parallel magnet units in the rotor are ideal for movements of the mover in the X and Y directions.

[0032] Due to the geometry of the X-coil groups and Y-coil groups of the stator unit and the X-magnet units and Y-magnet units of the rotor with essentially rectangular coil surfaces and magnetic surfaces, wherein the coil surfaces are smaller or at most the same size as the magnetic surfaces of the magnetic units, it can also be avoided that several X-magnet units or several Y-magnet units of the rotor substantially cover the same coil group.

[0033] Covering a coil group of the stator unit by a magnet unit of the rotor is achieved in the sense of the application if, in a positioning and orientation of the rotor on the stator unit, a magnet unit of the rotor is arranged at least partially above a coil group with respect to a Z direction of the stator unit.

[0034] Because the geometric design of the coil groups in terms of size and shape in relation to the size and shape of the magnet units of the rotor allows at least one coil group to be determined for each magnet unit of the rotor that exclusively covers the respective coil group, a stator magnetic field can be generated by controlling the respective coil group that acts exclusively on the magnet unit covering the controlled coil group. By generating separate stator magnetic fields for each magnet unit of the rotor by controlling the respective coil group exclusively covered by the respective magnet unit, which act exclusively on the respective magnet units, the movable unit can be controlled to perform any desired movement.

[0035] By covering the coil groups exclusively with one magnet unit, the stator magnetic fields generated by controlling the respective coil groups only act on the overlapping magnet units. This can prevent a stator magnetic field of a controlled coil group from acting on more than one magnet unit. Stator magnetic fields that act on more than one magnet unit of the rotor can restrict the movement of the moving unit, particularly with regard to rotation of the moving unit. By designing the coil groups with coil areas that are at most the same size as the magnet units of the rotor of the moving unit, and by controlling and regulating them separately.By energizing the coil groups, the stator magnetic fields generated by the coil groups can be individually adjusted to each magnet unit such that the respective stator magnetic fields act exclusively on the respective magnet units and with an individually adjustable magnetic field strength. This allows restrictions in the movement of the moving unit to be minimized or completely eliminated.

[0036] This allows for the technical advantage of generating a deliberately inhomogeneous field using coil groups and magnet units of essentially the same length or shorter. This allows for more individual, optimal phase angles and amplitudes of the current supply to be determined and adjusted for the X-coil groups and Y-coil groups, thus achieving improved control of the rotor's movement, especially in cases where the coils are not aligned parallel to the magnet units.According to one embodiment, at least eight X-coil groups arranged in one stator layer and / or at least eight Y-coil groups arranged in the other stator layer are controlled for energization, wherein the at least eight X-coil groups are arranged in two rows spaced apart from one another along the X-direction, each of four X-coil groups spaced apart along the Y-direction, and / or wherein the at least eight Y-coil groups are arranged in two rows spaced apart from one another along the Y-direction, each of four Y-coil groups spaced apart along the X-direction.

[0037] This achieves the technical advantage that the eight X-coil groups and the eight Y-coil groups each cover an area that essentially corresponds to the running surface of the rotor. By energizing the at least eight X-coil groups and / or the Y-coil groups arranged above or below the eight X-coil groups in the Z direction, a stator magnetic field can be generated that spans an area that essentially corresponds to the running surface of the rotor. This stator magnetic field enables optimal control of the rotor.

[0038] According to one embodiment, an X-current supply area defined by the at least eight X-coil groups is congruent with a Y-current supply area defined by the at least eight Y-coil groups.

[0039] This achieves the technical advantage of generating a uniform stator magnetic field. By designing the X-coil groups and Y-coil groups with essentially rectangular coil surfaces, the X-energization surfaces of the eight X-coil groups and the Y-energization surfaces of the eight Y-coil groups are essentially the same size and have the same rectangular or square shape. The X-energization surface, which defines an area of ​​the respective X-stator layer comprising the at least eight energized X-coil groups, and the Y-energization surface, which correspondingly defines an area of ​​the respective Y-stator layer comprising the eight energized Y-coil groups, are also essentially the same size as the running surface of the rotor.

[0040] The X-energization area describes an area defined by the stator magnetic field generated by the eight energized X-coil groups, while the Y-energization area describes the area defined by the stator magnetic field generated by the eight energized Y-coil groups. By energizing the eight X-coil groups arranged one above the other along the Z-direction and / or by energizing the eight Y-coil groups, a stator magnetic field covering the same area can be generated.

[0041] According to one embodiment, an X-energization pattern of the at least eight energized X-coil groups corresponds to a Y-energization pattern of the at least eight energized Y-coil groups rotated by substantially 90° about the Z-axis.

[0042] This allows the technical advantage of generating the most uniform stator magnetic field possible through the corresponding X-current and Y-current patterns of the at least eight energized X-coil groups and the at least eight energized Y-coil groups. In particular, for executing a rotary movement of the rotor about a rotational axis oriented parallel to the Z-direction, such corresponding X-current and Y-current patterns can lead to the most uniform rotary movement possible. Furthermore, rotary movements can be executed through any angle of rotation between 0° and 360°.

[0043] According to one embodiment, the control step comprises:

[0044] Determining a force and / or a torque required to move the rotor in a force determination step;

[0045] Determining partial magnetic forces acting on the individual magnet units of the rotor by the stator magnetic fields of the coil units covered by the magnet units in a partial force determination step, wherein a total of the partial magnetic forces acting on the individual magnet units of the rotor results in the force acting on the rotor and / or the torque acting on the rotor; and

[0046] Determining the individual currents of the coil groups covered by the rotor required to generate the specific magnetic partial forces in a current determination step.

[0047] This allows the technical advantage of enabling optimal current supply to the individual coil groups covered by the rotor and thus an optimized stator magnetic field, which enables the desired movement of the rotor.

[0048] To do this, the force and / or torque required for the desired movement is first determined. The force or torque acts on the entire rotor, for example, on the rotor's center of gravity, and causes the rotor to move. The force causes the rotor to move in a translational direction. The torque causes the rotor to rotate.

[0049] Since the movement of the rotor is caused by the magnetic coupling of the stator magnetic field with the rotor magnetic field, the force or torque acting on the rotor is provided by partial magnetic forces acting on the individual magnet units of the rotor. The partial magnetic forces acting on the magnet units are based on magnetic couplings between the magnetic fields of the rotor magnet units and the stator magnetic fields of the coil groups covered by the magnet units.

[0050] After determining the partial magnetic forces acting on the magnet units of the rotor, which in their entirety lead to the force or torque required for the movement of the rotor, the currents of the individual coil groups covered by the magnet units of the rotor, which are required to generate the partial magnetic forces, are determined.

[0051] Determining the force and / or torque required to move the runner may take into account factors such as the size, weight, load, or other characteristics of the runner.

[0052] Determining the current required to generate the desired force and / or torque can take into account factors such as the dimensions and magnetic properties of the magnet units or the rotor magnetic field, as well as the associated properties of the magnetic coupling between the stator magnetic field and the rotor magnetic field. In particular, the rotor's flight height, i.e., the distance in the Z direction between the magnet unit and the coil group, can be considered.

[0053] According to one embodiment, the determination of the force acting on the rotor and / or the torque acting on the rotor in the force determination step and / or the determination of the partial magnetic forces of the covered coil groups acting on the magnet units in the partial force determination step and / or the determination of the currents of the covered coil groups in the current determination step are carried out taking into account at least one reference relation between the current supply of the coil groups and the partial magnetic forces acting on the covering magnet units and / or the force acting on the rotor and / or the torque acting on the rotor.

[0054] This provides the technical advantage of precisely determining the required current flow values ​​of the overlapped coil groups. The relationship considered for this purpose can be generated, for example, based on simulations or reference measurements. This allows, in particular, the computing power of the control unit of the planar drive system to be saved by performing a previously performed simulation based on a model description of the relationship between the current flow to the coil groups and the magnetic forces acting on the magnet units, and thus the rotation through the predetermined angle, to determine the individual current flow required for rotation through any desired angle of rotation to the coil groups overlapped by the magnet units of the rotor.

[0055] The simulation results can be stored, for example, in a database or a look-up table, so that the required individual currents for the individual coil groups covered by the rotor to rotate the rotor through a predetermined angle do not need to be recalculated by the control unit, but simply read from the database or look-up table. This saves the control unit's calculation time and computing power required to perform the rotor rotation.

[0056] According to one embodiment, the determination of the force acting on the rotor and / or the torque acting on the rotor in the force determination step and / or the determination of the partial magnetic forces of the covered coil groups acting on the magnet units in the partial force determination step and / or the determination of the currents of the covered coil groups in the current determination step are carried out by at least one appropriately trained artificial intelligence model, for example a neural network or other machine learning models such as support vector machines, decision trees or random forests.

[0057] This makes it possible to achieve the technical advantage of achieving an exact determination of the force acting on the rotor and / or the torque acting on the rotor in the force determination step and / or the determination of the partial magnetic forces of the covered coil groups acting on the magnet units in the partial force determination step and / or the currents of the covered coil groups.

[0058] According to one embodiment, the partial magnetic force acting on a magnet unit of the rotor of an energized coil group covered by the respective magnet unit is defined as a partial magnetic force acting on a center of gravity of an overlapping surface of the magnet unit covered by the respective coil group.

[0059] This provides the technical advantage of enabling precise determination of the partial magnetic forces. The design of the coil groups, which are essentially the same size as the rotor's magnet units, allows multiple coil groups to be covered by one magnet unit. By controlling and energizing the individual coil groups individually, several different partial magnetic forces can be generated that act on the same magnet unit of the rotor. The individual partial magnetic forces depend on the energization of the respective coil group and the overlap area between the coil group and the magnet unit.

[0060] According to one embodiment, the totality of the partial magnetic forces generated by the energization of the X-coil groups covered by the rotor generates the torque acting on the rotor and causes a rotational movement of the rotor about the Z-direction, and wherein the totality of the partial magnetic forces generated by the energization of the Y-coil groups covered by the rotor generates the force acting on the rotor and causes a translational movement of the rotor along the Y-direction.

[0061] This provides the technical advantage of enabling flexible control of the rotor, allowing the rotor to execute any desired movement. The total of the partial magnetic forces acting on the various magnet units results in the force or torque acting on the rotor. By individually energizing the coil groups covered by the rotor, a plurality of partial magnetic forces acting on the magnet unit can be generated for each magnet unit.

[0062] The resulting multiple different magnetic partial forces acting on different points of application of the magnetic units allow for a variety of possible forces and / or torques acting on the rotor. This allows for flexible movement of the rotor, allowing it to be moved from any desired position and orientation to any other position and orientation.

[0063] According to one embodiment, the method further comprises:

[0064] Determining the coil groups of the stator unit that are covered by the magnet units of the rotor in a coil determination step, the coil determination step comprising:

[0065] Detecting the rotor magnetic fields of the individual magnet units of the rotor by magnetic field sensors of the stator unit by the control unit in a detection step; defining a coverage area for each magnet unit control unit in a definition step, wherein the coverage area characterizes an area of ​​the stator unit that corresponds to a projection of the magnetic surface of the magnet unit of the rotor onto a stator surface of the stator unit; and

[0066] Determining the coil groups that are at least partially arranged in an overlap area by the control unit in a determination step.

[0067] This provides the technical advantage of enabling precise control and energization of the correct coil groups. By taking the overlap areas into account, the coil groups covered by the various magnet units of the rotor can be identified. Each coil group can be controlled individually. A unique stator magnetic field can thus be generated for each magnet unit. The stator magnetic field acting on a magnet unit can be based on the magnetic fields of a plurality of coil groups covered by the respective magnet unit.

[0068] By taking the overlap areas into account, the coil groups covered by each magnet unit are determined, allowing the stator magnetic field acting on this magnet unit and generated by energizing the correspondingly covered coil groups to be individually generated for each magnet unit. This enables improved control of the rotor.

[0069] According to one embodiment, the angle of rotation of the rotor can be selected for any value between 0° and 360°. This provides the technical advantage that rotation of the rotor relative to the stator unit is possible at any position of the rotor by any angle.

[0070] According to one aspect, a planar drive system is provided with a stator unit having a plurality of coil groups for generating a stator magnetic field, at least one rotor having a plurality of magnet units for generating a rotor magnetic field, and a control unit for controlling the planar drive system, wherein the rotor on the stator unit can be driven via a magnetic coupling between the stator magnetic field and the rotor magnetic field, wherein the plurality of coil groups comprises a plurality of X-coil groups and a plurality of Y-coil groups, each with substantially rectangular coil surfaces, wherein the X-coil groups extend with a longer side of the substantially rectangular coil surface along an X-direction and the Y-coil groups extend with a longer side of the substantially rectangular coil surfaces along a Y-direction of the stator unit oriented perpendicular to the X-direction,wherein the plurality of X-coil groups and the plurality of Y-coil groups are each arranged in stator layers spaced apart from one another along a Z-direction perpendicular to the X-direction and Y-direction, wherein the plurality of magnet units comprises a plurality of X-magnet units and a plurality of Y-magnet units, each with substantially rectangular magnetic surfaces, wherein the X-magnet units are oriented with a longer side of the substantially rectangular magnetic surfaces along an X-direction of the rotor, wherein the Y-magnet units are oriented with a longer side of the substantially rectangular magnetic surfaces along a Y-direction of the rotor oriented perpendicular to the X-direction, wherein the longer sides of the coil surfaces of the X-coil groups and Y-coil groups are substantially the same length as the longer sides of the magnetic surfaces of the X-magnet units and Y-magnet units, and wherein the control unit is configuredto carry out the method according to one of the preceding embodiments.,

[0071] This makes it possible to achieve the technical advantage of providing an improved planar drive system that is configured to carry out the inventive method for operating a planar drive system with the aforementioned technical advantages. The X-coil groups and the Y-coil groups, which are essentially the same size as the X-magnet units and the Y-magnet units of the rotor, enable the rotor to be moved from any position and orientation to any selected position and orientation. There is no restriction on the rotation of the rotor. The rotor can be rotated in any position by any angle between 0° and a multiple of 360°. Furthermore, a rotational movement of the rotor can be performed during a translational movement of the rotor.

[0072] According to one embodiment, the X-coil groups and the Y-coil groups have coil surfaces of the same size, wherein the X-coil groups are arranged in an X-stator layer, wherein the Y-coil groups are arranged in at least one Y-stator layer, and wherein X-coil pair surfaces spanned by X-coil groups spaced apart in pairs along the Y-direction of at least one X-stator layer are congruent with Y-coil pair surfaces spanned by Y-coil groups spaced apart in pairs along the X-direction of at least one Y-stator layer.

[0073] This achieves the technical advantage that, by arranging the X-coil groups and Y-coil groups with congruent X-coil pair surfaces and Y-coil pair surfaces of paired X-coil groups and Y-coil groups, stator magnetic fields can be generated by the X-coil groups and Y-coil groups that are optimally adapted to the designs and dimensions of the X-magnet units and Y-magnet units. This enables optimal control and movement of the rotor.

[0074] According to one embodiment, an X-coil group is configured to generate a stator magnetic field having a Y-component and a Z-component, wherein an X-component is oriented along the X-direction, a Y-component is oriented along the Y-direction, and a Z-component is oriented along a Z-direction of the stator unit that is oriented perpendicular to the X-direction and the Y-direction.

[0075] This provides the technical advantage of enabling improved rotor control. The X-coil groups aligned along the X-direction of the coordinate system spanned by the magnet unit can generate a stator magnetic field with a Y-component and a Z-component, while the Y-coil groups aligned along the Y-direction can generate a stator magnetic field with an X-component and a Z-component.

[0076] By energizing the individual X or Y coil groups, a magnetic force in the Z direction can act on the rotor to be controlled, which can cause a movement of the rotor in the Z direction or the levitation of the rotor above the stator surface of the stator unit.

[0077] In addition, magnetic forces can act on the controlled rotor in the X or Y direction, or any combination of these, causing corresponding translational movements of the rotor within the XY plane of the coordinate system spanned by the stator unit and / or rotational movements of the rotor around an axis of rotation oriented parallel to the Z direction. This allows for precise movement of the rotor.

[0078] According to one embodiment, an X-magnet unit is configured to generate a rotor magnetic field having a Y-component and a Z-component, wherein an X-component is oriented along the X-direction, a Y-component is oriented along the Y-direction, and a Z-component is oriented along a Z-direction of the rotor that is oriented perpendicular to the X-direction and the Y-direction.

[0079] This provides the technical advantage of enabling precise control of the rotor. Depending on the position and orientation of the rotor relative to the stator unit, and thus the position and orientation of the rotor's magnet units relative to the stator unit's coil groups, the stator magnetic fields generated by controlling the X-coil groups and / or Y-coil groups can interact with the rotor's magnetic fields, generating forces and / or torques acting on the rotor with X-components, Y-components, and Z-components. This enables the rotor to move along all three spatial directions.

[0080] The invention is explained in more detail with reference to the accompanying figures. Herein:

[0081] Fig. 1 is a schematic representation of a planar drive system with a stator unit and a rotor according to an embodiment;

[0082] Fig. 2 is a schematic representation of a stator module of the stator unit in Fig. 1;

[0083] Fig. 3 is a schematic exploded view of a stator segment of the stator unit and a magnet arrangement of the rotor in Fig. 1; Fig. 4 is a schematic view of an underside of a rotor according to an embodiment;

[0084] Fig. 5 is a schematic representation of the rotor from Fig. 1;

[0085] Fig. 6 is a schematic representation of the rotor from Fig. 5 on the stator unit according to an embodiment;

[0086] Fig. 7 is a further schematic representation of the rotor on the stator unit according to a further embodiment;

[0087] Fig. 8 is a further schematic representation of the rotor on the stator unit according to a further embodiment;

[0088] Fig. 9 is a further schematic representation of a further rotor on the stator unit according to a further embodiment;

[0089] Fig. 10 is a flowchart of a method for controlling a planar drive system according to an embodiment; and

[0090] Fig. 11 is a further flowchart of the method for controlling a planar drive system according to another embodiment.

[0091] Fig. 1 shows a schematic view of a planar drive system 200 with a stator unit 300 and a rotor 400.

[0092] According to the embodiment in Fig. 1, the planar drive system comprises a control unit 201, a stator unit 300, and a rotor 400. The control unit 201 is connected to the stator unit 300 via a data connection 203. The control unit 201 is configured to execute a method 100 according to the invention for operating a planar drive system 200.

[0093] In the embodiment shown, the stator unit 300 comprises a plurality of stator modules 301, which are arranged next to one another along an X-direction and a Y-direction of the stator unit 300 and form a continuous, flat stator surface 303 of the stator unit 300. In the embodiment shown, the stator unit 300 comprises six stator modules 301. However, the number of interconnected stator modules 301 of a stator unit 300 should not be limited thereto and can vary as desired. Thus, a stator unit 300 according to the invention can consist of only one stator module 301, but also of a plurality of arbitrarily arranged, connected stator modules 301, which then form a continuous stator surface 303.

[0094] In the embodiment shown, the control unit 201 is connected to each stator module 301, so that each stator module 301 can be controlled individually. Due to the perspective view, not all connections to all stator modules 301 are visible in Fig. 1.

[0095] Each of the stator modules 301 has four stator segments 308. Each stator segment includes X-coil groups and Y-coil groups, each oriented along the X-direction or the Y-direction. For a detailed description of the coil groups, refer to Figs. 3 and 6 to 8.

[0096] In the embodiment shown, the stator segments 308 are square and arranged in alignment along the X-direction and the Y-direction. Each stator segment 308 comprises a plurality of energizable stator conductors (not shown in Fig. 1), which are combined in the coil groups as described for Fig. 3 and are oriented along the X-direction or along the Y-direction (not shown in Fig. 1).

[0097] Stator magnetic fields can be generated by energizing the stator conductors of the coil groups. By means of a magnetic coupling between the stator magnetic fields and a rotor magnetic field of the rotor 400, the rotor 400 can be moved in a suspended manner over the stator surface 303 along the X-direction and / or the Y-direction and / or the Z-direction and / or in the form of a rotational movement about a direction of rotation oriented along the X-direction and / or the Y-direction and / or the Z-direction.

[0098] By moving the rotor 400 in the Z direction, which is oriented perpendicular to the X direction and the Y direction, the distance of the rotor 400 from the stator surface 303 can be varied, i.e., the rotor 400 can be raised or lowered above the stator surface 303. The stator modules 301 each have a stator module housing 305 in which control electronics (not shown) are arranged for controlling the stator module 301. Furthermore, magnetic field sensors (not shown) for detecting the rotor magnetic field of the rotor 400 are arranged in the stator module housing 305. Each stator module 301 has corresponding connecting lines 307 for supplying power and data to the control electronics.

[0099] Fig. 2 shows a schematic view of a stator module 301 of the stator unit 300 from Fig. 1.

[0100] The stator module 301 shown comprises four stator segments 308 with stator conductors 309 oriented along the X-direction. The stator conductors 309 can be arranged electrically insulated from one another. The four stator segments 308 are square and form a square stator surface 303.

[0101] Fig. 3 shows a schematic exploded view of a stator segment 308 of the stator unit 300 and a magnet assembly 401 of the rotor 400 from Fig. 1. Fig. 3 shows a simplified perspective top view of the rotor 400. The four magnet units 411, 413, 415, and 417 of the magnet unit 401 of the rotor 400 are shown. For a more detailed description of the rotor 400, please refer to the description of Figs. 4 and 5.

[0102] Fig. 3 shows four separate stator layers 313, each of which is part of the stator segment 308.

[0103] According to the illustrated embodiment, the stator segment 308 has stator layers 313 arranged one above the other in the Z direction. In the illustrated embodiment, each of the plurality of stator layers 313 contains stator conductors 309 extending exclusively along the X direction or along the Y direction.

[0104] Fig. 3 shows an X stator layer 315 and a further X stator layer 315. In the X stator layer 315 and the further X stator layer 315, stator conductors 309 are formed which extend exclusively in the X direction and are arranged next to one another in the Y direction. Fig. 3 also shows a Y stator layer 317 and a further Y stator layer 317 between the two X stator layers 315, 315. In the Y stator layer 317 and the further Y stator layer 317, stator conductors 309 are formed which extend exclusively along the Y direction and are arranged next to one another in the X direction. In Fig. 3, the sequence of the stator layers 313 is XYYX. This sequence is not mandatory, and other sequences are also possible. Also, more or fewer than four stator layers 313 may be spaced apart along the Z direction.

[0105] The stator conductors 309 of the stator layers 313 are each combined into coil groups 321. The X-stator layers 315 comprise exclusively X-coil groups 323. The Y-stator layers 317 accordingly comprise exclusively Y-coil groups 325.

[0106] In the embodiment shown, the X-stator layers 315315 each have two rows of four X-coil groups 323 spaced apart along the X-direction and four X-coil groups 323 spaced apart along the Y-direction. In the embodiment shown, the X-coil groups 323 each define a substantially rectangular coil surface 327 with a longer side 329 of the coil surface oriented in the X-direction and a shorter side 331 of the coil surface 327 oriented in the Y-direction.

[0107] The Y-stator layers 317 are configured analogously to the X-stator layers 315315 and each have two rows of four Y-coil groups 325 spaced apart along the Y-direction and spaced apart along the X-direction. The Y-coil groups 325 each define a substantially rectangular coil surface 327 with a longer side 329 of the coil surface oriented in the Y-direction and a shorter side 331 of the coil surface 327 oriented in the X-direction.

[0108] The coil group 321 of the stator layers 313 each has six stator conductors 309. The six stator conductors 309 in each coil group 321 are combined in particular as a three-phase system, in which two interconnected stator conductors 309 each form one of the three phases II, V, W of the three-phase system. By appropriately energizing the coil groups 321, and in particular the three-phase systems of the coil groups 321, of the individual stator layers of the stator segments 308, stator magnetic fields of the stator unit 300 can be generated in the form of traveling magnetic fields, by means of which a magnetic force on the rotor 400 and thus a movement of the rotor 400 can be achieved.

[0109] Alternatively, coil groups 321 of several stator layers can also be connected together, so that X-coil groups 323 arranged one above the other or Y-coil groups 325 arranged one above the other each form a common three-phase system. By appropriately supplying current, the X-coil groups 323 are configured to generate a stator magnetic field with a Z component and a Y component. The Y-coil groups 325, on the other hand, are configured to generate a stator magnetic field with a Z component and an X component. The Z component of the stator magnetic field can be used to cause the rotor 400 to move in the Z direction of the stator unit 300 and, in particular, to levitate the rotor 400 above the stator surface 303 of the stator unit 300, as well as to rotate or tilt the rotor 400 relative to the stator surface 303 of the stator unit 300. The X and Y components of the stator magnetic field, on the other hand, can be used to determine movements of the rotor 400 in X and Y directions.Y-direction and rotations about a rotation axis oriented substantially parallel to the Z-direction relative to the stator unit 300.

[0110] Fig. 4 shows a schematic representation of an underside of a rotor 400 from Fig. 1 according to an embodiment.

[0111] During operation of the planar drive system 200, the underside of the rotor 400 is arranged facing the stator surface 303 of the stator unit 300. The rotor 400 has a magnet arrangement 401 on its underside with four magnet units 407, i.e., a first X-magnet unit 411, a second X-magnet unit 413, a first Y-magnet unit 415, and a second Y-magnet unit 417. Each magnet unit 407, in turn, has a plurality of magnet elements 409. In the embodiment shown, each magnet unit 407 has five magnet elements 409, which are designed as rectangular, elongated elements. For example, the magnet units 407 can each be designed as a Halbach array magnet unit.

[0112] The magnet arrangement 401 is designed to generate the rotor magnetic field of the rotor 400, via which a magnetic coupling with the stator magnetic fields of the stator unit 300 can be achieved. The magnetic coupling can be used to control or move the rotor 400 relative to the stator unit 300.

[0113] In the embodiment shown, the first X-magnet unit 411 and the second X-magnet unit 413 are each oriented parallel to an X-direction of the rotor 400, while the first Y-magnet unit 415 and the second Y-magnet unit 417 are oriented along a Y-direction. In the center of the magnet arrangement 401, the rotor 400 can have a free surface 403 that is not covered by magnets of the magnet arrangement 401. In the region of the free surface 403, the rotor 400 can have a fastening structure 405.

[0114] Fig. 5 shows a schematic representation of the rotor 400 from Fig. 1 in plan view, wherein of the rotor 400 only the magnet arrangement 401 with a first X-magnet unit 411, a second X-magnet unit 413, a first Y-magnet unit 415 and a second Y-magnet unit 417 is shown.

[0115] Each magnet unit 407 comprises five adjacently arranged magnet elements 409, which extend along an X direction of the rotor for X magnet units 411, 413 and along a Y direction of the rotor 400 for Y magnet units 415, 417. The magnet elements 409 of the X magnet units 411, 413 are configured to generate a rotor magnetic field with a Z component 4Bz and a Y component 4By. Due to the arrangement of the Y magnet units 415, 417 perpendicular to the X magnet units 411, 413, the Y magnet units 415, 417 are configured to generate a rotor magnetic field with a Z component 4Bz and an X component 4Bx.

[0116] The various movements of the rotor 400 are achieved by magnetically coupling the rotor magnetic fields of the magnet units 409 of the rotor 400 and the coil groups 321 of the stator unit 300 energized by the stator magnetic fields. This achieves a coupling of the parallel or antiparallel components of the rotor magnetic fields and the stator magnetic fields.

[0117] The magnet units 407 each define a substantially rectangular magnetic surface 419. The longer side 421 of the substantially rectangular magnetic surfaces 419 of the X-magnet units 411, 413 are oriented along the X-direction of the rotor 400 and the longer sides 421 of the magnetic surfaces 419 of the Y-magnet units 415, 417 are oriented along the Y-direction of the rotor 400.

[0118] Fig. 6 shows a schematic representation of the rotor 400 from Fig. 5 on the stator unit 300 according to one embodiment.

[0119] In particular, Fig. 6 shows a schematic plan view of a stator module 301 of a stator unit 300, wherein only four square-arranged stator segments 308 of the stator unit 300 are shown. Additionally, Fig. 6 shows the rotor 400 from Fig. 5, which is arranged on the stator unit 300, wherein again only the magnet arrangement 401 of the rotor 400 is shown.

[0120] In graphic a) of Fig. 6, the effect of the stator magnetic fields of the individually energized coil groups 321 on the rotor magnetic fields of the magnet units 407 of the rotor 400 is illustrated by way of example for a rotational movement of the rotor 400 about a rotational axis oriented parallel to the Z direction of the stator unit 300.

[0121] In graphic b) of Fig. 6, the effect of the stator magnetic fields of the individually energized coil groups 321 on the rotor magnetic fields of the magnet units 407 of the rotor 400 is illustrated by way of example for a linear translational movement of the rotor 400 along a direction of movement arranged substantially parallel to the X-direction of the stator unit 300.

[0122] In Fig. 6, for each stator segment 308, two stator layers 313 arranged one above the other in the Z direction are shown, an X-stator layer 315 with X-coil groups 323 and a Y-stator layer 317 with Y-coil groups 325. For better illustration, the X-coil groups 323 and the Y-coil groups 325 are shown in one plane.

[0123] In the embodiment shown, the X-stator layer 315 in each stator segment 308 comprises eight X-coil groups 323. The eight X-coil groups 323 are arranged in two rows spaced apart along the X-direction, each of four X-coil groups 323 spaced apart along the Y-direction. In the embodiment shown, the X-coil groups 323 each define a substantially rectangular coil surface 327, with a longer side 329 of the X-coil surface 327 oriented along the X-direction and a shorter side 331 of the coil surface 327 oriented along the Y-direction.

[0124] The Y-stator layer 317 is designed analogously to the X-stator layer 315 and differs from it only in the orientation of the Y-coil groups 325. The Y-stator layer 317 also comprises eight Y-coil groups 325 in each stator segment 308. The eight Y-coil groups 325 are arranged in two rows, spaced apart from one another along the Y-direction, each of four Y-coil groups 325 spaced apart from one another along the X-direction. Analogous to the X-coil groups 323, in the embodiment shown, the Y-coil groups 325 each define a substantially rectangular coil surface 327, with a longer side 329 of the coil surface 327 oriented along the Y-direction and a shorter side 331 of the coil surface 327 oriented along the X-direction.In the embodiment shown, the coil surfaces 327 defined by the X-coil groups 323 and the Y-coil groups 325 are identically formed and the longer sides 329 and shorter sides 331 of the coil surfaces 327 of the X-coil groups 323 each have the same lengths as the longer sides 329 and shorter sides 331 of the coil surfaces 327 of the Y-coil groups 325.

[0125] In the embodiment shown, the coil surfaces 327 defined by the X-coil groups 323 and Y-coil groups 325 are substantially the same size as the magnetic surfaces 419 of the magnetic units 407 of the rotor 400. The longer sides 329 and the shorter sides 331 of the coil surfaces 327 of the coil groups 321 are each substantially the same length as the longer sides 421 and the shorter sides 423 of the magnetic surfaces 419 of the magnetic units 407.

[0126] Arranged next to one another along the Y direction, the X-coil groups 323 each form pairs of X-coil pair surfaces 333. The Y-coil groups 325 form pairs of corresponding Y-coil pair surfaces 335 along the X direction. In the embodiment shown, in which the longer sides 329 of the coil surface 317 of the X-coil groups 323 and the Y-coil groups 325 are essentially twice the length of the shorter sides 331, the X-coil surfaces 333 and the Y-coil surfaces 335 are essentially square.

[0127] Furthermore, the X-coil pair surfaces 333 and the Y-coil pair surfaces 335 of X-coil groups 323 and Y-coil groups 325, each arranged one above the other in the Z direction, are designed to be congruent. This makes it possible to generate magnetic fields of identical surface area in relation to the X-direction and Y-direction of the stator unit 300 by energizing the X-coil groups 323 and Y-coil groups arranged one above the other.

[0128] According to the invention, all X-coil groups 323 and all Y-coil groups 325, both within a common stator segment 308 and in different stator segments 308, can be individually controlled and supplied with different coil currents. Through the individual control and supply of current, the individual X-coil groups 323 and Y-coil groups 325 are configured to generate corresponding stator magnetic fields or contributions to a common stator magnetic field. Through appropriate supply of current, the X-coil groups 323 are configured to generate a stator magnetic field with a Y component 3By and a Z component 3Bz. The Y-coil groups 325 are configured to generate a stator magnetic field with an X component 3Bx and a Z component 3Bz.

[0129] For the sake of clarity, the components of the stator magnetic field are shown in Fig. 6 as examples only for an X-coil group 323 and a Y-coil group 325. During operation, however, corresponding components of the stator magnetic field are naturally generated by all energized coil groups 321.

[0130] Through the interaction of the correspondingly generated stator magnetic fields with the rotor magnetic fields of the magnet units 407 of the rotor 400, partial magnetic forces can be generated that act on the respective magnet units 407 and the rotor 400. The interactions between the stator magnetic fields of the coil groups 321 and the rotor magnetic fields of the magnet units 407 occur primarily or exclusively between coil groups 321 of the stator unit 300 and magnet units 407 of the rotor 400, which at least partially overlap one another.

[0131] An interaction between coil groups 321 and magnet units 407 that do not directly overlap each other can be neglected.

[0132] In the sense of the application, a coil group 321 of the stator unit 300 is at least partially covered by a magnet unit 407 of the rotor 400 if the coil surface 327 defined by the coil group 321 and a projection of the magnet surface 419 defined by the magnet unit 407 onto the stator surface 303 of the stator unit 300 have an intersection area or superposition area relative to one another.

[0133] In the embodiment shown in graphic a), twelve X-coil groups 323 at least partially covered by the rotor 400 are individually controlled to execute the rotation of the rotor 400 relative to the stator unit. The twelve X-coil groups 323 at least partially covered by the rotor 400 can be individually controlled by the rotor 400 depending on the degree of coverage of the respective X-coil group 323.

[0134] The X-coil groups 323 with a higher coverage by at least one magnet unit 407 of the rotor 400 can be energized more strongly than X-coil groups 323 that are correspondingly less covered. Depending on the degree of coverage, a correspondingly stronger interaction can be achieved between the magnetic fields of the overlapping magnet units 407 and the stator magnetic field of the correspondingly energized coil group 321. The varying degrees of control of the twelve X-coil groups 323 are represented by the varying degrees of hatching of the respective coil surfaces 327 of the X-coil groups 323.

[0135] The stator magnetic fields generated by controlling the at least partially overlapped X-coil groups 323 interact with the rotor magnetic fields of the magnet unit 407 of the rotor 400. This generates partial magnetic forces that act on the magnet units 407 overlapping the respective X-coil groups 323 or on the rotor 400.

[0136] The partial magnetic force generated by an energized X-coil group 323 acts primarily or exclusively on the magnet unit 407 of the rotor 400 covering the X-coil group 323.

[0137] In the embodiment shown, the partial magnetic forces acting on the rotor 400 are defined as forces acting on the centers of gravity of overlapping surfaces 425 of the magnet units 407 of the rotor 400. An overlapping surface 425 of the rotor 400 is defined as a projection of a coil surface 327 of a coil group 321 at least partially covered by the rotor 400 onto the magnet units 407 of the rotor 400 each covering the coil group 321.

[0138] In the orientation shown, the rotor 400 covers a first X-coil group X1, a second X-coil group X2, a third X-coil group X3, a fourth X-coil group X4, a fifth X-coil group X5, a sixth X-coil group X6, a seventh X-coil group X7, an eighth X-coil group X8, a ninth X-coil group X9, a tenth X-coil group X10, an eleventh X-coil group X1, and a twelfth X-coil group X12. According to the invention, the twelve X-coil groups X1, X2, X3, X4, X5, X6, X7, X8, X9, X10, X11, X12 are controlled individually and generate different stator magnetic fields. Due to the different magnetic fields of the differently controlled X-coil groups X1,...,X12 and due to the different coverage of the X-coil groups X1,...,X12 by the different magnet units 407 of the rotor 400, twelve possibly different magnetic partial forces act on the rotor 400.

[0139] By energizing the first X-coil group X1, a partial magnetic force FX1 acts on the rotor 400. By energizing the second X-coil group X2, a partial magnetic force FX2 is applied. By energizing the third X-coil group X3, a partial magnetic force FX3 is applied. By energizing the fourth X-coil group X4, a partial magnetic force FX4 is applied. By energizing the fifth X-coil group X5, a partial magnetic force FX5 is applied. By energizing the sixth coil group X6, a partial magnetic force FX6 is applied. By energizing the seventh X-coil group X7, a partial magnetic force FX7 is applied. By energizing the eighth X-coil group X8, a partial magnetic force FX8 is applied. By energizing the ninth X-coil group X9, a partial magnetic force FX9 is applied. The current supply to the 10 X-coil group X10 causes a partial magnetic force FX10.The energization of the eleventh X-coil group X11 causes a partial magnetic force FX11 and the energization of the twelfth X-coil group X12 causes a partial magnetic force FX12.

[0140] In the orientation of the rotor 400 shown, the first X-coil group X1 is partially overlapped by the first X-magnet unit 411. This partial overlap defines an overlap area 425-X1 of the first X-coil group X1 on the rotor 400. As already described above, the overlap area 425 is defined as a projection of the coil area 327 of the respectively overlapped coil group 321 onto the rotor 400 or the respectively overlapping magnet unit 407.

[0141] Analogously, in the shown position and orientation of the rotor 400, the second to twelfth X-coil groups X2,...,X12 are at least partially covered by the first and second X-magnet units 411, 413 and the first and second Y-magnet units 415, 417, respectively, wherein corresponding covering areas 425 are defined by the respective coverings.

[0142] By overlapping the second X-coil group X2, an overlap area 425-X2 is defined. The overlap of the third X-coil group X3 defines an overlap area 425-X3, the overlap of the fourth X-coil group X4 leads to an overlap area 425-X4, the overlap of the fifth X-coil group X5 leads to an overlap area 425-X5, the overlap of the sixth X-coil group X6 leads to an overlap area 425-X6, the overlap of the seventh X-coil group X7 leads to an overlap area 425-X7, the overlap of the eighth X-coil group X8 leads to an overlap area 425-X8, the overlap of the ninth X-coil group X9 leads to an overlap area 525-X9, the tenth X-coil group X10 leads to an overlap area 425-X10, the overlap of the eleventh X-coil group X11 leads to an overlap area of ​​425-X11 and the overlap of the twelfth X-coil group X12 leads to an overlap area of ​​425-X12.The partial magnetic forces FX1, ..., FX12 generated by the corresponding current supply to the X-coil groups X1,...,X12 each act on the centers of gravity of the respective overlapping areas 425-X1,... .425-X12.

[0143] The overlapping areas 425-X1,...,425-X12 can at least partially encompass the corresponding magnet units 407 when the respective X-coil group X1,...,X12 is overlapped by multiple magnet units 407. For example, the second X-coil group X2 is partially overlapped by the first X-magnet unit 411 and the first Y-magnet unit 415. The corresponding overlapping area 425-X2 accordingly encompasses the overlapping partial regions of the first X-magnet unit 411 and the first Y-magnet unit 415.

[0144] To achieve the desired rotational movement of the rotor 400 around the rotation axis running parallel to the Z direction, the magnetic partial forces FX1, FX2, FX3, FX6, FX7, FX8 of the X-coil groups X1, X2, X3, X6, X7, X8 point in the negative Y direction, while the magnetic partial forces FX4, FX5, FX9, FX10, FX11, FX12 of the X-coil groups X4, X5, X9, X10, X11, X12 are oriented in the positive Y direction. This allows a counterclockwise rotation of the rotor 400 around the rotation axis to be achieved.

[0145] The current supply to the overlapped X-coil groups 323 shown in graphic a) is merely an example. A different current supply configuration can also lead to rotation of the rotor 400. Clockwise rotations or rotations around other axes of rotation are also possible. For example, rotation around an axis of rotation that does not pass through the center Z of the rotor 400 is possible.

[0146] The Z-components of the magnetic partial forces FX1 ,... ,FX12 are not shown in graph a).

[0147] As already mentioned above, graphic b) shows an example of a translational movement of the rotor 400. In the embodiment shown, the translational movement of the rotor 400 is achieved by controlling overlapping Y-coil groups 325. In graphics a) and b), the rotor 400 is shown in an identical position and orientation on the stator unit 300. In the illustrated position and orientation, twelve Y-coil groups 315 are controlled to execute the translational movement. Here, a first Y-coil group Y1, a second Y-coil group Y2, a third Y-coil group Y3, a fourth Y-coil group Y4, a fifth Y-coil group Y5, a sixth Y-coil group Y6, a seventh Y-coil group Y7, an eighth Y-coil group Y8, a ninth Y-coil group Y9, a tenth Y-coil group Y10, an eleventh Y-coil group Y11 and a twelfth Y-coil group Y12 are controlled individually.The stator magnetic fields generated by controlling the covered Y-coil groups Y1,...,Y12 generate corresponding partial magnetic forces FY1, FY2, FY3, FY4, FY5, FY6, FY7, FY8, FY9, FY10, FY11, FY12 upon interaction of the rotor magnetic fields of the covering magnet units 407 of the rotor 400. The magnetic partial forces FY1,... ,FY12 are defined analogously to the magnetic partial forces FX1,... ,FX12 as forces that act on the rotor 400 at the centers of gravity of the overlapping areas 425-Y1, 425-Y2, 425-Y3, 425-Y4, 425-Y5, 425-Y6, 425-Y7, 425-Y8, 425-Y9, 425-Y10, 425-Y11, 425-Y12 defined by the overlapped coil groups Y1.....Y12.

[0148] Due to the different current supply to the overlapped Y-coil groups Y1,...,Y12 and the different sized overlapping areas 425-Y1,...,425-Y12, the correspondingly generated magnetic partial forces FY1,...,FY12 can be individually configured for each overlapped Y-coil group Y1,...,Y12, i.e., can have different effective directions and strengths. In the embodiment shown, all twelve magnetic partial forces FY1,...,FY12 are oriented essentially along the X-direction, causing the translational movement of the rotor 400 in the X-direction relative to the stator unit 300. However, this is only an example. A translational movement of the rotor 400 in other directions is also possible.

[0149] The totality of the magnetic partial forces acting on the individual magnet units 407 of the rotor 400 results in a torque M acting on the rotor 400 during a rotational movement of the rotor 400, as shown in graphic a), with an X component Mx and / or a Y component My, and / or a Z component Mz, and / or in a translational movement, as shown in graphic b), with a force F acting on a center Z of the rotor 400, with an X component Fx and / or a Y component Fy and / or a Z component Fz, in the corresponding translational direction. By appropriately controlling the coil groups 321, a combination of a translational movement and a rotational movement is also possible.

[0150] In the relation shown, a relationship between the total forces Fx, Fy, Fz or torques Mx, My, Mz acting on the center of the rotor and the partial magnetic forces Fx1,...,Fx12 acting on the individual magnet units 407, of the twelve X-coil groups X1,...,X12 shown in graphic a) and controlled to effect rotation and Fy1,...,Fy12, of the twelve Y-coil groups Y1,...,Y12 shown in graphic and controlled to effect translational movement, is shown as an example. The magnetic partial forces Fx1,...,Fx12, or Fy1,...,Fy12 can include components in the X-direction, Y-direction and Z-direction, so that the illustrated magnetic partial forces can generate the torque M with components in the X-direction, Y-direction and Z-direction as well as the force F also with components in the X-direction, Y-direction and Z-direction.

[0151] In the embodiment shown, twelve X-coil groups X1,...,X12 and / or twelve Y-coil groups Y1,...,Y12 are controlled and energized to move the rotor 400. Furthermore, in the embodiment shown, the force F required to execute the translational movement is generated exclusively by energizing the twelve Y-coil groups Y1,...,Y12, while the torque M required to execute the rotational movement is generated exclusively by correspondingly controlling the twelve X-coil groups X1,...,X12. The force F is thus composed of the twelve magnetic partial forces Fy1,...,Fy12 of the twelve Y-coil groups at least partially covered by the rotor 400. ,Y12. The torque M results from the twelve magnetic partial forces Fx1,... ,Fx12 of the twelve energized X-coil groups ,X12.

[0152] According to a further embodiment in which the coil groups 321 are designed to be smaller, for example as shown in the embodiment of Fig. 8, in which the coil groups 321 are designed with a substantially square coil surface 327 and the longer sides 329 are half as long as the longer sides 329 of the coil surfaces 317 in the embodiment of Fig. 6, depending on the orientation and position of the rotor 400, a greater number than twelve X-coil groups 323 and / or twelve Y-coil groups 325 are covered by the rotor 400 and controlled accordingly.

[0153] In such a case, the force F and / or the torque M are formed by a larger number of magnetic partial forces. This allows the desired force F and / or the desired torque to be generated with greater precision by controlling the overlapped coil groups 321. In particular, different values ​​of the force F and / or the torque M can be generated in finer increments.

[0154] Embodiments in which the coil groups 321 of the stator unit 300 are formed with even smaller coil areas 327 in relation to the magnet units 407 of the rotor 400 than is shown in the embodiment in Fig. 8 are also possible.

[0155] In addition to the illustrated embodiment, in which the translational movement is effected exclusively by energizing the covered Y-coil groups Y1,...,Y12 and the rotational movement is effected exclusively by energizing the covered X-coil groups X1,...,X12, the covered X-coil groups X1,...,X12 and / or Y-coil groups Y1,...,Y12 can be controlled such that the magnetic partial forces Fx1,...,Fx12 of the X-coil groups X1,...,X12 and the magnetic partial forces Fy1,...,Fy12 of the Y-coil groups Y1,...,12 jointly contribute to the force F and / or the torque M. In such a case, the force F and / or the torque M can be generated from the totality of the magnetic partial forces of all covered and controlled coil groups 321.As can be seen in the relationship shown, by individually controlling the X-coil groups 323 and Y-coil groups 325, the force F acting on the rotor 400 and the torque M acting on the rotor 400 can be generated simultaneously. Thus, a movement of the rotor 400 can be generated that consists of a superposition of the translational movement caused by the force F and the rotational movement caused by the torque M.

[0156] This allows the rotor 400 to perform any conceivable, essentially planar, movement. The rotor 400 can be moved in any direction relative to the stator unit 300, in any orientation.

[0157] The actual relationship between the partial magnetic forces Fx1,...,Fx12, or Fy1,..., Fy12 acting on the individual magnet units 407 and the resulting forces Fx, Fy, Fz and torques Mx, My, Mz acting on the center Z of the rotor 400 can depend on the design of the rotor 400, such as shape, size and weight, and on the design of the magnet units 407, such as shape and size, and on the position of the magnet units 407 on the rotor 400.

[0158] Such a relationship between a movement to be performed by the rotor 400 and the force F and / or the torque M required for this purpose can be stored in the control unit 201, taking into account the respective properties of the rotor 400. Alternatively, the control unit 201 can be configured to calculate corresponding forces F and / or torques M based on the properties of the rotor 400. Alternatively or additionally, the control unit 201 can be provided with a relationship between the force F and / or the torque M required to move the rotor 400 and the magnetic partial forces required to generate the force F and / or the torque M. Corresponding relationships can be generated, for example, by reference measurements with a reference rotor 400 with different properties and for different positions and / or orientations and / or movements of the rotor 400.Alternatively, the corresponding relationships can also be based on simulations. Alternatively or additionally, the control unit 201 can calculate the corresponding partial magnetic forces, which, taken together, result in the required force F and / or the required torque M.

[0159] To generate the stator magnetic fields, the individual coil groups 321 are individually supplied with excitation currents. To control the planar drive system 200 and to move the rotor 400, a relationship is required between the force F required for a specific movement of the rotor 400 and acting at the center Z of the rotor 400, or the respective torque M, and the excitation currents I, which are to be applied to the coil groups 321 covered by the rotor 400 in order to generate stator magnetic fields. Upon interaction with the rotor magnetic fields of the magnet units 407 covering the respective coil groups 321, these generate the corresponding partial magnetic forces, which, in their entirety, result in the force F or the required torque M required for the movement.

[0160] The following relation describes, by way of example, such a relation between the force F acting on the rotor 400 or the torque M and the excitation coils of the twelve X-coil groups 323 and twelve Y-coil groups 325 covered by the rotor 400 in the graphics a), b). The relation shown describes proportionalities between the coil currents I of the force F or the torque M.

[0161] The current flowing through the individual coil groups 321 is represented as a dq current, as is usual for three-phase systems. The current flow values ​​l qX ,Y and l dX ,Y describe the q- and d-components of the excitation current of the respectively energized X-coil groups X1 ,... ,X12 or Y-coil groups ,Y12. The electrical phase angle is not shown in the vector shown.

[0162] The current values ​​shown l qX ,Y and l dX,Y indicate the excitation currents of the covered and controlled X-coil groups X1,...,X12 and Y-coil groups Y1,...,Y12, which, at a given position and / or orientation of the rotor 400, i.e., at a given coverage of the respective X-coil groups X1,...,X12 and Y-coil groups Y1,...,Y12 by the magnet units 407 of the rotor 400, with appropriate energization of the X-coil groups X1,...,X12 and Y-coil groups Y1,...,Y12, lead to the stator magnetic fields, which, upon interaction with the rotor magnetic fields of the respective magnet units 407, lead to the magnetic partial forces Fx1...,Fx12 and / or

[0163] Fy 1 ,... , Fy12 , which in turn, as a whole, result in the force F and / or the torque M required to move the rotor 400.

[0164] The actual relationship between the excitation current I and the partial magnetic force generated by the respective energized coil group 321 depends directly on the respective design of the coil groups 321 and magnet units 407 and, if applicable, on an orientation of both to one another and is not described in detail below.

[0165] The relations shown in the equations described above can be used for a translational and / or rotational movement of the rotor 400.

[0166] Fig. 7 shows a further schematic representation of the rotor 400 on the stator unit 300 according to a further embodiment.

[0167] Graphics a) to f) show various energization patterns of X-coil groups 323 and Y-coil groups 325 for moving a rotor 400 in three different orientations of the rotor 400 relative to the stator unit. Graphics a), c), and e) each show X-coil groups 323 of an X-stator position 315. Graphics b), d), and f) show Y-coil groups 325 of a Y-stator position 317. Graphics a) and b) show the rotor 400 in an orientation of -30° relative to the stator unit 300. Graphics c) and d) show the rotor 400 in an orientation of 0°. Graphics e) and f) show the rotor in an orientation of 30°.

[0168] In the embodiment shown, eight X-coil groups 323 covered by the rotor 400 and eight Y-coil groups 325 covered by the rotor 400 are energized to move the rotor 400.

[0169] In principle, the number of coil groups 323, 325 covered by the rotor 400 depends on the rotor orientation, rotor geometry, rotor extension and position, or the coil geometry, coil extension and position, and the resulting surface coverage. If one of the aforementioned variables deviates from the embodiment shown here, the number of coil groups 323, 325 covered by the rotor 400 can vary and, in certain embodiments, can even be fewer than eight.

[0170] The eight overlapped X-coil groups 323 in the embodiment of Fig. 7 are arranged in two rows of four X-coil groups 323 each, spaced apart from one another along the X-direction. The eight overlapped Y-coil groups 325 are correspondingly arranged in two rows of four Y-coil groups 325 each, spaced apart from one another in the Y-direction. A square X-current application area 337 is defined by the eight energized X-coil groups 323. A square Y-current application area 339 is defined by the eight Y-coil groups 325. In the embodiment shown, the X-current application area 337 of the eight energized X-coil groups 323 and the Y-current application area 339 of the eight energized Y-coil groups 325 are the same size and congruent.

[0171] In graphics a) to f), the different currents with different current values ​​of the eight energized X-coil groups 323 and eight energized Y-coil groups 325 are indicated by the different hatchings. The respective assignment of the current values ​​to the different hatchings is indicated in Fig. 7 by a scale. Here, a current value I is assigned to a hatching in arbitrary units from 1 to 5. The hatchings thus have a clear assignment from low (1) to high (5) current values. Each of the X-coil groups 323 and Y-coil groups 325 is controlled individually. The respective current supply is dependent on the coverage area 425 defined by the respectively covered X-coil group 323 or Y-coil group 325 and the respective movement of the rotor 400 to be carried out.

[0172] The different currents supplied to the various X-coil groups 323 or Y-coil groups 325 lead to different stator magnetic fields of the various coil groups 321. The actual current values ​​of the operating currents applied to the coil groups are determined according to the relationships explained above such that the respective currents supplied to the individual coil groups 321 lead to the stator magnetic fields which, in interaction with the rotor magnetic fields of the magnet units 407 of the rotor 400, generate the forces F and / or torques M acting on the rotor 400, which lead to the desired movement of the rotor 400.

[0173] The eight energized X-coil groups 323 define an X-current pattern 341 and the eight energized Y-coil groups 325 define a corresponding Y-current pattern 343. The X-current pattern 341 or the Y-current pattern 343 defines a geometric arrangement of the respective current values ​​of the eight energized X-coil groups 323 or the eight energized Y-coil groups 325. In the example shown, the X-current pattern 341 and the Y-current pattern 343 are each rotated by 90° to each other for the identical rotor orientation. In addition to the 90° rotation between the X-current pattern 341 and the corresponding Y-current pattern 343, the current values ​​of the individual energized X-coil groups 323 and Y-coil groups 325 are identical. The X- and Y-current patterns 341, 343, rotated by 90°, enable the rotor 400 to be controlled as uniformly as possible by means of a stator magnetic field that is as uniform as possible.

[0174] The 90° rotation of the current supply patterns 341, 343 described here depends heavily on the ideality of the coil groups 321. Asymmetries in the current supply patterns 341, 343 can occur in non-ideal areas of the coil groups 321, such as winding overhangs, edge areas, drill holes in the stator module 301, etc. Asymmetries in the current supply patterns can also occur if the rotor 400 is not aligned parallel to the stator surface 303, i.e., if the various magnet units 407 of a rotor have different distances from different coil groups 321. In the cases described, it may be that the X current supply pattern 341 cannot be converted into the Y current supply pattern 343 by a 90° rotation. In the examples shown, the X-current pattern 341 and the Y-current pattern 343 are aligned for rotation of the rotor 400 about a rotation axis oriented parallel to the Z-direction.For a correspondingly different movement of the rotor 400, the X-current supply patterns 341 and Y-current supply patterns 343 of the energized X-coil groups 323 and Y-coil groups 325 can be designed differently accordingly.

[0175] Fig. 8 shows a further schematic representation of the rotor 400 on the stator unit 300 according to a further embodiment.

[0176] The embodiment shown is based on the embodiment in Fig. 6 and includes all features described there.

[0177] In contrast to the embodiment in Fig. 6, the coil groups 321 in the embodiment shown are smaller than in the embodiment in Fig. 6. In particular, the longer sides 329 of the coil surfaces 327 defined by the coil groups 321 in the embodiment in Fig. 8 are reduced to half the length of the longer sides 329 of the coil surfaces 327 of the coil groups 321 in the embodiment in Fig. 6. The shorter sides 331 of the coil surfaces 327, however, remain unchanged. In the embodiment shown, the coil surfaces 327 defined by the coil groups 321 thus have a substantially square shape in which the longer sides 329 and the shorter sides 331 are substantially equal in length.

[0178] In the embodiment shown, the longer sides 329 and the equally long shorter sides 331 of the coil surfaces 327 of the coil groups 321 have half the length of the longer sides 421 of the magnetic surfaces 419 defined by the magnet units 407 of the rotor 400. The shorter sides 423 of the magnetic surfaces 419, however, are essentially the same length as the longer sides 329 and shorter sides 331 of the coil surfaces 321. With appropriate positioning and orientation of the rotor 400 relative to the stator unit 300, two coil groups 321 can be completely covered by one magnet unit 407 of the rotor 400.

[0179] In the embodiment shown, the X-stator layers 315 and the Y-stator layers 317 are arranged relative to one another such that the X-coil groups 323 and the Y-coil groups 325 are arranged directly above one another with respect to the Z-direction of the stator unit 300, and the coil surfaces 327 defined by the X-coil groups 323 and the Y-coil groups 325 are arranged in alignment with one another. In the embodiment shown, sixteen X-coil groups 323 are formed in each X-stator layer 315 in each stator segment 308, and sixteen Y-coil groups 325 are formed in each Y-stator layer 317, each of which is arranged in four rows of four coil groups 321 each.

[0180] Due to the smaller coil groups 321, a larger number of coil groups 321 can be covered by each magnet unit 407 of the rotor 400 in any position and orientation of the rotor 400 than is possible in the embodiment in Fig. 6. As a result, by controlling the covered coil groups 321, a higher number of partial magnetic forces acting on the magnet units 407 can be generated. This allows the control of the planar drive system 200 to be made even more precise. The higher number of partial magnetic forces acting on the magnet units 407 allows for a finer adjustment of the desired torque M and the force F acting on the rotor 400.

[0181] The finer adjustability of the torque M and the force F allows a finer adjustment of the movements that can be performed by the rotor 400.

[0182] To control and move the rotor 400, the control unit 201 identifies the coil groups 321 that are covered by the magnet units 407 of the rotor 400 in a specific position and orientation of the rotor 400 relative to the stator unit 300. For this purpose, a position of the rotor 400 is derived based on measured values ​​from a plurality of magnetic sensor elements of the stator unit 300 that represent the rotor magnetic fields of the magnet units 407 of the rotor 400. Based on the derived position of the rotor 400 and the known geometry of the rotor 400 and its magnet units 407, an overlap area 345 is defined for each magnet unit 407. The overlap area 345 describes a spatial area of ​​the stator unit 300 that corresponds to a projection of the magnetic surface 419 of the respective magnet unit 407 onto the stator surface 303 of the stator unit 300.

[0183] The determination of the coverage areas 345 can alternatively or additionally be calculated taking into account a known position and orientation of the rotor 400 relative to the stator unit 300. Knowing the position and orientation of the rotor 400, the position of the respective magnet unit 407 relative to the coil groups 321 of the stator unit 301 can be precisely determined for each magnet unit 407 of the rotor 400. Based on this, the coil groups 321 covered by the respective magnet unit 407 can be precisely determined for each magnet unit 407, and the coverage area 345 can be defined.

[0184] Subsequently, the control unit 201 identifies at least one coil group 321 for each overlap area 345, which is at least partially arranged within the overlap area 345. The coil groups 321 identified in this way are at least partially covered by the magnet units 407 of the rotor 400 and can thus, when appropriately energized, generate the corresponding magnetic fields, as described above, which, upon interaction with the magnetic fields of the magnet units 407 covering the coil groups 321, lead to the partial magnetic forces acting on the magnet units 407.

[0185] The embodiments illustrated in Figs. 6 and 8 are merely examples. Coil groups 321 with differently shaped coil surfaces 327 are also conceivable.

[0186] Fig. 9 shows a further schematic representation of a further rotor 600 on the stator unit 300 according to a further embodiment, wherein the further rotor 600 is individually controlled by fewer than eight overlapped X-coil groups 323 and / or by fewer than eight overlapped Y-coil groups 325.

[0187] In the embodiment shown, four X-coil groups 323 covered by the further rotor 600 and four Y-coil groups 325 covered by the further rotor 600 are energized to move the further rotor 600.

[0188] The additional rotor 600 has a further magnet arrangement 601 on its underside with four additional magnet units 602, i.e., a further first X-magnet unit 604, a further second X-magnet unit 605, a further first Y-magnet unit 606, and a further second Y-magnet unit 607. Each additional magnet unit 602, in turn, has a plurality of additional magnet elements 603. In the embodiment shown, each additional magnet unit 602 has five additional magnet elements 603, which are designed as rectangular, elongated elements. For example, the additional magnet units 602 can each be designed as a Halbach array magnet unit.

[0189] In the embodiment shown, the magnet units 602 are square and have an edge length that is substantially equal to the shorter sides 331 of the coil surfaces 321. In this embodiment of the rotor 600, the long side 421 of the further magnet arrangement 601 is substantially equal to the short side 423 of the further magnet arrangement 601.

[0190] In the embodiment of Fig. 9, the additional rotor 600 is thus smaller than the rotor 400 of the previous embodiments. This results in a smaller number of overlapped coil groups 321 than in the previous embodiments, whereby in this example, at least 6 x-coil groups 323 and 6 y-coil groups 325 must be energized in order to be able to move the additional rotor 600 translationally in any orientation.

[0191] This allows the additional rotor 600 to perform any conceivable, essentially planar, movement. Using the previously described method for individually energizing the coil groups with different amplitudes and phase angles, the additional rotor 600 can be moved in any direction relative to the stator unit 300 in any orientation.

[0192] Alternatively, the additional rotor 600 from the embodiment of Fig. 9, with substantially square-shaped additional magnet units 602, can also be driven by the substantially equally sized and also square coil groups 321 of the embodiment of Fig. 8. By individually controlling the coil groups 321, a translational movement of the additional rotor 600 could also be achieved in any orientation. The number of coil groups 321 covered by the magnet units 602 would be four, for example.

[0193] Furthermore, the described method can be carried out for any combination of the described rotors 400, 600 of the different embodiments and described coil groups 321 of the different embodiments.

[0194] Fig. 10 shows a flowchart of a method 100 for controlling a planar drive system 200 according to an embodiment.

[0195] To operate the planar drive system 200, the control unit 201 outputs control signals to the X-coil groups 323 and / or Y-coil groups 325 covered by the rotor 400 in a control step 101. These signals are used to energize the respective covered X-coil groups 323 and / or Y-coil groups 325 and to generate stator magnetic fields through the controlled X-coil groups 323 and / or Y-coil groups 325 to move the rotor 400 from a first position and a first orientation to a second position and / or a second orientation of the rotor 400. The X-coil groups 323 and / or Y-coil groups 325 covered by the rotor are controlled individually.

[0196] For this purpose, in a force determination step 103, the control unit 201 determines the force F and / or the required torque M required to execute the movement of the rotor 400. The required force F or the required torque M depend on the design of the rotor 400, for example, on the loading of the rotor 400 with a good to be transported.

[0197] In a partial force determination step 105, the control unit 201 subsequently determines the magnetic partial forces generated by the differently energized coil groups 321 and acting on the rotor 400 or the magnet units 407 of the rotor 400. The total of the magnetic partial forces results in the force F or the required torque M required to move the rotor 400.

[0198] Subsequently, in a current determination step 107, the control unit 201 determines the individual current required to generate the previously determined partial magnetic forces for each of the coil groups 321 covered by the rotor 400.

[0199] According to one embodiment, the determination of the force F acting on the rotor 400 and / or the acting torque M, which each lead to the movement of the rotor 400, in force determination step 103 and / or the determination of the partial magnetic forces of the covered coil groups 321 acting on the magnet units 407 in partial force determination step 105 and / or the determination of the energization of the covered coil groups 321 in energization determination step 107 is carried out taking into account at least one reference relationship between the energization of the coil groups 321 and the partial magnetic forces acting on the covered magnet units 407 and / or the force F acting on the rotor 400 and / or the acting torque M. The reference relationship can be based on reference measurements and / or on simulations and / or analytical calculations and / or artificial intelligence models.

[0200] Alternatively or additionally, trained artificial intelligence models, such as neural networks, can also be used to determine the force acting on the rotor and / or the torque acting on the rotor in the force determination step and / or the partial magnetic forces of the covered coil groups acting on the magnet units. According to one embodiment, the movement of the rotor 400 comprises a translational movement and / or a rotational movement about a rotational axis oriented parallel to the Z direction.

[0201] According to one embodiment, in the control step 101, at least one X-coil group 323 and at least one Y-coil 325, which are covered by the same magnetic element 407 of the rotor 400, are controlled simultaneously.

[0202] According to a further embodiment, in the control step 101, at least two X-coil groups 323 and / or at least two Y-coil groups 325, which are covered by the same magnetic element 407 of the rotor 400, are controlled to be energized with different coil currents.

[0203] According to one embodiment, in control step 101, at least eight X-coil groups 323 and / or eight Y-coil groups 325 covered by the rotor 400 are individually controlled. The eight X-coil groups 323 are arranged in two rows of four X-coil groups spaced apart from one another along the X-direction, and the eight Y-coil groups 325 are arranged in two rows of four Y-coil groups 325 each spaced apart along the Y-direction. The eight X-coil groups 323 define an X-current application area 337, and the eight Y-coil groups 325 define a Y-current application area 339 that is congruent with the X-current application area 337. The at least eight X-coil groups 323 are energized according to an X-current application pattern 341. The at least eight Y-coil groups 325 are energized according to a Y-energization pattern 343.

[0204] Fig. 11 shows another flowchart of the method 100 for controlling a planar drive system 200 according to another embodiment.

[0205] The embodiment in Figure 10 is based on the embodiment in Figure 9 and includes all method steps described there.

[0206] In the embodiment shown, in a coil determination step 107, the control unit 201 first determines the coil groups 321 that are covered by the magnet units 407 of the rotor 400 or by the rotor 400. For this purpose, in a detection step 111, the rotor magnetic fields of the individual magnet units 407 of the rotor 400 are detected by magnetic field sensors of the stator unit 300. In a definition step 113, the control unit 201 subsequently defines an overlap area 345 for each magnet unit 407.

[0207] The overlap area 345 denotes an area of ​​the stator unit which corresponds to a projection of the magnetic surface 419 of the respective magnetic unit 407 onto the stator surface 303 of the stator unit 300.

[0208] In a determination step 115, the control unit 201 subsequently determines for each magnet unit 407 or for the rotor 400 the coil groups 321 which are at least partially arranged in the overlap region 345.

[0209] List of reference symbols

[0210] 100 Methods for controlling a planar drive system

[0211] 101 Control step

[0212] 103 Force determination step

[0213] 105 Partial force determination step

[0214] 107 Current determination step

[0215] 109 Coil determination step

[0216] 111 Detection step

[0217] 113 Definition step

[0218] 115 Investigation step

[0219] 200 Planar drive system

[0220] 201 Control unit

[0221] 203 Data connection

[0222] 300 stator unit

[0223] 301 Stator module

[0224] 303 Stator surface

[0225] 305 Stator module housing

[0226] 307 connecting cable

[0227] 308 Stator segment

[0228] 309 Stator conductor

[0229] 313 Stator position

[0230] 315 X-stator position

[0231] 317 Y-stator position

[0232] 321 coil group

[0233] 323 X-coil group

[0234] 325 Y-coil group

[0235] 327 coil area

[0236] 329 longer side of the coil surface

[0237] 331 shorter side of the coil surface

[0238] 333 X-coil pair area

[0239] 335 Y-coil pair area

[0240] 337 X- current area

[0241] 339 Y- current supply area X-current supply pattern Y-current supply pattern Coverage area Rotor Magnet arrangement Running surface Free surface Fastening structure Magnet unit Magnet element First X-magnet unit Second X-magnet unit First Y-magnet unit Second Y-magnet unit Magnetic surface Longer side Shorter side Coverage area -X1 Coverage area of ​​the first X-coil group -X2 Coverage area of ​​the second X-coil group -X3 Coverage area of ​​the third X-coil group -X4 Coverage area of ​​the fourth X-coil group -X5 Coverage area of ​​the fifth X-coil group -X6 Coverage area of ​​the sixth X-coil group -X7 Coverage area of ​​the seventh X-coil group -X8 Coverage area of ​​the eighth X-coil group -X9 Coverage area of ​​the ninth X-coil group -X10 Coverage area of ​​the tenth X-coil group -X11 Coverage area of ​​the eleventh X-coil group-X12 Coverage area of ​​the twelfth X-coil group-Y1 Coverage area of ​​the first Y-coil group-Y1 Coverage area of ​​thefirst Y-coil group-Y2 Coverage area of ​​the second Y-coil group-Y3 Coverage area of ​​the third Y-coil group-Y4 Coverage area of ​​the fourth Y-coil group-Y5 Coverage area of ​​the fifth Y-coil group 425-Y6 Coverage area of ​​the sixth Y-coil group

[0242] 425-Y7 Coverage area of ​​the seventh Y-coil group

[0243] 425-Y8 Coverage area of ​​the eighth Y-coil group

[0244] 425-Y9 Coverage area of ​​the ninth Y-coil group

[0245] 425-Y10 Coverage area of ​​the tenth Y-coil group

[0246] 425-Y11 Coverage area of ​​the eleventh Y-coil group

[0247] 425-Y12 Coverage area of ​​the twelfth Y-coil group

[0248] XI first X-coil group

[0249] X2 second X-coil group

[0250] X3 third X-coil group

[0251] X4 fourth X-coil group

[0252] X5 fifth X-coil group

[0253] X6 sixth X-coil group

[0254] X7 seventh X-coil group

[0255] X8 eighth X-coil group

[0256] X9 ninth X-coil group

[0257] X10 tenth X-coil group

[0258] XI I eleventh X-coil group

[0259] X12 twelfth X-coil group

[0260] Y1 first Y-coil group

[0261] Y2 second Y-coil group

[0262] Y3 third Y-coil group

[0263] Y4 fourth Y-coil group

[0264] Y5 fifth Y-coil group

[0265] Y6 sixth Y-coil group

[0266] Y7 seventh Y-coil group

[0267] Y8 eighth Y-coil group

[0268] Y9 ninth Y-coil group

[0269] Y10 tenth Y-coil group

[0270] Y11 eleventh Y-coil group

[0271] Y12 twelfth Y-coil group

[0272] FX1 magnetic partial force of the first X-coil group

[0273] FX2 magnetic partial force of the second X-coil group

[0274] FX3 magnetic partial force of the third X-coil group FX4 magnetic partial force of the fourth X-coil group FX5 magnetic partial force of the fifth X-coil group FX6 magnetic partial force of the sixth X-coil group FX7 magnetic partial force of the seventh X-coil group FX8 magnetic partial force of the eighth X-coil group FX9 magnetic partial force of the ninth X-coil group FX10 magnetic partial force of the tenth X-coil group FX11 magnetic partial force of the eleventh X-coil group FX12 magnetic partial force of the twelfth X-coil group

[0275] FY 1 magnetic partial force of the first Y-coil group

[0276] FY2 partial magnetic force of the second Y-coil group

[0277] FY3 magnetic partial force of the third Y-coil group FY4 magnetic partial force of the fourth Y-coil group FY5 magnetic partial force of the fifth Y-coil group FY6 magnetic partial force of the sixth Y-coil group FY7 magnetic partial force of the seventh Y-coil group FY8 magnetic partial force of the eighth Y-coil group FY9 magnetic partial force of the ninth Y-coil group

[0278] FY10 magnetic partial force of the tenth Y-coil group FY11 magnetic partial force of the eleventh Y-coil group FY12 magnetic partial force of the twelfth Y-coil group

[0279] 3Bx x-component of the magnetic field of a coil group 3By y-component of the magnetic field of a coil group 3Bz z-component of the magnetic field of a coil group 4Bx x-component of the magnetic field of a magnet unit 4By x-component of the magnetic field of a magnet unit 4Bz x-component of the magnetic field of a magnet unit

[0280] F Force on the runner

[0281] Fx x-component of the magnetic force on the rotor

[0282] Fy y-component of the magnetic force on the rotor

[0283] Fz z-component of the magnetic force on the rotor

[0284] M torque on the rotor

[0285] Mx x-component of the rotor torque

[0286] My y-component of the rotor torque Mz z-component of the rotor torque a Angle of rotation

[0287] Z Center of the runner

[0288] 500 sensor module

[0289] 501 magnetic field sensor

[0290] 600 more runners

[0291] 601 additional magnet arrangement

[0292] 602 additional magnet unit

[0293] 603 additional magnetic element

[0294] 604 additional first X-magnet units

[0295] 605 additional second X-magnet unit

[0296] 606 additional first Y-magnet unit

[0297] 607 additional second Y-magnet unit

Claims

Claims 1. A method (100) for operating a planar drive system (200), wherein the planar drive system (200) comprises a stator unit (300) with a plurality of coil groups (321) for generating a stator magnetic field and a rotor (400) with a plurality of magnet units (409) for generating a rotor magnetic field, wherein the rotor (400) on the stator unit (300) can be driven via a magnetic coupling between the stator magnetic field and the rotor magnetic field, wherein the plurality of coil groups (321) comprises a plurality of X-coil groups (323) and a plurality of Y-coil groups (325) each having substantially rectangular coil surfaces (327),wherein the X-coil groups (323) extend with a longer side (329) of the substantially rectangular coil surface (327) along an X-direction and the Y-coil groups (325) extend with a longer side (329) of the substantially rectangular coil surfaces (327) along a Y-direction of the stator unit (300) oriented perpendicular to the X-direction, wherein the plurality of X-coil groups (323) and the plurality of Y-coil groups (325) are each arranged in at least two stator layers (313) spaced apart from one another along a Z-direction perpendicular to the X-direction and Y-direction, wherein the plurality of magnet units (409) comprises a plurality of X-magnet units (411, 413) and a plurality of Y-magnet units (415, 417), each having substantially rectangular magnet surfaces (421), wherein the X-magnet units (411, 413) are oriented with a longer side (421) of the substantially rectangular magnetic surfaces (421) along an X-direction of the rotor (400),wherein the Y-magnet units (415, 417) are oriented with a longer side (421) of the substantially rectangular magnetic surfaces (421) along a Y-direction of the rotor (400) oriented perpendicular to the X-direction, and wherein the method (100) comprises: Outputting control signals by a control unit (201) of the planar drive system (200) to X-coil groups (323) and / or Y-coil groups (325) covered by the rotor (400) for energizing the X-coil groups (323) and / or Y-coil groups (325) covered by the rotor (400) and for generating stator magnetic fields of the controlled X-coil groups (323) and / or Y-coil groups (325) for moving the rotor (400) from a first position and a first orientation into a second position and / or a second orientation of the rotor (400) relative to the stator unit (300) in a control step (101), wherein the energized X-coil groups (323) and Y-coil groups (325) are controlled individually, and wherein at least two of the rotor (400) covered X-coil groups (323) and / or at least two Y-coil groups covered by the rotor (400) (325) can be controlled to supply current with different coil currents.

2. The method (100) of claim 1, wherein the movement of the rotor (400) comprises a translational movement between the first position and the second position and / or a rotational movement between the first orientation and the second orientation.

3. Method (100) according to claim 1 or 2, wherein at least one X-coil group (323) and at least one Y-coil group (325) which are covered by the same magnetic element (407) of the rotor (400) are controlled simultaneously.

4. Method (100) according to one of the preceding claims, wherein at least two X-coil groups (323) and / or at least two Y-coil groups (325) which are covered by the same magnetic element (407) of the rotor (400) are controlled for energization with different coil currents.

5. The method (100) according to any one of the preceding claims, wherein the longer sides (329) of the coil surfaces (327) of the X-coil groups (323) and Y-coil groups (325) are substantially the same length as or shorter than the longer sides (421) of the magnet surfaces (421) of the X-magnet units (411, 414) and Y-magnet units (415, 417).

6. The method (100) according to claim 5, wherein at least eight X-coil groups (323) arranged in an X-stator layer (315) and / or at least eight Y-coil groups (325) arranged in a Y-stator layer (317) are controlled for energization, and wherein the at least eight X-coil groups (323) are arranged in two rows spaced apart from one another along the X-direction, each of four X-coil groups (323) spaced apart along the Y-direction, and / or wherein the at least eight Y-coil groups (325) are arranged in two rows spaced apart from one another along the Y-direction, each of four Y-coil groups (325) spaced apart along the X-direction.

7. The method (100) according to claim 6, wherein an X-energization area (337) defined by the at least eight X-coil groups (323) is congruent with a Y-energization area (339) defined by the at least eight Y-coil groups (325).

8. The method (100) according to any one of the preceding claims 6 or 7, wherein an X-energization pattern (341) of the at least eight energized X-coil groups (323) corresponds to a Y-energization pattern (343) of the at least eight energized Y-coil groups (325) rotated by substantially 90° about the Z-axis.

9. Method (100) according to one of the preceding claims, wherein the control step (101) comprises: Determining a force (F) and / or a torque (M) required to move the rotor (400) in a force determination step (103); Determining partial magnetic forces acting on the individual magnet units (407) of the rotor (400) by the stator magnetic fields of the coil units (321) covered by the magnet units (407) in a partial force determination step (105), wherein a total of the partial magnetic forces acting on the individual magnet units (407) of the rotor (400) results in the force acting on the rotor (400) and / or the torque acting on the rotor (400); and Determining the individual currents of the coil groups (321) covered by the rotor (400) necessary to generate the determined magnetic partial forces in a current determination step (107).

10. The method (100) according to claim 9, wherein the determination of the force (F) acting on the rotor (400) and / or the torque (M) acting on the rotor (400) in the force determination step (103) and / or the determination of the partial magnetic forces of the overlapped coil groups (321) acting on the magnet units (407) in the partial force determination step (105) and / or the determination of the energizations of the overlapped coil groups (321) in the energization determination step (107) are carried out taking into account at least one reference relationship between the energization of the coil groups (321) and the partial magnetic forces acting on the overlapping magnet units (407) and / or the force (F) acting on the rotor (400) and / or the torque (M) acting on the rotor (400).

11. Method (100) according to one of the preceding claims 9 to 10, wherein the partial magnetic force acting on a magnet unit (407) of the rotor (400) of an energized coil group (321) covered by the respective magnet unit (407) is applied as a force acting on a center of gravity of a coil group (321) covered by the respective coil group (321) the magnetic partial force acting on the covering surface (425) of the magnet unit (407) is defined.

12. Method (100) according to one of the preceding claims 9 to 11, wherein the totality of the partial magnetic forces generated by the energization of the X-coil groups (323) covered by the rotor (400) generates the torque acting on the rotor (400) and causes a rotational movement of the rotor (400) about the Z-direction, and wherein the totality of the partial magnetic forces generated by the energization of the Y-coil groups (325) covered by the rotor (400) generates the force acting on the rotor (400) and causes a translational movement of the rotor (400) along the Y-direction.

13. The method (100) according to any one of the preceding claims, further comprising: determining the coil groups (321) of the stator unit (300) that are covered by the magnet units (407) of the rotor (400) in a coil determination step (107), wherein the coil determination step (109) comprises: Detecting the rotor magnetic fields of the individual magnet units (407) of the rotor (400) by magnetic field sensors of the stator unit (300) by the control unit (201) in a detection step (111); Defining an overlap area (345) for each magnet unit (407) by the control unit (201) in a definition step (113), wherein the overlap area (345) characterizes an area of ​​the stator unit (300) that corresponds to a projection of the magnetic surface (419) of the respective magnet unit (407) onto a stator surface (303) of the stator unit (300); and Determining the coil groups (321) which are at least partially arranged in the overlap region (345) by the control unit (201) in a determination step (115).

14. Method (100) according to one of the preceding claims, wherein a rotation angle (a) of a rotational movement of the rotor (400) is selectable for any value between 0° and 360°.

15. Planar drive system (200) comprising a stator unit (300) with a plurality of coil groups (321) for generating a stator magnetic field, at least one rotor (400) with a plurality of magnet units (407) for generating a rotor magnetic field and a control unit (201) for controlling the planar drive system (200), wherein a magnetic coupling between the Stator magnetic field and the rotor magnetic field of the rotor (400) on the stator unit (300), wherein the plurality of coil groups (321) comprises a plurality of X-coil groups (323) and a plurality of Y-coil groups (325) each having substantially rectangular coil surfaces (327), wherein the X-coil groups (323) extend with a longer side (329) of the substantially rectangular coil surface (327) along an X-direction and the Y-coil groups (325) extend with a longer side (329) of the substantially rectangular coil surfaces (327) along a Y-direction of the stator unit (300) oriented perpendicular to the X-direction, wherein the plurality of X-coil groups (323) and the plurality of Y-coil groups (325) each extend in a direction perpendicular to the X-direction and Y-direction perpendicular to the Z-direction, wherein the plurality of magnet units (409) comprise a plurality of X-magnet units (411,413) and a plurality of Y-magnet units (415, 417) each having substantially rectangular magnetic surfaces (421), wherein the X-magnet units (411, 413) are oriented with a longer side (421) of the substantially rectangular magnetic surfaces (421) along an X-direction of the rotor (400), wherein the Y-magnet units (415, 417) are oriented with a longer side (421) of the substantially rectangular magnetic surfaces (421) along a Y-direction of the rotor (400) oriented perpendicular to the X-direction, wherein the longer sides (329) of the coil surfaces (327) of the X-coil groups (323) and Y-coil groups (325) are substantially the same length as the longer sides (421) of the magnetic surfaces (421) of the X-magnet units (411, 414) and Y-magnet units (415, 417), and wherein the control unit (201) is configured to carry out the method (100) according to one of the preceding claims 1 to 14., 16. Planar drive system (200) according to claim 15, wherein the X-coil groups (323) and the Y-coil groups (325) have coil areas (327) of equal size, wherein the X-coil groups (323) are arranged in an X-stator layer, wherein the Y-coil groups (325) are arranged in at least one Y-stator layer, and wherein X-coil pair areas (333) spanned by X-coil groups (323) spaced apart in pairs along the Y-direction of at least one X-stator layer are congruent with Y-coil pair areas (335) spanned by Y-coil groups (325) spaced apart in pairs along the X-direction of at least one Y-stator layer.

17. Planar drive system (200) according to claim 15 or 16, wherein an X-coil group (323) is arranged to generate a stator magnetic field with a Y-component and a Z-component, wherein a Y-coil group (325) is arranged to generate a To generate a stator magnetic field with an X component and a Z component, wherein an X component is aligned along the X direction, a Y component is aligned along the Y direction and a Z component is aligned along a Z direction of the stator unit (300) oriented perpendicular to the X direction and the Y direction.

18. Planar drive system (200) according to one of the preceding claims 15 to 17, wherein an X-magnet unit (411, 413) is configured to generate a rotor magnetic field with a Y-component and a Z-component, wherein a Y-magnet unit (415, 417) is configured to generate a rotor magnetic field with an X-component and a Z-component, wherein an X-component is oriented along the X-direction, a Y-component is oriented along the Y-direction and a Z-component is oriented along a Z-direction of the rotor (400) oriented perpendicular to the X-direction and the Y-direction.

19. Planar drive system (200) according to one of the preceding claims 15 to 18, wherein the rotor (400) comprises two X-magnet units (411, 413) and two Y-magnet units (415, 417), wherein the X-magnet units (411, 413) are arranged in the Y-direction on opposite sides of the rotor (400) and the Y-magnet unit (415, 417) are arranged in the X-direction on opposite sides of the rotor (400).

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