Exhaust pipe and manufacturing method therefor, and temperature control apparatus

Abstract

An exhaust pipe and a manufacturing method therefor, and a temperature control apparatus. The exhaust pipe is configured for temperature regulation in a process for producing display products, and comprises: a first gas guide pipe (1) and a second gas guide pipe (2), wherein the first gas guide pipe (1) is sleeved in the second gas guide pipe (2), such that a first space (A) with at least one end closed is formed between the first gas guide pipe (1) and the second gas guide pipe (2); a first end (1a) of the first gas guide pipe (1) is in communication with an external gas source; the first space (A) is closed at the end where the first end (1a) is located; and in the extension direction of the second gas guide pipe (2), a plurality of first exhaust holes (H1) are uniformly distributed in the pipe wall of the second gas guide pipe (2), and the length of a movement path traveled by the gas from the external gas source, from entering the first end (1a) to being discharged through the first exhaust hole (H1) through which the gas is first discharged, is at least greater than the length of the first gas guide pipe (1). The exhaust pipe can solve the technical problem in the prior art of a poor temperature control effect of exhaust pipes affecting the product yield.

Description

Exhaust pipe and manufacturing method thereof, and temperature control device

[0001] Cross-reference to related applications

[0002] The present application claims priority to the Chinese patent application No. 202410635850.2, filed on May 21, 2024, and entitled "Exhaust pipe and manufacturing method thereof, and temperature control device", the content of which is incorporated herein by reference in its entirety. TECHNICAL FIELD

[0003] The present disclosure relates to the technical field of electroluminescence, and particularly relates to an exhaust pipe and manufacturing method thereof, and a temperature control device. BACKGROUND

[0004] In the production process of an organic light-emitting diode (OLED) display panel, a temperature control device is usually used to control the temperature in the process.

[0005] In the prior art, an exhaust pipe is usually arranged in the temperature control device, as shown in FIG. 1, the exhaust pipe wall is distributed with a plurality of exhaust holes, after cold air is introduced into the air inlet end of the exhaust hole, the cold air enters the inside of the exhaust pipe, and the gas is directly sprayed out of the exhaust hole. Since the gas sprayed out of the exhaust hole near the air inlet end has a lower temperature, the defects of the OLED display panel are concentrated near the exhaust hole near the air inlet end, which affects the product yield. SUMMARY

[0006] Embodiments of the present disclosure provide an exhaust pipe and manufacturing method thereof, and a temperature control device, to solve the technical problem that the exhaust pipe in the prior art has poor temperature control effect and affects the product yield.

[0007] In a first aspect, to solve the above technical problem, an embodiment of the present disclosure provides an exhaust pipe for process temperature control of a display product, comprising:

[0008] A first gas guide pipe and a second gas guide pipe, the first gas guide pipe is sleeved in the second gas guide pipe, so that a first space with at least one closed end is formed between the first gas guide pipe and the second gas guide pipe;

[0009] The first end of the first gas guide pipe is in communication with an external gas source, and the first space is closed at the end where the first end is located;

[0010] In the extension direction of the second gas guide pipe, a plurality of first exhaust holes are uniformly distributed on the pipe wall of the second gas guide pipe, and the movement path length of the gas of the external gas source from entering the first end to being discharged from the first exhaust hole that is discharged first is at least greater than the length of the first gas guide pipe.

[0011] In a possible implementation, a second end of the first gas guide tube opposite to the first end is open, and the opening of the second end discharges gas in the first gas guide tube into the first space;

[0012] Alternatively, the second end is closed, and the first gas guide tube has a plurality of second gas discharge holes on a tube wall close to the second end, and the plurality of second gas discharge holes discharge gas in the first gas guide tube into the first space.

[0013] In a possible implementation, the first gas guide tube comprises:

[0014] a plurality of sub gas guide tubes that are sleeved with each other, wherein adjacent two sub gas guide tubes of the plurality of sub gas guide tubes comprise a first sub gas guide tube and a second sub gas guide tube, the first sub gas guide tube is sleeved in the second sub gas guide tube, so that a second space that is closed at least at one end is formed between the first sub gas guide tube and the second sub gas tube, and the closed end of the second space is close to the first end;

[0015] The gas inlet position and the gas outlet position of the first sub gas guide tube and the second sub gas guide tube are respectively located at different ends of the first gas guide tube.

[0016] In some embodiments, a ratio of a cross-sectional area of the second gas guide tube for containing gas to a cross-sectional area of the first gas guide tube for containing gas is greater than 2.

[0017] In a possible implementation, the gas inlet position of the first sub gas guide tube is close to the first end, and the gas outlet position of the first sub gas guide tube is close to the second end; wherein the second end is another end of the first gas guide tube opposite to the first end.

[0018] The second sub gas guide tube is closed at the end where the second end is located, and has a plurality of third gas discharge holes on a tube wall close to the first end.

[0019] In a possible implementation, the first sub gas guide tube is closed at the end where the second end is located.

[0020] The first sub gas guide tube has a plurality of fourth gas discharge holes on a tube wall close to the second end.

[0021] In a possible implementation, the first sub gas guide tube is open at the end where the second end is located.

[0022] In a possible implementation, the gas inlet position of the first sub gas guide tube is close to the second end, and the first sub gas guide tube is closed at the end where the second end is located, and the gas outlet position of the first sub gas guide tube is close to the first end; wherein the second end is another end of the first gas guide tube opposite to the first end.

[0023] The first sub-air pipe has a plurality of fifth exhaust holes on the pipe wall close to the first end.

[0024] In a possible implementation, the second sub-air pipe is arranged at the end opening of the second end.

[0025] In a possible implementation, the second sub-air pipe is arranged at the end closing of the second end.

[0026] The second sub-air pipe has a plurality of sixth exhaust holes on the pipe wall close to the second end.

[0027] In a possible implementation, the first exhaust hole intersects with the opening direction of the exhaust hole in the first air pipe.

[0028] In a possible implementation, the exhaust pipe further comprises:

[0029] A plurality of support columns are arranged between the pipe walls of two adjacent air pipes.

[0030] In a possible implementation, the material of the exhaust pipe comprises at least one of glass, metal, ceramic, and plastic.

[0031] In a possible implementation, the thickness of the first air pipe that closes part of the first space is less than the wall thickness of the first air pipe.

[0032] In a possible implementation, the material of the exhaust pipe is the metal or the plastic, and the fusion joint position of the first air pipe and the second air pipe has a fusion joint.

[0033] In a second aspect, the embodiments of the present disclosure provide a manufacturing method of an exhaust pipe, comprising:

[0034] Providing a first air pipe and a second air pipe;

[0035] Sleeving the first air pipe in the second air pipe to form a first space that is closed at least at one end between the first air pipe and the second air pipe; wherein the first end of the first air pipe is in communication with an external air source, the first space is closed at the end where the first end is located; in the extension direction of the second air pipe, a plurality of first exhaust holes are uniformly distributed on the pipe wall of the second air pipe, and the movement path length of the gas from the external air source from entering the first end to being discharged from the first exhaust hole that is discharged first is at least greater than the length of the first air pipe.

[0036] In a possible implementation, the sleeving of the first air pipe in the second air pipe comprises:

[0037] folding the first end of the first air guide tube and fusing it with the corresponding end of the second air guide tube; wherein the second end of the first air guide tube opposite to the first end is closed, and a plurality of second air exhaust holes are arranged on the tube wall of the first air guide tube close to the second end; or, the second end of the first air guide tube is open.

[0038] In a possible implementation, a plurality of support columns are arranged on the tube wall of the first air guide tube uniformly before the first end of the first air guide tube is folded.

[0039] After the first end of the first air guide tube is folded and fused with the first end of the second air guide tube, the second air guide tube is baked at positions corresponding to the support columns, so that the support columns are fused with the second air guide tube.

[0040] In a third aspect, the embodiments of the present disclosure provide a temperature control device, comprising:

[0041] a closed cavity;

[0042] the exhaust pipe as described in the first aspect is located in the closed cavity;

[0043] an external air source located outside the closed cavity, the external air source being in communication with the exhaust pipe. BRIEF DESCRIPTION OF DRAWINGS

[0044] FIG. 1 is a schematic diagram of an exhaust pipe;

[0045] FIG. 2 is a structural schematic diagram of an exhaust pipe provided by an embodiment of the present disclosure;

[0046] FIG. 3 is a structural schematic diagram of another exhaust pipe provided by an embodiment of the present disclosure;

[0047] FIG. 4 is a three-dimensional perspective view of an exhaust pipe provided by an embodiment of the present disclosure;

[0048] FIG. 5 is a structural schematic diagram of another first air guide tube provided by an embodiment of the present disclosure;

[0049] FIG. 6 is a structural schematic diagram of another exhaust pipe provided by an embodiment of the present disclosure;

[0050] FIG. 7 is a structural schematic diagram of another first air guide tube provided by an embodiment of the present disclosure;

[0051] FIG. 8 is a structural schematic diagram of another exhaust pipe provided by an embodiment of the present disclosure;

[0052] FIG. 9 is a structural schematic diagram of another first air guide tube provided by an embodiment of the present disclosure;

[0053] FIG. 10 is a structural schematic diagram of another exhaust pipe provided by an embodiment of the present disclosure;

[0054] FIG. 11 is a structural schematic diagram of another first air guide tube according to an embodiment of the present disclosure;

[0055] FIG. 12 is a three-dimensional perspective view of another exhaust tube according to an embodiment of the present disclosure;

[0056] FIG. 13 is a three-dimensional perspective view of another exhaust tube according to an embodiment of the present disclosure;

[0057] FIG. 14 is a cross-sectional view of another exhaust tube according to an embodiment of the present disclosure;

[0058] FIG. 15 is a structural schematic diagram of an exhaust tube according to an embodiment of the present disclosure;

[0059] FIG. 16 is a schematic diagram of a first air guide tube before welding according to an embodiment of the present disclosure;

[0060] FIG. 17 is a structural schematic diagram of another exhaust tube according to an embodiment of the present disclosure;

[0061] FIG. 18 is a flowchart of a manufacturing method of an exhaust tube according to an embodiment of the present disclosure;

[0062] FIG. 19 is a schematic diagram of forming an exhaust tube according to an embodiment of the present disclosure;

[0063] FIG. 20 is a three-dimensional schematic diagram of another first air guide tube according to an embodiment of the present disclosure;

[0064] FIG. 21 is a schematic diagram of a baking support column according to an embodiment of the present disclosure;

[0065] FIG. 22 is a structural schematic diagram of a temperature control device according to an embodiment of the present disclosure.

[0066] Reference signs: first air guide tube 1, second air guide tube 2, first space A, first end 1a, second end 1b, first exhaust hole H1, second exhaust hole H2, sub air guide tube 11, first sub air guide tube 11a, second sub air guide tube 11b, second space B, third exhaust hole H3, fourth exhaust hole H4, fifth exhaust hole H5, sixth exhaust hole H6, support column 3; closed cavity 100, exhaust tube 200, external air source 300. DETAILED DESCRIPTION

[0067] The present disclosure provides an exhaust tube and a manufacturing method thereof and a temperature control device to solve the technical problem of poor temperature control effect of the exhaust tube in the prior art, which affects product yield.

[0068] It is to be understood that the specific structure and features disclosed in the embodiments of the present disclosure are merely representative, and are for the purpose of describing the exemplary embodiments of the present disclosure. However, the present disclosure can be embodied in many alternative forms, and should not be construed as being limited to the embodiments set forth herein.

[0069] In the description of the present disclosure, it should be understood that the terms "center", "transverse", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are for the purpose of facilitating the description of the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be construed as limiting the present disclosure. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can be explicitly or implicitly included one or more features. In the description of the present disclosure, unless otherwise specified, the meaning of "a plurality of" is two or more. In addition, the term "comprise" and any variations thereof are intended to cover non-exclusive inclusion.

[0070] The terms used in the present disclosure are merely intended to describe specific embodiments and are not intended to limit exemplary embodiments. Unless the context clearly indicates otherwise, the singular form "a", "an", and "the" as used herein is also intended to include the plural. It should also be understood that the terms "comprise" and / or "include" as used herein specify the presence of stated features, integers, steps, operations, units and / or components, without excluding the presence or addition of one or more other features, integers, steps, operations, units, components and / or combinations thereof.

[0071] In order to make the above-mentioned purposes, features and advantages of the present disclosure more obvious and easy to understand, the present disclosure will be further described below in conjunction with the drawings and embodiments. However, the example embodiments can be implemented in various forms, and should not be understood as being limited to the embodiments set forth herein; on the contrary, these embodiments are provided to make the present disclosure more comprehensive and complete, and to fully convey the ideas of the example embodiments to those skilled in the art. The same reference signs in the drawings represent the same or similar structures, so repeated description thereof will be omitted. The expressions of position and direction described in the present disclosure are described with reference to the drawings, but changes can also be made as needed, and the changes made are included in the protection scope of the present disclosure. The drawings of the present disclosure are only used to show the relative positional relationship and do not represent the true proportions.

[0072] It should be noted that the specific details set forth in the following description are not intended to limit the disclosure in any way but rather to provide a thorough understanding of the disclosure. The present disclosure can be practiced with other systems, methods, and materials besides those described herein, and can be practiced with different specific embodiments than those described herein. Thus, the present disclosure is not limited to the specific embodiments described herein, but only by the claims. The description that follows is intended to provide a description of the preferred embodiments of the present disclosure and is not intended in any way to limit the scope of the present disclosure. The present disclosure is limited only by the claims.

[0073] The exhaust pipe and the manufacturing method thereof and the temperature control device provided by the embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0074] Please refer to FIG. 2 for a structural schematic diagram of an exhaust pipe according to an embodiment of the present disclosure, which is used for process temperature control of display products. The exhaust pipe comprises:

[0075] A first gas guide pipe 1 and a second gas guide pipe 2, the first gas guide pipe 1 is sleeved in the second gas guide pipe 2, so that a first space A is formed between the first gas guide pipe 1 and the second gas guide pipe 2, and the first space A is closed at least at one end;

[0076] The first end 1a of the first gas guide pipe 1 is in communication with an external gas source (not shown), and the first space A is closed at the end where the first end 1a is located;

[0077] In the extension direction X of the second gas guide pipe 2, a plurality of first exhaust holes H1 are uniformly distributed on the pipe wall of the second gas guide pipe 2, and the length of the movement path of the gas from the first end 1a to the first exhaust hole H1 from which the gas is first exhausted is at least greater than the length of the first gas guide pipe 1.

[0078] A display product layer usually comprises a plurality of film layers, which need to be formed at a specific temperature range. After the corresponding film layer completes the reaction, the display product needs to be cooled, which makes the manufacturing process of the display product in a high-temperature-low-temperature-high-temperature cycle process, and the temperature of the process is mainly controlled by the temperature control device in which the display product is placed. The stage in which the film layer is at a specific temperature to react is the process stage of the corresponding film layer in the present disclosure. In the process stage, the temperature control device controls the heat source to heat the chamber of the temperature control device, so that the chamber of the temperature control device is a high-temperature thermal environment.

[0079] Some film layers in a display panel not only need to be in a specific temperature range (i.e. a temperature range required in a process stage), but also need to be protected by a protection gas filled into a chamber of a temperature control device during a reaction of the film layer. Such a gas filled into the chamber of the temperature control device during the reaction of the film layer is referred to as a process gas. Taking a display product as the display panel as an example, the display panel includes a photosensitive layer, and a material of the photosensitive layer can be polyimide (PI). The photosensitive layer needs to reach a preset transmittance, and a process of making the photosensitive layer reach the preset transmittance is referred to as a process stage of the photosensitive layer. Nitrogen needs to be filled into the chamber of the temperature control device in the process stage of the photosensitive layer, so that the photosensitive layer is in a low-oxygen high-temperature environment. The nitrogen filled into the chamber in the process stage of the photosensitive layer is a process gas corresponding to the photosensitive layer. For another example, in a process of forming an active layer in the display panel, hydrogen in the active layer needs to be removed in a high-temperature environment. This hydrogen removal process can be referred to as a process stage of the active layer. Nitrogen also needs to be used to protect the active layer in the hydrogen removal process of the active layer. The nitrogen used in the hydrogen removal process of the active layer is a process gas corresponding to the active layer.

[0080] In the process stage, the process gas discharged into the chamber of the temperature control device can affect a required temperature range of a film layer in the display product. In order to reduce the influence of the process gas on the temperature in the chamber of the temperature control device, the exhaust pipe shown in FIG. 1 is usually used to preheat the process gas before the process gas is discharged into the chamber of the temperature control device. However, since the exhaust pipe in FIG. 1 is a single pipe, the temperature of the process gas discharged from the exhaust hole closer to the gas inlet end of the exhaust pipe in FIG. 1 is closer to the temperature of the gas inlet end of the exhaust pipe in FIG. 1. This causes the exhaust hole closer to the gas inlet end of the exhaust pipe in FIG. 1 to have a greater influence on the temperature around the exhaust hole in the chamber of the temperature control device. In turn, this causes the film layer to be formed in the display product to not be in the required temperature range, and finally causes the yield of the display product closer to the gas inlet end of the exhaust pipe in FIG. 1 to be lower.

[0081] In the process stage, the heat absorbed by the process gas per unit time is denoted as Q 艺 : Q 艺 = C 气 × M 艺 × △t 艺 (1);

[0082] wherein C 气 is the specific heat capacity of the process gas, M 艺 is the mass of the (process) gas entering the exhaust pipe per unit time, and △t 艺 is the temperature amplitude of the process gas raised by the exhaust pipe per unit time.

[0083] In the cooling stage, the first gas guide pipe 1 and the second gas guide pipe 2 of the exhaust pipe used in the process stage are still used, and the size and radiation coefficient of the first gas guide pipe 1 and the second gas guide pipe 2 do not change, so the heat absorbed per unit time (denoted as Q 冷 ) during cooling is the same as the heat absorbed during the process (Q 艺 ): Q 冷 = Q 艺 =C 气 ×M 冷 ×△t 冷 (2);

[0084] Where C 气 is the specific heat capacity of the (cooling) gas, M 冷 is the mass of the (cooling) gas entering the exhaust pipe per unit time, and △t 冷 is the temperature amplitude of the cooling gas in the exhaust pipe per unit time. Since the process gas and the cooling gas are the same gas, their specific heat capacities are represented by C 气 .

[0085] Assuming that the ratio of the process gas and the cooling gas entering per unit time is 40:1, the mass ratio of the process gas and the cooling gas is: M 冷 :M 艺 =40:1, according to formula (1) and formula (2), the ratio of the temperature amplitude of the process gas and the cooling gas per unit time is △t 艺 :△t 冷 =40:1. Therefore, even if the temperature of the process gas is increased by 100℃-200℃, the temperature of the cooling gas can only be increased by 2.5℃-5℃ using the exhaust pipe provided by the present disclosure, so the temperature of the cooling gas is very limited and can be ignored when using the cooling gas to cool the display product. That is, using the exhaust pipe provided by the present disclosure can greatly increase the temperature of the process gas in the process stage, and will not affect the cooling effect in the cooling stage.

[0086] It should be noted that the process gas and the cooling gas described above can be the same gas, such as nitrogen.

[0087] Assuming the length of the exhaust pipe in Figure 1 is the same as the length of the second gas guide pipe 2 in Figure 2 of the present disclosure (denoted as L), and the number and position of the exhaust holes provided on the exhaust pipe in Figure 1 are exactly the same as the number and position of the first exhaust holes H1 provided on the second gas guide pipe 2 in Figure 2 of the present disclosure, then the distance from the nearest exhaust hole to the air inlet end in Figure 1 is the same as the distance from the nearest first exhaust hole H1 to the first end 1a (i.e. the air inlet end) of the first gas guide pipe 1 in Figure 2 of the present disclosure, denoted as △L, where L = 11△L; assuming the required temperature range of the process stage is T±△t', where T is the required temperature of the process stage and △t' is the error value of the required temperature of the process stage, the temperature of the process gas before entering the exhaust pipe is T', and the temperature of the process gas after entering the air inlet end of the exhaust pipe in Figure 1 and being discharged from the nearest exhaust hole to the air inlet end increases by △t, the nearest exhaust hole to the air inlet end in Figure 1 is the first exhaust hole to discharge the process gas, and since the process gas discharged from the first exhaust hole in Figure 1 is heated for the shortest time, the temperature increase is the least, which makes the difference between the process gas discharged from the first exhaust hole in Figure 1 and the required temperature T of the process stage (T-(T'+△t)) greater, and the greater the influence on the temperature of the environment near the nearest exhaust hole to the air inlet end in Figure 1; while the process gas entering the first end 1a of the first gas guide pipe 1 in Figure 2 of the present disclosure needs to be discharged from the nearest first exhaust hole H1 to the second end 1b after passing through a pipe length (denoted as L' = 10△L) of the first gas guide pipe 1, and the preheating time is greatly increased, so that the temperature increases by at least 10△t, and the temperature increase of the nearest first exhaust hole H1 to the first end 1a in Figure 2 is the least, compared with the difference between the gas discharged from the first exhaust hole in Figure 1 and the required temperature T of the process stage (T-(T'+△t)), the difference between the gas discharged from the first exhaust hole H1 in Figure 2 and the required temperature T of the process stage (T-(T'+10△t)) is smaller, and is closer to the required temperature T of the process stage, so that the yield of the display product can be greatly improved. It can be seen that the temperature increase of the gas discharged from the first exhaust hole H1 using the above technical solution provided by the present disclosure is greatly improved, the temperature increase of the gas discharged from the remaining first exhaust holes H1 is greater, and all are within the required temperature range of the process stage, so that the technical solution provided by the present disclosure can effectively improve the temperature increase, and further improve the yield of the display product.

[0088] The present disclosure sets the above exhaust pipe in a temperature control device, and in the process stage, a low-gas-amount and low-pressure process gas is output to the exhaust pipe by controlling the external gas source. Since the process gas has low gas amount and low pressure, the flow rate is slow, and the process gas can be fully preheated before being discharged from the exhaust pipe, so that the display product is kept in the required high temperature range in the process stage. After the process stage is completed, high-gas-amount and high-pressure cooling gas can be output to the exhaust pipe by controlling the external gas source. Since the cooling gas has high gas amount and high pressure, the flow rate of the cooling gas is fast, and the cooling gas can be quickly discharged from the exhaust pipe without obvious temperature rise, thereby achieving the purpose of quickly cooling the display product.

[0089] The first gas guide pipe 1 also has a second end 1b opposite to the first end 1a. The second end 1b is open in FIG. 2. The first end 1a of the first gas guide pipe 1 communicates with an external gas source (not shown) as an air inlet end of the exhaust pipe. The gas enters the first end 1a of the first gas guide pipe 1, is discharged from the second end 1b of the first gas guide pipe 1 into the first space A formed between the first gas guide pipe 1 and the second gas guide pipe 2, and is then discharged from the plurality of first exhaust holes H1 of the second gas guide pipe 2. The movement path length of the process gas from the first end 1a to the first exhaust hole H1 that is first discharged from the plurality of first exhaust holes H1 (the first exhaust hole H1 closest to the second end 1b in FIG. 2) is at least greater than the length of the first gas guide pipe 1. This makes the process gas have enough time to warm up to the temperature range corresponding to the exhaust hole that discharges the process gas last in the scheme shown in FIG. 1, thereby preventing the production of display products with poor products as in FIG. 1, and further effectively improving the product yield.

[0090] Please continue to refer to FIG. 2. The second end 1b of the first gas guide pipe 1 is open. The opening of the second end 1b discharges the gas in the first gas guide pipe 1 into the first space A.

[0091] In the embodiments provided by the present disclosure, by opening the second end 1b of the first gas guide pipe 1 and communicating the first end 1a and the second end 1b, the gas in the first gas guide pipe 1 can be quickly discharged into the first space A between the first gas guide pipe 1 and the second gas guide pipe 2, and then discharged through the plurality of first exhaust holes H1 on the second gas guide pipe 2.

[0092] Please refer to Fig. 3 for another structure of the exhaust pipe provided by the embodiment of the present disclosure. The first gas guide pipe 1 can also be the structure shown in Fig. 3. The second end 1b of the first gas guide pipe 1 is closed, and the first gas guide pipe 1 has a plurality of second exhaust holes H2 on the pipe wall near the second end 1b. The plurality of second exhaust holes H2 exhaust the gas in the first gas guide pipe 1 into the first space A. The opening direction of the second exhaust hole H2 intersects with the opening direction of the first exhaust hole H1. For example, the opening direction of the second exhaust hole H2 can be perpendicular to the opening direction of the first exhaust hole H1. Fig. 4 shows a three-dimensional perspective view of an exhaust pipe provided by the embodiment of the present disclosure.

[0093] In the embodiment provided by the present disclosure, by closing the second end 1b of the first gas guide pipe 1 relative to the first end 1a, and arranging a plurality of second exhaust holes H2 on the pipe wall of the first gas guide pipe 1 near the second end 1b, the gas in the first gas guide pipe 1 is exhausted into the first space A through the plurality of second exhaust holes, which can reduce the flow rate of the gas entering the first space A, and the gas in the exhaust pipe can be fully preheated, thereby further improving the temperature of the preheated gas in the exhaust pipe.

[0094] Fig. 5 shows another structure of the first gas guide pipe provided by the embodiment of the present disclosure. The first gas guide pipe 1 in the exhaust pipe includes:

[0095] The plurality of sub gas guide pipes 11 are mutually sleeved. The adjacent two sub gas guide pipes 11 in the plurality of sub gas guide pipes 11 include a first sub gas guide pipe 11a and a second sub gas guide pipe 11b. The first sub gas guide pipe 11a is sleeved in the second sub gas guide pipe 11b, so that a second space B with at least one closed end is formed between the first sub gas guide pipe 11a and the second sub gas guide pipe 11b. The closed end of the second space B is close to the first end 1a.

[0096] The gas inlet position and the gas outlet position of the first sub gas guide pipe 11a and the second sub gas guide pipe 11b are close to different ends of the first gas guide pipe 1.

[0097] As shown in Fig. 5, the first gas guide pipe 1 includes two sub gas guide pipes 11 which are mutually sleeved. The first sub gas guide pipe 11a is located in the inner layer, and the second sub gas guide pipe 11b is sleeved outside the first sub gas guide pipe 11a. The gas inlet position of the first sub gas guide pipe 11a is located at the first end 1a, and the gas outlet position of the first sub gas guide pipe 11a is located at the second end 1b. The gas inlet position of the second sub gas guide pipe 11b (i.e. the gas outlet position of the first sub gas guide pipe 11a) is located at the second end 1b, and the gas outlet position of the second sub gas guide pipe 11b is located at the first end 1a. The structure of the exhaust pipe formed by Fig. 5 is shown in Fig. 6.

[0098] In the embodiments provided in the present disclosure, by setting the first gas guide pipe 1 as a plurality of sub gas guide pipes 11 which are sleeved with each other, the adjacent two sub gas guide pipes 11 in the plurality of sub gas guide pipes 11 include a first sub gas guide pipe 11a and a second sub gas guide pipe 11b, the first sub gas guide pipe 11a is sleeved in the second sub gas guide pipe 11b, a second space B which is closed at least at one end is formed between the first sub gas guide pipe 11a and the second sub gas guide pipe 11b, and the closed end of the second space B is close to the first end la; and the gas inlet position and the gas outlet position of the first sub gas guide pipe 11a and the second sub gas guide pipe 11b are arranged at different ends, so that the length of the movement path of the gas in the first gas guide pipe 1 is increased, and the temperature of the gas is improved.

[0099] Please continue to refer to FIG. 5, the gas inlet position of the first sub gas guide pipe 11a is close to the first end la, and the gas outlet position of the first sub gas guide pipe 11a is close to the second end lb; wherein the second end lb is the other end of the first gas guide pipe 1 opposite to the first end la;

[0100] The second sub gas guide pipe 11b is closed at the end where the second end lb is located, and a plurality of third exhaust holes H3 are arranged on the pipe wall close to the first end la.

[0101] As shown in FIG. 5, the first sub gas guide pipe 11a is open at the end where the second end lb is located, so that the gas in the first sub gas guide pipe 11a can be quickly discharged into the second space B between the first sub gas guide pipe 11a and the second sub gas guide pipe 11b.

[0102] Please refer to FIG. 7 for another structure schematic diagram of the first gas guide pipe provided in the embodiments of the present disclosure. The structure of the second sub gas guide pipe 11b is the same as that of the second sub gas guide pipe 11b in FIG. 5, and the first sub gas guide pipe 11a is open at the end where the second end lb is located, so that the flow rate of the gas entering the second space B between the first sub gas guide pipe 11a and the second sub gas guide pipe 11b can be reduced, and the temperature of the gas can be further improved. The structure schematic diagram of the exhaust pipe constituted by FIG. 7 is shown in FIG. 8.

[0103] Please refer to FIG. 9 for another structure schematic diagram of the first gas guide pipe provided in the embodiments of the present disclosure.

[0104] The gas inlet position of the first sub gas guide pipe 11a is close to the second end lb, and the first sub gas guide pipe 11a is closed at the end where the second end lb is located, and the gas outlet position of the first sub gas guide pipe 11a is close to the first end la; wherein the second end lb is the other end of the first gas guide pipe 1 opposite to the first end la;

[0105] The first sub gas guide pipe 11a has a plurality of fifth exhaust holes H5 on the pipe wall close to the first end la.

[0106] As shown in FIG. 9, the second sub-guide pipe 11b is closed at the end where the second end 1b is located; the second sub-guide pipe 11b has a plurality of sixth exhaust holes H6 on the pipe wall close to the second end 1b.

[0107] A plurality of fifth exhaust holes H5 are arranged on the pipe wall of the first sub-guide pipe 11a close to the first end 1a; the fifth exhaust holes H5 are used to exhaust the gas in the first sub-guide pipe 11a into the second space B between the first sub-guide pipe 11a and the second sub-guide pipe 11b, so as to reduce the flow rate of the gas entering the second space B and improve the gas temperature.

[0108] Please refer to FIG. 10 for another structure of the exhaust pipe provided by the embodiment of the present disclosure. In the exhaust pipe, the second sub-guide pipe 11b is open at the end where the second end 1b is located, so that the gas in the second sub-guide pipe 11b (i.e. the gas in the second space B) can be quickly exhausted into the first space A.

[0109] Please refer to FIG. 11 for another structure of the first guide pipe provided by the embodiment of the present disclosure. The first guide pipe 1 includes four sub-guide pipes 11; the innermost sub-guide pipe 11 is the first layer sub-guide pipe 11, and the outermost sub-guide pipe 11 is the fourth layer sub-guide pipe 11; when the first sub-guide pipe 11a includes an even number of sub-guide pipes 11, the odd layer sub-guide pipes 11 can be arranged as open at the end where the second end 1b is located, and the even layer sub-guide pipes 11 can be arranged as closed at the end where the second end 1b is located; the exhaust holes on the even layer sub-guide pipes 11 are arranged according to the principle that they are arranged at the opposite end from the exhaust position of the adjacent sub-guide pipe 11, which will not be described here.

[0110] In some embodiments, the first exhaust hole H1 intersects with the opening direction of the exhaust holes in the first guide pipe 1. Preferably, the first exhaust hole H1 is perpendicular to the opening direction of the exhaust holes in the first guide pipe 1. As shown in FIG. 12 for another three-dimensional perspective view of the exhaust pipe provided by the embodiment of the present disclosure, the opening direction of the first exhaust hole H1 is the Y direction, and the opening direction of the second exhaust hole H2 is the Z direction, which are perpendicular to each other.

[0111] If the first guide pipe 1 includes a plurality of sub-guide pipes 11, the exhaust holes on any sub-guide pipe 11 are all the exhaust holes on the first guide pipe 1. For example, the fourth exhaust hole H4 on the first sub-guide pipe 11a and the third exhaust hole H3 on the second sub-guide pipe 11b in FIG. 7 are all the exhaust holes on the first guide pipe 1; for another example, the fifth exhaust hole H5 on the first sub-guide pipe 11a and the sixth exhaust hole H6 on the second sub-guide pipe 11b in FIG. 9 are all the exhaust holes on the first guide pipe 1; the opening direction of the exhaust holes on the sub-guide pipe 11 intersects with the opening direction of the first exhaust hole H1. The opening direction of the exhaust holes on the adjacent two sub-guide pipes 11 in the first guide pipe 1 can be the same or different, which is not limited specifically.

[0112] Please see Figure 13 for another three-dimensional perspective view of the exhaust pipe provided by the embodiments of the present disclosure. The exhaust pipe further comprises: a plurality of support columns 3 located between the pipe walls of two adjacent layers of gas guide pipes.

[0113] The first gas guide pipe 1 in Figure 13 is equivalent to only one sub gas guide pipe 11, and a plurality of support columns 3 are arranged between the pipe walls of the first gas guide pipe 1 and the second gas guide pipe 2. When the first gas guide pipe 1 comprises a plurality of sub gas guide pipes 11, a plurality of support columns 3 can also be arranged between two adjacent layers of sub gas guide pipes 11 (which can also be regarded as two adjacent layers of gas guide pipes) as shown in Figure 13.

[0114] In the embodiments provided by the present disclosure, by arranging a plurality of support columns 3 between two adjacent layers of gas guide pipes, the pipe walls of the gas guide pipes can be fixedly supported, the vibration of the gas guide pipes when the gas flows through the exhaust pipe can be reduced, and the stability of the exhaust pipe can be improved.

[0115] Please see Figure 14 for another cross-sectional view of the exhaust pipe provided by the embodiments of the present disclosure. The ratio of the cross-sectional area S2 of the second gas guide pipe 2 containing gas to the cross-sectional area S1 of the first gas guide pipe 1 containing gas is in the range of 0.31-24.5.

[0116] In some embodiments, the ratio of the cross-sectional area S2 of the second gas guide pipe 2 containing gas to the cross-sectional area S1 of the first gas guide pipe 1 containing gas is greater than 2.

[0117] In some embodiments, the inner diameter of the first gas guide pipe 1 is greater than or equal to 4 mm and less than the inner diameter of the second gas guide pipe 2; and the inner diameter of the second gas guide pipe 2 is less than or equal to 25 mm.

[0118] The cross-sectional area of the first gas guide pipe 1 containing gas in Figure 15 is S1, and the cross-sectional area S2 of the second gas guide pipe 2 containing gas, i.e. the cross-sectional area of the first space A containing gas between the second gas guide pipe 2 and the first gas guide pipe 1. When the area S1 is increased (i.e. the diameter of the first gas guide pipe 1 is increased), the gas flow velocity in the first gas guide pipe 1 will decrease under the same process gas amount, the time for the process gas to pass through the first gas guide pipe 1 will be longer, and the preheating time will also increase accordingly, so that the temperature of the process gas discharged from the second gas guide pipe 2 is higher.

[0119] Assuming that the cross-sectional area of the first gas guide pipe 1 containing gas is S1, the cross-sectional area of the first space A containing gas between the second gas guide pipe 2 and the first gas guide pipe 1 is S2, and the preheating time is T1, the temperature increase of the preheated process gas is △t1 at this time;

[0120] When S1 is increased by n times (n > 1), the cross-sectional area of the first gas guide tube 1 for accommodating gas becomes S1' = n x S1, and the cross-sectional area of the first space A between the second gas guide tube 2 and the first gas guide tube 1 for accommodating gas becomes S2' = S - (n - 1)S1, where S is the cross-sectional area of the second gas guide tube 2. At this time, under the same flow rate of the process gas, the process gas heating time T2 = n x T1 (n > 1), and the preheating temperature rise amplitude is Δt2 = n x Δt1, that is, the temperature rise is increased to n times (ignoring the change of the heating rate).

[0121] In general design, the gas supply capacity of the external gas source is very large, so S2' = S - (n - 1)S1 can be set very small, and S1' = n x S1 (n > 1) can be very large, that is, the multiple change range of n is very large, and the temperature rise amplitude is also very large.

[0122] Therefore, in the design, if the temperature of the gas discharged from the first gas guide tube 1 in the initial design of the exhaust pipe cannot reach the required temperature range of the process stage, the ratio of the cross-sectional area S2 of the second gas guide tube 2 for accommodating gas to the cross-sectional area S1 of the first gas guide tube 1 for accommodating gas can be set to be greater than 2 to increase the cross-sectional area S1 of the first gas guide tube 1 for accommodating gas, thereby improving the temperature of the gas discharged from the exhaust pipe.

[0123] In the embodiments provided in the present disclosure, by setting the ratio of the cross-sectional area S2 of the second gas guide tube 1 for accommodating gas to the cross-sectional area S1 of the first gas guide tube for accommodating gas to be greater than 2, not only can the temperature rise amplitude of the process gas be improved, but also the number of the first gas guide tube 1 containing the first gas guide tube 11 does not need to be increased, and the structure of the external gas source does not need to be changed, without the need for additional complex switching pipelines and preheating structures, without additional gas power investment, and without the wear risk caused by pipeline switching.

[0124] In some embodiments, the material of the exhaust pipe includes at least one of glass, metal, ceramic, and plastic.

[0125] For example, the first gas guide tube 1 and the second gas guide tube 2 can be composed of a glass tube, a metal tube, a ceramic tube, or a plastic tube. The metal tube and the plastic tube can be formed by 3D printing.

[0126] The first gas guide tube 1 and the second gas guide tube 2 can be composed of materials with similar thermal properties (for example, the difference between the expansion coefficients is less than a preset range).

[0127] The first gas guide tube 1 and the second gas guide tube 2 can be made of the same material, so that the first gas guide tube 1 and the second gas guide tube 2 have the same thermal properties, thereby improving the stability of the exhaust pipe and preventing the first gas guide tube 1 and the second gas guide tube 2 from being broken at the junction position.

[0128] The first air guide pipe 1 and the second air guide pipe 2 can be made of glass pipes, and since the glass pipes have a small expansion coefficient and are clean and easy to clean, the first air guide pipe 1 and the second air guide pipe 2 made of glass can prevent breakage caused by thermal shock and reduce the risk of contamination.

[0129] In the working condition of small temperature difference, the first air guide pipe 1 and the second air guide pipe 2 can also be made of metal pipes, and the metal pipes can be provided with an expansion release mode to reduce the influence of the expansion of the metal pipes; in the working condition of large temperature difference, the first air guide pipe 1 and the second air guide pipe 2 can also be made of metal pipes (such as invar) with a small expansion coefficient, so that the first air guide pipe 1 can be used as a structure including multiple sub-air guide pipes 11 to realize a longer heating channel and achieve a higher temperature. Since the metal pipes have strong processability, the first air guide pipe 1 and the second air guide pipe 2 are made of metal pipes, which is convenient for processing the exhaust pipe.

[0130] In addition, the first air guide pipe 1 and the second air guide pipe 2 can also be partial polymer tubes or some composite material pipes that can adopt injection molding and welding processes, such as PI heat-resistant plastic pipes, where PI is polyimide.

[0131] Please refer to FIG. 15 for a structural schematic diagram of an exhaust pipe provided in an embodiment of the present application, and the thickness of the part of the first air guide pipe 1 that seals the first space A is smaller than the wall thickness of the first air guide pipe 1.

[0132] If the first air guide pipe 1 and the second air guide pipe 2 are both made of glass, the first end 1a of the first air guide pipe 1 can be made into a funnel shape as shown in FIG. 16, then the funnel-shaped first end 1a is folded towards the second air guide pipe and is welded to form the exhaust pipe shown in FIG. 15. Since the glass will melt at high temperature, the first air guide pipe and the second air guide pipe will be integrated after high-temperature annealing treatment, and no welding marks will appear.

[0133] Please refer to FIG. 17 for another structural schematic diagram of an exhaust pipe provided in an embodiment of the present application, and if the first air guide pipe 1 and the second air guide pipe 2 are made of metal pipes or plastic pipes, the position where the first air guide pipe 1 and the second air guide pipe 2 are welded also has a welding seam.

[0134] Based on the same inventive concept, the present disclosure provides a manufacturing method of an exhaust pipe, please refer to FIG. 18 for a flowchart of the manufacturing method of the exhaust pipe provided in an embodiment of the present disclosure, and the manufacturing method includes the following steps:

[0135] S11: providing a first air guide pipe and a second air guide pipe;

[0136] S12: fitting the first gas guide tube into the second gas guide tube to form a first space with at least one closed end between the first gas guide tube and the second gas guide tube; wherein the first end of the first gas guide tube is in communication with the external gas source, and the first space is closed at the first end; and wherein, in the extension direction of the second gas guide tube, the tube wall of the second gas guide tube is uniformly provided with a plurality of first exhaust holes, and the length of the movement path of the gas from the first end to the first exhaust hole from which the gas is first exhausted is at least greater than the length of the first gas guide tube.

[0137] In some embodiments, the fitting of the first gas guide tube into the second gas guide tube can be achieved by the following methods:

[0138] folding the first end of the first gas guide tube and then welding the first end to the corresponding end of the second gas guide tube; wherein the second end of the first gas guide tube opposite to the first end is closed, and the tube wall of the first gas guide tube close to the second end is provided with a plurality of second exhaust holes, and the opening directions of the first exhaust holes and the second exhaust holes are intersected; or, the second end of the first gas guide tube is open.

[0139] In some embodiments, the diameter of the first gas guide tube can be increased to increase the range of the process gas temperature raised by the exhaust tube.

[0140] Please refer to FIG. 19 for a schematic diagram of forming an exhaust tube according to an embodiment of the present disclosure.

[0141] S21: providing a first gas guide tube 1 and a second gas guide tube 2.

[0142] Before folding the first end 1a of the first gas guide tube 1, the first end 1a of the first gas guide tube 1 can be funnel-shaped. By pre-fabricating the first end 1a of the first gas guide tube 1 as funnel-shaped, the difficulty of manufacturing can be reduced. Of course, for skilled technicians, the first end 1a of the first gas guide tube 1 can also not be pre-fabricated as funnel-shaped.

[0143] In FIG. 19, the second end 1b of the first gas guide tube 1 opposite to the first end 1a is closed, and the tube wall of the first gas guide tube 1 close to the second end 1b is provided with a plurality of second exhaust holes H2; the second end 1b of the first gas guide tube 1 can also be open as the second end 1b of the first gas guide tube 1 in FIG. 2.

[0144] S22: fitting the first gas guide tube 1 into the second gas guide tube 2;

[0145] S23: folding the first end 1a of the first gas guide tube 1 and then welding the first end 1a to the corresponding end of the second gas guide tube 2.

[0146] For the case that the first gas guide pipe 1 has only one layer of pipe, the pipe wall of the first end 1a of the first gas guide pipe 1 can be folded to the outer side wall of the corresponding end of the second gas guide pipe 2 as shown in FIG. 17, and then the folded pipe wall of the first gas guide pipe 1 is fused with the pipe wall of the corresponding end of the second gas guide pipe 2. For the case that the first gas guide pipe 1 includes multiple layers of sub gas guide pipes 11, the pipe wall of the first sub gas guide pipe 11a at the first end 1a among the adjacent two layers of sub gas guide pipes 11 can be folded to the inner side wall of the corresponding end of the second sub gas guide pipe 11b in a similar manner as shown in FIG. 17, and then the folded pipe wall of the first sub gas guide pipe 11a is fused with the pipe wall of the corresponding end of the second sub gas guide pipe 11b.

[0147] Please refer to FIG. 20 for another three-dimensional schematic view of the first gas guide pipe provided by the embodiment of the present disclosure. Before folding the first end 1a of the first gas guide pipe 1, multiple support columns 3 are arranged on the pipe wall of the first gas guide pipe 1 in a uniform distribution;

[0148] Please refer to FIG. 21 for a schematic view of baking the support columns. After folding the first end 1a of the first gas guide pipe 1 and fusing it with the first end 1a of the second gas guide pipe 2, the second gas guide pipe 2 is baked at the position corresponding to the support columns 3 of the second gas guide pipe 2, so that the support columns 3 are fused with the second gas guide pipe 2. The three-dimensional perspective view of the exhaust pipe finally obtained is shown in FIG. 13.

[0149] If the first gas guide pipe 1 includes multiple sub gas guide pipes 11, the support columns 3 can also be arranged between the adjacent sub gas guide pipes 11 as shown in FIG. 18. The manner of arranging the support columns 3 between the adjacent sub gas guide pipes 11 is the same as the manner of arranging the support columns 3 between the first gas guide pipe 1 and the second gas guide pipe 2, which will not be described here again.

[0150] Based on the same inventive concept, the embodiment of the present disclosure provides a temperature control device. Please refer to FIG. 22 for a structural schematic view of a temperature control device provided by the embodiment of the present disclosure. The temperature control device includes:

[0151] a closed cavity 100;

[0152] an exhaust pipe 200 as described above, which is located in the closed cavity 100;

[0153] an external gas source 300, which is located outside the closed cavity 100, and the external gas source 300 is in communication with the exhaust pipe 200.

[0154] The display product is placed in the closed cavity 100. If the exhaust pipe 200 is used to discharge the preheated process gas into the closed cavity during the process stage, and if the display product needs to be cooled after completing a process stage, the external gas source 300 can be used to provide cooling gas, and the exhaust pipe 200 can be used to quickly discharge the cooling gas to cool the display product.

[0155] The external gas source 300 can include a process gas source and a cooling gas source, and different gas sources are sent to the exhaust pipe 200 through a gas exchange valve at different stages;

[0156] If the external gas source 300 can also provide only one kind of gas source, at this time a heat exchanger can be arranged between the external gas source 300 and the exhaust pipe 200, and the heater is opened in the process stage, so that the gas source provided by the external gas source 300 is heated to the required temperature of the process gas source; in the cooling stage, the heat exchanger is closed, and the gas source provided by the external gas source 300 is sent to the exhaust pipe 200 without heating.

[0157] The display product can be an OLED product, such as an OLED device or an OLED display panel. The display product can also be a liquid crystal display product, such as a liquid crystal display panel, a micro light emitting diode (MLED) display product, a virtual reality (VR) display product, an augmented reality (AR) display product, or the like.

[0158] Although the preferred embodiments of the present disclosure have been described, those skilled in the art can make further changes and modifications to the embodiments once they know the basic inventive concept. Therefore, the appended claims are intended to be interpreted as including all changes and modifications falling within the scope of the present disclosure.

[0159] Obviously, those skilled in the art can make various modifications and variations to the present disclosure without departing from the spirit and scope of the present disclosure. Thus, if these modifications and variations of the present disclosure fall within the scope of the claims of the present disclosure and their equivalent technologies, the present disclosure also intends to include these modifications and variations.

Claims

1. An exhaust pipe for process tempering of a display product produced, wherein, The application relates to a gas guide pipe, comprising: a first gas guide pipe and a second gas guide pipe, the first gas guide pipe being sleeved in the second gas guide pipe, so that a first space is formed between the first gas guide pipe and the second gas guide pipe, and the first space is closed at least at one end; a first end of the first gas guide pipe is communicated with an external gas source, and the first space is closed at the end where the first end is located; a plurality of first exhaust holes are uniformly distributed on the wall of the second gas guide pipe in the extending direction of the second gas guide pipe, and the movement path length of the gas from the first end to the first exhaust hole from which the gas is first exhausted is at least greater than the length of the first gas guide pipe.

2. The exhaust pipe according to claim 1, wherein a second end of the first gas guide pipe opposite to the first end is open, and the second end is arranged to exhaust the gas in the first gas guide pipe into the first space; alternatively, the second end is closed, and the wall of the first gas guide pipe close to the second end is provided with a plurality of second exhaust holes, and the plurality of second exhaust holes are arranged to exhaust the gas in the first gas guide pipe into the first space.

3. The exhaust pipe of claim 1, wherein, the first gas guide pipe comprises: a plurality of sub gas guide pipes sleeved with each other, adjacent two sub gas guide pipes in the plurality of sub gas guide pipes comprise a first sub gas guide pipe and a second sub gas guide pipe, the first sub gas guide pipe is sleeved in the second sub gas guide pipe, so that a second space is formed between the first sub gas guide pipe and the second sub gas guide pipe, and the second space is closed at least at one end, and the closed end of the second space is close to the first end; the gas inlet position and the gas outlet position of the first sub gas guide pipe and the second sub gas guide pipe are respectively located at different ends of the first gas guide pipe.

4. The exhaust pipe according to claim 1 or 2, wherein The ratio of the cross-sectional area of the second gas guide pipe containing gas to the cross-sectional area of the first gas guide pipe containing gas is greater than 2.

5. The exhaust pipe of claim 3, wherein, the gas inlet position of the first sub gas guide pipe is close to the first end, and the gas outlet position of the first sub gas guide pipe is close to the second end; wherein the second end is the other end of the first gas guide pipe opposite to the first end; the second sub gas guide pipe is closed at the end where the second end is located, and is provided with a plurality of third exhaust holes on the wall close to the first end.

6. The exhaust pipe of claim 5, wherein, the first sub gas guide pipe is closed at the end where the second end is located; the first sub gas guide pipe is provided with a plurality of fourth exhaust holes on the wall close to the second end.

7. The exhaust pipe of claim 5, wherein, the first sub gas guide pipe is open at the end where the second end is located.

8. The exhaust pipe of claim 3, wherein, the gas inlet position of the first sub gas guide pipe is close to the second end, and the first sub gas guide pipe is closed at the end where the second end is located, and the gas outlet position of the first sub gas guide pipe is close to the first end; wherein the second end is the other end of the first gas guide pipe opposite to the first end; the first sub gas guide pipe is provided with a plurality of fifth exhaust holes on the wall close to the first end.

9. The exhaust pipe of claim 8, wherein, the second sub gas guide pipe is open at the end where the second end is located.

10. The exhaust pipe of claim 7, wherein, the second sub gas guide pipe is closed at the end where the second end is located; the second sub gas guide pipe is provided with a plurality of sixth exhaust holes on the wall close to the second end.

11. The exhaust pipe according to any one of claims 2 and 5 to 10, wherein the opening direction of the first exhaust hole intersects with the opening direction of the exhaust hole in the first gas guide pipe.

12. The exhaust pipe according to any one of claims 1 to 11, wherein Further comprising: a plurality of support columns arranged between the walls of adjacent two layers of gas guide pipes.

13. The exhaust pipe according to any one of claims 1 to 11, wherein The material of the exhaust pipe comprises: at least one of glass, metal, ceramic and plastic.

14. The exhaust pipe of claim 13, wherein, The first air guide tube has a thickness less than the wall thickness of the first air guide tube.

15. The exhaust pipe of claim 14, wherein, The material of the exhaust pipe is the metal or the plastic, and the fusion joint position of the first air guide tube and the second air guide tube has a fusion joint.

16. A method of making an exhaust pipe, wherein, The method comprises: Providing a first air guide tube and a second air guide tube; Sleeving the first air guide tube in the second air guide tube to form a first space with at least one closed end between the first air guide tube and the second air guide tube; wherein the first end of the first air guide tube is in communication with an external gas source, and the first space is closed at the end where the first end is located; in the extension direction of the second air guide tube, a plurality of first exhaust holes are uniformly distributed on the tube wall of the second air guide tube, and the movement path length of the gas from the external gas source from entering the first end to being exhausted from the first exhaust hole that is first exhausted is at least greater than the length of the first air guide tube.

17. The production method according to claim 16, wherein Sleeving the first air guide tube in the second air guide tube comprises: Folding the first end of the first air guide tube and fusing it with the corresponding end of the second air guide tube; wherein the second end of the first air guide tube opposite to the first end is closed and arranged, and a plurality of second exhaust holes are arranged on the tube wall of the first air guide tube close to the second end; or, the second end of the first air guide tube is open.

18. The production method according to claim 17, wherein Before folding the first end of the first air guide tube, a plurality of support columns are arranged on the tube wall of the first air guide tube in a uniform distribution; After folding the first end of the first air guide tube and fusing it with the first end of the second air guide tube, the second air guide tube is baked at the position of the second air guide tube corresponding to the support columns, so that the support columns are fused with the second air guide tube.

19. A temperature controlled device, wherein, The method comprises: A closed cavity; The exhaust pipe according to any one of claims 1-15 is located in the closed cavity; An external gas source is located outside the closed cavity, and the external gas source is in communication with the exhaust pipe.

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