Tester for an automatic test equipment system and method for controlling the same

Abstract

Tester for an automatic test equipment system, the tester comprising a controller and a plurality of nodes each of the plurality of nodes comprising a memory; wherein at least one first node of the plurality of nodes is provided to store and execute test data and at least one remote node of the plurality of nodes is provided to store test data to be executed by the at least one first node; wherein the tester is configured to: determine the test data which is to be executed by the at least one first node; assign the test data which is to be executed by the at least one first node to the at least one first node; determine on the basis of a user input and / or on the basis of the memory available to the at least one first node to store certain parts of the test data to be executed by the at least one first node in the at least one remote node.

Description

[0001] Tester for an automatic test equipment system and method for controlling the same

[0002] Description

[0003] The present invention relates to a tester for an automatic test equipment system and method of controlling the same, the tester is configured to perform tests on electronic devices, in particular for testing semiconductor devices.

[0004] An automatic test equipment (ATE) system is an apparatus that performs tests on electronic devices, known as a device under test (DUT), using automation to perform measurements and evaluate the test results.

[0005] An ATE system usually contains a tester and a device specific adapter (DSA). The tester generally comprises a controller and a test head hosting one or a plurality of channel cards. The tester provides a data link between the channel cards and the controller. The channel cards each include a plurality of nodes, each node comprising a memory and a front-end connected to pins for signal generation or reception. Moreover, the tester comprises a device under test (DUT) interface connecting the nodes to the device specific adapter. The device specific adapter comprises a device under test (DUT) board and sockets to be connected to the DUT. The pins of the respective nodes are connected via the device specific adapter to the DUT.

[0006] The user typically programs the tester on the controller and schedules a test flow containing a plurality of test data, which may be understood as a specific test or series of tests, which the tester should perform on the DUT, to be executed in a predefined sequence by the nodes of the channel cards. The test data contains one or more of program instructions and / or configuration information of one or more stimuli to be applied and / or measurements to be executed by the at least one first node. The test data is stored in the memory of the node executing the test data. Hence, the memory of the node stores all test data executed by said node during the test flow.

[0007] In certain cases, the memory of a first node may not be sufficient to store all test data necessary to perform the test flow. In these cases, a second node has to be used to support the first node, wherein the pins of the DUT are connected to the first node and the second node, leading to a very complex set-up of the DUT board. Alternatively, the test flow has to be split in two test flows, leading to a time consuming test architecture.

[0008] EP 0 859 318 Bl discloses a method for distributing data between a plurality of channels each comprising a memory, wherein data is to be loaded in the memory of a first channel. The data to be loaded in the memory of the first channel is distributed into memories of other channels. During the execution of the test, the test flow is interrupted to reload the data from the memories of other channels into the memory of the first channel.

[0009] It is an object of the invention to provide a tester for an automatic test equipment system and a method for controlling a tester that enables an improved memory utilisation. In addition, it is an object of the invention to provide an automatic test equipment system comprising the tester and a computer program causing an automatic test equipment system to perform the method.

[0010] The problem is solved by an appropriately configured tester for an automatic test equipment system, as well as a method for controlling a tester.

[0011] According to the invention, a tester for an automatic test equipment system is provided, wherein the tester preferably comprises a controller, in particular a computer, and a plurality of nodes each comprising a memory. The tester comprises, preferably, a test head and / or at least one channel card comprising the plurality of nodes. The nodes may in particular further comprise at least one processor and / or at least one front-end being configured to be connected to a device under test via a plurality of pins. The nodes, and in particular the processor and / or the memories of the nodes, are preferably interconnected by a data link, in particular a high-speed bus. At least one first node of the plurality of nodes is provided to store and execute test data and at least one remote node of the plurality of nodes, preferably being a node different from the first node, is provided to store test data to be executed by the at least one first node. The test data contains one or more of program instructions and / or configuration information of one or more stimuli to be applied and / or measurements to be executed by the at least one first node. The test data is in particular executed by the at least one first node in a deterministic or non- deterministic sequence.

[0012] In a first step of operation, the tester is configured to determine the test data which is to be executed by the at least one first node.

[0013] In a further configuration, the test data which is to be executed by the at least one first node is assigned to the at least one first node.

[0014] In a next step, it is determined, on the basis of a user input and / or on the basis of the memory available to the at least one first node to store certain parts of the test data to be executed by the at least one first node in the at least one remote node. It is preferably determined, which of the pieces of test data are stored in the first node and which of the pieces of test data are stored in the at least one remote node. In particular, the user may select which test data is to be stored on the at least one remote node. Alternatively, the tester can select which test data is to be stored on the at least one remote node.

[0015] In a further step, the test data is preferably loaded or transmitted from the tester to the respective nodes where the test data is to be stored, i.e. the first node and / or the remote node.

[0016] The test data is in particular executed by the at least one first node after the transmission of the data to the respective nodes. After the execution of the test data by the at least one first node and / or after the transmission of the test data by the at least one remote node, the test data may be deleted form the respective node.

[0017] According to the invention, the full test data for executing the test flow which is to be executed by the at least one first node is stored not only in the memory of the at least one first node but also in the memory of at least one remote node. Thus, the available memory for the at least one first node is increased by utilizing the memory of all or a selection of alternative nodes of the plurality of nodes. After the transmission of the test data to the respective nodes, the test flow and / or the test data is executed by the at least one first node.

[0018] In an embodiment, the tester is further configured to move or transfer test data which is stored at the at least one remote node to the at least one first node for executing the test data, wherein the test data is preferably moved or transmitted from the at least one remote node to a plurality of first nodes for executing the test data. Accordingly, test data to be executed by the plurality of first nodes may only be stored in one remote node. The tester preferably copies or multiplies the test data stored on the remote node and transmits the test data to the plurality of first nodes. For example, test data to be executed by six first nodes is stored only one time in one remote node. The tester then copies or multiplies the test data stored on the remote node and moves the test data to the six first nodes executing the test data. Thus, the size of the data storage necessary for the test data is reduced.

[0019] The tester is further configured to move or transfer the test data, which is to be executed later in time by the at least one first node, during the execution of test data, which is to be executed earlier in time by the at least one first node. Hence, test data to be executed subsequently is transferred to the at least one first node during the preceding execution of other test data. Hence, the test data is available to the at least one first node when it is to be executed. Hence, the test flow will not be interrupted, since the test data will be available to the at least one first node "just-in-time". Accordingly, complex and memory consuming test flows can be conducted by the automatic test equipment system.

[0020] The plurality of nodes may preferably comprise multiple first nodes. The at least one remote node may execute the test data or not execute the test data. Hence, the at least one other node may serve as mere storage for the test data.

[0021] In an embodiment, the tester is configured to determine or estimate, e.g. by the controller, whether the data size of the test data assigned to the at least one first node exceeds the size of the memory of the at least one first node, when determining or prior to determining whether to store parts of the test data in the at least one remote node. In particular, the data size of the whole test data assigned to the at least one first node is determined or estimated and then compared to the memory size of the first node. It is therefore possible to determine whether a first node has sufficient memory size for the complete test data before loading or transmitting of the test data to the first node.

[0022] Preferably, the size of each part of test data assigned to the at least one first node is determined or estimated, in particular by the controller, when determining or prior to determining whether to store parts of the test data in the at least one remote node. This means, in particular, that the data size required for each of the test data to be executed by the at least one first node is determined or estimated. Hence, the test data requiring a large memory size may be determined or estimated.

[0023] In a further embodiment, part of test data assigned to the at least one first node which will be executed multiple times by the at least one first node are determined or estimated, in particular by the controller, when determining or prior to determining whether to store parts of the test data in the at least one remote node. For example, the same test data may be used by the at least one first node multiple times for recurring program instructions and / or configuration information of one or more stimuli to be applied and / or measurements. Accordingly, it may be advantageous to store the test data only once.

[0024] In an embodiment, the determination to store certain test data to be executed by the at least one first node in a remote node is further based on the data size of the respective part of the test data. Preferably it is decided in advance based on the size of the respective part of the test data, whether test data is stored on the at least one first node and / or on the at least one remote node. Alternatively or additionally it is decided on the basis of the size of the respective part of the test data which part of the test data has to be stored on the at least one remote node.

[0025] Alternatively or additionally the determination to store certain test data to be executed by the at least one first node in a remote node is further based on whether the parts of the test data are to be executed multiple times by the at least one first node. According to one aspect of the invention, the test data is compiled before the test data is loaded or transmitted to the respective nodes. The test data may, in particular, be compiled by the controller. Preferably, the test data is compiled before it is determined how and / or where to store certain test data to be executed by the at least one first node in a remote node. Hence, the test data is preferably stored in a compiled form in the nodes. Accordingly, the test data transmitted to the at least one first node during the execution of the test flow may be executed directly by the first node without conversion or readdressing of the test data at the first node.

[0026] In a further embodiment, the memory of at least one of the first node comprises a first buffer and at least one second buffer. The first buffer is an active buffer configured to store test data that is executed by the first node. The at least one second buffer is a swap buffer configured to receive and store test data transmitted from at least one remote node to the first node. Preferably, the transfer of test data occurs during the execution of test data stored in the active buffer. Hence, the test data in the active buffer can be executed while other test data can be received by the swap buffer. In particular, the test data is transmitted on the fly.

[0027] After execution of the test data stored in the first buffer, the first buffer will preferably be transitioned to be a swap buffer and one of the at least one second buffer becomes preferably the active buffer. Thus, test data to be executed is in the active buffer ensuring a fast execution of the test data by the first node.

[0028] In an embodiment the memory size of the first buffer and / or the memory size of the second buffer is variable and is assigned on the basis of the maximum size of the test data to be executed by the first node stored in either the first node and / or the at least one remote node. Hence, the size of the first and the second buffers is sufficient such that test data can be transmitted to the first and / or the second buffer without exceeding the memory size of the buffer. The maximum size of the test data can be determined or estimated, in particular by the controller.

[0029] In particular, the tester is further configured to transfer the test data to the respective nodes once the determination of where the test data is to be stored has been made. In a further embodiment, the at least one first node and / or the at least one remote node are bidirectional nodes. Hence, the at least one first node may transmit test data to other first nodes and / or to the at least one remote node and / or the at least one first node may receive test data from other first nodes and / or from the at least one remote node. Alternatively or additionally, the at least one remote node may transmit test data to other remote nodes and / or to the at least one first node and / or the at least one remote node may receive test data from other remote nodes and / or from the at least one first node.

[0030] In an embodiment, the controller of the tester is adapted to perform

[0031] - the determination of the test data which is to be executed by the at least one first node, and / or

[0032] - the assignment of the test data to the at least one first node, and / or

[0033] - the determination as to whether certain parts of the test data is to be stored at the at least one remote node.

[0034] Hence, the controller of the tester may be adapted to carry out the memory utilisation according to the invention.

[0035] The problem is furthermore solved by an automatic equipment test system comprising a device specific adapter and the tester according to the invention. The device specific adapter comprises in particular a device under test board and sockets configured to receive at least one device under test.

[0036] The problem is preferably solved by a method for operating an automatic test equipment system comprising the steps of operation as described above.

[0037] A computer program for controlling such an automatic test equipment, in particular for controlling the controller of such an automatic test equipment, is also provided.

[0038] The above and further features and advantages of the invention will become more readily apparent from the following detailed description of preferred embodiments of the invention with reference to the accompanying drawings, in which like reference signs designate like features, and in which:

[0039] Fig. 1 is a schematic diagram of an automatic test equipment system;

[0040] Fig. 2 is a schematic diagram of a channel card of the automatic test equipment system according to Fig. 1;

[0041] Fig. 3 is a schematic diagram of a test flow for a device under test;

[0042] Fig. 4 is a schematic diagram of the memory occupancy of nodes of the channel card according to Fig. 2;

[0043] Fig. 5 is a flow chart of a method for controlling the automatic test equipment system;

[0044] Fig. 6 is a schematic diagram showing test data to be executed by a first node being stored in other nodes;

[0045] Fig. 7 is a schematic diagram of a test flow for testing the device under test wherein test data is loaded to the first node by another node;

[0046] Fig. 8a, 8b is a schematic diagram showing a first and a second buffer of the first node; and

[0047] Fig. 9 is a schematic diagram showing transmitting and receiving test data by a bidirectional first node.

[0048] As depicted in Fig. 1, an automatic test equipment (ATE) system 1 comprises a tester 12 and a device specific adapter 13. The tester 12 comprises a controller 2 and a test head 3 connected to the controller 2 via a data link 5. The test head 3 typically comprises a plurality of channel cards 10a, 10b, ..., lOn, which are interconnected by the data link 5. The tester 12 further comprises a device under test (DUT) interface 9 connected to the channel cards lOa-n.

[0049] The channel cards lOa-n each comprise a plurality of nodes 20-1 - 20-n as depicted in Fig. 2 by the example of the channel card 10a. The node 20-1 comprises a memory 21-1, a processor 22-1 and a front-end 23-1, which are interconnected by the data link 25-1. The front-end is connected to pins 24-1 connecting the node 20-1 to the DUT interface 9. The processors 22-1 - 22-n of each nodes 20-1 - 20-n are interconnected by a data link 11, in particular a highspeed data bus.

[0050] The device specific adapter 13 comprises a device under test (DUT) board 8 and sockets 7a, 7b, ..., 7n to be connected to a device under test (DUT) 6a, 6b, ..., 6n. The DUT board 8 is designed and added by individual users to interface with each of a plurality of devices under test (DUT) 6a-n. The device specific adapter 13 is connected to the DUT interface 9 by electrical pins.

[0051] The tester 12 is adapted to be able to test the plurality of different devices under test (DUT) 6a-n that are each connected via corresponding sockets 7a, 7b, ..., 7n to the DUT board 8. Hence, the plurality of DUT 6a-n are connected to the channel cards lOa-n via the DUT interface 9, the DUT board 8 and the sockets 7a-n.

[0052] A user of the tester 12 can program the tester 12 on the controller 2, e.g. a computer, via a user interface and schedule a test flow 30 for executing a particular series of tests on the DUT 6a-n, cf. Fig. 3. Each test flow 30 comprises a plurality of test data 32-1, 32-2, ... 32-n, which are executed by at least one first node, e.g. node 20-1, in a deterministic or non-deterministic sequence. The test data 32-1 - 32-n contains one or more of program instructions and / or configuration information of one or more stimuli to be applied and / or measurements to be executed by the at least one first node, e.g. node 20-1.

[0053] Typically, all the test data 32-1 - 32-n executed by the at least one first node 20- 1 across the whole test flow 30 will be stored in the memory 21-1 of the at least one first node 20-1. However, if the data size of test data 32-1 - 32-n exceeds the memory size of the memory 21-1 of the first node 20-1, it is clear that not all test data 32-1 - 32-n can be stored in the memory 21-1. Accordingly, the memory 21-1 of the at least one first node 20-1 is fully utilized and indicated as "FULL" as shown in Fig. 4. Hence, the problem may occur that not all test data 32-1 - 32-n required for each of the tests within the complete test flow 30 can be stored and / or executed by the first node 20-1 such that the test flow 30 cannot be executed as a whole in a single run. The same problem may also occur for other nodes, which are also indicated as "FULL" in Fig. 4.

[0054] According to the invention, the tester 12 is configured such that it can appropriately increase the available memory to the nodes 20-1 - 20-n and to utilize the full memory of the plurality of the nodes 20-1 - 20-n and / or of the channel card 10a. This configuration is described in the form of a method 100 of operation in the following by the example of the first node 20-1 executing the test data 32-1 - 32-n. However, multiple first nodes may be provided such that the method 100 may be applied to multiple first nodes. In addition, at least one remote node 20-2 - 20-n of the plurality of nodes 20-1 - 20-n, being a node different from the first node 20-1, is provided to store test data 32-1 - 32-n to be executed by the at least one first node 20-1.

[0055] A flow chart of the method 100 which the test equipment is configured to employ is shown in Fig. 5.

[0056] In a first step 101 of the method 100, the controller 2, preferably, of the tester 12 determines the test data 32-1 - 32-n, which is to be executed by the first node 20-1.

[0057] The controller 2 then assigns the test data 32-1 - 32-n, which is to be executed by the first node 20-1 to the first node 20-1, cf. step 102. Hence, test data 32-1 - 32-n executed by the first node 20-1 is assigned to the first node 20-1.

[0058] The controller 2 then determines or estimates whether the data size of the test data 32-1 - 32-n assigned to the first node 20-1 exceeds the size of the memory 21-1 of the first node 20-1, cf. step 103. Hence, the controller 2 can predict if the first node 20-1 does not comprise sufficient memory size for the test data 32-1 - 32-n. As shown in Fig. 4, the memory 21-1 of the first node 20-1 does not comprise sufficient memory to store all the test data 32-1 - 32-n, which is required to be executed by the first node 20-1. The same applies to the other nodes indicated as "FULL" in Fig. 4.

[0059] The controller 2 then determines or estimates the size of each part of the test data 32-1 - 32-n that is assigned to the first node 20-1, cf. step 104. Hence, the test data 32-1 - 32-n having the largest memory size is known. Additionally, the controller 2 may optionally determine or estimate which test data 32-1 - 32-n assigned to the first node 20-1 is to be executed multiple times by the first node 20-1, cf. step 105.

[0060] According to the invention, the controller 2 further determines on the basis of a user input and / or on the basis of the memory available to the first node 20-1 to store certain parts of the test data 32-1 - 32-n to be executed by the first node 20-1 in the at least one remote node 20-2 - 20-n. It is in particular determined, which of the test data 32-1 - 32-n is to be stored in the first node 20-1 and which of the test data 32-1 - 32-n is to be stored in the at least one remote node 20-2 - 20-n. Preferably, the determination to store certain test data 32-1 - 32-n to be executed by the at least one first node 20-1 in a remote node 20-2 - 20-n is further based on the data size of the respective part of the test data 32-1 - 32- n and / or whether the test data 32-1 - 32-n is to be executed multiple times by the at least one first node 20-1.

[0061] As depicted in Fig. 6 by the dashed lined rectangle 33, test data 32-1, 32-2, 32-3, 32-5, 32-9 and 32-11 are each executed by the first node 20-1. However, only test data 32-1, 32-2 and 32-5 will be stored in the memory 21-1 of the first node 20-1. After storing the test data 32-1, 32-2 and 32-5 in the memory 21-1 of the first node 20-1, the memory 21-1 is fully utilized, so that no additional test data 32-3, 32-9 and 32-11 can be stored in the memory 21-1.

[0062] Test data 32-3 e.g. requires a larger memory size than test data 32-5. Thus, test data 32-5 will preferably be stored in the memory of the first node 20-1 to reduce the amount of data stored in the memory 21-1 of the first node 20-1. Hence, the memory available for a transfer and storage of test data 32-1 - 32-n to the first node 20-1 is increased in the memory 21-1.

[0063] The test data 32-3 and 32-9 will be stored in the memory 21-2 of the remote node 20-2, for example. Test data 32-11 will be stored in the memory 21-5 of the remote node 20-5. In particular, remote node 20-2 and remote node 20-5 will not execute test data 32-3, 32-9 and 32-11, as this test data 32-3, 32-9 and 32-11 is not for execution on these remote nodes 20-2, 20-5.

[0064] Each test data 32-2, 32-3, 32-5, 32-9 and 32-11 executed by the first node 20-1 will be stored either in the first node 20-1 or in the remote nodes 20-2 and 20-5. Thus, all test data 32-1, 32-2, 32-3, 32-5, 32-9 and 32-11 executed by the first node 20-1 may be stored in the plurality of nodes 20-1 - 20-n, although the memory 21-1 of the first node 20-1 does not provide sufficient memory size for the test data.

[0065] According to step 107, the test data 32-1 - 32-n is preferably compiled by the controller 2 before loading or transmitting the test data 32-1 - 32-n from the controller 2 to the respective nodes 20-1 - 20-n. Accordingly, the test data 32-1 - 32-n can be executed directly by the first node 20-1 without conversion or readdressing the test data 32-1 - 32-n. However, in an alternative embodiment, the test data 32 may be compiled before step 103.

[0066] In the step 108, the test data 32-1 - 32-n is loaded or transferred from the controller 2 to the respective nodes 20-1 - 20-n where the test data 32-1 - 32-n are to be stored. As shown in Fig. 6 and described above, the test data 32-1, 32- 2, 32-3, 32-5, 32-9 and 32-11 executed by the first node 20-1 is stored in the first node 20-1 and in the remote nodes 20-2, 20-5. After the transfer of the test data 32-1 - 32-n, the test flow 30 may be executed.

[0067] For the execution of the test data 32-1 - 32-n, the test data 32-1 - 32-n must be available to the first node 20-1: otherwise, the test data 32-1 - 32-n cannot be executed. Referring again to Fig. 6, the first node 20-1 for example cannot execute test data 32-3 since it is not stored in the memory 21-1. Hence, test data 32-3 needs to be transferred from the remote node 20-2 to the first node 20-1 by use of the data link 11. According to step 109, test data 32-1 - 32-n which is stored at the at least one remote node 20-2 - 20-n is transmitted to the first node 20-1 for executing the test data 32-1 - 32-n.

[0068] Fig. 7 schematically shows the transfer of test data 32-3 stored in the remote node 20-2 to the first node 20-1. The test data 32-3, which is to be executed later in time by the first node 20-1, is transferred to the first node 20-1 during the execution of the test data 32-2, which is executed earlier in time. Hence, the test data 32-3 need only be stored for only a short time in the memory 21-1 of the fist node 20-1.

[0069] According to the invention, the test data 32-1 - 32-n is not only stored in the first node 20-1 executing the test data 32-1 - 32-n but certain parts of the test data 32-1 - 32-n may also be stored in the remote nodes 20-2 - 20-n. The test data 32-1 - 32-n is then transmitted to the first node 20-1 executing the test data 32-1 - 32-n "just-in-time", such that the transmission of the test data 32-1 - 32-n ends before the execution of the respective test data 32-1 - 32-n. This provides the effect that the test data 32-1 - 32-n is distributed across a plurality of nodes 20-1 - 20-n, increasing the available memory for the nodes 20-1 - 20-n and utilizing the full memory of the plurality of nodes 20-1 - 20-n.

[0070] According to an embodiment of the invention, the memory 21-1 of the first node 20-1 comprises a first buffer 26 and at least one second buffer 27, as shown in Fig. 8a and 8b. The first buffer 26 is an active buffer configured to store test data 32-1 - 32-n to be executed by the first node 20-1. The active buffer provides the test data 32-2 during the execution to the processor 22-1 controlling the front-end 23-1 via the data link 25-1. Prior to or during the execution of the test data 32-2, the test data 32-3 is transferred to the at least one second buffer 27 acting as a swap buffer configured to receive and store the test data 32-3 transmitted to the first node 20-1, Fig. 8a.

[0071] As shown in Fig. 8b, after the execution of test data 32-2, the test data 32-3 is to be executed by the first node 20-1. The second buffer 27 then becomes the active buffer providing the test data 32-3 to be executed to the processor 22-1. The first buffer 26 then becomes, or may be designated, the swap buffer and the test data 32-4 to be executed later in time may then loaded into the second buffer 26.

[0072] The memory size of the first and the second buffers 26, 27 is variable and may be assigned on the basis of the maximum memory size of test data 32-1 - 32-n to be executed by the first node 20-1 stored in either the first node 20-1 or the at least one remote node 20-2 - 20-n. Hence, the memory size of the first and the second buffers 26, 27 is sufficient such that test data 32-1 - 32-n can be transmitted to the first and / or the second buffer without exceeding the memory size of the first and the second buffer 26, 27.

[0073] With reference to Fig. 9, the first node 20-1 receives test data 32-3 from the remote node 20-2 and the test data 32-5 is stored in the memory 21-1 of the first node 20-1 as described above. The test data 32-5 is executed by the first node 20-1, but is also executed by the remote nodes 20-2, 20-3 and 20-5. Thus, the first node 20-1 transmits the test data 32-5 to the remote nodes 20-2, 20-3 and

[0074] 20-5 also executes the test data 32-5. Accordingly, the first node 20-1 not only receives test data 32-3 from the remote node 20-2 but in this operation, it also provides test data 32-5 to the remote nodes 20-2, 20-3, 20-5. Hence, the first node 20-1 and the remote node 20-2 transmit and receive test data 32-1 - 32-n and act as bidirectional nodes.

[0075] In addition, a computer program is provided for operating the controller 2 of the tester 12 such that the tester 12 performs the method 100.

[0076] List of reference numbers:

[0077] 1 Automatic test equipment system

[0078] 2 Controller

[0079] 3 Test head

[0080] 5 Data link

[0081] 6a-n Device under test (DUT)

[0082] 7a-n Socket

[0083] 8 DUT board

[0084] 9 DUT interface lOa-n Channel card

[0085] 11 Data link

[0086] 12 Tester

[0087] 13 Device specific adapter

[0088] 20-1 - 20-n Node

[0089] 21-1 - 21-n Memory

[0090] 22-1 - 22-n Processor

[0091] 23-1 - 23-n Front-end

[0092] 24-1 - 24-n Pins

[0093] 25-1 - 25-n Data link

[0094] 26 Buffer

[0095] 27 Buffer

[0096] 30 Test flow

[0097] 32-1 - 32-n Test data

[0098] 33 Test data to be executed by a node

Claims

ADVANTEST CORPORATIONTester for an automatic test equipment system and method for controlling the sameClaims1. Tester (12) for an automatic test equipment system (1), the tester (12) comprising a controller (2) and a plurality of nodes (20-1 - 20-n) each of the plurality of nodes (20-1 - 20-n) comprising a memory (20-1 - 20-n); wherein at least one first node (20-1) of the plurality of nodes (20-1 - 20-n) is provided to store and execute test data (32-1 - 32-n) and at least one remote node (20-2 - 20-n) of the plurality of nodes (20-1 - 20-n) is provided to store test data (32-1 - 32-n) to be executed by the at least one first node (20-1); wherein the test data (32-1 - 32-n) contains one or more of program instructions and / or configuration information of one or more stimuli to be applied and / or measurements to be executed by the at least one first node (20-1); wherein the tester (12) is configured to:- determine the test data (32-1 - 32-n) which is to be executed by the at least one first node (20-1);- assign the test data (32-1 - 32-n) which is to be executed by the at least one first node (20-1) to the at least one first node (20-1);- determine on the basis of a user input and / or on the basis of the memory available to the at least one first node (20-1) to store certain parts of the test data (32-1 - 32-n) to be executed by the at least one first node (20-1) in the at least one remote node (20-2 - 20-n).

2. Tester (12) according to claim 1, wherein the tester (12) is further configured to move test data (32-1 - 32-n) which is stored at the at least one remote node (20-2 - 20-n) to the at least one first node (20-1) for executing the test data (32-1 - 32-n), wherein the test data (32- 1 - 32-n) is preferably moved from the at least one remote node (20-2 - 20-n) to a plurality of first nodes (20-1) for executing the test data (32-1 - 32-n).

3. Tester (12) according to claim 2, wherein the tester (12) is further configured to move the test data (32-1 - 32-n), which is to be executed later in time by the at least one first node (20-1), during the execution of test data (32-1 - 32-n), which is to be executed earlier in time by the at least one first node (20-1).

4. Tester (12) according to any one of the preceding claims, wherein the tester (12) is further configured to determine or estimate whether the data size of the test data (32-1 - 32-n) assigned to the at least one first node (20-1) exceeds the size of the memory (21-1) of the at least one first node (20-1).

5. Tester (12) according to any one of the preceding claims, wherein the tester (12) is further configured to determine or estimate the size of each part of test data (32-1 - 32-n) assigned to the at least one first node (20-1).

6. Tester (12) according to any one of the preceding claims, wherein the tester (12) is further configured to determine or estimate parts of test data (32-1 - 32-n) which will be executed multiple times by the at least one first node (20-1).

7. Tester (12) according to claim 5 or 6, wherein the determination to store certain test data (32-1 - 32-n) to be executed by the at least one first node (20-1) in a remote node (20-2 - 20-n) is further based on the data size of the respective part of the test data (32-1 - 32-n) and / or whether the parts of the test data (32-1 - 32-n) are to be executed multiple times by the at least one first node (20-1).

8. Tester (12) according to any one of the preceding claims, wherein the tester (12) is further configured to compile the test data (32-1 - 32-n) prior to transferring the test data (32-1 - 32-n) to the respective nodes(20-1 - 20-n).

9. Tester (12) according to any one of the preceding claims, wherein the memory (21-1) of at least one of the first node (20-1) comprises a first buffer (26) and at least one second buffer (26), wherein the first buffer(26) is an active buffer configured to store test data (32-1 - 32-n) to be executed by the first node (20-1) and the at least one second buffer(27) is a swap buffer configured to receive and store test data (32-1 - 32-n) transmitted to the first node (20-1), wherein preferably the transfer of test data (32-1 - 32-n) occurs during the execution of test data (32-1 - 32-n) by the first node (20-1) stored in the active buffer.

10. Tester (12) according to claim 9, wherein one of the at least one second buffer (27) becomes the active buffer and the first buffer (26) becomes a swap buffer after executing the test data (32-1 - 32-n) stored in the active buffer (27).

11. Tester (12) according to claim 9 or 10, wherein the memory size of the first buffer (26) and / or the second buffer (27) is variable and will be assigned on the basis of the maximum size of test data (32-1 - 32-n) to be executed by the first node (20-1) stored in either the first node (20-1) and / or the at least one remote node (20-2 - 20-n).

12. Tester (12) according to any one of the preceding claims, wherein the at least one first node (20-1) and / or the at least one remote node (20- 2 - 20-n) are bidirectional nodes.

13. Tester (12) according to any one of the preceding claims, wherein the tester (12) is further configured to transfer the test data (32-1 - 32-n) to the respective nodes once the determination of where the test data (32-1 - 32-n) is to be stored has been made and / or wherein the controller (2) is adapted to perform:- the determination of the test data (32-1 - 32-n) which is to be executed by the at least one first node (20-1); and / or- the assignment of the test data (32-1 - 32-n) to the at least one first node (20-1); and / or- the determination as to whether certain parts of the test data (32-1 -32-n) is to be stored at the at least one remote node (20-2 - 20-n).

14. Automatic test equipment system (1) comprising a device specific adapter (13) and a tester (12) according to any one of the preceding claims.

15. Method (100) for controlling a tester (12) for an automatic test equipment system (1), the tester (12) comprising a controller (2) and a plurality of nodes (20-1 - 20-n) each of the plurality of nodes (20-1 - 20-n) comprising a memory (20-1 - 20-n); wherein at least one first node (20-1) of the plurality of nodes (20-1 - 20-n) is provided to store and execute test data (32-1 - 32-n) and at least one remote node (20-2 - 20-n) of the plurality of nodes (20-1 - 20-n), being a node different from the first node (20-1), is provided to store test data (32-1 - 32-n) to be executed by the at least one first node (20-1); wherein the test data (32-1 - 32-n) contains one or more of program instructions and / or configuration information of one or more stimuli to be applied and / or measurements to be executed by the at least one first node (20-1); wherein the method (100) comprising the steps:- determining the test data (32-1 - 32-n) which is to be executed by the at least one first node (20-1);- assigning the test data (32-1 - 32-n) which is to be executed by the at least one first node (20-1) to the at least one first node (20-1);- determining on the basis of a user input and / or on the basis of the memory available to the at least one first node (20-1) to store certain parts of the test data (32-1 - 32-n) to be executed by the at least one first node (20-1) in the at least one remote node (20-2 - 20-n).

16. Method (100) according to claim 15, wherein the method (100) further comprising the step moving test data (32-1 - 32-n) which is stored at the at least one remote node (20-2 - 20-n) to the at least one first node (20-1) for executing the test data (32-1 - 32-n) and the method in particular comprises the step moving the test data (32-1 - 32-n), which is to be executed later in time by the at least one first node (20- 1), during the execution of test data (32-1 - 32-n), which is to beexecuted earlier in time by the at least one first node (20-1).

17. Method (100) according to claims 15 or 16, wherein the method (100) further comprises the steps- determining or estimating whether the data size of the test data (32-1- 32-n) assigned to the at least one first node (20-1) exceeds the size of the memory (21-1) of the at least one first node (20-1); and / or- compiling the test data (32-1 - 32-n) prior to transferring the test data (32-1 - 32-n) to the respective nodes (20-1 - 20-n).

18. Method (100) according to any one of the claims 15-17, wherein the method (100) further comprises the steps:- determining or estimating the size of each part of test data (32-1 - 32-n) to be executed by the at least one first node (20-1); and / or- determining or estimating parts of test data (32-1 - 32-n) which will be executed multiple times by the first node (20-1);- wherein the determination to store certain test data (32-1 - 32-n) to be executed by the at least one first node (20-1) in a remote node (20- 2 - 20-n) is in particular further based on the data size of the respective parts of the test data (32-1 - 32-n) and / or whether the parts of the test data (32-1 - 32-n) are to be executed multiple times by the at least one first node (20-1).

19. Method (100) according to any one of the claims 15-18, wherein the memory (21-1) of at least one of the first node (20-1) comprises a first buffer (26) and at least one second buffer (26), wherein the first buffer(26) is an active buffer configured to store test data (32-1 - 32-n) to be executed by the first node (20-1) and the at least one second buffer(27) is a swap buffer configured to receive and store test data (32-1 - 32-n) transmitted to the first node (20-1), wherein preferably the transfer of test data (32-1 - 32-n) occurs during the execution of test data (32-1 - 32-n) by the first node (20-1) stored in the active buffer; wherein in particular one of the at least one second buffer (27) becomes the active buffer and the first buffer (26) becomes a swap buffer after executing the test data (32-1 - 32-n) stored in the active buffer (27); and / or the memory size of the first buffer (26) and / or the second buffer (27)is variable and will be assigned on the basis of the maximum size of test data (32-1 - 32-n) to be executed by the first node (20-1) stored in either the first node (20-1) and / or the at least one remote node (20- 2 - 20-n).

20. Computer program for controlling a tester (12) for an automatic test equipment system (1) to perform the method (100) according to any one of the claims 15-19.

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