Micromirror apparatus and electronic device

Abstract

A micromirror apparatus and an electronic device. The micromirror apparatus comprises a lens and a housing for mounting the lens, wherein the lens and the housing enclose an accommodating cavity, a deflectable reflector is provided in the accommodating cavity, and the accommodating cavity is configured as a vacuum cavity.

Description

Micro-mirror device and electronic device

[0001] Cross Reference to Related Applications

[0002] The present application claims priority to the Chinese patent application No. 202421528107.9, filed on June 28, 2024, and entitled "Micro-mirror device and electronic device", the content of which is incorporated herein by reference in its entirety. TECHNICAL FIELD

[0003] The present disclosure relates to the field of optical technology, in particular, to a micro-mirror device and an electronic device. BACKGROUND

[0004] In the related art, when the reflecting mirror of the micro-mirror device vibrates at a high frequency in the air, it needs to overcome the damping effect of the air to do work, which increases the driving power consumption of the reflecting mirror. The friction between the high-speed movement and the air will cause the driving suspension arm area of the reflecting mirror to accumulate heat, which will cause the reflecting mirror to overheat and fail, the vibration frequency to be abnormal, and even cause the suspension arm to break. Another vibration environment of the reflecting mirror is a liquid environment. The movement damping of the liquid is very large, which will cause the vibration frequency of the reflecting mirror to be very low, and seriously restrict the performance of the micro-mirror device. SUMMARY

[0005] The purpose of the present disclosure is to provide a micro-mirror device and an electronic device to at least partially solve the problems in the related art.

[0006] To achieve the above-mentioned purpose, the present disclosure provides a micro-mirror device, comprising a lens and a housing for mounting the lens, the lens and the housing enclosing a receiving cavity, a deflectable reflecting mirror is arranged in the receiving cavity, wherein the receiving cavity is configured as a vacuum cavity.

[0007] Optionally, the lens is configured such that the included angle between the outgoing light and the incident light is greater than the included angle between the reflected light and the incident light, wherein the incident light is the light incident to the lens, the outgoing light is the light emitted from the lens, and the reflected light is the light reflected by the reflecting mirror.

[0008] Optionally, the lens comprises a first light-transmitting surface and a second light-transmitting surface, the first light-transmitting surface is used for receiving the reflected light, the second light-transmitting surface is used for receiving the refracted light refracted by the first light-transmitting surface, and the second light-transmitting surface is used for emitting the outgoing light, wherein the first light-transmitting surface and the second light-transmitting surface are configured to have different curvatures.

[0009] Optionally, the curvature of the second light-transmitting surface is smaller than the curvature of the first light-transmitting surface.

[0010] Optionally, the lens is configured to make the angle between the exit light ray and the incident light ray greater than 90 degrees when the angle between the mirror and the incident light ray is 45 degrees.

[0011] Optionally, the lens comprises an incident light-transmitting part for receiving the incident light ray, and the incident light-transmitting part is configured to have the same curvature on two opposite surfaces.

[0012] Optionally, the incident light-transmitting part is aligned with the center of the mirror.

[0013] Optionally, the mirror is configured to be able to deflect around a first deflection axis and a second deflection axis, and the first deflection axis is perpendicular to the second deflection axis.

[0014] Optionally, the micro-mirror device comprises a driving mechanism connected between the shell and the mirror to drive the mirror to deflect.

[0015] Optionally, the lens is configured as a semi-spherical lens, and the mirror thickness of the semi-spherical lens is configured to gradually increase from the middle to the end of the extension direction.

[0016] According to a second aspect of the embodiments of the present disclosure, an electronic device is provided, comprising the micro-mirror device according to any one of the above embodiments.

[0017] The technical solutions provided by the embodiments of the present disclosure can have the following beneficial effects:

[0018] The shell and the lens enclose a containing cavity in a vacuum state, and the mirror deflects at a high frequency in the containing cavity in the vacuum state, so that the mirror does not need to overcome the work done by air or liquid molecules during deflection, so that the driving power consumption of the mirror is low. Moreover, the working stability of the mirror is also avoided from being affected by the heat generated by the friction between the mirror and the air in the containing cavity, so as to ensure the stability and reliability of the micro-mirror device, and improve the service life of the product.

[0019] Other features and advantages of the present disclosure will be described in detail in the following specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings are included to provide a further understanding of the present disclosure and constitute a part of the specification, and are used together with the following specific embodiments to explain the present disclosure, but do not constitute a limitation on the present disclosure. In the drawings:

[0021] FIG. 1 is an exploded view of a micro-mirror device according to an exemplary embodiment of the present disclosure.

[0022] FIG. 2 is a schematic diagram of an optical path when the mirror deflects by 30 degrees in a micro-mirror device according to an exemplary embodiment of the present disclosure.

[0023] Fig. 3 is a partial enlarged view of part A in Fig. 2.

[0024] Fig. 4 is a schematic diagram of the light path when the mirror is deflected by 45° in a micro-mirror device according to an exemplary embodiment of the present disclosure.

[0025] Fig. 5 is a partial enlarged view of part B in Fig. 4.

[0026] Fig. 6 is a schematic diagram of the light path when the mirror is deflected by -45° in a micro-mirror device according to an exemplary embodiment of the present disclosure.

[0027] Fig. 7 is a partial enlarged view of part C in Fig. 6.

[0028] Fig. 8 is a schematic diagram of the light path in a micro-mirror device according to an exemplary embodiment of the present disclosure.

[0029] Fig. 9 is a schematic diagram of the light path in a micro-mirror device according to an exemplary embodiment of the present disclosure.

[0030] Fig. 10 is a schematic diagram of the light path in a micro-mirror device according to an exemplary embodiment of the present disclosure.

[0031] Fig. 11 is a schematic diagram of an electronic device according to an exemplary embodiment of the present disclosure.

[0032] Legend 1, micro-mirror device; 2, electronic device; 100, lens; 110, accommodating cavity; 120, incident light-transmitting part; 131, first light-transmitting surface; 132, second light-transmitting surface; 200, mirror; 300, driving mechanism; 310, first deflection axis; 330, second deflection axis; 340, magnetic driving member; 400, housing; L1, outgoing light ray; L2, incident light ray; L3, reflected light ray; Z1, refracted light ray. DETAILED DESCRIPTION

[0033] The specific embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely intended to illustrate and explain the present disclosure, and are not intended to limit the present disclosure.

[0034] In the present disclosure, the orientation words such as "upper" and "lower" are defined for the convenience of description in conjunction with the corresponding drawings, and do not limit the direction of the micro-mirror device. "Inner" and "outer" are defined according to the contour of the corresponding component itself. The terms such as "first" and "second" used in the present disclosure are used to distinguish one element from another element, and do not have sequentiality and importance. In addition, the following description refers to the drawings, and unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.

[0035] Micro-mirror is a small optical component with wide application, which can change optical path by controlling vibration to realize modulation, deflection and focusing of light.

[0036] Referring to FIG. 1 and FIG. 2, the micro-mirror device 1 provided by the embodiment of the present disclosure includes a lens 100 and a shell 400 for mounting the lens 100, the lens 100 and the shell 400 can form an accommodating cavity 110, and a deflectable mirror 200 can be arranged in the accommodating cavity 110, wherein the accommodating cavity 110 can be configured as a vacuum cavity. It can be understood that the lens 100 can be an optical component for refracting light, and the mirror 200 can be an optical component for reflecting light, and the cooperation of high-frequency deflection of the lens 100 and the mirror 200 can realize modulation and deflection of light. The accommodating cavity 110 formed between the lens 100 and the shell 400 is a closed space to prevent dust from entering and affecting the reflection effect of the mirror 200.

[0037] Through the above technical solution, the mirror 200 performs high-frequency vibration deflection in the vacuum state of the accommodating cavity 110, so that the mirror 200 does not need to overcome the work of air or liquid molecules during deflection, and the driving power consumption of the mirror 200 is low. Moreover, it also avoids the generation of heat by friction between the mirror 200 and the air in the accommodating cavity 110, which affects the working stability of the mirror 200, ensures the stability and reliability of the micro-mirror device 1, and improves the service life of the product.

[0038] In an embodiment, the accommodating cavity 110 configured as a vacuum cavity can adopt two ways, for example, an operator can package the micro-mirror device 1 in a vacuum environment to exhaust the air in the accommodating cavity 110, so that the accommodating cavity 110 becomes a vacuum cavity, and this way can also avoid the existence of dust, thereby avoiding the influence of dust falling on the mirror 200 on the use performance of the micro-mirror device 1; or a one-way valve is installed on the shell 400, and after the micro-mirror device 1 is assembled, a vacuumizing device is communicated with the one-way valve to suck the accommodating cavity 110 into a vacuum state.

[0039] In an embodiment, referring to FIG. 2, FIG. 4 and FIG. 6, the lens 100 can be configured such that the included angle between the outgoing light L1 and the incident light L2 is greater than the included angle between the reflected light L3 and the incident light L2, wherein the incident light L2 can be light incident to the lens 100, the outgoing light L1 can be light emitted from the lens 100, and the reflected light L3 can be light reflected by the mirror 200. In the embodiment of the present disclosure, the way to realize this light path can be realized by one lens or by a combination of multiple lenses, and the present disclosure does not limit this.

[0040] Specifically, in combination with FIG. 2 and FIG. 3, when the mirror 200 is deflected by 30 degrees relative to the horizontal direction, the angle a2 between the outgoing light ray L1 and the incident light ray L2 is greater than the angle a1 between the reflected light ray L3 and the incident light ray L2, thereby expanding the FOV (Field of View). In combination with FIG. 4 and FIG. 5, when the mirror 200 is deflected by 45 degrees relative to the horizontal direction, the angle a4 between the outgoing light ray L1 and the incident light ray L2 is greater than the angle a3 between the reflected light ray L3 and the incident light ray L2, thereby expanding the FOV. In combination with FIG. 6 and FIG. 7, when the mirror 200 is deflected by -45 degrees relative to the horizontal direction, the angle a6 between the outgoing light ray L1 and the incident light ray L2 is greater than the angle a5 between the reflected light ray L3 and the incident light ray L2, thereby expanding the FOV. Such a configuration in the present disclosure can expand the FOV of the micro-mirror device 1, so that the micro-mirror device 1 obtains a larger scanning range.

[0041] In an embodiment, referring to FIG. 2 to FIG. 7, the lens 100 can include a first light-transmitting surface 131 and a second light-transmitting surface 132, the first light-transmitting surface 131 can be configured to receive the reflected light ray L3, the second light-transmitting surface 132 can be configured to receive the refracted light ray Z1 refracted by the first light-transmitting surface 131, and the second light-transmitting surface 132 can be configured to emit the outgoing light ray L1, wherein the first light-transmitting surface 131 and the second light-transmitting surface 132 can be configured to have different curvatures.

[0042] It can be understood that the first light-transmitting surface 131 can be located on the inner side of the lens 100, i.e., the side enclosing the accommodating cavity 110, and the second light-transmitting surface 132 can be located on the outer side of the lens 100, i.e., the side away from the accommodating cavity 110. In combination with FIG. 9, when the curvature of the first light-transmitting surface 131 is equal to the curvature of the second light-transmitting surface 132, for example, when the relative refractive index of the lens 100 relative to the vacuum environment in the accommodating cavity 110 and the relative refractive index of the lens 100 relative to the external air environment are both 1.7, if the reflected light ray L3 reaches the first light-transmitting surface 131 at an angle of 60 degrees with the normal line thereof, in the first refraction, according to the refraction law, sin60° / 1.7=sin30°, so the refraction angle (the angle between the refracted light ray Z1 and the normal line on the first light-transmitting surface 131) after the first light-transmitting surface 131 is 30 degrees. The refracted light ray Z1 propagates in the lens 100 to the second light-transmitting surface 132 and undergoes the second refraction, the angle between the refracted light ray Z1 and the normal line on the second light-transmitting surface 132 is 30 degrees, according to the refraction law, 1.7×sin30°=sin60°, so the angle between the outgoing light ray L1 and the normal line on the second light-transmitting surface 132 is 60 degrees, which is equal to the angle between the reflected light ray L3 and the normal line on the first light-transmitting surface 131, and the field of view is not expanded.

[0043] Therefore, in the embodiment of the present disclosure, in order to change the field of view, the curvatures of the first light-transmitting surface 131 and the second light-transmitting surface 132 are set to be different. For example, referring to FIG. 8, when the included angle between the tangent of the first light-transmitting surface 131 and the tangent of the second light-transmitting surface 132 is 10 degrees (i.e., the curvatures of the first light-transmitting surface 131 and the second light-transmitting surface 132 are different), and the relative refractive indices of the first light-transmitting surface 131 and the second light-transmitting surface 132 to vacuum and external air are both 1.7, the included angle between the reflected light L3 and the normal line on the first light-transmitting surface 131 is 37 degrees, and according to the refraction law, sin 37° / 1.7≈sin 20°, so the angle between the refracted light Z1 and the normal line on the first light-transmitting surface 131 is 20 degrees, and when the refracted light Z1 propagates to the second light-transmitting surface 132, according to the refraction law, 1.7×sin 30°≈sin 60°, so the included angle between the emergent light L1 and the normal line on the second light-transmitting surface 132 is 60 degrees, which is larger than the deflection of the initial light, and thus the field of view of the micro-mirror device 1 is expanded. The different curvatures of the first light-transmitting surface 131 and the second light-transmitting surface 132 can make the light path have the following three cases:

[0044] The first case, please refer to FIG. 4 and FIG. 5, the incident light L2 irradiates to the reflecting mirror to generate the reflected light L3, and when the light propagates from the vacuum to the lens 100 made of glass, because the propagation speed of the light in the glass and the vacuum is different, the light path will be refracted at the junction of the two media (the first light-transmitting surface 131). In the first refraction, the refracted light Z1 will be upward deflected relative to the reflected light L3, so that the included angle between the refracted light Z1 and the incident light L2 is smaller than the included angle α3 between the reflected light L3 and the incident light L2, that is, the light angle will be smaller after the first refraction, and the smaller amount is a first value, for example, 6 degrees. It should be noted that the smaller or larger mentioned herein refers to the smaller or larger of the included angle between the corresponding light and the incident light. When the refracted light Z1 propagates from the glass to the external environment, because the propagation speed of the light in the glass and the air is different, the light will be refracted at the junction of the two media (the second light-transmitting surface 132). In the second refraction, the emergent light L1 will be downward deflected relative to the refracted light Z1, that is, the light angle will be larger after the second refraction than after the first refraction, and the larger amount is a second value, for example, 12 degrees, and finally the angle of the emergent light L1 is increased by 6 degrees. In this case, the light angle can be first decreased and then increased, and the second value of the amount of change is larger than the first value of the amount of change, that is, it can be ensured that the angle of the final emergent light L1 is increased after the light passes through the two refractions, so that the emergent angle is expanded, that is, the included angle α4 between the emergent light L1 and the incident light L2 is larger than the included angle α3 between the reflected light L3 and the incident light L2, and the field of view is expanded.

[0045] In the second case, please refer to FIG. 10, the reflected light L3 reaches the first light-transmitting surface 131 and undergoes the first refraction, in which the refracted light Z1 can be deflected downward relative to the reflected light L3, so that the included angle between the refracted light Z1 and the incident light L2 is greater than the included angle between the reflected light L3 and the incident light L2, that is, the light angle will increase after the first refraction, and the increase amount is a third value, such as 10 degrees. The refracted light Z1 reaches the second light-transmitting surface 132 and undergoes the second refraction, and the emergent light L1 can be deflected upward relative to the refracted light Z1, that is, the light angle will decrease after the second refraction relative to the last refraction, and the decrease amount is a fourth value, such as 4 degrees, and finally the angle of the emergent light L1 increases by 6 degrees. In this case, the light angle can first increase and then decrease, and the third value of the increase amount is greater than the fourth value of the decrease amount, that is, it can be ensured that the included angle between the emergent light L1 and the incident light L2 is greater than the included angle between the reflected light L3 and the incident light L2.

[0046] In the third case, the first refraction can be the same as the first refraction mode of the second case described above, that is, the light is deflected downward and the angle will increase after the first refraction, and in this case the increase amount is a fifth value, such as 3 degrees. Of course, in the second refraction, the emergent light L1 can also be further deflected downward relative to the refracted light Z1, that is, the light angle will further increase relative to the last refraction after the second refraction, and the increase amount is a sixth value, such as 3 degrees, and finally the angle of the emergent light L1 increases by 6 degrees. In this case, the light angle increases in each refraction, so that the emergent light L1 with an increased angle is finally obtained.

[0047] In the present embodiment, please refer to FIGS. 2, 4, 6 and 8, the curvature of the second light-transmitting surface 132 can be smaller than the curvature of the first light-transmitting surface 131, so that the radius of curvature of the second light-transmitting surface 132 located on the outer side can be greater than the radius of curvature of the first light-transmitting surface 131 located on the inner side, which facilitates the user to control the radii of curvature of the inner and outer sides of the lens 100, thereby facilitating the regular shape of the lens 100 and facilitating the processing and manufacturing of the lens 100.

[0048] In an embodiment, please refer to FIG. 4 and FIG. 5, the lens 100 can be configured to: when the mirror 200 is deflected to an angle of 45 degrees with the incident light L2, the angle a4 between the outgoing light L1 and the incident light L2 can be greater than 90 degrees, and at this time the angle a3 between the reflected light L3 and the incident light L2 is equal to 90 degrees, thereby expanding the field of view of the micro-mirror device 1, so that the micro-mirror device 1 obtains a larger scanning range, thereby expanding the user's field of view. Please refer to FIG. 6 and FIG. 7, for the same reason, when the mirror 200 is deflected to an angle of 45 degrees with the incident light L2, the angle a6 between the outgoing light L1 and the incident light L2 can be greater than 90 degrees, and at this time the angle a5 between the reflected light L3 and the incident light L2 is equal to 90 degrees. When the mirror 200 completes a period of deflection, a4+a6>180 degrees can be obtained, and the micro-mirror device 1 can obtain a scanning range of more than 180 degrees in front of the lens 100.

[0049] In an embodiment, please refer to FIG. 2, FIG. 4 and FIG. 6, the lens 100 can include an incident light transmission portion 120, the incident light transmission portion 120 can be used to receive the incident light L2, and the incident light transmission portion 120 can be configured to have the same curvature on the two opposite surfaces, so that the light perpendicular to the incident light transmission portion 120 can be directly incident into the accommodating cavity 110, avoiding the refraction of the incident light on the incident light transmission portion 120, increasing the complexity of the incident light path, and simplifying the incident light path, thereby facilitating the user to use the micro-mirror device 1.

[0050] Further, the incident light transmission portion 120 can be aligned with the center of the mirror 200, avoiding the deviation of the centers of the two, so that part of the incident light L2 cannot irradiate the mirror 200. This center alignment facilitates the change of the light path law, so that the deflection law of the mirror 200 in the opposite direction is the same, thereby improving the convenience of the micro-mirror device 1.

[0051] In an embodiment, please refer to FIG. 1, the mirror 200 can be configured to be able to deflect around the first deflection axis 310 and the second deflection axis 330, and the first deflection axis 310 can be perpendicular to the second deflection axis 330. By arranging the first deflection axis 310 and the second deflection axis 330, the mirror 200 can be deflected in two dimensions, and a three-dimensional image in front of the micro-mirror device 1 can be scanned, thereby facilitating the micro-mirror device 1 to collect images comprehensively.

[0052] In an embodiment, referring to FIG. 1, the micro-mirror device 1 can comprise a driving mechanism 300, which can be connected between the housing 400 and the mirror 200 to drive the mirror 200 to deflect, so that the mirror 200 can be deflected at any angle compared to the incident light L2, thereby changing the reflection angle. The driving mechanism 300 can be driven by electromagnetic drive, piezoelectric drive or magnetic drive, etc.

[0053] Further, referring to FIG. 1, the mirror 200 can be installed on the first deflection shaft 310, and the micro-mirror device 1 can further comprise a connecting ring and a magnetic driving member 340. The first deflection shaft 310 is located in the connecting ring, and the two ends of the first deflection shaft 310 are rotatably connected to the connecting ring. The connecting ring is installed on the second deflection shaft 330, and the second deflection shaft 330 can drive the connecting ring to rotate around its own axis. The magnetic driving member 340 is used to control the rotation of the first deflection shaft 310 and the second deflection shaft 330, respectively.

[0054] In an embodiment, referring to FIG. 1, the lens 100 can be configured as a semi-spherical lens 100, and the thickness of the semi-spherical lens 100 can be configured to gradually increase from the middle to the end of the extension direction, so that the curvature radius value of the inner side of the lens 100 is smaller than the curvature radius value of the outer side of the lens 100, and the focal length value of the inner side of the lens 100 is smaller than the focal length value of the outer side of the lens 100. In this way, the specially designed lens 100 can cause the light reflected by the mirror 200 to be refracted twice on the inner and outer sides of the lens 100 when the mirror 200 rotates, so that the final outgoing light L1 can have an expanded outgoing angle. Furthermore, the semi-spherical lens 100 can have an arc-shaped profile on the inner and outer sides, which can make the structure regular and facilitate processing and manufacturing. In the embodiments of the present disclosure, the center of the inner profile and the center of the outer profile can be aligned with the center of the mirror 200, i.e., the centers of the two arc-shaped profiles are collinear with the center of the mirror 200, so that the light path can be controlled.

[0055] Referring to FIG. 11, according to the second aspect of the embodiments of the present disclosure, an electronic device 2 is provided, which can comprise the micro-mirror device 1 of any of the above embodiments. For example, the electronic device can be a car laser radar, a micro-projector, a car HUD (head-up display system) or an AR device, etc. The electronic device 2 can have all the beneficial effects of the micro-mirror device 1 described above, which will not be repeated here.

[0056] The preferred embodiments of the present disclosure are described in detail above with reference to the accompanying drawings, but the present disclosure is not limited to the specific details in the above embodiments. Various simple modifications can be made to the technical solutions of the present disclosure within the scope of the technical concept of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.

[0057] It should also be noted that various technical features described in the above detailed description can be implemented in any suitable combination, and that the disclosure is not limited to any particular combination described.

[0058] Furthermore, various different embodiments of the disclosure can be combined in any suitable manner, and the same should be considered to be disclosed by the disclosure, as long as it does not deviate from the spirit of the disclosure.

Claims

1. A micromirror device (1), characterized in that, The device includes a lens (100) and a housing (400) for mounting the lens (100). The lens (100) and the housing (400) enclose a cavity (110). A deflectable mirror (200) is disposed in the cavity (110). The cavity (110) is configured as a vacuum cavity.

2. The micromirror device (1) according to claim 1, characterized in that, The lens (100) is configured such that the angle between the outgoing ray (L1) and the incident ray (L2) is greater than the angle between the reflected ray (L3) and the incident ray (L2), wherein the incident ray (L2) is the ray incident on the lens (100), the outgoing ray (L1) is the ray emitted from the lens (100), and the reflected ray (L3) is the ray reflected by the mirror (200).

3. The micromirror device (1) according to claim 2, characterized in that, The lens (100) includes a first light-transmitting surface (131) and a second light-transmitting surface (132). The first light-transmitting surface (131) is used to receive the reflected light ray (L3), and the second light-transmitting surface (132) is used to receive the refracted light ray (Z1) refracted by the first light-transmitting surface (131). The second light-transmitting surface (132) is used to emit the outgoing light ray (L1). The first light-transmitting surface (131) and the second light-transmitting surface (132) are configured with different curvatures.

4. The micromirror device (1) according to claim 3, characterized in that, The curvature of the second light-transmitting surface (132) is less than the curvature of the first light-transmitting surface (131).

5. The micromirror device (1) according to any one of claims 2-4, characterized in that, The lens (100) is configured such that when the reflector (200) is deflected to an angle of 45 degrees with the incident ray (L2), the angle between the outgoing ray (L1) and the incident ray (L2) is greater than 90 degrees.

6. The micromirror device (1) according to any one of claims 1-5, characterized in that, The lens (100) includes an incident light-transmitting section (120) for receiving incident light rays (L2), and the incident light-transmitting section (120) is configured such that its two opposing surfaces have the same curvature.

7. The micromirror device (1) according to claim 6, characterized in that, The incident light-transmitting part (120) is aligned with the center of the reflector (200).

8. The micromirror device (1) according to any one of claims 1-7, characterized in that, The reflector (200) is configured to deflect about a first deflection axis (310) and a second deflection axis (320), the first deflection axis (310) being perpendicular to the second deflection axis (320).

9. The micromirror device (1) according to any one of claims 1-8, characterized in that, The micromirror device (1) includes a drive mechanism (300) connected between the housing (400) and the mirror (200) to drive the mirror (200) to deflect.

10. The micromirror device (1) according to any one of claims 1-9, characterized in that, The lens (100) is constructed as a hemispherical lens, and the lens thickness of the hemispherical lens is configured to gradually increase from the middle to the end of its extension direction.

11. An electronic device (2), characterized in that, Includes the micromirror device (1) according to any one of claims 1-10.

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