Support device for planetary parts

Abstract

The invention relates to a support device for parts of a planetary system, the support device comprising: - a sun support (1) rotatably mounted so as to rotate about a sun axis (S) relative to a reference system, at least one planet support (2) rotatably mounted on the sun support (1) so as to rotate about a planet axis (P) parallel to the sun axis (S); - first drive means (5) for driving the planet support (2) as the sun support (1) rotates relative to the reference system: - at least one satellite support (3) rotatably mounted on the planet support (2) so as to rotate about a satellite axis (R) which is tilted relative to the sun axis (S); - tilting means (4) for modifying the tilt or orientation of the satellite axis (R) relative to the planet support (2) as the planet support (2) or the sun support (1) rotates.

Description

[0001] Planetary motion parts support device

[0002] technical field

[0003] The invention relates to a planetary motion part support device intended to be placed in a projection chamber for the application of surface coatings.

[0004] Previous technique

[0005] A surface coating process, notably using plasma, is known in which sublimated material or material separated into fine particles is projected in a directed stream against parts, on which a coating is then formed by the deposition of this material. To obtain the most homogeneous deposit possible and high productivity, a number of parts to be treated are placed in a chamber on a support device. This device allows the parts to move within the chamber so that each part presents all the surfaces where a coating is desired to the material stream.

[0006] For example, document EP 1 153 155 A1 describes a workpiece support device comprising a table mounted to rotate around a vertical axis within an enclosure. The disc-shaped table has a series of spindles, also vertically aligned, around its periphery. Each spindle has at least one planetary support mounted for rotation. Each planetary support is also circular and has a series of satellite supports, also mounted for rotation, around its periphery. A gear system drives each of these supports in rotation with the main rotation of the table.

[0007] This system is suitable for certain types of parts, but for others, the movements provided by the device are insufficient to expose all the faces of the parts to be machined. As shown in Figure 5, a typical example is a nail-shaped part 101 with a long cylindrical shank 1010 and a head 1011 that is also cylindrical but wider than the shank. The head has an upper face 1012, which may be hollow, and a lower face 1013 with an annular shape. For example, one might wish to machine the upper part of the shank 1010 and all the faces of the head 1011.If part 101 is placed in the satellite support 103 with its axis aligned with the rotation axis R of the satellite support 103, and with the material flow Fl coming from one side in a direction perpendicular to the axis of the satellite support 103, the cylindrical parts are found to be well coated due to the rotation R3 of the support and part 101 around the axis R of the satellite support 103. However, the flow is always oriented substantially parallel to the annular surface 1013 under the head, such that the coating received by this face 1013 is poor. Furthermore, if the upper face 1012 of the head is hollow, it does not receive the flow F2 and is not coated properly either.

[0008] Figure 6 shows a case in which the satellite mount 103' is mounted with an inclined axis of rotation R', compared to the case in Figure 5. In this configuration, the upper face 1012 of the part 101 is fully exposed to the flux F2. Conversely, the lower face 1013 of the head 1011 remains in the shadow of the flux F3 and receives no coating.

[0009] To promote exposure of the ends of the parts, document EP 2 297 375 Al proposes that the parts be arranged in a fan shape on a rotating satellite support.

[0010] In document DE 20 2004 009256 Ul, the parts to be processed are arranged in a fan shape on a rotating support. A ratchet system allows the parts to be pivoted around their longitudinal axis in increments, for example, by one-sixth of a turn.

[0011] These devices do not improve the treatment of the annular surface in the case of the nail as described previously.

[0012] Description of the invention

[0013] Therefore, one objective of the invention is to provide a parts support that allows the faces of the parts to be exposed as completely as possible.

[0014] With this objective in mind, the invention relates to a planetary system part support device according to claim 1. The device comprises:

[0015] - a solar mount that is rotatable around a solar axis relative to a reference system, at least one planetary mount that is rotatable on the solar mount around a planetary axis parallel to the solar axis;

[0016] - initial means of driving the planetary support during the rotation of the solar support relative to the reference system:

[0017] - at least one satellite mount rotatably mounted on the planetary mount along a satellite axis inclined relative to the solar axis;

[0018] - second drive means for driving the satellite support during the rotation of the planetary or solar support; characterized in that the support device further comprises tilting means for modifying the inclination or orientation of the satellite axis relative to the planetary support during the rotation of the planetary or solar support.

[0019] By adding tilting mechanisms to orient the satellite mount, an additional possibility is introduced for orienting the part towards a flux that is fixed in direction. For example, in the case of a nail-shaped part, as described previously, placed on the satellite mount, changing its orientation will allow the upper surface of the head to be exposed at certain times, while at other times the exposure will be on the lower surface of the head. Thus, a maximum number of surfaces of the part can be exposed to the flux and receive surface treatment.

[0020] According to a design feature, the tilting means comprise a control plate extending in a plane perpendicular to the planetary axis. For each satellite mount, the plate includes third drive means to act upon each satellite mount. The plate is driven in the plane relative to the planetary mount so that the third drive means cause a change in the tilt or orientation of the satellite axis of the satellite mounts. Displacement of the plate alone relative to the planetary mount controls the tilt of all the satellite mounts.

[0021] In one embodiment, the third drive means are drive lights through which the satellite carriers extend. Drive via lights allows a degree of freedom for the inclination and orientation of the satellite axis to adapt.

[0022] According to an improvement, the planetary mount incorporates a guide light for each satellite mount, through which the corresponding satellite mount passes, in order to limit the amplitude of the satellite mount's oscillation. The guide light determines the possible amplitude of movement for the satellite mount, as well as the relationship between inclination and orientation. It is also observed that the guide light is relatively easy to change, allowing the trajectories of the satellite mounts to be modified without needing to change the platform.

[0023] In one embodiment, the guide light is a linear slit. In this case, the orientation is constant and only the inclination varies. In another embodiment, the guide light is circular. In this case, the inclination is constant and only the orientation varies.

[0024] In one embodiment, the drive means include a ball joint connecting the platform to one end of the satellite mount. With the platform positioned at one end of the satellite mount, the tilting of the mount is guided above the platform, and therefore closer to the surface of the planetary stabilizer. This minimizes the space required for the satellite mount's movement above the planetary stabilizer.

[0025] According to one design, the tilting means comprise an eccentric driven in rotation relative to the planetary support, the eccentric being rotationally connected to the swashplate, with stop means provided to prevent the swashplate from rotating. Thus, the swashplate receives an oscillating motion without being driven in rotation. This oscillating motion is then used to tilt the satellite supports by transmitting the motion through the third drive means.

[0026] According to a specific design, the stop means comprise at least two pillars passing through the platform via circular stop slots. The combination of the pillars and stop slots prevents the platform from rotating. Furthermore, the pillars serve to connect components located above and below the platform.

[0027] According to one design, the eccentric is driven in rotation relative to the planetary carrier by means of an epicyclic gear train. The epicyclic gear train comprises a first and a second element from a group consisting of a ring gear and a planetary wheel. The first element is connected to the eccentric, and the second element is fixed and centered on the planetary carrier. A planet carrier is fixed against rotation relative to the sun carrier and mounted for rotation about the axis of the planetary carrier. At least one planet, rotatably mounted on the planet carrier, meshes simultaneously with the planetary wheel and the ring gear. This arrangement allows the rotation of the planetary carrier to be used to generate the movement of the swashplate in synchronization.

[0028] According to a design feature, the satellite mounts are rotated via a ball joint. This type of joint transmits the rotation of the satellite mounts while allowing the satellite axis to tilt. A universal joint is an example of a joint that performs this function. Brief description of the figures

[0029] The invention will be better understood and other features and advantages will become apparent upon reading the following description, the description referring to the attached drawings, among which:

[0030] - Figure 1 is a schematic perspective view of a device conforming to a first embodiment of the invention (on the left constant inclination + Orientation; on the right front / back pivoting);

[0031] - Figure 2 is a schematic cross-sectional view of the device in Figure 1 according to a first embodiment;

[0032] - Figure 3 is a schematic top view of part of the device in Figure 1;

[0033] - Figure 4 is a schematic view showing the flux received by a nail-shaped part;

[0034] - Figure 5 and a schematic view showing the flux received by a nail-shaped part according to the prior art;

[0035] - Figure 6 and a schematic view showing the flux received by a nail-shaped piece according to another earlier art;

[0036] - Figure 7 is a perspective view of the planetary gear hood of Fig. 2;

[0037] - Figure 8 is a perspective view of the planetary gear hood shown on the right in Fig. 1;

[0038] - Figure 9 is a view similar to Figure 2 according to a second embodiment.

[0039] Detailed description

[0040] An installation comprising a planetary system part support device according to a first embodiment of the invention is shown schematically in Figures 1 to 4. The installation can typically be a PVD (physical vapor deposition) coating installation. The support device is placed in a controlled vacuum chamber, in which, for example, sputtering is performed from one or more targets (constituting the material to be deposited).

[0041] In Fig. 1, the reference symbol C designates a fixed target relative to a reference system, generating a flux that transports the material constituting the coating of the parts to be treated. The flux is oriented in the direction symbolized by the arrow Fl. This drawing is obviously simplified, and the flux F may diverge slightly at the edges. The device includes a solar support 1 mounted for rotation relative to the reference system along a solar axis S substantially perpendicular to the direction of the flux Fl. For the sake of simplicity, this solar axis S will be considered vertical, although it can be installed in any direction. The rotation of the solar support is denoted RI. The device also includes a plurality of planetary supports 2, only two of which are shown in Fig. 1. Each planetary support 2 is mounted for rotation on the solar support 1 along a planetary axis P parallel to the solar axis S.The rotation of the planetary support is denoted R2.

[0042] The device further comprises a plurality of satellite supports 3, each satellite support 3 being rotatably mounted on one of the planetary supports 2 along a satellite axis R inclined with respect to the solar axis S. The rotation of the satellite support is denoted R3. In the illustrated variant (Figure 1) each satellite support 3 has a socket portion which supports the workpiece 101' above the hood 200, here a nail with a head.

[0043] The support device further includes tilting means 4 to modify the inclination, in the case of the planetary support 2 on the right in Figure 1, or the orientation, in the case of the planetary support 2 on the left in Figure 1, of the satellite axis R with respect to the planetary support 2 during the rotation of the planetary support 2 or solar support.

[0044] The solar support 1 comprises a disc-shaped table 10, pivotally mounted around the solar axis S. On the periphery of the table 10, pins 11 project along the planetary axes P to receive the planetary supports 2. The pins 11 are rotatably mounted, and each pin 11 can receive several planetary supports 2 stacked on top of each other. For example, the pin 11 has a square cross-section with which the planetary supports 2 mesh, allowing them to be driven in rotation by a central tube 201 threaded onto the pin 11.

[0045] Referring to Figure 2, the solar axis S is shown on the left of the figure, while one of the spindles 11 is shown in the middle. Two planetary carriers 2 are shown superimposed on the same spindle 11. Each planetary carrier 2 comprises a frame 20 with a cover 200 having a substantially flat upper face, the central tube 201 forming part of the frame 20. The frame 20 has four pillars 202 extending parallel to the planetary axis P under the cover 200. First drive means 5 are provided to drive the planetary carrier 2 during the rotation RI of the solar carrier 1 relative to the reference frame. For this purpose, the first drive means 5 comprise a first static gear 51 centered with the solar axis S and a second gear 52 meshing with the first gear 51 fixed to the spindle 11.By this pair of gears 51, 52, the relative rotation RI of the first gear 51 with respect to the solar support 1 is transmitted to the spindle 11, and thus to the planetary supports 2.

[0046] Secondary drive means 6 are provided to drive the satellite carrier 3 during the rotation R2 of the planetary carrier 2. The second drive means 6 comprise an eccentric pivot 61 rotatably mounted on the central tube 201 and having a stop arm 62 extending under the planetary carrier 2, held in rotation by a post 7 fixed relative to the solar carrier 1. A toothed wheel 63 is mounted freely in rotation on the eccentric pivot 61 with an axis of rotation offset relative to the axis P of the planetary carrier 2. The toothed wheel 63 has wheel slots 630, through which the pillars 202 pass, thus blocking its rotation. A toothed ring 64 is in contact with the toothed wheel 63 on the inside of the ring 64, which is guided in rotation around the planetary axis P by means of a groove attached to the sub-assembly 20, at the bottom of the pillars 202. For each satellite support 3, a satellite pinion 65 is in contact with the outside of the ring 64.Each satellite pinion 65 is mounted to rotate relative to the chassis 20. The satellite support 3 is driven in rotation by the satellite pinion 65 via a ball joint 66 (e.g., of the dog-clutch type), such that the satellite support 3 can be inclined relative to the axis of the satellite pinion 65. The ball joint 66 is located inside the chassis 20, while the satellite support 3 passes through and protrudes above the cover 200 of the chassis 20.

[0047] The tilting means 4 comprise a control plate 40 extending in a plate plane perpendicular to the planetary axis P, i.e., parallel to the cover 200 of the frame 20. For each satellite carrier 3, the plate 40 includes third drive means in the form of a drive slot 401 through which the satellite carrier 3 extends, above the ball joints 66. The plate 40 is driven in displacement in the plate plane 40 relative to the frame 20 of the planetary carrier 2 so that the drive slots 401 cause the change in tilt or orientation of the satellite axis R of the satellite carriers 3. The tilting means 4 further comprise an eccentric 41 driven in rotation about the planetary axis P, the eccentric 41 being rotationally connected to the plate 40 about the plate axis U offset by the planetary axis P.Stop means are provided to prevent the rotation of the platter 40. These stop means comprise the pillars 202 of the frame 20, which pass through the platter 40 via circular stop slots 402, as shown in Figure 3. The planetary carrier 2 has, for each satellite carrier 3, a guide slot 205 in the cover 200 through which the corresponding satellite carrier 3 passes, in order to limit the amplitude of the oscillation of the satellite carrier 3. The guide slot is located in the cover 200 of the frame 20. The cover 200 can be removably attached to the frame, so as to adjust the guidance of the satellite carriers as needed, without modifying the platter.

[0048] The eccentric 41 is driven in rotation relative to the planetary carrier 2 by means of an epicyclic gear train 8. In the example shown at the bottom of Figure 2, the epicyclic gear train 8 comprises a first element 81, which is a planetary wheel, the first element 81 being linked to the eccentric 41, and a second element 82, which is a ring gear fixed and centered on the planetary carrier 2, in this case on the pillars 202. The epicyclic gear train 8 further comprises a planet carrier 83, which is fixed against rotation relative to the solar carrier 1 and mounted for rotation about the axis of the planetary carrier 2. Advantageously, the eccentric pivot 61 performs the function of the planet carrier 83. At least one planet 84 is rotatably mounted on the planet carrier 83, engaging simultaneously with the planetary wheel 81 and the ring gear 82.

[0049] In the example shown at the top of Figure 2, the epicyclic gear train 8' comprises a second element 82' which is a planetary wheel fixed and centered on the planetary support 2, and a first element 81' which is a ring gear linked to the eccentric 4L

[0050] For the planetary support 2 shown on the right of Figure 1, the guide light (light 205' in hood 200', see Fig.8) is a linear slit, so that the movement conferred by the plate 40 or satellite support 3 is an oscillation of the inclination of the satellite axis R, noted T4 in Fig.1.

[0051] For the planetary support 2 shown on the left of Figure 1, the guide light 205 of the hood 200 (Figs 2 and 7) is round, such that the satellite axis R describes a trajectory on a cone with a vertical axis, and indicated R4 in Fig.1.

[0052] The operation of the parts support device will now be described (Figure 1).

[0053] The device is placed within the enclosure (not shown) of the installation. The planetary supports 2 are placed on the pins 11 in a stacked configuration.

[0054] The solar support 1 is driven in rotation around the solar axis S with a difference in rotational speed compared to the first gear 51. This difference in speed drives the rotation of the planetary supports 2 via the second gear 52. For each planetary support 2, the eccentric pivot 61 is prevented from rotating relative to the solar support 1 by the stop arm 62 bearing against the post 7. This results in a relative rotation of the eccentric pivot 61 with respect to the solar support 1, and therefore a relative rotation between the gear 63 and the eccentric pivot 61. The gear 63 oscillates inside the ring 64. Due to the difference in diameter (respectively, perimeter) between the gear 63 and the inside of the ring 64, the ring 64 is driven in rotation with respect to the planetary support 2. This then drives the rotation of the satellite gears 65 and thus the rotation of the supports satellites 3 via the ball joint 66.

[0055] For the planetary support 2 shown at the bottom of Figure 2, the relative rotation between the eccentric pivot 61 and the ring gear 81 of the epicyclic gear train 8 on the frame 20 causes the rotation of the planetary wheel 82 and therefore that of the eccentric 41 relative to the planetary support 2. The rotation of the eccentric 41 causes the displacement of the plate 40, which in turn causes the tilting of the satellite supports 3 via the drive slots 401, as shown in Figure 4. The tilting of the satellite supports 3 is determined by the shape and size of the guide slots. During part of the process time, the upper face of the workpiece is exposed to the flow from the target, as shown in the position on the left of Figure 4. During another part of the time, the lower face of the head is exposed to the flow from the target, as shown in the position on the right of Figure 4.Thus, both surfaces are properly coated at the end of the process.

[0056] The second embodiment, as shown in Figure 9, differs from the first embodiment in that the plate 40' is positioned below the planetary carrier 2'. In this embodiment, the third drive means comprise, for each satellite carrier, a ball joint 403 supported by the plate 40' at a lower end of the satellite carrier 3'. The satellite carrier 3' passes through the planetary carrier 2' via a guide that allows vertical sliding, tilting, and drive by the second drive means 6'. The satellite pinion is replaced by a ring 67 having two longitudinal grooves that engage with two lugs on the satellite carrier 3', which passes through the ring 67. The ring 67 is driven in rotation and drives the satellite carrier 3'.As in the first embodiment, the second drive means 6' are shown in two versions, between the top and bottom of Figure 9, which allow for distinct relative speeds between the second 6' and the third drive means. In particular, in the version shown at the top, a double pinion 44 is provided to allow modulation of the drive speed of the eccentric 41' and therefore of the oscillation speeds of the satellite supports 3'. This could also be a single pinion.

Claims

Demands 1. Planetary system parts support device comprising: - a solar support (1) mounted to rotate about a solar axis (S) relative to a reference system, at least one planetary support (2) mounted to rotate on the solar support (1) about a planetary axis (P) parallel to the solar axis (S); - the first means of drive (5) to drive the planetary support (2) during the rotation of the solar support (1) relative to the reference system: - at least one satellite support (3) mounted rotatably on the planetary support (2) along a satellite axis (R) inclined relative to the solar axis (S); - second drive means (6) for driving the satellite support (3) during the rotation of the planetary support (2) or solar support; characterized in that the support device further comprises tilting means (4) for modifying the inclination or orientation of the satellite axis (R) with respect to the planetary support (2) during the rotation of the planetary support (2) or solar support.

2. Support device according to claim 1, in which the tilting means (4) comprise a control plate (40) extending in a plate plane perpendicular to the planetary axis (P), the plate (40) comprising for each satellite support (3) third drive means (401, 403) to act on each satellite support (3, 3'), the plate (40, 40') being driven in the plate plane relative to the planetary support (2) so that the third drive means (401, 403) cause the change in the tilt or orientation of the satellite axis (R) of the satellite supports (3, 3').

3. Device according to claim 2, wherein the third drive means are drive lights (401) through which the satellite supports (3) extend.

4. Support device according to claim 2 or 3, wherein the planetary support (2) comprises for each satellite support (3) a guide light through which the corresponding satellite support (3) passes, so as to limit the amplitude of the oscillation movement of the satellite support (3).

5. Support device according to claim 4, wherein the guide light is a linear slot.

6. Support device according to claim 4, wherein the guide light is round.

7. Support device according to claim 2, wherein the third drive means comprise a ball joint (403) connecting the plate (40') to one end of the satellite support (3').

8. Support device according to any one of the preceding claims, wherein the tilting means (4) comprise an eccentric (41) driven in rotation relative to the planetary support (2), the eccentric (41) being in rotational connection relative to the plate (40), stop means being provided to stop the rotation of the plate (40).

9. Support device according to claim 8, wherein the stop means comprise at least two pillars (202) passing through the plate (40) by means of respective stop lights (402) of circular shape.

10. Support device according to claim 8 or 9, wherein the eccentric (41) is driven in rotation relative to the planetary carrier (2) by means of an epicyclic gear train (8, 8'), the epicyclic gear train (8, 8') comprising a first (81, 81') and a second element (82, 82') from among the group of a ring gear and a planetary wheel, the first element (81, 81') being linked to the eccentric (41) and the second element (82, 82') being fixed and centered on the planetary carrier (2), a planet carrier (83) being rotationally immobilized relative to the sun carrier (1) and mounted for rotation about the axis of the planetary carrier (2), at least one planet (84) rotatably mounted on the planet carrier (83) engaging simultaneously with the planetary wheel (81, 82') and the crown (82, 81').

11. Support device according to any one of the preceding claims, wherein the satellite supports (3) are driven in rotation by means of a ball joint (66).

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