Force-torque sensor and robot

Abstract

The present embodiment relates to a force-torque sensor comprising: a fixed part; a moving part disposed inside the fixed part; and a sensing part for sensing the movement of the moving part relative to the fixed part. The moving part includes: an inner carrier disposed inside the fixed part; and an outer carrier disposed between the inner carrier and the fixed part. The inner carrier and the outer carrier move as one in the z-axis direction relative to the fixed part, a first ball is disposed between the inner carrier and the outer carrier, and the inner carrier pivots about the first ball relative to the outer carrier.

Description

Force-torque sensors and robots

[0001] The present embodiment relates to a force-torque sensor.

[0002] Robots are used in a variety of fields, including industry, medicine, service, and other fields, and their scope of application is constantly expanding. To improve the performance and ensure safety of robotic systems, accurate monitoring and control of robot movements are essential. In particular, the forces and torques generated when a robot interacts with its environment or handles objects are crucial information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, forces and torques play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp and manipulate objects and respond to their environment. Furthermore, these sensors can be utilized to improve robot efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors cannot separate the applied external force into the forces of each axis. Instead, they receive input simultaneously and decompose the forces. This causes crosstalk noise to be mixed into the detection values ​​for each axis. In particular, noise increases when the Z-axis and torque forces are mixed.

[0005] (Patent Document 1) KR 10-2023-0123723 A

[0006] The present embodiment seeks to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0007] Through this, we aim to improve robot control and work processes.

[0008] In addition, the first embodiment of the present invention seeks to provide a force-torque sensor having a ball that provides a pivot center to a moving part.

[0009] In addition, the second embodiment of the present invention seeks to provide a force-torque sensor including a structure for fixing an elastic member in a screw manner.

[0010] A force-torque sensor according to a first embodiment of the present invention includes a fixed part; a moving part disposed within the fixed part; and a sensing part for detecting movement of the moving part with respect to the fixed part, wherein the moving part includes an inner carrier disposed within the fixed part and an outer carrier disposed between the inner carrier and the fixed part, wherein the inner carrier and the outer carrier move integrally in the z-axis direction with respect to the fixed part, a first ball is disposed between the inner carrier and the outer carrier, and the inner carrier can pivotally move with respect to the outer carrier about the first ball.

[0011] The inner carrier can move in a yaw direction, which is a rotational direction centered around the x-axis perpendicular to the z-axis, a pitch direction, which is a rotational direction centered around the y-axis perpendicular to each of the z-axis and the x-axis, and a roll direction, which is a rotational direction centered around the z-axis, relative to the outer carrier.

[0012] The inner carrier and the outer carrier include a groove, and the first ball can be positioned between the groove of the inner carrier and the groove of the outer carrier.

[0013] The groove of the inner carrier may include a curved surface having a shape corresponding to the curved surface of the first ball.

[0014] On a cross-section cut parallel to the z-axis and passing through the center of the first ball, the groove of the outer carrier can contact the first ball at two points.

[0015] The above first ball may be formed of one or more of ceramic, plastic, and metal.

[0016] The force-torque sensor includes a second ball disposed between the fixed part and the external carrier, and the diameter of the first ball may be larger than the diameter of the second ball.

[0017] The force-torque sensor includes a second ball disposed between the fixed part and the external carrier, and the first ball can overlap the second ball in a direction perpendicular to the z-axis.

[0018] The force-torque sensor may include an upper elastic member coupled to the inner carrier and the outer carrier.

[0019] The above force-torque sensor may include a lower elastic member coupled to the fixed part and the moving part.

[0020] A force-torque sensor according to a first modified example includes a fixed part; a moving part disposed within the fixed part; and a sensing part for detecting movement of the moving part with respect to the fixed part, wherein the moving part includes an inner carrier disposed within the fixed part and an outer carrier disposed between the inner carrier and the fixed part, wherein the inner carrier and the outer carrier move integrally in the z-axis direction with respect to the fixed part, the outer carrier includes a groove, and the inner carrier includes a protrusion including a curved surface disposed within the groove of the outer carrier, and the inner carrier can pivotally move with respect to the outer carrier about the protrusion of the inner carrier.

[0021] A force-torque sensor according to a second modified example includes a fixed part; a moving part disposed within the fixed part; and a sensing part for detecting movement of the moving part with respect to the fixed part, wherein the moving part includes an inner carrier disposed within the fixed part and an outer carrier disposed between the inner carrier and the fixed part, wherein the inner carrier and the outer carrier move integrally in the z-axis direction with respect to the fixed part, the inner carrier includes a groove, and the outer carrier includes a protrusion including a curved surface disposed within the groove of the inner carrier, and the inner carrier can pivotally move with respect to the outer carrier about the protrusion of the outer carrier.

[0022] A robot according to the first embodiment of the present invention may include the force-torque sensor.

[0023] A force-torque sensor according to a second embodiment of the present invention comprises: a fixed part; a moving part disposed within the fixed part; a sensing part detecting movement of the moving part with respect to the fixed part; a first elastic member coupled to the moving part; and a first coupling member coupling the moving part and the first elastic member, wherein the first coupling member includes a head part disposed on the first elastic member and a coupling part coupled to the moving part by passing through the first elastic member, and the coupling part of the first coupling member may include a screw thread coupled to the moving part.

[0024] The above moving part includes an inner carrier and an outer carrier disposed between the inner carrier and the fixed part, and the first elastic member can be coupled to the inner carrier and the outer carrier.

[0025] The outer carrier may include a hole or groove having a screw thread, and the first coupling member may include a first-first coupling member that engages with the screw thread of the outer carrier so that a portion of the first elastic member is fixed to the outer carrier.

[0026] The force-torque sensor may include a lead coupled to the inner carrier, at least a portion of the first elastic member is disposed between the lead and the inner carrier, the inner carrier includes a hole or groove having a thread, and the first coupling member may include a first-second coupling member coupled with the thread of the inner carrier such that the lead and a portion of the first elastic member are fixed to the inner carrier.

[0027] The force-torque sensor may include a second elastic member coupled to the fixed member and the movable member and positioned on the opposite side of the first elastic member with respect to the movable member.

[0028] The force-torque sensor may include a second coupling member that couples the fixed part and the second elastic member.

[0029] The second connecting member may include a head portion disposed below the second elastic member and a connecting portion that passes through the second elastic member and is connected to the fixing portion, and the connecting portion of the second connecting member may include a screw thread that is connected to the fixing portion.

[0030] The first elastic member includes an outer portion coupled with the outer carrier, an inner portion coupled with the inner carrier, and a connecting portion connecting the outer portion and the inner portion, and the connecting portion may include a shape that is bent at least three times.

[0031] The force-torque sensor may include a first magnet and a second magnet disposed on the inner carrier; a third magnet disposed on the outer carrier; a first sensor detecting the first magnet; a second sensor detecting the second magnet; and a third sensor detecting the third magnet.

[0032] The inner carrier includes a protrusion formed on an outer surface of the inner carrier, the outer carrier includes a groove formed on an inner surface of the outer carrier and in which the protrusion of the inner carrier is arranged, and when the inner carrier rotates about the z-axis by a predetermined angle or more with respect to the outer carrier, the protrusion of the inner carrier can come into contact with the groove of the outer carrier.

[0033] The outer carrier includes a protrusion formed on an outer surface of the outer carrier, the fixing portion includes a groove formed on an inner surface of the fixing portion and in which the protrusion of the outer carrier is arranged, and when the outer carrier rotates about the z-axis with respect to the fixing portion, the protrusion of the outer carrier can come into contact with the groove of the fixing portion.

[0034] The above force-torque sensor may include a shield can that surrounds at least a portion of the outer surface of the fixing member.

[0035] The force-torque sensor may include a shield plate disposed between the moving part and the second elastic member.

[0036] The force-torque sensor may include a first ball disposed between the inner carrier and the outer carrier; and a second ball disposed between the outer carrier and the fixed part.

[0037] A robot according to a second embodiment of the present invention may include a force-torque sensor.

[0038] The force-torque sensor according to this embodiment can measure Z-axis force and torque force separately. This minimizes the influence of noise due to crosstalk on the detection values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0039] Furthermore, the first embodiment of the present invention can reduce the number of parts and facilitate assembly.

[0040] In addition, a force-torque sensor that can be manufactured at a low cost can be provided through the second embodiment of the present invention.

[0041] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0042] Figure 2 is a cross-sectional view taken along line AA of Figure 1.

[0043] Figure 3 is a cross-sectional view viewed from BB in Figure 1.

[0044] FIG. 4 is a cross-sectional view of a force-torque sensor according to a first embodiment of the present invention, cut in a direction perpendicular to the z-axis and viewed from above.

[0045] Figure 5 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0046] Fig. 6 is a perspective view of a force-torque sensor according to a first embodiment of the present invention, with components such as leads and substrates omitted.

[0047] Figure 7 is a perspective view of Figure 6 with the upper cover omitted.

[0048] Figure 8 is a perspective view of Figure 7 with the upper elastic member and base omitted.

[0049] Figure 9 is a bottom perspective view of Figure 6 with the lower cover omitted.

[0050] Fig. 10 is a bottom perspective view of Fig. 9 with the lower elastic member, base, and upper cover omitted.

[0051] FIG. 11 is an exploded perspective view showing the inner carrier, outer carrier, and first ball of the force-torque sensor according to the first embodiment of the present invention.

[0052] Fig. 12 is an exploded perspective view viewed from a different direction than Fig. 11.

[0053] Fig. 13 is a cross-sectional view of a force-torque sensor according to the first modified example.

[0054] Figure 14 (a) is a bottom perspective view of the inner carrier of the force-torque sensor according to the first modified example, and (b) is a perspective view of the outer carrier.

[0055] Fig. 15 is a cross-sectional view of a force-torque sensor according to the second modified example.

[0056] Figure 16 (a) is a bottom perspective view of the inner carrier of the force-torque sensor according to the second modified example, and (b) is a perspective view of the outer carrier.

[0057] Fig. 17 is a perspective view for explaining the operating method of the force-torque sensor according to the first embodiment of the present invention.

[0058] FIG. 18 is a drawing for explaining a case where an external force having a component in the yaw direction or pitch direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0059] FIG. 19 is a drawing for explaining changes when an external force having a roll direction component is applied to a force-torque sensor according to the first embodiment of the present invention.

[0060] FIG. 20 is a drawing for explaining a case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0061] Fig. 21 is a perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0062] Figure 22 is a cross-sectional view taken along line AA of Figure 21.

[0063] Figure 23 is a cross-sectional view taken from BB of Figure 21.

[0064] Figure 24 is a cross-sectional view of a force-torque sensor according to a second embodiment of the present invention, cut in a direction perpendicular to the z-axis and viewed from above.

[0065] Fig. 25 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0066] FIG. 26 is an exploded perspective view showing an upper elastic member, a lower elastic member, and related components of a force-torque sensor according to a second embodiment of the present invention.

[0067] Fig. 27 is a drawing illustrating a sensing unit of a force-torque sensor according to a second embodiment of the present invention. Fig. 27 (a) is a drawing illustrating the arrangement structure of the first to third magnets, and Fig. 27 (b) is a drawing illustrating the arrangement structure of the first to third sensors.

[0068] Figure 28 is a perspective view of Figure 21 with the substrate and lead removed.

[0069] Figure 29 is a perspective view of Figure 28 with the upper cover and connecting member removed.

[0070] Fig. 30 is a perspective view of Fig. 29 with the base and upper elastic member removed.

[0071] Figure 31 is a bottom perspective view of Figure 21 with the substrate removed.

[0072] Figure 32 is a bottom perspective view of Figure 31 with the lower cover and connecting member removed.

[0073] Figure 33 is a bottom perspective view of Figure 32 with the base and lower elastic member removed.

[0074] Figure 34 is a drawing showing a state in which the first ball is placed in the internal carrier.

[0075] Figure 35 is a perspective view of a force-torque sensor according to the first modified example.

[0076] Figure 36 is a side view of the first modified example with the shield can separated.

[0077] Figure 37 is a cross-sectional view of a force-torque sensor according to the second modified example.

[0078] Figure 38 is a bottom perspective view showing the arrangement structure of the shield plate in the second modified example.

[0079] Fig. 39 is a perspective view for explaining an operating method of a force-torque sensor according to a second embodiment of the present invention.

[0080] FIG. 40 is a drawing for explaining changes when an external force having a component in the yaw direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0081] Figure 41 is a drawing for explaining changes when an external force having a roll direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0082] Figure 42 is a drawing for explaining changes when an external force having a component in the z-axis direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0083] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0084] However, the technical idea of ​​the present invention is not limited to some of the embodiments described, but can be implemented in various different forms, and within the scope of the technical idea of ​​the present invention, one or more of the components between the embodiments can be selectively combined or substituted for use.

[0085] In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be interpreted as having a meaning that can be generally understood by a person of ordinary skill in the technical field to which the present invention belongs, unless explicitly and specifically defined and described, and terms that are commonly used, such as terms defined in a dictionary, may be interpreted in consideration of the contextual meaning of the relevant technology.

[0086] Additionally, the terms used in the embodiments of the present invention are intended to describe the embodiments and are not intended to limit the present invention.

[0087] In this specification, the singular may also include the plural unless specifically stated otherwise in the phrase, and when it is described as “A and / or at least one (or more) of B, C”, it may include one or more of all combinations that can be combined with A, B, C.

[0088] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and are not intended to limit the nature, order, or sequence of the components.

[0089] And, when a component is described as being 'connected', 'coupled', or 'connected' to another component, it may include not only cases where the component is 'connected', 'coupled', or 'connected' directly to the other component, but also cases where the component is 'connected', 'coupled', or 'connected' by another component between the component and the other component.

[0090] Additionally, when described as being formed or arranged "above" or "below" each component, "above" or "below" includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or arranged between the two components. Furthermore, when expressed as "above" or "below," the meaning may include not only the upward direction but also the downward direction based on one component.

[0091] Hereinafter, one of the “internal carrier (210)” and the “external carrier (220)” may be referred to as the “first carrier” and the other may be referred to as the “second carrier”.

[0092] Hereinafter, one of the “upper elastic member (400)” and the “lower elastic member (500)” may be referred to as the “first elastic member” and the other may be referred to as the “second elastic member”.

[0093] Hereinafter, one of the “internal carrier (1210)” and the “external carrier (1220)” may be referred to as the “first carrier” and the other may be referred to as the “second carrier”.

[0094] Hereinafter, one of the “upper elastic member (1400)” and the “lower elastic member (1500)” may be referred to as the “first elastic member” and the other may be referred to as the “second elastic member”.

[0095] Hereinafter, one of the “upper connecting member (1710)” and the “lower connecting member (1720)” may be referred to as the “first connecting member” and the other may be referred to as the “second connecting member”.

[0096] Hereinafter, one of the “outer joining member (1710-1)” and the “inner joining member (1710-2)” may be referred to as the “first-first joining member” and the other as the “first-second joining member.” Alternatively, one of the “outer joining member (1710-1)” and the “inner joining member (1710-2)” may be referred to as the “second-first joining member” and the other as the “second-second joining member.”

[0097] Hereinafter, one of the z-axis, x-axis, and y-axis may be referred to as the “first axis,” the other as the “second axis,” and the other as the “third axis.”

[0098] Hereinafter, one of the roll direction, yaw direction, and pitch direction may be referred to as a “first circumferential direction,” another may be referred to as a “second circumferential direction,” and another may be referred to as a “third circumferential direction.” Alternatively, the roll direction, yaw direction, and pitch direction may be referred to as “first to third directions.”

[0099]

[0100] Hereinafter, the configuration of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0101] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA of FIG. 1. FIG. 3 is a cross-sectional view taken along line BB of FIG. 1. FIG. 4 is a cross-sectional view taken along line AA of FIG. 1 and viewed from above of the force-torque sensor according to the first embodiment of the present invention. FIG. 5 is an exploded perspective view of a force-torque sensor according to the first embodiment of the present invention. FIG. 6 is a perspective view of a force-torque sensor according to the first embodiment of the present invention, with components such as leads and a substrate omitted. FIG. 7 is a perspective view of FIG. 6 with the upper cover omitted. FIG. 8 is a perspective view of FIG. 7 with the upper elastic member and the base omitted. FIG. 9 is a bottom perspective view of FIG. 6 with the lower cover omitted. FIG. 10 is a bottom perspective view of FIG. 9 with the lower elastic member, the base, and the upper cover omitted. Fig. 11 is an exploded perspective view illustrating the inner carrier, outer carrier, and first ball of the force-torque sensor according to the first embodiment of the present invention. Fig. 12 is an exploded perspective view viewed from a different direction from Fig. 11.

[0102] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0103] The force-torque sensor may include a fixed part (100). The fixed part (100) is a concept distinct from the moving part (200) and may be a part that is relatively fixed when the moving part (200) moves.

[0104] The force-torque sensor may include a base (110). The fixing member (100) may include the base (110). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the upper cover (120). The base (110) may be disposed under the upper cover (120). The base (110) may be disposed between the lower cover (130) and the upper cover (120).

[0105] The base (110) may include a groove (111). The groove (111) may be a ball rail. A second ball (620) may be placed in the groove (111). The groove (111) may extend in the z-axis direction. The second ball (620) may move along the groove (111) of the base (110).

[0106] The force-torque sensor may include an upper cover (120). The fixing member (100) may include the upper cover (120). The upper cover (120) may be disposed on the base (110). The upper cover (120) may be disposed on the base (110). The upper cover (120) may be disposed between the base (110) and the lid (230). The upper cover (120) may be coupled to an upper surface of the base (110). The upper cover (120) may be coupled to the base (110).

[0107] The force-torque sensor may include a lower cover (130). The fixing member (100) may include the lower cover (130). The lower cover (130) may form a bottom portion of the force-torque sensor. The lower cover (130) may be positioned opposite the lead (230). The lower cover (130) may be positioned below the base (110). The lower cover (130) may be coupled to a lower surface of the base (110). The lower cover (130) may be coupled to the base (110). The lower cover (130) may include a groove through which the substrate (140) passes.

[0108] The force-torque sensor may include a substrate (140). The fixing member (100) may include the substrate (140). Sensors may be arranged on the substrate (140). First to third sensors (340, 350, 360) may be arranged on the substrate (140). The substrate (140) may be electrically connected to the first to third sensors (340, 350, 360). The substrate (140) may output the electrical signals detected by the first to third sensors (340, 350, 360) to the outside of the force-torque sensor.

[0109] The force-torque sensor may include a plate (150). The fixing member (100) may include the plate (150). The plate (150) may be placed on the substrate (140). The plate (150) may be a reinforcing plate. The plate (150) may be placed on the lower surface of the substrate (140). The plate (150) may reinforce the strength of the substrate (140) so that the first to third sensors (340, 350, 360) are placed in the correct positions.

[0110] The force-torque sensor may include a moving part (200). The moving part (200) may be placed within the fixed part (100). The moving part (200) may be placed on the fixed part (100). The moving part (200) may move relative to the fixed part (100). When an external force is applied, the moving part (200) may move relative to the fixed part (100).

[0111] The force-torque sensor may include an inner carrier (210). The moving part (200) may include the inner carrier (210). The inner carrier (210) may be disposed within the fixed part (100). The inner carrier (210) may be disposed within the outer carrier (220). The inner carrier (210) may be disposed on the fixed part (100). The inner carrier (210) may be disposed within the base (110). The inner carrier (210) may include a curved surface. A first ball (610) may be disposed on the curved surface of the inner carrier (210). The inner carrier (210) may be formed in a spherical shape at least partially. The inner carrier (210) may be formed in a spherical shape at least partially so that the center of rotation does not change and remains constant. Through this, the inner carrier (210) moves as intended by the designer, so that the occurrence of crosstalk can be minimized.

[0112] The inner carrier (210) and the outer carrier (220) can move integrally in the z-axis direction with respect to the fixed part (100). The inner carrier (210) can pivotally move with respect to the outer carrier (220) around the first ball (610).

[0113] The inner carrier (210) can move in a yaw direction, which is a rotational direction centered around the x-axis perpendicular to the z-axis with respect to the outer carrier (220), a pitch direction, which is a rotational direction centered around the y-axis perpendicular to each of the z-axis and the x-axis, and a roll direction, which is a rotational direction centered around the z-axis. That is, the inner carrier (210) can move in the yaw direction, the pitch direction, and the roll direction with respect to the outer carrier (220).

[0114] The inner carrier (210) may include a protrusion (211). The protrusion (211) may protrude downward from the body of the inner carrier (210). The protrusion (211) may be inserted into a hole (221) of the outer carrier (220). The protrusion (211) may include a plurality of protrusions. The protrusion (211) may include four protrusions.

[0115] The inner carrier (210) may include a protrusion (213). The protrusion (213) may be formed on the outer surface of the inner carrier (210). The protrusion (213) may protrude outward from the inner carrier (210). The protrusion (213) may be arranged in a groove (225) of the outer carrier (220).

[0116] The inner carrier (210) may include a groove (215). A first ball (610) may be placed in the groove (215). The groove (215) of the inner carrier (210) may include a curved surface having a shape corresponding to the curved surface of the first ball (610). The groove (215) may be formed in a shape corresponding to the shape of at least a portion of the first ball (610).

[0117] The force-torque sensor may include an outer carrier (220). The moving part (200) may include the outer carrier (220). The outer carrier (220) may be disposed between the inner carrier (210) and the fixed part (100). The outer carrier (220) may be disposed between the inner carrier (210) and the base (110). The outer carrier (220) may be disposed on the outside of the inner carrier (210). The outer carrier (220) may be disposed within the fixed part (100). The outer carrier (220) may be disposed on the fixed part (100). The outer carrier (220) may be disposed within the base (110).

[0118] The outer carrier (220) may include a hole (221). The hole (221) may penetrate the outer carrier (220) in the z-axis direction. A protrusion (211) of the inner carrier (210) may be arranged in the hole (221). The hole (221) may be formed between a cross-shaped rib and an inner circumferential surface of the outer carrier (220). The hole (221) may include a plurality of holes. The hole (221) may include four holes.

[0119] The outer carrier (220) may include a second groove (222). The second groove (222) may be a ball rail. A second ball (620) may be placed in the second groove (222). The second ball (620) may move along the second groove (222). The second groove (222) may extend in the z-axis direction.

[0120] The outer carrier (220) may include a groove (225). The groove (225) may be formed on the inner surface of the outer carrier (220). The groove (225) may be formed concavely on the inner surface of the outer carrier (220). At least a portion of the protrusion (213) of the inner carrier (210) may be arranged in the groove (225) of the outer carrier (220).

[0121] The groove (225) can limit the movement of the inner carrier (210) within a preset range. When the inner carrier (210) rotates about the z-axis by a preset angle or more with respect to the outer carrier (220), the protrusion (213) of the inner carrier (210) can come into contact with the groove (225) of the outer carrier (220).

[0122] The outer carrier (220) may include a groove (227). A first ball (610) may be placed in the groove (227). In a cross-section cut parallel to the z-axis and passing through the center of the first ball (610), the groove (227) of the outer carrier (220) may contact the first ball (610) at two points. Alternatively, the groove (227) of the outer carrier (220) may contact the first ball (610) at three points in the cross-section. The groove (227) may be formed in a different shape from the first ball (610).

[0123] The force-torque sensor may include a lead (230). The moving part (200) may include the lead (230). The lead (230) may be connected to the internal carrier (210). At least a portion of the lead (230) may be disposed on the base (110). At least a portion of the lead (230) may be disposed on the upper cover (120). At least a portion of the lead (230) may be disposed on the fixed part (100). At least a portion of the lead (230) may protrude beyond the fixed part (100). An external force may be applied to at least a portion of the lead (230) that protrudes beyond the fixed part (100). The external force may be applied to the lead (230). The lead (230) may be moved by the external force. The lead (230) may be coupled to the internal carrier (210). The lead (230) may be disposed on the internal carrier (210). The lead (230) can be placed on the inner carrier (210). The lead (230) can move integrally with the inner carrier (210). The lead (230) can be fixed to the inner carrier (210).

[0124] When a force is applied to the lead (230) in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the internal carrier (210) can move with respect to the external carrier (220). When a force is applied to the lead (230) in the direction of the third axis, the internal carrier (210) and the external carrier (220) can move together with respect to the fixed part (100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0125] The force-torque sensor may include a detection unit (300). The detection unit (300) may be a sensing unit. The detection unit (300) may be a sensor unit. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100). The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the x-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the y-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the yaw direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the pitch direction. The detection unit (300) can detect the roll direction movement of the moving unit (200) with respect to the fixed unit (100). The detection unit (300) can detect the z-axis direction movement of the moving unit (200) with respect to the fixed unit (100).

[0126] The force-torque sensor may include a first magnet (310). The sensing unit (300) may include the first magnet (310). The first magnet (310) may be disposed on the inner carrier (210). The first magnet (310) may be disposed on the lower surface of the inner carrier (210). The first magnet (310) may be disposed on the lower surface of the inner carrier (210).

[0127] The force-torque sensor may include a second magnet (320). The sensing unit (300) may include the second magnet (320). The second magnet (320) may be disposed on the inner carrier (210). The second magnet (320) may be disposed on the lower surface of the inner carrier (210). The second magnet (320) may be disposed on the lower surface of the inner carrier (210).

[0128] The force-torque sensor may include a third magnet (330). The sensing unit (300) may include the third magnet (330). The third magnet (330) may be disposed on the external carrier (220). The third magnet (330) may be disposed on the lower surface of the external carrier (220). The third magnet (330) may be disposed on the lower surface of the external carrier (220).

[0129] The force-torque sensor may include a first sensor (340). The detection unit (300) may include the first sensor (340). The first sensor (340) may be disposed on the fixing unit (100). The first sensor (340) may be disposed on the substrate (140). The first sensor (340) may be disposed on the lower cover (130). The first sensor (340) may be disposed on the base (110). The first sensor (340) may detect the first magnet (310). The first sensor (340) may detect the magnetic force of the first magnet (310). The first sensor (340) may detect the x-axis direction movement of the lead (230). The first sensor (340) may detect the pitch direction tilt of the lead (230). The first sensor (340) may be a Hall sensor. The first sensor (340) may be a TMR sensor.

[0130] The force-torque sensor may include a second sensor (350). The detection unit (300) may include the second sensor (350). The second sensor (350) may be disposed on the fixing unit (100). The second sensor (350) may be disposed on the substrate (140). The second sensor (350) may be disposed on the lower cover (130). The second sensor (350) may be disposed on the base (110). The second sensor (350) may detect the second magnet (320). The second sensor (350) may detect the magnetic force of the second magnet (320). The second sensor (350) may detect the y-axis direction movement of the lead (230). The second sensor (350) may detect the yaw direction tilt of the lead (230). The second sensor (350) may be a Hall sensor. The second sensor (350) may be a TMR sensor.

[0131] However, conversely, the first sensor (340) can detect movement in the y-axis direction and tilt in the yaw direction, and the second sensor (350) can detect movement in the x-axis direction and tilt in the pitch direction.

[0132] In the above, it has been described that the first sensor (340) detects the x-axis movement and pitch-direction tilt of the lead (230), but more accurate sensing can be achieved together with the detection value of the second sensor (350). When the second sensor (350) detects the y-axis movement and yaw-direction tilt of the lead (230), more accurate sensing can be achieved together with the detection value of the first sensor (340).

[0133] The first sensor (340) and the second sensor (350) may together detect roll direction tilt or movement. Alternatively, at least one of the first sensor (340) and the second sensor (350) may detect roll direction tilt or movement.

[0134] The force-torque sensor may include a third sensor (360). The detection unit (300) may include the third sensor (360). The third sensor (360) may be disposed on the fixing unit (100). The third sensor (360) may be disposed on the substrate (140). The third sensor (360) may be disposed on the lower cover (130). The third sensor (360) may be disposed on the base (110). The third sensor (360) may detect the third magnet (330). The third sensor (360) may detect the magnetic force of the third magnet (330). The third sensor (360) may be a Hall sensor. The third sensor (360) may be a TMR sensor.

[0135] In another embodiment, the force-torque sensor may include a capacitive sensing sensor. That is, the force-torque sensor may include a capacitive sensor. The force-torque sensor may include a first electrode and a second electrode. The force-torque sensor may include a control unit that applies power to the first electrode, and a sensing unit that measures a change in capacitance between the first electrode and the second electrode. At this time, the second electrode may be grounded. The first electrode may be disposed on the fixing unit (100). The second electrode may be disposed on at least one of the internal carrier (210) and the external carrier (220). When the internal carrier (210) and / or the external carrier (220) moves, the change in capacitance between the first electrode and the second electrode may be measured to calculate the amount of movement of the internal carrier (210) and / or the external carrier (220).

[0136] The force-torque sensor may include an elastic member. The elastic member may restore the moving part (200) to its initial position when the external force is removed. The elastic member may include an elastic member coupled to the inner carrier (210) and the outer carrier (220). The elastic member may include an elastic member coupled to the outer carrier (220) and the fixed part (100). The elastic member may have elasticity. The elastic member may be formed of metal. The elastic member may include a plate spring. The elastic member may include a spring.

[0137] The force-torque sensor may include an upper elastic member (400). The upper elastic member (400) may be coupled with the moving part (200). The upper elastic member (400) may be coupled with the inner carrier (210) and the outer carrier (220). The upper elastic member (400) may be coupled with the upper surface of the inner carrier (210) and the upper surface of the outer carrier (220). The upper elastic member (400) may be coupled with the upper portion of the inner carrier (210) and the upper portion of the outer carrier (220). The upper elastic member (400) may connect the inner carrier (210) and the outer carrier (220). The upper elastic member (400) may elastically connect the inner carrier (210) and the outer carrier (220). The upper elastic member (400) may movably support the inner carrier (210) relative to the outer carrier (220).

[0138] The upper elastic member (400) may include an inner portion (410). The inner portion (410) may be coupled with the inner carrier (210). The inner portion (410) may be disposed on the inner carrier (210). The inner portion (410) may be disposed on an upper surface of the inner carrier (210). The inner portion (410) may be fixed to the inner carrier (210). The inner portion (410) may be adhesively bonded to the inner carrier (210). The inner portion (410) may be movable as one piece with the inner carrier (210). At least a portion of the upper elastic member (400) may be disposed between the lead (230) and the inner carrier (210).

[0139] The upper elastic member (400) may include an outer portion (420). The outer portion (420) may be coupled to an outer carrier (220). The outer portion (420) may be disposed on the outer carrier (220). The outer portion (420) may be disposed on an upper surface of the outer carrier (220). The outer portion (420) may be fixed to the outer carrier (220). The outer portion (420) may be adhesively bonded to the outer carrier (220). The outer portion (420) may be movable as one piece with the outer carrier (220).

[0140] The upper elastic member (400) may include a connecting portion (430). The connecting portion (430) may connect the inner portion (410) and the outer portion (420). The connecting portion (430) may have elasticity. The connecting portion (430) may include a bent portion. The connecting portion (430) may include a bent shape. The connecting portion (430) may include a shape that is bent multiple times. The connecting portion (430) may include a shape that is bent at least three times. The connecting portion (430) may be deformable. The connecting portion (430) may be restored to its original state after being deformed. The connecting portion (430) may include a zigzag shape.

[0141] The connecting portion (430) may include a plurality of connecting portions. The connecting portion (430) may include four connecting portions. The connecting portion (430) may include first to fourth connecting portions. The connecting portion (430) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (410), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (410). The bent shape of the connecting portion (430) may be symmetrical in the rotational direction.

[0142] The force-torque sensor may include a lower elastic member (500). The lower elastic member (500) may be coupled to the fixed part (100) and the movable part (200). The lower elastic member (500) may be coupled to a lower surface of the base (110) and a lower surface of the external carrier (220). The lower elastic member (500) may be coupled to a lower surface of the base (110) and a lower surface of the external carrier (220). The lower elastic member (500) may connect the base (110) and the external carrier (220). The lower elastic member (500) may elastically connect the base (110) and the external carrier (220). The lower elastic member (500) may movably support the external carrier (220) with respect to the base (110). The lower elastic member (500) can be placed on the opposite side of the upper elastic member (400) with respect to the moving part (200).

[0143] The lower elastic member (500) may include an inner portion (510). The inner portion (510) may be coupled to an outer carrier (220). The inner portion (510) may be disposed on the outer carrier (220). The inner portion (510) may be disposed on a lower surface of the outer carrier (220). The inner portion (510) may be fixed to the outer carrier (220). The inner portion (510) may be bonded to the outer carrier (220) with an adhesive. The inner portion (510) may move integrally with the outer carrier (220).

[0144] The lower elastic member (500) may include an outer portion (520). The outer portion (520) may be coupled to the fixed portion (100). The outer portion (520) may be coupled to the base (110). The outer portion (520) may be coupled to the lower cover (130). The outer portion (520) may be disposed on the base (110). The outer portion (520) may be disposed on the lower surface of the base (110). The outer portion (520) may be disposed on the lower cover (130). The outer portion (520) may be fixed to the base (110).

[0145] The lower elastic member (500) may include a connecting portion (530). The connecting portion (530) may connect the inner portion (510) and the outer portion (520). The connecting portion (530) may have elasticity. The connecting portion (530) may include a bent portion. The connecting portion (530) may include a bent shape. The connecting portion (530) may include a shape that is bent multiple times. The connecting portion (530) may include a shape that is bent at least three times. The connecting portion (530) may be deformable. The connecting portion (530) may be restored to its original state after being deformed. The connecting portion (530) may include a zigzag shape.

[0146] The connecting portion (530) may include a plurality of connecting portions. The connecting portion (530) may include four connecting portions. The connecting portion (530) may include first to fourth connecting portions. The connecting portion (530) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (510), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (510). The bent shape of the connecting portion (530) may be symmetrical in the rotational direction.

[0147] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (200). The guide member may guide the movement of the moving part (200) relative to the fixed part (100). The guide member may guide the movement of the inner carrier (210) relative to the outer carrier (220).

[0148] The force-torque sensor may include a first ball (610). The guide member may include the first ball (610). The first ball (610) may be disposed between the inner carrier (210) and the outer carrier (220). The first ball (610) may be disposed between a groove (215) of the inner carrier (210) and a groove (227) of the outer carrier (220). The first ball (610) may guide movement of the inner carrier (210) with respect to the outer carrier (220). The inner carrier (210) may move in the yaw direction, the pitch direction, and the roll direction with respect to the outer carrier (220) by the first ball (610). However, when the inner carrier (210) is to move in the z-axis direction, the first ball (610) and the outer carrier (220) may move together.

[0149] The first ball (610) may be formed of one or more of ceramic, plastic, and metal. The diameter of the first ball (610) may be larger than the diameter of the second ball (620). The first ball (610) may overlap the second ball (620) in a direction perpendicular to the z-axis.

[0150] The first ball (610) may provide a pivot center. The first ball (610) may provide a pivot center for the inner carrier (210). The first ball (610) may be positioned on the central axis of the inner carrier (210). The first ball (610) may be positioned on the central axis of the outer carrier (220). The first ball (610) may be formed in a spherical shape.

[0151] The force-torque sensor may include a second ball (620). The guide member may include the second ball (620). The second ball (620) may be positioned between the outer carrier (220) and the fixing member (100). The second ball (620) may guide movement of the outer carrier (220) with respect to the base (110). The outer carrier (220) may move in the z-axis direction with respect to the base (110) by the second ball (620). At this time, the outer carrier (220) may move together with the inner carrier (210) and the lead (230).

[0152]

[0153] Below, the configuration of a force-torque sensor according to the first modified example is described with reference to the drawings.

[0154] Fig. 13 is a cross-sectional view of a force-torque sensor according to the first modified example. Fig. 14 (a) is a bottom perspective view of the inner carrier of the force-torque sensor according to the first modified example, and (b) is a perspective view of the outer carrier.

[0155] In a first modified example, the first ball (610) may be formed integrally with the inner carrier (210). The outer carrier (220) may include a groove (227). The inner carrier (210) may include a protrusion (219) having a curved surface that is positioned in the groove (227) of the outer carrier (220). The protrusion (219) of the inner carrier (210) may be formed in a hemispherical shape. The inner carrier (210) may pivot relative to the outer carrier (220) about the protrusion (219) of the inner carrier (210).

[0156]

[0157] Below, the configuration of a force-torque sensor according to the second modified example is described with reference to the drawings.

[0158] Fig. 15 is a cross-sectional view of a force-torque sensor according to a second modified example. Fig. 16 (a) is a bottom perspective view of the inner carrier of the force-torque sensor according to the second modified example, and (b) is a perspective view of the outer carrier.

[0159] In a second variation, the first ball (610) may be formed integrally with the outer carrier (220). The inner carrier (210) may include a groove (215). The outer carrier (220) may include a protrusion (229) having a curved surface that is positioned in the groove (215) of the inner carrier (210). The protrusion (229) of the outer carrier (220) may be formed in a hemispherical shape. The inner carrier (210) may pivot relative to the outer carrier (220) about the protrusion (229) of the outer carrier (220).

[0160]

[0161] Hereinafter, the operation of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0162] Fig. 17 is a perspective view for explaining an operating method of a force-torque sensor according to a first embodiment of the present invention. Fig. 18 is a diagram for explaining a case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to a first embodiment of the present invention. Fig. 19 is a diagram for explaining a change when an external force having a roll direction component is applied to a force-torque sensor according to a first embodiment of the present invention. Fig. 20 is a diagram for explaining a case where an external force having a z-axis direction component is applied to a force-torque sensor according to a first embodiment of the present invention.

[0163] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the x-axis (see yaw in FIG. 17). At this time, the lead (230) can move integrally with the internal carrier (210) (see A, B in FIG. 18). Meanwhile, since the fixed part (100) is maintained in a fixed state, the second sensor (350) disposed on the fixed part (100) detects the second magnet (320) disposed on the internal carrier (210), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (230) can be measured.

[0164] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the y-axis (see pitch in FIG. 17). At this time, the lead (230) can move integrally with the internal carrier (210). Meanwhile, since the fixed part (100) is maintained in a fixed state, the first sensor (340) arranged on the fixed part (100) detects the first magnet (310) arranged on the internal carrier (210), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (230) can be measured.

[0165] When an external force having a roll direction component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the z-axis (see roll in FIG. 17). The lead (230) can move with respect to the fixed part (100) as an integral part with the internal carrier (210) (see a, b in FIG. 19). At this time, the first sensor (340) arranged on the fixed part (100) detects the first magnet (310) arranged on the internal carrier (210), and the second sensor (250) detects the second magnet (320), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (230) can be measured.

[0166] When an external force having a z-axis component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can move along the z-axis (see Fz in FIG. 17). The lead (230) can move together with the inner carrier (210) and the outer carrier (220) with respect to the fixed part (100) (see A and B in FIG. 20). At this time, the third sensor (360) arranged on the fixed part (100) detects the third magnet (330) arranged on the outer carrier (220), so that the amount of movement of the lead (230), the inner carrier (210), and the outer carrier (220) can be measured. Through this, the force of the z-axis component of the external force applied to the lead (230) can be measured.

[0167]

[0168] Below, the configuration of a robot according to the first embodiment of the present invention is described.

[0169] A robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the first embodiment of the present invention may be disposed on the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the first embodiment of the present invention may be disposed on a joint of the arm member.

[0170]

[0171] Below, the configuration of a force-torque sensor according to a second embodiment of the present invention is described with reference to the drawings.

[0172] FIG. 21 is a perspective view of a force-torque sensor according to a second embodiment of the present invention. FIG. 22 is a cross-sectional view taken along line AA of FIG. 21. FIG. 23 is a cross-sectional view taken along line BB of FIG. 21. FIG. 24 is a cross-sectional view taken along line AA of FIG. 21 and viewed from above of a force-torque sensor according to a second embodiment of the present invention. FIG. 25 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention. FIG. 26 is an exploded perspective view showing an upper elastic member, a lower elastic member, and related components of a force-torque sensor according to a second embodiment of the present invention. FIG. 27 is a drawing showing a sensing unit of a force-torque sensor according to a second embodiment of the present invention. FIG. 27 (a) is a drawing showing the arrangement structure of first to third magnets, and FIG. 27 (b) is a drawing showing the arrangement structure of first to third sensors. Fig. 28 is a perspective view of Fig. 21 with the substrate and lead removed. Fig. 29 is a perspective view of Fig. 28 with the upper cover and the connecting member removed. Fig. 30 is a perspective view of Fig. 29 with the base and the upper elastic member removed. Fig. 31 is a bottom perspective view of Fig. 21 with the substrate removed. Fig. 32 is a bottom perspective view of Fig. 31 with the lower cover and the connecting member removed. Fig. 33 is a bottom perspective view of Fig. 32 with the base and the lower elastic member removed. Fig. 34 is a drawing showing a state in which the first ball is arranged in the internal carrier.

[0173] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0174] The force-torque sensor may include a fixed part (1100). The fixed part (1100) is a concept distinct from the moving part (1200) and may be a part that is relatively fixed when the moving part (1200) moves.

[0175] The force-torque sensor may include a base (1110). The fixing member (1100) may include the base (1110). The base (1110) may be disposed on the lower cover (1130). The base (1110) may be disposed on the lower cover (1130). The base (1110) may be disposed on the upper cover (1120). The base (1110) may be disposed under the upper cover (1120). The base (1110) may be disposed between the lower cover (1130) and the upper cover (1120).

[0176] The base (1110) may include a groove (1111). The groove (1111) may be a ball rail. A second ball (1620) may be placed in the groove (1111). The groove (1111) may extend in the z-axis direction. The second ball (1620) may move along the groove (1111) of the base (1110).

[0177] The base (1110) may include a groove (1112). The groove (1112) may be formed on the inner surface of the fixing portion (1100). The groove (1112) may be formed on the inner surface of the base (1110). The groove (1112) may be formed concavely on the inner surface of the fixing portion (1100). The groove (1112) may be formed concavely on the inner surface of the base (1110). A protrusion (1226) of an external carrier (1220) may be arranged in the groove (1112) of the fixing portion (1100).

[0178] In the second embodiment of the present invention, the rotation of the external carrier (1220) with respect to the base (1110) can be prevented through the shape of the fit between the groove (1112) of the base (1110) and the protrusion (1226) of the external carrier (1220). When the external carrier (1220) rotates around the z-axis with respect to the fixed part (1100), the protrusion (1226) of the external carrier (1220) can come into contact with the groove (1112) of the fixed part (1100).

[0179] The force-torque sensor may include an upper cover (1120). The fixing member (1100) may include the upper cover (1120). The upper cover (1120) may be disposed on the base (1110). The upper cover (1120) may be disposed on the base (1110). The upper cover (1120) may be disposed between the base (1110) and the lid (1230). The upper cover (1120) may be coupled to an upper surface of the base (1110). The upper cover (1120) may be coupled to the base (1110).

[0180] The force-torque sensor may include a lower cover (1130). The fixing member (1100) may include the lower cover (1130). The lower cover (1130) may form a bottom portion of the force-torque sensor. The lower cover (1130) may be positioned opposite the lead (1230). The lower cover (1130) may be positioned below the base (1110). The lower cover (1130) may be coupled to a lower surface of the base (1110). The lower cover (1130) may be coupled to the base (1110). The lower cover (1130) may include a groove through which the substrate (1140) passes.

[0181] The force-torque sensor may include a substrate (1140). The fixing member (1100) may include the substrate (1140). Sensors may be arranged on the substrate (1140). First to third sensors (1340, 1350, 1360) may be arranged on the substrate (1140). The substrate (1140) may be electrically connected to the first to third sensors (1340, 1350, 1360). The substrate (1140) may output the omnidirectional signals detected by the first to third sensors (1340, 1350, 1360) to the outside of the force-torque sensor.

[0182] The force-torque sensor may include a plate (1150). The fixing member (1100) may include the plate (1150). The plate (1150) may be placed on the substrate (1140). The plate (1150) may be a reinforcing plate. The plate (1150) may be placed on the lower surface of the substrate (1140). The plate (1150) may reinforce the strength of the substrate (1140) so that the first to third sensors (1340, 1350, 1360) are placed in the correct positions.

[0183] The force-torque sensor may include a moving part (1200). The moving part (1200) may be positioned within the fixed part (1100). The moving part (1200) may be positioned on the fixed part (1100). The moving part (1200) may move relative to the fixed part (1100). When an external force is applied, the moving part (1200) may move relative to the fixed part (1100).

[0184] The force-torque sensor may include an inner carrier (1210). The moving part (1200) may include the inner carrier (1210). The inner carrier (1210) may be disposed within the fixed part (1100). The inner carrier (1210) may be disposed within the outer carrier (1220). The inner carrier (1210) may be disposed on the fixed part (1100). The inner carrier (1210) may be disposed within the base (1110). The inner carrier (1210) may include a curved surface. A first ball (1610) may be disposed on the curved surface of the inner carrier (1210). The inner carrier (1210) may be formed in a spherical shape at least partially. The inner carrier (1210) may be formed in a spherical shape at least partially so that the center of rotation does not change and remains constant. Through this, the internal carrier (1210) moves as intended by the designer, so the occurrence of crosstalk can be minimized.

[0185] The inner carrier (1210) may include a protrusion (1211). The protrusion (1211) may be coupled with the upper elastic member (1400). The protrusion (1211) of the inner carrier (1210) may be coupled with the hole (1411) of the inner side (1410) of the upper elastic member (1400).

[0186] The inner carrier (1210) may include a groove (1212). The groove (1212) may have a thread. The groove (1212) may be formed on the upper surface of the inner carrier (1210). The groove (1212) may be formed on the outer circumferential surface of the inner carrier (1210). An inner coupling member (1710-2) may be coupled to the groove (1212). Alternatively, the groove (1212) may be formed alone.

[0187] The inner carrier (1210) may include a protrusion (1213). The protrusion (1213) may be formed on the outer surface of the inner carrier (1210). The protrusion (1213) may protrude outwardly from the inner carrier (1210). The protrusion (1213) may be positioned in a groove (1225) of the outer carrier (1220).

[0188] The force-torque sensor may include an outer carrier (1220). The moving part (1200) may include the outer carrier (1220). The outer carrier (1220) may be disposed between the inner carrier (1210) and the fixed part (1100). The outer carrier (1220) may be disposed on the outside of the inner carrier (1210). The outer carrier (1220) may be disposed within the fixed part (1100). The outer carrier (1220) may be disposed on the fixed part (1100). The outer carrier (1220) may be disposed within the base (1110).

[0189] The outer carrier (1220) may include a first groove (1221). The first groove (1221) may be a ball rail. A first ball (1610) may be placed in the first groove (1221). The first ball (1610) may move along the first groove (1221). Alternatively, the first ball (1610) may rotate while at least a portion of the first ball (1610) is accommodated in the first groove (1221).

[0190] The outer carrier (1220) may include a second groove (1222). The second groove (1222) may be a ball rail. A second ball (1620) may be placed in the second groove (1222). The second ball (1620) may move along the second groove (1222). The second groove (1222) may extend in the z-axis direction.

[0191] The outer carrier (1220) may include a protrusion (1223). The protrusion (1223) may be coupled with the upper elastic member (1400). The protrusion (1223) of the outer carrier (1220) may be coupled with a hole (1421) of the outer portion (1420) of the upper elastic member (1400).

[0192] The outer carrier (1220) may include a groove (1224). The groove (1224) may have a thread. The groove (1224) may be formed on an upper surface of the outer carrier (1220). The groove (1224) may be formed on an outer peripheral surface of the outer carrier (1220). An outer coupling member (1710-1) may be coupled to the groove (1224). Alternatively, the groove (1224) may be formed alone.

[0193] The outer carrier (1220) may include a groove (1225). The groove (1225) may be formed on the inner surface of the outer carrier (1220). The groove (1225) may be formed concavely on the inner surface of the outer carrier (1220).

[0194] The groove (1225) can limit the movement of the inner carrier (1210) within a preset range. When the inner carrier (1210) rotates about the z-axis by a preset angle or more with respect to the outer carrier (1220), the protrusion (1213) of the inner carrier (1210) can come into contact with the groove (1225) of the outer carrier (1220).

[0195] The outer carrier (1220) may include a protrusion (1226). The protrusion (1226) may be formed on an outer surface of the outer carrier (1220). The protrusion (1226) may protrude outwardly from the outer carrier (1220). The protrusion (1226) may be positioned in a groove (1112) of the fixing member (1100).

[0196] The force-torque sensor may include a lead (1230). The moving part (1200) may include the lead (1230). The lead (1230) may be connected to an internal carrier (1210). At least a portion of the lead (1230) may be disposed on a base (1110). At least a portion of the lead (1230) may be disposed on an upper cover (1120). At least a portion of the lead (1230) may be disposed on a fixed part (1100). At least a portion of the lead (1230) that protrudes beyond the fixed part (1100) may be subjected to an external force. The lead (1230) may be subjected to an external force. The lead (1230) may be moved by the external force. The lead (1230) may be coupled to the internal carrier (1210). The lead (1230) can be placed on the inner carrier (1210). The lead (1230) can be placed on the inner carrier (1210). The lead (1230) can move integrally with the inner carrier (1210). The lead (1230) can be fixed to the inner carrier (1210).

[0197] When a force is applied to the lead (1230) in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the internal carrier (1210) can move with respect to the external carrier (1220). When a force is applied to the lead (1230) in the direction of the third axis, the internal carrier (1210) and the external carrier (1220) can move together with respect to the fixed part (1100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0198] The force-torque sensor may include a detection unit (1300). The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100). The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the x-axis direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the y-axis direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the yaw direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the pitch direction. The detection unit (1300) can detect the roll direction movement of the moving unit (1200) with respect to the fixed unit (1100). The detection unit (1300) can detect the z-axis direction movement of the moving unit (1200) with respect to the fixed unit (1100).

[0199] The force-torque sensor may include a first magnet (1310). The sensing unit (1300) may include the first magnet (1310). The first magnet (1310) may be disposed on the inner carrier (1210). The first magnet (1310) may be disposed on the lower surface of the inner carrier (1210). The first magnet (1310) may be disposed on the lower surface of the inner carrier (1210).

[0200] The force-torque sensor may include a second magnet (1320). The sensing unit (1300) may include the second magnet (1320). The second magnet (1320) may be disposed on the inner carrier (1210). The second magnet (1320) may be disposed on the lower surface of the inner carrier (1210). The second magnet (1320) may be disposed on the lower surface of the inner carrier (1210).

[0201] The force-torque sensor may include a third magnet (1330). The sensing unit (1300) may include the third magnet (1330). The third magnet (1330) may be disposed on the external carrier (1220). The third magnet (1330) may be disposed on the lower surface of the external carrier (1220). The third magnet (1330) may be disposed on the lower surface of the external carrier (1220).

[0202] The force-torque sensor may include a first sensor (1340). The detection unit (1300) may include the first sensor (1340). The first sensor (1340) may be disposed on the fixing unit (1100). The first sensor (1340) may be disposed on the substrate (1140). The first sensor (1340) may be disposed on the lower cover (1130). The first sensor (1340) may be disposed on the base (1110). The first sensor (1340) may detect the first magnet (1310). The first sensor (1340) may detect the magnetic force of the first magnet (1310). The first sensor (1340) may detect the movement of the lead (1230) in the x-axis direction. The first sensor (1340) can detect the pitch direction tilt of the lead (1230). The first sensor (1340) may be a Hall sensor. The first sensor (1340) may be a TMR sensor.

[0203] The force-torque sensor may include a second sensor (1350). The detection unit (1300) may include the second sensor (1350). The second sensor (1350) may be disposed on the fixing unit (1100). The second sensor (1350) may be disposed on the substrate (1140). The second sensor (1350) may be disposed on the lower cover (1130). The second sensor (1350) may be disposed on the base (1110). The second sensor (1350) may detect the second magnet (1320). The second sensor (1350) may detect the magnetic force of the second magnet (1320). The second sensor (1350) may detect the movement of the lead (1230) in the y-axis direction. The second sensor (1350) can detect the yaw tilt of the lead (1230). The second sensor (1350) may be a Hall sensor. The second sensor (1350) may be a TMR sensor.

[0204] However, conversely, the first sensor (1340) can detect movement in the y-axis direction and tilt in the yaw direction, and the second sensor (1350) can detect movement in the x-axis direction and tilt in the pitch direction.

[0205] In the above, it has been described that the first sensor (1340) detects the x-axis movement and pitch-direction tilt of the lead (1230), but more accurate sensing can be achieved together with the detection value of the second sensor (1350). When the second sensor (1350) detects the y-axis movement and yaw-direction tilt of the lead (1230), more accurate sensing can be achieved together with the detection value of the first sensor (1340).

[0206] The first sensor (1340) and the second sensor (1350) may together detect roll tilt or movement. Alternatively, at least one of the first sensor (1340) and the second sensor (1350) may detect roll tilt or movement.

[0207] The force-torque sensor may include a third sensor (1360). The detection unit (1300) may include the third sensor (1360). The third sensor (1360) may be disposed on the fixing unit (1100). The third sensor (1360) may be disposed on the substrate (1140). The third sensor (1360) may be disposed on the lower cover (1130). The third sensor (1360) may be disposed on the base (1110). The third sensor (1360) may detect the third magnet (1330). The third sensor (1360) may detect the magnetic force of the third magnet (1330). The third sensor (1360) may be a Hall sensor. The third sensor (1360) may be a TMR sensor.

[0208] In another embodiment, the force-torque sensor may include a capacitive sensing sensor. That is, the force-torque sensor may include a capacitive sensor. The force-torque sensor may include a first electrode and a second electrode. The force-torque sensor may include a control unit that applies power to the first electrode, and a sensing unit that measures a change in capacitance between the first electrode and the second electrode. At this time, the second electrode may be grounded. The first electrode may be disposed on the fixing unit (1100). The second electrode may be disposed on at least one of the internal carrier (1210) and the external carrier (1220). When the internal carrier (1210) and / or the external carrier (1220) moves, the change in capacitance between the first electrode and the second electrode may be measured to calculate the amount of movement of the internal carrier (1210) and / or the external carrier (1220).

[0209] The force-torque sensor may include an elastic member. The elastic member may restore the moving part (1200) to its initial position when the external force is removed. The elastic member may include a spring that controls the z-axis movement of the moving part (1200). The spring that controls the z-axis movement may be formed as a plate spring or a spring in the form of an etching method. In the second embodiment of the present invention, two springs using the etching method may be applied.

[0210] The force-torque sensor may include an upper elastic member (1400). The upper elastic member (1400) may be coupled to a moving part (1200). The upper elastic member (1400) may be coupled to an inner carrier (1210) and an outer carrier (1220). The upper elastic member (1400) may be coupled to an upper surface of the inner carrier (1210) and an upper surface of the outer carrier (1220). The upper elastic member (1400) may be coupled to an upper portion of the inner carrier (1210) and an upper portion of the outer carrier (1220). The upper elastic member (1400) may connect the inner carrier (1210) and the outer carrier (1220). The upper elastic member (1400) may elastically connect the inner carrier (1210) and the outer carrier (1220). The upper elastic member (1400) can movably support the inner carrier (1210) relative to the outer carrier (1220).

[0211] The upper elastic member (1400) may include an inner portion (1410). The inner portion (1410) may be coupled to an inner carrier (1210). The inner portion (1410) may be disposed on the inner carrier (1210). The inner portion (1410) may be disposed on an upper surface of the inner carrier (1210). The inner portion (1410) may be fixed to the inner carrier (1210). The inner portion (1410) may be adhesively bonded to the inner carrier (1210). The inner portion (1410) may be movable as one piece with the inner carrier (1210). At least a portion of the upper elastic member (1400) may be disposed between the lead (1230) and the inner carrier (1210).

[0212] The inner portion (1410) may include a hole (1411). The hole (1411) may penetrate the inner portion (1410) in the z-axis direction. A protrusion (1211) of the inner carrier (1210) may be inserted into the hole (1411). Alternatively, the hole (1411) may be formed as a groove.

[0213] The upper elastic member (1400) may include an outer portion (1420). The outer portion (1420) may be coupled to an outer carrier (1220). The outer portion (1420) may be disposed on the outer carrier (1220). The outer portion (1420) may be disposed on an upper surface of the outer carrier (1220). The outer portion (1420) may be fixed to the outer carrier (1220). The outer portion (1420) may be adhesively bonded to the outer carrier (1220). The outer portion (1420) may be movable as one piece with the outer carrier (1220).

[0214] The outer portion (1420) may include a hole (1421). The hole (1421) may penetrate the outer portion (1420) in the z-axis direction. A protrusion (1223) of the external carrier (1220) may be inserted into the hole (1421).

[0215] The upper elastic member (1400) may include a connecting portion (1430). The connecting portion (1430) may connect the inner portion (1410) and the outer portion (1420). The connecting portion (1430) may have elasticity. The connecting portion (1430) may include a bent portion. The connecting portion (1430) may include a bent shape. The connecting portion (1430) may include a shape that is bent multiple times. The connecting portion (1430) may include a shape that is bent at least three times. The connecting portion (1430) may be deformable. The connecting portion (1430) may be restored to its original state after being deformed. The connecting portion (1430) may include a zigzag shape.

[0216] The connecting portion (1430) may include a plurality of connecting portions. The connecting portion (1430) may include four connecting portions. The connecting portion (1430) may include first to fourth connecting portions. The connecting portion (1430) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (1410), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (1410). The bent shape of the connecting portion (1430) may be symmetrical in the rotational direction.

[0217] The force-torque sensor may include a lower elastic member (1500). The lower elastic member (1500) may be coupled to a fixed portion (1100) and a movable portion (1200). The lower elastic member (1500) may be coupled to a lower surface of a base (1110) and a lower surface of an external carrier (1220). The lower elastic member (1500) may be coupled to a lower surface of the base (1110) and a lower surface of the external carrier (1220). The lower elastic member (1500) may connect the base (1110) and the external carrier (1220). The lower elastic member (1500) may elastically connect the base (1110) and the external carrier (1220). The lower elastic member (1500) may movably support the external carrier (1220) relative to the base (1110). The lower elastic member (1500) can be placed on the opposite side of the upper elastic member (1400) with respect to the moving part (1200).

[0218] The lower elastic member (1500) may include an inner portion (1510). The inner portion (1510) may be coupled to an outer carrier (1220). The inner portion (1510) may be disposed on the outer carrier (1220). The inner portion (1510) may be disposed on a lower surface of the outer carrier (1220). The inner portion (1510) may be fixed to the outer carrier (1220). The inner portion (1510) may be adhesively bonded to the outer carrier (1220). The inner portion (1510) may be movable as one piece with the outer carrier (1220).

[0219] The lower elastic member (1500) may include an outer portion (1520). The outer portion (1520) may be coupled to the fixing portion (1100). The outer portion (1520) may be coupled to the base (1110). The outer portion (1520) may be coupled to the lower cover (1130). The outer portion (1520) may be disposed on the base (1110). The outer portion (1520) may be disposed on the lower surface of the base (1110). The outer portion (1520) may be disposed on the lower cover (1130). The outer portion (1520) may be fixed to the base (1110). The outer portion (1520) may be fixed to the base (1110) via the lower coupling member (1720).

[0220] The lower elastic member (1500) may include a connecting portion (1530). The connecting portion (1530) may connect the inner portion (1510) and the outer portion (1520). The connecting portion (1530) may have elasticity. The connecting portion (1530) may include a bent portion. The connecting portion (1530) may include a bent shape. The connecting portion (1530) may include a shape that is bent multiple times. The connecting portion (1530) may include a shape that is bent at least three times. The connecting portion (1530) may be deformable. The connecting portion (1530) may be restored to its original state after being deformed. The connecting portion (1530) may include a zigzag shape.

[0221] The connecting portion (1530) may include a plurality of connecting portions. The connecting portion (1530) may include four connecting portions. The connecting portion (1530) may include first to fourth connecting portions. The connecting portion (1530) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (1510), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (1510). The bent shape of the connecting portion (1530) may be symmetrical in the rotational direction.

[0222] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (1200). The guide member may guide the movement of the moving part (1200) relative to the fixed part (1100). The guide member may guide the movement of the inner carrier (1210) relative to the outer carrier (1220).

[0223] The force-torque sensor may include a first ball (1610). The guide member may include the first ball (1610). The first ball (1610) may be disposed between the inner carrier (1210) and the outer carrier (1220). The first ball (1610) may guide movement of the inner carrier (1210) with respect to the outer carrier (1220). The inner carrier (1210) may move in the yaw direction, the pitch direction, and the roll direction with respect to the outer carrier (1220) by the first ball (1610). However, when the inner carrier (1210) is to move in the z-axis direction, the first ball (1610) and the outer carrier (1220) may move together.

[0224] The force-torque sensor may include a second ball (1620). The guide member may include the second ball (1620). The second ball (1620) may be positioned between the outer carrier (1220) and the fixing member (1100). The second ball (1620) may guide movement of the outer carrier (1220) relative to the base (1110). The outer carrier (1220) may move in the z-axis direction relative to the base (1110) by the second ball (1620). At this time, the outer carrier (1220) may move together with the inner carrier (1210) and the lead (1230).

[0225] The force-torque sensor may include a coupling member. The coupling member may couple two or more different members together. For example, the coupling member may be a screw. The coupling member may be a bolt.

[0226] The force-torque sensor may include an upper coupling member (1710). The upper coupling member (1710) may couple the moving member (1200) and the upper elastic member (1400).

[0227] The upper coupling member (1710) may include a head portion (1711). The head portion (1711) may be placed on the upper elastic member (1400).

[0228] The upper coupling member (1710) may include a coupling portion (1712). The coupling portion (1712) may pass through the upper elastic member (1400). The coupling portion (1712) may be coupled to the moving portion (1200). The coupling portion (1712) may include a screw thread coupled to the moving portion (1200).

[0229] The upper coupling member (1710) may include an outer coupling member (1710-1). The outer coupling member (1710-1) may be coupled with a thread of the outer carrier (1220) such that a portion of the upper elastic member (1400) is secured to the outer carrier (1220). The outer coupling member (1710-1) may secure the outer portion (1420) of the upper elastic member (1400) to the outer carrier (1220).

[0230] The upper coupling member (1710) may include an inner coupling member (1710-2). The inner coupling member (1710-2) may be coupled with the screw threads of the inner carrier (1210) such that the lead (1230) and a portion of the upper elastic member (1400) are secured to the inner carrier (1210). The inner coupling member (1710-2) may secure the lead (1230) to the inner carrier (1210). The inner coupling member (1710-2) may secure the inner portion (1410) of the upper elastic member (1400) to the inner carrier (1210).

[0231] The force-torque sensor may include a lower coupling member (1720). The lower coupling member (1720) may couple the fixing member (1100) and the lower elastic member (1500). The lower coupling member (1720) may fix the lower cover (1130) to the base (1110). The lower coupling member (1720) may fix the outer portion (1520) of the lower elastic member (1500) between the base (1110) and the lower cover (1130). The lower coupling member (1720) may penetrate the outer portion (1520) of the lower elastic member (1500).

[0232] The lower connecting member (1720) may include a head portion (1721). The head portion (1721) may be positioned below the lower elastic member (1500). The head portion (1721) may be positioned on the lower elastic member (1500).

[0233] The lower coupling member (1720) may include a coupling portion (1722). The coupling portion (1722) may pass through the lower elastic member (1500). The coupling portion (1722) may be coupled to the fixing portion (1100). The coupling portion (1722) may be coupled to the base (1110). The coupling portion (1722) may include a screw thread coupled to the fixing portion (1100).

[0234] The force-torque sensor may include a coupling member (1730). The coupling member (1730) may secure the upper cover (1120) to the base (1110). The coupling member (1730) may include screw threads. The coupling member (1730) may be screw-coupled to the base (1110) through the upper cover (1120).

[0235]

[0236] Below, the configuration of a force-torque sensor according to the first modified example is described with reference to the drawings.

[0237] Fig. 35 is a perspective view of a force-torque sensor according to the first modified example. Fig. 36 is a side view of the first modified example with the shield can removed.

[0238] The force-torque sensor may include a shield can (1810). The shield can (1810) may surround at least a portion of the outer surface of the fixing member (1100). The shield can (1810) may block external noise. The shield can (1810) may be formed of metal.

[0239] The shield can (1810) may include an upper shield can (1811). The upper shield can (1811) may be placed on the outer surface of the base (1110). The upper shield can (1811) may be placed on the outer surface of the upper cover (1120).

[0240] The shield can (1810) may include a lower shield can (1812). The lower shield can (1812) may be placed on the outer surface of the lower cover (1130). The lower shield can (1812) may be placed on the lower surface of the lower cover (1130).

[0241]

[0242] Below, the configuration of a force-torque sensor according to the second modified example is described with reference to the drawings.

[0243] Fig. 37 is a cross-sectional view of a force-torque sensor according to a second modified example. Fig. 38 is a bottom perspective view showing the arrangement structure of the shield plate in the second modified example.

[0244] The force-torque sensor may include a shield plate (1820). The shield plate (1820) may be positioned between the moving part (1200) and the lower elastic member (1500). The shield plate (1820) may block external noise. The shield plate (1820) may be formed of metal.

[0245] The shield plate (1820) may include an inner shield plate (1821). The inner shield plate (1821) may be disposed on the inner carrier (1210). The inner shield plate (1821) may be disposed on the lower surface of the inner carrier (1210). The inner shield plate (1821) may include a groove in which a first magnet (1310) and a second magnet (1320) are disposed. The groove may be formed by bending the inner shield plate (1821).

[0246] The shield plate (1820) may include an outer shield plate (1822). The outer shield plate (1822) may be disposed on the outer carrier (1220). The outer shield plate (1822) may be disposed on the lower surface of the outer carrier (1220). The outer shield plate (1822) may include a groove in which a third magnet (1330) is disposed. The groove may be formed by bending the outer shield plate (1822).

[0247]

[0248] Hereinafter, the operation of a force-torque sensor according to a second embodiment of the present invention will be described with reference to the drawings.

[0249] Fig. 39 is a perspective view for explaining an operating method of a force-torque sensor according to a second embodiment of the present invention. Fig. 40 is a diagram for explaining a change when an external force having a yaw component is applied to a force-torque sensor according to a second embodiment of the present invention. Fig. 41 is a diagram for explaining a change when an external force having a roll component is applied to a force-torque sensor according to a second embodiment of the present invention. Fig. 42 is a diagram for explaining a change when an external force having a z-axis component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0250] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the x-axis (see yaw in FIG. 39). At this time, the lead (1230) can move integrally with the internal carrier (1210). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the second sensor (1350) disposed on the fixed part (1100) detects the second magnet (1320) disposed on the internal carrier (1210), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (1230) can be measured.

[0251] In more detail, as illustrated in FIG. 40, when the internal carrier (1210) and the second magnet (1320) move in the yaw direction, a gap (g in FIG. 40) may be formed between a virtual straight line passing through the center of the second magnet (1320) and a virtual straight line passing through the center of the second sensor (1350). At this time, the second sensor (1350) may recognize the change in the magnetic force of the second magnet (1320) and recognize the position of the second magnet (1320). Through this, the second sensor (1350) may calculate the amount of movement of the internal carrier (1210) and calculate the y-axis component of the external force and the y-axis component of the external force.

[0252] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the y-axis (see pitch in FIG. 39). At this time, the lead (1230) can move integrally with the internal carrier (1210). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the first sensor (1340) disposed on the fixed part (1100) detects the first magnet (1310) disposed on the internal carrier (1210), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (1230) can be measured.

[0253] When an external force having a roll direction component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the z-axis (see roll in FIG. 39). The lead (1230) can move with respect to the fixed part (1100) as an integral part with the internal carrier (1210) (see (b) in FIG. 41). At this time, the first sensor (1340) arranged on the fixed part (1100) detects the first magnet (1310) arranged on the internal carrier (1210), and the second sensor (1250) detects the second magnet (1320), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (1230) can be measured.

[0254] When an external force having a z-axis component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can move along the z-axis (see Fz in FIG. 39). The lead (1230) can move with respect to the fixed part (1100) together with the internal carrier (1210) and the external carrier (1220) (see (b) in FIG. 42). At this time, the third sensor (1360) arranged on the fixed part (1100) detects the third magnet (1330) arranged on the external carrier (1220), so that the amount of movement of the lead (1230), the internal carrier (1210), and the external carrier (1220) can be measured. Through this, the force of the z-axis component of the external force applied to the lead (1230) can be measured.

[0255]

[0256] Below, the configuration of a robot according to a second embodiment of the present invention is described.

[0257] A robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. A force-torque sensor according to a second embodiment of the present invention may be disposed on the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor according to a second embodiment of the present invention may be disposed on a joint of the arm member.

[0258]

[0259] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential features thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

Claims

1. Fixed government; A moving part arranged within the above fixed part; and Including a detection unit that detects movement of the movable unit with respect to the fixed unit, The above moving part includes an inner carrier disposed within the fixed part, and an outer carrier disposed between the inner carrier and the fixed part, The inner carrier and the outer carrier move integrally in the z-axis direction with respect to the fixed part, A first ball is placed between the inner carrier and the outer carrier, The inner carrier is a force-torque sensor that pivots relative to the outer carrier around the first ball.

2. In paragraph 1, The inner carrier is a force-torque sensor that moves in a yaw direction, which is a rotational direction centered around the x-axis perpendicular to the z-axis with respect to the outer carrier, a pitch direction, which is a rotational direction centered around the y-axis perpendicular to each of the z-axis and the x-axis, and a roll direction, which is a rotational direction centered around the z-axis.

3. In paragraph 1, The inner carrier and the outer carrier include a home, The above first ball is a force-torque sensor disposed between the groove of the inner carrier and the groove of the outer carrier.

4. In paragraph 3, A force-torque sensor in which the groove of the inner carrier includes a curved surface having a shape corresponding to the curved surface of the first ball.

5. In paragraph 3, A force-torque sensor in which the groove of the outer carrier contacts the first ball at two points on a cross-section cut parallel to the z-axis and passing through the center of the first ball.

6. In paragraph 1, The above first ball is a force-torque sensor formed of one or more of ceramic, plastic, and metal.

7. In paragraph 1, Including a second ball disposed between the fixed part and the external carrier, A force-torque sensor in which the diameter of the first ball is larger than the diameter of the second ball.

8. In paragraph 1, Including a second ball disposed between the fixed part and the external carrier, The above first ball is a force-torque sensor that overlaps the above second ball in a direction perpendicular to the z-axis.

9. In paragraph 1, A force-torque sensor comprising an upper elastic member coupled to the inner carrier and the outer carrier.

10. In paragraph 1, A force-torque sensor comprising a lower elastic member coupled to the fixed portion and the movable portion.

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