Measurement device, measurement method, and measurement control program

Abstract

A measurement device (1) comprises: a detector (10) that measures an object to be measured; a temperature sensor (80) that measures the temperature of the object to be measured at the time of measurement; and a control unit (102) that is capable of switching a temperature input mode between an automatic input mode for automatically acquiring the temperature detected by the temperature sensor and a manual input mode for receiving a manual input of the temperature of the object to be measured at the time of measurement, and that corrects the measured temperature of the object to be measured on the basis of the temperature acquired by the automatic input mode or the manual input mode.

Description

Measurement device, measurement method, and measurement control program

[0001] The present invention relates to a measuring device, a measuring method, and a measurement control program, and more particularly to a measuring device, a measuring method, and a measurement control program for measuring the shape, roughness, contour, etc. of the surface of an object to be measured.

[0002] Measuring devices are known for measuring the shape, roughness, contour, etc. of the surface of a measurement object (workpiece). Such measuring devices are equipped with a mechanism whose parameters change with temperature (e.g., thermal expansion). Furthermore, the parameters of the measurement object may also change with temperature. If the parameters of the measuring device or the measurement object change with temperature, the measurement results of the measurement object will fluctuate.

[0003] A shape measuring device has been proposed that uses a temperature sensor to detect the temperature of an object during measurement and corrects the driving program or measurement results of the measuring device. For example, Patent Document 1 discloses that temperature sensor detection units are attached to each component of a coordinate measuring machine and to the object to be measured, and temperature data acquired by the temperature sensors is used to perform temperature correction processing on the actual dimensions of the object to be measured or the measurement operation of the coordinate measuring machine (changing the stop positions of each driving unit during the measurement operation). In Patent Document 1, the temperature correction processing described above makes it possible to obtain the dimensions of the object to be measured at a standard temperature (20°C).

[0004] JP 2016-090427 A

[0005] When performing temperature correction on measurement results such as the actual dimensions of an object to be measured, the actual dimensions of the object to be measured at a standard temperature are determined by performing a numerical calculation using, for example, the temperature measurement results from a temperature sensor and the measurement results of the object to be measured. When performing temperature correction, it is assumed that the temperature at the time of measurement can be detected in a timely manner, and if there is a problem in obtaining the temperature detected by the temperature sensor, it becomes impossible to perform temperature correction or measurement of the object to be measured.

[0006] The present invention has been made in view of the above circumstances, and has an object to provide a measurement device, a measurement method, and a measurement control program that are capable of stably performing temperature correction and measurement of a measurement object.

[0007] The measuring device according to a first aspect of the present invention comprises a detector for measuring an object to be measured, a temperature sensor for measuring the temperature of the object to be measured when the object is being measured, and a control unit that can switch the temperature input mode between an automatic input mode that automatically acquires the temperature detected by the temperature sensor and a manual input mode that accepts manual input of the temperature of the object to be measured when the object is being measured, and that performs temperature correction of the measurement of the object to be measured based on the temperature acquired in the automatic input mode or the manual input mode.

[0008] In the measuring device according to the second aspect of the present invention, in the first aspect, the control unit switches the temperature input mode to the manual input mode when there is a problem in obtaining the temperature from the temperature sensor, and performs temperature correction based on the manually input temperature.

[0009] A third aspect of the present invention provides a measurement device according to the second aspect, wherein the control unit switches the temperature input mode to the manual input mode when the control unit is unable to acquire a temperature from the temperature sensor for a predetermined period of time or longer.

[0010] In a measuring device according to a fourth aspect of the present invention, in any of the first to third aspects, when the temperature input mode is switched to the manual input mode and there is no manual input, the control unit performs temperature correction based on the most recent temperature obtained from the temperature sensor.

[0011] In the measuring device of the fifth aspect of the present invention, in the fourth aspect, the control unit outputs a notification to prompt manual input when there is no manual input and a first predetermined time has elapsed since the most recent temperature was obtained from the temperature sensor.

[0012] In a measuring device according to a sixth aspect of the present invention, in any of the first to fifth aspects, the control unit outputs a notification to prompt manual input when a second predetermined time has elapsed since the manual input of the temperature was accepted.

[0013] A seventh aspect of the present invention is a measurement device according to any one of the first to sixth aspects, wherein the control unit switches the temperature input mode to the automatic input mode when it detects that a temperature sensor has been connected.

[0014] In an eighth aspect of the present invention, in any of the first to seventh aspects, the control unit is a programmable command group for executing operations related to the measurement of the object to be measured, which includes a temperature setting command related to temperature acquisition, and when the temperature setting command is executed, performs temperature correction of the measurement of the object to be measured based on the temperature acquired in the automatic input mode or the manual input mode.

[0015] A ninth aspect of the present invention provides the measurement device of the eighth aspect, wherein the control unit switches the temperature input mode when a temperature input mode switching command of the temperature setting command is executed.

[0016] A measurement method according to a tenth aspect of the present invention includes the steps of switching a temperature input mode between an automatic input mode, which automatically acquires the temperature of the object to be measured detected by a temperature sensor, and a manual input mode, which accepts manual input of the temperature of the object to be measured, and performing temperature correction of the measurement of the object to be measured based on the temperature acquired in the automatic input mode or the manual input mode.

[0017] The measurement control program according to the eleventh aspect of the present invention enables a computer to realize the following functions: a function of switching the temperature input mode between an automatic input mode, which automatically acquires the temperature of the object to be measured detected by a temperature sensor, and a manual input mode, which accepts manual input of the temperature of the object to be measured; and a function of performing temperature correction for the measurement of the object to be measured based on the temperature acquired in the automatic input mode or the manual input mode.

[0018] According to the present invention, the temperature input mode can be switched between the automatic input mode and the manual input mode, so that measurements of the measurement object can be performed stably.

[0019] It is a diagram showing a measuring device according to one embodiment of the present invention. It is a block diagram showing a control device of the measuring device according to one embodiment of the present invention. It is a flowchart showing a measuring method (temperature correction method) according to one embodiment of the present invention. It is a diagram showing an example of an interface for setting a temperature for each temperature input mode. It is a diagram showing an example of a setting screen of CNC software.

[0020] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

[0021] 1 is a diagram showing a measuring device according to an embodiment of the present invention. In the following description, a three-dimensional Cartesian coordinate system is used in which the XY plane is the horizontal plane and the Z direction is the vertical direction (perpendicular direction).

[0022] The measuring device 1 is a device for measuring the shape, roughness, contour, etc. of the surface of a measuring object W placed on a measuring object placement section (hereinafter referred to as a stage) 50 .

[0023] 1, the stage 50 is placed on a base 52, and the surface of the stage 50 (the surface on which the measurement target W is placed) is parallel to the XY plane. A column (Z axis) 54 extending approximately perpendicular to the surface of the stage 50 is placed on the base 52. A carriage (X axis) 56 is attached to the column 54, and the carriage 56 is movable in the Z direction along the column 54 by an actuator (not shown).

[0024] The detector 10 is attached to the carriage 56, and the detector 10 is movable in the X direction relative to the carriage 56 by an actuator (not shown). A scale 58 for detecting the X direction position of the detector 10 is attached to the carriage 56. The scale 58 is, for example, a linear scale (linear position scale) with scale graduations formed along its length.

[0025] In this embodiment, the detector 10 is movable relative to the column 54, but the present invention is not limited to this. For example, the column 54 may be movable along the X direction relative to the stage 50, or the stage 50 may be movable along the X direction or the Z direction relative to the column 54. That is, any configuration may be used as long as the measurement object W placed on the stage 50 and the detector 10 are movable relatively in the X direction and the Z direction. Furthermore, the detector 10 may be movable relatively in the Y direction as well as the X direction relative to the measurement object W placed on the stage 50.

[0026] As shown in FIG. 1, the detector 10 includes a stylus portion 14, an arm portion 16, a swing shaft 20, a scale 22, and a scale head 24.

[0027] The stylus unit 14 is fixed to the arm unit 16 so as to extend in the X direction. Hereinafter, the stylus unit 14 attached to the arm unit 16 will be referred to as the swing unit 18. The swing unit 18 is attached to the detector housing 26 so as to be swingable integrally around a swing shaft 20. The mounting angle of the swing shaft 20 relative to the carriage 56 of the detector 10 is adjusted so that it is approximately parallel to the XY plane.

[0028] The configuration of the swinging part 18 is not limited to the example shown in Fig. 1. For example, the stylus part 14 or the arm part 16 may have an L-shaped bent part, and the stylus part 14 and the arm part 16 may be attached so as to be approximately parallel to each other.

[0029] A stylus 12 is provided at the tip of the stylus unit 14. The stylus 12 extends downward (in the -Z direction) in the figure. When the stylus 12 is brought into contact with the surface of the measurement object W placed on the stage 50 with a predetermined pressure, the oscillating unit 18 oscillates around the oscillating axis 20 in accordance with the height and unevenness of the surface of the measurement object W at the contact position.

[0030] The configuration of the stylus unit 14 is not limited to the example shown in Fig. 1. For example, the stylus unit 14 may be a T-shaped stylus with styluses provided in the vertical direction in the figure, or an L-shaped stylus with a stylus protruding downward in the figure longer than in the example shown in Fig. 1.

[0031] The scale 22 is fixed to the detector housing 26 so as to face the base end of the arm portion 16. The detector housing 26 is a member that connects the oscillation center 20C of the oscillation shaft 20 and the scale 22 (that defines the distance between the oscillation center 20C of the oscillation shaft 20 and the scale 22).

[0032] The scale 22 is, for example, a linear scale (linear position scale) with scale graduations formed along the length direction of the scale 22. The scale 22 is attached so that its length direction (displacement detection direction) is approximately perpendicular to the length direction of the oscillating portion 18.

[0033] The scale head 24 is fixed to the base end of the arm portion 16 and is capable of swinging integrally with the swinging portion 18. The scale head 24 is a device that reads the graduations of the scale 22 fixed to the detector housing 26 at an opposing position. The scale head 24 may be, for example, a photoelectric sensor for reading the graduations of the scale 22 or a non-contact sensor that includes an imaging element and an illumination light source (for example, an LED (Light-Emitting Diode)).

[0034] The reading of the graduations of the scale 22 read by the scale head 24 is output to a control unit 102 (see FIG. 2) of a control device 100 provided in the measuring device 1.

[0035] The control unit 102 controls the actuators provided on the column 54 and carriage 56 to move the measurement object W and the stylus 12 of the detector 10 relative to each other, while acquiring the readings of the graduations on the scale 22 for each position on the surface of the measurement object W. This makes it possible to measure the shape, roughness, contour, etc. of the surface of the measurement object W.

[0036] In this embodiment, the scale 22 is fixed to the detector housing 26, and the scale head 24 is fixed to the base end of the arm portion 16, but the present invention is not limited to this. For example, the scale head 24 may be fixed to the detector housing 26, and the scale 22 may be fixed to the base end of the arm portion 16. Furthermore, the scale 22 is not limited to a linear scale, and may be, for example, an arc scale (angle scale) formed in an arc shape along the swing direction of the arm portion 16.

[0037] The temperature sensor 80 is a temperature sensor capable of measuring the temperature of a predetermined location in the measurement device 1. In the example shown in Fig. 1, one temperature sensor 80 is disposed near the stage 50 on which the measurement object W is placed, but the number and installation locations of the temperature sensors 80 are not particularly limited. For example, a temperature sensor may also be disposed near the scale 22 inside the detector housing 26, near the scale 58 on the carriage 56, etc. Note that the temperature sensor 80 may be, for example, a radiation temperature sensor or a color temperature sensor.

[0038] The control unit 102 of the control device 100 controls each unit of the measurement device 1 to measure the measurement object W. When measuring the measurement object W, the control unit 102 receives temperature data D detected by the temperature sensor 80. ８０ and obtain the temperature data D ８０ The measurement results are corrected (temperature correction) based on the temperatures of the measurement object W, the scale 22, and the scale 58. Note that the temperature correction is not limited to the correction of the measurement results. For example, the drive control and position control of the detector 10 and the like may be performed based on the temperatures of the measurement object W, the scale 22, and the scale 58.

[0039] 2 is a block diagram showing the control device 100 of the measurement device 1. As shown in FIG. 2, the control device 100 includes a control unit 102, an input unit 104, a display unit 106, and a storage 108.

[0040] The control unit 102 includes a processor (e.g., a CPU (Central Processing Unit) or an MPU (Micro-Processing Unit)) for controlling each part of the measuring device 1, and memory (e.g., a ROM (Read Only Memory), a RAM (Random Access Memory)). In response to an operation input from the input unit 104, the control unit 102 outputs control signals for controlling the control device 100 and the measuring device 1, and control signals for controlling an actuator for moving the detector 10, etc. The control unit 102 also has a measurement control function and a temperature correction function.

[0041] The control unit 102 has a temperature correction function for performing temperature correction for the measurement of the measurement object W (correction of the measurement result of the measurement object W, or measurement operation of the measurement device 1 (e.g., drive target positions and drive stop positions by the detector drive mechanisms 60X and 60Z)) based on, for example, the temperature at the time of measurement of the measurement object W. The control unit 102 is an example of a computer.

[0042] The input unit 104 is a device for receiving operation input from an operator, and includes, for example, a keyboard, a mouse, a touch panel, and the like.

[0043] The display unit 106 is a device for displaying images and includes, for example, an LCD (Liquid Crystal Display). The display unit 106 displays, for example, a GUI (Graphical User Interface) for operating the control device 100, the measuring device 1, the actuator, etc., and measurement results such as the shape, roughness, or contour of the surface of the measurement target W.

[0044] The storage 108 is a device for storing programs for controlling the measurement device 1 and data of measurement results, and includes, for example, a hard disk drive (HDD) or a solid state drive (SSD). ８０ may be stored in the storage 108. The storage 108 stores a measurement control program for causing the control unit 102 to realize the measurement control function and the temperature correction function.

[0045] The detector drive mechanism 60X includes an X-axis drive unit (for example, an actuator, not shown in FIG. 1) for moving the detector 10 in the X direction relative to the carriage 56.

[0046] The detector drive mechanism 60Z includes a Z-axis drive unit (for example, an actuator, not shown in FIG. 1) for moving the carriage 56 in the Z direction relative to the column 54, thereby moving the detector 10 in the Z direction.

[0047] The temperature sensor 80 is a temperature sensor capable of measuring the environmental temperature near the stage 50. In the example shown in FIG. 1 , the temperature sensor 80 is disposed near the stage 50, but the installation location of the temperature sensor 80 is not particularly limited. For example, instead of the environmental temperature measured by the temperature sensor 80, it is also possible to use the temperature of a drive unit such as the detector drive mechanism 60X or 60Z. Note that the temperature sensor 80 may be, for example, a radiation temperature sensor or a color temperature sensor for measuring the temperature of the measurement object W or the detector 10.

[0048] When the stylus 12 comes into contact with the surface of the object W to be measured, the swinging unit 18 (arm unit 16) is displaced in the Z direction. The control unit 102 receives an input of a reading (scale head detection value) of the scale 22 by the scale head 24. The control unit 102 also receives an input of a reading (scale detection value) of the scale 58 indicating the amount of movement of the detector 10 in the X direction. The control unit 102 then uses the scale head detection value and the scale detection value to calculate the shape, roughness, contour, etc. of the surface of the object W to be measured. The control unit 102 also receives temperature data D detected by the temperature sensor 80. ８０ is obtained and temperature correction is performed.

[0049] 2, the control unit 102 of the control device 100 having the measurement control function also has the temperature correction function, but the present invention is not limited to this. The temperature correction function may be provided in a device separate from the control device 100.

[0050] 3 is a flowchart showing a measurement method (temperature correction method) according to one embodiment of the present invention. In this embodiment, if a problem occurs in acquiring the temperature from the temperature sensor 80, the temperature input mode is changed, thereby enabling stable measurement of the measurement target W.

[0051] At the time of starting measurement of the measurement object W, the temperature sensor 80 can detect the temperature normally, and the control unit 102 receives the temperature data D output from the temperature sensor 80. ８０ Therefore, the temperature input mode is set to the automatic input mode (step S10). In the automatic input mode, the control unit 102 receives the temperature data D from the temperature sensor 80 at predetermined time intervals. ８０ Get.

[0052] When the control unit 102 detects an abnormality in the temperature sensor 80 during measurement of the measurement object W (Yes in step S12), the control unit 102 switches the temperature input mode to the manual input mode (step S14). In step S12, the control unit 102 detects that the temperature data D from the temperature sensor 80 has been lost due to factors such as a malfunction of the temperature sensor 80 itself or a poor connection between the control unit 102 and the temperature sensor 80.８０ If the temperature input mode is switched to the manual input mode, the control unit 102 causes the display unit 106 to display an interface (GUI: Graphical User Interface) for accepting temperature input.

[0053] In the manual input mode, when a manual input of a temperature is received via the input unit 104 (Yes in step S16), the control unit 102 performs temperature correction of the measurement results, etc., using the manually input temperature (step S18). In step S18, the user can continue the measurement by checking and manually inputting the temperature measurement results obtained by, for example, a temperature sensor not connected to the control unit 102 or a temperature sensor installed in the location where the measurement device 1 is installed.

[0054] During measurement of the measurement target W, if a predetermined time (second predetermined time) has passed since the last temperature input (Yes in step S20), the control unit 102 outputs a notification to prompt the user to manually input the temperature (step S22). This notification may include, for example, a notification that a predetermined time has passed since the last temperature input, or a notification indicating the elapsed time since the last temperature input. This notification may be displayed on the display unit 106 or may be output as audio from a speaker or other device.

[0055] On the other hand, in the manual input mode, if the temperature has not been manually input, the control unit 102 performs temperature correction of the measurement results, etc., using the most recent (last) temperature acquired immediately before the occurrence of the abnormality (step S24).

[0056] During the measurement of the object W, the temperature data D ８０If a predetermined time (first predetermined time) has elapsed since the temperature was last acquired (Yes in step S26), the control unit 102 outputs a notification to prompt the user to manually input the temperature (step S28). This notification may include, for example, a notification that a predetermined time has elapsed since the temperature was last acquired, or a notification indicating the elapsed time since the temperature was last acquired. Note that this notification may be displayed on the display unit 106 or may be output as audio from a speaker or other device.

[0057] If a temperature is manually input after the notification of step S24 or S28, the control unit 102 performs temperature correction of the measurement results, etc. using the manually input temperature. Steps S16 to S22 may then be repeated. On the other hand, if a temperature is not manually input after the notification of step S24 or S28, the control unit 102 may perform temperature correction of the measurement results, etc. using the last manually input temperature or the most recent (last) temperature acquired immediately before the occurrence of the abnormality, or may allow the user to select whether or not to interrupt the measurement of the measurement object W.

[0058] According to this embodiment, if a problem occurs in obtaining the temperature from the temperature sensor 80, the temperature input mode automatically switches to the manual input mode. This allows measurement of the measurement object W to be performed stably without interruption. Furthermore, after a problem occurs in obtaining the temperature from the temperature sensor 80, a notification is sent at predetermined time intervals to prompt the user to manually input the latest temperature, thereby preventing a decrease in the accuracy of the temperature correction.

[0059] The predetermined times in steps S20 and S26 may be set arbitrarily by the user, and may be the same or different values. The predetermined times in steps S20 and S26 may also be set automatically in accordance with the properties of the object whose temperature is to be measured (e.g., the material or thermal expansion coefficient of the measurement object W, the oscillating unit 18, the scale 22 or 58, etc.). For example, the lower the thermal expansion coefficient of the measurement object W, the longer the predetermined time may be.

[0060] Furthermore, according to this embodiment, if an abnormality occurs in the temperature sensor 80, measurement can be continued using a temperature sensor prepared by the user (for example, a temperature sensor that cannot be connected to the control unit 102 or a temperature sensor that is not compatible with the measurement control program of the control unit 102) or a temperature sensor installed at the location where the measurement device 1 is installed. In other words, measurement can be continued without purchasing a temperature sensor that is compatible with the measurement control program of the control unit 102.

[0061] 4 shows an example of an interface for setting the temperature for each temperature input mode. The following interfaces U1 to U3 are output to the display unit 106, and the user can input operations via the input unit 104.

[0062] Reference symbol U1 in Fig. 4 indicates an interface in automatic input mode. The interface U1 includes a display indicating that the temperature sensor 80 is properly connected and a display of the latest temperature (workpiece temperature) of the object to be measured W. The interface U1 also includes a set button for setting the temperature and a close button for hiding the window of the interface U1. Of these, the set button is displayed as being unclickable (for example, its color or outline is changed or it is grayed out).

[0063] When the temperature input mode is switched to the manual input mode (step S14), the interface U1 changes to U2 in FIG. 4. In the interface U2, the display has changed to indicate that the set button is clickable. The interface U2 also includes a display of the temperature of the measurement object W (workpiece temperature) last acquired from the temperature sensor 80 and the date and time of acquisition. Log information of the workpiece temperature and the date and time of acquisition is stored in the storage 108.

[0064] When the set button is clicked in interface U2, interface U3 for manually inputting the temperature is displayed on the display unit 106. Interface U3 includes a spin box with an input field for the temperature value and spin buttons for increasing or decreasing the value in the input field, and accepts the manual input of the temperature (step S16). When the temperature is manually input in interface U3 and the OK button is clicked to confirm the manual input of the temperature, the control unit 102 performs temperature correction of the measurement results, etc., using the manually input temperature (step S18).

[0065] On the other hand, if no manual input is performed (if the set button is not clicked in interface U2, or the cancel button in interface U3 is clicked), the control unit 102 performs temperature correction of the measurement results, etc. using the most recent (last) temperature obtained immediately before the abnormality occurred (step S24).

[0066] The interface and operation method for the temperature input mode are not limited to the example shown in FIG.

[0067] The measuring device 1 may also be provided with a function for registering measurement-related operations and executing them as a series of steps. The measuring device 1 or the measurement control program may be provided with a programmable command set for automatically executing measurement-related operations, such as measurement, movement of the measurement unit (such as relative movement between the detector 10 and the measurement target W), and analysis (of the measurement results). These operations can then be registered as a set of measurement programs. By executing the set of registered measurement programs, the user can achieve stable measurements and execute complex operations in a short amount of time.

[0068] For example, when the operation of the measuring device 1 is automated by software (e.g., computerized numerical control (CNC) software), as shown in FIG. 5 , temperature setting commands related to temperature acquisition (e.g., including a temperature input mode switching command for switching the temperature input mode, or a temperature input command for manually entering a temperature) may be incorporated into the software (as elements of the command group). Executing the temperature input mode switching command makes it possible to switch the temperature input mode between automatic input mode and manual input mode. Executing the temperature input command makes it possible to call up a temperature setting input screen, allowing the opportunity for temperature input to be set arbitrarily.

[0069] For example, a temperature input mode switching command or a temperature input command may be incorporated into the set of measurement programs, and these commands may be automatically executed when certain conditions are met (for example, the preparation, start or end stage of a specified operation, or the interruption of input from the temperature sensor 80, etc.).

[0070] Furthermore, the temperature and date input during measurement, and information indicating whether the temperature was input automatically or manually may be stored in the storage 108. This allows this information to be output and checked on the analysis screen after measurement.

[0071] Furthermore, when it is detected that a temperature sensor is connected during the manual input mode, the control unit 102 may automatically switch the temperature input mode to the automatic input mode.

[0072] The appropriate frequency of temperature input varies depending on the purpose and environment of the measurement. For example, it depends on conditions such as the temperature gradient of the measurement environment, the execution time of the measurement program, the measurement accuracy required for each measurement, and the measurement stroke. By providing the temperature setting command as a programmable element, it is possible to set the temperature at any timing according to the above conditions, thereby achieving both high measurement accuracy and efficiency.

[0073] In the present embodiment, the temperature input mode is switched to the manual input mode when a problem occurs in acquiring the temperature from the temperature sensor 80. However, the present invention is not limited to this. The automatic input mode and the manual input mode may be arbitrarily switched between. Setting the temperature input mode to the manual input mode may, for example, enable simulation of measurement results when the temperature and thermal expansion coefficient of the measurement object W are virtually changed. Furthermore, setting the temperature input mode to the manual input mode may also enable temperature correction, for example, using a temperature detected by any temperature sensor other than the temperature sensor 80. In this way, the temperature input mode can be arbitrarily switched to perform simulations or temperature correction using a different temperature sensor (for example, a temperature sensor not compatible with the above software), thereby stabilizing measurement accuracy.

[0074] 1...measuring device, 10...detector, 12...styli, 14...styli section, 16...arm section, 18...oscillating section, 20...oscillating axis, 22...scale, 24...scale head, 26...detector housing, 50...measurement object placement section, 52...surface plate, 54...column, 56...carriage, 58...scale, 60X, 60Z...detector driving mechanism, 80...temperature sensor, 100...control device, 102...control section, 104...input section, 106...display section, 108...storage

Claims

1. A measuring device comprising: a detector for measuring an object to be measured; a temperature sensor for measuring the temperature of the object to be measured when it is being measured; and a control unit that can switch the temperature input mode between an automatic input mode that automatically acquires the temperature detected by the temperature sensor and a manual input mode that accepts manual input of the temperature of the object to be measured when it is being measured, and that performs temperature correction for the measurement of the object to be measured based on the temperature acquired in the automatic input mode or the manual input mode.

2. The measuring device of claim 1, wherein the control unit switches the temperature input mode to the manual input mode when a problem occurs in obtaining the temperature from the temperature sensor, and performs the temperature correction based on the manually input temperature.

3. The measurement device according to claim 2, wherein the control unit switches the temperature input mode to the manual input mode when the temperature cannot be obtained from the temperature sensor for a predetermined period of time or longer.

4. A measuring device as described in any one of claims 1 to 3, wherein the control unit performs the temperature correction based on the most recent temperature obtained from the temperature sensor if there is no manual input when the temperature input mode is switched to the manual input mode.

5. The measuring device of claim 4, wherein the control unit outputs a notification to prompt for manual input when a first predetermined time has elapsed since the most recent temperature was obtained from the temperature sensor if there is no manual input.

6. A measuring device as described in any one of claims 1 to 3, wherein the control unit outputs a notification to prompt manual input of the temperature when a second predetermined time has elapsed since the manual input of the temperature was received.

7. A measuring device according to any one of claims 1 to 3, wherein the control unit switches the temperature input mode to the automatic input mode when it detects that the temperature sensor has been connected.

8. A measuring device as claimed in any one of claims 1 to 3, wherein the control unit has a programmable command group for executing operations relating to the measurement of the object to be measured, the programmable command including a temperature setting command relating to the acquisition of the temperature, and when the temperature setting command is executed, performs temperature correction of the measurement of the object to be measured based on the temperature acquired in the automatic input mode or the manual input mode.

9. The measurement device according to claim 8, wherein the control unit switches the temperature input mode when a temperature input mode switching command of the temperature setting command is executed.

10. A measurement method comprising: a step of switching a temperature input mode between an automatic input mode in which the temperature of an object to be measured detected by a temperature sensor is automatically acquired, and a manual input mode in which the temperature of the object to be measured is manually input; and a step of performing temperature correction for the measurement of the object to be measured based on the temperature acquired in the automatic input mode or the manual input mode.

11. A measurement control program that causes a computer to realize the following functions: a function to switch the temperature input mode between an automatic input mode that automatically acquires the temperature of an object detected by a temperature sensor at the time of measurement, and a manual input mode that accepts manual input of the temperature of the object at the time of measurement; and a function to perform temperature correction for the measurement of the object based on the temperature acquired in the automatic input mode or the manual input mode.

12. A non-transitory computer-readable recording medium on which the program according to claim 11 is recorded.

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