Radio frequency power supply ignition control method and system

Abstract

The present application relates to a radio frequency power supply ignition control method and system. The method is applied to a radio frequency power supply comprising a power amplifier. The method comprises: controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load, so that gas in the chamber load undergoes overshoot ignition; and when the gas is successfully ignited, controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or the input load.

Description

RF power supply ignition control method and system

[0001] Related applications

[0002] This application claims priority to Chinese patent application No. 202410962415.0, filed on July 18, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This application relates to the field of radio frequency power supply technology, and in particular to a radio frequency power supply ignition control method and system. Background Technology

[0004] In existing technologies, the ignition process of radio frequency plasma power systems typically requires suppression of the power signal to ensure stable operation. This suppression is usually achieved through power control using a relatively low duty cycle or by employing a balanced power amplifier structure. However, this approach often leads to a low ignition success rate because it may not be able to provide sufficient energy or a stable electric field environment during ignition.

[0005] The above content is only used to help understand the technical solution of this application and does not represent an admission that the above content is prior art. Summary of the Invention

[0006] The main objective of this application is to provide a radio frequency power supply ignition control method and system, which aims to solve the technical problem that in the prior art, radio frequency plasma power supply systems usually need to suppress power signal overcharging during ignition, and typically use a relatively low duty cycle for power control or a balanced power amplifier structure for power control, which leads to a low ignition success rate.

[0007] To achieve the above objectives, this application provides an RF power supply ignition control method, applied to an RF power supply including a power amplifier, the method comprising:

[0008] The power amplifier is controlled to output a power signal higher than the target power to the chamber load or input load, so as to cause the gas in the chamber load to overshoot and ignite;

[0009] After the gas is successfully ignited, the power amplifier is controlled to output a constant power signal within a preset target power range to the chamber load or input load.

[0010] In one embodiment, after controlling the power amplifier to output a power signal higher than the target power to the chamber load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0011] The changes in voltage and current in the chamber load or input load are determined based on voltage and current sensors;

[0012] The changing trend of the chamber load impedance or the input load impedance is determined based on the changes in voltage and current in the chamber load or the input load.

[0013] Whether the gas was successfully ignited is determined based on the changing trend of the chamber load impedance or the input load impedance.

[0014] In one embodiment, the voltage and current sensors are one or more, and the changes in voltage and current monitored by the voltage and current sensors located at different monitoring positions correspond to the changing trends of the chamber load impedance or the input load impedance.

[0015] In one embodiment, before controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0016] The voltage and current values ​​in the chamber load or input load are determined based on voltage and current sensors;

[0017] The impedance value of the chamber load or the impedance of the input load, as well as the trend of impedance value change, are determined based on the voltage and current values ​​in the chamber load or the input load.

[0018] When the impedance value of the chamber load impedance or the input load impedance is within or tends to be within the preset flameout state impedance range, the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load is executed.

[0019] In one embodiment, before controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0020] Determine whether the power amplifier is outputting a power signal to the chamber load or input load for the first time during this operation;

[0021] If so, then the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load is performed.

[0022] In one embodiment, before controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0023] Determine the duty cycle of the power signal output by the power amplifier, and determine whether the duty cycle is lower than a preset duty cycle ratio;

[0024] If so, then the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load is performed.

[0025] In one embodiment, the duty cycle of the power signal output by the power amplifier is a periodic operating mode, which includes an off state, an ignition state, and a gradually off state.

[0026] In one embodiment, controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load includes:

[0027] Determine the preset threshold, preset ratio, or preset difference of the power signal;

[0028] Based on a preset threshold, preset ratio, or preset difference of the power signal, the power amplifier is controlled to output a power signal higher than the target power to the chamber load or input load.

[0029] In one embodiment, controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load based on a preset threshold, preset ratio, or preset difference of the power signal includes:

[0030] Determine the duty cycle of the output signal of the power amplifier;

[0031] Based on a preset threshold, preset ratio, or preset difference of the power signal, the power amplifier outputs a power signal higher than the target power to the chamber load or input load by adjusting the duty cycle of the power amplifier's output signal.

[0032] In one embodiment, after controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0033] Obtain the gas overshoot ignition time in the chamber load;

[0034] When the gas overshoot ignition time is within a preset proportion of the positive waveform of the power amplifier output power signal, it is determined whether the gas has been successfully ignited.

[0035] If the gas ignition is successful, then the step of controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load after the gas ignition is successful is executed.

[0036] If the gas ignition fails, the output power of the power amplifier or the preset duration of the positive waveform of the output power signal is increased to ensure successful gas ignition.

[0037] In one embodiment, after the gas is successfully ignited, and the power amplifier is controlled to output a constant power signal within a preset target power range to the chamber load or input load, the method further includes:

[0038] During the switching process from outputting a power signal higher than the target power to outputting a constant power signal within the preset target power range to the chamber load or input load, the control signal of the inverter in the power amplifier is set to zero.

[0039] In addition, to achieve the above objectives, this application also provides a radio frequency power ignition control system, the system comprising: a power amplifier and a main controller;

[0040] The main controller is connected to the power amplifier, and the power amplifier is connected to the chamber load or the input load.

[0041] The main controller is used to output a first control command to the power amplifier;

[0042] The power amplifier is configured to output a power signal higher than the target power to the chamber load or input load when the first control command is received, so as to cause the gas in the chamber load to overshoot and ignite.

[0043] The main controller is also configured to output a second control command to the power amplifier after the gas is successfully ignited;

[0044] The power amplifier is further configured to, upon receiving the second control command, control the power amplifier to output a power signal within a preset target power range to the chamber load or input load, so as to keep the power signal in the chamber load or input load constant.

[0045] In one embodiment, the system further includes: a voltage and current sensor;

[0046] The voltage and current sensors are connected to the main controller;

[0047] The voltage and current sensor is used to detect the voltage and current in the chamber load or input load, and output the voltage and current signals to the main controller;

[0048] The main controller is used to determine the changing trend of the chamber load impedance or the input load impedance based on the voltage and current signals in the chamber load or the input load when it receives the voltage and current signals.

[0049] The main controller is also used to determine whether the gas has been successfully ignited based on the changing trend of the chamber load impedance or the input load impedance.

[0050] In one embodiment, the system further includes: a voltage and current sensor;

[0051] The voltage and current sensors are connected to the main controller;

[0052] The voltage and current sensor is used to detect the voltage and current in the chamber load or input load, and output the voltage and current signals to the main controller;

[0053] The main controller is used to determine the impedance value and the trend of impedance value change of the chamber load impedance or the input load impedance based on the voltage and current signals in the chamber load or the input load when it receives the voltage and current signals.

[0054] The main controller is further configured to output a first control command to the power amplifier in the next pulse cycle when the impedance value of the chamber load impedance or the input load impedance is within or tends to be within the preset flameout state resistance value range in the current pulse cycle.

[0055] This application provides a radio frequency (RF) power supply ignition control method applied to an RF power supply including a power amplifier. The method includes: controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load to cause gas overshoot ignition in the chamber load; and after successful gas ignition, controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load. This application achieves gas overshoot ignition by controlling the power amplifier to output a power signal exceeding a target power to the chamber load or input load. Once ignition is successful, it adjusts the power amplifier to output a constant power signal to maintain it within the preset target power range, thereby solving the problem of low ignition success rate. Attached Figure Description

[0056] Figure 1 is a flowchart of the first embodiment of the radio frequency power supply ignition control method of this application;

[0057] Figure 2 is a flowchart of the second embodiment of the radio frequency power supply ignition control method of this application;

[0058] Figure 3 is a schematic diagram of the radio frequency power supply ignition control system of this application.

[0059] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Embodiments of the present invention

[0060] It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit this application.

[0061] Referring to Figure 1, the first embodiment of the RF power supply ignition control method of this application provides an RF power supply ignition control method applied to an RF power supply including a power amplifier, the method comprising:

[0062] S10: Control the power amplifier to output a power signal higher than the target power to the chamber load or input load, so as to cause the gas in the chamber load to overshoot and ignite.

[0063] S20: After the gas is successfully ignited, control the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load.

[0064] The execution subject of this embodiment can be a main controller that controls the output power of the power amplifier, or other electronic devices that can achieve the above functions. This embodiment does not limit this.

[0065] A power amplifier is a device used to increase the power of an input signal. In this embodiment, the power amplifier outputs a power signal higher than the target power to the chamber load or input load to induce gas overshoot ignition. The chamber load is a device in the radio frequency plasma system used to contain gas and discharge it. Controlling the power signal output by the power amplifier to the chamber load or input load is to achieve gas overshoot ignition. Gas overshoot ignition refers to stimulating the gas in the chamber load with a high-power signal to achieve the ignition process. The target power refers to the preset power level required during ignition. The constant power signal refers to a stable power signal that needs to be maintained within the preset target power range once ignition is successful.

[0066] Specifically, the power amplifier outputs a power signal higher than the target power to the chamber load or input load to stimulate gas overshoot ignition. Once gas ignition is successful, the power amplifier output is adjusted to maintain a constant power signal within the preset target power range, thereby improving the ignition success rate because it can provide sufficient energy during ignition while maintaining a stable electric field environment, thus ensuring that gas overshoot ignition occurs.

[0067] This embodiment provides an RF power supply ignition control method applied to an RF power supply including a power amplifier. The method includes: controlling the power amplifier to output a power signal higher than a target power to a chamber load or input load to cause gas overshoot ignition in the chamber load; after successful gas ignition, controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load. This embodiment achieves gas overshoot ignition by controlling the power amplifier to output a power signal exceeding the target power to the chamber load or input load. Once ignition is successful, it adjusts the power amplifier to output a constant power signal to maintain it within the preset target power range, thereby solving the problem of low ignition success rate.

[0068] Referring to Figure 2, which is a flowchart of the second embodiment of the radio frequency power ignition control method of this application, a second embodiment of the radio frequency power ignition control method of this application is proposed based on the embodiment shown in Figure 1 above.

[0069] In the second embodiment, after controlling the power amplifier to output a power signal higher than the target power to the chamber load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0070] S01: Determine the changes in voltage and current in the chamber load or input load based on voltage and current sensors;

[0071] S02: Determine the changing trend of the chamber load impedance or input load impedance based on the changes in voltage and current;

[0072] S03: Determine whether the gas has been successfully ignited based on the changing trend of the chamber load impedance or the input load impedance.

[0073] Voltage and current sensors are used to monitor voltage and current changes in the chamber load or the assembly consisting of the matching device and the chamber load. They provide real-time voltage and current data for analysis in subsequent steps. Based on the data provided by the voltage and current sensors, the changes in voltage and current in the chamber load or the assembly consisting of the matching device and the chamber load are monitored, and these changes reflect the gas discharge during ignition. The impedance changes of the chamber load or input load can be inferred from the trends in voltage and current changes in the chamber load or input load. This is an important basis for determining whether ignition is successful, as successful ignition will result in a significant change in impedance. The trend in the chamber load impedance or input load impedance can determine whether the gas has been successfully ignited. Successful ignition typically results in a significant change in the chamber load impedance or input load impedance. It should be understood that voltage and current sensors can be placed between the power supply and the matching device, between the matching device and the chamber load, or at a measurable point.

[0074] The voltage and current sensors can be one or more, and the changes in voltage and current monitored by the voltage and current sensors located at different monitoring positions correspond to the changing trends of the chamber load impedance or the input load impedance.

[0075] Specifically, voltage and current sensors are used to monitor voltage and current changes in the chamber load. These changes are analyzed to determine the trend of change in the chamber load impedance or input load impedance. Based on the impedance change trend, it is determined whether the gas has been successfully ignited. The effect of these steps is to provide a method for real-time monitoring and judgment of ignition success. By analyzing voltage and current changes in the chamber load or input load, it is possible to accurately determine whether the gas has been successfully ignited, thereby allowing for timely adjustments to power output or other measures to ensure a smooth ignition process.

[0076] Furthermore, in one embodiment, before controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0077] The voltage and current values ​​in the chamber load or input load are determined based on voltage and current sensors;

[0078] The impedance value of the chamber load or the input load impedance, as well as the trend of impedance value change, are determined based on the voltage and current values ​​in the chamber load.

[0079] When the impedance value of the chamber load impedance or the input load impedance is within or tends to be within the preset flameout state impedance range, the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load is executed.

[0080] Voltage and current values ​​refer to the real-time voltage and current values ​​of the chamber load or input load. These values ​​are acquired by voltage and current sensors for analysis in subsequent steps. The chamber load impedance or input load impedance and its changing trend refer to the ability to calculate the impedance value of the chamber load or input load based on the voltage and current values, and analyze the impedance's trend over time. This helps determine whether the gas in the chamber load is about to ignite, as there is usually a specific change in impedance value before ignition. The preset flameout state resistance range refers to a pre-set impedance value range used to determine whether ignition should be performed. When the impedance value of the chamber load or input load is within or approaches this range, the system will perform the ignition operation.

[0081] Specifically, voltage and current sensors are used to monitor the voltage and current values ​​in the chamber load or input load. Based on these values, the impedance value of the chamber load or input load is calculated, and the trend of impedance change is analyzed. When the impedance value is within or approaches the preset flameout state resistance range, the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load is executed to induce gas ignition. These steps improve the system's intelligence; by monitoring voltage and current changes in the chamber load or input load and judging based on impedance change trends, the system can more accurately determine when to perform the ignition operation, thereby improving ignition efficiency and success rate.

[0082] Furthermore, in one embodiment, before controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0083] Determine whether the power amplifier is outputting a power signal to the chamber load or input load for the first time during this operation;

[0084] If so, then the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load is performed.

[0085] Whether the power amplifier is outputting a power signal to the chamber load or input load for the first time in this operation refers to determining whether the power amplifier is outputting a power signal to the chamber load or input load for the first time within the current operating cycle. The purpose of this step is to ensure that appropriate control steps are executed at the start of each new operating cycle. The step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load means that when it is determined that the power amplifier is outputting a power signal to the chamber load or input load for the first time in this operation, a control step is executed to adjust the power signal to a level higher than the target power to ensure successful ignition of the gas in the chamber load or input load.

[0086] Specifically, at the start of each operating cycle, it is detected whether the power amplifier has already output an overpower signal to the chamber load or input load. If it is the first time an overpower signal has been output, a control step is performed to adjust the power signal to a level higher than the target power. The effect of this step is to ensure that the necessary controls are executed to facilitate successful ignition of the gas in the chamber load at the start of each new operating cycle. By detecting whether the power amplifier has already output an overpower signal, the system can determine whether the output signal needs to be adjusted to ensure successful ignition.

[0087] Furthermore, in one embodiment, before controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0088] Determine the duty cycle of the power signal output by the power amplifier, and determine whether the duty cycle is lower than a preset duty cycle ratio;

[0089] If so, then the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load is performed.

[0090] Different loads correspond to different duty cycles that facilitate ignition. A preset duty cycle is the critical value for successful ignition for different loads. When the duty cycle is lower than the preset duty cycle, it represents the output power signal under a low duty cycle setting. The output power signal under a low duty cycle setting refers to the power signal output by the power amplifier under this condition. A low duty cycle typically indicates the proportion of low activity time in the signal within a cycle. The output signal under this condition may require special processing to ensure successful ignition. The step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load means that when it is determined that the power amplifier's output power signal is under a low duty cycle setting, a control step is executed to adjust the power signal to a level higher than the target power to ensure successful ignition of the gas in the chamber load.

[0091] The power signal output by the power amplifier has a duty cycle of periodic operation mode, which includes an off state, an ignition state, and a gradually off state.

[0092] Specifically, the power signal output by the power amplifier is monitored to determine if it is under a low duty cycle setting. If it is, a control step is executed to adjust the power signal to a level higher than the target power. This step provides special processing for the power signal under low duty cycle settings to ensure successful ignition of the gas in the chamber load even under these conditions. By detecting signal conditions and adjusting the output accordingly, the system can improve the success rate and stability of ignition.

[0093] Furthermore, in one embodiment, controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load includes:

[0094] Determine the preset threshold, preset ratio, or preset difference of the power signal;

[0095] Based on a preset threshold, preset ratio, or preset difference of the power signal, the power amplifier is controlled to output a power signal higher than the target power to the chamber load or input load.

[0096] Preset thresholds, preset ratios, or preset differences refer to setpoints used to determine when to adjust the power signal. A preset threshold can be an absolute power value, a preset ratio can be a proportion relative to a target power, and a preset difference is the difference between the target power and the actual output power. These setpoints are adjusted according to system requirements and performance characteristics to ensure the effectiveness and safety of ignition operation. Controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load based on the preset threshold, preset ratio, or preset difference of the power signal means adjusting the power amplifier's output to be higher than the target power according to the preset threshold, ratio, or difference. This ensures that the chamber load is appropriately controlled when necessary to facilitate gas ignition.

[0097] Specifically, preset thresholds, preset proportional values, or preset differences are set according to system requirements and performance characteristics. The power signal is monitored and compared to the preset values. If the power signal exceeds the preset value, a corresponding control strategy is executed, adjusting the power amplifier output to provide a power signal higher than the target power to the chamber load or input load. The effect of this step is to ensure effective ignition operation under different operating conditions by dynamically adjusting the output power. The preset thresholds, proportional values, or differences provide a flexible control method, enabling the system to adapt to different operating conditions and ensuring the success and stability of ignition.

[0098] Further, in this embodiment, controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load based on a preset threshold, preset ratio, or preset difference of the power signal includes:

[0099] Determine the duty cycle of the output signal of the power amplifier;

[0100] Based on a preset threshold, preset ratio, or preset difference of the power signal, the power amplifier outputs a power signal higher than the target power to the chamber load or input load by adjusting the duty cycle of the power amplifier's output signal.

[0101] Determining the duty cycle of the power amplifier's output signal refers to determining the ratio of the active time of the power signal within a cycle to the total cycle time. Determining the duty cycle is crucial for controlling the energy distribution of the output signal. Controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load by adjusting the duty cycle of the power signal based on a preset threshold, preset ratio, or preset difference means controlling the power amplifier's output to exceed the target power by adjusting the duty cycle of the power signal according to the preset threshold, ratio, or difference. This method ensures that the output power can be adjusted when needed to facilitate successful ignition of the gas in the chamber load.

[0102] Specifically, the duty cycle of the power signal is monitored. Based on a preset threshold, ratio, or difference, the duty cycle of the power signal is adjusted. By adjusting the duty cycle, the output of the power amplifier is controlled to ensure that the output power is higher than the target power. Through dynamic adjustment of the duty cycle, the system can flexibly control the output power, thereby ensuring effective ignition operation under different operating conditions.

[0103] Furthermore, in one embodiment, after controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load to cause overshoot ignition of the gas in the chamber load, the method further includes:

[0104] Obtain the gas overshoot ignition time in the chamber load;

[0105] When the gas overshoot ignition time is within a preset proportion of the positive waveform of the power amplifier output power signal, it is determined whether the gas has been successfully ignited.

[0106] If the gas ignition is successful, then the step of controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load after the gas ignition is successful is executed.

[0107] If the gas ignition fails, the output power of the power amplifier or the preset duration of the positive waveform of the output power signal is increased to ensure successful gas ignition.

[0108] Obtaining the gas overshoot ignition time in the chamber load refers to measuring the time required for gas overshoot ignition, which helps determine the ignition effect and subsequent control strategies. Determining whether the gas ignition is successful when the gas overshoot ignition time is within a preset proportion of the positive waveform of the power amplifier output power signal means monitoring whether the gas successfully ignites within the preset proportion time range. This helps evaluate the ignition effect and make further adjustments. If the gas ignites successfully, the step of controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load after successful gas ignition means adjusting the power amplifier output to a constant power within the preset target power range to maintain the ignition state. If the gas ignition fails, increasing the power amplifier output power or the preset proportion of the positive waveform of the output power signal to improve the ignition success rate means increasing the power amplifier output power or the duration of the output signal to improve the ignition success rate.

[0109] Specifically, the time required for gas overshoot ignition is measured. Gas ignition success is monitored, and corresponding control strategies are implemented based on the results. The output power or the duration of the output signal is adjusted as needed to ensure successful gas ignition. The effect of this step is to improve system stability and performance by dynamically adjusting the output power signal after ignition to ensure successful gas ignition. This step involves processing the output power signal after gas overshoot ignition to ensure successful ignition.

[0110] Furthermore, in one embodiment, since the inverter in the power amplifier often uses an H-bridge inverter circuit, during pulse switching, multiple switches in the H-bridge circuit may become fully conductive due to the influence of continuous current, causing circuit damage. Therefore, to solve the above problem, after the gas ignition is successful and the power amplifier is controlled to output a constant power signal within a preset target power range to the chamber load or input load, the method further includes:

[0111] During the switching process from outputting a power signal higher than the target power to outputting a constant power signal within the preset target power range to the chamber load or input load, the control signal of the inverter in the power amplifier is set to zero.

[0112] By setting the inverter's control signal to zero during the multi-stage pulse signal switching process, the full conduction of the H-bridge transistors in the inverter is effectively avoided, reducing the risk of circuit damage. This allows the RF power supply to operate stably even during pulse switching overshoot, effectively solving the problem of circuit damage and poor stability in existing RF power supplies during pulse switching. The multi-stage pulse signal switching process refers to the switching process from a power amplifier outputting a power signal higher than the target power to a constant power signal within the preset target power range, and then to the chamber load or input load.

[0113] Referring to Figure 3, which is a schematic diagram of the radio frequency power ignition control system of this application, the system includes: a power amplifier 20 and a main controller 10;

[0114] The main controller 10 is connected to the power amplifier 20, and the power amplifier 20 is connected to the chamber load or the input load.

[0115] The main controller 10 is used to output a first control command to the power amplifier 20;

[0116] The power amplifier 20 is configured to output a power signal higher than the target power to the chamber load or input load when the first control command is received, so as to cause the gas in the chamber load to overshoot and ignite.

[0117] The main controller 10 is also used to output a second control command to the power amplifier 20 after the gas is successfully ignited;

[0118] The power amplifier 20 is further configured to, upon receiving the second control command, control the power amplifier 20 to output a power signal within a preset target power range to the chamber load or input load, so as to keep the power signal in the chamber load constant.

[0119] The main controller 10 is connected to the power amplifier 20 and is responsible for outputting control commands to the power amplifier 20. Specifically, it first outputs a first control command to the power amplifier 20 to initiate the ignition process, and then, after successful ignition, outputs a second control command to the power amplifier 20 to control the output power. The power amplifier 20 receives the control commands from the main controller 10 and outputs corresponding power signals to the chamber load or input load according to the commands. Upon receiving the first control command, it outputs a power signal higher than the target power for ignition; upon receiving the second control command, it controls the output to maintain the power within the preset target power range to maintain a stable state in the chamber load.

[0120] Specifically, the main controller 10 sends a first control command, and the power amplifier 20 generates a high-power signal for ignition according to the command. This may involve a series of signal processing and control logic to ensure that the output power signal can effectively ignite. After successful ignition, the main controller 10 sends a second control command, and the power amplifier 20 adjusts its output according to the command to maintain it within a preset target power range. This may include adjusting the internal circuitry of the power amplifier 20 to ensure the stability and accuracy of the output power.

[0121] The first control command is the command to initiate the ignition process, which typically causes the power amplifier 20 to output a power signal higher than the target power, thereby causing the gas in the chamber load to overshoot and ignite. The second control command is the command sent after successful gas ignition, and its purpose is to instruct the power amplifier 20 to adjust its output to maintain it within the preset target power range, ensuring that the power signal in the chamber load or input load remains constant.

[0122] This embodiment provides a radio frequency power supply ignition control system, the system including: a power amplifier 20 and a main controller 10; wherein, the main controller 10 and the power amplifier 20 are connected, and the power amplifier 20 is connected to a chamber load or an input load; the main controller 10 is used to output a first control command to the power amplifier 20; the power amplifier 20 is used to, upon receiving the first control command, output a power signal higher than a target power to the chamber load or input load, so as to cause gas overshoot ignition in the chamber load; the main controller 10 is also used to, after the gas ignition is successful, output a second control command to the power amplifier 20; the power amplifier 20 is also used to, upon receiving the second control command, control the power amplifier 20 to output a power signal within a preset target power range to the chamber load or input load, so as to keep the power signal in the chamber load or input load constant. In this embodiment, the main controller 10 achieves gas overshoot ignition by controlling the power amplifier 20 to output a power signal exceeding the target power to the chamber load or input load. Once ignition is successful, the main controller 10 will adjust the power amplifier 20 to output a constant power signal to maintain it within the preset target power range, thereby solving the problem of low ignition success rate.

[0123] In addition, in one embodiment, the system further includes a voltage and current sensor 30;

[0124] The voltage and current sensor 30 is connected to the main controller 10;

[0125] The voltage and current sensor 30 is used to detect the voltage and current in the chamber load or input load, and output the voltage and current signals to the main controller 10;

[0126] The main controller 10 is used to determine the changing trend of the chamber load impedance or the input load impedance based on the voltage and current signals in the chamber load or the input load when it receives the voltage and current signals.

[0127] The main controller 10 is also used to determine whether the gas has been successfully ignited based on the changing trend of the chamber load impedance or the input load impedance.

[0128] Voltage and current sensors 30 are connected to the main controller 10 to monitor the voltage and current in the chamber load or input load and transmit these signals to the main controller 10. The main controller 10 receives the voltage and current signals and uses them to determine the impedance change trend of the chamber load or input load. Based on the impedance change trend, the main controller 10 can determine whether the gas has been successfully ignited.

[0129] Specifically, voltage and current sensor 30 is responsible for collecting voltage and current information from the chamber load or input load and transmitting it to the main controller 10. The main controller 10 can digitize these signals for further analysis. Based on the voltage and current signals, the main controller 10 analyzes the impedance change trend in the chamber load or input load using algorithms or models. This may involve monitoring and analyzing the rate of impedance change. Based on the impedance change trend, the main controller 10 can determine whether the gas has been successfully ignited. This can be achieved by setting an impedance change threshold; once the impedance change exceeds this threshold, ignition is considered successful, thereby enhancing the monitoring and control of the ignition process and improving the system's stability and reliability.

[0130] In addition, in one embodiment, the system further includes a voltage and current sensor 30;

[0131] The voltage and current sensor 30 is connected to the main controller 10;

[0132] The voltage and current sensor 30 is used to detect the voltage and current in the chamber load or input load, and output the voltage and current signals to the main controller 10;

[0133] The main controller 10 is used to determine the impedance value of the chamber load impedance or the input load impedance and the trend of impedance value change based on the voltage and current signals in the chamber load or input load when it receives the voltage and current signals.

[0134] The main controller 10 is further configured to output a first control command to the power amplifier 20 in the next pulse cycle when the impedance value of the chamber load impedance or the input load impedance is within or tends to be within the preset flameout state resistance value range in the current pulse cycle.

[0135] In this embodiment, the voltage and current sensor 30 is used to detect the voltage and current in the chamber load or input load and transmit these signals to the main controller 10. Specific sensor technologies, such as current transformers or voltage probes, can be used to convert the detected voltage and current signals into electrical signals that can be processed. By monitoring the voltage and current of the chamber load or input load in real time, the system provides accurate perception of the chamber state, providing necessary data support for subsequent control.

[0136] The main controller 10 receives voltage and current signals and determines the impedance value and its changing trend of the chamber load or input load based on these signals. This allows the main controller 10 to understand the system load status in real time. When the impedance value of the chamber load or input load is within or approaches the preset flameout state resistance range in the current pulse cycle, the main controller 10 outputs a first control command to the power amplifier 20 in the next pulse cycle. This ensures that the system can respond instantly to the actual load conditions, maintain system stability and efficiency, and initiate the ignition process when necessary to ensure normal system operation. A microcontroller or embedded system, along with appropriate algorithms or models, can be used to process and analyze the received voltage and current signals to determine the impedance value and its changing trend, and generate control commands. This provides intelligent monitoring and control of the chamber load or input load status, enabling adjustments based on real-time data to ensure system stability and reliability.

[0137] In this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or system. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or system that includes that element.

[0138] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0139] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk), and includes several instructions to cause a terminal device (which may be a mobile phone, computer, server, air conditioner, or network device, etc.) to execute the methods described in the various embodiments of this application.

[0140] The above are merely embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A radio frequency power source ignition control method applied to a radio frequency power source including a power amplifier, wherein, The method comprises: controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load to cause the gas in the chamber load to overshoot ignition; after the gas is successfully ignited, controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or the input load.

2. The radio frequency power ignition control method of claim 1, wherein, After the step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load to cause the gas in the chamber load to overshoot ignition, the method further comprises: determining the change of voltage and current in the chamber load or the input load based on a voltage and current sensor; determining the change trend of the chamber load impedance or the input load impedance based on the change of voltage and current in the chamber load or the input load; determining whether the gas is successfully ignited based on the change trend of the chamber load impedance or the input load impedance.

3. The radio frequency power ignition control method of claim 2, wherein, The voltage and current sensor is one or more, and the change of voltage and current monitored by the voltage and current sensor at different monitoring positions corresponds to the change trend of the chamber load impedance or the input load impedance.

4. The radio frequency power ignition control method of claim 1, wherein, Before the step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load to cause the gas in the chamber load to overshoot ignition, the method further comprises: determining the voltage value and the current value in the chamber load or the input load based on a voltage and current sensor; determining the impedance value of the chamber load impedance or the input load impedance and the change trend of the impedance value based on the voltage value and the current value in the chamber load; when the impedance value of the chamber load impedance or the input load impedance is in or tends to be in a preset extinguishing state impedance value range, performing the step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load.

5. The radio frequency power ignition control method of claim 1, wherein, Before the step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load to cause the gas in the chamber load to overshoot ignition, the method further comprises: determining whether the power amplifier outputs a power signal to the chamber load or the input load for the first time in the current work; if yes, performing the step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load.

6. The radio frequency power ignition control method as claimed in claim 1, wherein, Before the step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load to cause the gas in the chamber load to overshoot ignition, the method further comprises: determining the duty cycle of the power signal output by the power amplifier, and determining whether the duty cycle is lower than a preset proportional duty cycle; if yes, performing the step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load.

7. The radio frequency power ignition control method of claim 6, wherein, The duty cycle of the power signal output by the power amplifier is a periodic working mode, and the periodic working mode comprises an extinguishing state, an ignition state, and a gradually extinguishing state.

8. The radio frequency power ignition control method as claimed in claim 1, wherein, The step of controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load comprises: determining a preset threshold value, a preset proportional value, or a preset difference value of the power signal; Controlling the power amplifier to output a power signal higher than a target power to the chamber load or input load based on a preset threshold value, a preset ratio value or a preset difference value of the power signal.

9. The radio frequency power source ignition control method of claim 8, wherein, The controlling the power amplifier to output a power signal higher than a target power to the chamber load or input load based on a preset threshold value, a preset ratio value or a preset difference value of the power signal comprises: Determining the output signal duty cycle of the power amplifier; Controlling the power amplifier to output a power signal higher than a target power to the chamber load or input load based on a preset threshold value, a preset ratio value or a preset difference value of the power signal by adjusting the output signal duty cycle of the power amplifier.

10. The radio frequency power ignition control method of any of claims 1 to 9, wherein, After the controlling the power amplifier to output a power signal higher than a target power to the chamber load or input load to make the gas in the chamber load overshoot ignition, the method further comprises: Obtaining the duration of the gas overshoot ignition in the chamber load; Determining whether the gas is successfully ignited when the duration of the gas overshoot ignition is within a preset ratio duration of the positive waveform of the power signal output by the power amplifier; If the gas is successfully ignited, performing the step of controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load after the gas is successfully ignited; If the gas is not successfully ignited, increasing the output power of the power amplifier or the preset ratio duration of the positive waveform of the output power signal to make the gas successfully ignited.

11. The radio frequency power ignition control method of any of claims 1 to 9, wherein, After the controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load after the gas is successfully ignited, the method further comprises: During the switching process of the power amplifier outputting a power signal higher than a target power to outputting a constant power signal within a preset target power range to the chamber load, setting the control signal of the inverter in the power amplifier to zero.

12. A radio frequency power ignition control system wherein, The system comprises a power amplifier and a main controller. The main controller and the power amplifier are connected, and the power amplifier is connected with a chamber load or an input load. The main controller is configured to output a first control instruction to the power amplifier. The power amplifier is configured to output a power signal higher than a target power to the chamber load or input load when receiving the first control instruction to make the gas in the chamber load overshoot ignition. The main controller is further configured to output a second control instruction to the power amplifier after the gas is successfully ignited. The power amplifier is further configured to control the power amplifier to output a power signal within a preset target power range to the chamber load or input load when receiving the second control instruction to make the power signal in the chamber load or input load constant.

13. The radio frequency power source ignition control system as defined in claim 12, wherein, The system further comprises a voltage and current sensor. The voltage and current sensor is connected with the main controller. The voltage and current sensor is configured to detect the voltage and current in the chamber load or input load and output the voltage and current signals to the main controller. The main controller is configured to determine a change trend of the chamber load impedance or the input load impedance based on the voltage and current signals in the chamber load or the input load when the voltage and current signals are received. The main controller is further configured to determine whether the gas is successfully ignited based on the change trend of the chamber load impedance or the input load impedance.

14. The radio frequency power source ignition control system as defined in claim 12, wherein, The system further comprises a voltage and current sensor. The voltage and current sensor is connected to the main controller. The voltage and current sensor is configured to detect the voltage and current in the chamber load or the input load and output the voltage and current signals to the main controller. The main controller is configured to determine an impedance value of the chamber load impedance or the input load impedance and a change trend of the impedance value based on the voltage and current signals in the chamber load or the input load when the voltage and current signals are received. The main controller is further configured to output a first control instruction to the power amplifier in a next pulse period when the impedance value of the chamber load impedance or the input load impedance is in or tends to be in a preset extinguishing state impedance value range in a current pulse period.

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