Laser gas recovery and separation device and method

Abstract

A laser gas recovery and separation device and method. The device comprises a reaction kettle body (1) and a kettle cover (8) fixed to the top of the reaction kettle body (1) by means of bolts, wherein a heating mechanism (9) for heating is provided inside the reaction kettle body (1); a reflux pipe (5) is welded to and is in communication with the side wall of the kettle cover (8); a transition box (10) is fixed to the inner wall of the reaction kettle body (1); the other end of the reflux pipe (5) is inserted into the reaction kettle body (1) and is then connected to the transition box (10); and a gas output pipe (2) is fixed to and is in communication with the side wall of the transition box (10), and the other end of the gas output pipe (2) is connected to an electromagnetic three-way valve (4). By providing the transition box (10), an evaporated gas can exchange heat with a mixed liquid inside the reaction kettle body (1) again, thereby increasing the purity of separation and also achieving the recovery of a certain amount of energy.

Description

Laser gas recovery separation device and method thereof TECHNICAL FIELD

[0001] The present application relates to the technical field of distillation, in particular to a laser gas recovery separation device and method thereof. BACKGROUND

[0002] Neon gas is used in scientific research, chips, medicine and high-tech industries, especially with the rapid development of chip industry and other industries, neon gas is consumed in large quantities, neon gas can be used to produce neon laser, which is used in scientific research, medical treatment and material processing fields. This feature makes helium an important element in the field of high-tech manufacturing. Neon gas mixed with krypton gas or neon gas mixed with argon gas, xenon gas in a certain proportion to obtain a specific wavelength of laser gas is applied to chip lithography machines.

[0003] The content of neon gas in air is only 18.18 x 10 -6 The separation process of neon and helium with 99.9999% purity of neon gas is complex, resulting in high cost of laser gas supply. After the use of the lithography machine, the laser gas is enriched with neon, krypton, xenon, argon and part of hydrogen according to different laser gas varieties. During the use of the lithography machine, the neon gas is almost not lost, and through recycling and separation, it becomes an optional item for chip factories.

[0004] According to the search, the patent with the patent number CN210434007U discloses an industrial gas distillation device, which comprises a support plate and a support frame, the support frame is symmetrically arranged at the bottom end of the support plate, a distillation kettle is arranged at the left top end of the support plate, a ring type electric heating plate is arranged at the lower part of the inner cavity of the distillation kettle, a slag liquid outlet pipe is arranged at the bottom of the distillation kettle, a valve is arranged on the slag liquid outlet pipe, and a stirring rod is rotatably arranged at the middle of the top wall of the inner cavity of the distillation kettle.

[0005] The above patent has the following disadvantages: it directly condenses the gas, but when the liquid mixture is heated, uneven heating may occur, for example, the temperature near the heat source is higher, and the temperature far from the heat source is lower. This will cause some liquid with high temperature to evaporate and mix with impurities with other boiling points, so that the separation purity is not enough after distillation and condensation.

[0006] Therefore, the present application provides a laser gas recovery separation device and method thereof. SUMMARY

[0007] The purpose of the present application is to solve the problems existing in the prior art, and to provide a laser gas recovery separation device and method thereof.

[0008] In order to achieve the above purpose, the present application adopts the following technical scheme:

[0009] A laser gas recovery and separation device, the laser gas being a mixed gas of neon, krypton, xenon, argon and hydrogen, the laser gas recovery and separation device comprising a reactor body and a cover fixed to the top of the reactor body by bolts,

[0010] The inside of the reactor body is provided with a heating mechanism for heating;

[0011] The side wall of the cover is welded and communicated with a reflux pipe, the inner wall of the reactor body is fixed with a transition box, the other end of the reflux pipe is inserted into the inside of the reactor body and connected to the transition box, the side wall of the transition box is fixed and communicated with a gas outlet pipe, the other end of the gas outlet pipe is connected with an electromagnetic three-way valve, one of the outlets of the electromagnetic three-way valve is connected with another electromagnetic three-way valve through a connecting pipe, and the other outlet of the electromagnetic three-way valve connected to the gas outlet pipe and the two outlets of the electromagnetic three-way valve connected to the tail end of the connecting pipe are both connected with a storage tank through a condenser.

[0012] Preferably, the electromagnetic three-way valve comprises a valve body and a valve core slidingly connected to the inner wall of the valve body, one side of the valve body is provided with an inlet flow channel, the other side of the valve body is provided with two outlet flow channels, the inner wall of the valve core is provided with two transition flow channels corresponding to the outlet flow channels and the inlet flow channel, and the two transition flow channels are communicated with each other.

[0013] Further, one side of the valve core is fixed with a permanent magnet, the inner wall of the valve body is fixed with an electromagnet arranged opposite to the permanent magnet, the end surface of the valve core is buckled with a spring two, the other end of the spring two is buckled to the inner wall of the valve body, and the opposite side of the electromagnet and the permanent magnet has the same magnetic pole.

[0014] Based on the foregoing scheme, the other side of the valve core is fixed with a valve rod, the side wall of the valve rod is provided with two groups of clamping grooves, the inner wall of the valve body is slidingly connected with an arc head clamping rod matched with the clamping grooves, the end of the arc head clamping rod is buckled with a spring one, and the other end of the spring one is buckled to the inner wall of the valve body.

[0015] In the foregoing scheme, the tail end side wall of the connecting pipe is fixedly embedded with two non-contact sharp electrodes one, and the tail end side wall of the gas outlet pipe is fixedly embedded with two non-contact sharp electrodes two.

[0016] As a further scheme of the present application, the sharp electrodes one and the sharp electrodes two are both connected with a high-voltage power supply, the electromagnet of the electromagnetic three-way valve connected to the tail end of the gas outlet pipe is connected in series with the two sharp electrodes two, and the electromagnet of the electromagnetic three-way valve connected to the tail end of the connecting pipe is connected in series with the two sharp electrodes one.

[0017] Meanwhile, the output voltage of the high-voltage power supply connected to the tip electrode II is less than 21.56 eV and greater than 13.598 eV, and the output voltage of the high-voltage power supply connected to the tip electrode I is less than 21.56 eV and greater than 15.759 eV.

[0018] As a preferred embodiment of the present application: the heating mechanism comprises a planetary wheel, a sun wheel and a gear ring, the sun wheel is rotationally connected to the bottom of the reaction kettle body, the gear ring is fixed to the inner wall of the reaction kettle body, the planetary wheel is engaged with the opposite side of the sun wheel and the gear ring, the top of the planetary wheel is fixed with a planetary shaft, the top of the planetary shaft is fixed with a heating plate, the top of the sun wheel is fixed with a stirring frame, and the outer wall of the bottom of the reaction kettle body is fixed with a motor through bolts, and the output shaft of the motor is connected to the inner wall of the sun wheel through a key.

[0019] Meanwhile, the inner wall of the reaction kettle body is fixed with a sealing plate, the outer wall of the planetary shaft is rotationally connected with a same planetary frame I, and a mechanical seal is arranged at the rotational connection between the planetary shaft and the planetary frame I, and the planetary frame I and the sealing plate are matched with each other through sawtooth protrusions.

[0020] As a more preferred embodiment of the present application: the bottom outer wall of a plurality of planetary shafts is rotationally connected with a same planetary frame II, the side wall of the planetary shaft is fixed with a conductive ring II in contact with a spring electrode I, the conductive ring II is fixed to the outer wall of the planetary frame II, the outer wall of the conductive ring II is fixed with a spring electrode II, the inner wall of the reaction kettle body is fixed with a conductive ring I in contact with the spring electrode II, and the conductive ring I is connected to a power supply, and the spring electrode I is electrically connected to the heating plate.

[0021] A laser gas recovery and separation method, comprising the following steps:

[0022] S1: after the mixed gas is cooled and fully liquefied, the mixed gas is input into a reaction kettle body;

[0023] S2: start the motor to perform stirring heating;

[0024] S3: start the power supply connected to the conductive ring I;

[0025] S4: subsequently, neon gas, gas higher than the boiling point of neon gas and gas lower than the boiling point of neon gas are respectively distilled and separated.

[0026] The present application has the following beneficial effects:

[0027] 1. The present application, by setting the transition box, the evaporated gas can be exchanged with the mixed liquid in the reactor body again, thereby realizing the purification function, increasing the purity of separation, and the evaporation of the gas and the mixed liquid in the reactor body also realizes the heating function of the liquid, thereby realizing a certain amount of energy recovery.

[0028] 2. The present application, by setting the arc head clamping rod and the clamping groove, two groups of clamping grooves correspond to two stations of the electromagnetic three-way valve respectively, so as to ensure the stability of the station state by using the limiting action of the arc head clamping rod and the clamping groove, and the sealing effect is ensured by setting the sealing ring, thereby further increasing the separation purity.

[0029] 3. The present application, by setting the arc head clamping rod and the clamping groove, two groups of clamping grooves correspond to two stations of the electromagnetic three-way valve respectively, so as to ensure the stability of the station state by using the limiting action of the arc head clamping rod and the clamping groove, and the sealing effect is ensured by setting the sealing ring, thereby further increasing the separation purity.

[0030] 4. The present application, by setting the planet wheel, the sun gear and the gear ring, on the one hand, the liquid can be stirred, on the other hand, the heating plate as the heating source can have two movements relative to the liquid, thereby increasing the uniformity of the contact between the heating plate and the liquid, increasing the uniformity of heating, and effectively preventing the defect of low separation purity caused by local uneven heating.

[0031] 5. The present application, by setting the spring electrode one and the conductive ring two, the spring electrode two and the conductive ring one, adopting double-layer transition form to offset the rotation and revolution movement of the heating plate respectively, thereby effectively preventing the risk of wire winding and breakage. BRIEF DESCRIPTION OF DRAWINGS

[0032] Fig. 1 is a schematic diagram of the overall structure of a laser gas recovery and separation device according to the present application;

[0033] Fig. 2 is a schematic diagram of the cross-sectional structure of a laser gas recovery and separation device according to the present application;

[0034] Fig. 3 is a schematic diagram of the pipeline structure of a laser gas recovery and separation device according to the present application;

[0035] Fig. 4 is a schematic diagram of the electromagnetic three-way valve structure of a laser gas recovery and separation device according to the present application;

[0036] Fig. 5 is a schematic diagram of the cross-sectional structure of the electromagnetic three-way valve of a laser gas recovery and separation device according to the present application before moving;

[0037] Fig. 6 is a schematic diagram of the cross-sectional structure of the electromagnetic three-way valve of a laser gas recovery and separation device according to the present application after moving;

[0038] Fig. 7 is a schematic diagram of the installation position structure of the tip electrode one and the tip electrode two of a laser gas recovery and separation device according to the present application;

[0039] Figure 8 is a schematic diagram of the heating mechanism structure of a laser gas recovery separation device according to the present application;

[0040] Figure 9 is an enlarged schematic diagram of part A in Figure 8 of a laser gas recovery separation device according to the present application;

[0041] Figure 10 is a schematic diagram of the structure of the conductive ring one, the conductive ring two, the spring electrode one and the spring electrode two of a laser gas recovery separation device according to the present application;

[0042] Figure 11 is a flowchart of a laser gas recovery separation method according to the present application.

[0043] In the figures: 1, reactor body; 2, gas outlet pipe; 3, connecting pipe; 4, electromagnetic three-way valve; 5, backflow pipe; 6, blocking cover; 7, feed inlet; 8, cover; 9, heating mechanism; 10, transition box; 11, valve body; 12, transition flow channel; 13, valve core; 14, sealing ring; 15, valve rod; 16, electromagnet; 17, permanent magnet; 18, spring one; 19, arc head clamping rod; 20, clamping groove; 21, tip electrode one; 22, tip electrode two; 23, stirring frame; 24, heating plate; 25, planet carrier one; 26, planet wheel; 27, planet shaft; 28, sun wheel; 29, motor; 30, gear ring; 31, sealing plate; 32, sawtooth protrusion; 33, conductive ring one; 34, conductive ring two; 35, spring electrode one; 36, spring electrode two; 37, planet carrier two; 38, spring two. DETAILED DESCRIPTION

[0044] The technical solutions of the present application will be described in further detail below in conjunction with specific embodiments.

[0045] Embodiments of the present application will be described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the accompanying drawings are exemplary and are only used to explain the present application and cannot be understood as limiting the present application.

[0046] Example 1:

[0047] A laser gas recovery separation device, the laser gas being a mixture of neon, krypton, xenon, argon and hydrogen, as shown in Figures 1-10, the laser gas recovery separation device comprising a reactor body 1 and a cover 8 fixed to the top of the reactor body 1 by bolts, the inside of the reactor body 1 being provided with a heating mechanism 9 for heating.

[0048] The side wall of the kettle cover 8 is welded and communicated with the reflux pipe 5, the inner wall of the reaction kettle body 1 is fixed with the transition box 10, the other end of the reflux pipe 5 is inserted into the inside of the reaction kettle body 1 and connected to the transition box 10, the side wall of the transition box 10 is fixed and communicated with the gas outlet pipe 2, the other end of the gas outlet pipe 2 is connected with an electromagnetic three-way valve 4, one of the outlets of the electromagnetic three-way valve 4 is connected with another electromagnetic three-way valve 4 through the connecting pipe 3, and the other outlet of the electromagnetic three-way valve 4 connected with the gas outlet pipe 2 and the two outlets of the electromagnetic three-way valve 4 connected with the tail end of the connecting pipe 3 are both connected with the storage tank through the condenser.

[0049] The side wall of the kettle cover 8 is provided with the feed inlet 7, and the outer wall of the feed inlet 7 is fixed with the plug cover 6 through bolts.

[0050] In use, the mixed gas is fully liquefied by cooling and then input into the reaction kettle body 1, and then heated by the heating mechanism 9. In the heating process, the gas with a higher boiling point than neon gas is preferentially evaporated. At this time, the electromagnetic three-way valve 4 connected to the tail end of the gas outlet pipe 2 is controlled to make the gas outlet pipe 2 not communicate with the connecting pipe 3, so that the gas enters one of the condensers through the electromagnetic three-way valve 4 and then enters the storage tank after condensation. Continue to heat, and after the temperature of the mixed system rises, neon gas is evaporated. At this time, the electromagnetic three-way valve 4 connected to the tail end of the gas outlet pipe 2 is connected with the connecting pipe 3, and the neon gas is stored in the storage tank after condensation through the other outlet of the electromagnetic three-way valve 4. Until the neon gas is completely evaporated, it is condensed and stored from the other outlet of the electromagnetic three-way valve 4, and in this process, the evaporated gas enters the reflux pipe 5 and then passes through the reaction kettle body 1 again, and exchanges heat with the mixed liquid in the reaction kettle body 1. Since the temperature of the entire mixed liquid is near the boiling point of the evaporated gas during evaporation, even if there is uneven heating and a small amount of gas with a high boiling point is evaporated, it will exchange heat with the liquid in the reaction kettle body 1 and be directly condensed and stored in the transition box 10. Until the temperature of the mixed liquid further rises, the liquid in the transition box 10 is heated and evaporated, and then enters the subsequent condensation and storage step together with the gas outlet pipe 2.

[0051] The device, by setting the transition box 10, the evaporated gas can exchange heat with the mixed liquid in the reaction kettle body 1 again, thereby realizing the purification function and increasing the purity of separation. At the same time, the heat exchange between the evaporated gas and the mixed liquid in the reaction kettle body 1 also realizes the heating function of the liquid, thereby realizing a certain amount of energy recovery.

[0052] In order to solve the switching problem; as shown in Figures 4, 5, the electromagnetic three-way valve 4 comprises a valve body 11 and a valve core 13 slidingly connected to the inner wall of the valve body 11, one side of the valve body 11 is provided with an inlet flow channel, the other side of the valve body 11 is provided with two outlet flow channels, the inner wall of the valve core 13 is provided with two transition flow channels 12 corresponding to the outlet flow channels and the inlet flow channel, and the two transition flow channels 12 are in communication with each other.

[0053] The outer wall of the valve core 13 on both sides of the transition flow channel 12 is fixed with a sealing ring 14.

[0054] One side of the valve core 13 is fixed with a permanent magnet 17, the inner wall of the valve body 11 is fixed with an electromagnet 16 arranged opposite to the permanent magnet 17, and the opposite side of the electromagnet (16) and the permanent magnet (17) has the same magnetic pole.

[0055] The other side of the valve core 13 is fixed with a valve rod 15, the side wall of the valve rod 15 is provided with two groups of clamping grooves 20, the inner wall of the valve body 11 is slidingly connected with an arc head clamping rod 19 which can cooperate with the clamping grooves 20, the end of the arc head clamping rod 19 is buckled with a spring I 18, and the other end of the spring I 18 is buckled to the inner wall of the valve body 11.

[0056] The end surface of the valve core 13 is buckled with a spring II, and the other end of the spring II is buckled to the inner wall of the valve body 11.

[0057] When the electromagnet 16 has current passing through, the electromagnet 16 will generate a magnetic field, thereby generating magnetic repulsion between the electromagnet 16 and the permanent magnet 17, at this time the valve rod 15 moves against the limiting action of the arc head clamping rod 19 on the clamping grooves 20, so that the valve core 13 moves, at this time based on Figure 5:

[0058] Before moving: the top of the left transition flow channel 12 is in communication with the inlet flow channel, and the bottom of the right transition flow channel 12 is in communication with the right outlet flow channel;

[0059] After moving, the bottom of the left transition flow channel 12 is in communication with the outlet flow channel, and the top of the right transition flow channel 12 is in communication with the inlet flow channel; thereby realizing the switching of the working position.

[0060] The device, by arranging the arc head clamping rod 19 and the clamping grooves 20, the two groups of clamping grooves 20 correspond to the two working positions of the electromagnetic three-way valve 4, thereby the limiting action of the arc head clamping rod 19 and the clamping grooves 20 can ensure the stability of the working position state, in addition, by arranging the sealing ring 14, it can ensure the sealing effect, thereby further increasing the separation purity.

[0061] In order to solve the problem of automatic control; as shown in Figure 6, the tail end side wall of the connecting pipe 3 is fixedly embedded with two non-contact sharp electrodes I 21, and the tail end side wall of the gas outlet pipe 2 is fixedly embedded with two non-contact sharp electrodes II 22.

[0062] The tip electrode one 21 and the tip electrode two 22 are connected with high-voltage power supply, the electromagnet 16 of the electromagnetic three-way valve 4 connected to the tail end of the outlet pipe 2 is connected in series with the two tip electrode two 22, and the electromagnet 16 of the electromagnetic three-way valve 4 connected to the tail end of the connecting pipe 3 is connected in series with the two tip electrode one 21.

[0063] Since the mixed liquid is neon, krypton, xenon, argon and hydrogen, the boiling point and ionization voltage are as follows:

[0064] From the above table, the gas with a boiling point higher than neon is krypton, xenon and argon, and the gas with a boiling point lower than neon is hydrogen. According to the ionization voltage, in this embodiment, the output voltage of the high-voltage power supply connected to the tip electrode two 22 is less than 21.56eV and greater than 13.598eV, and at the same time, the output voltage of the high-voltage power supply connected to the tip electrode one 21 is less than 21.56eV and greater than 15.759eV.

[0065] The specific switching principle is as follows:

[0066] ①: In the early stage of heating, hydrogen with a lower boiling point is evaporated first. Since the voltage of the tip electrode two 22 is between 21.56eV and 13.598eV, hydrogen will be partially ionized, causing an electric current to flow in the electromagnet 16, thereby causing the valve core 13 connected to the tail end of the outlet pipe 2 to move away from the electromagnet 16 due to magnetic repulsion, and spring two 38 is compressed. Until the hydrogen is evaporated, the temperature of the entire mixed liquid system rises to the boiling point of neon, and neon is evaporated. When the neon gas passes through the tail end of the outlet pipe 2, the voltage between the tip electrode two 22 is too low to ionize the neon gas, so there is no current in the electromagnet 16, and the valve core 13 is reset by the elastic force of spring two 38, and the channel is switched.

[0067] ②: After the channel is switched, the outlet pipe 2 is connected to the connecting pipe 3, and neon gas enters the connecting pipe 3. At this time, since the voltage of the tip electrode one 21 is also lower than the ionization voltage of neon, the neon gas will not be ionized, and the neon gas will be condensed and stored after passing through one of the flow channels of the electromagnetic three-way valve 4.

[0068] ③: Until the neon gas is evaporated, the temperature of the entire mixed liquid system is further increased, and the remaining gas is evaporated. When the gas enters the tail end of the connecting pipe 3, the gas between the tip electrode one 21 is ionized, thereby causing an electric current to flow in the electromagnet 16 of the electromagnetic three-way valve 4 connected to the tail end of the connecting pipe 3, and the valve core 13 at this position is switched.

[0069] The device, by the characteristics of the boiling point and ionization voltage of the gas, carries out targeted circuit design, so as to realize the automatic switching function of the two electromagnetic three-way valves 4 by the difference of the ionization voltage.

[0070] In order to solve the heating problem; as shown in Figures 7, 8, 9, the heating mechanism 9 comprises a planetary gear 26, a sun gear 28 and a ring gear 30, the sun gear 28 is rotatably connected to the bottom of the reactor body 1, the ring gear 30 is fixed to the inner wall of the reactor body 1, the planetary gear 26 is engaged with the opposite side of the sun gear 28 and the ring gear 30, the top of the planetary gear 26 is fixed with a planetary shaft 27, the top of the planetary shaft 27 is fixed with a heating plate 24, the top of the sun gear 28 is fixed with a stirring frame 23, and the outer wall of the bottom of the reactor body 1 is fixed with a motor 29 through bolts, and the output shaft of the motor 29 is connected to the inner wall of the sun gear 28 through a key.

[0071] When the motor 29 starts, it can drive the sun gear 28 to rotate, thereby driving the stirring frame 23 to rotate and stir the liquid, at the same time, the rotation of the sun gear 28 can drive the planetary gear 26 to rotate and revolve, thereby making the heating plate 24 rotate along the axis of the sun gear 28 while rotating.

[0072] The device, by setting the planetary gear 26, the sun gear 28 and the ring gear 30, etc., can realize the stirring of the liquid on the one hand, and also make the heating plate 24 as a heating source have two movements relative to the liquid, thereby increasing the uniformity of the contact between the heating plate 24 and the liquid, increasing the uniformity of heating, and effectively inhibiting the defects of low separation purity caused by local uneven heating.

[0073] In order to solve the sealing problem; as shown in Figure 8, the inner wall of the reactor body 1 is fixed with a sealing plate 31, the outer wall of the planetary shaft 27 is rotatably connected with the same planetary carrier one 25, and the rotating connection between the planetary shaft 27 and the planetary carrier one 25 is provided with a mechanical seal, and the planetary carrier one 25 and the sealing plate 31 are matched with each other through the sawtooth protrusions 32.

[0074] In order to solve the safety problem, as shown in Figure 9, the bottom outer wall of a plurality of planetary shafts 27 is rotatably connected with the same planetary carrier two 37, the side wall of the planetary shaft 27 is fixed with a conductive ring two 34, the outer wall of the planetary carrier two 37 is fixed with a conductive ring two 34 which is in contact with a spring electrode one 35, the outer wall of the conductive ring two 34 is fixed with a spring electrode two 36, the inner wall of the reactor body 1 is fixed with a conductive ring one 33 which is in contact with the spring electrode two 36, and the conductive ring one 33 is connected to a power supply, and the spring electrode one 35 is electrically connected to the heating plate 24.

[0075] Since the heating plate 24 has multiple movements, and it needs to be connected to the power supply to generate heat, when using wires to connect, wire entanglement and breakage may occur, based on this, the device sets the spring electrode one 35 and the conductive ring two 34, the spring electrode two 36 and the conductive ring one 33, adopts double-layer transition form to offset the rotation and revolution of the heating plate 24 respectively, thereby effectively preventing the risk of wire entanglement and breakage.

[0076] In use, the mixed gas is cooled and fully liquefied and then input into the reaction kettle body 1, and then heated by the heating mechanism 9. In the heating process, the gas with a boiling point higher than that of neon gas is preferentially evaporated. At this time, the electromagnetic three-way valve 4 connected to the tail end of the outlet pipe 2 is controlled to a position such that the outlet pipe 2 is not in communication with the connecting pipe 3. The gas will pass through the electromagnetic three-way valve 4 into one of the condensers and then into the storage tank after condensation. Continue to heat, and after the temperature of the mixed system rises, neon gas is evaporated. At this time, the electromagnetic three-way valve 4 connected to the tail end of the outlet pipe 2 is connected to the connecting pipe 3, and the neon gas passes through one of the outlets of the other electromagnetic three-way valve 4 after condensation and is stored in the storage tank. After the neon gas is evaporated, it is condensed and stored from the other outlet of the electromagnetic three-way valve 4, and in this process, the evaporated gas enters the reflux pipe 5 and then passes through the reaction kettle body 1 again along the reflux pipe 5, and exchanges heat with the mixed liquid in the reaction kettle body 1. Since the temperature of the entire mixed liquid during evaporation is near the boiling point of the evaporated gas, even if there is uneven heating and a small amount of gas with a high boiling point is evaporated, it will exchange heat with the liquid in the reaction kettle body 1 and be directly condensed and stored in the transition box 10. Until the temperature of the mixed liquid further rises, the liquid in the transition box 10 is heated and evaporated, and then enters the subsequent condensation and storage step along with the outlet pipe 2.

[0077] Embodiment 2:

[0078] A laser gas recovery and separation method, as shown in FIG. 11, includes the following steps:

[0079] S1: The mixed gas is cooled and fully liquefied and then input into the reaction kettle body 1;

[0080] S2: Start the electric motor 29 and perform stirring heating;

[0081] S3: Start the power supply connected to the conductive ring 33;

[0082] S3: Subsequently, neon gas, gas with a boiling point higher than that of neon gas, and gas with a boiling point lower than that of neon gas are separately distilled and separated.

[0083] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can make equivalent replacements or changes within the technical scope disclosed by the present application and according to the technical solution and inventive concept of the present application, which should be covered within the protection scope of the present application.

Claims

1. A laser gas recovery separation device, the laser gas being a mixture of neon, krypton, xenon, argon and hydrogen, the laser gas recovery separation device comprising a reactor body (1) and a cover (8) fixed to the top of the reactor body (1) by bolts, characterized in that, a heating mechanism (9) is arranged inside the reactor body (1) for heating; a reflux pipe (5) is welded and communicated to the side wall of the cover (8), a transition box (10) is fixed to the inner wall of the reactor body (1), the other end of the reflux pipe (5) is inserted into the inside of the reactor body (1) and connected to the transition box (10), the side wall of the transition box (10) is fixed and communicated with a gas outlet pipe (2), the other end of the gas outlet pipe (2) is connected with an electromagnetic three-way valve (4), one of the outlets of the electromagnetic three-way valve (4) is connected with another electromagnetic three-way valve (4) through a connecting pipe (3), the other outlet of the electromagnetic three-way valve (4) connected to the gas outlet pipe (2) and the two outlets of the electromagnetic three-way valve (4) connected to the tail end of the connecting pipe (3) are both connected with a storage tank through a condenser; the electromagnetic three-way valve (4) comprises a valve body (11) and a valve core (13) slidably connected to the inner wall of the valve body (11), one side of the valve body (11) is provided with an inlet flow channel, the other side of the valve body (11) is provided with two outlet flow channels, the inner wall of the valve core (13) is provided with two transition flow channels (12) corresponding to the outlet flow channels and the inlet flow channel, and the two transition flow channels (12) are communicated with each other; one side of the valve core (13) is fixed with a permanent magnet (17), the inner wall of the valve body (11) is fixed with an electromagnet (16) arranged opposite to the permanent magnet (17), the end surface of the valve core (13) is buckled with a spring two, the other end of the spring two is buckled to the inner wall of the valve body (11), and the opposite side of the electromagnet (16) and the permanent magnet (17) has the same magnetic pole; the other side of the valve core (13) is fixed with a valve rod (15), the side wall of the valve rod (15) is provided with two groups of clamping grooves (20), the inner wall of the valve body (11) is slidably connected with an arc head clamping rod (19) matched with the clamping grooves (20), the end of the arc head clamping rod (19) is buckled with a spring one (18), and the other end of the spring one (18) is buckled to the inner wall of the valve body (11); the tail end side wall of the connecting pipe (3) is fixedly embedded with two non-contact sharp electrodes one (21), and the tail end side wall of the gas outlet pipe (2) is fixedly embedded with two non-contact sharp electrodes two (22); the sharp electrodes one (21) and the sharp electrodes two (22) are both connected with a high-voltage power supply, the electromagnet (16) of the electromagnetic three-way valve (4) connected to the tail end of the gas outlet pipe (2) is connected in series with the two sharp electrodes two (22), and the electromagnet (16) of the electromagnetic three-way valve (4) connected to the tail end of the connecting pipe (3) is connected in series with the two sharp electrodes one (21). The output voltage of the high-voltage power supply connected to the tip electrode two (22) is less than 21.56 eV and greater than 13.598 eV, and the output voltage of the high-voltage power supply connected to the tip electrode one (21) is less than 21.56 eV and greater than 15.759 eV.

2. A laser gas recovery separation device according to claim 1, wherein, The heating mechanism (9) comprises a planetary wheel (26), a sun wheel (28) and a gear ring (30), the sun wheel (28) is rotationally connected to the bottom of the reaction kettle body (1), the gear ring (30) is fixed to the inner wall of the reaction kettle body (1), the planetary wheel (26) is engaged with the opposite side of the sun wheel (28) and the gear ring (30), the top of the planetary wheel (26) is fixed with a planetary shaft (27), the top of the planetary shaft (27) is fixed with a heating plate (24), the top of the sun wheel (28) is fixed with a stirring frame (23), and the outer wall of the bottom of the reaction kettle body (1) is fixed with a motor (29) through bolts, and the output shaft of the motor (29) is connected to the inner wall of the sun wheel (28) through a key.

3. A laser gas recovery separation apparatus according to claim 2, wherein, The inner wall of the reaction kettle body (1) is fixed with a sealing plate (31), the outer wall of the planetary shaft (27) is rotationally connected with the same planetary carrier one (25), and the rotational connection between the planetary shaft (27) and the planetary carrier one (25) is provided with a mechanical seal, and the planetary carrier one (25) and the sealing plate (31) are matched with each other through the sawtooth protrusions (32).

4. A laser gas recovery separation apparatus according to claim 3, wherein, The bottom outer wall of a plurality of planetary shafts (27) is rotationally connected with the same planetary carrier two (37), the side wall of the planetary shaft (27) is fixed with a conductive ring two (34), the outer wall of the planetary carrier two (37) is fixed with a conductive ring two (34) in contact with a spring electrode one (35), the outer wall of the conductive ring two (34) is fixed with a spring electrode two (36), the inner wall of the reaction kettle body (1) is fixed with a conductive ring one (33) in contact with the spring electrode two (36), and the conductive ring one (33) is connected to a power supply, and the spring electrode one (35) is electrically connected to the heating plate (24).

5. A method of laser hydrogen recovery separation, which is a method of using the laser hydrogen recovery separation device according to claim 4, characterized in that, The method comprises the following steps: S1: after the mixed gas is cooled and fully liquefied, it is input into the reaction kettle body (1); S2: start the motor (29) and perform stirring heating; S3: start the power supply connected to the conductive ring one (33); S4: then, neon, gas higher than the boiling point of neon and gas lower than the boiling point of neon are respectively distilled and separated.

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