Quartz glass product molding die and quartz glass product molding method

Abstract

The present application relates to the technical field of quartz glass product production. Provided are a quartz glass product molding die and a quartz glass product molding method. The quartz glass product molding die comprises: a molding wall, a support wall and a base, wherein the molding wall, the support wall and the base are combined to form an internal space; and the internal space is provided with a plurality of partition walls, the partition walls are adapted to divide the internal space into a plurality of chambers, capillary holes are provided at the top of each chamber, and an independent air hole is provided at the bottom of each chamber. The present application solves the problems that defects exist when quartz glass products are shaped by means of gravity and a mechanical force, and that the quartz glass products shaped by means of the gravity and a mechanical force fail to meet the requirement for uniform light transmission in a semiconductor epitaxial process.

Description

Quartz glass product forming mold and quartz glass product forming method TECHNICAL FIELD

[0001] The application belongs to the technical field of quartz glass product production, and particularly relates to a quartz glass product forming mold and a quartz glass product forming method. BACKGROUND

[0002] Quartz glass products are widely used in the fields of semiconductors, photovoltaic solar energy, etc., and play an important role in diffusion, oxidation, etching, epitaxy, cleaning, etc. In the semiconductor oxidation and diffusion process, a large number of quartz boats, quartz tubes, quartz heat preservation barrels, etc. are used; in the etching process, quartz cover plates, quartz rings, etc. are used; in the epitaxy process, opaque quartz rings, Domes, etc. are used. Quartz products are used in the photovoltaic solar energy field in a similar way to the semiconductor field.

[0003] The semiconductor and photovoltaic solar energy fields have very high requirements for the machining precision of quartz products, but quartz glass is a hard and brittle material that is difficult to machine and has a high melting point. Whether through mechanical cold machining or thermal machining, a large amount of resources and energy will be consumed, and it is difficult to achieve the same size precision as metal machining, which cannot meet the requirements of the semiconductor and photovoltaic solar energy fields. In particular, special-shaped semiconductor quartz products that meet harsh use requirements have low pass rates and extremely high production costs.

[0004] In the epitaxy process of semiconductor manufacturing, Upper Dome and Lower Dome quartz products are commonly used. The main body of these two products is a curved surface or a conical surface structure. During use, the heating light will pass through the curved surface or conical surface part of the Dome to irradiate the silicon wafer. If the curved surface or conical surface part has poor machining size precision, is not uniform, or has impurities, grooves, etc. that affect light transmittance, it will cause the silicon wafer to be unevenly heated, affecting the pass rate of the epitaxy process.

[0005] The inventor found that in the prior art, curved surface or conical surface quartz products are mainly shaped by gravity or mechanical force. However, when manufacturing special-shaped semiconductor quartz products, shaping by gravity tends to cause problems such as poor size precision and uneven thickness of finished products due to the special shape of the quartz glass product. Shaping by mechanical force tends to cause poor surface appearance quality, and is accompanied by problems such as impurity defects and grooves, which cannot meet the requirements of the semiconductor epitaxy process for uniform light transmittance. SUMMARY

[0006] The application provides a quartz glass product forming mold and a quartz glass product forming method to solve the problem that quartz glass products shaped by gravity and mechanical force cannot meet the requirements of the semiconductor epitaxy process for uniform light transmittance.

[0007] The technical scheme adopted in the present application is as follows:

[0008] The first aspect of the present application provides a quartz glass product forming mold, comprising: a forming wall, a supporting wall and a base, which are combined to form an internal space; the internal space is provided with a plurality of partition walls, the partition walls are suitable for dividing the internal space into a plurality of chambers, the top of the chamber is provided with a capillary hole, and the bottom of the chamber is provided with an independent air hole.

[0009] The quartz glass product forming mold provided by the present application further comprises the following additional technical features:

[0010] According to one embodiment of the present application, the capillary hole is formed on the forming wall, and the chamber is in communication with the outside through the capillary hole.

[0011] According to one embodiment of the present application, the air hole is formed on the base, and at least one air hole is provided at the bottom of each chamber.

[0012] According to one embodiment of the present application, the quartz glass product forming mold further comprises a vacuum pump, each air hole is respectively connected to one vacuum pump, and the vacuum pump is suitable for vacuumizing the chamber.

[0013] According to one embodiment of the present application, the quartz glass product forming mold further comprises a vacuum pump, and the vacuum pump is provided with one; the vacuum pump is in communication with the air hole through a multi-way valve.

[0014] According to one embodiment of the present application, the diameter of the quartz glass product is D, the quartz glass product forming mold comprises a first chamber and a second chamber; the partition wall is an annular wall, and the outer diameter of the annular wall is d1, wherein 0.45D≤d1≤0.82D.

[0015] According to one embodiment of the present application, the diameter of the quartz glass product is D, the quartz glass product forming mold comprises a third chamber, a fourth chamber and a fifth chamber; the partition wall between the third chamber and the fourth chamber is a first annular wall, and the outer diameter of the first annular wall is d2, wherein 0.71D≤d2≤0.87D;

[0016] The partition wall between the fourth chamber and the fifth chamber is a second annular wall, and the outer diameter of the second annular wall is d3, wherein 0.45D≤d3≤0.71D.

[0017] According to one embodiment of the present application, the forming wall is a concave structure, and the concave surface faces downward; the forming wall and the supporting wall are integrally formed, and the supporting wall is sealingly connected to the base.

[0018] The second aspect embodiment of the present application provides a quartz glass product forming method based on the quartz glass product forming mold in any one of the first aspect embodiments, comprising:

[0019] Placing the quartz glass product on the quartz glass product forming mold and heating the quartz glass product to a preset forming temperature;

[0020] Performing vacuumization on the chamber until the quartz glass product completely adheres to the forming wall.

[0021] According to one embodiment of the present application, the method further comprises:

[0022] Obtaining a temperature distribution image of the quartz glass product on the forming wall, and monitoring the adhesion of the quartz glass product to the forming wall according to the temperature distribution image;

[0023] Determining a position of the adhesion that does not meet the standard based on the adhesion;

[0024] Based on the position of the adhesion that does not meet the standard, determining the chamber corresponding to the position of the adhesion that does not meet the standard;

[0025] Performing vacuumization on the chamber to make the quartz glass product completely adhere to the forming wall.

[0026] Due to the adoption of the above technical solutions, the present application has the following beneficial effects:

[0027] According to the quartz glass product molding mold provided in the first aspect of this application, quartz glass products are prepared by using a negative pressure vacuum method, thereby improving the molding quality of the products. Specifically, the quartz glass product molding mold includes a molding wall, a support wall, and a base. The molding wall supports the raw material of the quartz glass product in its initial state. After the quartz glass product is fully formed, the bottom surface of the quartz glass product is completely attached to the upper surface of the molding wall. That is, the shape of the molding wall determines the shape of the quartz glass product. The support wall is connected to the molding wall and is used to support the molding wall. The base is connected to the bottom of the support wall. After the molding wall, support wall, and base are enclosed, an internal cavity space is formed. Further, the partition wall divides the internal space into multiple chambers. The chambers are evacuated through independent air holes at the bottom of the chambers. The vacuum environment in the chambers generates a vacuum adsorption force that acts on the space formed by the quartz glass product and the molding wall through the capillary pores at the top of the chambers. Finally, the quartz glass product is adsorbed and bent along the direction of the adsorption force until the quartz glass product is completely attached to the molding wall. At the same time, the capillary pores can also adsorb air bubbles in the quartz glass product attached to the molding wall, thereby reducing air bubbles in the molded product and improving the light transmittance of the molded product. The design incorporates multiple chambers, with the molding walls facing downwards, resulting in smaller chambers and less gas inside. This allows for faster vacuuming, ultimately improving molding efficiency. Because of the negative pressure molding method, no foreign objects come into contact with the quartz glass product during the molding process, resulting in a finished product with a surface free of impurities and grooves. Furthermore, the negative pressure molding ensures even stress distribution on the quartz glass product, leading to precise dimensions and uniform thickness. Attached Figure Description

[0028] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0029] Figure 1 is a front view of a two-chamber structure quartz glass product molding die provided in an embodiment of this application;

[0030] Figure 2 is a top view of a two-chamber quartz glass product molding die provided in an embodiment of this application;

[0031] Figure 3 is a schematic diagram of capillaries provided in an embodiment of this application;

[0032] Figure 4 is a front view of the three-chamber structure quartz glass product molding die provided in the embodiment of this application;

[0033] Figure 5 is a top view of a three-chamber quartz glass product molding die provided in an embodiment of this application;

[0034] Fig. 6 is a schematic diagram of the overall structure of a quartz glass product forming mold according to an embodiment of the present application;

[0035] Fig. 7 is a schematic diagram of a quartz glass product forming method according to an embodiment of the present application.

[0036] Wherein, 1, forming wall; 2, first chamber; 3, support wall; 4, base; 5, capillary hole; 6, partition wall; 7, second chamber; 8, air hole; 9, third chamber; 10, fourth chamber; 11, fifth chamber; 12, first annular wall; 13, second annular wall. DETAILED DESCRIPTION

[0037] In order to more clearly illustrate the overall concept of the present application, the following detailed description is given with reference to the accompanying drawings.

[0038] In the following description, a number of specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced without the specific details. In other instances, well-known methods, procedures, components, and circuits have not been described in detail so as not to obscure the present application. Embodiments of the present application can be implemented by using various means, for example, hardware, software, and / or firmware. Further, embodiments of the present application are not limited to any particular programming language or type of code. The software implementation can be implemented by controlled means, such as processors or microprocessors, programmed with software code. The software code can be stored in any type of non- transitory computer-readable medium or memory media suitable for storing information. Examples of memory media include but are not limited to RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital versatile discs (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices. The software code can also be distributed over network coupled computer systems so that the computer program is stored and executed in a distributed fashion. Note that the software code can be executed by one or more of the processors or microprocessors.

[0039] In addition, in the description of the present application, it should be understood that the terms "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0040] In the present application, unless specifically defined and limited otherwise, the terms "mount", "connect", "connection", "fixed", and the like should be broadly understood, for example, can be fixed connection, can also be detachable connection, or integrated; can be mechanical connection, can also be electrical connection, or communication; can be directly connected, or indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] In this application, unless specifically defined and limited otherwise, the first feature is "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. In the description of the specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the description of the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples.

[0042] As shown in FIG. 1, the first aspect embodiment of the present application provides a quartz glass product forming mold, which comprises a forming wall 1, a support wall 3 and a base 4. The forming wall 1, the support wall 3 and the base 4 are combined to form an internal space. The internal space is provided with a plurality of partition walls 6, which are adapted to divide the internal space into a plurality of chambers. The top of the chamber is provided with a capillary hole 5, and the bottom of the chamber is provided with an independent air hole 8.

[0043] Specifically, the bottom of the internal space is the base 4, which is sealingly connected to the support wall 3 through a sealing gasket. The base 4 is used to support the support wall 3. The top of the support wall 3 is connected to the forming wall 1. The support wall 3 is used to support the forming wall 1, and the support wall 3 and the forming wall 1 are integrally formed. The forming wall 1 is a concave structure, which is used to receive the quartz glass product and shape the quartz glass product through the outer side of the forming wall 1. A plurality of partition walls 6 are arranged in the internal space. The connection between the partition wall 6 and the forming wall 1 above is sealingly connected through a sealing gasket. The connection between the partition wall 6 and the base 4 below is also sealingly connected through a sealing gasket, so as to avoid air leakage during vacuumizing. The partition wall 6 is adapted to divide the internal space into a plurality of chambers.

[0044] According to the quartz glass product forming mold provided by the first aspect of the application, the quartz glass product is prepared by adopting the negative pressure vacuumizing mode, and the forming quality of the product is improved. Specifically, the quartz glass product forming mold comprises a forming wall 1, a supporting wall 3 and a base 4, wherein the forming wall 1 is used for bearing the raw material piece of the quartz glass product in the initial state, after the quartz glass product is completely formed, the bottom surface of the quartz glass product is completely attached to the upper wall surface of the forming wall 1, that is, the shape of the forming wall 1 determines the shape of the quartz glass product, the supporting wall 3 is connected with the forming wall 1 and is used for bearing the forming wall 1, the base 4 is connected with the bottom of the supporting wall 3, and after the forming wall 1, the supporting wall 3 and the base 4 are enclosed, an internal cavity space is formed, further, the internal space is separated into multiple chambers by a separation wall 6, the chambers are vacuumized through the independent air holes 8 at the bottom of the chambers, the vacuum adsorption force generated by the vacuum environment in the chambers further acts on the space enclosed by the quartz glass product and the forming wall 1 through the capillary holes 5 at the top of the chambers, and finally the quartz glass product is deformed along the direction of the adsorption force until the raw material piece is completely attached to the forming wall 1. Multiple chambers are arranged, since the forming wall 1 is downward, the chambers are further reduced, the gas in the chambers is also reduced, and thus the vacuumizing speed is accelerated, so that the forming efficiency is finally improved. Since the negative pressure forming mode is adopted, no foreign matter contacts the quartz glass product in the forming process, and finally the surface of the finished product is free of impurities and grooves, and since the negative pressure forming is adopted, the quartz glass product is balanced in stress, and the finished product is accurate in size and uniform in thickness.

[0045] In one embodiment of the application, as shown in FIG. 2, the capillary holes 5 at the top of the chambers are formed on the forming wall 1, and the chambers are communicated with the outside through the capillary holes 5.

[0046] The capillary holes 5 are uniformly arranged on the forming wall 1, the diameter of the capillary holes is less than 2 mm, and the spacing is more than 10 mm.

[0047] The capillary holes 5 act on the space enclosed by the quartz glass product and the forming wall 1, finally the quartz glass product is deformed along the direction of the adsorption force until the quartz glass product is completely attached to the forming wall 1, and at the same time, when the quartz glass product is attached to the forming wall 1, the capillary holes 5 can further adsorb the bubbles in the quartz glass product, so as to reduce the bubbles in the formed product and improve the light transmittance of the product.

[0048] In one embodiment of the application, as shown in FIG. 1, the air holes 8 are formed on the base 4, and at least one air hole 8 is arranged at the bottom of each chamber.

[0049] As shown in FIGS. 3, 5 and 6, the multiple air holes 8 are arranged in a straight line at the bottom of each chamber; the positions of the air holes 8 in each chamber are not fixed, and the suitable positions can be selected according to the actual situation.

[0050] The independent air holes 8 at the bottom of each chamber can vacuumize the chamber, and the chamber forms a vacuum environment to generate a vacuum adsorption force.

[0051] In an embodiment of the present application, the quartz glass product forming mold further comprises a vacuum pump, and each air hole 8 is connected to a vacuum pump, and the vacuum pump is suitable for vacuumizing the chamber.

[0052] Each chamber is connected to a vacuum pump, and the vacuum degree of the corresponding chamber can be adjusted by controlling any vacuum pump. Changing the vacuum degree of the chamber makes the part of the forming wall 1 above the corresponding chamber have stronger negative pressure forming ability, so as to realize fine adjustment of the adhesion of the quartz glass product to the forming wall 1.

[0053] In an embodiment of the present application, the quartz glass product forming mold further comprises a vacuum pump, and the vacuum pump is provided with one; the vacuum pump is communicated with the air holes 8 through a multi-way valve.

[0054] Among them, the air holes 8 are multiple, and the multi-way valve can be used to open and close each air hole 8. The specific opening and closing sequence of the multi-way valve is as follows:

[0055] The multi-way valve can be fully opened, and the vacuum pump can uniformly vacuumize all the chambers through the air holes 8;

[0056] The multi-way valve can also be sequentially opened. The multi-way valve first opens the air holes 8 of the outer chambers, and the vacuum pump vacuumizes the outer chambers. After the vacuum pump finishes vacuumizing the outer chambers, the multi-way valve closes the air holes 8 of the outer chambers, and then opens the air holes 8 of the inner chambers. The vacuum pump vacuumizes the inner chambers.

[0057] At the same time, after the vacuum pump vacuumizes the outer chambers, the multi-way valve can also choose not to close the air holes 8 of the outer chambers. At this time, the air holes 8 of the inner chambers are opened, and the inner chambers and the outer chambers are simultaneously vacuumized. After vacuumizing all the chambers, the multi-way valve closes all the air holes 8.

[0058] By setting the multi-way valve to control the opening and closing of the multiple air holes 8, and using multiple ways of opening and closing the air holes 8 by the multi-way valve, the speed of vacuumizing the multiple chambers can be greatly improved, thereby improving the efficiency of forming the quartz glass product.

[0059] In an embodiment of the present application, the present application is aimed at Dome type circular products, and the size of the chamber is particularly set, and the relationship between the chamber size and the size of the quartz glass product to be processed is determined. Assuming that the diameter of the quartz glass product to be processed is D; in actual use, the present application can be extended to a multi-chamber structure as needed.

[0060] As shown in FIG. 1 and FIG. 3, in the circular two-chamber case, the quartz glass product forming mold includes a first chamber 2 and a second chamber 7; the partition wall 6 is an annular wall, and the outer diameter of the annular wall is d1, where 0.45D≤d1≤0.82D.

[0061] As shown in FIG. 4 and FIG. 5, in the circular three-chamber case, the quartz glass product forming mold includes a third chamber 9, a fourth chamber 10, and a fifth chamber 11; the partition wall between the third chamber 9 and the fourth chamber 10 is a first annular wall 12, and the outer diameter of the first annular wall 12 is d2, where 0.71D≤d2≤0.87D;

[0062] The partition wall between the fourth chamber 10 and the fifth chamber 11 is a second annular wall 13, and the outer diameter of the second annular wall 13 is d3, where 0.45D≤d3≤0.71D.

[0063] By determining the size relationship between the chamber and the quartz glass product to be processed, the Dome type circular product can be quickly formed under negative pressure, and the size of the formed product is accurate and the thickness is uniform. The areas of the various annular regions are substantially the same, which ensures that the gas hole diameter and density are the same, that is, the exhaust cross-sectional area of each annular region is substantially the same. Under the same vacuum negative pressure condition, the same exhaust cross-sectional area will obtain the same deformation speed.

[0064] In an embodiment of the present application, the forming wall 1 is a concave structure, and the direction of the concave surface is downward; the forming wall 1 and the supporting wall 3 are integrally formed, and the supporting wall 3 is sealingly connected with the base 4.

[0065] The forming wall 1 is used to receive the quartz glass product and shape the quartz glass product through the outer side surface of the forming wall 1; the supporting wall 3 is used to support the top forming wall 1, and the base 4 is sealingly connected with the supporting wall 3 and is used as the bottom of the entire internal space.

[0066] The supporting wall 3 and the forming wall 1 are integrally formed, which is beneficial to improve the strength of the structure and avoid the collapse of the structure when bearing the quartz glass product; the supporting wall 3 and the base 4 are sealingly connected through the sealing gasket, which is beneficial to improve the overall sealing performance and improve the efficiency of vacuumizing the chamber.

[0067] As shown in FIG. 7, the second aspect embodiment of the present application provides a quartz glass product forming method based on the quartz glass product forming mold in any one of the above-mentioned first aspect embodiments, which includes:

[0068] Step 100, placing the quartz glass product on the quartz glass product forming mold and heating the quartz glass product to a preset forming temperature.

[0069] Step 200, vacuumizing the chamber until the quartz glass product completely adheres to the forming wall 1.

[0070] In step 100, the preset forming temperature is 900-1000℃; when the quartz glass product is at 900-1000℃, the viscosity is large, and the quartz glass product at this time is suitable for forming.

[0071] In step 200, there are various ways to perform the step of vacuumizing the chamber, specifically:

[0072] When each air hole 8 is connected with a vacuum pump respectively, the order of vacuumizing from the outer chamber to the inner chamber can be selected;

[0073] All chambers can also be simultaneously vacuumized;

[0074] The order of vacuumizing from the inner chamber to the outer chamber can also be selected.

[0075] When all air holes 8 are connected with a vacuum pump, the multi-way valve can be fully opened, and the vacuum pump uniformly vacuumizes all chambers through the air holes 8;

[0076] The multi-way valve can also be opened in the order from outside to inside, i.e., the multi-way valve first opens the air holes 8 of the outer chamber, the vacuum pump vacuumizes the outer chamber, after the vacuum pump finishes vacuumizing the outer chamber, the multi-way valve closes the air holes 8 of the outer chamber, then opens the air holes 8 of the inner chamber, and the vacuum pump vacuumizes the inner chamber;

[0077] Meanwhile, after the vacuum pump vacuumizes the outer chamber, the multi-way valve can also choose not to close the air holes 8 of the outer chamber, at this time, the air holes 8 of the inner chamber are opened, and the inner chamber and the outer chamber are simultaneously vacuumized, after all chambers are vacuumized, the multi-way valve closes all air holes 8.

[0078] The multi-way valve can also be opened in the order from inside to outside, i.e., the multi-way valve first opens the air holes 8 of the inner chamber, the vacuum pump vacuumizes the inner chamber, after the vacuum pump finishes vacuumizing the inner chamber, the multi-way valve closes the air holes 8 of the inner chamber, then opens the air holes 8 of the outer chamber, and the vacuum pump vacuumizes the outer chamber;

[0079] Meanwhile, after the vacuum pump vacuumizes the inner chamber, the multi-way valve can also choose not to close the air holes 8 of the inner chamber, at this time, the air holes 8 of the outer chamber are opened, and the inner chamber and the outer chamber are simultaneously vacuumized, after all chambers are vacuumized, the multi-way valve closes all air holes 8.

[0080] According to the quartz glass product forming method of the quartz glass product forming mold provided in the second aspect of the application, the chamber is vacuumed in multiple ways, the most efficient way can be selected to vacuum the chamber according to different situations, the rate of vacuuming the chamber can be greatly improved, and the rapid forming of the quartz glass product is realized.

[0081] In one embodiment of the application, the method further comprises:

[0082] The infrared thermal imager is used to obtain a temperature distribution diagram of the quartz glass product forming process, and the adhesion of the quartz glass product to the forming wall 1 is monitored according to the temperature distribution diagram;

[0083] Specifically, the thermal imager is aimed at the forming wall 1, temperature data is continuously collected in the process of forming the quartz glass product to form a temperature distribution diagram, the adhesion of the quartz glass product to the forming wall 1 is determined according to the temperature distribution diagram, and the uniformity of the quartz glass product flow and the cooling rate are indirectly evaluated by analyzing the change of the temperature distribution with time.

[0084] The adhesion of the quartz glass product to the forming wall 1 is determined based on the adhesion.

[0085] Based on the adhesion, the adhesion of the quartz glass product to the forming wall 1 is determined based on the adhesion.

[0086] The corresponding chamber is vacuumed to make the quartz glass product completely adhere to the forming wall 1.

[0087] The temperature distribution diagram of the overall forming process of the quartz glass product is obtained by the thermal imager, the adhesion of the quartz glass product to the forming wall 1 in the forming process can be clearly understood, for the parts with substandard adhesion, the parts are further vacuumed through the corresponding chamber, the overall adhesion can be kept consistent, so that the thickness of the obtained product is uniform, and the requirement of the semiconductor epitaxial process on uniform light transmission is met.

[0088] The places not mentioned in the application can be realized by using or referring to the existing technology.

[0089] Each embodiment in the specification is described in a progressive manner, and the same or similar parts between each embodiment can be referred to each other, and each embodiment mainly describes the difference from other embodiments.

[0090] The above only describes the embodiments of the application and is not used to limit the application. The application can have various changes and modifications for those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the application shall be included in the scope of the claims of the application.

Claims

1. A quartz glass product molding mold, characterized in that, include: The molded wall, the supporting wall, and the base, together form an internal space; The internal space is provided with multiple partition walls, which are adapted to divide the internal space into multiple chambers. The top of each chamber is provided with capillary pores, and the bottom of each chamber is provided with independent air vents.

2. The quartz glass product molding die according to claim 1, characterized in that, The capillaries are formed on the molded wall, and the chamber communicates with the outside through the capillaries.

3. The quartz glass product molding die according to claim 1, characterized in that, The air pores are formed on the base, and at least one air pore is provided at the bottom of each chamber.

4. The quartz glass product molding die according to claim 3, characterized in that, The quartz glass product forming mold also includes a vacuum pump, and each of the air holes is connected to a vacuum pump, which is suitable for evacuating the chamber.

5. A quartz glass product molding die according to claim 3, characterized in that, The quartz glass product forming mold also includes a vacuum pump, and one vacuum pump is provided; the vacuum pump is connected to the air hole through a multi-way valve.

6. A quartz glass product forming mold according to claim 1, characterized in that, The diameter of the quartz glass product is D, and the quartz glass product forming mold includes a first chamber and a second chamber; the partition wall is an annular wall, and the outer diameter of the annular wall is d1, wherein 0.45D≤d1≤0.82D.

7. A quartz glass product molding die according to claim 1, characterized in that, The diameter of the quartz glass product is D, and the quartz glass product forming mold includes a third chamber, a fourth chamber, and a fifth chamber; the partition wall between the third chamber and the fourth chamber is a first annular wall, and the outer diameter of the first annular wall is d2, wherein 0.71D≤d2≤0.87D; The partition wall between the fourth chamber and the fifth chamber is a second annular wall, and the outer diameter of the second annular wall is d3, wherein 0.45D≤d3≤0.71D.

8. A quartz glass product molding die according to any one of claims 1 to 7, characterized in that, The molded wall has a concave structure with the concave surface facing downwards; the molded wall and the supporting wall are integrally molded, and the supporting wall is sealed to the base.

9. A method for forming quartz glass products based on a quartz glass product forming mold as described in any one of claims 1 to 8, characterized in that, include: The quartz glass product is placed on the quartz glass product forming mold, and the quartz glass product is heated to the preset forming temperature; The chamber is evacuated until the quartz glass product is completely adhered to the molded wall.

10. A method for forming quartz glass products according to claim 9, characterized in that, The method also includes: An infrared thermal imager is used to acquire a temperature distribution map of the quartz glass product forming process, and the adhesion between the quartz glass product and the forming wall is monitored based on the temperature distribution image. Based on the degree of fit, determine the areas where the fit is not up to standard; Based on the areas where the fit is substandard, determine the cavity corresponding to the areas where the fit is substandard; The corresponding chambers are evacuated to ensure that the quartz glass product is completely fitted to the molded wall.

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