Dynamic level check system, substrate transport apparatus including the system, and method therefor

Abstract

A substrate transport apparatus includes a base, an articulated robot arm, a controller, and a level detector. The articulated robot arm is connected to the base, has an end effector thereon, and is articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function. The controller is connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function. The level detector is communicably coupled to the controller, and disposed on the articulated robot arm so as to effect determination of articulated robot arm level throughout a range of motion of the articulated robot arm that effects the predetermined operating function.

Description

DYNAMIC LEVEL CHECK SYSTEM, SUBSTRATE TRANSPORT APPARATUS INCLUDING THE SYSTEM, AND METHOD THEREFORCROSS-REFERENCE TO RELATED APPLICATION(S)

[0001] This application is a non-provisional of and claims the benefit of United States provisional patent application number 63 / 678,869 filed on August 2, 2024, the disclosure of which is incorporated herein by reference in its entirety.BACKGROUND1. Field

[0002] The present disclosure generally relates to substrate transports, and more particularly, to substrate transport set up and monitoring.2. Brief Description of Related Developments

[0003] Generally, substrate transport arm levelness is determined with portable electronic levels that are placed on portions of the substrate transport arm during setup of the substrate transport arm. The levels are removed for substrate transport arm operation. Substrate transport arm levelness may also be determined with level sensors that require hardware or interaction with features off-board the substrate transport arm (e.g., such as distance measuring sensors including time-of-flight and reflected beam level sensors, and capacitive level sensors that measure level from a calibrated base or datum feature). These level sensors requiring hardware or interaction with features off-board the substrate transport arm may only provide transport arm level determination at a specific position of the substrate transport arm. Typically, the levelness of the substrate transport arm is checked with the arm in a single position.

[0004] Accordingly, the present disclosure addresses a number of those issues.BRIEF DESCRIPTION OF THE DRAWINGS

[0005] The foregoing aspects and other features of the present disclosure are explained in the following description, taken in connection with the accompanying drawings, wherein:

[0006] Fig. 1 is a schematic illustration of a substrate processing system in accordance with the present disclosure;

[0007] Figs. 2A is a schematic illustration of a substrate transport apparatus, of the substrate processing system of Fig. 1 in accordance with the present disclosure;

[0008] Figs. 2B, and 2C are schematic illustrations of a portion of the substrate transport apparatus of Fig. 2A, of the substrate processing system of Fig. 1, respectively in retracted and extended configurations and in accordance with the present disclosure;

[0009] Figs. 3A and 3B are schematic illustrations of a substrate transport apparatus, of the substrate processing system of Fig. 1, respectively in retracted and extended configurations and in accordance with the present disclosure;

[0010] Figs. 4A-4F are schematic illustrations of substrate transport arms of a substrate transport apparatus of the substrate processing system of Fig. 1 in accordance with the present disclosure;

[0011] Figs. 5 A and 5B illustrate exemplary rotary joint configurations of the substrate transport apparatus described herein in accordance with the present disclosure; and

[0012] Fig. 6 is a flow diagram of an exemplary method in accordance with the present disclosure.DETAILED DESCRIPTION

[0013] The following detailed description is meant to assist the understanding of one skilled in the art, and is not intended in any way to unduly limit claims connected or related to the present disclosure.

[0014] The following detailed description references various figures, where like reference numbers refer to like components and features across various figures, whether specific figures are referenced, or not.

[0015] The word “each” as used herein refers to a single object (i.e., the object) in the case of a single object or each object in the case of multiple objects. The words “a,” “an,” and “the” as used herein are inclusive of “at least one” and “one or more” so as not to limit the object being referred to as being in its “singular” form.

[0016] Spatial terms such as “left,” “right,” “top,” “bottom,” “upper,” “lower,” “front,” “back,” “vertical,” and “horizontal” as may be used herein are by way of example and illustration only are not meant to limit the description and may be exchanged in position and orientation.

[0017] The terms “substantially” and “about” as may be used herein refer to a feature that may be varied within an acceptable manufacturing tolerance for a given application.

[0018] While the present disclosure makes reference to X, Y, Z, R, axes as well as rotations 0, pitch, roll as well as directional language (e g., vertical, horizontal, etc.) such nomenclature is exemplary only and the different axes and directions referred to herein may be referred to with any suitable nomenclature.

[0019] Figs. 1 illustrates an exemplary schematic illustration of a substrate processing system 100 in accordance with the present disclosure. Although the present disclosure will be described with reference to the drawings, it should be understood that the present disclosure can be embodied in many forms. In addition, any suitable size, shape or type of elements or materials could be used.

[0020] The present disclosure provides for integration of one or more level detectors 170 in a substrate transport apparatus 180 of the substrate processing system 100, so that the levelness of the substrate transport apparatus 180 may be automatically determined by a controller 199 of the substrate transport apparatus and / or substrate processing apparatus 100, throughout an entire range of motion of the substrate transport apparatus 180. Level detection of the substrate transport apparatus 180, throughout its entire range of motion, may effect at least automatic teaching of the substrate transport apparatus 180 within the substrate processing system 100. The present disclosure may provide for at roll (or row) and pitch determination of the substrate transport apparatus 180, and / or different portions (such as individual arm links, end effectors, etc.) of the substrate transport apparatus 180, at substantially all positions of the substrate transport arm throughout an extend, retract, and / or rotate motion.

[0021] The substrate processing system 100 may be configured for processing any suitable substrate or workpieces W in any suitable processing environment. For example, the substrates W may be any desired type of planar workpiece such as semiconductor workpieces, flat panels for flat panel displays, imaging plates (e.g., masks or reticles), semiconductor packaging substrates (e.g., high density interconnects), semiconductor wafers (e.g., 200 mm, 300 mm, or larger), susceptors or any other planar workpiece. The processing environment in one or more portions of the substrate processing system 100 may be a vacuum environment or an atmospheric pressure environment (e.g., where the atmospheric pressure environment includes at least a portion of the processing apparatus 100 filled with an inert gas or clean dry air). For example, a portion of the substrate processing system 100 has a vacuum environment and another portion of the substrate processing system 100 has an atmospheric pressure environment, or all portions of the substrate processing system 100 have an atmospheric pressure environment.

[0022] For exemplary purposes only, the substrate processing system 100 includes a substrate processing section 150 and a load port module 120 coupled to the substrate processing section 150. The load port module 120 is configured to interface with transport containers 110 so as to open the transport containers 110 to the processing environment within the substrate processing section110. The substrate processing section 150 includes, for example, an environmental front-end module or EFEM 130 and a substrate process module 140.

[0023] Still referring to Fig. 1, the environmental front-end module 130 may have a shell or casing (also referred to as the EFEM frame) defining a protected environment or mini-environment where substrates W may be accessed and handled with minimized potential for contamination between the transport containers 110. The protected environment is employed to transport the substrates W to and from the substrate processing system 100, and the substrate process module 140. The environmental front-end module 130 also includes the substrate transport apparatus 180 disposed within the environmental front-end module 130 frame and configured with at least one end effector 230 for transporting substrates W between the transport containers 110 and a substrate holding location 145 of the substrate process module 140. The substrate holding location 145 may be of a load lock, a process station, or any other suitable substrate holding location that effects processing and / or storing of the substrate W.

[0024] The substrate process module 140 may be configured to perform any suitable process on the substrates W. For example, the substrate process module 140 may be configured as a substrate sorter, stocker, metrology module, or be configured to perform a manufacturing process on the substrate. The substrate process module 140 may have any suitable controlled environment therein (e.g., an atmospheric pressure environment, an inert gas environment, a clean dry air environment, a vacuum environment, etc ), and generally comprises a processing system for processing substrates. Where the substrate process module 140 includes a vacuum environment the vacuum therein may be a high vacuum such as, for example, about IxlO'5Torr (e.g., about .001 Pa) or below. Exemplary processes that may be performed in the processing modules include, but are not limited to cleaning, baking, inspecting, thin film processes that use a vacuum such as plasma etch or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation, metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, forming of nitrides, vacuum lithography,epitaxy (EPI), wire bonder and evaporation, other thin film processes that use vacuum pressures, etc.

[0025] Suitable examples of processing apparatus to which the aspects of the present disclosure may be employed may be found in, for example, United States patent application number 15 / 215,143 filed on July 20, 2016 and titled “Substrate Processing Apparatus”; United States patent numbers 10,777,438 titled “Processing Apparatus,” and issued on September 15, 2020, 8,960,099 titled “Substrate Processing Apparatus,” and issued on February 24, 2015, 8,371,792 titled “Substrate Processing Apparatus,” and issued on February 12, 2013, 7,988,398 titled “Linear Substrate Transport Apparatus,” and issued on August 2, 2011, 9,105,673 titled “Side Opening Unified Pod,” and issued on August 11, 2015, 9,401,294 titled “Compact Substrate Transport System,” and issued on July 26, 2016, 6,520,727 titled “Modular Sorter,” and issued on February 18, 2003, 8,292,563 titled “Nonproductive Wafer Buffer Module For Substrate Processing Apparatus,” and issued on October 23, 2012, 11,295,975 titled “Method and Apparatus for Substrate Alignment,” and issued on April 5, 2022, 7,100,340 titled “Unified Frame for Semiconductor Material Handling System,” and issued on September 5, 2006, 7,217,076 titled “Semiconductor Material Handling System,” and issued on May 15, 2007, 7,648,327 titled “Wafer Engine,” and issued on January 19, 2010, 7,066,707 titled “Wafer Engine,” and issued on June 27, 2006, 9,943,969 titled “Clean Transfer Robot,” and issued on April 17, 2018; and International patent application number PCT / US 13 / 25513 entitled “Substrate Processing Apparatus” and filed on February 11, 2013, the disclosures of which are incorporated herein by reference in their entireties.

[0026] To effect transport of the substrates W, the substrate transport apparatus 180 is taught the locations of the substrate holding stations, such as of the load port module 120 (e.g., where the containers 110 are held) and of the substrate process module 140 (e.g., such as the substrate holding location 145). Such teaching may be effected automatically in any suitable manner, a suitable example of which is described in United States patent number 11,908,721 issued on Feb. 20, 2024, the disclosure of which is incorporated herein by reference in its entirety. In automatically teachingthe substrate transport apparatus 180 a substrate holding station location, the automatic teaching may provide for the detection / measurement of end effector 230 pose in six degrees of freedom (i.e., X, Y, Z, pitch, roll, and yaw in the substrate transport apparatus reference frame, see Figs. 2A and 3A). Here, pitch is rotation about the X-axis, roll is rotation about the Y-axis, and yaw is rotation about the Z-axis. The X, Y, Z, and yaw measurements may be obtained in any suitable manner, such as by employing encoders / sensors ENC of the substrate transport apparatus 180 and / or suitable sensors disposed within the substrate processing apparatus 100. The levelness (e.g., with respect to a horizontal plane HP, such as established and spatially oriented by the Earth’s gravitation) may be effected in-situ the substrate transport apparatus 180 in accordance with the present disclosure.

[0027] Referring to Figs. 1 and 2A-3B, the substrate transport apparatus 180, 180A, 180B includes a base 200B, at least one articulated robot arm (also referred to herein as a transport arm) 210, 211 (see, at least, Figs. 2A and 3 A), a level detector 170, and a controller 199. The controller 199 may be integral to or separate from a controller of the apparatus in which the substrate transport apparatus 180, 180A, 180B operates. The controller 199 is connected to and configured to articulate the substrate transport apparatus 180, 180A, 180B to perform the predetermined operating robot function(s) described herein.

[0028] The articulated robot arm 210, 211 is connected to the base 200. The base 200B may be movably mounted to a frame 13 OF of the EFEM 130, or to a frame of any suitable transport chamber (e.g., having a vacuum or atmospheric environment therein) of any suitable processing apparatus.

[0029] The substrate transport apparatus 180, 180A, 180B includes any suitable number of drive axes (e.g., defined by respective motors / drives) to effect articulation of the articulated robot arm 210, 211 and move a substrate S along one or more of the X, Y, Z, 0, Rx, Ry, and R (end effector or workpiece holder 230, 230A, 230B extension) axes.

[0030] The substrate transport apparatus 180, 180A, 180B includes the least one articulated robot arm 210, 211, where each of the at least one articulated robot arm 210, 211 has at least one end effector 230 thereon and is articulated so as to move along a predetermined direction with at least one degree of freedom (e.g., along at least one of the X axis, Y axis, Z axis, R, and 9 axes) and effect, with the end effector 230, a predetermined operating robot function. The predetermined operating robot function may be any suitable operating function including, but not limited to picking a substrate, placing a substrate, transporting a substrate, aligning a substrate, gripping a substrate or any other function that effects workpiece processing and / or transport.

[0031] The predetermined direction may be along a predetermined substantially level plane (such as the X-Y plane or R-9 plane) defined by the base 200B. The predetermined direction describes an axis (e.g., X, Y, R, and / or 0 axes) characterized by the at least one degree of freedom, and the change of articulated robot arm level is in at least one of a roll or row direction and a pitch direction about the axis.

[0032] As described herein, a level detector 170 is communicably coupled to the controller 199. The level detector 170 is integral and self-contained so as to move as a unit with the articulated robot arm 210, 211. The level detector 170 is disposed on the articulated robot arm 210, 211 so as to sense a change of articulated robot arm level effected by motion of the articulated robot arm 210, 211 throughout a range of motion of the articulated robot arm 210, 211 along the predetermined direction that is different than a level change direction of the change of articulated robot arm level. As also described herein, the level detector may be one or more of: disposed within the articulated robot arm and isolated from an environment in which the articulated robot arm operates; comprises a Micro-Electro-Mechanical-System (MEMS) sensor; a MEMS inertial measuring sensor; and a MEMS level sensor.

[0033] As described herein, the articulated robot arm 210, 211 may include one or more arm links 220, 310, 315 and the level detector 170 comprises a level / inertial measurement unit 271, 272, 273 in each of the one or more arm links. As described herein, the end effector 230, 230A, 230B iscoupled to the one or more arm links and may include a level / inertial measurement unit 273 therein.

[0034] The controller 199 is connected to and configured to articulate the articulated robot arm 210, 211, so as to move the articulated robot arm 210, 211 in the predetermined direction. The controller 199 is communicably coupled to the level detector 170 so as to register (e.g., store in any suitable memory of or accessible by the controller 199) from sensor data (e.g., received from the level detector 170 by the controller 199) the change of articulated arm level. The controller 199 is configured (e.g., with any suitable non-transitory computer program code) to effect determination of the level change direction and a total amount of the change of articulated robot arm level throughout the range of motion of the articulated robot arm 210, 211 along the predetermined direction.

[0035] The controller 199 is configured to resolve an uncommanded component of the level change direction and uncommanded amount of the total amount and generate, based on the resolved uncommanded component and uncommanded amount, an auto teach command effecting motion of the articulated robot arm 210, 211 in the predetermined direction so as to effect with the end effector 230, 230A, 230B the predetermined operating function

[0036] The controller 199 is configured to articulate the articulated robot arm 210, 211 to perform the predetermined operating robot function. The level detector 170 is disposed on the articulated robot arm 210, 211 so as to effect in-situ determination of articulated robot arm level throughout a range of motion (such as an entire range of motion and / or a range of motion of an extend, retract, and / or rotate motion) of the articulated robot arm 210, 211 that effects the predetermined operating function.

[0037] The at least one articulated robot arm 210, 211 may be mounted to a carriage 241 so that the at least one articulated robot arm 210, 211 is movably mounted to the frame 130F. The carriage 241 may be mounted to a slide 24 IS so as to be movable in the X direction although, the carriage241 may be mounted to the frame 130F so as to be fixed in the X (and / or Y direction). Any suitable drive 242 may be mounted to the frame 13 OF and drivingly connected to the carriage 241 by any suitable transmission 242T for moving the base 200B in the X direction. The transmission 242T may be a belt and pulley transmission and the drive 242 may be a rotary drive however, the drive242 may be a linear actuator that is drivingly connected to the carriage 241 with any suitable transmission or without a transmission (e g., such as where the carriage includes a drive portion of the linear actuator).

[0038] Referring also to Figs. 4A-4F, the at least one articulated robot arm 210, 211 of the substrate transport apparatus 180, 180A, 180B may be any suitable transport arm, such as for example, a linear slide transport arm 414 as shown in Fig. 4B or any other suitable transport arm having any suitable arm linkage mechanisms (such as those illustrated in Figs. 4A-4F) where articulation of the arm is one or more of a linear sliding movement and a rotational movement of one or more arm links. Suitable examples of arm linkage mechanisms can be found in, for example, U.S. Pat. No. 7,578,649 issued Aug. 25, 2009; U.S. Pat. No. 5,794,487 issued Aug. 18, 1998; U.S. Pat. No. 7,946,800 issued May 24, 2011; U.S. Pat. No. 6,485,250 issued Nov. 26, 2002; U.S. Pat. No. 7,891,935 issued Feb. 22, 201 1 ; U.S. Pat. No. 8,419,341 issued Apr. 16, 2013; and U.S. patent application Ser. No. 13 / 293,717 entitled “Dual Arm Robot” and filed on Nov. 10, 2011; U.S. patent application Ser. No. 13 / 861,693 entitled “Linear Vacuum Robot with Z Motion and Articulated Arm” and filed on Sep. 5, 2013; U.S. Pat. No. 7,648,327 issued on January 19, 2010 (entitled “Wafer Engine”); U.S. patent application No. 16 / 257,595 filed on January 25, 2019 (entitled “Automatic Wafer Centering Method and Apparatus”); and U.S. patent application No. 14 / 928,352 filed on October 30, 2015 (entitled “Wafer Aligner”), the disclosures of which are all incorporated by reference herein in their entireties.

[0039] In accordance with the present disclosure, the at least one articulated robot arm 210, 211 may be or be derived from a conventional SCARA (selective compliant articulated robot arm) type design (see SCARA arm 419 in Fig. 4E, see also Figs. 3 A and 3B), which includes an upper arm, a forearm, and an end-effector, or from a telescoping arm or any other suitable arm design, suchas a Cartesian linearly sliding arm (see, e.g., Figs. 2A and 4B), wherein any such design configuration also includes a slide body 220 and at least one substrate holder(s) 230 (see at least Figs. 4D, 4E, 4F). For example, in one aspect the slide body 220 is mounted to an arm link of any suitable substrate transport apparatus (see at least Fig. 2A). Suitable examples of transport arms can be found in, for example, U.S. patent application Ser. No. 12 / 117,415 entitled “Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism” filed on May 8, 2008 and U.S. Pat. No. 7,648,327 issued on Jan. 19, 2010, the disclosures of which are incorporated by reference herein in their entireties. Where more than one articulated robot arm 210, 211 are provided on a common substrate transport apparatus (see, for example, Figs. 4C, 4D, 4F), the operation of the more than one articulated robot arm 210, 211 may be independent from each other (e.g. the extension / retraction of each arm is independent from other arms), may be operated through a lost motion switch, or may be operably linked in any suitable way such that the arms share at least one common drive axis, where the at least one common drive axis is embodied in (or otherwise defined by) a drive shaft or drive member. The articulated robot arms 210, 211 may have any other desired arrangement such as a frog-leg arm 416 (Fig. 4A) configuration, a leap frog arm 417 (Fig. 4D) configuration, a bi-symmetric arm 418 (Fig. 4C) configuration, multiple SCARA arm configuration (Fig. 4F), etc. Suitable examples of transport arms can be found in U.S. Pat. No. 6,231,297 issued May 15, 2001; U.S. Pat. No. 5,180,276 issued Jan. 19, 1993; U.S. Pat. No. 6,464,448 issued Oct. 15, 2002; U.S. Pat. No. 6,224,319 issued May 1, 2001; U.S. Pat. No. 5,447,409 issued Sep. 5, 1995; U.S. Pat. No. 7,578,649 issued Aug. 25, 2009; U.S. Pat. No. 5,794,487 issued Aug. 18, 1998; U.S. Pat. No. 7,946,800 issued May 24, 2011; U.S. Pat. No. 6,485,250 issued Nov. 26, 2002; U.S. Pat. No. 7,891,935 issued Feb. 22, 2011; U.S. patent application No. 16 / 257,595 filed on January 25, 2019 (entitled “Automatic Wafer Centering Method and Apparatus”); U.S. patent application No. 13 / 293,717 filed on Nov. 10, 2011 (entitled “Dual Arm Robot”); and U.S. patent application No. 13 / 270,844 filed on Oct. 11, 2011 (entitled “Coaxial Drive Vacuum Robot”), the disclosures of which are all incorporated by reference herein in their entireties.

[0040] Referring to Figs. 2A, 2B, and 2C, an exemplary substrate transport apparatus 180A is illustrated. The substrate transport apparatus 180A includes a base 200B and an articulated robot arm 210 coupled to the base 200B. A drive section 200 of the substrate transport apparatus 180A (see also substrate transport apparatus 180, 180B described herein) may be disposed at least partially within the base 200B. The articulated robot arm 210 includes a Z-drive column or vertical extension axis 215, a slide body 220 coupled to the Z-drive column 215, and one or more end effector 230 coupled to the slide body 220. The slide body 220 moves vertically (e.g., reciprocates) in the Z direction along the Z-drive column 215 under impetus of the drive section 200. The slide body 220 may generally be referred to as arm link 220. The one or more end effectors 230 move, linearly on the slide body 220, along an axis of extension and retraction R under impetus of the drive section 200. The Z-drive column 215, slide body 220, and the one or more end effector 230 may rotate about a rotation axis 0 as a unit under impetus of the drive section 200. The substrate transport apparatus 180A may include a traverse 235 along which the Z-drive column 215, slide body 220, and the one or more end effector 230 linearly travel as a unit within the substrate processing apparatus 100. For example, the drive section 200 may include a rotational drive 262 that rotates the Z-drive column 215, slide body 220, and the one or more end effector 230 about the rotation axis 0. The rotational drive 262 is any suitable rotational drive mounted to the frame 130F of the transport chamber 130 or the sliding carriage 241 of the transport chamber 130, where the sliding carriage 241 is configured to linearly move the substrate transport apparatus 180A along a length of the transport chamber 130, e.g., in the X direction. The Z-drive column 280 is mounted to an output of the rotational drive 262 so as to rotate in the direction of arrow T about the 0 axis (e.g. the 0 direction). The slide body 220 is movably mounted to the Z drive column 280, where the Z-drive column 280 includes any suitable drive motor 280D and / or transmission 280DT for moving the slide body 220 in the Z direction. Here, the Z-drive column 280 and the slide body 220 (and any arms / end effectors 230 coupled to the slide body 220) rotate about the 0 axis as a unit.

[0041] The at least one end effectors 230 is movably mounted to the slide body 220 in any suitable manner so as to extend and retract in the R direction. While one end effectors 230 is illustrated in Figs. 2A-2C for exemplary purposes only, it should be understood that any suitable number of end effectors 230 may be mounted to the slide body 220 (i.e., coupled to the slide body 220 so as to depend from and move / slide along the slide body 220 in any suitable manner such as for example, in a manner similar to that described in United States patent numbers 7,100,340, 7,066,707, 7,648,327, and 7,217,076 the disclosure of which were previously incorporated herein by reference in their entireties).

[0042] Referring to Figs. 3 A and 3B, an exemplary substrate transport apparatus 180B is illustrated. The substrate transport apparatus 180B includes the drive section 200 and an articulated robot arm 211 coupled to the drive section 200. The articulated arm may be coupled to the traverse 235 illustrated in Fig. 2A so as to move in the X direction along the slide 24 IS in the manner described above. The drive section 200 may include any suitable Z-axis drive 200Z (e.g., ball-screw drive, belt drive, chain drive, etc.) configured to move the articulated robot arm 211 in the Z direction in, for example, a similar manner to that of the Z-drive column 215 described above. The articulated robot arm 211 is illustrated as a SC ARA arm having more than one arm link 310, 315 serially coupled to each other. For example, the arm link 310 may be referred to as an upper arm link and is coupled to the drive section at a shoulder joint for rotation about rotation axis 0 (which may be referred to as a shoulder axis). The arm link 315 may be referred to as a forearm link and is coupled to the upper arm link 310 at what may be referred to as an elbow joint for rotation about an elbow axis EX. One or more end effectors 230 is / are coupled to the forearm link 315 at a wrist joint for rotation about a wrist axis WX. The drive section 200 is coupled to the articulated robot arm 211 so as to extend / retract the arm links 310, 315 and end effector(s) 230 so that the one or more end effector 230 travels along the axis of extension and retraction R. While the articulated robot arm 211 is illustrated has having two arm links 310, 315 and one end effector 230, the articulated robot arm 211 may have fewer or more than two arm links and more than one end effector. The, or each, end effector 230 may include one or more (e.g., stacked one above theother in the Z direction or arranged side-by-side in a common plane) substrate holding stations thereon.

[0043] While the substrate transport apparatus 180 is described herein as a telescopic sliding arm (e.g., substrate transport apparatus 180A) and a SCARA arm (e.g., substrate transport apparatus 180B), it should be understood that the present disclosure may be applied to any suitable substrate transport having any suitable configuration including but not limited to, those illustrated in Figs. 4A-4F.

[0044] Referring again to Figs. 1 and 2A-3B, the level detector 170 includes a level determination module 270, which may be a part of or otherwise communicably coupled to the controller 199. The level detector 170 also includes one or more inertial measurement units 271, 272, 273. Where the substrate transport apparatus 180, 180A, 180B is disposed in a vacuum or other isolated atmosphere, the level detector 170 (and its components, i.e., the level determination module 270 and / or level / inertial measurement units 271, 272, 273) may be disposed within the articulated robot arm 210, 211 and isolated, by the articulated robot arm 210, 211, from the environment (i.e., the vacuum or other isolated environment) in which the articulated robot arm 210, 211 operates. Isolation of the interior of the articulated robot arm 210, 211 may be effected in any suitable manner, suitable examples of which are described in International patent application numbers PCT / US24 / 45685 filed on September 6, 2024 and PCT / US24 / 45646 filed on September 6, 2024, the disclosures of which are incorporated herein by reference in their entireties.

[0045] There may be at least one inertial measurement unit 271, 272, 273 disposed in one or more of the arm links 220, 310, 315 and / or one or more of the end effectors 230. In Figs. 2A, 2B, and 2C the arm link (slide body) 220 includes inertial measurement unit 271 that moves within the arm link 220 with, for example, a drive follower 278 coupled to and driving linear movement of the end effector 230 as the end effector moves along the axis of extension and retraction R (e.g., the inertial measurement unit 271 travels with the end effector). The end effector 230 may also include inertial measurement unit 272.

[0046] In Figs. 3A and 3B, one or more of the arm links 310, 315 and end effector 230 may include an inertial measurement unit. For example, the arm link 310 may include the inertial measurement unit 271 and / or the arm link 315 may include the inertial measurement unit 272. An inertial measurement unit 273 may be included with the end effector 230.

[0047] The inertial measurement units 271-273 may be any suitable inertial measurement unit, such as, but not limited to, micro-electronic inertial measurement units having six-degree of freedom position sensing. Power and data communication (e.g., communication with the level determination module 270) may be provided to each of the inertial measurement units 271-273 through the arm links in any suitable manner, such as that described in International patent application numbers PCT / US24 / 45685 filed on September 6, 2024 and PCT / US24 / 45646 filed on September 6, 2024, the disclosures of which were previously incorporated herein by reference in their entireties. For example, power and data communication cables may extend through the articulated robot arm 210, 211 to the inertial measurement units 271-273 where, at rotary joints, at least the data communication signals are wirelessly transmitted across the rotary joint. Power may be wirelessly transmitted across the rotary joint, or transmitted by electrical brushes. Power and data communication may be provided wirelessly in any suitable manner.

[0048] Figs. 5A and 5B illustrate exemplary power and data communication transmitted across a rotary joint of the substrate transport apparatus 180, 180A, 180B. A power bus and high-speed data communication bus (which may form a common (e.g., combined) bus or separate buses) may be distributed throughout an arm or arms of the substrate transport apparatus 180, 180A, 180B. Power distributed through the power bus may be direct current power or alternating current power. A power and data communication system PDCS may be distributed through the articulated arm (inclusive of all the articulated arms described herein with respect to Figs. 2A-4F), where the power and communication data system PDCS has a (at least one) wireless power and data communication interface WPDC (see Figs. 5 A and 5B) routed through each (or one or more) rotary joint (e.g., the joint(s) at respective axes 0, SX, EX, WX of the substrate transport apparatus 180, 180A, 180B. The wireless power and data communication interface WPDC, through each (or oneor more) rotary joint, is configured as a noncontact wireless communication interface. A data communication and bus power network PDCN (e.g., a network formed by and of the power and data communication system PDCS) is resident on board the articulated robot arm 210, 211. The data communication and bus power network PDCN is distributed throughout the articulated robot arm 210, 211 from a terminal joint (such as one or more of joints SX, 9) through the distal joint (e g., joint WX). The data communication and bus power network PDCN is housed in and crosses each (or one or more) rotary j oint of the housing. The data communication and bus power network PDCN incorporates local controls (e.g., transmitters, receivers, controllers, etc. of the substrate transport apparatus described herein), and any suitable sensors (e.g., such as at least the inertial measurement units 271-273 of the level detector 170) disposed respectively on one or more links and / or end effector(s) of the articulated robot arm 210, 211, coupled via a network interface (e.g., such as a respective wireless power and data communication interface WPDC described herein) so as to effect local, on board, on the fly controls of at least kinematic motion of the substrate holding station SHS via articulation of the articulated robot arm 210, 211 and on board health monitoring of the articulated arm.

[0049] Figs. 5A and 5B illustrate exemplary rotary joint configuration where hollow drive shafts, 200M2D, 200M3AD, 200M3BD (such as at one or more of the axes 0, SX, EX, WX) are configured for the passage of one or more of electrical / communication cables CBL. The rotary joint configurations provide for wireless delivery of at least data communication over an air gap MAG (the term air being used herein for convenience as the gap may exist in a vacuum atmosphere as described herein with respect to the wrist axis). The rotary joint may provide for power delivery through a slip-ring 379 (such as at the shoulder and elbow joints) but the power delivery may be wireless power delivery (such as at the wrist joint and / or at one or more of the shoulder and elbow joints) similar to that of the wireless data communication over the air gap MAG. The power delivery and data communication may provide for the integration of sensors (such as at least the inertial measurement units 271-273 of the level detector 170) and / or actuators / direct drive motors 200M2, 200M3A, 200M3B of the drive section 200 (e.g., illustrated in Figs. 5A and 5B) into thearticulated robot arm 210, 211, while isolating the sensors and actuators from the environment in which the articulated robot arm 210, 211 operates (noting where the articulated robot arm 210, 211 operates in an atmospheric environment, isolation may be omitted). Any cabling, cooling tubes, and other electronics (including at least the sensors (such as the sensors of the level detector 170) may be embedded within the within the articulated robot arm structure, which may substantially eliminate contamination of, for example, a vacuum environment in which the articulated robot arm operates, due to outgassing of the cabling and other electronics.

[0050] While Fig. 5A illustrates an elbow joint EX of the articulated robot arm 211, one or more of the shoulder joint SX and the wrist joint WX (see Fig. 5B) of the articulated robot arm 211 and the joint at the axis 0 of the articulated robot arm 210 (and any other rotary joints thereof) may be similarly configured. Referring to Fig. 5 A, a conduit 381 extends through the hollow drive shaft 200M2D and motor rotor (the motor rotor being formed by the drive shaft, or vice versa, or otherwise coupled thereto), although the conduit 381 may otherwise be formed by the hollow drive shaft 200M2D and / or motor rotor. To effect data transmission through the rotary joint, noting the conduit 381 rotates relative to the upper arm 310, a wireless transmitter 377T is fixed (i.e., stationary) to the end portion of the upper arm 310. A wireless receiver 377R (having, e.g., a disk shaped antenna or any suitably shaped antenna) is fixed to the conduit 381, so as to rotate with the conduit 381 as a unit, and is coupled to the communication cable CBL. The wireless transmitter 377T (having, e.g., a disk shaped antenna or any suitably shaped antenna) is positioned relative to the wireless receiver 377R so as to transmit data therebetween. While a transmitter and receiver 377T, 377R are illustrated, the positions of the transmitter and receiver may be reversed, there may be two transceivers (to provide two way data communication), or there may be two sets of transmitters and receivers (to provide two way data communication). The transmitter and receiver 377T, 377R may be configured for optical communication, radio frequency (e.g., Wi-Fi, near field communication, ultra-wide band, millimeter wave, etc.) communication, inductive communication, or other short range wireless communication protocols such as those described herein (e.g., Bluetooth", infrared, ZigBee", etc.) that operate over very short distances such asabout 20 mm or less than about 20 mm (the communication distances may be more than about 20 mm). The short-range communication effects secure data transmissions and immunity to radio frequency noise within the semiconductor manufacturing FAB (fabrication) or factory. A minimized air gap MAG is provided between transmitting and receiving portions of the transmitter and receiver 377T, 377R. The minimized air gap is sized to be about the smallest gap possible that provides for rotation of the receiver 377R relative to the transmitter 377T without contact therebetween.

[0051] Still referring to Figs. 5A electrical power may be transferred through the rotary joint through a slip-ring 379, although electrical power may be wirelessly transmitted over the air gap MAG as described below. For example purposes only, with respect to slip ring 379, a brush block 379B of the slip-ring 379 is fixedly (stationary) coupled to the end portion of the upper arm 310, while the rotating ring 379R of the slip-ring is fixed (e.g., relative to the conduit 381) to the conduit 381 so as to rotate as a unit with the conduit 381. Electrical power is fed to the brush block 379B with any suitable power cable CBL and from the rotating ring into the forearm 315 with any suitable power cable CBL that is routed adjacent the conduit 381 and within the drive shaft 200M2D. The power fed through the articulated arm via the cables and slip rings (and in some instances through wireless couplings) provides power to the motors 200M1-200M3B, the encoders 388, 389, 389A, and / or any other suitable electronics integrated with the articulated arm.

[0052] Referring to Figs. 5A and 5B, both power transmission and data communication through the rotary joint may be wireless. For exemplary purposes only, wireless power transmission and data communication will be described with respect to the wrist joint (see Fig. 5B), although the elbow joint (see Fig. 5 A) and the shoulder joint SX of the articulated robot arm 210 and the joint at the axis 9 of the articulated robot arm 210 (and any other rotary joints thereof) may be substantially similar. For example, power and data communication is provided to the wrist, via cables, for effecting operation of at least the drive motors 200M3A, 200M3B (e.g., driving a respective end effector 230A, 230B) and the respective encoders, where the cables extend through the arm to the wrist. A short-range proximity wireless communication network may be providedfor transferring power and data to and / or from the end effector 230A, 230B. The short-range proximity wireless communication network includes a data and power transmitter 341T, 342T disposed within the wrist and a data and power receiver 341R, 342R disposed in the end effector 230A, 230B (power receiver 342R is illustrated at the base of the drive shaft 200M3BD for end effector 23 OA). The short-range proximity wireless communication network may be employed for power and / or data transmission between the 200B and the upper arm 310 (or between the base 200B and the Z-drive column 215) and / or between the upper arm 310 and forearm 315. The data and power transmitter 34 IT is disposed within the articulated robot arm 210, 211. The data and power transmitter 34 IT is coupled to a transmitter antenna 341 TA disposed within the vacuum or other suitable environment (see also transmitter antenna 342TA of transmitter 342T). The transmitter antenna 341 TA, 342TA is constructed of any suitable vacuum compatible material (e.g., such as stainless steel - where used in a non-vacuum environment any suitable material may be employed) and is affixed to the articulated robot arm 210, 211 in any suitable manner (such as with any suitable fasteners). Any suitable seals (such as O-rings) may be provided between the transmitter antenna 341TA and the arm so as to seal any feedthroughs that couple the transmitter antenna 341 TA to the data and power transmitter 34 IT. The transmitter antenna 341 TA may circumscribe the drive shaft 200M3AD of the motor 200M3A (and hence, the coupling between the drive shaft 200M3AD and the respective end effector 21 IB) so that as the end effector 23 OB rotates, wireless communication between the power and data transmitter 34 IT and the end effector 23 OB is substantially maintained.

[0053] A data and power receiver 341R is embedded within the end effector 230B in any suitable manner (such as during manufacture of the end effector or within a sealed atmospheric chamber within the end effector 230B). A receiver antenna 341RA is disposed within the vacuum or other suitable environment (see also receiver antenna 342RA at the base of the drive shaft 200M3BD). The receiver antenna 34 IRA, 342RA is constructed of any suitable vacuum compatible material (e g., such as stainless steel - where used in a non-vacuum environment any suitable material may be employed) and is affixed to the end effector 230B in any suitable manner (such as with anysuitable fasteners). Any suitable seals (such as O-rings) may be provided between the receiver antenna 341RA and the end effector 230B so as to seal any feedthroughs that couple the receiver antenna 34 IRA to the data and power receiver 341R. The receiver antenna 34 IRA may circumscribe the drive shaft 200M3AD of the motor 200M3A (and hence, the coupling between the drive shaft 200M3AD and the respective end effector 23 OB) so as to provide a pass through for drive shaft 200M3BD of motor 200M3B and so that as the end effector 230B rotates wireless communication between the power and data transmitter 34 IT and the end effector 230B is substantially maintained through wireless communication between the two ring shaped antenna 341TA, 341RA. The antenna 341TA, 341RA may have any suitable shapes. As an example, the antenna 341 TA, 34 IRA may be constructed of a thin foil so as to be conformal to / with the surface to which they are affixed. The transmitter 341T and receiver 341R may provide two-way data communication. In a manner similar to that described herein, the antenna 341 TA, 34 IRA are separated by the minimized gap MAG. Power and data may be transmitted to (and from) the end effector 230A in a manner substantially similar to that described with respect to Fig. 5A employing the power and data transmitter 342T, the transmitter antenna 342TA, the power and data receiver 342R, and the receiver antenna 342RA.

[0054] As can be seen in Figs. 5 A and 5B, the rotary joints provide for substantially unlimited rotation. Where substantially unlimited rotation of an arm joint is not required or otherwise desired, the one or more of the electrical slip ring and data transmitter / receiver may be removed such that the power and data cable(s) extend through the conduit 381 to the seal 385B (with the conduit 381 being stationarily fixed to the upper arm 213) where the cable(s) form a clock spring about the rotational axis 0, SX, EX, WX that winds and unwinds (in a manner similar to that of a spiral clock spring).

[0055] The level or inertial measurement units 271-273 disposed on the one or more arm links 220, 310, 315 and / or end effector(s) 230 may provide signals (e.g., embodying the roll and / or pitch angles of the respective arm link or end effector) to the level determination module 270. The level determination module 270 is configured to, based on the signals from the inertial measurementunits 271-273, determine the angle of roll and / or pitch of the respective arm link 220, 310, 315 and / or end effector 230. As the inertial measurement units 271-273 are carried with the respective articulate robot arm links, the roll and / or pitch angles may be measured in-situ the articulated robot arm 210, 211 substantially throughout an entire range of motion (e.g., in rotation about the rotation axis 9, in extension and retraction R, and, where provided, along the linear axis of travel along the traverse 235) of the substrate transport apparatus 180, 180A, 180B.

[0056] The angle(s) of roll and / or pitch of the arm links 220, 310, 315 and / or end effector(s) 230 determined by the level detector 170 may be employed in an auto-tech procedure of the substrate transport apparatus 180, 180A, 180B. The angle(s) of roll and / or pitch of the arm links 220, 310, 315 and / or end effector(s) 230 determined by the level detector 170 may be employed to one or more of validate level (e.g., a manual leveling such as performed at installation of the substrate transport apparatus 180, 180A, 180B) of the substrate transport arm 210, 211 throughout the entire range of motion of the substrate transport arm; effect an automatic leveling of the substrate transport arm 180, 180A, 180B (e.g., such as where the substrate transport apparatus includes a self-leveling system that may include a set of motorized jack screws that are each operated independently by the controller 199 to effect level of the substrate based on the angle(s) of roll and / or pitch of the arm links and / or end effector(s) determined by the level detector 170); calibrate or modify movement of the substrate transport arm 210, 211 to effect complete substrate S transfer / handoff to and from the substrate transport arm; and effect preventative maintenance (such as where the level of the substrate transport apparatus moves out of a predetermined level tolerance (e.g., about 1 degree off from level with the horizontal plane HP although, the tolerance may be less or more than 1 degree from level with the horizontal plane HP).

[0057] On installation of the substrate transport apparatus 180, 180A, 180B in the environmental front-end module 130 or substrate processing section 150 an operator may level the substrate transport apparatus 180, 180A, 180B relative to the horizontal plane HP. The level detector 170 may be employed to verify the level of the substrate transport apparatus 180, 180A, 180Bthroughout the entire range of motion of the articulated robot arm 210, 211, such as in an automatic teaching operation.

[0058] The substrate transport apparatus 180, 180A, 180B may include automatic leveling system ALS (e.g., a three point jacking system that operates to level at least the end effector 230 relative to the horizontal plane HP). The automatic leveling system ALS may be operated, such as by the controller 199, based on the determined angle(s) of roll and / or pitch of the arm links so that a spatial orientation of the articulated robot arm 210, 211 is manipulated (e.g., in roll and / or pitch) so that end effector 230 is substantially in the horizontal plane HP.

[0059] The controller 199 may employ the angle(s) of roll and / or pitch of the arm links 220, 310, 315 and / or end effector 230 to command movement of the substrate transport arm 210, 211, under impetus of the drive section 200, so that substrate S handoff to and from the end effector 230 is effected taking the angle(s) of roll and / or pitch of the arm links 220, 310, 315 into account. For example, the movement of the substrate transport arm 210, 211 is such that complete engagement or disengagement of the end effector 230 with the substrate W occurs at handoff / transfer.

[0060] The determined angle(s) of roll and / or pitch of the arm links 220, 310 and / or end effector 230 may be employed by the controller 199 to map the level of the articulated robot arm 210, 211 from one position to another over time. Such mapping may effect preventative maintenance of the substrate transport apparatus where, for example, a change in level over time may indicate bearings / joints of the articulated for arm 210, 211 are in need of service.

[0061] Referring to Figs. 1-5B and 6, an exemplary method will be described in accordance with the present disclosure. The method includes providing the substrate transport apparatus 180, 180A, 180B (Fig. 6, Block 600) as described herein. The substrate transport apparatus 180, 180A, 180B may include the base 200B, the at least one articulated robot arm 210, 211 connected to the base 200B, the level indicator 170, and the controller 199. Each of the at least one articulated robot arm 210, 211 has at least one end effector 230 thereon and is articulated so as to move alonga predetermined direction with at least one degree of freedom (e.g., along at least one of the X axis, Y axis, Z axis, R, and 0 axes) and effect, with the end effector 230, a predetermined operating robot function. The level detector 170 is integral and self-contained so as to move as a unit with the articulated robot arm 210, 211. The controller 199 is connected to and configured to articulate the articulated robot arm 210, 211, so as to move the articulated robot arm 210, 211 in the predetermined direction.

[0062] The method includes sensing, with the level detector 170, a change of articulated robot arm level (Fig. 6, Block 610) effected by motion of the articulated robot arm 210, 211 throughout a range of motion of the articulated robot arm 210, 211 along the predetermined direction that is different than a level change direction of the change of articulated robot arm level. The controller 199 registers from the sensor data the change of articulated arm level (Fig. 6, Block 620), and effects determination of the level change direction and a total amount of the change of articulated robot arm level (Fig. 6, Block 630) throughout the range of motion of the articulated robot arm along the predetermined direction. The controller 199 resolves an uncommanded component of the level change direction and uncommanded amount of the total amount (Fig. 6, Block 640). The controller 199 generates based on the resolved uncommanded component and uncommanded amount, an auto teach command (Fig. 6, Block 650) effecting motion of the articulated robot arm 210, 211 in the predetermined direction so as to effect with the end effector 230, 230A, 230B the predetermined operating function.

[0063] The method may include one or more of the following, individually or in any suitable combination thereof and / or any suitable combination with the features described herein: the level detector 170 comprises MEMS sensor; the level detector 170 is at least one of a MEMS inertial measuring sensor and a MEMS level sensor; the predetermined direction is along a predetermined substantially level plane defined by the base 200B, the predetermined direction describes an axis characterized by the at least one degree of freedom, and the change of articulated robot arm level is in at least one of a roll direction and a pitch direction about the axis; the articulated robot arm includes one or more arm links 220, 310, 315 and the level detector 170 comprises a levelmeasurement unit 271, 272, 273 in each of the one or more arm links; the end effector 230, 230A, 230B is coupled to the one or more arm links; the end effector 230, 230A, 230B includes a level measurement unit 273 therein; and the articulated robot arm 210, 211 is connected to the base200B by a Z-drive column 215 and the articulated robot arm 210, 211 is configured to reciprocate along the Z-drive column 215.

[0064] The following are provided in accordance with the present disclosure and may be employed individually, in any combination with each other, and / or in any combination with the features described above.

[0065] In accordance with the present disclosure, a substrate transport apparatus is provided. The substrate transport apparatus includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move along a predetermined direction with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a level detector integral and self-contained with so as to move as a unit with the articulated robot arm, the level detector being disposed on the articulated robot arm so as to sense a change of articulated robot arm level effected by motion of the articulated robot arm throughout a range of motion of the articulated robot arm along the predetermined direction that is different than a level change direction of the change of articulated robot arm level; and a controller connected to and configured to articulate the articulated robot arm so as to move in the predetermined direction, the controller being communicably coupled to the level detector so as to register from sensor data the change of articulated arm level, the controller being configured to effect determination of the level change direction and a total amount of the change of articulated robot arm level throughout the range of motion of the articulated robot arm along the predetermined direction. The controller is configured to resolve an uncommanded component of the level change direction and uncommanded amount of the total amount and generate, based on the resolved uncommanded component and uncommanded amount, an auto teach command effecting motion of the articulated robot arm in the predetermined direction so as to effect with the end effector the predetermined operating function.

[0066] In accordance with the present disclosure, the substrate transport apparatus includes one or more of, individually or in any suitable combination thereof or in any combination with the features described herein: the level detector is disposed within the articulated robot arm and isolated from an environment in which the articulated robot arm operates; the level detector comprises MEMS sensor; the level detector is at least one of a MEMS inertial measuring sensor and a MEMS level sensor; the predetermined direction is along a predetermined substantially level plane defined by the base, the predetermined direction describes an axis characterized by the at least one degree of freedom, and the change of articulated robot arm level is in at least one of a roll direction and a pitch direction about the axis; the articulated robot arm includes one or more arm links and the level detector comprises a level measurement unit in each of the one or more arm links; the end effector is coupled to the one or more arm links; the end effector includes a level measurement unit therein; and the articulated robot arm is connected to the base by a Z-drive column and the articulated robot arm is configured to reciprocate along the Z-drive column.

[0067] In accordance with the present disclosure, a method is provided. The method includes providing a substrate transport apparatus. The substrate transport apparatus includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move along a predetermined direction with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a level detector integral and self-contained with so as to move as a unit with the articulated robot arm, the level detector being disposed on the articulated robot arm; and a controller connected to and configured to articulate the articulated robot arm so as to move in the predetermined direction, the controller being communicably coupled to the level detector. The method also includes sensing, with the level detector, a change of articulated robot arm level effected by motion of the articulated robot arm throughout a range of motion of the articulated robot arm along the predetermined direction that is different than a level change direction of the change of articulated robot arm level; registering, with the controller, from sensor data, the change of articulated arm level, and effecting determination of the level change direction and a total amount of the changeof articulated robot arm level throughout the range of motion of the articulated robot arm along the predetermined direction; resolving, with the controller, an uncommanded component of the level change direction and uncommanded amount of the total amount; and generating, with the controller, based on the resolved uncommanded component and uncommanded amount, an auto teach command effecting motion of the articulated robot arm in the predetermined direction so as to effect with the end effector the predetermined operating function.

[0068] In accordance with the present disclosure, the method includes one or more of, individually or in any suitable combination thereof or in any combination with the features described herein: the level detector is disposed within the articulated robot arm and isolated from an environment in which the articulated robot arm operates; the level detector comprises MEMS sensor; the level detector is at least one of a MEMS inertial measuring sensor and a MEMS level sensor; the predetermined direction is along a predetermined substantially level plane defined by the base, the predetermined direction describes an axis characterized by the at least one degree of freedom, and the change of articulated robot arm level is in at least one of a roll direction and a pitch direction about the axis; the articulated robot arm includes one or more arm links and the level detector comprises a level measurement unit in each of the one or more arm links; the end effector is coupled to the one or more arm links; the end effector includes a level measurement unit therein; and the articulated robot arm is connected to the base by a Z-drive column and the articulated robot arm is configured to reciprocate along the Z-drive column.

[0069] In accordance with the present disclosure, a substrate transport apparatus is provided. The substrate transport apparatus includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move along a predetermined direction with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a MEMS sensor disposed on the articulated robot arm so as to move as a unit with the articulated robot arm and sense a change of articulated robot arm level effected by motion of the articulated robot arm throughout a range of motion of the articulated robot arm along the predetermined direction that is different than a level change direction of thechange of articulated robot arm level; and a controller connected to and configured to articulate the articulated robot arm so as to move in the predetermined direction, the controller being communicably coupled to the MEMS sensor so as to register from sensor data the change of articulated arm level, the controller being configured to effect determination of the level change direction and a total amount of the change of articulated robot arm level throughout the range of motion of the articulated robot arm along the predetermined direction. The controller is configured to resolve an uncommanded component of the level change direction and uncommanded amount of the total amount and generate, based on the resolved uncommanded component and uncommanded amount, an auto teach command effecting motion of the articulated robot arm in the predetermined direction so as to effect with the end effector the predetermined operating function.

[0070] In accordance with the present disclosure, the substrate transport apparatus includes one or more of, individually or in any suitable combination thereof or in any combination with the features described herein: the MEMS sensor is disposed within the articulated robot arm and isolated from an environment in which the articulated robot arm operates; the MEMS sensor is a MEMS inertial measuring sensor; the MEMS sensor is a MEMS level sensor; the predetermined direction is along a predetermined substantially level plane defined by the base, the predetermined direction describes an axis characterized by the at least one degree of freedom, and the change of articulated robot arm level is in at least one of a roll direction and a pitch direction about the axis; the articulated robot arm includes one or more arm links and the level detector comprises a level measurement unit in each of the one or more arm links; the end effector is coupled to the one or more arm links; the end effector includes a level measurement unit therein; and the articulated robot arm is connected to the base by a Z-drive column and the articulated robot arm is configured to reciprocate along the Z-drive column.

[0071] It should be understood that the foregoing description is only illustrative of the present disclosure. Various alternatives and modifications can be devised by those skilled in the art without departing from the present disclosure. Accordingly, the present disclosure is intended toembrace all such alternatives, modifications and variances that fall within the scope of any claims appended hereto. Further, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, such a combination remaining within the scope of the present disclosure.

[0072] What is claimed is:

Claims

CLAIMS1. A substrate transport apparatus comprising: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move along a predetermined direction with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a level detector integral and self-contained with so as to move as a unit with the articulated robot arm, the level detector being disposed on the articulated robot arm so as to sense a change of articulated robot arm level effected by motion of the articulated robot arm throughout a range of motion of the articulated robot arm along the predetermined direction that is different than a level change direction of the change of articulated robot arm level; and a controller connected to and configured to articulate the articulated robot arm so as to move in the predetermined direction, the controller being communicab ly coupled to the level detector so as to register from sensor data the change of articulated arm level, the controller being configured to effect determination of the level change direction and a total amount of the change of articulated robot arm level throughout the range of motion of the articulated robot arm along the predetermined direction, and wherein the controller is configured to resolve an uncommanded component of the level change direction and uncommanded amount of the total amount and generate, based on the resolved uncommanded component and uncommanded amount, an auto teach command effecting motion of the articulated robot arm in the predetermined direction so as to effect with the end effector the predetermined operating function.

2. The substrate transport apparatus of claim 1, wherein the level detector is disposed within the articulated robot arm and isolated from an environment in which the articulated robot arm operates.

3. The substrate transport apparatus of claim 1, wherein the level detector comprises MEMS sensor.

4. The substrate transport apparatus of claim 1, wherein the level detector is at least one of a MEMS inertial measuring sensor and a MEMS level sensor.

5. The substrate transport apparatus of claim 1, wherein the predetermined direction is along a predetermined substantially level plane defined by the base, the predetermined direction describes an axis characterized by the at least one degree of freedom, and the change of articulated robot arm level is in at least one of a roll direction and a pitch direction about the axis.

6. The substrate transport apparatus of claim 1, wherein the articulated robot arm includes one or more arm links and the level detector comprises a level measurement unit in each of the one or more arm links.

7. The substrate transport apparatus of claim 6, wherein the end effector is coupled to the one or more arm links.

8. The substrate transport apparatus of claim 7, wherein the end effector includes a level measurement unit therein.

9. The substrate transport apparatus of claim 1 , wherein the articulated robot arm is connected to the base by a Z-drive column and the articulated robot arm is configured to reciprocate along the Z-drive column.

10. A method comprising:providing a substrate transport apparatus that comprises: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move along a predetermined direction with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a level detector integral and self-contained with so as to move as a unit with the articulated robot arm, the level detector being disposed on the articulated robot arm; and a controller connected to and configured to articulate the articulated robot arm so as to move in the predetermined direction, the controller being communicably coupled to the level detector; and sensing, with the level detector, a change of articulated robot arm level effected by motion of the articulated robot arm throughout a range of motion of the articulated robot arm along the predetermined direction that is different than a level change direction of the change of articulated robot arm level; registering, with the controller, from sensor data, the change of articulated arm level, and effecting determination of the level change direction and a total amount of the change of articulated robot arm level throughout the range of motion of the articulated robot arm along the predetermined direction; resolving, with the controller, an uncommanded component of the level change direction and uncommanded amount of the total amount; and generating, with the controller, based on the resolved uncommanded component and uncommanded amount, an auto teach command effecting motion of the articulated robot arm inthe predetermined direction so as to effect with the end effector the predetermined operating function.

11. The substrate transport apparatus of claim 10, wherein the level detector is disposed within the articulated robot arm and isolated from an environment in which the articulated robot arm operates.

12. The substrate transport apparatus of claim 10, wherein the level detector comprises MEMS sensor.

13. The substrate transport apparatus of claim 10, wherein the level detector is at least one of a MEMS inertial measuring sensor and a MEMS level sensor.

14. The substrate transport apparatus of claim 10, wherein the predetermined direction is along a predetermined substantially level plane defined by the base, the predetermined direction describes an axis characterized by the at least one degree of freedom, and the change of articulated robot arm level is in at least one of a roll direction and a pitch direction about the axis.

15. The substrate transport apparatus of claim 10, wherein the articulated robot arm includes one or more arm links and the level detector comprises a level measurement unit in each of the one or more arm links.

16. The substrate transport apparatus of claim 15, wherein the end effector is coupled to the one or more arm links.

17. The substrate transport apparatus of claim 16, wherein the end effector includes a level measurement unit therein.

18. The substrate transport apparatus of claim 10, wherein the articulated robot arm is connected to the base by a Z-drive column and the articulated robot arm is configured to reciprocate along the Z-drive column.

19. A substrate transport apparatus comprising: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move along a predetermined direction with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a MEMS sensor disposed on the articulated robot arm so as to move as a unit with the articulated robot arm and sense a change of articulated robot arm level effected by motion of the articulated robot arm throughout a range of motion of the articulated robot arm along the predetermined direction that is different than a level change direction of the change of articulated robot arm level; and a controller connected to and configured to articulate the articulated robot arm so as to move in the predetermined direction, the controller being communicably coupled to the MEMS sensor so as to register from sensor data the change of articulated arm level, the controller being configured to effect determination of the level change direction and a total amount of the change of articulated robot arm level throughout the range of motion of the articulated robot arm along the predetermined direction; wherein the controller is configured to resolve an uncommanded component of the level change direction and uncommanded amount of the total amount and generate, based on the resolved uncommanded component and uncommanded amount, an auto teach command effecting motion of the articulated robot arm in the predetermined direction so as to effect with the end effector the predetermined operating function.

20. The substrate transport apparatus of claim 1, wherein the MEMS sensor is one or more of disposed within the articulated robot arm and isolated from an environment in which the articulated robot arm operates;a MEMS inertial measuring sensor; and a MEMS level sensor.

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