Material allocation device and wafer transfer apparatus

Abstract

A material allocation device and a wafer transfer apparatus. The material allocation device is used for transfer of materials between a pickup device and a first material carrying device, and comprises material allocation units; each material allocation unit comprises a first material allocation assembly and a second material allocation assembly; the first material allocation assembly comprises a first material support part capable of moving in a first direction, and the second material allocation assembly comprises a second material support part capable of moving in a second direction, wherein the first direction and the second direction are arranged at an included angle; the first material support part is used for placing materials to the first material carrying device, or the first material support part is used for taking out materials from the first material carrying device; each material allocation unit has a first working mode and a second working mode; in the first working mode, the first material support part works alone; in the second working mode, both the first material support part and the second material support part work, the second material support part is capable of taking away some materials of the first material support part for temporary storage, or at least some of materials temporarily stored in the second material support part can be provided to the first material support part.

Description

A material distribution device and sheet transfer apparatus

[0001] The present application claims priority to the Chinese patent application No. 202411080548.1, filed on August 7, 2024, and entitled "A material distribution device and sheet transfer apparatus", the content of which is incorporated herein by reference in its entirety. TECHNICAL FIELD

[0002] The present application relates to the technical field of photovoltaic equipment, in particular to a material distribution device and sheet transfer apparatus. BACKGROUND

[0003] In the production of photovoltaic cells, the carrier for carrying silicon wafers includes a wafer boat and a wafer basket. The wafer boat is mainly used for process treatment such as coating of the silicon wafers, while the wafer basket is used for transferring, cleaning or etching of the silicon wafers. The silicon wafers need to be transferred between the wafer basket and the wafer boat by means of a pick-up device such as a robot.

[0004] The wafer basket has a plurality of first clamping slots for placing silicon wafers, and each first clamping slot places one silicon wafer. The wafer boat has at least one accommodation position, and each accommodation position has a plurality of second clamping slots for placing silicon wafers, and each second clamping slot places two silicon wafers. When the silicon wafers are transferred from the wafer basket to the wafer boat, the pick-up device simultaneously picks up the wafers in two wafer baskets, and then sends them into the wafer boat after combining. When the silicon wafers are transferred from the wafer boat to the wafer basket, the pick-up device picks up the wafers from the wafer boat, and then sends them into two wafer baskets for storage after splitting.

[0005] When the number of silicon wafers that can be accommodated in two wafer baskets is not an integer multiple of the number of wafers picked up by the pick-up device at a time, it will cause the remaining silicon wafers in the wafer basket to be insufficient for the pick-up device to pick up at a time, or the pick-up device to pick up too many silicon wafers and the remaining first clamping slots in the wafer basket to be insufficient for loading. This cannot maximize the function of the pick-up device, and the potential capacity of the device cannot be released.

[0006] Therefore, how to provide a solution to overcome or alleviate the above-mentioned defects is still a technical problem that needs to be solved by those skilled in the art. SUMMARY

[0007] The purpose of the present application is a material distribution device and sheet transfer apparatus, which can compensate for the difference between the number of wafers picked up by the pick-up device and the number of wafers carried by the first carrier device, can greatly exert the function of the pick-up device, release the potential capacity of the sheet transfer apparatus, improve the transfer efficiency of the material, and speed up the production rhythm to improve the production efficiency.

[0008] To solve the above technical problems, the application provides a material distribution device for transferring materials between a picking device and a first material carrying device, comprising a material distribution unit, the material distribution unit comprises a first material distribution assembly and a second material distribution assembly, the first material distribution assembly comprises a first material supporting part capable of moving in a first direction, the second material distribution assembly comprises a second material supporting part capable of moving in a second direction, the first direction and the second direction are arranged at an angle, the first material supporting part is used for feeding materials to the first material carrying device, and the first material supporting part is used for picking materials from the first material carrying device; the material distribution unit has a first working mode and a second working mode; in the first working mode, the first material supporting part works alone; in the second working mode, the first material supporting part and the second material supporting part both work, the second material supporting part can take away part of the materials of the first material supporting part for caching, and the materials cached by the second material supporting part can be at least partially provided to the first material supporting part.

[0009] Optionally, the first material supporting part comprises a plurality of first material supporting pieces arranged at intervals in a third direction, each of the first material supporting pieces is provided with a plurality of first tooth grooves; and / or the second material supporting part comprises a plurality of second material supporting pieces arranged at intervals in the third direction, each of the second material supporting pieces is provided with a plurality of second tooth grooves; the third direction is arranged at an angle with the first direction and the second direction.

[0010] Optionally, the first material distribution assembly further comprises a first driving part, the first driving part is connected with the first material supporting part and is used for driving the first material supporting part to move in the first direction; the second material distribution assembly further comprises a second driving part, the second driving part is connected with the second material supporting part and is used for driving the second material supporting part to move in the second direction.

[0011] Optionally, the material distribution unit comprises a main frame and a sub-frame, the sub-frame is connected with the main frame, the first driving part is mounted on the main frame, and the second driving part is mounted on the sub-frame.

[0012] Optionally, the sub-frame comprises a sub-platform, the second driving part is mounted on the sub-platform, and the second material supporting part is in sliding connection with the sub-platform.

[0013] Optionally, the material distribution unit further comprises a main platform, the main platform is provided with a displacement assembly, the displacement assembly is used for carrying the first material carrying device and driving the first material carrying device to move in position.

[0014] Optionally, the displacement assembly comprises a carrying part and a third driving part, the third driving part is connected with the carrying part and is used for driving the carrying part to move in position, and the carrying part is used for carrying the first material carrying device.

[0015] Optionally, the material distribution unit further comprises a shaping assembly, which is configured to shape the material located on the first material supporting part.

[0016] Optionally, the shaping assembly comprises two shaping parts which are spaced apart in the third direction, and each of the shaping parts is provided with a plurality of shaping grooves.

[0017] Optionally, the number of the material distribution units is two.

[0018] The application further provides a sheet transfer device, which comprises a slide basket, a slide boat, a pickup device and a material distribution device, the material distribution device is the material distribution device described above, the slide basket is the first material supporting device, the pickup device is configured to transfer the sheet in the slide boat to the material distribution device, and the pickup device is further configured to transfer the sheet in the material distribution device to the slide boat.

[0019] In the above scheme, the material distribution device comprises a material distribution unit, and the material distribution unit has a first working mode and a second working mode. In the first working mode, the first material supporting part can work alone, which can be applicable to the working condition that the pickup quantity of the pickup component and the material loading quantity of the first material supporting device can be matched. In the second working mode, the second material supporting part and the first material supporting part can both work, the second material supporting part can buffer the material in the first material supporting part and supply the buffered material to the first material supporting part, so as to better compensate for the difference between the pickup quantity of the pickup component and the material loading quantity of the first material supporting device. In this way, the function of the pickup device can be exerted to a greater extent, the production capacity of the sheet transfer device can be released, the material transfer efficiency can be improved, and the production efficiency can be improved.

[0020] When the material distribution device is used to unload the first material supporting device, if the pickup quantity of the pickup device is less than or equal to the accommodable quantity of the first material supporting device, the material distribution unit can work in the first working mode, the first material supporting part can support the material picked up by the pickup device, and then the first material supporting part can move in the first direction to unload the material supported thereby into the first material supporting device. If the pickup quantity of the pickup device is greater than the accommodable quantity of the first material supporting device, the material distribution unit can work in the second working mode, the second material supporting part can move in the second direction to approach the first material supporting part, and can take away part of the material of the first material supporting part to buffer, so that the material left in the first material supporting part can be unloaded into the first material supporting device, thereby realizing the matching between the pickup device and the first material supporting device; and the material buffered by the second material supporting part can be used in the subsequent unloading process to unload the buffered material into the first material supporting device at one time or in multiple times.

[0021] The above-described material distribution device, when picking up materials from the first material carrying device, if the number of materials in the first material carrying device and the number of materials picked up by the picking device are the same, the material distribution unit can work in the first working mode, the first material supporting part supports the materials in the first material carrying device, and then the first material supporting part moves in the first direction to supply the supported materials to the picking device for picking up. If the number of materials in the first material carrying device is more than the number of materials picked up, the material distribution unit can work in the second working mode, the second material supporting part can move in the second direction to approach the first material supporting part, and can take away part of the materials in the first material carrying device supported by the first material supporting part for buffering, so that the number of materials left by the first material supporting part is equal to the number of materials picked up, thereby realizing the matching between the picking device and the first material carrying device; and the materials buffered by the second material supporting part can be used in the subsequent picking process to supply the buffered materials to the picking device for picking up at one time or in multiple times. BRIEF DESCRIPTION OF DRAWINGS

[0022] FIG. 1 is a structural schematic diagram of the material distribution device provided in the present application;

[0023] FIG. 2 is a partial structural diagram of FIG. 1;

[0024] FIG. 3 is a structural schematic diagram of the front view of FIG. 2;

[0025] FIG. 4 is a structural schematic diagram of the first material supporting part and the shaping assembly in FIG. 1;

[0026] FIG. 5 is a structural schematic diagram of an implementation manner of the sheet transferring device provided in the present application;

[0027] FIG. 6 is a flow schematic diagram of a material distribution method provided in the present application;

[0028] FIG. 7 is a flow schematic diagram of a sheet transferring method provided in the present application;

[0029] FIG. 8 is a flow schematic diagram of another material distribution method provided in the present application;

[0030] FIG. 9 is a flow schematic diagram of another sheet transferring method provided in the present application.

[0031] The reference signs are explained as follows: 100 first loading device, 200 second loading device, 300 picking device, 400 distributing device; 1 distributing unit, 11 first distributing assembly, 111 first material supporting part, 111a first material supporting piece, 112 first driving part, 12 second distributing assembly, 121 second material supporting part, 121a second material supporting piece, 122 second driving part, 123 linkage part, 13 main frame, 131 main platform, 14 auxiliary frame, 141 auxiliary platform, 15 shifting assembly, 151 bearing part, 152 third driving part, 16 shaping assembly, 161 shaping part. DETAILED DESCRIPTION

[0032] In order for those skilled in the art to better understand the technical solutions of the present application, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0033] In the description of the embodiments of the present application, the terms "first", "second", "third" are only used for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second", "third" can explicitly or implicitly include one or more of the features.

[0034] In the description of the embodiments of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, "connecting" can be detachable connection, or can be non-detachable connection; can be direct connection, or can be indirect connection through intermediate medium.

[0035] In the description of the embodiments of the present application, the term "a plurality of" means two or more. And when "a plurality of" is used to describe the number of different components, it does not mean the mutual relationship of the components in the number.

[0036] In the description of the embodiments of the present application, the terms "including", "containing" or any other variants thereof are intended to cover non-exclusive containing, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or includes elements inherent to such process, method, article or device. Without more limitations, the element defined by the sentence "including a…" does not exclude the presence of another identical element in the process, method, article or device including the element.

[0037] In the embodiments of the present application, "and / or" is only used to describe the relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the following three cases: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this paper generally represents an "or" relationship between the front and rear associated objects.

[0038] Embodiment one

[0039] As described in the background section, when the sheet material, such as a silicon wafer, is transferred between the wafer baskets and the wafer boat, if the number of sheet materials that can be accommodated in the two wafer baskets is not an integer multiple of the number of sheet materials that can be picked up by the picking device in a single picking operation (hereinafter referred to as the picking number), the remaining sheet materials in the wafer baskets will not be enough for the picking device to pick up in one picking operation, or the picking device will pick up too many sheet materials and there will not be enough space in the wafer baskets to accommodate them.

[0040] Specifically, assuming that the wafer baskets can accommodate 100 sheet materials, and the picking device can pick up 75+75 sheet materials in a single picking operation. When placing sheet materials into the wafer baskets, the first time, both wafer baskets can accommodate, but the second time, both wafer baskets can only accommodate 25 sheet materials, resulting in the picked-up sheet materials by the picking device cannot be completely loaded. Similarly, when picking up sheet materials from the wafer baskets, the first time, both wafer baskets can provide the required sheet materials, but the second time, both wafer baskets only have 25 sheet materials left, resulting in the picking device cannot pick up enough sheet materials. In this way, the picking device cannot be maximally utilized, the potential capacity of the equipment cannot be released, and the transfer efficiency of the sheet materials between the wafer boat and the wafer baskets is low, which is not conducive to rapid and continuous production.

[0041] To this end, the present application provides a sheet material distribution device, which can be arranged between the picking device and the wafer baskets. By buffering and using the sheet materials, the sheet material distribution device can effectively make up for the difference in the number of sheet materials between the picking device and the wafer baskets, so as to maximize the function of the picking device and release the capacity of the sheet material transfer equipment, thereby improving the transfer efficiency of the sheet materials between the wafer boat and the wafer baskets, so as to speed up the production rhythm, improve the production efficiency, and ensure the continuity of production.

[0042] Specifically, please refer to FIGS. 1-4, FIG. 1 is a structural schematic diagram of the sheet material distribution device provided by the present application, FIG. 2 is a partial structural diagram of FIG. 1, FIG. 3 is a front view of FIG. 2, and FIG. 4 is a structural schematic diagram of the first material supporting part and the shaping assembly in FIG. 1.

[0043] As shown in FIGS. 1-4, the present application provides a material distributing device 400, which comprises a material distributing unit 1, the material distributing unit 1 comprising a first material distributing assembly 11 and a second material distributing assembly 12. The first material distributing assembly 11 comprises a first material supporting part 111 capable of moving in a first direction. The second material distributing assembly 12 comprises a second material supporting part 121 capable of moving in a second direction. The first direction and the second direction are arranged at an angle, for example, 90 degrees; in the orientation and position relationship of FIG. 3, the first direction is the up-down direction, and the second direction is the left-right direction.

[0044] The first material supporting part 111 is used for feeding material to the first material loading device, or the first material supporting part 111 is used for taking out material from the first material loading device. Taking the material distributing device 400 provided by the present application for the transfer of sheet materials, such as silicon wafers, as an example, the first material loading device can be a wafer basket.

[0045] The above-mentioned material distributing unit 1 has a first working mode and a second working mode. In the first working mode, the first material supporting part 111 works alone, which is used for ejecting material (such as silicon wafers) in the first material loading device, or for putting material into the first material loading device. In the second working mode, the first material supporting part 111 and the second material supporting part 121 both work, the second material supporting part 121 can take away part of the material of the first material supporting part 111 for buffering, or the material buffered by the second material supporting part 121 can be at least partially provided to the first material supporting part 111.

[0046] When the material distributing device 400 feeds the first material loading device, if the pickup quantity of the pickup device is less than or equal to the accommodable quantity of the first material loading device, the material distributing unit 1 can work in the first working mode, the first material supporting part 111 supports the material picked up by the pickup device, and then the first material supporting part 111 moves in the first direction to put the material it supports into the first material loading device. If the pickup quantity of the pickup device is greater than the accommodable quantity of the first material loading device, the material distributing unit 1 can work in the second working mode, the second material supporting part 121 can move in the second direction to approach the first material supporting part 111, and can take away part of the material of the first material supporting part 111 for buffering, so that the material left in the first material supporting part 111 can be put into the first material loading device, thereby realizing the matching between the pickup device and the first material loading device; the material buffered by the second material supporting part 121 can be used in the subsequent feeding process to put the buffered material into the first material loading device at one time or in multiple times.

[0047] Still assuming that the initial accommodable quantity of the first carrier device is 100, and the pickup quantity of the pickup device is 75. In the first time of discharging, the distribution unit 1 can be in the first working mode, and the 75 pieces of material picked up by the pickup device can be directly put into the empty first carrier device through the first material supporting part 111; in the second time of discharging, the distribution unit 1 can be in the second working mode, the second material supporting part 121 can buffer 50 pieces, and the first material supporting part 111 can put the remaining 25 pieces into the remaining empty positions of the first carrier device. At this time, the first carrier device is full, a new empty first carrier device can be replaced, and the third time of discharging can be carried out; in the third time of discharging, the distribution unit 1 can be in the second working mode, the second material supporting part 121 can put 25 pieces of the buffered material into the first material supporting part 111 together with the 75 pieces of material picked up by the pickup device, and put them into the empty first carrier device by the first material supporting part 111. At this time, the first carrier device is full, a new empty first carrier device can be replaced again, and the fourth time of discharging can be carried out; the fourth time of discharging is the same as the third time of discharging described above, so that the material buffered by the second material supporting part 121 can be used up; through the four times of discharging, three empty first carrier devices can be filled, the matching of the pickup quantity and the accommodable quantity of the first carrier device can be realized, the pickup device is full-load working in the four times of discharging and does not stop, the function of the pickup device can be maximized, and the potential capacity of the sheet transfer equipment can be released. Then, the process of the first time of discharging to the fourth time of discharging can be circulated.

[0048] It should be understood that according to the difference of the initial accommodable quantity of the first carrier device and the difference of the pickup quantity of the pickup device, the number of the material buffered by the second material supporting part 121 in the discharging stage at a time can also be different, and accordingly, the number of the material released at a time and the number of times of release when the second material supporting part 121 releases the buffered material, for example, supplies the buffered material to the first material supporting part 111, can also be different, which is not specifically limited here.

[0049] When the first carrier device is being picked, if the number of materials in the first carrier device and the number of picking of the picking device are consistent, the material distribution unit 1 can work in the first working mode, the first material supporting part 111 supports the materials in the first carrier device, and then the first material supporting part 111 moves in the first direction to supply the supported materials to the picking device for picking. If the number of materials in the first carrier device is more than the number of picking, the material distribution unit 1 can work in the second working mode, the second material supporting part 121 moves in the second direction to approach the first material supporting part 111, and can take away part of the materials in the first carrier device supported by the first material supporting part 111 for buffering, so that the number of materials left in the first material supporting part 111 is equal to the number of picking, thereby realizing the matching between the picking device and the first carrier device; and the materials buffered by the second material supporting part 121 can be used in the subsequent picking process to supply the buffered materials to the picking device for picking one time or multiple times.

[0050] Still assuming that the first carrier device is full of 100 materials, and the number of picking of the picking device is 75. In the first picking, the material distribution unit 1 can be in the second working mode, the first material supporting part 111 can push out all the 100 materials in the full first carrier device, and then the second material supporting part 121 buffers 25 of them, and then the picking device takes away the remaining 75 materials of the first material supporting part 111, at this time, the full first carrier device is emptied, a new full first carrier device can be replaced, and the second picking can be started; the second picking is the same as the first picking, still 25 materials are buffered by the second material supporting part 121, at this time, the full first carrier device is emptied again, a new full first carrier device can be replaced, and the third picking can be started; the third picking is the same as the first picking, still 25 materials are buffered by the second material supporting part 121, at this time, the full first carrier device is emptied again, and the fourth picking can be started; after three times of buffering, the second material supporting part 121 has stored 75 materials, therefore, in the fourth picking, the material distribution unit 1 can be in the second working mode, the first material supporting part 111 provides all the 75 materials on the second material supporting part 121 to the picking device for picking; through the four pickings, the materials of three full first carrier devices can be picked, the matching between the number of picking and the number of materials in the first carrier device can be realized, the picking device is full load working in the four pickings without stopping, the function of the picking device can be maximized, and the potential capacity of the sheet transfer equipment can be released. Then, the process of the first picking to the fourth picking can be repeated.

[0051] It should be understood that the number of materials that can be cached by the second material supporting part 121 at one time during the material taking stage can also vary according to the difference in the number of materials contained by the first material carrying device and the difference in the number of materials picked up by the picking device, and accordingly, the timing at which the second material supporting part 121 releases the cached materials can also vary, which is not limited herein.

[0052] The first material supporting part 111 can include a plurality of first material supporting pieces 111a arranged at intervals in the third direction, each of which can be used to simultaneously support materials, thereby improving the reliability of the support and ensuring the stability of the materials when the first material supporting part 111 moves in the first direction. In the implementation shown in FIG. 4, the number of first material supporting pieces 111a can be two. Each first material supporting piece 111a can be provided with a plurality of first tooth grooves (not labeled in the figure), which are arranged at equal intervals in the second direction, and each first tooth groove is used to carry a piece of material.

[0053] The first material supporting part 111 can include a plurality of first material supporting pieces 111a arranged at intervals in the third direction, each of which can be used to simultaneously support materials, thereby improving the reliability of the support and ensuring the stability of the materials when the first material supporting part 111 moves in the first direction. In the implementation shown in FIG. 4, the number of first material supporting pieces 111a can be two. Each first material supporting piece 111a can be provided with a plurality of first tooth grooves (not labeled in the figure), which are arranged at equal intervals in the second direction, and each first tooth groove is used to carry a piece of material.

[0054] Here, the specific structure of the first driving part 112 is not limited in the embodiments of the present application, and can be set as needed by those skilled in the art in actual applications, as long as it meets the requirements of use. For example, the first driving part 112 can adopt a linear oil cylinder, a linear air cylinder or other linear driving elements that can directly output linear displacement, so that the structure of the first driving part 112 can be relatively simple. Alternatively, the first driving part 112 can also adopt a rotary air cylinder, a motor or other rotary driving elements that can directly output rotary displacement, and at this time, the first driving part 112 can further include a gear and rack mechanism, a lead screw mechanism or other displacement conversion mechanisms in the form of a displacement conversion mechanism, so as to convert the rotary displacement directly output by the above rotary driving elements into the required linear displacement.

[0055] The second material supporting part 121 can include a plurality of second material supporting pieces 121a arranged at intervals in the third direction, each of the second material supporting pieces 121a can be used to support the material at the same time, so as to improve the reliability of the support and ensure the stability of the material when the second material supporting part 121 moves in the second direction; in the implementation manner shown in FIG. 2, the number of the first material supporting pieces 111a can be two. Each of the second material supporting pieces 121a can be provided with a plurality of second tooth grooves (not labeled in the figure), and the second tooth grooves are arranged at equal intervals in the second direction, and each of the second tooth grooves is used to carry a piece of material.

[0056] The second material supporting part 121 can include a plurality of second material supporting pieces 121a arranged at intervals in the third direction, each of the second material supporting pieces 121a can be used to support the material at the same time, so as to improve the reliability of the support and ensure the stability of the material when the second material supporting part 121 moves in the second direction; in the implementation manner shown in FIG. 2, the number of the first material supporting pieces 111a can be two. Each of the second material supporting pieces 121a can be provided with a plurality of second tooth grooves (not labeled in the figure), and the second tooth grooves are arranged at equal intervals in the second direction, and each of the second tooth grooves is used to carry a piece of material.

[0057] It should be understood that when the second material supporting part 121 needs to buffer the material, or the material buffered by the second material supporting part 121 needs to be used (i.e. in the second working mode), the second material supporting part 121 can move close to the first material supporting part 111 in the second direction to be put into use; and when the second material supporting part 121 does not need to be used (i.e. in the first working mode), the second material supporting part 121 can move away from the first material supporting part 111 in the second direction. Therefore, according to the change of the working mode of the material distribution device 400, the second material supporting part 121 can move back and forth in the second direction to meet the requirements of use.

[0058] As shown in FIG. 1 and FIG. 2, the material distributing unit 1 can include a main frame 13 and a sub-frame 14, and the sub-frame 14 can be connected to the main frame 13. The main frame 13 and the sub-frame 14 are the structural basis of the material distributing unit 1, and are used to provide mounting positions for the first material distributing assembly 11 and the second material distributing assembly 12. In detail, the first driving part 112 of the first material distributing assembly 11 can be mounted on the main frame 13, and the second driving part 122 of the second material distributing assembly 12 can be mounted on the sub-frame 14. The specific mounting manner is not limited here, as long as the reliability of the mounting can be ensured.

[0059] The main frame 13 can be a frame structure. The sub-frame 14 can be a plate frame structure. As shown in FIG. 1, the sub-frame 14 can include a plate-shaped sub-platform 141, the sub-platform 141 can be mounted on the main frame 13, and the second driving part 122 can be mounted on the sub-platform 141. The second material supporting part 121 can be in sliding connection with the sub-platform 141. In detail, the second material supporting part 121 can be in sliding connection with the sub-platform 141 through the linkage part 123. The specific sliding connection manner is not limited here.

[0060] In some optional implementations, the main frame 13 can further include a main platform 131, and the main platform 131 can also be plate-shaped. The main platform 131 can be provided with a displacement assembly 15, the displacement assembly 15 is used to carry the first material carrying device, and is used to drive the first material carrying device to move in position in the second direction, so as to adjust the position of the first material carrying device.

[0061] As shown in FIG. 1, the displacement assembly 15 can include a carrying part 151 and a third driving part 152. The carrying part 151 is used to carry the first material carrying device. The third driving part 152 can be mounted on the main platform 131, and the third driving part 152 can be connected to the carrying part 151, and is used to drive the carrying part 151 to move in position, so as to adjust the working position of the carrying part 151.

[0062] The carrying part 151 can have a first working position and a second working position; in the first working position, the carrying part 151 can be located at a position corresponding to the first material supporting part 111 in the first direction; in the second working position, the carrying part 151 can be away from the first material supporting part 111 in the second direction. When the material distribution device 400 is used for material feeding, the carrying part 151 can be first located at the second working position to receive the empty first material carrying device, then the carrying part 151 can be driven by the third driving part 152 to move to the first working position to send the empty first material carrying device to the position corresponding to the first material supporting part 111, after the first material carrying device is filled, the carrying part 151 can be driven by the third driving part 152 to move to the second working position, and the full first material carrying device can be taken away; such a cycle can be implemented continuously to implement the material feeding operation. When the material distribution device 400 is used for material taking, the carrying part 151 can be first located at the second working position to receive the full first material carrying device, then the carrying part 151 can be driven by the third driving part 152 to move to the first working position to send the full first material carrying device to the position corresponding to the first material supporting part 111, after the first material carrying device is emptied, the carrying part 151 can be driven by the third driving part 152 to move to the second working position, and the empty first material carrying device can be taken away; such a cycle can be implemented continuously to implement the material taking operation.

[0063] In some optional implementations, the material distribution unit 1 can further include a shaping assembly 16, which is used for shaping the material located at the first material supporting part 111, so as to facilitate the posture of the material, thereby facilitating the material feeding to the first material carrying device or the material being picked up by the picking device, and reducing the possibility of damage to the material.

[0064] In combination with FIG. 4, the shaping assembly 16 can include two shaping parts 161 spaced apart in the third direction, and the two shaping parts 161 can be located at two sides of the material in the third direction respectively to shape the material from two ends of the material in the third direction, and the shaping effect can be better. The shaping part 161 can be provided with a plurality of shaping grooves (not labeled in the figure), and the shaping grooves of the same shaping part 161 can be equidistantly arranged in the second direction; a piece of material can be inserted into one shaping groove, and the shaping groove can position the material through the two groove side walls oppositely arranged in the second direction, thereby completing the shaping of the material.

[0065] In some optional implementations, as shown in FIG. 1, the number of the above-mentioned material distribution unit 1 can be two, that is, two groups of the first material distribution assembly 11 and the second material distribution assembly 12 can be included simultaneously, thereby simultaneously implementing the material taking and feeding of two first material carrying devices, and this implementation is especially suitable for the material distribution when the sheet material is transferred under the double insertion working condition.

[0066] In the transferring of the sheets, the first carrier device is a carrier basket, and the second carrier device is a carrier boat, each slot of the carrier boat can be inserted with two sheets, and each slot of the carrier basket can be inserted with one sheet. In this way, when the sheets are transferred from the carrier boat to the carrier basket, the sheets picked up by the picking device are all in groups, for example, the picking device can pick up 75 groups, and then form a picking quantity of 75+75 after the sheet splitting operation, and then 75 sheets can be placed into two carrier baskets at the same time; similarly, when the sheets are transferred from the carrier basket to the carrier boat, the picking device can pick up the same number (for example, 75 sheets) of sheets from two carrier baskets respectively, and then form groups of sheets after the sheet combining operation, and then the groups of sheets (for example, 75 groups) can be loaded into the carrier boat.

[0067] The two distribution units 1 can be integrated, as shown in FIG. 1, and the two distribution units 1 can share one main frame 13, at this time, the distribution device 400 provided by the application can have higher compactness, and the integration degree can be higher. Of course, the two distribution units 1 can also be independently provided, which does not affect the function implementation of each distribution unit 1.

[0068] It needs to be emphasized that although the design of the distribution device 400 provided by the application is initially intended to cope with the transfer of sheets, such as silicon wafers, between the carrier boat and the carrier basket, this does not mean that the distribution device 400 provided by the application can only be applied to the transfer of silicon wafers; in other words, the application examples actually do not limit the application field of the distribution device 400, and the distribution device 400 provided by the application examples can be applied in any scenario where the picking device and the first carrier device do not match.

[0069] Please refer to FIG. 5, which is a structural schematic diagram of an implementation manner of the sheet transfer equipment provided by the application.

[0070] As shown in FIG. 5, the application provides a sheet transfer equipment, which comprises a first carrier device 100, a second carrier device 200, a picking device 300 and a distribution device 400. The first carrier device 100 can be a carrier basket, and the second carrier device 200 can be a carrier boat.

[0071] When the sheets are transferred from the first carrier device 100 to the second carrier device 200, the sheets in the first carrier device 100 can be distributed by the distribution device 400, and then picked up by the picking device 300 and placed into the second carrier device 200. Similarly, when the sheets are transferred from the second carrier device 200 to the first carrier device 100, the sheets picked up by the picking device 300 from the second carrier device 200 are placed in the distribution device 400, and then placed into the first carrier device 100 after being distributed by the distribution device 400.

[0072] The material distribution device 400 can realize the buffering and use of the sheet material, effectively compensate for the difference in the number of sheets between the pickup device 300 and the first material loading device 100, thereby maximizing the function of the pickup device 300, releasing the production capacity of the sheet material transfer equipment, improving the transfer efficiency of the sheet material between the first material loading device 100 and the second material loading device 200, and preventing the first material loading device 100 and / or the second material loading device 200 from being occupied and / or idle, thereby accelerating the production rhythm, effectively improving the production efficiency, and ensuring the continuity of production.

[0073] In specific practice, one material distribution device 400 can include two material distribution units 1 to simultaneously realize the transfer of sheet material between two first material loading devices 100 and one second material loading device 200. Moreover, two material distribution devices 400 can be provided, one of which can receive the empty first material loading device 100 for the transfer of sheet material from the second material loading device 200 to the first material loading device 100, and the other can receive the full first material loading device 100 for the transfer of sheet material from the first material loading device 100 to the second material loading device 200.

[0074] Embodiment Two

[0075] Please refer to FIG. 6, which is a flowchart of a material distribution method provided by the embodiment of the present application.

[0076] As shown in FIG. 6, the present application also provides a material distribution method, which can be specifically executed by a material distribution device for transferring material from a pickup device to a first material loading device.

[0077] The holding capacity of the first material loading device is set as X, and the pickup capacity of the pickup device is set as Y, wherein 2Y>X>Y, (2Y-X) / (X-Y)=M, and M is a positive integer. The above-mentioned material distribution method includes the following steps S110 to S140.

[0078] In step S110, Y pieces of material are picked up by the pickup device, and the Y pieces of material picked up by the pickup device are placed into the empty first material loading device. Since X>Y, the Y pieces of material picked up by the pickup device can be accommodated by the empty first material loading device and can be directly placed into the empty first material loading device. After step S110, the first material loading device still has (X-Y) empty positions.

[0079] Step S120, the Y sheet material is picked up again by the picking device, the (2Y-X) sheet in the Y sheet material picked up again by the picking device is cached, and the remaining (X-Y) sheet in the Y sheet material picked up again by the picking device is put into the first loading device. In this way, after step S110 and step S120, a first loading device can be filled, and a new empty first loading device can be replaced; in addition, the (2Y-X) sheet material is in a cached state, which can be used subsequently.

[0080] Step S130, the Y sheet material is picked up again by the picking device, the (2Y-X) sheet in the Y sheet material picked up again by the picking device is cached, and the remaining (X-Y) sheet in the Y sheet material picked up again by the picking device is put into the first loading device. In this way, after step S110 and step S120, a first loading device can be filled, and a new empty first loading device can be replaced; in addition, the (2Y-X) sheet material is in a cached state, which can be used subsequently.

[0081] Step S140, it is judged whether the execution times of step S130 are less than M.

[0082] If the result of step S140 is yes, step S130 can be repeatedly executed. If the result of step S140 is no, that is, the (2Y-X) sheet material cached in step S120 is completely used, a dispensing cycle ends, and the dispensing cycle realizes full loading of (M+1) first loading devices. If dispensing is not performed, the dispensing method ends running. If dispensing is still performed, steps S110 to S140 described above can be cyclically executed to start the next dispensing cycle.

[0083] In the above dispensing method, by caching the material picked up by the picking device, the difference between the picking quantity of the picking device and the containing quantity of the first loading device can be matched, the picking device is full-load worked in each dispensing process, the function of the picking device can be maximized, the potential capacity of the sheet transfer equipment is released, and the efficiency of transferring material from the picking device to the first loading device is improved, so that the production rhythm can be accelerated and the production efficiency can be improved.

[0084] The above-mentioned material distributing device can be the material distributing device in Embodiment One. Thus, the above-mentioned step S110 can be that the Y-piece material picked up by the picking device is put into the first material carrying device 100 through the first material supporting part 111; the above-mentioned step S120 can be that the (2Y-X) pieces in the Y-piece material picked up by the picking device 300 again are put into the second material supporting part 121 for buffering, and the (X-Y) pieces in the Y-piece material picked up by the picking device 300 again can be put into the first material carrying device 100 through the first material supporting part 111; and the step S130 can be that the (X-Y) pieces in the buffered material and the Y-piece material picked up by the picking device 300 again are put into the first material carrying device 100 through the first material supporting part 111.

[0085] The relationship between the accommodating quantity and the picking quantity can also satisfy 2Y / X = 1.5, and in this case, M = 2. In addition to this, the relationship between the accommodating quantity and the picking quantity can also satisfy other relationships, for example, 2Y / X = 1.8, and in this case, M = 8.

[0086] Embodiment Three

[0087] Please refer to FIG. 7, which is a flowchart of a wafer transferring method provided by the embodiments of the present application.

[0088] As shown in FIG. 7, the present application also provides a wafer transferring method for transferring wafers from a second material carrying device to a first material carrying device. The first material carrying device can be a wafer basket, the second material carrying device can be a wafer boat, and the wafers can be silicon wafers.

[0089] The above-mentioned wafer transferring method includes: step S210, obtaining Y wafer groups from the second material carrying device through a picking device, each wafer group including two wafers that are attached to each other; step S220, splitting the wafer groups through the picking device to form two rows of wafers, each row including Y wafers; and step S230, distributing the two rows of wafers through a material distributing device to simultaneously feed two first material carrying devices.

[0090] In the above-mentioned step S230, the material distributing device can distribute the wafers according to the material distributing method described in Embodiment Two, so as to maximize the function of the picking device, release the potential productivity of the wafer transferring equipment, improve the wafer transferring efficiency from the second material carrying device to the first material carrying device, prevent the first material carrying device and / or the second material carrying device from being occupied and / or idle, speed up the production rhythm, effectively improve the production efficiency, and ensure the continuity of production.

[0091] The number of the sheet sets carried by the second carrier device can be 2Y, so that the picking device can pick the sheet sets from the second carrier device twice. The manner in which the picking device picks the sheet sets from the second carrier device is not limited herein.

[0092] Embodiment Four

[0093] Please refer to FIG. 8, which is a flowchart of another material distribution method provided by the embodiments of the present application.

[0094] As shown in FIG. 8, the present application also provides a material distribution method, which can be performed by a material distribution device, for transferring materials from a first carrier device to a picking device.

[0095] The number of the sheet sets carried by the second carrier device can be 2Y, so that the picking device can pick the sheet sets from the second carrier device twice. The manner in which the picking device picks the sheet sets from the second carrier device is not limited herein.

[0096] Step S310: X sheet materials carried by the full first carrier device are taken out, (X-Y) sheet materials are buffered, Y sheet materials are supplied to the picking device, and a new full first carrier device is replaced. Since X>Y, the full first carrier device can meet the picking requirement of the picking device, and the remaining (X-Y) sheet materials can be buffered first.

[0097] Step S320: whether the number of times of executing step S310 is less than N is determined. If yes, step S310 is repeatedly executed. Based on the relationship between X and Y, Y / (X-Y)=N. After step S310 is executed for N times, Y sheet materials can be buffered.

[0098] Step S330: the buffered Y sheet materials are supplied to the picking device.

[0099] In this way, N full first carrier devices can be emptied in total, and a picking period ends. If picking is not performed again, the material distribution method ends. If picking is still performed, steps S310-S330 can be repeatedly executed to start a next picking period.

[0100] In the material distribution method, the buffering of the materials provided by the first carrier device can match the difference between the picking number of the picking device and the carrying number of the first carrier device. The picking device works at full capacity in each picking process, which can maximize the function of the picking device, release the potential capacity of the sheet transfer equipment, and improve the efficiency of transferring materials from the first carrier device to the picking device, so that the production rhythm can be accelerated and the production efficiency can be improved.

[0101] The above-mentioned material distributing device can be the material distributing device in Embodiment One. Thus, the above-mentioned step S310 can be specifically: taking out the X pieces of material accommodated by the first material carrying device 100 through the first material supporting part 111, buffering the (X-Y) pieces of material therein through the second material supporting part 121, and supplying the remaining Y pieces to the picking device 300 through the first material supporting part 121; and the step S330 can be specifically: supplying the Y pieces of material buffered by the second material supporting part 121 to the picking device 300 through the first material supporting part 111.

[0102] The relationship between the accommodating quantity and the picking quantity can satisfy 2Y / X=1.5, and in this case, N=3. In addition to this, the relationship between the accommodating quantity and the picking quantity can also satisfy other relationships, for example, 2Y / X=1.8, and in this case, N=9.

[0103] Embodiment Five

[0104] Please refer to FIG. 9, which is a flowchart of another sheet transferring method provided by the embodiments of the present application.

[0105] As shown in FIG. 9, the present application also provides a sheet transferring method for transferring the sheet from the first material carrying device to the second material carrying device. The first material carrying device can be specifically a wafer basket, the second material carrying device can be specifically a wafer boat, and the sheet can be specifically a silicon wafer.

[0106] The above-mentioned sheet transferring method includes: step S410, distributing the sheet in two first material carrying devices through a material distributing device, and supplying two rows of sheets to the picking device, the number of each row of sheets being Y pieces; step S420, combining the two rows of sheets through the picking device to form Y sheet groups; and step S430, placing the Y sheet groups into the second material carrying device through the picking device.

[0107] In the above-mentioned step S410, the material distributing device can specifically distribute the sheet according to the distribution method involved in the aforementioned Embodiment Four, so as to maximize the function of the picking device, release the potential capacity of the sheet transferring equipment, improve the efficiency of transferring the sheet from the first material carrying device to the second material carrying device, prevent the first material carrying device 100 and / or the second material carrying device 200 from being occupied and / or idle, speed up the production rhythm, effectively improve the production efficiency, and ensure the continuity of production.

[0108] The number of sheet groups carried by the above-mentioned second material carrying device can be 2Y. In this way, the picking device can place the sheet groups into the second material carrying device twice, and the way in which the picking device places the sheet groups into the second material carrying device is not limited here.

[0109] It should be understood that the sheet transferring method in Embodiment Three and Embodiment Five can be performed in succession in one cycle, for example, after the sheet is transferred from the second carrier device to the first carrier device, the left space can be used to carry another part of the sheet, that is, after the sheet is transferred from the second carrier device to the first carrier device, another part of the sheet can be transferred from another first carrier device to the same second carrier device, so that the sheet transferring efficiency can be improved to a greater extent, and the situation that the first carrier device and / or the second carrier device is occupied and / or idle can be prevented, thereby improving the production efficiency and effectively ensuring the continuity of production.

[0110] In some implementations, the sheet transferred from the first carrier device to the second carrier device is referred to as a green sheet, that is, a sheet to be processed, and the green sheet can be processed in the second carrier device in the form of coating and the like to form a mature sheet, that is, a processed sheet. Therefore, the first carrier device carrying the sheet can be correspondingly distinguished into a dry-type sheet carrier basket and a wet-type sheet carrier basket. The dry-type sheet carrier basket is used to carry the mature sheet, and the wet-type sheet carrier basket is used to carry the green sheet. Therefore, after the mature sheet is taken out from the second carrier device and transferred to the dry-type sheet carrier basket, the left space can be used to load the green sheet taken out from the wet-type sheet carrier basket and transferred to the second carrier device. The first carrier device loaded or unloaded can timely connect the upper and lower processes, and the space in the first carrier device and the second carrier device is fully utilized to prevent the situation that the first carrier device and / or the second carrier device is occupied and / or idle, thereby improving the production efficiency and effectively ensuring the continuity of production.

[0111] The above is only the preferred embodiment of the present application, and it should be pointed out that for ordinary skilled in the art, without departing from the principles of the present application, a number of improvements and refinements can be made, and these improvements and refinements should be considered as the protection scope of the present application.

Claims

1. A material distribution device, characterized by, The application relates to a device for transferring materials between a picking device and a first material carrying device, comprising a material distributing unit, the material distributing unit comprising a first material distributing assembly and a second material distributing assembly, the first material distributing assembly comprising a first material supporting part capable of moving in a first direction, the second material distributing assembly comprising a second material supporting part capable of moving in a second direction, the first direction and the second direction being arranged at an angle, the first material supporting part being used for feeding materials to the first material carrying device, and the first material supporting part being used for picking materials from the first material carrying device. The material distributing unit has a first working mode and a second working mode; in the first working mode, the first material supporting part works alone; in the second working mode, the first material supporting part and the second material supporting part both work, and the second material supporting part can take away part of the materials of the first material supporting part for buffering, or the materials buffered by the second material supporting part can be at least partially provided to the first material supporting part.

2. The apparatus of claim 1, wherein The first material supporting part comprises a plurality of first material supporting parts arranged at intervals in a third direction, and each of the first material supporting parts is provided with a plurality of first tooth grooves; and / or the second material supporting part comprises a plurality of second material supporting parts arranged at intervals in the third direction, and each of the second material supporting parts is provided with a plurality of second tooth grooves. The third direction is arranged at an angle with the first direction and the second direction.

3. The apparatus of claim 1, wherein: The first material distributing assembly further comprises a first driving part connected with the first material supporting part and used for driving the first material supporting part to move in the first direction. The second material distributing assembly further comprises a second driving part connected with the second material supporting part and used for driving the second material supporting part to move in the second direction.

4. The apparatus of claim 3, wherein: The material distributing unit comprises a main frame and a sub-frame, the sub-frame is connected with the main frame, the first driving part is mounted on the main frame, and the second driving part is mounted on the sub-frame.

5. The apparatus of claim 4, wherein: The sub-frame comprises a sub-platform, the second driving part is mounted on the sub-platform, and the second material supporting part is in sliding connection with the sub-platform.

6. The apparatus of any one of claims 1-5, wherein, The material distributing unit further comprises a main platform provided with a shifting assembly, the shifting assembly is used for carrying the first material carrying device and driving the first material carrying device to move in position.

7. The apparatus of claim 6, wherein: The shifting assembly comprises a carrying part and a third driving part, the third driving part is connected with the carrying part and used for driving the carrying part to move in position, and the carrying part is used for carrying the first material carrying device.

8. The apparatus of any one of claims 1-5, wherein, The material distributing unit further comprises a shaping assembly, the shaping assembly is used for shaping the materials located on the first material supporting part.

9. The apparatus of claim 8, wherein: The shaping assembly comprises two shaping parts arranged at intervals in the third direction, and each of the shaping parts is provided with a plurality of shaping grooves.

10. The apparatus of any one of claims 1-5, wherein, The number of the material distributing units is two.

11. A sheet transfer apparatus characterized by, A slide basket, a slide boat, a pick-up device, and a dispensing device, the dispensing device being the dispensing device of any of claims 1-10, the slide basket being the first loading device, the pick-up device being for transferring a slide from within the slide boat to the dispensing device, and the pick-up device also being for transferring a slide from the dispensing device to the slide boat.

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