Single-axis MEMS gyroscope

Abstract

A single-axis MEMS gyroscope, comprising a substrate mechanism (A), wherein one or more gyroscope mechanisms (B) arranged in sequence in a Y-axis direction are connected to the substrate mechanism (A); each gyroscope mechanism (B) comprises two gyroscope units (C) arranged in the Y-axis direction; each gyroscope unit (C) comprises a reciprocating assembly (D) and two oscillating assemblies (E) symmetrically arranged on two sides of the reciprocating assembly (D) in an X-axis direction; each reciprocating assembly (D) comprises a drive frame (11) and a drive electrode (12); and each oscillating assembly (E) comprises a motion reversing member (21), a mass block (22) and a Coriolis force detection electrode (23). Adjacent drive frames (11) of a same gyroscope mechanism (B) are connected by means of a power reversing spring; adjacent motion reversing members (21) of a same gyroscope mechanism (B) are connected to a power reversing spring by means of a first decoupling spring (33); the drive frames (11) of different gyroscope mechanisms (B) are coupled; and all the mass blocks (22) of a same gyroscope mechanism (B) are coupled. The single-axis MEMS gyroscope has advantages such as high energy efficiency ratio, strong coupling and impact resistance.

Description

Single-axis MEMS gyroscope TECHNICAL FIELD

[0001] The present application relates to the technical field of detection, in particular to a single-axis MEMS gyroscope. BACKGROUND

[0002] MEMS gyroscope, i.e. micro-mechanical gyroscope, has been widely used in consumer electronics, automotive industry and aerospace due to its small size, low cost and high integration. With the increasing demand for performance of MEMS gyroscope, there is an increasing demand for low-cost, small-size and high-performance gyroscope.

[0003] Currently, typical MEMS gyroscope is mainly a capacitive resonant gyroscope, and its basic principle is to measure the energy conversion between different resonances caused by Coriolis force to obtain the size of angular velocity. The driving mode of the micro-mechanical gyroscope swings around the axis perpendicular to the mass block. When an angular velocity is applied, due to the Coriolis effect, the gyroscope will transfer energy to the detection mode, so that the mass block swings out of plane under the relative driving. The displacement of the mass block swinging out of plane can be detected to obtain the size of angular velocity. The micro-mechanical gyroscope for out-of-plane detection in the prior art has low energy efficiency on the one hand due to the single-end driving layout, and on the other hand, the weak coupling between each motion part cannot guarantee the consistency of the working amplitude of each motion part, resulting in reduced sensor detection accuracy. In addition, the traditional MEMS gyroscope uses a single large mass Coriolis force mass block for detection, which is prone to failure under high impact conditions due to large kinetic energy. SUMMARY

[0004] Therefore, the present application provides a single-axis MEMS gyroscope with high energy efficiency, strong coupling and impact resistance.

[0005] To solve the above technical problems, the present application provides a single-axis MEMS gyroscope, comprising a substrate mechanism, one or a plurality of gyroscope mechanisms arranged in sequence along the Y-axis direction are connected to the substrate mechanism, each gyroscope mechanism comprises two gyroscope units arranged along the Y-axis direction and symmetric to each other, each gyroscope unit comprises a reciprocating component and two swing components symmetrically arranged on both sides of the reciprocating component in the X-axis direction.

[0006] The reciprocating component comprises a driving frame and a driving module, the driving frame is connected to a first anchor point through a first spring beam, the driving frame has a degree of freedom of reciprocating motion along the Y-axis direction, and the driving module comprises a driving electrode, the driving electrode drives the driving frame to reciprocate along the Y-axis direction.

[0007] The swing assembly comprises a motion reversing component, one or a plurality of mass blocks arranged in sequence along the X-axis direction, and one or a plurality of detection modules arranged in sequence along the X-axis direction, the motion reversing component is connected to a second anchor point through a second spring beam, the motion reversing component has a degree of freedom of in-plane swing around the Z-axis direction, the mass block is connected to a third anchor point through a third spring beam, the mass block has degrees of freedom of in-plane swing around the Z-axis direction and out-of-plane swing around the X-axis direction, the detection module corresponds to the mass block in one-to-one correspondence, the detection module comprises a Coriolis force detection electrode, and the Coriolis force detection electrode detects the out-of-plane swing displacement of the corresponding mass block.

[0008] The adjacent driving frames of the same gyro mechanism are connected through a first coupling spring, the first coupling spring is a power reversing spring, and the power reversing spring is used for converting the motion in the Y-axis direction into the motion in the X-axis direction; the adjacent driving frames of different gyro mechanisms are connected through a second coupling spring; the adjacent motion reversing components of the same gyro mechanism are connected to the power reversing spring through a first decoupling spring; the motion reversing components and the mass blocks of the same swing assembly are connected through a second decoupling spring; the adjacent mass blocks are connected through a third coupling spring; and the mass blocks located at the same end in the Y-axis direction are respectively connected to the same fifth coupling spring through a fourth coupling spring.

[0009] Further, the power reversing spring comprises two V-shaped elastic bodies arranged along the X-axis direction and symmetrical to each other, the inner angles of the two V-shaped elastic bodies are opposite to each other, and the two ends of the V-shaped elastic bodies are respectively connected to the adjacent driving frames of the same gyro mechanism.

[0010] Further, the power reversing spring comprises two V-shaped elastic bodies arranged along the X-axis direction and symmetrical to each other, the outer angles of the two V-shaped elastic bodies are opposite to each other, and the two ends of the V-shaped elastic bodies are respectively connected to the adjacent driving frames of the same driving unit.

[0011] Further, the Y-axis direction of the driving frame is provided with the first anchor point, and the driving frame is connected to the first anchor points on both sides of the Y-axis direction through the first spring beam.

[0012] Further, the motion reversing component is an L-shaped component, the inner corner side of each L-shaped component is provided with a second anchor point, the inner corner surface of the L-shaped component is connected to the second anchor point through a second spring beam, and the two ends of the L-shaped component are respectively connected to the first decoupling spring and the second decoupling spring.

[0013] Further, the center position of each mass block is provided with a third anchor point, and the mass block is connected to the third anchor point at the center position through the third spring beam.

[0014] Further, the driving module further comprises a driving detection electrode, which is used to detect the amplitude, frequency and phase of the motion of the driving frame.

[0015] Further, the detection module further comprises a Coriolis force feedback electrode, which is used to start open-loop detection or closed-loop detection.

[0016] Further, the detection module further comprises a quadrature force correction electrode, and a mass balance through hole is arranged on the mass block, and the quadrature force correction electrode and the mass balance through hole constitute a quadrature stiffness adjusting structure.

[0017] Further, the substrate mechanism comprises a first substrate and a second substrate, and the third anchor point and the detection module are connected to the first substrate and the second substrate respectively and are located on both sides of the mass block in the Z-axis direction.

[0018] The above technical scheme of the present application has the following advantages compared with the prior art: the single-axis MEMS gyroscope disclosed by the present application has the following advantages: on the one hand, the layout mode of central driving and two-side detection is adopted, the power reversing spring is used to convert the driving force or motion in the Y-axis direction into the driving force or motion in the X-axis direction, the motion in the Y-axis direction is further converted into the periodic reciprocating swing of the mass block through the motion reversing member, the motion coupling error between the driving frame and the mass block is removed through the first decoupling spring and the second decoupling spring, and the energy efficiency ratio of the sensor is effectively improved; on the other hand, the mutual coupling structure is used to connect the driving frame with the driving frame, the driving frame with the mass block and the mass blocks with each other, the mutual coupling structure can offset the motion coupling error of each working part, improve the synchronization of the motion of each driving frame and further improve the detection accuracy of the gyroscope; at the same time, the gyroscope comprises a plurality of mass blocks, the plurality of mass blocks are supported in a split manner, coupled and detected in a differential manner, and the impact resistance and signal-to-noise ratio of the gyroscope can be improved under the same volume. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to make the content of the present application more easily understood, the present application will be further described in detail below according to specific embodiments of the present application and in combination with the drawings.

[0020] Fig. 1 is a layout diagram of the single-axis MEMS gyroscope in the embodiment one of the present application;

[0021] Fig. 2 is a structural schematic diagram of the single-axis MEMS gyroscope in the embodiment one of the present application;

[0022] Fig. 3 is a driving mode schematic diagram of the single-axis MEMS gyroscope in the embodiment one of the present application;

[0023] Fig. 4 is a detection schematic diagram of the single-axis MEMS gyroscope in the embodiment one of the present application;

[0024] Figure 5 is a schematic diagram of the connection of two reciprocating components of the same gyro mechanism of the single-axis MEMS gyroscope in the first embodiment of the present application;

[0025] Figure 6 is a schematic diagram of the connection of two reciprocating components and two oscillating components of the same gyro mechanism of the single-axis MEMS gyroscope in the first embodiment of the present application;

[0026] Figure 7 is a schematic diagram of the connection of adjacent masses of the single-axis MEMS gyroscope in the first embodiment of the present application;

[0027] Figure 8 is a schematic diagram of the single-anchor spring beam structure formed by the third anchor point and the third spring beam of the single-axis MEMS gyroscope in the first embodiment of the present application;

[0028] Figure 9 is a sectional view of the drive mode of the single-axis MEMS gyroscope in the first embodiment of the present application;

[0029] Figure 10 is a sectional view of the detection mode of the single-axis MEMS gyroscope in the first embodiment of the present application;

[0030] Figure 11 is a schematic diagram of the structure of the single-axis MEMS gyroscope in the second embodiment of the present application;

[0031] Figure 12 is a schematic diagram of the drive mode of the single-axis MEMS gyroscope in the second embodiment of the present application.

[0032] Figure 13 is a schematic diagram of the detection mode of the single-axis MEMS gyroscope in the second embodiment of the present application;

[0033] Figure 14 is a schematic diagram of the single-anchor spring beam structure formed by the third anchor point and the third spring beam of the single-axis MEMS gyroscope in the third embodiment of the present application.

[0034] Figure 14 is a schematic diagram of the single-anchor spring beam structure formed by the third anchor point and the third spring beam of the single-axis MEMS gyroscope in the third embodiment of the present application. DETAILED DESCRIPTION

[0035] The application will be further described in conjunction with the drawings and specific embodiments so that those skilled in the art can better understand the application and implement it. The embodiments are not intended to limit the application.

[0036] Embodiment one

[0037] Referring to FIGS. 1-10, an embodiment of a single-axis MEMS gyroscope in the application is shown.

[0038] The single-axis MEMS gyroscope includes a substrate mechanism A, one or a plurality of gyroscope mechanisms B arranged along the Y-axis direction connected to the substrate mechanism A, each gyroscope mechanism B including two gyroscope units C arranged along the Y-axis direction and symmetric to each other, each gyroscope unit C including a reciprocating component D and two swing components E arranged symmetrically on both sides of the reciprocating component D along the X-axis direction.

[0039] Each reciprocating component D includes a driving frame 11 and a driving module, the driving frame 11 is connected to a first anchor point 14 through a first spring beam 13, the driving frame 11 has a degree of freedom of reciprocating motion along the Y-axis direction, the driving module includes a driving electrode 12, the driving electrode 12 drives the driving frame 11 to reciprocate along the Y-axis direction.

[0040] Each swing component E includes a motion reversing member 21, one or a plurality of mass blocks 22 arranged along the X-axis direction, and one or a plurality of detection modules arranged along the X-axis direction, the motion reversing member 21 is connected to a second anchor point 25 through a second spring beam 24, the motion reversing member 21 has a degree of freedom of in-plane swing around the Z-axis direction, the mass block 22 is connected to a third anchor point 27 through a third spring beam 26, the mass block 22 has degrees of freedom of in-plane swing around the Z-axis direction and out-of-plane swing around the X-axis direction, the detection module corresponds to the mass block 22 one-to-one, the detection module includes a Coriolis force detection electrode 23, the Coriolis force detection electrode 23 detects the out-of-plane swing displacement of the corresponding mass block 22.

[0041] The adjacent driving frames 11 of the same gyro mechanism B are connected by a first coupling spring 31, which is a power reversing spring for converting the movement in the Y-axis direction into the movement in the X-axis direction. The adjacent driving frames 11 of different gyro mechanisms B are connected by a second coupling spring 32. The adjacent movement reversing members 21 of the same gyro mechanism B are connected by the power reversing spring through a first decoupling spring 33. The movement reversing member 21 and the mass 22 of the same swing assembly E are connected by a second decoupling spring 34. The adjacent masses 22 are connected by a third coupling spring 35. The masses 22 at the same end in the Y-axis direction are respectively connected to the same fifth coupling spring 37 through a fourth coupling spring 36.

[0042] In the reciprocating assembly D, the driving electrode 12 receives the driving signal provided by the peripheral circuit and drives the driving frame 11 to reciprocate along the Y-axis direction. The structure and layout of the first spring beam 13 ensure the freedom of the driving frame 11 in the Y-axis direction and inhibit the movement in other directions. The adjacent two driving frames 11 move in the opposite or the same direction.

[0043] The motion reversing component 21 in the swing assembly E is equivalent to a lever, one end of which is moved by the driving frame 11, and the other end of which drives the mass 22 to move, each detection module comprises two Coriolis force detection electrodes 23 arranged along the Y-axis direction and symmetric to the third anchor point, the Coriolis force detection electrodes 23 are connected to the external detection circuit through surface wiring or TSV process to output a differential signal, and are used to measure the sensitive signal of the applied angular velocity value, the structure and layout of the second spring beam 24 ensure the freedom of the motion reversing component 21 to move around the Z-axis direction and inhibit the movement in other directions, the structure and layout of the third spring beam 26 make the mass 22 easy to produce the freedom of movement around the Z-axis direction and the X-axis direction and inhibit the movement in other directions, the two adjacent motion reversing components 21 move in opposite directions, and the two adjacent masses 22 move in opposite directions. When the Y-axis direction of the first coupling spring 31 expands, the X-axis direction of the first coupling spring 31 contracts, and when the X-axis direction of the first coupling spring 31 expands, the Y-axis direction of the first coupling spring 31 contracts. The first coupling spring 31 converts the Y-axis direction movement into X-axis direction movement, and further converts it into periodic reciprocating swing acting on the mass 22 by the motion reversing component 21. The second coupling spring 32 realizes the synchronization of the movement of different gyro mechanisms B. The first decoupling spring 33 and the second decoupling spring 34 ensure that the driving frame 11 and the mass 22 do not interfere with each other in the two movement directions, and reduce the coupling error. The third coupling spring 35 connects the adjacent masses, which can effectively eliminate the coupling interference between the driving working mode and the detection working mode, and ensure that the masses of the same swing assembly E move with the same amplitude and frequency, thereby effectively improving the detection precision of the Coriolis force signal. The fourth coupling spring 36 and the fifth coupling spring 37 can ensure that the masses 22 of different swing assemblies E move with the same amplitude and frequency, thereby effectively improving the detection precision of the Coriolis force signal.

[0044] The single-axis MEMS gyroscope in the application comprises two gyro mechanisms B, and the single-axis MEMS gyroscope works by detecting the input angular velocity by using the Coriolis force.

[0045] A periodic driving voltage signal is applied to the driving electrode 12, and under the action of electrostatic force, the two driving frames 11 of the same driving unit move in opposite directions along the Y-axis direction, the driving force or movement is converted into X-axis direction opposite movement through the compression or expansion of the power reversing spring, further driving the motion reversing component 21 to rotate periodically and slightly around the second anchor point 25 through the second spring beam 24, and further driving the mass 22 to swing periodically and reciprocally in the plane around the third anchor point 27, thereby constituting the driving mode of the gyroscope in the application.

[0046] When the angular velocity around the y-axis direction is input, the Coriolis force causes the masses 22 to produce periodic reciprocating motion in the direction perpendicular to the driving direction of the masses 22, i.e. the masses 22 perform out-of-plane periodic reciprocating rotation around the third anchor point 27, and the input angular velocity around the y-axis direction can be obtained through the differential signal between the Coriolis force detection electrodes 23, thereby constituting the detection mode of the gyroscope in the application.

[0047] In Fig. 3, the arrow direction represents the rotation direction, and in Fig. 4, the dot on the side of the third anchor point represents the direction of the Coriolis force or motion being perpendicular to the paper surface and outward, and the cross on the side of the third anchor point represents the direction of the Coriolis force or motion being perpendicular to the paper surface and inward.

[0048] In the embodiment, the first coupling spring 31 includes two V-shaped elastic bodies arranged along the X-axis direction and symmetrical to each other, the inner angles of the two V-shaped elastic bodies are opposite to each other, and the two ends of the V-shaped elastic bodies are respectively connected to the adjacent driving frames 11 of the same gyroscope mechanism B.

[0049] Specifically, the V-shaped elastic body includes two elastic portions forming an included angle, each elastic portion has opposite first and second end portions, the first end portions of the two elastic portions meet at the included angle, and the second end portions of the two elastic portions are respectively connected to the two driving frames 11.

[0050] In the embodiment, the Y-axis direction sides of the driving frame 11 are respectively provided with the first anchor points 14, and the first anchor points 14 on the Y-axis direction sides of the driving frame 11 are connected by the first spring beam 13.

[0051] Specifically, the fifth coupling spring 37 and the driving frame 11 are provided with two first anchor points arranged along the X-axis direction, the Y-axis direction sides of each V-shaped elastic body are respectively provided with one first anchor point 14, the X-axis direction sides of the second coupling spring 32 are respectively provided with one first anchor point 14, and the first anchor points 14 are connected to the two adjacent driving frames 11 by the first spring beam 13.

[0052] In the embodiment, the motion reversing member 21 is an L-shaped member, the inner angle side of each L-shaped member is provided with one second anchor point 25, the inner angle surface of the L-shaped member is connected to the second anchor point 25 by the second spring beam 24, and the two ends of the L-shaped member are respectively connected to the first decoupling spring 33 and the second decoupling spring 34.

[0053] Specifically, the L-shaped member includes a first member portion and a second member portion forming an included angle, the first member portion extends along the X-axis direction and has a first end portion facing the driving frame 11 and a second end portion facing away from the driving frame 11, the second member portion extends along the Y-axis direction and has a first end portion facing the first decoupling spring 33 and a second end portion facing away from the first decoupling spring 33, the first end portion of the first member portion and the first end portion of the second member portion meet at the included angle, the second end portion of the first member portion is connected to the first coupling spring 31 through the first decoupling spring 33, and the second end portion of the second member portion is connected to the mass 22 through the second decoupling spring 34, the inner corner side of each L-shaped member is provided with one second anchor point 25, and the inner corner surfaces of the first member portion and the second member portion are respectively connected to the second anchor point 25 through the second spring beam 24.

[0054] Specifically, the mass 22 includes a rectangular main body portion and two rectangular protruding portions respectively located at the X-axis positive direction end and the X-axis negative direction end of the rectangular main body portion, two inner corners are formed at the Y-axis direction sides of each rectangular protruding portion, and the motion reversing member 21 is arranged at the inner corner between the rectangular protruding portion and the first decoupling spring. The mass 22 is arranged in a notched shape, and the motion reversing member 21 is arranged at the notched position of the mass 22, so that the structure of the entire gyroscope is more compact.

[0055] In the embodiment, the center position of each mass 22 is provided with one third anchor point 27, and the mass 22 is connected to the third anchor point 27 at the center position through the third spring beam 26.

[0056] Specifically, the center region of the mass 22 is provided with a center through hole, the third anchor point 27 is arranged in the center through hole, and the inner wall of the center through hole is connected with the third anchor point 27 in the center through hole through the third spring beam 26. The third spring beam 26 includes a ring-shaped multi-fold spring beam 261, a first cross spring beam 262, and a second cross spring beam 263. The ring-shaped multi-fold spring beam 261 is arranged between the first cross spring beam 262 and the second cross spring beam 263, and is composed of a V-shaped elastic body and an L-shaped elastic body. One end of the first cross spring beam 262 is connected with the mass 22, and the other end is connected with the corner of the ring-shaped multi-fold spring beam 261. The second cross spring beam 263 supports the inner corner of the ring-shaped multi-fold spring beam and the third anchor point. In the embodiment, each spring beam of the third spring beam is a straight spring beam, and the connection positions of different straight spring beams are not rounded. The spring beam is relatively simple to process and has high processing precision. The mass 22 is easy to support by the third anchor point 27, reduces the anchor point loss, and uses the coupling connection and the differential detection mode to improve the impact resistance and the signal-to-noise ratio of the gyroscope under the same volume.

[0057] In the embodiment, the driving module further includes a driving detection electrode 15, which is used to detect the motion amplitude, frequency, and phase of the driving frame 11.

[0058] The driving detection electrode 15 detects the motion amplitude, frequency, and phase of the driving frame 11, and further acts on the driving frame 11 through a feedback operation for frequency tuning.

[0059] In the embodiment, the detection module further includes a Coriolis force feedback electrode 28, which is connected with an external control circuit through surface wiring or a TSV process to open an open-loop detection or a closed-loop detection function.

[0060] Each detection module includes a Coriolis force feedback electrode 28 arranged along the Y-axis direction and symmetrical to the third anchor point.

[0061] In the embodiment, the detection module further includes a normal force correction electrode 29, and the mass 22 is further provided with a mass balance through hole 221. The normal force correction electrode 29 and the mass balance through hole 221 form a normal stiffness adjustment structure, and the normal force correction electrode 29 is connected with an external control circuit through surface wiring or a TSV process.

[0062] Each detection module comprises two orthogonal force correction electrodes 29 arranged along the Y-axis direction and symmetrical to the third anchor point, the orthogonal force correction electrodes 29 are opposite to the mass balance through hole 221, the orthogonal force correction electrodes 29 generate corresponding electrostatic negative stiffness to offset the orthogonal stiffness introduced by the processing error, so as to achieve the purpose of orthogonal correction and improve the output precision of the gyroscope.

[0063] In the embodiment, the substrate mechanism A comprises a first substrate 41 and a second substrate 42, and a pressure chamber 51 between the first substrate 41 and the second substrate 42, the third anchor point 27 and the detection module are connected to the first substrate 41 and the second substrate 42 respectively and are located on both sides of the mass block 22 in the Z-axis direction.

[0064] The third anchor point 27 is arranged on the first substrate 41, the first substrate 41 is bonded to the mass block 22 by semiconductor bonding technology, and the distance between the first substrate 41 and the mass block 22 is large. The second substrate 42 is bonded to the mass block 22 and the support side wall 222 by semiconductor bonding technology to realize vacuum packaging, the distance between the second substrate 42 and the mass block 22 is smaller than the distance between the first substrate 41 and the mass block 22, so that the distance between the detection module and the mass block 22 is not too large, and normal detection can be ensured. The pressure chamber makes the gyroscope work in a suitable pressure atmosphere.

[0065] Embodiment two

[0066] Referring to FIGS. 11-13, another embodiment of the single-axis MEMS gyroscope is shown. The rest is the same as embodiment one, the difference is that:

[0067] In the embodiment, the first coupling spring 31 comprises two V-shaped elastic bodies arranged along the X-axis direction and symmetrical to each other, the outer angles of the two V-shaped elastic bodies are opposite to each other, and the two ends of the V-shaped elastic bodies are connected to the adjacent driving frames 11 of the same driving unit C.

[0068] Specifically, the V-shaped elastic body comprises two elastic parts forming an included angle, each elastic part has a first end part and a second end part opposite to each other, the first end parts of the two elastic parts meet at the included angle, and the second end parts of the two elastic parts are connected to the two driving frames 11 respectively.

[0069] A first anchor point is arranged between the fifth coupling spring 37 and the driving frame 11, a first anchor point 14 is arranged between the inner angles of the two V-shaped elastic bodies, and a first anchor point 14 is arranged on each side of the second coupling spring 32 in the X-axis direction, and the first anchor point 14 is connected to the two driving frames 11 adjacent thereto through the first spring beam 13.

[0070] In Fig. 12, the arrow direction represents the rotation direction, and in Fig. 13, the circle point on the side of the third anchor point represents the direction of the Coriolis force or motion perpendicular to the paper surface outward; the cross on the side of the third anchor point represents the direction of the Coriolis force or motion perpendicular to the paper surface inward.

[0071] The power commutation structure of the embodiment adopts an outer folding layout, which can reduce the influence of the acceleration response on the output precision of the gyroscope, and the number of the first anchor points of the layout driving structure is small, which further reduces the error caused by the thermal stress in the wafer packaging process and improves the detection precision of the sensor.

[0072] Embodiment three

[0073] Referring to Fig. 14, another embodiment of the single-axis MEMS gyroscope in the application is shown. The rest is the same as that in the first embodiment, and the difference is that each spring beam of the third spring beam in the embodiment is an arc-shaped spring beam, and the connection of different arc-shaped elastic beams is smoothly processed. The spring beam is not easy to stress concentration and has good mechanical properties.

[0074] Obviously, the above embodiments are only examples for clear illustration, and are not limited to the embodiments. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, it is not necessary and impossible to enumerate all the embodiments. The obvious changes or variations derived therefrom are still within the protection scope of the application.

Claims

1. A single-axis MEMS gyroscope, characterized by, The application relates to a gyroscope mechanism, which comprises a substrate mechanism, one or a plurality of gyroscope mechanisms arranged in sequence along a Y-axis direction mounted on the substrate mechanism, each of the gyroscope mechanisms comprising two gyroscope units arranged along the Y-axis direction and symmetric to each other, each of the gyroscope units comprising a reciprocating component and two swing components symmetrically arranged on both sides of the reciprocating component along an X-axis direction. The reciprocating component comprises a driving frame and a driving module, the driving frame is connected with a first anchor point through a first spring beam, the driving frame has a degree of freedom of reciprocating movement along the Y-axis direction, and the driving module comprises a driving electrode which drives the driving frame to reciprocate along the Y-axis direction. The swing component comprises a motion reversing member, one or a plurality of mass blocks arranged in sequence along the X-axis direction and one or a plurality of detection modules arranged in sequence along the X-axis direction, the motion reversing member is connected with a second anchor point through a second spring beam, the motion reversing member has a degree of freedom of in-plane swing around a Z-axis direction, the mass block is connected with a third anchor point through a third spring beam, the mass block has degrees of freedom of in-plane swing around the Z-axis direction and out-of-plane swing around the X-axis direction, the detection module corresponds to the mass block in a one-to-one manner, and the detection module comprises a Coriolis force detection electrode which detects the out-of-plane swing displacement of the corresponding mass block. The adjacent driving frames of the same gyroscope mechanism are connected through a first coupling spring, the first coupling spring is a power reversing spring, the power reversing spring is used for converting the motion along the Y-axis direction into the motion along the X-axis direction, the adjacent driving frames of different gyroscope mechanisms are connected through a second coupling spring, the adjacent motion reversing members of the same gyroscope mechanism are connected with the power reversing spring through a first decoupling spring, the motion reversing member and the mass block of the same swing component are connected through a second decoupling spring, the adjacent mass blocks are connected through a third coupling spring, and the mass blocks located at the same end along the Y-axis direction are respectively connected to the same fifth coupling spring through a fourth coupling spring.

2. The single-axis MEMS gyroscope of claim 1, wherein, The power reversing spring comprises two V-shaped elastic bodies arranged along the X-axis direction and symmetric to each other, the inner angles of the two V-shaped elastic bodies are opposite to each other, and the two ends of the V-shaped elastic bodies are respectively connected to the adjacent driving frames of the same gyroscope mechanism.

3. The single-axis MEMS gyroscope of claim 1, wherein, The power reversing spring comprises two V-shaped elastic bodies arranged along the X-axis direction and symmetric to each other, the outer angles of the two V-shaped elastic bodies are opposite to each other, and the two ends of the V-shaped elastic bodies are respectively connected to the adjacent driving frames of the same driving unit.

4. The single-axis MEMS gyroscope of claim 2, wherein, The Y-axis direction both sides of the driving frame are respectively provided with the first anchor points, and the driving frame is connected with the first anchor points on both sides thereof along the Y-axis direction through the first spring beam.

5. The single-axis MEMS gyroscope of claim 1, wherein, The motion reversing member is an L-shaped member, the inner corner side of each L-shaped member is provided with a second anchor point, the inner corner surface of the L-shaped member is connected with the second anchor point through a second spring beam, and the two ends of the L-shaped member are respectively connected with the first decoupling spring and the second decoupling spring.

6. The single-axis MEMS gyroscope of claim 1, wherein, The central position of each mass block is provided with a third anchor point, and the mass block is connected with the third anchor point at the central position thereof through the third spring beam.

7. The single-axis MEMS gyroscope of claim 1, wherein, The driving module further comprises a driving detection electrode for detecting the amplitude, frequency and phase of the motion of the driving frame.

8. The single-axis MEMS gyroscope of claim 1, wherein, The detection module further comprises a Coriolis force feedback electrode for starting open-loop detection or closed-loop detection.

9. The single-axis MEMS gyroscope of claim 1, wherein, The detection module further comprises a quadrature force correction electrode, and the mass block is provided with a mass balance through hole, and the quadrature force correction electrode and the mass balance through hole constitute a quadrature stiffness adjusting structure.

10. The single-axis MEMS gyroscope of claim 1, wherein, The substrate mechanism comprises a first substrate and a second substrate, and the third anchor point and the detection module are connected to the first substrate and the second substrate respectively and located on both sides of the mass block in the Z-axis direction.

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