Cartridge and charged particle beam device

Abstract

The present invention provides a cartridge 12 which can be easily inserted into and removed from a holding mechanism 30 and which can be stably fixed to the holding mechanism 30. The cartridge 12 is used for transporting a sample SAM when observing the sample SAM with a charged particle beam device 100, and can be inserted into and removed from the holding mechanism 30 of a stage 10 provided to the charged particle beam device 100. The cartridge 12 has a cartridge body 13 on which the sample SAM can be placed, and a pressing mechanism 20 for fixing the cartridge body 13 to the holding mechanism 30 using the restoring force of an elastic member 23.

Description

Cartridge and charged particle beam device

[0001] The present invention relates to a cartridge and a charged particle beam device, and more particularly to a cartridge having a pressurizing mechanism and a charged particle beam device including the cartridge.

[0002] Charged particle beam devices such as transmission electron microscopes (TEMs) and scanning electron microscopes (SEMs) are used as devices for observing minute samples, such as those on the nano-order.

[0003] In general, a cartridge (sample holder) is used for observing a sample using a TEM. The cartridge must be transported to the correct position and fixed in place by a stage holding mechanism.

[0004] However, in order to suppress the frictional resistance between the cartridge and the holding mechanism, the spring force of the holding mechanism cannot be made strong. On the other hand, if the spring force of the holding mechanism is weak, a gap will be created between the cartridge and the holding mechanism, which will cause problems such as misalignment in height and the cartridge colliding with the pole piece.

[0005] For example, Patent Document 1 discloses a technique in which compressed air is supplied to an air passage to push out an installed piston, thereby clamping and gripping the cartridge.

[0006] Japanese Patent Application Laid-Open No. 2002-365182

[0007] However, the structure and principle of gripping a cartridge using air pressure, as in Patent Document 1, are complicated. The main objective of this application is to provide a cartridge that can be easily inserted into and removed from a holding mechanism and can be stably fixed to the holding mechanism. Furthermore, the invention provides a cartridge that has a relatively simple structure and can be manufactured at low cost.

[0008] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings.

[0009] A brief summary of a representative embodiment of the present invention will be given below.

[0010] In one embodiment, the cartridge is used to transport a sample when the sample is observed with a charged particle beam device, and is insertable into and removable from a holding mechanism of a stage provided in the charged particle beam device. The cartridge has a cartridge body on which the sample can be placed, and a pressurizing mechanism for fixing the cartridge body to the holding mechanism using the restoring force of an elastic member.

[0011] According to one embodiment, it is possible to provide a cartridge that can be easily inserted into and removed from a holding mechanism and can be stably fixed to the holding mechanism.

[0012] 1 is a schematic diagram showing a charged particle beam device in embodiment 1. FIG. 2 is a plan view showing a state in which a cartridge in embodiment 1 is inserted into a holding mechanism of a stage. FIG. 3 is a perspective view showing a cartridge in embodiment 1. FIG. 4 is an enlarged plan view showing the positional relationship of each hole formed in a base of the cartridge in embodiment 1. FIG. 5 is a cross-sectional view showing the positional relationship of each hole formed in the base of the cartridge in embodiment 1. FIG. 6 is a cross-sectional view showing a state before a pressurizing mechanism of a cartridge and a holding mechanism come into contact with each other in embodiment 1. FIG. 7 is a cross-sectional view showing a state before a pressurizing mechanism of a cartridge and a holding mechanism come into contact with each other in embodiment 1. FIG. 8 is a cross-sectional view showing a state after a pressurizing mechanism of a cartridge and a holding mechanism come into contact with each other in embodiment 1. FIG. 9 is a cross-sectional view showing a state after a pressurizing mechanism of a cartridge and a holding mechanism come into contact with each other in embodiment 1. FIG. 10 is a cross-sectional view showing contact points of each bearing in embodiments 1 and 2. FIG. 11 is a cross-sectional view showing a state before a pressurizing mechanism of a cartridge and a holding mechanism come into contact with each other in embodiment 2. FIG. 12 is a cross-sectional view showing a state before a pressurizing mechanism of a cartridge and a holding mechanism come into contact with each other in embodiment 2. FIG. 13 is an enlarged cross-sectional view showing a fixed bearing set in embodiment 2. 10 is a cross-sectional view showing a state after the pressurizing mechanism of the cartridge and the holding mechanism have come into contact with each other in the second embodiment.FIG. 11 is a cross-sectional view showing a state after the pressurizing mechanism of the cartridge and the holding mechanism have come into contact with each other in the second embodiment.FIG.

[0013] Hereinafter, embodiments will be described in detail with reference to the drawings. In all drawings for explaining the embodiments, components having the same functions are designated by the same reference numerals, and repeated explanations thereof will be omitted. In the following embodiments, explanations of the same or similar parts will not be repeated unless particularly necessary.

[0014] In addition, the X, Y, and Z directions described herein intersect and are perpendicular to each other. In the present application, the Z direction may be referred to as the up-down direction, and the X or Y direction may be referred to as the horizontal direction.

[0015] 1 and 2, a charged particle beam device 100 according to the first embodiment will be described. The charged particle beam device 100 is, for example, a TEM device or an SEM device, but the case where the charged particle beam device 100 is a TEM device will be described here.

[0016] 1 , the charged particle beam device 100 includes a column 1 and a transport device 11. The column 1 extends in the Z direction and has a generally cylindrical shape with the X and Y directions as radial directions. The transport device 11 is provided outside the column 1. The charged particle beam device 100 includes, inside the column 1, an electron gun 2, a first electron optical system 3, a detector 4, an upper pole piece 5, a lower pole piece 6, a second electron optical system 7, a fluorescent screen 8, a camera 9, a stage 10, and a cartridge 12.

[0017] A sample SAM can be placed on the cartridge 12. The sample SAM is, for example, a carbon black or semiconductor wafer sample. The electron gun 2 can irradiate the sample SAM with an electron beam.

[0018] Arranged inside the electron barrel 1 from top to bottom are an electron gun 2, a first electron optical system 3, and an upper pole piece 5. A detector 4 is disposed between the first electron optical system 3 and the upper pole piece 5. A stage 10, to which a cartridge 12 can be fixed, is disposed below the upper pole piece 5.

[0019] Inside the electron tube 1, a lower pole piece 6, a second electron optical system 7, and a fluorescent screen 8 are arranged below a stage 10. A camera 9 for capturing an image of the upper surface of the fluorescent screen 8 is arranged near the fluorescent screen 8.

[0020] The stage 10 has a holding mechanism (chuck mechanism) 30. The holding mechanism 30 fixes the cartridge 12 to the stage 10. The cartridge 12 is used to transport the sample SAM from outside the charged particle beam device 100 when observing the sample SAM with the charged particle beam device 100. The cartridge 12 can be automatically inserted into and removed from the holding mechanism 30 of the stage 10 by a transport device 11. That is, the cartridge 12 can be inserted into the interior of the optical column 1 from outside the optical column 1, and can be removed from the interior of the optical column 1 to the outside of the optical column 1.

[0021] 2 is a plan view showing the cartridge 12 placed on the stage 10. As shown in FIG. 2, the cartridge 12 has a cartridge body 13, a cartridge sleeve 14, and a pressurizing mechanism 20. The cartridge body 13 has a rod-like structure extending in the X direction, and can accommodate a sample SAM. The sample SAM is placed on the tip of the cartridge body 13. The cartridge sleeve 14 and the pressurizing mechanism 20 are attached to the outside of the cartridge body 13.

[0022] When observing the sample SAM, the cartridge 12 is detached from the transport device 11, the sample SAM is placed on the cartridge body 13, and the cartridge body 13 is fixed to the holding mechanism 30 by the pressure mechanism 20, and an electron beam is irradiated onto the sample SAM from the electron gun 2.

[0023] The electron beam emitted from the electron gun 2 is converged by the first electron optical system 3 and the upper pole piece 5 and irradiated onto the sample SAM. When the electron beam irradiates the surface of the sample SAM, secondary electrons are emitted from the sample SAM. The emitted secondary electrons are detected by the detector 4. This allows the shape of the top surface of the sample SAM to be observed.

[0024] The electron beam that has passed through the sample SAM is magnified by the lower pole piece 6 and the second electron optical system 7. The magnified transmission image of the sample SAM is projected onto the upper surface of the fluorescent screen 8. The projected transmission image is captured by the camera 9 and stored in a computer installed outside the electron tube 1. In this way, a transmission image (high-magnification image, magnified image) or an electron diffraction pattern (diffraction spots) is obtained by the electron beam that has passed through the sample SAM. By observing the transmission image, information such as the particle shape, crystal lattice, or electron diffraction inside the sample SAM can be obtained.

[0025] <Cartridge Pressurizing Mechanism> The pressurizing mechanism 20 in the first embodiment will be described below with reference to Figures 3 to 5. The pressurizing mechanism 20 is a mechanism for fixing the cartridge body 13 to the holding mechanism 30 by using the restoring force of the elastic member 23 when inserting the cartridge 12 into the holding mechanism 30. The insertion and removal direction into and from the holding mechanism 30 is the X direction.

[0026] 3, the pressure mechanism 20 includes a base 21 that serves as a frame, a bearing set 22 that provides a sliding function, an elastic member 23 that provides elasticity, and a holding pin 24. The bearing set 22, the elastic member 23, and the holding pin 24 are each attached to the base 21.

[0027] The bearing set 22 has a bearing 22A, a spacer 22B, and a central shaft member 22C. The central shaft member 22C extends in the Y direction. The bearing 22A is attached to the central shaft member 22C, with the central shaft member 22C serving as a rotation axis. The spacers 22B are provided on both sides of the bearing 22A in the Y direction. The spacers 22B are disposed between the bearing 22A and the base 21, allowing the bearing 22A to rotate smoothly. The bearing set 22 is a movable bearing set in which the central shaft member 22C can move in the Z direction.

[0028] The pressing pin 24 is a columnar member extending in the X direction. The elastic member 23 is, for example, a coil spring. The pressing pin 24 is fixed at a position away from the central shaft member 22C in the Z direction. The elastic member 23 is provided between the central shaft member 22C and the pressing pin 24 so as to be in contact with the central shaft member 22C and the pressing pin 24. The elastic member 23 expands and contracts in accordance with movement of the central shaft member 22C in the Z direction.

[0029] The base 21 has a columnar shape, for example, a cylindrical shape with a central axis in the X direction. The base 21 has a front surface FS and a rear surface RS that are positioned opposite each other in the X direction. When the base 21 has a cylindrical shape, the base 21 has two circular surfaces, the front surface FS and the rear surface RS. The base 21 also has a groove 21a, a hole 21b, a hole 21c, a hole 21d, and a hole 21e. The positional relationships between the groove 21a, the hole 21b, the hole 21c, the hole 21d, and the hole 21e will be described below with reference to FIGS. 3 to 5.

[0030] 3 to 5, the groove 21a is provided to a predetermined depth from the surface of the base 21 in the Z direction, and extends in the X direction so as to penetrate from the front surface FS to the rear surface RS. The pressurizing mechanism 20 is attached to the cartridge body 13 so that a portion of the cartridge body 13 is located inside the groove 21a.

[0031] Hole 21b is provided to a predetermined depth from the bottom surface of groove 21a in the Z direction and extends in the Y direction. Hole 21c is provided to penetrate base 21 from the bottom surface of groove 21a in the Z direction and communicates with hole 21b. Hole 21d is provided to a depth from the surface of base 21 in the Z direction that communicates with hole 21b. Hole 21e is provided in a location on base 21 different from groove 21a, is provided to a predetermined depth from the front surface FS of base 21 in the X direction, and communicates with hole 21d.

[0032] The central shaft member 22C is provided inside the hole 21b. The bearing 22A and the spacer 22B are provided inside the hole 21c. The elastic member 23 is provided inside the hole 21d. The pressing pin 24 is provided so that a portion of the pressing pin 24 passes through the inside of the hole 21d, and is fixed inside the hole 21e.

[0033] The diameter of hole 21b may change midway in the depth direction (Z direction) of hole 21b. In the examples of Figures 3 to 5, the diameter of the lower part of hole 21b is narrower than the diameter of the upper part of hole 21b. Elastic member 23 is provided at the lower part of hole 21b, and the narrow diameter of the lower part of hole 21b makes it easier to prevent elastic member 23 from falling out of hole 21b, as will be described later.

[0034] Furthermore, hole 21d has a communicating portion that communicates with groove 21a in the Y direction. In other words, hole 21d forms a recess that is recessed from the side surface of groove 21a in the Y direction. Therefore, central shaft member 22C can move within hole 21b and hole 21d in the Z direction. Furthermore, because hole 21b and hole 21d are connected, as described above, elastic member 23 expands and contracts in response to movement of central shaft member 22C in the Z direction. At this time, because press pin 24 is fixed within hole 21e, the position of the upper end of elastic member 23 does not change even when central shaft member 22C moves, but the position of the lower end of elastic member 23 changes in response to movement of central shaft member 22C.

[0035] Here, the ingenuity that can prevent the elastic member 23 and the bearing set 22 from falling off the base 21 will be described.

[0036] The elastic member 23 can fall off in the upward direction of the hole 21d (Z direction) and in the direction from the hole 21d toward the groove 21a (Y direction). The upper end of the elastic member 23 is fixed by the retaining pin 24, which prevents the elastic member 23 from falling off in the upward direction of the hole 21d.

[0037] 4, at the portion of hole 21d where elastic member 23 is provided (the lower portion of hole 21d), the width W1 of the communicating portion of hole 21d in the X direction is narrower than the diameter of elastic member 23. Therefore, it is possible to prevent elastic member 23 from falling off in the direction from hole 21d toward groove 21a.

[0038] 3, near both ends of the central shaft member 22C in the Y direction, a portion of the hole 21b is open to the outside of the base 21, but as shown in Fig. 5, most of the hole 21b is closed inside the base 21. Therefore, the downward movement of the central shaft member 22C is limited to the bottom surface of the hole 21b, which prevents the bearing set 22 from falling off below the base 21. Furthermore, an elastic member 23 and a retaining pin 24 are provided above the central shaft member 22C, which prevents the bearing set 22 from falling off above the base 21.

[0039] <Operation of the Pressurizing Mechanism> Below, using Figures 6 to 9, we will explain what happens before and after the pressurizing mechanism 20 and the holding mechanism 30 come into contact when the cartridge 12 is inserted into the holding mechanism 30. Note that although Figures 7 and 9 are based on cross-sectional views perpendicular to the Y direction, Figures 7 and 9 do not show accurate cross-sections, and priority is given to making it easy to understand the positional relationship between the bearing set 22, elastic member 23, pressing pin 24, and bearing set 31 of the holding mechanism 30.

[0040] As shown in Figures 6 and 7, before the pressurizing mechanism 20 and the holding mechanism 30 come into contact with each other, the central shaft member 22C is in contact with the bottom surface of the hole portion 21b, a portion of the bearing 22A is exposed from the base 21, and the elastic member 23 is in a stretched state.

[0041] The holding mechanism 30 is provided with bearing sets 31 for fixing the cartridge 12. Here, two bearing sets 31 are provided in the holding mechanism 30 so as to contact the base 21 at a position that corresponds to the upper half of the cartridge 12 (the upper half of the pressurizing mechanism 20). The number of bearing sets 31 may be three or more.

[0042] As shown in Figure 8, the bearing set 31 includes a bearing 31A, a spacer 31B, and a central shaft member 31C. The central shaft member 31C extends in a direction perpendicular to the X direction. The bearing 31A is attached to the central shaft member 31C, with the central shaft member 31C serving as the axis of rotation. The spacers 31B are provided on both sides of the bearing 31A. The spacers 31B are disposed between the bearing 31A and the holding mechanism 30, allowing the bearing 31A to rotate smoothly.

[0043] The holding mechanism 30 has a groove in which the bearing 31A and spacer 31B are provided. A hole is provided on the side of the groove, and the central shaft member 31C is fitted into the hole. The bearing set 31 is a fixed type bearing set in which the central shaft member 31C does not move.

[0044] 8 and 9, the cartridge 12 is moved to bring the pressurizing mechanism 20 into contact with the holding mechanism 30. At this time, the bearing 31A comes into contact with the base 21, and the bearing 22A comes into contact with the holding mechanism 30. The position of the central shaft member 31C is fixed before and after the bearing 31A comes into contact with the base 21. In other words, because the central shaft member 31C does not move, the position of the upper part of the cartridge 12 is fixed by the bearing 31A.

[0045] On the other hand, the central shaft member 22C can move in the Z direction. Therefore, when the bearing 22A comes into contact with the holding mechanism 30, the central shaft member 22C moves together with the bearing 22A in the direction toward the pressing pin 24, and the elastic member 23 contracts. At this time, a restoring force is generated in the elastic member 23, and this restoring force pushes back the central shaft member 22C. In other words, the elastic member 23 presses the bearing 22A against the holding mechanism 30 via the central shaft member 22C. As a result, the position of the lower part of the cartridge 12 is fixed by the bearing 22A.

[0046] After the pressurizing mechanism 20 and the holding mechanism 30 come into contact with each other, the rotation of the bearings 22A and 31A allows the cartridge 12 to slide in the X direction while maintaining its vertical position. The cartridge 12 can be moved to an appropriate position within the range where the bearing 22A and the holding mechanism 30 can come into contact with each other, and observation of the sample SAM can be started.

[0047] When removing the cartridge 12 from the holding mechanism 30, the cartridge 12 is moved in the direction opposite to the insertion direction.

[0048] As described above, the cartridge 12 of the first embodiment can be easily inserted into and removed from the holding mechanism 30, and can be stably fixed to the holding mechanism 30. Furthermore, since the cartridge 12 can be moved by utilizing the rotational motion of the bearings 22A and 31A, frictional resistance between the cartridge 12 and the holding mechanism 30 can be reduced. Furthermore, since the structure of the cartridge 12 is relatively simple, the cartridge 12 can be manufactured at low cost.

[0049] Furthermore, when maintenance of the cartridge 12 is required, there is no need to disassemble the charged particle beam device 100, and it is sufficient to simply insert and remove the cartridge 12. Therefore, the work required for maintenance of the cartridge 12 can be reduced.

[0050] Furthermore, in the first embodiment, the bearing set 31 is provided in the holding mechanism 30, and only the pressurizing mechanism 20 including the bearing set 22 is provided in the cartridge 12. With this structure, the cartridge 12 can be made lighter and easier to transport.

[0051] Furthermore, in the first embodiment, one bearing set 22 is provided in the cartridge 12, and two bearing sets 31 are provided in the holding mechanism 30. By supporting the cartridge 12 from three different directions, such as with one bearing 22A and two bearings 31A, the cartridge 12 can be stably fixed to the holding mechanism 30.

[0052] 10 , for example, if a triangle is formed by connecting the point where bearing 22A contacts holding mechanism 30, the point where one bearing 31A contacts base 21, and the point where the other bearing 31A contacts base 21 with imaginary lines as vertices, each of the interior angles of this triangle will be acute. As long as this triangular relationship is satisfied, the cartridge 12 can be stably fixed to the holding mechanism 30.

[0053] Even when three or more bearing sets 31 are provided in the holding mechanism 30, it is preferable to provide three or more bearing sets 31 so that the bearing 22A and at least two bearings 31A satisfy the above-mentioned triangular relationship.

[0054] (Embodiment 2) A cartridge 12 in embodiment 2 will be described below with reference to Figures 11 to 15. In the following description, differences from embodiment 1 will be mainly described, and explanations of points that overlap with embodiment 1 will be omitted. Figures 11, 12, 14, and 15 are cross-sectional views with the same gist as Figures 6, 7, 8, and 9 of embodiment 1.

[0055] In the first embodiment, the bearing set 31 is provided in the holding mechanism 30. In the second embodiment, the pressurizing mechanism 20 includes a bearing set 25 as a component that performs substantially the same function as the bearing set 31. Therefore, the holding mechanism 30 is not provided with the bearing set 31.

[0056] 11 and 12 show a state before the pressure applying mechanism 20 and the holding mechanism 30 come into contact with each other. As shown in Fig. 11 and 12, two bearing sets 25 are attached to the base 21 so as to be located in the upper half of the cartridge 12 (the upper half of the pressure applying mechanism 20). The number of bearing sets 25 may be three or more.

[0057] Figure 13 shows an enlarged view of the detailed structure of the bearing set 25. As shown in Figure 13, the bearing set 25 includes a bearing 25A, a spacer 25B, and a central shaft member 25C. The central shaft member 25C extends in a direction perpendicular to the X direction. The bearing 25A is attached to the central shaft member 25C, with the central shaft member 25C serving as the axis of rotation. Spacers 25B are provided on both sides of the bearing 25A. The placement of the spacers 25B between the bearing 25A and the base 21 allows the bearing 25A to rotate smoothly.

[0058] A groove 21f is provided in the base 21, and the bearing 25A and the spacer 25B are provided inside the groove 21f. A hole 21g is provided on the side of the groove 21f, and the central shaft member 25C is fitted inside the hole 21g. The bearing set 25 is a fixed type bearing set in which the central shaft member 25C does not move.

[0059] 14 and 15 , the cartridge 12 is moved to bring the pressurizing mechanism 20 into contact with the holding mechanism 30. At this time, the bearing 25A comes into contact with the holding mechanism 30, and the bearing 22A comes into contact with the holding mechanism 30. The position of the central shaft member 25C is fixed before and after the bearing 25A comes into contact with the holding mechanism 30. In other words, because the central shaft member 25C does not move, the position of the upper part of the cartridge 12 is fixed by the bearing 25A.

[0060] The functions of the bearing set 22, the elastic member 23 and the retainer pin 24 are the same as those in embodiment 1. The position of the lower part of the cartridge 12 is fixed by the bearing 22A.

[0061] As described above, the cartridge 12 of the second embodiment, like the cartridge 12 of the first embodiment, can be easily inserted into and removed from the holding mechanism 30, and can be stably fixed to the holding mechanism 30. Also, in the second embodiment, the structure of the cartridge 12 is relatively simple, so that the cartridge 12 can be manufactured at low cost.

[0062] Note that, because the pressurizing mechanism 20 includes the bearing set 25, the first embodiment is superior to the second embodiment in terms of reducing the weight of the cartridge 12. However, in the first embodiment, when replacing the bearing set 31, it is necessary to remove the holding mechanism 30 from inside the lens barrel 1. In the second embodiment, the bearing set 25 can be assembled and its parts replaced with only the cartridge 12 removed from inside the lens barrel 1.

[0063] Also in the second embodiment, the cartridge 12 can be stably fixed to the holding mechanism 30 by supporting the cartridge 12 from three different directions using one bearing 22A and two bearings 25A.

[0064] 10 , for example, if a triangle is formed by connecting the vertices of the point where the bearing 22A contacts the holding mechanism 30, the point where one bearing 25A contacts the holding mechanism 30, and the point where the other bearing 25A contacts the holding mechanism 30 with imaginary lines, each of the interior angles of the triangle will be acute. As long as this triangular relationship is satisfied, the cartridge 12 can be stably fixed to the holding mechanism 30.

[0065] Even when the pressure applying mechanism 20 includes three or more bearing sets 25, it is preferable to provide three or more bearing sets 25 so that the bearing 22A and at least two bearings 25A satisfy the above-mentioned triangular relationship.

[0066] The present invention has been specifically described above based on the form for implementing the present invention, but the present invention is not limited to the above-described embodiment and can be modified in various ways without departing from the spirit of the present invention.

[0067] REFERENCE SIGNS LIST 100 Charged particle beam device 1 Column 2 Electron gun 3 First electron optical system 4 Detector 5 Upper pole piece 6 Lower pole piece 7 Second electron optical system 8 Fluorescent screen 9 Camera 10 Stage 11 Transport device 12 Cartridge 13 Cartridge body 14 Cartridge sleeve 20 Pressurizing mechanism 21 Base 21a Groove 21b Hole for central shaft member 21c Hole for bearing 21d Hole for elastic member 21e Hole for pressing pin 21f Groove 21g Hole 22 Movable bearing set 22A Bearing 22B Spacer 22C Central shaft member 23 Elastic member 24 Pressurizing pin 25 Fixed bearing set 25A Bearing 25B Spacer 25C Central shaft member 30 Holding mechanism 31 Fixed bearing set 31A Bearing 31B Spacer 31C Central shaft member FS Front surface of base RS Rear surface of base

Claims

1. A cartridge used to transport a sample when observing the sample with a charged particle beam device, and which can be inserted into and removed from a holding mechanism of a stage provided in the charged particle beam device, the cartridge comprising: a cartridge body on which the sample can be placed; and a pressure mechanism for fixing the cartridge body to the holding mechanism using the restoring force of an elastic member.

2. A cartridge according to claim 1, wherein the pressurizing mechanism includes a base, a first bearing set, the elastic member, and a pressing pin, each attached to the base; the first bearing set has a first central shaft member extending in a first direction, and a first bearing attached to the first central shaft member with the first central shaft member as the axis of rotation; the pressing pin is fixed at a position away from the first central shaft member in a second direction perpendicular to the first direction; the elastic member is provided between the first central shaft member and the pressing pin so as to be in contact with the first central shaft member and the pressing pin; the first central shaft member is movable in the second direction; and the elastic member expands and contracts in accordance with the movement of the first central shaft member.

3. A cartridge as described in claim 2, wherein, when the cartridge is inserted into the holding mechanism in a third direction perpendicular to the first and second directions, the first bearing comes into contact with the holding mechanism, the first central shaft member moves in a direction toward the pressing pin, and the elastic member contracts, causing the elastic member to press the first bearing against the holding mechanism via the first central shaft member.

4. A cartridge according to claim 3, wherein the pressurizing mechanism further includes a second bearing set attached to the base, the second bearing set having a second central shaft member extending in a direction perpendicular to the third direction, and a second bearing attached to the second central shaft member with the second central shaft member as a rotation axis, the second bearing coming into contact with the holding mechanism when the cartridge is inserted into the holding mechanism, and the position of the second central shaft member being fixed before and after the contact between the second bearing and the holding mechanism.

5. A cartridge according to claim 4, wherein the pressurizing mechanism includes two of the second bearing sets, and when a triangle is formed by connecting the point where the first bearing contacts the holding mechanism, the point where one of the second bearings contacts the holding mechanism, and the point where the other second bearing contacts the holding mechanism with imaginary lines as vertices, each of the interior angles of the triangle forms an acute angle.

6. A charged particle beam device equipped with the cartridge described in claim 3, comprising: an electron gun capable of irradiating an electron beam onto the sample; and the stage having the holding mechanism, wherein the sample is placed on the cartridge body, and the cartridge body is fixed to the holding mechanism by the pressurizing mechanism, and the electron beam is irradiated from the electron gun onto the sample.

7. A charged particle beam device as described in claim 6, wherein the holding mechanism is provided with a third bearing set, the third bearing set having a third central shaft member extending in a direction perpendicular to the third direction, and a third bearing attached to the third central shaft member with the third central shaft member as a rotation axis, the third bearing coming into contact with the base when the cartridge is inserted into the holding mechanism, and the position of the third central shaft member being fixed before and after the contact between the third bearing and the base.

8. A charged particle beam device according to claim 7, wherein the holding mechanism is provided with two of the third bearing sets, and when a triangle is formed by connecting the point where the first bearing contacts the holding mechanism, the point where one of the third bearings contacts the base, and the point where the other of the third bearings contacts the base with imaginary lines as vertices, each of the interior angles of the triangle forms an acute angle.

9. A cartridge according to claim 2, wherein the base has: a groove portion provided from the surface of the base to a predetermined depth in the second direction and extending in a third direction perpendicular to the first and second directions; a first hole portion provided from the bottom surface of the groove portion to a predetermined depth in the second direction and extending in the first direction; a second hole portion provided from the bottom surface of the groove portion to penetrate the base in the second direction and communicating with the first hole portion; a third hole portion provided from the surface of the base to a depth communicating with the first hole portion in the second direction; and a fourth hole portion provided in a location of the base different from the groove portion, provided from the front surface of the base in the third direction to a predetermined depth and communicating with the third hole portion; wherein the first central shaft member is provided inside the first hole portion; the first bearing is provided inside the second hole portion; and the elastic member is provided inside the third hole portion. The pressing pin is provided so that a portion of the pressing pin passes through the inside of the third hole, and is fixed inside the fourth hole portion.

10. A cartridge according to claim 9, wherein the third hole portion has a communicating portion that communicates with the groove portion in the first direction, and the first central shaft member is capable of moving within the first hole portion and the third hole portion in the second direction.

11. A cartridge as described in claim 10, wherein the elastic member is a coil spring, and at the location of the third hole where the elastic member is provided, the width of the communicating portion in the third direction is narrower than the diameter of the elastic member.

12. A charged particle beam device equipped with the cartridge described in claim 1, comprising: an electron gun capable of irradiating an electron beam onto the sample; and a stage having the holding mechanism, wherein the sample is placed on the cartridge body, and the cartridge body is fixed to the holding mechanism by the pressurizing mechanism, and the electron beam is irradiated from the electron gun onto the sample.

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