Power cable connecting device

Abstract

This power cable connecting device comprises a plurality of connecting members and a plurality of connected members. Power-source-device-side ends of a plurality of electric wires included in a power cable for transmitting power supplied from a power source device to a plasma head that generates plasma are respectively fixed to the plurality of connecting members. The plurality of connected members are a plurality of members to which the plurality of connecting members are respectively connected, and a plurality of in-machine wiring lines each have one end connected to an output unit of the power source device, and another end fixed to the plurality of connected members, respectively. The plurality of connecting members and the plurality of connected members are provided with an erroneous connection suppressing mechanism that allows connection between members that should be connected to each other and restricts connection between members that should not be connected to each other.

Description

Power Cable Connection Device

[0001] This specification discloses a technique related to a power cable connection device.

[0002] The power supply device described in Patent Document 1 includes a harness connected to a battery cell, a round terminal, a housing, and a pair of guide pieces. The round terminal includes a flat portion having an end through which a terminal screw hole passes in the vertical direction, and a crimped portion that is crimped to one end of the harness and connected to the end of the harness. The housing houses the battery cell, harness, round terminal, and circuit board. The pair of guide pieces hold the left and right edges of the flat portion of the round terminal, which intersect with the vertical direction, in a position where the round terminal is fixed to the housing by a screw inserted into the terminal screw hole.

[0003] International Publication No. 2023 / 176136

[0004] When connecting multiple electric wires contained in the power cable that transmits power supplied from the power supply unit to the plasma head that generates plasma to multiple internal wiring connected to the output section of the power supply unit, there is a possibility of incorrect connections occurring.

[0005] In view of the above circumstances, this specification discloses a power cable connection device that can prevent incorrect connections between the electric wires of a power cable and the internal wiring of a power supply device.

[0006] This specification discloses a power cable connection device including a plurality of connecting members and a plurality of connected members. The plurality of connecting members are fixed to the power supply unit side ends of a plurality of electric wires included in a power cable that transmits power supplied from a power supply unit to a plasma head that generates plasma. The plurality of connected members are a plurality of members to which the plurality of connecting members are respectively connected, and each of the plurality of connected members is fixed to the other ends of a plurality of internal wirings that are connected to an output unit of the power supply unit. The plurality of connecting members and the plurality of connected members are equipped with an erroneous connection prevention mechanism that allows connection of members that should be connected to each other and prevents connection of members that should not be connected to each other.

[0007] This specification discloses a technical idea in which claim 9 in the claims initially attached to the application changes "the power cable connection device according to claim 1" to "the power cable connection device according to any one of claims 1 to 8."

[0008] The power cable connection device described above can prevent erroneous connections between the electric wires of the power cable and the internal wiring of the power supply device.

[0009] 12 is a schematic diagram showing an example of the configuration of a plasma generating device; FIG. 13 is a schematic diagram showing an example of the electrical configuration of a plasma generating device; FIG. 14 is a perspective view showing an example of the configuration of a power cable connecting device; FIG. 15 is a plan view showing an example of a plurality of connecting members; FIG. 16 is a plan view showing an example of a plurality of connected members; FIG. 17 is a plan view showing an example of fixing a plurality of connecting members to a plurality of electric wires of a power cable; FIG. 18 is a side view showing an example of whether one connecting member and a connected member of FIG. 6 can be connected; FIG. 19 is a side view showing an example of whether another connecting member and a connected member of FIG. 6 can be connected; FIG. 19 is a plan view showing another example of fixing a plurality of connecting members to a plurality of electric wires of a power cable; FIG. 19 is a side view showing an example of whether one connecting member and a connected member of FIG. 9 can be connected; FIG. 20 is a side view showing an example of whether another connecting member and a connected member of FIG. 22 can be connected; FIG. 21 is a plan view showing another example of fixing a plurality of connecting members to a plurality of electric wires of a power cable; FIG. 22 is a plan view showing an example of whether one connecting member and a connected member of FIG. 12 can be connected;

[0010] 1. Embodiment 1-1. Configuration Example of Plasma Generator 1 A power cable connection device 90 can be applied to the plasma generator 1. The plasma generator 1 of the embodiment is an atmospheric pressure plasma generator that generates plasma at atmospheric pressure. As shown in FIG. 1, the plasma generator 1 includes a plasma head 10, a power supply device 20, a gas supply device 30, gas piping 31, a control device 40, a robot 50, a housing 60, a cover 70, and a power cable 80. As shown in FIG. 2, the power cable connection device 90 is provided inside the power supply device 20.

[0011] The plasma generator 1 supplies power to the plasma head 10 from the power supply device 20 via a power cable 80. The plasma generator 1 also supplies a process gas to be converted into plasma from the gas supply device 30 via a gas pipe 31. This allows the plasma generator 1 to irradiate the plasma gas from the plasma head 10.

[0012] The power supply device 20 supplies power to the plasma head 10, which generates plasma. The power supply device 20 can use a high-frequency power supply capable of generating plasma. As shown in FIG. 2 , the power supply device 20 includes a converter 21, an inverter 22, a smoother 23, a booster 24, and a power cable connection device 90. The converter 21 converts AC power, such as that from a commercial power source, into DC power. The inverter 22 converts the DC power output from the converter 21 into AC power. The smoother 23 smooths the AC power output from the inverter 22. The booster 24 boosts the AC power smoothed by the smoother 23 to generate power to be supplied to the plasma head 10.

[0013] The power supply device 20 may be any known power device capable of supplying power to the plasma head 10. For example, the inverter 22 may be an inverter including a plurality of (e.g., four) bridge-connected switching elements. The smoother 23 may be a smoother including a coil and a capacitor. The booster 24 may be a transformer. As shown in FIG. 2, the transformer includes a primary winding 24a and a secondary winding 24b.

[0014] The transformer boosts the AC power input to the primary winding 24a (the AC power smoothed by the smoother 23) and outputs the boosted AC power from the secondary winding 24b. For example, the output voltage of the AC power output from the secondary winding 24b is approximately 15 kV at most. Furthermore, since the voltage drops during discharge, the output voltage of the AC power output from the secondary winding 24b is approximately 8 kV to 9 kV. In this way, the power supply device 20 can output AC power of several thousand volts to tens of thousands of volts. Furthermore, the power supply device 20 can output AC power at a frequency of several kilohertz to several tens of kilohertz.

[0015] The secondary winding 24b outputs boosted AC power and corresponds to the output section 20s of the power supply device 20. As shown in FIG. 2 , an end of one of the internal wirings 20k on the side of the booster 24 is connected to one end of the secondary winding 24b. An end of one of the internal wirings 20k opposite the booster 24 is a first end 25a, which is connected to a third end 25c in the power cable connection device 90. An end of the other of the internal wirings 20k on the side of the booster 24 is connected to the other end of the secondary winding 24b. An end of the other of the internal wirings 20k opposite the booster 24 is a second end 25b, which is connected to a fourth end 25d in the power cable connection device 90.

[0016] Ends 80a of the multiple (two in this embodiment) electric wires 81 included in the power cable 80 on the side of the power supply device 20 correspond to the third end 25c and the fourth end 25d. Ends 80b of the multiple (two) electric wires 81 opposite the power supply device 20 are connected to a pair of electrodes 10a, 10b provided in the plasma head 10. Specifically, the end 80b of one electric wire 81 on the side opposite the third end 25c is connected to the electrode 10a, and the end 80b of the other electric wire 81 on the side opposite the fourth end 25d is connected to the electrode 10b. The electrode 10b is provided in a housing 10h of the plasma head 10, and the housing 10h is formed in a cylindrical shape. The housing 10h is arranged to surround the periphery of the electrode 10a, which is provided inside the electrode 10b.

[0017] The gas supply device 30 pressure-feeds and supplies a gas (e.g., air, dry air, etc.) containing at least one of an inert gas (e.g., nitrogen, etc.) and an active gas (e.g., oxygen, etc.) as a process gas. For this purpose, the gas supply device 30 includes a tank for storing the process gas. The gas supply device 30 may also include a heater for heating the process gas supplied to the plasma head 10 as needed, a cooler for cooling the process gas as needed, etc. In this case, the gas supply device 30 can supply the plasma head 10 with a process gas heated by the heater or a process gas cooled by the cooler. The gas supply device 30 can also mix unheated process gas supplied from the tank with a process gas heated by the heater and supply the resulting mixture to the plasma head 10. The gas supply device 30 can also include a mixer for mixing any process gas (e.g., a mixer for mixing nitrogen with hydrogen to produce a reduction effect) rather than changing the temperature of the process gas. In this case, the gas supply device 30 can supply any process gas mixed by the mixer to the plasma head 10.

[0018] The control device 40 drives and controls the plasma generator 1. As shown in FIG. 1, the power cable 80 and the gas pipe 31 are attached along the robot arm 51 of the robot 50. The plasma head 10 is attached to the tip of the robot arm 51. The robot arm 51 has multiple (two in the figure) arm portions 51a connected in one direction. In other words, the robot 50 is an articulated robot. The robot 50 is driven and controlled by the control device 40. Specifically, the robot 50 drives the robot arm 51 based on commands from the control device 40 to move the plasma head 10, thereby irradiating the workpiece W0 supported on the workpiece table D0 with plasma gas.

[0019] As shown in FIG. 1 , the plasma head 10 has a base end fixed to a housing 60 and a tip end covered by a cover 70. An opening 71 is provided at the tip of the cover 70 for irradiating the plasma gas generated by the plasma head 10. The plasma head 10 generates the plasma gas by converting a process gas into plasma using power supplied from a power supply unit 20. The plasma head 10 irradiates the generated plasma gas onto the surface of the workpiece W0. The plasma gas irradiated onto the surface of the workpiece W0 can be used for various surface treatments of the surface of the workpiece W0, such as a modification treatment for modifying the surface of the workpiece W0 from hydrophobic to hydrophilic.

[0020] 1-2. Configuration Example of the Power Cable Connection Device 90 The power cable 80 of this embodiment includes two electric wires 81. For example, as shown in FIG. 2 , an end 80a of one of the two electric wires 81, which is on the side of the power supply device 20, is frame-grounded. In the same figure, the grounded state is indicated by the symbol FG0. For example, a fourth end 25d of one of the two electric wires 81 of the power cable 80 and a second end 25b of one of the two internal wirings 20k are connected in the power cable connection device 90 and are grounded via the frame 20a of the power supply device 20.

[0021] Furthermore, the third end 25c of the other of the two electric wires 81 of the power cable 80 and the first end 25a of the other of the two internal wirings 20k are connected by the power cable connection device 90. Thus, each of the multiple electric wires 81 included in the power cable 80 needs to be connected to a specific internal wiring 20k among the multiple internal wirings 20k connected to the output section 20s of the power supply device 20. However, for example, if a crimp terminal crimped onto the end 80a of the electric wire 81 is simply connected to a crimp terminal crimped onto the end of the internal wiring 20k using a known terminal block, there is a possibility of an incorrect connection between the electric wire 81 and the internal wiring 20k. The fourth end 25d is the ground side, and the third end 25c is the high-voltage side. If the above-mentioned incorrect connection occurs, the electrode 10b provided on the housing 10h of the plasma head 10, which is accessible to an operator, will be connected to the high-voltage side.

[0022] Therefore, the power supply device 20 is provided with a power cable connection device 90. As shown in FIG. 3, the power cable connection device 90 includes a plurality of (two in the figure) connecting members 91 and a plurality of (two in the figure) connected members 92. As will be described later, the plurality of (two) connecting members 91 and the plurality of (two) connected members 92 are each provided with an erroneous connection prevention mechanism 93. This allows the power cable connection device 90 to prevent erroneous connection between the electric wire 81 of the power cable 80 and the internal wiring 20k of the power supply device 20. The power cable connection device 90 also prevents the electrode 10b, which is provided on the housing 10h of the plasma head 10 and which can be touched by an operator, from being connected to the high-voltage side.

[0023] The power cable 80 has end portions 80a, on the side of the power supply device 20, of the two electric wires 81 included in the power cable 80, fixed to the two (two) connecting members 91, respectively. Specifically, the third end portion 25c of the electric wire 81 is fixed to one of the two (two) connecting members 91, and the fourth end portion 25d of the electric wire 81 is fixed to the other (two) connecting members 91. As described above, the power cable 80 transmits power supplied from the power supply device 20 to the plasma head 10, which generates plasma.

[0024] The multiple (two) connectable members 92 are multiple (two) members to which the multiple (two) connecting members 91 are respectively connected, and each has one end of a multiple (two) internal wiring 20k connected to the output section 20s of the power supply device 20 fixed to the other end. Specifically, a first end 25a of the internal wiring 20k is fixed to one of the multiple (two) connectable members 92, and a second end 25b of the internal wiring 20k is fixed to the other of the multiple (two) connectable members 92.

[0025] The misconnection prevention mechanism 93 allows connection of components that should be connected to each other and prevents connection of components that should not be connected to each other. In the above example, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed should be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed, but should not be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed.

[0026] Therefore, the misconnection prevention mechanism 93 allows the connection between the connecting member 91 to which the third end 25c of the electric wire 81 is fixed and the connected member 92 to which the first end 25a of the internal wiring 20k is fixed. The misconnection prevention mechanism 93 also restricts the connection between the connecting member 91 to which the third end 25c of the electric wire 81 is fixed and the connected member 92 to which the second end 25b of the internal wiring 20k is fixed.

[0027] Similarly, the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed should be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed, and should not be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed. Therefore, the incorrect connection prevention mechanism 93 allows the connection between the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed and the connected member 92 to which the second end 25b of the internal wiring 20k is fixed. In addition, the incorrect connection prevention mechanism 93 restricts the connection between the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed and the connected member 92 to which the first end 25a of the internal wiring 20k is fixed.

[0028] The multiple connecting members 91 may be formed of a conductive material (e.g., metal) and may take various forms as long as the power supply unit 20-side ends 80a of the multiple electric wires 81 can be fixed to them. Similarly, the multiple connected members 92 may be formed of a conductive material (e.g., metal) and may take various forms as long as the multiple connecting members 91 can be connected to them and the other ends of the multiple internal wiring 20k can be fixed to them. Furthermore, the incorrect connection prevention mechanism 93 may take various forms as long as it allows the connection of components that should be connected to each other and prevents the connection of components that should not be connected to each other. The matters described in this specification may be applied by selecting appropriate elements. Furthermore, the matters described in this specification may be combined as appropriate.

[0029] 1-2-1. First Mode: One of the connecting member 91 and the connected member 92 is defined as a first member 90f. The other of the connecting member 91 and the connected member 92 is defined as a second member 90s. In this case, the misconnection prevention mechanism 93 provided on the first member 90f can be a protrusion 94 that protrudes toward the second member 90s when the first member 90f and the second member 90s are connected. The misconnection prevention mechanism 93 provided on the second member 90s can be a hole 95a or a notch 95b provided at a predetermined position on the second member 90s.

[0030] Specifically, the hole 95a or the cutout 95b is not formed at a position where the protrusion 94 would enter when connecting the first member 90f and the second member 90s, which should not be connected to each other. Furthermore, the hole 95a or the cutout 95b is formed at a position where the protrusion 94 would enter when connecting the first member 90f and the second member 90s, which should be connected to each other, and the protrusion 94 can enter. The hole 95a need only be a through-hole that allows the protrusion 94 to enter, and may be a non-through recess. Similarly, the shape of the cutout 95b is not limited as long as the protrusion 94 can enter.

[0031] For example, as shown in FIGS. 3, 7, and 8, the first member 90f can be a connecting member 91 formed in a plate shape. In this case, as shown in FIGS. 3, 6 to 8, a crimp terminal 90j crimped onto the end 80a of the electric wire 81 on the power supply device 20 side is fixed to the connecting member 91 by a bolt 90b longer than the plate thickness 91t. A known crimp terminal can be used as the crimp terminal 90j, for example, a round terminal with a circular fixing portion. As shown in FIGS. 7 and 8, in this embodiment, the protrusion 94 is a bolt 90b protruding from the connecting member 91. In other words, the misconnection prevention mechanism 93 of the first embodiment can provide the protrusion 94 by utilizing the bolt 90b protruding from the connecting member 91.

[0032] 4 and 6 to 8, the connecting member 91 can include a member fixing hole 91a and an electric wire fixing hole 91b. The member fixing hole 91a is a hole on the connecting member 91 side that is used when fixing the connecting member 91 to the connected member 92. The electric wire fixing hole 91b is a hole that is used when fixing the electric wire 81 to the connecting member 91 with a crimp terminal 90j and a bolt 90b. The electric wire fixing hole 91b has an internal thread, and the crimp terminal 90j that is crimped onto the end 80a of the electric wire 81 on the power supply device 20 side can be fixed with the bolt 90b.

[0033] 5, 7, and 8, the connected member 92 can have a member fixing hole 92a and a hole 95a or a notch 95b. The member fixing hole 92a is a hole on the connected member 92 that is used when fixing the connecting member 91 to the connected member 92. The member fixing hole 92a is internally threaded, and the connecting member 91 can be fixed with a bolt equivalent to the bolt 90b. The hole 95a or the notch 95b is formed larger than the outer diameter of the bolt 90b protruding from the connecting member 91 so that the bolt 90b can enter.

[0034] 4 and 6 , distances L11, L12 from the center of the member fixing hole 91a to the center of the electric wire fixing hole 91b vary depending on the connecting member 91. Specifically, as shown in Fig. 6 , for example, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed has the distance L11, and the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed has the distance L12. As described above, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed should be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed, but should not be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed.

[0035] 5, the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed is located at a distance L11 from the center of the member fixing hole 92a. This allows the protrusion 94 of the connecting member 91 to which the third end 25c of the electric wire 81 is fixed to enter the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed (see the connection tolerance shown in FIG. 7). In other words, the connecting member 91 can be connected to the connected member 92.

[0036] In contrast, as shown in the connected member 92 on the right side of Fig. 5, the hole 95a or notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed is located at a distance L12 from the center of the member fixing hole 92a. As a result, the protrusion 94 of the connecting member 91 to which the third end 25c of the electric wire 81 is fixed cannot enter the hole 95a or notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed (see the connection restriction shown in Fig. 7). In other words, the connecting member 91 cannot be connected to the connected member 92.

[0037] Similarly, the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed should be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed, but should not be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed. Therefore, as shown in the connected member 92 on the right side of FIG. 5 , the hole 95a or notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed is located at a distance L12 from the center of the member fixing hole 92a. This allows the protrusion 94 of the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed to enter the hole 95a or notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed (see the connection allowance shown in FIG. 8 ). In other words, the connecting member 91 can be connected to the connected member 92.

[0038] In contrast, as shown in the connected member 92 on the left side of FIG. 5 , the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed is located at a distance L11 from the center of the member-fixing hole 92a. As a result, the protrusion 94 of the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed cannot enter the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed (connection restriction shown in FIG. 8 ). In other words, the connecting member 91 cannot be connected to the connected member 92. In this way, the incorrect connection prevention mechanism 93 allows connection between components that should be connected to each other and restricts connection between components that should not be connected to each other.

[0039] The power cable 80 may be a known power cable such as a cross-linked polyethylene insulated vinyl sheath cable (CV cable). In order to ensure electrical insulation, the power cable 80 has a thicker sheath than the electric wires 81 inside. Therefore, the bending stress of the electric wires 81 is relatively high, and if only the electric wires 81 are fixed to the connecting member 91, the electric wires 81 may break. Therefore, it is preferable that the end 80a of the electric wires 81 on the side of the power supply device 20 is fixed to the connecting member 91. This makes it possible to prevent breakage of the electric wires 81.

[0040] For example, the end 80a of the electric wire 81 on the side of the power supply device 20 can be fixed to the connecting member 91 with a cable tie 90u. As shown in Figures 4 and 6, the connecting member 91 has a cable tie 91c. The cable tie 91c refers to the portion where the end 80a of the electric wire 81 on the side of the power supply device 20 is fixed to the connecting member 91 with the cable tie 90u. As shown in Figure 4, for example, the cable tie 91c is formed in a concave shape in the connecting member 91, and the position of the cable tie 90u can be specified when the end 80a of the electric wire 81 on the side of the power supply device 20 is fixed with the cable tie 90u.

[0041] 1-2-2. Second Form As shown in Figures 9 to 11, this form differs from the first form in that the bolt 90b does not protrude from the connecting member 91, and in each connecting member 91, the distance from the center of the member fixing hole 91a to the center of the electric wire fixing hole 91b is distance L11. In the connecting member 91 of this form, the crimp terminal 90j crimped onto the end 80a of the electric wire 81 on the power supply device 20 side is fixed by a bolt 90b with a thickness 91t equal to or shorter than the thickness 91t. This specification focuses on the differences from the first form, and redundant explanations are omitted. The same applies to the other forms described above.

[0042] 10 and 11 , the connecting member 91 of this embodiment is provided with a protruding portion 94 that protrudes toward the connected member 92. The protruding portion 94 may have various shapes as long as it protrudes toward the connected member 92. For example, the protruding portion 94 may be cylindrical, prismatic, or plate-shaped. Furthermore, as shown in FIGS. 10 and 11 , the distances L21 and L22 from the center of the member fixing hole 91 a to the center of the protruding portion 94 vary depending on the connecting member 91.

[0043] 10 , for example, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed is at a distance L21, and the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed is at a distance L22. As described above, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed should be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed, but should not be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed.

[0044] Therefore, the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed is provided at a position distance L21 from the center of the member fixing hole 92a. This allows the protrusion 94 of the connecting member 91 to which the third end 25c of the electric wire 81 is fixed to enter the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed (see the connection tolerance shown in FIG. 10 ). In other words, the connecting member 91 can be connected to the connected member 92.

[0045] In contrast, the hole 95a or notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed is located at a distance L22 from the center of the member fixing hole 92a. As a result, the protrusion 94 of the connecting member 91 to which the third end 25c of the electric wire 81 is fixed cannot enter the hole 95a or notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed (see the connection restriction shown in FIG. 10 ). In other words, the connecting member 91 cannot be connected to the connected member 92.

[0046] Similarly, the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed should be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed, but should not be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed. Therefore, the hole 95a or the notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed is provided at a distance L22 from the center of the member fixing hole 92a. This allows the protrusion 94 of the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed to enter the hole 95a or the notch 95b of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed (see the connection allowance shown in FIG. 11 ). That is, the connecting member 91 can be connected to the connected member 92.

[0047] In contrast, the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed is located at a distance L21 from the center of the member fixing hole 92a. As a result, the protrusion 94 of the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed cannot enter the hole 95a or notch 95b of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed (see the connection restriction shown in FIG. 11 ). In other words, the connecting member 91 cannot be connected to the connected member 92.

[0048] As such, the protrusion 94 is not limited to the bolt 90b protruding from the connecting member 91 shown in the first embodiment. Furthermore, the protrusion 94 in this embodiment can also be provided on the connected member 92, and the hole 95a or the notch 95b can also be provided on the connecting member 91. In other words, the misconnection prevention mechanism 93 provided on the first member 90f can be the protrusion 94, and the misconnection prevention mechanism 93 provided on the second member 90s can be the hole 95a or the notch 95b. In any of the embodiments described above, the misconnection prevention mechanism 93 can allow connection between components that should be connected to each other and can prevent connection between components that should not be connected to each other.

[0049] 1-2-3. Third Form Like the second form, this form differs from the first form in that the bolt 90b does not protrude from the connecting member 91, and the distance from the center of the member fixing hole 91a to the center of the electric wire fixing hole 91b is distance L11 in all connecting members 91. This form also differs from the first and second forms in that the misconnection prevention mechanism 93 provided on the first member 90f does not have a protrusion 94, and the misconnection prevention mechanism 93 provided on the second member 90s does not have a hole 95a or a notch 95b.

[0050] 12 to 14 , in this embodiment, the misconnection prevention mechanism 93 provided on the connecting member 91 is a protruding portion 96 that protrudes from the connecting member 91, which is formed in a plate shape. The misconnection prevention mechanism 93 provided on the connected member 92 is a standing portion 97 that is provided at a predetermined position on the connected member 92. Specifically, the standing portion 97 is not formed in a position that will abut against the protruding portion 96 when connecting the connecting member 91 and the connected member 92 that should be connected to each other. The standing portion 97 is formed in a position that will abut against the protruding portion 96 when connecting the connecting member 91 and the connected member 92 that should not be connected to each other, and can abut against the protruding portion 96 to prevent connection.

[0051] For example, as shown in Figures 12 to 14, the end 80a of the electric wire 81 on the side of the power supply device 20 is fixed to the connecting member 91 by a cable tie 90u. In this case, the protruding portion 96 can be the cable tie 90u protruding from the connecting member 91. For example, compared to the cable tie 91c of the first embodiment shown in Figure 4, the concave portion (constriction) formed in the connecting member 91 is shallower in the cable tie 91c of this embodiment, and a portion of the cable tie 90u protrudes horizontally from the connecting member 91. In addition, the head portion of the cable tie 90u (the portion into which the band portion is inserted) may protrude horizontally from the connecting member 91 depending on the position of the cable tie 90u when fixed to the connecting member 91.

[0052] In this way, the misconnection prevention mechanism 93 of this embodiment can provide the protruding portion 96 by utilizing the cable tie 90u protruding from the connecting member 91. Furthermore, as shown in FIGS. 12 to 14 , the connecting member 91 can be provided with a member fixing hole 91a and a binding portion 91c. As described above, the member fixing hole 91a refers to a hole on the connecting member 91 that is used when fixing the connecting member 91 to the connected member 92. The binding portion 91c refers to a portion where the end 80a of the electric wire 81 on the side of the power supply device 20 is fixed to the connecting member 91 by the cable tie 90u.

[0053] 13 and 14 , the connected member 92 can include a member fixing hole 92a and a raised portion 97. As described above, the member fixing hole 92a is a hole on the connected member 92 that is used to fix the connecting member 91 to the connected member 92. The member fixing hole 92a is internally threaded, allowing the connecting member 91 to be fixed with a bolt similar to bolt 90b. The raised portion 97 can have various shapes as long as it is raised so as to be able to abut against the protruding portion 96. For example, the raised portion 97 may be cylindrical or rectangular.

[0054] 12 to 14 , distances L31, L32 from the center of the member fixing hole 91a to the binding portion 91c vary depending on the connecting member 91. Specifically, as shown in Fig. 12 , for example, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed has the distance L31, and the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed has the distance L32. As described above, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed should be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed, but should not be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed.

[0055] Therefore, the upright portion 97 of the connected member 92 to which the first end 25a of the internal wiring 20k is fixed is not located at a position distance L31 from the center of the member fixing hole 92a, but is located at a position distance L32. As a result, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed can be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed (see the connection allowance shown in FIG. 13 ). In contrast, the upright portion 97 of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed is located at a position distance L31 from the center of the member fixing hole 92a. As a result, the connecting member 91 to which the third end 25c of the electric wire 81 is fixed cannot be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed (see the connection restriction shown in FIG. 13 ).

[0056] Similarly, the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed should be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed, but should not be connected to the connected member 92 to which the first end 25a of the internal wiring 20k is fixed. Therefore, the upright portion 97 of the connected member 92 to which the second end 25b of the internal wiring 20k is fixed is not located at a position distance L32 from the center of the member fixing hole 92a, but is located at a position distance L31. This allows the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed to be connected to the connected member 92 to which the second end 25b of the internal wiring 20k is fixed (see the connection allowance shown in FIG. 14 ).

[0057] In contrast, the upright portion 97 of the connection target member 92 to which the first end 25a of the internal wiring 20k is fixed is located at a distance L32 from the center of the member fixing hole 92a. As a result, the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed cannot be connected to the connection target member 92 to which the first end 25a of the internal wiring 20k is fixed (see the connection restriction shown in FIG. 14 ). Thus, the misconnection prevention mechanism 93 is not limited to the protrusion 94 that protrudes toward the connecting member 91 or the connection target member 92 when the connecting member 91 and the connection target member 92 are connected. Even in this embodiment, the misconnection prevention mechanism 93 can permit connection between components that should be connected to each other and restrict connection between components that should not be connected to each other.

[0058] 2 and 3, a power cable 80 includes two electric wires 81. A connecting member 91, to which an end 80a of one of the two electric wires 81 on the side of the power supply device 20 is fixed, is fixed to a connected member 92, which is grounded to the frame. Specifically, as shown in Fig. 3, the connected member 92 to which the second end 25b of the internal wiring 20k is fixed is formed in a plate shape and is separated from the bottom surface of the frame 20a of the power supply device 20 by, for example, a spacer or the like.

[0059] As a result, the second end 25b of the internal wiring 20k can be connected from the back side of the connected member 92. In contrast, the connecting member 91 to which the fourth end 25d of the electric wire 81 is fixed can be connected from the front side of the connected member 92. In addition, the ground wire 20e connected to the back side of the connected member 92 and the shield wire 82 of the power cable 80 are connected at the terminal block and are grounded via the frame 20a of the power supply device 20.

[0060] A connected member 92 to be connected to a connecting member 91 to which an end 80a of the other of the two electric wires 81 on the side of the power supply device 20 is fixed is fixed to an insulator 98 provided on the frame 20a. The insulator 98 may be any known insulator as long as it can be electrically insulated from the frame 20a of the power supply device 20. The insulator 98 may be made of, for example, ceramic or epoxy resin.

[0061] 3, a connected member 92 is provided on the upper part of the insulator 98. The connected member 92 is formed in a U-shape and is disposed so as to protrude vertically upward. The first end 25a of the internal wiring 20k is connected to one protruding portion of the connected member 92, and the connecting member 91, to which the third end 25c of the electric wire 81 is fixed, is connected to the other protruding portion of the connected member 92.

[0062] The power cable 80 may include two or more electric wires 81. In this case, the power cable connection device 90 may include the same number of connecting members 91 as the electric wires 81 and the same number of connected members 92 as the electric wires 81. The diameter of the member fixing hole 91a of the connecting member 91, the diameter of the member fixing hole 92a of the connected member 92, and the outer diameter of the bolt that fixes the connecting member 91 to the connected member 92 may be changed for each combination of connecting member 91 and connected member 92. Furthermore, in order to prevent erroneous connection between the end 80a of the electric wire 81 on the side of the power supply device 20 and the connecting member 91, the hole diameter of the fixing portion of the crimp terminal 90j and the outer diameter of the bolt 90b may be changed for each electric wire 81.

[0063] 2. Example of Effects of the Embodiment According to the power cable connection device 90, it is possible to prevent incorrect connection between the electric wire 81 of the power cable 80 and the internal wiring 20k of the power supply device 20.

[0064] 10: plasma head, 20: power supply unit, 20a: frame, 20k: internal wiring, 20s: output section, 80: power cable, 80a: end section, 81: electric wire, 90: power cable connection device, 90f: first member, 90s: second member, 90j: crimp terminal, 90b: bolt, 90u: cable tie, 91: connection member, 91a: member fixing hole, 91b: electric wire fixing hole, 91c: binding section, 91t: plate thickness, 92: connected member, 93: misconnection prevention mechanism, 94: protrusion, 95a: hole, 95b: notch, 96: protruding section, 97: standing section, 98: insulator, L11, L12, L31, L32: distance.

Claims

1. A power cable connection device comprising: a plurality of connecting members to which the ends of a plurality of electric wires included in a power cable that transmits power supplied from a power supply to a plasma head that generates plasma are respectively fixed at the power supply unit side ends of the plurality of electric wires; and a plurality of connected members, which are members to which the plurality of connecting members are respectively connected, and to which the other ends of a plurality of internal wirings whose one ends are connected to the output unit of the power supply are respectively fixed, wherein the plurality of connecting members and the plurality of connected members are equipped with an erroneous connection prevention mechanism that allows connection of members that should be connected to each other and prevents connection of members that should not be connected to each other.

2. The power cable connection device according to claim 1, wherein the misconnection prevention mechanism provided on a first member, which is one of the connecting member and the connected member, is a protrusion that protrudes toward the second member when the first member is connected to a second member, which is the other of the connecting member and the connected member, and the misconnection prevention mechanism provided on the second member is not formed in a position into which the protrusion would enter when connecting the first member and the second member, which should not be connected to each other, but is a hole or notch into which the protrusion, which is formed in a position into which the protrusion would enter when connecting the first member and the second member, which should be connected to each other, can enter.

3. The power cable connection device according to claim 2, wherein the first member is the connecting member formed in a plate shape, the connecting member has a crimp terminal crimped onto the end of the electric wire on the side of the power supply device and fixed by a bolt longer than the plate thickness, and the protrusion is the bolt protruding from the connecting member.

4. A power cable connection device as described in claim 3, wherein the connection member comprises: a member fixing hole for fixing the connection member to the connected member; and a wire fixing hole for fixing the electric wire to the connection member using the crimp terminal and the bolt; and the distance from the center of the member fixing hole to the center of the wire fixing hole varies depending on the connection member.

5. A power cable connection device according to any one of claims 1 to 4, wherein the end of the electric wire on the side of the power supply device is fixed to the connection member by a cable tie.

6. The power cable connection device according to claim 1, wherein the misconnection prevention mechanism provided on the connecting member is a protruding portion that protrudes from the connecting member, which is formed in a plate shape, and the misconnection prevention mechanism provided on the connected member is an upright portion that is not formed in a position that will abut against the protruding portion when connecting the connecting member and the connected member that should be connected to each other, and is formed in a position that will abut against the protruding portion when connecting the connecting member and the connected member that should not be connected to each other, and can abut against the protruding portion to prevent connection.

7. A power cable connection device as described in claim 6, wherein the end of the electric wire on the side of the power supply device is fixed to the connection member by a cable tie, and the protruding portion is the cable tie protruding from the connection member.

8. A power cable connection device as described in claim 7, wherein the connection member comprises a member fixing hole for fixing the connection member to the connected member, and a binding portion at which the end of the electric wire on the side of the power supply device is fixed to the connection member by the binding band, and the distance from the center of the member fixing hole to the binding portion varies depending on the connection member.

9. The power cable connection device according to claim 1, wherein the power cable comprises two electric wires, and the connected member to which the connecting member, to which the end of one of the two electric wires on the side of the power supply device is fixed, is frame-grounded.

10. A power cable connection device as described in claim 9, wherein the connecting member to which the end of the other of the two electric wires on the side of the power supply unit is fixed is connected, and the connected member is fixed to an insulator provided on a frame.

Images