Information processing method, information processing device, and substrate processing system

Abstract

Provided are an information processing method, an information processing device, and a substrate processing system that make it possible to update a control model that is used by a substrate processing device.　An information processing method according to the present invention involves acquiring a control model for controlling a substrate processing device to perform substrate processing in accordance with a recipe, storing the acquired control model at a storage device, deploying the control model at the substrate processing device, and storing information about the control model as deployed at the substrate processing device at the storage device.

Description

Information processing method, information processing device, and substrate processing system

[0001] The present disclosure relates to an information processing method, an information processing apparatus, and a substrate processing system.

[0002] Patent Literature 1 discloses an example of a substrate processing apparatus that is controlled to perform substrate processing according to a recipe. For example, Patent Literature 1 discloses that control parameters and operating conditions of a plasma processing apparatus are determined using a machine learning model.

[0003] International Publication No. WO2024 / 014363

[0004] The present disclosure provides an information processing method, an information processing apparatus, and a substrate processing system that enable updating of a control model used by a substrate processing apparatus.

[0005] In an information processing method according to one aspect of the present disclosure, a control model for controlling a substrate processing apparatus to perform substrate processing according to a recipe is acquired, the acquired control model is stored in a storage device, the control model is deployed to the substrate processing apparatus, and information regarding the control model deployed to the substrate processing apparatus is stored in the storage device.

[0006] According to the present disclosure, it is possible to provide an information processing method, an information processing apparatus, and a substrate processing system that enable updating of a control model used by a substrate processing apparatus.

[0007] FIG. 1 is a schematic diagram showing an example of the configuration of a substrate processing system. FIG. 2 is a block diagram showing an example of the internal configuration of a distribution device. FIG. 3 is a block diagram showing an example of the internal configuration of an information processing device. FIG. 4 is a schematic diagram showing example contents of recipe data. FIG. 5 is a flowchart showing an example of a processing procedure for distributing a control model from a distribution device to an information processing device. FIG. 6 is a flowchart showing a processing procedure for deploying a control model executed by a substrate processing system to a substrate processing device. FIG. 7 is a schematic diagram showing example contents of management data. FIG. 8 is a flowchart showing a processing procedure for deploying a control model executed by a substrate processing system to another substrate processing device.

[0008] In order to perform substrate processing appropriately in a substrate processing apparatus, it is desirable to use not only an appropriate recipe but also an appropriate control model. Even if the hardware of the substrate processing apparatus is the same, if the control model can be updated to an appropriate control model, the substrate processing apparatus can perform more appropriate substrate processing. However, no technology is known for updating the control model used in existing substrate processing apparatuses.

[0009] The present disclosure will be described in detail below with reference to the drawings illustrating embodiments thereof. FIG. 1 is a schematic diagram illustrating an example configuration of a substrate processing system 100. The substrate processing system 100 executes an information processing method. The substrate processing system 100 according to this embodiment distributes a control model, which is software for controlling a substrate processing apparatus 2 to perform substrate processing according to a recipe that defines substrate processing details, and controls the substrate processing apparatus 2 using the distributed control model. The substrate processing system 100 includes an information processing apparatus 1. The information processing apparatus 1 is connected to a distribution device 3 via a first communication network N1, such as the Internet. The distribution device 3 distributes the control model to the information processing apparatus 1. A plurality of information processing apparatuses 1 may be connected to the distribution device 3 via the first communication network N1. In this embodiment, the control model is distributed from the distribution device 3 to the information processing apparatus 1.

[0010] A plurality of substrate processing apparatuses 2 are connected to the information processing apparatus 1 via a second communication network N2 such as a LAN (Local Area Network). For example, the information processing apparatus 1 and the plurality of substrate processing apparatuses 2 are located in a factory. Each substrate processing apparatus 2 includes a control unit 21 and a plurality of process chambers 22. The process chambers 22 are chambers in which substrate processing such as etching or film formation is performed. The control unit 21 is configured as a computer and controls the operation of each part of the substrate processing apparatus 2 and controls the substrate processing performed in each process chamber 22. In this embodiment, the information processing apparatus 1 deploys the distributed control model to the substrate processing apparatus 2. The control unit 21 performs control in accordance with the control model.

[0011] FIG. 2 is a block diagram showing an example of the internal configuration of the distribution device 3. The distribution device 3 is configured using a computer such as a server device. The distribution device 3 includes a calculation unit 31, a memory 32, a storage unit 33, and a communication unit 34. The calculation unit 31 is a processor and is configured using, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or a multi-core CPU. The calculation unit 31 may also be configured using a quantum computer. The memory 32 stores temporary data generated in conjunction with calculations. The memory 32 is, for example, a RAM (Random Access Memory). The storage unit 33 is non-volatile and is, for example, a hard disk or non-volatile semiconductor memory. The communication unit 34 communicates with the information processing device 1 via the first communication network N1 by wired communication or wireless communication.

[0012] The storage unit 33 stores a computer program 331. The calculation unit 31 executes processing to realize the functions of the distribution device 3 in accordance with the computer program 331. For example, the computer program 331 recorded on a recording medium (not shown) is read from the recording medium and stored in the storage unit 33. The computer program 331 may be pre-stored in the storage unit 33 or downloaded from outside the distribution device 3. The computer program 331 can be deployed to be executed on a single computer, or on multiple computers located at one site, or distributed across multiple sites and interconnected by a communication network. That is, the distribution device 3 may be composed of multiple computers, and the computer program 331 may be executed on multiple computers connected via a communication network. For example, data may be stored in a distributed manner across multiple computers. The distribution device 3 may be configured using a cloud server.

[0013] The storage unit 33 stores a control model. The control model is software for controlling the substrate processing apparatus 2 and includes a computer program. The control model may include data required for executing the computer program. The control model is configured from binary data. The control model is updated as needed, and the latest control model is stored in the storage unit 33.

[0014] The storage unit 33 stores authentication data for authenticating the information processing device 1 to which distribution of a control model should be permitted. For example, the authentication data records identification information for identifying the information processing device 1. The identification information is, for example, the name of the business operator using the information processing device 1 or a user ID. The authentication data may record a license ID of the control model that has been previously assigned to the information processing device 1. The authentication data also records the validity period of the license for the information processing device 1 to use the control model.

[0015] FIG. 3 is a block diagram showing an example of the internal configuration of the information processing device 1. The information processing device 1 is configured using a computer such as a server device. The information processing device 1 includes a calculation unit 11, a memory 12, a storage unit 13, a reading unit 14, an operation unit 15, a display unit 16, a first communication unit 17, and a second communication unit 18. The calculation unit 11 is a processor and is configured using, for example, a CPU, a GPU, or a multi-core CPU. The calculation unit 11 may also be configured using a quantum computer. The memory 12 stores temporary data generated in conjunction with calculations. The memory 12 is, for example, a RAM. The storage unit 13 is non-volatile and is, for example, a hard disk or a non-volatile semiconductor memory. The reading unit 14 reads information from a recording medium 10 such as an optical disc or a portable memory.

[0016] The operation unit 15 receives input of information such as text by receiving operations from a user. The operation unit 15 is, for example, a keyboard, a pointing device, or a touch panel. The display unit 16 displays images. The display unit 16 is, for example, a liquid crystal display or an EL display (Electroluminescent Display). The operation unit 15 and the display unit 16 may be integrated. The first communication unit 17 communicates with the distribution device 3 via a first communication network N1 by wired or wireless communication, and the second communication unit 18 communicates with a control unit 21 of the substrate processing apparatus 2 via a second communication network N2 by wired or wireless communication.

[0017] The calculation unit 11 causes the reading unit 14 to read a computer program (program product) 131 recorded on the recording medium 10, and stores the read computer program 131 in the storage unit 13. The calculation unit 11 executes processing to realize the functions of the information processing device 1 in accordance with the computer program 131. The computer program 131 may be stored in the storage unit 13 in advance, or may be downloaded from outside the information processing device 1. In this case, the information processing device 1 does not need to include the reading unit 14.

[0018] The computer program 131 can be deployed to run on a single computer, or on multiple computers located at one site or distributed across multiple sites and interconnected by a communications network. That is, the information processing device 1 may be made up of multiple computers, and the computer program 131 may be executed on multiple computers connected via a communications network.

[0019] The processing of each step, which will be described later and which is executed by the information processing device 1, can be executed by multiple computers. The processing of each step can also be executed by different computers. Data used during the processing can be stored in multiple computers. The processing of each step can also be executed using a virtual machine. The processing of each step can be executed by multiple calculation units. The processing of each step can also be executed by different calculation units. For example, part of the processing can be executed by one computer, and another part of the processing can be executed by another computer.

[0020] The storage unit 13 corresponds to a storage device. The storage unit 13 stores a control model 132 distributed from the distribution device 3 to the information processing device 1. The control model 132 is configured from binary data. The storage unit 13 may store a plurality of control models 132 of different versions. The storage unit 13 stores management data 134 that records information related to the control model 132 deployed to each substrate processing device 2.

[0021] The storage unit 13 stores recipe data 133 representing a recipe that defines the substrate processing details to be performed in the process chamber 22. FIG. 4 is a schematic diagram showing an example of the contents of the recipe data 133. A recipe consists of multiple processing steps in a predetermined order. A processing step is the smallest unit of a chronological processing procedure for a substrate. In the example shown in FIG. 4, each of the multiple processing steps is given a name such as A or B. The order of the processing steps is determined by arranging the names of the processing steps vertically or horizontally. The name of each processing step is associated with the substrate processing details that are predetermined for each processing step. In the example shown in FIG. 4, the processing details include the pressure within the process chamber 22, the power supplied to the process chamber 22, the flow rates of multiple types of gases supplied to the process chamber 22, and the temperature within the process chamber 22. Other processing details, such as the length of time for processing, may also be determined.

[0022] The recipe data 133 is, for example, created by a company that performs substrate processing and stored in the storage unit 13 of the information processing device 1. The recipe data 133 may be distributed from the distribution device 3 to the information processing device 1. The recipe data 133 may be stored in the control unit 21 of the substrate processing device 2, rather than in the information processing device 1. The recipe data 133 may include data representing multiple recipes.

[0023] 5 is a flowchart showing an example of a processing procedure for distributing a control model from the distribution device 3 to the information processing device 1. Hereinafter, step is abbreviated as S. The calculation unit 11 executes information processing in accordance with the computer program 131, and the information processing device 1 executes the following processing. Furthermore, the calculation unit 31 executes information processing in accordance with the computer program 331, and the distribution device 3 executes processing.

[0024] The information processing device 1 transmits a request for a control model to the distribution device 3 (S101). For example, the user operates the operation unit 15 to input the request for the control model to the information processing device 1. In S101, the calculation unit 11 transmits the request for the control model from the first communication unit 17 to the distribution device 3. In addition to the request for the control model, the calculation unit 11 also transmits information required for authentication to use the control model to the distribution device 3. The information required for authentication is, for example, identification information for identifying the information processing device 1, a password, or a license ID for the control model.

[0025] The distribution device 3 receives the control model request transmitted from the information processing device 1 via the communication unit 34 (S102). In S102, the distribution device 3 also receives information necessary for authentication transmitted from the information processing device 1. The distribution device 3 then determines whether or not to distribute the control model (S103). In S103, the calculation unit 31 authenticates the information processing device 1 in accordance with the information necessary for authentication transmitted from the information processing device 1, based on the authentication data stored in the storage unit 33, and determines whether or not to distribute the control model. For example, the calculation unit 31 determines whether the identification information, password, or license ID for identifying the information processing device 1 is correct, based on the authentication data. The calculation unit 31 also determines whether the current time is within the validity period of the license. If the identification information, password, or license ID are correct and the current time is within the validity period of the license, the calculation unit 31 authenticates the information processing device 1 as the information processing device 1 to which the control model should be distributed, and determines to permit distribution of the control model to the information processing device 1.

[0026] If the determination in S103 indicates that distribution of the control model to the information processing device 1 is not permitted (S104: NO), the distribution device 3 transmits a determination result indicating that distribution is not permitted to the information processing device 1 (S105). The information processing device 1 receives the determination result transmitted from the distribution device 3 via the first communication unit 17 (S106) and outputs the received determination result (S107). In S107, the calculation unit 11 displays the determination result indicating that distribution is not permitted on the display unit 16. After S107 is completed, the information processing device 1 terminates the process of distributing the control model.

[0027] If the determination in S103 indicates that distribution of the control model to the information processing device 1 is permitted (S104: YES), the distribution device 3 transmits the control model to the information processing device 1 through the first communication network N1 (S108). In S108, the distribution device 3 transmits the latest control model stored in the storage unit 33. The information processing device 1 receives the control model transmitted from the distribution device 3 via the first communication unit 17 (S109). By receiving the control model transmitted from the distribution device 3, the information processing device 1 acquires the control model. The information processing device 1 stores the received control model (S110). In S110, the calculation unit 11 stores the control model 132 in the storage unit 13. The calculation unit 11 records information about the control model 132 stored in the storage unit 13 in the management data 134.

[0028] After S110 is completed, the information processing device 1 ends the process of distributing the control model. The processes of S101 to S110 are executed as needed. For example, the processes of S101 to S110 are executed every time the control model is updated. The control model is distributed from the distribution device 3 to the information processing device 1 through the processes of S101 to S110. Because the control model is composed of binary data, it is difficult for a person to check the contents of the control model. Therefore, the contents of the control model can be kept secret.

[0029] The information processing device 1 may acquire the control model using a recording medium 30 such as an optical disc or a portable memory, rather than by distribution via the first communication network N1. In this configuration, the first communication network N1 may be omitted. In this configuration, an operator using the information processing device 1 requests the operator operating the distribution device 3 to provide the control model. In accordance with the request, the recording medium 30 on which the control model is recorded is delivered to the operator using the information processing device 1. The information processing device 1 acquires the control model by reading the control model recorded on the delivered recording medium 30 using the reading unit 14. The information processing device 1 stores the read control model in the storage unit 13.

[0030] 6 is a flowchart showing the procedure of a process executed by the substrate processing system 100 to deploy the control model 132 to the substrate processing apparatus 2. The information processing apparatus 1 deploys the control model 132 to the substrate processing apparatus 2 (S21). For example, a user operates the operation unit 15 to specify one of the plurality of substrate processing apparatuses 2 as a target for deploying the control model 132. A specific substrate processing apparatus 2 may be predetermined as the target substrate processing apparatus 2 to which the control model 132 is initially deployed. In S21, the calculation unit 11 transmits the control model 132 from the second communication unit 18 to the control unit 21 of the substrate processing apparatus 2 via the second communication network N2, and deploys the control model 132 to the control unit 21.

[0031] The control unit 21 tunes the deployed control model 132 (S22). In S22, the control unit 21 tunes the control model 132 by performing an experiment or simulation to perform control in accordance with the control model 132 so that substrate processing is performed according to one recipe in one process chamber 22 included in the substrate processing apparatus 2. When tuning the control model 132, the control unit 21 adjusts parameters used by the control model 132.

[0032] More specifically, the control unit 21 adjusts parameters used to control the substrate processing apparatus 2 as it transitions from a state in which one processing step included in the recipe is being executed to a state in which another processing step is being executed. As shown in FIG. 4 , each processing step has a predetermined value for a controlled variable, such as pressure, power, or temperature, to be controlled for substrate processing. The control model 132 executes control so that, when a processing step included in the recipe is completed and the next processing step is executed, the controlled variable changes from a value determined for one processing step to a value determined for the next processing step. In S22, the control unit 21 adjusts parameters that define how the controlled variable changes from a value determined for one processing step to a value determined for the next processing step. For example, the control model 132 is defined so that the value of the controlled variable changes according to a predetermined function, and the control unit 21 adjusts parameters included in the function. For example, the function is a function in which the value of the controlled variable changes linearly with time, and the parameter of the function is the slope of the line. The control unit 21 adjusts parameters for multiple controlled variables.

[0033] In S22, the control unit 21 adjusts the parameters so that predetermined conditions are satisfied. For example, the control unit 21 adjusts the parameters so that the length of time required to change multiple controlled variables during a processing step or the length of time required to perform substrate processing according to a recipe is minimized. For example, the control unit 21 adjusts the parameters so that deviations of the controlled variables from their targets fall within predetermined ranges. For example, the control unit 21 adjusts the parameters so that the cost of substrate processing falls within a predetermined range. By adjusting the parameters, the control model 132 is tuned so that the values ​​of the controlled variables change appropriately during the processing steps. For example, the time required to transition from one processing step to the next can be shortened.

[0034] In S22, the control unit 21 tunes the control model 132 in accordance with the recipe. If the recipe differs, the result of parameter adjustment will also differ. The control unit 21 tunes the control model 132 in accordance with the recipe represented by the recipe data 133 stored in the storage unit 13 by the information processing device 1. The control unit 21 may tune the control model 132 in accordance with the recipe represented by the recipe data stored in the control unit 21. The control unit 21 may tune the control model 132 in accordance with a plurality of recipes. By tuning the control model 132 in accordance with the recipe, the control model 132 is tuned so that substrate processing in accordance with the recipe can be appropriately performed.

[0035] Furthermore, in S22, the control unit 21 tunes the control model 132 according to the process chamber 22. Different process chambers 22 have different characteristics in terms of how the values ​​of the controlled variables change, and the results of parameter adjustment also differ. The control unit 21 may tune the control model 132 for a single process chamber 22, or may tune the control model 132 for multiple process chambers 22. The control model 132 may be tuned according to a specific process chamber 22 that is predetermined. By tuning the control model 132 according to the process chamber 22, the control model 132 is tuned so that substrate processing can be appropriately performed in the process chamber 22.

[0036] The control unit 21 uploads information about the tuned control model 132 to the information processing device 1 (S23). The information about the tuned control model 132 includes information indicating a recipe used by the tuned control model 132 and values ​​of parameters adjusted during tuning. In S23, the control unit 21 transmits the information about the tuned control model 132 to the information processing device 1, and the information processing device 1 receives the information transmitted from the control unit 21 via the second communication unit 18.

[0037] The information processing device 1 stores information about the control model 132 deployed to the substrate processing device 2, including information uploaded from the control unit 21 of the substrate processing device 2 (S24). In S24, the calculation unit 11 records information including the uploaded information in the management data 134, thereby storing the information about the control model 132 deployed to the substrate processing device 2 in the storage unit 13.

[0038] 7 is a schematic diagram showing an example of the contents of the management data 134. The names of the substrate processing apparatuses 2, such as substrate processing apparatus M1 and substrate processing apparatus M2, are recorded as information indicating the substrate processing apparatuses 2 to which the control model 132 has been deployed. Information other than the names, such as numbers corresponding to the respective substrate processing apparatuses 2, may be recorded as information indicating the substrate processing apparatuses 2. The names of the control models 132, such as control model A, and the versions of the control models 132, are recorded in association with the information indicating the substrate processing apparatuses 2 as information indicating the deployed control models 132. Furthermore, information indicating the process chambers 22 and recipes involved in tuning is recorded in association with the information indicating the deployed control models 132. The names of the process chambers 22, such as process chamber P1, are recorded as information indicating the process chambers 22 included in the substrate processing apparatus 2, and the names of the recipes, such as recipe R1, are recorded as information indicating the recipes.

[0039] 7, it is recorded that a control model A with version 1.0.0 is deployed to the substrate processing apparatus M1, and that the control model A has been tuned in accordance with the process chamber P1 and recipe R1. Furthermore, the management data 134 records the values ​​of parameters adjusted by tuning in association with information indicating the substrate processing apparatus 2, the control model 132, the process chamber 22, and the recipe. In the example shown in FIG. 7, the control model A has not been tuned in accordance with the process chamber P2 of the substrate processing apparatus M1. Furthermore, it is recorded that the control model A has been tuned in accordance with the process chamber P3 and recipe R2, and the values ​​of the parameters adjusted by tuning are recorded.

[0040] 7 , the management data 134 also records the deployed control model 132, information indicating the process chamber 22 and recipe related to tuning of the control model 132, and the parameter values ​​adjusted by tuning for substrate processing apparatuses 2 other than the substrate processing apparatus M1. When the control model 132 is tuned in accordance with one process chamber 22 and multiple recipes, information indicating multiple recipes and the parameter values ​​adjusted by each tuning are recorded in the management data 134 in association with information indicating one process chamber 22.

[0041] By storing the management data 134 in the information processing apparatus 1, information related to the control model 132 deployed to the substrate processing apparatus 2 is recorded. For example, information is recorded on which substrate processing apparatus 2 the control model 132 was deployed, and on which process chamber 22 and in which recipe the control model 132 was tuned. In addition, values ​​of parameters adjusted by tuning are recorded. The information processing apparatus 1 may display the contents of the management data 134 on the display unit 16. By visually checking the contents of the displayed management data 134, the user can know the status of the deployment and tuning of the control model 132.

[0042] After S24 is completed, the substrate processing apparatus 2 performs substrate processing in accordance with the tuned control model 132 (S25). After S24 is completed, the control unit 21 stores the control model 132 and the adjusted parameters. In S25, the control unit 21 controls the process chamber 22 in accordance with the tuned control model 132, thereby causing the process chamber 22 to perform substrate processing in accordance with the recipe. The substrate processing system 100 then completes the processing. The substrate processing system 100 performs the processing of S21 to S24 as needed. For example, the processing of S21 to S24 is performed each time the information processing apparatus 1 acquires a control model. The substrate processing apparatus 2 performs the processing of S25 as needed using the tuned control model 132.

[0043] The substrate processing system 100 performs a process of deploying a control model 132 tuned for one substrate processing apparatus 2 to another substrate processing apparatus 2. FIG. 8 is a flowchart showing the procedure of the process executed by the substrate processing system 100 to deploy the control model 132 to another substrate processing apparatus 2. The information processing apparatus 1 deploys the control model 132 tuned for one substrate processing apparatus 2 to the other substrate processing apparatus 2 (S31). For example, the user operates the operation unit 15 to specify the control model 132 tuned for one substrate processing apparatus 2 and specify the other substrate processing apparatus 2 to which the control model 132 is to be deployed. For example, the contents of the management data 134 are displayed on the display unit 16, and the control model 132 is specified using the operation unit 15. At this time, the substrate processing apparatus 2 to which the control model 132 is deployed, the process chamber 22 related to tuning, and the recipe may be specified. In S31, the calculation unit 11 transmits the control model 132 from the second communication unit 18 to the control unit 21 of the substrate processing apparatus 2, and deploys the control model 132 to the control unit 21.

[0044] The control unit 21 identifies a recipe related to tuning of the deployed control model 132 (S32). In S32, the control unit 21 identifies a recipe associated with the deployed control model 132. More specifically, the control unit 21 refers to the management data 134, acquires information indicating a recipe associated with information indicating the deployed control model 132, and identifies the recipe based on the acquired information. If there are multiple recipes related to tuning of the deployed control model 132, the control unit 21 may identify multiple recipes, or may identify one recipe from the multiple recipes. The processing of S32 may be performed by the information processing device 1.

[0045] The control unit 21 re-tunes the deployed control model 132 (S33). In S33, the control unit 21 tunes the control model 132 by performing an experiment or simulation to perform control in accordance with the control model 132 so that substrate processing is performed in one process chamber 22 included in the substrate processing apparatus 2 according to the identified recipe. The control unit 21 also re-tunes the control model 132 by utilizing parameter values ​​that have been adjusted by previous tuning for another substrate processing apparatus 2. The control unit 21 refers to the management data 134 and acquires parameter values ​​associated with the deployed control model 132 and information indicating the identified recipe.

[0046] The acquired parameter values ​​have been adjusted by previous tuning. The control unit 21 adjusts the parameters using the parameter values ​​adjusted by previous tuning as initial values. The control unit 21 may fix the values ​​of some of the multiple parameters and adjust the other parameters. For example, the multiple parameters may include parameters that are significantly affected by differences in the substrate processing apparatus 2 and the process chamber 22 and parameters that are less affected. The control unit 21 fixes the parameters that are less affected by differences in the substrate processing apparatus 2 and the process chamber 22 to the parameter values ​​adjusted by previous tuning. The control unit 21 adjusts the parameters that are significantly affected by differences in the substrate processing apparatus 2 and the process chamber 22. By retuning the control model 132, the control model 132 is tuned so that substrate processing can be appropriately performed even in a substrate processing apparatus 2 other than the substrate processing apparatus 2 on which the control model 132 was initially deployed. When retuning the control model 132, the parameter values ​​adjusted by previous tuning are used, thereby minimizing the time required to adjust parameters that are less affected by differences in the substrate processing apparatus 2 or the process chamber 22. This reduces the time required for retuning.

[0047] The control unit 21 uploads information related to the re-tuned control model 132 to the information processing device 1 (S34). The information related to the re-tuned control model 132 includes the values ​​of the parameters readjusted during tuning. In S34, the control unit 21 transmits the information related to the re-tuned control model 132 to the information processing device 1, and the information processing device 1 receives the information transmitted from the control unit 21 via the second communication unit 18.

[0048] The information processing device 1 stores information about the control model 132 deployed to the substrate processing device 2, including information uploaded from the control unit 21 of the substrate processing device 2 (S35). In S35, the calculation unit 11 records information including the uploaded information in the management data 134, thereby storing the information about the control model 132 deployed to the substrate processing device 2 in the storage unit 13.

[0049] After S35 is completed, the substrate processing apparatus 2 performs substrate processing in accordance with the re-tuned control model 132 (S36). After S36 is completed, the control unit 21 stores the control model 132 and the adjusted parameters. In S36, the control unit 21 controls the process chamber 22 in accordance with the re-tuned control model 132, thereby causing the process chamber 22 to perform substrate processing in accordance with the recipe. The substrate processing system 100 then completes the processing. The substrate processing system 100 performs the processing of S31 to S35 as needed. The substrate processing apparatus 2 performs the processing of S36 as needed using the re-tuned control model 132.

[0050] As described above, in this embodiment, the information processing device 1 acquires the control model 132 from the distribution device 3 or the recording medium 30, deploys the acquired control model 132 to the substrate processing apparatus 2, and stores information about the deployed control model 132. The information processing device 1 can acquire the control model 132 from an external device and deploy the acquired control model 132 to the substrate processing apparatus 2 at any time. Therefore, when the control model 132 is updated, the information processing device 1 can deploy the updated control model 132 to the substrate processing apparatus 2. Therefore, in the substrate processing system 100, it is possible to update the control model 132 used by an existing substrate processing apparatus 2 every time the control model is updated. Updating the control model 132 used by an existing substrate processing apparatus 2 enables the substrate processing apparatus 2 to perform more appropriate substrate processing, thereby improving the performance of the substrate processing apparatus 2. Furthermore, since the information processing device 1 stores information about the control model 132, a user can manage the status of the control model 132, such as the version of the control model 132.

[0051] The present invention is not limited to the contents of the above-described embodiment, and various modifications are possible within the scope of the claims. In other words, embodiments obtained by combining technical means modified appropriately within the scope of the claims are also included in the technical scope of the present invention.

[0052] The matters described in each embodiment can be combined with each other. Furthermore, the independent claims and dependent claims described in the claims can be combined with each other in any and all combinations, regardless of the reference format. Furthermore, the claims do not use a format in which a claim references two or more other claims (multiple claim format), but this is not limited to this. They may be written using a multiple claim format or a format in which multiple claims (multi-multi claim) reference at least one other multiple claim.

[0053] REFERENCE SIGNS LIST 100 Substrate processing system 1 Information processing device 10, 30 Recording medium 11 Calculation unit 13 Storage unit (storage device) 131 Computer program 132 Control model 2 Substrate processing device 21 Control unit 22 Process chamber 3 Distribution device N1, N2 Communication network

Claims

1. An information processing method comprising: acquiring a control model for controlling a substrate processing apparatus to perform substrate processing in accordance with a recipe; storing the acquired control model in a storage device; deploying the control model to the substrate processing apparatus; and storing information relating to the control model deployed to the substrate processing apparatus in the storage device.

2. The information processing method according to claim 1, wherein the control model is tuned by adjusting parameters used by the control model according to the substrate processing apparatus in which the control model is deployed, and information relating to the tuned control model is stored in the storage device.

3. The information processing method according to claim 2, wherein the control model is tuned in accordance with a substrate processing apparatus in which the control model is deployed and a specific recipe, and information about the tuned control model includes information indicating the specific recipe.

4. An information processing method as described in claim 2, wherein, when tuning the control model, parameters used to control a substrate processing apparatus that transitions from a state in which one processing step included in a recipe is executed to a state in which another processing step is executed are adjusted.

5. The information processing method according to claim 2, wherein the control model tuned for one substrate processing apparatus is deployed to another substrate processing apparatus.

6. The information processing method according to claim 5, wherein the control model deployed to another substrate processing apparatus is retuned in accordance with the other substrate processing apparatus or in accordance with a process chamber included in the other substrate processing apparatus.

7. An information processing method according to claim 1, wherein the information relating to the control model deployed to the substrate processing apparatus includes information indicating the version of the deployed control model, information indicating a recipe used by the deployed control model, or information indicating the substrate processing apparatus to which the control model has been deployed or a process chamber included in the substrate processing apparatus.

8. The information processing method according to claim 1, further comprising the steps of: acquiring the control model configured from binary data; and storing the control model configured from binary data in the storage device.

9. An information processing method according to claim 1, which determines whether the validity period of a license for using the control model includes the current time, and acquires the control model if the validity period includes the current time.

10. An information processing device comprising a calculation unit and a memory unit, wherein the calculation unit acquires a control model for controlling a substrate processing apparatus to perform substrate processing according to a recipe, stores the acquired control model in the memory unit, deploys the control model to the substrate processing apparatus, and stores information related to the control model deployed to the substrate processing apparatus in the memory unit.

11. A substrate processing system comprising a distribution device, an information processing device, and a substrate processing device, wherein the distribution device transmits a control model to the information processing device for controlling the substrate processing device to perform substrate processing according to a recipe, and the information processing device deploys the received control model to the substrate processing device, and stores information relating to the control model deployed to the substrate processing device.

12. The substrate processing system according to claim 11, wherein the substrate processing apparatus tunes the deployed control model by adjusting parameters used by the control model, and performs substrate processing in accordance with the tuned control model.

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