Measurement work support method and measurement work support system

Abstract

In the present invention, a virtual operating tool, together with a virtual measuring tool for measuring the dimensions, etc., of an object to be measured, is created and displayed at a position separated by a prescribed distance from the virtual measuring tool. As a result of an operator performing an operation for extending, contracting, rotating, or moving the virtual operating tool, the virtual measuring tool also extends, contracts, rotates, or moves in synchronization with the operation of the virtual operating tool. Instead of directly holding and operating the virtual measuring tool by hand, an operator wearing smart glasses operates the virtual operating tool by hand, and then moves the virtual measuring tool in conjunction with this to move the virtual measuring tool up to the object to be measured. Even in a narrow space where a hand cannot fit, it is possible to place the virtual measuring tool therein and perform measurement work.

Description

Measurement work support method and measurement work support system

[0001] The present invention relates to a measurement operation support method and a measurement operation support system for supporting a measurement operation in which a virtual measuring tool is used to measure a measurement target inside an industrial device such as a substrate processing apparatus that performs a predetermined process on a substrate. Substrates to be processed by the substrate processing apparatus include, for example, semiconductor substrates, substrates for liquid crystal display devices, substrates for flat panel displays (FPDs), substrates for optical disks, substrates for magnetic disks, and substrates for solar cells.

[0002] In recent years, technologies related to mixed reality (MR) have been put into practical use. Mixed reality is a technology that constructs a space in which a virtual world is combined with a real world by projecting virtual objects onto the real world. Such mixed reality requires a technology for determining the dimensions and distances of real objects and virtual objects. For example, when placing a virtual object in a substrate processing apparatus, it is necessary to measure clearances to verify whether the virtual object will collide with a real object. Patent Document 1 discloses a technology for measuring dimensions and distances in a mixed reality space using a virtual measuring tool (e.g., a virtual ruler).

[0003] Typically, mixed reality is a technology realized by using a head-mounted display (HMD) such as smart glasses. Patent Literature 2 discloses a technology in which a worker wearing smart glasses inputs operation instructions to a virtual object using hand gestures. To apply this technology to improve the efficiency of measurement work using a virtual measuring tool, a technology has also been devised in which a worker manually moves a virtual measuring tool to a measurement target to measure distances, etc.

[0004] JP 2017-49950 A JP 2024-94491 A

[0005] Using the above technology, a worker can freely move a virtual measuring tool with their hands within the mixed reality space recognized by the smart glasses. However, the virtual measuring tool cannot be placed in a space too narrow for the worker to reach. Furthermore, even in a space that is just large enough for the worker's hand to fit through, the smart glasses may recognize the space as a wall due to the resolution issues of the sensors that recognize the space. In this case, the smart glasses are unable to recognize that the worker's hand is entering the space, and as a result, the virtual measuring tool held in the hand will not enter the space.

[0006] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a measurement work support method and a measurement work support system that allow measurement work to be performed by placing a virtual measuring tool even in a small space.

[0007] In order to solve the above problem, a first aspect of the present invention is a measurement work support method for supporting a specified measurement work using a virtual measuring tool, comprising: a generation process for generating and displaying an operation virtual tool for operating the virtual measuring tool using a portable terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit; and a movement process for moving the virtual measuring tool in conjunction with an operation of the operation virtual tool by a worker wearing the portable terminal, and moving it to an object to be measured.

[0008] In addition, in a second aspect, in the measurement work support method according to the first aspect, when the virtual measuring tool is moved to the object to be measured, the display unit enlarges and displays the object to be measured imaged by the imaging unit.

[0009] In a third aspect, in the measurement operation supporting method according to the first or second aspect, the virtual operation tool has the same size and shape as the virtual measuring tool.

[0010] In a fourth aspect, in the measurement operation supporting method according to the first or second aspect, the virtual tool for operation has a shape obtained by enlarging or reducing the virtual measuring tool at a predetermined ratio.

[0011] In addition, a fifth aspect is a measurement work support method according to any one of the first to fourth aspects, wherein in the movement process, when an operation of extending, rotating or moving is performed on the virtual tool for operation, the virtual measuring tool extends, rotates or moves in synchronization with the virtual tool for operation.

[0012] In addition, a sixth aspect is a measurement work support method according to any one of the first to fifth aspects, wherein the moving process includes an auxiliary process in which the portable terminal additionally moves the virtual measuring tool in response to instructions from a worker wearing the portable terminal.

[0013] In a seventh aspect, in the measurement operation supporting method according to any one of the first to sixth aspects, the measurement target is located inside an industrial device.

[0014] An eighth aspect is the measurement operation support method according to the seventh aspect, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate.

[0015] In a ninth aspect, in the measurement operation supporting method according to any one of the first to eighth aspects, the mobile terminal is a pair of smart glasses.

[0016] In addition, a tenth aspect is a measurement work support system that supports specified measurement work using a virtual measuring tool, and includes a portable terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit, a generation unit that generates an operation virtual tool for operating the virtual measuring tool, and a movement unit that moves the virtual measuring tool in conjunction with operations on the operation virtual tool by a worker wearing the portable terminal, and moves it to the object to be measured.

[0017] In addition, an eleventh aspect is a measurement work support system according to the tenth aspect, in which, when the moving unit moves the virtual measuring tool to the measurement object, the display unit enlarges and displays the measurement object imaged by the imaging unit.

[0018] In a twelfth aspect, in the measurement operation support system according to the tenth or eleventh aspect, the virtual operation tool has the same size and shape as the virtual measuring tool.

[0019] In a thirteenth aspect, in the measurement operation support system according to the tenth or eleventh aspect, the virtual tool for operation has a shape obtained by enlarging or reducing the virtual measuring tool at a predetermined ratio.

[0020] In addition, a fourteenth aspect is a measurement work support system relating to any one of the tenth to thirteenth aspects, wherein the movement unit extends, extends, rotates or moves the virtual measuring tool in synchronization with the virtual tool for operation when an operation of extending, rotating or moving is performed on the virtual tool for operation.

[0021] In addition, a fifteenth aspect is a measurement work support system relating to any one of the tenth to fourteenth aspects, in which when the moving unit moves the virtual measuring tool, the moving unit additionally moves the virtual measuring tool in response to instructions from a worker wearing the mobile terminal.

[0022] In a sixteenth aspect, in the measurement operation support system according to any one of the tenth to fifteenth aspects, the measurement target is located inside an industrial device.

[0023] In a seventeenth aspect, in the measurement operation support system according to the sixteenth aspect, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate.

[0024] In addition, an eighteenth aspect is the measurement work support system according to any one of the tenth to seventeenth aspects, wherein the mobile terminal is a pair of smart glasses.

[0025] According to the measurement work support methods of the first to ninth aspects, the virtual measuring tool is moved in conjunction with operations on the virtual tool to be operated by a worker wearing a mobile terminal, and is then moved to the object to be measured, so that the virtual measuring tool can be placed in a narrow space where the worker's hand cannot reach and measurement work can be performed.

[0026] In particular, according to the measurement work support method relating to the second aspect, the display unit enlarges and displays the measurement object imaged by the imaging unit, improving the visibility of the measurement object and making measurement work using a virtual measuring tool easier.

[0027] In particular, according to the measurement work support method relating to the sixth aspect, the mobile terminal moves the virtual measuring tool in response to instructions from the worker wearing the mobile terminal, thereby improving operability of the virtual measuring tool and making it easier to move the virtual measuring tool to the object to be measured.

[0028] According to the measurement work support system of the 10th to 18th aspects, the virtual measuring tool is moved in conjunction with operations on the virtual tool to be operated by a worker wearing a mobile terminal, and is then moved to the object to be measured, so that the virtual measuring tool can be placed in a narrow space where the hand cannot fit and measurement work can be performed.

[0029] In particular, according to the measurement work support system relating to the 11th aspect, the display unit enlarges and displays the measurement object imaged by the imaging unit, improving the visibility of the measurement object and making measurement work using a virtual measuring tool easier.

[0030] In particular, according to the measurement work support system of the 15th aspect, the virtual measuring tool is moved in response to instructions from the worker wearing the mobile terminal, thereby improving operability of the virtual measuring tool and making it easier to move the virtual measuring tool to the object to be measured.

[0031] FIG. 1 is a diagram schematically illustrating the configuration of a measurement operation support system according to the present invention. FIG. 2 is a plan view for explaining the internal layout of a substrate processing apparatus. FIG. 3 is a plan view illustrating the schematic configuration of a processing unit. FIG. 4 is a side view illustrating the schematic configuration of a processing unit. FIG. 5 is a perspective view illustrating the appearance of smart glasses. FIG. 6 is a block diagram illustrating the functional configuration of the smart glasses, a server, a work support terminal, and a control unit of the substrate processing apparatus. FIG. 7 is a flowchart illustrating the procedure of a measurement operation support method according to the present invention. FIG. 8 is a diagram schematically illustrating generation of a virtual tool for operation. FIG. 9 is a diagram illustrating the behavior of a virtual measurement tool when an operator extends or retracts the virtual tool for operation. FIG. 10 is a diagram illustrating the behavior of a virtual measurement tool when an operator moves the virtual tool for operation. FIG. 11 is a diagram illustrating the behavior of a virtual measurement tool when an operator rotates the virtual tool for operation. FIG. 12 is a diagram illustrating a state in which the virtual measurement tool has been moved to a spin chuck. FIG. 13 is a diagram illustrating an example of a virtual object displayed by smart glasses according to a second embodiment.

[0032] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Hereinafter, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) not only strictly represent the positional relationship but also represent a state of relative angular or distance displacement within a tolerance or a range that provides equivalent functionality, unless otherwise specified. Furthermore, expressions indicating an equal state (e.g., "identical," "equal," "homogeneous," etc.) not only represent a state of strict quantitative equality but also represent a state of difference that provides a tolerance or equivalent functionality, unless otherwise specified. Furthermore, expressions indicating a shape (e.g., "circular," "square," "cylindrical," etc.) not only represent a geometrically strict shape but also represent a shape within a range that provides equivalent functionality, such as irregularities or chamfers, unless otherwise specified. Furthermore, expressions such as "comprise," "comprise," "include," "have," etc., regarding components, are not exclusive expressions that exclude the presence of other components. Furthermore, the expression "at least one of A, B, and C" includes "A only," "B only," "C only," "any two of A, B, and C," and "all of A, B, and C."

[0033] First Embodiment Fig. 1 is a diagram illustrating a schematic configuration of a measurement operation support system according to the present invention. The measurement operation support system according to the present invention includes a plurality of substrate processing apparatuses 40, smart glasses 10, a server 70, and a work support terminal 80. Controllers of the smart glasses 10 and the substrate processing apparatuses 40 are connected to an information and communication network 5 (e.g., the Internet) via wireless communication. The work support terminal 80 and the server 70 are connected to the information and communication network 5 via a wired connection. Information can be transmitted and received between devices connected to the information and communication network 5; for example, information can be exchanged between the smart glasses 10 and the work support terminal 80. Note that whether each device is connected to the information and communication network 5 wirelessly or via a wired connection is not limited to the above example and can be any suitable connection (e.g., the work support terminal 80 may be connected to the information and communication network 5 wirelessly).

[0034] The plurality of substrate processing apparatuses 40 are arranged side by side in, for example, a clean room. The clean room is provided in, for example, a semiconductor device manufacturing factory, and is a room where a certain level of air cleanliness is ensured and temperature and humidity are controlled. Workers perform work on the substrate processing apparatuses 40 in the clean room.

[0035] 2 is a plan view illustrating the internal layout of the substrate processing apparatus 40. The substrate processing apparatus 40 is a single-wafer type substrate cleaning apparatus that processes substrates W, which are disk-shaped silicon substrates such as semiconductor wafers, one by one. The substrate processing apparatus 40 includes an indexer unit 43, a plurality of processing units 50, a main transport robot 48, and a control unit 45.

[0036] The indexer section 43 has a plurality of load ports LP (three in this embodiment) and an indexer robot 41. Each load port LP is loaded with a carrier C that accommodates a plurality of substrates W to be processed in a processing unit 50. The carrier C may be in the form of a front opening unified pod (FOUP) that accommodates substrates W in an enclosed space, a standard mechanical interface (SMIF) pod, or an open cassette (OC) that exposes the accommodated substrates W to the outside air.

[0037] The indexer robot 41 transports substrates W between the carriers C and the main transport robot 48. The indexer robot 41 is, for example, an articulated robot, and can transfer substrates W to and from any of the carriers C placed on the multiple load ports LP.

[0038] The main transport robot 48 also transports substrates W between the indexer robot 41 and the processing units 50. The main transport robot 48 is configured to be capable of lifting and lowering, rotating, and moving its transport arm back and forth. The main transport robot 48 receives an unprocessed substrate W that the indexer robot 41 has removed from a carrier C and transports it into the processing unit 50. The indexer robot 41 also receives a processed substrate W that the main transport robot 48 has transported from the processing unit 50 and stores it in the carrier C.

[0039] In the substrate processing apparatus 40, for example, three processing units 50 are stacked to form one stack (tower). Then, for example, four stacks are arranged around the main transport robot 48. That is, one substrate processing apparatus 40 includes, for example, 12 (=3×4) processing units 50. In FIG. 2, one stage of three stacked processing units 50 is schematically shown. Note that the number of processing units 50 in the substrate processing apparatus 40 is not limited to 12 and may be changed as appropriate.

[0040] The main transport robot 48 is installed in the center of the stack of four stacked processing units 50. The main transport robot 48 transfers the substrate W to be processed received from the indexer robot 41 into the inside of the cup 55 of one of the processing units 50. The main transport robot 48 also transfers the processed substrate W from each processing unit 50 and hands it over to the indexer robot 41.

[0041] The substrate processing apparatus 40 also includes a control unit 45. The control unit 45 is a general-purpose computer that controls the operations of the indexer robot 41, the main transport robot 48, and mechanisms provided in each processing unit 50, all of which are provided within the apparatus. The control unit 45 has a touch panel serving as an input / output interface provided on a wall surface of the apparatus, and a communication unit that communicates with the outside of the apparatus. Note that, for convenience of illustration, the control unit 45 is shown in the indexer unit 43 in FIG. 2, but is not limited to this, and the control unit 45 may be provided in an appropriate position within the substrate processing apparatus 40.

[0042] The following describes one of the twelve processing units 50 mounted on the substrate processing apparatus 40, but the other processing units 50 have the same configuration except for the nozzle arrangement positional relationship.

[0043] The processing unit 50 discharges a processing liquid onto one substrate W to perform a cleaning process. The processing liquid is a term that encompasses various chemical liquids and pure water. Examples of chemical liquids include liquids for etching processes and liquids for removing particles. Specifically, SC-1 liquid (a mixed solution of ammonium hydroxide, hydrogen peroxide, and pure water), SC-2 liquid (a mixed solution of hydrochloric acid, hydrogen peroxide, and pure water), or hydrofluoric acid are used.

[0044] Fig. 3 is a plan view showing a schematic configuration of the processing unit 50. Fig. 4 is a side view showing a schematic configuration of the processing unit 50. The processing unit 50 includes a processing chamber 51, a rotating holder 56, a processing liquid nozzle 60, a spray nozzle 65, and a cup 55. The processing chamber 51 is a hollow housing. Inside the processing chamber 51, the rotating holder 56, the processing liquid nozzle 60, the spray nozzle 65, the cup 55, etc. are provided.

[0045] A loading / unloading port 52 is provided on a side wall of the processing chamber 51. The loading / unloading port 52 is opened and closed by a shutter 53. With the shutter 53 opening the loading / unloading port 52, the main transport robot 48 loads and unloads the substrate W into and from the processing chamber 51 through the loading / unloading port 52. The shutter 53 closes the loading / unloading port 52 while the substrate W is being processed. When the loading / unloading port 52 is closed by the shutter 53, the interior of the processing chamber 51 becomes a semi-enclosed space.

[0046] An FFU (fan filter unit) 54 is provided on the ceiling of processing chamber 51. FFU 54 supplies clean air from the ceiling of processing chamber 51 into processing chamber 51. This creates a downflow of clean air from above to below within processing chamber 51. The gas supplied into processing chamber 51 is exhausted through exhaust duct 59 provided at the bottom of processing chamber 51.

[0047] The rotation holder 56 includes a spin chuck 57 and a spin motor 58. The spin chuck 57 is a substrate holder that holds the substrate W in a horizontal position (a position in which the normal to the main surface of the substrate W is aligned vertically). The spin chuck 57 is, for example, a vacuum suction-type chuck. The spin chuck 57 suction-holds the central portion of the lower surface of the substrate W. Note that the spin chuck 57 may be another type of chuck, such as a clamping-type mechanical chuck that grips the edge portion of the substrate W.

[0048] The spin chuck 57 has a disk shape with a diameter smaller than that of the substrate W. When the lower surface of the substrate W is held by suction on the spin chuck 57, the peripheral edge of the substrate W protrudes outward beyond the outer circumferential edge of the spin chuck 57.

[0049] The spin chuck 57 is connected to the spin motor 58 via a motor shaft. That is, the upper end of the motor shaft of the spin motor 58 is connected to the center of the lower surface of the spin chuck 57. When the spin motor 58 rotates the motor shaft while the substrate W is held by suction on the spin chuck 57, the substrate W and the spin chuck 57 rotate in a horizontal plane around a rotation axis extending in the vertical direction.

[0050] A cup 55 is provided to surround the spin chuck 57. The cup 55 can be raised and lowered by a cup lifting mechanism 39 conceptually shown in FIG. 4. The cup 55 has a generally cylindrical shape, and the upper part of the cup 55 is inclined so that it approaches the spin chuck 57 as it goes up. However, the inner diameter of the upper end portion of the cup 55 is larger than the diameter of the substrate W. During processing of the substrate W, the upper end of the cup 55 is higher than the height of the substrate W held by the spin chuck 57. Therefore, liquid scattered by centrifugal force from the substrate W rotated by the spin holder 56 during processing is received and recovered by the cup 55. The liquid recovered by the cup 55 is discharged from a drain pipe (not shown) provided at the bottom of the cup 55. The cup 55 may have a multi-stage structure in which multiple recovery ports are provided for different purposes.

[0051] The processing liquid nozzle 60 includes a nozzle tip 61, a swing arm 62, and a nozzle driver 63. The processing liquid nozzle 60 is, for example, a straight nozzle that ejects the processing liquid in the form of a continuous flow. The nozzle tip 61 is attached to the tip of a swing arm 62 that extends in a substantially horizontal direction. The processing liquid is supplied to the nozzle tip 61 from a processing liquid supply source (not shown), and a discharge port (not shown) is formed in the nozzle tip 61, from which the processing liquid is ejected. The swing arm 62 is moved up and down by the nozzle driver 63, and is also swung in a horizontal plane around a swing axis A1 that extends in the vertical direction.

[0052] The nozzle drive unit 63 raises and lowers and swings the swing arm 62, thereby moving the nozzle tip 61 between a processing position above the substrate W held by the rotary holder 56 and a standby position outside the cup 55. When the nozzle tip 61 is located at the processing position, the processing liquid nozzle 60 discharges a chemical solution onto the substrate W held by the rotary holder 56, thereby proceeding with, for example, cleaning processing of the substrate W. Furthermore, the processing liquid nozzle 60 discharges pure water onto the substrate W, thereby proceeding with pure water rinsing processing of the substrate W.

[0053] On the other hand, the spray nozzle 65 includes a nozzle tip 66, a swing arm 67, and a nozzle driver 68. The spray nozzle 65 is a two-fluid nozzle that mixes, for example, a processing liquid with a pressurized gas to generate droplets and sprays the mixed fluid of the droplets and gas onto the substrate W. The nozzle tip 66 is attached to the tip of a swing arm 67 that extends in a substantially horizontal direction. A processing liquid and a pressurized gas are supplied to the nozzle tip 66 from a processing liquid supply source and a gas supply source (not shown), respectively, and are mixed inside or outside the nozzle tip 66 to form a mixed fluid. The swing arm 67 is moved up and down and swung in a horizontal plane around a swing axis A2 that extends in the vertical direction by the nozzle driver 68.

[0054] The nozzle driving unit 68 raises and lowers and swings the swing arm 67, thereby moving the nozzle tip 66 between a processing position above the substrate W held by the rotating holder 56 and a standby position outside the cup 55. When the nozzle tip 66 is located at the processing position, the spray nozzle 65 sprays the mixed fluid onto the substrate W held by the rotating holder 56, thereby proceeding with, for example, cleaning processing of the substrate W.

[0055] 3, there is a risk that the rotational movement of the processing liquid nozzle 60 and the rotational movement of the spray nozzle 65 may interfere with each other. That is, when the processing liquid nozzle 60 is located at the processing position, if the spray nozzle 65 also moves above the substrate W, there is a risk that the two may collide with each other. For this reason, an interlock is provided so that when either the processing liquid nozzle 60 or the spray nozzle 65 is located at the processing position, the other cannot operate.

[0056] A maintenance light 69 is provided at the upper inside of the processing chamber 51. The maintenance light 69 is a light that illuminates the inside of the processing chamber 51 when maintenance of the substrate processing apparatus 40 is performed.

[0057] A worker who performs operations such as operating the substrate processing apparatus 40 wears smart glasses 10. The smart glasses 10 are a type of wearable device that uses a head-mounted display (HMD). The smart glasses 10 are also devices that realize AR (Augmented Reality) or MR (Mixed Reality). For example, Microsoft's "HoloLens" (registered trademark) can be used as the smart glasses 10.

[0058] 5 is a perspective view showing the appearance of the smart glasses 10. The smart glasses 10 include a visor 11 and a headband 12. A worker wears the smart glasses 10 by placing the headband 12 on their head. The worker can adjust the length of the headband 12 to fit the size of their head. The headband 12 also includes a power button, a brightness button, a volume button, and the like.

[0059] The visor 11 includes various sensors and a display. The display is a see-through holographic lens. That is, the display can display a three-dimensional image in the worker's field of view using a hologram, and transmits light from real objects in the same way as regular eyeglass lenses. Therefore, a worker wearing the smart glasses 10 can view the displayed three-dimensional image while viewing real objects through the display.

[0060] The sensors of the visor 11 include, for example, multiple visible light cameras that mainly capture images in front of the visor 11, an infrared camera that tracks the worker's line of sight, a depth sensor that measures the distance to an object, and an inertial measurement sensor. The infrared camera tracks the line of sight by measuring the movement of the eyeballs of the wearer of the smart glasses 10. The depth sensor measures the distance to an object using, for example, a Time of Flight (ToF) method. The inertial measurement sensor is composed of an accelerometer, a gyroscope, a magnetometer, etc.

[0061] The smart glasses 10 also have a built-in computer including a CPU, memory, a storage unit, etc. The smart glasses 10 are also provided with a wireless communication mechanism, and the computer in the smart glasses 10 connects to the information communication network 5 using the wireless communication mechanism. The smart glasses 10 are also provided with a microphone, a speaker, a battery, etc.

[0062] 6 is a block diagram showing the functional configuration of the smart glasses 10, the server 70, the work support terminal 80, and the control unit 45 of the substrate processing apparatus 40. The smart glasses 10 include, as hardware elements, an imaging unit 21, a communication unit 22, a display unit 23, a storage unit 24, and a spatial recognition unit 25. The imaging unit 21 includes a visible light camera provided on the visor 11 described above. The imaging unit 21 includes, for example, four visible light cameras that capture images of the front and diagonally forward, and can capture images of the field of view of the worker wearing the smart glasses 10.

[0063] The communication unit 22 includes the wireless communication mechanism of the smart glasses 10 described above. The communication unit 22 transmits and receives data to and from the work support terminal 80 and the server 70 via the information and communication network 5. The communication unit 22 can also transmit and receive data directly to and from the control unit 45 of the substrate processing apparatus 40 if the distance is short. That is, the communication unit 22 can transmit data and commands to the control unit 45 of the substrate processing apparatus 40 directly or via the information and communication network 5.

[0064] The display unit 23 includes the display of the visor 11. The display unit 23 has a holographic processing device and displays a 3D image at a predetermined spatial position using hologram technology. Note that the 3D image displayed by the display unit 23 is not limited to a 3D shape, and may be a 2D image such as a document.

[0065] The storage unit 24 includes a memory and storage installed in the smart glasses 10. The memory and storage provided in the smart glasses 10 are, for example, a dynamic random access memory (DRAM) and a universal flash storage (UFS), respectively. The storage unit 24 stores applications and data used by the computer of the smart glasses 10.

[0066] The spatial recognition unit 25 includes the depth sensor of the smart glasses 10 described above. The depth sensor can measure the distance to an object. The spatial recognition unit 25 can perform spatial mapping by scanning a space using the depth sensor. Specifically, the spatial recognition unit 25 creates a spatial mesh, which is mesh data, by scanning the space. Because the spatial recognition unit 25 uses the depth sensor, it is possible to scan a space even in a dark place.

[0067] The smart glasses 10 also include an operation recognition unit 31, a generation unit 32, and a movement unit 33. The operation recognition unit 31, the generation unit 32, and the movement unit 33 are function processing units realized by the CPU of the smart glasses 10 executing a predetermined processing program. The processing contents of the operation recognition unit 31, the generation unit 32, and the movement unit 33 will be described in more detail later.

[0068] The control unit 45 of the substrate processing apparatus 40 controls the operations of mechanisms provided in the processing unit 50, such as the spin motor 58, the cup lifting mechanism 39, and the nozzle driving units 63 and 68. The control unit 45 of the substrate processing apparatus 40 can communicate with the communication unit 22 of the smart glasses 10, and can also control the operations of various mechanisms provided in the processing unit 50 in accordance with operation instruction commands transmitted from the smart glasses 10.

[0069] The work support terminal 80 is installed, for example, in a factory of a vendor that manufactures and maintains the substrate processing apparatus 40. The server 70 is installed in a clean room in which a plurality of substrate processing apparatuses 40 are installed. The work support terminal 80 and the server 70 are capable of communicating with the smart glasses 10 via the information and communication network 5. The work support terminal 80 and the server 70 are also capable of communicating with each other via the information and communication network 5.

[0070] The work support terminal 80 and the server 70 are general computer systems. That is, the work support terminal 80 and the server 70 include a CPU which is a circuit that performs various arithmetic processing, a ROM which is a read-only memory that stores basic programs, a RAM which is a readable and writable memory that stores various information, a storage unit (for example, a magnetic disk or SSD) that stores control software and data, and a communication unit that communicates with the information communication network 5.

[0071] The work support terminal 80 is a computer that allows, for example, a work supporter on the vendor side to support the work of a worker in a clean room. The work supporter can send various information from the work support terminal 80 to the smart glasses 10 worn by the worker in the clean room.

[0072] The server 70 is a computer that executes predetermined processes in response to requests from the smart glasses 10 and the work support terminal 80 in the measurement work support system according to the present invention. The server 70 includes a memory unit 74 with a relatively large capacity. Large-sized data created by the smart glasses 10 and the work support terminal 80 may be stored in the memory unit 74. Note that the server 70 and the work support terminal 80 are not essential elements.

[0073] Next, a measurement operation support method using the measurement operation support system having the above-described configuration will be described. Fig. 7 is a flowchart showing the steps of the measurement operation support method according to the present invention. In this embodiment, a case will be described in which a virtual measurement tool is used to support the measurement of dimensions of components in a processing unit 50 of a substrate processing apparatus 40, as an example. A worker wearing smart glasses 10 starts the measurement operation near the processing unit 50 of the substrate processing apparatus 40.

[0074] First, the generation unit 32 of the smart glasses 10 generates a virtual measurement tool (step S1). Although an operator can measure the dimensions of the components in the processing unit 50 using a real measurement tool (such as a ruler or a straightedge), there is a risk that the real measurement tool will collide with the components such as the processing liquid nozzle 60 when placed in the processing chamber 51 of the processing unit 50. In general, the position of the processing liquid nozzle 60 and the like is precisely adjusted, and it is undesirable for the measurement tool to physically collide with the processing liquid nozzle 60 and the like and cause an impact. For this reason, the dimensions of the components in the processing unit 50 are measured using a virtual measurement tool.

[0075] The virtual measuring tool is a virtual object generated by the generation unit 32 of the smart glasses 10, and is displayed as a three-dimensional image by the display unit 23 using hologram technology. The virtual measuring tool in this embodiment is a virtual ruler, and the smart glasses 10 generate and display a rod-shaped virtual measuring tool as the virtual ruler.

[0076] Next, the generation unit 32 of the smart glasses 10 generates a virtual operation tool (step S2). FIG. 8 is a diagram schematically illustrating the generation of the virtual operation tool. In this embodiment, the generation unit 32 of the smart glasses 10 generates a virtual operation tool 95 having the same size and shape as the virtual measurement tool 91. That is, the virtual operation tool 95 is also a virtual object generated by the generation unit 32 and has the same size and shape as the virtual measurement tool 91. The display unit 23 of the smart glasses 10 displays the virtual operation tool 95 as a stereoscopic image at a predetermined distance from the virtual measurement tool 91. The relative position of the virtual operation tool 95 from the virtual measurement tool 91 at which the display unit 23 displays the virtual operation tool 95 can be set in advance by the operator via the smart glasses 10. Note that in FIG. 8, the virtual measurement tool 91 and the virtual operation tool 95 are scaled as rulers for ease of understanding. However, if doing so increases the load on the smart glasses 10 and slows down processing, it is preferable to display the virtual measurement tool 91 and the virtual operation tool 95 without scales. In the following description, the virtual measuring tool 91 and the virtual operating tool 95 are not marked with scales.

[0077] A worker who wants to perform an operation such as moving the virtual measurement tool 91 operates the operation virtual tool 95 with his or her own hand (step S3). The worker's hand movement (e.g., pinching, moving, rotating, etc. the operation virtual tool 95) is captured and detected by the imaging unit 21 of the smart glasses 10, and the operation recognition unit 31 analyzes the operation content of the worker from the detection result. The movement unit 33 of the smart glasses 10 moves the operation virtual tool 95 in accordance with the operation content of the worker, and operates the virtual measurement tool 91 in synchronization with the movement of the operation virtual tool 95 (step S4).

[0078] 9 is a diagram showing the movement of the virtual measurement tool 91 when the worker extends or retracts the operation virtual tool 95. As shown in the lower part of FIG. 9 , when the worker performs an action to contract the operation virtual tool 95 with his / her hand, the smart glasses 10 contract and display the operation virtual tool 95 in accordance with the movement of the worker's hand. Then, as shown in the upper part of FIG. 9 , the movement unit 33 of the smart glasses 10 contracts and displays the virtual measurement tool 91 in synchronization with the contraction of the operation virtual tool 95. Conversely, when the worker performs an action to extend the operation virtual tool 95 with his / her hand, the smart glasses 10 expands the operation virtual tool 95 in accordance with the movement of the worker's hand, and also expands and displays the virtual measurement tool 91 in synchronization with the contraction. The operation virtual tool 95 and the virtual measurement tool 91 are controlled to have the same size and shape, and when the operation virtual tool 95 is expanded or retracted, the expansion ratio of both is the same.

[0079] FIG. 10 is a diagram showing the movement of the virtual measurement tool 91 when the worker moves the operation virtual tool 95. As shown in the lower part of FIG. 10 , when the worker moves the operation virtual tool 95 by hand in a predetermined direction by a predetermined distance, the smart glasses 10 move the operation virtual tool 95 by the predetermined distance in accordance with the movement of the worker's hand and display it. Then, as shown in the upper part of FIG. 10 , in synchronization with the movement of the operation virtual tool 95 by the predetermined distance in the predetermined direction, the movement unit 33 of the smart glasses 10 moves the virtual measurement tool 91 by the same distance in the same direction as the operation virtual tool 95 and displays it. The movement direction and movement distance of the operation virtual tool 95 and the virtual measurement tool 91 are completely identical. That is, the operation virtual tool 95 and the virtual measurement tool 91 move parallel to each other.

[0080] 11 is a diagram showing the movement of the virtual measurement tool 91 when the worker rotates the operation virtual tool 95. As shown in the lower part of FIG. 11 , when the worker rotates the operation virtual tool 95 by a predetermined angle with his / her hand, the smart glasses 10 rotate the operation virtual tool 95 by that angle in accordance with the movement of the worker's hand and display it. Then, as shown in the upper part of FIG. 11 , in synchronization with the movement of the operation virtual tool 95 rotating by the predetermined angle, the movement unit 33 of the smart glasses 10 rotates the virtual measurement tool 91 by the same angle as the operation virtual tool 95 and displays it. The rotation direction and rotation angle of the operation virtual tool 95 and the virtual measurement tool 91 are completely identical.

[0081] As described above, the virtual measuring tool 91 operates in complete coordination with the operation of the virtual tool for operation 95 by the worker wearing the smart glasses 10. Specifically, when the worker wearing the smart glasses 10 performs an operation of extending, rotating, or moving the virtual tool for operation 95, the virtual measuring tool 91 also extends, rotates, or moves in synchronization with the operation of the virtual tool for operation 95.

[0082] The worker wearing the smart glasses 10 performs the various operations described above on the virtual tool for operation 95 to move the virtual measuring tool 91 to the measurement target (step S5). For example, the worker manually operates the virtual tool for operation 95 to insert the virtual measuring tool 91 into the processing chamber 51 from the loading / unloading port 52 of the processing unit 50 and move it to the spin chuck 57, which is the measurement target. Figure 12 is a diagram showing the virtual measuring tool 91 moved to the spin chuck 57.

[0083] Here, a worker wearing the smart glasses 10 can directly operate and move the virtual measuring tool 91 by hand. However, in order to measure a real object using the virtual measuring tool 91, it is necessary to link the virtual measuring tool 91, which is a virtual object, with the processing unit 50, etc., which are real objects. The spatial recognition unit 25 of the smart glasses 10 scans the space including the processing unit 50, etc., to create a spatial mesh. The spatial mesh created by the spatial recognition unit 25 of the smart glasses 10 is represented by a mesh of many triangles. Various shapes, including curved and flat surfaces, are represented by a collection of many connected triangles. Complex shapes including uneven surfaces are represented by a high density of triangles, and conversely, flat shapes are represented by a relatively low density of triangles. The smart glasses 10 recognize the shape and size of objects by creating a spatial mesh.

[0084] However, depending on the resolution of the depth sensor of the space recognition unit 25, for example, the loading / unloading entrance 52 of the processing unit 50 may be recognized as a wall rather than an opening. In this case, although in real space, a worker can insert his / her hand into the processing chamber 51 through the loading / unloading entrance 52 of the processing unit 50, the smart glasses 10 cannot recognize that the hand is passing through the wall, and as a result, it cannot recognize that the virtual measuring tool 91 being operated by the worker's hand is entering the processing chamber 51 through the loading / unloading entrance 52. While it is possible to recognize the loading / unloading entrance 52 as an opening by increasing the resolution of the depth sensor of the space recognition unit 25 and creating a fine spatial mesh, in this case the amount of data becomes too large to be practical for processing by the smart glasses 10. Furthermore, even in real space, the virtual measuring tool 91 cannot be inserted by hand into a narrow space that the worker's hand cannot reach.

[0085] For this reason, in this embodiment, an operation virtual tool 95 for operating the virtual measurement tool 91 is generated, and the operator indirectly moves the virtual measurement tool 91 by operating the operation virtual tool 95 with his or her hands. If the operator does not directly hold the virtual measurement tool 91 with his or her hands and the virtual measurement tool 91 operates in conjunction with the operator's operation of the operation virtual tool 95, the virtual measurement tool 91 can also be inserted into the processing chamber 51 through the transfer port 52 of the processing unit 50. Note that in order to enable the virtual measurement tool 91 to be freely movable, it is preferable to generate the operation virtual tool 95 in a large open space in step S2.

[0086] 12 , when the virtual measuring tool 91 moves to the spin chuck 57, which is the measurement target, the imaging unit 21 of the smart glasses 10 captures an image of the vicinity of the spin chuck 57, and the display unit 23 displays an enlarged image of the spin chuck 57 and the virtual measuring tool 91 (step S6). The worker can visually confirm the enlarged spin chuck 57 and virtual measuring tool 91 through the visor 11 of the smart glasses 10. Note that when performing the measurement work, the maintenance light 69 is turned on to illuminate the inside of the processing chamber 51, so that the imaging unit 21 can properly capture an image of the spin chuck 57.

[0087] Next, the worker uses the virtual measuring tool 91 to measure the size of the spin chuck 57, which is the measurement target (step S7). While viewing the images of the spin chuck 57 and the virtual measuring tool 91 enlarged and displayed by the smart glasses 10, the worker measures the size of the spin chuck 57 using the enlarged virtual measuring tool 91. For example, while viewing the enlarged image, the worker moves the operation virtual tool 95 to align one end of the virtual measuring tool 91 with an end of the spin chuck 57. Next, the worker extends or retracts the operation virtual tool 95 to align the other end of the virtual measuring tool 91 with the end of the spin chuck 57. As shown in FIG. 12 , the display unit 23 of the smart glasses 10 displays the length of the virtual measuring tool 91 at that time near the operation virtual tool 95. The worker can measure the size of the spin chuck 57, which is the measurement target, by reading the length of the displayed virtual measuring tool 91.

[0088] In the first embodiment, a virtual measuring tool 91 for measuring the dimensions of a measurement object is displayed together with an operation virtual tool 95 created at a predetermined distance from the virtual measuring tool 91. The worker does not directly operate the virtual measuring tool 91, but rather operates the virtual measuring tool 91 indirectly via the operation virtual tool 95. Specifically, when the worker extends, rotates, or moves the operation virtual tool 95, the virtual measuring tool 91 also extends, rotates, or moves in synchronization with the movement of the operation virtual tool 95. In other words, the worker wearing the smart glasses 10 does not directly hold and operate the virtual measuring tool 91 with his or her hands, but rather operates the operation virtual tool 95 with his or her hands, and moves the virtual measuring tool 91 in conjunction with the operation to move it to the measurement object. This allows the virtual measuring tool 91 to be inserted and moved to the measurement object even through a relatively small opening that the smart glasses 10 recognizes as a wall or a narrow space that is physically inaccessible to the hand. As a result, the virtual measuring tool 91 can be inserted and moved to the measurement object even in such a narrow space.

[0089] Furthermore, in the first embodiment, when the virtual measuring tool 91 is moved to the measurement target, the display unit 23 enlarges and displays the measurement target imaged by the imaging unit 21 of the smart glasses 10. This improves the visibility of the measurement target, making it easier for the worker to perform measurement using the virtual measuring tool 91.

[0090] Second Embodiment Next, a second embodiment of the present invention will be described. The configuration of the measurement operation support system in the second embodiment is the same as that in the first embodiment. The procedure of the measurement operation support method in the second embodiment is also generally the same as that in the first embodiment. In the second embodiment, in addition to operating the operation virtual tool 95, the virtual measuring tool 91 is additionally moved as an auxiliary operation.

[0091] 13 is a diagram showing an example of a virtual object displayed by the smart glasses 10 of the second embodiment. In the second embodiment, an operation panel 98 is displayed in addition to the virtual measuring tool 91 and the virtual operation tool 95 similar to those in the first embodiment. The operation panel 98 is also a virtual object displayed as a three-dimensional image by the display unit 23 of the smart glasses 10 using hologram technology. In the example of FIG. 13, the operation panel 98 includes six types of operation buttons.

[0092] In the second embodiment, too, when the worker performs an operation to extend, retract, rotate, or move the operation virtual tool 95, the virtual measuring tool 91 also extends, retracts, rotates, or moves in synchronization with the movement of the operation virtual tool 95. In addition, in the second embodiment, the worker can also move the virtual measuring tool 91 by giving an instruction from the operation panel 98. The movement of the worker's hand on the operation panel 98 is captured and detected by the imaging unit 21 of the smart glasses 10, and the operation recognition unit 31 analyzes which operation button the worker selected from the detection result. The movement unit 33 of the smart glasses 10 moves the virtual measuring tool 91 additionally in accordance with the content of the operation button selected by the worker.

[0093] In the second embodiment, for example, when there is insufficient space to move the operation virtual tool 95, the worker issues an instruction from the operation panel 98 to additionally move the virtual measuring tool 91. For example, when it is difficult to move the operation virtual tool 95 further back despite wanting to push the virtual measuring tool 91 further back from the loading / unloading entrance 52 of the processing unit 50, the worker selects the "Forward" operation button on the operation panel 98. Recognizing this, the smart glasses 10 additionally move the virtual measuring tool 91 forward by a predetermined distance. This allows the worker to push the virtual measuring tool 91 further back from the loading / unloading entrance 52 of the processing unit 50 and move it to the desired position.

[0094] In the second embodiment, the smart glasses 10 additionally and auxiliary move the virtual measuring tool 91 in response to an instruction from a worker wearing the smart glasses 10. This improves the operability of the virtual measuring tool 91, making it possible to more easily move the virtual measuring tool 91 to the measurement target.

[0095] <Modifications> Although the embodiments of the present invention have been described above, various modifications other than those described above are possible without departing from the spirit of the present invention. For example, in the above embodiments, the virtual tool for operation 95 has the same size and shape as the virtual measurement tool 91. However, the virtual tool for operation 95 may have a shape obtained by enlarging or reducing the virtual measurement tool 91 at a predetermined ratio. For example, if the measurement target is located inside a very large device, the virtual measurement tool 91 will also be correspondingly large. If the virtual tool for operation 95 has the same size and shape as the virtual measurement tool 91, the operability of the virtual tool for operation 95 will be significantly reduced. For this reason, in such cases, it is preferable that the virtual tool for operation 95 have a shape obtained by reducing the virtual measurement tool 91 at a predetermined ratio. Conversely, if the measurement target is a very small precision part, it is preferable that the virtual tool for operation 95 have a shape obtained by enlarging the virtual measurement tool 91 at a predetermined ratio.

[0096] Furthermore, in each of the above embodiments, the virtual measuring tool 91 is a virtual ruler, but this is not limited to this. The virtual measuring tool 91 may be, for example, a virtual protractor for measuring angles. Alternatively, the virtual measuring tool 91 may be a virtual level for measuring horizontality. In other words, the virtual measuring tool 91 may be any virtual measuring instrument for performing a predetermined measurement task.

[0097] Furthermore, in the second embodiment, the virtual measuring tool 91 is additionally moved using the operation panel 98, which is a virtual object. However, instead of this, the virtual measuring tool 91 may be additionally moved by, for example, the voice of a worker wearing the smart glasses 10. Specifically, the smart glasses 10 may also be equipped with a microphone, and the smart glasses 10 may recognize a voice instruction from the worker and additionally move the virtual measuring tool 91 in accordance with the voice instruction. In other words, any configuration may be used as long as the smart glasses 10 additionally and auxiliary move the virtual measuring tool 91 in response to an instruction from the worker wearing the smart glasses 10.

[0098] In addition, in each of the above embodiments, the generation unit 32 of the smart glasses 10 generates the virtual tool 95 for operation, and the movement unit 33 moves the virtual measuring tool 91, but these processes may also be performed by the work support terminal 80 or the server 70.

[0099] Furthermore, in each of the above embodiments, the worker uses smart glasses 10, but this is not limited thereto. Instead of the smart glasses 10, a portable terminal such as a tablet terminal or a smartphone may be used. That is, any portable terminal equipped with an imaging unit, a communication unit, etc. is sufficient. However, since using a tablet terminal or the like would occupy the worker's hands while holding it, it is preferable to use a wearable terminal such as the smart glasses 10.

[0100] Furthermore, substrate processing apparatus 40 is not limited to a substrate cleaning apparatus, but may be any apparatus that performs a predetermined process on a substrate, such as a heat treatment apparatus, an exposure apparatus, a coating and developing apparatus, a measurement apparatus, or an inspection apparatus. When substrate processing apparatus 40 is a substrate cleaning apparatus, it may be a single-wafer type cleaning apparatus that cleans substrates one by one, or a batch type cleaning apparatus that cleans multiple substrates at once.

[0101] Furthermore, the measurement operation support technology according to the present invention is not limited to the inside of a substrate processing apparatus, but may be applied to the inside of any industrial equipment, such as a printing processing apparatus, a film forming apparatus, a medical apparatus, and a visual inspection apparatus.

[0102] 5 Information and communication network 10 Smart glasses 21 Imaging unit 22 Communication unit 23 Display unit 24 Memory unit 25 Spatial recognition unit 31 Operation recognition unit 32 Generation unit 33 Movement unit 40 Substrate processing apparatus 41 Indexer robot 45 Control unit 48 Main transport robot 50 Processing unit 55 Cup 56 Rotation holding unit 57 Spin chuck 58 Spin motor 60 Processing liquid nozzle 65 Spray nozzle 70 Server 80 Work support terminal 91 Virtual measurement tool 95 Virtual tool for operation 98 Operation panel W Substrate

Claims

1. A measurement work support method for supporting a specified measurement work using a virtual measuring tool, comprising: a generation step of generating and displaying an operation virtual tool for operating the virtual measuring tool using a portable terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit; and a movement step of moving the virtual measuring tool in conjunction with an operation of the operation virtual tool by a worker wearing the portable terminal, and moving it to an object to be measured.

2. A measurement operation support method according to claim 1, wherein when the virtual measuring tool is moved to the object to be measured, the display unit enlarges and displays the object to be measured imaged by the imaging unit.

3. A measurement operation support method according to claim 1, wherein the virtual tool for operation has the same size and shape as the virtual measuring tool.

4. A measurement operation support method according to claim 1, wherein the virtual tool for operation has a shape obtained by enlarging or reducing the virtual measuring tool at a predetermined ratio.

5. A measurement work support method according to claim 1, wherein in the moving step, when an operation of extending, rotating or moving is performed on the virtual tool for operation, the virtual measuring tool extends, rotates or moves in synchronization with the virtual tool for operation.

6. A measurement work support method according to claim 1, wherein the movement step includes an auxiliary step in which the portable terminal additionally moves the virtual measuring tool in response to an instruction from a worker wearing the portable terminal.

7. A measurement operation support method according to claim 1, wherein the measurement object is located inside an industrial device.

8. A measurement operation support method according to claim 7, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate.

9. A measurement operation support method according to any one of claims 1 to 8, wherein the mobile terminal is a pair of smart glasses.

10. A measurement work support system that supports a specified measurement work using a virtual measuring tool, comprising: a portable terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit; a generation unit that generates an operation virtual tool for operating the virtual measuring tool; and a movement unit that moves the virtual measuring tool in conjunction with an operation of the operation virtual tool by a worker wearing the portable terminal, and moves it to an object to be measured.

11. A measurement work support system according to claim 10, wherein when the moving unit moves the virtual measuring tool to the object to be measured, the display unit enlarges and displays the object to be measured, imaged by the imaging unit.

12. A measurement work support system according to claim 10, wherein the virtual tool for operation has the same size and shape as the virtual measuring tool.

13. A measurement work support system according to claim 10, wherein the virtual tool for operation has a shape obtained by enlarging or reducing the virtual measuring tool at a predetermined ratio.

14. A measurement work support system according to claim 10, wherein the movement unit extends, retracts, rotates or moves the virtual measuring tool in synchronization with the virtual tool for operation when an extension, retraction, rotation or movement operation is performed on the virtual tool for operation.

15. A measurement work support system according to claim 10, wherein when the moving unit moves the virtual measuring tool, the moving unit additionally moves the virtual measuring tool in response to an instruction from a worker wearing the mobile terminal.

16. A measurement work support system according to claim 10, wherein the measurement object is located inside an industrial device.

17. A measurement work support system according to claim 16, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate.

18. A measurement work support system according to any one of claims 10 to 17, wherein the mobile terminal is a pair of smart glasses.

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