Computer program, information processing device, and information processing method

Abstract

Provided are a computer program, an information processing device and an information processing method capable of executing a plurality of maintenance operations in parallel in a substrate processing device.　Upon accepting a command for causing a substrate processing device to execute a plurality of maintenance operations, the computer program determines whether or not the plurality of maintenance operations can be executed in parallel, and if the plurality of maintenance operations can be executed in parallel, the computer causes the substrate processing device to execute the plurality of maintenance operations in parallel, and if the plurality of maintenance operations cannot be executed in parallel, the computer causes one of the plurality of maintenance operations to be executed, without executing the plurality of maintenance operations in parallel.

Description

Computer program, information processing device, and information processing method

[0001] The present disclosure relates to a computer program, an information processing device, and an information processing method.

[0002] Patent Document 1 discloses an example of maintenance of a substrate processing apparatus.

[0003] Japanese Patent Application Laid-Open No. 2022-18902

[0004] The present disclosure provides a computer program, an information processing apparatus, and an information processing method that enable multiple maintenance tasks to be performed in parallel in a substrate processing apparatus.

[0005] A computer program according to one aspect of the present disclosure, when receiving a command to cause a substrate processing apparatus to perform multiple maintenance operations, determines whether the multiple maintenance operations can be performed in parallel, and if the multiple maintenance operations can be performed in parallel, causes the substrate processing apparatus to perform the multiple maintenance operations in parallel, and if the multiple maintenance operations cannot be performed in parallel, causes the substrate processing apparatus to perform one of the multiple maintenance operations without performing the multiple maintenance operations in parallel.

[0006] According to the present disclosure, it is possible to provide a computer program, an information processing apparatus, and an information processing method that enable multiple maintenance operations to be performed in parallel in a substrate processing apparatus.

[0007] FIG. 1 is a schematic diagram showing an example of the configuration of a substrate processing system. FIG. 2 is a block diagram showing an example of the internal configuration of an information processing device 1. FIG. 3 is a schematic diagram showing example contents of a maintenance table. FIG. 4 is a flowchart showing an example of a processing procedure in which an information processing device 1 causes a substrate processing device 2 to perform maintenance. FIG. 5 is a schematic diagram showing a first example of an image showing multiple maintenance operations being performed in parallel and maintenance operations that have been stopped. FIG. 6 is a schematic diagram showing a second example of an image showing multiple maintenance operations being performed in parallel and maintenance operations that have been stopped. FIG. 7 is a schematic diagram showing an example of a macro. FIG. 8 is a schematic diagram showing an example of a macro. FIG. 9 is a flowchart showing an example of a processing procedure in which an information processing device causes a substrate processing device to perform maintenance in accordance with a macro.

[0008] In a substrate processing apparatus, multiple maintenance tasks may be performed, such as measuring the flow rate of gas supplied to a process module and calibrating RF (Radio Frequency) power. If multiple maintenance tasks can be performed in parallel, efficient maintenance becomes possible.

[0009] The present disclosure will be described in detail below with reference to the drawings illustrating embodiments thereof. FIG. 1 is a schematic diagram showing an example configuration of a substrate processing system 100. The substrate processing system 100 executes an information processing method. The substrate processing system 100 according to this embodiment includes a substrate processing apparatus 2 and an information processing apparatus 1 that executes information processing for controlling the substrate processing apparatus 2. The information processing apparatus 1 is connected to the substrate processing apparatus 2. The information processing apparatus 1 executes the information processing method.

[0010] The substrate processing apparatus 2 includes a vacuum transfer module and multiple process modules (substrate processing modules) 21. The vacuum transfer module is configured to transfer substrates under vacuum or reduced pressure. The vacuum transfer module includes a vacuum transfer chamber 22 and a first transfer robot 23 disposed within the vacuum transfer chamber 22. The process module 21 includes a substrate processing chamber and a substrate support disposed within the substrate processing chamber, and is configured to perform substrate processing, such as etching or film formation, on the substrate on the substrate support. The multiple process modules 21 are connected to the vacuum transfer module. The first transfer robot 23 includes a transfer arm having an end effector for holding the substrate. The substrate processing apparatus 2 also includes an atmospheric transfer module, a load port, and multiple load lock modules. The multiple load lock modules are connected between the atmospheric transfer module and the vacuum transfer module, and the load port is connected to the atmospheric transfer module. The substrate processing apparatus 2 is configured such that a second transfer robot disposed within the atmospheric transfer module transfers substrates between a substrate container on the load port and the load lock module. The substrate processing apparatus 2 is configured so that the first transfer robot 23 transfers a substrate between any one of the plurality of process modules 21 and any one of the plurality of load lock modules.

[0011] Each process module 21 includes, for example, a vacuum pump, gas supply lines, and a power supply. The power supply includes at least one of a voltage generator and an RF (radio frequency) generator electrically connected to one or more electrodes in the substrate processing chamber. The voltage generator is configured to generate a voltage signal. The voltage signal may be a constant voltage or may be pulsed. In one embodiment, the voltage signal is applied to an upper electrode in the substrate processing chamber. In one embodiment, the pulsed voltage signal is applied as a bias signal to a lower electrode in the substrate processing chamber. The RF generator is configured to generate an RF signal. The RF signal may be a source RF signal for generating plasma in the substrate processing chamber or a bias RF signal supplied to a lower electrode in the substrate processing chamber. The RF signal may be a continuous wave or may be pulsed.

[0012] The substrate processing apparatus 2 also includes a flow rate measurement module 24 as a maintenance mechanism. In one embodiment, the flow rate measurement module 24 is disposed above or at the top of the vacuum transfer chamber 22. The flow rate measurement module 24 does not need to be permanently installed and may be a maintenance unit separate from the substrate processing apparatus 2. During maintenance, the flow rate measurement module 24 is connected to a gas supply line and measures the flow rate of gas flowing through the gas supply line. Based on the gas flow rate measurement results, it is checked whether the gas flow rate is correct. Also, during maintenance, an RF calibration unit 25 is connected to an RF generation unit included in the process module 21. In one embodiment, the RF calibration unit 25 includes a dummy load and a power sensor, and the power sensor measures the power of an RF signal (hereinafter referred to as RF power) supplied from the RF generation unit to the dummy load. Based on the power measurement results by the power sensor, the RF power is calibrated.

[0013] FIG. 2 is a block diagram showing an example of the internal configuration of the information processing device 1. The information processing device 1 is configured using a computer. The information processing device 1 includes a calculation unit 11, a memory 12, a storage unit 13, a reading unit 14, an operation unit 15, a display unit 16, and a connection unit 17. The calculation unit 11 is a processor and is configured using, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or a multi-core CPU. The calculation unit 11 may also be configured using a quantum computer. The memory 12 stores temporary data generated in conjunction with calculations. The memory 12 is, for example, a RAM (Random Access Memory). The storage unit 13 is non-volatile and is, for example, a hard disk or non-volatile semiconductor memory. The reading unit 14 reads information from a recording medium 10 such as an optical disc or a portable memory.

[0014] The operation unit 15 receives input of information such as commands for executing specific processes by receiving operations from a user. The operation unit 15 is, for example, a keyboard, a pointing device, or a touch panel. The display unit 16 displays images. The display unit 16 is, for example, a liquid crystal display or an EL display (Electroluminescent Display). The operation unit 15 and the display unit 16 may be integrated. The connection unit 17 is connected to the substrate processing apparatus 2 by wire or wirelessly, and inputs and outputs information for controlling the substrate processing apparatus 2.

[0015] The calculation unit 11 causes the reading unit 14 to read a computer program (program product) 131 recorded on the recording medium 10, and stores the read computer program 131 in the storage unit 13. The calculation unit 11 executes processing to realize the functions of the information processing device 1 in accordance with the computer program 131. The computer program 131 may be stored in the storage unit 13 in advance, or may be downloaded from outside the information processing device 1. In this case, the information processing device 1 does not need to include the reading unit 14.

[0016] The computer program 131 can be deployed to run on a single computer, or on multiple computers located at one site or distributed across multiple sites and interconnected by a communications network. That is, the information processing device 1 may be configured with multiple computers, and the computer program 131 may be executed on multiple computers connected via a communications network. The information processing device 1 may be configured using a cloud server.

[0017] The processing of each step described below for executing the information processing method can be executed by multiple computers. The processing of each step can also be executed by different computers. Data used during the processing can be stored in multiple computers. The processing of each step can also be executed using a virtual machine. The processing of each step can be executed by multiple computing units. The processing of each step can also be executed by different computing units. For example, part of the processing can be executed by one computer, and another part of the processing can be executed by another computer.

[0018] The information processing apparatus 1 controls the execution of multiple maintenance operations in the substrate processing apparatus 2. The storage unit 13 stores a maintenance table 132 that records the relationships between multiple maintenance operations. Fig. 3 is a schematic diagram showing an example of the contents of the maintenance table 132. In the example shown in Fig. 3, the following maintenance operations are recorded: RF power calibration, gas flow rate measurement, gas line depressurization (gas line vacuum drawing), manual transfer, Easy Teaching, and maintenance substrate transfer.

[0019] RF power calibration is a process of measuring the RF power supplied from the RF generation unit to the dummy load of the RF calibration unit 25 and calibrating the RF power. Gas flow measurement is a process of measuring the flow rate of gas flowing through the gas supply line using the flow rate measurement module 24 and inspecting the gas flow rate. Gas line depressurization is a process of depressurizing the inside of the gas supply line using a vacuum pump. Manual transfer is a process in which a user manually operates the first transfer robot 23 and the second transfer robot to transfer a substrate to the process module 21. Easy Teaching is a process in which the first transfer robot 23 sets (teaches) the position in the chamber of the process module 21 to which the substrate will be delivered. Maintenance substrate transfer is a process in which the first transfer robot 23 and the second transfer robot transfer a substrate for maintenance to the process module 21.

[0020] The maintenance combination information includes information regarding a combination of multiple maintenance tasks that can be performed in parallel by the substrate processing apparatus 2. In one embodiment, the maintenance combination information is a maintenance table 132. For example, the maintenance table 132 shown in FIG. 3 includes information regarding whether each of two maintenance tasks included in the multiple maintenance tasks can be performed in parallel. In FIG. 3, two maintenance task combinations that can be performed in parallel are marked with a circle, and two maintenance task combinations that cannot be performed in parallel are marked with a cross. The maintenance combination information may be in a format other than a table.

[0021] If two maintenance operations must simultaneously utilize the same mechanism included in the substrate processing apparatus 2 when they are performed in parallel, the two maintenance operations cannot be performed in parallel. For example, manual transport, Easy Teaching, and maintenance substrate transport are all performed using the first transport robot 23, and therefore, any combination of two maintenance operations cannot be performed in parallel. Similarly, two identical maintenance operations cannot be performed in parallel. Therefore, the maintenance table 132 records that two combinations of maintenance operations that must simultaneously utilize the same mechanism when performed in parallel cannot be performed in parallel. For example, it records that any two combinations of manual transport, Easy Teaching, and maintenance substrate transport cannot be performed in parallel. It also records that two identical maintenance operations cannot be performed in parallel.

[0022] The two maintenance tasks can be performed in parallel if they do not share the same mechanisms provided in the substrate processing apparatus 2. For example, RF power calibration and gas flow rate measurement can be performed in parallel because they do not share the same mechanisms.

[0023] The multiple maintenance tasks can be classified into multiple groups based on the mechanisms of the substrate processing apparatus 2 that they utilize. A first group includes maintenance tasks that utilize the RF calibration unit 25, a second group includes maintenance tasks that utilize the flow measurement module 24, a third group includes maintenance tasks that utilize a vacuum pump, and a fourth group includes maintenance tasks that utilize the first transfer robot 23. RF power calibration is included in the first group, gas flow measurement is included in the second group, gas line depressurization is included in the third group, and manual transfer, Easy Teaching, and maintenance substrate transfer are included in the fourth group. The maintenance table 132 records that multiple maintenance tasks that are included in different groups can be performed in parallel, but that maintenance tasks that are included in the same group cannot be performed in parallel.

[0024] 3 is an example, and other maintenance may be recorded in the maintenance table 132. Even when the maintenance is updated, such as when the content of the maintenance or the number of types of maintenance is changed, the maintenance of the substrate processing apparatus 2 can be continuously controlled by updating the maintenance table (maintenance combination information) 132.

[0025] The processing executed by the information processing apparatus 1 will be described below. FIG. 4 is a flowchart showing an example of the processing procedure by which the information processing apparatus 1 causes the substrate processing apparatus 2 to perform maintenance. Hereinafter, steps will be abbreviated as S. The information processing apparatus 1 performs the following processing by the calculation unit 11 executing information processing in accordance with the computer program 131. The information processing apparatus 1 receives a command for causing the substrate processing apparatus 2 to perform maintenance (S11). In S11, the user operates the operation unit 15 to input the command to the information processing apparatus 1. The calculation unit 11 receives the input command. The information processing apparatus 1 causes the substrate processing apparatus 2 to perform maintenance in accordance with the command (S12). In S12, the calculation unit 11 causes the substrate processing apparatus 2 to perform maintenance in accordance with the command by transmitting a control signal from the connection unit 17 to the substrate processing apparatus 2 to cause the substrate processing apparatus 2 to perform maintenance in accordance with the command.

[0026] The information processing apparatus 1 then receives a command to cause the substrate processing apparatus 2 to perform new maintenance (S13). The maintenance performed by the substrate processing apparatus 2 in S12 is considered to be the previous maintenance, and the maintenance corresponding to the command received in S13 is considered to be the subsequent maintenance. The information processing apparatus 1 then determines whether the substrate processing apparatus 2 is currently performing the previous maintenance (S14). In S14, for example, the calculation unit 11 acquires a signal via the connection unit 17 indicating whether the substrate processing apparatus 2 is currently performing maintenance, and makes a determination based on the acquired signal. If the substrate processing apparatus 2 is not currently performing the previous maintenance (S14: NO), the information processing apparatus 1 causes the substrate processing apparatus 2 to perform the subsequent maintenance (S15), and ends the process.

[0027] If the substrate processing apparatus 2 is currently performing the earlier maintenance (S14: YES), the information processing apparatus 1 determines whether the earlier maintenance and the later maintenance can be performed in parallel (S16). In S16, the calculation unit 11 makes the determination using the maintenance table 132. For example, if the maintenance table 132 records that the earlier maintenance and the later maintenance are a combination that can be performed in parallel, the calculation unit 11 determines that the earlier maintenance and the later maintenance can be performed in parallel. If the maintenance table 132 records that the earlier maintenance and the later maintenance are a combination that cannot be performed in parallel, the calculation unit 11 determines that the earlier maintenance and the later maintenance cannot be performed in parallel.

[0028] The information processing apparatus 1 may perform a process for determining whether multiple maintenance tasks can be performed in parallel using a method other than the method using the maintenance table 132. For example, the computer program 131 may describe combinations of maintenance tasks that can be performed in parallel, and the calculation unit 11 may make a determination according to the description in the computer program 131. For example, groups to which each maintenance task belongs may be recorded in advance, and the calculation unit 11 may identify the group to which each maintenance task belongs and make a determination based on whether the groups to which each maintenance task belongs are the same. For example, the calculation unit 11 may determine that multiple maintenance tasks can be performed in parallel if the mechanisms of the substrate processing apparatus 2 used in each maintenance task are different, but may determine that multiple maintenance tasks cannot be performed in parallel if the mechanisms used in the multiple maintenance tasks are the same. For example, the calculation unit 11 may acquire signals from the mechanisms of the substrate processing apparatus 2 used in each maintenance task via the connection unit 17, identify the mechanisms to be used based on the acquired signals, and make a determination based on the identified mechanisms.

[0029] If it is possible to perform the earlier maintenance and the later maintenance in parallel (S16: YES), the information processing apparatus 1 causes the substrate processing apparatus 2 to perform the earlier maintenance and the later maintenance in parallel (S17). In S16, the calculation unit 11 causes the substrate processing apparatus 2 to perform the earlier maintenance and the later maintenance in parallel by transmitting a control signal for causing the substrate processing apparatus 2 performing the later maintenance from the connection unit 17. Thereafter, the information processing apparatus 1 ends the processing.

[0030] If it is not possible to perform the earlier maintenance and the later maintenance in parallel (S16: NO), the information processing apparatus 1 cancels the execution of the later maintenance (S18). In S18, the calculation unit 11 does not send a control signal to the substrate processing apparatus 2 to cause the later maintenance to be performed. After the earlier maintenance is completed, the information processing apparatus 1 causes the substrate processing apparatus 2 to perform the later maintenance (S19). In S19, the calculation unit 11 confirms that the earlier maintenance is completed based on a signal acquired from the substrate processing apparatus 2 via the connection unit 17. Next, the calculation unit 11 causes the substrate processing apparatus 2 to perform the later maintenance by sending a control signal from the connection unit 17 to the substrate processing apparatus 2 to cause the latter maintenance to be performed. Thereafter, the information processing apparatus 1 ends the processing.

[0031] The information processing apparatus 1 executes the processes of S11 to S19 as needed. The information processing apparatus 1 can also cause the substrate processing apparatus 2 to execute three or more maintenance operations. The information processing apparatus 1 executes the processes of S13 to S19 each time it receives a command to execute the third or subsequent maintenance operation.

[0032] The information processing apparatus 1 may perform processing to display multiple maintenance tasks being performed in parallel and maintenance tasks that have been suspended. The calculation unit 11 displays an image showing multiple maintenance tasks being performed in parallel and maintenance tasks that have been suspended on the display unit 16. FIG. 5 is a schematic diagram showing a first example of an image showing multiple maintenance tasks being performed in parallel and maintenance tasks that have been suspended. FIG. 5 shows an example in which gas flow rate measurement and manual transport are performed in parallel. The first direction is the horizontal direction, and multiple maintenance tasks being performed in parallel are displayed side by side along the horizontal direction. The user can check the multiple maintenance tasks being performed in parallel by the substrate processing apparatus 2.

[0033] FIG. 5 shows an example in which Easy Teaching execution has been suspended. A second direction intersecting the first direction is defined as the vertical direction, and multiple maintenance tasks being performed in parallel and suspended maintenance tasks are displayed side by side along the vertical direction. The suspended maintenance tasks are marked with the word "waiting" to indicate that their execution is on hold. The calculation unit 11 displays an image on the display unit 16, as shown in FIG. 5, in which multiple maintenance tasks being performed in parallel are lined up in the first direction and suspended maintenance tasks are lined up alongside multiple maintenance tasks being performed along the second direction. When performing the processing of S18, the information processing device 1 displays multiple maintenance tasks being performed in parallel and suspended maintenance tasks.

[0034] FIG. 6 is a schematic diagram showing a second example of an image showing multiple maintenance tasks being performed in parallel and maintenance tasks that have been suspended. When the information processing device 1 receives a command to perform additional maintenance tasks while there is a standby maintenance task, the information processing device 1 performs a process to further display the additional maintenance task. If the additional maintenance task and the standby maintenance task can be performed in parallel, the calculation unit 11 displays the additional maintenance task alongside the standby maintenance task along a first direction. If the additional maintenance task and the standby maintenance task cannot be performed in parallel, the calculation unit 11 displays the additional maintenance task alongside the standby maintenance task along a second direction. The example shown in FIG. 6 indicates that standby Easy Teaching and gas line depressurization can be performed in parallel. Furthermore, maintenance substrate transport cannot be performed in parallel with standby Easy Teaching, and is on standby to be performed after Easy Teaching is completed.

[0035] The information processing apparatus 1 can acquire a macro that compiles multiple commands for causing the substrate processing apparatus 2 to execute multiple processes. FIGS. 7, 8, and 9 are schematic diagrams showing examples of macros. The macro contains multiple commands arranged in the order in which the processes are to be executed. In the examples shown in FIGS. 7, 8, and 9, commands are selected in order from the top, and the processes corresponding to the commands are executed. The macro contains a command for causing the substrate processing apparatus 2 to execute maintenance. The macro may also contain a command for causing the substrate processing apparatus 2 to execute processes other than maintenance. In the examples shown in FIGS. 7, 8, and 9, a command for initializing the process module 21 is included.

[0036] In a macro, an execution setting that specifies whether a process corresponding to a command is to be executed alone or whether multiple processes corresponding to multiple commands are to be executed in parallel is associated with the command. In a macro, information that identifies the process module 21 that is the target of the process is associated with the command. PM1 and PM2 shown in FIGS. 7, 8, and 9 are examples of information that identifies the process module 21. In a macro, settings related to the process corresponding to the command are associated with the command as needed. In the examples shown in FIGS. 8 and 9, the type and flow rate of gas when gas flow rate measurement is performed are set. FIGS. 7, 8, and 9 are examples of macros, and macros may be configured in other formats.

[0037] 10 is a flowchart showing an example of a processing procedure in which the information processing apparatus 1 causes the substrate processing apparatus 2 to perform maintenance in accordance with a macro. The information processing apparatus 1 acquires the macro (S201). In S201, the user operates the operation unit 15 to input the macro to the information processing apparatus 1, and the calculation unit 11 acquires the input macro. Alternatively, a pre-created macro may be stored in the storage unit 13, and the calculation unit 11 may acquire the macro by reading it from the storage unit 13. By acquiring the macro, the information processing apparatus 1 accepts multiple commands for executing multiple processes.

[0038] The information processing apparatus 1 selects a command included in the macro (S202). In S202, the calculation unit 11 selects the first command included in the macro. The information processing apparatus 1 determines whether the process corresponding to the selected command is set to be executed independently (S203). In S203, the calculation unit 11 makes the determination according to the execution setting associated with the command in the macro. If the process corresponding to the command is set to be executed independently (S203: YES), the information processing apparatus 1 causes the substrate processing apparatus 2 to execute a single maintenance operation in accordance with the command (S204). In S204, the calculation unit 11 causes the substrate processing apparatus 2 to execute the maintenance operation in accordance with the command by transmitting a control signal from the connection unit 17 to the substrate processing apparatus 2. Even if the process corresponding to the command is a process other than maintenance, the information processing apparatus 1 similarly causes the substrate processing apparatus 2 to execute the process corresponding to the command.

[0039] The information processing device 1 then determines whether the macro includes an unselected command (S205). In S205, the calculation unit 11 makes this determination by referring to the acquired macro. If the macro includes an unselected command (S205: YES), the information processing device 1 returns the process to S202. In S202, the calculation unit 11 selects the next command included in the macro. If the macro does not include an unselected command (S205: NO), the information processing device 1 ends the process.

[0040] If the process corresponding to the command is not set to be executed independently in S203 (S203: NO), the information processing device 1 selects multiple commands (S206). In this case, the macro is set to execute multiple processes corresponding to the multiple commands in parallel. In S206, the calculation unit 11 selects multiple commands set to execute processes in parallel, including the command selected in S202.

[0041] The information processing device 1 determines whether it is possible to perform multiple maintenance tasks corresponding to the selected multiple commands in parallel (S207). In S207, the calculation unit 11 determines whether it is possible to perform multiple maintenance tasks in parallel by performing a process similar to that in S16. The macro shown in FIG. 7 is defined to perform RF power calibration and gas flow rate measurement in parallel, and it is possible to perform these two maintenance tasks in parallel. The macro shown in FIG. 8 is defined to perform gas flow rate measurement for process module PM1 and gas flow rate measurement for process module PM2 in parallel, but it is not possible to perform these two maintenance tasks in parallel.

[0042] 9 is defined to execute gas flow rate measurement for process module PM1, gas flow rate measurement for process module PM2, and Easy Teaching for process module PM1 in parallel. Gas flow rate measurement for process module PM1 is defined as first maintenance, gas flow rate measurement for process module PM2 is defined as second maintenance, and Easy Teaching is defined as third maintenance. The first maintenance and the second maintenance cannot be executed in parallel. Either the first maintenance or the second maintenance can be executed in parallel with the third maintenance.

[0043] If it is possible to execute all of the multiple maintenance tasks corresponding to the multiple commands in parallel (S207: YES), the information processing apparatus 1 causes the substrate processing apparatus 2 to execute the multiple maintenance tasks in parallel (S208). For example, if the macro shown in Fig. 7 has been acquired, RF power calibration and gas flow rate measurement are executed in parallel. After S208 is completed, the information processing apparatus 1 advances the process to S205.

[0044] If there is a combination of maintenance tasks that cannot be performed in parallel among the multiple maintenance tasks corresponding to the multiple commands (S207: NO), the information processing apparatus 1 causes the substrate processing apparatus 2 to perform some of the multiple maintenance tasks (S209). In S209, the calculation unit 11 causes the substrate processing apparatus 2 to perform one of the multiple maintenance tasks. Alternatively, if there is a combination of maintenance tasks that can be performed in parallel among the multiple maintenance tasks, the calculation unit 11 causes the substrate processing apparatus 2 to perform multiple maintenance tasks that can be performed in parallel in parallel. For example, if the macro shown in FIG. 8 is acquired, gas flow rate measurement for the process module PM1 or gas flow rate measurement for the process module PM2 is performed. For example, if the macro shown in FIG. 9 is acquired, either the first maintenance task or the second maintenance task and the third maintenance task are performed in parallel. The information processing apparatus 1 may perform a process to display multiple maintenance tasks being performed in parallel and maintenance tasks that have been stopped, as shown in FIG. 5 or FIG. 6.

[0045] The information processing apparatus 1 then waits until at least one maintenance operation is completed and confirms that at least one maintenance operation has been completed (S210). In S210, the calculation unit 11 confirms that the maintenance operation has been completed based on a signal received from the substrate processing apparatus 2 via the connection unit 17. The information processing apparatus 1 determines whether any maintenance operation is still in progress (S211). If no maintenance operation is in progress (S211: NO), the information processing apparatus 1 determines whether multiple maintenance operations have not yet been performed (S212). In S212, the calculation unit 11 determines the number of unperformed maintenance operations among the multiple maintenance operations corresponding to the selected multiple commands. If multiple unperformed maintenance operations exist (S212: YES), the information processing apparatus 1 returns the process to S207. If only one unperformed maintenance operation remains (S212: NO), the information processing apparatus 1 proceeds to S204.

[0046] If there is a maintenance task currently being performed in S211 (S211: YES), the information processing device 1 determines whether or not there is any unperformed maintenance task that can be performed in parallel with the currently-performed maintenance task (S213). In S213, the calculation unit 11 performs a process similar to that of S16 to determine whether or not the currently-performed maintenance task and the unperformed maintenance task can be performed in parallel. If there is no unperformed maintenance task that can be performed in parallel with the currently-performed maintenance task (S213: NO), the information processing device 1 returns the process to S210.

[0047] If there is any maintenance that can be performed in parallel with the ongoing maintenance among the unperformed maintenance (S213: YES), the information processing apparatus 1 causes the substrate processing apparatus 2 to perform the other maintenance in parallel with the ongoing maintenance (S214). In S214, the calculation unit 11 causes the substrate processing apparatus 2 to perform the maintenance that can be performed in parallel with the ongoing maintenance. For example, if the macro shown in FIG. 9 is acquired, and first and third maintenance are performed in parallel, and the first maintenance is completed, the second and third maintenance are subsequently performed in parallel. The information processing apparatus 1 may perform processing to display multiple maintenance tasks being performed in parallel and maintenance tasks that have been stopped, as shown in FIG. 5 or 6.

[0048] The information processing device 1 then waits until at least one maintenance task is completed and confirms that at least one maintenance task has been completed (S215). The information processing device 1 then determines whether or not there is any unexecuted maintenance task (S216). In S216, the calculation unit 11 determines whether or not there is any unexecuted maintenance task among the multiple maintenance tasks corresponding to the multiple selected commands. If there is any unexecuted maintenance task (S216: YES), the information processing device 1 returns the process to S211. If there is no unexecuted maintenance task (S216: NO), the information processing device 1 proceeds to S205.

[0049] In this embodiment, the information processing device 1 receives multiple commands using a macro, but the information processing device 1 may also receive multiple commands collectively using a method other than using a macro. For example, the information processing device 1 may also receive multiple commands input in chronological order collectively. The information processing device 1 executes the processes of S202 to S216 in response to the multiple commands, just as in the case of using a macro.

[0050] As described above in detail, in this embodiment, the information processing apparatus 1 receives multiple commands to cause the substrate processing apparatus 2 to perform multiple maintenance tasks, and determines whether or not it is possible to perform the multiple maintenance tasks in parallel. If it is possible to perform multiple maintenance tasks in parallel, the information processing apparatus 1 causes the substrate processing apparatus 2 to perform the multiple maintenance tasks in parallel. If it is not possible to perform multiple maintenance tasks in parallel, the information processing apparatus 1 cancels the execution of one of the maintenance tasks and prevents multiple maintenance tasks from being performed in parallel. Multiple maintenance tasks that use the same mechanism of the substrate processing apparatus 2 cannot be performed in parallel, but multiple maintenance tasks that use different mechanisms of the substrate processing apparatus 2 can be performed in parallel.

[0051] In this embodiment, multiple maintenance tasks can be performed in parallel in the substrate processing apparatus 2, which allows efficient maintenance in the substrate processing apparatus 2. For example, the time required for maintenance of the substrate processing apparatus 2 can be shortened.

[0052] The present invention is not limited to the contents of the above-described embodiment, and various modifications are possible within the scope of the claims. In other words, embodiments obtained by combining technical means modified appropriately within the scope of the claims are also included in the technical scope of the present invention.

[0053] The matters described in each embodiment can be combined with each other. Furthermore, the independent claims and dependent claims described in the claims can be combined with each other in any and all combinations, regardless of the reference format. Furthermore, the claims do not use a format in which a claim references two or more other claims (multiple claim format), but this is not limited to this. They may be written using a multiple claim format or a format in which multiple claims (multi-multi claim) reference at least one other multiple claim.

[0054] REFERENCE SIGNS LIST 100 Substrate processing system 1 Information processing device 10 Recording medium 11 Calculation unit 13 Storage unit 131 Computer program 132 Maintenance table (maintenance combination information) 2 Substrate processing device 21 Process module 22 Vacuum transfer chamber 23 First transfer robot 24 Flow rate measurement module 25 RF calibration unit

Claims

1. A computer program that, when receiving a command to cause a substrate processing apparatus to perform multiple maintenance operations, determines whether the multiple maintenance operations can be performed in parallel, and if the multiple maintenance operations can be performed in parallel, causes the substrate processing apparatus to perform the multiple maintenance operations in parallel, and if the multiple maintenance operations cannot be performed in parallel, causes the computer to perform one of the multiple maintenance operations without performing the multiple maintenance operations in parallel.

2. A computer program according to claim 1, which causes a computer to execute a process of determining whether or not the plurality of maintenance tasks can be performed in parallel using maintenance combination information that records combinations of maintenance tasks that can be performed in parallel by the substrate processing apparatus.

3. The computer program according to claim 2, wherein the maintenance combination information is a table containing information about whether or not two maintenance combinations can be executed in parallel.

4. The computer program of claim 1, which causes a computer to execute the following process: when a command to execute another maintenance operation while the substrate processing apparatus is executing one maintenance operation is received, determines whether the one maintenance operation and the other maintenance operation can be executed in parallel; if the one maintenance operation and the other maintenance operation can be executed in parallel, causes the substrate processing apparatus to execute the other maintenance operation in parallel with the one maintenance operation; and if the one maintenance operation and the other maintenance operation cannot be executed in parallel, causes the substrate processing apparatus to execute the other maintenance operation after the one maintenance operation is completed.

5. The computer program according to claim 1, which causes a computer to execute a process of determining whether or not the plurality of maintenance tasks can be performed in parallel when a command to cause the substrate processing apparatus to perform the plurality of maintenance tasks in parallel is received.

6. The computer program of claim 1, which causes a computer to execute a process of causing the substrate processing apparatus to execute the first and third maintenance in parallel when, among the first, second, and third maintenance, the first and second maintenance cannot be executed in parallel, but one of the first and second maintenance and the third maintenance can be executed in parallel, and causing the substrate processing apparatus to execute the second maintenance after the first maintenance is completed.

7. The computer program of claim 1, which causes a computer to execute a process of determining that the plurality of maintenance operations cannot be performed in parallel when the same mechanism included in the substrate processing apparatus must be used simultaneously when the plurality of maintenance operations are performed in parallel.

8. The computer program of claim 1, which causes a computer to execute a process of determining that among a plurality of maintenance operations including calibration of RF power included in a first group, measurement of gas flow rate included in a second group, depressurization of a gas supply line included in a third group, or manual transport of a substrate, setting a position to which the substrate will be transported, or transport of a substrate for maintenance included in a fourth group, maintenance operations included in different groups can be performed in parallel, and determining that maintenance operations included in the same group cannot be performed in parallel.

9. The computer program according to claim 1, which causes a computer to execute a process of displaying a plurality of maintenance operations to be performed in parallel on the substrate processing apparatus in a first direction, and displaying a maintenance operation whose execution has been suspended in a second direction alongside the plurality of maintenance operations.

10. An information processing device comprising a calculation unit, which, when receiving a command to cause a substrate processing device to perform multiple maintenance operations, determines whether or not it is possible to perform the multiple maintenance operations in parallel, and if it is possible to perform the multiple maintenance operations in parallel, causes the substrate processing device to perform the multiple maintenance operations in parallel, and if it is not possible to perform the multiple maintenance operations in parallel, causes the substrate processing device to perform one of the multiple maintenance operations without performing the multiple maintenance operations in parallel.

11. An information processing device as described in claim 10, further comprising a memory unit that stores maintenance combination information that records combinations of maintenance that can be performed in parallel by the substrate processing device, and the calculation unit uses the maintenance combination information to determine whether the multiple maintenance tasks can be performed in parallel.

12. The information processing device according to claim 11, wherein the maintenance combination information is a table containing information about whether or not two maintenance combinations can be performed in parallel.

13. The information processing device according to claim 10, wherein, when the calculation unit receives a command to cause the substrate processing device to perform another maintenance while the substrate processing device is performing one maintenance, it determines whether or not it is possible to perform the one maintenance and the other maintenance in parallel, and if it is possible to perform the one maintenance and the other maintenance in parallel, it causes the substrate processing device to perform the other maintenance in parallel with the one maintenance, and if it is not possible to perform the one maintenance and the other maintenance in parallel, it causes the substrate processing device to perform the other maintenance after the one maintenance is completed.

14. The information processing apparatus of claim 10, wherein the calculation unit causes the substrate processing apparatus to perform the first and third maintenance in parallel when, among the first, second, and third maintenance, the first and second maintenance cannot be performed in parallel, but it is possible to perform either the first or second maintenance in parallel with the third maintenance, and causes the substrate processing apparatus to perform the second maintenance after the first maintenance is completed.

15. The information processing device according to claim 10, wherein the calculation unit determines that it is not possible to perform the multiple maintenance operations in parallel if the same mechanism included in the substrate processing device must be used simultaneously when the multiple maintenance operations are performed in parallel.

16. The information processing device according to claim 10, wherein the calculation unit determines that among a plurality of maintenance tasks including calibration of RF power included in a first group, measurement of gas flow rate included in a second group, depressurization of a gas supply line included in a third group, or manual transport of a substrate, setting of a position to which the substrate is to be transported, or transport of a substrate for maintenance included in a fourth group, maintenance tasks included in different groups can be performed in parallel, and determines that maintenance tasks included in the same group cannot be performed in parallel.

17. An information processing method that, when receiving a command to cause a substrate processing apparatus to perform multiple maintenance operations, determines whether or not it is possible to perform the multiple maintenance operations in parallel, and if it is possible to perform the multiple maintenance operations in parallel, causes the substrate processing apparatus to perform the multiple maintenance operations in parallel, and if it is not possible to perform the multiple maintenance operations in parallel, causes the substrate processing apparatus to perform one of the multiple maintenance operations without performing the multiple maintenance operations in parallel.

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