Tracked transport vehicle system

Abstract

This tracked transport vehicle system transports an article by means of a transport vehicle that travels along a track. The tracked transport vehicle system comprises: a monitoring device that is mounted on the transport vehicle and monitors the situation around the space in which the transport vehicle travels; and a controller that transmits, to the transport vehicle, a monitoring instruction to instruct the monitoring device to perform monitoring, and stores a monitoring result and a monitoring position in association with each other.

Description

Rail-guided vehicle system

[0001] The present disclosure relates to a rail-guided vehicle system.

[0002] There is known a system in which an article is conveyed by a carrier system main body supported by a ceiling, and the article is transferred between the carrier system main body and a ground-side station via a transfer device provided at the ground-side station for performing a lifting operation. In such a system, it is known that the height of the ceiling of a building can vary. In the system described in Patent Document 1, a distance sensor is provided in a station or a processing device arranged on the ground side, and a bracket is provided on a side surface of a belt support supported by the ceiling. The distance sensor measures the height distance to the bracket. In accordance with the variation of the height distance, the lifting amount of an arm in the transfer device is corrected by a control circuit.

[0003] International Publication No. 2010 / 143269

[0004] In the above-described conventional system, since a distance sensor is provided for each ground-side station, many distance sensors are required. Even when distance sensors are provided only for some stations, a certain number of distance sensors are required for the entire system. Also, on the ceiling side, it is necessary to project brackets laterally, resulting in a large-scale configuration. In the conventional system, a moving body such as a belt or a cradle is not provided with a configuration (such as a sensor) related to distance measurement.

[0005] The present inventor focused on the fact that by using a carrier traveling (running) along a track to monitor the situation around the running space, it becomes possible to obtain all useful data in system operation. Since the track is often laid over a wide area within a building, it is also possible to acquire and accumulate data over a wide area. The present disclosure describes a rail-guided vehicle system capable of monitoring the situation around the running space by using a carrier.

[0006] [1] One aspect of the present disclosure is a rail-mounted transport vehicle system for transporting goods by a transport vehicle that travels along a track, comprising: a monitoring device mounted on the transport vehicle for monitoring the conditions around the transport vehicle's travel space; and a controller that transmits a monitoring instruction to the transport vehicle to perform monitoring by the monitoring device, and stores the monitoring results and monitoring location in association.

[0007] According to the rail-railed transport vehicle system in [1], the controller sends a monitoring instruction to the transport vehicle, causing it to travel through a predetermined monitoring location. A monitoring device mounted on the transport vehicle then monitors the surrounding conditions of the travel space at the monitoring location. This allows the surrounding conditions of the travel space to be monitored using the transport vehicle. For example, if the controller estimates any change or abnormality based on the monitoring results, it can notify the administrator (or operator, etc.) of the estimation along with the monitoring location (by display output or data presentation, etc.). Since it is possible to notify such monitoring results or estimations over the range in which the track is provided, this rail-railed transport vehicle system contributes to the proper operation of the system.

[0008] [2] In the railed transport vehicle system described in [1] above, the rail is installed on the ceiling of the building, the transport vehicle is an overhead transport vehicle, and the monitoring device may have a distance sensor that measures the distance to the floor or the transfer surface of the item installed on the floor. In this case, it is possible to monitor changes in the vertical distance between the ceiling or rail and the floor, etc.

[0009] [3] In the rail-type transport vehicle system described in [1] or [2] above, the monitoring device is a monitoring unit that can be held and transported by the transport vehicle, and the monitoring unit may have a communication unit that enables information communication with the transport vehicle when held by the transport vehicle. In this case, the transport vehicle that normally transports goods can be easily equipped with a monitoring function as needed.

[0010] [4] In any one of the rail-mounted transport vehicle systems described in [1] to [3] above, the controller stores the measured values ​​acquired by the monitoring device, linked to the monitoring location where the measured values ​​were acquired, and may display planar map information reflecting the measured values ​​on the display unit. In this case, the measured values ​​as monitoring results can be provided to the operator, etc., as map information. As a result, appropriate maintenance can be performed.

[0011] [5] In the rail-rail transport vehicle system described in [2] above, the controller stores the distance measured by the distance sensor of the monitoring device, linking it to the monitoring time and monitoring location at which the distance was measured. The change in distance between two different monitoring times may be reflected in a planar heat map as the amount of deflection of the ceiling or track and displayed on the display unit. In this case, the amount of deflection of the ceiling or track can be notified to the operator, etc. As a result, the operator, etc. can easily recognize the transfer section (port, etc.) that requires reteaching.

[0012] The track is installed in the ceiling of the building, and the transport vehicles are overhead transport vehicles. The overhead transport vehicles are equipped with a teaching unit as a monitoring device, and the distance to the transfer surface of the items placed on the floor may be measured by the teaching unit performing a teaching operation. In this case, the teaching operation is completed by measuring the distance to the transfer surface while performing the teaching operation. Furthermore, by having multiple transport vehicles perform the teaching operation and distance measurement, it is possible to estimate whether the change in distance reflects the amount of deflection of the ceiling or track, or whether it is due to mechanical elements specific to each transport vehicle.

[0013] According to this disclosure, the surrounding conditions of the travel space can be monitored using a transport vehicle.

[0014] Figure 1 is a schematic plan view showing a transport vehicle system according to one embodiment of the present disclosure. Figure 2 is a diagram showing an example configuration of a transport vehicle, a monitoring unit, and a controller. Figure 3 is a flowchart relating to monitoring control and display of map information performed by the controller. Figure 4(a) shows a diagram showing multiple monitoring positions, and Figure 4(b) shows an example of a heat map output and displayed based on the monitoring results. Figure 5(a) shows a diagram showing multiple monitoring positions, and Figure 5(b) shows an example of a heat map output and displayed based on the monitoring results. Figure 6(a) shows a diagram showing multiple monitoring positions, and Figure 6(b) shows an example of a time-series graph of deflection amount output and displayed based on the monitoring results at one monitoring position. Figure 7 is a diagram showing another example configuration of the transport vehicle, monitoring unit, and controller. Figures 8(a) and 8(b) show yet another example configuration of the track, transport vehicle, and monitoring unit, respectively. Figure 9 is a diagram showing distance measurement to the transfer surface by a monitoring unit according to a modified example. Figure 10 is a diagram showing distance measurement to the transfer surface using an auto-teaching unit.

[0015] Embodiments of this disclosure will be described below with reference to the drawings. In the description of the drawings, the same elements will be denoted by the same reference numerals, and redundant descriptions will be omitted.

[0016] Referring to Figures 1 and 2, the overall configuration of the transport vehicle system S (rail-type transport vehicle system) of this embodiment will be described. As shown in Figure 1, the transport vehicle system S is applied, for example, to a cleanroom (semiconductor factory) where semiconductor devices are manufactured. The transport vehicle system S comprises a track 200 laid near the ceiling of a building that constitutes a cleanroom, etc., and a plurality of overhead transport vehicles 1 that travel along the track 200. The number of overhead transport vehicles 1 is appropriately determined according to the required transport capacity, etc.

[0017] The track 200 is suspended from the ceiling, for example. The track 200 is a predetermined one-way route for the overhead transport vehicle 1 to travel on. The track 200 passes over, for example, a plurality of ports 60. The layout of the track 200 may be appropriately determined according to the arrangement of the processing equipment (not shown) in the cleanroom. Each port 60 is installed, for example, on the floor surface F at the horizontal end of the processing equipment. The arrangement of the ports 60 may also be appropriately determined. At least one port 60 may be positioned so as not to overlap the track 200 in a plan view.

[0018] In the transport vehicle system S, each overhead transport vehicle 1 travels along a track 200. Each overhead transport vehicle 1 transports an item 10. The item 10 is, for example, a Front Opening Unified Pod (FOUP) containing multiple wafers. Each overhead transport vehicle 1 transfers the item 10 to and from a port 60. The transport vehicle system S may also be equipped with storage shelves (not shown) suspended from the ceiling, or with a stocker (not shown) installed on the floor surface F.

[0019] In the transport vehicle system S of this embodiment, for example, while goods 10 are being transported by multiple overhead transport vehicles 1, the surrounding conditions of the travel space are monitored by another one or more overhead transport vehicles 1. The overhead transport vehicle 1 is capable of holding and transporting goods 10, as well as holding and transporting a monitoring unit (monitoring device) 40 prepared for monitoring (see Figure 2). While holding the monitoring unit 40, the overhead transport vehicle 1 receives a movement instruction from the transport vehicle controller 50 (details to be described later) and performs a predetermined monitoring operation in cooperation with the monitoring unit 40. In the example described below, one overhead transport vehicle 1 monitors the surrounding conditions of the travel space. The time of monitoring by the overhead transport vehicle 1 (this is a concept that includes the date and time period) may be appropriately determined by the maintenance controller 100 (or transport vehicle controller 50). The overhead transport vehicle 1 used for monitoring may monitor the surrounding conditions of the travel space not only while goods 10 are being transported by multiple overhead transport vehicles 1, but also when the transport of goods 10 is paused.

[0020] Referring to Figure 2, the configuration of the overhead transport vehicle 1 will be described. As described above, the overhead transport vehicle 1 can be used for both transporting and monitoring articles 10. Figure 2 shows the overhead transport vehicle 1 holding the monitoring unit 40. Since the configuration for holding articles 10 and the configuration for holding the monitoring unit 40 are the same in the overhead transport vehicle 1, the following description will focus on the case where the monitoring unit 40 is held and transported. The description of the case where articles 10 are held and transported will be omitted.

[0021] As shown in Figure 2, the overhead transport vehicle 1 comprises a frame unit 2, a travel unit 3, a lateral unit 4, a lifting drive unit 6, and a gripping unit 7. The frame unit 2 includes frames provided on the front and rear sides in the extending direction (travel direction) of the track 200. The travel unit 3 travels along the track 200 by receiving power non-contact from, for example, high-frequency current lines laid along the track 200. As the drive method for the travel unit 3, an electric motor drive method may be adopted, a linear motor drive method may be adopted, or other known drive methods may be adopted. The lateral unit 4 moves the lifting drive unit 6 and the gripping unit 7 laterally (to the side in the travel direction of the overhead transport vehicle 1).

[0022] The lifting drive unit 6 raises and lowers the gripping unit 7. The lifting drive unit 6 raises and lowers the gripping unit 7 by winding or unwinding the belt B. The gripping unit 7 holds the monitoring unit 40 in a specified orientation. The gripping unit 7 has, for example, a pair of grippers 8, 8. The pair of grippers 8, 8 are opened and closed by a drive motor and a link mechanism to grip the monitoring unit 40 or release the grip of the monitoring unit 40.

[0023] The overhead transport vehicle 1 may have known configurations other than those described above. A rotation unit may be provided between the lateral unit 4 and the lifting drive unit 6 to rotate the lifting drive unit 6 around a central axis (rotation axis) along the Z direction. Another rotation unit may be provided between the lifting drive unit 6 and the gripping unit 7 to rotate the gripping unit 7 around a central axis (rotation axis) along the Z direction.

[0024] The overhead transport vehicle 1 has a control unit 9. The control unit 9 is located, for example, within the frame unit 2. The control unit 9 is a controller that controls each part of the overhead transport vehicle 1. The control unit 9 controls the travel unit 3, the lateral unit 4, the lifting drive unit 6, and the gripping unit 7. The control unit 9 is an electronic control unit composed of a processor such as a CPU (Central Processing Unit), ROM (Read-only memory), and RAM (Random Access Memory). The control unit 9 communicates information with the transport vehicle controller 50 using the power supply section (high-frequency current line) or communication line (feeder line) of the track 200. The control unit 9 can determine the position of its own vehicle, for example, by obtaining position information from positioning marks 201 such as barcodes provided on the track 200, and by using counters (encoders) such as motors provided in the travel unit 3.

[0025] The monitoring unit 40 is mounted on the overhead transport vehicle 1 and is a monitoring device that monitors the conditions around the travel space of the overhead transport vehicle 1. In this embodiment, the monitoring unit 40 monitors the conditions below the travel space. More specifically, the monitoring unit 40 measures the distance from the distance sensor 47 to the floor surface F, or the mounting surface 60a of the port 60 installed on the floor surface F (the transfer surface for the article 10, see Figure 9). The monitoring unit 40 has, for example, a communication unit 43 and a control unit 45 mounted inside a housing. The monitoring unit 40 has a flange portion 41 provided on the upper surface 40a of the housing. The gripper 8 fits under the flange portion 41, and the monitoring unit 40 is held by the gripping unit 7. The communication unit 43 can communicate information with the control unit 9 of the overhead transport vehicle 1, for example, via a belt B. The communication unit 43 communicates various information related to monitoring between the control unit 9 and the control unit 45 of the overhead transport vehicle 1. The control unit 45 consists of, for example, a PLC (Programmable Logic Controller) or sequencer equipped with an arithmetic unit and a memory unit.

[0026] The communication unit 43 enables information communication with the control unit 9 of the overhead transport vehicle 1 by wire connecting the connector (not shown) of the monitoring unit 40 to the connector (not shown) of the overhead transport vehicle 1 when the monitoring unit 40 is held by the overhead transport vehicle 1. For example, the connector can be provided on the gripper 8. When the gripping unit 7 is gripping the monitoring unit 40, the connector of the monitoring unit 40 is connected to the connector of the gripper 8. In this case, the gripping unit 7 communicates with the control unit 9 through the belt B.

[0027] The monitoring unit 40 has, for example, a distance sensor 47 provided on the lower surface 40b of the housing. The distance sensor 47 is, for example, a Time of Flight (TOF) type sensor. The type of distance sensor 47 is not particularly limited, but for example, a reflective laser sensor can be used as the distance sensor 47. The distance sensor 47 is installed so that the laser beam emitter is exposed downward on the lower surface 40b of the housing. The distance sensor 47 is controlled by the control unit 45. The distance sensor 47 emits laser light toward the floor surface F (downward in the vertical direction) and receives the reflected light as input. The distance sensor 47 calculates the distance from the emitter to the floor surface F and outputs the distance information to the control unit 45. The control unit 45 transmits the distance information to the control unit 9 via the communication unit 43. Note that the distance monitored by the monitoring unit 40 is not limited to the floor surface F. For example, as shown in Figure 9, the monitoring unit 40 may measure the distance from the port 60 to the mounting surface 60a (the transfer surface for the article 10).

[0028] As shown in Figures 1 and 2, the transport vehicle system S includes a transport vehicle controller 50 that controls the transport of articles 10 in the overhead transport vehicle 1 and the measurement of the distance to the floor surface F (monitoring of the floor surface F), a data server 300, and a maintenance controller 100 that creates and stores maintenance schedules and communicates with the transport vehicle controller 50. Each of the transport vehicle controller 50, the maintenance controller 100, and the data server 300 is an electronic control unit consisting of, for example, a CPU, ROM, and RAM.

[0029] The maintenance controller 100 transmits a command related to monitoring (a movement command, described later) to the transport vehicle controller 50 according to a predetermined maintenance schedule. As shown in Figure 2, the transport vehicle controller 50 has a control unit 51, a storage unit 52, and a display unit 53. When the transport vehicle controller 50 receives a command related to monitoring from the maintenance controller 100, the control unit 51 creates and transmits a movement instruction to the overhead transport vehicle 1, which is to perform monitoring operations, with a predetermined monitoring location as its destination. This movement instruction corresponds to a monitoring instruction indicating that monitoring will be performed by the monitoring unit 40. The control unit 9 of the overhead transport vehicle 1 can communicate with the transport vehicle controller 50. When the transport vehicle controller 50 receives distance measurement information from the control unit 9 of the overhead transport vehicle 1, it stores the measurement result (monitoring result), measurement location (monitoring location), and measurement time (monitoring time) in the storage unit 52, linking them together.

[0030] The transport vehicle controller 50 simultaneously links the measurement result (monitoring result), measurement location (monitoring location), and measurement time (monitoring time) and stores them in the data server 300. The term "measurement information" is used below to refer to the concept that includes the measurement result, i.e., distance information, and the measurement location and time at which the measurement was taken. The transport vehicle controller 50 can read the measurement information stored in the data server 300 as needed. The transport vehicle controller 50 displays a heat map (see Figure 4) on the display unit 53 when it has acquired measurement results for substantially the entire area of ​​the track 200 or a predetermined range, or when it has received a map creation instruction based on the operation of the portable device 400. The transport vehicle controller 50 also monitors the trend of past measurement results (distance) for each measurement location and issues an abnormality alert when a change of a certain amount or more occurs at any measurement location.

[0031] The data server 300 stores measurement information and other data based on signals transmitted and received by the transport vehicle controller 50. The maintenance controller 100 and the data server 300 also communicate with each other sequentially.

[0032] The transport vehicle system S may include a portable device 400, such as a tablet or personal computer (PC), which is viewed and operated by an operator. The portable device 400 is capable of communicating information with the transport vehicle controller 50 and the data server 300. The portable device 400 has, for example, a display unit 401 such as a liquid crystal display (see Figure 4(b)), an operation unit such as a touch panel display, and a communication unit capable of wireless information communication. The operator can use the portable device 400 to refer to and update measurement information (monitoring information) via the transport vehicle controller 50 or the data server 300. For example, measurement information and abnormal alerts are transmitted from the transport vehicle controller 50 to the portable device 400. A maintenance viewer is installed on the portable device 400, and the data server 300 appropriately distributes information to the maintenance viewer.

[0033] Next, an example of a monitoring and control method (monitoring method) in the transport vehicle system S will be described with reference to Figures 3 and 4. Figure 3 is a flowchart relating to monitoring and control and display of map information performed by the transport vehicle controller 50. Figure 4(a) is a diagram showing multiple monitoring locations, and Figure 4(b) is a diagram showing an example of a heat map output and displayed based on the monitoring results. First, the transport vehicle controller 50 receives a movement command from the maintenance controller 100 (step S01). This movement command includes one or more measurement locations where measurements should be taken. For example, as shown in Figure 4(a), six measurement points P1 to P6 are set on the track 200. Although not shown in the diagram, there are more (numerous) measurement points set on the track 200 than those shown in Figure 4(a). The movement command may specify only some of the measurement points, or it may specify all of the measurement points. As an example, let's assume that the six measurement points shown in Figure 4(a) are specified.

[0034] Next, the transport vehicle controller 50 creates a movement instruction based on the movement command and transmits the movement instruction to the overhead transport vehicle 1 which is to perform monitoring operations (step S02). The control unit 9 of the overhead transport vehicle 1 receives the movement instruction (measurement instruction). When creating the movement instruction, the transport vehicle controller 50 generates a movement path using a known search method so as to stop the overhead transport vehicle 1 at each of the measurement points P1 to P6 included in the movement instruction. In this specification, "measurement point" is synonymous with "measurement position".

[0035] Upon receiving a movement instruction, the overhead transport vehicle 1, while holding the monitoring unit 40, travels according to the movement path indicated in the movement instruction, and stops at each of the measurement points P1 to P6 in a predetermined order to measure the distance to the floor surface F. The control unit 9 of the overhead transport vehicle 1 receives distance information from the monitoring unit 40. The control unit 9 transmits the measurement result and measurement position (i.e., measurement information) to the transport vehicle controller 50. The transport vehicle controller 50 receives the measurement information (step S03). The transport vehicle controller 50 may receive measurement information for each measurement point sequentially as measurement is completed at each measurement point, or it may receive measurement information for all measurement points together (all at once) when measurement is completed at all measurement points. The control unit 51 of the transport vehicle controller 50 stores the measurement information in the storage unit 52 and also stores the measurement information in the data server 300 (step S04).

[0036] In the transport vehicle system S, the processes described in steps S01 to S04 are performed multiple times at different times at measurement points P1 to P6. The measurements are performed, for example, according to the maintenance schedule set in the maintenance controller 100. Measurements may be performed sequentially at other measurement points set on the track 200, not just at measurement points P1 to P6. The maintenance controller 100 may create a maintenance schedule so that measurements are performed sequentially at all measurement points set on the track 200, or it may create a maintenance schedule so that measurements are performed sequentially at a limited number of measurement points, for example, based on past measurement results.

[0037] When the transport vehicle controller 50 acquires measurement results for substantially the entire area of ​​the track 200 or a predetermined range, or when it receives a map creation instruction based on the operation of the portable device 400, it reads the stored measurement information from the storage unit 52 or the data server 300 (step S05). In the measurement information, as described above, the distance measured by the distance sensor 47 is linked to the measurement time and measurement location at which the distance was measured. As illustrated in Figure 4(b), the transport vehicle controller 50 creates a planar heat map MA that reflects the amount of change in distance at two different measurement times as the amount of deflection of the ceiling or track 200 (step S06). The transport vehicle controller 50 displays the heat map MA that reflects the amount of deflection (amount of change in distance) of the ceiling or track 200 on the display unit 401 of the portable device 400, etc. (step S07).

[0038] In the illustrated example, for instance, the change in distance was largest at measurement point P6, followed by measurement point P5, and then measurement point P4. At measurement points P1, P2, and P3, the change in distance was small or nearly zero. The transport vehicle controller 50 stores multiple thresholds related to the change in distance when creating the heatmap MA, and determines the warning level in the heatmap MA based on these thresholds and the change in distance obtained from the measured values.

[0039] As shown in Figure 4(b), the heatmap MA shows multiple areas based on the amount of deflection (change in distance) of the ceiling or track 200, in different intensities (or different colors). The track diagram IMG2 corresponding to the track 200 and multiple port diagrams IMG6 corresponding to multiple ports 60 are superimposed on the heatmap MA. The third level area L3 is displayed in the darkest color, corresponding to measurement point P6. A port diagram IMG6 corresponding to one specific port 60 located in the lower right in the plan view is superimposed on this third level area L3. The second level area L2 is displayed in the next darkest color, corresponding to measurement point P5. Two port diagrams IMG6 corresponding to two ports 60 near the specific port 60 are superimposed on this second level area L2. The first level area L1 is displayed in the lightest color, corresponding to measurement point P4. A port diagram IMG6 corresponding to one port 60 located a short distance from the specific port 60 is superimposed on this first level area L1. In this way, the heatmap MA displays warnings at different levels, divided into areas according to the magnitude of the change in distance. The change in distance at these ports 60 is inferred from the heatmap MA. Note that, as shown in the upper right port diagram IMG6 in Figure 4(b), the location of the measurement point P4 and the location of port 60 may be far apart. Even in that case, the transport vehicle controller 50 calculates the level (concentration, i.e., degree of warning) at each planar location by two-dimensional interpolation based on the measurement information at multiple measurement points P4, P5, P6, etc.

[0040] Since these represent the amount of deflection of the ceiling or track 200, the degree (level) of the warning mentioned above is related to the need for reteaching at port 60. For ports 60 with a high degree of warning, for example, the three ports 60 belonging to the third level area L3 and the second level area L2 in Figure 4(b), a notification is issued on the portable device 400 indicating that reteaching is necessary. Note that the normal area L0 and the four ports included in Figure IMG6 corresponding to measurement points P1, P2, and P3 are shown in colorless or lightest color.

[0041] In the transport vehicle system S, the heat map MA clearly indicates the ports 60 that require (or have a high need for) reteaching. Therefore, the operator performs reteaching on the three ports 60 using a known auto-teaching unit.

[0042] In Figure 4(b), the heatmap MA reflected the track diagram IMG2 corresponding to the track 200 and the multiple port diagrams IMG6 corresponding to the multiple ports 60. The creation and display of the heatmap by the transport controller 50 is not limited to this; for example, as shown in Figure 5(b), a heatmap MB corresponding to a cleanroom (semiconductor factory) may be created and displayed. Such a heatmap MB allows for the estimation of the deflection of the building's ceiling. This allows the overhead transport vehicle 1, which travels along the ceiling, to estimate changes in ceiling height even when there are changes in ceiling height due to seasonal temperature differences or snow accumulation. For example, measurements may be started at the start of factory operation, and the dimensional change in ceiling height from the start of measurement may be recorded. The heatmap MB may then display such time-series dimensional changes. A display mode in which the color changes according to the time series may also be adopted.

[0043] Another application example is graph GA shown in Figure 6(b), where the operator selects an arbitrary measurement point (for example, measurement point P3 in the illustrated example), and the change in ceiling height at that measurement point is displayed on a monthly basis. The unit of the vertical axis in graph GA is "mm (millimeters)". This type of display also allows for the estimation of changes in ceiling height when there are changes in ceiling height due to seasonal temperature differences, snow accumulation, etc.

[0044] According to the carrier system S of the present embodiment, the carrier controller 50 transmits a movement instruction to the ceiling carrier 1, causing the ceiling carrier 1 to travel so as to pass through a predetermined measurement position. Then, the monitoring unit 40 mounted on the ceiling carrier 1 monitors the situation below (around) the running space at the measurement position. As a result, the carrier controller 50 that can monitor the situation below (around) the running space by using the ceiling carrier 1 can notify the administrator (or operator, etc.) of any changes or abnormalities in the ceiling of the building, etc., together with the measurement position, based on the measurement results. Since such measurement results or estimated contents can be notified over the range where the track 200 is provided, this carrier system S contributes to the proper operation of the system.

[0045] According to the measurement of the distance (height) using the ceiling carrier 1, it is possible to monitor the change in the vertical distance between the ceiling or the track 200 and the floor surface F, etc.

[0046] The monitoring unit 40 has a communication unit 43 that can communicate with the ceiling carrier 1 by being held by the ceiling carrier 1. As a result, it is possible to easily provide the ceiling carrier 1 that normally conveys the article 10 with a measurement function (monitoring function) as needed.

[0047] The carrier controller 50 associates and stores the distance measured by the distance sensor 47 with the monitoring time and the monitoring position at which the distance was measured, and reflects the amount of change in the distance at two different monitoring times as the amount of deflection of the ceiling or the track 200 on a planar heat map and displays it on the display unit 401. As a result, it is possible to notify the operator, etc. of the amount of deflection of the ceiling or the track 200. As a result, it is possible to easily make the operator, etc. recognize the transfer unit (port 60, etc.) that requires re-teaching.

[0048] As described above, the embodiments of the present disclosure have been described, but the present invention is not limited to the above embodiments.

[0049] For example, the movement instructions (monitoring instructions) and the collection of measurement data (monitoring data) in the above embodiment are merely examples. In the above embodiment, the control unit 9 of the overhead transport vehicle 1 receives the movement instructions and transmits (reports) the measurement information to the transport vehicle controller 50. In another configuration example shown in Figure 7, the frame unit 2 of the overhead transport vehicle 1 is provided with an external communication interface 21, such as a wireless LAN. The control unit 45 of the monitoring unit 40 transmits the measurement information directly to the portable device 400 via the communication unit 43 and the external communication interface 21. In this case, the communication unit 43 has the function of a web server, and the data server 300 is omitted. The control unit 9 of the overhead transport vehicle 1 is involved in receiving the movement instructions (measurement instructions), but is not involved in transmitting (reporting) the measurement information. According to this configuration example, if a Wi-Fi environment is set up in the factory, the same effects as the above embodiment can be achieved with a simpler configuration.

[0050] Alternatively, as shown in Figure 8(a), a wireless LAN access point 203 may be provided at a predetermined position on the track 200. In this case as well, the control unit 45 of the monitoring unit 40 directly transmits the measurement information to the portable device 400 via the communication unit 43 and the external communication interface 21. At the same time, the control unit 45 of the monitoring unit 40 can transmit the measurement information to the maintenance controller 100 (see Figure 2) via the communication unit 43, the external communication interface 21, and the wireless LAN access point 203. In the configuration example shown in Figure 8(a), unlike the configuration example shown in Figure 7, a data server 300 is provided. Thus, a configuration in which the control unit 45 of the monitoring unit 40 reports the measurement information to a higher-level controller may be adopted. In this case, the maintenance controller 100 may perform the data storage and retrieval that the transport vehicle controller 50 performed with the data server 300 in the above embodiment. In this configuration example, as in the configuration example shown in Figure 7, the control unit 9 of the overhead transport vehicle 1 is involved in receiving movement instructions (measurement instructions) but is not involved in transmitting (reporting) measurement information. Furthermore, the transmission of measurement information and abnormality alerts, which was performed by the transport vehicle controller 50 to the portable device 400 in the above embodiment, may be performed by the maintenance controller 100.

[0051] As a further modification of the configuration example shown in Figure 8(a), the maintenance controller 100 may transmit measurement instructions and receive measurement information on behalf of the transport vehicle controller 50. In this case, the measurement instructions are directly input from the maintenance controller 100 to the monitoring unit 40 via the wireless LAN access point 203 and the external communication interface 21. In the embodiments and various configuration examples described above, the measurement instructions were included in the movement instructions from the transport vehicle controller 50 to the control unit 9 of the overhead transport vehicle 1. However, in this modification, the measurement instructions are separated from the movement instructions of the overhead transport vehicle 1 and directly input to the monitoring unit 40 via the wireless LAN access point 203 and the external communication interface 21. That is, the control unit 9 of the overhead transport vehicle 1 is involved in the driving and movement of the overhead transport vehicle 1, but is not involved in measurement.

[0052] As a further modification of the configuration example shown in Figure 8(a), as shown in Figure 8(b), an optical communication unit 205 may be provided at a predetermined position on the track 200, and an optical communication unit 23 may be provided on the frame unit 2 of the overhead transport vehicle 1. The optical communication unit 205 is provided, for example, so as to hang down from the track 200, and faces the optical communication unit 23 on the side of the travel space of the overhead transport vehicle 1. Similar to the configuration example shown in Figure 8(a), movement instructions including measurement instructions are transmitted to the control unit 9 of the overhead transport vehicle 1. Meanwhile, measurement information is transmitted to the maintenance controller 100 via the optical communication unit 23 and the optical communication unit 205. In this configuration example, an external communication interface 21 and a wireless LAN access point 203 are not provided. Measurement information input to the maintenance controller 100 via the wireless LAN access point 203 is stored in the data server 300. In this configuration example, as in the configuration example shown in Figure 8(a), the control unit 9 of the overhead transport vehicle 1 is involved in receiving movement instructions (measurement instructions) but is not involved in transmitting (reporting) measurement information. Measurement information may be delivered to the portable device 400 from the data server 300, rather than from the overhead transport vehicle 1 or the transport vehicle controller 50.

[0053] In addition to the information communication path of the entire system described above, various modifications can be adopted. For example, in each of the above embodiments, configuration examples, and modifications, the monitoring unit 40 may be held by a configuration different from that of the gripping unit 7 and the gripper 8. The monitoring unit 40 may be detachably attached to the frame unit 2 of the overhead transport vehicle 1, etc. The monitoring device is not limited to a monitoring unit that can be held and transported by the overhead transport vehicle 1 (transport vehicle). The monitoring device may be mounted on the transport vehicle and integrated with it. In that case as well, the transport vehicle can transport goods.

[0054] If the transport vehicle is capable of holding and transporting the item 10 with the monitoring device installed, it may monitor the surrounding conditions in the travel space while transporting the item 10. In that case, the transport vehicle performs both transport and monitoring of the item 10 simultaneously. The transport vehicle controller 50, maintenance controller 100, and transport vehicle control unit 9 execute each control independently so that the control related to the transport of the item 10 (transport control) and the control related to monitoring (monitoring control) do not interfere with each other. In this case, transport control may take precedence over monitoring control.

[0055] In the above embodiments, configuration examples, and modifications, the case in which the distance to the floor surface F is measured by the monitoring device has been described. The monitoring items are not limited to these. For example, as shown in Figure 9, the monitoring unit 40 may measure the distance from the distance sensor 47 to the mounting surface 60a (transfer surface) of the port 60. In this case, for example, a plurality of distance sensors 47 arranged in the direction of travel are provided on the lower surface 40b of the housing. To fine-tune the measurement point (measurement target location), the lateral unit 4, etc., may be fine-tuned to find a point in which the laser beam axis can be stably irradiated. Measurement values ​​from multiple distance sensors 47 may be acquired, or their average value may be calculated. If the measurement value deviates significantly (for example, 100 mm or more, a size not expected from the deflection of the ceiling), it may be determined that an obstacle 70, etc. exists, and a remeasurement may be performed after a period of time. The distance sensors 47 may be periodically calibrated in the master station.

[0056] Furthermore, as shown in Figure 10, if the measurement target is only the mounting surface 60a of the port 60, the teaching unit 80 can be used as the monitoring device instead of the monitoring unit 40. A known unit used for auto-teaching can be used as the teaching unit 80. By performing teaching operations periodically with the teaching unit 80, the same effect as distance measurement by the monitoring unit 40 can be obtained. In this case, the processing equipment in the factory needs to switch to maintenance mode (i.e., a mode in which auto-teaching is possible) via E84 communication or the like in conjunction with the overhead transport vehicle 1. On the other hand, if a dummy port is used as the measurement point, coordination with the processing equipment in the factory is not necessary.

[0057] In this way, the teaching unit 80 mounted on the overhead transport vehicle 1 performs a teaching operation to measure the distance from the floor surface to the transfer surface of the item. As a result, the teaching operation is completed by measuring the distance to the placement surface 60a (transfer surface) and performing the teaching operation and the adjustments made thereafter. Re-teaching is not necessary. Furthermore, by having multiple overhead transport vehicles 1 perform the teaching operation and distance measurement, it is possible to estimate whether the change in distance reflects the amount of deflection of the ceiling or track 200, or whether it is due to mechanical elements specific to each overhead transport vehicle 1.

[0058] Further monitoring items can be provided by the monitoring device. For example, a distance sensor pointed downwards, similar to the distance sensor 47, may detect abnormalities in the floor surface F or obstacles on the floor surface F. A forward distance sensor, attached to the frame unit 2 or the like and pointed forward in the direction of travel of the overhead transport vehicle 1, may detect abnormalities in the walls or other surfaces surrounding the travel space. In a factory adjusted to a nitrogen atmosphere, an oxygen concentration sensor attached to the frame unit 2 or the like may detect a purge gas leak. Alternatively, a downward-facing monitoring camera may detect abnormalities in workers or displacement of ports 60 or stations.

[0059] In the monitoring device and monitoring items related to the modified examples described above, the overhead transport vehicle 1 may or may not stop at a predetermined position. Depending on the monitoring item, measurements or inspections may be performed while the overhead transport vehicle 1 is in motion.

[0060] Even when the modified monitoring device and monitoring items are used, the transport vehicle controller 50 stores the measured values ​​acquired by the monitoring device, linking them to the monitoring location where the measured values ​​were acquired. The transport vehicle controller 50 displays planar map information reflecting the measured values ​​on its display unit. In this case, the measured values ​​as monitoring results can be provided to the operator, etc., as map information. As a result, appropriate maintenance can be performed. Various heat maps and map information may be displayed on the display unit 53 of the transport vehicle controller 50 instead of the display unit 401 of the portable device 400.

[0061] In a rail-based transport vehicle system, the transport vehicles are not limited to overhead transport vehicles; other types of transport vehicles may also be used, such as ground-based transport vehicles (rail-based trolleys) that travel on tracks installed on the ground. Monitoring devices mounted on these other types of transport vehicles can monitor the surrounding space. Examples of monitoring items include undulation of the floor surface F or steps on the floor surface F. In addition, whether it is an overhead transport vehicle or a ground-based transport vehicle, other monitoring items may include temperature, humidity, and the concentration of some type of gas. The controller can store these monitoring results and their associated monitoring locations, and the data can be reflected and displayed in a heat map similar to that in the above embodiment.

[0062] In the transport vehicle system S, the items to be transported are not limited to FOUPs, but may be any items other than FOUPs that can be transported by the overhead transport vehicle 1 and the floor transport vehicle 30. The items may also be reticle pods that house reticles, etc.

[0063] 1...Overhead transport vehicle (transport vehicle), 40...Monitoring unit (monitoring device), 43...Communication unit, 45...Control unit, 47...Distance sensor, 50...Transport vehicle controller (controller), 60...Port, 60a...Placement surface (transfer surface for goods), 80...Teaching unit (monitoring device), 100...Maintenance controller, 200...Track, F...Floor surface, S...Transport vehicle system (rail transport vehicle system).

Claims

1. A rail-mounted transport vehicle system for transporting goods by a transport vehicle that travels along a track, comprising: a monitoring device mounted on the transport vehicle for monitoring the conditions around the transport vehicle's travel space; and a controller that transmits a monitoring instruction to the transport vehicle to perform monitoring by the monitoring device, and stores the monitoring results and monitoring location in association.

2. The railed transport vehicle system according to claim 1, wherein the rail is provided on the ceiling of the building, the transport vehicle is an overhead transport vehicle, and the monitoring device has a distance sensor that measures the distance to the floor or to the transfer surface of the article installed on the floor.

3. The rail-mounted transport vehicle system according to claim 1 or 2, wherein the monitoring device is a monitoring unit that can be held and transported by the transport vehicle, and the monitoring unit has a communication unit that enables information communication with the transport vehicle when held by the transport vehicle.

4. The tracked transport vehicle system according to claim 1 or 2, wherein the controller stores the measured values ​​acquired by the monitoring device in association with the monitoring location where the measured values ​​were acquired, and displays planar map information reflecting the measured values ​​on the display unit.

5. The tracked transport vehicle system according to claim 2, wherein the controller stores the distance measured by the distance sensor of the monitoring device, associating the distance with the monitoring time and monitoring position at which the distance was measured, and displays the amount of change in the distance at two different monitoring times as the amount of deflection of the ceiling or the track on a planar heat map.

6. The tracked transport vehicle system according to claim 1, wherein the track is provided on the ceiling of the building, the transport vehicle is an overhead transport vehicle, and the overhead transport vehicle is equipped with a teaching unit as a monitoring device, and the distance to the transfer surface of the article installed on the floor is measured by the teaching unit performing a teaching operation.

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