Multi-functional processing apparatus for fine metal mask, and processing method therefor

Abstract

A multi-functional processing apparatus for a fine metal mask, and a processing method therefor. The multi-functional processing apparatus comprises an integrated processing head and a processing platform. The integrated processing head comprises a platform cleaning device, a laser cutting device, a laser repair device, a measurement device, and a grinding device. A mounting base of the machining platform is provided with: an ESC electrostatic automatic tensioning and adsorption platform, which cooperates with the laser cutting device to cut lugs in waste areas at two ends of the FMM; a porous ceramic suspended automatic tensioning and adsorption platform, which is mounted on the ESC electrostatic automatic tensioning and adsorption platform and cooperates with the measurement device and the grinding device to measure and grind a protrusion on a surface of the FMM; and a large-format ESC electrostatic adsorption platform, which cooperates with the platform cleaning device and the laser repair device to repair the FMM. The integrated processing head can realize multiple repair functions, and the processing platform is a multifunctional integrated processing platform.

Description

A multi-functional processing equipment and method for fine metal masks Technical Field

[0001] This invention relates to the field of photomask processing technology, and in particular to a multi-functional processing equipment and method for fine metal photomasks. Background Technology

[0002] FMM stands for Fine Metal Mask, and its main materials are metal or metal and resin.

[0003] Currently, the mainstream method for mass production of AMOLED panels is vacuum evaporation, which requires the use of FMM (Film Mesh evaporation) technology. During OLED evaporation, the FMM is attached tightly to the LTPS backplane, and the holes on the FMM are aligned with the pixel areas where the organic layer needs to be deposited, thus allowing the organic thin film to be deposited on the designated pixel areas. FMM is a key component in OLED manufacturing.

[0004] Currently, the main production method of FMM is to thin and drill holes in the raw material through etching. However, the yield rate of etching process is relatively low, and it will produce defects such as leaks, residual adhesive on the surface, and surface bumps, which affect the use of the product. Since fine photomasks are usually expensive, in order to improve the production yield, a repair process is often added in the later process. However, the current production repair process has problems such as low integration. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a multi-functional processing equipment and processing method for fine metal masks that integrates laser cutting and repair, grinding, detection and measurement, positioning and platform cleaning, and can repair all common defects, in order to solve the problems existing in the prior art mentioned above.

[0006] The technical solution adopted by the present invention to solve its technical problem is: a multi-functional processing equipment for fine metal masks, including a comprehensive processing head and a processing platform, wherein the comprehensive processing head is mounted on a moving device and the comprehensive processing head is mounted above the processing platform;

[0007] The integrated processing head includes a platform cleaning device, a laser cutting device, a laser repair device, a measuring device, and a grinding device;

[0008] The processing platform includes a mounting base on which an ESC electrostatic automatic tensioning and adsorption platform is installed to receive the FMM board, tension and suspend the FMM board, and cooperate with the laser cutting device to cut the waste material at both ends of the FMM board.

[0009] The porous ceramic suspended automatic tensioning adsorption platform is installed on the ESC electrostatic automatic tensioning adsorption platform and is offset vertically from the ESC electrostatic automatic tensioning adsorption platform. It is used to support the FMM plate, tension and suspend the FMM plate, and cooperate with the measuring device and grinding device to detect and grind the protrusions on the surface of the FMM plate.

[0010] In addition, a large-format ESC electrostatic adsorption platform, in conjunction with a platform cleaning device and a laser repair device, is used to receive FMM boards and repair them.

[0011] The backlight assembly is placed on the magnetic float of the electrostatic adsorption platform in the large-format ESC electrostatic adsorption platform to illuminate the entire electrostatic adsorption glass, thereby allowing observation of the shape of the etched holes on the FMM plate.

[0012] Furthermore, the ESC electrostatic automatic tensioning adsorption platform includes symmetrically arranged support column assemblies. The two support column assemblies are installed along the length of the mounting base. Each support column assembly is equipped with a magnetic levitation base plate. Each magnetic levitation base plate is equipped with a first magnetic levitation stator. Both ends of the first magnetic levitation stator are equipped with cutting electrostatic adsorption magnetic levitation crossbeams. Both ends of the bottom surface of each cutting electrostatic adsorption magnetic levitation crossbeam are equipped with a second magnetic levitation stator that cooperates with the first magnetic levitation stator. The two cutting electrostatic adsorption magnetic levitation crossbeams slide relative to each other along the first magnetic levitation stator.

[0013] Furthermore, the porous ceramic suspended automatic tensioning adsorption platform includes a third magnetic levitation stator and a ground porous ceramic crossbeam. The third magnetic levitation stator is installed on the magnetic levitation substrate in the ESC electrostatic automatic tensioning adsorption platform. Ground porous ceramic crossbeams are installed at both ends of the magnetic levitation substrate. A fourth magnetic levitation stator that cooperates with the third magnetic levitation stator is installed at both ends of each ground porous ceramic crossbeam. The two ground porous ceramic crossbeams slide relative to each other along the third magnetic levitation stator. The two third magnetic levitation stators and the two ground porous ceramic crossbeams form a working area.

[0014] Furthermore, the vertical cross-sectional shape of the magnetic levitation substrate is stepped, divided into a first mounting substrate and a second mounting substrate. The first magnetic levitation stator is mounted on the first mounting substrate, and the third magnetic levitation stator in the porous ceramic suspended automatic tensioning adsorption platform is mounted on the second mounting substrate.

[0015] Furthermore, the distance L between the bottom surface of the cut electrostatic adsorption magnetic levitation beam and the upper surface of the second mounting substrate in the magnetic levitation substrate in the ESC electrostatic automatic tensioning adsorption platform is greater than the sum of the heights H of the third magnetic levitation stator, the fourth magnetic levitation stator, and the ground porous ceramic beam in the porous ceramic suspended automatic tensioning adsorption platform.

[0016] Furthermore, the large-format ESC electrostatic adsorption platform includes an electrostatic adsorption platform magnetic float mount and a glass electrostatic platform. Several magnetic springs and electric push rods are installed on both sides of the electrostatic adsorption platform magnetic float mount and the glass electrostatic platform along the length direction. Electrostatic adsorption glass is installed inside the glass electrostatic platform. Electrostatic adsorption platform magnetic floats are installed on the electrostatic adsorption platform magnetic float mount. The width of the electrostatic adsorption platform magnetic float is smaller than the length and width of the glass electrostatic platform. The backlight assembly is placed on the upper plate of the electrostatic adsorption platform magnetic float and is magnetically levitated and displaced on the electrostatic adsorption platform magnetic float.

[0017] Furthermore, a mounting plate is installed on the mounting base, and a slide rail assembly is installed between the mounting plate and the magnetic float mounting base of the electrostatic adsorption platform. An X-axis motor assembly is installed on the bottom surface of the magnetic float mounting base of the electrostatic adsorption platform to drive the large-format ESC electrostatic adsorption platform to move along the slide rail assembly.

[0018] Furthermore, a product cleaning mechanism is installed on one side of the platform cleaning device.

[0019] Furthermore, a visual positioning device is installed on one side of the laser cutting device, which performs visual positioning of the positioning points on the FMM plate.

[0020] Furthermore, the mounting base is also equipped with a plazma cleaning device for cleaning laser residues on the electrostatically adsorbed glass of the large-format ESC electrostatic adsorption platform.

[0021] A processing method for a multi-functional processing device for fine metal masks, comprising the multi-functional processing device for fine metal masks as described above, includes the following steps:

[0022] Step 1: The platform cleaning device cleans the surface of the electrostatic adsorption glass, removing residual dust. Some dust can also be removed by the product cleaning mechanism. The product is transported to the large-format ESC electrostatic adsorption platform, and the vision positioning device is activated to visually locate the positioning points on the product.

[0023] Step 2:

[0024] a. Cutting process:

[0025] In the ESC electrostatic automatic tensioning adsorption platform, the cutting electrostatic adsorption magnetic levitation beam slides along the magnetic levitation substrate to receive the product, and tensions and suspends the product. Then, the laser cutting device is started to cut the waste material at both ends of the product.

[0026] b. Grinding process:

[0027] In the porous ceramic suspended automatic tensioning adsorption platform, the grinding porous ceramic crossbeam slides along the magnetic levitation substrate to receive the product, and tensions and suspends the product. Then, the measuring device detects the thickness and protrusion of the product. Finally, the grinding device grinds the protrusion and thickness of the product to meet the process requirements.

[0028] c. Repair process:

[0029] The glass electrostatic platform is pushed upward by an electric push rod and a magnetic spring until it is level with or slightly higher than the ESC electrostatic automatic tensioning adsorption platform. The product is adsorbed on the glass electrostatic platform, and the backlight component floats and moves on the magnetic float of the electrostatic adsorption platform, thereby illuminating the product placed on the glass electrostatic platform. The etched holes on the product are detected. Then, the laser repair device is activated to repair any leaks, holes that are not drilled through, irregular holes, or holes that are not etched properly.

[0030] Step 3: After cutting and / or grinding and / or repair, the product is conveyed to the next process. The plazma cleaning device cleans the laser residue generated on the electrostatically adsorbed glass to prevent interference with the processing of the next product, and so on.

[0031] The beneficial effects of this invention are as follows: This invention includes an integrated processing head and a processing platform; the integrated processing head can realize repair functions such as laser cutting, laser drilling, laser cleaning, physical grinding, 3D measurement, positioning detection, and cleaning of the processing platform;

[0032] The processing platform includes a porous ceramic suspended automatic tensioning adsorption platform, an ESC electrostatic automatic tensioning adsorption platform, a large-format ESC electrostatic adsorption platform, a backlight source, and plazma cleaning components. The processing platform is combined with guide rail components to automatically adapt to matching repair processes. It is a multi-functional comprehensive processing platform with tensioning function, ESC adsorption, and compatibility with all current specifications, models, and sizes. Attached Figure Description

[0033] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0034] Figure 1 is a schematic diagram of the structure of the present invention.

[0035] Figure 2 is a schematic diagram of the processing platform of the present invention.

[0036] Figure 3 is an exploded view of the processing platform of the present invention.

[0037] Figure 4 is a partial enlarged view of point A in Figure 3 of this invention.

[0038] Figure 5 is an exploded view of Figure 3 of the present invention from another direction.

[0039] Figure 6 is a schematic diagram of the structure of the large-format ESC electrostatic adsorption platform of the present invention.

[0040] In the diagram: 1. Integrated processing head, 10. Platform cleaning device, 11. Laser cutting device, 12. Laser repair device, 13. Measuring device, 14. Grinding device, 15. Product cleaning mechanism, 16. Vision positioning device, 2. Processing platform, 20. Mounting base, 21. ESC electrostatic automatic tensioning adsorption platform, 211. Support column assembly, 212. Magnetic levitation substrate, 213. Cutting electrostatic adsorption magnetic levitation crossbeam, 214. First magnetic levitation stator, 215. Second magnetic levitation stator, 22. Porous ceramic suspension 221. Automatic tensioning adsorption platform; 222. Third magnetic levitation stator; 223. Fourth magnetic levitation stator; 224. Grinded porous ceramic crossbeam; 23. Large-format ESC electrostatic adsorption platform; 231. Electrostatic adsorption platform magnetic float mount; 232. Electrostatic adsorption platform magnetic float; 233. Glass electrostatic platform; 234. Magnetic spring; 235. Electric push rod; 236. Electrostatic adsorption glass; 237. Slide rail assembly; 238. X-axis motor assembly; 24. Backlight assembly; 25. Plazma cleaning device. Detailed Implementation

[0041] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0042] As shown in Figures 1 to 6, a multi-functional processing equipment for fine metal masks includes a processing head 1 and a processing platform 2. The processing head 1 is mounted on a moving device and is mounted above the processing platform 2.

[0043] During the production process, one, several, or all of the devices in the integrated processing head 1 can be selected and used according to the actual situation of each FMM board. The integrated processing head 1 includes a platform cleaning device 10 and an electrostatic adsorption glass 236 of a large-format ESC electrostatic adsorption platform 23. After processing, there will be some dust residue, which is used to clean the electrostatic adsorption glass 236.

[0044] A product cleaning mechanism 15 is installed on one side of the platform cleaning device 10 to stick and electrostatically adsorb dust on the glass platform.

[0045] Laser cutting device 11 is used to remove the waste material generated at both ends of the product after the previous process;

[0046] A vision positioning device 16 is installed on one side of the laser cutting device 11. The vision positioning device 16 performs visual positioning on the positioning points on the FMM plate to determine the position of the FMM plate on the large-format ESC electrostatic adsorption platform 23. The positioning points of the same product after loading are within a certain range, and the vision positioning device 16 can quickly complete the search and positioning.

[0047] The laser repair device 12 is used to repair holes, holes that are not drilled through, irregular holes, or holes that are not etched properly on the FMM plate. It can also be used for detection and positioning functions. The laser repair device 12 integrates CCD detection and matches multiple sets of objective lenses with different magnifications to detect and observe specific processing effects.

[0048] The measuring device 13 is used to detect the protrusions. The thickness of the raw material is relatively thick, and the thickness of the FMM version needs to be controlled within 20um. Some products need to be thinned by etching according to processing requirements. At the same time, due to the etching process, a few micrometers of protrusions will be generated, resulting in slight differences in flatness. The measuring device 13 is used to detect the protrusions, detect the contour and height of the protrusions, thereby establishing coordinates and transmitting the scanning information to the host computer.

[0049] In addition, the grinding device 14 is used to grind the protrusions and thicknesses detected by the measuring device 13. The grinding is physical grinding and is performed by grinding through a grinding belt.

[0050] In addition, dust collection devices are installed below both the laser cutting device 11 and the laser repair device 12.

[0051] The processing platform 2 includes a mounting base 20. Three platforms mounted on the mounting base 20 are equipped with lifting functions. The three working platforms can be raised and lowered as needed. An ESC electrostatic automatic tensioning adsorption platform 21 is mounted on the mounting base 20 to support the FMM board, tension and suspend the FMM board. It works in conjunction with the laser cutting device 11 to cut the waste material at both ends of the FMM board. It is a full-stroke moving platform that is compatible with products of various specifications and lengths. It also has a tensioning function. There is no need to use a force sensor. The tensioning force of the ESC electrostatic automatic tensioning adsorption platform 21 is controlled by comparing the current feedback with the preset current.

[0052] The porous ceramic suspended automatic tensioning adsorption platform 22 is installed on the ESC electrostatic automatic tensioning adsorption platform 21. The movement between the two platforms, the porous ceramic suspended automatic tensioning adsorption platform 22 and the ESC electrostatic automatic tensioning adsorption platform 21, is set relatively independently and is staggered vertically with the ESC electrostatic automatic tensioning adsorption platform 21. It is used to support the FMM plate, tension and suspend the FMM plate. In conjunction with the measuring device 13 and the grinding device 14, it detects and grinds the protrusions on the surface of the FMM plate.

[0053] In addition, the positions of the porous ceramic suspended automatic tensioning adsorption platform 22 and the ESC electrostatic automatic tensioning adsorption platform 21 are interchangeable and can be set according to customer needs.

[0054] In addition, the large-format ESC electrostatic adsorption platform 23, together with the platform cleaning device 10 and the laser repair device 12, is used to receive the FMM plate and repair the FMM plate. The diameter of the etched holes on the FMM plate is about 10um. Therefore, a flat and stable operating space is required when repairing. The entire FMM plate needs to be adsorbed and then the etched holes are processed on this basis. The electrostatic adsorption glass 236 has a very good flatness.

[0055] As shown in Figure 2, the height of the ESC electrostatic automatic tensioning adsorption platform 21 represents the working position of each platform during operation. The ESC electrostatic automatic tensioning adsorption platform 21 moves to the two ends to avoid other working platforms during operation. In the figure, the position of the porous ceramic suspended automatic tensioning adsorption platform 22 is the avoidance layer of the porous ceramic suspended automatic tensioning adsorption platform 22. In the figure, the position of the large-format ESC electrostatic adsorption platform 23 is the avoidance layer of the large-format ESC electrostatic adsorption platform 23.

[0056] The backlight assembly 24 is placed on the electrostatic adsorption platform magnetic float 232 in the large-format ESC electrostatic adsorption platform 23 to illuminate the entire electrostatic adsorption glass 236, thereby allowing observation of the shape of the etched holes on the FMM plate. At the same time, the backlight assembly 24 adopts the principle of magnetic levitation and has a certain tilt angle. The width of the electrostatic adsorption platform magnetic float 232 is smaller than the width of the glass electrostatic platform 233. Magnetic levitation has a characteristic of being six degrees of freedom, which can make slight tilting movements. This can complete the backlight illumination of the entire glass electrostatic platform 233, that is, the edges of the glass electrostatic platform 233 can also be illuminated, reducing the existence of dead corners. It can be moved to the required position for illumination as needed.

[0057] The mounting base 20 is also equipped with a plazma cleaning device 25, an ultrasonic cleaning head, for cleaning laser residue on the electrostatic adsorption glass 236 in the large-format ESC electrostatic adsorption platform 23. This device is used to clean the laser residue generated on the electrostatic adsorption glass 236 after processing, so as to prevent interference with the processing of the next product.

[0058] As shown in Figures 2 to 4, the ESC electrostatic automatic tensioning adsorption platform 21 includes symmetrically arranged support column assemblies 211. The two support column assemblies 211 are installed along the length direction of the mounting base 20. Each support column assembly 211 is equipped with a magnetic levitation substrate 212. Each magnetic levitation substrate 212 is equipped with a first magnetic levitation stator 214. Both ends of the first magnetic levitation stator 214 are equipped with cutting electrostatic adsorption magnetic levitation crossbeams 213. Both ends of the bottom surface of each cutting electrostatic adsorption magnetic levitation crossbeam 213 are equipped with a second magnetic levitation stator 215 that cooperates with the first magnetic levitation stator 214. The two cutting electrostatic adsorption magnetic levitation crossbeams 213 slide relative to each other along the first magnetic levitation stator 214.

[0059] As shown in Figures 2 to 4, the porous ceramic suspended automatic tensioning adsorption platform 22 includes a third magnetic levitation stator 221 and a ground porous ceramic crossbeam 223. The third magnetic levitation stator 221 is installed on the magnetic levitation substrate 212 in the ESC electrostatic automatic tensioning adsorption platform 21. Ground porous ceramic crossbeams 223 are installed at both ends of the magnetic levitation substrate 212. A fourth magnetic levitation stator 222 that cooperates with the third magnetic levitation stator 221 is installed at both ends of each ground porous ceramic crossbeam 223. The two ground porous ceramic crossbeams 223 slide relative to each other along the third magnetic levitation stator 221. The two third magnetic levitation stators 221 and the two ground porous ceramic crossbeams 223 form a working area, and the large-format ESC electrostatic adsorption platform 23 is located in this working area.

[0060] As shown in Figure 2, the vertical cross-sectional shape of the magnetic levitation substrate 212 is stepped, and it is divided into a first mounting substrate and a second mounting substrate. The first magnetic levitation stator 214 is mounted on the first mounting substrate, and the third magnetic levitation stator 221 in the porous ceramic suspended automatic tensioning adsorption platform 22 is mounted on the second mounting substrate.

[0061] As shown in Figure 2, the distance L between the bottom surface of the cutting electrostatic adsorption magnetic levitation beam 213 in the ESC electrostatic automatic tensioning adsorption platform 21 and the upper surface of the second mounting substrate in the magnetic levitation substrate 212 is greater than the sum of the heights H of the third magnetic levitation stator 221, the fourth magnetic levitation stator 222 and the grinding porous ceramic beam 223 in the porous ceramic suspended automatic tensioning adsorption platform 22. In other words, there is a certain gap between the cutting electrostatic adsorption magnetic levitation beam 213 and the grinding porous ceramic beam 223, and they are relatively independent of each other.

[0062] As shown in Figure 6, the large-format ESC electrostatic adsorption platform 23 includes an electrostatic adsorption platform magnetic float mounting base 231 and a glass electrostatic platform 233. Several magnetic springs 234 and electric push rods 235 are installed on both sides of the electrostatic adsorption platform magnetic float mounting base 231 and the glass electrostatic platform 233 along the length direction. The extended end of the electric push rod 235 faces the glass electrostatic platform 233. The electric push rod 235 is suitable for a wider platform, balancing the weight of the electrostatic adsorption platform. At the same time, the installation of multiple magnetic springs 234 also improves the flatness of the glass electrostatic platform 233. The magnetic springs 234 are unpowered and rely on magnetic force. In this way, the electric push rod 235 can complete the lifting and lowering without a large load. The structure is simple and miniaturized.

[0063] Among them, the height of the large-format ESC electrostatic adsorption platform 23 is level with or slightly higher than the height of the cutting electrostatic adsorption magnetic levitation beam 213 in the ESC electrostatic automatic tensioning adsorption platform 21, which effectively prevents the grinding device 14 from hitting the cutting electrostatic adsorption magnetic levitation beam 213 during the grinding process.

[0064] When performing other processing, the large-format ESC electrostatic adsorption platform 23 descends without affecting other processes (repair and cutting).

[0065] An electrostatic adsorption glass 236 is installed inside the glass electrostatic platform 233. An electrostatic adsorption platform magnetic float 232 is installed on the electrostatic adsorption platform magnetic float mounting base 231. The width of the electrostatic adsorption platform magnetic float 232 is smaller than the length and width of the glass electrostatic platform 233. The backlight component 24 is placed on the upper plate surface of the electrostatic adsorption platform magnetic float 232 and is magnetically levitated and displaced on the electrostatic adsorption platform magnetic float 232.

[0066] A mounting plate is installed on the mounting base 20. A slide rail assembly 237 is installed between the mounting plate and the magnetic float mounting base 231 of the electrostatic adsorption platform. An X-axis motor assembly 238 is installed on the bottom surface of the magnetic float mounting base 231 of the electrostatic adsorption platform to drive the large-format ESC electrostatic adsorption platform 23 to move along the slide rail assembly 237, thereby adapting to products of various specifications.

[0067] A processing method for a multi-functional processing device for fine metal masks, comprising the multi-functional processing device for fine metal masks as described above, includes the following steps:

[0068] Step 1: The platform cleaning device 10 cleans the surface of the electrostatic adsorption glass 236, removing residual dust from the surface of the electrostatic adsorption glass 236. At the same time, some dust can also be removed by the product cleaning mechanism 15. The product is transported to the large-format ESC electrostatic adsorption platform 23, and the visual positioning device 16 is activated to perform visual positioning of the positioning points on the product.

[0069] Step 2:

[0070] a. Cutting process:

[0071] In the ESC electrostatic automatic tensioning adsorption platform 21, the cutting electrostatic adsorption magnetic levitation beam 213 slides along the magnetic levitation substrate 212 to receive the product, and tensions and suspends the product. Then, the laser cutting device 11 is started to cut the waste material at both ends of the product.

[0072] b. Grinding process:

[0073] In the porous ceramic suspended automatic tensioning adsorption platform, the grinding porous ceramic crossbeam 223 slides along the magnetic levitation substrate 212 to receive the product and tension and suspend it. Then, the measuring device 13 detects the thickness and protrusion of the product. Finally, the grinding device 14 grinds the protrusion and thickness of the product to meet the process requirements.

[0074] c. Repair process:

[0075] The glass electrostatic platform 233 is pushed upward by the electric push rod 235 and the magnetic spring 234 until it is flush with or slightly higher than the ESC electrostatic automatic tensioning adsorption platform 21. The product is adsorbed on the glass electrostatic platform 233. The backlight component 24 floats and moves on the magnetic float 232 of the electrostatic adsorption platform, thereby illuminating the product placed on the glass electrostatic platform 233. The etched holes on the product are detected. Then, the laser repair device 12 is activated to repair the leaks, holes that are not drilled, irregular holes, or holes that are not etched properly on the product.

[0076] Step 3: After cutting and / or grinding and / or repair, the product is conveyed to the next process. The plazma cleaning device 25 cleans the laser residue generated on the electrostatic adsorption glass 236 to prevent interference with the processing of the next product, and so on.

[0077] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A multi-functional processing equipment for precision metal photomasks, characterized in that: It includes a comprehensive processing head (1) and a processing platform (2), wherein the comprehensive processing head (1) is mounted on a moving device and is mounted above the processing platform (2); The integrated processing head (1) includes a platform cleaning device (10), a laser cutting device (11), a laser repair device (12), a measuring device (13), and a grinding device (14); The processing platform (2) includes a mounting base (20), on which are mounted a... The ESC electrostatic automatic tensioning adsorption platform (21) is used to receive the FMM board, tension and suspend the FMM board, and cooperate with the laser cutting device (11) to cut the waste material at both ends of the FMM board. The porous ceramic suspended automatic tensioning adsorption platform (22) is installed on the ESC electrostatic automatic tensioning adsorption platform (21) and is staggered with the ESC electrostatic automatic tensioning adsorption platform (21) to support the FMM plate and tension and suspend the FMM plate. It works in conjunction with the measuring device (13) and the grinding device (14) to detect and grind the protrusions on the surface of the FMM plate. In addition, a large-format ESC electrostatic adsorption platform (23), in conjunction with a platform cleaning device (10) and a laser repair device (12), is used to receive FMM plates and repair FMM plates; The backlight assembly (24) is placed on the magnetic float (232) of the electrostatic adsorption platform in the large-format ESC electrostatic adsorption platform (23) to illuminate the entire electrostatic adsorption glass (236) and observe the shape of the etched holes on the FMM plate.

2. The multi-functional processing equipment for precision metal masks according to claim 1, characterized in that: The ESC electrostatic automatic tensioning adsorption platform (21) includes symmetrically arranged support column assemblies (211). The two support column assemblies (211) are installed along the length direction of the mounting base (20). Each support column assembly (211) is equipped with a magnetic levitation substrate (212). Each magnetic levitation substrate (212) is equipped with a first magnetic levitation stator (214). Both ends of the first magnetic levitation stator (214) are equipped with cutting electrostatic adsorption magnetic levitation crossbeams (213). Both ends of the bottom surface of each cutting electrostatic adsorption magnetic levitation crossbeam (213) are equipped with a second magnetic levitation stator (215) that cooperates with the first magnetic levitation stator (214). The two cutting electrostatic adsorption magnetic levitation crossbeams (213) slide relative to each other along the first magnetic levitation stator (214).

3. The multi-functional processing equipment for precision metal masks according to claim 1, characterized in that: The porous ceramic suspended automatic tensioning adsorption platform (22) includes a third magnetic levitation stator (221) and a ground porous ceramic crossbeam (223). The third magnetic levitation stator (221) is installed on the magnetic levitation substrate (212) in the ESC electrostatic automatic tensioning adsorption platform (21). Ground porous ceramic crossbeams (223) are installed at both ends of the magnetic levitation substrate (212). A fourth magnetic levitation stator (222) that cooperates with the third magnetic levitation stator (221) is installed at both ends of each ground porous ceramic crossbeam (223). The two ground porous ceramic crossbeams (223) slide relative to each other along the third magnetic levitation stator (221). The two third magnetic levitation stators (221) and the two ground porous ceramic crossbeams (223) form a working area.

4. The multi-functional processing equipment for precision metal masks according to claim 2, characterized in that: The vertical cross-sectional shape of the magnetic levitation substrate (212) is stepped, and it is divided into a first mounting substrate and a second mounting substrate. The first magnetic levitation stator (214) is mounted on the first mounting substrate, and the third magnetic levitation stator (221) in the porous ceramic suspended automatic tensioning adsorption platform (22) is mounted on the second mounting substrate.

5. The multi-functional processing equipment for precision metal photomasks according to claim 1, characterized in that: The large-format ESC electrostatic adsorption platform (23) includes an electrostatic adsorption platform magnetic float mount (231) and a glass electrostatic platform (233). Several magnetic springs (234) and electric push rods (235) are installed on both sides of the electrostatic adsorption platform magnetic float mount (231) and the glass electrostatic platform (233) along the length direction. An electrostatic adsorption glass (236) is installed inside the glass electrostatic platform (233). An electrostatic adsorption platform magnetic float (232) is installed on the electrostatic adsorption platform magnetic float mount (231). The width of the electrostatic adsorption platform magnetic float (232) is smaller than the length and width of the glass electrostatic platform (233). The backlight assembly (24) is placed on the upper plate of the electrostatic adsorption platform magnetic float (232) and is magnetically levitated and displaced on the electrostatic adsorption platform magnetic float (232).

6. The multi-functional processing equipment for precision metal photomasks according to claim 5, characterized in that: A mounting plate is mounted on the mounting base (20), and a slide rail assembly (237) is installed between the mounting plate and the magnetic float mounting base (231) of the electrostatic adsorption platform. An X-axis motor assembly (238) is mounted on the bottom surface of the magnetic float mounting base (231) of the electrostatic adsorption platform to drive the large-format ESC electrostatic adsorption platform (23) to move along the slide rail assembly (237).

7. The multi-functional processing equipment for precision metal masks according to claim 1, characterized in that: A product cleaning mechanism (15) is installed on one side of the platform cleaning device (10).

8. The multi-functional processing equipment for precision metal masks according to claim 1, characterized in that: A visual positioning device (16) is installed on one side of the laser cutting device (11), and the visual positioning device (16) performs visual positioning on the positioning point on the FMM plate.

9. The multi-functional processing equipment for precision metal photomasks according to claim 1, characterized in that: The mounting base (20) is also equipped with a plazma cleaning device (25) for cleaning laser residues on the electrostatic adsorption glass (236) in the large-format ESC electrostatic adsorption platform (23).

10. A processing method for a multi-functional processing equipment for fine metal masks, comprising the multi-functional processing equipment for fine metal masks as described in any one of claims 1 to 9, characterized in that: It has the following steps: Step 1: The platform cleaning device (10) cleans the surface of the electrostatic adsorption glass (236) and removes the residual dust on the surface of the electrostatic adsorption glass (236). At the same time, some dust is removed by the product cleaning mechanism (15). The product is transported to the large-format ESC electrostatic adsorption platform (23). The visual positioning device (16) is activated to perform visual positioning of the positioning points on the product. Step 2: a. Cutting process: In the ESC electrostatic automatic tensioning adsorption platform (21), the cutting electrostatic adsorption magnetic levitation beam (213) slides along the magnetic levitation substrate (212) to receive the product and tension and suspend the product. Then, the laser cutting device (11) is started to cut the waste material at both ends of the product. b. Grinding process: In the porous ceramic suspended automatic tensioning adsorption platform, the grinding porous ceramic crossbeam (223) slides along the magnetic levitation substrate (212) to receive the product and tension and suspend it. Then, the measuring device (13) detects the thickness and protrusion of the product. Finally, the grinding device (14) grinds the protrusion and thickness of the product to meet the process requirements. c. Repair process: The glass electrostatic platform (233) is pushed upward by an electric push rod (235) and a magnetic spring (234) until it is level with or slightly higher than the ESC electrostatic automatic tension adsorption platform (21). The product is adsorbed on the glass electrostatic platform (233). The backlight assembly (24) floats and moves on the magnetic float (232) of the electrostatic adsorption platform, thereby illuminating the product placed on the glass electrostatic platform (233). The perforations on the product are detected. Then, the laser repair device (12) is activated to repair the leaks, holes that are not drilled, irregular holes, or holes that are not etched properly on the product. Step 3: After cutting and / or grinding and / or repair, the product is conveyed to the next process. The plazma cleaning device (25) cleans the laser residue generated on the electrostatic adsorption glass (236) to prevent interference with the processing of the next product, and so on.

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