Regenerative thermal oxidation of fluorinated compounds

Abstract

A regenerative thermal oxidizer (RTOx) can destroy fluorinated compounds in a feed gas. The RTOx includes a combustion chamber, a burner, and a heat recovery packing bed. The burner is coupled to the combustion chamber. The burner is configured to receive the feed gas, a fuel gas, and an oxidizing gas. The fuel gas includes methane. The oxidizing gas includes oxygen. The burner is configured to combust the feed gas and the fuel gas in the presence of the oxidizing gas to produce heat an exhaust gas that includes a fluoride-containing byproduct. The heat recovery packing bed is disposed within the combustion chamber. The heat recovery packing bed is made of a ceramic material that includes aluminum oxide that is configured to absorb at least a portion of the heat produced by the combustion of the feed gas and the fuel gas.

Description

Attorney Docket No.: FP0040-W001REGENERATIVE THERMAL OXIDATION OF FLUORINATED COMPOUNDS CROSS REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of priority of U.S. Provisional Application No. 63 / 707,822 filed October 16, 2024, the disclosures of which are incorporated herein by reference in its entirety.FIELD OF THE INVENTION

[0002] This disclosure relates to oxidation of gases, e.g., harmful greenhouse gases, such as fluorinated organic compounds (FOCs).BACKGROUND OF THE INVENTION

[0003] Volatile organic compounds (VOCs) are organic compounds that have a high vapor pressure at room temperature. High vapor pressure correlates with a low boiling point, which relates to the number of a sample’s molecules in the surrounding air, a trait known as volatility. VOCs can be generated by anthropogenic processes including domestic and industrial processes. The increase of worldwide industrial activities has resulted in extensive distribution of VOCs in the environment. VOCs can adversely affect the environment and human health. For example, certain VOCs have been identified as greenhouse gases, which are able to absorb radiated energy from Earth and their increase in concentrations in the atmosphere has been correlated with global warming. Examples of harmful VOCs identified as greenhouse gases include FOCs, which are compounds that include carbon atom(s) and fluorine atom(s).SUMMARY OF THE INVENTION

[0004] This disclosure describes technologies relating to regenerative thermal oxidation of gases, e.g., harmful greenhouse gases, such as FOCs. The subject matter described in this disclosure can be implemented in particular implementations, so as to realize one or more of the following advantages. The technology described operates at elevated temperatures (e.g., greater than 1 ,000 degrees Celsius (°C)) for effective destruction of harmful FOCs by converting them into less harmful byproducts, such asAttorney Docket No.: FP0040-W001 carbon dioxide and water vapor, through oxidation. The technology described injects feed gases containing fluorinated compounds (e.g., FOCs) directly into the burner of the regenerative thermal oxidizer, allowing for exposure of the fluorinated compounds to the elevated temperatures for effective destruction. For example, the technology described can employ a co-firing burner that receives the feed gas that includes fluorinated compounds (e.g., FOCs) and a fuel gas (e.g., natural gas) together for oxidizing and destroying the fluorinated compounds. The fuel gas can be injected perpendicularly in relation to the injection of the feed gas into the described burner for efficient destruction of fluorinated compounds present in the feed gas. In cases where a feed gas includes potentially fouling material, such feed gas can be introduced into the regenerative thermal oxidizer downstream of the burner to avoid damage to the burner. The technology described can be implemented to destroy harmful FOCs from air process emissions sources to reduce and / or eliminate emissions of such harmful FOCs, contributing to decarbonization efforts toward a low-carbon economy. The technology described can improve emissions intensity of the facility in which the technology is implemented, thereby reducing the product carbon footprint (PCF) of the materials produced by the facility.

[0005] Thermal oxidation of FOCs can result in the formation of hydrogen fluoride (HF) which is highly reactive. Conventional regenerative thermal oxidizers typically include mullite as a heat recovery media material. Mullite includes silicon dioxide, which can react with HF to form silicon tetrafluoride. The reaction between silicon dioxide and HF shortens the useful life and effectiveness of such heat recovery media. The technology described replace silicon dioxide (typically present in conventional regenerative thermal oxidizers) with aluminum oxide in the heat recovery media, thereby increasing HF resistance of the heat recovery media. Replacing silicon dioxide with aluminum oxide in the heat recovery media allows for the described regenerative thermal oxidizers to successfully destroy FOCs while continuing to be able to recover a majority of the heat produced from the oxidation process because of the resistance to HF.

[0006] The technology described can recover and reuse the recovered heat, thereby drastically reducing the energy requirements for operation in comparison to conventional technologies. In some implementations, the technology described can allow about 90%Attorney Docket No.: FP0040-W001 energy efficiency and reduce natural gas use to treat the same volume of exhaust streams in comparison to conventional thermal oxidizers. The technology described can recover and handle substantially all of the HF from the exhaust gas produced by the regenerative thermal oxidizers. In some implementations, the technology described can be implemented to reduce the PCF to one pound of carbon dioxide equivalent per pound of product produced. In some implementations, the technology described can decrease a facility-wide carbon footprint by about 33%, compared to only about 2% with conventional technologies.

[0007] The details of one or more implementations of the subject matter of this disclosure are set forth in the accompanying drawings and the description. Other features, aspects, and advantages of the subject matter will become apparent from the description, the drawings, and the claims.BRIEF DESCRIPTION OF THE DRAWINGS

[0008] FIG. 1 is a schematic diagram of an example regenerative thermal oxidizer.

[0009] FIG. 2 is a block diagram of an example system including the regenerative thermal oxidizer of FIG. 1 .

[0010] FIG. 3 is a flow chart of an example method for regenerative thermal oxidation.

[0011] FIG. 4 is a flow chart of an example method for regenerative thermal oxidation along with recovery and handling of the fluoride-containing byproduct produced by the regenerative thermal oxidation.DETAILED DESCRIPTION OF THE INVENTION

[0012] This disclosure describes thermal oxidation for oxidation of gas streams. In particular, the disclosure describes regenerative thermal oxidation for destruction of harmful greenhouse gases, such as FOCs. A regenerative thermal oxidizer includes a combustion chamber and a co-feed burner into which a gas stream including an FOC is directly fed. The FOC in the gas stream is thermally oxidized (e.g., combusted), which destroys the FOC and produces heat and byproducts, such as HF and water vapor. TheAttorney Docket No.: FP0040-W001 regenerative thermal oxidizer includes a heat recovery packing bed that can absorb a majority of the heat produced from thermal oxidation of the FOC in the gas stream.

[0013] FIG. 1 is a schematic diagram of an example regenerative thermal oxidizer (RTOx) 100. The RTOx 100 includes a combustion chamber 102, a burner 104, and a heat recovery packing bed 106. The burner 104 is coupled to the combustion chamber102. The heat recovery packing bed 106 is disposed within the combustion chamber 102.

[0014] The burner 104 is a co-feed (co-firing) burner that is configured to receive a feed gas 101 , a fuel gas 103, and an oxidizing gas 105. For example, the burner 104 defines various inlets, and each inlet can receive a different one of the feed gas 101 , the fuel gas103, and the oxidizing gas 105. The feed gas 101 includes a fluorinated compound. The feed gas 101 can include a fluorinated organic compound (FOC), a fluorinated inorganic compound, or both. The FOCs present in the feed gas 101 are gaseous at injection conditions into the RTOx 100. Some non-limiting examples of FOCs include fluorinated methanes (e.g., fluoromethane, difluoromethane, trifluoromethane, tetrafluoromethane), fluorinated ethanes (e.g., tetrafluoroethane, pentafluoroethane, hexafluoroethane), tetrafluoroethylene, hexafluoropropylene, vinylidene fluoride, perfluorocyclobutane, tetrafluoropropylene oxide, hexafluoropropylene oxide and perfluoro(alkyl vinyl ethers). The feed gas 101 can include additional components, such as nitrogen. The fuel gas 103 includes methane. For example, the fuel gas 103 can include natural gas, which includes methane. The oxidizing gas 105 includes oxygen. For example, the oxidizing gas 105 can include air, which includes oxygen. The burner 104 is configured to combust the feed gas 101 and the fuel gas 103 in the presence of the oxidizing gas 105 to produce heat and an exhaust gas 107. Because the feed gas 101 includes a fluorinated compound, the exhaust gas 107 includes a fluoride-containing byproduct (e.g., HF) as a product of combustion of the feed gas 101. In some implementations, an excess amount of the fuel gas 103 is flowed to the burner 104 for providing sufficient hydrogen (present in the methane) to ensure destruction (complete oxidation) of the fluorinated compounds (e.g., FOCs) present in the feed gas 101 . For example, the fuel gas 103 is flowed to the burner 104 at a flow rate that provides up to about 130% (an excess of up to about 30%) of the necessary amount of hydrogen (e.g., present in the methane of the fuel gas 103) forAttorney Docket No.: FP0040-W001 complete oxidation of halogens (e.g., fluorine present in the fluorinated compound(s) of the feed gas 101 and any other feed gases, such as feed gases 109 and 111 ) entering the burner 104.

[0015] In some implementations, as shown in FIG. 1 , the RTOx 100 includes two burners 104. Although shown in FIG. 1 as including two burners 104, the RTOx 100 can optionally include fewer (e.g., one) or more (e.g., three or more than three) burners 104. In some implementations, the burner 104 includes an additional inlet for receiving a second feed gas 109 including VOCs and potentially fouling material. In such cases, the inlet for receiving the second feed gas 109 can be located downstream of the ignition area of the burner 104 where the feed gas 101 and the oxidizing gas 105 enter the burner 104, such that the potentially fouling material of the second feed gas 109 avoids fouling the ignition components of the burner 104. In some implementations, the combustion chamber 102 defines an inlet separated from the burner 104 for receiving a third feed gas 111 including VOCs but has a reduced concentration of FOCs in comparison to the feed gas 101 or is substantially free of FOCs. For example, the third feed gas 111 that is a gas including VOCs (and in some cases, a dilute concentration of FOCs) that can be thermally oxidized within the combustion chamber 102 but does not necessarily require direct feeding to the burner 104 as does the feed gas 101. It is advantageous to flow the feed gas 101 (having a relatively high concentration of FOCs) directly to the burner 104 so that the feed gas 101 is exposed to higher temperatures for ensuring destruction of the FOCs present in the feed gas 101. In some implementations, the feed gas 101 has an FOC concentration greater than about 1 volume percent (vol.%). For example, the feed gas 101 has an FOC concentration in a range from about 1 vol.% to 100 vol.%. In some implementations, the second feed gas 109 has an FOC concentration greater than about 1 vol.%. For example, the second feed gas 109 has an FOC concentration in a range from about 1 vol.% to 100 vol.%. In some implementations, the third feed gas 111 has an FOC concentration less than about 5 vol.%. For example, the third feed gas 111 is substantially free of FOCs. As another example, the third feed gas 111 has an FOC concentration in a range from about 1 part per million (ppm) to about 5 vol.%. In some implementations, the third feed gas 111 has an FOC concentration that is less than 25% of the explosive limit. In some implementations, the RTOx 100 can destroy (thermallyAttorney Docket No.: FP0040-W001 oxidize) more than 99.9% of FOCs entering the RTOx 100. In some implementations, the RTOx 100 can destroy more than 99.5% of the VOCs entering the RTOx 100. The RTOx 100 is capable of destroying the FOCs entering the RTOx 100 over a large range of volumetric flow rates and over a large range of FOC concentrations of the feed streams entering the RTOx (for example, the feed gas 101 , the second feed gas 109, the third feed gas 111 , or any combinations of these). In some implementations, the feed gas 101 has a smaller volumetric flow rate and a greater concentration of FOCs in comparison to the second feed gas 109 and / or the third feed gas 111. In some implementations, the feed gas 101 has a volumetric flow rate in a range from about 200 standard cubic feet per minute (SCFM) to about 1 ,000 SCFM. In some implementations, the second feed gas 109 has a volumetric flow rate in a range from about 200 SCFM to about 1 ,000 SCFM. In some implementations, the third feed gas 111 has a volumetric flow rate in a range from about 5,000 SCFM to about 50,000 SCFM, from about 7,000 SCFM to about 40,000 SCFM, from about 10,000 SCFM to about 30,000 SCFM, from about 13,000 SCFM to about 30,000 SCFM, or from about 15,000 SCFM to about 25,000 SCFM (for example, about 24,000 SCFM).

[0016] The heat recovery packing bed 106 is configured to absorb at least a portion of the heat produced by combustion of the feed gas 101 and the fuel gas 103. For example, the heat recovery packing bed 106 is configured to absorb at least about 85%, at least about 90%, at least about 91 %, at least about 92%, at least about 93%, at least about 94%, or at least about 95% of the heat produced by combustion of the feed gas 101 and the fuel gas 103. In some implementations, the heat recovery packing bed 106 is configured to absorb about 92% to about 95% of the heat produced by combustion of the feed gas 101 and the fuel gas 103. In some implementations, the heat recovery packing bed 106 is configured to absorb at least the portion of the heat produced by combustion of the feed gas 101 and the fuel gas 103, such that a centerline of the combustion chamber 102 has an operating temperature of at least about 1 ,000 °C.

[0017] The heat recovery packing bed 106 is made of a ceramic material including aluminum oxide (also referred to as alumina). In some implementations, the ceramic material making up the heat recovery packing bed 106 includes at least about 90 weightAttorney Docket No.: FP0040-W001 percent (wt.%) alumina. In some implementations, the ceramic material making up the heat recovery packing bed 106 includes more than about 90 wt.% alumina (for example, about 91 wt.% alumina, about 92 wt.% alumina, about 93 wt.% alumina, about 94 wt.% alumina, or about 95 wt.% alumina). In some implementations, the ceramic material making up the heat recovery packing bed 106 includes more than about 95 wt.% alumina (for example, about 96 wt.% alumina, about 97 wt.% alumina, about 98 wt.% alumina, or about 99 wt.% alumina). In some implementations, the ceramic material making up the heat recovery packing bed 106 includes more than about 99 wt.% alumina (for example, about 99.9 wt.% alumina). The heat recovery packing bed 106 is resistant to HF. In some implementations, the ceramic material making up the heat recovery packing bed 106 is substantially free of silicon dioxide (also referred to as silica), which is vulnerable to HF. In some implementations, the ceramic material making up the heat recovery packing bed 106 includes less than about 5 wt.% silica, less than about 4 wt.% silica, less than about 3 wt.% silica, less than about 2 wt.% silica, less than about 1 wt.% silica, or less than about 0.1 wt.% silica. In some implementations, as shown in FIG. 1 , the RTOx 100 includes three heat recovery packing beds 106. Although shown in FIG. 1 as including three heat recovery packing beds 106, the RTOx 100 can optionally include fewer (e.g., one or two) or more (e.g., four or more than four) heat recovery packing beds 106.

[0018] The combustion chamber 102 is lined with an insulating material 108. The insulating material can, for example, be made of the same (or similar) ceramic material making up the heat recovery packing bed 106. In some implementations, the insulating material 108 is in the form of insulating refractory bricks made of a ceramic material including alumina. Having the insulating material 108 in the form of insulating refractory bricks can be advantageous to forms that have a larger specific surface area (e.g., fibers), especially in cases where the ceramic material making up the insulating material 108 has a relatively higher silica content (e.g., about 3 wt.%, about 4 wt.%, or about 5 wt.%). Having a reduced specific surface area (for example, by having the shape of bricks) can mitigate the exposure of silica that might be present in the insulating material 108 to HF present in the exhaust gas 107, thereby extending the useful life of the insulating material 108. In some implementations, the ceramic material making up the insulating materialAttorney Docket No.: FP0040-W001108 includes at least about 90 wt.% alumina. In some implementations, the ceramic material making up the insulating material 108 includes more than about 90 wt.% alumina (for example, about 91 wt.% alumina, about 92 wt.% alumina, about 93 wt.% alumina, about 94 wt.% alumina, or about 95 wt.% alumina). In some implementations, the ceramic material making up the insulating material 108 includes more than about 95 wt.% alumina (for example, about 96 wt.% alumina, about 97 wt.% alumina, about 98 wt.% alumina, or about 99 wt.% alumina). In some implementations, the ceramic material making up the insulating material 108 includes more than about 99 wt.% alumina (for example, about 99.9 wt.% alumina). The insulating material 108 is resistant to HF. In some implementations, the ceramic material making up the insulating material 108 is substantially free of silica. In some implementations, the ceramic material making up the insulating material 108 includes less than about 5 wt.% silica, less than about 4 wt.% silica, less than about 3 wt.% silica, less than about 2 wt.% silica, less than about 1 wt.% silica, or less than about 0.1 wt.% silica.

[0019] Because the heat recovery packing bed 106 and the insulating material 108 lining the combustion chamber 102 are made of the ceramic material having a minimal amount of silica (e.g., less than about 2 wt.% silica), the RTOx 100 is capable of processing the feed gas 101 including the FOC at elevated temperatures (e.g., greater than 1 ,000 °C) for enabling substantially complete breakdown of the FOC in the feed gas 101 while avoiding / mitigating damage to the heat recovery packing bed 106 and the insulating material 108.

[0020] In some embodiments, the regenerative thermal oxidizer includes a conventional burner. As used herein, a “conventional burner” refers to a burner configured to receive and combust a fuel gas (e.g., methane, propane, or natural gas) and an oxidizing gas (e.g., air or oxygen), but not configured to receive a feed gas comprising fluorinated compounds. In these embodiments, the feed gas is introduced into the combustion chamber at a location separate from the burner, such as downstream of the burner flame zone, or laterally offset from the burner. The feed gas is thereby exposed to the elevated temperatures within the combustion chamber and is thermallyAttorney Docket No.: FP0040-W001 oxidized by the heat generated from combustion of the fuel gas and oxidizing gas, rather than being directly combusted within the burner itself.

[0021] This configuration may be advantageous in certain embodiments, such as retrofit applications or when treating feed gases that contain fouling agents or particulates that could degrade burner components if introduced directly into the burner. For example, the feed gas may be injected into a hot zone of the combustion chamber where the temperature is maintained at or above 1 ,000°C, enabling effective destruction of fluorinated compounds without direct flame contact. The combustion chamber may be sized and insulated to ensure sufficient residence time (e.g., at least about 2 seconds) and thermal uniformity to achieve high destruction efficiency of the fluorinated compounds.

[0022] In contrast to the conventional burner configuration embodiment, a hybrid burner (also referred to as a co-feed or co-firing burner) embodiment is configured to receive and combust the feed gas, fuel gas, and oxidizing gas together within the burner structure. This co-firing configuration enables direct exposure of the fluorinated compounds to the burner flame, which may enhance destruction efficiency and reduce residence time requirements.

[0023] Accordingly, the present disclosure encompasses both conventional burner and hybrid burner configuration embodiments for regenerative thermal oxidation of fluorinated compounds, thereby providing flexibility in system design and deployment based on application-specific requirements.

[0024] The combustion chamber 102 is sized to ensure that the exhaust gas 107 has a residence time within the combustion chamber 102 sufficient for maximum destruction of harmful pollutants, such as the FOC. In some implementations, the combustion chamber 102 is sized for the exhaust gas 107 having a residence time within the combustion chamber 102 of at least about 2 seconds. In some implementations, the combustion chamber 102 operates at an operating temperature of at least 1 ,000 °C. In some implementations, the combustion chamber 102 operates at an operating temperature in a range from about 1 ,000 °C to about 1 ,200 °C. For example, the combustion chamber 102 operates at an operating temperature of about 1 ,100 °C.Attorney Docket No.: FP0040-W001

[0025] FIG. 2 is a block diagram of an example system 200. The system 200 includes the RTOx 100 (also shown in FIG. 1 ), a quencher 210, and a scrubber 220. The feed gas 101 , the fuel gas 103, and the oxidizing gas 105 flow to the RTOx 100. The feed gas 101 and the fuel gas 103 are thermally oxidized by the RTOx in the presence of the oxidizing gas 105 to produce heat and the exhaust gas 107, which includes a fluoride-containing byproduct (e.g., HF). The exhaust gas 107 flows from the RTOx to the quencher 210. The quencher 210 is configured to cool the exhaust gas 107. The exhaust gas 107 that has been cooled by the quencher 210 flows from the quencher 210 to the scrubber 220. The scrubber 220 is configured to remove the fluoride-containing byproduct from the exhaust gas 107 to produce an overhead stream 221 that is substantially free of the fluoride-containing byproduct.

[0026] The quencher 210 defines an exhaust inlet 212 for receiving the exhaust gas 107 discharged from the RTOx 100. The quencher 210 defines a cooling inlet 214 for receiving a cooling fluid 211. The cooling fluid 211 includes hydrofluoric acid (aqueous HF). For example, the cooling fluid 211 is an aqueous solution of HF including about 1 wt.% to about 30 wt.% HF or from about 20 wt.% HF to about 30 wt.% HF. The quencher 210 is configured to bring the cooling fluid 211 in contact with the exhaust gas 107 to reduce an operating temperature of the exhaust gas 107. The quencher 210 can include, for example, a multi-pipe quencher or similar technology for bringing the exhaust gas 107 into contact with the cooling fluid 211 to rapidly cool the exhaust gas 107. The quencher 210 defines an exhaust outlet 216 for discharging the exhaust gas 107 at the reduced operating temperature from the quencher 210. In some implementations, the exhaust gas 107 exiting the quencher 210 via the exhaust outlet 216 has an operating temperature in a range from about 50 °C to about 60 °C.

[0027] The scrubber 220 defines a feed inlet 222 for receiving the exhaust gas 107 discharged from the quencher 210. The scrubber 220 defines a scrubbing inlet 224 for receiving a scrubbing fluid 223. The scrubbing fluid 223 includes water. For example, the scrubbing fluid 223 is demineralized or deionized water. The scrubber 220 is configured to bring the scrubbing fluid 223 in contact with the exhaust gas 107 to transferAttorney Docket No.: FP0040-W001 at least a portion of the fluoride-containing byproduct present in the exhaust gas 107 to the scrubbing fluid 223 to produce a bottoms stream 225 and the overhead stream 221 .

[0028] The scrubbing fluid 223 (a liquid) is denser than the exhaust gas 107 (a gas), so the scrubbing inlet 224 can be positioned above the feed inlet 222 to increase interaction between the exhaust gas 107 and the scrubbing fluid 223 as the exhaust gas 107 and the scrubbing fluid 223 flow in opposite directions (e.g., scrubbing fluid 223 flows generally downward as exhaust gas 107 flows generally upward with respect to gravity) through the scrubber 220. The scrubber 220 can include a packed bed 226. The packed bed 224 can include, for example, structured or random packing. The packed bed 226 increases surface area within the scrubber 220 to increase interaction between the exhaust gas 107 and the scrubbing fluid 223 as the exhaust gas 107 and the scrubbing fluid 223 flow through the scrubber 220. The scrubber 220 can include a tray 228. The tray 228 can include, for example, a bubble cap tray, a sieve tray, or a valve tray. The tray 228 can be shaped and sized to increase interaction between the exhaust gas 107 and the scrubbing fluid 223 at the exhaust gas 107 and the scrubbing fluid 223 flow through the scrubber 220.

[0029] In some implementations, the scrubber 220 includes multiple stages. For example, as shown in FIG. 2, the scrubber 220 includes multiple packed beds 226 with trays 228 in between each packed bed 226. The scrubber 220 can include multiple scrubbing inlets 224 for receiving the scrubbing fluid 223 at multiple locations across the scrubber 220. For example, as shown in FIG. 2, scrubbing inlets 224 are located directly above one or more of the packed beds 224.

[0030] In some implementations, the scrubber 220 includes a caustic inlet 230 for receiving a caustic solution 227. The caustic solution 227 can come into contact with both the exhaust gas 107 and the scrubbing fluid 223. The caustic solution 227 can neutralize acidic components in the scrubbing fluid 223 (for example, acidic components that have transferred from the exhaust gas 107 to the scrubbing fluid 223 within the scrubber 220). In some implementations, the caustic solution 227 has a pH of about 8. In some implementations, the caustic solution 227 includes an aqueous solution of sodium hydroxide or potassium hydroxide.Attorney Docket No.: FP0040-W001

[0031] The bottoms stream 225 includes the scrubbing fluid 223 and the fluoride- containing byproduct that has transferred from the exhaust gas 107 to the scrubbing fluid 223. The bottoms stream 225 can include additional components that have transferred from the exhaust gas 107 to the scrubbing fluid 223. In cases where caustic solution 227 is flowed to the scrubber 220 via caustic inlet 228, the bottoms stream 225 includes the caustic solution 227. The overhead stream 221 includes a remaining portion of the exhaust gas 107 excluding the fluoride-containing byproduct and any other components that have been transferred from the exhaust gas 107 to the scrubbing fluid 223 (and, in cases where caustic solution 227 is flowed to the scrubber 220 via caustic inlet 230, the caustic solution 227). In some implementations, the overhead stream 221 is substantially free of the fluoride-containing byproduct. For example, more than 99.99% of the fluoride- containing byproduct content of the exhaust gas 107 can be removed from the exhaust gas 107 in the scrubber 220, such that the overhead stream 221 exiting the scrubber 220 includes less than 0.01 % of the fluoride-containing byproduct from the exhaust gas 107.

[0032] FIG. 3 is a flow chart of an example method 300 for regenerative thermal oxidation. The regenerative thermal oxidizer 100 can, for example, implement the method 300. At block 302, a feed gas (such as the feed gas 101 ) is flowed to a burner (such as the burner 104) of a regenerative thermal oxidizer (such as the RTOx 100). At block 304, a fuel gas (such as the fuel gas 103) is flowed to the burner 104. At block 306, an oxidizing gas (such as the oxidizing gas 105) is flowed to the burner 104. At block 308, the burner104 combusts the feed gas 101 and the fuel gas 103 in the presence of the oxidizing gas105 to produce heat and an exhaust gas (such as the exhaust gas 107) within a combustion chamber (such as the combustion chamber 102) of the RTOx. Because the feed gas 101 includes an FOC, the exhaust gas 107 produced at block 308 includes a fluoride-containing byproduct. At block 310, a heat recovery packing bed (such as the heat recovery packing bed 106) absorbs at least a portion of the heat produced by combustion of the feed gas 101 and the fuel gas 103 at block 308. One or more blocks of the method 300 need not occur sequentially (e.g., one after another) and can occur simultaneously. For example, blocks 302, 304, and 306 can be implemented simultaneously. The method 300 can be implemented as a continuous process, such that the blocks of method 300 can be repeated continuously and occur simultaneously.Attorney Docket No.: FP0040-W001In some implementations, the method 300 includes insulating, by insulating material 108, the combustion chamber 102 to mitigate heat dissipation from the combustion chamber 102 to a surrounding environment. In some implementations, at least a portion of the heat absorbed by the heat recovery packing bed 106 at block 310 is transferred to the oxidizing gas 105 upstream of the RTOx 100, such that the absorbed heat can be used to preheat the oxidizing gas 105 prior to entering the burner 104 at block 306.

[0033] FIG. 4 is a flow chart of an example method 400 for regenerative thermal oxidation along with recovery and handling of the fluoride-containing byproduct (e.g., HF) produced by the regenerative thermal oxidation. The system 200 can, for example, implement the method 400. At block 402, a feed gas (such as the feed gas 101 ) is flowed to a burner (such as the burner 104) of a regenerative thermal oxidizer (such as the RTOx 100). At block 404, a fuel gas (such as the fuel gas 103) is flowed to the burner 104. At block 406, an oxidizing gas (such as the oxidizing gas 105) is flowed to the burner 104. At block 408, the burner 104 combusts the feed gas 101 and the fuel gas 103 in the presence of the oxidizing gas 105 to produce heat and an exhaust gas (such as the exhaust gas 107) within a combustion chamber (such as the combustion chamber 102) of the RTOx 100. Because the feed gas 101 includes an FOC, the exhaust gas 107 produced at block 408 includes a fluoride-containing byproduct. At block 410, a heat recovery packing bed (such as the heat recovery packing bed 106) absorbs at least a portion of the heat produced by combustion of the feed gas 101 and the fuel gas 103 at block 408. In some implementations, the method 400 includes insulating, by insulating material 108, the combustion chamber 102 to mitigate heat dissipation from the combustion chamber 102 to a surrounding environment. In some implementations, at least a portion of the heat absorbed by the heat recovery packing bed 106 at block 410 is transferred to the oxidizing gas 105 upstream of the RTOx 100, such that the absorbed heat can be used to preheat the oxidizing gas 105 prior to entering the burner 104 at block 406.

[0034] At block 412, the exhaust gas 107 is flowed from the RTOx 100 to a quencher (such as the quencher 210). At block 414, a cooling fluid (such as the cooling fluid 211 ) is flowed to the quencher 210. At block 416, the exhaust gas 107 is contacted with theAttorney Docket No.: FP0040-W001 cooling fluid 211 within the quencher 210 to reduce an operating temperature of the exhaust gas 107. The cooling fluid 211 used to cool the exhaust gas 107 and exiting the quencher 210 can be re-cooled and circulated back to the quencher 210 for cooling the exhaust gas 107 within the quencher 210. At block 418, the exhaust gas 107 at the reduced operating temperature is flowed from the quencher 210 to a scrubber (such as the scrubber 220). At block 420, a scrubbing fluid (such as the scrubbing fluid 223) is flowed to the scrubber 220. At block 422, the exhaust gas 107 is contacted with the scrubbing fluid 223 within the scrubber 220 to transfer at least a portion of the fluoride- containing byproduct present in the exhaust gas 107 to the scrubbing fluid 223 to produce a bottoms stream (such as the bottoms stream 225) and an overhead stream (such as the overhead stream 221 ). One or more blocks of the method 400 need not occur sequentially (e.g., one after another) and can occur simultaneously. For example, blocks 402, 404, and 406 can be implemented simultaneously. The method 400 can be implemented as a continuous process, such that the blocks of method 400 can be repeated continuously and occur simultaneously.EMBODIMENTS

[0035] In an example implementation (or aspect), a regenerative thermal oxidizer comprises: a combustion chamber; a burner coupled to the combustion chamber, wherein the burner is configured to receive a fuel gas comprising methane, an oxidizing gas comprising oxygen, and a feed gas comprising a fluorinated compound, wherein the burner is configured to combust the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas comprising a fluoride-containing byproduct; and a heat recovery packing bed disposed within the combustion chamber, wherein the heat recovery packing bed is made of a ceramic material comprising aluminum oxide configured to absorb at least a portion of the heat produced by combustion of the fuel gas and the feed gas.

[0036] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the fluorinated compound is a fluorinated organic compound.Attorney Docket No.: FP0040-W001

[0037] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the feed gas comprises a fluorinated inorganic compound.

[0038] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with the ceramic material.

[0039] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

[0040] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.

[0041] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 2 wt.% silicon dioxide.

[0042] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 1 wt.% silicon dioxide.

[0043] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material is substantially free of silicon dioxide.

[0044] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 90 wt.% aluminum oxide.

[0045] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 95 wt.% aluminum oxide.

[0046] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 99 wt.% aluminum oxide.Attorney Docket No.: FP0040-W001

[0047] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.

[0048] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least the portion of the heat produced by combustion of the fuel gas and the feed gas, such that a centerline of the combustion chamber has an operating temperature of at least about 1 ,000 degrees Celsius (°C).

[0049] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 85% of the heat produced by combustion of the fuel gas and the feed gas.

[0050] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 90% of the heat produced by combustion of the fuel gas and the feed gas.

[0051] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 92% of the heat produced by combustion of the fuel gas and the feed gas.

[0052] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas.

[0053] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least 95% of the heat produced by combustion of the fuel gas and the feed gas.

[0054] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the burner is a first burner, and the regenerative thermal oxidizer comprises a second burner coupled to the combustion chamber.Attorney Docket No.: FP0040-W001

[0055] In an example implementation (or aspect), a method, for regenerative thermal oxidation of a fluorinated compound in a feed gas comprising the fluorinated compound, comprises: flowing the feed gas to a burner of a regenerative thermal oxidizer, the burner coupled to a combustion chamber of the regenerative thermal oxidizer; flowing a fuel gas to the burner of the regenerative thermal oxidizer, the fuel gas comprising methane; flowing an oxidizing gas to the burner of the regenerative thermal oxidizer, the oxidizing gas comprising oxygen; combusting, by the burner, the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas within the combustion chamber of the regenerative thermal oxidizer, the exhaust gas comprising a fluoride- containing byproduct; and absorbing, by a heat recovery packing bed disposed within the combustion chamber, at least a portion of the heat produced by combustion of the fuel gas and the feed gas, the heat recovery packing bed made of a ceramic material comprising aluminum oxide.

[0056] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the fluorinated compound is a fluorinated organic compound.

[0057] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the feed gas comprises a fluorinated inorganic compound.

[0058] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

[0059] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the method comprises insulating, by the plurality of insulating refractory bricks, the combustion chamber to mitigate heat dissipation from the combustion chamber to a surrounding environment.

[0060] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.Attorney Docket No.: FP0040-W001

[0061] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 2 wt.% silicon dioxide.

[0062] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 1 wt.% silicon dioxide.

[0063] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material is substantially free of silicon dioxide.

[0064] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 90 wt.% aluminum oxide.

[0065] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 95 wt.% aluminum oxide.

[0066] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 99 wt.% aluminum oxide.

[0067] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.

[0068] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least the portion of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed, such that a centerline of the combustion chamber operates at an operating temperature of at least about 1 ,000 degrees Celsius (°C).

[0069] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least about 85% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.Attorney Docket No.: FP0040-W001

[0070] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least about 90% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0071] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least about 92% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0072] In an example implementation (or aspect) combinable with any other example implementation (or aspect), from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0073] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0074] In an example implementation (or aspect), a system comprises: a feed gas comprising a fluorinated compound; a fuel gas comprising methane; an oxidizing gas comprising oxygen; and a regenerative thermal oxidizer comprising: a combustion chamber; a burner coupled to the combustion chamber, the burner configured to receive the fuel gas, the oxidizing gas, and the feed gas, the burner configured to combust the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas comprising a fluoride-containing byproduct; and a heat recovery packing bed disposed within the combustion chamber, wherein the heat recovery packing bed is made of a ceramic material comprising aluminum oxide configured to absorb at least a portion of the heat produced by combustion of the fuel gas and the feed gas.

[0075] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the fluorinated compound is a fluorinated organic compound.

[0076] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the feed gas comprises a fluorinated inorganic compound.Attorney Docket No.: FP0040-W001

[0077] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with the ceramic material.

[0078] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

[0079] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.

[0080] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 2 wt.% silicon dioxide.

[0081] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 1 wt.% silicon dioxide.

[0082] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material is substantially free of silicon dioxide.

[0083] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 90 wt.% aluminum oxide.

[0084] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 95 wt.% aluminum oxide.

[0085] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 99 wt.% aluminum oxide.

[0086] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.Attorney Docket No.: FP0040-W001

[0087] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the system comprises the exhaust gas, and the exhaust gas has a residence time within the combustion chamber of at least about 2 seconds.

[0088] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least the portion of the heat produced by combustion of the fuel gas and the feed gas, such that a centerline of the combustion chamber has an operating temperature of at least about 1 ,000 degrees Celsius (°C).

[0089] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 85% of the heat produced by combustion of the fuel gas and the feed gas.

[0090] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 90% of the heat produced by combustion of the fuel gas and the feed gas.

[0091] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 92% of the heat produced by combustion of the fuel gas and the feed gas.

[0092] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas.

[0093] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least 95% of the heat produced by combustion of the fuel gas and the feed gas.

[0094] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the burner is a first burner, and the regenerative thermal oxidizer comprises a second burner coupled to the combustion chamber.Attorney Docket No.: FP0040-W001

[0095] In an example implementation (or aspect), a system comprises: a regenerative thermal oxidizer comprising: a combustion chamber; a burner coupled to the combustion chamber, the burner configured to receive a fuel gas comprising methane, an oxidizing gas comprising oxygen, and a feed gas comprising a fluorinated compound, the burner configured to combust the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas comprising a fluoride-containing byproduct; and a heat recovery packing bed disposed within the combustion chamber, the heat recovery packing bed made of a ceramic material comprising aluminum oxide configured to absorb at least a portion of the heat produced by combustion of the fuel gas and the feed gas, the combustion chamber defining an outlet for discharging the exhaust gas from the regenerative thermal oxidizer; a quencher defining an exhaust inlet for receiving the exhaust gas discharged from the regenerative thermal oxidizer, the quencher defining a cooling inlet for receiving a cooling fluid, the quencher configured to bring the cooling fluid in contact with the exhaust gas to reduce an operating temperature of the exhaust gas, the quencher defining an exhaust outlet for discharging the exhaust gas at the reduced operating temperature from the quencher; and a scrubber defining a feed inlet for receiving the exhaust gas discharged from the quencher, the scrubber defining a scrubbing inlet for receiving a scrubbing fluid, the scrubber configured to bring the scrubbing fluid in contact with the exhaust gas to transfer at least a portion of the fluoride- containing byproduct present in the exhaust gas to the scrubbing fluid to produce a bottoms stream and an overhead stream, the bottoms stream comprising the fluoride- containing byproduct transferred from the exhaust gas to the scrubbing fluid, the overhead stream comprising a remaining portion of the exhaust gas excluding the fluoride-containing byproduct transferred from the exhaust gas to the scrubbing fluid.

[0096] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the fluorinated compound is a fluorinated organic compound.

[0097] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the feed gas comprises a fluorinated inorganic compound.

[0098] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with the ceramic material.Attorney Docket No.: FP0040-W001

[0099] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

[0100] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.

[0101] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 2 wt.% silicon dioxide.

[0102] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 1 wt.% silicon dioxide.

[0103] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material is substantially free of silicon dioxide.

[0104] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 90 wt.% aluminum oxide.

[0105] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 95 wt.% aluminum oxide.

[0106] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 99 wt.% aluminum oxide.

[0107] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.Attorney Docket No.: FP0040-W001

[0108] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the system comprises the exhaust gas, and the exhaust gas has a residence time within the combustion chamber of at least about 2 seconds.

[0109] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least the portion of the heat produced by combustion of the fuel gas and the feed gas, such that a centerline of the combustion chamber has an operating temperature of at least about 1 ,000 degrees Celsius (°C).

[0110] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 85% of the heat produced by combustion of the fuel gas and the feed gas.

[0111] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 90% of the heat produced by combustion of the fuel gas and the feed gas.

[0112] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least about 92% of the heat produced by combustion of the fuel gas and the feed gas.

[0113] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas.

[0114] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the heat recovery packing bed is configured to absorb at least 95% of the heat produced by combustion of the fuel gas and the feed gas.

[0115] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the burner is a first burner, and the regenerative thermal oxidizer comprises a second burner coupled to the combustion chamber.Attorney Docket No.: FP0040-W001

[0116] In an example implementation (or aspect), a method comprises: flowing a feed gas to a burner of a regenerative thermal oxidizer, the feed gas comprising a fluorinated compound, the burner coupled to a combustion chamber of the regenerative thermal oxidizer; flowing a fuel gas to the burner of the regenerative thermal oxidizer, the fuel gas comprising methane; flowing an oxidizing gas to the burner of the regenerative thermal oxidizer, the oxidizing gas comprising oxygen; combusting, by the burner, the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas within the combustion chamber of the regenerative thermal oxidizer, the exhaust gas comprising a fluoride-containing byproduct; absorbing, by a heat recovery packing bed disposed within the combustion chamber, at least a portion of the heat produced by combustion of the fuel gas and the feed gas, the heat recovery packing bed made of a ceramic material comprising aluminum oxide; flowing the exhaust gas from the regenerative thermal oxidizer to a quencher; flowing a cooling fluid to the quencher, the cooling fluid comprising hydrofluoric acid; contacting the exhaust gas with the cooling fluid within the quencher to reduce an operating temperature of the exhaust gas; flowing the exhaust gas at the reduced operating temperature from the quencher to a scrubber; flowing a scrubbing fluid to the scrubber, the scrubbing fluid comprising water; and contacting the exhaust gas with the scrubbing fluid within the scrubber to transfer at least a portion of the fluoride-containing byproduct present in the exhaust gas to the scrubbing fluid to produce a bottoms stream and an overhead stream, the bottoms stream comprising the fluoride-containing byproduct transferred from the exhaust gas to the scrubbing fluid, the overhead stream comprising a remaining portion of the exhaust gas excluding the fluoride-containing byproduct transferred from the exhaust gas to the scrubbing fluid.

[0117] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the fluorinated compound is a fluorinated organic compound.

[0118] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the feed gas comprises a fluorinated inorganic compound.Attorney Docket No.: FP0040-W001

[0119] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

[0120] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the method comprises insulating, by the plurality of insulating refractory bricks, the combustion chamber to mitigate heat dissipation from the combustion chamber to a surrounding environment.

[0121] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.

[0122] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 2 wt.% silicon dioxide.

[0123] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises less than about 1 wt.% silicon dioxide.

[0124] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material is substantially free of silicon dioxide.

[0125] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 90 wt.% aluminum oxide.

[0126] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 95 wt.% aluminum oxide.

[0127] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the ceramic material comprises greater than about 99 wt.% aluminum oxide.Attorney Docket No.: FP0040-W001

[0128] In an example implementation (or aspect) combinable with any other example implementation (or aspect), the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.

[0129] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least the portion of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed, such that a centerline of the combustion chamber operates at an operating temperature of at least about 1 ,000 degrees Celsius (°C).

[0130] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least about 85% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0131] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least about 90% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0132] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least about 92% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0133] In an example implementation (or aspect) combinable with any other example implementation (or aspect), from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0134] In an example implementation (or aspect) combinable with any other example implementation (or aspect), at least 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

[0135] In an example implementation (or aspect), a regenerative thermal oxidizer having a “conventional” burner comprises: (a) a combustion chamber; (b) a burner coupled to the combustion chamber, the burner configured to receive a fuel gas comprising methane and an oxidizing gas comprising oxygen, and to combust the fuelAttorney Docket No.: FP0040-W001 gas and the oxidizing gas to produce heat; (c) a feed gas inlet configured to introduce a feed gas comprising a fluorinated compound into the combustion chamber at a location separate from the burner, such that the feed gas is thermally oxidized by the heat produced from combustion; and (d) a heat recovery packing bed disposed within the combustion chamber, the heat recovery packing bed comprising a ceramic material including aluminum oxide and configured to absorb at least a portion of the heat produced by combustion.

[0136] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventional burner, the feed gas inlet is positioned downstream of a flame zone of the burner.

[0137] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventional burner, the burner is not configured to receive the feed gas comprising the fluorinated compound.

[0138] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventional burner, the heat recovery packing bed comprises greater than about 95 weight percent aluminum oxide and less than about 1 weight percent silicon dioxide.

[0139] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventional burner, the combustion chamber is lined with insulating refractory bricks comprising aluminum oxide.

[0140] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventional burner, the feed gas is introduced at a volumetric flow rate in a range from about 5,000 to about 50,000 standard cubic feet per minute.

[0141] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventionalAttorney Docket No.: FP0040-W001 burner, the combustion chamber is sized to provide a residence time of at least about two seconds for the feed gas.

[0142] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventional burner, the regenerative thermal oxidizer further comprises a quencher configured to cool an exhaust gas discharged from the combustion chamber.

[0143] In an example implementation (or aspect) combinable with any other example implementation (or aspect) of a regenerative thermal oxidizer having a conventional burner, the regenerative thermal oxidizer further comprises a scrubber configured to remove a fluoride-containing byproduct from the exhaust gas.

[0144] While this specification contains many specific implementation details, these should not be construed as limitations on the scope of what may be claimed, but rather as descriptions of features that may be specific to particular implementations. Certain features that are described in this specification in the context of separate implementations can also be implemented, in combination, in a single implementation. Conversely, various features that are described in the context of a single implementation can also be implemented in multiple implementations, separately, or in any sub-combination. Moreover, although previously described features may be described as acting in certain combinations and even initially claimed as such, one or more features from a claimed combination can, in some cases, be excised from the combination, and the claimed combination may be directed to a sub-combination or variation of a sub-combination.

[0145] As used in this disclosure, the terms “a,” “an,” or “the” are used to include one or more than one unless the context clearly dictates otherwise. The term “or” is used to refer to a nonexclusive “or” unless otherwise indicated. The statement “at least one of A and B” has the same meaning as “A, B, or A and B.” In addition, it is to be understood that the phraseology or terminology employed in this disclosure, and not otherwise defined, is for the purpose of description only and not of limitation. Any use of section headings is intended to aid reading of the document and is not to be interpreted as limiting; information that is relevant to a section heading may occur within or outside of that particular section.Attorney Docket No.: FP0040-W001

[0146] As used in this disclosure, the term “about” or “approximately” can allow for a degree of variability in a value or range, for example, within 10%, within 5%, or within 1% of a stated value or of a stated limit of a range.

[0147] As used in this disclosure, the term “substantially” refers to a majority of, or mostly, as in at least about 50%, 60%, 70%, 80%, 90%, 95%, 96%, 97%, 98%, 99%, 99.5%, 99.9%, 99.99%, or at least about 99.999% or more.

[0148] Values expressed in a range format should be interpreted in a flexible manner to include not only the numerical values explicitly recited as the limits of the range, but also to include all the individual numerical values or sub-ranges encompassed within that range as if each numerical value and sub-range is explicitly recited. For example, a range of “0.1 % to about 5%” or “0.1 % to 5%” should be interpreted to include about 0.1 % to about 5%, as well as the individual values (for example, 1 %, 2%, 3%, and 4%) and the sub-ranges (for example, 0.1% to 0.5%, 1.1 % to 2.2%, 3.3% to 4.4%) within the indicated range. The statement “X to Y” has the same meaning as “about X to about Y,” unless indicated otherwise. Likewise, the statement “X, Y, or Z” has the same meaning as “about X, about Y, or about Z,” unless indicated otherwise.

[0149] Particular implementations of the subject matter have been described. Other implementations, alterations, and permutations of the described implementations are within the scope of the following claims as will be apparent to those skilled in the art. While operations are depicted in the drawings or claims in a particular order, this should not be understood as requiring that such operations be performed in the particular order shown or in sequential order, or that all illustrated operations be performed (some operations may be considered optional), to achieve desirable results. In certain circumstances, multitasking or parallel processing (or a combination of multitasking and parallel processing) may be advantageous and performed as deemed appropriate.

[0150] Moreover, the separation or integration of various system modules and components in the previously described implementations should not be understood as requiring such separation or integration in all implementations, and it should be understood that the described components and systems can generally be integrated together or packaged into multiple products.Attorney Docket No.: FP0040-W001

[0151] Accordingly, the previously described example implementations do not define or constrain the present disclosure. Other changes, substitutions, and alterations are also possible without departing from the spirit and scope of the present disclosure.

Claims

Attorney Docket No.: FP0040-W001CLAIMSWhat is claimed is:1 . A regenerative thermal oxidizer comprising: a combustion chamber; a burner coupled to the combustion chamber, wherein the burner is configured to receive a fuel gas comprising methane, an oxidizing gas comprising oxygen, and a feed gas comprising a fluorinated compound, wherein the burner is configured to combust the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas comprising a fluoride- containing byproduct; and a heat recovery packing bed disposed within the combustion chamber, wherein the heat recovery packing bed is made of a ceramic material comprising aluminum oxide configured to absorb at least a portion of the heat produced by combustion of the fuel gas and the feed gas.

2. The regenerative thermal oxidizer of claim 1 , wherein the fluorinated compound is a fluorinated organic compound.

3. The regenerative thermal oxidizer of claim 2, wherein the feed gas comprises a fluorinated inorganic compound.

4. The regenerative thermal oxidizer of any of claims 1 -3, wherein the combustion chamber is lined with the ceramic material.

5. The regenerative thermal oxidizer of any of claims 1 -4, wherein the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

6. The regenerative thermal oxidizer of any of claims 1 -5, wherein the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.

7. The regenerative thermal oxidizer of any of claims 1-6, wherein the ceramic material comprises less than about 2 wt.% silicon dioxide.Attorney Docket No.: FP0040-W0018. The regenerative thermal oxidizer of any of claims 1 -7, wherein the ceramic material comprises less than about 1 wt.% silicon dioxide.

9. The regenerative thermal oxidizer of any of claims 1 -8, wherein the ceramic material is substantially free of silicon dioxide.

10. The regenerative thermal oxidizer of any of claims 1 -9, wherein the ceramic material comprises greater than about 90 wt.% aluminum oxide.11 . The regenerative thermal oxidizer of any of claims 1 -10, wherein the ceramic material comprises greater than about 95 wt.% aluminum oxide.

12. The regenerative thermal oxidizer of any of claims 1 -11 , wherein the ceramic material comprises greater than about 99 wt.% aluminum oxide.

13. The regenerative thermal oxidizer of any of claims 1 -12, wherein the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.

14. The regenerative thermal oxidizer of any of claims 1 -13, wherein the heat recovery packing bed is configured to absorb at least the portion of the heat produced by combustion of the fuel gas and the feed gas, such that a centerline of the combustion chamber has an operating temperature of at least about 1 ,000 degrees Celsius (°C).

15. The regenerative thermal oxidizer of any of claims 1 -14, wherein the heat recovery packing bed is configured to absorb at least about 85% of the heat produced by combustion of the fuel gas and the feed gas.

16. The regenerative thermal oxidizer of any of claims 1 -15, wherein the heat recovery packing bed is configured to absorb at least about 92% of the heat produced by combustion of the fuel gas and the feed gas.

17. The regenerative thermal oxidizer of any of claims 1 -16, wherein the heat recovery packing bed is configured to absorb from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas.Attorney Docket No.: FP0040-W00118. The regenerative thermal oxidizer of any of claims 1 -16, wherein the heat recovery packing bed is configured to absorb at least 95% of the heat produced by combustion of the fuel gas and the feed gas.

19. The regenerative thermal oxidizer of any of claims 1 -18, wherein the burner is a first burner, and the regenerative thermal oxidizer comprises a second burner coupled to the combustion chamber.

20. A method for regenerative thermal oxidation of a fluorinated compound in a feed gas comprising the fluorinated compound, the method comprising: flowing the feed gas to a burner of a regenerative thermal oxidizer, the burner coupled to a combustion chamber of the regenerative thermal oxidizer; flowing a fuel gas to the burner of the regenerative thermal oxidizer, the fuel gas comprising methane; flowing an oxidizing gas to the burner of the regenerative thermal oxidizer, the oxidizing gas comprising oxygen; combusting, by the burner, the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas within the combustion chamber of the regenerative thermal oxidizer, the exhaust gas comprising a fluoride-containing byproduct; and absorbing, by a heat recovery packing bed disposed within the combustion chamber, at least a portion of the heat produced by combustion of the fuel gas and the feed gas, the heat recovery packing bed made of a ceramic material comprising aluminum oxide.21 . The method of claim 20, wherein the fluorinated compound is a fluorinated organic compound.

22. The method of claim 21 , wherein the feed gas comprises a fluorinated inorganic compound.

23. The method of any of claims 20-22, wherein the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.Attorney Docket No.: FP0040-W00124. The method of claim 23, comprising insulating, by the plurality of insulating refractory bricks, the combustion chamber to mitigate heat dissipation from the combustion chamber to a surrounding environment.

25. The method of any of claims 20-24, wherein the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.

26. The method of any of claims 20-25, wherein the ceramic material comprises less than about 2 wt.% silicon dioxide.

27. The method of any of claims 20-26, wherein the ceramic material comprises less than about 1 wt.% silicon dioxide.

28. The method of any of claims 20-27, wherein the ceramic material is substantially free of silicon dioxide.

29. The method of any of claims 20-28, wherein the ceramic material comprises greater than about 90 wt.% aluminum oxide.

30. The method of any of claims 20-29, wherein the ceramic material comprises greater than about 95 wt.% aluminum oxide.31 . The method of any of claims 20-30, wherein the ceramic material comprises greater than about 99 wt.% aluminum oxide.

32. The method of any of claims 20-31 , wherein the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.

33. The method of any of claims 20-32, wherein at least the portion of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed, such that a centerline of the combustion chamber operates at an operating temperature of at least about 1 ,000 degrees Celsius (°C).

34. The method of any of claims 20-33, wherein at least about 85% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.Attorney Docket No.: FP0040-W00135. The method of any of claims 20-34, wherein at least about 92% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

36. The method of any of claims 20-35, wherein from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

37. The method of any of claims 20-35, wherein at least 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

38. A system comprising: a feed gas comprising a fluorinated compound; a fuel gas comprising methane; an oxidizing gas comprising oxygen; and a regenerative thermal oxidizer comprising: a combustion chamber; a burner coupled to the combustion chamber, the burner configured to receive the fuel gas, the oxidizing gas, and the feed gas, the burner configured to combust the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas comprising a fluoride-containing byproduct; and a heat recovery packing bed disposed within the combustion chamber, wherein the heat recovery packing bed is made of a ceramic material comprising aluminum oxide configured to absorb at least a portion of the heat produced by combustion of the fuel gas and the feed gas.

39. The system of claim 38, wherein the fluorinated compound is a fluorinated organic compound.

40. The system of claim 39, wherein the feed gas comprises a fluorinated inorganic compound.Attorney Docket No.: FP0040-W00141 . The system of any of claims 38-40, wherein the combustion chamber is lined with the ceramic material.

42. The system of any of claims 38-41 , wherein the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

43. The system of any of claims 38-42, wherein the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.

44. The system of any of claims 38-43, wherein the ceramic material comprises less than about 2 wt.% silicon dioxide.

45. The system of any of claims 38-44, wherein the ceramic material comprises less than about 1 wt.% silicon dioxide.

46. The system of any of claims 38-45, wherein the ceramic material is substantially free of silicon dioxide.

47. The system of any of claims 38-46, wherein the ceramic material comprises greater than about 90 wt.% aluminum oxide.

48. The system of any of claims 38-47, wherein the ceramic material comprises greater than about 95 wt.% aluminum oxide.

49. The system of any of claims 38-48, wherein the ceramic material comprises greater than about 99 wt.% aluminum oxide.

50. The system of any of claims 38-49, wherein the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.51 . The system of any of claims 38-50, comprising the exhaust gas, wherein the exhaust gas has a residence time within the combustion chamber of at least about 2 seconds.

52. The system of any of claims 38-51 , wherein the heat recovery packing bed is configured to absorb at least the portion of the heat produced by combustion of theAttorney Docket No.: FP0040-W001 fuel gas and the feed gas, such that a centerline of the combustion chamber has an operating temperature of at least about 1 ,000 degrees Celsius (°C).

53. The system of any of claims 38-52, wherein the heat recovery packing bed is configured to absorb at least about 85% of the heat produced by combustion of the fuel gas and the feed gas.

54. The system of any of claims 38-53, wherein the heat recovery packing bed is configured to absorb at least about 92% of the heat produced by combustion of the fuel gas and the feed gas.

55. The system of any of claims 38-54, wherein the heat recovery packing bed is configured to absorb from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas.

56. The system of any of claims 38-54, wherein the heat recovery packing bed is configured to absorb at least 95% of the heat produced by combustion of the fuel gas and the feed gas.

57. The system of any of claims 38-56, wherein the burner is a first burner, and the regenerative thermal oxidizer comprises a second burner coupled to the combustion chamber.

58. A system comprising: a regenerative thermal oxidizer comprising: a combustion chamber; a burner coupled to the combustion chamber, the burner configured to receive a fuel gas comprising methane, an oxidizing gas comprising oxygen, and a feed gas comprising a fluorinated compound, the burner configured to combust the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas comprising a fluoride-containing byproduct; and a heat recovery packing bed disposed within the combustion chamber, the heat recovery packing bed made of a ceramic material comprising aluminumAttorney Docket No.: FP0040-W001 oxide configured to absorb at least a portion of the heat produced by combustion of the fuel gas and the feed gas, the combustion chamber defining an outlet for discharging the exhaust gas from the regenerative thermal oxidizer; a quencher defining an exhaust inlet for receiving the exhaust gas discharged from the regenerative thermal oxidizer, the quencher defining a cooling inlet for receiving a cooling fluid, the quencher configured to bring the cooling fluid in contact with the exhaust gas to reduce an operating temperature of the exhaust gas, the quencher defining an exhaust outlet for discharging the exhaust gas at the reduced operating temperature from the quencher; and a scrubber defining a feed inlet for receiving the exhaust gas discharged from the quencher, the scrubber defining a scrubbing inlet for receiving a scrubbing fluid, the scrubber configured to bring the scrubbing fluid in contact with the exhaust gas to transfer at least a portion of the fluoride-containing byproduct present in the exhaust gas to the scrubbing fluid to produce a bottoms stream and an overhead stream, the bottoms stream comprising the fluoride-containing byproduct transferred from the exhaust gas to the scrubbing fluid, the overhead stream comprising a remaining portion of the exhaust gas excluding the fluoride- containing byproduct transferred from the exhaust gas to the scrubbing fluid.

59. The system of claim 58, wherein the fluorinated compound is a fluorinated organic compound.

60. The system of claim 59, wherein the feed gas comprises a fluorinated inorganic compound.61 . The system of any of claims 58-60, wherein the combustion chamber is lined with the ceramic material.

62. The system of any of claims 58-61 , wherein the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

63. The system of any of claims 58-62, wherein the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.Attorney Docket No.: FP0040-W00164. The system of any of claims 58-63, wherein the ceramic material comprises less than about 2 wt.% silicon dioxide.

65. The system of any of claims 58-64, wherein the ceramic material comprises less than about 1 wt.% silicon dioxide.

66. The system of any of claims 58-65, wherein the ceramic material is substantially free of silicon dioxide.

67. The system of any of claims 58-66, wherein the ceramic material comprises greater than about 90 wt.% aluminum oxide.

68. The system of any of claims 58-67, wherein the ceramic material comprises greater than about 95 wt.% aluminum oxide.

69. The system of any of claims 58-68, wherein the ceramic material comprises greater than about 99 wt.% aluminum oxide.

70. The system of any of claims 58-69, wherein the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.71 . The system of any of claims 58-70, comprising the exhaust gas, wherein the exhaust gas has a residence time within the combustion chamber of at least about 2 seconds.

72. The system of any of claims 58-71 , wherein the heat recovery packing bed is configured to absorb at least the portion of the heat produced by combustion of the fuel gas and the feed gas, such that a centerline of the combustion chamber has an operating temperature of at least about 1 ,000 degrees Celsius (°C).

73. The system of any of claims 58-72, wherein the heat recovery packing bed is configured to absorb at least about 85% of the heat produced by combustion of the fuel gas and the feed gas.Attorney Docket No.: FP0040-W00174. The system of any of claims 58-73, wherein the heat recovery packing bed is configured to absorb at least about 92% of the heat produced by combustion of the fuel gas and the feed gas.

75. The system of any of claims 58-74, wherein the heat recovery packing bed is configured to absorb from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas.

76. The system of any of claims 58-74, wherein the heat recovery packing bed is configured to absorb at least 95% of the heat produced by combustion of the fuel gas and the feed gas.

77. The system of any of claims 58-76, wherein the burner is a first burner, and the regenerative thermal oxidizer comprises a second burner coupled to the combustion chamber.

78. A method comprising: flowing a feed gas to a burner of a regenerative thermal oxidizer, the feed gas comprising a fluorinated compound, the burner coupled to a combustion chamber of the regenerative thermal oxidizer; flowing a fuel gas to the burner of the regenerative thermal oxidizer, the fuel gas comprising methane; flowing an oxidizing gas to the burner of the regenerative thermal oxidizer, the oxidizing gas comprising oxygen; combusting, by the burner, the fuel gas and the feed gas in the presence of the oxidizing gas to produce heat and an exhaust gas within the combustion chamber of the regenerative thermal oxidizer, the exhaust gas comprising a fluoride-containing byproduct; absorbing, by a heat recovery packing bed disposed within the combustion chamber, at least a portion of the heat produced by combustion of the fuel gas and the feed gas, the heat recovery packing bed made of a ceramic material comprising aluminum oxide;Attorney Docket No.: FP0040-W001 flowing the exhaust gas from the regenerative thermal oxidizer to a quencher; flowing a cooling fluid to the quencher, the cooling fluid comprising hydrofluoric acid; contacting the exhaust gas with the cooling fluid within the quencher to reduce an operating temperature of the exhaust gas; flowing the exhaust gas at the reduced operating temperature from the quencher to a scrubber; flowing a scrubbing fluid to the scrubber, the scrubbing fluid comprising water; and contacting the exhaust gas with the scrubbing fluid within the scrubber to transfer at least a portion of the fluoride-containing byproduct present in the exhaust gas to the scrubbing fluid to produce a bottoms stream and an overhead stream, the bottoms stream comprising the fluoride-containing byproduct transferred from the exhaust gas to the scrubbing fluid, the overhead stream comprising a remaining portion of the exhaust gas excluding the fluoride- containing byproduct transferred from the exhaust gas to the scrubbing fluid.

79. The method of claim 78, wherein the fluorinated compound is a fluorinated organic compound.

80. The method of claim 79, wherein the feed gas comprises a fluorinated inorganic compound.81 . The method of any of claims 78-80, wherein the combustion chamber is lined with a plurality of insulating refractory bricks made of the ceramic material.

82. The method of claim 81 , comprising insulating, by the plurality of insulating refractory bricks, the combustion chamber to mitigate heat dissipation from the combustion chamber to a surrounding environment.

83. The method of any of claims 78-82, wherein the ceramic material comprises less than about 5 weight percent (wt.%) silicon dioxide.Attorney Docket No.: FP0040-W00184. The method of any of claims 78-83, wherein the ceramic material comprises less than about 2 wt.% silicon dioxide.

85. The method of any of claims 78-84, wherein the ceramic material comprises less than about 1 wt.% silicon dioxide.

86. The method of any of claims 78-85, wherein the ceramic material is substantially free of silicon dioxide.

87. The method of any of claims 78-86, wherein the ceramic material comprises greater than about 90 wt.% aluminum oxide.

88. The method of any of claims 78-87, wherein the ceramic material comprises greater than about 95 wt.% aluminum oxide.

89. The method of any of claims 78-88, wherein the ceramic material comprises greater than about 99 wt.% aluminum oxide.

90. The method of any of claims 78-89, wherein the combustion chamber is sized for the exhaust gas having a residence time within the combustion chamber of at least about 2 seconds.91 . The method of any of claims 78-90, wherein at least the portion of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed, such that a centerline of the combustion chamber operates at an operating temperature of at least about 1 ,000 degrees Celsius (°C).

92. The method of any of claims 78-91 , wherein at least about 85% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

93. The method of any of claims 78-92, wherein at least about 92% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.Attorney Docket No.: FP0040-W00194. The method of any of claims 78-93, wherein from about 92% to about 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

95. The method of any of claims 78-93, wherein at least 95% of the heat produced by combustion of the fuel gas and the feed gas is absorbed by the heat recovery packing bed.

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