Rotation rate sensor having a substrate and a double rotor and method for operating a rotation rate sensor having a substrate and a double rotor

Abstract

A rotation rate sensor and a method for operating a rotation rate sensor having a substrate and a double rotor are proposed, the substrate having a main plane of extent with an X direction and a Y direction running perpendicular thereto, the double rotor having a first rotor and a second rotor which are each elastically connected to the substrate via a suspension by means of one of first spring elements and are elastically connected to one another in such a way that the two rotors can be excited to anti-phase rotary oscillations, the axes of rotation of the rotors each running parallel to a Z direction perpendicular to the main plane of extent of the substrate, the first rotor being elastically connected to a first seismic mass and a second seismic mass, the second rotor being elastically connected to a third seismic mass and a fourth seismic mass, the first seismic mass being connected to the third seismic mass via a first rocker element in each case by means of one of fourth spring elements, the second seismic mass being connected to the fourth seismic mass via a second rocker element in each case by means of another one of the fourth spring elements, each of the first spring elements having a first spring constant in the Y direction, each of the fourth spring elements having a fourth spring constant in the Y direction.

Description

[0001] Description

[0002] title

[0003] Rotation rate sensor with a substrate and a double rotor and method for operating a rotation rate sensor with a substrate and a double rotor

[0004] State of the art

[0005] The invention relates to a gyroscope with a substrate and a double rotor according to the preamble of claim 1.

[0006] Such rotation rate sensors with a substrate and a double rotor are generally known.

[0007] For example, a three-axis angular rate sensor with a substrate and a double rotor is known from the publication DE 102021 200483 A1, wherein the double rotor has a first and second rotor which are elastically connected to each other via a first coupling element in such a way that the two rotors can be excited to antiphase rotational vibrations.

[0008] A disadvantage of this type of gyroscope is that the drive movement (out-of-phase rotational oscillations) of the two rotors (due to the coupling of the first and third seismic masses via the first rocker element and the second and fourth seismic masses via the second rocker element) and the detection (in-plane detection mode) of a rotation rate applied in the Z-direction, combined with the topological design of the gyroscope and possible external vibrations, rotational and linear accelerations, generate an undesirable in-plane parallel mode to the in-plane detection mode. This superposition of the in-plane parallel mode and the in-plane detection mode results from the largely independent deflection of the rocker elements and, in conventional gyroscopes of this type, ensures that the excitation frequencies of these modes lie in approximately the same region of the frequency domain or spectrum.This further leads to increased susceptibility of the gyroscope to interference from external vibrations, rotational and linear accelerations. Manufacturing-related imperfections then lead, especially with rotational acceleration around the Z-axis, to a particularly high susceptibility to interference in the frequency range of the drive and detection frequency and generate faulty (in-plane) detection signals.

[0009] Disclosure of the invention

[0010] Against this background, the task is to provide a rotation rate sensor with a substrate and a double rotor which, by virtue of its design, does not have the aforementioned disadvantages and ensures a significant frequency difference between the excitation frequency of the in-plane detection mode and the excitation frequency of the in-plane parallel mode in the frequency domain or spectrum.

[0011] The gyroscope according to the invention, comprising a substrate and a double rotor, offers the advantage over the prior art of reduced susceptibility to interference from external vibrations, rotational and linear accelerations, and ensures effective and efficient operation of the gyroscope. This is advantageously achieved by generating a large frequency difference, compared to the prior art, between the excitation frequency of the in-plane detection mode and the excitation frequency of the in-plane parallel mode in the frequency domain or spectrum. Furthermore, this is advantageously achieved due to a weaker coupling ratio between the first and second rotors with the substrate compared to the coupling of the respective seismic masses (coupled to the respective rotors) and the first and second rocker elements.According to the invention, the ratio of the first spring constant in the Y-direction to the fourth spring constant in the Y-direction has a value less than 125, in particular less than 100, preferably less than 50, and preferably between 10 and 15. The smaller the ratio of the coupling in the Y-direction of the first and second rotors with the substrate compared to the coupling in the Y-direction of the respective seismic masses and the first and second rocker elements (and / or in particular compared to other couplings in the Y-direction between the components within the gyroscope), the greater the frequency difference between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum. Furthermore, this also reduces the dependence or influence of the in-plane detection mode and the in-plane parallel mode on each other (and accordingly also the dependence or influence of the in-plane detection mode on the in-plane parallel mode).The influence on the deflection of the first rocker element and the second rocker element relative to each other is increased. Due to the small ratio of the coupling in the Y-direction of the rotors with the substrate compared to the coupling in the Y-direction of the seismic masses with the rocker elements (and / or especially compared to the other couplings in the Y-direction between the components within the gyroscope), the rotors can execute a comparatively small (i.e., compared to other functional deflections within the gyroscope) but inventive deflection in the Y-direction within the in-plane parallel mode. Thus, a possible excitation or the excitation frequency of the in-plane parallel mode is shifted into the low-frequency range. Due to this shift of the excitation frequency of the in-plane parallel mode into the low-frequency range, a change occurs in the frequency domain.The spectrum is characterized by a larger frequency spacing between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode. In particular, this spacing exhibits a width in the frequency domain or spectrum of more than 50 Hertz (state of the art). Furthermore, this results in a more pronounced deflection, especially in the deflection of the first and second rocker elements, within the in-plane detection mode and the in-plane parallel mode. This means that, on the one hand, these are excited with higher intensity, and on the other hand, as already mentioned above, a larger frequency spacing between their excitation frequencies is ensured. The frequency spacing in the excitation frequencies and the more pronounced deflection thus result in the gyroscope exhibiting greater robustness against external disturbances such as external vibrations, rotational and linear accelerations. Furthermore, the gyroscope is more resistant to manufacturing-related, i.e.,Imperfections lying within manufacturing tolerances, which in particular break the symmetry of the topological arrangement of the gyroscope, are less susceptible to rotational acceleration, especially in the Z direction.

[0012] Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings.

[0013] According to an advantageous embodiment of the invention, it is provided that both the first seismic mass and the second seismic mass are connected to the first rotor and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the first rotor by means of one of the second spring elements, wherein both the third seismic mass and the fourth seismic mass are connected to the second rotor and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the second rotor by means of another of the second spring elements, wherein each of the second spring elements has a second spring constant in the Y-direction, wherein the ratio of the first spring constant in the Y-direction to the second spring constant in the Y-direction has a value of less than 3300, in particular less than 1500, preferably less than 500, preferably less than 200.This exhibits a weaker relationship, or a smaller ratio, of the coupling in the Y-direction of the first and second rotors with the substrate compared to the coupling in the Y-direction between the rotors and the seismic masses in the radial direction, as seen in the prior art. This results in a larger frequency separation of the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum. Within the in-plane parallel mode, this advantageously supports the small Y-direction displacement of the two rotors (compared to other functional displacements). The shift towards the lower frequency range of the excitation frequency of the in-plane parallel mode is thus advantageously supported, and the benefits of a larger frequency separation between the excitation frequencies, as well as the stronger expression of the in-plane detection mode and the in-plane parallel mode, are enhanced.The robustness of the gyroscope is therefore ensured. According to an advantageous embodiment of the invention, both the first seismic mass and the second seismic mass are connected to the first rotor and are arranged to be elastically deflected in a tangential direction and essentially parallel to the main extension plane by means of one of the third spring elements and one of the fifth spring elements, respectively, with respect to an axis of symmetry of the suspension of the first rotor in the Y-direction, one of the third spring elements is arranged in the negative X-direction and one of the fifth spring elements is arranged in the positive X-direction, respectively, and both the third seismic mass and the fourth seismic mass are connected to the second rotor and are arranged in a tangential direction and essentially parallel to the main extension plane by means of another of the third spring elements and one of the fifth spring elements, respectively.one of the fifth spring elements is arranged to be elastically deflectable, wherein, with respect to an axis of symmetry of the suspension of the second rotor in the Y-direction, one of the third spring elements is arranged in the positive X-direction and one of the fifth spring elements is arranged in the negative X-direction, wherein each of the third spring elements has a third spring constant in the Y-direction, and wherein each of the fifth spring elements has a fifth spring constant in the Y-direction, and wherein the ratio of the first spring constant in the Y-direction to the third spring constant in the Y-direction and the ratio of the first spring constant in the Y-direction to the fifth spring constant in the Y-direction has a value less than 6600, in particular less than 3000, preferably less than 1500, preferably less than 600. This is due to a weaker ratio compared to the prior art, or a smaller ratio compared to the prior art.The ratio of the coupling in the Y-direction of the first and second rotors with the substrate, compared to the coupling in the Y-direction of the rotors and the respective seismic masses, advantageously favors the larger frequency spacing of the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum, i.e., the shift of the excitation frequency of the in-plane parallel mode into the lower frequency range. Furthermore, this also advantageously supports the small Y-direction deflection of the two rotors (compared to other functional deflections within the gyroscope) and the stronger expression of the in-plane detection mode and the in-plane parallel mode. According to an advantageous embodiment of the invention, each of the first spring elements comprises a partial spring element and a further partial spring element, with respect to the axis of symmetry of the respective suspension of the first rotor and thesecond rotor in the X direction and with regard to the respective first spring element

[0014] -- the corresponding partial spring element is arranged in the positive Y direction between the suspension of the respective rotor and the respective rotor and

[0015] -- the corresponding additional spring element is arranged in the negative Y-direction between the suspension of the respective rotor and the respective rotor itself. The symmetrical arrangement of the spring element and the additional spring element (in the positive Y-direction between the suspension of the respective rotor and the respective rotor, and in the negative Y-direction between the suspension of the respective rotor and the respective rotor) advantageously promotes a larger frequency spacing of the excitation frequencies in the frequency domain or spectrum and a stronger expression of the in-plane detection modes and the in-plane parallel modes. Therefore, increased robustness against external disturbances, such as external vibrations, rotational and linear accelerations, can be advantageously achieved.Furthermore, due to the symmetrical arrangement of the partial spring element and the other partial spring element, the (compared to other functional deflections within the gyroscope) small deflection of the rotors in the Y direction within the in-plane parallel mode (and the associated shift of the excitation frequency of the in-plane parallel mode into the low-frequency range) can be advantageously supported.

[0016] According to an advantageous embodiment of the invention, the fourth spring elements are designed as a cross spring and / or as a meandering cross spring, wherein the cross spring and / or the meandering cross spring is designed such that they each have or consist of substantially straight beam elements, wherein the length and width of the beam elements are variably designed, wherein in particular the cross spring is designed such that it has or consists of beam elements running parallel between its connection to one of the rocker elements and its connection to one of the seismic masses, connected at their connection ends and arranged substantially crosswise with respect to one axis and another axis, wherein in particular preferably the distance between the parallel beam elements is variably designed.Due to the design of the fourth spring elements as a cross spring and / or meandering cross spring, in-plane bending and gravity movements within a drive mode of the gyroscope can be advantageously supported, as well as compliance and transmission of a movement in the Y direction with respect to the in-plane parallel mode and in-plane detection mode.

[0017] Furthermore, this design of the fourth spring element also allows symmetrical and antisymmetrical out-of-plane detection modes (such as those generated when a rotation rate is applied in the X or Y direction) to be effectively and efficiently promoted.

[0018] According to an advantageous embodiment of the invention, the first rotor and the second rotor are elastically connected to each other by means of a sixth spring element, wherein the sixth spring element is in particular designed as a phi spring or double phi spring. This advantageously ensures effective and efficient operation of the gyroscope.

[0019] According to an advantageous embodiment of the invention, the first rocker element and / or the second rocker element are elastically connected to the substrate by means of seventh spring elements, wherein the seventh spring elements are in particular designed as torsion springs. This advantageously ensures effective and efficient operation of the gyroscope.

[0020] According to an advantageous embodiment of the invention, the first spring elements are designed as simple T-relief elements and / or as double-sided T-relief elements. This advantageously ensures effective and efficient operation of the gyroscope.

[0021] According to an advantageous embodiment of the invention, the third and / or fifth spring elements are designed as simple beam springs and / or U-springs and / or meandering U-springs. This advantageously ensures effective and efficient operation of the gyroscope.

[0022] According to an advantageous embodiment of the invention, the first and second rocker elements each have first detection electrodes, in particular in-plane detection electrodes, the seismic masses each have second detection electrodes, in particular in-plane and out-of-plane detection electrodes, and the first and second rotors each have third detection electrodes. This advantageously ensures effective and efficient operation of the gyroscope.

[0023] A further object of the invention is a method for operating the rotation rate sensor according to the invention, wherein the antiphase rotational oscillation is controlled via at least one ASIC, wherein at least one voltage required for this purpose is provided, wherein at least one applied rotation rate is detected by reading the detection electrodes, wherein a rotation rate signal for an applied rotation rate about the Z-direction is calculated from the difference of a sum signal of the in-plane detection electrodes to the first and second seismic masses and a sum signal of the in-plane detection electrodes to the third and fourth seismic masses, wherein a rotation rate signal for an applied rotation rate about the Y-direction is calculated from the difference of a sum signal of the out-of-plane detection electrodes to the first and second seismic masses and a sum signal of the out-of-plane detection electrodes to the third and fourth seismic masses.wherein a rotation rate signal for an applied rotation rate around the X-direction is calculated from a difference signal of the third detection electrodes to the first and second rotors.

[0024] According to an advantageous embodiment of the invention, it is provided that the detection electrodes are read out capacitively and / or piezo-resistively and / or piezo-electrically and / or magnetically and / or optically.

[0025] The advantages and features described in connection with the embodiments of the inventive gyroscope with a substrate and a double rotor can be applied to the method for operating the gyroscope with a substrate and a double rotor.

[0026] Exemplary embodiments of the present invention are shown in the drawings and explained in more detail in the following description.

[0027] Brief description of the drawings:

[0028] Figure 1 shows a schematic representation of a gyroscope with a substrate and a double rotor according to the prior art.

[0029] Figure 2 shows a schematic representation of a drive movement or

[0030] Drive mode of the gyroscope according to the state of the art.

[0031] Figure 3 shows a schematic representation of an in-plane detection mode of the gyroscope according to the prior art.

[0032] Figure 4 shows a schematic representation of an in-plane parallel mode of the gyroscope according to the prior art.

[0033] Figure 5 shows a schematic representation of a gyroscope with a substrate and a double rotor according to an exemplary embodiment of the present invention.

[0034] Figure 6 shows a schematic representation of an in-plane parallel mode of the gyroscope according to the exemplary embodiment of the present invention.

[0035] Figure 7 shows various embodiments of spring elements according to the invention.

[0036] Figures 8a to d show a cross spring according to an exemplary embodiment as part of the present invention in various load conditions.

[0037] Embodiments of the invention: Figures 1 to 4 schematically illustrate a gyroscope with a substrate and a double rotor according to the prior art, in order to explain a sensor arrangement according to the invention. The substrate (not shown) has a principal plane of extension with an X-direction and a Y-direction perpendicular to it. The following describes how individual components of the gyroscope according to the prior art are connected to one another by means of various spring elements or coupling structures.In detail, a distinction is made between first spring elements, each with a first spring constant k1; second spring elements, each with a second spring constant k2; third spring elements, each with a third spring constant k3; fourth spring elements, each with a fourth spring constant k4; fifth spring elements, each with a fifth spring constant k5; a sixth spring element with a spring constant k6; and seventh spring elements, each with a seventh spring constant k7. The respective spring constants in the Y-direction are particularly important here. For clarity (and due to the symmetrical topological arrangement of the angular rate sensor), the reference symbols for the spring constants are only given for the right-hand side.

[0038] In the prior art, a ratio of the first spring constant k1 in the Y-direction to the fourth spring constant k4 in the Y-direction of equal to (or greater than) 125 is used. Furthermore, a ratio of the first spring constant k1 in the Y-direction to the second spring constant k2 in the Y-direction of equal to (or greater than) 3300 is proposed in the prior art. Additionally, ratios of the first spring constant k1 in the Y-direction to the third spring constant k3 in the Y-direction and to the fifth spring constant k5 in the Y-direction of equal to (or greater than) 6600 are specified. The basic element of the gyroscope according to the prior art is formed by the counter-phase oscillating double rotor.The two rotors m1, m1' are each elastically connected to the substrate (not shown) via a suspension a1 by means of one of the first spring elements and are elastically connected to each other by means of the sixth spring element such that the two rotors m1, m1' can be excited to antiphase torsional vibrations. The axes of rotation of the rotors m1, m1' each run parallel to a Z-direction perpendicular to the main plane of extension of the substrate. A first seismic mass m2 and a second seismic mass m2' are partitioned off in the first rotor m1 and each elastically connected to the first rotor m1. In detail, both the first seismic mass m2 and the second seismic mass m2' are attached to the first rotor m1 and arranged to be elastically deflected in the radial direction and essentially parallel to the main plane of extension relative to the first rotor m1 by means of one of the second spring elements.Furthermore, both the first seismic mass m2 and the second seismic mass m2' are elastically deflected on the first rotor m1 in a tangential direction (and also essentially parallel to the main extension plane) by means of one of the third spring elements and one of the fifth spring elements, respectively. With respect to an axis of symmetry of the suspension a1 of the first rotor m1 in the Y-direction, one of the third spring elements is arranged in the negative X-direction and one of the fifth spring elements in the positive X-direction. Additionally, a third seismic mass m2" and a fourth seismic mass m2'' are partitioned off in the second rotor m1' and each is elastically connected to the second rotor m1'.In detail, both the third seismic mass m2" and the fourth seismic mass m2'" are connected to the second rotor m1' and are arranged in a radial direction and essentially parallel to the main plane of extension relative to the second rotor m1', each by means of a different second spring element so as to be elastically deflected. Furthermore, both the third seismic mass m2" and the fourth seismic mass m2'" are arranged in a tangential direction (and also essentially parallel to the main plane of extension) on the second rotor m1', each by means of a different third spring element and each by means of a different fifth spring element so as to be elastically deflected. With respect to an axis of symmetry of the suspension a1 of the second rotor m1' in the Y-direction, one of the third spring elements is arranged in the positive X-direction and one of the fifth spring elements is arranged in the negative X-direction.

[0039] The first seismic mass m2 is connected to the third seismic mass m2" via a first rocker element m3, each by means of one of the fourth spring elements, such that when the first seismic mass m2 is radially displaced, the third seismic mass m2" is deflected in a direction opposite to the radial displacement of the first mass m2. Furthermore, the second seismic mass m2' is connected to the fourth seismic mass m2'" via a second rocker element m3', each by means of another of the fourth spring elements, such that when the second seismic mass m2' is radially displaced, the fourth seismic mass m2'" is deflected in a direction opposite to the radial displacement of the second seismic mass m2'. Finally, the first rocker element m3 and the second rocker element m3' are each elastically connected to the (not shown) substrate via a suspension a2 by means of one of the seventh spring elements.Due to this arrangement, the first and second rocker elements m3, m3' can be deflected and excited largely independently of each other. This results in excitation frequencies of an in-plane detection mode and an (undesired) in-plane parallel mode being located in approximately the same region of the frequency domain and spectrum (also due to the topological structure of the gyroscope). Furthermore, this leads to increased susceptibility of the gyroscope to disturbances caused by external vibrations, rotational and linear accelerations, especially rotational acceleration around the Z-axis. In particular, manufacturing-related imperfections, i.e., those within manufacturing tolerances, which especially break the symmetry of the topological arrangement with regard to manufacturing-related edge loss gradients, lead to a comparatively high susceptibility to errors in in-plane detection.within in-plane detection signals. The state-of-the-art gyroscope can therefore be affected by manufacturing-related imperfections, such as a manufacturing-related edge loss gradient(s), during rotational accelerations, particularly around the Z-axis, in the frequency range of the drive and detection frequencies. Furthermore, the first and second rocker elements m3, m3' each have first detection electrodes e1, in particular in-plane detection electrodes. The seismic masses m2, m2', m2", m2'" each have second detection electrodes, in particular in-plane and out-of-plane detection electrodes e2, and the first and second rotors m1, m1' each have third detection electrodes e3. For clarity, these detection electrodes are shown here only for the left side of the double rotor.Figure 2 shows the drive movement of the rotors m1, m1' of the double rotor. As indicated by the arrows, the rotors are set into out-of-phase rotational oscillations by a drive (not shown) when the gyroscope is operated. The first rotor m1 (shown on the left) rotates clockwise, and the second rotor m1' (shown on the right) rotates counterclockwise. Furthermore, it is shown that the first and second rocker elements m3, m3' essentially do not undergo any (detection) deflection due to the drive movement.

[0040] Figure 3 shows an in-plane detection motion or in-plane detection mode with an applied rotation rate in the Z-direction. As indicated by the arrows, the seismic masses m2, m2', m2", m2'" are deflected due to the effect of the Coriolis force (with an applied rotation rate in the Z-direction). In detail, the first seismic mass m2 and the second seismic mass m2' are displaced radially relative to the first rotor m1 towards its center (i.e., essentially moved along the Y-direction towards the center of the first rotor m1) due to the resulting Coriolis force. The third seismic mass m2" and the fourth seismic mass m2'" are (due to the resulting Coriolis force) displaced or deflected in a radial direction relative to the second rotor m1' away from the center of the second rotor m1' (i.e., essentially moved away along the Y-direction from the center of the second rotor m1').The first and second rocker elements m3, m3' also experience a deflection as a result, supporting or promoting the opposing deflections of the seismic masses m2, m2', m2", m2'". Specifically, the first rocker element m3 experiences a deflection or rotation about an axis of symmetry of its suspension a2 in the Z-direction, and the second rocker element m3' experiences an opposing deflection or rotation about an axis of symmetry of its suspension a2 in the Z-direction.

[0041] Figure 4 shows an in-plane parallel mode, primarily due to an acting rotational or linear acceleration and / or external vibrations. In contrast to the displacements in Figure 3, here the seismic masses m2, m2', m2", m2'" are deflected, as indicated by the arrows, primarily due to the effect of the rotational or linear acceleration and / or external vibrations. Specifically, the first seismic mass m2 and the second seismic mass m2' are deflected essentially along the Y-direction in a negative direction, and the third seismic mass m2" and the fourth seismic mass m2'" are deflected essentially along the Y-direction in a positive direction. Due to this deflection of the seismic masses m2, m2', m2", m2'", the first and second rocker elements m3, m3' also exhibit a deflection or rotation about their respective axes of symmetry in the Z-direction of the suspension a2. In contrast to the displacements or rotations in Figure 3, the first and second rocker elements m3, m3' are also deflected or rotated about their respective axes of symmetry in the Z-direction of the suspension a2.Rotations of the rocker elements m3, m3' in Figure 3 cause them to deflect or rotate in the same direction. This results in erroneous in-plane detection signals being generated, particularly in the case of manufacturing imperfections.

[0042] Figure 5 shows a gyroscope with a double rotor and a substrate according to an embodiment of the present invention. The first, second, and fourth spring elements are schematically adapted in width in the X-direction according to their different spring constants k1, k2, and k4, respectively, and coupling strengths, with respect to the prior art (Figures 1 to 4). Due to a weaker relationship or a smaller ratio of the coupling or coupling strength of the first and second rotors m1, m1' with the substrate compared to the coupling or coupling strength of the respective seismic masses m2, m2', m2", m2'" and the first and second rocker element m3, m3' (coupled to the respective rotor), and / or especially compared to other couplings or coupling strengths between the components within the gyroscope, it is advantageously possible that a significant orA larger frequency separation is generated between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum. Furthermore, a more pronounced deflection is observed, particularly with respect to the first and second rocker elements m3 and m3', within the in-plane detection mode and the in-plane parallel mode. Thus, the in-plane detection mode and the in-plane parallel mode are excited more intensely, and a significantly larger frequency separation is generated between their excitation frequencies (i.e., these modes essentially do not overlap). This also results in an advantage over the prior art: increased robustness against external disturbances such as external vibrations, rotational accelerations, and linear accelerations.Furthermore, imperfections such as those occurring within the scope of manufacturing tolerances, particularly those that break the symmetry of the topological arrangement of the angular rate sensor, such as manufacturing-related edge loss gradients, have a less pronounced effect on the detection of rotational accelerations, especially rotational accelerations about the Z-axis. The mode shapes (in-plane detection mode and in-plane parallel mode) and frequencies (excitation frequencies of the respective in-plane mode) thus change less significantly for the same edge loss gradient. The ratio according to the invention between the first spring constant k1 in the Y-direction and the fourth spring constant k4 in the Y-direction has a value less than 125, particularly less than 100, preferably less than 50, and preferably between 10 and 15. The smaller or weaker the ratio or the relationship of the coupling, the less pronounced the effect.The more precisely the coupling strength in the Y-direction of the first and second rotors m1, m1' with the substrate is designed, compared to the coupling or coupling strength in the Y-direction of the respective seismic masses m2, m2', m2", m2'" and the first and second rocker elements m3, m3', and / or especially compared to other couplings or coupling strengths in the Y-direction between the components within the gyroscope, the greater the frequency difference between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum. This is particularly evident in a relatively (i.e.,In comparison to the other couplings in the Y-direction between the individual components within the gyroscope, a weak coupling of the rotors m1, m1' with the substrate is realized via the respective suspension a1 in the Y-direction and causes the rotors m1, m1' to be able to perform a small or infinitesimal, but inventive, deflection in the Y-direction within the framework of the in-plane parallel mode, compared to other functional deflections within the arrangement of the gyroscope, and thus the excitation frequency of the in-plane parallel mode is shifted into the low-frequency range.This is particularly preferably achieved by means of a weak coupling in the Y-direction of the rotors m1, m1' with the substrate via the respective suspension a1 in the Y-direction, compared to the prior art (Figures 1 to 4), and / or a strong coupling in the Y-direction of the respective seismic masses m2, m2', m2", m2'" and the first and second rocker elements m3, m3', compared to the prior art (Figures 1 to 4). Preferably, the ratio of the first spring constant k1 in the Y-direction to the second spring constant k2 in the Y-direction has a value of less than 3300, particularly less than 1500, preferably less than 500, and preferably less than 200.Furthermore, the ratio of the first spring constant k1 in the Y-direction to the third spring constant k3 in the Y-direction and the ratio of the first spring constant k1 in the Y-direction to the fifth spring constant k5 in the Y-direction preferably have a value less than 6600, in particular less than 3000, preferably less than 1500, and preferably less than 600. These smaller or weaker Y-direction couplings of the first and second rotors m1, m1' with the substrate, compared to the couplings in the Y-direction between the rotors m1, m1' and the seismic masses m2, m2', m2", m2'" in the radial and tangential directions, advantageously support the small or infinitesimal Y-direction displacements of the rotors m1, m1' compared to the other functional displacements, and thus the shift of the excitation frequency of the in-plane parallel mode into the low-frequency range. Therefore, a significant orA larger frequency difference between the excitation frequency of the in-plane detection mode and the excitation frequency of the in-plane parallel mode in the frequency domain or spectrum is favored. Furthermore, this also supports the stronger deflections, particularly of the first and second rocker elements m3, m3', within the in-plane detection mode and the in-plane parallel mode. In this embodiment, each of the first spring elements comprises a sub-spring element and a further sub-spring element, with respect to an axis of symmetry a1 of the respective suspension of the first rotor m1 and the second rotor m1' in the X-direction and with respect to the respective first spring element.

[0043] - the corresponding partial spring element is arranged in the positive Y direction between the suspension a1 of the respective rotor m1 , m1 ' and the respective rotor m1 , m1 ' and

[0044] - the corresponding additional partial spring element is arranged in the negative Y-direction between the suspension a1 of the respective rotor m1, m1' and the respective rotor m1, m1'. This also promotes a particularly weak coupling of the rotors m1, m1' with the (not shown) substrate, especially compared to the prior art. Due to the symmetrical arrangement of the partial spring elements and the additional partial spring elements (in the positive Y-direction between the suspension a1 of the respective rotor m1, m1' and the respective rotor m1, m1' and in the negative direction between the suspension a1 of the respective rotor m1, m1' and the respective rotor m1, m1'), the deflections within the gyroscope are small compared to other functional deflections.Infinitesimal deflection of the rotors m1, m1' in the Y direction within the framework of the in-plane parallel mode (and the associated shift of the excitation frequency of the in-plane parallel mode into the low-frequency range) is advantageously supported.

[0045] Figure 6 schematically shows an in-plane parallel mode of the gyroscope according to an exemplary embodiment of the present invention. Such an in-plane parallel mode is generated, in particular, by the action of a rotational or linear acceleration and / or external vibrations. The difference from the prior art (Figure 4) is that the first rotor m1 and the second rotor m1' are deflected in the direction of displacement of the seismic masses m2, m2', m2", m2'" (indicated by the comparatively small arrows), particularly due to the relatively (i.e.,Compared to the other couplings between the individual components within the gyroscope, there is weak coupling in the Y-direction with the substrate and / or, compared to the prior art (Figures 1 to 4), weak coupling in the Y-direction with the substrate and / or, compared to the prior art (Figures 1 to 4), strong coupling in the Y-direction of the respective seismic masses m2, m2', m2", m2'" and the first and second rocker elements m3, m3'. This displacement is small or infinitesimal compared to other functional displacements, but it allows the in-plane parallel mode to be shifted into the low-frequency range. This results in a significant or larger frequency difference between the excitation frequency of the in-plane parallel mode and the excitation frequency of the in-plane detection mode.Therefore, false signals during rotational accelerations, especially around the Z-axis, can be reduced in a frequency range of the drive frequencies between 15% and 50% and in the frequency range of the detection frequencies by 50% (i.e. by a factor of 2).

[0046] Figure 7 shows various embodiments of the respective spring elements according to the invention. These embodiments serve as guidelines and are not exhaustively shown or listed. A Phi spring 100 is shown in the upper left of Figure 7. This consists of beam elements arranged in an O-shape (here, the O-shape is formed by means of two relatively long and two relatively short beam elements). Below this, a double Phi spring 110 can be seen. This is designed in the same way as the Phi spring 100 in certain sections; however, the two individual O-shaped components are connected to each other centrally at one of the relatively long beam elements. Preferably, the sixth spring element is designed as a Phi spring 100 or a double Phi spring 110. A simple beam or torsion spring 120 is shown in the center left of Figure 7.This consists of a comparatively long beam element and is preferably used for the configuration of the third and / or fifth spring elements and / or seventh spring elements. A U-spring 130 and a meandering U-spring 140 are shown in the lower left of Figure 7. The U-spring 130 consists of two comparatively long beam elements, which are connected only at one end by means of a comparatively short beam element. The meandering U-spring 160, in this configuration, consists of three comparatively long beam elements, with two of these beam elements also connected at one end. Preferably, the third and / or fifth spring elements can also be configured as U-springs 130 and / or meandering U-springs 140. A cross-spring 150 is shown in the upper right of Figure 7. This also consists of comparatively long beam elements, which are arranged in a cross shape, i.e.,The elements are connected to each other at 90° angles or, using comparatively small beam elements, at 360° angles. A meandering cross spring 160 is shown in the lower right of Figure 7. It also consists of comparatively long beam elements connected to each other at 90° angles or, using comparatively small beam elements, at 180° or 360° angles. The beam elements are arranged in a meandering pattern, particularly along a vertical axis of symmetry of the meandering cross spring 160. Preferably, a cross spring 150 and / or a meandering cross spring 160 is used for the configuration of the fourth spring elements. The comparatively long beam elements can, in turn, consist of partial beam elements. Furthermore, the first spring elements are configured as simple T-relief elements and / or as double-sided T-relief elements.

[0047] Figures 8a to 8d show one of the fourth spring elements configured as a cross spring 150 in various load modes according to the present invention. Arrows indicate the different load modes, triggered by the different (load) modes that can occur in the gyroscope. The cross spring 150 is configured such that it has or consists of essentially straight beam elements.The length and width of the beam elements are variable. The cross-spring 150 shown here is designed such that it has, or consists of, comparatively long beam elements running parallel between its connection 151 to one of the rocker elements m3, m3' and its connection 152 to one of the seismic masses m2, m2', m2", m2'". These beam elements are connected at their connection ends and arranged in a cruciform pattern with respect to an axis 153 and another axis 154. These comparatively long beam elements are connected by comparatively short beam elements. In particular, the spacing of the parallel beam elements can be varied by means of the comparatively short beam elements. Figure 8a shows the load on the fourth spring element, or the cross-spring 150, during the symmetrical out-of-plane detection movement or mode.In this figure, a torsion about axis 153 (i.e., the Y-axis), indicated by the arrow, takes place. This torsion is adjustable and controllable via the leg spacing, as well as the width and length of the beam elements. Figure 8b shows the loading within the context of the antisymmetric out-of-plane detection movement or mode. In this figure, bending about the further axis 154 (i.e., the X-axis) takes place. This bending is also adjustable and controllable via the spacing, as well as the width and length of the beam elements. Figure 8c shows a loading within the context of the in-plane detection mode and the in-plane parallel mode. The arrows indicate compliance and transmission of movement in the Y-direction. This compliance and transmission are adjustable and controllable, in particular, via the width and length of the beam elements arranged horizontally or along the further axis 154 (i.e., in the X-direction).Figure 8d shows in-plane bending and shearing forces as they arise for the drive movement or drive mode of the gyroscope. The arrows also indicate the load on the cross spring 150 as a result of the drive movement. This results in a degree of gradation or...

[0048] The effect of the drive movement or drive mode can be controlled by means of the width and length of the beam elements arranged along axis 153 and the further axis 154 (i.e., in the Y and X directions). This design, particularly of the fourth spring elements, advantageously facilitates the support of both in-plane bending and gravitational movements within the drive movement or drive mode of the gyroscope, as well as compliance and transmission of movements in the Y direction with respect to the in-plane detection mode and in-plane parallel mode.

[0049] The invention is not limited to the embodiments described above, but can rather be used for a wide variety of applications of inertial sensor-based navigation, orientation, and stabilization of objects. A processing unit within the sensor can be used to control the operation of the inertial sensor (e.g., power-saving mode, measuring ranges), to validate sensor signals and check them for tolerances (e.g., for internal sensor monitoring), and to perform signal conditioning (e.g.,...

[0050] The processing unit can perform tasks such as calculating position or orientation and filtering data, as well as selecting communication protocols. Various AI-based algorithms, including self-learning ones, can be used in the processing unit to evaluate and process data from inertial sensors, temperature sensors, and external data (e.g., GPS data, odometer data). Examples of applications include: - Automotive applications (e.g., ESP, rollover sensing, airbags, road noise suppression, anti-theft alarms, parking bump detection, road condition monitoring).

[0051] - in two-wheeled applications such as motorcycles, bicycles, and scooters (e.g., in ESP / AirBag, tilt detection, balancing)

[0052] - in the case of three-wheeled vehicles such as tuk-tuks

[0053] - in the avionics field (e.g. in flight stabilization and flight control)

[0054] - in industrial robot applications (e.g. in position control of excavator buckets, drilling, image stabilization, flight control, alignment of satellite antennas, fine motor skills when gripping robots)

[0055] - in applications for home and garden (e.g., in lawnmower navigation, door position monitoring)

[0056] - in medical applications (e.g. fall detection, movement and posture tracking)

[0057] - in sports and leisure applications (e.g. motion detection, posture detection (in golf clubs, tennis rackets or skis)

[0058] - in numerous consumer applications, e.g., in smartphones, tablets, wearables, hearables, drones, gaming toys, AR or VR. Furthermore, numerous designs, changes, modifications, deviations, variations and embodiments are possible, all of which fall within the scope of the invention.

Claims

Claims 1. Rotation rate sensor with a substrate and a double rotor, wherein the substrate has a principal extension plane with an X-direction and a Y-direction perpendicular to it, wherein the double rotor has a first rotor (m1) and a second rotor (m1'), each of which is elastically connected to the substrate via a suspension (a1) by means of one of the first spring elements and which are elastically connected to each other in such a way that the two rotors (m1, m1') can be excited to antiphase rotational oscillations, wherein the axes of rotation of the rotors (m1, m1') each run parallel to a Z-direction perpendicular to the principal extension plane of the substrate, wherein the first rotor (m1) is elastically connected to a first seismic mass (m2) and a second seismic mass (m2') in such a way that these are each mounted to be deflected in a radial direction relative to the first rotor (m1) and substantially parallel to the principal extension plane.wherein the second rotor (m1') is elastically connected to a third seismic mass (m2") and a fourth seismic mass (m2'') such that these are each mounted to be deflected radially relative to the second rotor (m1') and substantially parallel to the main extension plane, wherein the first seismic mass (m2) is connected to the third seismic mass (m2") via a first rocker element (m3) by means of one of the fourth spring elements such that the third seismic mass (m2") is deflected in a direction opposite to the radial deflection of the first mass (m2) when the first seismic mass (m2) is deflected radially, wherein the second seismic mass (m2') is connected to the fourth seismic mass (m2'') via a second rocker element (m3') by means of another of the fourth spring elements such thatthat the fourth seismic mass (m2“') is deflected in a direction opposite to the radial deflection of the second seismic mass (m2') when the second seismic mass (m2') is deflected radially, wherein each of the first spring elements has a first spring constant (k1) in the Y-direction, wherein each of the fourth spring elements has a fourth spring constant (k4) in the Y-direction, characterized in that, the ratio of the first spring constant (k1) in the Y direction to the fourth spring constant (k4) in the Y direction has a value less than 125.

2. Rotation rate sensor according to claim 1, characterized in that the ratio of the first spring constant (k1) in the Y direction to the fourth spring constant (k4) in the Y direction has a value less than 100, in particular less than 50.

3. Rotation rate sensor according to one of the preceding claims, characterized in that the ratio of the first spring constant (k1) in the Y direction to the fourth spring constant (k4) in the Y direction has a value between 10 and 15.

4. Rotation rate sensor according to one of the preceding claims, characterized in that both the first seismic mass (m2) and the second seismic mass (m2') are connected to the first rotor (m1) and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the first rotor (m1) by means of one of two spring elements, wherein both the third seismic mass (m2") and the fourth seismic mass (m2'') are connected to the second rotor (m1') and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the second rotor (m1') by means of another of the second spring elements. wherein each of the second spring elements has a second spring constant (k2) in the Y-direction, wherein the ratio of the first spring constant (k1) in the Y direction to the second spring constant (k2) in the Y direction has a value less than 3300, in particular less than 1500, preferably in particular less than 500, preferably in particular less than 200.

5. Rotation rate sensor according to one of the preceding claims, characterized in that both the first seismic mass (m2) and the second seismic mass (m2') are connected to the first rotor (m1) and are arranged to be elastically deflected in a tangential direction and substantially parallel to the main extension plane by means of one of third spring elements and one of fifth spring elements respectively. wherein with respect to an axis of symmetry of the suspension (a1) of the first rotor (m1) in the Y-direction, each of the third spring elements is arranged in the negative X-direction and each of the fifth spring elements is arranged in the positive X-direction, wherein both the third seismic mass (m2“) and the fourth seismic mass (m2“') are connected to the second rotor (m1') and are arranged to be elastically deflected in a tangential direction and essentially parallel to the main extension plane by means of a different third spring element and a different fifth spring element, wherein with respect to an axis of symmetry of the suspension (a1) of the second rotor (m1') in the Y-direction, one of the third spring elements is arranged in the positive X-direction and one of the fifth spring elements is arranged in the negative X-direction, each of the third spring elements having a third spring constant (k3) in the Y-direction, wherein each of the fifth spring elements has a fifth spring constant (k5) in the Y-direction, wherein the ratio of the first spring constant (k1) in the Y direction to the third spring constant (k3) in the Y direction and the ratio of the first spring constant (k1) in the Y direction to the fifth spring constant (k5) in the Y direction has a value less than 6600, in particular less than 3000, preferably in particular less than 1500, preferably in particular less than 600.

6. Rotation rate sensor according to one of the preceding claims, characterized in that each of the first spring elements comprises a partial spring element and a further partial spring element, wherein with respect to an axis of symmetry of the respective suspension (a1) of the first rotor (m1) and the second rotor (m1') in the X-direction and with respect to the respective first spring element - the corresponding partial spring element is arranged in the positive Y direction between the suspension (a1) of the respective rotor (m1, m1') and the respective rotor (m1, m1') and - the corresponding further partial spring element is arranged in the negative Y direction between the suspension (a1) of the respective rotor (m1, m1') and the respective rotor (m1 , m1').

7. Rotation rate sensor according to one of the preceding claims, characterized in that the fourth spring elements are designed as a cross spring (150) and / or as a meandering cross spring (160), wherein the cross-feather (150) and / or the meandering cross-feather (160) is designed such that these each have or consist of essentially straight beam elements, where the length and width of the beam elements can be varied, wherein in particular the cross spring (150) is designed such that it has or consists of beam elements running parallel between its connection (151) to one of the rocker elements (m3, m3') and its connection (152) to one of the seismic masses (m2, m2', m2“, m2'“), connected at their connection ends and arranged in a substantially cross-like manner with respect to an axis (153) and a further axis (154), in particular, the spacing of the parallel beam elements can preferably be designed to be variable.

8. Rotation rate sensor according to one of the preceding claims, characterized in that the first rotor (m1) and the second rotor (m1') are elastically connected to each other by means of a sixth spring element, wherein the sixth spring element is in particular designed as a Phi spring (100) or double Phi spring (110).

9. Rotation rate sensor according to one of the preceding claims, characterized in that the first rocker element (m3) and / or the second rocker element (m3') are elastically connected to the substrate by means of seventh spring elements, wherein the seventh spring elements are designed in particular as torsion springs (120).

10. Rotation rate sensor according to one of the preceding claims, characterized in that the first spring elements are designed as simple T-relief elements and / or as double-sided T-relief elements.

11. Rotation rate sensor according to one of the preceding claims, characterized in that the second spring elements are designed as a Phi spring (100) and / or double Phi spring (110).

12. Rotation rate sensor according to one of the preceding claims, characterized in that the third and / or fifth spring elements are designed as simple beam springs (120) and / or U-springs (130) and / or meandering U-springs (140).

13. Rotation rate sensor according to one of the preceding claims, characterized in that the first and second rocker element (m3. m3') each have first detection electrodes (e1), in particular in-plane detection electrodes. wherein the seismic masses (m2, m2', m2“, m2'“) each have second detection electrodes, in particular in-plane and out-of-plane detection electrodes (e2), wherein the first and second rotors (m1 , m1 ') each have third detection electrodes (e3).

14. Method for operating a gyroscope according to one of the preceding claims, characterized in that the antiphase rotational oscillation is controlled via at least one ASIC, wherein at least one voltage required for this purpose is provided, wherein at least one applied gyroscope rate is detected by reading the detection electrodes, wherein a gyroscope rate signal for an applied gyroscope rate about the Z-direction is calculated from the difference of a sum signal of the in-plane detection electrodes to the first and second seismic masses (m2, m2') and a sum signal of the in-plane detection electrodes to the third and fourth seismic masses (m2", m2'), wherein a gyroscope rate signal for an applied gyroscope rate about the Z-direction is calculated from the difference of a sum signal of the out-of-plane detection electrodes (e2) to the first and second seismic masses (m2, m2') and a sum signal of the out-of-plane detection electrodes (e2) to the third and fourth seismic masses (m2, m2').m2'“) a rotation rate signal for an applied rotation rate around the Y direction is calculated, whereby a difference signal from the third detection electrodes (e3) to the first and second rotors (m1, m1') is derived, A rotation rate signal is calculated for an applied rotation rate around the X-direction.

15. Method for operating a gyroscope according to claim 14, characterized in that the detection electrodes are read out capacitively and / or piezoresistively and / or piezoelectrically and / or magnetically and / or optically.

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