Spraying apparatus and substrate processing device

Abstract

The present application discloses a spraying apparatus and a substrate processing device. The spraying apparatus comprises a main body and a switch element. A cavity is provided inside the main body, and the main body is further provided with a liquid inlet and a liquid outlet, the liquid inlet being used to introduce at least two chemical solutions into the cavity, and the liquid outlet being used to discharge a mixed liquid of the at least two chemical solutions out of the cavity. The switch element comprises an inner core, the inner core being movably disposed in the cavity, so as to open or close the liquid outlet. In a state in which the inner core closes the liquid outlet, the at least two chemical solutions are introduced into the cavity by means of the liquid inlet, so as to mix the at least two chemical solutions to form the mixed liquid. In addition, when a duration for mixing of the mixed liquid reaches a predetermined duration, the inner core is caused to open the liquid outlet, so as to discharge the mixed liquid. The spraying apparatus of the present application can cause the mixed liquid in the cavity of the spraying apparatus body to be mixed for a predetermined duration, so as to be supplied to a surface of a substrate, and achieve a good substrate processing effect.

Description

Spraying equipment and substrate processing equipment Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a spraying device and substrate processing equipment. Background Technology

[0002] In semiconductor substrate processing, SPM (Sulfuric Acid Hydrogen Peroxide Mixture) is commonly used to remove photoresist. A mixture of sulfuric acid and hydrogen peroxide is sprayed onto the substrate surface. When sulfuric acid and hydrogen peroxide are mixed, carboxylic acid is generated. Carboxylic acid has very strong oxidizing power, which can oxidize the photoresist, thereby removing it. Research suggests that, when sulfuric acid and hydrogen peroxide are mixed for a predetermined time, the temperature at which the SPM solution is formed and the concentration of carboxylic acid in the SPM solution are more conducive to achieving better photoresist removal results.

[0003] Therefore, it is necessary to provide a spraying device and a substrate processing equipment to solve the problem of how to mix the liquid (SPM solution) for a predetermined time so as to supply it to the substrate surface to achieve a better substrate processing effect. Summary of the Invention

[0004] The purpose of this application is to solve the problem in the prior art of how to mix the liquid for a predetermined time so as to supply it to the substrate surface to achieve a better substrate treatment effect.

[0005] To address the aforementioned problems, one embodiment of this application provides a spraying device, comprising:

[0006] The main body has an internal cavity, and also has a liquid inlet and a liquid outlet. The liquid inlet is used to introduce at least two kinds of medicinal liquids into the cavity; the liquid outlet is used to discharge the mixture of at least two kinds of medicinal liquids from the cavity.

[0007] A switching element, including an inner core movably disposed in a cavity, for opening or closing the liquid outlet;

[0008] The spray system is configured as follows:

[0009] With the inner core's liquid outlet closed, at least two kinds of medicinal solutions are introduced into the cavity through the liquid inlet to mix the at least two kinds of medicinal solutions to form a mixture; and

[0010] When the mixing time of the mixture reaches the predetermined time, the inner core opens the outlet to discharge the mixture.

[0011] Another embodiment of this application provides a substrate processing apparatus, including:

[0012] A chamber for accommodating the substrate;

[0013] The aforementioned spraying device is used to supply a mixture to the substrate inside the chamber.

[0014] The spraying device proposed in this application is equipped with a switching element, the inner core of which is movably disposed in the cavity to open or close the liquid outlet, so that at least two kinds of liquids are mixed in the cavity of the body to form a mixture, and the mixture is discharged when the mixing time of the mixture reaches a predetermined time. Therefore, the spraying device can make the mixture mix for a predetermined time so as to supply it to the substrate surface to achieve a better substrate treatment effect.

[0015] The substrate processing equipment provided in this application includes the above-mentioned spraying device, which supplies a mixed liquid in the spraying device for a predetermined mixing time to the substrate surface to achieve a better substrate processing effect.

[0016] Other features and corresponding beneficial effects of this application will be described in the latter part of the specification, and it should be understood that at least some of the beneficial effects will become obvious from the description in this application.

[0017] Overview of the attached figures

[0018] The features and performance of this application are further described by the following embodiments and accompanying drawings.

[0019] Figure 1 is a three-dimensional structural schematic diagram of the spray device of Embodiment 1 of this application;

[0020] Figure 2 is a cross-sectional structural diagram of the spray device in Embodiment 1 of this application when the liquid outlet of the inner core is closed;

[0021] Figure 3 is a cross-sectional structural diagram of the spray device in Embodiment 1 of this application when the inner core opens the liquid outlet.

[0022] Figure 4 shows the concentration versus time curve of caloic acid generated in Example 1 of this application;

[0023] Figure 5 is a three-dimensional structural schematic diagram of the spray device in Embodiment 2 of this application;

[0024] Figure 6 is a cross-sectional structural diagram of the spray device in Embodiment 2 of this application when the inner core closes the liquid outlet.

[0025] Figure 7 is a cross-sectional structural diagram of the spray device in Embodiment 2 of this application when the inner core has its liquid outlet open; and

[0026] Figure 8 is a schematic diagram of the substrate processing equipment provided in Embodiment 3 of this application.

[0027] Preferred embodiments of this application

[0028] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application is presented in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this embodiment. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many specific details will be included in the following description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.

[0029] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0030] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0033] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0034] Example 1:

[0035] Figure 1 is a three-dimensional structural schematic diagram of the spray device of Embodiment 1 of this application; Figure 2 is a cross-sectional structural schematic diagram of the spray device of Embodiment 1 of this application when the inner core closes the liquid outlet; Figure 3 is a cross-sectional structural schematic diagram of the spray device of Embodiment 1 of this application when the inner core opens the liquid outlet.

[0036] Referring to Figures 1 to 3, the spraying device 100 provided in this application includes a body 10 and a switching element 20. The body 10 has an interior cavity 11, and also has an inlet 13 and an outlet 15. The inlet 13 is used to introduce at least two kinds of medicinal liquids into the cavity 11; the outlet 15 is used to discharge the mixture of at least two kinds of medicinal liquids from the cavity 11. The switching element 20 includes an inner core 21, which is movably disposed in the cavity 11 to open or close the outlet 15. In this embodiment, the inner core 21 moves vertically within the cavity 11. The spraying device 100 is configured to: with the outlet 15 closed by the inner core 21, introduce at least two kinds of medicinal liquids into the cavity 11 through the inlet 13 to mix the at least two kinds of medicinal liquids to form a mixture; and when the mixing time of the mixture reaches a predetermined time, open the outlet 15 by the inner core 21 to discharge the mixture. In this embodiment, the liquid inlet 13 includes a first liquid inlet 131 and a second liquid inlet 132, used to respectively introduce two different liquid solutions, such as sulfuric acid (H2SO4) and hydrogen peroxide (H2O2), to form SPM (Sulfuric Acid Hydrogen Peroxide Mixture) solution in the cavity 11. When sulfuric acid and hydrogen peroxide are mixed together, the following chemical reaction occurs: H2SO4 + H2O2 → H2SO5 + H2O

[0037] As shown in the above chemical equation, sulfuric acid and hydrogen peroxide react to form peroxysulfuric acid, also known as carboxylic acid (H2SO5). Carboxylic acid has a very strong oxidizing power and can easily react with organic compounds such as benzene and phenol, decomposing them into products such as carbon dioxide, thereby achieving a removal effect. This strong ability to remove organic matter makes the mixture of sulfuric acid and hydrogen peroxide (SPM solution) suitable for removing photoresist. The photoresist removal effect of the SPM solution is related to the concentration of carboxylic acid and the temperature of the SPM solution. In this embodiment, the sulfuric acid introduced into cavity 11 can be at an ultra-high temperature of 170°C or higher, such as 180°C or 190°C. After mixing with room temperature hydrogen peroxide in cavity 11, the ultra-high temperature sulfuric acid above 170°C will rise to a temperature higher than 170°C, such as above 200°C. SPM solution at this temperature can significantly improve the photoresist removal effect and help save sulfuric acid usage. At the same time, within a reasonable range, the higher the temperature of the SPM solution, the faster the carboxylic acid is generated. The formation of carboxylic acid is accompanied by decomposition, and the decomposition rate increases with increasing temperature. The reaction process can be represented as: H₂SO₄ + H₂O₂ → H₂SO₅ → H₂SO₄ + 1 / 2O₂

[0038] Figure 4 shows the concentration versus time curve of carboxylic acid formation. As shown in Figure 4, the peak value and the range near the peak value represent the optimal working range for achieving the maximum degumming effect. The predetermined time t for sulfuric acid and hydrogen peroxide to remain in cavity 11 for mixing is also shown. a The range is: minimum scheduled duration t a_min ≤Pre-order duration t a ≤Maximum booking duration t a_max Scheduled duration t a The value can be adjusted according to the SPM solution temperature required by the process. For example, the predetermined time t a The time t represents the mixing time of sulfuric acid and hydrogen peroxide, ranging from a few seconds to a few minutes. This is achieved by controlling the predetermined mixing time t of sulfuric acid and hydrogen peroxide within cavity 11. a This allows for control of the SPM solution to reach a target state, such as when the carboxylic acid concentration is close to or even reaches its peak, the SPM solution temperature is optimal, the SPM solution has the lowest gas content, or other desired process parameters. At this state, the SPM solution is applied to the substrate surface, ultimately achieving the best adhesive removal effect in the shortest process time and with the lowest solution cost. Specifically, this application incorporates a switching element 20, whose inner core 21 is movably disposed within the cavity 11 to open or close the outlet 15. This ensures that the mixing time of sulfuric acid and hydrogen peroxide within the cavity 11 of the spray device 100 body reaches a predetermined time t. a At the same time, the spraying device 100 supplies SPM solution containing carboxylic acid to the substrate to achieve a better adhesive removal effect.

[0039] In this embodiment, the number of inlets 13 corresponds to the number of different types of liquids, which can be determined according to actual needs. Optionally, one inlet 13 can be provided, where at least two liquids, such as sulfuric acid and hydrogen peroxide, first converge outside the body 10, and then enter the cavity 11 of the body 10 through the inlet 13 and remain there for a certain period of time. After a certain period, the inner core 21 opens the outlet 15 to discharge the SPM liquid. In some other embodiments, the spray device 100 is also suitable for liquids at room temperature.

[0040] In some embodiments, cavity 11 includes a first cavity 111 and a second cavity 112. The inner core 21 includes a movable end 211 and a through portion 212. The movable end 211 is located in the first cavity 111 and serves to divide the first cavity 111 into a first pressure regulating chamber 101 and a second pressure regulating chamber 102. The first pressure regulating chamber 101 is located above the second pressure regulating chamber 102. The first end of the through portion 212 is connected to the movable end 211, and the through portion 212 extends from the first cavity 111 into the second cavity 112. The second cavity 112 is provided with an inlet 13 and an outlet 15, with the inlet 13 located above the outlet 15. The second end of the through portion 212 is used to open or close the outlet 15. The first pressure regulating chamber 101 has a first opening 113 on its side wall, and the second pressure regulating chamber 102 has a second opening 114 on its side wall. The pressure inside the first and second pressure regulating chambers 101 and 102 is adjusted by introducing or discharging fluid into the first and second openings 113 and 114 respectively, causing the movable end 211 to move the through portion 212 relative to the outlet 15. In this embodiment, the movable end 211 moves up and down along the side wall of the first cavity 111, and this structure guides the movement of the inner core 21. A sealing element, such as a sealing ring, is provided between the movable end 211 and the side wall of the first cavity 111 to prevent fluid leakage, thereby maintaining the pressure difference between the first and second pressure regulating chambers 101 and 102.

[0041] Specifically, in the examples shown in Figures 2 and 3, firstly, a fluid, such as nitrogen, is introduced into the first opening 113, and a fluid, such as nitrogen, is discharged from the second opening 114. Under the pressure difference between the first pressure regulating chamber 101 and the second pressure regulating chamber 102, the inner core 21 moves downward and closes the liquid outlet 15 (as shown in Figure 2). If the second opening 114 is the first time the fluid is discharged, the discharged fluid is air. Then, sulfuric acid and hydrogen peroxide are introduced into the cavity 11 through the first liquid inlet 131 and the second liquid inlet 132, respectively. The sulfuric acid and hydrogen peroxide are mixed to form SPM solution. Next, a predetermined time is waited. Finally, a fluid, such as nitrogen, is introduced into the second opening 114, and a fluid, such as nitrogen, is discharged from the first opening 113. Under the pressure difference between the first pressure regulating chamber 101 and the second pressure regulating chamber 102, the inner core 21 moves upward and opens the liquid outlet 15 (as shown in Figure 3), discharging the SPM solution to the substrate surface to remove the photoresist. It should be noted that during the period from opening the outlet 15 to the end of the photoresist cleaning process, the volume of the chemical solution in the cavity 11 during the process can be obtained based on the chemical solution outlet flow rate in the outlet 15 and the predetermined mixing time of the chemical solution in the cavity 11. The structural dimensions of the cavity 11 are then designed based on this chemical solution volume. By designing the structural dimensions of the cavity 11, a balanced chemical solution supply is ensured. This balanced chemical solution supply is achieved when the chemical solution outlet flow rate in the outlet 15 equals the chemical solution inlet flow rate in the inlet 13, while maintaining a constant liquid level in the cavity 11. This ensures that subsequent new SPM chemical solution entering the cavity 11 can always mix for the predetermined time, allowing the spray device 100 to continuously supply SPM chemical solution to the substrate surface to achieve the aforementioned target state for the photoresist cleaning process.

[0042] In some embodiments, referring to Figures 2 and 3, the switching element 20 further includes an elastic seal 22 disposed on the outer periphery of the through portion 212. A first end of the elastic seal 22 is connected to the movable end 211, and a second end of the elastic seal 22 is connected to the bottom of the first cavity 111. This prevents airflow between the first cavity 111 and the second cavity 112, such as preventing impurities in the first cavity 111 from entering the second cavity 112 and contaminating the SPM solution, thus ensuring the high cleanliness of the SPM solution. It also prevents acid mist generated by the SPM solution from entering the first cavity 111, causing crystallization and resulting in jamming of the movable end 211. Specifically, a through hole 109 is provided at the bottom of the first cavity 111, and the second end of the elastic seal 22 is connected to the sidewall of the through hole 109. The elastic seal 22 is, for example, a bellows, and both ends of the bellows are connected to the movable end 211 and the sidewall of the through hole 109 by welding or other means.

[0043] In some embodiments, referring to Figures 2 and 3, the body 10 further includes a limiting member 16, which is disposed in the second pressure regulating chamber 102 and located below the movable end 211, for abutting against the movable end 211. It should be noted that the design height of the limiting member 16 should satisfy the following: during the downward movement of the inner core 21, the design height of the limiting member 16 ensures that the inner core 21 will not block the second opening 114, while allowing the inner core 21 to close the liquid outlet 15, and that the inner core 21 will not abnormally squeeze the liquid outlet 15.

[0044] In some embodiments, referring to Figures 2 and 3, the body 10 further includes a cover 104. A first limiting portion 105 is provided on the side of the cover 104 facing the cavity 11, and a second limiting portion 201 is provided on the movable end 211. The first limiting portion 105 and the second limiting portion 201 are matched. The spray device 100 is configured such that when the movable end 211 of the inner core 21 moves the through portion 212 relative to the outlet 15, the second limiting portion 201 is always limited within the first limiting portion 105 to prevent the inner core 21 from rotating about its axis. In the example shown in Figures 2 and 3, the inner core 21 moves vertically. This example uses the shape design of the first limiting portion 105 and the second limiting portion 201 to prevent the inner core 21 from rotating about its axis when it moves vertically. The first limiting part 105 is a groove, and the second limiting part 201 is a protrusion; alternatively, the first limiting part 105 is a protrusion, and the second limiting part 201 is a groove, with the protrusion matching the groove. The groove and the protrusion may be square or elliptical, etc. This application does not particularly limit the shape of the groove and the protrusion, as long as they can achieve the purpose of preventing the inner core 21 from rotating around its axis.

[0045] In some embodiments, referring to Figures 2 and 3, the outlet 15 of the body 10 is funnel-shaped, with the upper opening diameter of the outlet 15 being larger than the lower opening diameter, so as to stably supply the mixture through the outlet 15. In other embodiments, the cross-sectional shape of the outlet 15 of the body is an inverted trapezoid, with the diameter of the outlet 15 gradually decreasing from its upper opening to its lower opening, which also facilitates a stable supply of the mixture through the outlet 15.

[0046] In some embodiments, referring to Figures 2 and 3, the body 10 further includes an exhaust port 17 for discharging gases from the second cavity 112, such as gases generated during the reaction of sulfuric acid and hydrogen peroxide. In the example shown in Figures 2 and 3, the size of the first cavity 111 is smaller than the size of the second cavity 112, and the exhaust port 17 is disposed on the top wall of the second cavity 112, opposite to the liquid inlet 13.

[0047] In some embodiments, the body 10 and the inner core 21 are made of one or any combination of PTFE (polytetrafluoroethylene), PCTFE (polychlorotrifluoroethylene), PVDF (polyvinylidene fluoride), ETFE (ethylene-tetrafluoroethylene copolymer) or ECTFE (ethylene-chlorotrifluoroethylene copolymer).

[0048] Example 2:

[0049] Figure 5 is a three-dimensional structural schematic diagram of the spray device of Embodiment 2 of this application; Figure 6 is a cross-sectional structural schematic diagram of the spray device of Embodiment 2 of this application when the inner core closes the liquid outlet; Figure 7 is a cross-sectional structural schematic diagram of the spray device of Embodiment 2 of this application when the inner core opens the liquid outlet.

[0050] The spray device 100 provided in this embodiment 2 differs from that in embodiment 1 in that the inner core 21' of the spray device 100 moves by electromagnetic drive, thereby achieving the purpose of opening or closing the liquid outlet 15.

[0051] Referring to Figures 5 to 7, the switching element 20 includes an inner core 21' and an electromagnet 24. The inner core 21' includes a permanent magnet 213. The spray device 100 is configured such that the inner core 21' opens or closes the liquid outlet 15 by the attraction or repulsion between the electromagnet 24 and the permanent magnet 213. In this embodiment, the electromagnet 24 is disposed outside the body 10. The permanent magnet 213 is made of a high-temperature resistant permanent magnet material, such as neodymium iron boron magnets, samarium cobalt magnets, ferrite magnets, or alnico magnets.

[0052] Specifically, in the examples shown in Figures 6 and 7, firstly, the electromagnet 24 is energized to repel the inner core 21', causing the inner core 21' to move downwards and close the outlet 15 (as shown in Figure 6); then, sulfuric acid and hydrogen peroxide are introduced into the cavity 11 through the first inlet 131 and the second inlet 132, respectively, and the sulfuric acid and hydrogen peroxide mix to form SPM solution; next, a predetermined time is waited; finally, the current of the electromagnet 24 is reversed, attracting the inner core 21', causing the inner core 21' to move upwards and open the outlet 15 (as shown in Figure 7), discharging the SPM solution to the substrate surface to remove the photoresist. Similar to Example 1, during the time from opening the outlet 15 to the end of the photoresist cleaning process, the volume of the solution in the cavity 11 during the process can be obtained based on the solution outlet flow rate in the outlet 15 and the predetermined mixing time of the solution in the cavity 11, and then the structural dimensions of the cavity 11 can be designed based on this solution volume. By designing the structural dimensions of cavity 11, a balanced supply of the chemical solution is ensured. This balanced supply is achieved when the outflow rate of the chemical solution in outlet 15 equals the inflow rate of the chemical solution in inlet 13, while maintaining a constant liquid level within cavity 11. This ensures that newly entering SPM solution can always be mixed for a predetermined time, allowing the spraying device 100 to continuously supply SPM solution to the substrate surface at the aforementioned target state for photoresist cleaning. For details regarding the target state described in this embodiment, please refer to the description of the target state in Embodiment 1.

[0053] In some embodiments, referring to Figures 5 to 7, the spray device 100 further includes a receiving cavity 25, which is disposed outside the body 10. The electromagnet 24 is housed in the receiving cavity 25. The receiving cavity 25 is provided with an air inlet 251 and an air outlet 252. The air inlet 251 is used to introduce a cooling medium, such as CDA (Clean Dry Air) or nitrogen, into the receiving cavity 25. The air outlet 252 is used to discharge the cooling medium from the receiving cavity 25, thereby cooling the electromagnet 24 and ensuring the stability of the magnetic field generated by the electromagnet 24.

[0054] In some embodiments, referring to Figures 6 and 7, the switching element 20 further includes an elastic guide 26, which connects the inner core 21' and the sidewall of the cavity 11. Specifically, the elastic guide 26 is a thin sheet, which guides the movement of the inner core 21' by means of elastic deformation. Two elastic guides 26 are provided. The material used for the elastic guides 26 is glass fiber reinforced fluoroplastic.

[0055] In some embodiments, referring to Figures 6 and 7, the body 10 also has an exhaust port 17 disposed on the top wall of the cavity 11 for discharging gases in the cavity 11, such as gases generated during the reaction of sulfuric acid and hydrogen peroxide.

[0056] Example 3:

[0057] Figure 8 is a schematic diagram of the substrate processing equipment provided in Embodiment 3 of this application.

[0058] Referring to Figure 8, the substrate processing apparatus 1000 provided in this embodiment includes a chamber 200 and a spraying device. The chamber 200 is used to accommodate a substrate 300. The spraying device adopts the spraying device 100 of Embodiment 1 or Embodiment 2, and is used to supply a mixing liquid to the substrate 300 in the chamber 200. This embodiment achieves a better substrate processing effect by supplying the mixing liquid in the spraying device 100 for a predetermined mixing time to the surface of the substrate 300.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A spraying device, characterized in that, include: The body has an internal cavity, and the body also has a liquid inlet and a liquid outlet, wherein the liquid inlet is used to introduce at least two kinds of medicinal liquids into the cavity; The outlet is used to discharge the mixture of at least two medicinal solutions from the cavity; A switching element includes an inner core movably disposed in the cavity to open or close the liquid outlet; The spraying device is configured as follows: With the inner core closed at the outlet, at least two medicinal solutions are introduced into the cavity through the inlet to mix them and form a mixture; and When the mixing time of the mixture reaches the predetermined time, the inner core opens the outlet to discharge the mixture.

2. The spraying device according to claim 1, characterized in that, The cavity includes a first cavity and a second cavity. The inner core includes a movable end and a through portion. The movable end is located in the first cavity and is used to divide the first cavity into a first pressure regulating cavity and a second pressure regulating cavity. The first pressure regulating cavity is located above the second pressure regulating cavity. The first end of the through portion is connected to the movable end. The through portion extends from the first cavity into the second cavity. The second cavity is provided with the liquid inlet and the liquid outlet. The liquid inlet is located above the liquid outlet. The second end of the through portion is used to open or close the liquid outlet. The first pressure regulating chamber has a first opening on its side wall, and the second pressure regulating chamber has a second opening on its side wall. The spraying device is configured to adjust the pressure inside the first pressure regulating chamber and the second pressure regulating chamber by introducing or discharging fluid into the first opening and the second opening, respectively, so that the movable end drives the through portion to move relative to the liquid outlet.

3. The spraying device according to claim 2, characterized in that, The switching element further includes: An elastic seal is disposed on the outer periphery of the through portion, with a first end of the elastic seal connected to the movable end and a second end of the elastic seal connected to the bottom of the first cavity.

4. The spraying device according to claim 2, characterized in that, The body also has: A limiting member is disposed in the second pressure regulating chamber and located below the movable end, for abutting against the movable end.

5. The spraying device according to claim 2, characterized in that, The body also has: The cover has a first limiting part on the side facing the cavity, and a second limiting part on the movable end, wherein the first limiting part and the second limiting part match each other. The spray device is configured such that when the movable end of the inner core drives the through portion to move relative to the liquid outlet, the second limiting portion is always limited in the first limiting portion to prevent the inner core from rotating around the inner core axis.

6. The spraying device according to claim 1, characterized in that, The switching element further includes an electromagnet, and the inner core includes a permanent magnet; The spraying device is configured such that the inner core opens or closes the liquid outlet by means of the attraction or repulsion between the electromagnet and the permanent magnet.

7. The spraying device according to claim 6, characterized in that, It also includes a receiving cavity, in which the electromagnet is housed. The receiving cavity is provided with an air inlet and an air outlet. The air inlet is used to introduce a cooling medium into the receiving cavity, and the air outlet is used to discharge the cooling medium from the receiving cavity.

8. The spraying device according to claim 6, characterized in that, The switching element further includes an elastic guide that connects the inner core and the sidewall of the cavity.

9. The spraying device according to claim 1, characterized in that, The body also has: An exhaust port is used to discharge gas from the cavity.

10. The spraying device according to claim 1, characterized in that, The at least two solutions include sulfuric acid and hydrogen peroxide, and the inlet includes a first inlet and a second inlet for respectively introducing the sulfuric acid and the hydrogen peroxide.

11. A substrate processing apparatus, characterized in that, include: A chamber for accommodating the substrate; The spraying apparatus according to any one of claims 1 to 10 is used to supply the mixture to the substrate in the chamber.

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