Semiconductor capacitor and method for manufacturing semiconductor capacitor

The semiconductor capacitor design addresses the challenge of increasing voltage without thickening dielectric films by connecting capacitors in series within separate grooves on a substrate, achieving high voltage withstand and simplified manufacturing with enhanced capacitance.

WO2026110256A1PCT designated stage Publication Date: 2026-05-28NISSAN MOTOR CO LTD
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
NISSAN MOTOR CO LTD
Filing Date
2024-11-20
Publication Date
2026-05-28

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Abstract

This semiconductor capacitor includes a substrate, a first capacitor, and a second capacitor. The substrate has a first main surface, and a first groove and a second groove are formed at different positions on the first main surface. The first capacitor includes a first laminated structure in which two or more first dielectric films and two or more first conductive films are alternately laminated at least on an inner surface of the first groove. The second capacitor includes a second laminated structure in which two or more second dielectric films and two or more second conductive films are alternately laminated on at least the inner surface of the second groove. The first capacitor and the second capacitor are connected in series.
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Citation Information

Patent Citations

  • Capacitor and mounting board including the same

    JP2019021898A

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    JP2020027821A

  • Semiconductor device

    JP2021114531A