Solar-blind ultraviolet detector and preparation method therefor

By using a lithium niobate substrate and interdigitated electrode structure, the high cost and insufficient performance of existing technologies in solar-blind ultraviolet detectors have been solved, realizing a low-cost, high-performance solar-blind ultraviolet detector suitable for environmental monitoring, medical treatment, disinfection equipment, high-speed communication and other scenarios.

WO2026113029A1PCT designated stage Publication Date: 2026-06-04NATIONAL NANOTECH INNOVATION CENTER
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
NATIONAL NANOTECH INNOVATION CENTER
Filing Date
2024-12-03
Publication Date
2026-06-04

AI Technical Summary

Technical Problem

Existing Ga2O3, AlGaN, and ZnO solar-blind ultraviolet detectors require costly growth techniques and complex multilayer structures, and suffer from high dark current and slow response time, which limits the development of solar-blind ultraviolet detectors.

Method used

A solar-blind ultraviolet detector with interdigitated electrode structure was fabricated using lithium niobate as the substrate material and a MEMS platform and nanoscale photolithography technology. The detector includes first and second electrodes. The electrode areas were processed by electron beam and optical photolithography technology to achieve mass production.

Benefits of technology

A solar-blind ultraviolet detector that is easy to manufacture, low in cost, and has excellent performance has been realized. It has better temperature stability and is suitable for harsh environments. It is suitable for portable devices, has high responsivity, excellent external quantum efficiency and specific detectivity, low noise equivalent power, and is suitable for high-speed communication.

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Abstract

A solar-blind ultraviolet detector and a preparation method therefor. The solar-blind ultraviolet detector comprises: a substrate, the material of which is lithium niobate; a first electrode, which is disposed on a surface of the substrate and comprises a first external connection region and a finger region that are connected to each other, wherein the first external connection region is used for connecting to a common ground terminal, and the finger region comprises a plurality of adjacent first finger structures; and at least one second electrode, which is disposed on a surface of the substrate and comprises a second external connection region and a photosensitive region that are connected to each other, wherein the second external connection region is used for connecting to a positive electrode of a corresponding external power source, a negative electrode of the external power source is connected to the common ground terminal, the photosensitive region comprises at least one second finger structure, and the second finger structure extends into the space between a pair of adjacent first finger structures. The solar-blind ultraviolet detector has the advantages of low cost, ease of large-scale manufacturing, etc.
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