Gate valve control system and control method therefor

Abstract

A gate valve control system (100) according to one embodiment of the present invention comprises: a gate valve (110) including a blade (111) for opening / closing a gate of a substrate processing apparatus, and a valve rod (112) coupled to the blade (111); a valve driving unit (120) for horizontally moving the blade (111) and vertically moving the valve rod (112); an operation signal generation unit (130) that provides an operation signal for selectively operating the valve driving unit (1200); an air-operated valve (140) for selectively supplying air to the valve driving unit (120); and an air supply part (150) including an opening air supply part (151) and a closing air supply part (152) for the opening / closing of the gate valve (110), wherein the operation signal generation unit (130) includes a main flow path (130a) and a signal flow path (130b), and provides the operation signal to the air-operated valve through a differential pressure between the main flow path (130a) and the signal flow path (130b).

Description

Gate valve control system and control method thereof

[0001] The present invention relates to a gate valve control system for opening and closing a gate of a substrate processing device and a control method thereof.

[0002] Generally, substrates such as semiconductors are fed into or taken out through a substrate transfer channel connected to the outer wall of a chamber of a substrate processing device to proceed with the process, and such a substrate transfer channel is equipped with a gate valve for opening and closing the transfer channel.

[0003] The substrate transfer passage may be equipped with a valve housing having openings formed on the front and rear sides through which the substrate can pass. In this case, a gate valve is installed within the valve housing, and the gate valve's actuator is driven so that the sealing blade opens or closes the openings according to the operation of the actuator.

[0004] The conventional gate valve (Korean Registered Patent No. 10-1234055) discloses a gate valve comprising: a valve blade that is in close contact with a valve seat formed around an opening in a valve housing and can close the opening from the inside; and a valve rod connected to the valve blade, which protrudes from the inside to the outside of the valve housing through a bellows while maintaining airtightness and can perform vertical and horizontal movements.

[0005] Meanwhile, to open and close the opening, the vertical and horizontal movements of the gate valve must be selectively controlled. However, if the vertical and horizontal movements of the gate valve are not accurately controlled, operational errors occur, resulting in inaccurate sealing of the gate and reduced reliability of substrate processing. Therefore, there is a need to develop a drive control method that can minimize the possibility of operational errors in the gate valve.

[0006] The objective of the present invention is to provide a gate valve control system and a control method thereof that enable integrated lifting and pushing / pull control of a gate valve using a signal generator capable of operation control through differential pressure.

[0007] A gate valve control system (100) according to an embodiment of the present invention comprises a gate valve (110) including a blade (111) for opening and closing a gate of a substrate processing device and a valve rod (112) coupled to the blade (111), a valve driving unit (120) for moving the blade (111) horizontally and moving the valve rod (112) vertically, an operation signal generating unit (130) for providing an operation signal for selectively operating the valve driving unit (1200), an air operation valve (140) for selectively supplying air to the valve driving unit (120), and an air supply unit (150) including an open air supply unit (151) and a closed air supply unit (152) for opening and closing the gate valve (110), wherein the operation signal generating unit (130) includes a main flow path (130a) and a signal flow path (130b), and the The operation signal is provided to the air operation valve through the differential pressure between the main flow path (130a) and the signal flow path (130b).

[0008] Additionally, in a gate valve control system, the valve driving unit (120) includes a push / pull driving unit (121) and a lifting driving unit (122), the push / pull driving unit (121) can operate a push or pull operation with respect to the blade (111), and the lifting driving unit (122) can operate a rising or lowering operation with respect to the valve rod (112).

[0009] Additionally, in the gate valve control system, the air operating valve (140) may include a push / pull operating valve (141) that selectively supplies air to the push / pull driving unit (121) and a lifting operating valve (142) that selectively supplies air to the lifting driving unit (122).

[0010] Additionally, in the gate valve control system, the operation signal generating unit (130) includes a first signal generating unit (131) and a second signal generating unit (132), the first signal generating unit (131) provides a first signal to the push / pull operation valve (141) for selectively operating the push / pull driving unit (121), and the second signal generating unit (132) provides a second signal to the lift operation valve (142) for selectively operating the lift driving unit (122).

[0011] A gate valve control system (1000) according to an embodiment of the present invention comprises: a gate valve including a blade (111) for opening and closing a gate of a substrate processing device and a valve rod (112) coupled to the blade (111); a valve driving unit (1200) including a push / pull driving unit (1210) connected to the blade (111) and a lifting driving unit (1220) connected to the valve rod (112); an air operating valve (1400) including a push / pull operating valve (1410) connected to the push / pull driving unit (1210) and a lifting operating valve (1420) connected to the lifting driving unit (1220); a first signal generating unit (1310) connected to the push / pull operating valve (1410) and the lifting driving unit (1220); and a second signal connected to the push / pull driving unit (1210) and the lifting operating valve (1420). It includes an operation signal generating unit (1300) including a generating unit (1320), a closed air supply unit (1520) connected to the lifting operation valve (1420) and supplying closed air to the lifting operation valve (1420), and an open air supply unit (1510) connected to the push / pull operation valve (1410) and supplying open air to the push / pull operation valve (1410).

[0012] Additionally, in the gate valve control system, when close air is supplied to the lifting operation valve (1420), the lifting operation valve (1420) supplies air to the lifting drive unit (1220) to raise the valve rod (112) which is a close operation, and the down air contained in the lifting drive unit (1220) is exhausted into the main flow path of the first signal generator, and the valve rod (112) can be raised.

[0013] Additionally, in the gate valve control system, when the exhaust of the down air is completed, the signal path of the first signal generator (1310) supplies closed air to the push / pull operation valve (1410), the push / pull operation valve (1410) becomes ON, and push air is supplied to the push / pull drive unit (1210) so that the blade (111) can be pushed.

[0014] Additionally, in the gate valve control system, when open air is supplied to the push / pull operation valve (1410), the push / pull operation valve (1410) supplies open air to the push / pull drive unit (1210), and the push air contained in the push / pull drive unit (1210) is exhausted into the main flow path of the second signal generator (1320), and the blade (111) can be released from the push state.

[0015] Additionally, in the gate valve control system, when the exhaust of the push air is completed, the signal path of the second signal generator (1320) supplies open air to the lifting operation valve (1420), the lifting operation valve (1420) becomes ON, and open air is supplied to the lifting drive unit (1220) so that the valve rod can be lowered.

[0016] A gate valve control method according to an embodiment of the present invention comprises: a close air supply step (S1100) for supplying close air to a lifting operation valve for a close operation of the gate valve; a lifting operation valve operation step (S1200) in which, after the close air is supplied to the lifting operation valve, the lifting operation valve is turned ON and the close air is supplied to the lifting drive unit; a lifting drive unit operation step (S1300) in which the lifting drive unit raises a valve rod; a down air discharge completion confirmation step (S1400) for confirming whether the discharge of down air contained in the lifting drive unit is completed; a push signal generation step (S1500) in which a first signal generator generates a push signal when it is confirmed that the discharge of down air is completed through the down air discharge completion confirmation step (S1400); and a push / pull operation valve that operates the push / pull operation valve to the ON state by the push signal provided through the push signal generation step (S1500). It includes an operation step (S1600) and a push / pull drive unit operation step (S1700) in which closed air is supplied by the push / pull operation valve and the push / pull drive unit pushes the blade.

[0017] In addition, in the gate valve control method, the down air flows into the main flow path of the first signal generator, and the first signal generator can control the activation of the flow path by the pressure difference between the main flow path and the signal flow path.

[0018] A gate valve control method according to another embodiment of the present invention comprises: an open air supply step (S2100) for supplying open air to a push / pull operation valve; a push / pull operation valve operation step (S2200) in which, after the open air is supplied to the push / pull operation valve, the push / pull operation valve is turned ON and the open air is supplied to a push / pull drive unit; a push / pull drive unit operation step (S2300) in which the push / pull drive unit releases the push operation of a blade; a push air discharge completion confirmation step (S2400) for confirming whether the discharge of the push air contained in the push / pull drive unit is completed; a down signal generation step (S2500) in which a second signal generator generates a down signal when it is confirmed that the discharge of the push air is completed through the push air discharge completion confirmation step (S2400); a lifting operation valve operation step (S2600) in which the lifting operation valve is operated to an ON state by the down signal provided through the down signal generation step (S2500); and the lifting The lifting drive unit includes a lifting drive unit operation step (S2700) in which the open air is supplied by the operating valve and the lifting drive unit lowers the valve rod.

[0019] In addition, in the gate valve control method, the push air flows into the main flow path of the second signal generator, and the second signal generator can control the activation of the flow path by the pressure difference between the main flow path and the signal flow path.

[0020] The gate valve control system and control method according to the present invention have the advantage of enabling control of the vertical and horizontal movements of the gate valve with a simple structure, thereby improving the productivity and reliability of the substrate processing device.

[0021] Specifically, the gate valve control system and control method according to the present invention utilize a signal generator capable of operation control through differential pressure to enable integrated lifting and push / pull control of the gate valve, thereby minimizing the possibility of gate valve operation errors and significantly improving control accuracy.

[0022] FIG. 1 is a schematic diagram illustrating a gate valve control system according to the technical concept of the present invention.

[0023] FIG. 2 is a schematic diagram illustrating the detailed technical configuration of the gate valve control system illustrated in FIG. 1.

[0024] FIG. 3 is a schematic diagram illustrating a signal generating unit in the gate valve control system illustrated in FIG. 2.

[0025] FIG. 4 is a schematic diagram illustrating a gate valve control system according to an embodiment of the present invention, showing the gate valve open state.

[0026] FIG. 5 is a schematic diagram of the operating state illustrating the first closing stage of the gate valve in the gate valve control system illustrated in FIG. 4.

[0027] FIG. 6 is a schematic diagram of the operating state illustrating the second closing stage of the gate valve in the gate valve control system illustrated in FIG. 4.

[0028] FIG. 7 is a usage state diagram schematically illustrating the third stage of closing the gate valve in the gate valve control system illustrated in FIG. 4, showing the state of completion of closing the gate valve.

[0029] FIG. 8 is a schematic diagram of the first opening stage of the gate valve in the closed state of the gate valve control system illustrated in FIG. 7.

[0030] FIG. 9 is a schematic diagram of the operating state illustrating the second opening stage of the gate valve in the gate valve control system illustrated in FIG. 7.

[0031] FIG. 10 is a flowchart schematically illustrating a first control method of a gate valve control system according to an embodiment of the present invention.

[0032] FIG. 11 is a flowchart schematically illustrating a second control method of a gate valve control system according to an embodiment of the present invention.

[0033] Embodiments of the present invention are described below with reference to the attached drawings so that those skilled in the art can easily implement the invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein.

[0034] In addition, to clearly explain the invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification have been given similar reference numerals.

[0035] Throughout the specification, when a part is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components.

[0036] It should be understood that the technology described in this invention is not intended to be limited to specific embodiments and includes various modifications, equivalents, and alternatives to the embodiments of the invention.

[0037] The expression “configured to” as used in the present invention may be replaced, depending on the context, with, for example, “suitable for,” “having the capacity to,” “designed to,” “adapted to,” “made to,” or “capable of.” The term “configured to” may not necessarily mean only that which is “specifically designed to” in hardware. Instead, in some situations, the expression “device configured to” may mean that the device is “capable of” together with other devices or components.

[0038] The prior art described in the present invention is incorporated herein by reference in its entirety, and it will be understood that a person skilled in the art may apply the contents described in the prior art to the parts briefly described in the present invention.

[0039] Hereinafter, a gate valve control system and a control method according to the present invention will be described with reference to the attached drawings.

[0040] The gate valve of the gate valve control system according to the present invention is intended to open and close the gate of a substrate processing device for substrate processing, and can be configured in various ways.

[0041] The substrate processing device in which the gate valve is installed may include one or more process chambers, a substrate support unit, and a gas injection unit. The one or more process chambers form a sealed processing space and are configured in various ways to perform substrate processing on a substrate. The substrate support unit is a susceptor installed within the process chamber to support the substrate, and the gas injection unit may be a showerhead for injecting gas for substrate processing. Additionally, the chamber body is equipped with a gate for the entry and exit of the substrate, and a gate valve is installed to open and close the gate.

[0042] However, the present invention is not limited thereto, and it is obvious that the substrate processing device in which the gate valve is installed can be configured in various ways, such as a load lock module, a transfer module, etc.

[0043] First, FIG. 1 is a schematic diagram illustrating a gate valve control system according to the technical concept of the present invention, and FIG. 2 is a schematic diagram illustrating the detailed technical configuration of the gate valve control system illustrated in FIG. 1.

[0044] As described above, the gate valve control system (100) includes a gate valve (110), a valve driving unit (120), an operation signal generating unit (130), an air operation valve (140), an air supply unit (150), and a control unit (160).

[0045] As described above, the gate valve (110) is intended to be in close contact with the valve seat around the gate of the substrate processing device to block or open the substrate transfer path. To this end, the gate valve (110) may include a blade (111) and a valve rod (112).

[0046] The valve rod (112) can be coupled to the blade (111). For example, the valve rod (112) can be coupled to the lower part of the blade (111).

[0047] The above valve driving unit (120) can be configured in various ways as a driving unit for moving the gate valve (110) to implement an opening and closing operation.

[0048] In order for the gate valve (110) to open and close the gate, vertical and horizontal movement is required, and the valve driving unit (120) can move the blade (111) horizontally and move the valve rod (112) up and down to implement the opening and closing operation of the gate valve (110).

[0049] To this end, the valve driving unit (120) may include a push / pull driving unit (121) and a lifting driving unit (122).

[0050] The above push / pull drive unit (121) can be configured in various ways as a drive unit for operating a push or pull operation with respect to the blade (111). The above push / pull drive unit (121) may be a drive unit including a piston connected to the blade (111) and a cylinder installed to allow the piston to move horizontally. By applying pneumatic pressure to one side of the piston of the cylinder, the blade (111) can be pushed / pull operated.

[0051] The above-mentioned lifting drive unit (122) can be configured in various ways as a drive unit for operating an upward or downward movement with respect to the valve rod (112). The above-mentioned lifting drive unit (122) may be a drive unit including a piston connected to the valve rod (112) and a cylinder installed to allow the piston to move horizontally. By applying pneumatic pressure to one side of the piston of the cylinder, the valve rod (112) can be moved up and down.

[0052] The above air operating valve (140) can be configured in various ways as a valve for selectively supplying air to a valve driving unit (120) to move the blade (111) and valve rod (112) of a gate valve (110).

[0053] The above air operating valve (140) may include a push / pull operating valve (141) and a lifting operating valve (142).

[0054] The above push / pull operation valve (141) is configured to selectively provide air to one side of the cylinder of the push / pull drive unit (121) for the push or pull operation of the blade (111), and can be turned on / off controlled by the operation signal generating unit (130) described later.

[0055] The above push / pull operation valve (141) may be a control valve that blocks or changes the direction of air flow. The above push / pull operation valve (141) may include an air inlet port, a push air supply port for supplying push air for the push operation of the blade (111) to the push / pull drive unit (121), a pull air supply port for supplying pull air for the pull operation of the blade (111) to the push / pull drive unit (121), a pull air exhaust port for exhausting pull air from the push / pull drive unit (121) during the push operation of the blade (111), and a push air exhaust port for exhausting push air from the push / pull drive unit (121) during the pull operation of the blade (111).

[0056] The above lifting operation valve (142) is configured to selectively supply air to one side of the cylinder of the lifting drive unit (122) for the lifting or lowering operation of the valve rod (112), and can be controlled on / off by the operation signal generating unit (130) described later.

[0057] The above lifting operation valve (142) may be a control valve that blocks or changes the direction of air flow. The above lifting operation valve (142) may include an air inlet port, an up air supply port for supplying up air to the lifting drive unit (122) for the up operation of the valve rod (112), a down air supply port for supplying down air to the lifting drive unit (122) for the down operation of the valve rod (112), a down air exhaust port for exhausting down air from the lifting drive unit (122) when the valve rod (112) is in an up operation, and an up air exhaust port for exhausting up air from the lifting drive unit (122) when the valve rod (112) is in a down operation.

[0058] The above air supply unit (150) is intended to provide air for operating a valve driving unit (120) that implements the opening and closing operation of a gate valve (110). The air supplied through the above air supply unit (150) can pass through the air operating valve (140) and be supplied to the valve driving unit (120).

[0059] For example, the air supply unit (150) includes an open air supply unit (151) that supplies air for an open operation for opening and closing the gate valve (110), and a close air supply unit (152) that supplies air for a close operation.

[0060] The open air supply unit (151) can supply open air to move the gate valve (110) to the gate open position. The open air can be supplied as pull air for the pull operation of the blade (111) and down air for the lowering operation of the valve rod (112). During the gate valve opening process, the pull operation of the blade (111) and the lowering operation of the valve rod (112) can be performed sequentially through the open air.

[0061] The above-mentioned close air supply unit (152) can supply close air to move the gate valve (110) to the gate close position. The close air can be supplied as push air for the pushing operation of the blade (111) and up air for the lifting operation of the valve rod (112). During the gate valve closing process, the lifting operation of the valve rod (112) and the pushing operation of the blade (111) can be performed sequentially through the close air.

[0062] The present invention specifies that the working fluid is air, but is not limited thereto and can be implemented in various ways.

[0063] The above control unit (160) can selectively control the operation of the air supply unit (150) to operate the valve driving unit (120).

[0064] The above operation signal generating unit (130) is for providing an operation signal to optionally operate the valve driving unit (120), and the operation signal may be a control signal for the operation of the valve driving unit (120).

[0065] To this end, the operation signal generating unit (130) provides an operation signal to the air operation valve (140) so that the air operation valve (140) can be selectively turned on / off.

[0066] That is, the operation signal generating unit (130) can selectively operate the push / pull drive unit (121) and the lifting drive unit (122), respectively.

[0067] The above operation signal generating unit (130) can provide a signal to operate the valve driving unit (120) using a pressure difference, that is, a physical differential pressure. For example, the above operation signal generating unit (130) may be a cylinder signal generator (PPL) including a main flow path (130a) and a signal flow path (130b). The above operation signal generating unit (130) can generate an operation signal by the differential pressure between the main flow path (130b) and the signal flow path. That is, when a differential pressure is generated by the air flowing through the main flow path (130a), the signal flow path (130a) is blocked so that the operation signal through the signal flow path (130a) is turned off, and when the differential pressure caused by the air flowing through the main flow path (130a) is removed, the signal flow path (130b) is opened so that the operation signal through the signal flow path (130b) is turned on.

[0068] At this time, the operation signal generating unit (130) may include a first signal generating unit (131) and a second signal generating unit (132).

[0069] The first signal generator (131) may provide a first signal to the push / pull operation valve (141) to selectively operate the push / pull drive unit (121). When the first signal is applied to the push / pull operation valve (141), the push / pull operation valve (141) is opened so that the push / pull operation of the push / pull drive unit (121) can be implemented. Specifically, the first signal may be a signal that controls the supply of push air through the push / pull operation valve (141). When the first signal is transmitted to the push / pull operation valve (141), the push / pull operation valve (141) may supply push air to the push / pull drive unit (121) through the push air supply port. When the first signal is blocked, the push / pull operation valve (141) may block the supply of push air to the push / pull drive unit (121) through the push air supply port.

[0070] The second signal generator (132) can provide a second signal to the lifting operation valve (142) to selectively operate the lifting drive unit (122). When the second signal is applied to the lifting operation valve (142), the lifting operation valve (142) is activated so that lifting and lowering operations can be implemented. Specifically, the second signal may be a signal that controls the supply of down air through the lifting operation valve (142). When the second signal is transmitted to the lifting operation valve (142), the lifting operation valve (142) can supply down air to the lifting drive unit (122) through the down air supply port. When the second signal is blocked, the lifting operation valve (142) can block the supply of down air to the lifting drive unit (122) through the down air supply port.

[0071] That is, the operation signal generating unit (130) is intended to integrally control the lifting operation and the push / pull operation by associating them when the lifting operation and the push / pull operation of the gate valve need to be selectively implemented under specific conditions to open and close the gate.

[0072] For example, the operation signal generating unit (130) can control the blade (111) so that it is not pushed by the push / pull driving unit (121) before the lifting driving unit (122) completes the lifting of the valve rod (112) during the gate valve closing process. Additionally, the operation signal generating unit (130) can control the valve rod (112) so that it is not lowered by the lifting driving unit (122) before the pulling operation on the blade (111) is completed during the gate valve opening process.

[0073] As illustrated in FIG. 3, the operation signal generating unit (130) can be implemented as a signal generator using the pressure difference between the internally formed fluid passages, i.e., physical differential pressure.

[0074] To this end, the operation signal generating unit (130) may include a main flow path (130a) and a signal flow path (130b). The signal flow path may be blocked or activated through the differential pressure between the main flow path (130a) and the signal flow path (130b), and the operation signal may be transmitted or blocked accordingly.

[0075] That is, the main flow path (130a) and the signal flow path (130b) are formed such that an area difference occurs, and the operation of the signal flow path (130b) can be controlled by controlling the flow path activation by the pressure difference with the main flow path (130a).

[0076] FIG. 4 is a schematic diagram illustrating a gate valve control system according to an embodiment of the present invention. FIG. 4 illustrates the gate valve open state, in which open air is supplied as full air and down air by an open air supply unit (1510), so that the valve rod (112) of the gate valve is in a lowered state and the blade (111) is in a pulled (pull) state. In FIG. 4 and the subsequent FIGS. 5 to 9, the thick line illustrates the air supply state through the flow path, the solid line illustrates the air exhaust state through the flow path, and the dotted line illustrates the ATM state within the flow path.

[0077] As described above, the gate valve control system (1000) may include a gate valve, a valve driving unit (1200), an operation signal generating unit (1300), an air operation valve (1400), and an air supply unit (1500).

[0078] Meanwhile, the detailed technical configuration of the gate valve, valve driving unit (1200), operation signal generating unit (1300), air operation valve (1400), and air supply unit (1500) is omitted as described above through FIGS. 1 to 3.

[0079] Below, the organic coupling structure of the gate valve control system (1000) will be described in detail.

[0080] The push / pull drive unit (1210) may be connected to the blade (111), and the lifting drive unit (1220) may be connected to the valve rod (112). The push / pull drive unit (1210) may drive the push / pull operation of the blade (111), and the lifting drive unit (1220) may drive the lifting operation (up / down operation) of the valve rod (112).

[0081] The above push / pull operation valve (1410) is connected to the push / pull drive unit (1210), and the lifting operation valve (1420) is connected to the lifting drive unit (1220). When the air supply port of the push / pull operation valve (1410) is opened, air is supplied to the push / pull drive unit (1210), so that the push / pull drive unit (1210) can perform a push / pull operation. When the air supply port of the lifting operation valve (1420) is opened, air is supplied to the lifting drive unit (1220), so that the lifting drive unit (1220) can perform a lifting and lowering operation.

[0082] The above air supply unit (1500) can be connected to an air operation valve (1400).

[0083] The above open air supply unit (1510) is connected to the push / pull operation valve (1410) and the lifting operation valve (1420), respectively, and the closed air supply unit (1520) can be connected to the push / pull operation valve (1410) and the lifting operation valve (1420), respectively.

[0084] The open air supply unit (1510) can supply open air to the push / pull operation valve (1410), and the supplied open air can be supplied to the push / pull drive unit (1210) through the pull air supply port of the push / pull operation valve (1410). Additionally, the open air supply unit (1510) can supply open air to the lift operation valve (1420). When the second signal of the second signal generator (1320) is activated, the open air supplied to the lift operation valve (1420) can be supplied to the lift drive unit (1220) through the down air supply port of the lift operation valve (1420).

[0085] The above-mentioned closed air supply unit (1520) can supply open air to the lifting operation valve (1420), and the supplied open air can be supplied to the lifting drive unit (1220) through the up air supply port of the lifting operation valve (1420). Additionally, the above-mentioned closed air supply unit (1520) can supply open air to the push / pull operation valve (1410). When the first signal of the above-mentioned first signal generator (1310) is activated, the open air supplied to the above-mentioned push / pull operation valve (1410) can be supplied to the push / pull drive unit (1210) through the push air supply port of the above-mentioned push / pull operation valve (1410).

[0086] The operation signal generating unit (1300) can be connected to the air supply unit (1500), the air operation valve (1400), and the valve driving unit (1200), respectively.

[0087] The above operation signal generating unit (1300) can selectively provide an operation signal (open air or closed air) to the air operation valve (1400) according to specific conditions.

[0088] The first signal generator (1310) and the second signal generator (1320) are each connected to the push / pull operation valve (1410) and the lift operation valve (1420), respectively, and can selectively provide operation signals. Specifically, the first signal generator (1310) is connected to the push / pull operation valve (1410) and can control the supply of push air through the push / pull operation valve (1410) through the transmission of a first signal. The second signal generator (1320) is connected to the lift operation valve (1420) and can control the supply of down air through the lift operation valve (1420) through the transmission of a second signal.

[0089] That is, to implement the closing process of the gate valve, the down air passage of the lifting drive unit (1220) and the push / pull operation valve (1410) may be connected to the first signal generator (1310), and to implement the opening process of the gate valve, the push air passage of the push / pull drive unit (1210) and the lifting operation valve (1420) may be connected to the second signal generator (1320).

[0090] Specifically, the main flow path of the first signal generator (1310) is connected to the down air flow path of the lifting drive unit (1220), and the signal flow path can be connected to the air supply unit (1500) and the push / pull operation valve (1410). Accordingly, when the lifting operation is performed by the lifting drive unit (1220), the down air is exhausted, and the signal flow path from the air supply unit (1500) to the push / pull operation valve (1410) can be blocked by the differential pressure caused by the air flowing through the main flow path of the first signal generator (1310). As the first signal for the push air supply is blocked, the blade (111) can be fundamentally blocked from performing a push operation by the push / pull drive unit (1210) when the valve rod (112) is lifted by the lifting drive unit (1220).

[0091] Similarly, the main flow path of the second signal generator (1320) is connected to the push air flow path of the push / pull drive unit (1210), and the signal flow path can be connected to the air supply unit (1500) and the lifting operation valve (1420). Accordingly, when the push air is exhausted during the pull operation by the push / pull drive unit (1210), the signal flow path from the air supply unit (1500) to the lifting operation valve (1420) can be blocked by the differential pressure caused by the air flowing through the main flow path of the second signal generator (1320). As the second signal for the down air supply is blocked, the downward movement of the valve rod (112) by the lifting drive unit (1220) during the pull operation of the blade (111) by the push / pull drive unit (1210) can be fundamentally blocked.

[0092] Meanwhile, when the gate valve is open, the blade (111) is maintained in a pulled state by a pull spring, and when it is closed, the blade (111) is maintained in a pushed state according to the air supply so that it can be closely attached to the gate.

[0093] Hereinafter, the closing and opening processes of the gate valve will be described in more detail with reference to FIGS. 4 to 9.

[0094] FIG. 4 is a usage diagram illustrating the open state of the gate valve, in which open air is supplied from the open air supply unit (1510) to the push / pull operation valve (1410) and the lifting operation valve (1420). The open air can be branched and supplied as pull air to maintain the blade (111) in a pull state through the push / pull operation valve (1410), and as down air to maintain the valve rod (112) in a lowered state through the lifting operation valve (1420), respectively. Accordingly, the blade (111) can be in a pull state by the push / pull operation valve (1410), and the valve rod (112) can be in a lowered state by the lifting operation valve (1420).

[0095] In the above gate valve open state, since the push / pull drive unit (1210) has exhausted all the push air, the second signal generator (1320), which is connected to the main flow path of the push air line through which the push air is exhausted, becomes active in the signal flow path, and accordingly, down air for lowering the valve rod (112) can be supplied through the lifting operation valve (1420).

[0096] FIG. 5 is a diagram showing the operating state schematically illustrating the first closing step for switching the gate valve to a closed state in the open state of the gate valve shown in FIG. 4.

[0097] As described above, first, the open air supply through the open air supply unit (1510) is stopped, and the closed air supply unit (1520) begins to supply closed air to the lifting operation valve (1420). Accordingly, the lifting operation valve (1420) can supply up air to the lifting drive unit (1220) to raise the valve rod (112) through the up air supply port.

[0098] As up air is supplied to the lifting drive unit (1220), the valve rod (112) begins to move upward while in a lowered state, and since down air that lowers the valve rod (112) is contained in the lifting drive unit (1220), the down air begins to be exhausted through the down air passage. That is, as the valve rod (112) rises, the first signal to the push / pull operation valve (1410) of the first signal generator (1310) can be blocked by the differential pressure of the main passage of the first signal generator (1310) connected to the down air passage.

[0099] Accordingly, since the first signal from the first signal generator (1310) is blocked by the push / pull operation valve (1410), the push air supply port for pushing the blade (111) is blocked, and push air may not be supplied to the push / pull drive unit (1210).

[0100] That is, during the process of the valve rod (112) moving up and down, down air from the lifting drive unit (1220) is delivered to the main flow path of the first signal generator (1310), and until the exhaust of the down air is completed, the first signal from the first signal generator (1310) is blocked so that the supply of push air through the push / pull operation valve (1410) can be kept off. Accordingly, the pull state of the blade (111) is maintained, and the close air can be supplied as pull air to maintain the pull state through the pull air supply port of the push / pull operation valve (1410).

[0101] FIG. 6 is a usage diagram schematically illustrating the second closing step of the gate valve control system illustrated in FIG. 4.

[0102] As described above, when the exhaust of the down air contained in the lifting drive unit (1220) is completed, the signal path of the first signal generator (1310) can generate a push air supply signal (first signal) for the push operation of the blade (111) to the push / pull operation valve (1410). When the push air supply signal from the first signal generator (1310) is transmitted to the push / pull operation valve (1410), the push / pull operation valve (1410) can supply push air to the push / pull drive unit (1210) to push the blade (111) through the push air supply port.

[0103] As described above, the push / pull operation valve (1410) is in a state where it can supply push air by means of the first signal generator (1310), and can supply push air to the push / pull drive unit (1210). As push air is supplied to the push / pull drive unit (1210), the pull air for the pull operation of the blade (111) can be exhausted through the pull air passage.

[0104] FIG. 7 is a schematic diagram of the third closing step in the gate valve control system illustrated in FIG. 4, illustrating the state in which the closing operation is completed after the full air exhaust from the push / pull drive unit (1210) is completed.

[0105] FIG. 8 is a schematic diagram of the first opening stage of the gate valve in the closed state of the gate valve control system illustrated in FIG. 7.

[0106] As described above, in order to open a valve in a closed state, the closed air supply unit (1520) can cut off the closed air supply, and the open air supply unit (1510) can supply open air.

[0107] The above open air is supplied to the push / pull operation valve (1410), and the push / pull operation valve (1410) can supply open air as pull air to the push / pull drive unit (1210) to pull the blade (111) through the pull air supply port.

[0108] When open air is supplied as full air to the push / pull drive unit (1210) by the push / pull operation valve (1410), the push air contained in the push / pull drive unit (1210) can be exhausted to the push / pull operation valve (1410) through the push air passage.

[0109] At this time, since the push air remaining in the push / pull drive unit (1210) is connected to the main flow path of the second signal generator (1320), the second signal to the lifting operation valve (1420) of the second signal generator (1320) can be blocked by the differential pressure formed in the main flow path of the second signal generator (1320).

[0110] Accordingly, since the second signal from the second signal generator (1320) is blocked by the lifting operation valve (1420), the down air supply port for the valve rod (112) to descend is blocked, and down air may not be supplied to the lifting drive unit (1220).

[0111] That is, during the process of the blade (111) being fully operated, the push air of the push / pull drive unit (1210) is transmitted to the main flow path of the second signal generator (1320), and until the exhaust of the push air is completed, the second signal of the second signal generator (1320) is blocked so that the down air supply through the lifting operation valve (1420) can be kept in an off state. Accordingly, the up state of the valve rod (112) is maintained, and the open air can be supplied as up air to maintain the up state through the up air supply port of the lifting operation valve (1420).

[0112] FIG. 9 is a schematic diagram of the operating state illustrating the second opening stage of the gate valve in the gate valve control system illustrated in FIG. 7.

[0113] As described above, when the push air of the push / pull drive unit (1210) is completely exhausted, the signal path of the second signal generator (1320) can generate a down air supply signal (second signal) for the lowering operation of the valve rod (112) to the lifting operation valve (1420). When the down air supply signal from the second signal generator (1320) is transmitted to the lifting operation valve (1420), the lifting operation valve (1420) receives open air and can supply down air to the lifting drive unit (1220) to lower the valve rod (112) through the down air supply port. As the valve rod (112) lowers, the up air of the lifting drive unit (1220) can be exhausted through the lifting operation valve (1420).

[0114] When the exhaust of the up air of the above lifting drive unit (1220) is completely finished, the gate valve opening operation is completed, and the gate valve can be maintained in the open state as shown in Fig. 4.

[0115] As described above, the gate valve can operate from an open state to a closed state through the sequential process of Fig. 4 → Fig. 5 → Fig. 6 → Fig. 7, and conversely, the gate valve can operate from a closed state to an open state through the sequential process of Fig. 7 → Fig. 8 → Fig. 9 → Fig. 4.

[0116] FIG. 10 is a flowchart schematically illustrating a first control method of a gate valve control system according to an embodiment of the present invention.

[0117] More specifically, the first control method (S1000) of the gate valve control system illustrates a control method regarding the closing operation of the gate valve.

[0118] As described above, the control method (S1000) of the gate valve control system includes a close air supply step (S1100), a lifting operation valve operation step (S1200), a lifting drive unit operation step (S1300), a down air discharge completion confirmation step (S1400), a push signal generation step (S1500), a push / pull operation valve operation step (S1600), and a push / pull drive unit operation step (S1700).

[0119] The close air supply step (S1100) is a step of supplying close air to the lifting operation valve for the closing operation of the gate valve.

[0120] The lifting operation valve operation step (S1200) is a step in which, after closing air is supplied to the lifting operation valve, the lifting operation valve is turned on and closing air is supplied to the lifting drive unit.

[0121] The lifting drive unit operation step (S1300) is a step in which the lifting drive unit raises the valve rod to close the gate valve.

[0122] The down air discharge completion confirmation step (S1400) is a step of confirming whether the discharge of down air contained in the lifting drive unit is completed.

[0123] Down air flows into the main flow path of the first signal generator, and the first signal generator can control the activation of the first signal flow path by the pressure difference between the main flow path and the signal flow path.

[0124] At this time, if the discharge of down air is not completed, the first signal generator does not generate a first signal to the push / pull drive valve (a push air supply signal for a push operation).

[0125] Accordingly, the blade is not pushed until the valve rod is fully raised by the lifting drive unit.

[0126] The push signal generation step (S1500) is a step in which, when it is confirmed through the down air discharge completion confirmation step (S1400) that the discharge of down air is completed, the first signal generator generates a first signal (a push air supply signal for a push operation).

[0127] The push / pull operation valve operation step (S1600) is a step of operating the push air supply port of the push / pull operation valve to the ON state by means of a push signal provided through the push signal generation step (S1500).

[0128] The push / pull drive unit operation step (S1700) is a step in which push air is supplied by the push / pull operation valve and the push / pull drive unit pushes the blade.

[0129] FIG. 11 is a flowchart schematically illustrating a second control method of a gate valve control system according to an embodiment of the present invention.

[0130] More specifically, the second control method (S2000) of the gate valve control system illustrates a control method for opening the gate valve.

[0131] The second control method (S2000) of the gate valve control system includes an open air supply step (S2100), a push / pull operation valve operation step (S2200), a push / pull drive unit operation step (S2300), a push air discharge completion confirmation step (S2400), a down signal generation step (S2500), a lifting operation valve operation step (S2600), and a lifting drive unit operation step (S2700).

[0132] The open air supply step (S2100) is a step of supplying open air to a push / pull operating valve for the opening operation of the gate valve.

[0133] The push / pull operation valve operation step (S2200) is a step in which, after open air is supplied to the push / pull operation valve, the push / pull operation valve becomes ON and provides open air to the push / pull drive unit.

[0134] The push / pull drive unit operation step (S2300) is a step in which the push / pull drive unit releases the push operation of the blade to open the gate.

[0135] At this time, the push / pull drive unit can pull the blade.

[0136] The push air discharge completion confirmation step (S2400) is a step of confirming whether the discharge of the push air inherent in the push / pull drive unit is completed.

[0137] Push air flows into the main path of the second signal generator, and the second signal generator can control the activation of the second signal path by the pressure difference between the main path and the signal path.

[0138] At this time, if the discharge of the push air is not completed, the second signal generator does not generate a second signal for the valve rod lowering operation (air supply signal for the down operation).

[0139] Accordingly, the valve rod is not lowered until the blade pull process is completed by the push / pull drive unit.

[0140] The down signal generation step (S2500) is a step in which, when it is confirmed through the push air discharge completion confirmation step (S2400) that the discharge of push air is completed, the second signal generator generates a second signal (down air supply signal for down operation).

[0141] The lifting operation valve operation step (S2600) is a step of operating the down air supply port of the lifting operation valve to the ON state by means of a down air supply signal provided through the down signal generation step (S2500).

[0142] The lifting drive unit operation step (S2700) is a step in which open air is supplied by the lifting operation valve and the lifting drive unit lowers the valve rod.

[0143]

[0144] The foregoing merely describes some preferred embodiments that can be implemented by the present invention. As is well known, the scope of the present invention should not be interpreted as being limited to the above embodiments, and all technical concepts that share the fundamental principles with the technical concept of the present invention described above shall be considered to be included within the scope of the present invention.

Claims

1. A gate valve (110) comprising a blade (111) for opening and closing the gate of a substrate processing device and a valve rod (112) coupled to the blade (111); A valve driving unit (120) that moves the blade (111) horizontally and moves the valve rod (112) up and down; An operation signal generating unit (130) that provides an operation signal for selectively operating the above valve driving unit (120); An air operating valve (140) that selectively supplies air to the above valve driving unit (120); and The air supply unit (150) includes an open air supply unit (151) and a closed air supply unit (152) for opening and closing operation of the gate valve (110). A gate valve control system characterized in that the above-mentioned operation signal generating unit (130) includes a main flow path (130a) and a signal flow path (130b), and provides the operation signal to the air operation valve through the differential pressure between the main flow path (130a) and the signal flow path (130b).

2. In Paragraph 1, The above valve driving unit (120) includes a push / pull driving unit (121) and a lifting driving unit (122), and The above push / pull drive unit (121) operates a push or pull operation with respect to the blade (111), and A gate valve control system characterized in that the lifting drive unit (122) operates the lifting or lowering motion with respect to the valve rod (112).

3. In Paragraph 2, The above air operating valve (140) A push / pull operating valve (141) that selectively supplies the air to the push / pull driving unit (121), and A gate valve control system characterized by including a lifting operation valve (142) that selectively supplies air to the lifting drive unit (122).

4. In Paragraph 3, The above operation signal generating unit (130) includes a first signal generating unit (131) and a second signal generating unit (132), and The first signal generator (131) provides a first signal to the push / pull operation valve (141) for selectively operating the push / pull drive unit (121), and A gate valve control system characterized in that the second signal generator (132) provides a second signal to the lifting operation valve (142) for selectively operating the lifting drive unit (122).

5. A gate valve comprising a blade (111) for opening and closing the gate of a substrate processing device and a valve rod (112) coupled to the blade (111); A valve driving unit (1200) comprising a push / pull driving unit (1210) connected to the blade (111) and a lifting driving unit (1220) connected to the valve rod (112); An air operating valve (1400) comprising a push / pull operating valve (1410) connected to the push / pull driving unit (1210) and a lifting operating valve (1420) connected to the lifting driving unit (1220); An operation signal generating unit (1300) comprising a first signal generating unit (1310) connected to the push / pull operation valve (1410) and the lifting drive unit (1220), and a second signal generating unit (1320) connected to the push / pull drive unit (1210) and the lifting operation valve (1420); and A gate valve control system characterized by including an air supply unit (1500) comprising a closed air supply unit (1520) connected to the lifting operation valve (1420) and supplying closed air to the lifting operation valve (1420), and an open air supply unit (1510) connected to the push / pull operation valve (1410) and supplying open air to the push / pull operation valve (1410).

6. In Paragraph 5, A gate valve control system characterized in that when closed air is supplied to the lifting operation valve (1420), the lifting operation valve (1420) supplies air to the lifting drive unit (1220) to raise the valve rod (112) which is a closed operation, and the down air contained in the lifting drive unit (1220) is exhausted into the main flow path of the first signal generator and the valve rod (112) is raised.

7. In Paragraph 6, A gate valve control system characterized in that when the exhaust of the down air is completed, the signal path of the first signal generator (1310) supplies close air to the push / pull operation valve (1410), the push / pull operation valve (1410) becomes ON, and push air is supplied to the push / pull drive unit (1210) so that the blade (111) is pushed.

8. In Paragraph 5, When open air is supplied to the push / pull operation valve (1410), A gate valve control system characterized in that the above push / pull operation valve (1410) supplies open air to the above push / pull drive unit (1210), the push air contained in the above push / pull drive unit (1210) is exhausted into the main flow path of the above second signal generator (1320), and the blade (111) is released from the push state.

9. In Paragraph 8, A gate valve control system characterized in that when the exhaust of the push air is completed, the signal path of the second signal generator (1320) supplies open air to the lifting operation valve (1420), the lifting operation valve (1420) becomes ON, and open air is supplied to the lifting drive unit (1220) so that the valve rod is lowered.

10. Supplying closing air to the lifting operation valve for the closing operation of the gate valve Close air supply step (S1100); After the above-mentioned close air is supplied to the above-mentioned lifting operation valve, the above-mentioned lifting operation valve becomes ON, and the above-mentioned lifting operation valve provides the above-mentioned close air to the lifting drive unit, a lifting operation valve operation step (S1200); The above lifting drive unit is a lifting drive unit operation step (S1300) that raises the valve rod, Down air discharge completion confirmation step (S1400) confirming whether the discharge of down air contained in the above lifting drive unit is completed If it is confirmed that the discharge of the down air is completed through the down air discharge completion confirmation step (S1400) above, the first signal generator generates a push signal generation step (S1500) that generates a push signal. A push / pull operation valve operation step (S1600) that operates the push / pull operation valve to the ON state by means of a push signal provided through the push signal generation step (S1500); and A gate valve control method characterized by including a push / pull drive unit operation step (S1700) in which closed air is supplied by the above-mentioned push / pull operation valve and the push / pull drive unit pushes the blade.

11. In Paragraph 10, A gate valve control method characterized in that the down air flows into the main flow path of the first signal generator, and the first signal generator controls the flow path activation by the pressure difference between the main flow path and the signal flow path.

12. Open air supply step (S2100) for supplying open air to a push / pull operating valve; After the open air is supplied to the push / pull operation valve, the push / pull operation valve is turned on, and the push / pull operation valve operation step (S2200) provides the open air to the push / pull drive unit; The above push / pull drive unit releases the push operation of the blade (S2300); A push air discharge completion confirmation step (S2400) for confirming whether the discharge of push air contained in the above push / pull drive unit is completed; If it is confirmed that the discharge of the push air is completed through the above push air discharge completion confirmation step (S2400), the second signal generator generates a down signal generation step (S2500) that generates a down signal. A lifting operation valve operation step (S2600) that operates the lifting operation valve to the ON state by the down signal provided through the down signal generation step (S2500), A gate valve control method characterized by including a lifting drive unit operation step (S2700) in which the open air is supplied by the lifting operation valve and the lifting drive unit lowers the valve rod.

13. In Claim 12, A gate valve control method characterized in that the above-mentioned push air flows into the main flow path of a second signal generator, and the second signal generator controls the activation of the flow path by the pressure difference between the main flow path and the signal flow path.

Images