Control of conversion efficiency in an EUV source
By controlling droplet shape through pre-pulses and deformation lasers, the system addresses EUV power variability and enhances efficiency in EUV light sources.
WO2026139173A1 Publication Date: 2026-07-02ASML NETHERLANDS BV
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Patent Information
- Application Number
- PCT/EP2025/083925
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-27
- Filing Date
- 2025-11-21
- Publication Date
- 2026-07-02
AI Technical Summary
Technical Problem
Existing EUV light sources face challenges in maintaining consistent and efficient EUV power output due to the deformation of droplets caused by next-droplet interaction (NDI) during plasma generation, leading to reduced power and variability in EUV power generation.
Method used
A system that controls the shape of droplets by using pre-pulses and deformation lasers to align the droplet shape with a predetermined target distribution, ensuring optimal conditions for EUV power generation.
Benefits of technology
Enhances EUV power generation efficiency and consistency by aligning droplet shape with optimal conditions for conversion, thereby improving conversion efficiency (CE) and reducing variability.
✦ Generated by Eureka AI based on patent content.
Abstract
Disclosed is an apparatus for and method of controlling the conversion efficiency of an extreme ultraviolet (EUV) radiation source by timing irradiation laser pulses such that they strike droplets of the target material while the droplet of target material has a specified shape and / or orientation with respect to the pulses.
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