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A plastic film thickness measurement system and method based on transmission spectrum

ActiveCN116481444BThickness measurement implementationavoid manual selectionAngle of incidenceOptical measurements
This invention discloses a plastic film thickness measurement system and method based on transmission spectroscopy, belonging to the field of thin film optics and optical measurement. The thickness measurement system includes a light source, an incident converging lens, a film sample, a receiving converging lens, a miniature spectrometer, and a data processing unit. The light source and the incident converging lens are connected via optical fiber. The principal optical axes of the incident and receiving converging lenses are aligned. The focal points of the incident and receiving converging lenses are adjusted to infinity. The film sample is placed between the incident and receiving converging lenses. The angle between the normal of the film sample and the principal optical axes of the incident and receiving lenses is the angle of incidence. The receiving converging lens is connected to the miniature spectrometer via optical fiber, and the miniature spectrometer is connected to the data processing unit via a USB data cable. This invention, based on the existing full-spectrum fitting method, combines the measurement of the refractive index of the film using the transmittance envelope, realizing the thickness measurement of films with unknown refractive indices.
Owner:SOUTHEAST UNIV