121results about How to "High temperature controllability" patented technology

A shower head structure (26) includes a shower head main body (78) of a one-piece structure formed in a generally cup shape and having a bottom wall (78A) provided with a plurality of gas injection holes (30A, 30B) formed therein and a side wall (78B) rising from a peripheral portion of the bottom wall. A plurality of gas diffusion chamber forming plates (82A-82C) are housed in the shower head main body (78). A through-hole is formed in a head mounting frame (76) disposed on a ceiling of a processing vessel (24). An upper portion of the side wall (78B) of the shower head main body (78) is inserted into the through-hole, so that a part of the side wall (78B) is exposed to the exterior of the processing vessel. A cooling mechanism (84) is disposed at the upper end portion of the side wall (78B). Heat transfer between the cooling mechanism (84) and the bottom wall (78A) is enhanced, so that the temperature of the bottom wall (78A) can be controlled at a proper value, thereby preventing any adhesion of an unnecessary film onto the bottom wall (78A).

A group-III nitride crystal growth method, comprising the steps of: a) preparing a mixed molten liquid of an alkaline metal and a material at least comprising a group-III metal; b) growing a group-III nitride crystal of the group-III metal and nitrogen from the mixed molten liquid and a material at least comprising nitrogen; and c) setting a predetermined crystal growth condition according to a zone defined by a pressure and a temperature in said step b).

A substrate mounting table for mounting a substrate in a substrate processing apparatus includes a mounting table main body, an annular peripheral protrusion portion which is formed such that when the substrate is loaded on a reference surface at a substrate mounting side of the mounting table main body, it is in contact with a peripheral portion of the substrate and a sealed space filled with a heat transfer gas is formed below the substrate, a plurality of first protrusions which are formed on the reference surface inward from the annular peripheral protrusion portion such that they are in contact with the substrate when the substrate is loaded on the substrate mounting table, and a number of second protrusions which are provided independently of the first protrusions on the reference surface inward from the annular peripheral protrusion portion such that they are close to the substrate without contacting it when the substrate is loaded on the substrate mounting table.

The invention discloses a fast-heating type water heating device. The invention relates to a water heating device, in particular to the fast-heating type water heating device which performs heating by using a stainless steel substrate electric heating film and is applied to an instant electric kettle. The fast-heating type water heating device mainly comprises an electric heating film heating plate, a water channel plate, a heating body rear plate, a temperature controller, a thermo-sensitive resistor, a water inlet, a water outlet and a control circuit, wherein the electric heating film heating plate (1) and the heating body rear plate (3) clamp the water channel plate (2) and are connected into a whole by a connecting piece or in a welding sealing mode; a grating (14) is arranged on thewater channel plate (2); a water channel cavity (9) capable of making water flow is formed between the grating (14) on the water channel plate (2) and the electric heating film heating plate (1); theshape of the cavity guides a flowing direction of the water; and the water inlet and the water outlet are positioned at upper and lower ends of the water channel plate and led out from the water channel plate by the heating body rear plate. The fast-heating type water heating device is characterized in that: the electric heating film heating plate (1) is curved and in clearance fit with the waterchannel plate (2), so a local clearance is formed at a joint between the electric heating film heating plate (1) and the grating (14) which is arranged on the water channel plate (2). The invention has the advantages that: compared with the prior art, the fast-heating type water heating device is higher in heat efficiency, better in temperature controllability and lowest in flowing resistance of a heating body; and a water outlet temperature can be controlled to be above 95 DEG C during fast heating.

A heat medium heating device including flat heat exchange tubes and PTC heaters stacked in a plurality of layers, the heat medium heating device being capable of correctly and accurately detecting the temperature of a circulating heat medium; and a vehicular air-conditioning device including the same. In a heat medium heating device, flat heat exchange tubes each including an inlet header part and an outlet header part and PTC heaters are stacked in a plurality of layers, and are incorporated in a casing including a heat medium inlet path and a heat medium outlet path communicated with the inlet and outlet header parts. In the heat medium heating device thus configured, an inlet temperature sensor and an outlet temperature sensor that detect the temperature of a heat medium are provided around the inlet and outlet header parts of the lowermost flat heat exchange tube in the stacked structure.

A large semiconductor crystal has a diameter of at least 6 inches and a low dislocation density of not more than 1×10⁴ cm⁻². The crystal is preferably a single crystal of GaAs, or one of CdTe, InAs, GaSb, Si or Ge, and may have a positive boron concentration of not more than 1×10¹⁶ cm⁻³ and a carbon concentration of 0.5×10¹⁵ cm⁻³ to 1.5×10¹⁵ cm⁻³ with a uniform concentration throughout the crystal. Such a crystal can form a very thin wafer with a low dislocation density. A special method and apparatus for producing such a crystal is also disclosed.

The invention provides a plasma processing device and an electrostatic chuck thereof and a manufacturing method of the electrostatic chuck. The electrostatic chuck comprises a metal pedestal. Heating devices are arranged on the metal pedestal. Heat-conducting plates are arranged on the heating devices. Ceramic insulating layers are arranged on the heat-conducting plates. Height of the heating devices to a substrate and height of the heat-conducting plates to the substrate are different, and heat-conducting adhesive layers with controllable thickness are arranged between the ceramic insulating layers and the heat-conducting plates so that uniform surface temperature of the ceramic insulating layers or multi-parameter adjustment with specific temperature gradient can be realized. Power supply power of the heating devices can be adjusted, and adjustment of surface temperature of the ceramic insulating layers can be also realized by adjusting height difference of the heating devices of different heating areas, thickness of the heat-conducting plates of different heat areas and thickness of the heat-conducting adhesive layers between the ceramic insulating layers and the heat-conducting plates so that temperature controllability of the electrostatic chuck can be greatly increased, and rapid adjustment of temperature uniformity or specific gradient of different areas of the electrostatic chuck is facilitated.

The invention discloses a method for comprehensive utilization of paigeite through direct reduction-electric furnace melting separation of a rotary hearth furnace, belonging to the field of iron-making and resource comprehensive utilization. The invention relates to a method for separating and gathering boron and iron in paigeite, and the method is used for development and utilization of paigeite. The method is characterized in that liquid pig iron (or semisteel) and high-quality boron-rich slag of which the B2O3 content is 10-22% are prepared by using paigeite powder, a carbonaceous reducing agent and a binding agent as raw materials through the processes of blending, uniform mixing, agglomeration, rotary hearth furnace reduction, electric furnace melting separation and the like. The produced liquid pig iron (or semisteel) can be used as a raw material for steel making, and the boron-rich slag can replace camsellite ores to produce boric acid or borax, so that boron and iron resources can be fully used to realize comprehensive utilization of paigeite. The method disclosed by the invention is simple in process, short in flow, thorough in boron-ion separation and high in efficiency and the separated products can meet requirements for boron industry and steel industry at the same time and have good social and economic benefits.

The invention discloses a power battery, a temperature control method of the power battery and a new energy vehicle to solve the problem of poor temperature control of existing power batteries. The power battery comprises a casing, cells, flexible heat-conducting strips and finger plate tools, wherein gaps I between the cells and gaps II between the cells and the inner wall of the battery casing are filled with flexible heat-conducting strips arranged in pairs, and the finger plate tools are inserted in gaps between the flexible heat-conducting strips to be in surface contact with the flexibleheat-conducting strips; each flexible heat-conducting strip comprises a flexible heat-conducting material, a copper tube, an electric heating wire and a temperature sensor, and two ends of each flexible heat-conducting strip extend to the outer side of the battery casing and are connected with a heat-conducting solution circulating system and an electric control system. The power battery adoptingthe structure has an excellent temperature control effect and can have multiple effects of thermal insulation, heating and cooling of the cells, so that the cells are always within the best working temperature range, and the temperature difference between the cells in a battery pack can be controlled within +/-3 DEG C.

The invention provides a control method of an ice making system of a refrigerator and the refrigerator. The control method comprises the steps as follows: the temperature of an ice making compartmentis acquired; the temperature of the ice making compartment is matched with preset starting conditions of the ice making system, and corresponding parts are determined and started according to matchingresults. Correspondingly, the refrigerator comprises the ice making compartment, the ice making system and a controller; and the controller is set to judge the matching results of the temperature ofthe compartment and the preset starting conditions of the parts of the ice making system and control starting of the corresponding parts. According to the control method of the ice making system of the refrigerator, starting parameters of the parts of the system are temperatures, the temperatures are high in controllability and high in control accuracy, and when the starting conditions are met, the corresponding parts of the ice making system are started. By the aid of the control method, the condition that the ice making system can be started under any conditions including the relatively hightemperature is avoided, if the ice making system can be started under any conditions including the relatively high temperature, the service life of the ice making system is shortened, and energy is wasted.

Using a rapid thermal processing system provided with a substrate carrier supporting a substrate and having oxidation resistance, rapid thermal processing is carried out on the substrate.

A semiconductor substrate supporting apparatus for supporting a single semiconductor substrate in a plasma CVD apparatus comprises a placing block having a substrate placing area on which the substrate is placed. The substrate placing area is anodized and has as an outermost film an anodic oxide film having a thickness of about 30 μm to about 60 μm and/or a dielectric breakdown voltage of about 300 V or higher.

A control method for an electronically controlled thermostat includes that an actuator is used for cooling-water control of an internal combustion engine and the actuator is capable of optionally varying the valve-opening ratio. An engine control unit computes a target temperature by means of various engine parameters and distributes the power distribution amount required to operate the actuator so that the cooling water temperature reaches the target temperature. The power distribution amount distributed to the actuator is determined by monitoring only the actual water temperature of the cooling water.

The invention provides a method for preparing an organic-inorganic hybrid perovskite single crystal based on a two-phase process. The method comprises the following steps: by taking a halide solutioncontaining a first reactant as a lower solution layer and taking an organic matter solution containing a second reactant as an upper solution layer, reacting the first reactant and the second reactantto produce the organic-inorganic hybrid perovskite single crystal wafer at an interface contact of the lower solution layer and the upper solution layer, wherein the density of the lower solution layer is smaller than that of the upper solution layer. The crystal structure having high degree of crystallinity and consistent crystal phase can be obtained, preparation of the crystal wafer of any shape and area can be realized, crystal destruction brought by later physical machining is avoided, and the structural integrity and consistency in crystal growth are ensured. The single crystal is grownby controlling the reaction temperature and concentration. A communicating vessel is increased, the single crystal wafer having the thickness of less than 50 microns can be directly grown, the operation is simple and convenient, the needed equipment is simple, low in cost and common in raw materials, and study in the aspect of improving the efficiency of a perovskite single crystal cell is facilitated.

This is a kind of miniflow control chip integral device of highly efficient constant temperature system. It includes a temperature thermostat and a micro 3D controller. The 3D controller is fixed on one side of the bed flatform, and the temperature thermostat is made up of two micro metal incubators, one on the top and the other on the bottom. In the incubators there are circulate conduits for the temperature-controlling working substance, and between the incubators the miniflow control chips are set on the flatform. Also there are the sustainer and the spiral controlling nuts between the incubators to make the height between two incubators almost the same as the thickness of the chip. This invention is miniflow control chip integral device of the integrated temperature thermostat, and using it can make the experiment run in the temperature set before and cancel the perturbance of the temperature in and outside the system. As a resut, we can greatly improve the replaying ability of the experiment and widen the use and researching area of the electrophoretic chip.

The invention discloses a device for controlling DPF(diesel particulate filter)carbon-loaded capture and passive regeneration and a control method. The device comprises a NOx sensor, a DPF parallel assembly and a temperature sensor, wherein the NOx sensor is located on an upstream pipeline of the DPF parallel assembly, and the temperature sensor is located on a downstream pipeline of the DPF parallel assembly. The DPF parallel assembly comprises at least two sets of DPF pipelines arranged in parallel, each DPF pipeline comprises a DPF carrier, an air flow meter, a one-way valve, a differential pressure sensor and a resistance wire, and the resistance wire is located at the front end of each DPF carrier. By comparing each real-time measured numerical value with a threshold value set by the system, the one-way valves are controlled to switch waste gas to flow between the DPF carriers, and the resistance wires are controlled to start/stop heating. According to the carbon loading amount of each DPF, the flowing of waste gas among different DPFs is switched through the one-way valves, the DPFs are actively regenerated through the resistance wires, and the device has the advantages that the temperature controllability is high, the temperature rise is fast, and the over-temperature phenomenon is few.

The invention belongs to the field of industrial processes, energy and environmental protection, and particularly relates to a multi-energy gradient utilization heat pump low-temperature evaporation and concentration system capable of accurately controlling temperature. The multi-energy gradient utilization heat pump low-temperature evaporation and concentration system capable of accurately controlling the temperature comprises a heating tank, a steam cooling and condensing system, a heat pump circulating system, a vacuumizing and re-condensing system, a water circulating temperature adjusting system, a heat dissipation system and a material preheating system. According to the system, efficient heat exchange on the refrigerant side can be achieved, the pressure environment of the material heating coil is improved, the adverse problems caused by heating materials through a high-temperature refrigerant are effectively solved, the material treatment quality is improved, meanwhile, the superheat degree of secondary steam can be reduced, and the heat exchange environment on the evaporator side during initial starting is improved. The system can accurately control the boiling evaporation temperature of the materials and efficiently utilize the materials in a gradient manner according to energy grades, so that the purposes of saving energy and reducing carbon are achieved, and the system is very significant.

In order to be able to introduce fluid components extraneous to the system into a modular microfluidic system comprising modules arranged alongside one another which can be connected to one another with fluid connection by connecting parts comprising connecting channels with short connecting paths and good temperature controllability, a module with the following features is provided: the module has a plate-shaped microfluidic part which comprises a fluid channel system and on whose top side, in edge regions to the potentially adjacent modules of the microfluidic system has fluid connections, the fluidic connection to adjacent modules being establishable by means of the connecting parts adjacent in edge regions on the upper side, below the microfluidic part is arranged an insulation vessel which can be filled and flowed through by a temperature control fluid and is concluded at the to by the microfluidic part which serves as a lid.

This invention provides one hydrolysis method to synthesize lithium alkyl, which comprises the following steps: containing the lithium powder filtered by lithium alkyl into its buffer tar; then pressing the lithium powder into hydrolysis tar through lithium powder metering pump to react with large amount of water under temperature of sixty degrees to control lithium powder quantative through hydrolysis temperature; the reaction temperature can be taken away by cooling water and thehydrocarbon solvent sent out are recycled by air condensation device. The method can prevent super heat without large range wave to realize the industry automatic control.

The invention discloses a method for preparing crisp fruit and vegetable chips and belongs to the technical field of preparation of crisp fruit and vegetable chips. According to the method, fruits and vegetables are cleaned and sliced and mixed and soaked with sodium bicarbonate solution, the fruits and vegetables are taken out of a food steamer and led into superheated steam, the fruits and vegetables are mixed with mixed liquid and stand, the aired fruit and vegetable chips are obtained after ultrasonic oscillation, filtration, drying, freezing, unfreezing and natural airing, the fruit and vegetable chips are subjected to heat preservation and puffing, and the crisp fruit and vegetable chips are obtained through drying. The method for preparing the crisp fruit and vegetable chips has the advantages that preparation steps are simple, the temperature controllability in the preparation process is good, and there is no charring phenomenon; the obtained crisp fruit and vegetable chips are good in puffing degree and are puffed evenly, the puffing rate is improved by 40-66% compared with when other methods are adopted, and the crisp fruit and vegetable chips are crisp in taste and have good color and flavor.

The invention discloses a cooling and heating device for an injection mold, which comprises a compressor (1), a heat exchanger (2), a throttling element (3), four reversing valves and connecting pipelines (4). The mold (5) is provided with a cooling and heating circuit (6), and the cooling and heating circuit (6) is provided with two inlets and outlets. Reversing valve II, reversing valve I and the other two connection ends of reversing valve II are respectively connected to one end of the heat exchanger and the first inlet and outlet, and the other end of the heat exchanger is connected to reversing valve III and reversing valve IV , a throttling element is connected in series between the reversing valve and the reversing valve IV, and the reversing valve III and the reversing valve IV are also connected with the second inlet and outlet. Adopting the present invention can make the mold cool evenly without generating dirt in the cooling channel, and the cooling part and the heating part of the device are integrated, so that the cooling and heating of the mold can be realized in a set of devices.

A method for synthesizing a zirconium-iron pink pigment through an LCS process comprises the following steps: 1, mixing a silicon source with a zirconium source according to a Si:Zr mole ratio of 0.9-1:0.9-1.1 to form a solution or suspension, respectively adding an iron compound accounting for 5-15% of the total mass of the dry material of the mixture, an organic incendiary agent accounting for 5-50% of the total mass of the dry material of the mixture, a nitro oxidant accounting for 5-50% of the total mass of the dry material of the mixture and a mineralizer accounting for 3-9% of the total mass of the dry material of the mixture, fully and uniformly mixing, and drying; 2, placing the finally obtained dried material in a chamber of a furnace, heating to 200-500DEG C, and igniting in order to obtain a pre-burned material after complete burning; and 3, carrying out heat treatment on the pre-burned material at 800-1300DEG C to obtain zirconium-iron pink pigment powder. The zirconium-iron pink pigment nanopowder with small particle and high low-temperature controllability synthesized through the LCS process has good coloring capability and color generation capability, and can be applied to ceramic inkjet printing.